JP5016960B2 - 静電噴霧装置及び主剤からなる試料の作製方法 - Google Patents
静電噴霧装置及び主剤からなる試料の作製方法 Download PDFInfo
- Publication number
- JP5016960B2 JP5016960B2 JP2007089101A JP2007089101A JP5016960B2 JP 5016960 B2 JP5016960 B2 JP 5016960B2 JP 2007089101 A JP2007089101 A JP 2007089101A JP 2007089101 A JP2007089101 A JP 2007089101A JP 5016960 B2 JP5016960 B2 JP 5016960B2
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- Prior art keywords
- nozzle
- substrate
- main
- auxiliary
- agent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000003795 chemical substances by application Substances 0.000 title claims description 34
- 239000007921 spray Substances 0.000 title claims description 19
- 238000000034 method Methods 0.000 title description 14
- 239000000758 substrate Substances 0.000 claims description 48
- 239000002994 raw material Substances 0.000 claims description 39
- 239000007788 liquid Substances 0.000 claims description 27
- 239000012752 auxiliary agent Substances 0.000 claims description 20
- 239000002245 particle Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 16
- 238000007590 electrostatic spraying Methods 0.000 claims description 15
- 239000003595 mist Substances 0.000 claims description 13
- 239000000843 powder Substances 0.000 claims description 11
- 239000002002 slurry Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000002904 solvent Substances 0.000 description 27
- 239000000203 mixture Substances 0.000 description 17
- 238000010586 diagram Methods 0.000 description 16
- 239000000126 substance Substances 0.000 description 13
- 238000000151 deposition Methods 0.000 description 9
- 238000004458 analytical method Methods 0.000 description 8
- 230000008021 deposition Effects 0.000 description 7
- 238000005507 spraying Methods 0.000 description 6
- 238000002441 X-ray diffraction Methods 0.000 description 5
- 238000012993 chemical processing Methods 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 229910010272 inorganic material Inorganic materials 0.000 description 3
- 239000011147 inorganic material Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 229910001935 vanadium oxide Inorganic materials 0.000 description 2
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 1
- 239000003905 agrochemical Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 239000002075 main ingredient Substances 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- -1 vanadium oxide acetylacetonate Chemical class 0.000 description 1
Landscapes
- Catching Or Destruction (AREA)
- Sampling And Sample Adjustment (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Nozzles (AREA)
- Electrostatic Spraying Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007089101A JP5016960B2 (ja) | 2007-03-29 | 2007-03-29 | 静電噴霧装置及び主剤からなる試料の作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007089101A JP5016960B2 (ja) | 2007-03-29 | 2007-03-29 | 静電噴霧装置及び主剤からなる試料の作製方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008246328A JP2008246328A (ja) | 2008-10-16 |
| JP2008246328A5 JP2008246328A5 (enExample) | 2010-05-20 |
| JP5016960B2 true JP5016960B2 (ja) | 2012-09-05 |
Family
ID=39971919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007089101A Expired - Fee Related JP5016960B2 (ja) | 2007-03-29 | 2007-03-29 | 静電噴霧装置及び主剤からなる試料の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5016960B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100975668B1 (ko) | 2008-10-30 | 2010-08-17 | 연세대학교 산학협력단 | 패턴 간격을 조정가능한 전기수력학적 패터닝 장치 및 이를이용한 전기수력학적 패터닝 방법 |
| KR101263592B1 (ko) | 2011-07-25 | 2013-05-13 | 고려대학교 산학협력단 | 정전기 스프레이 장치 |
| JP5926611B2 (ja) * | 2012-05-18 | 2016-05-25 | 株式会社ノリタケカンパニーリミテド | ガラス接合材料の評価装置 |
| KR101968664B1 (ko) | 2012-08-06 | 2019-08-14 | 삼성디스플레이 주식회사 | 박막 형성 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55142558A (en) * | 1979-04-21 | 1980-11-07 | Toyota Motor Corp | Electrolytic coater with flat spray coating pattern |
| JPH0615047B2 (ja) * | 1985-04-01 | 1994-03-02 | ノードソン株式会社 | 粉体塗料のスプレイパタ−ンの形成方法とそのスプレイ装置 |
| JP2005264353A (ja) * | 2004-03-16 | 2005-09-29 | Japan Vilene Co Ltd | 繊維集合体の製造方法及び製造装置 |
| JP2005329356A (ja) * | 2004-05-21 | 2005-12-02 | National Institute For Materials Science | 試料製造装置及び試料製造方法 |
| JP2006007163A (ja) * | 2004-06-29 | 2006-01-12 | Alps Electric Co Ltd | スプレーコート装置及びこれを用いたスプレーコート方法 |
-
2007
- 2007-03-29 JP JP2007089101A patent/JP5016960B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008246328A (ja) | 2008-10-16 |
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