JP5000246B2 - Waste liquid treatment method and treatment apparatus - Google Patents

Description

  The present invention relates to a method and a processing apparatus for treating drainage generated from a manufacturing apparatus represented by a semiconductor device manufacturing apparatus.

  For example, in a process for manufacturing a semiconductor device such as a thin film transistor (TFT), it is necessary to treat the drainage generated from the manufacturing apparatus. A large amount of drainage is generated on a daily basis at the manufacturing plant, and the treatment method greatly affects the running cost of the plant. Patent Document 1 proposes a substrate processing system for a developing device, in which waste liquids such as a developing solution and washing water generated from the device are processed by separate pipes. In some cases, the drainage generated from the apparatus is caused to flow through separate piping by a switching valve to treat the drainage (for example, Patent Document 2).

  In addition, from the viewpoint of safety, the drainage may be treated with a double pipe (for example, Patent Document 3). Patent Document 3 proposes a double piping system in which an outer shell pipe is piped around the main pipe. In this case, the drainage passes only through the inner main pipe, and the outer shell pipe is hollow. The outer shell pipe is for avoiding the risk of leakage from this pipe.

Also, depending on the manufacturing process, the waste liquid becomes hot, and there are cases where the waste liquid cannot be treated unless the waste liquid is cooled to a temperature acceptable by the waste liquid recovery tank. At this time, it is necessary to take measures such as making the pipe longer than necessary in order to naturally cool the drainage, or adding a separate cooling mechanism to the manufacturing apparatus in order to cool the drainage. In Patent Document 4, a precooling tank having a cooling coil is separately provided in the apparatus in order to cool the drainage.
JP 2003-229356 A Japanese Patent Laid-Open No. 7-78799 JP 2000-88148 A JP-A-6-132272

  As described above, when processing the high-temperature drainage, it is necessary to lengthen the pipe more than necessary or to provide a separate cooling mechanism, which requires extra capital investment. In addition, there is a problem that the equipment is enlarged. Also, when processing harmful drainage, a method using double piping has been proposed to ensure safety, but since the outer piping is hollow, there are many wasted parts and costly, Preventing downsizing of equipment. Thus, providing a separate cooling mechanism or using double piping leads to an increase in cost and an increase in the size of the equipment.

  Therefore, in the present invention, it is an object of the present invention to safely treat waste liquid without increasing costs and providing a large-scale facility when treating the waste liquid.

  In the drainage processing method of the present invention, when the first drainage is passed through the inner pipe of the double pipe in which the inner pipe is arranged in the outer pipe, the outer wall of the inner pipe and the inner wall of the outer pipe During this period, the second drainage liquid having a temperature lower than that of the first drainage liquid is caused to flow.

  In the drainage processing method of the present invention, the first processing liquid is supplied from the first processing liquid supply unit to the first processing unit, and the second processing liquid is supplied from the second processing liquid supply unit to the second processing unit. The first processing unit supplies and discharges the first drained liquid discharged from the first processing unit through the first draining unit to the inner pipe disposed in the double pipe, and the second processing unit. The second drainage discharged from the pipe is caused to flow between the outer wall of the inner pipe and the inner wall of the outer pipe through the second drainage section.

  In the drainage processing method of the present invention, the first processing liquid is supplied from the first processing liquid supply unit to the first processing unit, and the second processing liquid is supplied from the second processing liquid supply unit to the second processing unit. The first processing unit supplies and discharges the first drained liquid discharged from the first processing unit through the first draining unit to the inner pipe disposed in the double pipe, and the second processing unit. The second drainage discharged from the second pipe is caused to flow between the outer wall of the inner pipe and the inner wall of the outer pipe through the second drainage section, and the second drainage is the second drainage. At the start of discharging from the processing section, the temperature is lower than that of the first drainage liquid, and the second drainage liquid contains the first processing liquid diluted with the solvent contained in the second processing liquid. It is characterized by being.

  In the drainage processing method of the present invention, the first drainage is caused to flow to the inner pipe by the switching valve, and the second drainage is caused to flow between the outer wall of the inner pipe and the inner wall of the outer pipe by the switching valve. And the second drainage is once stored by a valve provided between the outer wall of the inner pipe and the inner wall of the outer pipe.

  In the drainage processing method of the present invention, the first drainage is caused to flow to the inner pipe by the switching valve, and the second drainage is caused to flow between the outer wall of the inner pipe and the inner wall of the outer pipe by the switching valve. And the second drainage is once stored by a valve provided between the outer wall of the inner pipe and the inner wall of the outer pipe.

  In the drainage processing method of the present invention, the first drainage is caused to flow to the inner pipe by the switching valve, and the second drainage is caused to flow between the outer wall of the inner pipe and the inner wall of the outer pipe by the switching valve. The first drainage is once stored by the first valve provided on the inner pipe, and the second valve provided between the outer wall of the inner pipe and the inner wall of the outer pipe is used to store the first drainage liquid. The second drainage is once stored.

  The drainage treatment method of the present invention is characterized in that the temperature of the first treatment liquid is adjusted in the first treatment liquid supply unit.

  In the drainage treatment method of the present invention, the concentration of the first treatment liquid contained in the second drainage is inspected by a concentration sensor provided on the inner wall of the outer pipe or the outer wall of the inner pipe. Features.

  The processing apparatus of the present invention includes a first processing unit, a second processing unit, a first processing liquid supply unit that supplies a first processing liquid to the first processing unit, and the second processing. A second processing liquid supply section for supplying a second processing liquid to the section, a first drainage section for processing the first drainage discharged from the first processing section, and the second processing. A second drainage section for treating the second drainage discharged from the section, an inner pipe connected to the first drainage section and through which the first drainage flows, and the second drainage section It has a double pipe provided with an outer pipe arranged outside the inner pipe connected and through which the second drainage flows.

  The processing apparatus of the present invention includes a first processing unit, a second processing unit, a first processing liquid supply unit that supplies a first processing liquid to the first processing unit, and the second processing. A second processing liquid supply section for supplying a second processing liquid to the section, a first drainage section for processing the first drainage discharged from the first processing section, and the second processing. A second drainage section for treating the second drainage discharged from the section, an inner pipe connected to the first drainage section and through which the first drainage flows, and the second drainage section The first treatment liquid that is connected and is at a lower temperature than the first drainage liquid when starting to drain from the second drainage part and diluted with the solvent contained in the second treatment liquid is included. A processing apparatus comprising: a double pipe including an outer pipe disposed outside the inner pipe through which the second drainage flows.

  The processing apparatus of the present invention includes a first processing liquid supply unit that supplies a first processing liquid to the processing unit, a second processing liquid supply unit that supplies a second processing liquid to the processing unit, Connected to the processing unit and disposed outside the inner pipe through which the first drainage discharged from the processing unit flows and the inner pipe connected to the processing unit and from which the second drainage discharged from the processing unit flows. And having a double pipe with an outer pipe.

  The processing apparatus of the present invention includes a processing section, a first processing liquid supply section that supplies a first processing liquid to the processing section, and a second processing liquid supply that supplies a second processing liquid to the processing section. And the inner pipe connected to the processing unit and through which the first drainage discharged from the processing unit flows, and connected to the processing unit and at the start of draining from the processing unit, the temperature is lower than that of the first drainage. And an outer side disposed outside the inner pipe through which the second drained liquid discharged from the processing unit including the first processing liquid diluted with the solvent included in the second processing liquid flows. It has a double pipe provided with a pipe.

  The processing apparatus of the present invention has a switching valve between the processing unit and the double pipe, and has a valve in at least one of the outer pipe and the inner pipe of the double pipe. .

  The processing apparatus of the present invention is characterized in that the first processing liquid supply unit has a temperature adjusting unit.

  The processing apparatus of this invention has a density | concentration sensor in the inner wall of the said outer side piping, or the outer wall of the said inner side piping, It is characterized by the above-mentioned.

  In the present invention, it is possible to cool the drainage flowing through the inner pipe by allowing the drainage having a temperature lower than the drainage flowing through the inner pipe to flow through the outer pipe. Moreover, since it becomes a double piping structure, danger, such as leakage of a dangerous chemical | medical solution, can be reduced.

Further, in the present invention, the water drainage that has been conventionally treated without being reused is reused as a refrigerant, which leads to cost reduction for cooling. Furthermore, since it is not necessary to provide a new cooling mechanism for reusing water drainage, high temperature chemical drainage can be efficiently and safely recovered and processed without increasing costs. Moreover, it is not necessary to lengthen the pipe for cooling by flowing water drainage through the pipe outside the double pipe and cooling the drainage flowing through the inner pipe.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the present invention can be implemented in many different modes, and those skilled in the art can easily understand that the modes and details can be variously changed without departing from the spirit and scope of the present invention. Is done. Therefore, the present invention should not be construed as being limited to the description of the embodiment modes. In the drawings, common portions are denoted by the same reference numerals, and detailed description thereof is omitted. Further, Embodiments 1 to 4 can be used in any combination.

(Embodiment 1)
In the present embodiment, a drainage processing method and a processing apparatus for flowing a drainage liquid having a temperature lower than a drainage flowing through an inner pipe to an outer pipe will be described with reference to FIGS.

  FIG. 1 shows a processing apparatus 101. The processing apparatus 101 includes a chemical solution supply unit 104 that supplies a chemical solution to the chemical solution processing unit 102 that processes with the chemical solution, a chemical solution drain unit 106 that processes drainage discharged from the chemical solution processing unit 102, and a water treatment that uses water. The water supply part 105 which supplies water to the part 103, and the water drainage part 107 which processes the drainage discharged | emitted from the water treatment part 103 are provided. Further, a double pipe (not shown) through which the drained liquid discharged from the chemical liquid processing unit 102 and the drained liquid discharged from the water processing unit 103 flow is provided. In addition, the structure of the processing apparatus 101 is not restricted to what is shown in FIG. 1, You may have a some chemical | medical solution process part, and may have a some water treatment part.

  In the present embodiment, the chemical solution processing unit 102 performs processes such as wet etching, development, and peeling. Therefore, the drainage discharged from the chemical solution processing unit 102 contains a chemical solution.

  In the present embodiment, in the water treatment unit 103, for example, processing such as cleaning of the substrate processed in the chemical solution processing unit 102 is performed. In this case, the drainage discharged from the water treatment unit 103 contains a chemical solution at a lower concentration than the drainage discharged from the chemical treatment unit 102. Further, the water treatment unit 103 may perform cleaning of the substrate before being processed by the chemical treatment unit 102, and in that case, sewage containing no chemical solution is discharged from the water treatment unit 103 as drainage. .

  In the present embodiment, the temperature of the drainage discharged from the water treatment unit 103 must be lower than the temperature of the drainage discharged from the chemical treatment unit 102. As the water supplied from the water supply unit 105 to the water treatment unit 103, tap water or distilled water from which suspended matters and impurities are removed (so-called pure water) can be used. For example, in the case of a semiconductor device manufacturing apparatus, it is preferable to use pure water.

  Further, the chemical solution supply unit 104 is provided with a temperature adjusting unit 108 for adjusting the temperature of the chemical solution (see FIG. 1). In the present embodiment, a case will be described in which a chemical liquid that has been temperature-controlled in advance by the temperature adjustment unit 108 is supplied to the chemical liquid processing unit 102 and waste liquid discharged from the chemical liquid processing unit 102 is processed. 108 is not necessarily provided. The present invention can be carried out even when the chemical liquid processing unit 102 causes a reaction accompanied by heat generation and processes waste liquid that results in a high temperature. That is, the present invention can be implemented as long as the temperature of the drainage discharged from the chemical treatment unit 102 is higher than the temperature of the drainage discharged from the water treatment unit 103.

  An example of such a processing apparatus 101 is shown in FIG. FIG. 2B is a schematic diagram of a cross section of a portion indicated by a dotted line connecting AB in FIG. In the present embodiment, the chemical drainage unit 106 is disposed inside the water drainage unit 107. As a result, a double pipe 111 is formed in which the inner pipe 112 extending to connect with the drain of the chemical drainage section 106 is covered with the outer pipe 113 extending to connect with the drain of the water drainage section 107 (FIG. 2 ( A) and (B)). That is, the inner pipe 112 is arranged inside the outer pipe 113.

  In the present embodiment, the chemical liquid adjusted to a high temperature by the temperature adjustment unit 108 is supplied from the chemical liquid supply unit 104 to the chemical liquid processing unit 102, and process processing is performed in the chemical liquid processing unit 102. Subsequently, using the water supplied from the water supply unit 105, the water treatment unit 103 performs process processing. Alternatively, the treatment may be performed by the water treatment unit 103 and then the treatment may be performed by the chemical treatment unit 102. The order of the process steps can be appropriately changed according to the purpose.

  Next, the drainage discharged from the chemical treatment unit 102 and the drainage discharged from the water treatment unit 103 flow into the double pipe 111 simultaneously via the chemical drainage unit 106 and the water drainage unit 107, respectively. That is, the drainage discharged from the chemical treatment unit 102 flows into the inner pipe 112 and the drainage discharged from the water treatment unit 103 flows to the outer pipe 113, that is, between the inner wall of the outer pipe 113 and the outer wall of the inner pipe 112. It flows into the gap between them. In the present embodiment, when the drainage starts to be discharged from the water treatment unit, the temperature of the drainage flowing through the outer pipe 113 is lower than the temperature of the drainage flowing through the inner pipe 112, and therefore flows through the outer pipe 113. The drainage flowing through the inner pipe 112 is cooled by the drainage.

  FIG. 3 is a schematic cross-sectional view of the chemical liquid drainage section 106, the water drainage section 107, the inner pipe 112, and the outer pipe 113 shown in FIG. As shown in FIG. 3, the chemical drainage unit 106 and the water drainage unit 107 include a chemical drainage drain pan 109 and a water drainage drain pan 110 having an inclination. Here, the drain pan is an inclined plate that guides the drained liquid discharged from each processing section to the inner pipe and the outer pipe, and creates a smooth flow of the drained liquid to the pipe. Objective. Alternatively, the processing unit may be directly connected to the double pipe 111 without providing a drain pan.

  Further, as the shapes of the inner pipe 112 and the outer pipe 113 of the double pipe 111, the cross section of the pipe as shown in FIG. 4A may be circular, or as shown in FIG. The cross section of the piping may be polygonal. In FIG. 4A, the pipe has a circular cross section, but the cross section of the pipe may be elliptical. In FIG. 4B, the pipe has a quadrangular cross section, but the cross section of the pipe is not limited to a quadrilateral and may be a polygon such as a triangle or a pentagon.

  As described above, it is possible to cool the drainage flowing through the inner pipe 112 by allowing the drainage having a temperature lower than the drainage flowing through the inner pipe 112 to flow through the outer pipe 113. Moreover, since it becomes a double piping structure, danger, such as leakage of a dangerous chemical | medical solution, can be reduced.

In addition, since water drainage that has been treated as it is without being reused is reused as a refrigerant, it leads to cost reduction for cooling. Furthermore, since it is not necessary to provide a new cooling mechanism for reusing water drainage, high temperature chemical drainage can be efficiently and safely recovered and processed without increasing costs. Moreover, it is not necessary to lengthen the pipe for cooling by flowing water drainage through the pipe outside the double pipe and cooling the drainage flowing through the inner pipe.

(Embodiment 2)
In the present embodiment, a case where a concentration sensor is added to the outer pipe in the drainage processing method and the processing apparatus in which the drainage at a temperature lower than the drainage flowing through the inner pipe is supplied to the outer pipe will be described.

  At least one concentration sensor 114 is provided on the inner wall of the outer pipe 113 having a double pipe structure (see FIGS. 5A and 5B). FIG. 5B is a cross-sectional view of FIG. The processing apparatus monitors whether or not the drainage fluid passing through the inner pipe 112 is mixed into the drainage fluid passing through the outer pipe 113 by inspecting the drainage fluid passing through the outer pipe 113 with the concentration sensor 114. . The concentration sensor 114 is a device that issues a warning such as an alarm in response to a component of the chemical liquid drainage passing through the inner pipe 112. The concentration sensor 114 may be provided at a position where the concentration of the drainage flowing through the outer pipe 113 can be confirmed. For example, the concentration sensor 114 may be provided on the outer wall of the inner pipe 112 or may be provided on the inner wall of the outer pipe 113. However, it is necessary to fix the concentration sensor 114 so that it does not flow due to drainage.

For the density value that reacts to the density sensor 114, a reference density value serving as a reference is determined in consideration of the possibility of contamination during process processing. When the concentration of the chemical solution contained in the drainage flowing through the inner pipe 112 that is equal to or higher than the reference concentration value is detected in the drainage in the outer pipe 113, it is determined that the chemical drainage is leaking from the inner pipe 112; Issue warnings such as alarms.

  In the case of the double piping structure, since leakage from the inner piping cannot be determined only from the appearance, the countermeasure is delayed. However, if a concentration sensor is provided as in the present embodiment, early detection of leakage becomes possible. Further, in the double pipe structure of the present invention, since the liquid flows also in the outer pipe, it is possible to monitor the leakage of the entire pipe by providing only one liquid phase concentration sensor downstream of the outer pipe. it can.

  Note that this embodiment can be freely combined with any of the other embodiments.

(Embodiment 3)
In this embodiment, a batch processing apparatus will be described with reference to the drawings.

  6A and 6B show the configuration of a batch type processing apparatus using the drainage processing method of the present invention. FIG. 6B is a schematic view of the top surface of FIG.

The batch processing apparatus includes a workstation 201, a chemical treatment tank 205, a water treatment tank 206, a robot 203 having an arm chuck 204, and a drainage treatment unit 207. The arm chuck 204 is controlled by the robot 203.

First, the workpiece 202 transferred to the workstation 201 is transferred to the chemical processing tank 205 using the arm chuck 204. Next, in the chemical solution treatment tank 205, a treatment using the chemical solution is performed on the workpiece 202. For example, in the case of a wet etching apparatus, the processing object 202 is etched using hydrofluoric acid, oxalic acid, or the like in the chemical treatment tank 205. In the peeling apparatus, the chemical treatment tank 205 has two chemical treatment tanks, for example, a peel liquid tank and an isopropyl alcohol (IPA) tank. In each chemical treatment tank, the peeling treatment is performed on the workpiece 202. Done.

Subsequently, the workpiece 202 is transferred to the water treatment tank 206 by the arm chuck 204. Then, in the water treatment tank 206, a process such as cleaning is performed on the workpiece 202 treated in the chemical treatment tank 205.

A constant amount of temperature-adjusted chemical solution is constantly supplied to the chemical solution treatment tank 205, and the chemical solution always overflows. Moreover, when the workpiece 202 is conveyed, the chemical solution for the volume of the workpiece 202 further overflows. In addition, a constant amount of water is constantly supplied to the water treatment tank 206, and the water always overflows. When the workpiece 202 is transported, the volume of water of the workpiece 202 overflows further.

  The chemical waste liquid overflowed in the chemical liquid treatment tank 205 and the water waste liquid overflowed in the water treatment tank 206 flow into the waste liquid treatment unit 207. The drainage processing unit 207 includes a chemical drainage unit and a water drainage unit as in FIG. Similarly to the first embodiment, the chemical drainage that overflows in the chemical treatment tank 205 flows into the inner pipe of the double pipe through the chemical drainage section, and the water drainage that overflows in the water treatment tank 206 is drained. Flow through the liquid part to the outer pipe of the double pipe.

  In the present embodiment, drainage at a temperature lower than the drainage flowing through the inner pipe flows through the outer pipe. Therefore, the drainage flowing through the inner pipe can be cooled by the drainage flowing through the outer pipe. Moreover, since it becomes a double piping structure, danger, such as leakage of a dangerous chemical | medical solution, can be reduced.

  In addition, since water drainage that has been treated as it is without being reused is reused as a refrigerant, it leads to cost reduction for cooling. Furthermore, since it is not necessary to provide a new cooling mechanism for reusing water drainage, high temperature chemical drainage can be efficiently and safely recovered and processed without increasing costs. Moreover, it is not necessary to lengthen the pipe for cooling by flowing water drainage through the pipe outside the double pipe and cooling the drainage flowing through the inner pipe.

(Embodiment 4)
In this embodiment mode, a single wafer apparatus will be described with reference to the drawings.

  FIG. 7 shows a configuration of a spin coater device as an example of a single-wafer device using the drainage processing method of the present invention.

  The spin coater device of the present embodiment includes a water supply unit 301 and a chemical solution supply unit 302, and is provided with a water discharge nozzle 303 and a chemical solution discharge nozzle 304 for discharging water and a chemical solution, respectively. Moreover, the chemical solution supply unit 302 may have a temperature adjustment function for adjusting the temperature of the chemical solution.

  First, an object to be processed 305 is set on a rotary stage 306 provided in a cup 307 (a cup is also referred to as a processing unit). In the present embodiment, the cup 307 corresponds to a chemical treatment unit and a water treatment unit. Next, the chemical solution discharged from the chemical solution discharge nozzle 304 is applied onto the workpiece 305 while rotating the workpiece 305 installed on the rotation stage 306 at an optimum rotation speed. And after apply | coating on a to-be-processed object, the chemical | medical solution drainage generate | occur | produced by this process flows into the inner side piping 312. FIG.

  Next, the object to be processed 305 is cleaned using water discharged from the water discharge nozzle 303. Then, the water drainage generated by the cleaning process flows into the outer pipe 311.

  In the present embodiment, unlike the above embodiment, both the chemical solution and the water treatment are performed in the cup 307. Therefore, the chemical solution drainage and the water drainage are respectively performed on the double pipe inner pipe 312 and the outer pipe. A switching valve 308 is provided to flow separately from the pipe 311.

  FIG. 8 is a schematic view of the upper surface of the switching valve 308 of FIG. In the switching valve 308, when the chemical liquid is discharged from the chemical liquid discharge nozzle 304 and the chemical liquid drainage flows to the inner pipe 312, the switching valve 308 is moved outward as shown in FIG. The entrance to is closed and the entrance to the inner pipe 312 is opened. Further, when water is discharged from the water discharge nozzle 303 and the water drainage is caused to flow to the outer pipe 311, the switching valve 308 is moved inward to enter the inner pipe 312 as shown in FIG. 8B. Is closed and the entrance to the outer pipe 311 is opened. Thereby, the chemical liquid drainage flows to the inner pipe 312 and the water drainage flows to the outer pipe 311.

In the present embodiment, unlike the above embodiment, the timing of flowing into the chemical liquid drainage, the water drainage, and the double pipe is different. Therefore, when the chemical liquid drainage passes through the inner pipe, there is a possibility that water drainage does not flow in the outer pipe, or vice versa, and the chemical liquid drainage cannot be cooled. In order to solve this problem, the spin coater of the present embodiment is provided with an outer piping tank valve 309 inside the outer piping 311 and an inner piping tank valve 310 inside the inner piping 312 as shown in FIG. Yes.

In the present embodiment, when the chemical liquid is discharged from the chemical liquid discharge nozzle 304, the switching valve 308 moves outward, and the chemical liquid drainage flows to the inner pipe 312. Then, the inner piping tank valve 310 is closed, and the chemical liquid drainage is temporarily stored. Next, when water is discharged from the water discharge nozzle 303, the switching valve 308 moves inward, and water drainage flows to the outer pipe 311. Then, the outer piping tank valve 309 is closed and water drainage is temporarily stored. At the same time, the outer piping tank valve 309 and the inner piping tank valve 310 are opened, and the drainage is processed. The outer piping tank valve 309 and the inner piping tank valve 310 allow the chemical liquid drainage to be efficiently cooled by the water drainage.

Further, both the outer piping tank valve 309 and the inner piping tank valve 310 are not necessarily provided, and may be provided only in one of them. In this case, drainage is collected at the end of the pipe provided with the tank valve. For example, when only the outer pipe tank valve 309 is provided, first, the water drainage generated from the water discharge nozzle 303 is stored in the outer pipe 311, and then the chemical liquid drainage discharged from the chemical liquid discharge nozzle 304 is supplied to the inner pipe 312. The outer piping tank valve 309 may be opened at the flow-in timing. When only the inner pipe tank valve 310 is provided, first, the chemical liquid drainage discharged from the chemical liquid discharge nozzle 304 is stored in the inner pipe 312, and then the water drainage generated from the water discharge nozzle 303 is sent to the outer pipe 311. The inner piping tank valve 310 may be opened at the flow-in timing. Further, both the outer piping tank valve 309 and the inner piping tank valve 310 may be provided, and only one tank valve may be opened and used.

  In the present embodiment, drainage at a temperature lower than the drainage flowing through the inner pipe flows through the outer pipe. Therefore, the drainage flowing through the inner pipe can be cooled by the drainage flowing through the outer pipe. Moreover, since it becomes a double piping structure, danger, such as leakage of a dangerous chemical | medical solution, can be reduced.

  In addition, since water drainage that has been treated as it is without being reused is reused as a refrigerant, it leads to cost reduction for cooling. Furthermore, since it is not necessary to provide a new cooling mechanism for reusing water drainage, high temperature chemical drainage can be efficiently and safely recovered and processed without increasing costs. Moreover, it is not necessary to lengthen the pipe for cooling by flowing water drainage through the pipe outside the double pipe and cooling the drainage flowing through the inner pipe.

It is a figure explaining the drainage processing method of the present invention. It is a figure explaining the drainage processing method of the present invention. It is a figure explaining the drainage processing method of the present invention. It is sectional drawing explaining the double piping structure of this invention. It is a figure explaining the drainage processing method of the present invention. It is a figure explaining the processing apparatus using the drainage processing method of this invention. It is a figure explaining the processing apparatus using the drainage processing method of this invention. It is a figure explaining the processing apparatus using the drainage processing method of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 101 Processing apparatus 102 Chemical treatment part 103 Water treatment part 104 Chemical solution supply part 105 Water supply part 106 Chemical liquid drainage part 107 Water drainage part 108 Temperature control part 109 Chemical drainage drain pan 110 Water drainage drain pan 111 Double piping 112 Inner piping 113 Outer piping 114 Concentration sensor 201 Work station 202 Workpiece 203 Robot 204 Arm chuck 205 Chemical solution treatment tank 206 Water treatment tank 207 Drainage treatment unit 301 Water supply unit 302 Chemical solution supply unit 303 Water discharge nozzle 304 Chemical solution discharge nozzle 305 Workpiece 306 Rotating stage 307 Cup 308 Switching valve 309 Outside piping tank valve 310 Inside piping tank valve 311 Outside piping 312 Inside piping

Claims (21)

  When the first drainage liquid is caused to flow through the inner pipe of the double pipe in which the inner pipe is arranged in the outer pipe, the first drainage liquid is provided between the outer wall of the inner pipe and the inner wall of the outer pipe. A drainage treatment method characterized by flowing a second drainage liquid at a lower temperature. The first processing liquid is supplied from the first processing liquid supply unit to the first processing unit, and the second processing liquid is supplied from the second processing liquid supply unit to the second processing unit.
While flowing the first drainage discharged from the first processing unit through the first drainage unit to the inner pipe disposed in the double pipe,
The second drainage discharged from the second processing section and having a temperature lower than that of the first drainage is passed through the second drainage section and the outer wall of the inner pipe and the inner wall of the outer pipe of the double pipe. A drainage treatment method characterized by flowing between the two. The first processing liquid is supplied from the first processing liquid supply unit to the first processing unit, and the second processing liquid is supplied from the second processing liquid supply unit to the second processing unit.
While flowing the first drainage discharged from the first processing unit through the first drainage unit to the inner pipe disposed in the double pipe,
Flowing the second drainage discharged from the second processing section between the outer wall of the inner pipe and the inner wall of the outer pipe of the double pipe through the second drainage section;
The second drainage liquid is lower in temperature than the first drainage liquid when starting to drain from the second processing unit, and the second drainage liquid is diluted with a solvent contained in the second processing liquid. A drainage treatment method comprising the first treatment liquid. When flowing the first drainage through the inner pipe of the double pipe in which the inner pipe is arranged in the outer pipe, the second drainage is passed between the outer wall of the inner pipe and the inner wall of the outer pipe. sink,
Drainage processing method characterized in that said by the concentration sensor provided in the inner wall or outer wall of the inner pipe of the outer pipe, to check the concentration of the first processing solution that is part of the second drain. The first processing liquid is supplied from the first processing liquid supply unit to the first processing unit, and the second processing liquid is supplied from the second processing liquid supply unit to the second processing unit.
While flowing the first drainage discharged from the first processing unit through the first drainage unit to the inner pipe disposed in the double pipe,
Flowing the second drainage discharged from the second processing section between the outer wall of the inner pipe and the inner wall of the outer pipe of the double pipe through the second drainage section;
A drainage treatment method, wherein the concentration of the first treatment liquid contained in the second drainage is inspected by a concentration sensor provided on the inner wall of the outer pipe or the outer wall of the inner pipe. When the first drainage liquid is caused to flow through the inner pipe of the double pipe in which the inner pipe is arranged in the outer pipe, the first drainage liquid is provided between the outer wall of the inner pipe and the inner wall of the outer pipe. Let the cooler second drainage flow,
Drainage processing method characterized in that said by the concentration sensor provided in the inner wall or outer wall of the inner pipe of the outer pipe, to check the concentration of the first processing solution that is part of the second drain. The first processing liquid is supplied from the first processing liquid supply unit to the first processing unit, and the second processing liquid is supplied from the second processing liquid supply unit to the second processing unit.
While flowing the first drainage discharged from the first processing unit through the first drainage unit to the inner pipe disposed in the double pipe,
The second drainage discharged from the second processing section and having a temperature lower than that of the first drainage is passed through the second drainage section and the outer wall of the inner pipe and the inner wall of the outer pipe of the double pipe. Shed between
A drainage treatment method, wherein the concentration of the first treatment liquid contained in the second drainage is inspected by a concentration sensor provided on the inner wall of the outer pipe or the outer wall of the inner pipe. In claim 2, claim 3, claim 5 or claim 7,
The first drainage is caused to flow to the inner pipe by a switching valve,
Flowing the second drainage fluid between the outer wall of the inner pipe and the inner wall of the outer pipe by the switching valve;
A drainage processing method, wherein the first drainage is once stored by a valve provided in the inner pipe. In claim 2, claim 3, claim 5 or claim 7,
The first drainage is caused to flow to the inner pipe by a switching valve,
Flowing the second drainage fluid between the outer wall of the inner pipe and the inner wall of the outer pipe by the switching valve;
A drainage processing method, wherein the second drainage is once stored by a valve provided between an outer wall of the inner pipe and an inner wall of the outer pipe. In claim 2, claim 3, claim 5 or claim 7,
The first drainage is caused to flow to the inner pipe by a switching valve,
Flowing the second drainage fluid between the outer wall of the inner pipe and the inner wall of the outer pipe by the switching valve;
The first drainage is once stored by the first valve provided in the inner pipe, and the second valve is provided by the second valve provided between the outer wall of the inner pipe and the inner wall of the outer pipe. A drainage treatment method characterized by storing drainage once. In any one of claims 2, 3, 5, and 7 to 10,
A drainage treatment method, wherein the temperature of the first treatment liquid is adjusted in the first treatment liquid supply unit. It has a double pipe with the inner pipe arranged inside the outer pipe,
The first drainage flows through the inner pipe,
A processing apparatus, wherein a second drainage liquid having a temperature lower than that of the first drainage flows between an outer wall of the inner pipe and an inner wall of the outer pipe. A first processing unit;
A second processing unit;
A first processing liquid supply section for supplying a first processing liquid to the first processing section;
A second processing liquid supply unit for supplying a second processing liquid to the second processing unit;
A first drainage unit for treating the first drainage discharged from the first processing unit;
A second drainage unit for treating the second drainage discharged from the second processing unit;
A double pipe having an inner pipe connected to the first drainage section and an outer pipe connected to the second drainage section and arranged outside the inner pipe;
The first drainage flows through the inner pipe,
The processing apparatus, wherein the second drainage liquid having a temperature lower than that of the first drainage flows between an outer wall of the inner pipe and an inner wall of the outer pipe. A first processing unit;
A second processing unit;
A first processing liquid supply section for supplying a first processing liquid to the first processing section;
A second processing liquid supply unit for supplying a second processing liquid to the second processing unit;
A first drainage unit for treating the first drainage discharged from the first processing unit;
A second drainage unit for treating the second drainage discharged from the second processing unit;
A double pipe having an inner pipe connected to the first drainage section and an outer pipe connected to the second drainage section and arranged outside the inner pipe;
The first drainage flows through the inner pipe,
Between the outer wall of the inner pipe and the inner wall of the outer pipe, the temperature at the start of discharge from the second drainage part is lower than that of the first drainage, and the second treatment liquid The processing apparatus, wherein the second drainage liquid containing the first processing liquid diluted with an included solvent flows. A processing unit;
A first processing liquid supply section for supplying a first processing liquid to the processing section;
A second processing liquid supply unit for supplying a second processing liquid to the processing unit;
A double pipe comprising an inner pipe connected to the processing section and an outer pipe connected to the processing section and arranged outside the inner pipe;
The first drainage discharged from the processing unit flows through the inner pipe,
A processing apparatus, wherein a second drainage discharged from the processing section and having a temperature lower than that of the first drainage flows between an outer wall of the inner pipe and an inner wall of the outer pipe. A processing unit;
A first processing liquid supply section for supplying a first processing liquid to the processing section;
A second processing liquid supply unit for supplying a second processing liquid to the processing unit;
A double pipe comprising an inner pipe connected to the processing section and an outer pipe connected to the processing section and arranged outside the inner pipe;
The first drainage discharged from the processing unit flows through the inner pipe,
Between the outer wall of the inner pipe and the inner wall of the outer pipe, a solvent that is at a lower temperature than the first drainage liquid and is contained in the second treatment liquid at the start of discharge from the processing unit. A processing apparatus, wherein the second drained liquid discharged from the processing unit containing the diluted first processing liquid flows. A double pipe in which an inner pipe is arranged in the outer pipe, and a concentration sensor on the inner wall of the outer pipe or the outer wall of the inner pipe,
The first drainage flows through the inner pipe,
A processing apparatus, wherein a second drainage liquid having a temperature lower than that of the first drainage flows between an outer wall of the inner pipe and an inner wall of the outer pipe. A first processing unit;
A second processing unit;
A first processing liquid supply section for supplying a first processing liquid to the first processing section;
A second processing liquid supply unit for supplying a second processing liquid to the second processing unit;
A first drainage unit for treating the first drainage discharged from the first processing unit;
A second drainage unit for treating the second drainage discharged from the second processing unit;
A double pipe comprising an inner pipe connected to the first drainage section and an outer pipe connected to the second drainage section and arranged outside the inner pipe;
A concentration sensor on the inner wall of the outer pipe or the outer wall of the inner pipe;
The first drainage flows through the inner pipe,
The processing apparatus, wherein the second drainage liquid having a temperature lower than that of the first drainage flows between an outer wall of the inner pipe and an inner wall of the outer pipe. A processing unit;
A first processing liquid supply section for supplying a first processing liquid to the processing section;
A second processing liquid supply unit for supplying a second processing liquid to the processing unit;
A double pipe comprising an inner pipe connected to the processing section and an outer pipe connected to the processing section and arranged outside the inner pipe;
A concentration sensor on the inner wall of the outer pipe or the outer wall of the inner pipe;
The first drainage discharged from the processing unit flows through the inner pipe,
A processing apparatus, wherein a second drainage discharged from the processing section and having a temperature lower than that of the first drainage flows between an outer wall of the inner pipe and an inner wall of the outer pipe. In claim 15, claim 16 or claim 19 ,
A processing apparatus comprising a switching valve between the processing unit and the double pipe, and having a valve on at least one of the outer pipe and the inner pipe of the double pipe. Claim 15, claim 16, claim 19 or claim 20 ,
A processing apparatus comprising a temperature adjusting unit in the first processing liquid supply unit.

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