JP4965529B2 - Connecting tool - Google Patents

Description

  The present invention uses a connection seal member of a fluid device that connects a first component made of resin and a second component made of resin, which are used in a fluid device that handles a chemical solution, and is formed on the connection seal member The first part and the second part can be temporarily inserted into the recessed portion, and the first part and the second part can be connected by press-fitting the first part and the second part. The present invention also relates to a connection tool used when press-fitting the first part and the second part.

The first fluid device (corresponding to the “first component” in the claims) and the second fluid device (corresponding to the “second component” in the claims), which are the objects of the present invention, are used in the semiconductor manufacturing process. In order to flow a highly erodible fluid that is used, it is made of a highly corrosion-resistant resin.
In this case, a seal structure for connecting the first fluid device and the second fluid device is important.
In order to connect the first fluid device made of resin and the second fluid device, the applicant of the present invention corresponds to a sealing member having an H-shaped cross section shown in Japanese Patent No. 3780277 (corresponding to “connecting sealing member” in the claims). .) Has been proposed.
FIG. 19 shows a cross-sectional view of the seal member 6.
Specifically, as shown in FIG. 19, the main body 11 has an H-shaped cross section, and the cross section has a line-symmetric shape on the left and right. The main body 11 is formed with annular grooves 11a and 11b. The annular grooves 11a and 11b are provided with press-fitting allowances 11c and 11d, respectively, on the inner inner wall and the outer inner wall on the back side from the opening.
When the annular protrusions 11a and 11b of the first fluid device and the second fluid device are press-fitted into the annular grooves 11a and 11b of the seal member 6, the press-fitting allowances 11c and 11d generate a seal surface pressure to ensure the seal. It is also possible to prevent the sealing force from being reduced.

28, the first fluid device 120, the second fluid device 130, and the seal member 6 are shown.
For the first fluid device 120 and the second fluid device 130, only the connection portion is shown, and the previous portion is omitted.
An annular protrusion 122 a is formed on the connection part 122 of the first fluid device 120. An annular protrusion 132 a is formed on the connection portion 132 of the second fluid device 130. The annular protrusion 122a is inserted up to the press-fitting allowances 11c and 11d provided in the annular groove 11a of the seal member 6. The annular protrusion 132a is inserted up to the press-fitting allowances 11c and 11d provided in the annular groove 11b of the seal member 6.
As shown in FIG. 28, the first fluid device 120 and the second fluid device 130 are formed with mounting grooves 121 and 131 for mounting the connection mechanism from the time of manufacture.

Conventionally, there is a connection mechanism 201 shown in FIG. 27 as a connection mechanism used when connecting resin pipes such as the first fluid device 120 and the second fluid device 130.
As shown in FIG. 27, the connection mechanism 201 includes a mechanism main body 202 and an arm 203. The mechanism main body 202 includes a fixed portion 206 and a movable portion 207. The arm 203 includes a fixed first arm 204 and a second arm 205 that can slide back and forth. The tips of the first arm 204 and the second arm 205 are fitted with the mounting grooves 121 and 131 shown in FIG. 28, and therefore, the U-shaped portion 205a has a shape along the mounting grooves 121 and 131 as shown in FIG. Is forming. Although not shown, the first arm 204 has a U-shaped portion 204a similar to the U-shaped portion shown in FIG. Since the second arm 205 is subjected to a large load at the time of connection, as shown in FIGS. 27 and 28, the second arm 205 is attached in advance to incline toward the tip.

When connecting the first fluid device 120 and the second fluid device 130, the connection mechanism 201 is brought close to the first fluid device 120 and the second fluid device 130 to be connected, and the tips of the first arm 204 and the second arm 205 are connected. The U-shaped portions 204 a and 205 a are fitted into the mounting grooves 121 and 131.
By moving the movable part 207 to the fixed part 206, the second arm 205 approaches the first arm 204. Accordingly, the first fluid device 120 approaches the second fluid device 130 via the connection portion 121 that contacts the second arm 205. When the first fluid device 120 approaches the second fluid device 130, the annular protrusion 122a of the first fluid device 120 and the annular protrusion 132a of the second fluid device 130 are press-fitted into the press-fitting margins 11c and 11d of the seal member 6. .
Through the series of operations described above, the annular protrusion 122a of the first fluid device 120 and the annular protrusion 132a of the second fluid device 130 can be press-fitted into the press-fitting margins 11c and 11d of the seal member 6, and both components can be connected. it can.

Japanese Patent No. 3780277 JP 2003-181776 A

However, since the sealing member 6 has a characteristic shape that does not exist in the past as shown in FIG. 19, the seal member 6 is conventionally used when connecting the first fluid device 120 and the second fluid device 130. Depending on the connection mechanism 201 as described above, there is a fear that it cannot be reliably connected.
As shown in FIG. 19, since the press-fitting allowances 11 c and 11 d are formed on the entire circumference of the seal member 6, the annular protrusion 122 a of the first fluid device 120 and the first projections are required unless uniform force is applied to the entire circumference. This is because the annular protrusion 132a of the two-fluid device 130 cannot be uniformly press-fitted over the entire circumference.
For example, when a force is applied to a part of the circumference, and the press-fitting allowances 11c and 11d and the annular protrusion 122a of the first fluid device 120 are joined only to that part, the other parts are from the uneven distribution of the force, There is a possibility that it is impossible to press-fit uniformly over the entire circumference of the press-fitting allowances 11c and 11d. The press-fitting allowances 11c and 11d of the seal member 6 are formed over the entire circumference, and when a force is applied to a part, stress concentration occurs in the part, and a part of the seal member 6 is deformed or made of resin. This can cause scratches. For this reason, there is a problem that the sealing performance is deteriorated.
In addition, there is a problem that the annular protrusion 122a of the first fluid device 120 may not be press-fitted into the press-fitting allowances 11c and 11d at other portions where the force is applied unevenly. Furthermore, since other parts are press-fitted after a part is press-fitted into the press-fitting allowances 11c and 11d of the seal member 6, they are forcibly press-fitted into the press-fitting allowances 11c and 11d, and the press-fitting allowances 11c and 11d are deformed. There was a problem. Since the sealing member 6 including the press-fitting allowances 11c and 11d is made of resin, it is plastically deformed, and once it is deformed, it does not return to the original state.

Specifically, as shown in FIG. 28, when the second arm 205 of the connection mechanism 201 is attached in advance so as to incline inward toward the tip, as shown in FIGS. The arm 205 is in contact with the mounting groove 121 only at the tip portion 205b of the U-shaped portion 205a. For this reason, when the second arm 205 is moved, the force is applied to the distal end portion 205b, and stress concentration occurs in the distal end portion 205b. Since the force of the tip portion 205b is applied to a part of the annular protrusion 122a of the first fluid device 120, the portions near the tip portion 205b are also press-fitted in the press-fitting margins 11c and 11d first. Then, since the annular protrusion 122a is inserted with an inclination with respect to the press-fitting allowances 11c and 11d, there is a problem that the press-fitting allowances 11c and 11d may be deformed or damaged.
Further, since the force is unevenly distributed except for the portion to which the force of the tip portion 205b is applied, a uniform force does not act on the entire circumference of the press-fitting allowances 11c and 11d, so that the annular protrusions 122a and 132a are press-fitted into the press-fitting allowances 11c and 11d. There was also a problem that sometimes it was not possible.
Further, since the portions other than the portion to which the force of the tip portion 205b is applied are forcedly inserted into the press-fitting allowances 11c and 11d after the press-fitting allowances 11c and 11d near the tip end portion 205b are press-fitted, the press-fitting allowances 11c and 11d. In addition, there is a problem that the annular protrusions 122a and 132a are deformed.
Therefore, if the force is not uniformly applied over the entire circumference of the annular protrusions 122a and 132a, the seal may not be completely sealed, and the press-fitting allowances 11c and 11d may be deformed or scratched. There was a risk of leakage.

On the other hand, when the connecting tool is large, there is a problem that work in the apparatus cannot be performed. Since the connection mechanism 201 has a complicated structure, it must be large, and there is a problem that workability is deteriorated in the semiconductor manufacturing line.
Further, each time the work is performed, if the first arm and the second arm are adjusted to the width of the connection portion between the first fluid device and the second fluid device, it takes time and there is a problem that workability is deteriorated.

  From the above problems, there is a demand for a connecting tool that has a force to draw the first fluid device and the second fluid device and can apply a uniform force over the entire circumference of the seal member. The present invention has been made to solve the above problems, and an object of the present invention is to provide a connecting tool capable of applying a uniform force over the entire circumference of the seal member.

In order to achieve the above object, a connection tool according to the present invention has the following configuration.
(1) A connection seal member for a chemical solution device that connects a first component made of resin and a second component made of resin, which are used in a chemical solution device, is used in a recess formed in the connection seal member. In the connection tool for connecting the first part and the second part by temporarily inserting the connection part between the first part and the second part and press-fitting the connection part between the first part and the second part into the recess, In order to draw the one part and the second part, a connection mechanism is used, the connection mechanism is composed of a mechanism body and a pair of arms, and the pair of arms is composed of a first arm and a second arm. The first part has a first attachment groove of the connection part to be fitted to the first arm of the connection mechanism, and the second part has a second attachment groove of the connection part to be fitted to the second arm of the connection mechanism. The first arm and the second arm of the connection mechanism Tsukemizo and fitted into the second mounting groove, by proximity to the first arm and the second arm, press-fitting the first and second parts to connect the sealing member, the connecting portion of the first component The connection surface and the connection surface of the connection part of the second part are drawn in parallel, are fitted into the first mounting groove, have a semi-cylindrical shape, and a holder engagement at the uppermost part of the semi-cylindrical circumference A pair of first holders having a portion, a semi-cylindrical shape fitted into the second mounting groove, and a pair of second holders having a holder engaging portion at the uppermost part of the circumference of the semi-cylindrical shape By using the holder, engaging the first arm and the second arm of the connection mechanism with the first holder and the second holder, and bringing the first arm and the second arm close to each other, the first component and the second component Is press-fitted into the connection seal member .
(2) The connecting seal member of the chemical device used to connect the first component made of resin and the second component made of resin, which is used in the chemical solution device, is formed in the recess formed in the connection seal member. In the connection tool for connecting the first part and the second part by temporarily inserting the connection part between the first part and the second part and press-fitting the connection part between the first part and the second part into the recess, In order to draw the one part and the second part, a connection mechanism is used, the connection mechanism is composed of a mechanism body and a pair of arms, and the pair of arms is composed of a first arm and a second arm. The first part has a first attachment groove of the connection part to be fitted to the first arm of the connection mechanism, and the second part has a second attachment groove of the connection part to be fitted to the second arm of the connection mechanism. The first arm and the second arm of the connection mechanism The first part and the second part are press-fitted into the connection seal member by fitting the grooved part and the second attachment groove and bringing the first arm and the second arm close to each other, and the connection part of the first part The connection surface of the second part and the connection surface of the connection part of the second component are drawn in parallel, the connection seal member is a resin, and the cross-sectional shape is an H-shaped seal, the first arm and the second arm The locking member is formed as a stepped portion on the first arm side on the rod portion where one end portion is fixed to the first arm and the other end portion is in sliding contact with the second arm. In addition, the first arm and the second arm do not approach a predetermined distance or more by contacting the annular contact surface of the second arm and the stepped surface of the locking member.

(3) (1) or (2) connecting Engineering again and again Oite described, the connection mechanism, the second arm is able to close to the first arm by using the thrust of the screw, characterized by.
( 4 ) In any one of the connection tools described in (1) to ( 3 ), the connection mechanism is configured such that two handles are rotatably connected at an intersection, and the handle is a tip part. Bends inward and the support shafts are arranged so as to be parallel to the rotation axis of the handle, and the support portion of the pressure plate is rotatably held on the support shaft. It is characterized by this.
( 5 ) In any one of the connection tools described in (1) to ( 4 ), the first arm and the second arm can be replaced, and the first arm and the second arm are provided for each connection port diameter. This is characterized in that the parts are different in size.
Connecting Engineering again and again Oite described (6) (1), if a state in which the connecting portion of the first component of the connecting portion and the second component is temporarily inserted into the initial position in a recess formed in the connecting seal member The first arm cannot be engaged with the first holder, and the connection part of the first part and the connection part of the second part must be temporarily inserted into the initial position in the recess formed in the connection seal member. For example, the second arm cannot be engaged with the second holder and the state where the second arm is temporarily inserted into the initial position is that the connection part of the first part and the connection part of the second part are formed on the connection seal member. It is the state inserted until it contact | abuts the entrance of the press-fitting allowance of the recessed part .

Next, the operation and effect of the connection tool used for connecting the first fluid device and the second fluid device will be described.
For example, first, one surface of the seal member is temporarily fixed to the annular protrusion of the first fluid device in a state up to the press-fitting allowance along the annular groove. Next, the annular projection of the second fluid device is temporarily fixed on the other surface of the seal member along the annular groove until the state before the press-fitting allowance.
A connection mechanism is prepared, and the arm engagement portion of the arm is engaged with the first attachment groove of the first fluid device and the second attachment groove of the second fluid device. Next, the second arm is moved closer to the first arm by pulling the lever of the mechanism body. As the second arm is drawn closer to the first arm, the first fluid device and the second fluid device come close to each other, and the annular protrusion of the first fluid device and the annular protrusion of the second fluid device serve as a press-fitting allowance for the seal member. Press-fitted and sealed. The connection mechanism is held in a sealed state. When the seal is in the press-fitted state, it is put on the connecting portion including the seal member so as to be sandwiched between the connecting members. After covering the connecting member, the connection is completed by fitting the claw and the drawing member.

By adopting the configuration of (1) above, a uniform force can be applied to the entire circumference of the press-fitting allowance of the seal member, and the annular projection of the connecting portion can be press-fitted to the press-fitting allowance of the seal member, so Can be made. Further, the connection surface of the connection portion of the first fluid device and the connection surface of the connection portion of the second fluid device can be drawn in parallel, and a uniform force can be applied to the entire circumference of the press-fitting allowance of the seal member, The annular protrusion of the connecting portion can be press-fitted into the press-fitting allowance of the seal member, and can be reliably sealed. Further, when connecting the first fluid device and the second fluid device, the holder has a small diameter portion fitted over the first mounting groove and the second mounting groove over the entire circumference, so that the arm is engaged with the holder, By bringing the second arm closer to the first arm, a force can be applied over the entire circumference of the holder. Therefore, a uniform force can be applied to the entire circumference of the press-fitting allowance of the seal member, and the annular protrusion of the connecting portion can be press-fitted to the press-fitting allowance of the seal member, so that the seal can be reliably performed.
In addition, by adopting the configuration of (2) above, a uniform force can be applied to the entire circumference of the press-fitting allowance of the seal member, and the annular protrusion of the connecting portion can be press-fitted into the press-fitting allowance of the seal member. Can be sealed. Further, the connection surface of the connection portion of the first fluid device and the connection surface of the connection portion of the second fluid device can be drawn in parallel, and a uniform force can be applied to the entire circumference of the press-fitting allowance of the seal member, The annular protrusion of the connecting portion can be press-fitted into the press-fitting allowance of the seal member, and can be reliably sealed. Since the arm has a locking member for preventing the first arm and the second arm from approaching a predetermined distance or more, an excessive force is not excessively applied to the seal portion. That is, when the locking member comes into contact, no further force can be applied, so that the excessive force does not damage or deform the seal member.
Further, since the arm moves by utilizing the thrust of the screw by adopting the configuration of ( 3 ) above, the connecting jig can be miniaturized, so the first fluid device and the second fluid can be used even in a narrow place. Equipment can be connected. Further, since the second arm is guided by the rod and can move in parallel, a uniform force can be applied to the entire circumference of the press-fitting allowance of the seal member, and the annular protrusion of the connecting portion can be used as the press-fitting allowance of the seal member. It can be press-fitted and can be reliably sealed.

Further, since the pressure plate is rotatably attached to the support shaft by adopting the configuration of ( 4 ) above, the pressurizing plate rotates around the support shaft at the time of pressurization. The pressure plate can be pressurized while keeping parallel. Therefore, a uniform force can be applied to the entire circumference of the press-fitting allowance of the seal member, and the annular protrusion of the connecting portion can be press-fitted to the press-fitting allowance of the seal member, so that the seal can be reliably performed.
Further, by adopting the configuration of ( 5 ) above, the first fluid device and the second fluid port having various connection diameters can be obtained by replacing the second arm and the first arm only by having a mechanism body of one connection mechanism. It can correspond to connection of fluid equipment.
Further, by adopting the configuration ( 6 ), the first arm and the second arm cannot be engaged with the first holder and the second holder, and the second arm cannot be brought close to the first arm. . As a result, since no force is applied to the seal member, the connection portion is not deformed or damaged. In addition, the annular protrusion of the connecting portion can be press-fitted into the press-fitting allowance of the seal member, and can be reliably sealed.

(First embodiment)
<Overall configuration of fluid connection device>
In FIG. 2, the external appearance perspective view before the connection of the 1st fluid apparatus 2, the 2nd fluid apparatus 3, and the sealing member 6 is shown. FIG. 13 shows a cross-sectional view of FIG.
Specifically, the first and second connection parts 4 and 5 are cylindrical, and the flow paths 4h and 5h are open at the end faces. Seal grooves 4a and 5a are formed on the end surfaces of the first and second connection portions 4 and 5 around the flow path opening. In the seal grooves 4a and 5a, annular protrusions 4b and 5b are provided so as to protrude concentrically with the flow paths 4h and 5h. The first and second connecting portions 4 and 5 are provided with protruding portions 4g and 5g projecting outward along the outer periphery of the end surface.

  On the outer peripheral surfaces of the first and second connecting portions 4 and 5, first and second mounting grooves 4f (corresponding to “first grooves” in the claims) to which a first holder 40 and a second holder 50 described later are mounted. ), 5f (corresponding to “second groove” in the claims) are each formed in an annular shape. The inner surface 4i, 5i on the end face side of the first and second mounting grooves 4f, 5f is formed in parallel to the end faces of the first and second connection portions 4, 5, and is perpendicular to the axis of the flow paths 4h, 5h. Form a flat shape.

The first and second connection portions 4 and 5 are provided between the first and second mounting grooves 4f and 5f and the end surfaces of the first and second connection portions 4 and 5, respectively. Are each formed in an annular shape. The first and second mounting grooves 4c and 5c are formed to a depth corresponding to the annular protrusions 4b and 5b. The end surface side inner surfaces 4d and 5d of the first and second mounting grooves 4c and 5c are formed in parallel with the end surfaces of the first and second connection portions 4 and 5, and are perpendicular to the axes of the flow paths 4h and 5h. Form a flat shape. The first and second mounting grooves 4c and 5c are formed with connecting portion side tapers 4e and 5e on the back side from the openings of the end surface side inner side surfaces 4d and 5d. The connecting portion side tapers 4e and 5e are formed so as to narrow the groove widths of the first and second mounting grooves 4c and 5c toward the back side of the first and second mounting grooves 4c and 5c.
In FIG. 13, the outer peripheral line of the grip portion 12 is omitted in order to make the seal member 6 easy to see.

<Overall configuration of holder>
FIG. 21 shows an external perspective view of the first holder 40.
Since the shapes of the first holder 40 and the second holder 50 are the same, the description of the second holder 50 is omitted here by describing the first holder 40.
The first holder 40 includes two semicircular holder members 40A and 40B. When the holder members 40A and 40B are combined, a single circular first holder 40 is obtained. The first holder 40 has a strength that can withstand the pulling force.
At the center of the semicircular outer periphery of the holder member 40A, a cylindrical engaging portion 41a protruding outward is formed.
A large diameter portion 42a and a small diameter portion 43a are formed inside the semicircular shape of the holder member 40A. A connecting surface 421a is formed on the large diameter portion 42a. Connection surfaces 431a and 432a are formed in the small diameter portion 43a. The connection surface 421a and the connection surface 432a are formed in parallel, and a connection surface 431a is formed vertically therebetween. Steps are formed by the connection surfaces 421a, 431a, and 432a.
The small diameter portion 43a has an annular shape similar to that of the mounting groove 4f.
Since the holder member 40B has the same configuration as the holder member 40A, description of the holder member 40B is omitted.

<Overall configuration of seal member>
FIG. 18 is a plan view of the seal member 6 shown in FIG. FIG. 19 is a cross-sectional view of the seal member 6 shown in FIG.
The seal member 6 is made of a hard and corrosion-resistant resin such as PFA, and includes a main body portion 11, a grip portion 12, and an overhang portion 13.

  As shown in FIG.18 and FIG.19, the main-body part 11 is formed in the short cylindrical shape. The main body 11 is formed with annular grooves 11a and 11b fitted to the annular protrusions 4b and 5b of the first and second connection parts 4 and 5 on both end faces, forming an H-shaped cross section, and a cross-sectionally line-symmetrical shape with right and left. It has become. As shown in FIG. 14, the annular grooves 11 a and 11 b are formed so that the groove width is the same as or slightly larger than the width dimension of the annular protrusions 4 b and 5 b of the first and second connecting portions 4 and 5. In the annular grooves 11a and 11b, press-fitting allowances 11c and 11d are respectively provided on the inner inner wall and the outer inner wall on the back side from the opening, and the groove width on the back side is made smaller than the opening of the annular grooves 11a and 11b. The seal member 6 is provided with an inclination on the inner peripheral surface and the outer peripheral surface so as to correspond to the inclination provided on the bottom of the seal grooves 4a and 5a (see FIG. 13), and the annular grooves 11a and 11b of the seal member 6 are When the annular protrusions 4b and 5b of the first and second connection portions 4 and 5 are press-fitted, the width of the annular grooves 11a and 11b of the seal member 6 is widened to prevent the sealing force from being reduced.

    As shown in FIGS. 18 and 19, the overhanging portion 13 protrudes outward from the outer peripheral surface of the seal member 6. The overhang portion 13 is formed in an annular shape along the outer peripheral surface of the main body portion 11. A plurality of gripping portions 12 are integrally connected to the outer edge portion of the overhang portion 13 with a predetermined interval. Each gripping portion 12 is provided with a hooking portion 12a that hooks and engages with the convex portions 4g and 5g of the first and second connecting portions 4 and 5 so as to protrude inward (toward the center). In FIG. 19, the outer peripheral line of the grip portion 12 is omitted in order to make the seal member 6 easy to see.

<Overall configuration of connection mechanism>
FIG. 1 shows the connection mechanism 21. FIG. 7 illustrates a part of the connection mechanism 21.
As shown in FIG. 1, the connection mechanism 21 includes a mechanism main body 22 and an arm 23. The mechanism main body 22 includes a head 24 and a movable handle 25.
The arm 23 is made of a rigid metal (such as stainless steel) in order to prevent deformation when transmitting force. The arm 23 includes a first arm 26 and a second arm 27.
As shown in FIG. 7, the 1st arm 26 is flat form, The front-end | tip is divided into two forks by the U-shaped notch. Furthermore, hook portions 26a and 26b each formed into a semi-cylindrical inner U-shape are formed at the two tip portions.
The second arm 27 has a symmetrical shape with the first arm 26. The 2nd arm 27 is flat form, and the front-end | tip is divided into two forks by the U-shaped notch. Furthermore, hook portions 27a and 27b each formed in a semi-cylindrical inner U-shape are formed at the two tip portions.
About the structure inside the head 24, since it uses a prior art, description is omitted.

<Overall configuration of connecting member>
FIG. 22 shows an exploded view of the connecting member 70. FIG. 23 shows a combination of the first divided piece and the second divided piece constituting the connecting member 70 shown in FIG. FIG. 24 is an external perspective view of the connecting member 70 and the attracting member shown in FIG. FIG. 25 shows a state in which an attracting member is attached to the connecting member 70 shown in FIG. FIG. 26 shows a state in which the connecting member 70 shown in FIG. 22 is further tightened with an attracting member.
As shown in FIG. 22, the connecting member 70 is provided with a first divided piece 70A and a second divided piece 70B separately. The first and second divided pieces 70A and 70B are arranged so that the extending portions 71A and 71B are brought into contact with each other without gaps when the first fluid device 2 and the second fluid device 3 are attracted. Inclinations are provided on the surfaces of the 71B that are brought into contact with each other. Therefore, in the first and second divided pieces 70A and 70B, a gap S1 having a predetermined angle is provided between the extending portions 71A and 71B at the time of initial assembly shown in FIG. As shown in FIGS. 22 and 23, in the extending portions 71A and 71B, mounting holes 72A and 72B (an example of “mounting portion”) for mounting the attracting member 80 are formed in a square shape.

  As shown in FIG. 22, in the first divided piece 70A, a pair of support walls 73A are provided in parallel to the opposite side of the extending portion 71A, and a rotating shaft 75A is provided between the support walls 73A. On the other hand, the second divided piece 70B is provided with a U-shaped rotation engaging portion 76B on the opposite side to the extending portion 71B. The rotation engaging portion 76B is open on the opposite side to the divided surface where the second divided piece 71B contacts the first divided piece 71A. The opening of the rotation engaging portion 76B has a width smaller than the diameter of the rotation shaft 75A. In the connecting member 70, a rotating connecting portion 77 is configured by press-fitting and inserting the rotating shaft 75A into the rotating engaging portion 76B. In such a connecting member 70, since the rotating shaft 75A is unlikely to be detached from the rotation engaging portion 76B, the first divided piece 70A and the second divided piece 70B are integrally connected without being separated.

  As shown in FIG. 24, the attracting member 80 includes a resin clip member 81 and a resin nut member 82. The attracting member 80 is configured to be attached to the connecting member 70 by one-touch by pushing the clip member 81 into the mounting holes 72 </ b> A and 72 </ b> B of the connecting member 70.

  Next, a procedure for connecting the first fluid device 2 and the second fluid device 3 will be described. The connection procedure is performed by the following five steps.

<First step>
FIG. 2 is an external perspective view of the first fluid device 2, the second fluid device 3, and the seal member 6. FIG. 3 is an external perspective view showing a state where the annular protrusion 4 b of the first fluid device 2 of FIG. 2 is temporarily connected to the annular groove 11 a of the seal member 6. FIG. 4 is an external perspective view showing a state where the annular protrusion 5 b of the second fluid device 3 of FIG. 3 is temporarily connected to the annular groove 11 b of the seal member 6. FIG. 13 shows a cross-sectional view of FIG. FIG. 14 shows a cross-sectional view of FIG.
As shown in FIG. 2, the 1st fluid apparatus 2, the 2nd fluid apparatus 3, and the sealing member 6 are prepared.
Next, as shown in FIG. 14, for example, the hook portion 12 a of the seal member 6 is hooked on the convex portion 4 g of the first connection portion 4, and the seal member 6 is mounted on the outer periphery of the first connection portion 4. . Since the hook portion 12a is easily elastically deformed outward, it can be easily attached to the convex portion 4g of the first connection portion 4.
At this time, the annular protrusion 4b of the first connection part 4 is inserted until the tip part comes into contact with the inlets of the press-fitting allowances 11c and 11d of the annular groove 11a of the seal member 6.
Then, the second connection unit 5 performs the same operation as the first connection unit 4. That is, the hook portion 12 a of the seal member 6 is hooked on the convex portion 5 g of the second connection portion 5, and the seal member 6 is mounted on the outer periphery of the second connection portion 5 so as not to drop off. Since the hooking portion 12a is easily elastically deformed outward, it can be easily attached to the convex portion 5g of the second connection portion 5.
At this time, the annular protrusion 5b of the second connection part 5 is inserted until the tip part comes into contact with the inlets of the press-fitting allowances 11c and 11d of the annular groove 11b of the seal member 6.

<Second step>
FIG. 5 is an external perspective view showing a state before the second holder 50 is joined to the state shown in FIG. 4 and the first holder 40 is joined. FIG. 6 is an external perspective view showing a state in which the first holder 40 and the second holder 50 are joined to the state of FIG. FIG. 15 is a cross-sectional view of a state in which hook portions 26a, 26b, 27a, and 27b described later in FIG. 6 are attached to the engaging portions 41a, 41b, 51a, and 51b.
As shown in FIG. 5, the holder members 40 </ b> A and 40 </ b> B are fitted with the first fluid device 2 in the state of FIG. 4. When the first holder 40 and the second holder 50 are fitted, the state shown in FIG. 6 is obtained.
As shown in the cross-sectional view of FIG. 15, the small diameter portion 43a of the holder member 40A has the same annular shape as the mounting groove 4f of the first fluid device 2, and therefore can be reliably fitted.
The holder member 40A can be integrated with the first connecting portion 4 by the small-diameter portion 43a being securely fitted to the mounting groove 4f, so that the holder member 40A can act integrally.
However, since the holder member 40A is a detachable member, it is detached when pulled in the vertical direction.

<Third step>
FIG. 7 is an external perspective view showing a state in which the first arm 26 and the second arm 27 are brought close to the state of FIG. 8 is an external perspective view showing a state in which the hook portions 26a, 26b, 27a, and 27b of the first arm 26 and the second arm 27 are engaged with the engaging portions 41a, 41b, 51a, and 51b in the state of FIG. The figure is shown.
In the state of FIG. 6, the first arm 26 and the second arm 27 of the connection mechanism 21 are brought close to the first holder 40 and the second holder 50 as shown in FIG. Then, the hook portion 26a of the first arm 26 is fitted into the engaging portion 41a, and the hook portion 26b is fitted into the engaging portion 41b. The hook portion 27a of the second arm 27 is engaged with the engaging portion 51a, and the hook portion 27b is engaged with the engaging portion 51b (not shown). FIG. 8 shows a state in which the first arm 26 and the second arm 27 are fitted to the first holder 40 and the second holder 50.
A plan view of the state of FIG. 8 is shown in FIG.
At this time, as shown in FIG. 15, the width W1 between the end surface side inner surfaces 4d and 5d of the first and second mounting grooves 4c and 5c is equal to the width of the holding groove 74A of the connecting member 70 (first protrusion). The width between 78A and the second protrusion 79A) is greater than W2, and the connecting member 70 cannot be attached to the first and second connecting portions 4 and 5.

<4th process>
FIG. 9 is an external perspective view showing a state in which the second arm 27 is brought closer to the first arm 26 side from the state of FIG. FIG. 15 shows a cross-sectional view of FIG.
In order to bring the second arm 27 closer to the first arm 26 from the state shown in FIG. 8, the movable handle 25 shown in FIG. Thereby, the second arm 27 can be brought closer to the first arm 26 side by a gear inside the head 24 (not shown).
As shown in FIG. 15, by bringing the second arm 27 closer, the first holder 40 is engaged via the engaging portions 41a, 41b, 51a, 51b engaged with the first arm 26 and the second arm 27. The 2nd holder 50, the 1st fluid apparatus 2, and the 2nd fluid apparatus 3 approach. When the first holder 40, the second holder 50, the first fluid device 2, and the second fluid device 3 approach each other, the first and second connection portions 4 and 5 are end surfaces of the first and second mounting grooves 4f and 5f. The side inner surfaces 4i and 5i are continuously pressurized along the axis of the flow paths 4h and 5h. As a result, the annular protrusions 4b and 5b of the first and second connecting portions 4 and 5 are uniformly press-fitted in the circumferential direction into the annular grooves 11a and 11b of the seal member 6, and the press-fitting margins 11c and 11d are crushed and press-fitted. can do. By crushing the press-fitting allowances 11c and 11d, it is possible to secure the seal and to prevent the sealing force from being lowered.

When the second holder 50 is moved closer to the first holder 40 side by the second arm 27, the first holder 40 and the second holder 50 are attracted to each other via the engaging portions 41a, 41b, 51a, 51b. Power is generated.
As shown in FIG. 15, the joining surfaces 431 a and 431 b of the small diameter portions 43 a and 43 b of the first holder 40 are joined over the entire circumference of the inner surface 4 i of the connection portion 4 of the first fluid device 2. Further, the connection surfaces 531a and 531b of the small diameter portions 53a and 53b of the second holder 50 are joined over the entire circumference of the inner surface 5i of the connection portion 5 of the second fluid device 3.
Therefore, the force generated from the first arm 26 to the engaging portions 41a and 41b applies a force uniformly over the entire circumference of the inner surface 4i of the connecting portion 4 via the joint surfaces 431a and 431b of the small diameter portions 43a and 43b. be able to. Further, the force generated by the engaging portions 51a and 51b from the second arm 27 applies a force uniformly over the entire circumference of the inner side surface 5i of the connecting portion 5 via the joint surfaces 531a and 531b of the small diameter portions 53a and 53b. Can do.
Since a force can be applied uniformly over the entire circumference of the inner side surface 4i of the connecting portion 4, a necessary force can be applied to press-fit the annular protrusion 4b into the press-fitting margins 11c and 11d of the annular groove 11a. . Therefore, the annular protrusion 4b can be press-fitted into the press-fitting margins 11c and 11d over the entire circumference.
In addition, since a force can be applied uniformly over the entire circumference of the inner surface 5i of the connecting portion 5, as a result, a necessary force sufficient to press-fit the annular protrusion 5b into the press-fitting margins 11c and 11d of the annular groove 11b is applied. Can do. Therefore, the annular protrusion 5b can be press-fitted into the press-fitting margins 11c and 11d over the entire circumference.

Since the hook portions 26a, 26b, 27a, and 27b are formed in an inner U shape, they can be engaged with the engaging portions 41a, 41b, 51a, and 51b. Therefore, since it does not suddenly disengage from the engaging portions 41a, 41b, 51a, 51b during work, the work can be performed reliably.
Further, the hook portions 26a, 26b, 27a, 27b are inwardly U-shaped, and the engaging portions 41a, 41b, 51a, 51b are cylindrical, so that when the second arm 27 approaches the first arm 26 In addition, the hook portions 26a, 26b, 27a, and 27b can always come into contact with the centers of the engaging portions 41a, 41b, 51a, and 51b. That is, since the hook portions 26a, 26b, 27a, 27b and the engaging portions 41a, 41b, 51a, 51b are not fixed, the place where the force abuts on the central portion changes.
The hook portions 26a, 26b, 27a, 27b are engaged by the engaging portions 41a, 41b, 51a, 51b, and the force balance can be kept constant by positioning the engaging portion at the center of the holder. As described above, the force applied by the first arm 26 and the second arm 27 to the engaging portions 41a, 41b, 51a, 51b is via the connection surfaces 431a, 431b, 531a, 531b of the small diameter portions 43a, 43b, 53a, 53b. The force can always be applied uniformly over the entire circumference of the inner side surfaces 4i and 5i of the connecting portions 4 and 5.

As shown in FIG. 17, the holder member 40 </ b> A can be integrated with the first connection portion 4 by the small-diameter portion 43 a being securely fitted to the mounting groove 4 f, and can act integrally.
When acting integrally, as shown in FIG. 17, the connection surface 421a of the large diameter portion 42a of the holder member 40A is in contact with the connection portion 4, so that the engagement portion 41a is moved to the second holder 50 side. Even if a force is applied, the engaging portion 41a is not bent and the force is not dispersed. That is, when a force is applied to the cylindrical engaging portion 41a, the engaging portion 41a is bent by a lateral force unless there is a base such as the large-diameter portion 42a of the holder member 40A. It is.
Therefore, the presence of the large-diameter portion 42a of the holder member 40A serving as a base does not cause the engaging portion 41a to bend and distribute the force.

  When the width W1 is larger than the width W2, the amount by which the annular protrusions 4b and 5b are press-fitted into the annular grooves 11a and 11b is small, and a predetermined sealing force is not obtained. In this case, the movable handle 25 is further moved closer to the head 24 and the second arm 27 is moved closer to the first arm 26.

<5th process>
FIG. 10 is an external perspective view showing a state in which the connecting member 70 is opened in the state of FIG. 9 so as to be sandwiched from above the seal member 6. FIG. 11 shows an external perspective view of the state shown in FIG. 10 in which the locking claw 711A of the first divided piece 70A is inserted into the insertion hole 711B of the second divided piece 70B. FIG. 12 shows an external perspective view of the state in which the attracting member 80 is mounted in the mounting holes 72A and 72B in the state of FIG.
When the first fluid device 2 and the second fluid device 3 shown in FIGS. 9 and 16 are in a state of being pulled, that is, between the end surface side inner side surfaces 4d and 5d of the first and second mounting grooves 4c and 5c. When the width W1 is the same as the width W2, the connecting member 70 is opened so as to be sandwiched from above the seal member 6.
Specifically, as shown in FIGS. 22 and 23, the connecting member 70 press-fits the rotation shaft 75A into the opening of the rotation engaging portion 76B, so that the first and second divided pieces 70A and 70B are connected to each other. Integrated. Then, by covering the sealing member 6 so as to sandwich the sealing member 6, as shown by an arrow in FIG. 23, the first divided piece 70A is rotated with respect to the second divided piece 70B with the rotation connecting portion 77 as a fulcrum. Then, the locking claw 711A is inserted into the insertion hole 711B while being bent. As shown in FIGS. 11 and 23, the locking claw 711A is restored when it passes through the insertion hole 711B and hooks the distal end 712A on the outer periphery of the opening of the insertion hole 711B. Thereby, both ends of the first and second divided pieces 70A and 70B are connected by the rotation connecting portion 77 and the locking claw 711A. At this time, the connecting member 70 is attached so as to sandwich the seal member 6 with a gap S1 between the extending portions 71A and 71B.

  Next, as shown in FIGS. 12, 24, and 25, an attracting member 80 is attached to the connecting member 70 in advance during initial assembly. The attracting member 80 is inserted toward the mounting hole 72A with the lower ends of the pair of flexible pieces 81b, 81b aligned with the mounting hole 72A. At this time, the taper formed on the outer surface of the locking portions 81c and 81c is pressed against the inner wall of the mounting hole 72A, and the flexible pieces 81b and 81b bend toward the groove 81a. When the locking portions 81c and 81c pass through the mounting holes 72A and 72B and the pressing force from the extending portions 71A and 71B is released, the flexible pieces 81b and 81b are restored to lock the locking portions 81c and 81c. Hook the extension member 71B to make it difficult for the attracting member 80 to be removed from the mounting holes 72A and 72B.

  Therefore, in the fluid device connection structure, if the clip member 81 of the attracting member 80 is pushed into the mounting holes 72A and 72B, the attracting member 80 can be easily attached to the connecting member 70 with a single touch, and thus workability is good. In particular, when the fluid device unit is assembled in a wafer cleaning apparatus including a large number of fluid devices, for example, the fluid device unit may be disposed on the back side of other fluid devices. Even in this case, the attracting member 80 can be easily mounted on the connecting member 70 by simply pushing it into the mounting holes 72A and 72B without using a tool.

  Here, as for the connection member 70, the rotation engaging part 76B is opened in the opposite direction to the division surface of the 2nd division | segmentation piece 70B. Therefore, even if the connecting member 70 receives a force in the direction of separating the first and second divided pieces 70A and 70B due to thermal deformation or fluid pressure of the first fluid device 2 and the second fluid device 3, the rotating shaft 75A Is supported in the opposite direction by the rotation engagement portion 76B and does not come off the rotation engagement portion 76B.

After the connecting member 70 is fixed by the attracting member 80, the hook portions 26a and 26b of the first arm 26 are removed from the engaging portions 41a and 41b. Further, the hook portions 27a and 27b of the second arm 7 are detached from the engaging portions 51a and 51b.
Then, the 1st holder 40 and the 2nd holder 50 are removed from the 1st fluid apparatus 2 and the 2nd fluid apparatus 3, and all processes are complete | finished.
As described above, the connection process between the first fluid device 2 and the second fluid device 3 is completed through all the steps.

As described above, the connection tool of the first embodiment has a semi-cylindrical shape that fits into the mounting groove 4f, and has a holder engaging portion at the uppermost part of the circumference of the semi-cylindrical shape. Using a pair of first holders 40, a pair of second holders 50 having a semi-cylindrical shape that fits in the attachment groove 5f and having a holder engaging portion at the uppermost part of the circumference of the semi-cylindrical shape. The use of the first arm 26 and the second arm 27 of the connection mechanism is formed with two arm engaging members 26a, 26b, 27a, 27b that can be engaged with the holder engaging portion, By engaging the first arm 26 and the second arm 27 of the connection mechanism with the first holder 40 and the second holder 50 and bringing the first arm 26 and the second arm 27 close to each other, the first fluid device 2 and the second arm 27 are connected. 2 It has a configuration that press-fits the fluid device 3 into the seal member 6 Therefore, when the first fluid device 2 and the second fluid device 3 are connected, the first holder 40 and the second holder 50 are fitted with the mounting groove 4f and the mounting groove 5f over the entire circumference. When the first arm 26 and the second arm 27 move the first holder 40 and the second holder 50, a force can be applied over the entire circumference of the first holder 40 and the second holder 50. Therefore, a uniform force can be applied to the entire circumference of the press-fitting allowances 11c and 11d of the seal member 6, and the annular protrusions 4b and 5b of the connecting portions 4 and 5 can be press-fitted into the press-fitting allowances 11c and 11d of the seal member 6. The sealing member 6 can be reliably sealed over the entire circumference.
Moreover, since a uniform force can be applied to the entire circumference of the first holder 40 and the second holder 50, the first fluid device 2 and the second fluid device 3 can be moved in parallel.

Since the hook portions 26a, 26b, 27a, and 27b are formed in an inner U shape, they can be engaged with the engaging portions 41a, 41b, 51a, and 51b. Therefore, since it does not suddenly disengage from the engaging portions 41a, 41b, 51a, 51b during work, the work can be performed reliably.
Further, the hook portions 26a, 26b, 27a, 27b are inwardly U-shaped, and the engaging portions 41a, 41b, 51a, 51b are cylindrical, so that when the second arm 27 approaches the first arm 26 In addition, the hook portions 26a, 26b, 27a, and 27b can always come into contact with the centers of the engaging portions 41a, 41b, 51a, and 51b. That is, since the hook portions 26a, 26b, 27a, 27b and the engaging portions 41a, 41b, 51a, 51b are not fixed, the place where the force abuts on the central portion changes.
The hook portions 26a, 26b, 27a, 27b are always engaged by the engaging portions 41a, 41b, 51a, 51b, and the force balance can be kept constant because the engaging portion is located at the center of the holder, As a result, the force applied by the first arm 26 and the second arm 27 to the engaging portions 41a, 41b, 51a, 51b is via the connection surfaces 431a, 431b, 531a, 531b of the small diameter portions 43a, 43b, 53a, 53b. Thus, it is possible to always apply a force uniformly over the entire circumference of the inner side surfaces 4i and 5i of the connecting portions 4 and 5.

  Further, the first holder 40 is in contact with the first fluid device 2 on the circumferential surface, so that force is uniformly applied to the entire circumference, and the second holder 50 is circumferential with the second fluid device 50. When the first fluidic device 40 and the second fluidic device 50 are pulled together by contacting the surfaces, the sealing member can be pulled while maintaining the parallelism of the connecting surfaces. A uniform force can be applied to the entire circumference of the press-fitting allowances 11c and 11d, and the annular protrusion 4b of the connecting portion 4 and the annular protrusion 5b of the connecting portion 5 can be press-fitted into the press-fit allowances 11c and 11d of the seal member 6. And can be surely sealed.

(Second Embodiment)
A second embodiment will be described with reference to FIGS. 34 and 35.
FIG. 34 is an external perspective view of the connection mechanism 150 according to the second embodiment. FIG. 35 is a plan view in which FIG. 34 is omitted, and a part of the screw 152 and the rod 156 is shown as a cross-sectional view for explaining the movable structure. Since the seal member 6, the first fluid device 2, and the second fluid device 3 are the same as those in the first embodiment, the description thereof is omitted in the second embodiment.
The connection mechanism 150 includes a handle 151, a screw 152, and a main body 155. The handle 151 and the screw 152 are joined, and when the handle 151 is rotated, the screw 152 is also rotated integrally. The screw 152 is threaded with a male screw 152a. The screw 152 is screwed with the main body 155. Specifically, since the female screw 155a is screwed into the main body 155, the male screw 152a is screwed with the female screw 155a.
One end of the rod 156 is in sliding contact with the second arm 154, and the other end is fixed to the first arm 153. The second arm 156 can move linearly by being in sliding contact with the rod 156. A locking portion 156 a is formed on the rod 156 on the first arm 153 side.
As shown in FIG. 34, the main body 155 has a substantially bell shape, and a first arm 153 is fixed to a portion corresponding to the bottom of the bell shape. The bell shape of the main body 155 includes a groove portion 155 d in a portion surrounded by the inner portions 155 a, 155 b, 155 c and the first arm 153. A second arm 154 is slidably inserted in the groove portion 155d.
An arm engaging portion that can be engaged with the holder engaging portion can be formed at the distal ends of the first arm 153 and the second arm 154.

The operation and effect of the second embodiment will be described.
The engagement portion 153a of the first arm 153 is attached to the attachment groove 5f of the second fluid device 3, and the engagement portion 154a of the second arm 154 is attached to the attachment groove 4f of the first fluid device 2.
Next, the handle 151 is rotated clockwise. When the handle 151 is rotated, the screw 152 is also rotated integrally, and the screw 152 approaches the first arm 153. Since the screw 152 and the second arm 154 are joined, when the screw 152 approaches the first arm 153, the second arm 154 also approaches the first arm 153. When the second arm 154 approaches the first arm 153, the second arm 154 is in sliding contact with the rod 156, and thus can be guided and moved in parallel by the rod 156. Further, since the second arm 154 is inserted in the groove portion 155d, it can move in parallel.
By sliding the second arm 154 in parallel with the first arm 153, the connection surface of the connection portion 4 of the first fluid device 2 and the connection surface of the connection portion 5 of the second fluid device 3 can be drawn in parallel. A uniform force can be applied to the entire circumference of the press-fitting allowances 11c and 11d of the seal member 6, and the annular protrusions 4b and 5b of the connecting portions 4 and 5 can be press-fitted into the press-fitting allowances 11c and 11d of the seal member 6. It can be surely sealed.
Since the locking portion 156a is formed on the rod 156, when the second arm 154 is guided by the rod 156, the second arm 154 is locked by the locking portion 156a. Therefore, an excessive force is not applied between the second arm 154 and the first arm 153, and the seal portion and its surroundings are not damaged.

Compared with the connection mechanism 21 of the first embodiment, the connection mechanism 150 is a handle 151 that moves the second arm 154 in the second embodiment. is there. Since the connection mechanism 21 converts the force that moves the movable handle 25 toward the head 24 into the force that causes the second arm 27 to approach the first arm 26, a plurality of gears are required inside the main body 22. Must be big. On the other hand, since the connection mechanism 150 can convert the thrust for rotating the handle 151 into the force for moving the second arm 154 closer to the first arm 153 as it is, the connection mechanism 150 has a simple structure and the connection mechanism 150 can be made small. .
Accordingly, since the connection mechanism 150 is smaller than the connection mechanism 21, the connection mechanism 150 connects the first fluid device 2 and the second fluid device 3 even in a narrow place where the connection mechanism 21 cannot be used. be able to.
An arm engagement portion that can be engaged with the holder engagement portion can be formed at the distal ends of the second arm 154 and the first arm 153.

(Third embodiment)
The second embodiment will be described with reference to FIGS.
For example, the connection mechanism can be a connection mechanism 501 shown in FIG.
FIG. 36 is an external perspective view of the connection mechanism 501.
The connection mechanism 501 is made of a rigid metal (stainless steel or the like) to prevent deformation when transmitting force. The connection mechanism 501 couples two handles 516A and 516B at an intersection 517 so as to be rotatable. A support portion 519b of the pressure plate 519 is rotatably held on each support shaft 518. The pressure plate 519 is formed with a U-shaped portion 519 a that is fitted into the first and second attachment grooves 4 f and 5 f of the first and second connection portions 4 and 5. Note that the handles 516A and 516B have a crossing portion rather than the length between each support shaft 518 and the crossing portion 517 in order to facilitate the pulling of the first and second connecting portions 4 and 5. The length from 517 to the grip portion is increased.
An arm engagement portion that can be engaged with the holder engagement portion can also be formed at the distal end portion of the U-shaped portion 519a.

FIG. 37 shows a drawing method by the connection mechanism 501.
As shown in FIG. 37, the first and second connection portions 4 and 5 are inserted into the U-shaped portions 519a and 519a formed in the pressure plates 519 and 519 of the connection mechanism 501, and the pressure plates 519 and 519 are inserted. It arrange | positions in the 1st and 2nd attachment grooves 4f and 5f.
Therefore, the handles 516A and 516B of the connection mechanism 501 are gripped, and the first and second connection portions 4 and 5 are pressed and pulled toward each other as indicated by arrows in the drawing. At this time, the pressure plates 519 and 519 rotate around the support shafts 518 and 518. In addition, the end surface side inner surfaces 4i, 5i of the first and second mounting grooves 4f, 5f are parallel to the end surfaces of the first and second connection portions 4, 5 (perpendicular to the axes of the flow paths 4h, 5h). It is. For this reason, the first and second connection portions 4 and 5 are configured so that the pressure plates 519 and 519 have the end surface side inner side surfaces 4i and 5i of the first and second mounting grooves 4f and 5f along the axis of the flow paths 4h and 5h. Continue to be pressurized. As a result, the annular protrusions 4b and 5b of the first and second connecting portions 4 and 5 are uniformly pressed into the annular grooves 11a and 11b of the seal member 6 in the circumferential direction.

Since the pressure plates 519 and 519 are rotatably attached to the support shafts 518 and 518, the pressure plates 519 and 519 rotate around the support shafts 518 and 518 at the time of pressurization. Therefore, the pressure plate 519 and the pressure plate 519 can be pressed while keeping parallel.
Therefore, a uniform force can be applied to the entire circumference of the annular grooves 11a and 11b of the seal member 6, and the annular protrusions 4b and 5b of the first and second connection portions 4 and 5 are inserted into the press-fitting margins 11c and 11d of the seal member 6. The seal member 6 can be surely sealed over the entire circumference. In addition, the first fluid device 2 and the second fluid device 3 can be moved in parallel.

Note that the present invention is not limited to the above-described embodiment, and various applications are possible.
For example, if the first arm 26 and the second arm 27 in the first embodiment are not in the initial position, the first arm is attached to the attachment groove 4f or the first holder 40, and the second arm is attached to the attachment groove 5f. 2 It is made impossible to engage with the holder 50. In addition, the second embodiment and the third embodiment can also be diverted.
The annular protrusion 4b of the first connection portion 4 of the first fluid device 2 is inserted into the annular groove 11a formed in the seal member 6, and the second connection of the second fluid device 3 is inserted into the annular groove 11b formed in the seal member 6. The annular protrusion 5b of the portion 5 is inserted until it comes into contact with the inlets of the press-fitting margins 11c and 11d. The state inserted until it contacts the inlets of the press-fitting allowances 11c, 11d is the initial position, and if not inserted in the initial position, the first arm is attached to the mounting groove 4f or the first holder 40, and the second arm Cannot be engaged with the mounting groove 5 f or the second holder 50.
If the first arm and the second arm can be engaged with the mounting groove or the holder and the second arm can be brought close to the first arm without being in the initial position, the shaft is difficult to fit and the seal is There is a possibility that the member 6 is damaged. For example, a part of the annular projection 4b on the circumference is inserted into the annular groove 11b of the seal member 6 and inserted until the press-fitting allowances 11c and 11d, but the other part on the diagonal line is the seal member 6 When a force is applied to the seal member 6 when the seal member 6 is not in the initial position inserted into the annular groove 11a until the press-fitting allowances 11c and 11d are inserted, stress concentration occurs in only a part of the press-fitting allowances 11c and 11d. May be deformed or scratched. Moreover, the case where it cannot press-fit into the press-fitting allowances 11c and 11d by the uneven distribution of force arises.
On the other hand, if the first arm and the second arm cannot be engaged with the mounting groove or the holder unless they are in the initial position, the second arm can be brought closer to the first arm. In addition, since no force can be applied to the seal member 6, deformation or damage of the press-fitting allowances 11c and 11d can be prevented. Further, the annular protrusions 4b and 5b of the connecting portions 4 and 5 can be press-fitted into the press-fitting allowances 11c and 11d of the seal member 6, and can be reliably sealed.

If the first arm 26 and the second arm 27 are not in the initial positions, the first arm is engaged with the mounting groove 4f or the first holder 40, and the second arm is engaged with the mounting groove 5f or the second holder 50. If the first arm and the second arm are not fully open, the first arm is attached to the first holder or the mounting groove 4f, and the second arm is attached to the first holder or the attachment. It must be determined that it cannot be engaged with the groove 5f. If the first arm and the second arm can be engaged with the holder or the mounting groove with the first arm and the second arm opened, the first arm 26 can be engaged by force. This is because the press-fitting allowances 11c and 11d are deformed or damaged.
Therefore, the first arm and the second arm replace the first arm and the second arm in accordance with the sizes of the first fluid device and the second fluid device. If the first arm and the second arm are replaced, the first arm and the second arm cannot be engaged unless the first arm and the second arm are fully opened. This is because it cannot be engaged with the mounting groove or the holder.
FIG. 30 shows an embodiment in which the first fluid device 302 and the second fluid device 303 have large diameters. FIG. 31 shows an embodiment where the first fluid device 402 and the second fluid device 403 have a small diameter.
When the first fluid device 302 and the second fluid device 303 have a large diameter, a first arm 316 and a second arm 315 for large diameter as shown in FIG. 30 are used. When the first arm 316 and the second arm 315 are fully opened, they can engage with the attachment groove 302f of the first fluid device 302 and the attachment groove 303f of the second fluid device 303.

However, when the first fluid device 402 and the second fluid device 403 have a small diameter as shown in FIG. 31, the first arm 316 and the second arm 315 for large diameter shown in FIG. Cannot be used because of their different sizes. In addition, in the initial position, the second arm and the first arm cannot be engaged with the mounting grooves 402f and 403f unless the first arm and the second arm are fully opened. In the case of the large-diameter first arm 316 and the second arm 315 shown in the figure, they cannot be engaged with the mounting grooves 402f and 403f.
Therefore, in the case of the small diameter, as shown in FIG. 31, it is possible to replace the first arm 416 and the second arm 415 corresponding to the small diameter. The engaging part 415a and the base part 415b of the second arm 415 are formed in parallel, and the intermediate part 415c is joined to the engaging part 415a and the base part 415b at right angles.
By shifting the positions of the engaging portion 415a and the root portion 415b, the first fluid device 402 and the second fluid device 403 can be connected by simply changing the arm without changing the arm even when the diameter is small. . Further, by shifting the positions of the engaging portion 415a and the root portion 415b, the second arm 415 can be brought into the initial position when the second arm 415 is fully opened. Therefore, it can be engaged by making the 2nd arm 415 and the 1st arm 416 fully open. When the second arm 415 and the first arm 416 are fully opened, it is not necessary to adjust the distance between the mounting grooves 402f and 403f, so that the second arm is brought closer to the first arm in the temporarily inserted state. Can be reliably sealed.
In addition, by preparing the first arm and the second arm that can be attached in correspondence with the first fluid device and the second fluid device having different sizes for each connection port diameter, the mechanism main body of the connection mechanism can be used as it is. It is possible to correspond to the connection of the first fluid device and the second fluid device having a large size.

FIG. 32 shows a view in which the locking member 90 is attached to the second arm 91 and the first arm 92. FIG. 33 shows a view in which the second arm 91 is moved, and the second arm 91 and the first arm 92 are locked by the locking member 90.
A locking member 90 is attached to the inner side of the second arm 91 and the first arm 92. The locking member 90 is for preventing the first arm 92 and the second arm 91 from approaching a predetermined distance or more. Since the locking member 90 is attached, the second arm 91 and the first arm 92 are in contact with each other even when the second arm 91 is moved closer to the first arm 92 side. No more power is added.
Therefore, an excessive force is not partially applied between the second arm 91 and the first arm 92, and the seal portion and its periphery are not damaged.

The front view of the connection mechanism 21 is shown. The external appearance perspective view before the connection of the 1st fluid apparatus 2, the 2nd fluid apparatus 3, and the sealing member 6 is shown. The external appearance perspective view of the state which temporarily connected the sealing member 6 to the 1st fluid apparatus 2 of FIG. 2 is shown. The external appearance perspective view of the state which temporarily connected the 2nd fluid apparatus 3 to the sealing member 6 of FIG. 3 is shown. The external perspective view showing the state before joining the 2nd holder 50 and joining the 1st holder 40 in the state of FIG. 4 is shown. FIG. 4 is an external perspective view showing a state in which the first holder 40 and the second holder 50 are joined to each other. FIG. 6 is an external perspective view showing a state in which the first arm 26 and the second arm 27 are brought close to the state of FIG. 6 is an external perspective view showing a state in which the hook portions 26a, 26b, 27a, 27b of the first arm 26 and the second arm 27 are engaged with the engaging portions 41a, 41b, 51a, 51b. The external appearance perspective view showing the state which made the 2nd arm 27 approach the 1st arm 26 side from the state of FIG. 8 is shown. FIG. 10 is an external perspective view showing a state in which the connecting member 70 is opened in the state shown in FIG. 9 so as to be sandwiched from above the seal member 6. FIG. 10 shows an external perspective view of the state in which the locking claw 711A of the first divided piece 70A is inserted into the insertion hole 711B of the second divided piece 70B. FIG. 11 shows an external perspective view of the state in which the attracting member 80 is mounted in the mounting holes 72A and 72B in the state of FIG. Sectional drawing of the state of FIG. 2 is shown. Sectional drawing of the state of FIG. 4 is shown. FIG. 9 is a cross-sectional view of the state of FIG. Sectional drawing of the state of FIG. 9 is shown. The enlarged view of L of FIG. 15 is shown. The top view of the sealing member 6 shown in FIG. 2 is shown. The AA sectional view of seal member 6 shown in Drawing 18 is shown. FIG. 9 is a plan view of FIG. 8. The enlarged view of the 1st holder 40 shown in FIG. 5 is shown. The exploded view of the connection member 70 used for a fluid apparatus connection structure is shown. The figure which combined the 1st division | segmentation piece and 2nd division | segmentation piece which comprise the connection member 70 shown in FIG. 22 is shown. The external appearance perspective view of the connection member 70 and the drawing member shown in FIG. 22 is shown. The figure of the state which attached the attracting member to the connection member 70 shown in FIG. The figure of the state which retightened the connection member 70 shown in FIG. 22 with the attracting member is shown. The front view of the connection mechanism 201 which is a prior art is shown. The 1st fluid apparatus 120, the 2nd fluid apparatus 130, and the sealing member 6 are shown. The side view which extracted the front-end | tip part of the 2nd arm 205 is shown. The Example in case the 1st fluid apparatus 2 and the 2nd fluid apparatus 3 are large diameter is shown. The Example in case the 1st fluid apparatus 2 and the 2nd fluid apparatus 3 are small diameter is shown. The figure which attached the locking member 90 to the 2nd arm 91 and the 1st arm 92 is shown. The figure which made the 2nd arm 91 approach the 1st arm 92, and the 2nd arm 91 and the 1st arm 92 were latched by the latching member 90 is shown. The external appearance perspective view of the connection mechanism 150 which is 2nd Embodiment is shown. 34 is shown, and a part of the screw 152 and the rod 156 are shown as a cross-sectional view for explaining the structure in which the screw is movable. The external appearance perspective view of the connection mechanism 501 is shown. The drawing method by the connection mechanism 501 is shown.

Explanation of symbols

2 1st fluid apparatus 3 2nd fluid apparatus 4 1st connection part 4b 1st connection groove | channel 4f 1st attaching groove 5 2nd connection part 5b 2nd attachment part 5f 2nd attachment groove 6 Seal member 11 Main-body part 11a, 11b Annular groove 11c, 11d Press fitting allowance 21 Connection mechanism 22 Mechanism body 23 Arm 26 First arm 27 Second arm 26a, 26b, 27a, 27b Hook part 40 First holder 40A, 40B Holder member
50 2nd holder 50A, 50B Holder member 41a, 41b, 51a, 51b Engagement member 70 Connection member 80 Attraction member

Claims (6)

A connection seal member of a chemical device used to connect a first component made of resin and a second component made of resin, which is used in the chemical solution device, is used, and the first portion is formed in a recess formed in the connection seal member. A connection tool for connecting the first part and the second part by temporarily inserting a connection part between the part and the second part and press-fitting the connection part between the first part and the second part into the recess. In
Using a connection mechanism to draw the first part and the second part;
The connection mechanism is composed of a mechanism body and a pair of arms;
The pair of arms includes a first arm and a second arm;
Having a first attachment groove of a connection portion to be fitted to the first arm of the connection mechanism in the first component;
Having a second attachment groove of a connection part to be fitted to the second arm of the connection mechanism in the second component;
By fitting the first arm and the second arm of the connection mechanism into the first mounting groove and the second mounting groove, and bringing the first arm and the second arm close to each other, the first component And press-fitting the second part into the connection seal member,
The connection surface of the connection part of the first component and the connection surface of the connection part of the second component are drawn in parallel;
Using a pair of first holders having a semi-cylindrical shape to be fitted into the first mounting groove and having a holder engaging portion at the uppermost part of the circumference of the semi-cylindrical shape;
Using a pair of second holders having a semi-cylindrical shape fitted into the second mounting groove, and having a holder engaging portion at the uppermost part of the semi-cylindrical circumference;
By engaging the first arm and the second arm of the connection mechanism with the first holder and the second holder, and bringing the first arm and the second arm close to each other, the first component and the second arm Press-fitting a second part into the connection seal member;
A connection tool characterized by A connection seal member of a chemical device used to connect a first component made of resin and a second component made of resin, which is used in the chemical solution device, is used, and the first portion is formed in a recess formed in the connection seal member. A connection tool for connecting the first part and the second part by temporarily inserting a connection part between the part and the second part and press-fitting the connection part between the first part and the second part into the recess. In
Using a connection mechanism to draw the first part and the second part;
The connection mechanism is composed of a mechanism body and a pair of arms;
The pair of arms includes a first arm and a second arm;
Having a first attachment groove of a connection portion to be fitted to the first arm of the connection mechanism in the first component;
Having a second attachment groove of a connection part to be fitted to the second arm of the connection mechanism in the second component;
By fitting the first arm and the second arm of the connection mechanism into the first mounting groove and the second mounting groove, and bringing the first arm and the second arm close to each other, the first component And press-fitting the second part into the connection seal member,
The connection surface of the connection part of the first component and the connection surface of the connection part of the second component are drawn in parallel;
The connection seal member is a resin, and the cross-sectional shape is an H-shaped seal;
Having a locking member between the first arm and the second arm;
The locking member is formed as a stepped portion on the first arm side at a rod portion in which one end portion is fixed to the first arm and the other end portion is in sliding contact with the second arm,
The first arm and the second arm do not approach a predetermined distance or more by contacting the annular contact surface of the second arm and the stepped surface of the locking member;
A connection tool characterized by Connecting Engineering again and again Oite to claim 1 or claim 2,
The connection mechanism is configured such that the second arm approaches the first arm using a thrust of a screw;
A connection tool characterized by In any one of the connection tools according to claim 1 to claim 3 ,
The connection mechanism is configured to connect two handles rotatably at an intersection;
The handle is arranged such that the tip is bent inward and the support shafts are arranged so as to be parallel to the rotation axis of the handle,
The support portion of the pressure plate is rotatably held on the support shaft,
A connection tool characterized by In any one of the connection tools described in claim 1 to claim 4 ,
The first arm and the second arm are interchangeable;
The first arm and the second arm are parts having different sizes for each connection port diameter,
A connection tool characterized by Connecting Engineering again and again Oite according to claim 1,
If a state in which the connecting portion of the connecting portion and the second component of the first part in a recess formed in the connecting seal member is temporarily inserted into the initial position, engaging said first arm before Symbol first holder That cannot be combined,
If a state in which the connecting portion of the connecting portion and the second component of the first part in a recess formed in the connecting seal member is temporarily inserted into the initial position, engaging the second arm before Symbol second holder That cannot be combined,
The state of being temporarily inserted into the initial position means that the connection part of the first part and the connection part of the second part are inserted until they contact the inlet of the press-fitting allowance of the recess formed in the connection seal member. Being in a state,
A connection tool characterized by

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