JP5025561B2 - 光ファイバーセンサー及び製法 - Google Patents
光ファイバーセンサー及び製法 Download PDFInfo
- Publication number
- JP5025561B2 JP5025561B2 JP2008129851A JP2008129851A JP5025561B2 JP 5025561 B2 JP5025561 B2 JP 5025561B2 JP 2008129851 A JP2008129851 A JP 2008129851A JP 2008129851 A JP2008129851 A JP 2008129851A JP 5025561 B2 JP5025561 B2 JP 5025561B2
- Authority
- JP
- Japan
- Prior art keywords
- ceramic material
- fiber
- optical
- cladding
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013307 optical fiber Substances 0.000 title claims description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000835 fiber Substances 0.000 claims description 99
- 229910010293 ceramic material Inorganic materials 0.000 claims description 88
- 230000003287 optical effect Effects 0.000 claims description 71
- 239000011148 porous material Substances 0.000 claims description 58
- 239000003795 chemical substances by application Substances 0.000 claims description 57
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 40
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 31
- 238000000034 method Methods 0.000 claims description 28
- 239000000203 mixture Substances 0.000 claims description 20
- 238000005253 cladding Methods 0.000 claims description 19
- 239000000377 silicon dioxide Substances 0.000 claims description 19
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 17
- 238000000576 coating method Methods 0.000 claims description 17
- 229910052763 palladium Inorganic materials 0.000 claims description 15
- 239000012798 spherical particle Substances 0.000 claims description 15
- 238000007598 dipping method Methods 0.000 claims description 14
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 12
- 150000003624 transition metals Chemical class 0.000 claims description 12
- 229920000642 polymer Polymers 0.000 claims description 11
- 229910052723 transition metal Inorganic materials 0.000 claims description 9
- 229910044991 metal oxide Inorganic materials 0.000 claims description 7
- 150000004706 metal oxides Chemical class 0.000 claims description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 5
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 claims description 4
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 claims description 4
- 229920000620 organic polymer Polymers 0.000 claims description 4
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 claims description 4
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 4
- 229910001930 tungsten oxide Inorganic materials 0.000 claims description 4
- 229910001935 vanadium oxide Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical group [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 2
- 229910052703 rhodium Inorganic materials 0.000 claims description 2
- 239000010948 rhodium Substances 0.000 claims description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052707 ruthenium Inorganic materials 0.000 claims description 2
- 229910000314 transition metal oxide Inorganic materials 0.000 claims 3
- 230000004044 response Effects 0.000 description 27
- 239000007789 gas Substances 0.000 description 22
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 18
- 239000000463 material Substances 0.000 description 16
- 239000000243 solution Substances 0.000 description 13
- XQMTUIZTZJXUFM-UHFFFAOYSA-N tetraethoxy silicate Chemical compound CCOO[Si](OOCC)(OOCC)OOCC XQMTUIZTZJXUFM-UHFFFAOYSA-N 0.000 description 13
- 238000010438 heat treatment Methods 0.000 description 12
- 229910002091 carbon monoxide Inorganic materials 0.000 description 10
- 239000002245 particle Substances 0.000 description 10
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 9
- 239000000126 substance Substances 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 5
- 239000011162 core material Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 238000005507 spraying Methods 0.000 description 5
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 238000005524 ceramic coating Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 229910021529 ammonia Inorganic materials 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 238000003618 dip coating Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- YMOZVEUPTBUUNN-UHFFFAOYSA-N [Sn](=O)=O.[Pt] Chemical compound [Sn](=O)=O.[Pt] YMOZVEUPTBUUNN-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910001922 gold oxide Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000004816 latex Substances 0.000 description 1
- 229920000126 latex Polymers 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004005 microsphere Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910003445 palladium oxide Inorganic materials 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000011540 sensing material Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
- C03C25/10—Coating
- C03C25/104—Coating to obtain optical fibres
- C03C25/106—Single coatings
- C03C25/1061—Inorganic coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
- C03C25/10—Coating
- C03C25/12—General methods of coating; Devices therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/0208—Refractive index modulation gratings, e.g. Bragg gratings characterised by their structure, wavelength response
- G02B6/021—Refractive index modulation gratings, e.g. Bragg gratings characterised by their structure, wavelength response characterised by the core or cladding or coating, e.g. materials, radial refractive index profiles, cladding shape
- G02B6/02104—Refractive index modulation gratings, e.g. Bragg gratings characterised by their structure, wavelength response characterised by the core or cladding or coating, e.g. materials, radial refractive index profiles, cladding shape characterised by the coating external to the cladding, e.g. coating influences grating properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
- G01N2021/7706—Reagent provision
- G01N2021/7726—Porous glass
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- General Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Optics & Photonics (AREA)
- Inorganic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/780,701 | 2007-07-20 | ||
| US11/780,701 US7720321B2 (en) | 2007-07-20 | 2007-07-20 | Fiber optic sensor and method for making |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009025289A JP2009025289A (ja) | 2009-02-05 |
| JP2009025289A5 JP2009025289A5 (enExample) | 2011-03-10 |
| JP5025561B2 true JP5025561B2 (ja) | 2012-09-12 |
Family
ID=39942788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008129851A Expired - Fee Related JP5025561B2 (ja) | 2007-07-20 | 2008-05-16 | 光ファイバーセンサー及び製法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7720321B2 (enExample) |
| EP (1) | EP2017659B1 (enExample) |
| JP (1) | JP5025561B2 (enExample) |
| CN (1) | CN101349649B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8019190B2 (en) | 2009-03-30 | 2011-09-13 | General Electric Company | Optical sensors, systems, and methods of making |
| US8135247B2 (en) * | 2009-03-30 | 2012-03-13 | General Electric Company | Packaged sensors and harsh environment systems with packaged sensors |
| CA2819144C (en) * | 2010-12-01 | 2019-06-04 | 1366 Technologies Inc. | Making semiconductor bodies from molten material using a free-standing interposer sheet |
| US20190025492A1 (en) * | 2016-01-29 | 2019-01-24 | Corning Incorporated | Optical fiber apparatus with high divergence angle and light source system using same |
| JP6915859B2 (ja) * | 2017-08-08 | 2021-08-04 | 学校法人 創価大学 | 光ファイバ水素センサ及びその製造方法 |
| CN108645827B (zh) * | 2018-05-11 | 2021-06-22 | 武汉理工大学 | 基于简化微结构光纤的超灵敏no传感器 |
| GB2615737A (en) * | 2021-12-23 | 2023-08-23 | Oxsensis Ltd | Optical sensor |
| JP7081864B1 (ja) * | 2021-12-24 | 2022-06-07 | 株式会社ヒキフネ | 被膜ファイバ、センサ装置、モニタリング装置及び被膜ファイバの製造方法 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5280172A (en) * | 1991-11-12 | 1994-01-18 | Gaz De France | Fiber optic sensor for measuring gas |
| US5496997A (en) * | 1994-01-03 | 1996-03-05 | Pope; Edward J. A. | Sensor incorporating an optical fiber and a solid porous inorganic microsphere |
| US5457313A (en) * | 1994-02-01 | 1995-10-10 | The United States Of America As Represented By The United States Department Of Energy. | Fiber optic detector and method for using same for detecting chemical species |
| US5567622A (en) * | 1995-07-05 | 1996-10-22 | The Aerospace Corporation | Sensor for detection of nitrogen dioxide and nitrogen tetroxide |
| US5656241A (en) * | 1995-09-07 | 1997-08-12 | Optical Sensors Incorporated | Method for manufacturing fiber optic sensors |
| US5864641A (en) * | 1997-04-11 | 1999-01-26 | F&S, Inc. | Optical fiber long period sensor having a reactive coating |
| US6535658B1 (en) * | 2000-08-15 | 2003-03-18 | Optech Ventures, Llc | Hydrogen sensor apparatus and method of fabrication |
| US6445861B1 (en) * | 2000-08-18 | 2002-09-03 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Sol-gel processing to form doped sol-gel monoliths inside hollow core optical fiber and sol-gel core fiber devices made thereby |
| FR2813393B1 (fr) * | 2000-08-22 | 2002-10-18 | Commissariat Energie Atomique | Fabrication d'un capteur chimique a fibre optique comprenant un indicateur colore, utilisable notamment pour la mesure de l'acidite nitrique |
| US6819811B1 (en) * | 2000-11-09 | 2004-11-16 | Quantum Group Inc. | Nano-size gas sensor systems |
| US7058243B2 (en) * | 2002-01-17 | 2006-06-06 | Mississippi State University | Optical fiber sensor having a sol-gel fiber core and a method of making |
| JP2004309354A (ja) * | 2003-04-08 | 2004-11-04 | Nippon Steel Corp | 光学式物質センサーおよびモニタリング方法 |
| US7037554B2 (en) * | 2003-06-30 | 2006-05-02 | Mississippi State University | Moisture sensor based on evanescent wave light scattering by porous sol-gel silica coating |
| US20060008677A1 (en) * | 2004-07-12 | 2006-01-12 | General Electric Company | Ceramic bonding composition, method of making, and article of manufacture incorporating the same |
| US7421162B2 (en) * | 2005-03-22 | 2008-09-02 | General Electric Company | Fiber optic sensing device and method of making and operating the same |
| US20060222762A1 (en) * | 2005-03-29 | 2006-10-05 | Mcevoy Kevin P | Inorganic waveguides and methods of making same |
| US7228017B2 (en) * | 2005-09-30 | 2007-06-05 | General Electric Company | Fiber optic sensing device and method of making and operating the same |
| US7151872B1 (en) * | 2005-11-22 | 2006-12-19 | General Electric Company | Method, system and module for monitoring a power generating system |
| CN101109664A (zh) * | 2007-08-21 | 2008-01-23 | 李亚滨 | 光纤温/湿度传感器及其制造方法和计量装置 |
-
2007
- 2007-07-20 US US11/780,701 patent/US7720321B2/en not_active Expired - Fee Related
-
2008
- 2008-05-13 EP EP08156110.2A patent/EP2017659B1/en not_active Ceased
- 2008-05-16 JP JP2008129851A patent/JP5025561B2/ja not_active Expired - Fee Related
- 2008-05-20 CN CN2008101005134A patent/CN101349649B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US20090022449A1 (en) | 2009-01-22 |
| JP2009025289A (ja) | 2009-02-05 |
| EP2017659B1 (en) | 2016-03-30 |
| CN101349649B (zh) | 2013-05-29 |
| CN101349649A (zh) | 2009-01-21 |
| US7720321B2 (en) | 2010-05-18 |
| EP2017659A1 (en) | 2009-01-21 |
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