JP4950329B2 - 洗浄装置 - Google Patents
洗浄装置 Download PDFInfo
- Publication number
- JP4950329B2 JP4950329B2 JP2010195587A JP2010195587A JP4950329B2 JP 4950329 B2 JP4950329 B2 JP 4950329B2 JP 2010195587 A JP2010195587 A JP 2010195587A JP 2010195587 A JP2010195587 A JP 2010195587A JP 4950329 B2 JP4950329 B2 JP 4950329B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaning medium
- medium
- nozzle
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Cleaning In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010195587A JP4950329B2 (ja) | 2010-09-01 | 2010-09-01 | 洗浄装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010195587A JP4950329B2 (ja) | 2010-09-01 | 2010-09-01 | 洗浄装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006169124A Division JP2007330947A (ja) | 2006-06-19 | 2006-06-19 | 乾式洗浄装置、および乾式洗浄方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010279949A JP2010279949A (ja) | 2010-12-16 |
JP2010279949A5 JP2010279949A5 (enrdf_load_stackoverflow) | 2011-12-15 |
JP4950329B2 true JP4950329B2 (ja) | 2012-06-13 |
Family
ID=43537192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010195587A Expired - Fee Related JP4950329B2 (ja) | 2010-09-01 | 2010-09-01 | 洗浄装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4950329B2 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105215008A (zh) * | 2015-09-28 | 2016-01-06 | 中国科学院半导体研究所 | 抽取清洗残余废气的气嘴结构 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011052771A1 (de) * | 2011-08-17 | 2013-02-21 | Nordenia Deutschland Gronau Gmbh | Verfahren und Vorrichtung zur Entfernung von Verschmutzungen auf profilierten Oberflächen ineinander greifender Streckwalzen |
CN103409815B (zh) * | 2013-07-15 | 2016-01-20 | 东华大学 | 一种喷丝板自动吹干机 |
JP5722477B2 (ja) * | 2014-03-06 | 2015-05-20 | 東北電機鉄工株式会社 | バグフィルター清掃用コアンダインジェクター |
DE102018219696A1 (de) * | 2018-11-16 | 2020-05-20 | Ejot Gmbh & Co. Kg | Berührungsfreie Reinigungsvorrichtung mit Wirbelstrom |
CN115616856B (zh) * | 2022-12-19 | 2023-04-07 | 深圳仕上电子科技有限公司 | 一种掩模板清洗工艺 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60188123A (ja) * | 1984-03-08 | 1985-09-25 | 株式会社エムテ−樋川 | 表面清掃方法 |
JPH0273U (enrdf_load_stackoverflow) * | 1988-06-02 | 1990-01-05 | ||
JPH0718646B2 (ja) * | 1989-08-22 | 1995-03-06 | ジャパン・フィールド株式会社 | 被洗浄物の乾燥装置 |
JP2005296853A (ja) * | 2004-04-13 | 2005-10-27 | Ricoh Co Ltd | 微粉除去装置 |
JP4546147B2 (ja) * | 2004-05-18 | 2010-09-15 | 株式会社リコー | 乾式洗浄方法および装置 |
-
2010
- 2010-09-01 JP JP2010195587A patent/JP4950329B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105215008A (zh) * | 2015-09-28 | 2016-01-06 | 中国科学院半导体研究所 | 抽取清洗残余废气的气嘴结构 |
Also Published As
Publication number | Publication date |
---|---|
JP2010279949A (ja) | 2010-12-16 |
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