JP4989455B2 - Control apparatus and control method - Google Patents

Description

  The present invention relates to a control device and a control method for a multi-loop temperature control system that suppresses the sum of operation amount outputs to be equal to or less than an operation amount output upper limit value of the entire control device.

  Conventionally, a control device such as a temperature controller may be instrumented to constitute a multi-loop temperature control system. FIG. 2 is a diagram showing an example of a temperature control system to which the control device of the present invention is applied. Since the configuration is similar in the prior art, the multi-loop temperature control system will be briefly described with reference to FIG. To do. In the example of FIG. 2, the temperature inside the firing furnace 10 is controlled by the temperature controller 15. The heaters 11 and 12 heat the regions A1 and A2 in the firing furnace 10 in accordance with the operation amounts MV1 and MV2 output from the temperature controller 15. The sensor 13 measures the temperature PV1 of the area A1 heated by the heater 11, and the sensor 14 measures the temperature PV2 of the area A2 heated by the heater 12. The temperature controller 15 calculates the operation amount MV1 so that the temperature PV1 matches the set value SP1, and calculates the operation amount MV2 so that the temperature PV2 matches the set value SP2.

  In such a multi-loop temperature control system, the sum of the manipulated variable outputs MV1, MV2 is the manipulated variable output of the entire control device for the purpose of achieving both controllability and energy consumption within an acceptable range. There has been proposed a control device of a multi-loop temperature control system that suppresses the upper limit value or less (see Patent Document 1).

JP 2002-49401 A

  For example, when a plurality of heaters are used for temperature control in a single machine and a plurality of temperature control loops are formed, the technique disclosed in Patent Document 1 is used to limit the total power. It can be used as a method. In this case, a power supply device such as a breaker can be downsized. However, if the resistance value of the heater changes due to aging, the relationship between the current value estimated in the initial design of the control system and the manipulated variable MV changes, so the sum of the current values estimated in the design and the actual value There was a possibility of deviation from the sum of the current values. Considering the miniaturization of a power supply device such as a breaker, the total sum of current values is rather important, and it is not preferable to be affected by the aging of the heater.

  The present invention has been made to solve the above-described problem, and in a multi-loop temperature control system that suppresses the total operation amount output to be equal to or lower than the operation amount output upper limit value of the entire control device, the total current value is reduced. It is an object to provide a control device and a control method that can be limited.

The present invention provides a control device for a multi-loop temperature control system that suppresses the sum of operation amount outputs of a plurality of controllers that respectively control a plurality of heaters to be equal to or less than an operation amount output upper limit value of the entire control device. The total current value calculating means for calculating the sum of the current values flowing through the plurality of heaters according to the operation amount output from the controller, and the operation amount output upper limit value of the entire control device is calculated by the total current value calculating means. And a total manipulated variable output upper limit calculating means for correcting based on the total current value.
Further, one configuration example of the control device of the present invention further includes a total manipulated variable value calculating means for calculating a total manipulated variable value that is a sum of manipulated variable outputs from the plurality of controllers, and the total manipulated variable output upper limit. When the total current value is CTa, the total manipulated variable value is MTa, and the predetermined reference total current value is CTr, the value calculating means sets the manipulated variable output upper limit MT1 of the entire control device as MT1 = MTa. It is calculated by (CTr / CTa).

  Further, according to one configuration example of the control device of the present invention, as the controller, a priority controller that calculates an operation amount output according to a first operation amount output upper limit, and an operation amount according to a second operation amount output upper limit. A non-priority controller for calculating the output, and the first operation amount output upper limit input in advance so that the operation amount output of the priority controller is equal to or less than the operation amount output upper limit value of the entire control device. The priority side upper limit processing means for limiting the size and giving to the priority side controller, and the sum of the operation amount outputs of the priority side controller and the non-priority side controller are less than or equal to the operation amount output upper limit value of the entire control device. In addition, a non-priority side upper limit calculating means for calculating the second operation amount output upper limit and giving it to the non-priority controller, and the non-priority controller for the second operation amount output upper limit. The priority side upper limit processing means performs a calculation to increase or decrease the first operation amount output upper limit according to the margin of the operation amount output of the controller, and uses the calculated value as the first operation amount output upper limit of the next control cycle. A priority-side upper limit calculation means to be provided.

  In addition, according to one configuration example of the control device of the present invention, the first to m-th (m is n-1) priorities are assigned in advance as the n (n is an integer of 3 or more) controllers, The first to m-th controllers that calculate the operation amount outputs according to the corresponding first to m-th operation amount output upper limits, respectively, are ranked in advance in the lowest order, and are operated according to the n-th operation amount output upper limit. An n-th controller that calculates a quantity output, and is provided for each k-th (k is an integer from 1 to m) controller, and a sum of operation quantity outputs of the first to k-th controllers is the control device. First to m-th priority side upper limit processing means for limiting the magnitude of the kth operation amount output upper limit inputted in advance so as to be equal to or less than the entire operation amount output upper limit, The first to mth controllers and the nth controller Non-priority upper limit calculation means for calculating the nth operation amount output upper limit and giving it to the nth controller so that the sum of the operation amount outputs of the controller is equal to or less than the operation amount output upper limit value of the entire control device. The k-th operation amount output upper limit is calculated according to the margin of the operation amount output of the (k + 1) th controller with respect to the (k + 1) th operation amount output upper limit. And a first to mth priority side upper limit calculating means for giving the value to the kth priority side upper limit processing means as the kth operation amount output upper limit of the next control cycle.

  Further, the present invention provides a control method for a multi-loop temperature control system that suppresses the sum of operation amount outputs of a plurality of controllers that respectively control a plurality of heaters to be equal to or less than an operation amount output upper limit value of the entire control device. A total current value calculation procedure for calculating a sum of current values flowing through the plurality of heaters according to operation amount outputs from a plurality of controllers, and an operation amount output upper limit value for the entire control device are calculated by the total current value calculation procedure. And a total manipulated variable output upper limit calculation procedure for correcting based on the total current value.

  According to the present invention, the sum of the current values flowing through the plurality of heaters is calculated, and the operation amount output upper limit value of the entire control device is corrected based on the total current value. In the control device of the multi-loop temperature control system that suppresses the manipulated variable output to be less than or equal to the operation amount output upper limit value, even if the resistance value of the heater changes due to secular change, the total current value can be limited. In the present invention, since the existing CT value measurement function provided in the temperature controller can be used, the total sum of current values can be limited without adding a special device.

[Principle of the Invention]
In the technique disclosed in Patent Document 1, the operation amount output upper limit value of the entire apparatus is basically a fixed value set by the user. However, if the manipulated variable output upper limit value is fixedly set, there is a possibility that it will be affected by the secular change of the heater. Therefore, the inventor has noticed that it is possible to improve the operation amount output upper limit value of the entire apparatus appropriately so that the original purpose can be reliably achieved. Further, the inventor has noticed that a control device such as a temperature controller is equipped with a CT value measurement function that always measures the true value of the energization state (current) to the heater in preparation for the heater disconnection. Then, the inventor has conceived that it is effective to solve the problem if the upper limit value of the manipulated variable output of the entire apparatus is corrected while sequentially comparing with the total of the actually measured heater current values.

[First Embodiment]
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram showing a configuration of a control device according to the first embodiment of the present invention.
The control device includes a total current value calculating unit C_CTa, a total manipulated variable value calculating unit C_MTa, a total manipulated variable output upper limit calculating unit C_MT1, a priority controller PID1, a non-priority controller PID2, and a priority upper limit processor. L_MH1, a non-priority upper limit calculation unit C_MH2, and a priority upper limit calculation unit C_MH1.

  In the present embodiment, for example, in an apparatus (semiconductor manufacturing apparatus, etc.) having two loops in one apparatus having a control system using an electric heater as an actuator, the control characteristics of one of the control loops need not be considered as important. These two loops can be applied as a target. In this case, the controller of the control loop that requires emphasis on the control characteristics is the priority controller, and the controller of the control loop that does not require much emphasis on the control characteristics is the non-priority controller.

  FIG. 2 is a diagram illustrating an example of a temperature control system to which the control device of the present embodiment is applied. In the example of FIG. 2, the temperature inside the firing furnace 10 is controlled by the temperature controller 15. The heaters 11 and 12 heat the regions A1 and A2 in the firing furnace 10 in accordance with the operation amounts MV1 and MV2 output from the temperature controller 15. The sensor 13 measures the temperature PV1 of the area A1 heated by the heater 11, and the sensor 14 measures the temperature PV2 of the area A2 heated by the heater 12. The temperature controller 15 calculates the operation amount MV1 so that the temperature PV1 matches the set value SP1, and calculates the operation amount MV2 so that the temperature PV2 matches the set value SP2. The control device in FIG. 1 is provided inside the temperature controller 15. The temperature controller 15 has a CT value measuring function for measuring the current values CT1 and CT2 flowing through the heaters 11 and 12 in accordance with the outputs of the manipulated variables MV1 and MV2.

Hereinafter, the operation of the control device of the present embodiment will be described. FIG. 3 is a flowchart showing the operation of the control device of FIG. In the following description, the operation amount output upper limit value of the entire control device is regarded as the entire operation amount output upper limit value, and is distinguished from other operation amount output upper limit values.
First, the priority-side upper limit processing unit L_MH1 is an operation amount output upper limit value MH1 indicating the upper limit of the operation amount output MV1 of the priority-side controller PID1, and the total operation amount output upper limit value output from the total operation amount output upper limit calculation unit C_MT1. When the manipulated variable output upper limit value MH1 is larger than the total manipulated variable output upper limit value MT1 by comparing with MT1, MH1 = MT1, that is, the upper limit for setting the total manipulated variable output upper limit value MT1 as a new manipulated variable output upper limit value MH1. Processing is performed (step S101 in FIG. 3).

  Then, the priority side upper limit processing unit L_MH1 outputs the updated operation amount output upper limit value MH1 to the priority side controller PID1 and the priority side upper limit calculation unit C_MH1. When the manipulated variable output upper limit value MH1 is less than or equal to the overall manipulated variable output upper limit value MT1, it is not necessary to update the manipulated variable output upper limit value MH1, and the current manipulated variable output upper limit value MH1 may be output as it is. In the first control cycle, a predetermined initial value of the total manipulated variable output upper limit MT1 is output from the total manipulated variable output upper limit calculating unit C_MT1. The initial value of the manipulated variable output upper limit value MH1 in the first control cycle is set to 100%, for example.

  Next, the priority controller PID1 executes a PID calculation to calculate an operation amount output MV1 (step S102). In step S102, the priority controller PID1 calculates the internal output value UC1, which is the operation amount before performing the upper limit process based on the operation amount output upper limit value MH1, by the PID calculation as follows.

UC1 = Kg1 {1 + 1 / (Ti1s) + Td1s} (SP1-PV1) (1)
In Equation (1), Kg1 is the proportional gain of the controller PID1, Ti1 is the integration time of the controller PID1, Td1 is the differential time of the controller PID1, SP1 is a set value set for the control target of the controller PID1, and PV1 is the control target Control amount. The proportional gain Kg1, the integration time Ti1, the differential time Td1, and the set value SP1 are set in advance, and the control amount PV1 is detected by a sensor (not shown).

  Subsequently, the priority controller PID1 compares the calculated internal output value UC1 with the operation amount output upper limit value MH1 output from the priority side upper limit processing unit L_MH1, and the internal output value UC1 is greater than the operation amount output upper limit value MH1. If it is larger, MV1 = MH1, that is, an upper limit process is performed in which the operation amount output upper limit value MH1 is set to the operation amount output MV1, and when the internal output value UC1 is less than or equal to the operation amount output upper limit value MH1, The value UC1 is set as the manipulated variable output MV1.

The priority controller PID1 outputs the calculated operation amount output MV1 to the control target (the actual output destination is the heater 11 in FIG. 2), the non-priority side upper limit calculation unit C_MH2, and the total operation amount value calculation unit C_MTa. The internal output value UC1 is output to the priority side upper limit calculation unit C_MH1.
Above, the process of step S102 is complete | finished.

Next, the non-priority side upper limit calculation unit C_MH2 calculates an operation amount output upper limit value MH2 indicating the upper limit of the operation amount output MV2 of the non-priority controller PID2, as shown in the following equation, and this operation amount output upper limit value MH2 is calculated. Output to the non-priority controller PID2 (step S103).
MH2 = MT1-MV1 (2)

  The non-priority controller PID2 calculates the manipulated variable output MV2 by executing the PID calculation (step S104). In step S104, the non-priority controller PID2 calculates an internal output value UC2 that is an operation amount before the upper limit process based on the operation amount output upper limit value MH2 by the PID calculation as follows.

UC2 = Kg2 {1 + 1 / (Ti2s) + Td2s} (SP2-PV2) (3)
In Equation (3), Kg2 is the proportional gain of the controller PID2, Ti2 is the integration time of the controller PID2, Td2 is the differential time of the controller PID2, SP2 is a set value set for the control target of the controller PID2, and PV2 is the control target Control amount. The proportional gain Kg2, the integration time Ti2, the differential time Td2 and the set value SP2 are set in advance, and the control amount PV2 is detected by a sensor (not shown).

  Subsequently, the non-priority controller PID2 compares the calculated internal output value UC2 with the operation amount output upper limit value MH2 output from the non-priority upper limit calculation unit C_MH2, and the internal output value UC2 becomes the operation amount output upper limit value. If it is larger than MH2, MV2 = MH2, that is, an upper limit process is performed in which the manipulated variable output upper limit value MH2 is set to the manipulated variable output MV2. If the internal output value UC2 is less than or equal to the manipulated variable output upper limit value MH2, MV2 = UC2. The internal output value UC2 is set as an operation amount output MV2.

The non-priority controller PID2 outputs the calculated operation amount output MV2 to the control target (the actual output destination is the heater 12 in FIG. 2), the priority upper limit calculation unit C_MH1, and the total operation amount value calculation unit C_MTa. The internal output value UC2 is output to the priority side upper limit calculation unit C_MH1.
Above, the process of step S104 is complete | finished.

Next, the priority side upper limit calculation unit C_MH1 calculates an operation amount output upper limit value MH1 ′ of the next control cycle of the priority side controller PID1 (step S105).
In step S105, the priority upper limit calculation unit C_MH1 determines whether or not the following equation is established based on the internal output value UC2 and the operation amount output MV2 output from the non-priority controller PID2.

α (UC2−MV2)> 0 (4)
α is a priority coefficient indicating the priority of control of the priority controller PID1 with respect to the non-priority controller PID2, and takes a real value from 0 to 1 (priority is maximum when 0, and priority is minimum when 1).

  The priority side upper limit calculation unit C_MH1 outputs the operation amount output upper limit value MH1 of the current control cycle output from the priority side upper limit processing unit L_MH1 and the internal output value UC1 output from the priority side controller PID1 when Expression (4) is satisfied. Based on the operation amount output MV2 and the internal output value UC2 output from the non-priority controller PID2, the operation amount output upper limit value MH1 ′ of the next control cycle of the priority controller PID1 is calculated as follows: The manipulated variable output upper limit value MH1 ′ is output to the priority side upper limit processing unit L_MH1.

MH1 ′ = [MH1Tx1 + {UC1−α (UC2−MV2)} dT] / (Tx1 + dT)
... (5)
Tx1 is a transition time, for example, Tx1 = Td1. dT is a control cycle.

Further, when the formula (4) is not satisfied, the priority side upper limit calculation unit C_MH1 is based on the operation amount output upper limit value MH1 and the total operation amount output upper limit value MT1 of the current control period output from the priority side upper limit processing unit L_MH1. Then, the operation amount output upper limit value MH1 ′ is calculated as follows, and this operation amount output upper limit value MH1 ′ is output to the priority side upper limit processing unit L_MH1.
MH1 ′ = [MH1Tx1 + MT1dT] / (Tx1 + dT) (6)
Thus, the process of step S105 is completed.

Next, currents according to the operation amount outputs MV1 and MV2 flow through the heaters 11 and 12, respectively. The total current value calculation unit C_CTa calculates a total current value CTa, which is the sum of the current values CT1 and CT2 flowing through the heaters 11 and 12 measured by a CT value measurement unit (not shown) of the control device, as follows: (Step S106).
CTa = CT1 + CT2 (7)

On the other hand, the total manipulated variable value calculation unit C_MTa calculates a total manipulated variable value MTa that is the sum of the manipulated variable outputs MV1 and MV2 as in the following equation (step S107).
MTa = MV1 + MV2 (8)

The total manipulated variable output upper limit calculation unit C_MT1 calculates the total manipulated variable output upper limit MT1 of the next control cycle from the total current value CTa and the total manipulated variable value MTa as shown in the following equation (step S108).
MT1 = MTa (CTr / CTa) (9)
In Expression (9), CTr is a reference total current value given in advance, and corresponds to a desired total current value. Through the processing in step S108, the total manipulated variable output upper limit MT1 is corrected.

The processes in steps S101 to S108 as described above are repeated every control cycle dT until the control is stopped by an instruction from an operator or the like (YES in step S109).
The priority side upper limit processing unit L_MH1 uses MH1 = MH1 ′, ie, the operation amount output upper limit value MH1 ′ calculated and output by the priority side upper limit calculation unit C_MH1 in the previous control cycle as the operation amount output upper limit value MH1 in the current control cycle. Then, the process of step S101 is performed.

  Thus, in the present embodiment, in order to always maintain the sum of the operation amount output MV1 of the priority controller PID1 and the operation amount output MV2 of the non-priority controller PID2 at or below the total operation amount output upper limit value MT1, The operation amount output upper limit value MH2 of the priority controller PID2 is set to MT1-MV1 (step S103).

  If equation (4) is not satisfied, that is, if the internal output value UC2 of the non-priority controller PID2 has a margin with respect to the manipulated variable output upper limit value MH2 (UC2 ≦ MH2), priority is given using equation (6). The operation amount output upper limit value MH1 of the side controller PID1 is increased to asymptotically approach the overall operation amount output upper limit value MT1 (step S105). As a result, the priority controller PID1 can output a larger manipulated variable output MV1. The transition time Tx1 at this time is the time until the manipulated variable output upper limit value MH1 transitions to the total manipulated variable output upper limit value MT1 (more precisely, the manipulated variable output upper limit value MH1 and the total manipulated variable output upper limit value MT1 When the interval is 100%, the time until it fluctuates 63.2%).

  Further, when Expression (4) is satisfied, that is, when the internal output value UC2 of the non-priority controller PID2 has no margin with respect to the manipulated variable output upper limit value MH2 (UC2> MH2), priority is given using Expression (5). The operation amount output upper limit value MH1 of the side controller PID1 is asymptotically approached in the direction of decreasing by the output shortage (UC2-MV2) of the non-priority side controller PID2 (step S105). As a result, the operation amount output MV1 of the priority controller PID1 is suppressed. The transition time Tx1 at this time is the time until the manipulated variable output upper limit value MH1 shifts to UC1- (UC2-MV2).

When the operation amount output upper limit value MH1 of the priority controller PID1 is reduced when the equation (4) is satisfied, the output shortage (UC2-MV2) of the non-priority controller PID2 which is an index of the decrease is calculated. Is multiplied by a priority factor α. By adjusting the value of the priority coefficient α, it is possible to maintain the controllability of the non-priority controller PID2 in a possible range without giving priority to the priority controller PID1 excessively.
As described above, in the present embodiment, the sum of the two-loop manipulated variable outputs MV1 and MV2 is maintained below the overall manipulated variable output upper limit MT1, and a good control state is maintained for the control variable PV1 having a high priority. can do.

  Further, in the present embodiment, the total manipulated variable output upper limit MT1 is corrected based on the total current value CTa and the total manipulated variable value MTa, so that even if the resistance value of the heater changes due to aging, the current value Can be limited. Moreover, in this Embodiment, since the existing CT value measurement function provided in the temperature controller can be utilized, the sum total of an electric current value can be restrict | limited without adding a special apparatus.

[Embodiment 2]
FIG. 4 is a block diagram showing a configuration of a control device according to the second embodiment of the present invention. 4 includes a total current value calculating unit C_CTa, a total manipulated variable value calculating unit C_MTa, an overall manipulated variable output upper limit calculating unit C_MT1, and the first to mth (m is an integer of 2 or more). For each of the first to m-th priority controllers PID1 to PIDm to which the first priority is assigned, the non-priority controller (n-th controller) PIDn that is ranked in the lowest order, and the priority controllers PID1 to PIDm Provided for each of the first to mth priority side upper limit processing units L_MH1 to L_MHm, the non-priority side upper limit calculation unit C_MHn provided corresponding to the non-priority side controller PIDn, and the priority side controllers PID1 to PIDm. The first to m-th priority side upper limit calculation units C_MH1 to C_MHm are configured.

In the present embodiment, for example, in a device (for example, a semiconductor manufacturing device, etc.) having a control system using an electric heater as an actuator in a single device, where n (n is an integer of 3 or more, n = m + 1), these priorities are used. When the control characteristics of the control loop do not need to be emphasized according to the above, it is possible to apply these n loops as targets.
Since the temperature control system to which the control device of the present embodiment is applied has the configuration of FIG.

Hereinafter, the operation of the control device of the present embodiment will be described. FIG. 5 is a flowchart showing the operation of the control device of FIG. Here, description will be made on the priority order of PID1, PID2, PID3,..., PIDm, PIDn.
First, the first priority side upper limit processing unit L_MH1 outputs the operation amount output upper limit value MH1 and the total operation amount output upper limit value calculation unit C_MT1 of the first priority side controller PID1 having the highest priority. When the manipulated variable output upper limit value MH1 is larger than the total manipulated variable output upper limit value MT1 by comparing with the output upper limit value MT1, MH1 = MT1, that is, the total manipulated variable output upper limit value MT1 is set to the new manipulated variable output upper limit value MH1. Is performed (step S201 in FIG. 5).

  Then, the first priority upper limit processing unit L_MH1 outputs the updated manipulated variable output upper limit value MH1 to the first priority controller PID1 and the first priority upper limit calculation unit C_MH1. When the manipulated variable output upper limit value MH1 is less than or equal to the overall manipulated variable output upper limit value MT1, it is not necessary to update the manipulated variable output upper limit value MH1, and the current manipulated variable output upper limit value MH1 may be output as it is. Similar to the first embodiment, in the first control cycle, a predetermined initial value of the total manipulated variable output upper limit MT1 is output from the total manipulated variable output upper limit calculating unit C_MT1.

Next, the first priority controller PID1 calculates a manipulated variable output MV1 by executing a PID calculation (step S202). In step S202, the first priority controller PID1 calculates the internal output value UC1 by the PID calculation as follows:
UC1 = Kg1 {1 + 1 / (Ti1s) + Td1s} (SP1-PV1) (10)

  Subsequently, the first priority controller PID1 compares the calculated internal output value UC1 with the manipulated variable output upper limit value MH1 output from the first priority upper limit processing unit L_MH1, and the internal output value UC1 operates. When it is larger than the quantity output upper limit value MH1, an upper limit process is performed in which MV1 = MH1, that is, the manipulated variable output upper limit value MH1 is set to the manipulated variable output MV1. = UC1, that is, the internal output value UC1 is set as the manipulated variable output MV1.

The first priority controller PID1 uses the calculated operation amount output MV1 as a control target (not shown) (the actual output destination is a heater corresponding to the controller PID1), the second priority upper limit processing unit L_MH2, and the total operation amount value. Simultaneously with output to the calculation unit C_MTa, the internal output value UC1 is output to the first priority upper limit calculation unit C_MH1.
Above, the process of step S202 is complete | finished.

Next, the second priority side upper limit processing unit L_MH2 operates the second priority side controller PID2 based on the operation amount output MV1 output from the first priority side controller PID1 and the overall operation amount output upper limit value MT1. An upper limit value MT2 for performing upper limit processing on the quantity output upper limit value MH2 is calculated according to the following equation (step S203).
MT2 = MT1-MV1 (11)

  Subsequently, the second priority side upper limit processing unit L_MH2 compares the operation amount output upper limit value MH2 with the upper limit value MT2 of the second priority side controller PID2, and the operation amount output upper limit value MH2 is larger than the upper limit value MT2. In this case, MH2 = MT2, that is, an upper limit process is performed in which the upper limit value MT2 is set as a new manipulated variable output upper limit value MH2 (step S204).

  Then, the second priority side upper limit processing unit L_MH2 outputs the updated operation amount output upper limit value MH2 to the second priority side controller PID2 and the second priority side upper limit calculation unit C_MH2. When the manipulated variable output upper limit value MH2 is equal to or lower than the upper limit value MT2, it is not necessary to update the manipulated variable output upper limit value MH2, and the current manipulated variable output upper limit value MH2 may be output as it is.

The second priority controller PID2 executes the PID calculation to calculate the manipulated variable output MV2 (step S205). In step S205, the second priority controller PID2 calculates the internal output value UC2 by the PID calculation as follows:
UC2 = Kg2 {1 + 1 / (Ti2s) + Td2s} (SP2-PV2) (12)

  Subsequently, the second priority controller PID2 compares the calculated internal output value UC2 with the operation amount output upper limit value MH2 output from the second priority upper limit processing unit L_MH2, and the internal output value UC2 operates. When it is larger than the quantity output upper limit value MH2, MV2 = MH2, that is, an upper limit process for setting the manipulated variable output upper limit value MH2 as the manipulated variable output MV2 is performed. = UC2, that is, the internal output value UC2 is set as the manipulated variable output MV2.

Then, the second priority controller PID2 controls the calculated operation amount output MV2 to be controlled (not shown) (the actual output destination is a heater corresponding to the controller PID2), the first priority upper limit calculation unit C_MH1, and the third priority. At the same time as output to the upper limit processing unit L_MH3 and the total manipulated variable value calculation unit C_MTa, the internal output value UC2 is output to the first priority upper limit calculation unit C_MH1 and the second priority upper limit calculation unit C_MH2.
Above, the process of step S205 is complete | finished.

Next, the first priority side upper limit calculation unit C_MH1 calculates the operation amount output upper limit value MH1 ′ of the next control cycle of the first priority side controller PID1 (step S206).
In step S206, the first priority upper limit calculation unit C_MH1 determines whether or not the following equation is established based on the internal output value UC2 and the operation amount output MV2 output from the second priority controller PID2.

α1 (UC2−MV2)> 0 (13)
α1 is a priority coefficient indicating the control priority of the first priority controller PID1 with respect to the second priority controller PID2 and takes a real value from 0 to 1 (the priority is maximum when 0, and priority when 1) Degree minimum).

When the formula (13) is satisfied, the first priority upper limit calculation unit C_MH1 outputs the operation amount output upper limit value MH1 of the current control cycle output from the first priority upper limit processing unit L_MH1, the first priority controller. Based on the internal output value UC1 output from PID1, the operation amount output MV2 output from the second priority controller PID2, and the internal output value UC2, the operation amount output upper limit of the next control cycle of the first priority controller PID1 The value MH1 ′ is calculated as the following equation, and this manipulated variable output upper limit value MH1 ′ is output to the first priority upper limit processing unit L_MH1.
MH1 ′ = [MH1Tx1 + {UC1−α1 (UC2−MV2)} dT] / (Tx1 + dT)
(14)

The first priority side upper limit calculation unit C_MH1 outputs the operation amount output upper limit value MH1 and the total operation amount output of the current control cycle output from the first priority side upper limit processing unit L_MH1 when the equation (13) is not satisfied. Based on the upper limit value MT1, an operation amount output upper limit value MH1 ′ is calculated as in the following equation, and this operation amount output upper limit value MH1 ′ is output to the first priority side upper limit processing unit L_MH1.
MH1 ′ = [MH1Tx1 + MT1dT] / (Tx1 + dT) (15)
Thus, the process of step S206 ends.

Next, the third priority side upper limit processing unit L_MH3 is based on the operation amount output MV2 output from the second priority side controller PID2 and the upper limit value MT2 output from the second priority side upper limit processing unit L_MH2. An upper limit value MT3 for performing upper limit processing on the manipulated variable output upper limit value MH3 of the third priority controller PID3 is calculated by the following equation (step S207).
MT3 = MT2-MV2 (16)

  Subsequently, the third priority side upper limit processing unit L_MH3 compares the operation amount output upper limit value MH3 and the upper limit value MT3 of the third priority side controller PID3, and the operation amount output upper limit value MH3 is larger than the upper limit value MT3. In this case, MH3 = MT3, that is, an upper limit process is performed in which the upper limit value MT3 is set as a new manipulated variable output upper limit value MH3 (step S208).

  Then, the third priority side upper limit processing unit L_MH3 outputs the updated operation amount output upper limit value MH3 to the third priority side controller PID3 and the third priority side upper limit calculation unit C_MH3. When the manipulated variable output upper limit value MH3 is equal to or lower than the upper limit value MT3, it is not necessary to update the manipulated variable output upper limit value MH3, and the current manipulated variable output upper limit value MH3 may be output as it is.

  The third priority controller PID3 calculates the manipulated variable output MV3 by executing the PID calculation (step S209). In step S209, the third priority controller PID3 calculates the internal output value UC3 by the PID calculation as follows.

UC3 = Kg3 {1 + 1 / (Ti3s) + Td3s} (SP3-PV3) (17)
In Equation (17), Kg3, Ti3, and Td3 are the proportional gain, integral time, and derivative time of the controller PID3, SP3 is a set value that is set for the control target (not shown) of the controller PID3, and PV3 is the control of this control target. Amount. The proportional gain Kg3, the integration time Ti3, the differentiation time Td3, and the set value SP3 are set in advance, and the control amount PV3 is detected by a sensor (not shown).

  Subsequently, the third priority controller PID3 compares the calculated internal output value UC3 with the operation amount output upper limit value MH3 output from the third priority upper limit processing unit L_MH3, and the internal output value UC3 operates. If it is larger than the quantity output upper limit value MH3, MV3 = MH3, that is, an upper limit process is performed in which the manipulated variable output upper limit value MH3 is made the manipulated variable output MV3, and if the internal output value UC3 is less than the manipulated variable output upper limit value MH3 = UC3, that is, the internal output value UC3 is set as the manipulated variable output MV3.

Then, the third priority controller PID3 uses the calculated operation amount output MV3 as a control target (not shown) (the actual output destination is a heater corresponding to the controller PID3), the second priority upper limit calculation unit C_MH2, and the fourth priority. At the same time as output to the side upper limit processing unit L_MH4 and the total manipulated variable value calculation unit C_MTa, the internal output value UC3 is output to the second priority side upper limit calculation unit C_MH2 and the third priority side upper limit calculation unit C_MH3.
Above, the process of step S209 is complete | finished.

  Next, the second priority upper limit calculation unit C_MH2 calculates an operation amount output upper limit value MH2 'for the next control cycle of the second priority controller PID2 (step S210). In step S210, the second priority upper limit calculation unit C_MH2 determines whether or not the following equation is established based on the internal output value UC3 and the operation amount output MV3 output from the third priority controller PID3.

α2 (UC3−MV3)> 0 (18)
α2 is a priority coefficient indicating the control priority of the second priority controller PID2 with respect to the third priority controller PID3, and takes a real value from 0 to 1 (maximum priority when 0, priority when 1). Degree minimum).

  The second priority side upper limit calculation unit C_MH2 outputs the operation amount output upper limit value MH2 of the current control cycle output from the second priority side upper limit processing unit L_MH2 when the formula (18) is satisfied, the second priority side controller. Based on the internal output value UC2 output from PID2, the operation amount output MV3 output from the third priority controller PID3, and the internal output value UC3, the operation amount output upper limit of the next control cycle of the second priority controller PID2 The value MH2 ′ is calculated as in the following equation, and this manipulated variable output upper limit value MH2 ′ is output to the second priority upper limit processing unit L_MH2.

MH2 '= [MH2Tx2 + {UC2-α2 (UC3-MV3)} dT] / (Tx2 + dT)
... (19)
Tx2 is a transition time, for example, Tx2 = Td2.

Further, the second priority side upper limit calculation unit C_MH2 outputs the operation amount output upper limit value MH2 and the total operation amount output of the current control cycle output from the second priority side upper limit processing unit L_MH2 when Expression (18) is not satisfied. Based on the upper limit value MT1, an operation amount output upper limit value MH2 ′ is calculated as in the following equation, and this operation amount output upper limit value MH2 ′ is output to the second priority upper limit processing unit L_MH2.
MH2 '= [MH2Tx2 + MT1dT] / (Tx2 + dT) (20)
Thus, the process of step S210 is completed.

As described above, the same processes as in steps S203 to S206 and S207 to S210 are repeated so that the mth priority side upper limit calculation unit C_MHm obtains the operation amount output upper limit value MHm ′ for the next control cycle of the mth priority side controller PIDm. After completing the calculation, the m-th priority side upper limit processing unit L_MHm outputs the operation amount output MVm-1 output from the (m-1) th priority side controller PIDm-1 and the (m-1) th priority side upper limit processing unit L_MHm. Based on the upper limit value MTm-1 output from -1 (not shown), the upper limit value MTm for upper limit processing of the manipulated variable output upper limit value MHm of the m-th priority controller PIDm is calculated as follows: (Step S300).
MTm = MTm-1-MVm-1 (21)

  Subsequently, the mth priority side upper limit processing unit L_MHm compares the operation amount output upper limit value MHm of the mth priority side controller PIDm with the upper limit value MTm, and the operation amount output upper limit value MHm is larger than the upper limit value MTm. In this case, MHm = MTm, that is, an upper limit process is performed in which the upper limit value MTm is set as a new manipulated variable output upper limit value MHm (step S301).

  Then, the mth priority side upper limit processing unit L_MHm outputs the updated operation amount output upper limit value MHm to the mth priority side controller PIDm and the mth priority side upper limit calculation unit C_MHm. When the manipulated variable output upper limit MHm is equal to or lower than the upper limit MTm, it is not necessary to update the manipulated variable output upper limit MHm, and the current manipulated variable output upper limit MHm may be output as it is.

  The m-th priority controller PIDm calculates the manipulated variable output MVm by executing the PID calculation (step S302). In step S302, the mth priority controller PIDm calculates the internal output value UCm by the PID calculation as follows.

UCm = Kgm {1 + 1 / (Tims) + Tdms} (SPm-PVm) (22)
In Equation (22), Kgm, Tim, and Tdm are proportional gain, integration time, and derivative time of the controller PIDm, SPm is a set value that is set for a control target (not shown) of the controller PIDm, and PVm is control of this control target. Amount. The proportional gain Kgm, the integration time Tim, the differentiation time Tdm, and the set value SPm are set in advance, and the control amount PVm is detected by a sensor (not shown).

  Subsequently, the mth priority controller PIDm compares the calculated internal output value UCm with the manipulated variable output upper limit value MHm output from the mth priority upper limit processing unit L_MHm, and the internal output value UCm operates. If it is larger than the quantity output upper limit MHm, MVm = MHm, that is, an upper limit process for setting the manipulated variable output upper limit MHm as the manipulated variable output MVm is performed. If the internal output value UCm is less than the manipulated variable output upper limit MHm, MVm = UCm, that is, the internal output value UCm is set as the manipulated variable output MVm.

Then, the m-th priority controller PIDm includes the control target (not shown) of the calculated operation amount output MVm (the actual output destination is a heater corresponding to the controller PIDm) and the m-1th priority-side upper limit calculation unit C_MHm-1. At the same time as outputting to the non-priority upper limit calculation unit C_MHn and the total manipulated variable value calculation unit C_MTa, the internal output value UCm is output to the m−1th priority side upper limit calculation unit C_MHm−1 and the mth priority side upper limit calculation unit C_MHm. To do.
Above, the process of step S302 is complete | finished.

  Next, the (m-1) th priority side upper limit calculation unit C_MHm-1 calculates an operation amount output upper limit value MHm-1 'for the next control cycle of the (m-1) th priority side controller PIDm-1 (step S303). . In step S303, the (m−1) th priority side upper limit calculation unit C_MHm−1 determines whether or not the following equation holds based on the internal output value UCm and the manipulated variable output MVm output from the mth priority side controller PIDm. judge.

αm-1 (UCm-MVm)> 0 (23)
αm-1 is a priority coefficient indicating the control priority of the m-1st priority controller PIDm-1 with respect to the mth priority controller PIDm, and takes a real value from 0 to 1 (the priority is 0). Maximum is 1, priority is minimum).

  The m−1 priority side upper limit calculation unit C_MHm−1, when Expression (23) is satisfied, is the operation amount output upper limit value of the current control cycle output from the m−1th priority side upper limit processing unit L_MHm−1. Based on MHm-1, the internal output value UCm-1 output from the m-1th priority controller PIDm-1, the manipulated variable output MVm and the internal output value UCm output from the mth priority controller PIDm, The operation amount output upper limit value MHm-1 ′ of the next control cycle of the m−1th priority side controller PIDm−1 is calculated by the following equation, and this operation amount output upper limit value MHm−1 ′ is calculated as the m−1th. Is output to the priority upper limit processing unit L_MHm-1.

MHm-1 '= [MHm-1Txm-1 + {UCm-1 -.alpha.m-1 (UCm-MVm)} dT]
/ (Txm-1 + dT) (24)
Txm-1 is a transition time, for example, Txm-1 = Tdm-1.

Further, the m−1 priority side upper limit calculation unit C_MHm−1 outputs the operation amount of the current control cycle output from the m−1th priority side upper limit processing unit L_MHm−1 when Expression (23) is not satisfied. Based on the upper limit value MHm-1 and the total manipulated variable output upper limit value MT1, the manipulated variable output upper limit value MHm-1 'is calculated as follows, and this manipulated variable output upper limit value MHm-1' 1 to the priority side upper limit processing unit L_MHm-1.
MHm-1 '= [MHm-1Txm-1 + MT1dT] / (Txm-1 + dT) (25)
Thus, the process of step S303 ends.

Next, the non-priority upper limit calculation unit C_MHn performs non-priority based on the manipulated variable output MVm output from the mth priority controller PIDm and the upper limit value MTm output from the mth priority upper limit processing unit L_MHm. The operation amount output upper limit value MHn indicating the upper limit of the operation amount output MVn of the side controller PIDn is calculated as follows, and this operation amount output upper limit value MHn is output to the non-priority controller PIDn (step S304).
MHn = MTm-MVm (26)

  The non-priority controller PIDn calculates the manipulated variable output MVn by executing the PID calculation (step S305). In step S305, the non-priority controller PIDn calculates the internal output value UCn by the PID calculation as follows.

UCn = Kgn {1 + 1 / (Tins) + Tdns} (SPn-PVn) (27)
In Equation (27), Kgn, Tin, and Tdn are proportional gain, integration time, and derivative time of the controller PIDn, SPn is a set value that is set for a control target (not shown) of the controller PIDn, and PVn is control of this control target. Amount. The proportional gain Kgn, the integration time Tin, the differentiation time Tdn, and the set value SPn are set in advance, and the control amount PVn is detected by a sensor (not shown).

  Subsequently, the non-priority controller PIDn compares the calculated internal output value UCn with the operation amount output upper limit value MHn output from the non-priority upper limit calculation unit C_MHn, so that the internal output value UCn is the operation amount output upper limit value. If it is larger than MHn, MVn = MHn, that is, an upper limit process for setting the manipulated variable output upper limit value MHn to the manipulated variable output MVn is performed, and if the internal output value UCn is less than or equal to the manipulated variable output upper limit value MHn, The internal output value UCn is set as the manipulated variable output MVn.

Then, the non-priority controller PIDn is a control object (the actual output destination is a heater corresponding to the controller PIDn), the m-th priority-side upper limit calculation unit C_MHm, and the total operation amount value calculation unit. Simultaneously with the output to C_MTa, the internal output value UCn is output to the priority side upper limit calculation unit C_MHm.
Above, the process of step S305 is complete | finished.

  Next, the mth priority side upper limit calculation unit C_MHm calculates the operation amount output upper limit value MHm ′ of the next control cycle of the mth priority side controller PIDm (step S306). In step S306, the priority side upper limit calculation unit C_MHm determines whether or not the following equation is established based on the internal output value UCn and the operation amount output MVn output from the non-priority controller PIDn.

αm (UCn−MVn)> 0 (28)
αm is a priority coefficient indicating the priority of control of the m-th priority controller PIDm with respect to the non-priority controller PIDn, and takes a real value from 0 to 1 (the priority is maximum when 0, the priority is minimum when 1) ).

  The m-th priority side upper limit calculation unit C_MHm, when Expression (28) is satisfied, the operation amount output upper limit value MHm of the current control cycle output from the mth priority side upper limit processing unit L_MHm, the mth priority side controller Based on the internal output value UCm output from PIDm, the operation amount output MVn output from the non-priority controller PIDn, and the internal output value UCn, the operation amount output upper limit MHm ′ of the next control cycle of the priority controller PIDm is The operation amount output upper limit value MHm ′ is calculated as shown in the equation, and is output to the mth priority side upper limit processing unit L_MHm.

MHm ′ = [MHmTxm + {UCm−αm (UCn−MVn)} dT] / (Txm + dT)
... (29)
Txm is a transition time, for example, Txm = Tdm.

Further, the priority side upper limit calculation unit C_MHm, when Expression (28) is not established, outputs the operation amount output upper limit value MHm and the total operation amount output upper limit value MT1 of the current control cycle output from the mth priority side upper limit processing unit L_MHm. Based on the above, the operation amount output upper limit value MHm ′ is calculated as the following equation, and this operation amount output upper limit value MHm ′ is output to the priority side upper limit processing unit L_MHm.
MHm '= [MHmTxm + MT1dT] / (Txm + dT) (30)
In this way, the process of step S306 is completed.

Next, currents corresponding to the operation amount outputs MV1, MV2,..., MVn flow through the n heaters, respectively. The total current value calculation unit C_CTa of the present embodiment is the sum of current values CT1, CT2,..., CTn flowing through each of n heaters measured by a CT value measurement unit (not shown) of the control device. The total current value CTa is calculated as in the following equation (step S307).
CTa = CT1 + CT2 ++ ... + CTn (31)

On the other hand, the total manipulated variable value calculation unit C_MTa calculates the total manipulated variable value MTa that is the sum of the manipulated variable outputs MV1, MV2,..., MVn as shown in the following equation (step S308).
MTa = MV1 + MV2 ++... + MVn (32)

  The total manipulated variable output upper limit value calculation unit C_MT1 calculates the total manipulated variable output upper limit value MT1 of the next control cycle from the total current value CTa and the total manipulated variable value MTa as shown in Expression (9) (step S309). Through the processing in step S309, the total manipulated variable output upper limit MT1 is corrected.

The processes in steps S201 to S309 as described above are repeated every control cycle dT until the control is stopped by an instruction from an operator or the like (YES in step S310).
The i-th (i = 1 to m) priority side upper limit processing unit L_MHi is MHi = MHi ′, that is, the manipulated variable output upper limit value calculated and output by the i-th priority side upper limit calculation unit C_MHi in the previous control cycle. The processing of steps S201, S204, S208, and S301 is performed with MHi ′ as the manipulated variable output upper limit value MHi of the current control cycle.

  As described above, in this embodiment, the operation amount output MV1 of the first priority controller PID1, the operation amount output MV2 of the second priority controller PID2,..., The sum MVn of the non-priority controller PIDn. In order to always maintain the total operation amount output upper limit value MT1 or less, the operation amount output upper limit value MH2 of the second priority controller PID2 is set to MT1-MV1 (step S203),..., Of the third priority controller PID3. The manipulated variable output upper limit value MH3 is set to MT1-MV1-MV2 (step S207),..., And the manipulated variable output upper limit value MHn of the non-priority controller PIDn is set to MTm-MVm (step S304).

  If equation (13) is not satisfied, that is, if the internal output value UC2 of the second priority controller PID2 has a margin with respect to the manipulated variable output upper limit value MH2 (UC2 ≦ MH2), equation (15) is used. Then, the operation amount output upper limit value MH1 of the first priority controller PID1 is increased to asymptotically approach the overall operation amount output upper limit value MT1 (step S206). This enables the first priority controller PID1 to output a larger manipulated variable output MV1.

  Further, when Expression (13) is satisfied, that is, when the internal output value UC2 of the second priority controller PID2 has no margin with respect to the manipulated variable output upper limit value MH2 (UC2> MH2), Expression (14) is used. As a result, the operation amount output upper limit value MH1 of the first priority controller PID1 is asymptotically approached in a direction to decrease the output shortage (UC2-MV2) of the second priority controller PID2 (step S206). As a result, the operation amount output MV1 of the first priority controller PID1 is suppressed.

  When the operation amount output upper limit value MH1 of the first priority controller PID1 is reduced when the equation (13) is satisfied, the output shortage (UC2− of the second priority controller PID2 which becomes an index of the decrease) MV2) is multiplied by a priority factor α1. By adjusting the value of the priority coefficient α1, the controllability of the second priority controller PID2 can be well maintained within a possible range without excessively prioritizing the first priority controller PID1. .

  Similarly, when the operation amount output MVj + 1 of the j + 1th controller PIDj + 1 has a margin with respect to the operation amount output upper limit MHj + 1 of the j + 1th (j is an integer of 2 to m), the jth The operation amount output upper limit MHj of the controller PIDj is increased to asymptotically approach the overall operation amount output upper limit value MT1. This enables the jth controller PIDj to output a larger manipulated variable output MVj.

  When the operation amount output MVj + 1 of the j + 1th controller PIDj + 1 has no margin with respect to the j + 1th operation amount output upper limit MHj + 1, the operation amount output upper limit MHj of the jth controller PIDj is set to the j + 1th operation amount. The controller PIDj + 1 is made asymptotically approaching in a direction of decreasing by an output shortage (UCj + 1−MVj + 1). As a result, the manipulated variable output MVj of the jth controller PIDj is suppressed.

  When the manipulated variable output upper limit value MHj of the jth controller PIDj is decreased, priority is given to the output shortage (UCj + 1−MVj + 1) of the j + 1th controller PIDj + 1 which is an index of the decrease. The degree coefficient αj is multiplied. By adjusting the value of the priority coefficient αj, the controllability of the (j + 1) th controller PIDj + 1 can be well maintained within a possible range without giving excessive priority to the jth controller PIDj. Note that the manipulated variable output upper limit values MH1, MH2, MH3,..., MHm in the first control cycle are set to 100%, for example.

As described above, in this embodiment, the total sum of the n-loop manipulated variable outputs MV1, MV2,... MVn is maintained below the overall manipulated variable output upper limit value MT1, and the control amount with high priority is good. Control state can be maintained.
In the present embodiment, as in the first embodiment, the total sum of current values can be limited in an n-loop control system.

  The control device described in the first and second embodiments can be realized by a computer having a CPU, a storage device, and an interface, and a program for controlling these hardware resources. The CPU executes the processing described in the first and second embodiments in accordance with a program stored in the storage device.

  In the first and second embodiments, the application example to the control device disclosed in Patent Document 1 is shown, but the present invention is not limited to this. The present invention can be similarly applied to any control device of a multi-loop control system that suppresses the total operation amount output to be equal to or less than the total operation amount output upper limit value. That is, the manipulated variable output upper limit values MH1, MH2, MH3,..., MHm of each control loop need not be variable as in Patent Document 1, and the first and second embodiments, but are handled as fixed values. It is also applicable to.

  The present invention can be applied to a multi-loop temperature control system.

It is a block diagram which shows the structure of the control apparatus which concerns on the 1st Embodiment of this invention. It is a figure which shows one example of the temperature control system to which the control apparatus which concerns on the 1st Embodiment of this invention is applied. It is a flowchart which shows operation | movement of the control apparatus which concerns on the 1st Embodiment of this invention. It is a block diagram which shows the structure of the control apparatus which concerns on the 2nd Embodiment of this invention. It is a flowchart which shows operation | movement of the control apparatus which concerns on the 2nd Embodiment of this invention.

Explanation of symbols

  C_CTa: total current value calculating unit, C_MTa: total manipulated variable value calculating unit, C_MT1: total manipulated variable output upper limit calculating unit, PID1-PIDm, PIDn: controller, L_MH1-L_MHm: priority side upper limit processing unit, C_MH1-C_MHm, C_MHn: upper limit calculation unit.

Claims (8)

In the control device of the multi-loop temperature control system that suppresses the sum of the operation amount outputs of the plurality of controllers that respectively control the plurality of heaters to be equal to or less than the operation amount output upper limit value of the entire control device.
A total current value calculating means for calculating a sum of current values flowing through the plurality of heaters according to operation amount outputs from the plurality of controllers;
A control apparatus comprising: an entire operation amount output upper limit value calculating means for correcting an operation amount output upper limit value of the entire control apparatus based on the total current value calculated by the total current value calculating means. The control device according to claim 1,
And a total manipulated variable value calculating means for calculating a total manipulated variable value that is a sum of manipulated variable outputs from the plurality of controllers.
The total manipulated variable output upper limit calculating means is configured such that when the total current value is CTa, the total manipulated variable value is MTa, and a predetermined reference total current value is CTr, the manipulated variable output upper limit value of the entire control device. MT1 is calculated by MT1 = MTa (CTr / CTa). The control device according to claim 1 or 2,
The controller includes a priority controller that calculates an operation amount output according to a first operation amount output upper limit, and a non-priority controller that calculates an operation amount output according to a second operation amount output upper limit.
The priority given to the priority controller by limiting the magnitude of the first operation amount output upper limit inputted in advance so that the operation amount output of the priority controller is less than or equal to the operation amount output upper limit value of the entire control device. Side upper limit processing means,
The non-priority controller is calculated by calculating the second operation amount output upper limit so that the sum of the operation amount outputs of the priority controller and the non-priority controller is equal to or less than the operation amount output upper limit value of the entire control device. A non-priority upper limit calculation means to be given to
In accordance with a margin of the operation amount output of the non-priority controller with respect to the second operation amount output upper limit, calculation is performed to increase / decrease the first operation amount output upper limit, and the calculated value is used for the first control cycle. And a priority-side upper limit calculating means for giving to the priority-side upper limit processing means as the operation amount output upper limit. The control device according to claim 1 or 2,
As the n (n is an integer of 3 or more) controllers, the first to m-th (m is n−1) -th priority are assigned in advance, and the corresponding first to m-th manipulated variable output upper limit is set. A first to m-th controller for calculating an operation amount output in response to each, and an n-th controller that is ranked in advance in the lowest order and calculates an operation amount output according to the n-th operation amount output upper limit. ,
It is provided for each k-th (k is an integer from 1 to m) controller, so that the sum of the operation amount outputs of the first to k-th controllers is equal to or less than the operation amount output upper limit value of the entire control device in advance. First to m-th priority side upper limit processing means for limiting the magnitude of the input k-th operation amount output upper limit and giving it to the k-th controller;
The nth manipulated variable output upper limit is calculated so that the sum of the manipulated variable outputs of the first to mth controllers and the nth controller is equal to or less than the manipulated variable output upper limit value of the entire control device. A non-priority upper limit calculating means for giving to the nth controller;
The k-th operation amount output upper limit is calculated according to the margin of the operation amount output of the (k + 1) -th controller with respect to the (k + 1) -th operation amount output upper limit. A control apparatus comprising: first to m-th priority side upper limit calculating means to be supplied to the kth priority side upper limit processing means as the kth operation amount output upper limit of the next control cycle. In the control method of the multi-loop temperature control system that suppresses the sum of the operation amount outputs of the plurality of controllers that respectively control the plurality of heaters to be equal to or less than the operation amount output upper limit value of the entire control device.
A total current value calculating procedure for calculating a sum of current values flowing through the plurality of heaters according to operation amount outputs from the plurality of controllers;
A control method comprising: an overall operation amount output upper limit calculation procedure for correcting an operation amount output upper limit value of the entire control device based on the total current value calculated by the total current value calculation procedure. The control method according to claim 5, wherein
And a total manipulated variable value calculating procedure for calculating a total manipulated variable value that is a sum of manipulated variable outputs from the plurality of controllers.
The total manipulated variable output upper limit value calculation procedure is as follows. When the total current value is CTa, the total manipulated variable value is MTa, and the predetermined reference total current value is CTr, the manipulated variable output upper limit value of the entire control device MT1 is calculated by MT1 = MTa (CTr / CTa). The control method according to claim 5 or 6,
The controller has two controllers, a priority controller and a non-priority controller,
(1) Priority-side upper limit processing for limiting the magnitude of the first operation amount output upper limit inputted in advance so that the operation amount output of the priority controller is equal to or less than the operation amount output upper limit value of the entire control device; ,
(2) A priority side operation amount output calculation process in which the priority side controller calculates an operation amount output according to the first operation amount output upper limit;
(3) The non-priority upper limit for calculating the second operation amount output upper limit so that the sum of the operation amount outputs of the priority controller and the non-priority controller is equal to or less than the operation amount output upper limit value of the entire control device. Calculation process,
(4) A non-priority side operation amount output calculation process for calculating an operation amount output by the non-priority side controller according to the second operation amount output upper limit;
(5) The first operation amount output upper limit is calculated to be increased or decreased according to a margin of the operation amount output of the non-priority controller with respect to the second operation amount output upper limit, and the calculated value is set to the next control cycle. And a priority side upper limit calculation process to be given to the priority side upper limit process as the first operation amount output upper limit. The control method according to claim 5 or 6,
As the controller, there are n controllers to which the first to nth (n is an integer of 3 or more) priorities are assigned in advance.
(1) The first priority side that limits the magnitude of the first operation amount output upper limit input in advance so that the operation amount output of the first controller is less than or equal to the operation amount output upper limit value of the entire control device. Capping,
(2) a first priority side operation amount output calculation process for calculating an operation amount output by the first controller in accordance with the first operation amount output upper limit;
(3) Second priority for calculating the second operation amount output upper limit so that the sum of the operation amount outputs of the first controller and the second controller is equal to or less than the operation amount output upper limit value of the entire control device. Side upper limit processing,
(4) a second priority side operation amount output calculation process for calculating an operation amount output by the second controller in accordance with the second operation amount output upper limit;
(5) Perform calculation to increase or decrease the first operation amount output upper limit according to a margin of the operation amount output of the second controller with respect to the second operation amount output upper limit, and calculate the calculated value as a next control cycle. Performing a first priority side upper limit calculation process to be given to the first priority side upper limit process as the first operation amount output upper limit of
(6) The size of the i-th operation amount output upper limit input in advance is limited so that the sum of the operation amount outputs of the first to i-th controllers is equal to or less than the operation amount output upper limit value of the entire control device. I-th priority side upper limit processing, i-th priority side operation amount output calculation processing for calculating the operation amount output by the i-th controller in accordance with the i-th operation amount output upper limit, and i-th operation amount output upper limit Is calculated to increase or decrease the (i-1) th operation amount output upper limit in accordance with the margin of the operation amount output of the ith controller with respect to, and the calculated value is used as the (i-1) th operation amount output upper limit of the next control cycle. Three processes of the (i-1) th priority side upper limit calculation process given to the (i-1) th priority side upper limit process are sequentially performed for each i (i is an integer of 3 to m).
(7) The nth manipulated variable output upper limit is calculated so that the sum of the manipulated variable outputs of the first to mth controllers and the nth controller is less than or equal to the manipulated variable output upper limit value of the entire control device. Non-priority upper limit calculation processing,
(8) a non-priority side operation amount output calculation process for calculating an operation amount output by the nth controller according to the nth operation amount output upper limit;
(9) Perform a calculation to increase or decrease the m-th manipulated variable output upper limit according to a margin of the manipulated variable output of the n-th controller with respect to the n-th manipulated variable output upper limit, and calculate the calculated value for the next control cycle A control method comprising: performing an mth priority side upper limit calculation process given to an mth priority side upper limit process as an mth operation amount output upper limit, and repeatedly performing the processes (1) to (9).

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