JP4499626B2 - Control apparatus and control method - Google Patents

Description

  The present invention relates to a process control technique, and more particularly to a technique for limiting an instantaneous sum of actuator outputs in a control system of at least two control loops.

  2. Description of the Related Art Conventionally, an apparatus having a plurality of control systems in one apparatus (for example, a semiconductor manufacturing apparatus using an electric heater as an actuator) is known. In such an apparatus, when it is not necessary to place importance on the control characteristics of all the control loops, it is possible to perform control by giving priority to the controllers for each control loop. If each controller is prioritized and controlled, power consumption (that is, energy consumption) can be suppressed.

  When controlling with priority assigned to each controller, a method of operating sequentially from a controller with higher priority and operating a controller with lower priority within the remaining capacity (amount of power that can be supplied) (hereinafter referred to as the first method) Or a method (hereinafter referred to as a second method) of controlling by reducing the ability of another controller in accordance with the slowest operating controller among a plurality of controllers.

  However, in the first method, a controller with a high priority is excessively prioritized, and a controller with a low priority hardly functions, and the controllability of a controller with a low priority may not be obtained. In the first method, if a controller with a low priority is to be operated, it is necessary to increase the capacity of the entire apparatus, resulting in an increase in energy consumption and an increase in the size of the apparatus. On the other hand, in the second method, since the ability of the controller with high priority is killed and used, it is only necessary to use a controller with low ability from the beginning, and this is a method that sacrifices controllability.

  On the other hand, Patent Document 1 discloses a control method for achieving both controllability and energy consumption of each controller within an acceptable range. In the control method disclosed in Patent Document 1, in the case where control is performed using the first to Nth controllers to which the first to N (N is an integer of 3 or more) priorities are assigned in advance, So that the sum of the operation amount outputs of the first to Kth (K is an integer from 1 to M, M is N-1) controllers is less than or equal to a predetermined value indicating the operation amount output upper limit of the entire apparatus. The operation amount output upper limit of K is limited and given to the Kth controller, so that the sum of the operation amount outputs of the first to Mth controllers and the Nth controller is less than or equal to a predetermined value. The operation amount output upper limit is calculated and given to the Nth controller having the lowest priority, and the Kth operation amount output is output according to the margin of the operation amount output of the (K + 1) th controller with respect to the (K + 1) th operation amount output upper limit. Perform a calculation to increase or decrease the upper limit, and calculate the calculated value By the operation amount output upper limit of the K control period, while limiting the total sum of the manipulated variable output of N loop below a predetermined value, and adjusts the priority of controllability.

On the other hand, Patent Document 2 discloses a power control method for suppressing instantaneous maximum power in a semiconductor manufacturing apparatus or the like having a plurality of heater systems. In the power control method disclosed in Patent Document 2, a plurality of heater systems are grouped, and when performing grouping, a predetermined number of times required in order to increase the temperature to a target temperature value are relatively large. The heater system and the required number of heater systems are grouped so that a predetermined number of heater systems are in the same group in ascending order, and each group is controlled independently, and the heaters belonging to each group are controlled on and off in a time-sharing manner. By doing so, the amount of power used at full power is suppressed.
Therefore, by combining the techniques disclosed in Patent Document 1 and Patent Document 2, the instantaneous maximum power of the entire heater system can be suppressed without greatly sacrificing controllability.

JP 2002-49401 A Japanese Patent No. 3467401

  The techniques disclosed in Patent Document 1 and Patent Document 2 are intended for a plurality of control systems (mainly temperature control systems using heaters), and examine in advance a control system that uses a large amount of power and a control system that uses a small amount of power. It is necessary to keep. For example, in the control method disclosed in Patent Document 1, in order to maintain control characteristics as much as possible, a control system with a high priority for power consumption and a control system with a lower priority may be examined and determined in advance. It is necessary to keep it. Further, in the power control method disclosed in Patent Document 2, it is necessary to check the time required for temperature increase and to determine the ratio of the on / off time in advance.

  However, in actual control objects, there are not a few situations that cannot be predicted in advance, for example, the amount of temperature rise (difference between the current temperature and the target temperature) varies depending on the situation. When such an unpredictable situation occurs, the priority order of the control system cannot be determined in advance, or the on-off time ratio is determined in advance by examining the time required for temperature rise. You will not be able to. In other words, the techniques disclosed in Patent Document 1 and Patent Document 2 cannot obtain the effect of “coexistence of control characteristics and maximum power suppression as much as possible” for a control target in which a situation that cannot be assumed in advance occurs. Specifically, in any situation, priority is given to the power limitation, and a situation occurs in which the responsiveness (the time required to complete the temperature rise of all control systems) is greatly sacrificed.

  For example, there are four control systems (control loops), and FIG. 8 (A) to FIG. 8 (H) show images of temperature rise when each operation amount output upper limit is 100%. 8A to 8H are diagrams illustrating an example of changes in the temperature measurement value (control amount) PV and the operation amount MV when the temperature set value SP is changed in the four control systems. FIG. 8A is a diagram showing a change in the temperature measurement value PV when the temperature set value SP is changed in the first control system that is settling, and FIG. 8B is the first diagram of FIG. 8A. FIG. 8C is a diagram showing a change in the manipulated variable MV in the control system, FIG. 8C is a diagram showing a change in the temperature measurement value PV when the temperature set value SP is changed in the second control system that is settling, FIG. FIG. 8D is a diagram showing a change in the manipulated variable MV in the second control system in FIG. 8C, and FIG. 8E is a diagram when the temperature set value SP is changed in the third control system that is settling. The figure which shows the change of the temperature measurement value PV, FIG.8 (F) is a figure which shows the change of the manipulated variable MV in the 3rd control system of FIG.8 (E), FIG. FIG. 8G is a diagram showing a change in the temperature measurement value PV when the temperature set value SP is changed in the fourth control system that is settling, and FIG. 8H is a diagram in the fourth control system of FIG. It is a figure which shows the change of the operation amount MV. In the example of FIG. 8, the temperature rise time of the first control system and the second control system is 110 seconds, and the temperature rise time of the third control system and the fourth control system is 60 seconds. .

  Next, consider applying the combination of techniques disclosed in Patent Document 1 and Patent Document 2 to the same four control systems. 9A to 9H show the temperature measurement value PV and the manipulated variable when the temperature set value SP is changed in the four control systems, similarly to FIGS. 8A to 8H. The change of MV is shown. 9A shows the temperature measurement value PV of the first control system, FIG. 9B shows the manipulated variable MV of the first control system, and FIG. 9C shows the second control system. 9D shows the manipulated variable MV of the second control system, FIG. 9E shows the temperature measured value PV of the third control system, and FIG. Shows the manipulated variable MV of the third control system, FIG. 9G shows the measured temperature PV of the fourth control system, and FIG. 9H shows the manipulated variable MV of the fourth control system. Yes. The manipulated variable MV0 in FIGS. 9B, 9D, 9F, and 9H is shown in FIGS. 8B, 8D, 8F, and 8 respectively. The operation amount MV of (H) is shown.

  Here, the first control system with a large amount of power used and the third control system with a small amount of power used are grouped together, and the upper limit of the total manipulated variable output of the first control system and the third control system is set as the upper limit. The second control system with a large amount of used power and the fourth control system with a small amount of used power are grouped together as the same group, and the total manipulated variable output of the second control system and the fourth control system The upper limit is 100%. As shown in FIG. 9, this grouping is reasonable, and the manipulated variable output at the time of temperature rise of the third control system and the fourth control system with a small amount of power consumption is MV = 33%. On the other hand, priority is given to the operation amount output of the control system with a large amount of power used, such that the operation amount output at the time of temperature rise of the first control system and the second control system with a large amount of power consumption is MV = 67%. Therefore, all the control systems complete the temperature increase simultaneously with a temperature increase time of 150 seconds.

  That is, the instantaneous operation amount output sum of all control systems in the case of FIG. 8 is 400%, whereas in FIG. 9, the operation amount output sum is about 200%. It turns out that it becomes half. On the other hand, in the case of FIG. 8, the time required to complete the temperature rise of all the control systems is 110 seconds, whereas in FIG. 9, the time required to complete the temperature rise is 150 seconds. It turns out that it is only about 1.4 times the case. Thus, when it is possible to examine in advance a control system with a large amount of power consumption and a control system with a small amount of power, it is effective to combine the techniques disclosed in Patent Document 1 and Patent Document 2.

  Next, a description will be given of a case where control system grouping is inappropriate because, for example, it is not possible to previously examine a control system with a large amount of power consumption and a control system with a small amount of power. 10A shows the temperature measurement value PV of the first control system, FIG. 10B shows the manipulated variable MV of the first control system, and FIG. 10C shows the temperature of the second control system. FIG. 10D shows the manipulated variable MV of the second control system, FIG. 10E shows the temperature measured value PV of the third control system, and FIG. 10F shows the measured value PV. 3 shows an operation amount MV of the third control system, FIG. 10G shows a temperature measurement value PV of the fourth control system, and FIG. 10H shows an operation amount MV of the fourth control system. The manipulated variable MV0 in FIGS. 10B, 10D, 10F, and 10H is shown in FIGS. 8B, 8D, 8F, and 8 respectively. The operation amount MV of (H) is shown.

  Here, the first control system and the second control system that use a large amount of power are grouped together, and the upper limit of the total manipulated variable output of the first control system and the second control system is 100%. The third control system and the fourth control system that use less power are grouped together, and the upper limit of the total manipulated variable output of the third control system and the fourth control system is 100%. As shown in FIG. 10, this grouping is not appropriate, and by combining the same amount of power used, the manipulated variable output at the time of temperature rise of each control system is 50%, As a result, the time required to complete the temperature rise of all control systems is 200 seconds. This required time is about twice the required time in the case of FIG. 8, and is 50 seconds longer than that in the case of FIG. That is, in the example of FIG. 10, the effect of “coexistence of control characteristics and maximum power suppression as much as possible” is greatly impaired.

  The examples of FIGS. 8 to 10 are examples for explaining the problems of the prior art in an easy-to-understand manner. However, the situation where the grouping is appropriate as shown in FIG. 9 and the situation where the grouping is inappropriate as shown in FIG. If this cannot be assumed in advance, a situation may occur in which the responsiveness (the time required to complete the temperature rise of the entire control system) is greatly sacrificed.

  The present invention has been made in order to solve the above-described problems, and is capable of achieving both good control characteristics and suppression of maximum power even when a control target in which a situation that cannot be assumed in advance occurs occurs. It aims to provide a method. In other words, the present invention does not fix the substantial priority level related to the power balance by any index in advance, and flexibly changes the priority level according to an arbitrary situation, and responds to the control. The goal is to avoid situations where sex is completely sacrificed.

The present invention provides a control device for a control system of an n (n is an even number of 2 or more) loop, based on n heaters for heating a controlled object, a set value input from the outside, and a control amount of the controlled object. An operation amount is calculated, and n controllers that output the operation amount whose size is limited in accordance with an operation amount output upper limit value to the corresponding heater and the start of temperature increase of the control system of the n loop are detected. a temperature increase start detecting unit, the care and start heating has been detected, every control loop as power usage prediction amount index corresponding to the predicted value of the power usage of the difference between the set value and the controlled variable of the control loop and a power usage predictor index calculating unit for calculating, based on the power predicted use amount index of each of the control loop, the divide the n controllers n / 2 groups., in the grouping, the power used Large forecast amount indicator A coupling processing unit that combines a priority controller having a high power supply priority with a non-priority controller having a low power supply priority and a low power supply priority, and is provided for each group. Priority is given to each group by limiting the size of the preferentially input operation amount output upper limit value that is input in advance so that the operation amount output of the priority controller is below a certain value. A non-priority side operation amount output provided so that the sum of the operation amount output of the priority controller and the operation amount output of the non-priority controller is equal to or less than the predetermined value. A non-priority upper limit calculating unit that calculates an upper limit value for each group and calculates and supplies the non-priority controller to the non-priority controller; The priority operation amount output upper limit value is increased or decreased according to the margin of the operation amount output of the non-priority controller with respect to the side operation amount output upper limit value, and the calculated value is used as the priority operation amount in the next control cycle. And a priority-side upper limit calculation unit that performs giving to the priority-side upper limit processing unit as an output upper limit for each group.

Further, in one configuration example of the control device of the present invention, the temperature rise start detection unit constantly monitors the set value of each control loop, and at least one set value has been changed to a value larger than the immediately preceding value. The time is regarded as the temperature rise start time, and a detection signal is output to the predicted power usage amount index calculation unit.
Further , in one configuration example of the control device of the present invention, the predicted power usage amount index calculation unit is used in each control loop for a difference between a set value and a control amount of each control loop when the temperature rise start is detected. A product obtained by multiplying the capacity coefficient of the heater is calculated as the predicted power usage amount index.
Further, in one configuration example of the control device of the present invention, the coupling processing unit selects the priority controller and the non-priority controller that belong to the same group in the grouping, and the priority controller The power usage prediction amount index is selected one by one in descending order, and the non-priority controller is selected one by one in the order from the smallest power usage prediction amount index.

Further, the present invention calculates an operation amount based on n (n is an even number of 2 or more) heaters for heating the control target, a set value input from the outside, and the control amount of the control target, and the operation amount In an n-loop control system control method comprising n controllers that output the manipulated variable whose size is limited according to an output upper limit value to the corresponding heater, start of temperature increase of the n-loop control system a temperature increase start detecting step of detecting, the care and start heating has been detected, as the power predicted use amount index corresponding to the predicted value of the power usage of the difference between the set value and the controlled variable of the control loop Based on the predicted power usage amount calculation procedure for each control loop and the predicted power usage amount index for each control loop, the n controllers are divided into n / 2 groups. The power usage plan A coupling procedure and the low priority non-preferential controller of the priority of the amount index greater power supply is higher preferential controller power usage predictor index smaller power supplies combine to be the same group, the Provided to the priority controller by limiting the size of the preferentially input operation amount output upper limit value provided in advance for each group, so that the operation amount output of the priority controller is below a certain value. Non-priority so that the sum of the operation amount output of the priority side controller and the operation amount output of the non-priority controller is less than or equal to the predetermined value. A non-priority upper limit calculation procedure for calculating, for each group, calculating a side operation amount output upper limit value and giving the non-priority controller to the non-priority controller; The priority operation amount output upper limit value is increased or decreased according to a margin of the operation amount output of the non-priority controller with respect to the non-priority operation amount output upper limit value. The priority side upper limit calculation procedure is performed repeatedly for each group to be given to the priority side upper limit processing procedure as the priority side operation amount output upper limit value of the control cycle.

  According to the present invention, power supply can be flexibly supplied according to an arbitrary situation based on an index of a predicted power usage amount without fixing a substantial priority level related to power sharing as in the past. Since the priority level (the combination of the priority controller and the non-priority controller) is changed, it is possible to avoid a situation in which the control responsiveness is completely sacrificed. As a result, in the present invention, it is possible to achieve both control characteristics of each control loop and instantaneous suppression of maximum power within an acceptable range.

  Further, according to the present invention, it is possible to easily calculate the predicted power usage amount index by using the difference between the set value and the control amount of each control loop when the temperature rising start is detected.

  Further, in the present invention, by using a value obtained by multiplying the difference between the set value and the control amount of each control loop when the temperature rising start is detected by the heater capacity coefficient used in each control loop, The prediction accuracy of the index can be improved.

  In addition, the priority controller and the non-priority controller that belong to the same group are selected one by one for the priority controller in descending order of the power usage prediction amount index, and the power consumption is used for the non-priority controller. By selecting one by one in ascending order of the predicted amount index, it is possible to maintain the controllability to some extent and suppress the total of the manipulated variable outputs of the two loops to a certain value or less.

[Principle of the Invention]
In the method of Patent Document 1, only the two-loop type is used in the method of Patent Document 1. Therefore, in a multi-loop system having three or more loops, a plurality of two-loop types are used, and each two-loop type is used. Note that it is practical to flexibly change the combination based on the predicted power usage.

Based on the above viewpoints, the problems are solved by the following technical ideas (A) to (D).
(A) A plurality of two-loop types of the method of Patent Document 1 are combined, and a combination of two loops can be arbitrarily changed.
(B) The combination of each two loops is automatically determined based on the relative comparison value of the predicted power usage between the control loops (there is no need to predict the actual power usage, and the relative comparison value between the loops) Or just ascending order is sufficient).
(C) The combination of each two loops is automatically determined by combining a control loop with a large relative comparison value of the predicted power usage and a control loop with a small amount.
(D) The relative comparison value of the predicted power usage amount is predicted based on the control deviation at the start of temperature rise.

Based on the above technical idea, first, as an example for obtaining the relative comparison value of the predicted power usage amount, “a manipulated variable output necessary for raising the temperature while maintaining controllability to some extent” is a standard. This will be described later.
Next, it is assumed that only the 2-loop type is used for the method of Patent Document 1. In this case, for example, if the total of the manipulated variable outputs of two loops is to be suppressed to 100% or less, the manipulated variable output required to increase the temperature while maintaining controllability to some extent is about 50%. Ideally, loops are combined.

  However, in a multi-loop system of three or more loops, control loops that are about 50% are not always prepared, and those that are larger or smaller than 50% are naturally mixed. In this case, if the controllability is maintained to some extent and the total of the manipulated variable outputs of the two loops is to be suppressed to 100% or less, the required manipulated variable output is small when combined with a control loop having a large required manipulated variable output. A control loop is preferred. Therefore, when the method of Patent Document 1 is applied to a multi-loop system having three or more loops, a control loop that maximizes the required manipulated variable output and a control loop that minimizes the output are combined, and the remaining control loops are selected. The method of combining the control loop that maximizes the required manipulated variable output and the control loop that minimizes the output may be sequentially repeated.

[First Embodiment]
Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 and 2 are block diagrams showing the configuration of the control apparatus according to the first embodiment of the present invention. In the present embodiment, a ceramic firing furnace provided with n (n is an even number of 2 or more, here n = 8) control loops using an electric heater as an actuator will be described as an example. The application target of is not limited to a ceramic firing furnace, and if it is two or more control loops, a similar control system can be configured on the same principle.

  The control device according to the present embodiment includes a temperature rise start detection unit 1 that detects the start of temperature rise in an eight-loop control system, and power usage corresponding to a predicted value of power usage when temperature rise start is detected. Based on the power usage prediction amount index calculation unit 2 that calculates the prediction amount index for each control loop, and based on the power usage prediction amount index for each control loop, eight controllers to be described later are divided into four groups. When dividing, a coupling processing unit 3 that combines a priority controller having a high power supply priority and a non-priority controller having a low power supply priority into the same group, and a set value SP input from the outside Controllers 4-1 to 4-8 that calculate an operation amount MV based on a control amount (temperature measurement value) PV to be controlled and output an operation amount MV whose size is limited according to an operation amount output upper limit value. Provided for each group, and the priority-side operation amount output upper limit value input in advance is limited and given to the priority-side controller so that the operation amount output of the priority-side controller is a predetermined value or less. Priority side upper limit processing unit 5 (5-1 to 5-4) and the sum of the operation amount output of the priority side controller and the operation amount output of the non-priority side controller are equal to or less than a predetermined value. Thus, the non-priority side operation amount output upper limit value is calculated and given to the non-priority controller for each group, and the non-priority upper limit calculation unit 6 (6-1 to 6-4) is provided for each group. The priority side operation amount output upper limit value is increased or decreased according to the margin of the operation amount output of the non-priority side controller relative to the non-priority side operation amount output upper limit value, and the calculated value is used for the priority side operation in the next control cycle. Quantity output upper limit and A priority side upper limit calculation unit 7 (7-1 to 7-4) for each group that is given to the priority side upper limit processing unit, and a grouping of the controllers and switching for realizing a combination of the priority side controller and the non-priority side controller To perform power control with the switches 8-1 to 8-8, 9-1 to 9-4, 10-1 to 10-4, 11-1 to 11-4, and 12-1 to 12-4 as means Switches 13-1 to 13-8 and an on / off control unit 14 for controlling the switches 13-1 to 13-8.

  FIG. 3 is a block diagram of the control system in the present embodiment. 1 to 3, SP1 to SP8 are set values of the first to eighth control loops, PV1 to PV8 are control amounts of the first to eighth control loops, and MV1 to MV8 are the first to eighth controls. The operation amounts output from the loop controllers 4-1 to 4-8, H1 to H8 are heaters of the first to eighth control loops, and P1 to P8 are control targets of the first to eighth control loops. For example, the controller 4-1, the heater H1, and the control object P1 constitute a first control loop, and the controller 4-2, the heater H2, and the control object P2 constitute a second control loop. The same applies to the other third to eighth control loops.

In the present embodiment, the difference (corresponding to the control deviation) between the set value SP and the control amount PV at the start of temperature rise is calculated as a substantial power usage prediction amount index. The validity of using the control deviation as a power usage prediction amount index will be described below.
A heat treatment apparatus divided into a plurality of heating zones, such as a ceramic firing furnace, is designed to have substantially the same heater capacity and heat capacity in each zone. Similarly, the heater position and temperature sensor position are designed to be almost the same in each zone, and the control characteristics of the controller increase at a substantially constant temperature increase rate using a large heater output during temperature increase, and the control amount PV is set. The operation is such that the heater output is reduced immediately before reaching the value SP.

  When the temperature increase is performed under such conditions, the temperature increase rate increases or decreases in each zone in accordance with the magnitude of the manipulated variable output MV given to the heater. It is considered that the output MV is approximately proportional to the product of the magnitude of the output MV and its maintenance time. As a result, the amount of power used is approximately proportional to the temperature increase range, that is, the difference between the set value SP at the start of temperature increase and the control amount PV.

  Hereinafter, it will be described with reference to FIGS. 4A to 4H that the amount of power used is approximately proportional to the product of the manipulated variable MV and its maintenance time. FIG. 4A shows a control amount PV when the set value SP is changed to 100 ° C. in a control system (hereinafter referred to as control system a) settling at a control amount PV = 0 ° C. and a set value SP = 0 ° C. 4 (B) is a diagram showing a change in the manipulated variable MV in the control system of FIG. 4 (A), and FIG. 4 (C) is another control system (hereinafter referred to as control) which is similarly set. FIG. 4D is a diagram showing a change in the control amount PV when the set value SP is changed to 100 ° C. in FIG. 4D, and FIG. is there.

  The control system a shown in FIGS. 4A and 4B and the control system b shown in FIGS. 4C and 4D have substantially the same characteristics, but the control system a is operated by the control system a. While the upper limit value of the amount is 100%, the upper limit value of the operation amount is 50% in the control system b. For this reason, when the set value is changed so that the temperature increase range is 100 (0 ° C. → 100 ° C.), the operation amount MV increases to 100% in the control system a, whereas the operation amount in the control system b. MV only rises to 50%.

  On the other hand, the time required for raising the temperature, that is, the time during which the manipulated variable MV is kept high is 110 seconds for the control system a and 200 seconds for the control system b, and the ratio of the maintenance times for the control system a and the control system b is It becomes about 1: 2. Therefore, the product of the operation amount MV and the maintenance time in the control system a is 100% × 110 sec = 11000, and the product of the operation amount MV and the maintenance time in the control system b is 50% × 200 sec = 10000, and the control system a and the control system b It becomes almost the same value.

  FIG. 4E shows a change in the control amount PV when the set value SP is changed to 50 ° C. in the control system a that is set at the control amount PV = 0 ° C. and the set value SP = 0 ° C. FIG. 4F is a diagram showing a change in the manipulated variable MV in the control system of FIG. 4E, and FIG. 4G is a control when the set value SP is changed to 50 ° C. in the control system b which is similarly set. FIG. 4H is a diagram showing a change in the amount PV, and FIG. 4H is a diagram showing a change in the manipulated variable MV in the control system of FIG. 4G.

The operation amount upper limit values of the control system a and the control system b are as described above. On the other hand, the maintenance time of the manipulated variable MV when the set value change is 50 (0 ° C. → 50 ° C.) is 60 sec for the control system a and 110 sec for the control system b. Therefore, the product of the operation amount MV and the maintenance time in the control system a is 100% × 60 sec = 6000, and the product of the operation amount MV and the maintenance time in the control system b is 50% × 110 sec = 5500, and the control system a and the control system b It becomes almost the same value.
Further, when the temperature increase width is 100 and 50 is compared, the ratio of the product of the manipulated variable MV and the maintenance time is about 2: 1, which is almost the same as the temperature increase width ratio.

In the present invention, in order to perform grouping of control loops (controllers) and selection of priority-side controllers and non-priority-side controllers belonging to the same group, values that can relatively compare power usage prediction amounts between control loops. Therefore, strict prediction of the power consumption of each control loop is not necessary.
For the above reasons, it can be said that it is appropriate to adopt the difference (corresponding to the control deviation) between the set value SP at the start of temperature rise and the control amount PV as an index corresponding to the predicted power usage.

Next, the operation of the control device of the present embodiment will be described with reference to FIG. FIG. 5 is a flowchart showing the operation of the control device.
The temperature rise start detector 1 constantly monitors the set values SP1 to SP8 of the first to eighth control loops, and raises the temperature when at least one set value SP is changed to a value larger than the immediately preceding value. Considering it as the start time, a detection signal is output to the power usage prediction amount index calculation unit 2 (step S1 in FIG. 5).

  When the set values SP1 to SP8 of all the control loops are changed at a slightly shifted timing, the detection signal is sequentially sent to the power usage prediction amount index calculation unit 2 according to each change, and as a result, finally When the change is made, it is detected as the final temperature rise start time, and the processes after step S2 are performed.

When the temperature rise start detection unit 1 receives the temperature rise start detection signal, the power usage predicted amount index calculation unit 2 calculates the difference between the set value SP and the control amount PV for each of the first to eighth control loops. The power usage prediction amount index PW1 to PW8 is calculated for each control loop as follows, assuming that the power usage prediction amount is an index (step S2).
PW1 = SP1-PV1 (1)
PW2 = SP2-PV2 (2)
PW3 = SP3-PV3 (3)
PW4 = SP4-PV4 (4)
PW5 = SP5-PV5 (5)
PW6 = SP6-PV6 (6)
PW7 = SP7-PV7 (7)
PW8 = SP8-PV8 (8)

  Next, the coupling processing unit 8 performs the first to fourth priority side control of the first to eighth control loops (controllers 4-1 to 4-8) based on the predicted power usage amounts PW1 to PW8. A coupling process assigned to the loop and first to fourth non-priority side control loops (first to fourth priority side controllers and first to fourth non-priority side controllers) is performed (step S3).

  First, the coupling processing unit 8 rearranges the power usage prediction amount indexes PW1 to PW8 in descending order of the numerical values. Here, for example, the following operation will be described on the assumption that the elements are rearranged in the descending order, such as PW2, PW4, PW6, PW8, PW1, PW3, PW5, and PW7.

  When rearranged in such an order, the coupling processing unit 8 is the first priority side control loop (first priority side controller) belonging to the first group. The second control loop (controller 4-2) is selected, and the seventh non-prioritized control loop (first non-priority controller) belonging to the first group has the smallest predicted power usage amount index. Control loop (controller 4-7) is selected. In addition, the coupling processing unit 8 serves as a second priority control loop (second priority controller) belonging to the second group as a fourth control loop (controller 4) having the second largest power usage prediction index. -4) and as a second non-priority side control loop (second non-priority side controller) belonging to the second group, a fifth control loop (controller) having the second smallest power usage prediction index 4-5) is selected.

  In addition, the coupling processing unit 8 is a third priority control loop (third priority controller) belonging to the third group, as a sixth control loop (controller 4) having the third largest power usage prediction index. −6), and the third non-priority control loop (third non-priority controller) belonging to the third group is the third control loop (controller) having the third smallest power usage prediction index 4-3) is selected. Further, the coupling processing unit 8 serves as the fourth priority control loop (fourth priority controller) belonging to the fourth group as the fourth control loop (controller 4) having the fourth largest power usage prediction index. −8) and the fourth non-priority side control loop (fourth non-priority side controller) belonging to the fourth group is the first control loop (controller) having the fourth smallest power usage prediction index 4-1) is selected.

Then, the coupling processing unit 8 switches the switches 8-1 to 8-8, 9-1 to 9-4, 10-1 to 10-4, 11- in order to actually apply the above selection to the control device. 1-11-4 and 12-1 to 12-4 are controlled.
That is, the coupling processing unit 8 switches 8-1 to 8-8 so that the operation amount output upper limits MH4b, MH1a, MH3b, MH2a, MH2b, MH3a, MH1b, and MH4a are input to the controllers 4-1 to 4-8, respectively. Switch -8. In addition, the coupling processing unit 8 switches the switches 9-1 to 9-4 so that the operation amounts MV2, MV4, MV6, and MV8 are input to the non-priority upper limit calculation units 6-1 to 6-4, respectively.

  The coupling processing unit 8 switches the switches 10-1 to 10-4 so that the operation amounts MV7, MV5, MV3, and MV1 are input to the priority side upper limit calculation units 7-1 to 7-4, respectively. In addition, the coupling processing unit 8 switches the switches 11-1 to 11-4 so that the internal output values UC7, UC5, UC3, and UC1 are input to the priority side upper limit calculation units 7-1 to 7-4, respectively. Further, the coupling processing unit 8 switches the switches 12-1 to 12-4 so that the internal output values UC2, UC4, UC6, and UC8 are input to the priority side upper limit calculation units 7-1 to 7-4, respectively. Thus, the coupling process in step S3 is completed.

The above switching will be described generally. The coupling processing unit 8 switches the switches 8-1 to 8 so that the operation amount output upper limit value from the priority upper limit processing unit belonging to the same group is input to the priority controller. 8-8, and controls the switches 8-1 to 8-8 so that the operation amount output upper limit value from the non-priority upper limit calculation unit belonging to the same group is input to the non-priority controller. The switches 9-1 to 9-4 are controlled so that the operation amount from the priority side controller belonging to the same group is input to the priority side upper limit calculation unit, and the priority side upper limit calculation unit is not assigned to the non- belonging to the same group. The switches 10-1 to 10-4 are controlled so that the operation amount from the priority controller is input, and the internal output from the non-priority controller belonging to the same group to the priority upper limit calculation unit Switches 11-1 to 11-4 are input so that the internal output values from the priority controllers belonging to the same group are input to the priority side upper limit calculation unit. -4 may be controlled.
The selection state of each switch in FIG. 1 and FIG. 2 shows the state after such switching.

  Next, the first to fourth control calculations (steps S4 to S7) are sequentially performed in the order of the first to fourth groups. The detailed operation of the control calculation of each group is shown in FIG. First, the first control calculation (step S4) will be described.

  The first priority side upper limit processing unit 5-1 compares the operation amount output upper limit value MH1a of the first priority side controller 4-2 with a predetermined constant value MT1 (for example, 100%), and outputs an operation amount. When the upper limit value MH1a is larger than the constant value MT1, MH1a = MT1, that is, an upper limit process is performed in which the constant value MT1 is set as a new manipulated variable output upper limit value MH1a, and the manipulated variable output upper limit value MH1a after the upper limit process is When the manipulated variable output upper limit value MH1a is equal to or less than the constant value MT1, the manipulated variable output upper limit value MH1a is directly output to the switches 8-1 to 8-8 (step S10 in FIG. 6). .

Next, the first priority controller 4-2 calculates a manipulated variable MV2 by executing a PID calculation (step S11 in FIG. 6).
In step S11, the first priority controller 4-2 calculates the internal output value UC2 that is the operation amount before the upper limit process based on the operation amount output upper limit value MH1a by the PID calculation as the following equation.

UC2 = Kg2 {1 + 1 / (Ti2s) + Td2s} (SP2-PV2)
... (9)
In Equation (9), Kg2 is the proportional gain of the controller 4-2, Ti2 is the integration time of the controller 4-2, Td2 is the differential time of the controller 4-2, SP2 is the set value of the control target of the controller 4-2, PV2 Is a control amount to be controlled by the controller 4-2, and s is a Laplace operator.

  Subsequently, the first priority controller 4-2 receives the calculated internal output value UC2 and the operation amount output upper limit value MH1a input from the first priority upper limit processing unit 5-1 via the switch 8-2. If the internal output value UC2 is larger than the manipulated variable output upper limit value MH1a, an upper limit process is performed in which MV2 = MH1a, that is, the manipulated variable output upper limit value MH1a is set to the manipulated variable MV2, and the internal output value UC2 is When the output upper limit value MH1a is less than or equal to MH1a, MV2 = UC2, that is, the internal output value UC2 is set as the manipulated variable MV2. Then, the first priority controller 4-2 outputs the operation amount MV2 to the switches 9-1 to 9-4, 10-1 to 10-4, 13-2, and the internal output value UC2 to the switch 11-1. To 11-4, 12-1 to 12-4. Above, the process of step S11 is complete | finished.

The first non-priority side upper limit calculation unit 6-1 performs the first non-priority based on the operation amount MV2 and the constant value MT1 input from the first priority controller 4-2 via the switch 9-1. The operation amount output upper limit value MH1b of the side controller 4-7 is calculated as follows, and this operation amount output upper limit value MH1b is output to the switches 8-1 to 8-8 (step S12 in FIG. 6).
MH1b = MT1-MV2 (10)

The first non-priority controller 4-7 executes the PID calculation to calculate the operation amount MV7 (step S13 in FIG. 6).
In step S13, the first non-priority controller 4-7 calculates the internal output value UC7, which is the operation amount before performing the upper limit process based on the operation amount output upper limit value MH1b, by the PID calculation as follows.

UC7 = Kg7 {1 + 1 / (Ti7s) + Td7s} (SP7-PV7)
(11)
In equation (11), Kg7 is the proportional gain of the controller 4-7, Ti7 is the integration time of the controller 4-7, Td7 is the differential time of the controller 4-7, SP7 is the set value of the control target of the controller 4-7, PV7 Is a control amount to be controlled by the controller 4-7.

  Subsequently, the first non-priority controller 4-7 includes the calculated internal output value UC7 and the operation amount output upper limit value input from the first non-priority upper limit calculation unit 6-1 via the switch 8-7. When the internal output value UC7 is larger than the manipulated variable output upper limit value MH1b by comparing with MH1b, an upper limit process is performed in which the manipulated variable output upper limit value MH1b is set to the manipulated variable MV7, and the internal output value UC7 is When the manipulated variable output upper limit value MH1b is equal to or smaller than MV7 = UC7, that is, the internal output value UC7 is set as the manipulated variable MV7. Then, the first non-priority controller 4-7 outputs the manipulated variable MV7 to the switches 9-1 to 9-4, 10-1 to 10-4, 13-7, and the internal output value UC7 to the switch 11-. 1 to 11-4 and 12-1 to 12-4. Above, the process of step S13 is complete | finished.

Next, the first priority side upper limit calculation unit 7-1 calculates the operation amount output upper limit value MH1a ′ of the next control cycle of the first priority side controller 4-2 (step S14 in FIG. 6).
In step S14, the first priority upper limit calculation unit 7-1 inputs the operation amount MV7 input from the first non-priority controller 4-7 via the switch 10-1 and the switch 11-1. It is determined whether or not the following equation holds based on the internal output value UC7.

α1 (UC7−MV7)> 0 (12)
α1 is a priority coefficient indicating the priority of the control of the first priority controller 4-2 with respect to the first non-priority controller 4-7, and takes a real value from 0 to 1 (maximum priority when 0) 1 is the lowest priority).

The first priority side upper limit calculation unit 7-1, when Expression (12) is satisfied, the operation amount output upper limit value MH1a of the current control cycle output from the first priority side upper limit processing unit 5-1, the first The internal output value UC2 input from the first priority controller 4-2 via the switch 12-1, the operation amount MV7 input from the first non-priority controller 4-7 via the switch 10-1 and the switch 11 Based on the internal output value UC7 input via -1, the operation amount output upper limit value MH1a 'of the next control cycle of the first priority controller 4-2 is calculated as the following equation, and this operation amount The output upper limit value MH1a ′ is output to the first priority upper limit processing unit 5-1.
MH1a ′ = [MH1aTx2 + {UC2−α1 (UC7−MV7)} dT]
/ (Tx2 + dT) (13)
In Expression (13), Tx2 is a transition time, for example, Tx2 = Td2, and dT is a control period.

The first priority side upper limit calculation unit 7-1 also sets the operation amount output upper limit for the next control cycle based on the operation amount output upper limit value MH1a and the constant value MT1 for the current control cycle when Equation (12) is not satisfied. The value MH1a ′ is calculated as in the following equation, and the manipulated variable output upper limit value MH1a ′ is output to the first priority upper limit processing unit 5-1.
MH1a ′ = [MH1aTx2 + MT1dT] / (Tx2 + dT) (14)
In this way, the process of step S14 is complete | finished.

The processes in steps S10 to S14 described above are set as the first control calculation in one control cycle, and the processes in steps S10 to S14 are repeated every control cycle dT.
Note that in the next control cycle, the first priority upper limit processing unit 5-1 operates MH1a = MH1a ′, that is, the operation amount output upper limit value calculated by the first priority upper limit calculation unit 7-1 in the previous control cycle. With MH1a ′ as the manipulated variable output upper limit value MH1a, the process of step S10 is performed.

  Next, the second control calculation in step S5 in FIG. 5 will be described. The processing flow of the second control calculation is the same as that of the first control calculation, but here, in order to distinguish it from the first control calculation, the description is made by changing the symbols S10 to S14 in FIG. 6 to S20 to S24. To do.

  The second priority side upper limit processing unit 5-2 compares the operation amount output upper limit value MH2a of the second priority side controller 4-4 with a predetermined constant value MT2 (for example, 100%), and outputs an operation amount. When the upper limit value MH2a is larger than the constant value MT2, an upper limit process is performed in which MH2a = MT2, that is, the constant value MT2 is set as a new manipulated variable output upper limit value MH2a, and the manipulated variable output upper limit value MH2a after the upper limit process is When the manipulated variable output upper limit value MH2a is equal to or less than the constant value MT2, the manipulated variable output upper limit value MH2a is output to the switches 8-1 to 8-8 as it is (step S20).

Next, the second priority controller 4-4 executes the PID calculation to calculate the operation amount MV4 (step S21).
In step S21, the second priority controller 4-4 calculates the internal output value UC4, which is the operation amount before performing the upper limit process based on the operation amount output upper limit value MH2a, by the PID calculation as follows.

UC4 = Kg4 {1 + 1 / (Ti4s) + Td4s} (SP4-PV4)
(15)
In equation (15), Kg4 is the proportional gain of the controller 4-4, Ti4 is the integration time of the controller 4-4, Td4 is the differential time of the controller 4-4, SP4 is the set value of the control target of the controller 4-4, PV4 Is a control amount to be controlled by the controller 4-4.

  Subsequently, the second priority controller 4-4 includes the calculated internal output value UC4 and the operation amount output upper limit value MH2a input from the second priority upper limit processing unit 5-2 via the switch 8-4. If the internal output value UC4 is greater than the manipulated variable output upper limit value MH2a, an upper limit process is performed in which the manipulated variable output upper limit value MH2a is set to the manipulated variable MV4, and the internal output value UC4 becomes the manipulated variable. When the output upper limit value MH2a is less than or equal to MH2a, MV4 = UC4, that is, the internal output value UC4 is set as the manipulated variable MV4. Then, the second priority controller 4-4 outputs the operation amount MV4 to the switches 9-1 to 9-4, 10-1 to 10-4, 13-4, and the internal output value UC4 to the switch 11-1. To 11-4, 12-1 to 12-4. Above, the process of step S21 is complete | finished.

The second non-priority side upper limit calculation unit 6-2 performs the second non-priority based on the operation amount MV4 and the constant value MT2 input from the second priority controller 4-4 via the switch 9-2. The operation amount output upper limit value MH2b of the side controller 4-5 is calculated as in the following equation, and this operation amount output upper limit value MH2b is output to the switches 8-1 to 8-8 (step S22).
MH2b = MT2-MV4 (16)

The second non-priority controller 4-5 executes the PID calculation to calculate the operation amount MV5 (step S23).
In step S23, the second non-priority controller 4-5 calculates the internal output value UC5, which is the operation amount before performing the upper limit process based on the operation amount output upper limit value MH2b, by the PID calculation as follows.

UC5 = Kg5 {1 + 1 / (Ti5s) + Td5s} (SP5-PV5)
... (17)
In equation (17), Kg5 is the proportional gain of the controller 4-5, Ti5 is the integration time of the controller 4-5, Td5 is the differential time of the controller 4-5, SP5 is the set value of the control target of the controller 4-5, PV5 Is a control amount to be controlled by the controller 4-5.

  Subsequently, the second non-priority controller 4-5 determines the calculated internal output value UC5 and the operation amount output upper limit value input from the second non-priority upper limit calculation unit 6-2 via the switch 8-5. When the internal output value UC5 is larger than the manipulated variable output upper limit value MH2b by comparing with MH2b, an upper limit process is performed in which the manipulated variable output upper limit value MH2b is set to the manipulated variable MV5, and the internal output value UC5 is When the manipulated variable output upper limit MH2b is equal to or smaller than MV5 = UC5, that is, the internal output value UC5 is set as the manipulated variable MV5. Then, the second non-priority controller 4-5 outputs the operation amount MV5 to the switches 9-1 to 9-4, 10-1 to 10-4, 13-5, and the internal output value UC5 to the switch 11-. 1 to 11-4 and 12-1 to 12-4. Above, the process of step S23 is complete | finished.

Next, the second priority upper limit calculator 7-2 calculates an operation amount output upper limit MH2a ′ for the next control cycle of the second priority controller 4-4 (step S24).
In step S24, the second priority upper limit calculation unit 7-2 inputs the operation amount MV5 input from the second non-priority controller 4-5 via the switch 10-2 and the switch 11-2. It is determined whether or not the following equation holds based on the internal output value UC5.

α2 (UC5-MV5)> 0 (18)
α2 is a priority coefficient indicating the priority of the control of the second priority controller 4-4 with respect to the second non-priority controller 4-5, and takes a real value from 0 to 1 (the priority is maximum when 0). 1 is the lowest priority).

When the expression (18) is established, the second priority upper limit calculation unit 7-2 outputs the operation amount output upper limit value MH2a of the current control cycle output from the second priority upper limit processing unit 5-2, the second The internal output value UC4 input from the priority side controller 4-4 via the switch 12-2, the operation amount MV5 input from the second non-priority side controller 4-5 via the switch 10-2, and the switch 11 Based on the internal output value UC5 input via -2, the operation amount output upper limit value MH2a 'of the next control cycle of the second priority controller 4-4 is calculated as the following equation, and this operation amount The output upper limit value MH2a ′ is output to the second priority upper limit processing unit 5-2.
MH2a ′ = [MH2aTx4 + {UC4-α2 (UC5-MV5)} dT]
/ (Tx4 + dT) (19)
In Expression (19), Tx4 is a transition time, for example, Tx4 = Td4.

Further, the second priority side upper limit calculation unit 7-2 determines that the operation amount output upper limit of the next control cycle is based on the operation amount output upper limit value MH2a of the current control cycle and the constant value MT2 when Expression (18) is not satisfied. The value MH2a ′ is calculated as in the following equation, and the manipulated variable output upper limit value MH2a ′ is output to the second priority upper limit processing unit 5-2.
MH2a ′ = [MH2aTx4 + MT2dT] / (Tx4 + dT) (20)
Thus, the process of step S24 is completed.

The processes in steps S20 to S24 described above are set as the second control calculation in one control cycle, and the processes in steps S20 to S24 are repeated every control cycle dT.
In the next control cycle, the second priority upper limit processing unit 5-2 sets MH2a = MH2a ′, that is, the operation amount output upper limit value calculated by the second priority upper limit calculation unit 7-2 in the previous control cycle. With MH2a ′ as the manipulated variable output upper limit value MH2a, the process of step S20 is performed.

  Next, the third control calculation in step S6 of FIG. 5 will be described. The processing flow of the third control calculation is the same as that of the first control calculation, but here, in order to distinguish it from the first control calculation, description is made by changing the codes S10 to S14 in FIG. 6 to S30 to S34. To do.

  The third priority side upper limit processing unit 5-3 compares the operation amount output upper limit value MH3a of the third priority side controller 4-6 with a preset constant value MT3 (for example, 100%), and outputs an operation amount. When the upper limit value MH3a is larger than the constant value MT3, MH3a = MT3, that is, an upper limit process is performed in which the constant value MT3 is set as a new manipulated variable output upper limit value MH3a. When the manipulated variable output upper limit value MH3a is equal to or less than the fixed value MT3, the manipulated variable output upper limit value MH3a is output to the switches 8-1 to 8-8 as it is (step S30).

Next, the third priority controller 4-6 executes the PID calculation to calculate the operation amount MV6 (step S31).
In step S31, the third priority controller 4-6 calculates the internal output value UC6, which is the operation amount before performing the upper limit process based on the operation amount output upper limit value MH3a, by the PID calculation as follows.

UC6 = Kg6 {1 + 1 / (Ti6s) + Td6s} (SP6-PV6)
(21)
In equation (21), Kg6 is the proportional gain of the controller 4-6, Ti6 is the integration time of the controller 4-6, Td6 is the differential time of the controller 4-6, SP6 is the set value of the control target of the controller 4-6, PV6 Is a control amount to be controlled by the controller 4-6.

  Subsequently, the third priority controller 4-6 includes the calculated internal output value UC6 and the manipulated variable output upper limit value MH3a input from the third priority upper limit processing unit 5-3 via the switch 8-6. If the internal output value UC6 is greater than the manipulated variable output upper limit value MH3a, an upper limit process is performed in which the manipulated variable output upper limit value MH3a is set to the manipulated variable MV6, and the internal output value UC6 becomes the manipulated variable. When the output upper limit value MH3a is less than or equal to MH3a, MV6 = UC6, that is, the internal output value UC6 is set as the manipulated variable MV6. Then, the third priority controller 4-6 outputs the operation amount MV6 to the switches 9-1 to 9-4, 10-1 to 10-4, 13-6, and the internal output value UC6 to the switch 11-1. To 11-4, 12-1 to 12-4. Above, the process of step S31 is complete | finished.

The third non-priority upper limit calculation unit 6-3 performs the third non-priority based on the operation amount MV6 and the constant value MT3 input from the third priority controller 4-6 via the switch 9-3. The operation amount output upper limit value MH3b of the side controller 4-3 is calculated as follows, and this operation amount output upper limit value MH3b is output to the switches 8-1 to 8-8 (step S32).
MH3b = MT3-MV6 (22)

The third non-priority controller 4-3 executes the PID calculation to calculate the operation amount MV3 (step S33).
In step S33, the third non-priority controller 4-3 calculates the internal output value UC3, which is the operation amount before performing the upper limit process based on the operation amount output upper limit value MH3b, by the PID calculation as follows.

UC3 = Kg3 {1 + 1 / (Ti3s) + Td3s} (SP3-PV3)
... (23)
In equation (23), Kg3 is the proportional gain of the controller 4-3, Ti3 is the integration time of the controller 4-3, Td3 is the differential time of the controller 4-3, SP3 is the set value of the control target of the controller 4-3, PV3 Is a control amount to be controlled by the controller 4-3.

  Subsequently, the third non-priority controller 4-3 calculates the calculated internal output value UC3 and the operation amount output upper limit value input from the third non-priority upper limit calculation unit 6-3 via the switch 8-3. When the internal output value UC3 is greater than the manipulated variable output upper limit value MH3b by comparing with MH3b, an upper limit process is performed in which the manipulated variable output upper limit value MH3b is set to the manipulated variable MV3, and the internal output value UC3 is When the manipulated variable output upper limit value MH3b is equal to or smaller than MV3 = UC3, that is, the internal output value UC3 is set as the manipulated variable MV3. Then, the third non-priority controller 4-3 outputs the operation amount MV3 to the switches 9-1 to 9-4, 10-1 to 10-4, and 13-3, and the internal output value UC3 to the switch 11-. 1 to 11-4 and 12-1 to 12-4. Above, the process of step S33 is complete | finished.

Next, the third priority side upper limit calculation unit 7-3 calculates an operation amount output upper limit value MH3a ′ for the next control cycle of the third priority side controller 4-6 (step S34).
In step S34, the third priority upper limit calculation unit 7-3 inputs the operation amount MV3 input from the third non-priority controller 4-3 via the switch 10-3 and the switch 11-3. Based on the internal output value UC3, it is determined whether or not the following equation holds.

α3 (UC3-MV3)> 0 (24)
α3 is a priority coefficient indicating the priority of the control of the third priority controller 4-6 with respect to the third non-priority controller 4-3, and takes a real value from 0 to 1 (the priority is maximum when 0) 1 is the lowest priority).

The third priority side upper limit calculation unit 7-3, when the expression (24) is satisfied, the operation amount output upper limit value MH3a of the current control cycle output from the third priority side upper limit processing unit 5-3, the third The internal output value UC6 input from the priority controller 4-6 via the switch 12-3, the operation amount MV3 input from the third non-priority controller 4-3 via the switch 10-3, and the switch 11 −3, the operation amount output upper limit value MH3a ′ of the next control cycle of the third priority controller 4-6 is calculated as shown in the following equation based on the internal output value UC3 input via The output upper limit value MH3a ′ is output to the third priority side upper limit processing unit 5-3.
MH3a ′ = [MH3aTx6 + {UC6-α3 (UC3-MV3)} dT]
/ (Tx6 + dT) (25)
In Expression (25), Tx6 is a transition time, for example, Tx6 = Td6.

Further, the third priority side upper limit calculation unit 7-3, when the expression (24) is not satisfied, based on the operation amount output upper limit value MH3a of the current control cycle and the constant value MT3, the operation amount output upper limit of the next control cycle. The value MH3a ′ is calculated as in the following equation, and the manipulated variable output upper limit value MH3a ′ is output to the third priority upper limit processing unit 5-3.
MH3a ′ = [MH3aTx6 + MT3dT] / (Tx6 + dT) (26)
Thus, the process of step S34 is completed.

The processes in steps S30 to S34 described above are set as the third control calculation in one control cycle, and the processes in steps S30 to S34 are repeated every control cycle dT.
In the next control cycle, the third priority upper limit processing unit 5-3 sets MH3a = MH3a ′, that is, the operation amount output upper limit value calculated by the third priority upper limit calculation unit 7-3 in the previous control cycle. With MH3a ′ as the manipulated variable output upper limit value MH3a, the process of step S30 is performed.

  Next, the fourth control calculation in step S7 in FIG. 5 will be described. The process flow of the fourth control calculation is the same as that of the first control calculation. Here, in order to distinguish from the first control calculation, the description is made by changing the reference numerals S10 to S14 in FIG. 6 to S40 to S44. To do.

  The fourth priority side upper limit processing unit 5-4 compares the operation amount output upper limit value MH4a of the fourth priority side controller 4-8 with a predetermined constant value MT4 (for example, 100%), and outputs an operation amount. When the upper limit value MH4a is larger than the constant value MT4, MH4a = MT4, that is, an upper limit process is performed in which the constant value MT4 is set as a new manipulated variable output upper limit value MH4a, and the manipulated variable output upper limit value MH4a after the upper limit process is When the operation amount output upper limit value MH4a is equal to or less than the constant value MT4, the operation amount output upper limit value MH4a is output to the switches 8-1 to 8-8 as it is (step S40).

Next, the fourth priority controller 4-8 executes the PID calculation to calculate the operation amount MV8 (step S41).
In step S41, the fourth priority controller 4-8 calculates the internal output value UC8, which is the operation amount before the upper limit process based on the operation amount output upper limit value MH4a, by the PID calculation as shown in the following equation.

UC8 = Kg8 {1 + 1 / (Ti8s) + Td8s} (SP8-PV8)
... (27)
In equation (27), Kg8 is the proportional gain of the controller 4-8, Ti8 is the integration time of the controller 4-8, Td8 is the differential time of the controller 4-8, SP8 is the set value of the control target of the controller 4-8, PV8 Is a control amount to be controlled by the controller 4-8.

  Subsequently, the fourth priority controller 4-8 includes the calculated internal output value UC8 and the manipulated variable output upper limit value MH4a input from the fourth priority upper limit processing unit 5-4 via the switch 8-8. If the internal output value UC8 is larger than the manipulated variable output upper limit value MH4a, an upper limit process is performed in which the manipulated variable output upper limit value MH4a is set to the manipulated variable MV8, and the internal output value UC8 becomes the manipulated variable. When the output upper limit value MH4a is equal to or smaller than MV8 = UC8, that is, the internal output value UC8 is set as the manipulated variable MV8. The fourth priority controller 4-8 outputs the operation amount MV8 to the switches 9-1 to 9-4, 10-1 to 10-4, 13-8, and the internal output value UC8 to the switch 11-1. To 11-4, 12-1 to 12-4. Above, the process of step S41 is complete | finished.

The fourth non-priority side upper limit calculation unit 6-4 generates the fourth non-priority based on the operation amount MV8 and the constant value MT4 input from the fourth priority-side controller 4-8 via the switch 9-4. The operation amount output upper limit value MH4b of the side controller 4-1 is calculated as in the following equation, and this operation amount output upper limit value MH4b is output to the switches 8-1 to 8-8 (step S42).
MH4b = MT4-MV8 (28)

The fourth non-priority controller 4-1 executes the PID calculation to calculate the operation amount MV1 (step S43).
In step S43, the fourth non-priority controller 4-1 calculates the internal output value UC1 that is the operation amount before performing the upper limit process based on the operation amount output upper limit value MH4b by the PID calculation as the following equation.

UC1 = Kg1 {1 + 1 / (Ti1s) + Td1s} (SP1-PV1)
... (29)
In equation (29), Kg1 is the proportional gain of the controller 4-1, Ti1 is the integration time of the controller 4-1, Td1 is the differential time of the controller 4-1, SP1 is the set value of the control target of the controller 4-1, PV1 Is a control amount to be controlled by the controller 4-1.

  Subsequently, the fourth non-priority controller 4-1 operates the calculated internal output value UC1 and the operation amount output upper limit value input from the fourth non-priority upper limit calculation unit 6-4 via the switch 8-1. When the internal output value UC1 is greater than the manipulated variable output upper limit value MH4b by comparing with MH4b, an upper limit process is performed in which the manipulated variable output upper limit value MH4b is set to the manipulated variable MV1, and the internal output value UC1 is When the manipulated variable output upper limit MH4b is equal to or smaller than MV1 = UC1, that is, the internal output value UC1 is set as the manipulated variable MV1. Then, the fourth non-priority controller 4-1 outputs the operation amount MV1 to the switches 9-1 to 9-4, 10-1 to 10-4, 13-1, and the internal output value UC1 to the switch 11-. 1 to 11-4 and 12-1 to 12-4. Above, the process of step S43 is complete | finished.

Next, the fourth priority side upper limit calculation unit 7-4 calculates an operation amount output upper limit value MH4a ′ for the next control cycle of the fourth priority side controller 4-8 (step S44).
In step S44, the fourth priority upper limit calculation unit 7-4 inputs the operation amount MV1 input from the fourth non-priority controller 4-1 via the switch 10-4 and the switch 11-4. It is determined whether or not the following equation holds based on the internal output value UC1.

α4 (UC1-MV1)> 0 (30)
α4 is a priority coefficient indicating the priority of the control of the fourth priority controller 4-8 with respect to the fourth non-priority controller 4-1, and takes a real value from 0 to 1 (when 0 is the maximum priority) 1 is the lowest priority).

When the expression (30) is established, the fourth priority side upper limit calculation unit 7-4 outputs the operation amount output upper limit value MH4a of the current control cycle output from the fourth priority side upper limit processing unit 5-4, the fourth The internal output value UC8 input from the priority controller 4-8 through the switch 12-4, the operation amount MV1 input from the fourth non-priority controller 4-1 through the switch 10-4, and the switch 11 -4, the operation amount output upper limit value MH4a ′ of the next control cycle of the fourth priority controller 4-8 is calculated as in the following equation based on the internal output value UC1 input via -4. The output upper limit value MH4a ′ is output to the fourth priority side upper limit processing unit 5-4.
MH4a ′ = [MH4aTx8 + {UC8−α4 (UC1−MV1)} dT]
/ (Tx8 + dT) (31)
In Expression (31), Tx8 is a transition time, for example, Tx8 = Td8.

Further, the fourth priority side upper limit calculation unit 7-4, when the expression (30) is not satisfied, based on the operation amount output upper limit value MH4a of the current control cycle and the constant value MT4, the operation amount output upper limit of the next control cycle. The value MH4a ′ is calculated as in the following equation, and this manipulated variable output upper limit value MH4a ′ is output to the fourth priority side upper limit processing unit 5-4.
MH4a ′ = [MH4aTx8 + MT4dT] / (Tx8 + dT) (32)
Thus, the process of step S44 is completed.

The processes in steps S40 to S44 described above are set as the fourth control calculation in one control cycle, and the processes in steps S40 to S44 are repeated every control cycle dT.
In the next control cycle, the fourth priority upper limit processing unit 5-4 sets MH4a = MH4a ′, that is, the operation amount output upper limit value calculated by the fourth priority upper limit calculation unit 7-4 in the previous control cycle. With MH4a ′ as the manipulated variable output upper limit value MH4a, the process of step S40 is performed.

The processes in steps S1 to S7 are repeatedly executed for each control cycle dT until the end of control is instructed by an operator (Yes in step S8), for example.
The grouping performed by the coupling process in step S3 and the combination of the priority controller and the non-priority controller remain the same until the next start of temperature rise is detected. In addition, if the temperature rising start is not detected in step S1, if it is an initial time point when the control device is operated, by a preset grouping and a combination of a preset priority controller and a non-priority controller, Steps S4 to S7 are performed.

  Note that the on / off control unit 14 applies the power control method disclosed in Patent Document 2 to suppress the instantaneous maximum power of the entire heater system, and switches 13 during the processing of steps S1 to S7. -1 to 13-8 are operated as follows. FIG. 7 is a timing chart for explaining the power control by the on / off control unit 14.

  As shown in FIGS. 7A and 7B, the on / off control unit 14 simultaneously outputs the operation amount outputs of the first priority controller and the first non-priority controller belonging to the first group. Control so that it does not turn on. In the above example, since the first priority controller is 4-2 and the first non-priority controller is 4-7, the on / off controller 14 prevents the switches 13-2 and 13-7 from being turned on simultaneously. To control.

  Further, as shown in FIGS. 7C and 7D, the on / off control unit 14 outputs the operation amounts of the second priority controller and the second non-priority controller belonging to the second group. Are controlled so that they are not turned on at the same time. In the above example, since the second priority controller is 4-4 and the second non-priority controller is 4-5, the on / off controller 14 prevents the switches 13-4 and 13-5 from being turned on at the same time. To control.

  Further, as shown in FIGS. 7E and 7F, the on / off control unit 14 outputs the operation amount of each of the third priority side controller and the third non-priority side controller belonging to the third group. Are controlled so that they are not turned on at the same time. In the above example, since the third priority controller is 4-6 and the third non-priority controller is 4-3, the on / off controller 14 prevents the switches 13-6 and 13-3 from being turned on simultaneously. To control.

  Further, as shown in FIGS. 7G and 7H, the on / off control unit 14 outputs the operation amount of each of the fourth priority controller and the fourth non-priority controller belonging to the fourth group. Are controlled so that they are not turned on at the same time. In the above example, since the fourth priority controller is 4-8 and the fourth non-priority controller is 4-1, the on / off controller 14 prevents the switches 13-8 and 13-1 from being turned on simultaneously. To control.

  That is, the on / off control unit 14 may prevent the operation amount output of the priority controller belonging to the same group and the operation amount output of the non-priority controller from being simultaneously turned on.

  As described above, in the present embodiment, when the start of temperature rise is detected, a power usage prediction amount index corresponding to the predicted value of power usage is calculated for each control loop, and the power usage prediction amount for each control loop is calculated. Based on the index, the controllers are grouped together, and when this grouping is performed, the priority controller and the non-priority controller are combined in the same group so that the operation amount output of the priority controller is below a certain value. The upper limit value of the priority-side operation amount output previously input is limited and given to the priority-side controller, and the sum of the operation amount output of the priority-side controller and the operation amount output of the non-priority-side controller becomes a certain value or less. As described above, the non-priority side operation amount output upper limit value is calculated and applied to the non-priority side controller, and the non-priority side controller operation amount output upper limit value is controlled by the non-priority side operation amount output upper limit value. Depending on the margin of quantity output, a calculation that increases or decreases the priority operation amount output upper limit value is performed, and a situation that cannot be assumed in advance occurs by setting the calculated value as the priority operation amount output upper limit value of the next control cycle. Even if it is a control target, it is possible to obtain good controllability for the priority controller while maintaining the sum of the manipulated variable outputs of one group below a certain value, and to some extent controllability for the non-priority controller Thus, the control characteristics of each control loop and instantaneous suppression of the maximum power can be made compatible within an acceptable range. For example, when considering the situation of FIGS. 9 and 10, the appropriate combination of FIG. 9 is always set automatically.

[Second Embodiment]
In the first embodiment, the difference between the set value SP and the control amount PV is simply used as an index of the predicted power usage. For example, when the heaters are not equally capable, the heaters H1 to H8 are heated. In consideration of the heater capacity coefficients HP1 to HP8 representing the power usage predicted amount indexes PW1 to PW8, the following may be calculated.

PW1 = (SP1-PV1) HP1 (33)
PW2 = (SP2-PV2) HP2 (34)
PW3 = (SP3-PV3) HP3 (35)
PW4 = (SP4-PV4) HP4 (36)
PW5 = (SP5-PV5) HP5 (37)
PW6 = (SP6-PV6) HP6 (38)
PW7 = (SP7−PV7) HP7 (39)
PW8 = (SP8-PV8) HP8 (40)

  Thereby, compared with 1st Embodiment, the prediction precision of an electric power usage prediction amount parameter | index can be improved. Thus, it is easy to incorporate other factors into the power usage prediction amount index in order to improve the prediction accuracy, and the power usage prediction amount can be used as a value that can be relatively compared between the control loops. If possible, the method is not limited to the method disclosed in the first and second embodiments.

  The control device described in the first and second embodiments can be realized by a computer having a CPU, a storage device, and an interface, and a program for controlling these hardware resources. The CPU executes the processing described in the first and second embodiments in accordance with a program stored in the storage device.

  The present invention can be applied to a process control technique.

It is a block diagram which shows the structure of the control apparatus used as the 1st Embodiment of this invention. It is a block diagram which shows the structure of the control apparatus used as the 1st Embodiment of this invention. It is a block diagram of the control system in the 1st Embodiment of this invention. It is a figure for demonstrating that electric power consumption is proportional to the product of the operation amount and its maintenance time. It is a flowchart which shows operation | movement of the control apparatus of FIG. It is a flowchart which shows the detailed operation | movement of the control calculation of each group in the control apparatus of FIG. It is a timing chart for demonstrating the electric power control by the on-off control part of the 1st Embodiment of this invention. It is a figure which shows an example of the change of the temperature measurement value when the temperature setting value is changed in four control systems, and the manipulated variable. It is a figure which shows an example of the change of a temperature measurement value at the time of applying the combination of a prior art to the control system of FIG. It is a figure which shows the other example of the change of a temperature measurement value at the time of applying the combination of a prior art to the control system of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Temperature rising start detection part, 2 ... Electric power usage prediction amount parameter | index calculation part, 3 ... Coupling process part, 4-1 to 4-8 ... Controller, 5-1 to 5-4 ... Priority side upper limit process part, 6 -1 to 6-4 ... non-priority side upper limit calculation unit, 7-1 to 7-4 ... priority side upper limit calculation unit, 8-1 to 8-8, 9-1 to 9-4, 10-1 to 10- 4, 11-1 to 11-4, 12-1 to 12-4, 13-1 to 13-8... Switch, 14.

Claims (5)

In a control device of a control system of an n (n is an even number of 2 or more) loop,
N heaters for heating the controlled object;
An operation amount is calculated based on a set value input from the outside and a control amount of the control target, and the operation amount whose size is limited according to an operation amount output upper limit value is output to the corresponding heater. A controller,
A temperature rise start detector for detecting the start of temperature rise in the control system of the n loop;
Wherein the can and start heating has been detected, power usage prediction amount calculated for each control loop as power usage prediction amount index difference corresponding to the predicted value of the power usage of the set value and the controlled variable of the control loop An index calculator,
Based on the predicted power usage amount index for each control loop, the n controllers are divided into n / 2 groups. In this grouping, the predicted power usage amount index is large and the power supply priority is high. A coupling processor that combines the priority controller and the non-priority controller having a low power supply priority with a small power usage prediction amount index into a same group;
Provided to the priority side controller by limiting the size of the priority side operation amount output upper limit value provided in advance for each group, so that the operation amount output of the priority side controller becomes a predetermined value or less. A priority upper limit processing unit for each group;
A non-priority side operation amount output upper limit value is provided for each group so that the sum of the operation amount output of the priority controller and the operation amount output of the non-priority controller is less than or equal to the predetermined value. A non-priority upper limit calculation unit for each group to give to the non-priority controller;
Provided for each group, and calculated to increase or decrease the priority side operation amount output upper limit value according to the margin of the operation amount output of the non-priority side controller with respect to the non-priority side operation amount output upper limit value. A control apparatus, comprising: a priority side upper limit calculation unit that assigns a value to the priority side upper limit processing unit as a priority side operation amount output upper limit value of a next control cycle for each group. The control device according to claim 1,
The temperature rise start detection unit constantly monitors the set value of each control loop, regards when at least one set value is changed to a value larger than the immediately preceding value as a temperature rise start time, and uses the power A control apparatus that outputs a detection signal to a prediction amount index calculation unit. The control device according to claim 1,
What the power usage predictor index calculation unit, multiplied by the capacity factor of the heater in which the temperature increase start is available for each control loop the difference between the control amount and the detected Kino the set value of the control loop The control device is calculated as the predicted power usage amount index. The control device according to claim 1,
The coupling processing unit selects the priority side controller and the non-priority side controller that belong to the same group at the time of the grouping, and selects the priority side controller one by one in descending order of the predicted power usage amount index. In addition, the non-priority controller is selected one by one in ascending order of the predicted power usage amount index . An operation amount is calculated based on n (n is an even number of 2 or more) heaters that heat the control target, a set value input from the outside, and a control amount of the control target, and the operation amount output upper limit value is determined. In a control method of an n-loop control system comprising n controllers that output the manipulated variable whose size is limited to the corresponding heater,
A temperature rising start detection procedure for detecting the temperature rising start of the control system of the n loop;
A predicted power usage amount index that calculates, for each control loop, a power usage prediction amount index corresponding to a predicted value of power usage when the start of temperature rise is detected Calculation procedure,
Based on the predicted power usage amount index for each control loop, the n controllers are divided into n / 2 groups. In this grouping, the predicted power usage amount index is large and the power supply priority is high. A coupling process procedure for combining the priority controller and the non-priority controller having a low power supply priority with a low power consumption prediction amount index into the same group;
Provided to the priority side controller by limiting the size of the priority side operation amount output upper limit value provided in advance for each group, so that the operation amount output of the priority side controller becomes a predetermined value or less. Priority side upper limit processing procedure to be performed for each group,
A non-priority side operation amount output upper limit value is provided for each group so that the sum of the operation amount output of the priority controller and the operation amount output of the non-priority controller is less than or equal to the predetermined value. A non-priority upper limit calculation procedure for each group giving to the non-priority controller;
Provided for each group, and calculated to increase or decrease the priority side operation amount output upper limit value according to the margin of the operation amount output of the non-priority side controller with respect to the non-priority side operation amount output upper limit value. A control method characterized by repeatedly executing a priority side upper limit calculation procedure in which a value is given to the priority side upper limit processing procedure as a priority side operation amount output upper limit value of a next control cycle for each group.

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