JP5001900B2 - Hermetic seal terminal and manufacturing method thereof - Google Patents

Description

  The present invention relates to a hermetic seal terminal and a method for manufacturing the same.

  In general, a functional element that converts a physical quantity such as pressure, load, acceleration, or angular velocity into an electrical signal is mounted on a hermetic seal terminal. Such a hermetic seal terminal includes a metallic cylindrical member, an insulating filling member filled inside the cylindrical member, and a conductive lead extending through the filling member in the axial direction. Yes. The functional element is mounted on one surface of the filling member and is electrically connected to the lead via, for example, a bonding wire. This hermetic seal terminal is normally used in a housing housing part to form a pressure, load, acceleration or angular velocity sensor, and an electrical signal from the functional element is taken out of the housing through a lead. Has been.

  Such various sensors are required to be ultra-compact due to the requirements for mounting in the measuring section, and the hermetic seal terminal inside the sensor is also required to be ultra-compact. In order to satisfy these requirements, glass is used as a filling member, and it has been proposed to pour molten glass into a metallic cylindrical member in order to simplify the manufacturing process and ensure dimensional accuracy.

  However, in this method, the glass melted in the filling process at the time of manufacture may leak to the outside of the metallic cylindrical member and protrude, and it is not easy to remove the protruding and solidified glass. The yield was bad. Therefore, Patent Document 1 discloses a pressure sensor using a hermetic seal terminal that can prevent such leakage of glass and a manufacturing method thereof.

  In the hermetic seal terminal disclosed in Patent Document 1, a metallic cylindrical member, a positioning glass that is installed inside the cylindrical member and made of a non-conductive material, and the positioning Hermetic sealing glass made of a material that is installed inside the cylindrical member so as to overlap with the glass for use and softens at a lower temperature than the positioning glass and does not have conductivity, positioning glass, and hermetic sealing glass And a metal electrode pin penetrating the wire.

  In the manufacturing method, a positioning glass made of a material having a through hole for passing an electrode pin and having no electrical conductivity is fitted inside a metallic cylindrical member, A hermetic made of a material that is softened at a lower temperature than the positioning glass and does not have conductivity, and has a through hole for passing the electrode pin inside the cylindrical member so as to overlap the positioning glass. The sealing glass is fitted, and the metal electrode pin is passed through each of the positioning glass through hole and the hermetic sealing glass through hole, and heated at a temperature at which only the hermetic sealing glass is softened. The softened hermetic sealing glass is filled in the gaps between the through holes and the electrode pins and the gaps between the positioning glass and the cylindrical member, and then cooled and solidified. And so as to et al.

JP 2001-41838 A

  However, in the hermetic seal terminal and the manufacturing method thereof disclosed in Patent Document 1, since the positioning glass and the hermetic seal glass provided with the through holes are used in an overlapping manner, the cylindrical members are used. An extra man-hour is required for the alignment of the through holes in the fitting process. Further, in order to prevent the hermetic seal glass in a softened (or fluidized) state from leaking outside the metallic cylindrical member, a hermetic seal glass having a softening point (or a pour point) different from that of the positioning glass is used. Since it is used repeatedly, in order to heat only the glass for hermetic sealing in the heating process, there is a problem that the temperature control is complicated and the manufacture is not easy.

  In view of such circumstances, it is an object of the present invention to provide a hermetic seal terminal that can prevent leakage of hermetic seal glass in a manufacturing process with a simple configuration and a method for manufacturing the same.

  One form of the hermetic seal terminal according to the present invention for solving the above-mentioned problems is a hermetic seal terminal for mounting a functional element, and a metal cylindrical member having a predetermined thickness, and the metal An insulative filling member that fills the inside of the cylindrical member and forms a mounting surface of the functional element; and a conductive lead that extends through the filling member and is electrically connected to the functional element. And an easily deformable portion is formed at one end of the end portion of the metallic cylindrical member on the mounting surface side.

  In one form of the above hermetic seal terminal, in the manufacturing process, the easily deformable portion formed at one end on the mounting surface side of the end portion of the metal cylindrical member having a predetermined thickness contacts the jig. When the pressure is applied from the other end side, the easily deformable portion is easily deformed and fits to the jig, thereby improving the sealing performance. Therefore, even if the insulating filling member filled inside the metal cylindrical member is in a molten state, leakage of the filling member can be prevented with a simple configuration.

  Furthermore, one form of a method for manufacturing a hermetic seal terminal according to the present invention for solving the above-described problem is a method for manufacturing a hermetic seal terminal for mounting a functional element, which is made of a metal having a predetermined thickness. An easily deformable portion is formed at one end of the cylindrical member, the easily deformable portion of the metal cylindrical member is brought into contact with a jig, and an insulating filling member and the filling are placed inside the metal cylindrical member. A conductive lead extending through the member, the metal cylindrical member is pressurized from the other end side, the filling member is heated and melted, and then cooled and solidified; A process is provided.

  According to one aspect of the method of manufacturing the hermetic seal terminal, the easily deformable portion formed at one end on the mounting surface side of the end portion of the metal cylindrical member having a predetermined thickness is brought into contact with the jig. An insulating filling member and a conductive lead extending through the filling member are disposed inside the metallic cylindrical member. The filling member is heated and melted while the metal cylindrical member is pressurized from the other end side. At this time, when the metal cylindrical member is pressurized from the other end side, the easily deformable portion is easily deformed and fits to the jig, and the sealing performance is improved. Even if the insulating filling member filled in is in a molten state, leakage of the filling member is prevented.

  Another embodiment of a method for manufacturing a hermetic seal terminal according to the present invention for solving the above-described problem is a method for manufacturing a hermetic seal terminal for mounting a functional element, which is made of a metal having a predetermined thickness. An easily deformable portion is formed at one end of the cylindrical member, the easily deformable portion of the metallic cylindrical member is brought into contact with a jig, and a conductive lead is disposed inside the metallic cylindrical member. And a step of filling the metallic cylindrical member with an insulating filling member in a molten state inside the metallic cylindrical member while pressurizing the metallic cylindrical member from the other end side, and then cooling and solidifying. It is characterized by.

  According to another aspect of the method for manufacturing the hermetic seal terminal, the easily deformable portion formed at one end on the mounting surface side of the end portion of the metal cylindrical member having a predetermined thickness contacts the jig. A conductive lead is disposed inside the metallic cylindrical member. And while the metal cylindrical member is pressurized from the other end side, an insulating filling member in a molten state is filled inside the metal cylindrical member. At this time, when the metal cylindrical member is pressurized from the other end side, the easily deformable portion is easily deformed and fits to the jig, and the sealing performance is improved. Even if the insulating filling member in a molten state is filled, leakage of the filling member is prevented.

  Here, it is preferable that the easily deformable portion has a shape that allows the surface pressure to be increased when the metal cylindrical member is pressed from the other end side than the predetermined thickness.

  According to this form, since the easily deformable portion has a shape in which the surface pressure can be increased as compared with the predetermined thickness at the time of pressurization from the other end side of the metal cylindrical member, higher sealing performance And the leakage of the filling member can be reliably prevented.

  Moreover, it is preferable that the said easily deformable part is formed so that it may not exceed the outer diameter of the said metal cylindrical member even after a deformation | transformation.

  According to this aspect, since the easily deformable portion is formed so as not to exceed the outer diameter of the metal cylindrical member even after being deformed, the outer diameter dimension of the metal cylindrical member does not change, and the hermetic seal with good yield is obtained. A terminal can be obtained.

  ADVANTAGE OF THE INVENTION According to this invention, the hermetic seal terminal which can prevent the leak of the glass for hermetic sealing in a manufacturing process with a simple structure, and its manufacturing method can be obtained.

  Embodiments of the present invention will be described below with reference to the accompanying drawings.

  FIG. 1 is a perspective view showing an embodiment of a hermetic seal terminal 10 according to the present invention, and FIG. 2 is a sectional view. As shown in FIGS. 1 and 2, the hermetic seal terminal 10 according to the present embodiment includes a metal cylindrical member 101, a glass 103 as an insulating filling member, and an electrode pin as a conductive lead. 105. The metallic cylindrical member 101 has a predetermined thickness, and an easily deformable portion 101A described later is formed at one end thereof. Further, one end surface of the glass 103 filled inside the metallic cylindrical member 101 forms a mounting surface 103A for a functional element to be described later. Note that the easily deformable portion 101A shown in FIGS. 1 and 2 is in a state after being deformed in the manufacturing process of the hermetic seal terminal 10 to be described later, and does not strictly represent the shape.

  Here, with reference to FIG. 3, various forms of the easily deformable portion 101 </ b> A formed on one end side of the metallic cylindrical member 101 will be described first. FIG. 3A shows a first embodiment of the easily deformable portion 101A, which is formed in an isosceles triangle shape in cross section with the base of the thickness of the metallic cylindrical member 101 having a predetermined thickness. The easily deformable portion 101Aa is shown. FIG. 3B shows a second embodiment of the easily deformable portion 101A, which is formed in a right-angled triangular section with the thickness of the metal cylindrical member 101 having a predetermined thickness as the base. The easily deformable portion 101Ab is shown. However, the right triangle is formed so that the inclined surface exists on the outer diameter side of the cylindrical member 101, in other words, the apex exists on the inner diameter side of the cylindrical member 101. Further, FIG. 3C shows a third embodiment of the easily deformable portion 101A, which is more than the thickness around the middle of the thickness of the metallic cylindrical member 101 having a predetermined thickness. An easily deformable portion 101Ac formed in a thin rectangular shape is shown.

  All of these easily deformable portions 101Aa, 101Ab, and 101Ac are formed thinner than the predetermined thickness of the metallic cylindrical member 101 as a whole, and the other end side of the metallic cylindrical member 101 is described later. When the pressure is applied toward the jig, the surface pressure at the contact portion increases more than the predetermined thickness. Thus, a higher sealing performance can be provided at the contact portion. Further, all of these easily deformable portions 101Aa, 101Ab, and 101Ac are formed so as not to exceed the outer diameter of the metallic cylindrical member 101 even after the deformation.

  Here, the 1st form of the manufacturing method of the hermetic seal terminal 10 which concerns on this Embodiment is demonstrated, referring FIG. As shown in FIG. 4A, an electrode pin 105 is fitted into a positioning hole 100A formed at the bottom of a bottomed cylindrical jig 100, and a glass 103 for hermetic sealing is previously formed thereon. After the electrode pin 105 is passed through the through hole 103b and inserted into the jig 100, the metal cylindrical member 101 is placed between the glass 103 and the inner wall of the jig 100, and the easily deformable portion 101A is a bottomed cylindrical jig 100. Fit so that it touches the bottom.

  Thereafter, as shown in FIG. 4B, the bottomed cylindrical jig 100 in which the metal cylindrical member 101, the glass 103, and the electrode pin 105 are set is installed in the furnace, and the metal cylindrical member 101 is attached to the furnace. While pressing from the other end side through the cylindrical pressure jig 110, heating is performed until the hermetic sealing glass 103 is melted (or fluidized). The heated hermetic sealing glass 103 expands and melts according to its coefficient of thermal expansion, and fluidizes by heating to a high temperature. At this time, the heating temperature and time are adjusted until the melted (or fluidized) hermetic sealing glass 103 sufficiently wraps around the gap between the electrode pin 105 and the metallic cylindrical member 101. As shown in FIG. 4B, the molten glass 103 may be pressurized in order to promote the wraparound of the molten glass 103.

  Thereafter, the heat treatment is stopped, and the molten hermetic sealing glass 103 is cooled and solidified again. By this cooling step, the hermetic sealing glass 103 that has expanded contracts, and the gap between the electrode pin 105 and the through-hole 103b and the gap between the glass 103 and the metal cylindrical member 101 are completely hermetically sealed, The hermetic seal terminal 10 is completed.

  Here, the deformation behavior of the easily deformable portion 101 </ b> A in the pressurizing process of the metal cylindrical member 101 in the method for manufacturing the hermetic seal terminal 10 will be described. The easily deformable portions 101A in the first to third embodiments described above are deformed as shown in FIGS. 5 (A) to 5 (C), respectively. That is, the easily deformable portion 101Aa formed in the shape of an isosceles triangle in cross section so that the upper side of FIGS. 5A to 5C shows the state before pressurization and the lower side after pressurization, As shown on the lower side of FIG. 5 (A), the easily deformable portion 101Ab deformed into a cross section of a regular trapezoidal shape and formed into a right-angled triangular section has a cross section of a cross section as shown in FIG. The easily deformable portion 101Ac that is deformed into a shape and has a rectangular cross section is deformed into a rectangular cross section with a reduced length ratio as shown on the lower side of FIG. As a result, when the metal cylindrical member 101 is pressed from the other end toward the jig, the surface pressure at the contact portion between the easily deformable portion 101A and the bottom of the bottomed cylindrical jig 100 increases. To do. Accordingly, a higher sealing performance is provided at the contact portion, and leakage of the molten hermetic glass 103 is prevented. Further, since the easily deformable portion 101A is formed so as not to exceed the outer diameter of the metal cylindrical member 101 even after the deformation, the outer diameter dimension of the metal cylindrical member 101 does not change, and the hermetic has a good yield. The seal terminal 10 can be obtained.

  A sensor chip 110 as a functional element is mounted on the hermetic seal terminal 10 formed as described above, and is used by being housed in a housing portion of a predetermined housing in order to form a desired sensor. Become.

  An example in which the hermetic seal terminal 10 according to the present invention is used for the pressure sensor 200 is shown in FIG. As shown in FIG. 6A, the sensor chip 110 is mounted on the mounting surface 103A of the hermetic sealing glass 103 via a pedestal, and each is fixed with an adhesive. The sensor chip 110 is formed of a semiconductor such as silicon and is of a piezo type or a capacitive type. The sensor chip 110 and the electrode pin 105 are electrically connected by a bonding wire, and a force transmitting metal or ceramic hemisphere 112 is also formed on the outer surface of the sensor chip 110 with an adhesive. It is fixed. On the other hand, the housing 202 in which the hermetic seal terminal 10 is accommodated has an accommodating portion 202A, and a diaphragm support member 204, in which a diaphragm 204A is partially formed, is integrally formed by laser welding or the like. Yes. A force transmission rod 208 made of ceramic or metal is integrated with the diaphragm 204A at the tip.

  Then, as shown in FIG. 6B, the hermetic seal terminal 10 is inserted into the housing 202 configured as described above, and the pressure sensor 200 is formed. FIG. 6B shows a state one step before completion. When the insertion is further continued in the direction of the arrow shown in the figure, the hemisphere 112 abuts against the end of the force transmission rod 208, and the pressure sensor 200 is completed. .

  Here, the 2nd form of the manufacturing method of the hermetic seal terminal 10 which concerns on this Embodiment is demonstrated. In the first embodiment, as shown in FIG. 4A, the electrode pin 105 is fitted into the positioning hole 100A formed in the bottom of the bottomed cylindrical jig 100, and the glass 103 for hermetic sealing is attached. Then, after inserting the electrode pin 105 into the through hole 103b formed in advance in the jig 100, the metal cylindrical member 101 is placed between the glass 103 and the inner wall of the jig 100 so that the easily deformable portion 101A is provided. The bottomed cylindrical jig 100 is fitted so as to be in contact with the bottom, and then, as shown in FIG. 4B, the bottomed cylindrical shape in which the metal cylindrical member 101, the glass 103, and the electrode pin 105 are set. The jig 103 is installed in the furnace, and the glass 103 for hermetic sealing is melted (or fluidized) while pressing the metal cylindrical member 101 from the other end side through the cylindrical pressure jig 110. Until it was heated.

  By the way, in the second embodiment, the electrode pin 105 is fitted into the positioning hole 100A formed in the bottom of the bottomed cylindrical jig 100, and the easily deformable portion 101A of the metal cylindrical member 101 has a bottomed cylindrical shape. The metal cylindrical member 101 is filled with beads of a hermetic seal, and then the metal cylindrical member 101 and the electrode pin 105 are set. At the same time, the bottomed cylindrical jig 100 filled with the beads of the glass 103 is placed in the furnace, and the metal cylindrical member 101 is pressed from the other end side through the cylindrical pressure jig 110. The glass 103 for hermetic sealing is heated until it melts (or flows).

  Furthermore, as a third embodiment of the method for manufacturing the hermetic seal terminal 10 according to the present embodiment, the electrode pin 105 is fitted into the positioning hole 100A formed in the bottom of the bottomed cylindrical jig 100 to form a metal cylindrical shape. The member 101 is fitted so that the easily deformable portion 101A contacts the bottom of the bottomed cylindrical jig 100, and the metal cylindrical member 101 is pressed from the other end side through the cylindrical pressure jig 110. On the other hand, the hermetic sealing glass 103 in a molten state may be poured and filled inside the metal cylindrical member 101.

It is a perspective view which shows embodiment of the hermetic seal terminal which concerns on this invention. It is sectional drawing which shows embodiment of the hermetic seal terminal which concerns on this invention. It is sectional drawing which shows the form of the easily deformable part in embodiment of the hermetic seal terminal which concerns on this invention, (A) is 1st Example, (B) 2nd Example, (C) is 3rd. An example is shown. It is sectional drawing for demonstrating the manufacturing method of the hermetic seal terminal concerning this invention, (A) is a mode that sets a metal cylindrical member, glass, and an electrode pin to a bottomed cylindrical jig, (B) is A state is shown in which a metallic cylindrical member is heated in a furnace while being pressurized. In the manufacturing method of the hermetic seal terminal which concerns on this invention, it is sectional drawing for demonstrating the behavior of the easily deformable part in the pressurization process of a metal cylindrical member, (A) is a 1st Example, (B) Shows the second embodiment, and (C) shows the third embodiment. It is sectional drawing for demonstrating an example which used the hermetic seal terminal which concerns on this invention for the pressure sensor, (A) is the state before insertion to the housing of a hermetic seal terminal, (B) is the state before the completion one step after insertion. Is shown.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Hermetic seal terminal 100 Jig 100A Positioning hole 101 Metal cylindrical member 101A Easily deformable part 103 Glass (insulating filling member)
103A Mounting surface (for functional element) 105 Electrode pin (conductive lead)
110 sensor chip 112 hemisphere 114 hollow pipe 200 pressure sensor 202 housing 202
202A Housing part 202B Throat part 204 Diaphragm support member 204A Diaphragm 206 Elastic member 208 Force transmission rod

Claims (7)

A hermetic seal terminal for mounting functional elements,
A metal cylindrical member having a predetermined thickness;
An insulating filling member that is filled inside the cylindrical member made of metal and forms a mounting surface of the functional element;
A conductive lead extending through the filling member and conducting to the functional element,
A hermetic seal terminal, wherein an easily deformable portion is formed at one end of the end portion of the metallic cylindrical member on the mounting surface side.   The said easily deformable part has a shape which surface pressure can increase rather than the said predetermined thickness at the time of the pressurization from the other end side of the said metal cylindrical member, It is characterized by the above-mentioned. Hermetic seal terminal.   The hermetic seal terminal according to claim 1 or 2, wherein the easily deformable portion is formed so as not to exceed an outer diameter of the metal cylindrical member even after being deformed. A method of manufacturing a hermetic seal terminal for mounting a functional element,
An easily deformable portion is formed at one end of a metallic cylindrical member having a predetermined thickness,
An easily deformable portion of the metal tubular member is brought into contact with a jig, and an insulating filling member and a conductive lead extending through the filling member are provided inside the metal tubular member. And place
While pressing the metal tubular member from the other end side, the filler member is heated and melted,
Then cool and solidify,
A method of manufacturing a hermetic seal terminal, comprising a step. A method of manufacturing a hermetic seal terminal for mounting a functional element,
An easily deformable portion is formed at one end of a metallic cylindrical member having a predetermined thickness,
While making the easily deformable portion of the metal cylindrical member abut on a jig, an electroconductive lead is disposed inside the metal cylindrical member,
While pressurizing the metal cylindrical member from the other end side, filling the inside of the metal cylindrical member with an insulating filling member in a molten state,
Then cool and solidify,
A method of manufacturing a hermetic seal terminal, comprising a step.   The said easily deformable part has the shape which surface pressure can increase rather than the said predetermined thickness at the time of the pressurization from the other end side of the said metal cylindrical member, The Claim 4 or 5 characterized by the above-mentioned. The manufacturing method of the hermetic seal terminal of description.   The method of manufacturing a hermetic seal terminal according to claim 4 or 5, wherein the easily deformable portion is formed so as not to exceed an outer diameter of the metal cylindrical member even after being deformed.

Images