JP5009663B2 - Appearance inspection system - Google Patents

Description

  The present invention relates to an inspection system that inspects an article and sorts the article according to the inspection result, and more specifically, an appearance inspection system that inspects the appearance of the article and sorts the article according to the inspection result. About.

  Electronic devices used in precision instruments, and optical devices such as lenses and image sensors often have a great influence on the performance even if they have some defects such as scratches and scratches. However, it is practically impossible to completely remove such defects from various factors during manufacturing. Therefore, in practice, the appearance and performance are carefully inspected before shipment, and only those satisfying certain standards are shipped as products.

  Although such inspections such as appearances are automated, it is difficult to quantitatively evaluate various defects, and many inspection items still have to rely on visual inspection. The visual inspection is greatly influenced by the skill level and physical condition of the inspection, and is not necessarily a stable inspection. Further, the inspection speed of the visual inspection is not necessarily fast, and it is most preferable to inspect all products correctly. However, in actuality, in many cases, the visual inspection often involves sampling some products.

  In recent years, in view of such problems of visual inspection, there has been proposed an appearance inspection apparatus that reduces the amount of visual inspection and accurately and efficiently inspects the appearance and the like. For example, based on the maximum brightness in the image obtained by imaging the article to be inspected, the article is determined as a non-defective product, a defective product, or a non-determinable product, and re-inspected as necessary based on this determination result. An appearance inspection apparatus that performs the above is known (see Patent Document 1).

An apparatus that inspects the appearance of a lens based on an image obtained by imaging the lens while illuminating a dark field is known (see Patent Document 2).
JP-A-9-264856 JP 2002-90258 A

  However, if a defect is detected using the maximum luminance in an image obtained by imaging an article as in the appearance inspection apparatus described in Patent Document 1, a low-luminance defect such as a stain cannot be correctly determined. There is a problem.

  If you try to detect such low-brightness defects by adjusting the camera position, lighting direction, illumination light intensity, etc., the high-brightness defects will be emphasized more than necessary, and they should be good. Many so-called over-detections that are regarded as defective products occur. That is, there is a problem that it cannot always be said that an accurate and efficient inspection can be performed on an article in which various defects are randomly generated.

  Further, as in the inspection apparatuses described in Patent Documents 1 and 2, in order to devise the position of the camera with respect to the article, the direction of illumination, the intensity of illumination light, the wavelength, etc., a plurality of cameras and illumination along the inspection line If a defect is not detected by one set of cameras or lighting, a defect may be detected if appropriate shooting conditions are obtained for another set. However, when the article to be inspected is moved on the inspection line or the like, the position of the article with respect to each camera or each illumination is different. Therefore, although the images separately photographed using a plurality of cameras and lighting sets in this manner are images in which various defects are respectively copied, the photographing angle of the article to be inspected is inspected. There is a problem that it is difficult to compare these images with each other with high accuracy because each time the lens is photographed.

  Realistic articles have a three-dimensional shape, and the characteristics of defects that occur here are various. Therefore, in the case where images taken by a large number of cameras and lighting cannot be compared with each other with high accuracy, in order to detect such defects without omission, a large number of cameras and lighting that are unrealistic in cost are necessary. End up. That is, in reality, there is a problem that various defects cannot be detected with high accuracy.

  On the other hand, in the case of a visual inspection device that uses both automatic inspection and visual inspection, such as re-inspection that is difficult to judge by automatic inspection and re-inspection by visual inspection, Under the situation where the quality of the product is not stable as in the initial stage of manufacturing, a large amount of reinspected products are generated. Therefore, there is a problem in that even if an appearance inspection apparatus that uses such a visual inspection is introduced, the manufacturing is not always efficient.

  Furthermore, regardless of whether the appearance inspection is a manual visual inspection or an automatic appearance inspection apparatus, it is necessary to sort the articles according to the inspection result and ship only good products.

  In order to automate the sorting of the articles according to the inspection results, a dedicated facility is required according to the characteristics such as the shape of the article, so that a large capital investment is required. Furthermore, since such equipment is produced according to the size and shape of the article, it is difficult to divert the equipment to those having different sizes and shapes, and there is no versatility. Therefore, when mass production of new products or the like is started, there is a problem that a large capital investment is required again.

  On the other hand, when such an article is manually selected, a complicated operation such as a monitor displaying the inspection result or a paper sheet on which the inspection result is printed is required. In particular, when the inspection result is not only the two categories of good and bad, for example, when it is necessary to sort according to the type of defect, such sorting of articles has been a very complicated task. . Therefore, there is a need for an inspection result display device that directly displays the inspection result of the inspected article on the inspected article, regardless of the monitor or paper at a remote location.

In addition, such an inspection result display device is required to display an inspection result accurately without causing a worker performing the sorting operation (hereinafter referred to as a sorting worker) to misidentify the inspection result.
For example, it is natural that the sorting workers have different physiques such as height, and the angle at which the inspection result is displayed differs depending on the individual. The inspection result display device is required to display the inspection result.

  In addition, for example, since the quality of individual articles has already been inspected by an inspection apparatus or the like, there are cases where a part of the articles is usually selected from a plurality of arranged articles according to the inspection result. When selecting a part of articles from a plurality of articles arranged in this way, the articles placed adjacent to each other are mistakenly selected regardless of the standing position of the sorting operator with respect to the inspection result display device. In order to prevent misidentification as an article, it is required that the inspection result of each article is clearly distinguished and recognized by a sorting worker.

  Furthermore, for example, when selecting several to several tens of articles from hundreds of articles, it is necessary to reduce inevitable human errors such as oversight and miscounting. Therefore, the inspection result display device is required to display appropriate information to the sorting worker in order to confirm whether or not the sorting operation is correctly performed.

  On the other hand, since such an inspection result display device is continuously used for manufacturing and inspection of articles, durability is required.

  Furthermore, the appearance inspection apparatus as described above, the re-inspection apparatus that performs precise re-inspection, and the inspection result display apparatus that selects according to the quality of the article are provided integrally with a series of inspection lines, and the appearance of the article The inspection and the selection according to the quality of the inspected article are performed continuously. Appearance inspection equipment, re-inspection equipment, sorting equipment, etc. are provided on the inspection line as a single unit, so they are required according to the quantity and quality of the products to be manufactured, the required precision of appearance inspection, etc. There is a problem that it is difficult to individually adjust, replace, or add only the device. In addition, when the entire inspection line is extended to another location, there is a problem that a large amount of capital investment is newly required.

  The present invention has been made in view of the above-described problems, and inspects various types of defects that occur randomly in an article having a realistic shape with high accuracy without omission and makes it easy to understand inspection results such as appearance inspections in an easy-to-understand manner. An object of the present invention is to provide an appearance inspection system to be displayed on the screen. Another object of the present invention is to provide an inexpensive appearance inspection system for efficiently performing an appearance inspection by freely adding each device necessary for the inspection of the article according to the manufacturing status of the article.

An appearance inspection system according to the present invention includes a plurality of objects to be inspected for appearance defects arranged side by side, and an object holding means for passing upward the light irradiated from below to each of the objects, An imaging unit that captures the subject to obtain an image of the subject, and moves the subject holding unit to place each subject at an examination position facing the imaging unit, A defect evaluation apparatus that images the object placed at the inspection position while illuminating the object and evaluates the defect of the object as good, defective, or re-inspected from the obtained image; While the specimens are arranged on the specimen holding means , light is irradiated from below the specimen holding means in association with each of the specimens, and the evaluation of the specimen by the defect evaluation apparatus is displayed respectively. Evaluation display device , Together with the evaluation of defects of the subject by the defect evaluation apparatus, an image of the subject obtained by the defect evaluation apparatus wherein with managing grouped by subject holding means, to a request from the evaluation display device In response, the evaluation management apparatus that outputs the evaluation of the object, and the image of the object that has been evaluated as reexamined by the defect evaluation apparatus is read out from the evaluation management apparatus and displayed on the monitor, so And a re-examination device for evaluating whether the defect of the subject is good or bad .

The evaluation display device displays a light or dark pattern according to the interval at which the subject holding means arranges the subject and the evaluation of each of the subjects by the defect evaluation device below the subject holding means. By displaying, it is preferable to display the evaluation by the defect evaluation apparatus in association with each of the objects while being arranged in the object holding means.

The defect evaluation apparatus is disposed on the opposite side of the imaging unit with respect to the subject, and uniformly illuminates the subject so that illumination light transmitted through the subject does not enter the imaging unit. A first illuminating unit and a first illuminating unit that is disposed on the same side as the imaging unit with respect to the subject and uniformly illuminates the subject so that illumination light reflected by the subject does not enter the imaging unit and second illumination means, wherein disposed on the opposite side of the imaging means to the subject, a third illumination the illumination light transmitted through the object is uniformly illuminate the object to be incident on the imaging unit It means and said arranged on the same side as the imaging means to the subject, the fourth illuminating means for uniformly illuminating the object so as illumination light reflected by the object is incident on the imaging unit A relative position between the subject and the imaging means. Switch to another pictorial, said first illumination means, the second illumination means, said third illumination means, may be such that the imaging while illuminating the subject with each of said fourth illumination means.

  According to the present invention, a wide variety of defects that occur randomly in an article having a realistic shape are inspected accurately and accurately, and inspection results such as appearance inspection are displayed in an easily understandable and accurate manner. According to the situation, it is possible to provide an inexpensive appearance inspection system for efficiently performing an appearance inspection by freely adding each device necessary for the inspection of the article.

  As shown in FIG. 1, the appearance inspection system 10 inspects defects generated on the surface and inside of the lenses 17 arranged on the inspection tray 16, displays the result of the inspection, and selects according to the inspection result. This is an external appearance inspection system 10.

  The lens 17 handled by the appearance inspection system 10 is, for example, a lens formed by heating and pressurizing a glass material with a mold and applied with an antireflection coating. Visual inspection using a microscope is performed, and selection is performed at the same time as inspection according to the result of visual inspection.

  The appearance inspection system 10 includes a server 21, an appearance inspection device 22, a re-inspection device 23, an inspection result display device 24, a tray storage 26, and the like.

The tray storage 26 is a place for storing the inspection tray 16 (details will be described later) after the appearance inspection by the appearance inspection apparatus 22 in a state where the lens 17 is disposed. The tray storage 26 displays the result of the appearance inspection of the lens 17 by the inspection result display device 24 and sorts it into a non-defective product and a defective product before the lens 17 disposed on the inspection tray 16. Is a place to store

[server]
The server 21 manages the data such as the images used for the appearance inspection evaluation and the appearance inspection of the lens 17 obtained by the appearance inspection device 22 in the database 28, and is requested from the re-inspection device 23, the inspection result display device 24, and the like. Output necessary data among these data. That is, the server 21 comprehensively manages data used in the appearance inspection system 10.

[Appearance inspection device]
As shown in FIG. 2, the appearance inspection apparatus 22 is an appearance inspection apparatus that inspects defects generated on the surface and inside of the lens 17 arranged side by side on the inspection tray 16.

  The inspection tray 16 is provided with countersink holes 31 in which the lenses 17 are arranged side by side in a lattice shape. Further, a through hole 32 having a smaller diameter than that of the counterbore 31 is provided in the center of the counterbore 31. Further, the through hole 32 is provided such that the diameter increases toward the lower side in order to efficiently guide the illumination light irradiated from below to the lens 17.

  Further, a plurality of similar inspection trays 16 are prepared in accordance with the production amount of the lens 17, and an ID 33 (see FIG. 3) for identifying each is assigned to the inspection tray 16. This ID 33 is, for example, a barcode, which is read when moved to the inspection position, and is managed together with the management number of the lens 17 disposed in the through hole 32.

  The appearance inspection apparatus 22 includes an XY stage 34, an ID scanner 36, a CCD area sensor 37, a transmission type dark field illumination 41 (first illumination), a reflection type dark field illumination 42 (second illumination), and a transmission type bright field illumination 43 ( 3rd illumination), reflection type bright field illumination 44 (4th illumination), etc. are comprised.

  The XY stage 34 moves the lens 17 together with the set inspection tray 16 and accurately moves the lens 17 that executes the inspection to an inspection position directly below the CCD area sensor 37. The XY stage 34 is provided with a hollow stage on which the inspection tray 16 on which the lens 17 is disposed is set. The hollow stage is provided so as to be movable horizontally and is formed in a hollow frame shape. Accordingly, the central portion of the set inspection tray 16 is exposed downward, and the lens 17 disposed on the inspection tray 16 is illuminated even from below. The XY stage 34 moves the inspection tray 16 to the ID scan position every time the inspection tray 16 is replaced.

  The CCD area sensor 37 is arranged downward, and the lens 17 moved to the inspection position by the XY stage 34, that is, the lens 17 arranged facing the CCD area sensor 37 is photographed under various illumination conditions. To do. The image of the lens 17 photographed by the CCD area sensor 37 is managed together with the ID 33 of the inspection tray 16 and the coordinates in the inspection tray 16 where the lens 17 is disposed.

  The transmission type dark field illumination 41 (first illumination means) is disposed on the opposite side of the CCD area sensor 37 with respect to the lens 17 at the inspection position, and is a planar shape that uniformly illuminates the lens 17 with illumination light. A light emitting surface 46 is provided. The entire light emitting surface 46 does not emit light, and a non-light emitting portion 47 is provided at the center of the light emitting surface 46. The illumination light emitted from the transmission type dark field illumination 41 is uniformly emitted from the entire light emitting surface 46 excluding the non-light emitting portion 47. Further, the size and shape of the non-light emitting portion 47 are determined so that the illumination light from the transmission type dark field illumination 41 does not enter the CCD area sensor 37 after passing through the lens 17. The transmissive dark field illumination 41 has a configuration in which a diffusion plate is provided on a large number of LEDs, and the size and shape of the non-light emitting portion 47 can be easily changed.

  The transmission type dark field illumination 41 is provided on the uniaxial stage 48 and freely moves between a use position where the lens 17 is irradiated with illumination light and a non-use position retracted from the use position. Is done. The uniaxial stage 48 for moving the transmission type dark field illumination 41 is provided independently of the XY stage 34 and the CCD area sensor 37 fixing equipment, and the CCD area sensor 37 and the lens 17 at the inspection position. The transmissive dark field illumination 41 is freely moved between the use position and the non-use position without changing the relative positional relationship between the two.

  The reflective dark field illumination 42 (second illumination means) is arranged on the same side as the CCD area sensor 37 with respect to the lens 17 at the inspection position. The reflection type dark field illumination 42 is a cylindrical illumination provided so as to surround the periphery of the lens 17 at the inspection position from above, and the inner surface side is a light emitting surface to uniformly illuminate the lens. Irradiate. The illumination light applied to the reflective dark field illumination 42 is applied to the lens 17 from an angle closer to the surface of the inspection tray 16 as compared to a reflective bright field illumination 44 described later. That is, the illumination angle of the reflective dark field illumination 42 is adjusted so that the amount of illumination light reflected by the normal surface of the lens 17 and entering the CCD area sensor 37 is reduced.

  The transmissive bright field illumination 43 (third illumination means) is disposed on the opposite side of the CCD area sensor 37 with respect to the lens 17 at the inspection position, and is a planar shape that uniformly illuminates the lens 17 with illumination light. A light emitting surface 49 is provided. Unlike the light emitting surface 46 of the transmission type dark field illumination 41 described above, the entire light emitting surface 49 of the transmission type bright field illumination 43 emits light uniformly. The size of the light emitting surface 49 of the transmissive bright field illumination 43 is at least larger than the size of the non-light emitting portion 47 of the transmissive dark field illumination 41 described above. That is, the illumination light emitted from the transmissive bright field illumination 43 passes through the lens 17 and enters the CCD area sensor 37.

  The reflective bright field illumination 44 (fourth illumination means) is arranged on the same side as the CCD area sensor 37 with respect to the lens 17 at the inspection position, and uniformly irradiates illumination light from above the lens 17. The illumination light emitted from the reflection type bright field illumination 44 is emitted from the direction facing the surface of the inspection tray 16 as compared with the reflection type dark field illumination 42 described above. That is, the illumination angle of the reflective bright field illumination 44 is adjusted so that most of the illumination light reflected on the normal surface of the lens 17 enters the CCD area sensor 37.

  The mask plate 52 is provided between the transmissive dark field illumination 41 and the transmissive bright field illumination 43 and the XY stage 34. Further, the mask plate 52 is provided with an opening through which only the lens 17 to be inspected is exposed in front of the CCD area sensor 37, and is emitted from the transmissive dark field illumination 41 and the transmissive bright field illumination 43. Light is applied to the lens 17 to be inspected through this opening. In addition, the distance between the mask plate 52 and the XY stage and the size of the opening of the mask plate 52 are determined so as not to cause so-called vignetting. On the other hand, the mask plate 52 blocks light from the transmissive dark field illumination 41 and the transmissive bright field illumination 43 irradiated to the other lenses 17 arranged around the lens 17 to be inspected. Further, the surface of the mask plate 52 is subjected to an antireflection treatment, and the light from the transmission type dark field illumination 41 and the transmission type bright field illumination 43 repeats random reflections and enters the lens 17 to be inspected. prevent.

  The mask plate 53 is provided between the reflective dark field illumination 42 and the XY stage 34. Further, the mask plate 53 is provided with an opening through which only the lens 17 to be inspected is exposed in front of the CCD area sensor 37, and is emitted from the reflective dark field illumination 42 and the reflective bright field illumination 44. Light is applied to the lens 17 to be inspected through this opening. Further, the distance between the mask plate 53 and the XY stage and the size of the opening of the mask plate 53 are determined so as not to cause so-called vignetting. On the other hand, the mask plate 53 blocks light from the reflection type dark field illumination 42 and the reflection type bright field illumination 44 that is irradiated to the other lenses 17 arranged around the lens 17 to be inspected. Further, the surface of the mask plate 53 is subjected to antireflection treatment, and the light from the reflective dark field illumination 42 and the reflective bright field illumination 44 repeats random reflections and enters the lens 17 to be inspected. prevent.

  As shown in FIG. 3, the appearance inspection apparatus 22 includes a control unit 56, a basic image processing unit 57, a reference image creation unit 58, a difference image creation unit 59, an evaluation unit 61, a RAM 62, a ROM 63, a data communication unit 64, and the like. Is done.

  The control unit 56 comprehensively controls each unit of the appearance inspection apparatus 22 via the data bus 66. Further, the control unit 56 reads out a control program stored in the ROM 63 and controls each part of the appearance inspection apparatus 22 according to this. For example, the control unit 56 includes the XY stage 34, the ID scanner 36, the uniaxial stage 48, the transmission type dark field illumination 41, the reflection type dark field illumination 42, the transmission type bright field illumination 43, the reflection type bright field illumination 44, The CCD area sensor 37 is controlled using a corresponding driver according to the control program of the visual inspection apparatus 22. Further, for example, the control unit 56 specifies the position in the inspection tray 16 of the lens 17 to be inspected based on the amount of movement of the XY stage 34, and stores this in the RAM 62.

  The ID scanner 36 reads the ID 33 of the inspection tray 16 moved to the ID scan position, and registers it in the database 28 constructed in the server 21. The IDs 33 registered in the database 28 are managed together with images used for inspection of each lens 17 and inspection results.

  The CCD area sensor 37 is composed of an imaging lens including a zoom lens, a focus lens, a diaphragm, and the like, and a CCD disposed behind the imaging lens. The CCD area sensor 37 is in the inspection position while being illuminated by any one of the transmission type dark field illumination 41, the reflection type dark field illumination 42, the transmission type bright field illumination 43, and the reflection type bright field illumination 44. The lens 17 is imaged. At this time, the light from the lens 17 to be inspected is imaged on the light receiving surface of the CCD by the imaging lens, and photoelectrically converted into an analog imaging signal proportional to the amount of light received by each pixel of the CCD.

  Note that the zoom and focus of the imaging lens, the aperture area of the diaphragm, the electronic shutter speed of the CCD, etc. are determined in advance according to the shape of the lens 17 to be inspected. Is done.

  The basic image processing unit 57 removes noise from the analog imaging signal output from the CCD area sensor 37, amplifies the signal, and converts the analog imaging signal into digital image data. The digital image data thus obtained from the CCD area sensor 37 is temporarily stored in the RAM 62 as an original image.

  Hereinafter, the original image of the lens 17 illuminated by the transmission type dark field illumination 41 is referred to as a first original image 67. Similarly, the original image of the lens 17 illuminated by the reflective dark field illumination 42 is the second original image 68, the original image of the lens 17 illuminated by the transmissive bright field illumination 43 is the third original image 69, and the reflective bright image. The original image of the lens 17 illuminated by the field illumination 44 is referred to as a fourth original image 70, respectively.

  The reference image creation unit 58 creates a reference image that serves as a reference for a non-defective product based on an original image obtained by imaging a lens that has been determined to be non-defective by the visual inspection device 22 or visual inspection (hereinafter, a non-defective lens). For example, when a plurality of non-defective lenses are illuminated by the transmission type dark field illumination 41 and the respective first original images are obtained, the reference image creating unit 58 averages the luminance for each pixel of these first original images. . Then, a first average luminance image is created in which the average luminance of the first original image of the non-defective lens is the luminance of each pixel. At the same time, the reference image creation unit 58 calculates a standard deviation for each pixel from the first original image 67 of the non-defective lens, and creates a first standard deviation image using the standard deviation as luminance data of each pixel. . Further, the reference image creation unit 58 uses the obtained first average luminance image and first standard deviation image as a reference for a non-defective product when shooting while illuminating with the transmission type dark field illumination 41. Is stored in the RAM 62. The first reference image 71 is, for example, a pixel corresponding to α times the first standard deviation image for the first average luminance image, where α is a predetermined number according to the characteristics such as the shape of the lens to be inspected. It is created by adding each.

At the same time, the reference image creating unit 58 creates a third average luminance image and a third standard deviation image using the third original images 69 of the plurality of non-defective lenses, and the transmission type bright field illumination 43 based on these images. A third reference image 73 used as a reference for a non-defective product when shooting while illuminating is created and stored in the RAM 62.

  On the other hand, when the second original image 68 of the lens 17 to be inspected is acquired, the reference image creation unit 58 applies the luminance data of the target pixel to a certain pixel (referred to as the target pixel) of the second original image 68. Then, the luminance data of a predetermined range of pixels around which attention is given is averaged to calculate local average luminance data. This local average luminance data is calculated for all the pixels of the second original image 68. Then, the reference image creation unit 58 temporarily stores the second local average image using the local average luminance data as the luminance data of each pixel in the RAM 62 as the second reference image 72.

  Similarly, when the fourth original image 70 of the lens 17 to be inspected is acquired, the reference image creation unit 58 creates a fourth local average image from the fourth original image 70, and uses this as a fourth reference image 74. Is temporarily stored in the RAM 62.

  The first reference image 71 and the third reference image 73 are performed once when the inspection of the lens is started, and the same reference images 71 and 73 are used for the subsequent inspection. On the other hand, the second reference image 72 and the fourth reference image 74 are created for each of the lenses 17 to be inspected.

  The difference image creating unit 59 reads the first original image 67 and the first reference image 71 of the lens 17 to be inspected from the RAM 62, calculates the difference between the pixels, and each pixel has the same value as the difference. One difference image 76 is created and stored in the RAM 62. Similarly, the difference image creation unit 59 subtracts the second reference image 72 from the second original image 68 to subtract the second difference image 77, and subtracts the third reference image 73 from the third original image to obtain a third difference image 78. , The fourth reference image 74 is subtracted from the fourth original image, and a fourth difference image 79 is created and stored in the RAM 62.

  As described above, when the difference image creation unit 59 creates the first difference image 76, the center of the lens imaged in the first original image 67 and the center of the lens of the first reference image 71 generally do not match. However, when the lens 17 is photographed, illumination is reflected in the lens 17 captured in the original image according to the shape of the surface of the lens 17. In addition, the illumination is also reflected in the inside of the lens imaged in the reference image. The difference image creation unit 59 calculates the center of the lens imaged in the original image and the reference image by using the illumination reflection according to the shape of the surface of the lens 17, and uses this as the center. A first difference image 76 is created. On the other hand, in the case of the third original image 69 and the third reference image 73 when illuminated by the transmission type bright field illumination 43, the whole is photographed brightly. Therefore, the center position of the lens using the reflected illumination is reflected. Not calculated or identified. However, when the entire lens is projected brightly in this way, there is a luminance distribution according to the shape of the lens surface. Therefore, when creating the third difference image 78, the difference image creation unit 59 calculates the center of the lens 17 that is projected on the third original image, based on the luminance distribution according to the shape of the surface of the lens 17. To do.

  The evaluation unit 61 evaluates the quality of the lens 17 by comparing with a predetermined threshold value for each pixel of the difference image. For example, the evaluation unit 61 compares the value of each pixel of the first difference image with a predetermined reference value, counts the total number of pixels exceeding the reference value, and sets the defect area S1. The reference value used here is determined in advance and stored in the RAM 62. Then, the evaluation unit 61 compares the defect area thus obtained with a first threshold value that is set in advance and stored in the RAM 62. The first threshold used here is composed of an upper limit value U1 and a lower limit value L1.

  That is, the first threshold value 81 is a combination of threshold values that define a range, and is determined in advance before the start of the inspection. The value of the first threshold value 81 is determined according to the inspection result such as the defective product rate of the lens 17, and is determined independently for each of the upper limit value U1 and the lower limit value L1. Such adjustment of the threshold value is common to the following second to fourth threshold values, and the first to fourth threshold values are independently determined and the upper limit value and the lower limit value of each threshold value are determined independently.

  When the defect area S1 is smaller than the lower limit value of the first threshold (S1 <L1), the evaluation unit 61 determines that the lens 17 is good. On the other hand, when the defect area is larger than the upper limit value of the first threshold (S1> U1), the evaluation unit 61 determines that the lens 17 is defective. When the defect area S1 is greater than or equal to the lower limit value L1 of the first threshold 81 and less than or equal to the upper limit value U1 (L1 ≦ S1 ≦ U1), the evaluation unit 61 determines that the lens 17 needs to be reinspected. To do. Thus, the determination of the lens 17 obtained from the comparison between the first difference image 76 and the first threshold value 81 is stored in the RAM 62 as the first determination result.

  Similarly, the evaluation unit 61 counts the defect area S2 of the second difference image and compares it with the second threshold value 82 (upper limit value U2, lower limit value L2). Determine whether any of the re-examination. The determination result of the lens 17 obtained based on the comparison between the second difference image 77 and the second threshold value 82 is stored in the RAM 62 as the second determination result.

  Similarly, the evaluation unit 61 counts the defect area S3 of the third difference image and compares it with the third threshold value 83 (upper limit value U3, lower limit value L3), so that the lens 17 is good, defective, or necessary. Determine whether any of the re-examination. The determination result of the lens 17 obtained based on the comparison between the third difference image 78 and the third threshold value 83 is stored in the RAM 62 as the third determination result.

  Similarly, the evaluation unit 61 counts the defect area S4 of the fourth difference image, and compares this with the fourth threshold value 84 (upper limit value U4, lower limit value L4). Determine whether any of the re-examination. The determination result of the lens 17 obtained based on the comparison between the fourth difference image 79 and the fourth threshold value 84 is stored in the RAM 62 as the fourth determination result.

  And the evaluation part 61 determines final evaluation of the lens 17 based on the above-mentioned 1st-4th determination result. That is, when the first to fourth determination results include a defect determination, the evaluation unit 61 evaluates the lens 17 as a defective product. On the other hand, when the lens 17 is not a defective product, if the first to fourth determination results include reinspection required, the evaluation unit 61 evaluates the lens 17 as a reinspection required product. And when it is not inferior goods and a reexamination required product, the evaluation part 61 evaluates the lens 17 as a non-defective product.

  The evaluation of the lens 17 by the evaluation unit 61 is associated with the ID 33 of the inspection tray 16, the position in the inspection tray 16, the first to fourth difference images used for evaluation, and the like in the database of the server 21. be registered.

  The RAM 62 is a working memory, and stores the ID 33 of the inspection tray 16, the position of the lens 17 to be inspected in the inspection tray 16, the original image, the reference image, the difference image, the threshold value, the reference value, and the like. The ROM 63 is a memory that stores various settings of the appearance inspection apparatus 22, control programs, various drivers, and the like.

  The data communication unit 64 connects the server 21 provided outside the appearance inspection device 22 and the appearance inspection device 22 via a LAN or the like. Therefore, the evaluation of the lens 17 is built in the server 21 through the data communication unit 64 together with the ID 33 of the inspection tray 16, the position of the lens 17 in the inspection tray 16, the first to fourth original images used for the evaluation, and the like. The registered database 28 is registered.

  Hereinafter, the operation of the appearance inspection apparatus 22 configured as described above will be described. As shown in FIG. 4, when the inspection tray 16 on which the lens 17 to be inspected is placed is set in the appearance inspection apparatus 22, the inspection tray 16 is moved to the ID scan position by the XY stage 34, and the inspection tray 16 is moved by the ID scanner 36. 16 IDs are read. Then, the lens 17 to be inspected is moved directly below the CCD area sensor 37, and the inspection of the lens 17 is started.

  First, the transmission type dark field illumination 41 is moved directly below the lens 17 to be inspected, and an image (first original image) of the lens 17 to be inspected in a state illuminated by the transmission type dark field illumination 41 is acquired. A first difference image 76 is created from the first original image and the first reference image 71. Then, based on the first difference image 76, the quality of the lens 17 is determined to be good, defective, or reexamination required (first determination result).

  When the first determination result is obtained in this manner, the appearance inspection apparatus 22 switches the illumination to the reflective dark field illumination 42, and an image (second original image) of the lens 17 is acquired. A second difference image 77 is created from the second original image and the second reference image 72. And based on the 2nd difference image 77, the quality of the lens 17 is determined in any of a quality, defect, and a reexamination required (2nd determination result).

  Further, when the second determination result is obtained, the appearance inspection apparatus 22 switches the illumination to the transmission type bright field illumination 43. That is, the uniaxial stage 48 is driven, the transmission type dark field illumination 41 is retracted from directly below the lens 17, and the transmission type bright field illumination 43 is moved directly below the lens 17. Then, the appearance inspection apparatus 22 acquires an image (third original image) of the lens 17 while illuminating the lens 17 with the transmission type bright field illumination 43. A third difference image 78 is created from the third original image and the third reference image 73. And based on the 3rd difference image 78, the quality of the lens 17 is determined in any of a quality, defect, and a reexamination required (3rd determination result).

  When the third determination result is obtained, the appearance inspection apparatus 22 switches the illumination to the reflective bright field illumination 44 and acquires the fourth original image. Then, a fourth difference image 79 is created from the fourth original image and the fourth reference image 74. Then, based on the fourth difference image, the quality of the lens 17 is determined as either good, defective, or reexamination required (fourth determination result). When the lens 17 is photographed while illuminating with the reflection type bright field illumination 44, the transmission type dark field illumination 41 is arranged at a position facing the CCD area sensor 37.

  When the first to fourth determination results are obtained in this way, the appearance inspection apparatus 22 determines the evaluation of the lens 17 based on these determination results. At this time, if at least one defect determination is included in the first to fourth determination results, the lens 17 is evaluated as a defective product. In addition, when the first to fourth determination results do not include a defect determination and a re-examination determination is necessary, the lens 17 is evaluated as a re-inspection product. On the other hand, the lens 17 is non-defective when the first to fourth determination results do not include both the defect determination and the reexamination determination required, that is, when all the first to fourth determination results are good. It is evaluated. The evaluation of the lens 17 is stored in the server 21 that manages the inspection together with the ID of the inspection tray 16, the position in the inspection tray, the difference image used for the inspection, and the like.

  When the evaluation of one lens 17 is determined in this way, the XY stage 34 is moved, and the same inspection as described above is performed on the other lenses.

  In addition, when all the lenses 17 arranged on the inspection tray 16 are evaluated as a non-defective product, a defective product, or a re-inspected product by the appearance inspection device 22, the inspection tray 16 is moved to the tray storage 26. .

  Further, among the lenses 17 inspected by the appearance inspection device 22, the lens 17 evaluated as a re-inspection product is separately re-inspected by a re-inspection device 23 described later, and finally a non-defective product or a defective product is determined. It is classified as either.

  Further, as described above, when obtaining an image of the lens 17 to be inspected using the transmission type dark field illumination 41, the reflection type dark field illumination 42, the transmission type bright field illumination 43, and the reflection type bright field illumination 44, respectively. The types of defects that can be accurately evaluated for each illumination differ. For example, as shown in FIG. 5, the lens 17 immediately before shipment may have various defects such as scratches 91, bumps 92, scratches 93, chips 96, missing coat 103, and hour 104. Of course, these various defects have different causes and characteristics.

  The scratches 91 are linear scratches generated on the surface of the lens 17, and the bumps 92 are dot-shaped scratches generated on the surface of the lens 17. The stain 93 is dirt that spreads over and adheres to the surface of the lens 17. In addition, the chip 96 is a defect having a shape in which the peripheral edge of the lens 17 is missing. The coating loss 103 is a defect in the antireflection coating and is a hole in the coating layer. Further, the hour 104 is a defect which is generated inside or on the surface of the lens 17 mainly due to air bubbles mixed during molding, and has a refractive index different from that of other normal portions.

  When the lens 17 in which such a defect has occurred is photographed by illuminating with the transmission type dark field illumination 41 and inspected, the scratches 91 and the irregularities 92 are accurately evaluated. For example, as shown in FIG. 6, in the first original image 67, scratches 91, lumps 92, scratches 93, and hour 104 are easily recognized visually. On the other hand, the chip 96 and the missing coat 103 may be difficult to recognize depending on the position, angle, defect degree, and the like. For this reason, as the first threshold value 81 to be compared with the defect area S1 of the first difference image 76, an optimal value is selected in order to detect the scratch 91 and the irregularity 92. Note that the blur 93 is more clearly recognized in the second original image 68 by the reflective dark field illumination 42 and is evaluated based on the second difference image 77 as described later. The millet 104 is also recognized with high accuracy in the first original image 67, but is recognized with high accuracy in the second original image 68 with an accuracy equal to or higher than this, and is evaluated based on the second difference image 77.

  The first original image 67 has an illumination reflection 106 generated according to the shape of the surface of the lens 17. In the first difference image 76, the illumination reflection 106 is compared with a defect. The brightness is sufficiently small. Therefore, the inspection of defects automatically performed is not greatly affected, and even a defect on the illumination reflection 106 is evaluated substantially accurately. The same applies to other difference images.

  In addition, when the lens 17 is illuminated with the reflection type dark field illumination 42 and photographed and inspected, the stain 93 and the hour 104 are evaluated with high accuracy. For example, as shown in FIG. 7, in the second original image 68, scratches 91, blisters 92, scratches 93, and hour 104 are easily recognized visually. In particular, the stain 93 is detected almost certainly by the second difference image 77. On the other hand, the missing coat 103 may be difficult to recognize depending on the position and angle where these occur and the degree of defects. In addition, with respect to the scratch 91 and the irregularity 92, the first original image 67 by the transmission type dark field illumination 41 is recognized more clearly. For these reasons, the second threshold value 82 to be compared with the defect area S2 of the second difference image 77 is selected to be an optimum value for evaluating the stain 93 hour 104.

  In addition, when the lens 17 is illuminated with the transmissive bright field illumination 43 to take an image and inspect, the chip 96 is evaluated with high accuracy. For example, as shown in FIG. 8, in the third original image 69, the chip 96 and the hour 104 are easily recognized visually. On the other hand, the scratches 91, bumps 92, and missing coats 103 may be difficult to recognize depending on the positions and angles at which these occur and the degree of defects. Further, the blur 93 is hardly recognized in the third original image 69. For these reasons, the third threshold value 83 to be compared with the defect area S3 of the third difference image 78 is selected to be an optimal value for evaluating the chip 96.

  In addition, when the lens 17 is illuminated with the reflection type bright field illumination 44 and photographed and inspected, the missing coat 103 is evaluated with high accuracy. For example, as shown in FIG. 9, the missing coat 103 is easily visually recognized in the fourth original image 70. On the other hand, the scratches 91 and the bumps 92 may be difficult to recognize depending on the position and angle where these occur and the degree of defects. Further, the scratch 93 and the hour 104 are hardly recognized in the fourth difference image. For these reasons, an optimum value is selected as the fourth threshold value 84 to be compared with the defect area S4 of the fourth difference image 79 in order to accurately evaluate the missing coat 103.

  As described above, the appearance inspection apparatus 22 includes the transmission type dark field illumination 41, the reflection type dark field illumination 42, the transmission type bright field illumination 43, and the reflection type bright field illumination 44 for one CCD area sensor 37. Various types of illumination are provided, and the lens 17 is photographed and inspected using each of them. Therefore, the appearance inspection apparatus 22 can be downsized as compared with the appearance inspection apparatus provided with a plurality of cameras and illuminations on the inspection line. In addition, since the number of cameras and illuminations is the minimum, the appearance inspection apparatus 22 can be provided at a low cost.

  In addition, as described above, the appearance inspection apparatus 22 performs inspection based on images captured under the four types of illumination conditions, and therefore, defects, such as the surface of the lens 17, are detected in position, size, angle, and the like. It is possible to inspect without leakage regardless of individual characteristics.

  Furthermore, since the defect of the lens 17 is determined from the image under each illumination condition, and these are combined to determine the final evaluation of the lens 17, the evaluation criteria are not inclined to the evaluation of any defect. The quality of the lens 17 can be correctly evaluated by fully considering any of various defects that occur in the defect of the lens 17.

  Furthermore, since the type of defect to be inspected is assigned based on each illumination condition, the threshold value can be easily set according to the feature of the defect generated in the lens 17. In addition, since the evaluation is performed using the threshold value set according to the feature of the defect detected under each illumination condition, the defect can be inspected accurately without omission, and the stability and reliability of the inspection are improved.

  Further, as described above, the evaluation of the lens 17 under various illumination conditions is performed by comparing the defect area with a threshold value according to the illumination condition. The threshold value used is composed of an upper limit value and a lower limit value, and a range is designated. It is a threshold to do. Therefore, when evaluating with a single threshold value, such as over-inspection that overestimates the defect and makes the lens 17 defective or erroneous inspection that makes the evaluation lens 17 non-defective by reducing the defect, Defects that occur in the difficult range of judgment are prevented, and stable and highly reliable inspection can be performed.

  In addition, the upper and lower threshold values can be set according to the number and characteristics of defective products, so inspection accuracy can be improved even when the product quality is not stable at the initial stage of production of a new product. While ensuring, it is possible to reduce the number of products that are unnecessarily re-inspected and improve inspection efficiency.

  In addition, as described above, the appearance inspection apparatus 22 evaluates the defect based on the difference image that is the difference between the original image and the reference image, and therefore, in the portion where the illumination is reflected according to the shape of the surface of the lens 17. Even a certain defect can be accurately evaluated.

  On the other hand, for lenses that require re-examination that is difficult to determine automatically, re-inspection is performed using the first to fourth original images 67, 68, 69, and 70, compared with visual inspection using a microscope. The presence / absence, degree, and type of defects are easily discriminated, and the re-inspection itself is performed quickly. In addition, when re-inspection is performed using the first to fourth original images 67, 68, 69, and 70, characteristics such as presence / absence, degree, and type of defects become obvious at a glance. The influence on the re-inspection is extremely small, so the inspection quality is stable.

  Furthermore, when re-inspection is performed using the first to fourth original images 67, 68, 69, 70, when the lens 17 is evaluated as a defective product by the re-inspection, many defects that may occur in the future. The cause is easily identified. The causes of defects that may increase as described above are collectively managed and analyzed, so that the causes of defects such as the identification of lots with many defects and the identification of the production process that caused the defects are investigated. Can be prevented and the production efficiency can be improved.

  In addition, it is preferable that each part of the above-described appearance inspection apparatus 22, for example, the light emitting surface of each illumination, the CCD area sensor 37, the inspection tray 16, and the like are subjected to antireflection treatment. By applying anti-reflection treatment to the light emitting surfaces of the transmission type dark field illumination 41, the reflection type dark field illumination 42, the transmission type bright field illumination 43, and the reflection type bright field illumination 44, the light from each illumination becomes messy. It is possible to prevent the inspection accuracy from deteriorating due to unnecessary light that is reflected and reflected and scattered in addition to the defect generated in the appearance of the lens 17 entering the CCD area sensor 37. For the same reason, for example, the mask plate 52 of the appearance inspection apparatus 22 may be provided with a shutter that opens and closes an opening subjected to antireflection treatment. Further, when photographing the lens 17 to be inspected with the reflection type dark field illumination 42 or the reflection type bright field illumination 44, the transmission type dark field illumination 41 may be moved directly below the lens 17 to be inspected. That is, it is possible to prevent the inspection accuracy from being deteriorated by the above-described unnecessary light in the non-light emitting portion 47 of the transmissive dark field illumination 41.

  The appearance inspection apparatus 22 switches between the transmission type dark field illumination 41 and the transmission type bright field illumination 43 by driving the uniaxial stage 48, but is not limited to this, and the transmission type dark field illumination 41 and the transmission type bright field illumination. A light emitting surface common to 43 may be used. For example, as shown in FIG. 10A, a light-shielding plate 113 having the same shape as the non-light-emitting portion 47 is rotated on the front surface of the illumination panel 111 that uniformly emits and extinguishes the entire surface. Switching between visual field illumination and transmissive bright field illumination. That is, when the light shielding plate 113 is retracted from the light emitting surface 112, the illumination panel 111 becomes the transmission type bright field illumination 43, whereas when the light shielding plate 113 is moved onto the light emitting surface 112, the illumination panel 111 is the transmission type dark field illumination. The field illumination 41 is obtained. Further, for example, as shown in FIG. 10B, the light shielding plate 113 may be moved horizontally on the front surface of the illumination panel 111 to switch between transmission-type dark field illumination and transmission-type bright field illumination.

  For example, as shown in FIG. 11, a so-called liquid crystal panel 114 that displays an image or the like can be suitably used as an illumination panel that is commonly used for transmissive dark field illumination and transmissive bright field illumination. The liquid crystal panel 114 has a state where the entire surface of the light emitting surface 116 is quenched (FIG. 11A), a state where the entire surface of the light emitting surface 116 emits light (FIG. 11B), and a central portion of the light emitting surface 116 is not present. The state of partially emitting light (FIG. 11C) can be freely switched so as to become the light emitting unit 117. At this time, the state where the entire surface is extinguished (FIG. 11A) is a state in which the liquid crystal panel 114 is not used. Further, in a state where the entire surface emits light (FIG. 11B), the liquid crystal panel 114 functions as transmissive bright field illumination. Further, the state in which light is partially emitted (FIG. 11C) functions as transmissive dark field illumination.

  Further, when the liquid crystal panel 114 is used as transmissive dark field illumination, the position and size of the non-light emitting portion can be freely changed depending on the size of the lens 17 to be inspected. For example, as shown in FIG. 12A, the optimum size and shape of the non-light emitting portion are determined according to the size of the lens 17 to be inspected and the shape of the curved surface, the distance between the lens 17 to be inspected and the liquid crystal panel 114, and the like. . On the other hand, as shown in FIG. 12B, for example, even when the appearance of the lens 118 having a diameter larger than that of the lens 17 is inspected, the liquid crystal panel 114 has a size of the lens 118 and a curved shape. Depending on the distance between the lens 118 and the liquid crystal panel 114, the size of the non-light emitting portion 119 is changed.

  Thus, when a common light emitting surface is used for transmissive dark field illumination and transmissive bright field illumination, the number of illumination panels can be substantially reduced. Therefore, the appearance inspection apparatus 22 is reduced in size, and further, The appearance inspection device 22 can be provided at a low cost.

  Further, when the liquid crystal panel 114 is used as transmissive dark field illumination and transmissive bright field illumination, the size and shape of the non-light emitting part can be easily and freely selected according to the characteristics of the lens to be inspected, such as size and surface shape. Can be changed.

  Note that the liquid crystal panel 114 may be an LED panel, FED panel, SED panel, CRT, or the like, as long as it can selectively quench a part of the light emitting surface 116.

  The appearance inspection apparatus 22 includes all of the transmission type dark field illumination 41, the reflection type dark field illumination 42, the transmission type bright field illumination 43, and the reflection type bright field illumination 44, but is not limited thereto. For example, when the appearance inspection apparatus 22 is to be provided at a lower cost, the transmission type dark field illumination 41 may not be provided, and the reflection type dark field illumination 42 may be used instead. Therefore, it is difficult to set the second threshold value, and deterioration of inspection accuracy is inevitable. Further, for example, since the appearance inspection apparatus 22 inspects the lens 17 on which the antireflection coating has been applied in advance, a reflection type bright field illumination 44 for mainly detecting the coating loss 103 is provided. However, the reflection type bright field illumination 44 is not necessarily required when the present invention is applied to the lens 17 in a state where the antireflection coating is not applied or an appearance inspection apparatus for inspecting an article which does not require the antireflection coating. . Therefore, when inspecting such an object, it is only necessary to provide three types of illumination, that is, the transmission type dark field illumination 41, the reflection type dark field illumination 42, and the transmission type bright field illumination 43. That is, the transmissive dark field illumination 41, the reflective dark field illumination 42, the transmissive bright field illumination 43, and the reflective bright field illumination 44 have different defect characteristics that can be accurately inspected. The number of illuminations provided in the appearance inspection apparatus 22 may be reduced in accordance with the characteristics of the defects that occur.

  In addition, although the lens 17 is image | photographed and test | inspected in order of the transmission type dark field illumination 41, the reflection type dark field illumination 42, the transmission type bright field illumination 43, and the reflection type bright field illumination 44, it is not restricted to this. That is, the order of illumination used for imaging and inspection can be arbitrarily selected.

  In addition, the quality of the lens is determined simultaneously with the shooting under each illumination condition. However, the present invention is not limited to this, and it is possible to determine the quality of the lens for each image after all the shooting under the four types of illumination conditions is completed. good.

  Furthermore, the above-described appearance inspection apparatus 22 registers the first to fourth original images 67, 68, 69, and 70 in the database 28. However, the present invention is not limited to this, and the difference image is displayed when the lens evaluation is good. May also be registered in the database and used when creating a reference image. In other words, the reference image creation method shown in the above-described embodiment mobile phone is an example, and the same inspection as in the above-described embodiment may be performed based on the reference image created by another method shown in the left diagram. Similarly, the first to fourth difference images may be registered in the database and used for reexamination.

  In addition, when the above-described visual inspection device 22 automatically evaluates a lens, it evaluates the lens based on a value defined as a defect area. However, the present invention is not limited to this. Evaluation may be performed. For example, the lens may be evaluated based on the characteristics of the shape of each defect such as the size and length of the defect, the perimeter, the aspect ratio, the total number of defects detected for one lens, and the like. . In order to further improve the accuracy of the inspection, it is preferable to evaluate the lens by combining these various criteria.

  The appearance inspection apparatus 22 described above will be described by taking the appearance inspection apparatus 22 for inspecting the lens 17 as an example. However, the inspection object is not limited to a lens, and is particularly preferably a transparent article that transmits light to some extent. It may be an opaque article.

A liquid crystal panel can be suitably used for any of the transmission type dark field illumination 41, the reflection type dark field illumination 42, the transmission type bright field illumination 43, and the reflection type bright field illumination 44. Moreover, you may use not only this but another illumination panel and a display. For example, an LED illumination panel in which LEDs are arranged can be turned on and off at high speed, and thus is particularly preferable as illumination used for the appearance inspection device 24. Further, a display using electron emission such as CRT, FET, SED may be used as illumination. That is, any operation principle can be used as long as the lens 17 to be inspected can irradiate light uniformly, and the form of illumination is not limited.

  In the above-described appearance inspection device 22, the result of the appearance inspection of the lens 17 is registered in a database constructed in the server 21, but the present invention is not limited to this, and may be stored in the appearance inspection device 22 itself. Further, it may be output on a paper surface by a printer or the like. Further, it may be output to an inspection result display device or the like.

  In the appearance inspection apparatus 22, white light is preferably used as the light emitted by the transmission type dark field illumination 41, the reflection type dark field illumination 42, the transmission type bright field illumination 43, and the reflection type bright field illumination 44. However, the present invention is not limited thereto, and may be substantially monochromatic light in a specific wavelength range. Furthermore, infrared light or the like may be used as long as the CCD area sensor 37 has a sensitive wavelength range. In addition, each of the transmissive dark field illumination 41, the reflective dark field illumination 42, the transmissive bright field illumination 43, and the reflective bright field illumination 44 may be a different color illumination.

[Re-inspection equipment]
As shown in FIG. 13A, the re-inspection device 23 is a device that re-inspects the lens 17 evaluated as a re-inspection product by the appearance inspection device 22, and includes a monitor 121, a keyboard 122, a mouse 123, and the like. Is done. The monitor 121 displays an image used for reexamination. The keyboard 122 and the mouse 123 are input devices that select items displayed on the evaluation input unit 126.

  As shown in FIG. 13B, the re-inspection device 23 reads the first to fourth original images 67, 68, 69, and 70 of the lens 17 evaluated as a re-inspection product by the appearance inspection device 22 from the server 21. These are arranged on the left side and displayed on the monitor 121. The original image of the reinspected product lens 17 read out from the server 21 by the reinspection device 23 is read out in a predetermined order such as the order of the ID 33 of the inspection tray 16 in which the reinspected product lens 17 is arranged. On the other hand, an evaluation input unit 126 is displayed on the right side of the monitor 121. In the evaluation input unit 126, for example, items indicating all types of defects that can occur in the lens 17 to be inspected are listed and displayed.

  The re-inspection by the re-inspection device 23 is performed by visually comparing the original images of the re-inspected lenses 17 displayed side by side on the left side of the monitor 121. In addition, this re-inspection determines whether the re-inspected lens 17 is good or bad. For example, if the evaluation of the re-inspection product lens 17 is defective, the type of defect occurring in the re-inspection product lens 17 is selected from the items in the evaluation input unit 126. On the other hand, when the evaluation of the reinspected product lens 17 is good, an item indicating a good product is selected from the evaluation input unit 126. It should be noted that such items as the type of defect are selected by a cursor 127 moved by the keyboard 122, a mouse cursor 128, or the like.

  Thus, when items such as the type of defect are selected and the evaluation of the re-evaluated product lens 17 is determined, the re-inspection device 23 evaluates the re-inspected product lens 17 determined by the re-inspection. Register in the database 28.

  While the re-inspection device 23 performs re-inspection, the inspection tray 16 on which the re-inspected product lens 17 is arranged is managed by a tray storage 26 provided at a location different from the re-inspection device 23. Yes.

[Inspection result display device]
As shown in FIG. 14, the inspection result display device 24 is a display device that displays the result of inspecting the appearance of the lens 17, and includes an inspection tray 16, a liquid crystal panel 131, a spacer 132, a guide 133, an ID scanner 134, and the like. Is done.

  The liquid crystal panel 131 includes a display surface 136, a peripheral edge 137, and the like. The display surface 136 includes, for example, a polarizing plate arranged in crossed Nicols and a liquid crystal layer provided so that the liquid crystal is sandwiched between the polarizing plates. The display surface 136 controls the polarization state of light emitted from the internal backlight by changing the voltage applied to the liquid crystal layer, and selectively transmits light for each pixel to display an image or the like. indicate. The liquid crystal panel 131 is longer in the longitudinal direction than the inspection tray 16 and has a size such that a part of the display surface protrudes from the inspection tray 16 when the inspection tray 16 is disposed.

  The display surface 136 includes an inspection result display area 138 and a sorting information display area 139. The inspection result display area 138 displays an image that directly displays the inspection result on the lens 17 by adjusting the color of the light irradiated to the lens 17 through the light projection hole 141 of the spacer 132, including the state of not emitting light. To do. Further, the sorting information display area 139 is provided on the display surface 136 of the portion protruding from the inspection tray 16 when the inspection tray 16 is arranged, and the sorting operation is accurately performed when the lens 17 is sorted. Various information for assisting the sorting operation of the lens 17 according to the inspection result, such as character information for confirming whether or not it is performed, is displayed. In the information displayed in the sorting information display area 139, for example, the number of lenses 17 to be extracted from the inspection tray 16 is displayed. For example, the type of defect of the lens 17 extracted from the inspection tray 16 may be displayed.

  In addition, the peripheral portion 137 is provided with wiring or the like provided for controlling the display surface 136, and is provided so as to protrude upward rather than the display surface 136.

  The spacer 132 is disposed on the liquid crystal panel 131. The spacer 132 is provided with a thickness that is at least approximately the same height as the peripheral edge 137 protruding upward from the display surface 136 when the spacer 132 is disposed on the display surface 136. Further, the light emitting holes 141 are provided in the spacer 132 at the same arrangement interval as the arrangement interval of the counterbore holes 31 (and the through holes 32) of the inspection tray 16. The light projecting hole 141 is positioned almost exactly under the countersink hole 31 when the inspection tray 16 is slid horizontally and disposed on the front surface of the liquid crystal panel 131. Therefore, the light emitted from the display surface 136 with an image or the like displayed thereon passes through the light projection hole 141 and is irradiated to the lens 17 positioned immediately above.

  The spacer 132 is made of an opaque material, and the light passing through the light projecting hole 141 is irradiated only to the lens 17 positioned immediately above, and is not irradiated to the other adjacent lenses 17. In other words, the spacer 132 fills the gap between the display surface 136 and the inspection tray 16, thereby reliably selecting the lens 17 that emits light from the display surface 136, and allowing unnecessary light to enter the adjacent lens 17. prevent.

The guide 133 is provided in parallel with two opposite sides of the liquid crystal panel 131, and a guide that slides the inspection tray 16 on which the lens 17 is disposed horizontally on the front surface of the liquid crystal panel 131 without contacting the liquid crystal panel 131. Become. Therefore, the surface on which the guide 133 supports the lower surface of the inspection tray 16 is provided at a position slightly higher than the surface of the liquid crystal panel 131. Further, the guide 133 is provided with a stopper 142 for properly arranging the inspection tray 16 directly above the inspection result display area 138. This stopper 142 is closed when the inspection tray 16 before the sorting operation is arranged, and the inspection tray 16 is correctly positioned immediately above the inspection result display area 138. On the other hand, when the sorting operation of the lenses 17 arranged on the inspection tray 16 is completed, the lens 17 is opened, and the inspection tray 16 is moved by sliding on the guide 133. The operation of the stopper 142 is performed by an opening / closing mechanism (not shown) such as a motor or a gear.
Further, the operation button 143 is provided on the guide 133. For example, when the operation button 143 is pressed, the sorting operation is advanced to the next stage, and the display content of the sorting information display area 139 is updated depending on the stage of the sorting operation of the lens 17. In addition, the stopper 142 is opened and closed.

  As shown in FIG. 15, the inspection result display device 24 includes a control unit 144, a RAM 146, a ROM 147, a data communication unit 148, an inspection result acquisition unit 151, a display image creation unit 152, and the like.

  The control unit 144 reads out and executes a control program stored in the ROM 147, and comprehensively controls each unit of the inspection result display device 24 via the data bus 150. For example, the ID scanner 134 is controlled using the scanner driver 154 so that the ID 33 of the inspection tray 16 arranged on the liquid crystal panel 131 is read. For example, the control unit 144 causes the liquid crystal panel 131 to display an image or the like via the encoder 156.

  Further, the control unit 144 opens and closes the stopper 142 via the motor driver 157 according to the stage of the sorting operation of the lens 17. Further, the control unit 144 monitors whether or not the operation button 143 is pressed by the button sensor 158. When the operation button 143 is pressed, the control unit 144 opens and closes the stopper 142 according to the stage of the lens 17 sorting operation. In addition, various information displayed in the sorting information display area 139 is updated.

  The RAM 62 is a working memory, and temporarily stores various data generated in each part of the inspection result display device 24. For example, the ID 33 read from the inspection tray 16 disposed on the liquid crystal panel 131 is stored in the RAM 62.

  The ROM 147 is a memory that stores a control program for the inspection result display device 24 and various settings. A communication program with the server 21 is also stored in the ROM 147 and read by the control unit 144. Further, a warning image and warning information (described later) that are read when the position and orientation of the inspection tray 16 are incorrectly arranged are stored in the ROM 147.

  The server 21 is provided independently of the inspection result display device 24 and manages the result of the appearance inspection of the lens 17. The server 21 is provided with a database 28 for collectively managing the results of the appearance inspection of the lenses 17. Each lens 17 is stored in the inspection tray 16 together with the ID 33 of the inspection tray 16 on which the lenses 17 are arranged. The position at which the lens 17 is arranged, the image used at the time of the appearance inspection, the good / bad evaluation of each lens 17, and the type of the defect when there is a defect in the appearance are stored in association with each other.

  The data communication unit 148 transmits / receives various data to / from the server 21 based on instructions from the inspection result acquisition unit 151. The data acquired from the server 21 by the data communication unit 148 is stored in the RAM 62.

  The ID scanner 134 reads the ID 33 that is positioned in front of the ID scanner 134 when the inspection tray 16 is disposed in front of the inspection result display area 138 of the liquid crystal panel 131 and the operation button 143 is pressed. At this time, if the ID 33 of the inspection tray 16 can be read correctly, this is stored in the RAM 62, and if the ID 33 cannot be read correctly, an error code is stored in the RAM 62. Further, the range in which the ID scanner 134 can read the ID 33 of the inspection tray 16 is set narrow. Therefore, when the inspection tray 16 is correctly arranged on the front surface of the inspection result display area 138 and the light projection holes 141 of the spacer 132 and the corresponding lenses 17 are arranged in a substantially straight line, the ID scanner 134 performs the inspection. When the ID 33 of the tray 16 is correctly read and the light projecting hole 141 of the spacer 132 and each lens 17 corresponding thereto are displaced from each other, or the direction in which the inspection tray 16 is disposed is rotated. If the ID 33 of the inspection tray 16 is not located in the reading range of the scanner 134, an error ID is output.

  The inspection result acquisition unit 151 acquires the appearance inspection result of the lens 17 disposed on the inspection tray 16 from the server 21 via the data communication unit 148. That is, the inspection result acquisition unit 151 reads the ID 33 of the inspection tray 16 from the RAM 146, and inquires the server 21 about the result of the appearance inspection of each lens 17 arranged on the inspection tray 16 that displays the inspection result. At this time, the inspection result acquisition unit 151 evaluates the quality of each lens 17 among various data related to the lens 17 stored in the database 28 and the type of defect for the lens 17 evaluated as defective in the appearance inspection. Are obtained from the database 28 and stored in the RAM 146. When the inspection result acquisition unit 151 reads the error ID instead of the ID 33 of the inspection tray 16 from the RAM 146, the inspection result acquisition unit 151 does not inquire the server 21 about the result of the appearance inspection of the lens 17 and the display image creation unit 152 and the selection information. An error signal is output to the creation unit 153.

  The display image creation unit 152 reads out the data of the lens 17 evaluation and the defective type of the defective lens acquired by the inspection result acquisition unit 151 from the RAM 146, and displays the inspection result image displayed on the liquid crystal panel 131 based on the data. (Hereinafter referred to as an inspection result image). The inspection result image has a different color for each portion divided according to the arrangement interval of the lenses 17 of the inspection tray 16. That is, when this inspection result image is displayed in the inspection result display area 138 of the liquid crystal panel 131, the lens 17 positioned immediately above is irradiated with light of different colors depending on the evaluation of each lens 17 and the type of defect. The

  On the other hand, when the display image creation unit 152 receives an error signal from the inspection result acquisition unit 151, the display image creation unit 152 reads a warning image indicating that the inspection tray 16 is misplaced from the ROM 147. When this warning image is displayed in the inspection result display area 138 of the liquid crystal panel 131, it is displayed that the inspection tray 16 is not correctly disposed via each lens 17 disposed on the inspection tray 16.

  Based on the evaluation of the lens 17 acquired by the inspection result acquisition unit 151, the selection information creation unit 153 determines the number of non-defective lenses, the number of defective lenses, the number of defective lenses for each defect type, and the like. Count each. Further, the sorting information creation unit 153 displays the counted number of defective lenses as sorting information in the sorting information display area 139 as sorting information.

  On the other hand, when receiving an error signal from the inspection result acquisition unit, the selection information creation unit 153 reads warning information indicating that the inspection tray 16 is incorrectly arranged from the ROM 147 and displays the warning information in the selection information display area 139.

  Hereinafter, the operation of the test result display device 24 configured as described above will be described. As shown in FIG. 16, the inspection tray 16 that has undergone the appearance inspection is carried out from the sorting standby place where the lens 17 is placed and is slid onto the liquid crystal panel 131 and placed on the inspection result display device 24. .

  At this time, if the position and orientation of the inspection tray 16 are mistakenly arranged in the inspection result display device 24, the inspection result display device 24 displays a warning image in the inspection result display area 138 and also in the sorting information display area 139. A message indicating that the inspection tray 16 is incorrectly arranged is displayed.

  On the other hand, the ID 33 of the inspection tray 16 arranged on the inspection result display device 24 is read. The evaluation of the lens 17 managed in association with the ID 33, the type of defect, and the like are acquired from the server 21. That is, the evaluation of each lens 17 arranged on the inspection tray 16 and the type of defect are acquired.

  Further, an inspection result image having a different color is created for each portion divided according to the arrangement interval of the lenses 17 on the inspection tray 16 and the evaluation of each lens 17 and the type of defect, and this inspection result image is inspected. It is displayed in the result display area 138.

  Then, each lens 17 arranged on the inspection tray 16 transmits light from the liquid crystal panel 131 to determine whether each lens 17 is good or bad, and if the lens 17 is defective, the type of defect is light. It is displayed by the color. At the same time, the number of defective lenses to be extracted is displayed in the sorting information display area 139.

  When the clearly displayed defective lenses are all extracted from the inspection tray 16 and the operation button 143 is pressed, the stopper 142 is opened, and the inspection tray 16 in which only the non-defective lenses 17 remain is slid and moved. And taken out from the inspection result display device 24. The selected non-defective lenses 17 are taken out from the inspection tray 16 and individually packaged before shipment.

  Specifically, as shown in FIG. 17A, assuming that 25 lenses 17 are arranged in 5 columns × 5 rows on the inspection tray 16, the inspection result display device 24 displays the 25 lenses. Only the defective lens 17 is displayed by emitting light. At this time, as shown in FIG. 17B, the defective surface of the defective lens 17 is displayed on the display surface 136 of the liquid crystal panel 131 for each region divided according to the arrangement interval of the lenses 17 of the inspection tray 16. Depending on the type, an inspection result image in which different colors are arranged is displayed.

  For example, red is displayed immediately below the defective lens 161a in which the type of defect is a linear scratch generated on the surface of the lens. Therefore, the defective lens 161a is displayed in red as a result, and the defective lens 161a is a defective product, indicating that it is to be extracted, and at the same time, clearly indicating that the type of defect is a scratch. .

  Further, for example, blue is displayed immediately below the defective lens 161b in which the type of defect is an antireflection coating missing, that is, a so-called coating missing. Accordingly, the defective lens 161b is displayed in blue as a result, indicating that the defective lens 161b is a defective product and to be extracted, and at the same time, clearly indicating that the type of defect is missing coat. The

  Further, for example, green is displayed immediately below the defective lens 161c, which is a so-called “fog”, in which the types of defects spread and adhere to the surface of the lens. Therefore, the defective lens 161c is displayed in green as a result, indicating that the defective lens 161c is a defective product and is an object to be extracted, and at the same time clearly indicating that the type of defect is dirty. The

  On the other hand, a so-called black color which is not any color is displayed immediately below the non-defective lens 17. That is, the non-defective lens 17 does not emit light, indicating that the non-defective lens 17 is non-defective and not to be extracted.

  Further, it is displayed that the defective lenses 161a, 161b, 161c are to be extracted, and at the same time, in the selection information display area 139, for example, the total number 162 of defective lenses to be extracted from the inspection tray 16 is displayed. The total number of defective lenses to be extracted displayed in the selection information display area 139 is compared with, for example, the number of times the extraction operation has been performed to confirm whether the extraction operation has been performed without omission. Used.

  On the other hand, when the direction of the inspection tray 16 is rotated 180 degrees, the ID 33 of the inspection tray 16 is not located within the reading range of the ID scanner 134. In such a case, for example, as shown in FIG. 18, a red warning image is displayed in the inspection result display area 138 every predetermined time. Accordingly, when viewed from above the inspection tray 16, the lens 17 disposed on the inspection tray 16 blinks in red and black every predetermined time, indicating that the arrangement or orientation of the inspection tray 16 is incorrect. At the same time, warning information 163 indicating that the inspection tray 16 is misplaced is displayed in the sorting information display area 139. In this way, the inspection result display device 24 informs that the inspection tray 16 is misplaced.

  Moreover, such warning display is not only when the direction of the inspection tray 16 is wrong, but also when the inspection result is displayed without the inspection tray 16 reaching the stopper 142, for example, the projection hole of the spacer 132. In the case where 141 and the lens 17 of the inspection tray 16 are shifted from each other, a warning is displayed in the same manner.

  As described above, the inspection result display device 24 can display the result of the appearance inspection of the lens 17 arranged on the inspection tray 16 directly and clearly on the lens 17 to be selected.

  Further, since the inspection result display device 24 clearly distinguishes and displays the different colors according to the type of defect of the defective lens to be displayed, complicated work such as sorting according to the type of defect is facilitated. be able to.

  Furthermore, since the inspection result display device 24 displays the inspection result and also displays appropriate information for confirming whether or not the sorting operation is performed correctly, it is possible to reduce human errors in the sorting operation. it can.

  Further, if the shape of the inspection tray 16 is changed and the division of the image displayed in the inspection result display area 138 is changed accordingly, the inspection result display device 24 can be easily used for objects of different sizes and shapes. Can do. That is, the function of the inspection result display device 24 can be used for a wide variety of items without depending on a specific article, its size, shape, or the like. Therefore, since it is not a dedicated device for a specific article, replacement of the device itself, replacement of parts, etc. can be easily performed at low cost.

  Furthermore, since the inspection result display device 24 arranges the spacer 132 between the liquid crystal panel 131 and the inspection tray 16, it prevents the light emitted from the inspection result display area 138 from entering other than the lens 17 directly above, It is possible to effectively prevent so-called misidentification that erroneously determines an adjacent lens as a defective lens. That is, the inspection result display device 24 can accurately display the position of the defective lens without being affected by the position or physique of the sorting worker.

  On the other hand, when the entire length of the through-hole 32 is increased by increasing the thickness of the inspection tray 16, only light irradiated from directly below the lens 17 in the inspection result display area 138 reaches the lens 17, and the inspection result display area 138 The light irradiated obliquely from the adjacent portion does not reach this lens 17. However, when the inspection tray 16 is made thicker in this way, the weight and volume increase, and the original function of the inspection tray 16 that disposes and moves the lens 17 is impaired. Therefore, in order to prevent misidentification as described above, it is preferable to arrange the spacer 132 like the inspection result display device 24.

  In general, it is not assumed that the display surface 136 of the liquid crystal panel 131 is used by placing an object (such as the inspection tray 16), and such a method of use tends to damage the liquid crystal panel 131. However, since the inspection result display device 24 arranges the spacer 132 between the liquid crystal panel 131 and the inspection tray 16 as described above, the display surface 136 and the moving inspection tray 16 are not in direct contact with each other. Even if it is repeatedly used repeatedly, it can be prevented that the display surface 136 of the liquid crystal panel 131 is damaged by the influence of dust or the like sandwiched therebetween. That is, the inspection result display device 24 can improve durability by using the spacer 132.

  If the inspection tray 16 is placed on the display surface 136 of the liquid crystal panel 131 from above, the liquid crystal panel 131 that is not supposed to be loaded with such pressure is also easily damaged. However, since the inspection result display device 24 slides the inspection tray 16 horizontally along the guide 133 and arranges it on the front surface of the liquid crystal panel 131, the inspection tray 16 is disposed on the front surface of the liquid crystal panel 131 from above. Compared to the case, the possibility of the liquid crystal panel 131 being damaged can be reduced.

  In the above-described inspection result display device 24, the light projection hole 141 is provided in the spacer 132. However, when the target for displaying the inspection result is a lens, as shown in FIG. It is preferable that a light projecting lens 164 for adjusting the focal length of the lens for displaying the inspection result is disposed in the light projecting hole 141 of the spacer 132.

  When the display of the inspection result is a lens, the light emitted from the liquid crystal panel 131 is refracted by the lens 17. Therefore, if the light projection lens 164 is not provided in the light projection hole 141, for example, depending on the curved surface shape of the lens 17, only the central portion 167 of the lens 17 is the liquid crystal panel 131 as shown in FIG. Result in the same color. As described above, when the inspection result is displayed on only a part of the lens 17, the display is not necessarily easy to see, and may cause an oversight in the sorting operation.

  On the other hand, when the light projection lens 164 for adjusting the focal length of the lens 17 is disposed in the light projection hole 141 located below the lens 17, the inspection result is displayed on substantially the entire lens 17, as shown in FIG. Is done.

  As described above, when the target of displaying the inspection result is an optical device such as a lens and it is not always possible to display the inspection result that is easy to see by simply irradiating light, the focal length and refractive index of the optical device are displayed. Considering optical characteristics such as the above, it is possible to make it easy to see by arranging the light projection lens 164 in the light projection hole 141 of the spacer 132.

  In addition, although the above-described inspection result display device 24 simultaneously displays defective lenses of different types of defects in one inspection result display, the inspection result is divided into several times for each defect type. It may be displayed and the sorting operation may be performed.

  As shown in FIG. 20A, for example, all the defective lenses with defective coating 166a are displayed, and these are extracted. At this time, the sorting information display area 139 displays the total number 168a of defective lenses 166a caused by missing coats. When the operation of removing the defective lens 166a due to the missing coat is completed and the operation button 143 is pressed, for example, as shown in FIG. All the defective lenses 166b, which are so-called chipped parts, are displayed and removed. At this time, the information in the selection information display area 139 is updated, and the total number 168b of defective lenses 166b caused by chipping is displayed. Further, similarly, defective lenses having other types of defects are also displayed in order and extracted.

  In this way, it is displayed in order according to the type of defect of the defective lens, and when these are extracted, it is almost conscious of what kind of defect the defective lens to be extracted is evaluated as defective. Instead, the user can concentrate on the work of simply extracting the displayed items. That is, it is possible to reduce the burden on the sorting worker and to prevent human errors in the sorting operation.

  The above-described inspection result display device 24 displays different types of defective defective lenses in different colors. However, the present invention is not limited to this, and any defective lens or non-defective lenses can be displayed due to any defect. You may display with the same color. For example, when displaying an inspection result of an appearance inspection performed when a stable mass production system is established, defective products caused by causes that cannot be removed in practice are selected. Under such circumstances, it is not always necessary to select according to the type of defect of the defective lens, so it is only necessary to clearly display the distinction between the non-defective product and the defective product. Therefore, when such a display that is not necessarily distinguished according to the type of defect is not required, only defective products (non-defective products) may be simultaneously displayed in the same color that is easy to recognize.

  The above-described inspection result display device 24 shows an example in which the total number of lenses to be extracted is displayed as information to be displayed in the sorting information display area 139. However, the present invention is not limited to this, and other useful information necessary for the sorting operation is shown. Information may be displayed in the sorting information display area 139. For example, the ID 33 of the inspection tray 16 that displays the inspection result, the breakdown of defect types of defective lenses, and the like may be displayed in the selection information display area 139.

  In addition, although the above-described inspection result display device 24 shows an example of displaying the result of inspecting the appearance of the lens, the present invention is not limited thereto, and the result of the appearance inspection of another transparent article may be displayed. Further, the inspection type is not limited to the appearance inspection, and the inspection result display device 24 can be used even for inspection results of various performance inspections (such as optical characteristics of the lens).

  The above-described inspection result display device 24 irradiates light using the liquid crystal panel 131 when displaying the inspection result of each lens. However, the present invention is not limited to this, and other illuminations and displays may be used. . For example, an LED display in which LEDs are arranged may be used, and a display using electron emission such as CRT, FET, SED, or the like may be used. That is, the form of illumination and display is not limited as long as each of the arranged lenses can be irradiated with light according to each inspection result.

  Further, in the above-described inspection result display device 24, the liquid crystal panel 131 can be displayed in full color, but the present invention is not limited to this, and it is not always necessary to display in color. For example, as described above, in a situation where distinction according to the type of defect is not required, for example, a liquid crystal panel may be used as long as it can be switched on and off, a display in which monochromatic LEDs are arranged, etc. Can be suitably used.

  The above-described inspection result display device 24 has a mechanism for detecting whether or not the inspection tray 16 is correctly arranged on the inspection result display device 24 based on the result of reading the ID 33 of the inspection tray 16 by the ID scanner 134. However, the present invention is not limited to this, and a mechanism for detecting the position and orientation of the inspection tray 16 may be provided independently of the ID scanner 134.

  In addition, if the inspection tray 16 is misplaced, the inspection result display device 24 described above blinks the inspection result display area 138 and displays warning information in the selection information display area 139 so that the position of the inspection tray 16 is displayed. Although the warning is displayed that the orientation is wrongly arranged, the method of issuing the warning is not limited to this. For example, the warning may be displayed by displaying an image of a color indicating the warning in the inspection result display area 138. Furthermore, the lens 17 may be turned on and blinked so that a predetermined warning pattern is obtained. In addition, for example, it is not always necessary to simultaneously display the warning information in the sorting information display area 139 and the warning image in the inspection result display area 138, and either of the inspection trays 16 is misplaced. You may display.

  The above-described inspection result display device 24 displays the result of the appearance inspection of the lens 17 that transmits light, but is not limited to this, the performance of the non-optical device such as an opaque article or an electronic device, and the appearance inspection. Also when displaying a result, the test result display device 24 of the present invention can be suitably used. For example, by providing a hole for allowing light from the liquid crystal panel 131 to pass around a portion of the inspection tray 16 where the article is placed, the inspection result display device 24 easily displays various inspection results of the opaque article. be able to.

  The above-described inspection result display device 24 acquires the result of the appearance inspection of the lens 17 from the server 21 according to the ID 33 of the inspection tray 16, but is not limited to this, and without the server 21 or the like, The inspection result may be acquired by directly connecting to the appearance inspection device 22. Such a connection is effective when displaying the inspection result simultaneously with the appearance inspection.

  In the above-described embodiment, the operation button 143 for sequentially proceeding with the operation and the sorting operation of the inspection result display device 24 is provided. However, the operation button 143 is not limited thereto, and an operation unit for operating the inspection result display device 24 in more detail is provided. Also good.

  The above-described inspection result display device 24 can display the inspection result again on the inspection tray 16 once the sorting operation has been completed. However, the present invention is not limited to this. The inspection result may not be displayed again on the inspection tray 16 that has been completed. For example, when the sorting operation for the lens 17 is completed, the ID 33 of the inspection tray 16 for which the sorting operation for the lens 17 is completed is stored in the RAM 146 as the completed tray data. When the ID 33 of the inspection tray 16 is read by the ID scanner 134, the processed tray data is compared with the read ID 33, and when the same ID 33 is included in the processed tray data. The inspection result may not be displayed.

  Further, for example, the server 21 is notified of the ID 33 of the inspection tray 16 for which the lens selection operation has been completed, and is registered in the database 28. Then, when the inspection result of the lens is again requested for the same ID 33 from the inspection result display device 24, the server 21 outputs only data indicating that the work has been completed, so that the inspection result associated with the same ID 33 is not read out. May be.

  By performing such setting, double work can be prevented. Further, when performing such setting, when reusing the inspection tray 16, it is necessary to assign an ID different from the previous one.

  As described above, the operation of the appearance inspection system 10 including the appearance inspection device 22, the re-inspection device 23, the inspection result display device 24, and the like will be described. As shown in FIG. 21, when the lens 17 arranged on the inspection tray 16 is inspected by the appearance inspection device 22, the lens 17 is evaluated as a non-defective product, a defective product, or a re-inspected product. This evaluation is registered in the database 28 of the server 21 together with the ID 33 of the inspection tray 16 and the original image used by the appearance inspection device 22 for inspection. The inspection tray 16 that has been inspected by the appearance inspection device 22 is moved and stored in the tray storage 26 with the lens 17 still disposed.

  On the other hand, a lens that has been evaluated as a re-inspection product by the appearance inspection device 22 is determined to be either good or defective by the re-inspection device 23. At this time, the inspection tray 16 is kept in the tray storage 26 and is acquired by the appearance inspection device 22 and registered in the database 28 of the server 21 for re-inspection performed by the re-inspection device 23. Only the original image is used. The re-inspection device 23 registers the evaluation of the re-inspected product lens 17 determined by the re-inspection in the database 28 of the server 21.

  Then, the inspection tray 16 in which the evaluation of the arranged lens 17 is determined to be either good or defective is moved from the tray storage 26 and placed on the inspection result display device 24. The inspection result display device 24 reads the evaluation of the lens 17 of the arranged inspection tray 16 and displays it. Based on the display of the inspection result, the defective lens is extracted from the inspection tray 16, and finally, only the good lens is left on the inspection tray 16. The non-defective lenses thus selected are packaged and shipped.

  As described above, the appearance inspection system 10 accurately inspects various defects generated in an article having a realistic shape by the appearance inspection device 22 without omission, and the inspection result display device 24 makes it easy to understand the result of the appearance inspection. Display accurately. Therefore, the appearance inspection system 10 can perform an accurate appearance inspection efficiently.

  Furthermore, the appearance inspection system 10 does not integrate the appearance inspection device 22, the re-inspection device 23, and the inspection result display device 24, but is provided separately, and a database 28 built in the server 21 is necessary for these devices. Manage data collectively. Accordingly, the appearance inspection, re-inspection, and sorting (display of inspection results) are performed in parallel, and the appearance inspection device 22, re-inspection device 23, and inspection result display are performed according to the manufacturing situation such as the quantity and quality of the lens. The devices 24 can be easily added to each other.

  For example, as shown in FIG. 22A, in the case where the number of reinspected lenses increases due to some manufacturing reason, in addition to the reinspection device 23, a second reinspection device 171 may be added. . At this time, the second re-inspection device 171 communicates with the server 21 independently of the re-inspection device 23, obtains an original image of the re-inspected lens, and performs re-inspection. For example, as shown in FIG. 22B, in order to increase the production amount of a lens with stable quality, a second appearance inspection device 172 and a second inspection result display device 173 may be provided. Furthermore, similarly, an appearance inspection device, a re-inspection device, and an inspection result display device can be provided as necessary.

  In the same manner, replacement and adjustment in the case where a problem occurs in these, replacement with an improved apparatus, etc. can be easily and inexpensively performed.

  In the above-described embodiment, each device constituting the appearance inspection system 10 shares data used for inspection and the like by the server 21. However, the present invention is not limited to this, and each device is directly connected to obtain necessary data. May be shared.

  In the above-described embodiment, an example in which a barcode is used as the ID 33 of the inspection tray 16 is shown, but this barcode may be a one-dimensional barcode or a two-dimensional barcode. Further, the ID 33 is not limited to a barcode, and an IC chip or the like may be used.

  In the above-described embodiment, an example in which the appearance inspection of the lens 17 is performed is shown. However, the shape of the lens 17 is not limited, and even when the appearance of the lens 17 is inspected, a combination of surface irregularities is a meniscus lens. The lens may be biconvex or biconcave, and the shape may be spherical or aspherical. Also, any size can be used, and a special lens such as a Fresnel lens may be used. Further, the material of the lens to be inspected is not limited to glass, and may be a known resin material. The lens manufacturing method is not limited to the above-described embodiment, and may be manufactured by various moldings or polishing. good.

  Furthermore, the article to be inspected is not limited to a lens, and is preferably a transparent article, and may be an opaque article.

It is explanatory drawing which shows the structure of an external appearance inspection system. It is a perspective view which shows the structure of an external appearance inspection apparatus roughly. It is a block diagram which shows the electrical structure of an external appearance inspection apparatus. It is explanatory drawing which shows the defect which arises in a lens. It is a flowchart which shows the effect | action of an external appearance inspection apparatus. It is explanatory drawing which shows the mode of a 1st difference image. It is explanatory drawing which shows the mode of a 2nd difference image. It is explanatory drawing which shows the mode of a 3rd difference image. It is explanatory drawing which shows the mode of a 4th difference image. It is explanatory drawing which shows a mode that an illumination panel is switched to transmissive | pervious dark field illumination and transmissive | pervious bright field illumination with a light-shielding plate. It is explanatory drawing which shows the example which uses a liquid crystal panel as transmissive | pervious dark field illumination and transmissive | pervious bright field illumination. It is explanatory drawing which shows a mode that the magnitude | size of a non-light-emitting part changes, when using a liquid crystal panel as transmissive | pervious dark field illumination. It is explanatory drawing which shows the structure of a reexamination apparatus. It is a perspective view which shows the structure of a test result display apparatus roughly. It is a block diagram which shows the electrical structure of a test result display apparatus. It is a flowchart which shows the effect | action of a test result display apparatus. It is explanatory drawing which shows the example which displays a defective product lens. It is explanatory drawing which shows the example which displays a defect lens in order according to the kind of defect. It is explanatory drawing which shows the example which displays a warning when a test | inspection tray is not arrange | positioned correctly. It is the schematic which shows the example which provides a light projection lens in a light projection hole. It is a block diagram which shows the structure in the case of providing two or more reexamination apparatuses. It is explanatory drawing which shows the structure in the case of providing two or more external appearance inspection apparatuses and an inspection result display apparatus.

Explanation of symbols

10 Visual Inspection System 16 Inspection Tray (Subject Holding Unit)
17 Lens 21 Server 22, 172 Visual inspection device (defect evaluation device)
23,171 Re-inspection device 24,173 Inspection result display device (evaluation display device)
26 Tray storage 28 Database 33 ID
36,134 ID scanner 37 CCD area sensor 41 Transmission type dark field illumination (first illumination)
42 Reflective dark field illumination (second illumination)
43 Transmission type dark field illumination (3rd illumination)
44 Reflective dark field illumination (4th illumination)
47, 117, 119 Non-light emitting part 52, 53 Mask plate 58 Reference image creation part 59 Difference image creation part 61 Evaluation part 76, 77, 78, 79 Difference image 111 Illumination panel 113 Light shielding plate 114, 131 Liquid crystal panel 132 Spacer 133 Guide 138 Inspection result display area 139 Selection information display area 141 Light projection hole 152 Display image creation unit 153 Selection information creation unit 164 Projection lens

Claims (3)

A plurality of specimens to be inspected for defects in appearance, and a specimen holding means for passing light irradiated from below to each of the specimens;
An imaging unit that captures each subject and obtains an image of the subject is provided, and the subject holding unit is moved to place each subject at an examination position facing the imaging unit. A defect evaluation apparatus that images the object disposed at the inspection position while illuminating the object, and evaluates the defect of the object as good, defective, or re-inspected from the obtained image;
Wherein leave an array of object to the object holding means, said in association with each of the subject is irradiated with light from below the object holding means, each displayed an evaluation of the subject by the defect evaluation device An evaluation display device ,
Along with the evaluation of the defect of the object by the defect evaluation apparatus, the image of the object obtained by the defect evaluation apparatus is managed collectively for each object holding means, and in response to a request from the evaluation display apparatus An evaluation management device for outputting the evaluation of the subject,
The image of the subject evaluated as reexamined by the defect evaluation device is read from the evaluation management device and displayed on the monitor, and the defect of the subject evaluated as reexamined is either good or defective. Re-inspection equipment to be evaluated,
An appearance inspection system comprising: The evaluation display device displays a light or dark pattern according to the interval at which the subject holding means arranges the subject and the evaluation of each of the subjects by the defect evaluation device below the subject holding means. The visual inspection system according to claim 1, wherein the visual inspection system displays the evaluation by the defect evaluation apparatus in association with each of the objects while being arranged on the object holding means . The defect evaluation apparatus is
A first illuminating unit that is disposed on the opposite side of the imaging unit with respect to the subject and uniformly illuminates the subject so that illumination light transmitted through the subject does not enter the imaging unit;
A second illuminating unit that is disposed on the same side as the imaging unit with respect to the subject and uniformly illuminates the subject so that illumination light reflected by the subject does not enter the imaging unit;
A third illuminating unit that is disposed on the opposite side of the imaging unit with respect to the subject and uniformly illuminates the subject so that illumination light transmitted through the subject is incident on the imaging unit;
A fourth illumination unit that is arranged on the same side as the imaging unit with respect to the subject and uniformly illuminates the subject so that illumination light reflected by the subject is incident on the imaging unit; ,
Switching between the subject and the imaging means without changing the relative positions thereof, the subject is performed by each of the first illumination means , the second illumination means , the third illumination means , and the fourth illumination means. taking an image while illuminating the,
The appearance inspection system according to claim 1 or 2.

Images