JP5016009B2 - Optical signal processing apparatus and assembly method thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical signal processor having improved alignment accuracy. <P>SOLUTION: The optical signal processor is equipped with: an array waveguide diffraction grating which has a signal light input waveguide, an alignment light input waveguide, a slab waveguide linked to the signal light input waveguide and to the alignment light input waveguide, and an array waveguide linked to the slab waveguide; a converging optical system which converges signal light emitted from the array waveguide diffraction grating to a space at a position corresponding to an emission angle from the array waveguide diffraction grating; and an optical signal processing means which is arranged at a position where the signal light is converged by the converging optical system and carries out phase modulation or intensity modulation or deflection of the signal light. In the optical signal processor, a basic mode diameter at a surface linked to the slab waveguide of guided wave light of the alignment light input waveguide is larger than the basic mode diameter at a surface linked to the slab waveguide of the guided wave light of a signal light input output waveguide. Difference between the basic mode diameters improves alignment accuracy when assembling. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to an optical signal processing device and an assembling method thereof.

  As the speed and capacity of optical communication networks have increased, the need for devices that perform optical signal processing such as processing of wavelength division multiplexing (WDM) transmission signals has increased. For example, a wavelength selective switch (WSS) that switches the path of a multiplexed optical signal for each channel in a node, or a variable dispersion compensator (TODC: Tunable Optical) that compensates for chromatic dispersion of an optical fiber in a transmission line Dispersion Compensator) is required.

  Research and development of a planar lightwave circuit (PLC) is underway for the purpose of downsizing and integrating an optical signal processing device. For example, a waveguide made of quartz glass material is formed on a silicon substrate, and various functions are integrated on one chip, so that an optical functional device with low loss and high reliability is realized. Furthermore, a composite optical signal processing device in which a plurality of PLC chips and other optical functional parts are combined has appeared.

  2. Description of the Related Art Conventionally, as a WSS using a PLC, one using a MEMS (Micro Electro Mechanical Systems) mirror array as an optical deflection element is known (see Patent Document 1 and Non-Patent Document 1). FIG. 1 is a diagram showing the configuration of a WSS using such a MEMS mirror array. FIG. 1A is a plan view of the WSS, and FIG. 1B is a side view. In the WSS shown in FIG. 1, WDM optical signals are input as input light to an input-side optical fiber, and channel optical signals having different wavelengths from each other by an arrayed waveguide grating 10 (AWG: Arrayed Waveguide Grating) manufactured by PLC technology. Each channel light signal that has been demultiplexed every time is condensed by a lens (cylindrical lens 20, main lens 40) onto a MEMS mirror 60 that forms a MEMS mirror array. Here, the MEMS mirror array is arranged so that the optical signals of the respective wavelength channels are input to the respective mirrors 60. In this specification, the direction perpendicular to the spectral plane of the AWG is y, the principal ray axis of the signal light having the design center wavelength of the AWG is z, and the axis orthogonal to both is x.

  As shown in FIG. 1B, the WSS has a configuration in which an input side arrayed waveguide grating 10 and a plurality of output side arrayed waveguide gratings 10 'are stacked (in the y direction). One or more output arrayed waveguide diffraction gratings 10 ′ are arranged at positions on the extended line of the optical path axis of the signal light and not overlapping the arrayed waveguide diffraction grating 10 with the MEMS mirror 60 as the axis of symmetry or the rotation axis. Has been. Therefore, an optical signal can be input to another stacked AWG by adjusting the angle of each MEMS mirror in the vertical direction (y direction) with respect to the optical axis (z direction).

  In the WSS shown in FIG. 1, the optical signals of the respective wavelength channels are multiplexed by the output side AWGs and output again as WDM signals from the respective output ports. In the example of FIG. 1, since there are two arrayed waveguide diffraction gratings for one input side arrayed waveguide diffraction grating, it functions as a 1-input 2-output WSS.

  On the other hand, a TODC using a PLC is known that uses LCOS (Liquid Crystal On Silicon) as a spatial light phase modulation element (see Non-Patent Document 2). FIG. 2 is a diagram showing the configuration of such a TODC. In the TODC shown in FIG. 2, an optical signal is input to the input / output waveguide 15 as input light, and is demultiplexed by the AWG 10 for each light having different wavelengths, and the demultiplexed optical signal is converted into a condensing optical system (cylindrical lens). 20, the main lens 40) is configured to condense on the LCOS 61 for each wavelength component. Here, the LCOS has a function of reflecting the phase of incident light with an arbitrary pattern in the x-axis direction, so that the phase modulation of an arbitrary pattern with respect to the wavelength can be imparted to the signal light by the LCOS. It is known that chromatic dispersion occurs when phase modulation of a quadratic function pattern is performed on the wavelength. The chromatic dispersion value given to the optical signal is proportional to the second order coefficient of the phase modulation pattern. By setting a pattern having a target second-order coefficient in the LCOS, a TODC function that imparts target wavelength dispersion to the signal light can be realized.

U.S. Pat. No. 7,088,882

Proc. 31st Eur. Conf. Opt. Commun. 2005, Th3.6.4 Opt. Fiber Commun. Conf. 2008, OWP04 J. Lightwave Technol., Vol. 22, p. 833, 2004

  However, the WSS of FIG. 1 and the TODC of FIG. 2 have the following problems. In general, a condensing optical system constituted by a condensing element such as an AWG or a lens, an optical signal processing means such as a MEMS mirror or LCOS needs to be arranged at a correct position with reference to the optical axis. That is, since the eccentricity from the design position causes a loss of signal light transmission, it must be made sufficiently small when the optical signal processing apparatus is assembled. The optical member is positioned at the correct position, that is, the alignment method is an active alignment method in which signal light is input and the optical characteristics such as transmission loss are evaluated, and an optical beam from a camera or the like. There are two methods of “passive alignment” in which the light beam is aligned at the design position using means for directly observing the position.

  In active alignment, which optical member is decentered cannot be specified from observed information such as transmittance. For this reason, it is necessary to repeat a procedure of observing the result by moving a large number of axes (translation axes and rotation axes) of a large number of optical members such as individual lenses. This method has the following disadvantages: (1) the alignment time becomes long, (2) the local transmittance peak position that is not the actual optimal arrangement may be mistaken as the optimal alignment position, and ( 3) There is a drawback that there is no guide for finding the optimum alignment position even if it is determined that the position is a local transmittance peak position. However, the above-described drawbacks are eliminated in alignment that further increases accuracy from a state in which the position of the optical member is aligned at a substantially designed position by another method.

  On the other hand, in the passive alignment method, the optical member can be sequentially adjusted from the incident side so that the alignment light becomes the light beam position at the time of design, so that the three drawbacks of the active alignment are solved. However, sufficient alignment accuracy cannot be obtained when the optical axis position accuracy required to obtain the characteristics required for the optical signal processing device such as the signal light transmittance exceeds the accuracy of the light beam observation means such as a camera. There is a drawback.

  Specifically, in the optical signal processing device of FIGS. 1 and 2, the principal ray of the signal light after demultiplexing does not depend on the wavelength, but is transmitted to the optical signal processing means (MEMS mirror 60 or LCOS 61) by xz. It is necessary to enter perpendicularly in the plane. If the light does not enter perpendicularly, the principal ray axes of the incident light and the reflected light will deviate, resulting in light loss due to the deviation of the optical axis. In order to realize the perpendicularity with light of a specific wavelength, it is only necessary to adjust θy of the optical signal processing means. However, in order to realize the above-described normal incidence at the same time for all wavelengths of light and reduce the wavelength dependence (ILU) of the optical loss, it is necessary for the principal rays of the signal light of each wavelength to be parallel to each other. is there. This requirement is called “image telecentricity” in the condensing optical system, and is realized by aligning each member of the optical system so that the front focal position of the main lens 40 coincides with the pupil. In the case of a spectroscopic optical system based on AWG, the pupil is on the surface where the arrayed waveguide 14 and the output-side slab waveguide 11 where the light of each wavelength is deflected are connected. In addition to the configuration shown in FIGS. 1 and 2, an optical signal processing means that transmits signal light is used, and a condensing optical system and a new AWG emitting optical system are arranged on an extension of the optical path axis of the incident light. Even in this case, in order to avoid light loss, image telecentricity of the condensing optical system is required.

  In order to adjust the image telecentricity by the passive alignment method, it is necessary to accurately evaluate the principal ray axis direction of each wavelength light. However, this direction angle detection has the following limitations.

FIG. 3 schematically shows the beam shape of signal light of a specific wavelength that is collected near the optical signal processing means. A case where light is condensed at a position of a cross section B where the optical signal processing means is to be arranged is shown with respect to the optical axis z direction. Ambient light in the figure is a display of the trajectory of the light farthest from the principal ray for the purpose of representing the beam thickness. In general, the spread angle of ambient light is expressed by the aperture of the beam, NA. When the beam radius at the focus and omega _O NA becomes as follows.

Here, λ is the wavelength of light. The detection of the light beam direction by the passive alignment is performed by moving the detection means in the optical axis direction z, measuring the light intensity distribution in the cross section A and the cross section C, and evaluating the z dependency of the principal ray position. Realize. Since the detection accuracy of the principal ray position is approximately proportional to the beam thickness, if the ratio is defined as k here, the angle detection limit θ _lim is as follows.

On the other hand, if the angle between the normal of the reflecting surface of the optical signal processing means and the incident principal ray axis of the signal light of each wavelength is θ, the optical coupling loss Loss [dB] due to the inclination of the incident principal ray axis is as follows. It becomes.

Here, _assuming that alignment is possible up to the detection limit θ _lim , the residual optical loss due to alignment accuracy limit is

It becomes. If the light intensity distribution is ideal, k can be reduced, but if the beam shape is disturbed due to noise, lens aberration, etc., the beam position detection accuracy by a camera or the like is about 1/5 of the beam radius, that is, k decreases to about 0.2. In this case, according to Equation 4, the residual light loss due to the alignment limit is 0.69 dB regardless of the design of the optical system. Considering the usage pattern in which the signal light transmittance of the entire optical signal processing apparatus is several dB and its specification value is specified in units of 0.1 dB, this limit value is too large. The problem that the conventional passive alignment cannot meet the alignment accuracy requirement has been clarified.

  The present invention has been made in view of such problems, and an object thereof is to improve alignment accuracy in an assembly method of an optical signal processing device using passive alignment. Another object of the present invention is to provide an optical signal processing device capable of improving alignment accuracy.

  In order to achieve such an object, the first aspect of the present invention is connected to the signal light input waveguide and the aligning light input waveguide, and to the signal light input waveguide and the aligning light input waveguide. An arrayed waveguide grating having a slab waveguide and an arrayed waveguide connected to the slab waveguide, and an output angle of the signal light emitted from the arrayed waveguide grating to the space from the arrayed waveguide grating A condensing optical system for condensing the signal light at a position corresponding to the optical signal processing means for phase-modulating, intensity-modulating or deflecting the signal light, disposed at a position where the signal light is condensed by the condensing optical system And the fundamental mode diameter of the guided light of the alignment light input waveguide connected to the slab waveguide is the surface of the signal light input / output waveguide connected to the slab waveguide. Larger than the basic mode diameter of An optical signal processing apparatus characterized.

  According to a second aspect of the present invention, in the first aspect, the signal light input / output waveguide extends into the slab waveguide and the alignment light input waveguide enters the slab waveguide. Are extended on the surface where the slab waveguide and the arrayed waveguide are connected to each other.

  According to a third aspect of the present invention, in the first or second aspect, the fundamental mode diameter of the guided light of the aligning light input waveguide on the surface connected to the slab waveguide is the signal light input. It is characterized by being at least twice as large as the fundamental mode diameter of the guided light of the output waveguide on the surface connected to the slab waveguide.

  According to a fourth aspect of the present invention, in any one of the first to third aspects, the optical signal processing means is a reflective type that reflects the signal light processed in the optical signal processing means, The reflected signal light is incident on the arrayed waveguide diffraction grating through the condensing optical system, and is output from the signal light input / output waveguide.

  According to a fifth aspect of the present invention, in any one of the first to third aspects, the optical signal processing means is a symmetric axis or a rotation axis on an extension line of the optical path axis of the signal light. One or more output arrayed waveguide diffraction gratings are arranged at positions that do not overlap with the waveguide diffraction grating.

  According to a sixth aspect of the present invention, there is provided a signal light input waveguide and an aligning light input waveguide, a slab waveguide connected to the signal light input waveguide and the aligning light input waveguide, and the slab guide. An arrayed waveguide diffraction grating having an arrayed waveguide connected to the waveguide, and signal light emitted from the arrayed waveguide diffraction grating to the space is condensed at a position corresponding to an emission angle from the arrayed waveguide diffraction grating. An optical signal processing apparatus comprising: a condensing optical system; and an optical signal processing unit that is disposed at a position where the signal light is collected by the condensing optical system and that modulates or deflects the signal light. An assembly method, the step of inputting aligning light into the aligning light input waveguide, the step of measuring the direction of the principal ray axis of the aligning light emitted from the condensing optical system, and the chief ray The axis depends on the wavelength of the aligning light Adjusting a position of at least one condensing element included in the condensing optical system so as to be parallel, and connecting the guided light of the aligning light input waveguide to the slab waveguide The fundamental mode diameter of the signal light input / output waveguide is larger than the fundamental mode diameter of the guided light of the signal light input / output waveguide on the surface connected to the slab waveguide.

  According to a seventh aspect of the present invention, in the sixth aspect, the optical signal processing device is the optical signal processing device according to any one of the second to fifth aspects.

  According to an eighth aspect of the present invention, in the sixth or seventh aspect, the step of inputting alignment light into the alignment light input waveguide and the adjustment output from the alignment light input waveguide. And a step of adjusting about an axis perpendicular to the spectral plane of the arrayed waveguide grating of the optical signal processing means so that the light intensity of the heart light becomes maximum.

  According to the method of assembling the optical signal processing device of the present invention, the fundamental mode diameter of the surface of the aligning light input waveguide connected to the slab waveguide is such that the slab guide of the waveguide light of the signal light input / output waveguide is the same. By being larger than the fundamental mode diameter on the surface connected to the waveguide, alignment accuracy can be improved, thereby reducing signal light transmission loss of the optical signal processing device.

  Further, according to the optical signal processing device of the present invention, the fundamental mode diameter on the surface of the alignment light input waveguide connected to the slab waveguide of the guided light is the slab waveguide of the guided light of the signal light input / output waveguide. Since it is larger than the fundamental mode diameter on the surface connected to, the alignment accuracy during assembly can be increased, thereby reducing signal light transmission loss.

It is a figure for demonstrating schematic structure of the conventional wavelength selective switch, (a) is a top view, (b) is a side view. It is a figure for demonstrating schematic structure of the conventional TODC. It is a figure for demonstrating the shape of the light beam of an optical signal processing means vicinity. It is a figure for demonstrating the assembly method of TODC which concerns on the 1st Example of this invention. It is a figure which shows the evaluation result by the beam position observation apparatus used at the time of the assembly of TODC which concerns on 1st Example of this invention. It is a figure for demonstrating the structure of AWG of TODC based on 2nd Example of this invention.

  Hereinafter, embodiments of the present invention will be described in detail.

(Embodiment 1)
An optical signal processing device according to Embodiment 1 of the present invention includes a signal light input waveguide and an alignment light input waveguide, a slab waveguide connected to the signal light input waveguide and the alignment light input waveguide, and a slab waveguide. An arrayed waveguide diffraction grating having an arrayed waveguide connected to the optical waveguide, and a condensing optical system that condenses the signal light emitted from the arrayed waveguide diffraction grating into the space at a position corresponding to the emission angle from the arrayed waveguide diffraction grating And optical signal processing means arranged at a position where the signal light is condensed by the condensing optical system, for phase-modulating, intensity-modulating or deflecting the signal light. In the optical signal processing device, the fundamental mode diameter on the surface of the aligning light input waveguide connected to the slab waveguide of the guided light is the surface of the signal light input / output waveguide connected to the slab waveguide of the guided light. Larger than the basic mode diameter. It will be described below that this difference in basic mode diameter leads to an improvement in alignment accuracy during assembly.

In the method of assembling the optical signal processing device according to the present embodiment, signal light and alignment light are incident from different input waveguides. The fundamental mode diameters of the guided light of the signal light input / output waveguide and the aligning light input waveguide when entering the slab waveguide are ω _s1 and ω _a1 = α · ω _s1 , respectively. The coefficient α is the ratio of the mode diameter between the aligning light and the signal light. Since the connecting surface of the slab waveguide on the input waveguide side and the focal plane of the condensing optical system on which the optical signal processing means is placed are optically conjugate, the input beam shape of the slab waveguide has a constant magnification. And projected onto the optical signal processing means. That is, if the beam diameters of the signal light and the aligning light on the optical signal processing means are ω _s2 and ω _a2 , respectively, ω _a1 / ω _s1 = ω _a2 / ω _s2 = α. Thus, when the beam diameters of the signal light and the aligning light are different, Expressions 2 to 4 are changed as follows:

  That is, the optical loss value that is expected to remain is inversely proportional to the square of α in dB. Assuming that an ILU of about 1 dB is allowed in WSS and TODC, it is sufficient that the assembly accuracy is limited to a fraction of that. Assuming that the actual usage and alignment are Loss ≦ 0.2 dB and k = 0.2, α ≧ 2 is sufficient. In other words, the fundamental mode diameter on the surface of the aligning light input waveguide connected to the slab waveguide of the guided light is the fundamental mode diameter on the surface of the signal light input / output waveguide connected to the slab waveguide. It is preferable that it is twice or more as large as compared.

Example 1
FIG. 4 is a diagram for explaining an assembling method of the optical signal processing device according to the first embodiment of the present invention. The arrayed waveguide diffraction grating 10 includes a aligning light input waveguide 17 separately from the signal light input / output waveguide 16. The output light of the wavelength tunable laser light source as the aligning light source is input to the aligning light input waveguide 17, the wavelength is adjusted, and the aligning light is emitted from the arrayed waveguide grating 10 substantially parallel to the z-axis. Adjusted as follows. Here, since the incident position to the slab waveguide 12 is different between the signal light and the aligning light, it should be noted that the aligning light does not exit parallel to the z-axis at the design center wavelength of the AWG 10.

  The width of the aligning light input waveguide 17 gradually increases toward the connection surface 18 to the slab waveguide 12. As a result, the aligning light is incident on the slab waveguide 12 after the mode diameter is increased while maintaining the fundamental mode waveguide. In Example 1, the width of the signal light input / output waveguide 16 is 7.5 μm, the width of the aligning light input waveguide 17 is 7.5 μm at the entrance, and 22.5 μm at the exit to the slab waveguide 12. . With this design, the fundamental mode diameter of the aligning light before entering the slab waveguide 12 is about three times that of the signal light.

  The beam position observation device 62 was installed using a movable stage in the z-axis direction in the vicinity of the focal plane of the condensed beam that passed through the cylindrical lens 20 and the main lens (also referred to as “condensing lens”) 40. Here, a CCD camera type beam profiler is used as the beam position observation device 62, but a slit scan type or an IR camera can also be used.

FIG. 5 shows the light intensity distribution in the x direction when the beam position observation device 62 is placed at positions A and C moved ± 10 mm in the z-axis direction from the position of the focal plane B in FIG. On the focal plane B, the beam diameter is thinner for the signal light and the position evaluation is easier (see FIG. 5A). However, on the A and C planes, the alignment light is thinner and the position detection accuracy is higher. (See FIG. 5B). Therefore, the angle detection of the aligning light in the principal ray direction can be performed with higher accuracy. Since the beam diameter ω _a2 of the aligning light is about 100 μm and the beam diameter ω _s2 of the signal light is about 40 μm, it is found from Equation 7 that the loss at the alignment limit is 0.11 dB, which is sufficiently small. It was.

  The wavelength of the aligning light was changed within the range of the range used in TODC, and the position of the main lens 40 in the z-axis direction was adjusted so that the principal ray axis of the aligning light at each wavelength was parallel. Specifically, first, the beam profiler 62 is installed at the position A in FIG. An aligning light (short wavelength aligning light) whose wavelength is adjusted so as to have substantially the same principal ray axis as the principal ray axis 53 of the short wavelength signal light, and a principal ray axis substantially the same as the principal ray axis 54 of the long wavelength signal light. The beam profiler 62 observes the aligning light (long wavelength aligning light) whose wavelength is adjusted so as to have a difference, and records the difference in the x coordinate of each principal ray position, that is, the principal ray interval (interval A). Next, the movable stage is moved to move the beam profiler 62 to the position C, and similarly, the interval (interval C) between the short wavelength aligning light and the long wavelength aligning light is measured. If the distance A> the distance C, the main lens 40 is moved along the z-axis so as to approach the AWG 10. If the distance A <the distance C, the main lens 40 is moved along the z-axis so as to be away from the AWG 10. This operation is repeated until the principal beam axes of the short wavelength aligning light and the long wavelength aligning light are parallel. By this adjustment, the condensing optical system becomes an image telecentric optical system, so that the principal ray axis is parallel to the z axis regardless of the wavelength of the signal light.

  In the present embodiment, a single convex lens is used as the condensing lens 40, but a combination of a plurality of lenses, that is, a lens unit can be used in consideration of the aberration of the condensing optical system. In that case, the telecentricity adjustment can be performed by adjusting the position of the entire lens unit or by adjusting the position of some lenses in the lens unit.

  After that, the main lens 40 is fixed, and LCOS (corresponding to “optical signal processing means”) is aligned and fixed on the focal plane B by active alignment using signal light, and the TODC (“optical signal processing device”) is fixed. Is equivalent). ILU was measured in a state where no dispersion occurred, that is, in a state where the phase modulation amount of LCOS was zero. For comparison, a TODC adjusted by inputting alignment light from the signal light input / output waveguide 16 without depending on the present invention was also manufactured. Table 1 shows the results of both characteristics evaluation. According to the present invention, the ILU characteristics have been improved to a level where there is no practical problem.

(Embodiment 2)
FIG. 6 is an enlarged view of the vicinity of the slab waveguide in the AWG provided in the optical signal processing device according to Embodiment 2 of the present invention. In the optical signal processing device according to the second embodiment, the alignment light input waveguide 17 is narrowed toward the connection surface 18 to the slab waveguide 12 and the extension line of the alignment light input waveguide 17 is the slab. The optical signal processing apparatus according to the first embodiment is different from the optical signal processing apparatus according to the first embodiment in that the waveguide 12 crosses the extension line of the signal light input / output waveguide 16 at the boundary surface on the array waveguide 14 side.

  It is known that the fundamental waveguide mode diameter in a waveguide becomes thicker on the contrary when the waveguide width becomes narrower than the width satisfying the single mode condition (detailed in Non-Patent Document 3). In FIG. 6, the aligning light input waveguide 17 has a gentle taper shape and is connected to the slab waveguide 12 after being reduced to about 2 μm. Thereby, it can be expected that the mode diameter of the aligning light is increased and the accuracy of image telecentricity adjustment is increased.

Further, both the alignment light and the signal light are incident on the center position of the arrayed waveguide 14. As a result, the exit position from the arrayed waveguide 14 becomes the same, so that the alignment light and the signal light are parallel at the position of the optical signal processing means. As a result, θy adjustment of the optical signal processing means can be performed by using the aligning light incident from the aligning light input waveguide 17. At this time, the light transmittance change detection limit Loss _lim during active alignment and the θy adjustment limit θy _lim are:

The relationship holds. Residual light transmission loss in signal light is

It becomes. Compared with the case where θy of the optical signal processing means is adjusted using the light input from the signal light input / output waveguide (corresponding to α = 1), the light incident on the alignment light input waveguide 17 where α> 1. When heart light is used, residual light loss due to alignment deviation can be reduced in inverse proportion to the square of α. Table 2 shows the transmission characteristics of TODC when the LOCS θy is adjusted by using the aligning light incident from the aligning light input waveguide 17 in addition to the aligning work equivalent to that of the first embodiment. The effect of reducing transmission loss was confirmed.

10, 10 'array waveguide diffraction grating 11 output side slab waveguide 12 slab waveguide 14 array waveguide 15 input / output waveguide 16 signal light input / output waveguide 17 aligning light input waveguide 18 signal light input / output waveguide and Connecting surface of alignment light input waveguide and slab waveguide 20 Cylindrical lens 40 Condensing lens 60 MEMS mirror 61 LCOS

Claims (8)

An array having a signal light input waveguide and an aligning light input waveguide, a slab waveguide connected to the signal light input waveguide and the aligning light input waveguide, and an array waveguide connected to the slab waveguide A waveguide grating;
A condensing optical system for condensing the signal light emitted to the space from the arrayed waveguide diffraction grating at a position corresponding to an emission angle from the arrayed waveguide diffraction grating;
Optical signal processing means arranged at a position where the signal light is collected by the condensing optical system, and phase-modulating, intensity-modulating or deflecting the signal light;
The fundamental mode diameter of the waveguide light of the aligning light input waveguide on the surface connected to the slab waveguide is the fundamental mode diameter of the waveguide light of the signal light input / output waveguide on the surface connected to the slab waveguide. An optical signal processing device characterized by being larger than the above.   An extension line of the signal light input / output waveguide into the slab waveguide and an extension line of the alignment light input waveguide into the slab waveguide are formed by the slab waveguide and the arrayed waveguide. The optical signal processing device according to claim 1, wherein the optical signal processing device intersects on a connecting surface.   The fundamental mode diameter of the waveguide light of the aligning light input waveguide on the surface connected to the slab waveguide is the fundamental mode diameter of the waveguide light of the signal light input / output waveguide on the surface connected to the slab waveguide. 3. The optical signal processing apparatus according to claim 1, wherein the optical signal processing apparatus is at least twice as large as the optical signal processing apparatus. The optical signal processing means is a reflective type that reflects the signal light processed in the optical signal processing means,
4. The reflected signal light is incident on the arrayed waveguide diffraction grating through the condensing optical system and output from the signal light input / output waveguide. An optical signal processing device according to claim 1.   Using the optical signal processing means as a symmetry axis or a rotation axis, at least one arrayed-waveguide diffraction grating for emission is located on an extension line of the optical path axis of the signal light so as not to overlap the arrayed-waveguide diffraction grating. 4. The optical signal processing device according to claim 1, wherein the optical signal processing device is disposed. An array having a signal light input waveguide and an aligning light input waveguide, a slab waveguide connected to the signal light input waveguide and the aligning light input waveguide, and an array waveguide connected to the slab waveguide A waveguide diffraction grating, a condensing optical system for condensing the signal light emitted into the space from the arrayed waveguide diffraction grating at a position corresponding to an emission angle from the arrayed waveguide diffraction grating, and the condensing optical system An optical signal processing apparatus assembly method comprising: an optical signal processing means arranged at a position where the signal light is condensed by the optical signal processing means for phase modulation, intensity modulation or deflection of the signal light,
Inputting aligning light into the aligning light input waveguide;
Measuring the direction of the principal ray axis of the aligning light emitted from the condensing optical system;
Adjusting the position of at least one condensing element included in the condensing optical system so that the principal ray axis is parallel regardless of the wavelength of the aligning light,
The fundamental mode diameter of the waveguide light of the aligning light input waveguide on the surface connected to the slab waveguide is the fundamental mode diameter of the waveguide light of the signal light input / output waveguide on the surface connected to the slab waveguide. An assembly method characterized by being large compared to. The assembly method according to claim 6, wherein the optical signal processing device is the optical signal processing device according to claim 2.
Inputting aligning light into the aligning light input waveguide;
Adjusting the axis perpendicular to the spectral plane of the arrayed-waveguide grating of the optical signal processing means so that the light intensity of the aligning light output from the aligning light input waveguide is maximized; The assembly method according to claim 6, further comprising:

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