JP4951063B2 - 大視野等倍投影光学系 - Google Patents
大視野等倍投影光学系 Download PDFInfo
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- JP4951063B2 JP4951063B2 JP2009512389A JP2009512389A JP4951063B2 JP 4951063 B2 JP4951063 B2 JP 4951063B2 JP 2009512389 A JP2009512389 A JP 2009512389A JP 2009512389 A JP2009512389 A JP 2009512389A JP 4951063 B2 JP4951063 B2 JP 4951063B2
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- Prior art keywords
- lens element
- optical system
- lens
- convex
- reflecting mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003287 optical effect Effects 0.000 title claims description 44
- 230000003595 spectral effect Effects 0.000 claims description 10
- 230000004075 alteration Effects 0.000 claims description 8
- 230000005499 meniscus Effects 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000005350 fused silica glass Substances 0.000 claims description 2
- 238000000206 photolithography Methods 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 206010010071 Coma Diseases 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
- G02B13/26—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances for reproducing with unit magnification
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Lenses (AREA)
Description
1)大視野
用語“大視野”は、約44mm×44mm又はそれより大きい長方形寸法を有する視野を意味する。
2)ブロードスペクトルバンド
光源は、g、h、iの水銀スペクトル線(すなわち、それぞれ436nm、405nm、365nm)である。
3)1×倍率
物平面OPのサイズは像平面IPのサイズと等しい。
4)物平面は像平面IPと平行であり、それはリソグラフィ機の設計をより容易にする。
5)Dyson−Wynneカタディオプトリック光学系
Claims (4)
- 以下の(1)から(4)を含む光学系であって、正の屈折力のレンズ群のそれぞれのレンズ要素と一対のプリズムは、溶融石英を材料とするものであって、かつ、少なくともg、h及びi線波長を含むスペクトル領域で色収差を補正することを特徴とする光学系。
(1)光軸
(2)凹球面反射ミラーM1
(3)空間を設けて前記凹球面反射ミラーM1に対向して順に配置される正の屈折力のレンズ群であって、以下の要素を含む。
前記凹球面反射ミラーM1側の凸面と前記凹球面反射ミラーM1と反対側の平面を有する第1の平凸レンズ要素E5、
前記平凸レンズ要素E5に隣り合い、前記凹球面反射ミラーM1側の凹面と前記第1の平凸レンズ要素E5と反対側の凹面を有する負の両凹レンズ要素E4、
前記負の両凹レンズ要素E4に隣り合い、前記負の両凹レンズ要素E4側の凸面7と前記凹球面反射ミラーM1と反対側の凹面を有する正のレンズ要素E3、
前記正のレンズ要素E3に隣り合い、前記正のレンズ要素E3側の凸面と前記凹球面反射ミラーM1と反対側の凹面を有する負のメニスカスレンズ要素E2、
前記負のメニスカスレンズ要素E2に隣り合い、前記負の両凹レンズ要素E4側の凸面と前記凹球面反射ミラーM1と反対側の平面を有する第2の平凸レンズ要素E1、
(4)それぞれが第1及び第2の面を有しており、前記第2の面A2・B2はそれぞれ前記光軸の反対側で前記第2の平凸レンズ要素E1の前記平面に隣接して配置されており、一方のプリズムP1の前記第1の面A1は物平面OPに、他方のプリズムP2の前記第1の面B1は像平面IPに対向して配置されている一対のプリズム - サイズが少なくとも44mm×44mm以上であり、開口数が0.18である少なくとも一つの四角の視野を有する、
ことを特徴とする請求項1に記載された光学系。 - 前記レンズ群のレンズ要素は球面である、
ことを特徴とする請求項1に記載された光学系。 - 前記物平面OPは前記像平面IPと平行である
ことを特徴とする請求項1に記載された光学系。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200610027264.1 | 2006-06-02 | ||
CNB2006100272641A CN100388056C (zh) | 2006-06-02 | 2006-06-02 | 一种投影物镜光学系统 |
PCT/CN2006/003271 WO2007140663A1 (en) | 2006-06-02 | 2006-12-04 | Large-field unit-magnification projection optical system |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009539123A JP2009539123A (ja) | 2009-11-12 |
JP4951063B2 true JP4951063B2 (ja) | 2012-06-13 |
Family
ID=37133008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009512389A Active JP4951063B2 (ja) | 2006-06-02 | 2006-12-04 | 大視野等倍投影光学系 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7746571B2 (ja) |
EP (1) | EP2024791B1 (ja) |
JP (1) | JP4951063B2 (ja) |
CN (1) | CN100388056C (ja) |
WO (1) | WO2007140663A1 (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8208198B2 (en) | 2004-01-14 | 2012-06-26 | Carl Zeiss Smt Gmbh | Catadioptric projection objective |
US20080151365A1 (en) | 2004-01-14 | 2008-06-26 | Carl Zeiss Smt Ag | Catadioptric projection objective |
DE602005003665T2 (de) | 2004-05-17 | 2008-11-20 | Carl Zeiss Smt Ag | Katadioptrisches projektionsobjektiv mit zwischenbildern |
CN100480772C (zh) * | 2007-12-07 | 2009-04-22 | 上海微电子装备有限公司 | 一种折反射式投影光学系统 |
US9238878B2 (en) | 2009-02-17 | 2016-01-19 | Redwood Bioscience, Inc. | Aldehyde-tagged protein-based drug carriers and methods of use |
US8493670B2 (en) * | 2010-09-10 | 2013-07-23 | Coherent, Inc. | Large-field unit-magnification catadioptric projection system |
AU2012205301B2 (en) | 2011-01-14 | 2017-01-05 | Redwood Bioscience, Inc. | Aldehyde-tagged immunoglobulin polypeptides and method of use thereof |
US8659823B2 (en) | 2011-04-22 | 2014-02-25 | Coherent, Inc. | Unit-magnification catadioptric and catoptric projection optical systems |
CN103135356B (zh) * | 2011-11-23 | 2015-04-15 | 上海微电子装备有限公司 | 反射式光刻投影物镜 |
US9436103B2 (en) * | 2014-05-19 | 2016-09-06 | Ultratech, Inc. | Wynne-Dyson projection lens with reduced susceptibility to UV damage |
TWI551958B (zh) * | 2014-09-29 | 2016-10-01 | Equal magnification total optical exposure machine group | |
US9891533B2 (en) * | 2015-06-16 | 2018-02-13 | National Applied Research Laboratories | Conjugate common optical path lithography lens |
WO2017066859A1 (en) * | 2015-10-20 | 2017-04-27 | Raytheon Canada Limited | Compact dual-function optics for lcos displays |
WO2017151291A1 (en) * | 2016-03-04 | 2017-09-08 | Applied Materials, Inc. | Wire grid polarizer manufacturing method |
CN109071634A (zh) | 2016-04-26 | 2018-12-21 | R.P.谢勒技术有限责任公司 | 抗体偶联物及其制备和使用方法 |
CN114859516B (zh) * | 2022-05-23 | 2024-04-30 | 张家港中贺自动化科技有限公司 | 一种用于投影光刻的物镜光学系统以及投影光刻系统 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000039557A (ja) * | 1998-05-21 | 2000-02-08 | Nikon Corp | 投影光学系、投影光学装置、走査型露光装置、光加工方法および露光方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4171871A (en) * | 1977-06-30 | 1979-10-23 | International Business Machines Corporation | Achromatic unit magnification optical system |
JP3724517B2 (ja) * | 1995-01-18 | 2005-12-07 | 株式会社ニコン | 露光装置 |
JPH08179217A (ja) | 1994-08-19 | 1996-07-12 | Tamarack Scient Co Inc | ダイソンレンズ系 |
US5559629A (en) * | 1994-08-19 | 1996-09-24 | Tamarack Scientific Co., Inc. | Unit magnification projection system and method |
JPH08211294A (ja) * | 1995-02-02 | 1996-08-20 | Nikon Corp | 投影露光装置 |
US6381077B1 (en) * | 2000-04-05 | 2002-04-30 | Ultratech Stepper, Inc. | Scanning microlithographic apparatus and method for projecting a large field-of-view image on a substrate |
KR100431883B1 (ko) * | 2001-11-05 | 2004-05-17 | 삼성전자주식회사 | 노광방법 및 투영 노광 장치 |
US6879383B2 (en) * | 2002-12-27 | 2005-04-12 | Ultratech, Inc. | Large-field unit-magnification projection system |
US6863403B2 (en) * | 2003-05-27 | 2005-03-08 | Ultratech, Inc. | Deep ultraviolet unit-magnification projection optical system and projection exposure apparatus |
EP1880249B1 (fr) | 2005-04-29 | 2012-05-23 | SAGEM Défense Sécurité | Systeme optique pour un dispositif de lithographie |
-
2006
- 2006-06-02 CN CNB2006100272641A patent/CN100388056C/zh active Active
- 2006-12-04 JP JP2009512389A patent/JP4951063B2/ja active Active
- 2006-12-04 US US12/302,824 patent/US7746571B2/en active Active
- 2006-12-04 WO PCT/CN2006/003271 patent/WO2007140663A1/en active Application Filing
- 2006-12-04 EP EP06828233A patent/EP2024791B1/en active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000039557A (ja) * | 1998-05-21 | 2000-02-08 | Nikon Corp | 投影光学系、投影光学装置、走査型露光装置、光加工方法および露光方法 |
Also Published As
Publication number | Publication date |
---|---|
US20090185290A1 (en) | 2009-07-23 |
CN1851526A (zh) | 2006-10-25 |
EP2024791A4 (en) | 2010-07-28 |
US7746571B2 (en) | 2010-06-29 |
WO2007140663A1 (en) | 2007-12-13 |
JP2009539123A (ja) | 2009-11-12 |
EP2024791A1 (en) | 2009-02-18 |
CN100388056C (zh) | 2008-05-14 |
EP2024791B1 (en) | 2012-05-16 |
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