JP4982554B2 - 担持体にスケールを保持するための方法ならびに担持体とスケールを備えた組立体 - Google Patents

担持体にスケールを保持するための方法ならびに担持体とスケールを備えた組立体 Download PDF

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JP4982554B2
JP4982554B2 JP2009501869A JP2009501869A JP4982554B2 JP 4982554 B2 JP4982554 B2 JP 4982554B2 JP 2009501869 A JP2009501869 A JP 2009501869A JP 2009501869 A JP2009501869 A JP 2009501869A JP 4982554 B2 JP4982554 B2 JP 4982554B2
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scale
carrier
electrode
voltage
electrodes
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JP2009531675A (ja
JP2009531675A5 (https=
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ホルツアプフェル・ヴォルフガング
シュペックバッハー・ペーター
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2009501869A 2006-03-29 2007-01-18 担持体にスケールを保持するための方法ならびに担持体とスケールを備えた組立体 Active JP4982554B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006014789.8 2006-03-29
DE102006014789 2006-03-29
PCT/EP2007/000404 WO2007112796A1 (de) 2006-03-29 2007-01-18 Verfahren zum halten eines massstabs an einem träger sowie anordnung mit einem träger und einem massstab

Publications (3)

Publication Number Publication Date
JP2009531675A JP2009531675A (ja) 2009-09-03
JP2009531675A5 JP2009531675A5 (https=) 2012-03-29
JP4982554B2 true JP4982554B2 (ja) 2012-07-25

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JP2009501869A Active JP4982554B2 (ja) 2006-03-29 2007-01-18 担持体にスケールを保持するための方法ならびに担持体とスケールを備えた組立体

Country Status (5)

Country Link
US (1) US7549234B2 (https=)
EP (1) EP2002216B1 (https=)
JP (1) JP4982554B2 (https=)
CN (1) CN101416031A (https=)
WO (1) WO2007112796A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7707739B2 (en) * 2005-11-04 2010-05-04 Dr. Johannes Heidenhain Gmbh Method for attaching a scale to a carrier, a scale, and carrier having a scale
DE102008043353A1 (de) * 2008-10-31 2010-05-06 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung
JP5162800B2 (ja) * 2009-03-24 2013-03-13 株式会社ミツトヨ リニアスケール
DE102009044917A1 (de) * 2009-09-23 2011-04-07 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung
DE102009047120A1 (de) * 2009-11-25 2011-05-26 Dr. Johannes Heidenhain Gmbh Anordnung mit einem an einem Träger befestigten Maßstab
DE102011079446A1 (de) 2011-07-20 2013-02-07 Robert Bosch Gmbh Sensoreinrichtung, insbesondere für die Verwendung in einem Kraftfahrzeug
CN103322900B (zh) * 2013-06-21 2016-02-03 深圳市华星光电技术有限公司 一种靶材的刻蚀量测装置及量测方法
TWI656596B (zh) * 2014-08-26 2019-04-11 Asml Holding N. V. 靜電夾具及其製造方法
DE102016201088A1 (de) * 2016-01-26 2017-07-27 Dr. Johannes Heidenhain Gmbh Verfahren zum Bearbeiten einer Maßverkörperung
DE102019206523A1 (de) 2019-05-07 2020-11-12 Zf Friedrichshafen Ag Leistungsmodul mit gehäusten Leistungshalbleitern zur steuerbaren elektrischen Leistungsversorgung eines Verbrauchers
EP3892962B1 (de) 2020-04-08 2023-03-08 Dr. Johannes Heidenhain GmbH Anordnung für eine positionsmessung
WO2023076359A1 (en) * 2021-10-28 2023-05-04 Entegris, Inc. Electrostatic chuck that includes upper ceramic layer that includes a dielectric layer, and related methods and structures

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3635511A1 (de) * 1986-10-18 1988-04-28 Zeiss Carl Fa Halterung fuer mass- und formverkoerperung
EP0288613A1 (en) 1987-05-01 1988-11-02 Agfa-Gevaert N.V. Electrostatic holder
JPH0814485B2 (ja) * 1988-01-25 1996-02-14 株式会社ミツトヨ スケール精度測定装置及び測定方法
DE3929629A1 (de) * 1989-09-06 1991-03-07 Zeiss Carl Fa Laengen- oder winkelmesseinrichtung
DE19512892C2 (de) * 1995-04-06 1998-11-05 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
US5838529A (en) * 1995-12-22 1998-11-17 Lam Research Corporation Low voltage electrostatic clamp for substrates such as dielectric substrates
DE19854318A1 (de) * 1998-11-25 2000-05-31 Heidenhain Gmbh Dr Johannes Längenmeßeinrichtung
US6772531B1 (en) * 1999-11-30 2004-08-10 Renishaw Plc Measurement apparatus including a track for a measurement scale and apparatus for tensioning the scale
US7289212B2 (en) 2000-08-24 2007-10-30 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufacturing thereby
JP2003036573A (ja) * 2001-07-26 2003-02-07 Pioneer Electronic Corp ディスク原盤製造装置
US6867377B2 (en) * 2000-12-26 2005-03-15 Emcore Corporation Apparatus and method of using flexible printed circuit board in optical transceiver device
DE10153147A1 (de) 2001-10-27 2003-05-08 Zeiss Carl Verfahren zum Aufbringen eines Maßstabes auf einen Träger
US6754062B2 (en) * 2002-02-27 2004-06-22 Praxair S.T. Technology, Inc. Hybrid ceramic electrostatic clamp
JP4024600B2 (ja) * 2002-06-25 2007-12-19 株式会社ミツトヨ 枠多点固定タイプのユニット型直線変位測定装置、及び、その固定方法
US8043797B2 (en) * 2004-10-12 2011-10-25 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7196770B2 (en) * 2004-12-07 2007-03-27 Asml Netherlands B.V. Prewetting of substrate before immersion exposure
WO2007008792A2 (en) * 2005-07-08 2007-01-18 Nexgensemi Holdings Corporation Apparatus and method for controlled particle beam manufacturing
US7707739B2 (en) * 2005-11-04 2010-05-04 Dr. Johannes Heidenhain Gmbh Method for attaching a scale to a carrier, a scale, and carrier having a scale
US7804582B2 (en) * 2006-07-28 2010-09-28 Asml Netherlands B.V. Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
CN101416031A (zh) 2009-04-22
US7549234B2 (en) 2009-06-23
EP2002216A1 (de) 2008-12-17
WO2007112796A1 (de) 2007-10-11
JP2009531675A (ja) 2009-09-03
US20070227027A1 (en) 2007-10-04
EP2002216B1 (de) 2015-07-08

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