JP4966774B2 - Coating material spreading device - Google Patents

Coating material spreading device Download PDF

Info

Publication number
JP4966774B2
JP4966774B2 JP2007190618A JP2007190618A JP4966774B2 JP 4966774 B2 JP4966774 B2 JP 4966774B2 JP 2007190618 A JP2007190618 A JP 2007190618A JP 2007190618 A JP2007190618 A JP 2007190618A JP 4966774 B2 JP4966774 B2 JP 4966774B2
Authority
JP
Japan
Prior art keywords
rotating shaft
mounting table
coated
rotating
rotation axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007190618A
Other languages
Japanese (ja)
Other versions
JP2009022920A (en
Inventor
英之 小梶
哲哉 岡本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Origin Electric Co Ltd
Original Assignee
Origin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Origin Electric Co Ltd filed Critical Origin Electric Co Ltd
Priority to JP2007190618A priority Critical patent/JP4966774B2/en
Publication of JP2009022920A publication Critical patent/JP2009022920A/en
Application granted granted Critical
Publication of JP4966774B2 publication Critical patent/JP4966774B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for spreading a coating material, which has a simple structure and is used for applying a coating material to the uneven surface of the object to be coated by a spin coating method and to provide a method for spreading the coating material. <P>SOLUTION: The apparatus 1 for spreading the coating material is provided with: a rotary shaft part 30 to be rotated around a rotary shaft R; and a placement stand 10 which supports fixedly the coating material 88-supplied object 80 to be coated, is supported by the rotary shaft part 30 and turned around the turnable axis D in the direction crossing the direction of the rotary shaft R while being rotated by the rotation of the rotary shaft part 30. The method for spreading the coating material comprises the steps of: supplying the coating material 88 onto the surface of the object 80 to be coated; rotating the coating material 88-supplied object 80 to be coated around the rotary shaft R to spread the coating material 88; and changing the angle T of the object 80 to be coated with the rotary shaft R by turning the object 80 to be coated around the turnable axis D in the direction having the crossing with the direction of the rotary shaft R at the step of rotating the coating material 88-supplied object 80 to be coated around the rotary shaft R to spread the coating material 88. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

本発明は、塗布物展延装置および塗布物展延方法に関し、特に、平坦でない被塗布物の面上に塗布物を所望の厚さに展延する装置および方法に関する。   The present invention relates to a coating material spreading apparatus and a coating material spreading method, and more particularly, to an apparatus and a method for spreading a coating material to a desired thickness on a surface of an object to be coated which is not flat.

プリント配線基板の表面にフォトレジスト材料を塗布するには、プリント配線基板の表面に液状のフォトレジスト材料を供給した後に、高速で回転することにより、高速回転の遠心力を利用してフォトレジスト材料をプリント配線基板の表面に展延する方法がしばしば用いられている(例えば、特許文献1参照)。このように、プリント配線基板などの被塗布物に液状の塗布物を供給した上で、高速回転させて遠心力を利用して展延する方法はスピンコーティング法として、塗布物の膜厚を均一に所望の厚さに塗布することができることから、CD(コンパクトディスク)などの光ディスクへの保護膜あるいは接着剤の塗布などの分野で広く用いられている。
特開2001−339144号公報(第2−3頁、図2)
In order to apply a photoresist material to the surface of a printed wiring board, a liquid photoresist material is supplied to the surface of the printed wiring board and then rotated at a high speed, thereby utilizing the centrifugal force of high speed rotation. A method of spreading the film on the surface of the printed wiring board is often used (see, for example, Patent Document 1). In this way, the liquid coating material is supplied to the coating object such as a printed wiring board and then spread using a centrifugal force at a high speed, and the coating film thickness is uniform as a spin coating method. Since it can be applied to a desired thickness, it is widely used in the field of applying a protective film or an adhesive to an optical disk such as a CD (compact disk).
JP 2001-339144 A (page 2-3, FIG. 2)

しかし、高速回転させて遠心力を利用して展延する方法は、従来はプリント配線基板や光ディスクなどの平坦な表面を有する被塗布物に対して用いられてきた。ところが、スピンコーティング法の膜厚を均一に所望の厚さに塗布する能力に鑑み、曲面や直角に近いような角度で接続する二面を有するなど、平坦でない被塗布物の表面にもスピンコーティング法により塗布物を塗布することへの要求は高い。ただし、かかる平坦でない被塗布物をスピンコートする装置として、複雑な構造とするのであれば、装置のコストも高く、信頼性も低下してしまう。そこで、本発明は、簡単な構造で、平坦でない被塗布物の表面にスピンコーティング法により塗布物を塗布するための、塗布物展延装置および塗布物展延方法を提供することを目的とする。   However, the method of rotating at high speed and spreading using centrifugal force has been conventionally used for a coated object having a flat surface such as a printed wiring board or an optical disk. However, in view of the ability to apply a uniform thickness to the desired thickness of the spin coating method, spin coating is also applied to the surface of an object to be coated, such as a curved surface or two surfaces that are connected at an angle close to a right angle. There is a high demand for applying a coating by the method. However, if a complicated structure is used as a device for spin-coating the uneven coating object, the cost of the device is high and the reliability is also lowered. SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a coating material spreading device and a coating material spreading method for applying a coating material by a spin coating method to the surface of a non-flat coating material with a simple structure. .

上記目的を達成するために、本発明の第1の態様に係る塗布物展延装置は、例えば図1に示すように、回転軸R回りに回転する回転軸部30と;塗布物88が供給された被塗布物80を固定支持し、回転軸部30に支持され、回転軸部30の回転に伴い回転しながら回転軸Rの方向と交差する方向の回動軸D回りに回動する載置台10とを備える。   In order to achieve the above object, the spread material spreading apparatus according to the first aspect of the present invention includes, for example, a rotating shaft portion 30 that rotates about a rotation axis R as shown in FIG. The coated object 80 is fixedly supported, supported by the rotary shaft 30, and rotated about the rotation axis D in a direction intersecting the direction of the rotation axis R while rotating as the rotation shaft 30 rotates. The pedestal 10 is provided.

このように構成すると、被塗布物を固定支持する載置台が、回転軸部が回転する回転軸と交差する回動軸回りに回動するので、回転軸回りに回転する載置台の回転面の回転軸との垂直面に対する角度(以降、「傾斜角」ともいう)Tを変化させることができる。したがって、簡単な構造で、被塗布物が回転することにより塗布物が展延される、被塗布物上での位置を変えることができ、平坦でない被塗布物に供給された塗布物を所望の厚さに展延することができる。   If comprised in this way, since the mounting base which fixes and supports a to-be-coated object will rotate around the rotating shaft which cross | intersects the rotating shaft which a rotating shaft part rotates, of the rotating surface of the mounting table rotated around a rotating shaft. The angle (hereinafter also referred to as “inclination angle”) T with respect to the vertical plane with respect to the rotation axis can be changed. Therefore, it is possible to change the position on the coated object where the coated object is spread by rotating the coated object with a simple structure. Can be spread to thickness.

また、本発明の第2の態様に係る塗布物展延装置では、例えば図3に示すように、本発明の第1の態様に係る塗布物展延装置において、回転軸部30が、載置台10の重心位置Gからずれた位置(回動軸Dの位置)で載置台10を支持してもよい。なお、「重心位置からずれた位置」とは、載置台の重心を回転軸に垂直な平面上に投影した場合、重心を投影した位置とはずれた位置に投影される位置をいう。
このように構成すると、載置台が重心位置からずれた位置で支持されて、回転されることになるので、回転速度に応じて、載置台が回動軸回りに回動し、載置台の回転面の回転軸に対する角度を変化させることとなる。
Moreover, in the coated material spreading apparatus which concerns on the 2nd aspect of this invention, as shown, for example in FIG. 3, in the coated material spreading apparatus which concerns on the 1st aspect of this invention, the rotating shaft part 30 is a mounting base. The mounting table 10 may be supported at a position shifted from the center of gravity position G (position of the rotation axis D). The “position shifted from the position of the center of gravity” refers to a position projected at a position deviated from the position where the center of gravity is projected when the center of gravity of the mounting table is projected on a plane perpendicular to the rotation axis.
If comprised in this way, since a mounting base will be supported and rotated in the position shifted | deviated from the gravity center position, according to rotation speed, a mounting base will rotate around a rotating shaft, and rotation of a mounting base will be carried out. The angle of the surface with respect to the rotation axis is changed.

また、本発明の第3の態様に係る塗布物展延装置では、例えば図1に示すように、本発明の第1の態様または第2の態様に係る塗布物展延装置1において、回転軸部30の回転速度は可変であり;回転軸部30の回転速度を制御する制御装置46を備えてもよい。
このように構成すると、制御装置により回転軸部の回転速度を制御するので、所望の回転速度で、あるいは、回転速度を変化させながら、被塗布物を回転させることができ、塗布物の展延を調整しやすい。特に、載置台が重心位置からずれた位置で支持される場合には、回転速度を制御することで、傾斜角を変化させることもでき、回転速度を適宜制御することにより、塗布物を所望の厚さに展延することができる。
Moreover, in the coating material spreading | diffusion apparatus which concerns on the 3rd aspect of this invention, as shown, for example in FIG. 1, in the coating material spreading | diffusion apparatus 1 which concerns on the 1st aspect or 2nd aspect of this invention, a rotating shaft The rotational speed of the part 30 is variable; a control device 46 for controlling the rotational speed of the rotary shaft part 30 may be provided.
With this configuration, since the rotation speed of the rotating shaft is controlled by the control device, the object to be coated can be rotated at a desired rotation speed or while changing the rotation speed. Easy to adjust. In particular, when the mounting table is supported at a position shifted from the position of the center of gravity, the tilt angle can be changed by controlling the rotation speed, and the desired product can be obtained by appropriately controlling the rotation speed. Can be spread to thickness.

また、本発明の第4の態様に係る塗布物展延装置では、例えば図4に示すように、本発明の第1の態様ないし第3の態様のいずれかの態様に係る塗布物展延装置において、載置台10を回動軸D回りに回動する回動駆動装置70を備えてもよい。
このように構成すると、傾斜角を任意に変化させることができるので、塗布物を所望の厚さに展延しやすい。
Moreover, in the coated material spreading apparatus according to the fourth aspect of the present invention, for example, as shown in FIG. 4, the coated material spreading apparatus according to any one of the first to third aspects of the present invention. , A rotation drive device 70 that rotates the mounting table 10 about the rotation axis D may be provided.
If comprised in this way, since an inclination | tilt angle can be changed arbitrarily, it is easy to spread a coating material to desired thickness.

また、本発明の第5の態様に係る塗布物展延装置では、例えば図2(a)、(b)に示すように、本発明の第1の態様ないし第4の態様のいずれかの態様に係る塗布物展延装置において、載置台10から突出し、被塗布物80を吸着して固定する吸着部20を複数備え、吸着部20は被塗布物80の形状に合わせるため載置台10から突出する高さhが可変であってもよい。
このように構成すると、載置台で平坦でない被塗布物を確実に固定支持することができる。
Moreover, in the coated material spreading apparatus according to the fifth aspect of the present invention, for example, as shown in FIGS. 2 (a) and 2 (b), any one of the first to fourth aspects of the present invention. In the coated material spreading apparatus according to the present invention, a plurality of suction parts 20 that protrude from the mounting table 10 and suck and fix the coated object 80 are provided, and the sucking part 20 protrudes from the mounting table 10 to match the shape of the coated object 80. The height h to be changed may be variable.
If comprised in this way, the to-be-coated to-be-coated object can be fixedly supported reliably by a mounting base.

また、本発明の第6の態様に係る塗布物展延装置では、例えば図2(c)に示すように、本発明の第1の態様ないし第4の態様のいずれかの態様に係る塗布物展延装置において、載置台14が、回転軸Rに交差する方向に押圧することにより被塗布物82を固定支持してもよい。
このように構成すると、載置台が回転軸に交差する方向に押圧することにより被塗布物を固定支持するので、被塗布物が押圧される面を有する場合に、被塗布物を容易に確実に固定支持することができる。
Moreover, in the coated material spreading apparatus according to the sixth aspect of the present invention, for example, as shown in FIG. 2 (c), the coated material according to any one of the first to fourth aspects of the present invention. In the spreading device, the mounting table 14 may be fixedly supported by pressing the mounting table 14 in a direction crossing the rotation axis R.
If comprised in this way, since a mounting base will fix and support a to-be-coated object by pressing in the direction which cross | intersects a rotating shaft, when it has a surface where a to-be-coated object is pressed, it can be easily and reliably Can be fixedly supported.

また、本発明の第7の態様に係る塗布物展延装置では、例えば図5に示すように、本発明の第1の態様ないし第6の態様のいずれかの態様に係る塗布物展延装置において、回転軸部35が、回転軸R回りに回転しながら回転軸Rの方向および回動軸Dの方向と交差する方向の可動軸K回りに回動してもよい。
このように構成すると、回転軸部が回転軸および回動軸と交差する可動軸回りに回動できるので、被塗布物を傾斜角と異なる方向にも傾斜させて回転させることができ、塗布物が展延する方向を変化させることができる。
Moreover, in the coated material spreading apparatus according to the seventh aspect of the present invention, for example, as shown in FIG. 5, the coated material spreading apparatus according to any one of the first to sixth aspects of the present invention. In this case, the rotary shaft 35 may rotate around the movable axis K in the direction intersecting the direction of the rotary axis R and the direction of the rotary axis D while rotating around the rotary axis R.
If comprised in this way, since a rotating shaft part can be rotated around the movable axis | shaft which cross | intersects a rotating shaft and a rotating shaft, it can be rotated by inclining a to-be-coated object also in the direction different from an inclination angle, and a coated object. Can change the direction of spreading.

前記目的を達成するため、本発明の第8の態様に係る塗布物展延方法は、例えば図3および図6に示すように、被塗布物80の表面に塗布物88を供給する工程(S1)と;塗布物88が供給された被塗布物80を回転軸R回りに回転し(S3)、塗布物88を展延する工程(S4、S7)と;塗布物88を展延する工程(S4、S7)において、回転軸Rの方向と交差する方向の回動軸D回りに被塗布物80を回動し、被塗布物88の回転軸Rに対する角度Tを変える工程(S6)とを備える。   In order to achieve the above object, the spread material spreading method according to the eighth aspect of the present invention includes a step of supplying a spread material 88 to the surface of the object to be coated 80 (S1) as shown in FIGS. ); Rotating the coating object 80 supplied with the coating 88 around the rotation axis R (S3) and spreading the coating 88 (S4, S7); and spreading the coating 88 ( In S4, S7), a step (S6) of rotating the object 80 around the rotation axis D in a direction intersecting the direction of the rotation axis R and changing the angle T of the object 88 with respect to the rotation axis R (S6). Prepare.

このように構成すると、被塗布物を回転軸回りに回転しながら、回転軸と交差する回動軸回りに回動し、被塗布物の回転軸に対する角度を変えるので、被塗布物が回転することにより展延される塗布物の、被塗布物上での位置を変えることができ、平坦でない被塗布物に供給された塗布物を所望の厚さに展延することができる。   If comprised in this way, while rotating a to-be-coated object around a rotating shaft, it rotates to the rotation axis | shaft which cross | intersects a rotating shaft, and changes the angle with respect to the rotating shaft of an to-be-coated object, Therefore A to-be-coated object rotates. Accordingly, the position of the spread product to be spread on the workpiece can be changed, and the spread coating applied to the non-planar workpiece can be spread to a desired thickness.

また、本発明の第9の態様に係る塗布物展延装置では、例えば図3および図6に示すように、本発明の第8の態様に係る塗布物展延方法において、塗布物88を展延する工程(S4、S7)において、被塗布物80が回転軸R回りに回転する回転速度を変える工程(S5)を備えてもよい。
このように構成すると、被塗布物が回転軸回りに回転する回転速度を変えるので、塗布物の展延を調整することができる。
Moreover, in the coated material spreading apparatus according to the ninth aspect of the present invention, for example, as shown in FIGS. 3 and 6, in the coated material spreading method according to the eighth aspect of the present invention, the coated material 88 is spread. In the extending step (S4, S7), a step (S5) of changing the rotation speed at which the article 80 rotates around the rotation axis R may be provided.
If comprised in this way, since the rotational speed which a to-be-coated object rotates about a rotating shaft is changed, spreading of a coated object can be adjusted.

本発明によれば、塗布物展延装置が、回転軸回りに回転する回転軸部と、塗布物が供給された被塗布物を固定支持し、回転軸部に支持され、回転軸部の回転に伴い回転しながら回転軸の方向と交差する方向の回動軸回りに回動する載置台とを備えるので、被塗布物を固定支持する載置台が、回転軸部が回転する回転軸と交差する回動軸回りに回動し、回転軸回りに回転する載置台の傾斜角を変化させることができる。そのため、被塗布物が回転することにより塗布物が展延される、被塗布物上での位置を変えることができる。したがって、簡単な構造で、平坦でない被塗布物の表面にスピンコーティング法により塗布物を塗布するための塗布物展延装置を提供することができる。   According to the present invention, the coating material spreading device fixedly supports the rotating shaft portion that rotates about the rotation axis and the workpiece to which the coating material is supplied, is supported by the rotating shaft portion, and rotates the rotating shaft portion. And a mounting table that rotates around a rotation axis in a direction that intersects the direction of the rotation axis while rotating, so that the mounting table that fixes and supports the coating object intersects with the rotation axis that the rotation shaft portion rotates. It is possible to change the inclination angle of the mounting table that rotates about the rotation axis and rotates about the rotation axis. Therefore, the position on the coated object where the coated object is spread by rotating the coated object can be changed. Therefore, it is possible to provide an application spreading device for applying an application by a spin coating method to the surface of an object to be applied which is not flat with a simple structure.

また本発明によれば、塗布物展延方法が、被塗布物の表面に塗布物を供給する工程と、塗布物が供給された被塗布物を回転軸回りに回転し塗布物を展延する工程と、塗布物を展延する工程において回転軸の方向と交差する方向の回動軸回りに被塗布物を回動し被塗布物の回転軸に対する角度を変える工程とを備えるので、被塗布物が回転することにより展延される塗布物の、被塗布物上での位置を変えることができる。したがって、簡単な構造で、平坦でない被塗布物の表面にスピンコーティング法により塗布物を塗布するための塗布物展延方法を提供することができる。   Further, according to the present invention, the spread method of the coated material includes the step of supplying the coated material to the surface of the coated material, and the coated material to which the coated material is supplied is rotated around the rotation axis to spread the coated material. A step of rotating the coating object around a rotation axis in a direction intersecting the direction of the rotation axis in the step of spreading the coating material, and changing the angle of the coating material with respect to the rotation axis. It is possible to change the position of the coated material spread by rotating the material on the coated material. Therefore, it is possible to provide a method for spreading a coated material for applying a coated material by a spin coating method to the surface of a non-flat coated material with a simple structure.

以下、図面を参照して、本発明の実施の形態について説明する。なお、各図において、互いに同一または相当する装置には同一符号を付し、重複した説明は省略する。   Embodiments of the present invention will be described below with reference to the drawings. In the drawings, the same or corresponding devices are denoted by the same reference numerals, and redundant description is omitted.

まず、図1を参照して、本発明の実施の形態としての塗布物展延装置1について説明する。図1は、塗布物展延装置1の構成を説明する模式図である。塗布物展延装置1は、被塗布物80を固定支持する載置台10と、載置台10から突出し、被塗布物80を吸着して固定する複数の吸着部20(複数の吸着部を個別に参照するときはには添え字a、b、cをつける)と、載置台10を支持して回転軸R回りに回転する回転軸部30と、回転軸部30を回転する駆動装置としての電動モータ40と、回転する被塗布物80を囲み、被塗布物80上から漏れた塗布物88を捕捉するコーターハウス50と、コーターハウス50から塗布物88を回収する樹脂回収装置60と、電動モータ40の回転速度を制御する制御装置46とを備える。   First, with reference to FIG. 1, the coated material spreading apparatus 1 as an embodiment of the present invention will be described. FIG. 1 is a schematic diagram illustrating the configuration of the spread material spreading apparatus 1. The spread material spreading apparatus 1 includes a mounting table 10 that fixes and supports the object to be coated 80, and a plurality of suction units 20 that protrude from the mounting table 10 and suck and fix the coating object 80 (a plurality of suction units are individually set). When referring, subscripts a, b, and c are added), a rotating shaft portion 30 that supports the mounting table 10 and rotates around the rotating shaft R, and an electric motor as a driving device that rotates the rotating shaft portion 30. A motor 40, a coater house 50 that surrounds the rotating coated object 80 and captures the coated object 88 leaked from the coated object 80, a resin recovery device 60 that collects the coated object 88 from the coater house 50, and an electric motor And a control device 46 for controlling the rotational speed of 40.

回転軸部30は、その回転軸Rを実質的に鉛直上下方向と一致する方向にして配置される。回転軸部30の下端は電動モータ40のモータ軸部42に接続され、電動モータ40の作動により、回転軸R回りに回転する。回転軸部30あるいは、モータ軸部42がベアリング(不図示)等で回転可能に支持され、回転軸Rの傾きや振動が防止される。   The rotating shaft portion 30 is arranged with the rotating shaft R in a direction substantially matching the vertical vertical direction. The lower end of the rotating shaft portion 30 is connected to the motor shaft portion 42 of the electric motor 40 and rotates around the rotating shaft R by the operation of the electric motor 40. The rotary shaft 30 or the motor shaft 42 is rotatably supported by a bearing (not shown) or the like, and the tilt and vibration of the rotary shaft R are prevented.

載置台10は、回転軸部30がモータ軸部42に接続される下端とは逆の上端で、水平な回動軸D回りに回動可能に、回転軸部30に支持される。回動軸Dは水平ではなく、傾斜していてもよい。すなわち、回転軸Rと回動軸Dとは互いに交差する方向である。ここで、回転軸Rと直交する回動軸D回りに載置台10が回動することにより、回動する角度と後述するその作用との関係が明快になり操作しやすく、かつ、回動する角度により表れる作用が大きくなるので、好ましい。   The mounting table 10 is supported by the rotating shaft 30 so that the rotating shaft 30 is rotatable about a horizontal rotation axis D at the upper end opposite to the lower end where the rotating shaft 30 is connected to the motor shaft 42. The rotation axis D may not be horizontal but may be inclined. That is, the rotation axis R and the rotation axis D are directions that intersect each other. Here, when the mounting table 10 rotates around the rotation axis D orthogonal to the rotation axis R, the relationship between the angle of rotation and the action described later becomes clear and easy to operate, and the rotation is performed. This is preferable because the action expressed by the angle is increased.

載置台10の回転軸部30に支持される側とは反対側の上面から、複数の吸着部20a〜cが突出する。複数の吸着部20a〜cは、平坦でない被塗布物80の形状に合わせるように、突出する高さha〜c(図2参照)を変えている。突出部20は、突出した先端の接触部24を被塗布物80に接触させ、被塗布物80に固着する。   A plurality of suction portions 20a to 20c protrude from the upper surface of the mounting table 10 opposite to the side supported by the rotating shaft portion 30. The plurality of adsorbing portions 20a to 20c change the protruding heights ha to c (see FIG. 2) so as to match the shape of the non-flat object 80 to be coated. The protruding portion 20 contacts the object to be coated 80 with the protruding contact portion 24 at the tip, and adheres to the object to be coated 80.

ここで、図2を参照して、載置台10および吸着部20について説明する。図2(a)、(b)は図1に示す載置台10および吸着部20を説明する断面図で、(a)は図1と同方向に見た断面図、(b)は(a)と直交する垂直断面での断面図、図2(c)は被塗布物82を押圧することにより固定支持する載置台14を説明する側面図、図2(d)は載置治具19にて被塗布物80を固定支持する載置台18を説明する断面図である。   Here, with reference to FIG. 2, the mounting table 10 and the adsorption | suction part 20 are demonstrated. 2A and 2B are cross-sectional views for explaining the mounting table 10 and the suction portion 20 shown in FIG. 1. FIG. 2A is a cross-sectional view viewed in the same direction as FIG. 1, and FIG. FIG. 2C is a side view illustrating the mounting table 14 fixedly supported by pressing the workpiece 82, and FIG. 2D is a mounting jig 19. It is sectional drawing explaining the mounting base 18 which fixes and supports the to-be-coated article 80. FIG.

まず図2(a)および(b)を参照すると、載置台10は、回転軸部30の頂部を貫通する丸棒状のセンター軸12と、センター軸12の両端に接続する2枚の厚板状の両側板11を含んで構成される。センター軸12は、回転軸部30の軸受32により軸回りに回るように支持されている。すなわち、載置台10はセンター軸12を中心に回動可能な構成となっている。センター軸12には、軸方向に貫通する吸引管28が形成され、吸引管28は載置台10が回動する範囲内で回転軸部30に形成された吸引管38と連通する。回転軸部30に形成された吸引管38は、不図示の真空ポンプと連接しており、吸引管28は、吸引管38を介して負圧に減圧される。   First, referring to FIGS. 2A and 2B, the mounting table 10 includes a round bar-shaped center shaft 12 that penetrates the top of the rotating shaft portion 30, and two thick plates that are connected to both ends of the center shaft 12. The both side plates 11 are configured. The center shaft 12 is supported by a bearing 32 of the rotary shaft portion 30 so as to rotate about the axis. That is, the mounting table 10 is configured to be rotatable about the center shaft 12. A suction pipe 28 penetrating in the axial direction is formed in the center shaft 12, and the suction pipe 28 communicates with a suction pipe 38 formed in the rotary shaft portion 30 within a range in which the mounting table 10 rotates. A suction pipe 38 formed on the rotary shaft 30 is connected to a vacuum pump (not shown), and the suction pipe 28 is decompressed to a negative pressure via the suction pipe 38.

両側板11は、矩形の厚板であり、センター軸12の軸方向に対し垂直に接続する。両側板11は、矩形の長辺を水平方向に近い角度で配置し、すなわち、載置台10が回動するときに、水平方向に伸びた腕を上下するように動く。吸引管28は、2枚の両側板11内にも延伸し、2つに分岐して長辺に沿って延在する。両側板11には、吸着部20を収納する複数の穴13が形成され、吸引管28はそれぞれの穴13に導かれる。図2(a)に示すように、3個の穴13が、両側板11の長辺方向に均等に分布して配置される。なお、穴13の個数は3個に限られず、また、必ずしも均等に配置されなくてもよく、穴13に収納されて配置される吸着部20により被塗布物80を固着支持できればよい。   Both side plates 11 are rectangular thick plates and are connected perpendicular to the axial direction of the center shaft 12. The side plates 11 are arranged such that the long sides of the rectangle are arranged at an angle close to the horizontal direction, that is, when the mounting table 10 rotates, the arms extending in the horizontal direction move up and down. The suction pipe 28 also extends into the two side plates 11, branches into two, and extends along the long side. A plurality of holes 13 for accommodating the suction portions 20 are formed in the side plates 11, and the suction pipes 28 are guided to the respective holes 13. As shown in FIG. 2A, the three holes 13 are arranged evenly distributed in the long side direction of the both side plates 11. Note that the number of the holes 13 is not limited to three, and the holes 13 are not necessarily arranged evenly. It is only necessary that the object to be coated 80 can be fixedly supported by the suction portion 20 housed and disposed in the holes 13.

吸着部20は、穴13に出入り可能に収納される軸部22と、軸部22の突出する先端に配置され、被塗布物80と接触して固着する接触部24と、穴13の中に配置され、軸部22を突出する方向に付勢するばね26とを有する。軸部22には吸引管28と連通する貫通孔(不図示)が形成され、吸引管28と連通する。すなわち、軸部22の外表面が穴13と気密に構成されることにより、軸部22に貫通孔が形成されれば、貫通孔内は、吸引管28・38を介して、不図示の真空ポンプにより負圧に減圧される。   The suction part 20 is disposed in the hole 13 so as to be able to enter and exit the hole 13, the contact part 24 that is disposed at a protruding tip of the shaft part 22 and is fixed in contact with the workpiece 80, and the hole 13. And a spring 26 that urges the shaft portion 22 in a protruding direction. A through hole (not shown) that communicates with the suction tube 28 is formed in the shaft portion 22 and communicates with the suction tube 28. That is, if the through-hole is formed in the shaft portion 22 by the outer surface of the shaft portion 22 being configured to be airtight with the hole 13, the inside of the through-hole is a vacuum (not shown) via the suction pipes 28 and 38. The pressure is reduced to a negative pressure by a pump.

接触部24は、例えばゴムのような弾性材料で形成された略円筒形の部材で、被塗布物80に接触し、吸引管28・38を介して減圧された負圧により、被塗布物80に吸着する。すなわち、被塗布物80は吸着部20に固着される。ばね26は、軸部22を穴13から突出する方向に付勢することで、平坦でない被塗布物80にそれぞれの接触部24を当接させる。図2(a)に示す例では、湾曲する被塗布物80の形状に合わせ、ばね26aが圧縮されて吸着部20aは穴13に深く入り込み、ばね26bは伸長して吸着部20bは穴13から大きく突出し、ばね26cは圧縮されて吸着部20cは穴13に深く入り込む。なお、吸着部20の突出する高さを変化させる構成は、軸部22を穴13に嵌入し、ばね26で付勢する構成ではなく、他の周知の構成を用いてもよい。このように、負圧に減圧して吸着することで被塗布物80を吸着部20に固着すると、負圧とすることで吸着部20は被塗布物80に固着し、負圧を開放することにより容易に固着を解除でき、簡単に被塗布物80を載置台10に固着して固定支持され、また、取り外すことができる。   The contact portion 24 is a substantially cylindrical member formed of an elastic material such as rubber, for example, and comes into contact with the object 80 to be applied, and the object 80 is subjected to negative pressure reduced through the suction pipes 28 and 38. Adsorb to. That is, the workpiece 80 is fixed to the suction portion 20. The spring 26 urges the shaft portion 22 in a direction in which the shaft portion 22 protrudes from the hole 13, thereby bringing the contact portions 24 into contact with the non-planar workpiece 80. In the example shown in FIG. 2A, the spring 26a is compressed in accordance with the shape of the curved workpiece 80, the suction portion 20a penetrates deeply into the hole 13, the spring 26b extends, and the suction portion 20b extends from the hole 13. The spring 26c is compressed and the suction portion 20c enters the hole 13 deeply. In addition, the structure which changes the height which the adsorption | suction part 20 protrudes may use the other well-known structure instead of the structure which inserts the axial part 22 in the hole 13, and is urged | biased with the spring 26. FIG. As described above, when the object 80 is fixed to the adsorption unit 20 by reducing the pressure to a negative pressure and adsorbing, the adsorption part 20 is fixed to the object 80 and the negative pressure is released by setting the negative pressure. Thus, the fixation can be easily released, and the object 80 can be fixed and supported on the mounting table 10 easily and can be removed.

次に、図2(c)を参照すると、上記とは別の手段により被塗布物82を載置台14に固定支持する例が示されている。載置台14は、回転軸部30の頂部を貫通する丸棒状の伸縮軸部15と、伸縮軸部15の両端に接続する2個の比較的柔らかい素材で形成された押え部16を含んで構成される。ここで、「比較的柔らかい」とは被塗布物82を構成する素材より変形し易いことを指し、典型的には被塗布物82が金属やガラス、硬質プラスチックの硬質な素材で形成されるので、それらの素材より僅かに変形し易い素材(例えば、軟質プラスチック、ゴムなど)で形成されるのがよい。丸棒状の伸縮軸部15は、上記のセンター軸12と同様に軸回りに回るように支持されており、載置台14は伸縮軸部15を中心に回動可能な構成となっている。   Next, referring to FIG. 2C, there is shown an example in which the workpiece 82 is fixedly supported on the mounting table 14 by means different from the above. The mounting table 14 includes a round bar-shaped telescopic shaft portion 15 penetrating the top of the rotary shaft portion 30 and two presser portions 16 formed of two relatively soft materials connected to both ends of the telescopic shaft portion 15. Is done. Here, “relatively soft” means that the material to be coated 82 is more easily deformed, and typically the material to be coated 82 is formed of a hard material such as metal, glass, or hard plastic. These are preferably made of a material (for example, soft plastic, rubber, etc.) that is slightly easier to deform than those materials. The round rod-like telescopic shaft portion 15 is supported so as to rotate about the same axis as the center shaft 12, and the mounting table 14 is configured to be rotatable about the telescopic shaft portion 15.

押え部16と伸縮軸部15との接続は、例えば、ネジ継手となっており、押え部16と伸縮軸部15とで、伸縮可能となっている。あるいは、伸縮軸部15が押え部16に形成された穴(不図示)に挿入され、伸縮可能となり、更に、穴にはばねが収納されて、ばねにより押え部16が突出する方向(載置台14が全体として長くなる方向)に付勢されてもよい。   The connection between the presser portion 16 and the telescopic shaft portion 15 is, for example, a screw joint, and the presser portion 16 and the telescopic shaft portion 15 can be expanded and contracted. Alternatively, the telescopic shaft portion 15 is inserted into a hole (not shown) formed in the presser portion 16 so that the telescopic shaft portion 15 can be extended and contracted. Further, a spring is accommodated in the hole and the presser portion 16 protrudes by the spring (mounting table). 14 may be biased in a direction in which the length of the entire length 14 is increased.

被塗布物82は、本例では、円筒を半分に切断した中空のかまぼこ形をしており、その両端面83の内側が広がる方向に載置台14により押圧される。押え部16と伸縮軸部15とがネジ継手で接続されている場合にはネジで調整して、押え部16がばねで付勢されている場合には付勢力により、押え部16が端面83を押圧するようにする。押え部16が端面83を押圧することで、押圧することにより生ずる押え部16と端面83との摩擦力で被塗布物82が載置台14に固定支持される。押え部16が比較的柔らかい素材で形成されると、特に押え部16が端面83にしっくりと馴染むので、滑りにくく、確実に固定され、好ましい。被塗布物82は、円筒の外周に相当する側面84が湾曲しているが、載置台14の回動に伴い湾曲する方向に回動できる。なお、載置台14は、その上に被塗布物82を載置するのではないが、端面83を押圧することで被塗布物82を固定支持するので、載置台の概念に含まれる。端面83を押圧することで載置台14が被塗布物82を固定支持すると、簡単な構造で固定支持できるので、好適である。ただし、端面83に相当する押圧される平行な2平面を被塗布物82が有していることが条件となる。なお、図2(c)に示す例では、載置台14は内側から端面83を押圧しているが、外側から挟み込むようにして押圧する構成としてもよい。   In this example, the workpiece 82 has a hollow kamaboko shape in which a cylinder is cut in half, and is pressed by the mounting table 14 in a direction in which the inner sides of both end faces 83 spread. When the presser portion 16 and the telescopic shaft portion 15 are connected by a screw joint, the presser portion 16 is adjusted by a screw. When the presser portion 16 is biased by a spring, the presser portion 16 is moved by an urging force. To press. When the pressing portion 16 presses the end surface 83, the workpiece 82 is fixedly supported on the mounting table 14 by the frictional force between the pressing portion 16 and the end surface 83 that is generated by pressing. It is preferable that the presser portion 16 is formed of a relatively soft material, in particular, because the presser portion 16 fits into the end face 83, and is not slippery and is securely fixed. Although the coated object 82 has a curved side surface 84 corresponding to the outer periphery of the cylinder, the coated object 82 can be rotated in a curved direction as the mounting table 14 rotates. In addition, although the mounting base 14 does not mount the to-be-coated object 82 on it, since the to-be-coated object 82 is fixedly supported by pressing the end surface 83, it is contained in the concept of a mounting base. When the mounting table 14 fixes and supports the workpiece 82 by pressing the end surface 83, it is preferable because the mounting table 14 can be fixed and supported with a simple structure. However, the condition is that the workpiece 82 has two parallel planes to be pressed corresponding to the end face 83. In addition, in the example shown in FIG.2 (c), although the mounting base 14 is pressing the end surface 83 from the inner side, it is good also as a structure pressed so that it may pinch | interpose from the outer side.

次に、図2(d)を参照すると、載置台18は、被塗布物80を載置する側の上面は平坦に形成され、その平坦な面に載置治具19を固定し、載置治具19が被塗布物80を固定支持する例が示されている。載置治具19と被塗布物80との固着は、周知のいかなる方法により固着してもよく、同様に載置台18と載置治具19との固着もいかなる方法でもよい。載置台18が、載置治具19を介して被塗布物80を固定支持する構成とすることにより、種々の形状の被塗布物に対しても、載置治具19を取り替えるだけで容易に対応することができ、好適である。   Next, referring to FIG. 2D, the mounting table 18 has a flat upper surface on the side on which the workpiece 80 is mounted, and the mounting jig 19 is fixed to the flat surface. An example in which the jig 19 fixes and supports the workpiece 80 is shown. The mounting jig 19 and the workpiece 80 may be fixed by any known method. Similarly, the mounting table 18 and the mounting jig 19 may be fixed by any method. Since the mounting table 18 is configured to fix and support the workpiece 80 via the mounting jig 19, it is easy to replace the mounting jig 19 even for various shapes of coating objects. It is possible and suitable.

図1に戻り、塗布物展延装置1の説明を続ける。コーターハウス50は、回転軸部30、載置台10、吸着部20および被塗布物80を囲む上部が開放されたほぼ円筒形の容器である。円筒形の側面に相当する側壁52の上縁は、内側に傾斜するように曲げられ、被塗布物80の回転により飛散する塗布物88がコーターハウス50の外部に漏れにくい構造となっている。コーターハウス50の底板54の中央部をモータ軸部42が貫通し、底板54の下に配置された電動モータ40とコーターハウス50の内部に配置された回転軸部30とを連接している。また、底板54には、他にも孔が形成され、樹脂回収装置60の回収管62が接続して開口する。   Returning to FIG. 1, the explanation of the coated material spreading apparatus 1 is continued. The coater house 50 is a substantially cylindrical container in which an upper portion surrounding the rotating shaft portion 30, the mounting table 10, the suction portion 20, and the workpiece 80 is opened. The upper edge of the side wall 52 corresponding to the cylindrical side surface is bent so as to incline inward, so that the coated material 88 scattered by the rotation of the coated material 80 hardly leaks to the outside of the coater house 50. The motor shaft portion 42 passes through the center portion of the bottom plate 54 of the coater house 50, and connects the electric motor 40 disposed below the bottom plate 54 and the rotary shaft portion 30 disposed inside the coater house 50. In addition, other holes are formed in the bottom plate 54, and a recovery pipe 62 of the resin recovery device 60 is connected and opened.

樹脂回収装置60は、被塗布物80の回転により飛散する塗布物88を回収する装置で、コーターハウス50の底板54に接続する回収管62と、回収管62の下端に接続し、回収する塗布物88を貯留する容器である樹脂溜め64と、樹脂溜め64の上部に接続し、樹脂溜め64から空気を排出することにより、コーターハウス50から回収管62、樹脂溜め64から外部への空気の流れを作る排気管66および排気管66に配置された排気ファン68とを有する。コーターハウス50で捕捉された塗布物88は、典型的には樹脂であるが、排気ファン68により引き起こされるコーターハウス50内から樹脂回収装置60への空気の流れに押されて、回収管62に流れる。回収管62に流れた塗布物88は、樹脂溜め64内に流入し、その底部に溜まる。一方、排気管66は樹脂溜め64の上部に接続しているので、樹脂溜め64から空気だけを排出し、塗布物88は樹脂溜め64内に貯留される。   The resin recovery device 60 is a device that recovers the coated material 88 that is scattered by the rotation of the coated material 80. The resin collecting device 60 is connected to the bottom plate 54 of the coater house 50 and the lower end of the collecting tube 62. By connecting the resin reservoir 64 which is a container for storing the object 88 and the upper portion of the resin reservoir 64 and discharging the air from the resin reservoir 64, the air from the coater house 50 to the recovery pipe 62 and the resin reservoir 64 to the outside An exhaust pipe 66 for generating a flow and an exhaust fan 68 disposed in the exhaust pipe 66 are provided. The coating 88 captured by the coater house 50 is typically resin, but is pushed by the air flow from the coater house 50 to the resin recovery device 60 caused by the exhaust fan 68, and is collected in the recovery pipe 62. Flowing. The applied material 88 that has flowed into the recovery pipe 62 flows into the resin reservoir 64 and accumulates at the bottom thereof. On the other hand, since the exhaust pipe 66 is connected to the upper part of the resin reservoir 64, only air is discharged from the resin reservoir 64, and the coating material 88 is stored in the resin reservoir 64.

電動モータ40の作動、すなわち起動、停止と回転速度の調整は、制御装置46により制御される。電動モータ40は信号ケーブル44により制御装置46と接続され、制御装置46からの信号に応じて作動する。制御装置46にはタイマ(TM)48が内蔵され、作動時間を計測できる。   The operation of the electric motor 40, that is, the start / stop and the adjustment of the rotation speed are controlled by the control device 46. The electric motor 40 is connected to a control device 46 by a signal cable 44 and operates according to a signal from the control device 46. The controller 46 has a built-in timer (TM) 48 that can measure the operating time.

続いて、図3をも参照して、塗布物展延装置1の作用、特に回転軸部30の回転と載置台10の回動による作用について説明する。図3は載置台10が回転軸部30の回転に伴って回転しながら回動し被塗布物80上の塗布物88を展延する様子を説明する模式図で、(a)は初期に低速で回転している場合、(b)は回転速度を上げ、載置台10が回動して傾斜角Tが小さくなってきた場合、(c)は回転速度を更に上げ、載置台10が回動して傾斜角Tがほぼ0(ゼロ)に、すなわち、ほぼ水平になった場合を示す。塗布物88が供給された被塗布物80を吸着部20を介して載置台10に固定支持させる。塗布物88は、典型的には被塗布物80の塗布すべき表面全面に、しかし、所望の厚さにではなく塗布されている。塗布物88は、被塗布物80の表面の一部にまとめて供給されていてもよい。なお図3中、「A」、「B」、「C」は、被塗布物80の図3における断面方向を大略3部分に分けたA部、B部、C部を示す。   Next, with reference to FIG. 3 as well, the action of the spread material spreading apparatus 1, particularly the action due to the rotation of the rotating shaft portion 30 and the rotation of the mounting table 10 will be described. FIG. 3 is a schematic diagram for explaining a state in which the mounting table 10 rotates while rotating with the rotation of the rotating shaft portion 30 and spreads the coating 88 on the workpiece 80. FIG. (B) increases the rotation speed, and when the mounting table 10 rotates and the inclination angle T decreases, (c) further increases the rotation speed and the mounting table 10 rotates. Then, the case where the tilt angle T is substantially 0 (zero), that is, substantially horizontal is shown. The workpiece 80 to which the coating material 88 is supplied is fixedly supported on the mounting table 10 via the suction unit 20. The application 88 is typically applied over the entire surface of the application 80 to be applied, but not to the desired thickness. The coated material 88 may be supplied together on a part of the surface of the coated material 80. In FIG. 3, “A”, “B”, and “C” indicate A part, B part, and C part in which the cross-sectional direction in FIG.

被塗布物80が固定された載置台10は、重心G位置が、載置台10が回転軸部30に支持される位置と、典型的には回動軸Dと、載置台10の両側板11(図2参照)の長辺方向でずれている。ここで、「重心G位置」とは、載置台10の重心Gを回転軸方向に投影した位置である。重心G位置が回動軸Dとずれているので、載置台10は、被塗布物80と一緒に傾斜する。すなわち、重心G側が下方となる。なお、ここでいう重心Gは、厳密には、載置台10、吸着部20および塗布物88が供給された被塗布物80を一体としての重心であるが、他の部材に比べて載置台10の質量が大きいので、載置台10の重心として考えても実質的に問題はない。載置台10の質量が大きくないなど、特殊な事情がある場合には、「載置台10の重心G」を「載置台10、吸着部20および塗布物88が供給された被塗布物80を一体としての重心G」と読み替えることとする。   The mounting table 10 to which the workpiece 80 is fixed has a center of gravity G position, a position where the mounting table 10 is supported by the rotary shaft 30, typically a rotation axis D, and both side plates 11 of the mounting table 10. It is shifted in the long side direction (see FIG. 2). Here, the “center of gravity G position” is a position where the center of gravity G of the mounting table 10 is projected in the direction of the rotation axis. Since the position of the center of gravity G is deviated from the rotation axis D, the mounting table 10 is tilted together with the workpiece 80. That is, the center of gravity G side is downward. Strictly speaking, the center of gravity G here is the center of gravity of the mounting table 10, the suction unit 20, and the workpiece 80 to which the coating material 88 is supplied, but the mounting table 10 as compared with other members. Therefore, there is no problem even if it is considered as the center of gravity of the mounting table 10. When there is a special circumstance such as the mass of the mounting table 10 is not large, the “center of gravity G of the mounting table 10” is integrated with “the mounting table 10, the suction unit 20 and the application object 80 supplied with the coating 88”. As “the center of gravity G”.

図3(a)に示すように、制御装置46からの信号に応じて電動モータ40が低速で回転する。低速で回転する間は、載置台10が回転軸R回りに回転する回転面と回転軸Rに垂直な平面との角度としての傾斜角Tの変化は小さい。すなわち、載置台10は回動軸D回りにほとんど回動しない。なお、傾斜角Tは、載置台10の上面と回転軸Rとの垂直面とのなす角で代表する。そこで、被塗布物80はA部周りでは塗布物88が塗布された面をほぼ水平として、つまり回転軸Rに垂直に近い角度にして回転し、B部周りあるいはC部周りでは、塗布物88が塗布された面を回転軸Rに近い角度にして回転する。その結果、回転軸Rに垂直に近い角度で回転するA部周りの塗布物88は、遠心力の方向と塗布物88が展延される方向が一致して展延されるが、B部周りあるいはC部周りの塗布物88は、遠心力の方向と塗布物88が展延される方向が一致せずあまり展延されない。   As shown in FIG. 3A, the electric motor 40 rotates at a low speed in response to a signal from the control device 46. While rotating at a low speed, a change in the inclination angle T as an angle between a rotation surface on which the mounting table 10 rotates around the rotation axis R and a plane perpendicular to the rotation axis R is small. That is, the mounting table 10 hardly rotates around the rotation axis D. The tilt angle T is represented by an angle formed by the upper surface of the mounting table 10 and the vertical plane of the rotation axis R. Therefore, the object 80 is rotated around the part A with the surface on which the object 88 is applied substantially horizontal, that is, at an angle close to the rotation axis R, and around the part B or the part C. Is rotated at an angle close to the rotation axis R. As a result, the coating 88 around the portion A that rotates at an angle close to the rotation axis R is spread with the direction of the centrifugal force and the direction in which the coating 88 is spread, Alternatively, the coated material 88 around the portion C is not spread so much because the direction of the centrifugal force and the direction in which the coated material 88 is spread do not match.

次に、図3(b)に示すように、制御装置46からの信号に応じて電動モータ40が回転速度を上げて回転する。回転速度を上げることにより、載置台10(厳密には、吸着部20および塗布物88が供給された被塗布物80を加えた一体)に作用する遠心力が増し、傾斜角Tが小さくなる。すなわち、水平に近づく。そこで、被塗布物80の塗布物88が塗布された面の角度は、A部周りでは回転軸Rの垂直面から離れ、B部周りでは回転軸Rの垂直面に近づき、C部周りでは回転軸Rの垂直面に近づくものの依然として回転軸Rに近い角度である。その結果、回転軸Rに垂直に近い角度で回転するB部周りの塗布物88は、遠心力の方向と塗布物88が展延される方向が一致して展延されるが、A部周りあるいはC部周りの塗布物88は、遠心力の方向と塗布物88が展延される方向が一致せずあまり展延されない。   Next, as shown in FIG. 3B, the electric motor 40 rotates at a higher rotational speed in accordance with a signal from the control device 46. By increasing the rotation speed, the centrifugal force acting on the mounting table 10 (strictly speaking, the integrated portion including the workpiece 80 supplied with the suction unit 20 and the coating material 88) increases, and the inclination angle T decreases. That is, it approaches the horizontal. Therefore, the angle of the surface of the object 80 to which the coating material 88 is applied is separated from the vertical surface of the rotation axis R around the A portion, approaches the vertical surface of the rotation axis R around the B portion, and rotates around the C portion. Although close to the vertical plane of the axis R, the angle is still close to the rotation axis R. As a result, the coated material 88 around the B portion rotating at an angle close to the rotation axis R is spread with the direction of the centrifugal force and the direction in which the coated material 88 is spread, Alternatively, the coated material 88 around the portion C is not spread so much because the direction of the centrifugal force and the direction in which the coated material 88 is spread do not match.

次に、図3(c)に示すように、制御装置46からの信号に応じて電動モータ40が回転速度を更に上げて回転する。回転速度を更に上げることにより、載置台10に作用する遠心力が更に増し、傾斜角Tが小さくなる。傾斜角Tは、回動軸Dと重心Gとが略水平となるまで小さくなる。そこで、被塗布物80の塗布物88が塗布された面の角度は、A部周りあるいはB部周りでは回転軸Rの垂直面から離れ、C部周りでは回転軸Rの垂直面に近づく。その結果、回転軸Rに垂直に近い角度で回転するC部周りの塗布物88は、遠心力の方向と塗布物88が展延される方向が一致して展延されるが、A部周りあるいはB部周りの塗布物88は、遠心力の方向と塗布物88が展延される方向が一致せずあまり展延されない。   Next, as shown in FIG. 3C, the electric motor 40 further rotates at a higher rotational speed in accordance with a signal from the control device 46. By further increasing the rotation speed, the centrifugal force acting on the mounting table 10 is further increased, and the inclination angle T is decreased. The inclination angle T decreases until the rotation axis D and the center of gravity G become substantially horizontal. Therefore, the angle of the surface of the object 80 to which the coated object 88 is applied is separated from the vertical surface of the rotation axis R around the A portion or the B portion, and approaches the vertical surface of the rotation axis R around the C portion. As a result, the coating material 88 around the portion C rotating at an angle close to the rotation axis R is spread with the direction of the centrifugal force and the direction in which the coating material 88 is spread, Alternatively, the coating 88 around the portion B is not spread so much because the direction of the centrifugal force and the direction in which the coating 88 is spread do not match.

以上のように、載置台10の傾斜角Tを変化させて回転軸R回りに回転することにより、被塗布物80に供給された塗布物88が展延される部分を、変化させることができる。よって、簡単な構造で、湾曲した被塗布物80の、あるいは平坦でない他の形状の被塗布物の表面に供給された塗布物88を、所望の厚さ、典型的には均一な厚さに展延することが可能となる。特に、重心G位置が、載置台10が回転軸部30に支持される回動軸Dとずれているために、載置台10の回転速度に応じて傾斜角Tが変化する、すなわち、回転速度が変化することで回動軸D回りに回動すると、回転速度を変えるだけで済むので、極めて簡単に所望の厚さに展延でき、好適である。ただし、回転速度が大きい場合には、展延の進み具合も速く、回転速度が遅い場合には展延の進み具合が遅くなるので、回転する時間は調整する必要がある。そこで、回転速度と回転時間とを制御装置46で制御するように構成することで、確実に所望の厚さに展延し易くなる。   As described above, by changing the tilt angle T of the mounting table 10 and rotating around the rotation axis R, it is possible to change the portion where the coating material 88 supplied to the coating material 80 is spread. . Thus, the coating 88 supplied to the surface of the curved workpiece 80 or other irregularly shaped workpiece with a simple structure can be formed to a desired thickness, typically a uniform thickness. It becomes possible to spread. In particular, since the position of the center of gravity G is deviated from the rotation axis D on which the mounting table 10 is supported by the rotating shaft portion 30, the inclination angle T changes according to the rotation speed of the mounting table 10, that is, the rotation speed. If it is rotated about the rotation axis D by changing, it is only necessary to change the rotation speed, so that it can be spread to a desired thickness very easily, which is preferable. However, when the rotation speed is high, the progress of the spread is also fast, and when the rotation speed is slow, the progress of the spread becomes slow. Therefore, it is necessary to adjust the rotation time. Therefore, by configuring the rotation speed and the rotation time to be controlled by the control device 46, it becomes easy to reliably spread the film to a desired thickness.

次に図4を参照して、遠心力ではなく、載置台10を回動させる駆動装置としての回動駆動装置70により載置台10を回動させる構成について説明する。図4は、載置台10が回転軸30の回転にともなって回転しながら、回動駆動装置70により回動し被塗布物80上の塗布物88を展延する例を説明する模式図で、(a)は初期に傾斜角Tが大きな状態で回転している場合、(b)は傾斜角Tが小さく、ほぼ0(ゼロ)となって回転している場合、(c)は初期とは逆方向に傾斜角Tが大きくなって回転している場合を示す。   Next, with reference to FIG. 4, the structure which rotates the mounting base 10 with the rotation drive device 70 as a drive device which rotates not the centrifugal force but the mounting base 10 is demonstrated. FIG. 4 is a schematic diagram for explaining an example in which the mounting table 10 rotates with the rotation of the rotating shaft 30 and is rotated by the rotation driving device 70 to spread the coating 88 on the workpiece 80. (A) is initially rotated with a large tilt angle T, (b) is rotated with a small tilt angle T and is almost 0 (zero), (c) is an initial A case is shown in which the tilt angle T is increased in the reverse direction.

回動駆動装置70は、載置台10の回動軸Dから離間した位置から鉛直下方に垂下する剛な直線状の棒である支持ロッド76と、支持ロッド76の下端を支持し、鉛直上下に移動する回転軸Rを中心とした円環平板のドーナッツ板72と、ドーナッツ板72を上下に移動させるアクチュエータ74とを備える。支持ロッド76は、上端は載置台10に回転軸Rを中心とした放射方向に回動可能に支持され、下端はドーナッツ板72上を移動可能に支持される。支持ロッド76が上端を回転軸Rを中心とした放射方向に回動可能に支持されるので、載置台10の傾斜角Tに関わらず、下端をドーナッツ板72上に配置することができる。また、下端は、ドーナッツ板72上を移動可能であるので、載置台10は回動駆動装置70に邪魔されることなく回転でき、また、ドーナッツ板72およびアクチュエータ74は、回転する必要がない。   The rotation driving device 70 supports a support rod 76 that is a rigid linear rod that hangs vertically downward from a position separated from the rotation axis D of the mounting table 10, and a lower end of the support rod 76, and vertically up and down. An annular flat donut plate 72 centering on the moving rotation axis R, and an actuator 74 for moving the donut plate 72 up and down are provided. The upper end of the support rod 76 is supported by the mounting table 10 so as to be rotatable in a radial direction around the rotation axis R, and the lower end is supported so as to be movable on the donut plate 72. Since the support rod 76 is supported so that the upper end is rotatable in the radial direction about the rotation axis R, the lower end can be disposed on the donut plate 72 regardless of the inclination angle T of the mounting table 10. Further, since the lower end is movable on the donut plate 72, the mounting table 10 can be rotated without being obstructed by the rotation driving device 70, and the donut plate 72 and the actuator 74 do not need to rotate.

アクチュエータ74は、空気圧式、油圧式などの流体圧シリンダ、ボールネジなどの機械式昇降手段などを含む、周知の装置でよい。アクチュエータ74によりドーナッツ板72が上昇すると、支持ロッド76の下端が押し上げられ、したがって、上端も押し上げられ、上端に接続する載置台10が持ち上げられる。支持ロッド76が垂下される位置が回動軸Dから離間しているので、載置台10は回動軸Dを中心に回動する。逆に、ドーナッツ板72を下降させると、載置台10は逆方向に回動する。支持ロッド76が垂下される位置が回動軸Dから大きく離れていると、小さな力で載置台10を回動することができるが、支持ロッド76が垂下される位置が回動軸Dから近いと、支持ロッド76の、すなわちアクチュエータ74の小さな動きで載置台10を大きく回動することができる。   The actuator 74 may be a known device including a hydraulic cylinder such as a pneumatic type or a hydraulic type, a mechanical lifting means such as a ball screw. When the donut plate 72 is raised by the actuator 74, the lower end of the support rod 76 is pushed up, and therefore the upper end is also pushed up, and the mounting table 10 connected to the upper end is lifted. Since the position where the support rod 76 is suspended is separated from the rotation axis D, the mounting table 10 rotates about the rotation axis D. Conversely, when the donut plate 72 is lowered, the mounting table 10 rotates in the reverse direction. If the position where the support rod 76 is drastically separated from the rotation axis D, the mounting table 10 can be rotated with a small force, but the position where the support rod 76 is suspended is close to the rotation axis D. Then, the mounting table 10 can be largely rotated by a small movement of the support rod 76, that is, the actuator 74.

載置台10を回動させるのに回動駆動装置70を備えると、図4(c)に示すように、載置台10は、回動軸D回りに大きな角度で回動することが可能となり、図3で説明した遠心力により回動する場合と異なり、回動軸Dと重心Gとが略水平となる傾斜角Tまでに制限されることがない。また、傾斜角Tが回転速度に依存しないので、例えばコンスタントな回転速度とするなど、回転速度を任意に設定することができる。したがって、より任意な形状の平坦でない被塗布物80の表面に供給された塗布物を、簡単な構造で、より効率よく所望の厚さに展延することが可能となる。この場合には、電動モータ40(図1参照)の回転速度やアクチュエータ74の作動を、制御装置46(図1参照)で制御することが好ましい。制御装置46で制御することにより、複雑な回転速度の調整およびアクチュエータ74の動作を精確に制御することができる。なお、回動駆動装置70は、他の構成でもよく、例えば、ステップモータ(不図示)により直接的に載置台10を回動してもよい。   When the rotation driving device 70 is provided to rotate the mounting table 10, the mounting table 10 can be rotated around the rotation axis D at a large angle as shown in FIG. Unlike the case of rotating by the centrifugal force described in FIG. 3, the rotation axis D and the center of gravity G are not limited to an inclination angle T at which the rotation axis D and the center of gravity G are substantially horizontal. Further, since the inclination angle T does not depend on the rotation speed, the rotation speed can be arbitrarily set, for example, a constant rotation speed. Therefore, it becomes possible to spread the coating material supplied to the surface of the non-flat coating object 80 having an arbitrary shape to a desired thickness with a simple structure. In this case, it is preferable to control the rotational speed of the electric motor 40 (see FIG. 1) and the operation of the actuator 74 by the control device 46 (see FIG. 1). By controlling with the control device 46, the complicated adjustment of the rotational speed and the operation of the actuator 74 can be accurately controlled. In addition, the rotation drive device 70 may have another configuration, for example, the mounting table 10 may be directly rotated by a step motor (not shown).

次に、図5を参照して、回転軸Rの方向および回動軸Dの方向と交差する方向の可動軸K回りに回動することが可能な回転軸部35を有する場合について説明する。図5(a)は載置台10、回転軸部35等の正面図、(b)は側面図を示す。回転軸部35は回転軸上部36と回転軸下部37とを有し、回転軸上部36は載置台10を回動軸D回りに回動可能に支持し、回転軸下部37は、モータ軸部42(図1参照)に接続する。そして、回転軸下部37と回転軸上部36とは、可動軸K回りに回動可能に接続する。可動軸Kは、典型的には、回転軸Rおよび回動軸Dと直交する方向の軸である。また、可動軸Kの位置、すなわち、回転軸上部36と回転軸下部37との長さの比は任意であるが、回転軸上部36が長いと、可動軸K回りに傾けたときに、回転軸R回りに回転させたときの偏心質量が大きくなり、振動等の問題を生じる可能性が高まるので、回転軸上部36は短くするのが好ましい。   Next, with reference to FIG. 5, a description will be given of the case where the rotating shaft portion 35 that can rotate around the movable axis K in the direction intersecting the direction of the rotating shaft R and the direction of the rotating shaft D is provided. FIG. 5A is a front view of the mounting table 10, the rotary shaft portion 35, and the like, and FIG. 5B is a side view. The rotating shaft part 35 has a rotating shaft upper part 36 and a rotating shaft lower part 37, and the rotating shaft upper part 36 supports the mounting table 10 so as to be rotatable about the rotation axis D, and the rotating shaft lower part 37 is a motor shaft part. 42 (see FIG. 1). The rotating shaft lower portion 37 and the rotating shaft upper portion 36 are connected so as to be rotatable around the movable axis K. The movable axis K is typically an axis in a direction orthogonal to the rotation axis R and the rotation axis D. Further, the position of the movable shaft K, that is, the ratio of the length of the rotating shaft upper portion 36 and the rotating shaft lower portion 37 is arbitrary, but if the rotating shaft upper portion 36 is long, it rotates when tilted around the movable axis K. Since the eccentric mass when rotating around the axis R increases and the possibility of causing problems such as vibration increases, it is preferable to shorten the rotating shaft upper part 36.

回転軸下部37と回転軸上部36とは、電動モータ40(図1参照)で回転軸R回りに回転中に、例えばサーボモータ機構などの周知の手段で可動軸K回りに回動してもよく、あるいは、電動モータ40が停止中に、手動で回動軸K回りに回動して回転軸部35の曲がりの角度を定めた後に、可動軸K回りの回動をネジなどで固定し、電動モータ40の作動中は回動しないような構成としてもよい。回転軸部35が可動軸K回りに回動し、回転軸上部36が角度を変えることにより、被塗布物80上の塗布物88に作用する遠心力の方向・大きさを変えることができ、すなわち展延する方向および速度が変わるので、複雑な形状の被塗布物80でも、塗布物88を所望の厚さに展延することが可能となり、よって、簡単な構造で、塗布物展延装置1(図1参照)の適用範囲を広くすることができる。なお、電動モータ40が停止中に手動で回動軸K回りに回動する構成とすると、極めて簡単な構成で、回転軸Rの方向および回動軸Dの方向と交差する方向の可動軸K回りに回動することが可能な回転軸部35となる。   The rotary shaft lower portion 37 and the rotary shaft upper portion 36 may rotate around the movable axis K by a known means such as a servo motor mechanism while rotating around the rotary axis R by the electric motor 40 (see FIG. 1). Alternatively, or while the electric motor 40 is stopped, after manually turning around the rotation axis K to determine the bending angle of the rotation shaft portion 35, the rotation around the movable axis K is fixed with a screw or the like. The electric motor 40 may be configured not to rotate during operation. The direction and the magnitude of the centrifugal force acting on the coated object 88 on the coated object 80 can be changed by rotating the rotating shaft part 35 around the movable axis K and changing the angle of the rotating shaft upper part 36. That is, since the spreading direction and speed are changed, it is possible to spread the coated material 88 to a desired thickness even with the object 80 having a complicated shape. Therefore, the coated material spreading device has a simple structure. 1 (see FIG. 1) can be widened. If the electric motor 40 is manually rotated around the rotation axis K while the electric motor 40 is stopped, the movable axis K in the direction intersecting the direction of the rotation axis R and the direction of the rotation axis D is very simple. It becomes the rotating shaft part 35 which can be rotated around.

ここで図6のフローチャートを参照して、これまで説明した塗布物展延方法の基本的な流れを説明する。なお、塗布物展延装置としては図1を参照するが、図6のフローチャートに示す塗布物展延方法を実行するのは、本実施の形態における塗布物展延装置1には限られず、他の態様でもよい。図6は、被塗布物を回転する回転軸と交差する方向の回動軸回りに被塗布物を回動する工程を備える塗布物展延方法を説明するフローチャートである。まず、塗布物88を被塗布物80の表面に供給する(ステップS1)。塗布物88が供給された被塗布物80を載置台10に固定する(ステップS2)。なお、被塗布物80を載置台10に固定した後に、塗布物88を供給してもよい。被塗布物80を載置台10に固定すると、被塗布物80は傾斜する。すなわち、載置台10の被塗布物80を載置する面は、水平ではなく、傾斜角Tで傾斜している。   Here, the basic flow of the coating material spreading method described so far will be described with reference to the flowchart of FIG. Note that although FIG. 1 is referred to as the coated material spreading apparatus, the coated material spreading method shown in the flowchart of FIG. 6 is not limited to the coated material spreading apparatus 1 in the present embodiment, and other The aspect of this may be sufficient. FIG. 6 is a flowchart for explaining a coated material spreading method including a step of rotating the coating object around a rotation axis in a direction intersecting with a rotation axis for rotating the coating material. First, the coated material 88 is supplied to the surface of the coated material 80 (step S1). The workpiece 80 to which the coating material 88 is supplied is fixed to the mounting table 10 (step S2). In addition, after fixing the to-be-coated object 80 to the mounting base 10, you may supply the coated object 88. FIG. When the object 80 is fixed to the mounting table 10, the object 80 is inclined. That is, the surface of the mounting table 10 on which the workpiece 80 is mounted is not horizontal but is inclined at an inclination angle T.

被塗布物80を固定した載置台10を第1の回転速度で回転させる(ステップS3)。第1の回転速度で回転することにより傾斜角Tはある傾斜角T1(図示しない)となる。その状態で、被塗布物80の第1の部分(例えば、図3のA部分)の塗布物88が主に展延され、他の部分の塗布物88はほとんど展延されない(ステップS4)。次に、回転速度を加速する(ステップS5)。回転速度が加速されることにより、載置台10等に作用する遠心力の影響で、載置台10傾斜角Tが変化して、ある傾斜角T2(図示しない)となる(ステップS6)。そこで、被塗布物80の塗布物88が主に展延される部分が、第1の部分から第2の部分(例えば、図3のB部分)へと変わる(ステップS7)。このように、回転速度を変えることにより塗布物88が展延される被塗布物80上の位置が変わるので、適宜回転速度を変え、ステップS5〜S7を繰り返すことにより、被塗布物80上の全面で塗布物88を展延することができ、所望の厚さに展延できる。   The mounting table 10 to which the workpiece 80 is fixed is rotated at the first rotation speed (step S3). By rotating at the first rotation speed, the tilt angle T becomes a certain tilt angle T1 (not shown). In this state, the coating material 88 of the first portion (for example, portion A in FIG. 3) of the coating object 80 is mainly spread, and the coating material 88 of other portions is hardly spread (step S4). Next, the rotational speed is accelerated (step S5). By accelerating the rotation speed, the tilt angle T of the mounting table 10 changes due to the centrifugal force acting on the mounting table 10 and the like, and becomes a certain tilt angle T2 (not shown) (step S6). Therefore, the part where the application object 88 of the application object 80 is mainly spread is changed from the first part to the second part (for example, part B in FIG. 3) (step S7). Thus, since the position on the coating object 80 where the coating material 88 is spread is changed by changing the rotation speed, the rotation speed is appropriately changed, and the steps S5 to S7 are repeated, whereby the coating material 80 is coated. The coated material 88 can be spread over the entire surface, and can be spread to a desired thickness.

塗布物88を所望の厚さに展延したならば、載置台10および被塗布物80の回転を止める(ステップS8)。そして、塗布物88が紫外線硬化樹脂である場合には、紫外線照射により紫外線硬化樹脂である塗布物88を固化し、形状を安定させる(ステップS9)。なお、紫外線照射は、被塗布物80を載置台10に固定したまま、あるいは回転したまま行ってもよい。載置台10に固定したまま紫外線照射をすることで、所望の厚さに展延した直後に、振動等を与えて塗布物88を変形させることなしに、塗布物88を固化できるので、所望の厚さを維持し易い。更に、回転させながら、紫外線照射を行うことができると、塗布物88が所望の厚さになった時点で紫外線照射を行い固化することができるので、より所望の厚さを維持し易い。この場合には、塗布物展延装置1に紫外線ランプ(不図示)が備えられる。ただし、被塗布物80を載置台10から取り外し、別の場所で紫外線照射を行うと、処理時間の長い塗布物88の展延と、紫外線照射とを別個の装置で行うことになり、塗布物展延装置1の処理能力がアップする。また、被塗布物80を所定の位置に静止した状態で紫外線を照射できるので、紫外線ランプと塗布物88との距離を任意に調整でき、弱い紫外線ランプでも十分に使用することができる。   When the coating material 88 is spread to a desired thickness, the mounting table 10 and the coating object 80 are stopped from rotating (step S8). If the coated material 88 is an ultraviolet curable resin, the coated material 88, which is an ultraviolet curable resin, is solidified by ultraviolet irradiation to stabilize the shape (step S9). The ultraviolet irradiation may be performed while the workpiece 80 is fixed to the mounting table 10 or rotated. By irradiating with ultraviolet rays while being fixed to the mounting table 10, immediately after spreading to a desired thickness, the applied material 88 can be solidified without applying vibration or the like to deform the applied material 88. Easy to maintain thickness. Furthermore, when the ultraviolet irradiation can be performed while rotating, since the ultraviolet irradiation can be performed and solidified when the coated material 88 reaches a desired thickness, the desired thickness can be more easily maintained. In this case, the coating material spreading apparatus 1 is provided with an ultraviolet lamp (not shown). However, if the application object 80 is removed from the mounting table 10 and ultraviolet irradiation is performed in another place, the spreading of the application object 88 having a long processing time and the ultraviolet irradiation are performed by separate apparatuses. The processing capability of the spreading device 1 is improved. In addition, since the ultraviolet light can be irradiated while the object to be coated 80 is stationary at a predetermined position, the distance between the ultraviolet lamp and the coated material 88 can be arbitrarily adjusted, and even a weak ultraviolet lamp can be used sufficiently.

上記の図6のフローチャートを参照した説明では、載置台10が回転による遠心力で回動軸D回りに回動するものとして説明したが、回動軸D回りに回動するのは回動駆動装置70(図4参照)等、他の機構であってもよい。また、第1の回転速度から次の回転速度へ階段状に加速するように説明したが、回転速度の変化は滑らかに行われてもよく、また、加速するだけではなく、階段状にあるいは滑らかに減速してもよい。   In the description with reference to the flowchart of FIG. 6 described above, it has been described that the mounting table 10 rotates about the rotation axis D by the centrifugal force due to the rotation. Other mechanisms such as the device 70 (see FIG. 4) may be used. Moreover, although it demonstrated so that it may accelerate in steps from the 1st rotation speed to the next rotation speed, the change in rotation speed may be performed smoothly, and it is not only in acceleration but also in steps or smoothly. You may slow down.

次に、図7に示すような、湾曲した面(B’、C’部)と、湾曲した面から折れ曲がる面(A’部)とを有する被塗布物90上の塗布物92を回動軸R回りに回動させて回転して展延する場合と、従来通りに回動させずに回転して展延する場合とで、展延後の塗布物92の厚さの比較実験を行った。供給した塗布物92は、粘性が0.04Pa・s(25℃)の塗料である。塗付物92を供給した被塗布物90を図7に示すように載置台10により吸着部20を介して固定支持し、回転軸部30を回転した。   Next, as shown in FIG. 7, the application object 92 on the application object 90 having a curved surface (B ′, C ′ part) and a surface bent from the curved surface (A ′ part) is rotated. An experiment was conducted to compare the thickness of the coated material 92 after spreading between the case of rotating around the R and rotating and spreading and the case of rotating and spreading without turning as usual. . The supplied applied material 92 is a paint having a viscosity of 0.04 Pa · s (25 ° C.). As shown in FIG. 7, the object 90 to which the application object 92 was supplied was fixedly supported by the mounting table 10 via the suction part 20, and the rotary shaft part 30 was rotated.

図8に実施例として回転した回転速度vと時間tとの関係をグラフ化して示す。本実施例では、v1、v2、v3と3段階に回転速度を変化させた。また、回転速度の低いv1で回転する時間を長く、v2、v3と回転速度が高くなるにつれ、回転する時間を短くし、均一な膜厚になるようにした。ここで、v1は500(1/分)、v2は1250(1/分)、v3は2000(1/分)であり、t1は回転開始(t0)後8秒、t2は回転開始(t0)後12秒、t3は回転開始(t0)後13秒である。   FIG. 8 is a graph showing the relationship between the rotation speed v and time t as an example. In the present embodiment, the rotational speed was changed in three stages, v1, v2, and v3. In addition, the rotation time at v1 where the rotation speed is low is lengthened, and the rotation time is shortened and the film thickness is uniform as v2 and v3 are increased. Here, v1 is 500 (1 / min), v2 is 1250 (1 / min), v3 is 2000 (1 / min), t1 is 8 seconds after the start of rotation (t0), and t2 is the start of rotation (t0). After 12 seconds, t3 is 13 seconds after the start of rotation (t0).

比較例として、同じ被塗布物90に同じ塗付物92を供給し、載置台10の被塗布物90を載置する上面を水平に保ち、回転速度1500(1/分)で6秒間回転し、塗付物92を展延した。   As a comparative example, the same coated object 92 is supplied to the same coated object 90, the upper surface of the mounting table 10 on which the coated object 90 is placed is kept horizontal, and it rotates for 6 seconds at a rotation speed of 1500 (1 / min). The coated material 92 was spread.

図9に実施例と比較例の展延後の塗付物の膜厚を、位置A’、B’、C’ごとにまとめて示す。図9でも明らかなように、被塗布物90を水平に固定したまま回転する従来の塗布物展延方法による比較例に対し、回転しながら回動軸R回り回動する本発明に係る塗布物展延方法によれば、展延後の塗布物92の膜厚をより均一にできる。すなわち、所望の膜厚が得られることが分かった。   FIG. 9 collectively shows the film thicknesses of the applied products after spreading in the example and the comparative example for each position A ′, B ′, and C ′. As is apparent from FIG. 9, the coated product according to the present invention that rotates about the rotation axis R while rotating is compared with the comparative example by the conventional coated material spreading method in which the coated material 90 is rotated while being fixed horizontally. According to the spreading method, the thickness of the coating 92 after spreading can be made more uniform. That is, it was found that a desired film thickness can be obtained.

塗布物展延装置の構成を説明する模式図である。It is a schematic diagram explaining the structure of a coated material spreading apparatus. (a)、(b)は図1に示す載置台および吸着部を説明する断面図で、(a)は図1と同方向に見た断面図、(b)は(a)と直交する垂直断面での断面図、(c)は被塗布物を押圧することにより固定支持する載置台を説明する側面図、(d)は載置治具にて被塗布物を固定支持する載置台を説明する断面図である。(A), (b) is sectional drawing explaining the mounting base and adsorption | suction part shown in FIG. 1, (a) is sectional drawing seen in the same direction as FIG. 1, (b) is perpendicular | vertical orthogonal to (a). Sectional drawing in a cross section, (c) is a side view for explaining a mounting table fixed and supported by pressing the object to be coated, and (d) illustrates a mounting table for fixing and supporting the object to be coated by a mounting jig. FIG. 載置台が回転軸部の回転にともなって回転しながら回動し被塗布物上の塗布物を展延する様子を説明する模式図で、(a)は初期に低速で回転している場合、(b)は回転速度を上げ、載置台が回動して傾斜角が小さくなってきた場合、(c)は回転速度を更に上げ、載置台が回動してほぼ水平になった場合を示す。In the schematic diagram illustrating the state where the mounting table rotates while rotating with the rotation of the rotating shaft portion and spreads the coated material on the coated material, (a) is rotating at a low speed in the initial stage, (B) shows a case where the rotation speed is increased and the mounting table is rotated and the inclination angle is reduced, and (c) is a case where the rotation speed is further increased and the mounting table is rotated and becomes almost horizontal. . 載置台が回転軸の回転に伴って回転しながら、回動駆動装置により回動し被塗布物上の塗布物を展延する例を説明する模式図で、(a)は初期に傾斜角が大きな状態で回転している場合、(b)は傾斜角が小さく、ほぼ0(ゼロ)となって回転している場合、(c)は初期とは逆方向に傾斜角が大きくなって回転している場合を示す。FIG. 5 is a schematic diagram for explaining an example in which the mounting table rotates with the rotation of the rotating shaft and is rotated by a rotation driving device to spread the coated material on the coated material. FIG. When rotating in a large state, (b) has a small tilt angle, and when rotating at almost 0 (zero), (c) rotates with a large tilt angle in the direction opposite to the initial direction. Indicates the case. 回転軸の方向および回動軸の方向と交差する方向の可動軸回りに回動することが可能な回転軸部を説明する図で、(a)は載置台、回転軸部等の正面図、(b)は側面図を示す。It is a figure explaining the rotating shaft part which can be rotated around the movable axis of the direction which intersects the direction of a rotating shaft and the direction of a rotating shaft, (a) is a front view, such as a mounting base and a rotating shaft part, (B) shows a side view. 被塗布物を回転する回転軸と交差する方向の回動軸回りに被塗布物を回動する工程を備える塗布物展延方法を説明するフローチャートである。It is a flowchart explaining the coating material spreading | diffusion method provided with the process of rotating the to-be-coated object around the rotation axis | shaft of the direction which cross | intersects the rotating shaft which rotates a to-be-coated material. 実施例および比較例で用いた被塗布物の形状を説明する図である。It is a figure explaining the shape of the to-be-coated object used in the Example and the comparative example. 実施例として被塗布物を回転した塗布物を展延した回転速度と時間との関係をグラフ化して示す図である。It is a figure which graphs and shows the relationship between the rotational speed and time which spread the coating material which rotated the to-be-coated material as an Example. 実施例と比較例の展延後の塗付物の膜厚を、位置ごとにまとめて示す図である。It is a figure which shows collectively the film thickness of the coating material after the extension of an Example and a comparative example for every position.

符号の説明Explanation of symbols

1 塗布物展延装置
10 載置台
11 両側板
12 センター軸
13 穴
14 載置台
15 伸縮軸部
16 押え部
18 載置台
19 載置治具
20(20a、20b、20c) 吸着部
22 (吸着部の)軸部
24 (吸着部の)接触部
26(26a、26b、26c) ばね
28 吸引管
30 回転軸部
32 軸受
35 回転軸部
36 回転軸上部
37 回転軸下部
38 吸引管
40 電動モータ(駆動装置)
42 モータ軸部
44 信号ケーブル
46 制御装置
48 タイマ
50 コーターハウス
52 側壁
54 底板
60 樹脂回収装置
62 回収管
64 樹脂溜め
66 排気管
68 排気ファン
70 回動駆動装置
72 ドーナッツ板
74 アクチュエータ
76 支持ロッド
80 被塗布物
82 被塗布物
83 端面
84 側面
88 塗布物
90 被塗布物
92 塗布物
A、B、C、A’、B’、C’ 被塗布物上の位置
D 回動軸
G 重心位置
h(ha、hb、hc) 載置台から突出する高さ
K 可動軸
R 回転軸
T 傾斜角(回転軸周りに回転する載置台の回転面の回転軸に対する角度)
t 時間
v 回転速度
DESCRIPTION OF SYMBOLS 1 Coating material spreading apparatus 10 Mounting stand 11 Both side plate 12 Center axis | shaft 13 Hole 14 Mounting stand 15 Telescopic shaft part 16 Holding part 18 Mounting stand 19 Mounting jig 20 (20a, 20b, 20c) Adsorption part 22 (Adsorption part of adsorption part) ) Shaft portion 24 (Adsorption portion) Contact portion 26 (26a, 26b, 26c) Spring 28 Suction tube 30 Rotating shaft portion 32 Bearing 35 Rotating shaft portion 36 Rotating shaft upper portion 37 Rotating shaft lower portion 38 Suction tube 40 Electric motor (drive device) )
42 motor shaft 44 signal cable 46 control device 48 timer 50 coater house 52 side wall 54 bottom plate 60 resin recovery device 62 recovery pipe 64 resin reservoir 66 exhaust pipe 68 exhaust fan 70 rotational drive device 72 donut plate 74 actuator 76 support rod 80 covered Application object 82 Application object 83 End face 84 Side surface 88 Application object 90 Application object 92 Application object A, B, C, A ', B', C 'Position on application object D Rotating axis G Center of gravity position h (ha , Hb, hc) Height K protruding from the mounting table Movable shaft R Rotating shaft T Inclination angle (An angle of the rotating surface of the mounting table rotating around the rotating shaft with respect to the rotating shaft)
t Time v Rotational speed

Claims (6)

回転軸回りに回転する回転軸部と;
塗布物が供給された被塗布物を固定支持し、前記回転軸部に支持され、前記回転軸部の回転に伴い回転しながら前記回転軸の方向と交差する方向の回動軸回りに回動する載置台とを備え;
前記載置台から突出し、前記被塗布物を吸着して固定する吸着部を複数備え、前記吸着部は被塗布物の形状に合わせるため前記載置台から突出する高さが可変である;
塗布物展延装置。
A rotating shaft that rotates about the rotating shaft;
The object to be coated is fixedly supported, supported by the rotating shaft portion, and rotated around the rotation axis in a direction intersecting the direction of the rotating shaft while rotating as the rotating shaft portion rotates. Bei example and the mounting table to;
A plurality of adsorbing portions that protrude from the mounting table and adsorb and fix the object to be coated; and the height of the adsorbing part protruding from the mounting table is variable to match the shape of the object to be coated;
Application spreader.
回転軸回りに回転する回転軸部と;
塗布物が供給された被塗布物を固定支持し、前記回転軸部に支持され、前記回転軸部の回転に伴い回転しながら前記回転軸の方向と交差する方向の回動軸回りに回動する載置台とを備え;
前記回転軸部が、前記回転軸回りに回転しながら前記回転軸の方向および前記回動軸の方向と交差する方向の可動軸回りに回動する;
塗布物展延装置。
A rotating shaft that rotates about the rotating shaft;
The object to be coated is fixedly supported, supported by the rotating shaft portion, and rotated around the rotation axis in a direction intersecting the direction of the rotating shaft while rotating as the rotating shaft portion rotates. Bei example and the mounting table to;
The rotating shaft rotates around a movable shaft in a direction intersecting the direction of the rotating shaft and the direction of the rotating shaft while rotating around the rotating shaft;
Application spreader.
前記回転軸部が、前記載置台の重心位置からずれた位置で前記載置台を支持する;
請求項1又は請求項2に記載の塗布物展延装置。
The rotating shaft portion supports the mounting table at a position shifted from the center of gravity of the mounting table;
The coated material spreading apparatus according to claim 1 or 2 .
前記載置台を前記回動軸回りに回動する回動駆動装置を備える;
請求項1乃至請求項3のいずれか1項に記載の塗布物展延装置。
A rotation drive device for rotating the mounting table around the rotation axis;
The coating material spreading | diffusion apparatus of any one of Claim 1 thru | or 3.
回転軸回りに回転する回転軸部と;
塗布物が供給された被塗布物を固定支持し、前記回転軸部に支持され、前記回転軸部の回転に伴い回転しながら前記回転軸の方向と交差する方向の回動軸回りに回動する載置台とを備え;
前記回転軸部が、前記載置台の重心位置からずれた位置で前記載置台を支持し;
前記回転軸部は、前記回転軸が鉛直方向に向くよう配置され、前記載置台は前記回転軸部の回転速度に応じて遠心力で前記回動軸回りに回動し、前記回動により前記載置台の傾斜角が変化するように構成された;
塗布物展延装置。
A rotating shaft that rotates about the rotating shaft;
The object to be coated is fixedly supported, supported by the rotating shaft portion, and rotated around the rotation axis in a direction intersecting the direction of the rotating shaft while rotating as the rotating shaft portion rotates. Bei example and the mounting table to;
The rotating shaft supports the mounting table at a position shifted from the center of gravity of the mounting table ;
The rotating shaft portion is arranged so that the rotating shaft is oriented in the vertical direction, and the mounting table rotates around the rotating shaft by centrifugal force according to the rotation speed of the rotating shaft portion, Configured to change the tilt angle of the table;
Application spreader.
前記回転軸部の回転速度は可変であり;
前記回転軸部の回転速度を制御する制御装置を備える;
請求項1乃至請求項5のいずれか1項に記載の塗布物展延装置。
The rotational speed of the rotating shaft is variable;
A control device for controlling the rotational speed of the rotary shaft portion;
The coated material spreading apparatus according to any one of claims 1 to 5 .
JP2007190618A 2007-07-23 2007-07-23 Coating material spreading device Expired - Fee Related JP4966774B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007190618A JP4966774B2 (en) 2007-07-23 2007-07-23 Coating material spreading device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007190618A JP4966774B2 (en) 2007-07-23 2007-07-23 Coating material spreading device

Publications (2)

Publication Number Publication Date
JP2009022920A JP2009022920A (en) 2009-02-05
JP4966774B2 true JP4966774B2 (en) 2012-07-04

Family

ID=40395254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007190618A Expired - Fee Related JP4966774B2 (en) 2007-07-23 2007-07-23 Coating material spreading device

Country Status (1)

Country Link
JP (1) JP4966774B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI396772B (en) 2009-02-03 2013-05-21 Nippon Steel & Sumitomo Metal Corp Alloyed hot dip galvanized steel sheet and producing method therefor
JP6243278B2 (en) * 2014-03-31 2017-12-06 芝浦メカトロニクス株式会社 Coating liquid coating apparatus and method
US9789701B1 (en) 2016-09-19 2017-10-17 Xerox Corporation System and method for printing on a three-dimensional (3D) curved object
US10350826B2 (en) * 2017-04-03 2019-07-16 Xerox Corporation Vacuum tube object clamping array with conformable pads
KR102037802B1 (en) * 2017-11-13 2019-10-29 세메스 주식회사 Apparatus for treating substrate
CN114602719B (en) * 2022-03-28 2022-11-01 甘肃能源化工职业学院 Anticorrosive paint coating device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6020065B2 (en) * 1981-06-12 1985-05-20 松下電工株式会社 Article holding jig
JPS58131168A (en) * 1982-01-29 1983-08-04 Masahiko Kurano Device for applying material for inhibiting leakage of water inside flower vase
JP2793554B2 (en) * 1996-04-25 1998-09-03 九州日本電気株式会社 Method for manufacturing semiconductor device
JP4220092B2 (en) * 2000-02-16 2009-02-04 有限会社東田鉄工 Tanker truck
JP2003053247A (en) * 2001-08-09 2003-02-25 Toshiba Corp Panel tilting device and manufacturing apparatus for cathode ray tube

Also Published As

Publication number Publication date
JP2009022920A (en) 2009-02-05

Similar Documents

Publication Publication Date Title
JP4966774B2 (en) Coating material spreading device
KR101839464B1 (en) Attachment device of display panel and attachment method
WO2018121069A1 (en) Lamination apparatus
CN113731746B (en) Folding device
JP2010265404A (en) Adhesion method and adhesion device
JP2005347775A (en) Electronic component mounting apparatus and mounting method
KR100924656B1 (en) Spin coater for cylindrical substrate and coating method using thereof
JP2008043877A (en) Apparatus for applying locking agent onto screw member
JP5756022B2 (en) Wafer taping
JP2002175973A (en) Semiconductor manufacturing equipment and method of manufacturing semiconductor device
JP7101583B2 (en) Board processing equipment and board processing method
JP5384972B2 (en) Wafer processing method and wafer processing apparatus
KR101566657B1 (en) Apparatus and method for processing substrate
TW202224789A (en) Application apparatus and application method
CN107200301B (en) Pad pasting aligning device of MEMS wafer
KR102122006B1 (en) Module integrated head and apparatus for attaching the fingerprint detecting sensor on the screen panel including the same
CN109425997B (en) Projection lens assembling equipment
JP6961397B2 (en) Substrate coating method and coating system
KR102323999B1 (en) Wafer peeling device
JP2010181770A (en) Apparatus for applying sealing agent
JP4550540B2 (en) Sample stage and ion sputtering equipment
JP3004824U (en) Fluid coating device
CN218362772U (en) Infrared laser engraving device
JP2009047820A (en) Lens fixing method
JP6989764B2 (en) Imprint device, operation method of imprint device and manufacturing method of device

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090928

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110922

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111018

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111215

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120327

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120402

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150406

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees