JP4943087B2 - Continuous firing furnace and continuous firing method - Google Patents

Description

  The present invention relates to a continuous firing furnace and a continuous firing method for continuously firing an object to be fired formed of a ceramic material or the like.

As this type of continuous firing furnace and continuous firing method, the technical ideas of Patent Document 1 and Patent Document 2 are known.
Patent Document 1 has a firing chamber defined by a partition made up of a heat generating layer that self-heats by microwaves and a heat insulating layer that surrounds the outside of the heat generating layer, and is transported through the firing chamber from an inlet toward an outlet. In a continuous firing furnace in which the object to be fired is irradiated with microwaves to heat and fire the object to be fired, a cooling medium flow path is provided in the heat insulating layer, and a distance between the flow path and the heat generating layer is set. A technical idea of changing the temperature distribution in the furnace length direction by changing the temperature is disclosed.

  With this configuration, when the heat generating layer is self-heated by the microwave and the firing chamber is in a high temperature state, normal temperature air is introduced from the cylinder into the holes formed in the heat insulating layer, and the air introduced into the holes is When it flows through the inside, heat is exchanged with the heat generating layer in the vicinity of the pores, and the temperature in the firing chamber decreases in a limited region near the pores. In addition, the degree of temperature decrease in the firing chamber due to the air flowing through the holes can be arbitrarily controlled by changing the heat exchange efficiency by adjusting the introduction speed of the air introduced into the holes. Therefore, by adjusting the introduction speed of the air introduced into each hole, the temperature profile in the firing chamber can be arbitrarily set even in a designed furnace, and the material, shape, and size of the body to be fired can be set. By optimizing the temperature profile in the firing chamber accordingly, it is possible to cope with firing of various objects to be fired in one continuous firing furnace.

Further, in Patent Document 2, using a tunnel-type continuous firing furnace provided with at least a heating / sintering region for firing by electromagnetic wave irradiation, a fired body that continuously obtains various types of fired bodies having different firing temperatures is disclosed. In the firing method, a fired body having a firing temperature different from the former is placed around the fired body in the heating / sintering region set to a firing temperature condition for a predetermined fired body. A technical idea of a continuous firing method in which the material is inserted in a state surrounded by a radiant heater formed of a material having heat generation characteristics is disclosed.
With this configuration, despite the use of a microwave continuous firing furnace in which the temperature conditions of the heating / sintering region are set to those for a predetermined firing temperature, various types having different firing temperatures Can be fired at the same time according to each firing temperature, and various high-quality fired bodies can be obtained by microwave heating. It is possible to obtain a continuous firing method excellent in the above.

Japanese Patent No. 3687902 JP 2004-352574 A

By the way, in Patent Document 1 described above, changing the temperature distribution in the furnace length direction by changing the distance between the flow path of the cooling medium of the heat insulating layer and the heat generating layer releases heat energy by the refrigerant. As a result, energy to be supplied was wasted.
Moreover, in the said patent document 2, with respect to the multiple types of to-be-fired body which has different baking temperature, the circumference | surroundings of the to-be-fired body were formed with the material which has the electromagnetic wave heat generating characteristic according to the electromagnetic wave heat generating characteristic which the said to-be-fired body has. Although the technical idea of changing the firing temperature of the object to be fired by surrounding and firing with a radiant heating body is disclosed, also in this technique, microwave power is consumed by the radiant heating body, This results in wasteful power consumption and wasteful energy supply.

  On the other hand, in recent years, there has been a growing demand for ceramic electronic components that are smaller, lighter, and higher in performance from the viewpoint of energy saving, and in the fields of the IT industry and the home appliance industry, miniaturization of components has been remarkably achieved. . However, the firing process, which is the key to the production of parts, is mass-produced by a firing furnace in which those parts are stacked on shelves arranged in multiple stages, so most of the firing energy is used to heat the shelf rather than the product. However, there is a current situation where the firing efficiency cannot be improved. Here, in the in-tube multimode resonance heating method of Patent Document 1 and Patent Document 2, a limit is expected in the firing energy efficiency.

  Therefore, the present invention has been made to solve such a problem, and it is an object to provide a continuous firing furnace and a continuous firing method capable of performing efficient microwave firing in a short time while reducing waste of power consumption. It is what.

The continuous firing furnace according to claim 1 includes a microwave generation source for generating microwaves, confining the microwaves generated by the microwave generation sources, propagating the microwaves with the characteristics of the waveguide, and being accommodated. A firing waveguide for heating and firing while moving the heated object in the traveling direction of the traveling wave, and a supply guide for confining the microwave generated by the microwave generation source and propagating the microwave to the firing waveguide A corrugated tube, wherein the fired waveguide is inserted from a position where the electromagnetic field strength is weak in a direction perpendicular to the length direction of the fired waveguide, and the heated object is By moving to a strong position, the heating and baking temperature of the heating object is increased.
Here, the microwave generation source is a microwave oscillator having a frequency of about 1000 MHz, that is, a wavelength of about 30 cm. In the embodiment, the one having an output of about 1 KW to 50 KW is used. In this case, the output of the microwave may be determined based on the load such as the conveyance speed that determines the baking capability, and the frequency of the microwave may be determined depending on the size of the baking space. However, since the size of the firing waveguide is determined from the size of the heating object, it is preferable to use a frequency around 1000 MHz.
The firing waveguide may be any material that confines the microwave supplied from the microwave generation source and propagates the traveling wave with the characteristics of the waveguide and heats and heats the object to be heated. . The fired waveguide is inserted by inserting the heating object from a position where the electromagnetic field strength is low in the direction perpendicular to the length direction, and moving the heating object to a central position where the electromagnetic field strength is strong. It raises the heating and firing temperature of the object to be heated, as long as the object to be heated can be taken in from the position where the electromagnetic field strength is weak in the firing waveguide and can be gradually moved to a position where the electromagnetic field strength is strong. .
The supply waveguide only needs to confine the microwave energy generated by the microwave generation source and convey the microwave energy to the firing waveguide. What is necessary is just to be connected to the firing waveguide.
Furthermore, inserting the heating object from a position where the electromagnetic field strength is weak and moving it to the center position where the electromagnetic field strength is strong can be changed linearly or in a plurality of stepwise changes. .

The continuous firing furnace according to claim 2, wherein the operation of taking the heating object from a position where the electromagnetic field strength of the firing waveguide is weak and moving the heating object to a position where the electromagnetic field intensity is strong is performed by the firing guide. It is taken in from the lower surface side of the wave tube and moved to the center of the cross section of the fired waveguide.
Here, the movement of the heating object may be any of a case of placing on a conveyor belt of a belt conveyor, a case of putting on a roller of a roller conveyor, and a case of a pusher system that sequentially extrudes the heating object. In particular, the heating object may be inserted from a position where the electromagnetic field strength of the fired waveguide is weak and the heating object is relatively moved to a position where the electromagnetic field intensity is strong.

In the continuous firing furnace according to claim 3, the operation of taking the heating object from a position where the electromagnetic field strength of the firing waveguide is weak and moving the heating object to a position where the electromagnetic field intensity is strong is the firing. It is taken in from the upper surface side of the waveguide and is moved to the approximate center of the cross section of the fired waveguide.
Here, the movement of the heating object may be any of a case where the heating object is put on a conveyor belt, a case where the heating object is put on a roller conveyor, or a pusher system in which the heating object is sequentially pushed out. What is necessary is just to take in the said heating target object from the position with a weak electromagnetic field intensity | strength of a baking waveguide, and to relatively move the said heating target object to a position with a strong electromagnetic field intensity | strength.

After the heating and firing by the firing waveguide of the continuous firing furnace according to claim 4 , high temperature holding and cooling treatment, high temperature holding or cooling treatment are performed. Here, the high temperature holding treatment only needs to maintain a specific high temperature for several minutes or more, and the cooling treatment may be any temperature lower than the firing temperature, and the temperature drops to about room temperature. It is not intended to mean anything that has been reduced to a temperature lower than the room temperature. Strictly speaking, the temperature may be any temperature that does not destroy the heating object and does not affect the work. For example, it may be about 50 to 80 ° C., although it depends on the firing material.

  The supply waveguide of the continuous firing furnace according to claim 5 is provided with a tuner. Here, the tuner is not limited as long as the distribution of the microwaves branched into the firing waveguide can be controlled to a desired value in the supply waveguide.

The operation of taking the heating object from a position where the electromagnetic field strength of the firing waveguide of the continuous firing furnace according to claim 6 is weak and moving the heating object to a position where the electromagnetic field intensity is strong is the firing waveguide. The heating object is moved to a position where the electromagnetic field strength is strong at an angle with a flange connecting the pipes.
Here, the flange connecting the fired waveguides changes the relative movement direction of the fired waveguide and the heating object, and it is necessary to change the shape of the standardized waveguides. There is no sex.

The continuous firing method according to claim 7 confines the microwave generated by the microwave generation source to guide the microwave to the firing waveguide, confine the introduced microwave energy, and the characteristics of the waveguide. In addition to propagating traveling waves, the object to be heated contained in the firing waveguide is heated and fired while being moved in the traveling direction of the traveling wave, and the length of the firing waveguide with respect to the firing waveguide The heating object is taken in from a position where the electromagnetic field strength is perpendicular to the vertical direction, and the heating object is moved to a position where the electromagnetic field strength is strong, thereby increasing the heating and baking temperature of the heating object. Is .
Here, the microwave supply unit may be anything that guides the microwave generated by the microwave generation source to the firing waveguide for firing the object to be heated.
In addition, the heating and firing means that the traveling wave introduced can be propagated in the length direction and the object to be heated contained in the firing waveguide can be heated and fired while being moved in the traveling direction of the traveling wave. If it is.
Then, the temperature raising introduction part is inserted from the position where the electromagnetic field strength is low in the direction perpendicular to the length direction of the firing waveguide, and the heating target is made strong in the electromagnetic field strength. What is necessary is just to raise the heating-firing temperature of the said heating target object by moving to a position.

The temperature raising introduction part that takes in the heating object from a position where the electromagnetic field strength is weak and moves the heating object to a position where the electromagnetic field intensity is strong in the continuous baking method according to claim 8 is provided in the baking waveguide. It is taken in from the lower surface side and moved to the center of the fired waveguide.
Here, the movement of the heating object may be any of a case of placing on a conveyor belt of a belt conveyor, a case of putting on a roller of a roller conveyor, and a case of a pusher system that sequentially extrudes the heating object. In particular, it is sufficient if the heating object is taken in from the position where the electromagnetic field strength of the fired waveguide is weak and the heating object is relatively moved to a position where the electromagnetic field strength is strong.

The temperature raising introduction part that takes in the heating object from a position where the electromagnetic field strength is weak and moves the heating object to a position where the electromagnetic field intensity is strong in the continuous baking method according to claim 9, It is taken in from the upper surface side and moved to the center of the fired waveguide.
Here, the movement of the heating object may be any of a case where the heating object is put on a conveyor belt, a case where the heating object is put on a roller conveyor, or a pusher system in which the heating object is sequentially pushed out. What is necessary is just to insert the said heating target object from the position with a weak electromagnetic field intensity | strength of a baking waveguide, and to move the said heating object relatively to a position with a strong electromagnetic field intensity | strength.

  In the continuous firing method according to claim 10, a high temperature holding treatment and / or a cooling treatment is performed as a temperature lowering treatment after the heat firing. Here, the high temperature state only needs to maintain a specific temperature for several minutes or more, and the cooling state is not limited to a temperature dropped to about room temperature, but rather than the firing temperature. Means low temperature. Strictly speaking, it may be about 50 to 80 ° C., although it depends on the temperature at which the heating object is not destroyed, for example, the firing material.

The continuous firing method according to claim 11, wherein the operation of taking the heating object from a position where the electromagnetic field strength of the firing waveguide is weak and moving the heating object to a position where the electromagnetic field intensity is strong is the firing guide. The heating object is moved to a position where the electromagnetic field strength is strong by making an angle with a flange connecting the wave tubes.
Here, the flange connecting the fired waveguides changes the relative movement direction of the fired waveguide and the heating object, and it is necessary to change the shape of the standardized waveguides. There is no sex.

The continuous firing furnace according to claim 1 confines the microwave generated by the microwave generation source that generates the microwave, propagates the traveling wave with the characteristics of the waveguide, and heats and burns the object to be heated. The waveguide captures the heating object from a position where the electromagnetic field strength is low in the direction perpendicular to the length direction of the firing waveguide, and moves the heating object to a position where the electromagnetic field strength is strong in the traveling wave traveling direction. By moving, the heating and baking temperature of the heating object is increased.
Therefore, when firing is performed in the firing waveguide, if heating of the heating object is suddenly started with high energy, the heating object is cracked or damaged, but in the present invention, the electromagnetic field is weak. Since the object to be heated is taken from the vicinity of the wall surface of the fired waveguide and then gradually led to the center of the fired waveguide having a strong electromagnetic field, the shock to the heated object is small. Further, since the object to be heated is taken in from the vicinity of the wall surface of the fired waveguide having a weak electromagnetic field, there is almost no electromagnetic wave leaking from the fired waveguide. And the disturbance of the electromagnetic wave in a baking waveguide can be suppressed to the minimum. Furthermore, since the entire temperature inside the firing waveguide is not increased, but only the object to be heated is heated and fired, it can be fired quickly with less energy, and power consumption is not wasted. In addition, since the firing environment of the moving heating object always coincides, the heating object can be uniformly fired under the same energy distribution condition, and as a result of the uniform firing, the quality is improved. Furthermore, since almost no reflected wave is generated in the sintered waveguide, the microwave oscillator constituting the microwave generation source is not damaged by the reflected wave.
More specifically, the equipment has been dramatically reduced in size, and the heating efficiency of small-sized electronic components has been improved several times by the high-efficiency and rapid processing of the one-stage loading of the heating object, and the addition of atmospheric firing has been added. Since it is flexible, it can be used not only for ceramic electronic parts fired in the atmosphere but also for ceramic electronic parts fired in atmospheric firing and automobile parts that are metal parts. Moreover, since the heating process uses the microwave internal heating effect to the maximum extent, it can be expected to improve the characteristic values of materials such as electronic components.

  The continuous firing furnace according to claim 2, wherein the operation of taking the heating object from a position where the electromagnetic field strength of the firing waveguide is weak and moving the heating object to a position where the electromagnetic field intensity is strong is performed by the firing waveguide. Since it is taken in from the lower surface side of the tube and moved to the center of the cross section of the fired waveguide, in addition to the effect of claim 1, it is gradually raised from the lower direction to the center of the fired waveguide The position setting is suitable for the one in which the supply waveguide that propagates the microwave to the firing waveguide is disposed on the upper portion.

  The continuous firing furnace according to claim 3 is configured such that the heating object is taken from a position where the electromagnetic field strength of the firing waveguide is weak and the heating object is moved to a position where the electromagnetic field strength is strong. Since it is taken in from the upper surface side of the tube and moved to the center of the cross section of the fired waveguide, in addition to the effect of claim 1, it is gradually lowered from the upper direction of the fired waveguide to the center The position setting is suitable for a supply waveguide that propagates microwaves up to the firing waveguide.

The effect according to any one of claims 1 to 3, since the high-temperature holding and / or cooling treatment is performed after the heating and baking by the baking waveguide of the continuous baking furnace of claim 4. In addition to firing at a predetermined firing temperature for a specific time, and then performing an arbitrary treatment, firing cooling management becomes easy.

  Since the supply waveguide of the continuous firing furnace according to claim 5 is provided with a tuner, in addition to the effect according to any one of claims 1 to 4, a single micro The supply waveguide branched from the wave generation source to the plurality of firing waveguides can supply microwaves to the plurality of branched firing waveguides in a desired distribution.

7. The continuous firing furnace according to claim 6, wherein the operation of taking the heating object from a position where the electromagnetic field strength of the firing waveguide is weak and moving the heating object to a position where the electromagnetic field strength is strong is the firing waveguide. The heating object is moved to a position where the electromagnetic field strength is strong by making an angle with a flange connecting between unit firing waveguides of a predetermined length constituting the tube.
Therefore, in addition to the effect described in any one of claims 1 to 5, a unit firing waveguide having a predetermined length that constitutes the firing waveguide only by a flange connecting the firing waveguides. Since the relative movement direction between the tubes is changed, there is no need to change the shape of the standardized waveguide, and an inexpensive standard product can be used as the firing waveguide. Moreover, even if there is a relative change between the unit firing waveguide of a predetermined length constituting the firing waveguide and the heating object, the movement of the heating object can always be a linear movement. .

The continuous firing method according to claim 7 confines the microwave generated by the microwave generation source, guides the microwave to the firing waveguide, confines the introduced microwave energy, and has characteristics of the waveguide. A firing section that propagates the traveling wave and heats and heats the object to be heated accommodated in the firing waveguide while moving in the traveling direction of the traveling wave, in the length direction of the firing waveguide The heating object is taken in from the temperature rise introduction part at a position where the electromagnetic field strength is perpendicular to the perpendicular direction, and the heating object is moved to a position where the electromagnetic field intensity is strong, thereby setting the heating and firing temperature of the heating object. It is something to raise.
Therefore, when firing is performed in the firing waveguide, if heating of the heating object is suddenly started with high energy, the heating object is cracked or damaged, but in the present invention, the electromagnetic field is weak. Since the object to be heated is inserted from the vicinity of the wall surface of the fired waveguide and then gradually led to the center of the fired waveguide having a strong electromagnetic field, the shock to the heated object is small. Further, since the object to be heated is inserted from the vicinity of the wall surface of the fired waveguide having a weak electromagnetic field, there is almost no electromagnetic wave leaking from the fired waveguide. And since it is what does not raise the whole temperature in a baking waveguide, and only heats and heats an object to be heated, it can burn quickly with little energy, and there is no waste in power consumption. In addition, since the firing environment of the moving heating object always coincides, the heating object can be uniformly fired under the same energy distribution condition, and as a result of the uniform firing, the quality is improved. Furthermore, since almost no reflected wave is generated in the sintered waveguide, the microwave oscillator constituting the microwave generation source is not damaged by the reflected wave.
More specifically, the equipment has been dramatically reduced in size, and the heating efficiency of small-sized electronic components has been improved several times by the high-efficiency and rapid processing of the one-stage loading of the heating object, and the addition of atmospheric firing has been added. Since it is flexible, it can be used not only for ceramic electronic parts fired in the atmosphere but also for ceramic electronic parts fired in atmospheric firing and automobile parts that are metal parts. Moreover, since the heating process uses the microwave internal heating effect to the maximum extent, it can be expected to improve the characteristic values of materials such as electronic components.

  The continuous firing method according to claim 8, wherein the heating target that takes in the heating object from a position where the electromagnetic field strength is weak and moves the heating object to a position where the electromagnetic field strength is strong is provided on the firing waveguide. Since it is taken from the lower surface and moved to the center of the fired waveguide, in addition to the effect of claim 7, it is gradually raised from the lower direction of the fired waveguide to the center, The position setting is suitable for the one in which the supply waveguide for conveying the microwave energy to the firing waveguide is arranged on the upper part.

  The continuous firing method according to claim 9, wherein the heating target that takes in the heating object from a position where the electromagnetic field strength is weak and moves the heating object to a position where the electromagnetic field strength is strong is provided on the firing waveguide. Since it is taken in from the upper surface and moved to the center of the fired waveguide, in addition to the effect of claim 7, since it is gradually lowered from the upper direction of the fired waveguide to the center, The position setting is suitable for a supply waveguide that conveys microwave energy to the firing waveguide.

  In the continuous firing method of claim 10, since the temperature lowering process after the heating and firing by the firing waveguide is a high temperature holding process and a cooling process, a high temperature holding process or a cooling process. In addition to the effect described in any one of the above, since the material is fired for a specific time at a predetermined firing temperature and then cooled to room temperature, the fired product can be directly taken out without being cooled externally. it can.

  The operation of taking the heating object from a position where the electromagnetic field strength of the firing waveguide of the continuous firing method according to claim 11 is weak and moving the heating object to a position where the electromagnetic field intensity is strong is the firing waveguide. The heating object is moved to a position where the electromagnetic field strength is strong by making an angle with a flange connecting between unit firing waveguides of a predetermined length constituting the tube. In addition to the effect described in any one of the above, the relative movement direction of the fired waveguide and the heating object by a flange connecting the unit fired waveguides of a predetermined length constituting the fired waveguide Therefore, there is no need to change the standardized shape of the waveguide, it can be used as it is, and an inexpensive device can be manufactured. Moreover, even if a relative change occurs between a plurality of unit-fired waveguides having a predetermined length and the heating object, the movement of the heating object can always be a linear movement.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that, in the embodiments, the same symbols and the same symbols mean the same or corresponding functions, and redundant description is omitted.
FIG. 1 is a conceptual diagram conceptually showing the overall configuration of a continuous firing furnace in an embodiment of the present invention, and FIG. 2 is a side view showing a specific configuration showing the overall configuration of the continuous firing furnace in an embodiment of the present invention. FIG. FIG. 3 is a front view showing a supply waveguide of a continuous firing furnace in the embodiment of the present invention, and FIG. 4 is a perspective view of a main part showing the supply waveguide of the continuous firing furnace in the embodiment of the present invention. FIG. FIG. 5 is a side view (a), a front view (b), and a front view (c) showing only an opening, showing a modified E bend of the continuous firing furnace in the embodiment of the present invention. FIG. It is a front view of the carrying-in port of the deformation | transformation E bend of the continuous baking furnace in the form of.

  In the figure, a microwave generation source 1 for generating a microwave is a 915 MHz microwave oscillator whose output is about 1 KW to 50 KW. As an embodiment, a description will be given as a system of an example in which a microwave of 915 MHz is used and the oscillation output 15 KW is branched into two systems, and each oscillation output is 7.5 KW. The microwave of 915 MHz has a rectangular waveguide WR975 (EIA model name) as a transmission line having a cross-sectional inner dimension of 124 × 248 mm, specifically, a heating region of the unit firing waveguide 30 having an inner dimension of 124 × 248 mm. The width of the 90% flat top is about 60 mm. Further, as the unit firing waveguide 30, an inner dimension of 146 × 292 mm that matches the inner dimension of the cross section of the rectangular waveguide WR1150 (EIA model name) can be used.

Specifically, the output of the microwave is obtained by making a measurement hole of 10 mm in a waveguide of unit fired waveguides 30 _-2 , 30 _-3 , and 30 _-4 described later, and the position is measured by a radiation thermometer. The control system was set to reach the maximum temperature. Note that the microwave has zero electromagnetic field intensity at the center of the longitudinal plane of the cross section of the waveguide, so it is clear that there is no microwave leakage. However, when a large number of measurement holes are formed, there is no leakage, but it is preferable that the measurement holes be discontinuous in order to avoid frequency fluctuations. As a specific example, when a 10 mm measurement hole was set at 100 mm intervals, no frequency fluctuation or leakage was confirmed. The mode of the electromagnetic field generated in the unit firing waveguide 30 was confirmed by the inventors to be TE10.
Incidentally, when a 2.45 GHz microwave oscillator is used as the commercially available microwave generation source 1, the inside dimension of the cross section of the waveguide is 55 × 109 mm, and the width of the 90% flat top is about 20 mm.

  In the present embodiment, in order to satisfy the form of the firing area of the heating object W to be heated and fired, the heating area is 90% to increase the width of the flat top, for example, 90% to maintain about 50 mm. A microwave having a frequency band of 915 MHz is required because of the size of the waveguide that can take the width of the flat top. However, even if the inner dimensions of the same rectangular waveguide WR975 (EIA model name) are used, the frequency range of the fundamental mode can use microwaves in the range of 0.76 to 1.15 GHz. Therefore, when emphasizing the width of the 90% flat top when implementing the present invention, the frequency of the microwave oscillator can be a frequency band around 1 GHz, that is, a microwave oscillator having a wavelength of about 30 cm. Thus, the frequency of the microwave can be determined by the size of the firing space of the heating object W.

In particular, as in the embodiment of the present invention, the standard size of the firing waveguide 50 is determined from the size of the object to be heated W as the frequency of the microwave oscillator, and according to this, it is necessary to secure the space for the firing process. Therefore, it is preferable to use a frequency around 1 GHz including 915 MHz.
In the present embodiment, when referring to a specific unit firing waveguide, it is described as unit firing waveguides 30 _-1 , 30 _-2 , 30 _-3 ,..., 30 _-9. In the case of the explanation, the unit firing waveguide 30 or the entire continuous unit firing waveguide 30 is described as the firing waveguide 50.

The 915 MHz microwave generated from the microwave generation source 1 is output from the output window 2 provided in the microwave generation source 1, and the straight tube 3, the E bend 4, the straight tube 5, the 1/2 demultiplexer 6, The traveling wave is fired and guided by the characteristics of the waveguide through the H bend 7 (7R, 7L), the power monitor 8 (8R, 8L), the tuner 9 (9R, 9L), and the modified E bend 10 (10R, 10L). Propagated to the wave tube 50.
Of the H bend 7 (7R, 7L), power monitor 8 (8R, 8L), tuner 9 (9R, 9L), and modified E bend 10 (10R, 10L) illustrated in the present embodiment, FIG. In the sense of distinguishing between the right and left ones, R and L are attached to the numbers, and in the technical meaning which may be either left or right, only the numbers are added, and R or L is not attached to them. .

The straight pipe 3 and the straight pipe 5 use the internal dimensions of a standardized rectangular waveguide WR975 (EIA model name). The E-bend 4 and the H-bend 7 are also bends with an internal dimension connected to a standardized rectangular waveguide WR975 (EIA model name). The 1/2 demultiplexer 6 branches the waveguide, and distributes the microwave energy output through the straight pipe 5 to the right H bend 7R and the left H bend 7L. . The power monitor 8 detects the distribution state of the microwave energy, and indicates the input wave power distributed and input to the right H bend 7R and the left H bend 7L.
Here, the straight tube 3, the E bend 4, the straight tube 5, the 1/2 demultiplexer 6, the H bend 7, the power monitor 8, and the tuner 9 connected to the output window 2 of the microwave generation source 1 described above are: A supply waveguide 20 for confining microwave energy generated by the microwave generation source 1 and propagating the traveling wave to the firing waveguide 50 is configured, and a plurality of firing waveguides 50 branched by the tuner 9 are provided. Microwaves can be supplied in a desired distribution.

In this embodiment, the supply waveguide 20 is composed of a straight tube 3, an E bend 4, a straight tube 5, a 1/2 duplexer 6, an H bend 7, a power monitor 8, and a tuner 9. When the firing waveguide 50 has only one row, the straight tube 3, a bend or a corner not shown (“bend” and “corner” are not found to define an established shape. Throughout this specification. “Bend” and “Corner” will be described assuming that they have forms corresponding to the figure), and can be a power monitor 8 and a tuner 9. Further, when the firing waveguides 50 are arranged in four rows, it is divided into two by a 1/2 branching filter, and further divided into two. Of course, other configurations can be adopted depending on the opening position of the output window 2 of the microwave generation source 1 and the position of the firing waveguide 50.
Note that the modified E bend 10 of the present embodiment, in addition to the function of confining the microwave and propagating it to the firing waveguide 50 as in the case of the E bend 4, causes the heating object W to be subjected to an electromagnetic field using bending. It has a function of taking in the fired waveguide 50 from a position with low strength.

  As shown in the conceptual diagram of FIG. 1, the firing waveguide 50 of the present embodiment is a position where the electromagnetic field strength is weak in the length direction of the firing waveguide 50, that is, in the direction perpendicular to the traveling direction of the traveling wave. , A heating part W that takes in the heating object W from the heating point, a temperature raising introduction part 52 that moves the heating object W to a position where the electromagnetic field intensity is strong along the traveling direction of the traveling wave, and a high temperature holding part that maintains a predetermined firing temperature ( The constant temperature holding portion 53, the remaining microwave absorbing portion 54 that absorbs the attenuated traveling wave without reflecting it and further attenuates and consumes it, and the cooling processing portion 55 that cools the heating target W are configured as a whole. Specifically, the continuous firing furnace of the present embodiment includes an intake part 51, a temperature rise introduction part 52, a high temperature holding part 53, a residual microwave absorption part 54, and a cooling processing part 55, which are provided on a gantry 90 and an auxiliary gantry 91. It is placed on top and maintains a predetermined positional relationship. The total length of the capturing unit 51, the temperature raising introduction unit 52, the high temperature holding unit 53, the remaining microwave absorption unit 54, and the cooling processing unit 55 is about 6 to 10 m, and is configured compactly. Note that the feeding mechanism 100 is a mechanism unit that performs feeding by sequentially moving the conveyance body 70 guided by the conveyance guide 60 from the carry-in port 13 to the carry-out port 15 of the firing waveguide 50.

  Note that the firing waveguide 50 in the case of implementing the present invention requires the entire configuration of the capturing section 51, the temperature raising introduction section 52, the high temperature holding section 53, the remaining microwave absorption section 54, and the cooling processing section 55. Instead, the microwave generated in the microwave source 1 is confined to propagate the traveling wave with the characteristics of the waveguide, and the contained heating object W is heated and fired while being moved in the traveling direction of the traveling wave. The temperature raising introduction part 52 and the high temperature holding part 53 are constituent features.

Next, the structure and characteristics of the capture unit 51, the temperature rise introduction unit 52, the high temperature holding unit 53, the residual microwave absorption unit 54, the cooling processing unit 55, and the feed mechanism 100 of the continuous firing furnace of the present embodiment will be sequentially described. .
Since the taking-in part 51 of this Embodiment uses the tangent which contacts the flange 19 side straight line inside a bending, it is made | formed by the deformation | transformation E bend 10. FIG. In the modified E bend 10, the guide of the fired waveguide 50 shown in FIG. 8 is placed on the carry-in entrance 13 of the heating object W of the fired waveguide 50 on the extension line of the inner lower surface on the flange 19 side of the deformed E bend 10. Compared with the wave tube main body 39, the carry-in port 13 shown in FIG. 6 has a small vertical size of about 1/8, a horizontal size of about 1/3, and an opening area of 1/10 to 1/20 or less. A protrusion 11 having a wavelength of / 4 wavelength or more is formed, and an opening 12 is formed at the end thereof.

  Specifically, as shown in FIGS. 5 and 6, the opening 12 of the protruding portion 11 that becomes the carry-in port 13 for the heating target W of the firing waveguide 50 has a height of 10 to 20 mm in cross-sectional inner dimensions, and a lateral width. The thickness is 60 to 100 mm and the thickness is 1 to 10 mm. From the functional part of the waveguide main body 39 for confining and propagating microwaves like the E bend 4, that is, from the flange 19 of the modified E bend 10, the maximum position (lower side) is 300 mm, and the minimum position (upper side) is 100 mm. It is set to protrude only. This indicates that the protruding portion 11 protrudes from the functional portion of the waveguide by a quarter wavelength or more. Incidentally, the wavelength of 1 GHz microwave is 300 mm, and its quarter wavelength is 75 mm.

  Accordingly, the carry-in port 13 for the heating object W of the firing waveguide 50 of the modified E bend 10 is temporarily opened even if the opening 12 is in an open state, or a part of the heating object W protrudes from there. However, the microwave energy is not leaked to the outside of the fired waveguide 50 by being reflected and induced by it.

Further, a conveyance guide 60 including a pair of rails 61 and 62 is disposed at the carry-in port 13 for the heating object W. Conveying guide 60 is in the lowest position in the position of the flange 19 of the opening 12 and its modified E bend 10 of the protrusion 11, it is maintained in the flange 41F of the side position of the unit firing waveguide 30 _-1.

From the opening 12 of the protruding portion 11 of the entrance 13 of the heating object W, the conveyance guide 60 is protruded, it is connected to the conveying guide 60 of unit firing waveguide 30 _-1 later. The conveyance guide 60 disposed on the projecting portion 11 of the modified E bend 10 is firmly fixed to the projecting portion 11 via a spacer 66 made of a heat insulating material with small energy loss. Deformation Inside the E bends 10, leading to the rail 61, 62 of the pair of the conveying guide 60 essentially linearly arranged with units fired waveguide 30 _-1 later.
As described above, the capturing unit 51 of the present embodiment uses the linear tangent line of the bending of the waveguide, so that the opening 12 is in an open state or a part of the heating object from there. Even if W protrudes to the outside, the carry-in port 13 can be formed in which the microwave energy is not reflected and guided to the outside of the firing waveguide 50. Further, as will be described later, the conveyance guide 60 can be set to a predetermined linear motion including horizontal.

The temperature raising introduction part 52 of the firing waveguide 50 of the present embodiment is mainly composed of two unit firing waveguides 30 _-1 and 30 _-2 .
FIG. 7 is a side view of the main part showing the configuration of the temperature raising introduction part of the continuous firing furnace in the embodiment of the present invention. 8 is a sectional view taken along the cutting line AA in FIG. 7, FIG. 9 is a sectional view taken along the cutting line BB in FIG. 7, and FIG. 10 is a sectional view taken along the cutting line CC in FIG.

As described above, the fired waveguide 50 uses a standardized waveguide, and flanges 41F (F of the flange is the microwave generation source 1 side) and 41R (R of the flange is the microwave generation) at both ends. Specific unit firing waveguides 30 _-1 , 30 _-2 , 30 _-3 , ..., 30 _-9 , specifically having the opposite side of the source 1), 42F, 42R, ..., 49F, 49R Is an inner dimension of a rectangular waveguide WR975 (EIA model name), and the inner dimension of the cross section is precisely 123.8 ± 0.25 mm in height and 247.65 ± 0.25 mm in width, The plate thickness is 10 mm. The unit firing waveguides 30 _-1 , 30 _-2 , 30 _-3 ,..., 30 _-9 are closely connected by flanges 41F, 41R, 42F, 42R,. The structure is such that no leakage occurs.

  The material of the sintered waveguide 50 is preferably one having a low microwave transmission loss, and any of copper, aluminum, stainless steel, and general steel is desirable. In the present embodiment, aluminum is selected from the viewpoints of economy and workability. Straight pipe 3, E bend 4, straight pipe 5, 1/2 demultiplexer 6, H bend 7 (7R, 7L), power monitor 8 (8R, 8L), tuner 9 (9R, 9L), modified E bend 10 The same applies to the materials (10R, 10L).

Unit firing waveguide 30 constituting the heating inlet portion 52 and the high-temperature holding section 53, i.e., the unit fired waveguide 30 _-1, 30 _-2, 30 _-3, ..., in the 30 _-6, the upper surface Further, heat insulating materials 31 and 32 having a thickness of 20 to 30 mm are disposed on the lower surface, and heat insulating materials 33 and 34 having a thickness of 40 to 60 mm are disposed on the left and right surfaces. The heat insulating materials 31 and 32 and the heat insulating materials 33 and 34 according to the present embodiment are good dielectrics, and do not generate heat due to microwave energy, that is, ceramics with very little energy loss absorbed by the dielectric. Therefore, the absorbed energy is small. In the present embodiment, the heat insulating materials 31 and 32 and the heat insulating materials 33 and 34 are disposed in the unit firing waveguide 30 constituting the temperature rising introduction portion 52 and the high temperature holding portion 53. In the structure in which the heating object W is taken into the firing waveguide 50, a heat insulating material can be used or omitted. Moreover, when a cooling process is incorporated in the firing waveguide 50, the use of a heat insulating material can be omitted in the cooling process.
In any case, the heat insulating materials 31 and 32 and the heat insulating materials 33 and 34 are arranged in the unit firing waveguides 30 _-1 , 30 _-2 , 30 _{-3 ,.} It is preferable to be disposed on the inner wall surface and prevent heat radiation from inside the unit firing waveguides _30-1 , _30-2 , _30-3 , ..., _30-6 . But when practicing the present invention, the unit fired waveguide 30 _-1, 30 _-2, 30 _-3, ..., the internal state of the 30 _-6, for example, through a belt conveyor inside In such a case, the unit firing waveguides 30 _-1 , 30 _-2 , 30 _-3 ,..., 30 _-6 can be disposed on the outer wall surface.

Here, the heat insulation materials 31 and 32 and the heat insulation materials 33 and 34 of the present embodiment are expressed by the following equation, where P is energy absorbed by the dielectric.
P = (ε ₀ · ε ^" · ω · E ² · V _S ) ^1/2
Where ε _O = dielectric constant of vacuum
ε ^" = ε _r · tan δ = dielectric loss factor of dielectric
ε _r = dielectric constant
tan δ = dielectric loss angle
ω = each frequency
E = field strength
V _S = dielectric volume. That is, a material having a low dielectric loss factor of a dielectric material functions as a heat insulating material because it hardly absorbs microwave energy and generates heat.
Incidentally, Al ₂ O ₃ is 0.06 at 25 ° C. and 0.16 at 1000 ° C., and ZrO ₂ is 0.27 at 25 ° C. and 22.64 at 1000 ° C. If both are compared from the energy loss, it can be seen that Al ₂ O ₃ is more suitable as a heat insulating material.

As described above, the heat insulating materials 31 to 34 are difficult to absorb microwaves and need to have a heat insulating capacity corresponding to the temperature rising profile. Incidentally, as the heat insulating materials 31 to 34 of the present embodiment, it is possible to use an alumina-silica heat insulating material or a silica-titania heat insulating material.
In the present embodiment, when the maximum temperature is 1200 ° C., the temperature of the outer surface of the waveguide body 39 is 80 ° C. or less due to the heat insulating materials 31 to 34 of the waveguide body 39, and the heat of the fired waveguide 50 Strain and stress due to expansion were completely negligible. When the maximum temperature is further increased, there is a concern that distortion and stress may occur due to the thermal expansion of the fired waveguide 50 itself. Therefore, the outer periphery of the fired waveguide 50 that is a high temperature part is cooled by water, air, or the like. Temperature control is required.
As a precaution, the microwave waveguide having a frequency of 915 MHz has an internal size of WR975 to WR1150, thereby increasing the cross-sectional shape and increasing the thickness of the heat insulating material. A method for reducing the temperature can also be used.

During the opposite side of the flange 42R from the opening 12 by passing through a unit firing waveguide 30 _-1 units fired waveguide 30 _-2 units fired waveguide 30 _-1 of the protruding portion 11, a pair of A conveyance guide 60 composed of rails 61 and 62 is provided. It rails 61, 62 of the pair of the conveying guide 60, as shown in FIG. 8, at the lowest position in the position of the flange 41F of the opening 12 and the unit firing waveguide 30 _-1 protrusions 11, units firing guide As shown in FIG. 10, the wave guide 30-2 is set at the center position of the waveguide main body 39 at the position of the flange 42 _</ b> R.
In general, the transport guide 60 has a linear motion in consideration of the ease of mechanical transport of the heating object W, and the two unit firing waveguides 30 _-1 and 30 _-2 are set at a predetermined angle. It is better to change it relatively by inclining.

For the unit firing waveguides 30 after the unit firing waveguide 30 _-3 , the transport guide 60 is positioned at a linear position on the extension line of the transport guides 60 of the two unit firing waveguides 30 _-1 and 30 _-2. As shown in FIG. 1, there is no relative change between the unit firing waveguides _{30-3 and the} following and the conveyance guide 60.

Here, the relative movement between the carrier 70 and the inner surface of the firing waveguide 50 according to the present embodiment will be described in detail.
The opening 12 formed on the lower surface side of the projection 11 as the carry-in port 13 for the heating target W of the firing waveguide 50 of the modified E bend 10 of the present embodiment is formed from the opening 12 of the projection 11. The conveyance guide 60 to the 50 carry-out ports 15 is linear, and the position of the firing waveguide 50 is relatively changed.

The relative change in the position of the rail 61, 62 of the pair of the conveying guide 60 and the firing waveguide 50 is provided between the flange 41F of the flange 19 and the unit firing waveguide 30 _-1 variant E bend 10 The angle adjusting adapter 66 made of aluminum and having an opening that matches the waveguide characteristics of the fired waveguide 50 is clamped so as to sandwich it. Angle adjustment adapter 66, the length Lmm unit firing waveguide 30 _-1 and units fired waveguide 30 _-2, there is a change in height 124/2 mm of the central section of the firing waveguide 50 Is set as follows. However, the position of the conveying guide 60 of the opening 12 and the unit firing waveguide 30 _-1 of the protrusion 11 of the entrance 13 of the heating object W firing waveguide 50 variant E bend 10, from the lower surface given Since the initial value δ that is a distance away is set, the heating object W of the firing waveguide 50 is usually set at the center of the cross section of the firing waveguide 50. It is set lower in the range of about δ mm than the height position 124/2 of the central cross section = 62 mm.

The angle θ of the angle adjustment adapter 66 when the temperature raising introduction part 52 is made of two unit firing waveguides 30 _-1 and 30 _-2 is:
θ = tan ⁻¹ (62−δ) mm / 2 length Lmm of unit fired waveguide
Usually, since the heating object W is disposed at the center position,
θ> tan ^-1 length Lmm of 50 mm / 2 unit firing waveguide
θ <tan ⁻¹ 75 mm / 2 unit firing waveguide length Lmm
Is set to an angle of
In other words, the angle θ of the angle adjustment adapter 66 of the present embodiment is a quadrangular frame that is thick on the upper side and thin on the lower side, and the angle θ sets the distance from the lower surface of the firing waveguide 50 and its change. The length of the firing waveguide 50 to be determined is determined.
In the present embodiment, the temperature raising introduction part 52 has been described as the case where the two unit firing waveguides 30 _-1 and 30 _-2 are used. However, when the present invention is implemented, the heating target W Depending on the characteristics, one unit firing waveguide 30 _-1 or three or more unit firing waveguides 30 _-1 , 30 _-2 , 30 _-3 can be provided.

Also between the flange 43F of the unit firing waveguide 30 _-2 flange 42R and units fired waveguide 30 _-3, is provided with the angle adjustment adapter 67. The angle adjustment adapter 67 is the reverse of the angle adjustment adapter 66, that is, the same one as the angle adjustment adapter 66 is created and attached with its top and bottom reversed. The angle −θ of the angle adjustment adapter 67 does not change the position of the unit firing waveguide 30 _{-3 and the} following and the conveyance guide 60 by raising the angle lowered by the angle adjustment adapter 66 by the same angle. The fired waveguide 50 is used.
Therefore, the carrier 70 is taken in by the angle θ of the angle adjustment adapter 66, and the carrier 70 is moved to a position where the electromagnetic field strength of the firing waveguide 50 having the waveguide characteristics is strong. It can be transported at a position with strong field strength.

  In the present embodiment, the case of the carry-in port 13 for the heating target W of the deformation E bend 10 has been described. However, when the present invention is implemented, the heating target W of the firing waveguide 50 of the deformation E bend 10 is described. As the carry-in port 13, the protruding portion 11 and the opening 12 formed on the upper surface side can also be used. In particular, in the present embodiment, since the microwave energy supplied from the supply waveguide 20 is on the upper side of the deformation E bend 10, the carrier 70 is disposed on the lower surface side of the projecting portion 11 of the deformation E bend 10. It becomes easy to secure a space for disposing the feeding mechanism 100 that is sequentially moved.

Conversely, when the microwave energy supplied from the supply waveguide 20 to the modified E bend 10 is supplied from the lower side, the transport body 70 is sequentially moved from the protrusion 11 provided on the upper side of the modified E bend 10. It becomes easy to secure a space for disposing the feeding mechanism 100.
Further, when the microwave energy supplied from the supply waveguide 20 is on the left side or the right side, it can be supplied from the protrusion 11 provided on the right side or the left side of the modified E bend 10. In the present embodiment, an E bend is used as the deformed E bend 10. However, it can be a deformed H bend using an H bend, and a deformed E corner or a deformed H corner using a corner. It is possible to do this, but details will be described later.

The pair of rails 61 and 62 as the transport guide 60 is made of a bar material having a substantially C-shaped cross section made of an alumina material having a small dielectric loss factor (ε ^″ = ε _r · tan δ), and is provided at predetermined intervals. An opening 38 having a substantially rectangular cross section is formed in the gap holding heat-resistant body 35. The opening 38 of the gap holding heat-resistant body 35 is made of a bar material having a substantially C-shaped cross section. It is hold | maintained so that the opening of the conveyance guide 60 may be opposite. A wrapped conveyance guide 60 is disposed, and is fixed so as not to easily move between the conveyance guide 60 and the heat-resisting body 35 for maintaining the distance.
The position between the conveyance guides 60 is at the center position of the waveguide body 39 when expressed in the left and right cross-sectional areas of the waveguide body 39 of the unit firing waveguide 30.

  Between the conveyance guides 60, a conveyance plate 71 made of a SiC plate having a thickness of about 1 to 10 mm with a surface of 100 × 60 mm made of SiC material, and a guide 72 made of a bar material having a substantially C-shaped cross section at both ends thereof. A transport body 70 configured by mounting a pair of rails 61 is arranged to be movable in the length direction of a pair of rails 61 and 62 as a transport guide 60. That is, the transport body 70 is configured by attaching a guide 72 whose movement direction is specified to the transport guide 60 to at least the opposite side of the transport plate 71 made of an SiC plate, and the heating object W is placed on the upper surface of the transport body 70. If there is a possibility that the object to be heated W will fall when transported in a mounted state, if the guide 72 is disposed on two opposite sides of the transport plate 71 made of SiC, it will fall from the side in the traveling direction. The possibility disappears. Incidentally, in relation to the firing speed, normally, unless it is a substantially spherical heating object W, it does not fall from the transport plate 71. In this embodiment, the guide 72 is disposed on the two opposite sides of the transport plate 71. However, even if the guide 72 is disposed on one side of the transport plate 71, the guide 72 and the rail 61 on one side are disposed. Or if the connection with the rail 62 is maintained, if the conveyance board 71 which consists of a SiC plate does not remove | deviate from the rail 61 and the rail 62, it will function as the conveyance body 70 in that state.

Two unit firing waveguide 30 _-1, at 30 _-2, conveying guide 60 is at the position of the flange 42R of the unit firing waveguide 30 _-2, the position of the conveying guide 60, the waveguide body 39 It is set to be the center position of the cross section. That is, the flange 41F side of the unit firing waveguide 30 _-1 and the lower surface position, is set so as to be substantially central position of the cross section of the waveguide body 39 at the position of the flange 42R of the unit firing waveguide 30 _-2 The For this reason, the thickness of the heat insulating material applied under the space-holding heat-resistant body 35 is gradually adjusted to be thicker.

When moving the conveyance plate 71 of the heating object W supplied from the carry-in port 13, the interval between them is set larger than that even if the interval between the continuous conveyance plates 71 is zero in order to obtain high firing efficiency. The inventors have confirmed that there is no problem in the incident / reflective characteristics even if the layers are provided.
According to the experiments by the inventors, the arrangement density of the conveyance bodies 70 in this embodiment is such that the intervals between the conveyance plates 71 made of SiC plates are arranged in close contact with each other or separated by a predetermined distance. By continuously arranging and taking the carrier 70 from the position of the lower surface where the electromagnetic field strength is weak in the direction perpendicular to the length direction of the firing waveguide 50, the carrier 70 is moved to a position where the electromagnetic field strength is strong. The incident / reflection characteristics were confirmed. The output frequency of the microwave generation source 1 used in the present embodiment is 915 MHz. In any case, the conveyance body 70 is taken in from the arrangement of the conveyance plates 71 and the position of the lower surface where the magnetic field strength is weak. It was confirmed that the incident / reflection characteristics by moving to a position where the electromagnetic field strength is strong are not affected. It was confirmed that the influence of the incident / reflecting characteristics was equivalent to the problem of the error range, and it was confirmed that the VSWR was a value close to 1 (the reflectance was almost zero).

Here, the conveyance guide 60 including the pair of rails 61 and 62 needs to use a material having high wear strength with respect to the conveyance of the conveyance body 70. However, a material having conductivity that prevents the microwave from traveling is not preferable. In general, it is desirable to select a material resistant to high temperatures from Al ₂ O ₃ , mullite, cordierite, Si ₃ N ₄ and their composites. In addition, when using SiC having conductivity with high wear strength, it can be used if it is edged with a non-conductive material at regular intervals in order to reduce obstruction of traveling waves.

Further, the transport body 70 on which the heating object W is loaded is appropriately selected according to the heating object W from SiC, Si ₃ N ₄ , alumina, mullite, cordierite, and composites thereof. Then, in order to prevent reaction during the firing of the heating object W, it may be used carrier 70 imparted with co one coating, such as ZrO _2, Al ₂ 0 _3.

The high temperature holding unit 53 that maintains a predetermined high temperature is constituted by four unit fired waveguides 30 _-3 ,..., 30 _-6 .
FIG. 11 is a cross-sectional view of a main part showing the configuration of the high temperature holding part of the continuous firing furnace in the embodiment of the present invention. FIG. 12 is a characteristic diagram showing temperature characteristics of the continuous firing furnace in the embodiment of the present invention.
Here, the high temperature holding unit 53 propagates microwaves generated by the microwave source 1, the unit of the traveling wave characteristics of the waveguide firing waveguide 30 _-3, ..., and 30 _-6 The heated object W is heated while moving in the traveling direction of the traveling wave, and functions to maintain the specific heating maximum temperature. In reality, the traveling wave is a unit firing waveguide. When traveling through the tubes 30 _-1 and 30 _-2 , a lot of energy is consumed, and the temperature tends to drop.

Therefore, even if the microwave energy is lowered by the radiation heating body 21 made of the SiC plate which closes the thickness of the conveyance plate 71 made of the SiC plate of the conveyance body 70 and the upper opening of the conveyance guide 60 and is heated by the microwave energy. In this configuration, the firing temperature is maintained.
Note that the radiant heater 21, but the energy P absorbed in a dielectric is large, or use a material having a large dielectric loss factor epsilon _r · tan [delta dielectric, or by increasing the volume V _S of the dielectric Used.

The material of the radiant heater 21 is appropriately selected from SiC, Al ₂ 0 ₃ , mullite, cordierite, and composites thereof in accordance with the heating object W.

The temperature characteristic of the continuous firing furnace in the present embodiment is a case where the radiation heating body 21 is not used, and the microwave generated by the microwave generation source 1 has a peak of 1200 ° C. in the unit firing waveguide 30 _-2. The temperature distribution when doing so is as shown in FIG. At this time, the microwave output was 4.5 KW.
Here, the use of radiant heater 21, radiant because energy P absorbed is present in the heating body 21, in the unit fired waveguide 30 _-3 subsequent high temperature holding part 53, the heating and heat insulating effect of the radiant heat Is generated, and the temperature is gradually lowered to a predetermined temperature.

Here, furthermore, as an embodiment in the case of maintaining the holding temperature after reaching a predetermined high temperature peak value (1200 ° C.) in the continuous firing furnace of the present embodiment, the temperature rising introduction part 52 overlapping with the former is used. And the high temperature holding | maintenance part 53 is explained in full detail using FIG. 13 thru | or FIG.
13 is a cross-sectional view taken along the cutting line BB of FIG. 7, and FIG. 14 is a cross-sectional view taken along the cutting line CC of FIG. 7 and the internal structure of the high temperature holding portion. FIG. 15 is a cross-sectional view of the main part corresponding to FIG. 10 showing the structure of another example of the high-temperature holding part of the continuous firing furnace in the embodiment of the present invention.

In the figure, a pair of rails 61 and 62 as a conveyance guide 60 is made of a bar material having a substantially C-shaped cross section formed of Al ₂ O ₃ , and is a radiant heat for holding a gap arranged at predetermined intervals. The radiant heating element 22 holds the bar guides 60 having a substantially C-shaped cross section so that the openings of the bar guides face each other. The radiant heater 21 and the radiant heater 22 are configured by disposing the radiant heater 21 and the radiant heater 22 inside the heat insulating materials 31 and 32 shown in FIGS.

  The heat insulating materials 31 and 32 that are the same in the upper and lower sides and the heat insulating materials 33 and 34 that are the same on the left and right are encased in a radiant heating body 22 for spacing and radiant heat made of a SiC plate that absorbs relatively large microwave energy. The conveyance guide 60 is disposed, and the conveyance guide 60 and the radiant heating body 22 are joined together so as not to move easily. Furthermore, the radiant heating body 21 made of a SiC plate that absorbs relatively large energy is disposed in the opening above the conveyance guide 60. As a result, the radiant heater 21 is also heated, and the heating object W on the upper surface of the transport body 70 can be secondarily heated by the radiant heat (radiant heat) from the radiant heater 22 and the radiant heater 21.

Furthermore, since the high-temperature holding unit 53 of the continuous firing furnace of the present embodiment is particularly intended to utilize the radiant heat of the radiant heating body 22 and the radiant heating body 21, this configuration is applied to the upper surface of the transport body 70. If the cover radiant heating body 25 is made of a SiC plate that covers the heating object W and is made of a SiC plate that absorbs relatively large microwave energy, and moves together with the transport plate 70, the thermostatic effect is remarkably stabilized. .
At this time, the mass of the cover radiant heating element 25 made of a SiC plate that absorbs relatively large microwave energy is determined by the temperature of the heating object W and the high-temperature atmosphere time.

Next, the remaining microwave absorption unit 54 will be described.
The microwave energy that has not been consumed up to the high temperature holding unit 53 is absorbed by the remaining microwave absorption unit 54.
FIG. 16 is a cross-sectional view of the main part showing the configuration of the remaining microwave absorption part of the continuous firing furnace in the embodiment of the present invention.

The remaining microwave absorbing portion 54 is composed of two unit fired waveguides 30 _-7 and 30 _-8 .
The two unit fired waveguides 30 _-7 and 30 _-8 of the fired waveguide 50 function as the residual microwave absorbing portion 54, absorb the attenuated traveling wave without reflecting it, and further attenuate the traveling wave. Exhaust. For this reason, the remaining microwave absorber 54 is provided with two microwave absorbers 80U and a microwave absorber 80D at the upper and lower portions of the conveyance guide 60 set at the center of the firing waveguide 50. . The microwave absorber 80U is inclined so as to be in close contact with the transport guide 60 from the upper surface on the inner surface of the firing waveguide 50, and the microwave absorber 80D is in close contact with the transport guide 60 from the lower surface on the inner surface of the firing waveguide 50. It is inclined so that.

The microwave absorber 80U and the microwave absorber 80D use a plate material made of SiC having high microwave energy absorption characteristics. However, when the present invention is implemented, the microwave absorber 80U and the microwave absorber 80D are not limited to a plate material made of SiC. The material can be selected from materials that absorb and consume microwave energy such as carbon and ferrite.
The microwave absorber 80U and the microwave absorber 80D have a width matching the inner upper surface and the lower surface of the firing waveguide 50, and abut on the inner upper surface or the inner lower surface on the flange 47F side of the unit firing waveguide _30-7. and was located, such that contact with a position on the conveying guide 60 in the flange 48R side of the unit firing waveguide 30 _-8, are disposed inclined so as to continuously vary.
The microwave absorber 80U and the microwave absorber 80D are not easily moved into the two unit firing waveguides 30 _-7 and 30 _-8 by the holding member 36 for holding the gaps arranged at predetermined intervals. Has been.

In the two unit firing waveguides 30 _-7 and 30 _{-8 of the} firing waveguide 50, the microwave absorber 80U and the microwave absorber 80D are materials that absorb and consume microwave energy. As a result, Microwave energy is converted to heat. Therefore, heat radiation characteristics are provided without providing a heat insulating material throughout. The holding member 36 of the microwave absorber 80U and the microwave absorber 80D is basically a heat insulating material, but is configured to dissipate heat from the waveguide body 39 by not being continuously installed.

According to the experiments by the inventors, the electric power absorbed and consumed by the microwave energy by the microwave absorber 80U and the microwave absorber 80D is several percent or less, and the unit firing waveguides _30-7 and _30-8. It was confirmed that the heating object W was gradually cooled without being rapidly cooled by natural heat radiation from the outer surface. Further, in the present embodiment, the microwave absorber 80U and the microwave absorber 80D are disposed in the two unit firing waveguides 30 _-7 and 30 _-8 of the firing waveguide 50. in the practice of the present invention, as long as only the purpose of absorbing consumed microwave energy, may be disposed only in one unit firing waveguide 30 _-7 or unit firing waveguide 30 _-8 . Conversely, the microwave absorber 80U and the microwave absorber 80D may be disposed in three or more unit firing waveguides 30, or may be repeatedly provided in a plurality of stages.

In the present embodiment, the microwave absorber 80U and the microwave absorber 80D are disposed above and below the internal opening of the waveguide body 39 of the transport guide 60. However, when the present invention is implemented, A microwave absorber may be disposed on the left and right sides of the internal opening of the waveguide main body 39. In this case, not to arrange so that the contact position to the conveying guide 60 in the flange 48R side of the unit firing waveguide 30 _-8, provided a notch in the contact position to the conveying guide 60 Thus, it is desirable to use two microwave absorbers that avoid the gap between the conveyance guides 60 from the viewpoint of preventing leakage of the microwaves.

The materials of the microwave absorber 80U and the microwave absorber 80D are desired to have particularly large energy P absorbed by the dielectric. Therefore, by increasing the dielectric loss factor epsilon _r · tan [delta dielectric, which increases the volume V _S of the dielectric. Specifically, it is appropriately selected from SiC, carbon, ferrite and the like having high microwave absorption characteristics. Further, their weight is appropriately selected in order to completely prevent microwave leakage. Of course, the form is not limited to a plate-like material, and may be a thread-like or cotton-like substance.

Next, the cooling processing unit 55 of the present embodiment will be described.
Conveying guide 60 that passes through the flange 48R side of the unit firing waveguide 30 _-8 firing waveguide 50 is configured to cool a unit firing waveguide 30 _-9 and / or room temperature as required .
FIG. 17 is a cross-sectional view of the main part showing the configuration of the cooling processing unit of the continuous firing furnace in the embodiment of the present invention, and FIG. 18 is the main part showing the configuration of the carry-out port of the continuous firing furnace in the embodiment of the present invention. FIG. 19 is a front view of the main part showing the configuration of the cooling processing unit of the continuous firing furnace in the embodiment of the present invention.

That is, there is no possibility of burns when the heating target W is gradually cooled to such an extent that the unit firing waveguides 30 _-7 and 30 _-8 are not damaged by rapid cooling, and the cooling temperature is taken up manually. as such, after passing through the unit firing waveguide 30 _-9 as a cooling processing unit 55, as shown in FIG. 17, carry-out port of the sealing member 16 attached to the flange 49R of the unit firing waveguide 30 _-9 15 is led to the outside air cooling unit 56 of the cooling processing unit 55 which further lowers the temperature at room temperature, where it is cooled to a temperature conscious of the next process.

In the cooling processing unit 55, natural cooling may be performed at room temperature like the outside air cooling unit 56, or forced cooling may be performed by water cooling or air cooling. Also, as in the units firing waveguide 30 _-9 it may use one or more unit firing waveguide 30 to the cooling. In order to efficiently lower the temperature of the object to be heated W by the cooling processing unit 55, it is desirable to provide a cover that covers the conveyance guide 60 and to circulate or blow cooling gas into the cover.

In the cooling unit 55 of the present embodiment, the conveyance guide 60 which has passed through the flange 49R side of the unit firing waveguide 30 _-9 firing waveguide 50 passes through the sealing member 16 attached to the flange 49R These are fixed to a conveyance base 65 made of a metal plate bent at both ends, and are movable on a pedestal 90 and an auxiliary pedestal 92 thereon not shown in FIG.

Next, the feed mechanism 100 of the present embodiment will be described.
20 to 22 are main part front views showing the configurations of the feed mechanisms of three types of continuous firing furnaces according to the embodiment of the present invention.
The feed mechanism 100 of FIG. 20 that guides the transport body 70 in the continuous firing furnace of the present embodiment from the transport inlet 13 to the transport outlet 15 of the firing waveguide 50 guided by the transport guide 60 pushes the transport body 70. It is a pusher function. The feed mechanism 100 includes a plurality of stages of the transport body 70, and the guide 72 of the transport body 70 is fitted to the transport guide 60 of the carry-in port 13 of the firing waveguide 50. It has a mechanism to push. At this time, the interval between the conveyance plate 71 and the adjacent conveyance plate 71 is determined by the assembly position with the guide 72 that is in continuous contact.
The feed mechanism 100 shown in FIG. 20 has been described with an example using a pair of rails 61 and 62 as the transport guide 60. However, when the present invention is implemented, other methods may be employed.

The continuous firing furnace of the present embodiment shown in FIG. 21 is provided with rollers 60a that continuously rotate independently as the conveyance guide 60A, and moves the conveyance body 70 on the rollers 60a. In this embodiment, the roller 60a as the conveyance guide 60A is configured such that the right and left side surfaces are restricted from moving, and can be continuously moved at a predetermined interval. The roller 60a is made of a good dielectric material having a small dielectric loss factor, and is made of an Al ₂ O ₃ material that does not generate heat due to microwave energy, that is, an Al ₂ O ₃ material that has a very small energy loss absorbed by the dielectric material. In the present embodiment, the supply waveguide 20 for introducing the microwave from the lower side of the firing waveguide 50 is disposed with the carry-in port 13 to the firing waveguide 50 as the upper side. The feed mechanism 100 shown in FIG. 21 that sequentially moves from the carry-in port 13 to the carry-out port 15 of the firing waveguide 50 has a pusher function for pushing out the carrier 70. The feed mechanism 100 includes a plurality of stages of the conveyance bodies 70, and has a mechanism for supplying the conveyance bodies 70 from the carry-in entrance 13 of the firing waveguide 50 and pushing the conveyance bodies 70 on the rollers 60 a. At this time, the distance between the transport plate 71 and the adjacent transport plate 71 is determined by the assembly position with the guide 72 that is in continuous contact, as in the former.

  In the continuous baking furnace of the present embodiment shown in FIG. 22, a rotating drum 60c driven by a motor 60e of a belt conveyor and a conveying belt 60b hung on the rotating drum 60d are disposed as a conveying guide 60B, and the conveying body 70 is moved to the conveying drum 60c. It moves while placed on the conveyor belt 60b. In this embodiment, the conveyance belt 60b as the conveyance guide 60B is configured such that its left and right side surfaces are restricted from moving, and is continuously movable at a predetermined interval. The conveyor belt 60b is made of a good dielectric material and does not generate heat due to microwave energy, that is, a ceramic plate having a small dielectric loss factor, that is, a very small energy loss absorbed by the dielectric material, and the like. The shafts are connected to each other. In the present embodiment, the entrance 13 to the firing waveguide 50 is on the lower side, and microwaves are introduced from the upper side of the firing waveguide 50 through the supply waveguide 20. The feed mechanism 100 shown in FIG. 22 that sequentially moves from the carry-in port 13 to the carry-out port 15 of the firing waveguide 50 is continuously moved (rotated).

  The feed mechanism 100 includes a plurality of stages of the transport body 70, which is placed on the transport belt 60 b of the transport inlet 13 of the firing waveguide 50 and moves the transport plate 71 in this state. At this time, the interval between the conveyance plate 71 and the adjacent conveyance plate 71 is determined by the assembly position and the placement position with the guide 72 that is in continuous contact, as in the former.

  As described above, the pusher function and the roller conveyor feed mechanism 100 basically includes the conveyance guides 60, 60 </ b> A, 60 </ b> B and the conveyance body 70 on which the heating object W is loaded, the pusher function that pushes the conveyance body 70, or the conveyance body 70. It consists of the structure of feed mechanisms 100, such as a belt conveyor which mounts and moves.

  The continuous firing furnace of the present embodiment has basically been described as a firing furnace in the atmosphere. However, when the present invention is implemented, the firing waveguide 50 is made of nitrogen, nitrogen + hydrogen, argon + nitrogen, or the like. It can be used as an inert atmosphere firing furnace by adding atmospheric gas or the like. In this case, the atmosphere gas to be inserted into the firing waveguide 50 is fired at a slightly positive pressure from the atmospheric pressure, and a vacuum replacement chamber is provided before and after the firing waveguide 50 so that the atmosphere and the atmosphere gas are completely removed. Either case of substitution and firing in the atmosphere can be handled.

  In particular, a firing test of the capacitor was performed as the continuous firing furnace of the present embodiment. The firing temperature was 1200 ° C., and the firing ability was fired at a processing speed of 0.3 to 1 hour using a two-row firing waveguide 50 with a total of 6 kg of the heating object W and the carrier 70. The microwave output at this time can process 10 kW and 5 × 5 mm products in two series at 700 pieces / minute, and the firing cost is about ½ that of the conventional firing furnace. It was.

  As described above, the continuous firing furnace of the present embodiment confines the microwave generated by the microwave generation source 1 that generates the microwave, propagates the traveling wave with the characteristics of the waveguide, and heats the housed therein. The firing waveguide 50 for heating and firing the object W takes in the heating object W from a position where the electromagnetic field strength in the direction perpendicular to the length direction of the firing waveguide 50 is weak, and uses the heating object W as the electromagnetic field strength. The heating and firing temperature of the object to be heated W is raised while being moved in the traveling direction of the traveling wave to a strong position.

  Therefore, when firing is performed in the firing waveguide 50, if the heating object W is suddenly started to be heated with high energy, the heating object W is locally dried, partially cracked, or damaged. However, in the present embodiment, the object to be heated W is taken from the vicinity of the wall surface of the firing waveguide 50 having a weak electromagnetic field, and then gradually led to the center of the firing waveguide 50 having a strong electromagnetic field. Therefore, there is little shock given to the heating object W. Further, since the object to be heated W is taken in from the vicinity of the wall surface of the fired waveguide 50 having a weak electromagnetic field, there is almost no electromagnetic wave leaking from the fired waveguide 50. And since temperature rise is not controlled by the load sharing in the baking waveguide 50, there is no waste in power consumption. Furthermore, since almost no reflected wave is generated in the firing waveguide 50, the microwave oscillator constituting the microwave generation source 1 is not damaged by the reflected wave.

  More specifically, the continuous firing furnace is drastically reduced in size, and there is no need to stack the heating object W in multiple stages as in the conventional furnace. As a result, the firing efficiency of the small electronic component is improved several times, and further, the atmosphere heating of the radiation heating body 21, the radiation heating body 22, the cover radiation heating body 25, etc. can be added, so that the firing is performed in the air. Without being limited to ceramic electronic parts, it can also be used for ceramic electronic parts fired in atmosphere firing and automobile parts that are metal parts. Moreover, since the heating process uses the microwave internal heating effect to the maximum extent, it can be expected to improve the characteristic values of materials such as electronic components.

  The continuous firing furnace of the present embodiment takes in the heating object W from the position where the electromagnetic field strength of the firing waveguide 50 is weak, and moves the heating object W to a position where the electromagnetic field strength is strong. Since it is taken in from the lower surface side of the tube 50 and moved to the center of the cross section of the firing waveguide 50, the design freedom is increased above the firing waveguide 50, and the microwave is propagated to the firing waveguide 50. The position setting is suitable for the one in which the supply waveguide 20 is arranged on the upper part.

  On the contrary, in the case of taking in from the upper surface side of the firing waveguide 50 and moving to the center of the cross section of the firing waveguide 50, the firing waveguide 50 is gradually lowered from the upper direction to the center. The position setting is suitable for the one in which the supply waveguide 20 that propagates the microwave to the wave tube 50 is disposed below.

Since the temperature lowering process after the heating and firing by the firing waveguide 50 of the continuous firing furnace of the present embodiment is a high temperature holding process and a cooling process, it is fired for a specific time at a predetermined firing temperature, and then a cooling process. Thus, the fired product can be directly taken out, and the firing cooling management becomes easy.
However, when carrying out the present invention, the temperature lowering process after the heating and baking by the baking waveguide 50 can be omitted, and the temperature management can be performed by another apparatus. That is, in the firing waveguide 50 when the present invention is implemented, only heating and firing can be performed. Moreover, it can also be set as the isothermal process after heat-firing. Furthermore, it may be a constant temperature treatment and cooling treatment after heating and baking, and a cooling treatment after heating and baking. In any case, after heating and baking, it is only necessary to perform a process that matches the subsequent purpose.

  Since the supply waveguide 20 of the continuous firing furnace of the present embodiment is provided with the tuner 9, it branches from the single microwave generation source 1 to a plurality of waveguide rows 50. The supply waveguide 20 can control the distribution of the branched microwaves to a desired value. Therefore, when the output of the microwave oscillator of the microwave generation source 1 is large, a plurality of waveguide rows 50 can be arranged to increase the production capacity. Two series and four series can be used.

  The operation of taking the heating object W from the position where the electromagnetic field strength is weak in the firing waveguide 50 of the continuous firing furnace of the present embodiment and moving the heating object W to a position where the electromagnetic field strength is strong is the firing waveguide. The angle is adjusted by the angle adjusting adapters 66 and 67 on the flanges 41F and 42R side connecting the 50 to each other, and the heating object W is moved to a position where the electromagnetic field strength is strong. Therefore, the relative movement direction of the firing waveguide 50 and the heating object W is changed only by the angle adjustment adapters 66 and 67 on the flanges 41F and 42R side connecting the unit firing waveguides 30 to each other. There is no need to change the shape of the standardized waveguide, and an inexpensive standard product can be used as the firing waveguide 50. Of course, the flanges 41F and 42R can also have the functions of the angle adjustment adapters 66 and 67.

By the way, about the continuous baking furnace of the said embodiment, the structure was demonstrated by the concept of the apparatus. However, when carrying out the present invention, it can also be regarded as a method invention.
That is, the continuous firing method of the above embodiment is introduced with a microwave supply unit including a supply waveguide 20 and the like that confines the microwave generated by the microwave generation source 1 and guides it to the firing waveguide 50. The microwave energy is confined, the traveling wave is propagated with the characteristics of the waveguide, and the heating object W accommodated in the firing waveguide 50 is heated and fired while being moved in the traveling direction of the traveling wave. The heating object W is taken in from the temperature rising introduction part at a position where the electromagnetic field intensity is weak in the direction perpendicular to the length direction of the baking waveguide 50. The heating and firing temperature of the heating object W is increased by moving W to a position where the electromagnetic field strength is strong.

  Therefore, as in the continuous firing furnace of the above embodiment, when firing is performed in the firing waveguide 50, when the heating of the heating target W is suddenly started with high energy, the heating target W is cracked, In the present invention, the object to be heated W is inserted from the vicinity of the wall surface of the firing waveguide 50 having a weak electromagnetic field, and then gradually led to the center of the firing waveguide 50 having a strong electromagnetic field. Therefore, there is little shock given to the heating object W. Further, since the heating object W is inserted from the vicinity of the wall surface of the fired waveguide 50 having a weak electromagnetic field, there is almost no electromagnetic wave leaking from the fired waveguide 50. And since temperature rise is not controlled by the load sharing in the baking waveguide 50, there is no waste in power consumption. Furthermore, since almost no reflected wave is generated in the firing waveguide 50, the microwave oscillator constituting the microwave generation source 1 is not damaged by the reflected wave.

  More specifically, the continuous firing furnace is drastically reduced in size, and there is no need to stack the heating object W in multiple stages as in the conventional furnace. As a result, the firing efficiency of the small electronic component is improved several times, and further, the atmosphere heating of the radiation heating body 21, the radiation heating body 22, the cover radiation heating body 25, etc. can be added, so that the firing is performed in the air. Without being limited to ceramic electronic parts, it can also be used for ceramic electronic parts fired in atmosphere firing and automobile parts that are metal parts. Moreover, since the heating process uses the microwave internal heating effect to the maximum extent, it can be expected to improve the characteristic values of materials such as electronic components.

  In the continuous firing method according to the present embodiment, the heating target 52 that takes in the heating object W from a position where the electromagnetic field strength is weak and moves the heating object W to a position where the electromagnetic field strength is strong is provided in the firing waveguide 50. Since it is taken in from the lower surface of the tube and moved to the center of the firing waveguide 50, the position setting suitable for the one in which the supply waveguide 20 for conveying the microwave energy to the firing waveguide 50 is arranged at the upper part Become.

  Conversely, in the continuous firing method of the present embodiment, in the case of taking in from the upper surface of the firing waveguide 50 and moving it to the center of the firing waveguide 50, the supply guide for conveying the microwave energy to the firing waveguide 50. The position setting is suitable for the wave tube 20 disposed below.

  In the continuous firing method of the present embodiment, the temperature lowering process after heating and firing by the firing waveguide 50 is a high-temperature holding process and a cooling process, a high-temperature holding process or a cooling process. Since it is fired for a period of time and then cooled to room temperature, the fired product can be directly taken out without being cooled externally.

  In the continuous firing method of the present embodiment, the operation of taking the heating object W from the position where the electromagnetic field strength of the firing waveguide 50 is weak and moving the heating object W to the position where the electromagnetic field strength is strong is the firing waveguide. Since the tube 50 is connected to each other by the flange itself or the angle adjustment adapters 66 and 67 on the flanges 41F and 42R side, the heating object W is moved to a position where the electromagnetic field strength is strong. It is only necessary that the relative movement direction of the firing waveguide 50 and the heating object W can be changed by the flanges that connect each other, and there is no need to change the shape of the standardized waveguide. Therefore, an inexpensive device can be manufactured.

In the continuous firing furnace and the continuous firing method of the above-described embodiment, of the temperature rise profile and the temperature fall profile, the temperature rise profile has a measurement hole formed in the waveguide body 39 of the unit fired waveguides 30 _-2 and 30 _-3. The position is controlled by a radiation thermometer so that the position reaches the maximum temperature, and can have arbitrary temperature characteristics in cooperation with the microwave generation source 1.
In particular, it is clear that the object to be heated W is supplied from the upper part or the lower part of the fired waveguide 50, so that the electromagnetic field density of the microwave is strongest at the center in the cross section of the waveguide body 39. The heating object W is inserted from the upper part or the lower part of the low-density waveguide main body 39, and as the heating object W is gradually moved to the central part, a temperature rising profile is formed to raise the temperature, and heating is performed. The object W can be heated at a constant temperature increase rate to the target maximum temperature at the moving inclined portion. Further, the temperature lowering profile can arbitrarily have temperature holding and temperature lowering characteristics depending on the combination of the thickness of the conveying plate 71, the radiant heaters 21 and 22, and the cover type radiant heater 25. The firing waveguide 50 having a parallel portion parallel to the reference floor behind the inclined portion reaches the highest temperature at the highest position of the inclined portion by the unit firing waveguide 30 _-2 which is the temperature raising introduction portion 52, and By holding the high temperature holding part 53 by the parallel part holding the maximum temperature, that is, the unit firing waveguides 30 _-4 ,..., 30 _-6 , a holding time at the target maximum temperature is given. In addition, the heating object W that does not require the holding time can be cooled.

Furthermore, in the continuous firing furnace and the continuous firing method of the above embodiment, as an example of inserting the heating object W from a position where the electromagnetic field strength is weak and moving it to a central position where the electromagnetic field strength is strong, two unit firings are performed. The waveguides 30 _-1 and 30 _-2 are linearly changed, but a plurality of step changes can be made. For example, two unit firing waveguides 30 _-1 and 30 _-2 are halved in length, and an angle adjustment adapter of θ / 2 is disposed between the flanges between them, resulting in four broken line changes. Can do.
In this way, by arbitrarily setting the angle θ of the angle adjustment adapter, an arbitrary plurality of relative changes are obtained, and the heating object W is inserted from a position where the electromagnetic field strength is weak, and the central position where the electromagnetic field strength is strong. Can be moved to.

Although various embodiments of the present invention have been described, the modified E bend 10 of the present embodiment has a function of confining a microwave and propagating it to the fired waveguide 50 like the E bend 4, It has a function of taking the object to be heated W into the firing waveguide 50 from a position where the electromagnetic field strength is weak using bending. That is, the modified E bend 10 of the present embodiment confines the microwave supplied from the microwave generation source and propagates the traveling wave with the characteristics of the waveguide, and heats and heats the contained heating object W. Anything is acceptable. The firing waveguide 50 is heated by inserting the heating object W from a position where the electromagnetic field strength is low in the direction perpendicular to the length direction and moving the heating object W to a center position where the electromagnetic field strength is strong. The heating and firing temperature of the object W is raised, the heating object W is taken from the position where the electromagnetic field strength is weak in the firing waveguide 50, and the heating object W is gradually moved to a position where the electromagnetic field strength is strong. I can do it.
Therefore, for example, in addition to the function of confining the microwave in the form of H bend and propagating it to the firing waveguide 50, the firing waveguide 50 is moved from the position where the heating object W is weak from the position where the electromagnetic field strength is weak using bending. It can also be configured to have a function of taking in. That is, the modified E bend 10 of the present embodiment can be a modified H bend.

FIG. 23 is a side view (a), a front view (b), and a front view (c) of only an opening showing a modified H bend of the continuous firing furnace in the embodiment of the present invention.
The take-in portion 51 using the modified E bend 10E of the present embodiment in FIG. 1 can be a modified H bend 10H that uses a tangent line that contacts the straight line on the bottom surface on the flange 19H side of the bend in FIG. . Compared to the inner dimension of the flange 19H (inner dimension obtained by rotating the waveguide main body 39 shown in FIG. 8 of the firing waveguide 50 by 90 degrees) at the carry-in port 13H of the heating object W of the firing waveguide 50. The carry-in port 13H shown in FIG. 23 has a small length of about 1/3 and a width of about 1/8, an opening area of 1/10 to 1/20 or less, and a protrusion 11H having a quarter wavelength or more. And an opening 12H is formed at the end thereof. The opening 12H of the projecting portion 11H serving as the carry-in port 13H for the heating object W of the firing waveguide 50 has a height of 60 to 100 mm, a width of 10 to 20 mm, and a thickness of 1 to 10 mm. From the functional part of the waveguide main body 39 that confines and propagates the microwave as in the E-bend 4 in FIG. 1, that is, from the flange 19H of the modified H-bend 10H, the maximum position (lower side) is 300 mm, and the minimum position. It is set so as to protrude about 100 mm at (upper side). This indicates that the protruding portion 11H protrudes from the functional portion of the waveguide by a quarter wavelength or more. As described above, the modified H bend 10H constituting the capturing unit 51 has a weak electromagnetic field strength by using the bending to heat the object W to be heated in addition to the function of confining the microwave and propagating it to the firing waveguide 50. What is necessary is just to have the function to take in in the baking waveguide 50 from a position.

Furthermore, when implementing this invention, it is not limited to the deformation | transformation E bend 10 and the deformation | transformation H bend of the said embodiment, It can also be set as the deformation | transformation E corner or deformation | transformation H corner using a corner.
FIG. 24 is a side view (a), a front view (b), and a front view (c) of only an opening showing a modified E corner of the continuous firing furnace in the embodiment of the present invention. It is the side view (a) which shows the deformation | transformation H corner of the continuous baking furnace in embodiment, the front view (b), and the front view (c) only of opening.
In FIG. 24, the intake 51 using the modified E bend 10 of the embodiment of FIG. 1 can be a modified E corner 10E that uses a tangent line that contacts the straight line on the bottom surface on the flange 19E side of the bend. . Compared to the inner dimension of the flange 19E (the inner dimension of the waveguide main body 39 shown in FIG. 8 of the firing waveguide 50) to the carry-in entrance 13E of the heating object W of the firing waveguide 50, as shown in FIG. The mouth 13E has a small length of about 1/8, a width of about 1/3, an opening area having a cross-sectional area of 1/10 to 1/20 or less, and forms a protrusion 11E having a quarter wavelength or more. An opening 12E is formed at the end. The only difference is that a basic configuration is used in which the E bend of the modified E bend 10 of the embodiment of FIG. 1 is replaced with an E corner.

25, the take-in portion 51 using the modified E bend 10 of the embodiment of FIG. 1 has a tangent line in which the opening 12h is in contact with a straight line on the side surface on the flange 19h side of the bend (right side in FIG. 25B). The modified H corner 10h can be used. Compared to the inner dimension of the flange 19h at the carry-in port 13h of the heating object W of the firing waveguide 50 (inner dimension obtained by rotating the waveguide body 39 shown in FIG. 8 of the firing waveguide 50 by 90 degrees). The carry-in port 13h shown in FIG. 25 has a small vertical dimension of about 1/3 and a horizontal dimension of about 1/8, an opening area of 1/10 to 1/20 or less in cross-sectional area, and a protrusion 11h having a quarter wavelength or more. And an opening 12h is formed at the end thereof. The basic configuration in which the basic configuration of the E bend of the modified E bend 10 of the embodiment of FIG. 1 is replaced with an H corner is used.
The opening 12h of the projecting portion 11h serving as the carry-in port 13h for the heating target W of the firing waveguide 50 has a height of 60 to 100 mm, a width of 10 to 20 mm, and a thickness of 1 to 10 mm. From the functional part of the waveguide main body 39 that confines and propagates the microwave as in the E-bend 4 in FIG. 1, that is, from the flange 19h of the modified H corner 10h, the maximum position (lower side) is 300 mm, and the minimum position. It is set so as to protrude about 100 mm at (upper side). This indicates that the protruding portion 11h protrudes from the functional portion of the waveguide by a quarter wavelength or more. As described above, the modified H corner 10h constituting the capturing unit 51 has a function of confining the microwave and propagating it to the firing waveguide 50, and uses the bending to make the heating target W have a weak electromagnetic field strength. What is necessary is just to have the function to take in in the baking waveguide 50 from a position.
Note that the carry-in port 13h of the embodiment shown in FIG. 25 is provided at the center of the upper and lower sides of the side surface on the flange 19h side (the right side of FIG. 25 (b)). The heating object W is conveyed in the center.

Thus, when the microwave energy supplied from the supply waveguide 20 is on the left side or the right side, it can be supplied from the protrusion 11 provided on the right side or the left side of the modified E bend 10. In the embodiment shown in FIG. 1, an E bend is used as the deformed E bend 10, but it can be a deformed H bend 10h using an H bend, or a deformed E corner 10E using a corner. Or it can also be set as the deformation | transformation H corner 10h.
However, in the above embodiment, the heating object W is taken from the position where the electromagnetic field strength is low in the direction perpendicular to the length direction of the firing waveguide 50, and the heating object W is moved to the position where the electromagnetic field strength is strong. Thus, in order to raise the heating and firing temperature of the heating object W, the deformation E bend 10, the deformation H bend 10H, the deformation E corner 10E, and the deformation H corner 10h are used, but the unit firing waveguide 30 is used. You can also

FIG. 26 is an explanatory view showing the arrangement of the intake section using the unit firing waveguide of the continuous firing furnace in the embodiment of the present invention.
FIG. 26 shows the arrangement of the capturing section 51 using the unit firing waveguides 30 _-1a , 30 _-2 , 30 _-3, and the capturing section 51 of the present embodiment includes the unit firing waveguide 30. A projecting portion 11a having a cross-sectional area of 1/10 to 1/20 or less with respect to _{-1a and having} a quarter wavelength or more is formed, and an opening 12a is formed at an end thereof. That is, compared with the waveguide main body 39 shown in FIG. 8 of the firing waveguide 50, the carry-in port 13a forms a protruding portion 11a having a length that is about 1/8 and a width that is about 1/3. It branches off from the fired waveguide _30-1a . This branching position is not limited to a specific position of the unit firing waveguide _30-1a .
The carry-in port 13a for the heating target W of the firing waveguide 50 is provided on an extension line on the inner lower surface of the waveguide main body 39 so that the heating target W performs a linear motion in the horizontal direction.
The arrangement angle between the waveguide main body 39 and the carry-in port 13a can be set only by the angle adjustment adapters 66a and 67a on the flanges 41F and 42R side.
As described above, when the present invention is carried out, the heating object W is taken in from the position where the electromagnetic field strength is low in the direction perpendicular to the length direction of the firing waveguide 50, and the heating object W has the electromagnetic field strength. Any structure that raises the heating and baking temperature of the object to be heated W by moving it to a strong position can be adopted.

In addition, the conveyance guide 60 composed of the pair of rails 61 and 62 of the above embodiment, the conveyance plate 71 composed of a SiC plate between the conveyance guides 60, and the guide 72 composed of a bar material having a substantially C-shaped cross section at both ends thereof. When carrying out the present invention, the conveyance body 70 formed by attaching the conveyance guide 60 and the conveyance body 70 can be used in any combination, and the components of the conveyance guide 60 and the conveyance body 70 can be arbitrarily arranged. Can also be combined.
Similarly, the feed mechanism 100 can be implemented as a pusher function, a roller conveyor function, and a belt conveyor function.

  The angle adjusting adapters 66 and 67 maintain the linearity of the unit firing waveguide 30 and move the heating object W from a position where the electromagnetic field strength is weak to a strong position. In this case, the angle adjusting adapters 66 and 67 may be omitted, and the unit firing waveguide 30 may be formed to have an angle. In any case, in the firing waveguide 50, the heating object W is taken in from the position where the electromagnetic field strength is perpendicular to the length direction of the firing waveguide 50, and the heating object W is placed at the position where the electromagnetic field strength is strong. It is only necessary that the heating and baking temperature of the object to be heated W can be increased by moving the object to.

FIG. 1 is a conceptual diagram conceptually showing the overall configuration of a continuous firing furnace in an embodiment of the present invention. FIG. 2 is a side view showing a specific configuration showing the overall configuration of the continuous firing furnace in the embodiment of the present invention. FIG. 3 is a front view showing the supply waveguide of the continuous firing furnace in the embodiment of the present invention. FIG. 4 is a perspective view of a main part showing a supply waveguide of the continuous firing furnace in the embodiment of the present invention. FIG. 5 is a side view (a), a front view (b), and a front view (c) with only an opening showing a modified E bend of the continuous firing furnace in the embodiment of the present invention. FIG. 6 is a front view of the carry-in port for the modified E bend of the continuous firing furnace in the embodiment of the present invention. FIG. 7 is a side view of the main part showing the configuration of the temperature raising introduction part of the continuous firing furnace in the embodiment of the present invention. FIG. 8 is a cross-sectional view of an essential part taken along the cutting line AA in FIG. FIG. 9 is a cross-sectional view of an essential part taken along a cutting line BB in FIG. FIG. 10 is a cross-sectional view of a principal part taken along the cutting line CC in FIG. FIG. 11 is a cross-sectional view of a main part showing the configuration of the high temperature holding part of the continuous firing furnace in the embodiment of the present invention. FIG. 12 is a characteristic diagram showing temperature characteristics of the continuous firing furnace in the embodiment of the present invention. FIG. 13 is a sectional view corresponding to FIG. 9 showing the configuration of the high-temperature holding unit of the continuous firing furnace in the embodiment of the present invention. FIG. 14 is a cross-sectional view of the main part corresponding to FIG. 10 showing the configuration of the high temperature holding part of the continuous firing furnace in the embodiment of the present invention. FIG. 15 is a cross-sectional view of the main part corresponding to FIG. 10 showing the structure of another example of the high-temperature holding part of the continuous firing furnace in the embodiment of the present invention. FIG. 16 is a cross-sectional view of the main part showing the configuration of the remaining microwave absorption part of the continuous firing furnace in the embodiment of the present invention. FIG. 17 is a cross-sectional view of the main part showing the configuration of the cooling processing part of the continuous firing furnace in the embodiment of the present invention. FIG. 18 is a front view of an essential part showing the configuration of the carry-out port of the continuous firing furnace in the embodiment of the present invention. FIG. 19 is a front view of a principal part showing the configuration of the cooling processing unit of the continuous firing furnace in the embodiment of the present invention. FIG. 20 is a main part front view showing the configuration of the feed mechanism of the continuous firing furnace in the embodiment of the present invention. FIG. 21 is a main part front view showing another configuration of the feed mechanism of the continuous firing furnace in the embodiment of the present invention. FIG. 22 is a principal part front view showing another configuration of the feed mechanism of the continuous firing furnace in the embodiment of the present invention. FIG. 23 is a side view (a), a front view (b), and a front view (c) of only an opening showing a modified H bend of the continuous firing furnace in the embodiment of the present invention. FIG. 24 is a side view (a), a front view (b), and a front view (c) of only an opening showing a modified E corner of the continuous firing furnace in the embodiment of the present invention. FIG. 25 is a side view (a), a front view (b), and a front view (c) with only an opening showing a modified H corner of the continuous firing furnace in the embodiment of the present invention. FIG. 26 is an explanatory view showing the arrangement of the intake section using the unit firing waveguide of the continuous firing furnace in the embodiment of the present invention.

Explanation of symbols

W Heating object 1 Microwave generation source 9 (9R, 9L) Tuner 10 (10R, 10L) Deformed E bend 13 Carry-in port 15 Carry-out port 20 Supply waveguide 30 Unit firing waveguide 31-34 Heat insulation material 50 Firing guide Wave tube 51 Capture section 52 Temperature rise introduction section 53 High temperature holding section 54 Remaining microwave absorption section 55 Cooling processing section 60 Transport guides 61 and 62 A pair of rails 66 and 67 Angle adjustment adapter 70 Transport body 80U and 80D Microwave absorber 100 feed mechanism

Claims (11)

A microwave source that generates microwaves;
A firing waveguide for confining microwaves generated by the microwave generation source, propagating traveling waves with the characteristics of the waveguide, and heating and firing while moving a contained heating object in the traveling direction of the traveling waves When,
Comprising a supply waveguide for confining the microwave generated by the microwave generation source and propagating it to the firing waveguide;
In the firing waveguide, a position where the heating object is taken in a direction perpendicular to the length direction of the firing waveguide is a position where the electromagnetic field strength is weak, and the heating object is positioned there from where the electromagnetic field strength is strong A continuous firing furnace characterized by having a structure in which the material to be heated is heated and fired at a position where the electromagnetic field strength is strong and the heating and firing temperature of the object to be heated is increased . The position where the heating object taken in the direction perpendicular to the length direction of the baking waveguide by the baking waveguide is taken as a position where the electromagnetic field strength is weak, and the heating object is set there from a position where the electromagnetic field strength is strong. In the structure of moving and heating and baking the object to be heated at a position where the electromagnetic field strength is strong, the heating is performed on the lower surface side of the baking waveguide, and the movement from there is the baking guide. The continuous firing furnace according to claim 1, wherein the cross section of the wave tube is set at a substantially central position . The position where the heating object taken in the direction perpendicular to the length direction of the baking waveguide by the baking waveguide is taken as a position where the electromagnetic field strength is weak, and the heating object is set there from a position where the electromagnetic field strength is strong. The structure in which the heating object is heated and fired at a position where the electromagnetic field strength is strong is increased and the firing is performed on the upper surface side of the firing waveguide, and the movement from there is the firing guide. The continuous firing furnace according to claim 1, wherein the cross section of the wave tube is set at a substantially central position . The continuous firing furnace according to any one of claims 1 to 3, wherein the firing waveguide has a structure in which a high temperature is maintained and / or cooled after the heating and firing .   The continuous firing furnace according to any one of claims 1 to 4, wherein the supply waveguide includes a tuner. Taking the heating object from a position where the electromagnetic field strength of the firing waveguide is weak, and moving the heating object to a position where the electromagnetic field intensity is strong,
The position where the heating object taken in the direction perpendicular to the length direction of the firing waveguide by the firing waveguide is taken as a position where the electromagnetic field strength is weak, and the position to which the heating object is moved is moved from there. In the heating and baking in which the heating object is heated at a high position and the heating and baking temperature of the heating object is increased, the movement of the heating object to a position where the electromagnetic field strength is strong is connected between the baking waveguides of a predetermined length. The continuous firing furnace according to any one of claims 1 to 5, wherein the firing is performed only by changing a relative movement direction of the firing waveguide and the heating object by a flange to be heated . The microwave generated by the microwave generation source is confined by the microwave supply unit and guided to the firing waveguide,
Confine the guided microwave energy, propagate the traveling wave with the characteristics of the waveguide, and heat and fire while moving the object to be heated contained in the firing waveguide in the traveling direction of the traveling wave ,
The heating object is taken in from the position where the electromagnetic field strength is weak in the direction perpendicular to the length direction of the firing waveguide with respect to the firing waveguide at the temperature rising introduction portion of the firing waveguide, and A continuous baking method, wherein the heating and baking temperature of the heating object is increased while moving the heating object to a position where the electromagnetic field strength is strong.   A temperature raising introduction part that takes in the heating object from a position where the electromagnetic field strength is weak and moves the heating object to a position where the electromagnetic field intensity is strong is taken in from the lower surface side of the baking waveguide, and the baking wave guide The continuous firing method according to claim 7, wherein the continuous firing method is performed by moving the tube to the center of the tube.   A temperature raising introduction unit that takes in the heating object from a position where the electromagnetic field intensity is weak and moves the heating object to a position where the electromagnetic field intensity is strong is taken in from the upper surface side of the baking waveguide, The continuous firing method according to claim 7, wherein the continuous firing method is performed by moving the tube to the center of the tube.   The continuous firing method according to any one of claims 7 to 9, wherein the fired waveguide is subjected to a high-temperature holding treatment and / or a cooling treatment as a temperature lowering treatment after heating and firing.   The operation of taking the heating object from a position where the electromagnetic field strength of the firing waveguide is weak and moving the heating object to a position where the electromagnetic field strength is strong is unit firing of a predetermined length constituting the firing waveguide. The continuous firing according to any one of claims 7 to 10, wherein the object to be heated is moved to a position where the electromagnetic field strength is strong at an angle with a flange connecting the waveguides. Method.

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