JP4993684B2 - Spray mill - Google Patents

Description

  The present invention is a jet mill that pulverizes or disintegrates an object to be pulverized by a high-speed air flow supplied from an air nozzle. More specifically, a liquid crystal display substrate, a PDP substrate, a glass substrate, a silicon wafer, etc. The present invention relates to a spray jet mill for spraying powder having a predetermined particle size distribution on a substrate surface.

  Conventionally, as a device for pulverizing a material to be pulverized, the material to be pulverized is pulverized by a high-speed air flow supplied to the inside of the pulverization chamber from an air nozzle disposed on the side wall of the pulverization chamber, and is also pulverized by a swirling air flow. A jet mill that also classifies the object to be crushed is known. For example, in Patent Document 1, the space formed inside the jet mill main body is divided into a pulverization zone and a classification zone, and a narrow path is provided between the pulverization zone and the classification zone that is divided and communicated. A jet mill is disclosed in which variation in particle size of a material to be pulverized is reduced so that high classification accuracy can be obtained.

  The powder of the material to be pulverized by the jet mill may be dispersed on the substrate in order to maintain a gap between the substrates, for example. As an apparatus used in such a case, for example, in Patent Document 2, a pressurized gas is supplied into a container containing powder, and the powder is transferred from the container into the housing, and is disposed in the housing. In addition, there has been disclosed an apparatus capable of spraying dry powder without lump by heating and vibrating the container when spraying powder onto a plurality of semiconductor wafers. Further, in Patent Document 3, a powder discharge nozzle is directly connected to a discharge port of an airflow crusher (jet mill) in order to uniformly distribute fine particles having a particle size of about 10 μm or less over the entire surface to be dispersed. A spraying device that is provided and opened inside a housing is disclosed.

  Further, in Patent Document 4, a spacer is accommodated in the state of a dispersion, and a supply device that supplies the dispersion according to a predetermined pressure is applied. There is disclosed a spacer spraying device including an ejector that is crushed by force and a spraying device that transports the pulverized particle aerosol to a predetermined position and sprays it on a substrate.

  Further, Patent Document 5 discloses a nozzle that discharges a spacer on an airflow with respect to a liquid crystal panel stored in a storage box, and a spacer supply suction provided so as to protrude into the airflow in the nozzle. A spacer supply box for supplying a spacer to the suction pipe and a spacer supply box for supplying a spacer to the suction pipe, and a spacer spray formed by opening a suction pipe so as to open an opening for supplying the spacer into the air flow toward the inside of the storage box A mechanism is disclosed.

And in patent document 6, the spray nozzle pipe | tube arrange | positioned and spaced apart from the to-be-spread body, the support part which supports a spray nozzle pipe so that inclination is possible, and the 1st provided in the upper end side of the spray nozzle pipe Two linear motion actuators, each of which is provided in parallel with a predetermined direction or inclined at a predetermined angle and provided with a second joint portion, and a first joint portion and a second joint portion. Fine powder that has two rods that connect each of them, and synthesizes the movements of the two linear actuators to incline the spray nozzle tube in an arbitrary direction and sprays the fine powder on the object to be sprayed. A spraying device is disclosed.
JP 2005-131633 A JP 2003-229341 A JP 2006-51491 A JP-A-5-313171 JP-A-6-148586 Japanese Patent Laid-Open No. 11-276941

  By the way, when an object to be pulverized (for example, a spacer) is pulverized into fine particles having a small particle size distribution using a jet mill, the gap between the liquid crystal display panel substrates may not be maintained at a target value. That is, when spacers having a too small particle size distribution or spacers having a too large particle size distribution are scattered on the substrate, a desired gap cannot be obtained and the liquid crystal display panel becomes defective. Therefore, when the powder of the material to be pulverized by the jet mill is used as a spacer for maintaining a gap, the material to be pulverized needs to be pulverized so as to have a predetermined particle size distribution.

  An object of the present invention is to disperse an object to be pulverized into a state having a required particle size distribution so that powders that serve as spacers for maintaining gaps can be dispersed on a substrate or the like. Is to supply a jet mill.

  The spray jet mill according to claim 1 is arranged with a space between a jet mill main body in which a disk-shaped cavity is formed and a ring-shaped side wall of the jet mill main body, and a center line of the disk-shaped cavity. A plurality of air nozzles that eject an air flow at a predetermined angle to generate a high-speed air flow in the disk-shaped cavity, and a target for supplying a material to be crushed into the disk-shaped cavity of the jet mill body. A pulverized material supply port and an outlet disposed substantially at the center of the disk-shaped cavity of the jet mill body, and the pulverized material supply port pulverizes the material to be crushed from the outlet of the jet mill body. It is provided in the position of the radial direction according to the required particle size distribution at the time of carrying out.

  According to the jet mill for spraying according to the first aspect, the object supply port is provided at a radial position corresponding to the required particle size distribution when the object to be pulverized is pulverized from the outlet of the jet mill main body. The object to be pulverized can be pulverized into a state having a desired required particle size distribution.

  Further, in the spray jet mill according to claim 2, a plurality of the pulverized material supply ports are provided in the jet mill main body at positions having different distances in the radial direction from the outlet according to the required particle size distribution. It is characterized by.

  The jet jet mill according to claim 2 includes a plurality of pulverized object supply ports provided at different positions in the radial direction from the outlet according to the required particle size distribution. Therefore, a powder having a desired required particle size distribution can be easily obtained by supplying the object to be pulverized through the object supply port corresponding to the required particle size distribution.

  The spray jet mill according to claim 3 further includes a pulverized material supply device that supplies the pulverized material to the disk-shaped cavity of the jet mill main body through the pulverized material supply port, The pulverized material supply device and the disk-shaped cavity are connected via a switching device that switches the pulverized material supply port according to the required particle size distribution.

  In the spray jet mill according to the third aspect, the pulverized material supply device and the jet mill main body are connected via a switching device that switches the pulverized material supply port according to the required particle size distribution. Therefore, by switching the plurality of pulverized material supply ports according to the required particle size distribution, powders having different particle size distributions can be easily obtained using one jet mill.

The spraying jet mill according to claim 4 is arranged with a space between a jet mill main body in which a disk-shaped cavity is formed and a ring-shaped side wall of the jet mill main body, and the center of the disk-shaped cavity A plurality of air nozzles that eject an air flow at a predetermined angle with respect to a line to generate a high-speed air flow in the disk-shaped cavity, and supply the object to be crushed into the disk-shaped cavity of the jet mill body To be crushed, and an outlet disposed substantially at the center of the disk-shaped cavity of the jet mill body, wherein the disk-shaped cavity has the high-speed air flow supplied from the plurality of air nozzles. A ring-shaped pulverization zone for pulverizing the material to be pulverized, a classification zone disposed inside the pulverization zone for classifying the material to be pulverized by the air flow, and between the pulverization zone and the classification zone A ring-shaped narrow path that communicates between the pulverization zone and the classification zone, and the pulverized material supply port is provided in the pulverization zone and / or the classification zone of the jet mill body. It is the position which supplies a thing, Comprising: It is provided in the position of the radial direction according to the required particle size distribution at the time of grind | pulverizing the said to-be-ground object from the said exit of the said jet mill main body .

In the spray jet mill according to claim 4, the pulverization zone forming the disk-shaped cavity and the classification zone are communicated by a narrow path, and the pulverized material supply port is provided in the pulverization zone and / or classification zone of the jet mill main body. Is provided at a position in the radial direction corresponding to a required particle size distribution when the object to be pulverized is pulverized from the outlet of the jet mill main body . Accordingly, by supplying the material to be pulverized into the pulverization zone and / or the classification zone, that is, by supplying the material to be pulverized only into the pulverization zone, only into the classification zone, or both, A powder satisfying the required particle size distribution can be easily obtained , and further, the powder has a desired required particle size distribution depending on the position of the pulverized material supply port for supplying the pulverized material into the pulverization zone and / or the classification zone. A powder is obtained.

The spray jet mill according to claim 5 is characterized in that the narrow path has a predetermined opening width, and the predetermined opening width can be adjusted according to the required particle size distribution.

According to the jet mill for spraying according to claim 5 , since the particle size distribution of the obtained powder can be adjusted by adjusting the opening width of the narrow path, the powder satisfying the desired required particle size distribution can be obtained. Can be easily obtained.

In the spray jet mill according to claim 6 , the narrow path is formed at a predetermined position in the radial direction of the disk-shaped cavity, and the predetermined position in the radial direction depends on the required particle size distribution. It is adjustable.

According to the jet mill for spraying according to claim 6 , since the particle size distribution of the obtained powder can be adjusted by adjusting the position where the narrow path is formed, the powder satisfying the desired required particle size distribution. The body can be easily obtained.

The spray jet mill according to claim 7 , wherein when the object to be crushed is pulverized by the high-speed air stream, the wall surface of the jet mill body that forms the disk-shaped cavity, the object to be crushed, The powder of the pulverized object to be pulverized is charged by collision and / or friction generated during the process.

The spray jet mill according to claim 7 charges the powder of the pulverized object to be pulverized. Therefore, the aggregation of the powder can be prevented, and the powder can be uniformly sprayed in the spraying device.

  In the jet mill for spraying of the present invention, the object supply port is provided at a radial position corresponding to the required particle size distribution of the object to be pulverized from the outlet of the jet mill body. Therefore, the finely divided powder and the coarsely pulverized powder are appropriately mixed so that the powder serving as a spacer for holding the gaps can be dispersed on the substrate or the like. Can be pulverized into a state having a desired required particle size distribution.

  In the spray jet mill of the present invention, the disc-shaped cavity of the jet mill body is formed by a pulverization zone and a classification zone communicated by a narrow path, and the pulverized material supply port is provided in the pulverization zone and / or It is provided in the position which supplies a to-be-ground material in a classification zone. Therefore, in order to be able to disperse the powder that serves as a spacer for holding the gaps on the substrate or the like, the object to be crushed is finely divided powder, coarsely pulverized powder, or they are appropriate. It can grind | pulverize in the state which has the desired required particle size distribution mixed in a small ratio.

  In addition, according to the jet mill for spraying of the present invention, since the powder of the pulverized material to be pulverized is charged, powder agglomeration is appropriately prevented and the powder is uniformly distributed in the subsequent spraying device. Can be performed. Further, when the inside of the spraying device is charged to the same polarity as the powder, it is possible to prevent the powder from adhering to the spraying device and perform efficient spraying.

A spray jet mill according to an embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a longitudinal sectional view showing a schematic configuration of a spray jet mill according to a first embodiment. The jet mill has a jet mill main body 2 and an object to be crushed on the jet mill main body 2 (for example, spacers for liquid crystal, aluminum oxide: Al ₂ O ₃ , magnesium oxide: MgO, resin powder, paint powder, other metal oxides, etc.) The to-be-ground object supply apparatus 16 and the jet mill main body 2 are connected via supply pipes 18a to 18c. The jet mill main body 2 is connected to a discharge nozzle 22 that discharges powder discharged through an outlet 6 provided substantially in the center of the pulverization chamber 8 into a spraying device to be described later.

  As shown in FIG. 1, the jet mill main body 2 includes a disk-shaped lower member 10 having a concave portion facing upward and a disk-shaped upper member 12 having a concave portion facing downward, and has a disk shape inside. A crushing chamber 8 is formed. In addition, the upper member 12 is provided with a plurality of pulverized material supply ports 14 a to 14 c for supplying the pulverized material into the pulverizing chamber 8 formed between the upper member 12 and the lower member 10. Each of the pulverized material supply ports 14a to 14c is provided at a radial position corresponding to the required particle size distribution when the pulverized material is pulverized from the outlet 6 provided at the approximate center of the pulverization chamber 8.

  Further, the supply pipes 18 a to 18 c connecting the jet mill main body 2 and the pulverized material supply device 16 require a pulverized material supply port used when the pulverized material is supplied to the jet mill main body 2. Switching valves (switching devices) 20a to 20c that switch according to the particle size distribution are provided. Here, the pulverized material supply device 16 conveys and supplies the pulverized material to the jet mill body 2 together with, for example, compressed air. Therefore, by opening and closing the switching valves 20a to 20c provided in the supply pipes 18a to 18c, which are conveyance paths for the pulverized material, it is possible to switch the pulverized material supply port. Moreover, the discharge nozzle 22 connects the spraying apparatus mentioned later and the jet mill main body 2.

  FIG. 2 is a plan sectional view showing a schematic configuration of a spray jet mill (jet mill main body 2) according to the first embodiment (a plan sectional view in a portion where the lower member 10 and the upper member 12 are joined). ). In the jet mill main body 2, an air flow is ejected at a predetermined angle with respect to the center line 100 of the disc-shaped grinding chamber 8 on a ring-shaped (cylindrical) side wall formed by the lower member 10 and the upper member 12. A plurality of air nozzles 4 are arranged at substantially equal intervals. The lower member 10 and the upper member 12 forming the pulverization chamber 8 are sealed with a sealing material such as an O-ring to prevent leakage of air or fine powder of the pulverized object to be crushed. (Not shown).

  Further, the compressed air supplied from a compressed air source (not shown) is supplied to the air nozzle 4 through a pipe line (not shown), and the air flow is squeezed by the air nozzle 4 to become a high-speed air flow and is jetted into the pulverization chamber 8. Supplied by Here, the air nozzle 4 has an angle of 80 to 40 degrees with respect to the center line 100 of the grinding chamber 8 on the ring-shaped side wall (with respect to the tangent to the ring-shaped side wall). 10 to 50 degrees), more preferably 70 to 50 degrees (20 to 40 degrees with respect to the tangent). The number of air nozzles 4 varies depending on the size of the jet mill body 2, and is not limited to the case shown in FIG.

  Then, the air flow supplied from the air nozzle 4 shown in FIG. 2 is ejected into the grinding chamber 8 at a high speed, and the material to be ground is crushed mainly by the shearing action of the ejected air flow. In addition, the jetted air flow swirls at high speed inside the crushing chamber 8, so that the objects to be crushed supplied inside the crushing chamber 8 also swirl at high speed. It is also crushed by colliding with the wall surface of the crushing chamber 8.

  When the object to be pulverized is pulverized in the pulverization chamber 8, the wall surface of the pulverization chamber 8 (inner wall of the jet mill main body 2) and the object to be pulverized come into contact with each other, and / Due to the friction, the pulverized object to be pulverized is charged (tribocharging).

  For example, when the material to be crushed is supplied via the material to be crushed supply port 14a, the supply pipe 18a connected to the material to be crushed supply port 14a is opened by the switching valve 20a and the material to be crushed by the switching valve 20b. The supply pipe 18b connected to the material supply port 14b is closed, and the supply pipe 18c connected to the pulverized material supply port 14c is closed by the switching valve 20c. Similarly, when the material to be pulverized is supplied through the material supply port 14b, the supply valve 18b connected to the material supply port 14b is opened by the switching valve 20b, and the switching valve 20a and the switching valve 20b are switched. When the supply pipes 18a and 18c are closed by the valve 20c and the pulverized material is supplied via the pulverized material supply port 14c, the supply connected to the pulverized material supply port 14c by the switching valve 20c. The pipe 18c is opened, and the supply pipes 18a and 18b are closed by the switching valve 20a and the switching valve 20b, respectively, and the pulverized material supply port is switched. Here, the closer the position of the pulverized material supply port to the outlet 6, the wider the particle size distribution of the powder, and the farther the position of the pulverized material supply port from the outlet, the more concentrated the particle size distribution of the powder. (High uniformity). In other words, the material to be crushed supplied to the jet mill body 2 is crushed in the pulverizing chamber 8, but the sufficiently pulverized powder is discharged through the outlet 6 because the centrifugal force is small. On the other hand, the large-diameter powder that has not been sufficiently pulverized has a large centrifugal force, so that it is not discharged through the outlet 6 and is continuously pulverized. Here, when the material to be crushed is supplied from the vicinity of the outlet 6, a part of the powder is discharged from the outlet 6 in a large diameter state that is not sufficiently pulverized, and the particle size distribution has a predetermined spread. It becomes a state. And the particle size distribution of the powder becomes wider as the position where the material to be crushed is closer to the outlet.

  Therefore, among the pulverized material supply ports 14a to 14c shown in FIG. 1, when the pulverized material is supplied through the pulverized material supply port 14a, the particle size distribution becomes the most widened state, and the pulverized material supply is performed. When the material to be crushed is supplied through the mouth 14c, the particle size distribution is most concentrated. In addition, the positions of the pulverized object supply ports 14a to 14c are determined using the result of a predetermined experiment or the like performed in advance. Further, FIG. 1 shows a case where three pulverized material supply ports are provided, but the number of pulverized material supply ports can be arbitrarily determined. For example, the optimum required particle size distribution is In one case, the pulverized product supply port may be provided only at a position corresponding to the required particle size distribution.

  Here, the supply of the object to be crushed is performed by selecting any one of the object supply ports corresponding to the required particle size distribution among the object supply ports 14a to 14c to be pulverized. The material to be crushed may be simultaneously supplied from the object to be crushed supply port. Further, if necessary, the pulverized material supply port may be switched during the pulverization process.

  In the spray jet mill according to the first embodiment described above, the pulverized material supply port is arranged substantially linearly in the radial direction from the outlet corresponding to the required particle size distribution. The arrangement of the mouth is not limited to a straight line. That is, the pulverized product supply port may be arranged at any position as long as the position is in the radial direction from the outlet corresponding to the required particle size distribution.

  FIG. 3 is a schematic configuration diagram of a spraying device 30 including the jet mill according to the first embodiment. The spraying device 30 includes a cylindrical casing 32 that prevents the dispersed powder from scattering to the surroundings, and the jet mill main body 2 is connected to the upper portion of the casing 32 via a discharge nozzle 22. ing. In addition, a mounting table 34 for mounting a substrate on which powder is to be dispersed is installed inside the housing 32, and air in the housing 32 and excess powder are placed outside the housing 32 on the bottom surface. A discharge pipe 36 for discharging is provided. By discharging the air in the casing 32 through the discharge pipe 36, the powder supplied through the discharge nozzle 22 can be efficiently taken into the casing 32.

  Further, as shown in FIG. 3, an opening / closing member 38 is disposed in the housing 32. A lifting device (not shown) is connected to the opening / closing member 38, and the opening / closing member 38 is lifted / lowered by the lifting device. That is, when the substrate is carried into (carrying out) the housing 32, the opening / closing member 38 is lowered by the lifting device, and the substrate is carried (carrying out) by, for example, a robot. On the other hand, when the powder is sprayed on the substrate, the opening / closing member 38 is raised by the lifting device to close the conveyance space.

  In addition, a power source 42 is connected to the casing 32 in order to charge the casing 32, and the casing 32 is charged to the same polarity as the supplied powder. For example, when the supplied powder is charged with a positive polarity, the casing 32 is also charged with a positive polarity to prevent the powder from adhering to the inner wall of the casing 32. When the powder is charged, it is effective to charge the mounting table 34 with a polarity different from that of the powder in order to improve the efficiency of applying the powder to the substrate. In this case, generally, by grounding the mounting table, an effect equivalent to that obtained when the mounting table is charged to a polarity different from that of the powder can be obtained.

  When the powder is charged, the powder is prevented from agglomerating with each other, and the casing 32 is charged to the same polarity as the powder, as described above. It is possible to prevent the powder from adhering and reduce the amount of powder used. In addition, by charging the mounting table 34 to a polarity different from that of the powder, the particles of the powder can be quickly settled and efficient dispersion can be performed.

  Next, the powder dispersion process in the dispersion apparatus shown in FIG. 3 will be described. First, the opening / closing member 38 is lowered by the lifting device to form a transfer space, and the substrate is loaded from the transfer space into the spraying device 30 by a robot or the like and placed on the mounting table 34. After the substrate is mounted on the mounting table 34, the opening / closing member 38 is raised by the lifting device to close the transfer space. Next, a pulverized material supply port corresponding to a desired required particle size distribution is selected from the pulverized material supply ports 14a to 14c, and the pulverized material supply port is switched. For example, when the pulverized material supply port 14a is selected, the supply pipe 18a connected to the pulverized material supply port 14a is opened by the switching valve 20a and is connected to the pulverized material supply ports 14b and 14c. The supply pipes 18b and 18c are closed by the switching valves 20b and 20c, thereby switching the pulverized material supply ports.

  Next, an amount of the object to be pulverized corresponding to the powder sprayed in one spraying process is supplied to the jet mill main body 2 through the selected object to be crushed supply port. . In the jet mill body 2, the object to be crushed is supplied from the selected object to be pulverized supply port, and is pulverized into a state having a desired required particle size distribution. When the object to be pulverized is pulverized in the jet mill main body 2, the powder is charged by friction generated between the inner wall in the pulverization chamber 8 and the object to be pulverized.

  The powder pulverized in the jet mill body 2 is discharged into the casing 32 of the spraying device 30 through the outlet 6 and the discharge nozzle 22 and sprayed on the substrate. Here, when the powder is discharged into the housing 32 through the discharge nozzle 22, the powder is further charged by friction generated between the inner wall of the discharge nozzle 22 and the powder. Further, the inside of the housing 32 is charged with the same polarity as the powder. In the spraying device 30, the opening / closing member 38 is lowered by the lifting device to form a transport space, and the substrate on which the powder having a desired required particle size distribution is sprayed is transported from the transport space by a robot or the like.

  Next, a spray jet mill according to a second embodiment will be described with reference to the drawings. In the spray jet mill according to the second embodiment, the same reference numerals are used for the same components as those of the spray jet mill according to the first embodiment, and detailed description of the overlapping components is omitted. To do.

  FIG. 4 is a longitudinal sectional view showing a schematic configuration of a spray jet mill according to the second embodiment. The jet mill has two supply pipes 18 for connecting the jet mill main body 2 and the material to be crushed supply device 16, two pulverized material supply ports 14, and the pulverization chamber 8 has a pulverization zone 8 b. Except for being divided into classification zones 8a, it has the same configuration as the spray jet mill according to the first embodiment. Therefore, the detailed description regarding an overlapping part is abbreviate | omitted.

  The jet mill body 2 according to this embodiment is a ring-shaped barrier formed inside the grinding chamber 8 at a position substantially in the middle of the radial position of the grinding chamber 8 formed as a disk-shaped cavity. An upper partial ring 21a and a lower partial ring 21b are arranged, and the grinding chamber 8 is divided into an outer ring-shaped grinding zone 8b and an inner ring-shaped classification zone 8a.

  The upper partial ring 21a and the lower partial ring 21b have substantially symmetrical shapes. As shown in FIG. 4, the upper partial ring 21a is formed on the upper member 12, and the lower partial ring 21b is formed on the lower member 10. , Each is installed at a position facing each other. A narrow path 23 having a predetermined opening width is formed by the surface facing the lower partial ring 21b of the upper partial ring 21a and the surface facing the upper partial ring 21a of the lower partial ring 21b. Yes.

  As shown in FIG. 4, the wall of the upper partial ring 21a and the lower partial ring 21b disposed in the pulverization chamber 8 on the pulverization zone 8b side is sufficiently crushed by the material to be pulverized in the pulverization zone 8b. Until it is done, it has a shape having an arc-shaped recess so as not to flow into the classification zone 8a from the grinding zone 8b. Further, as shown in FIG. 4, the wall surface of the upper partial ring 21a and the lower partial ring 21b on the classification zone 8a side is covered by a narrow passage 23 between the upper partial ring 21a and the lower partial ring 21b. The crushed product has a shape having an arc-shaped convex portion so as to smoothly flow into the classification zone 8a.

  The opening width of the narrow path 23 can be changed to an arbitrary opening width by exchanging the upper partial ring 21a or the lower partial ring 21b. That is, as the upper partial ring 21a and the lower partial ring 21b, those having various opening widths of the narrow path 23 are prepared, and the upper partial ring 21a or the lower partial ring 21b arranged in the crushing chamber 8 are prepared. By exchanging, the opening width of the narrow path 23 can be changed according to the desired required particle size distribution.

  FIG. 5 is a diagram showing a case where the opening width of the narrow path 23 is made narrower than that shown in FIG. 4 by replacing the lower partial class ring 21b. In FIG. 5, the opening width of the narrow path 23 is adjusted by replacing the lower partial ring 21b. However, the opening width of the narrow path 23 is adjusted by replacing the upper partial ring 21a. You may make it do. Further, the opening width of the narrow path 23 may be adjusted by exchanging the upper partial class ring 21a and the lower partial class ring 21b. By adjusting the opening width of the narrow path 23, the particle size distribution of the obtained powder can be adjusted, and a powder having a desired required particle size distribution can be obtained. Note that when the object to be crushed is actually pulverized, the opening width of the narrow path 23 is set to a state having an opening width corresponding to a desired required particle size distribution based on a predetermined experimental result or the like. The

  Moreover, the required particle size distribution of the obtained powder can be adjusted by changing the formation position of the narrow path 23 by exchanging the upper partial ring 21a and the lower partial ring 21b. FIG. 6 is a diagram illustrating an example of the jet mill body 2 when the formation position of the narrow path 23 is changed.

  In FIG. 6, the narrow path 23 is formed at a position away from the center line 100 of the crushing chamber 8 as compared with the case shown in FIG. 4. By adjusting the formation position of the narrow path 23, the particle size distribution of the obtained powder can be adjusted, and a powder having a desired required particle size distribution can be obtained. Note that when the object to be crushed is actually crushed, a narrow path 23 is formed at a formation position corresponding to a desired required particle size distribution based on a predetermined experimental result or the like performed in advance.

  FIG. 7 is a diagram illustrating an example of the jet mill main body 2 when the shape of the narrow path 23 is changed. In FIG. 7, the surface of the upper partial ring 21a and the lower partial ring 21b arranged in the pulverization chamber 8 on the classification zone 8a side is pulverized from the classification zone 8a by the material to be crushed in the classification zone 8a. It has a shape having an arcuate recess so that it does not easily flow into the zone 8b. Further, as shown in FIG. 7, the wall surfaces of the upper partial ring 21a and the lower partial ring 21b on the side of the pulverization zone 8b allow the material to be pulverized in the pulverization zone 8b to smoothly flow into the classification zone 8a. Furthermore, it has a shape having an arc-shaped convex portion.

  Here, while adjusting the opening width of the narrow path 23, the shape of the narrow path 23 may be adjusted. That is, a predetermined experiment is performed in advance on the opening width and shape of the narrow path 23, and the opening width and formation position corresponding to a desired required particle size distribution are set based on the result of the experiment, and the object to be crushed is crushed. You may make it perform.

  In the jet mill according to the second embodiment, as in the jet mill according to the first embodiment, when the material to be crushed is pulverized in the pulverization chamber 8 and the powder is discharged via the discharge nozzle 22. In each case, the powder is charged by collision and / or frictional charging.

  In the spray jet mill according to the second embodiment described above, the narrow path is formed by installing the upper partial ring and the lower partial ring, but the narrow ring is not used without using the classification ring. A path may be formed. That is, you may make it form a narrow path by making the upper member and lower member which comprise a jet mill main body into the shape which each has a predetermined convex part. In this case, the width of the narrow path can be changed by exchanging the upper member or the lower member, or the upper member and the lower member, and the position where the narrow path is formed by exchanging the upper member and the lower member. Can be changed.

  In the spray jet mill according to the second embodiment described above, the particle size distribution of the obtained powder is adjusted by adjusting the position of the pulverized material supply port for supplying the pulverized material into the classification zone. You may make it do. In that case, the particle size distribution of the powder to be obtained can be adjusted by adjusting the position of the pulverized material supply port without adjusting the opening width or the formation position of the narrow path.

  Further, the particle size distribution of the obtained powder may be finely adjusted by adjusting the position of the object to be crushed, the opening width of the narrow path, and the formation position of the narrow path. That is, the particle size distribution of the obtained powder can be adjusted appropriately by combining the position of the object to be crushed, the opening width of the narrow path, and the position where the narrow path is formed, and making adjustments for each. In this case, based on the results of experiments conducted in advance, the optimum combination of the position of the object to be pulverized, the opening width of the narrow path and the position of formation of the narrow path is set, and the object to be pulverized You may make it perform.

  FIG. 8 is a schematic configuration diagram of a spraying device 30 including a jet mill according to the second embodiment. The spraying apparatus shown in FIG. 8 includes a jet mill (jet mill according to the second embodiment) different from the jet mill (jet mill according to the first embodiment) included in the spraying apparatus shown in FIG. Since it is the same structure except being, detailed description is abbreviate | omitted. Further, the powder spraying process in the spraying apparatus shown in FIG. 8 is also performed in the same manner as the powder spraying process in the spraying apparatus shown in FIG.

  In the spray jet mill according to the above-described embodiment, the material to be pulverized is pulverized in a state having the required particle size distribution. Therefore, the powder that serves as a spacer can be sprayed on the substrate by the spraying device.

  In the spray jet mill according to the above-described embodiment, the air nozzles are arranged at substantially equal intervals on the ring-shaped side wall, but the arrangement of the air nozzles is not limited to substantially equal intervals. That is, as long as an air flow necessary for pulverizing the object to be pulverized can be supplied in the pulverization chamber, the air flow may not be arranged at substantially equal intervals.

It is a longitudinal section showing the composition of the jet mill concerning a 1st embodiment. It is a plane sectional view showing composition of a jet mill (jet mill main part) concerning a 1st embodiment. It is a figure which shows the structure of the spraying apparatus which concerns on 1st Embodiment. It is a longitudinal cross-sectional view which shows the structure of the jet mill which concerns on 2nd Embodiment. It is a figure which shows an example at the time of changing the opening width of the narrow path of the jet mill main body which concerns on 2nd Embodiment. It is a figure which shows an example at the time of changing the formation position of the narrow path of the jet mill main body which concerns on 2nd Embodiment. It is a figure which shows an example at the time of changing the shape of the narrow path of the jet mill main body which concerns on 2nd Embodiment. It is a figure which shows the structure of the spraying apparatus which concerns on 2nd Embodiment.

Explanation of symbols

  2 ... jet mill main body, 4 ... air nozzle, 6 ... outlet, 8 ... grinding chamber, 8a ... classification zone, 8b ... grinding zone, 10 ... lower member, 12. ..Upper member, 14a to 14b ... object to be crushed supply port, 18a to 18c ... supply pipe, 20a to 20c ... switching valve, 21a ... upper partial ring, 21b ... lower part Class ring, 22 ... discharge nozzle, 23 ... narrow path, 30 ... spraying device.

Claims (7)

A jet mill body in which a disk-shaped cavity is formed;
The jet mill main body is arranged with a space between the ring-shaped side walls, and an air flow is ejected at a predetermined angle with respect to the center line of the disk-shaped cavity, thereby generating a high-speed air flow in the disk-shaped cavity. A plurality of air nozzles,
In the disk-shaped cavity of the jet mill main body, an object supply port for supplying an object to be pulverized,
An outlet disposed substantially in the center of the disk-shaped cavity of the jet mill body,
The object to be crushed supply port is
A spray jet mill for spraying, which is provided at a radial position corresponding to a required particle size distribution when the material to be crushed is pulverized from the outlet of the jet mill body. The object to be crushed supply port is
2. The spray jet mill according to claim 1, wherein a plurality of spray mills are provided in the jet mill main body at positions having different distances in the radial direction from the outlet according to the required particle size distribution. A pulverized material supply device for supplying the pulverized material to the disk-shaped cavity of the jet mill main body through the pulverized material supply port;
The said to-be-ground material supply apparatus and the said disk-shaped cavity are connected via the switching apparatus which switches the said to-be-ground material supply port according to the said required particle size distribution. Spray mill for spraying. A jet mill body in which a disk-shaped cavity is formed;
The jet mill main body is arranged with a space between the ring-shaped side walls, and an air flow is ejected at a predetermined angle with respect to the center line of the disk-shaped cavity, thereby generating a high-speed air flow in the disk-shaped cavity. A plurality of air nozzles,
In the disk-shaped cavity of the jet mill main body, an object supply port for supplying an object to be pulverized,
An outlet disposed substantially in the center of the disk-shaped cavity of the jet mill body,
The disk-shaped cavity is
A ring-shaped crushing zone for crushing the material to be crushed by the high-speed air flow supplied from the plurality of air nozzles;
A classification zone disposed inside the pulverization zone for classifying the material to be crushed by the air flow;
It is arranged between the pulverization zone and the classification zone, and has a ring-shaped narrow path that communicates the pulverization zone and the classification zone,
The object to be crushed supply port is
A position for supplying the material to be crushed into the pulverization zone and / or the classification zone of the jet mill body ;
A spray jet mill for spraying, which is provided at a radial position corresponding to a required particle size distribution when the material to be crushed is pulverized from the outlet of the jet mill body . The narrow road is
The spray jet mill according to claim 4 , wherein the spraying mill has a predetermined opening width, and the predetermined opening width can be adjusted according to the required particle size distribution. The narrow road is
Is formed at a predetermined position in the radial direction of the disc-shaped cavity, the predetermined position of the radially of claim 4 or claim 5, wherein the adjustable in response to the request particle size distribution Spray mill for spraying. When the object to be pulverized is pulverized by the high-speed air flow, the object is pulverized by collision and / or friction generated between the wall surface of the jet mill body forming the disk-shaped cavity and the object to be pulverized. The spray jet mill according to any one of claims 1 to 6 , wherein the powder of the material to be ground is charged.

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