JP4941099B2 - Silicon carbide single crystal manufacturing equipment - Google Patents

Description

The present invention, silicon carbide can be used for materials such as a power MOSFET (hereinafter, SiC hereinafter) relates to manufacturing ZoSo location of a single crystal.

Conventionally, a method of growing a SiC single crystal has been proposed (see, for example, Patent Document 1). Specifically, in patent document 1, while joining a seed crystal in a graphite crucible and heating the SiC powder raw material arranged at the bottom of the crucible to 2300 ° C., for example, the SiC powder raw material is sublimated and sublimated. There has been proposed a method of crystallizing a gas on a seed crystal set at a temperature lower than the raw material temperature.
Japanese Patent No. 3792699

  However, in the above conventional technique, when the SiC powder raw material arranged at the bottom of the crucible is heated and sublimated, silicon is mainly sublimated from the upper layer portion of the SiC powder raw material. The silicon is depleted and the upper layer becomes a depleted layer.

  When the SiC powder raw material is continuously heated, the depletion layer becomes thick, and the carbon layer serves to cover the upper layer portion of the SiC powder raw material. From the lower layer portion of the SiC powder raw material that has not yet been sublimated. It becomes difficult to supply the sublimation gas. As a result, there is a problem that the sublimation gas cannot be continuously supplied to the seed crystal, and the growth rate of the SiC single crystal is reduced.

In view of the above points, and an object thereof is to provide a manufacturing equipment of SiC single crystal can be obtained from the powder material continuously supplied sublimation gas on the seed crystal.

To achieve the above object, the present onset bright, and form covering a part of the sublimated gas supply surface of the silicon carbide raw material (5,20,31), heating the silicon carbide source material (5,20,31) The sublimation gas supply adjusting member (4, 4) is configured to form a new sublimation gas supply surface apart from a part of the sublimation gas supply surface of the silicon carbide raw material (5, 20, 31) after a certain time from the start of 19, 30).

  Thereby, even if supply of sublimation gas falls by continuing the form which has covered a part of sublimation gas supply surface of silicon carbide raw material (5, 20, 31), sublimation gas supply adjustment member is a sublimation gas supply surface. The sublimation gas can be supplied from a new sublimation gas supply surface that is formed away from a part of the gas. Therefore, it is possible to continue supplying the sublimation gas to the seed crystal (3), thereby preventing the growth rate of the silicon carbide single crystal (8) from being lowered.

As a specific device, the sublimation gas supply adjusting member has a hollow cylindrical shape, and has a diameter smaller than the inner diameter of the container body (1a), and one end side (4a) of the cylinder is integrated with the lid (1b). And having a separation wall (4) provided with a through hole (4d) on the side,
The lid (1b) is attached so that the open end of the lid (1b) is in contact with and overlaps the open end of the container body (1a), and the end surface (4e) of the other end side (4c) of the separation wall (4) is the container body (1a). The silicon carbide raw material (5) is disposed in the hollow portion of the separation wall (4) in contact with the bottom surface, and the lid (1b) is relatively relative to the container body (1a) in the axial direction of the central axis. It ’s movable,
When the space between the seed crystal (3) and the silicon carbide raw material (5) in the hollow portion of the separation wall (4) is defined as a growth space region (6) and the heating of the crucible (1) is started, the separation wall (4 ), The sublimation gas generated from the silicon carbide raw material (5) exposed in the hollow portion is supplied to the growth space region (6),
The lid (1b) relatively moves away from the container body (1a) after a certain period of time after the start of heating of the crucible (1), and the end surface (4c) of the other end side (4c) of the separation wall (4) ( 4e) moves away from the bottom surface of the container body (1a), so that the silicon carbide raw material (5) in contact with the other end side (4c) of the separation wall (4) serves as a new sublimation gas supply surface. Exposed inside,
From the exposed portion, the sublimation gas passes through the gas supply passage (7) and the through hole (4d) formed in the space between the inner wall surface of the container body (1a) and the outer wall surface of the separation wall (4), and the growth space. It is characterized in that it is supplied to the region (6).

  Thereby, sublimation gas can be supplied in the container main body (1a) from the surface covered with the separation wall (4) in the silicon carbide raw material (5). When a new sublimation gas supply surface is formed in this way, a through hole (4d) is provided in the separation wall (4), so that the sublimation gas grows through the gas supply passage (7) and the through hole (4d). It can lead to the spatial region (6). In this way, the sublimation gas can continue to be supplied to the growth space region (6), and hence the growth rate of the silicon carbide single crystal (8) can be prevented from decreasing.

In this case, a hollow cylindrical cylindrical member (9a) is formed on the inner wall surface of the separation wall (4), and the hollow cylindrical shape is integrated with the cylindrical member (9a), and the bottom surface of the container body (1a). And a heat insulating member (9b) that is fixed to the air and has a breathability, and a slide wall (9) is provided, and a silicon carbide raw material (5) is disposed in a hollow portion of the slide wall (9),
By moving the lid (1b) away from the container body (1a), the sublimation gas can be supplied to the gas supply passage (7) through the heat insulating member (9b).

  Thereby, adhesion with the separation wall (4) and the silicon carbide raw material (5) can be prevented, and the separation wall (4) can be reliably moved after a certain time from the start of heating of the crucible (1).

  Moreover, the slide wall (9) is comprised by the cylindrical member (9a) and the heat insulation member (9b). Therefore, in the initial stage of growth of the silicon carbide single crystal (8), heat is easily transferred to the silicon carbide raw material (5) surrounded by the cylindrical member (9a), while the heat insulating member of the silicon carbide raw material (5) Sublimation of the portion surrounded by (9b) can be suppressed. Then, after the separation wall (4) moves, the sublimation gas can be supplied to the gas supply passage (7) from the portion surrounded by the heat insulating member (9b) in the silicon carbide raw material (5).

  In addition, the code | symbol in the bracket | parenthesis of each said means shows the correspondence with the specific means as described in embodiment mentioned later.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, the same or equivalent parts are denoted by the same reference numerals in the drawings.

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. Fig.1 (a) shows the cross-sectional structure of the SiC single crystal manufacturing apparatus concerning 1st Embodiment of this invention. As shown in this figure, the SiC single crystal manufacturing apparatus includes a graphite crucible 1 constituted by a bottomed cylindrical container body 1a and a circular lid 1b. In the crucible 1, for example, a circular SiC seed crystal 3 is disposed on the back surface of the lid 1 b via a pedestal 2.

  Further, a separation wall 4 made of graphite and having a hollow cylindrical shape is disposed in the crucible 1. FIG. 1B is an external view of the separation wall 4. The separation wall 4 is smaller in diameter than the container main body 1a and the lid 1b, and is integrated with the lid 1b of the crucible 1.

  Specifically, a flange portion 4b shown in FIG. 1A is provided on one end side 4a of the separation wall 4, and the flange portion 4b is integrated with the inner wall of the lid 1b. The other end side 4c of the separation wall 4 protrudes from the opening end of the lid 1b, and the other end side 4c of the separation wall 4 protruding in this way is stored in the container body 1a. In this case, the central axis of the container body 1a, the central axis of the lid 1b, and the central axis of the separation wall 4 are arranged on the same axis.

  A plurality of through holes 4d are provided on the side of the separation wall 4 on the lid 1b side. The plurality of through holes 4d connect the outside of the separation wall 4 and the hollow portion, and function as a passage through which the sublimation gas passes from the outside of the separation wall 4 to the hollow portion. The separation wall 4 corresponds to the sublimation gas supply adjusting member of the present invention.

  Further, as shown in FIG. 1A, in a state where the end surface 4e on the other end side 4c of the separation wall 4 is in contact with the bottom surface of the container body 1a, the hollow portion of the separation wall 4 serves as a sublimation gas supply source. An SiC powder raw material 5 is arranged. That is, the surface of the powder raw material 5 disposed in the hollow portion of the separation wall 4 becomes a sublimation gas supply surface.

  Then, if the space between the seed crystal 3 and the powder raw material 5 is the growth space region 6 in the hollow portion of the separation wall 4, the sublimation gas from the powder raw material 5 passes through the growth space region 6 and is on the surface of the seed crystal 3. The SiC single crystal is grown on the surface of the seed crystal 3 by recrystallization.

  Furthermore, the recessed part 1c is provided in the outer wall surface of the opening edge part of the container main body 1a. When the inner wall of the opening end of the lid 1b is in contact with the recess 1c of the container body 1a and the end surface 4e of the other end 4c of the separation wall 4 contacts the bottom surface of the container body 1a, FIG. ).

  The lid 1b is provided with a drive mechanism (not shown) that moves the lid 1b along the central axis, and the movement of the lid 1b is controlled by a control device (not shown). The above is the overall configuration of the SiC single crystal manufacturing apparatus according to the present embodiment.

  Next, a method for manufacturing a SiC single crystal using the SiC single crystal manufacturing apparatus will be described with reference to the drawings. FIG. 2A is a diagram showing a manufacturing process of the SiC single crystal in the present embodiment. First, as shown in FIG. 1A, a seed crystal 3 is arranged on the bottom of a lid 1b via a pedestal 2 and a powder raw material is formed in a hollow portion of the separation wall 4 so as to face the seed crystal 3. 5 is arranged.

  Subsequently, the crucible 1 is placed in a heating chamber (not shown), and gas is discharged using an exhaust mechanism (not shown), whereby the inside of the external chamber including the inside of the crucible 1 is evacuated and the induction coil is energized. The fixed heater is induction-heated, and the crucible 1 is heated by the radiant heat to bring the inside of the crucible 1 to a predetermined temperature. At this time, by making the frequency or power of energization to each induction coil different, heating that causes a temperature difference with the heater can be performed.

  The temperature inside the crucible 1 is controlled by controlling the energization amount of the induction coil while measuring the temperature of each part of the crucible 1 and the heater through the radiation thermometer. The heater is fixed at a position facing the powder raw material 5, for example.

  For example, an inert gas (Ar gas or the like), hydrogen, or a mixed gas such as nitrogen serving as a dopant to the crystal flows into the heating chamber. This inert gas is discharged via the exhaust pipe. Until the temperature of the growth surface of the seed crystal 3 and the temperature of the SiC powder raw material 5 are increased to the target temperature, the atmospheric pressure in the heating chamber is set to an atmospheric pressure close to atmospheric pressure to suppress sublimation from the powder raw material 5 and reach the target temperature. Now, a vacuum atmosphere is set. For example, when the growth crystal is 4H—SiC, the temperature of the powder raw material 5 is 2100 to 2300 ° C., the temperature of the growth crystal surface is lower by about 10 to 200 ° C., and the vacuum atmosphere is 0.01 to 50 Torr. And

  Thus, the powder raw material 5 is sublimated by heating the powder raw material 5, and sublimation gas is generated from the upper layer portion of the powder raw material 5. The sublimation gas passes through the growth space region 6 and is supplied to the seed crystal 3.

  Then, as described above, when the powder raw material 5 is continuously heated, a carbon layer, that is, a depleted layer in which the silicon layer of the SiC powder raw material 5 is depleted is formed, and if this state is maintained, the supply of sublimation gas decreases. To do. Therefore, after a certain period of time has elapsed since the heating of the powder raw material 5 is started, as shown in FIG. 2 (a), the lid 1b of the crucible 1 is pulled away from the container body 1a by a drive mechanism (not shown). Move relative.

  The timing at which the lid 1b is pulled up is basically the point at which the growth rate begins to decrease due to a change in the growth rate by experiment in advance because the depletion state of the raw material 5 changes depending on the growth conditions, particularly the raw material temperature and the atmospheric pressure. That is, it is preferable to raise the sublimation gas when the generation of sublimation gas starts to decrease. It is desirable that the height to be pulled up is equal to the crystal growth height at that time. This is because by keeping the distance between the surface of the powder raw material 5 and the surface of the growth crystal constant, the fluctuation of the surface temperature difference between the powder raw material 5 and the growth crystal, which is one factor that determines the growth rate, can be suppressed. is there. Therefore, it may be pulled up several times at a height corresponding to the growth height at regular time intervals, or may be continuously pulled up at the same speed as the growth rate.

  In this case, the inner wall of the opening end portion of the lid body 1b is pulled up while being in contact with the recess 1c provided on the outer wall surface of the opening end portion of the container body 1a, so that the form in which the lid body 1b is inserted into the container body 1a is maintained. Is done.

  As a result, the end surface 4e on the other end side 4c of the separation wall 4 is separated from the bottom surface of the container body 1a, and the lower layer portion of the powder raw material 5 that is in contact with the inner wall surface on the other end side 4c of the separation wall 4 It is exposed between the wall surface and the inner wall surface of the container body 1a. This exposed portion becomes a new sublimation gas supply surface. That is, from the exposed part of the lower layer part of this powder raw material 5 to each through-hole 4d provided in the separation wall 4 via the space comprised by the inner wall surface of the container main body 1a and the outer wall surface of the separation wall 4 A gas supply passage 7 can be formed. The gas supply passage 7 joins the growth space region 6 through each through hole 4d. In addition, after starting the heating of a powder raw material, after a fixed time passes, the powder raw material is in a state of being fixed to each other and solidified.

  As described above, the sublimation gas was supplied from the upper layer portion of the powder raw material 5 to the growth space region 6 until the separation wall 4 was pulled up, but the end surface 4e on the other end side 4c of the separation wall 4 was connected to the container body 1a. The sublimation gas generated from the lower layer portion of the powder raw material 5 is guided to the growth space region 6 through the new gas supply passage 7 by exposing the lower layer portion of the powder raw material 5 in the container body 1a. be able to.

  In this case, similarly to the upper layer portion of the powder raw material 5, a depletion layer is also formed in the lower layer portion of the powder raw material 5 on the inner wall surface of the other end side 4c of the separation wall 4 and the portion in contact with the bottom surface of the container body 1a. However, since the depletion layer formed in the lower layer part of the powder raw material 5 is thinner than the depletion layer formed in the upper layer part of the powder raw material 5, the sublimation gas passes through the depletion layer and is supplied to the gas supply passage 7. The

  FIG. 2B is a diagram schematically illustrating the gas supply passage 7. As shown in this figure, the sublimation gas generated from the lower layer portion of the powder raw material 5 passes through each through hole 4d of the separation wall 4 through the gas supply passage 7, and the growth space shown in FIG. It is supplied to the seed crystal 3 through the region 6. Thereby, even if the sublimation gas supplied from the upper layer part of the powder raw material 5 is reduced by the depletion layer, the sublimation gas can be supplied from the lower part of the powder raw material 5, and the sublimation gas is continuously supplied to the seed crystal 3. be able to. In this way, the SiC single crystal 8 is formed on the seed crystal 3.

  As described above, in the present embodiment, during the growth of the SiC single crystal 8, the lid 1b is relatively moved from the container body 1a, and the end surface 4e of the other end 4c of the separation wall 4 is moved to the container body 1a. The lower part of the powder raw material 5 is exposed to the container main body 1a by being separated from the bottom surface, and a gas supply passage 7 formed by the space between the outer wall surface of the separation wall 4 and the inner wall surface of the container main body 1a is formed. It is characterized by.

  Thereby, the sublimation gas generated from the lower layer portion of the powder raw material 5 can be guided through the gas supply passage 7 to the growth space region 6 from each through hole 4 d of the separation wall 4. That is, even if the silicon in the upper layer part of the powder raw material 5 is depleted to form a thick depletion layer and it becomes difficult to supply the sublimation gas from the upper layer part of the powder raw material 5, The sublimation gas can be continuously supplied to the growth space region 6 through the formed gas supply passage 7.

(Second Embodiment)
In the present embodiment, only different parts from the first embodiment will be described. In the first embodiment, since the powder raw material 5 is directly disposed in the hollow portion of the separation wall 4, the depletion layer in which the powder raw material 5 in contact with the separation wall 4 is solidified and the separation wall 4 are fixed to each other, thereby separating the separation wall 4. There is a possibility that it cannot be raised. Therefore, the present embodiment is characterized by reliably pulling up the separation wall 4.

  FIG. 3 is a cross-sectional configuration diagram of an SiC single crystal manufacturing apparatus according to the second embodiment of the present invention. The apparatus according to this embodiment has a configuration in which a slide wall 9 is arranged in a hollow portion of the separation wall 4 in the apparatus shown in FIG.

  The slide wall 9 includes a carbon member 9a and a heat insulating member 9b. Both the carbon member 9a and the heat insulating member 9b have a hollow cylindrical shape. The heat insulating member 9b is disposed on the bottom surface side of the container main body 1a, and the carbon member 9a is disposed on the lid body 1b side. 9 is configured. The heat insulating member 9b is made of a material having air permeability, and for example, a porous material is adopted. The carbon member 9a corresponds to the cylindrical member of the present invention.

  The outer wall surfaces of the carbon member 9a and the heat insulating member 9b are in contact with the inner wall surface of the separation wall 4, and the open end of the heat insulating member 9b is in contact with the bottom surface of the container body 1a. That is, the outer wall surface of the slide wall 9 and the inner wall surface of the separation wall 4 are relatively movable in the axial direction of the crucible 1. In this case, in order to fix the position of the slide wall 9 with respect to the movable separation wall 4, the open end of the heat insulating member 9b is fixed to the bottom surface of the container body 1a by an adhesion method or the like.

  The powder raw material 5 is disposed in the hollow portion of the slide wall 9. Since the upper layer portion of the powder raw material 5 is surrounded by the carbon member 9a, heat is easily transmitted and the powder material 5 is easily sublimated. On the other hand, since the lower layer part of the powder raw material 5 is surrounded by the heat insulating member 9b, it is difficult for heat to be transmitted and sublimation is difficult.

  Next, a method for producing a SiC single crystal using the apparatus having the above configuration will be described with reference to FIGS. FIG. 4 is a diagram showing a manufacturing process of the SiC single crystal in the present embodiment. First, the crucible 1 shown in FIG. 3 is heated. As described above, since heat is easily transmitted to the upper layer portion of the powder raw material 5 and heat is hardly transmitted to the lower layer portion, the upper layer portion is sublimated.

  In this way, the upper layer portion of the powder raw material 5 is preferentially sublimated, and after a predetermined time has elapsed, the separation wall 4 is pulled up as shown in FIG. At this stage, the fixed layer 5a is formed on the powder raw material 5 in contact with the slide wall 9, and the powder raw material 5 and the slide wall 9 are integrated.

  However, since the slide wall 9 and the separation wall 4 are only in contact with each other, the separation wall can be separated by pulling the lid 1b away from the container body 1a in the same manner as in the first embodiment with the position of the slide wall 9 fixed. 4 can be moved relative to the slide wall 9. Thereby, the outer wall of the heat insulation member 9b will oppose the inner wall of the container main body 1a. Further, a gas supply passage 7 that guides the sublimation gas to the growth space region 6 is formed.

  In the state shown in FIG. 3 in which the separation wall 4 is moved, the lower layer portion of the powder raw material 5 is suppressed in heat transfer and sublimation by the heat insulating member 9 b and the separation wall 4. Due to the movement, heat is applied to the lower layer portion of the powder raw material 5 and sublimation gas is generated. That is, the heat insulating member 9b functions to suppress sublimation of the lower layer portion of the powder raw material 5 in the initial stage of growth, and guides sublimation gas generated in the lower layer portion of the powder raw material 5 in the late stage of growth to the gas supply passage 7. Functions as a passage.

  Then, the sublimation gas generated in the lower layer portion of the powder raw material 5 flows through the heat insulating member 9 b to the gas supply passage 7 and joins the growth space region 6 through the through hole 4 d of the separation wall 4. Thus, the sublimation gas can be continuously supplied to the growing SiC single crystal 8.

  As described above, the present embodiment is characterized in that the slide wall 9 is provided in the hollow portion of the separation wall 4. Thereby, adhesion with the separation wall 4 and the powder raw material 5 can be prevented, and the separation wall 4 can be pulled up reliably.

  Further, the slide wall 9 is composed of the carbon member 9a and the heat insulating member 9b, and the lower layer portion of the powder raw material 5 is surrounded by the heat insulating member 9b, so that the lower layer portion of the powder raw material 5 is in the initial growth stage of the SiC single crystal 8. Sublimation of the powder raw material 5 can be sublimated after the separation wall 4 is pulled up.

(Third embodiment)
In each of the above-described embodiments, an apparatus in which the separation wall 4 for separating the inside of the container body 1a is provided in the container body 1a is shown. However, in this embodiment, an apparatus configured by separating the container itself is used. It is characterized by providing.

  FIG. 5 is a cross-sectional configuration diagram of an SiC single crystal manufacturing apparatus according to a third embodiment of the present invention. As shown in this figure, the SiC single crystal manufacturing apparatus includes a hollow cylindrical outer container 11, a bottomed cylindrical inner container 12 disposed in a hollow portion of the outer container 11, and a lid 13. A graphite crucible 10 is provided.

  The side part of the outer container 11 is comprised by the inner wall part 11a, the outer wall part 11b, the end surface part 11c, and the space enclosed by these, The said space becomes the raw material chamber 11d by which the powder raw material 14 is arrange | positioned. Yes. This raw material chamber 11d is provided as wide as possible on the side part from the one end side 11e of the outer container 11 to the other end side 11f. The raw material chamber 11d corresponds to the first chamber of the present invention.

  Further, the inner wall portion 11a on the one end side 11e of the outer container 11 connects the hollow portion of the outer container 11 and the raw material chamber 11d, and also introduces a plurality of sublimation gases generated from the powder raw material 14 to the hollow portion of the outer container 11. A through hole 11g is provided.

  The outer diameter of the inner container 12 is the same as the inner diameter of the outer container 11. Therefore, when the inner container 12 is inserted into the hollow part of the outer container 11, the outer wall of the inner container 12 is in contact with the inner wall part 11 a of the outer container 11 and is accommodated in the hollow part. And the bottom face of the inner side container 12 and the bottom face of the other end side 11f of the outer side container 11 are match | combined with the same surface. In this case, the height of the inner container 12 is such that the open end of the inner container 12 does not close the through holes 11g provided in the inner wall 11a of the outer container 11. The powder raw material 15 is also arranged in the inner container 12 arranged in this way.

  In addition, a circular lid 13 is attached to and integrated with one end side 11e of the outer container 11, and for example, a circular SiC seed crystal 3 is disposed on the back surface of the lid 1b via a base 2. Yes. Thereby, a growth space region 16 is formed between the seed crystal 3 and the powder raw material 15 in the hollow portion of the outer container 11. The above is the overall configuration of the SiC single crystal manufacturing apparatus according to the present embodiment.

  The lid body 13 or the outer container 11 is provided with a drive mechanism (not shown) that moves the lid body 13 and the outer container 11 away from the inner container 12 as in the above embodiments.

  Next, a method for manufacturing a SiC single crystal using the SiC single crystal manufacturing apparatus will be described with reference to FIGS. FIG. 6 is a diagram showing a manufacturing process of the SiC single crystal in the present embodiment.

  First, as shown in FIG. 5, the powder raw material 14 is disposed in the raw material chamber 11 d of the outer container 11, the powder raw material 15 is disposed in the inner container 12, and the inner container 12 is inserted into the hollow portion of the outer container 11. And the seed crystal 3 is arrange | positioned through the base 2 at the bottom part of the cover body 13, and the cover body 13 is integrated with the outer side container 11, and the crucible 10 of FIG. 5 is comprised.

  Thereafter, the crucible 10 is placed in the heating chamber, and the crucible 10 is heated as in the first embodiment. Thereby, as shown in FIG. 5, the outer container 11 of the crucible 10 is heated by a heater (not shown) fixed at a position facing the powder raw material 14.

  Thereby, the powder raw material 14 arrange | positioned at the raw material chamber 11d of the outer side container 11 is heated and sublimated, and sublimation gas is supplied to the growth space area | region 16 from the raw material chamber 11d through each through-hole 11g. The sublimation gas passes through the growth space region 6 and is supplied to the seed crystal 3, and the SiC single crystal 8 grows on the seed crystal 3.

  Thus, as a first step, the powder raw material 14 disposed in the outer container 11 is first sublimated. At this time, the powder raw material 15 disposed in the inner container 12 is not heated higher than the outer container 11 because the heat from the heater is blocked by the outer container 11. For this reason, in the inner container 12, the powder raw material 15 which is not sublimated is left.

  That is, after a certain time after the powder raw material 14 disposed in the outer container 11 is sublimated in the first stage, as shown in FIG. 6, the lid 13 or the outer container 11 is moved by a drive mechanism (not shown) as the second stage. Move away from the inner container 12. Thereby, since the heat of the heater is directly applied to the inner container 12, the powder raw material 15 disposed in the inner container 12 can be mainly sublimated.

  At this time, since the outer wall of the inner container 12 is maintained in contact with the inner wall portion 11a of the outer container 11, the growth space region 16 is continuously maintained in a closed space. Accordingly, the sublimation gas generated from the powder raw material 15 of the inner container 12 is separated from the powder raw material 15 and seed crystal disposed in the inner container 12 in the space surrounded by the hollow portion of the outer container 11, the lid 13, and the inner container 12. 3 is supplied to the SiC single crystal 8 through a space between the two, that is, a growth space region 16. In addition, the space enclosed by the hollow part of the outer side container 11, the cover body 13, and the inner side container 12 is equivalent to the 2nd room of this invention.

  As described above, in the present embodiment, the crucible 10 is configured by the outer container 11 in which the powder raw material 14 is arranged in the raw material chamber 11d and the inner container 12 in which the powder raw material 15 is arranged, and the outer container 11 is first formed. The powder raw material 14 is sublimated, and after the outer container 11 is separated from the inner container 12, the powder raw material 15 of the inner container 12 is sublimated.

  Thereby, even if the powder raw material 14 of the outer container 11 is depleted, the inner container 12 can be directly heated by moving the outer container 11, and the sublimation gas can be continuously supplied from the inner container 12. .

(Fourth embodiment)
In the present embodiment, only different parts from the third embodiment will be described. In the said 3rd Embodiment, since the inner container 12 is enclosed by the outer container 11, the heat from a heater is not given directly, but it can be heated at high temperature whether indirectly. Thereby, when the powder raw material 14 of the outer container 11 is sublimated, the powder raw material 15 of the inner container 12 is also sublimated, and there are few powder raw materials 15 that can be sublimated when the inner container 12 is directly heated. There is a possibility of becoming.

  Therefore, the present embodiment is characterized in that the powder raw material 15 in the inner container 12 is not sublimated as much as possible when the powder raw material 14 in the outer container 11 is sublimated.

  FIG. 7 is a cross-sectional configuration diagram of an SiC single crystal manufacturing apparatus according to a fourth embodiment of the present invention. The apparatus according to this embodiment has a configuration in which the heat insulating member 17 is arranged in the circumferential direction on the inner wall portion 11a in the raw material chamber 11d of the outer container 11 in the apparatus shown in FIG. The heat insulating member 17 is located on the other end side 4c of the outer container 11, and is sandwiched between the powder raw material 14 disposed in the raw material chamber 11d and the inner wall portion 11a.

  Next, a method for producing a SiC single crystal using the SiC single crystal production apparatus will be described with reference to FIGS. FIG. 8 is a diagram showing a manufacturing process of the SiC single crystal in the present embodiment.

  First, by heating the crucible 10 shown in FIG. 7, the powder raw material 14 disposed in the raw material chamber 11d of the outer container 11 is sublimated, and the sublimation gas is supplied to the growth space region 16 through each through hole 11g. To do. Thereby, a sublimation gas is supplied to the seed crystal 3, and an SiC single crystal is grown on the seed crystal 3.

  In this case, since the heat insulating member 17 is disposed between the powder raw material 14 and the inner wall portion 11 a in the raw material chamber 11 d of the outer container 11, it is difficult for heat to be transmitted from the outer container 11 to the inner container 12. That is, the sublimation of the powder raw material 15 in the inner container 12 can be suppressed at the initial stage of growth in which the powder raw material 14 in the outer container 11 is sublimated by the heat insulating member 17.

  Subsequently, the outer container 11 is moved in the axial direction of the crucible 10 so as to be separated from the inner container 12. As a result, heat is directly applied to the inner container 12, and the powder raw material 15 disposed in the inner container 12 is sublimated. Thus, the sublimation gas is continuously supplied to the growth space region 16 to grow the SiC single crystal 8.

  As described above, the outer container 11 is provided with the heat insulating member 17 and sublimates the powder raw material 14 disposed in the raw material chamber 11d of the outer container 11, thereby sublimating the powder raw material 15 disposed in the inner container 12. The sublimation gas from the powder raw material 15 of the inner container 12 after the movement of the outer container 11 can be continuously supplied for a longer time.

(Fifth embodiment)
A fifth embodiment of the present invention will be described. In the present embodiment, in the initial growth stage of the SiC single crystal 8, a part of the surface of the powder raw material is covered with the raw material lid, and the raw material lid is separated from the surface of the powder raw material after a certain time, thereby sublimating from the entire surface of the powder raw material. It is characterized by being able to supply gas and preventing a decrease in the growth rate of the SiC single crystal 8. That is, as in the above embodiments, the sublimation gas is supplied in two stages.

  FIG. 9 is a cross-sectional configuration diagram of an SiC single crystal manufacturing apparatus according to the fifth embodiment of the present invention. As shown in this figure, the SiC single crystal manufacturing apparatus includes a bottomed cylindrical container body 1a and a circular lid 1b, similarly to the crucible 1 shown in FIG. 1 (a). A SiC seed crystal 3 is arranged on the back surface of the lid 1b via a base 2.

  For example, a cylindrical support portion 18 is fixed to the lid 1b. The support portion 18 has a flange portion 18a on one end side, and the support portion 18 is attached to the lid 1b via the flange portion 18a. In the present embodiment, the other end side of the support portion 18 protrudes from the opening end of the lid 1b.

  Further, a circular and plate-shaped raw material lid 19 is provided on the other end side of the support portion 18. The diameter of the raw material lid 19 is the same as the inner diameter of the container main body 1a, and the side surface of the raw material lid 19 is in contact with the inner wall surface of the container main body 1a. Further, the raw material lid 19 is provided with a window portion 19a penetrating the plate at the central portion of the plate.

  The raw material lid 19 corresponds to the sublimation gas supply adjusting member of the present invention. Moreover, the support part 18 should just be what can fix the raw material lid | cover 19, and may be a rod-shaped thing besides the cylindrical thing as mentioned above.

  And the crucible 1 is comprised so that the inner wall of the opening edge part of the cover body 1b may contact | connect the recessed part 1c provided in the container main body 1a outer wall surface. In this state, the powder raw material 20 is arranged on the container body 1a.

  In this case, as shown in FIG. 9, the surface of the powder raw material 20 and the end face of the raw material lid 19 are in contact with each other, and growth occurs between the powder raw material 20 exposed from the window 19 a of the raw material lid 19 and the seed crystal 3. A space area 21 is formed. That is, the powder raw material 20 exposed from the window portion 19a of the raw material lid 19 serves as a sublimation gas supply surface. As in the first embodiment, the lid 1b is provided with a drive mechanism (not shown) that moves the lid 1b along the central axis. The above is the overall configuration of the SiC single crystal manufacturing apparatus according to the present embodiment.

  Next, a method for manufacturing a SiC single crystal using the SiC single crystal manufacturing apparatus will be described with reference to FIGS. 9 and 10. FIG. 10 is a diagram showing a manufacturing process of the SiC single crystal in the present embodiment.

  First, the powder raw material 20 is arranged on the container main body 1a and the lid 1b is attached. As a result, as shown in FIG. 9, a part of the surface of the powder raw material 20 is in contact with the end face of the raw material lid 19, and only the powder raw material 20 located in the window 19 a of the raw material lid 19 is exposed to the growth space region 21. ing.

  When this crucible 1 is heated in a heating chamber, the powder raw material 20 is heated and sublimation gas is generated. However, the sublimation gas is not supplied to the growth space region 21 from the surface of the powder raw material 20 with which the end face of the raw material lid 19 contacts. That is, in the first stage in which the SiC single crystal 8 is grown, the supply of sublimation gas from the portion of the powder raw material 20 that faces the raw material lid 19 is suppressed, and the growth space starts from the portion of the raw material lid 19 that faces the window portion 19a. Sublimation gas is supplied to the region 21.

  Then, after a certain time, as shown in FIG. 9, as a second stage, the lid 1b is moved away from the container body 1a by a drive mechanism (not shown). As described above, if the powder raw material 20 is continuously heated, there is a possibility that the depletion layer is formed on the upper portion of the powder raw material 20 exposed from the window portion 19a due to silicon depletion, and the supply of sublimation gas is reduced. Therefore, by separating the lid 1b from the container main body 1a, the raw material lid 19 is separated from the powder raw material 20, and the surface area capable of supplying the sublimation gas from the powder raw material 20 to the first stage is increased. That is, a region covered with the raw material lid 19 in the surface of the powder raw material 20 becomes a new sublimation gas supply surface.

  Thereby, the sublimation gas can be supplied also from the surface of the powder raw material 20 that has been in contact with the end face of the raw material lid 19 in the first stage, and the sublimation gas can be continuously supplied to the growth space region 21. As a result, the growth rate of the SiC single crystal 8 can be prevented from decreasing.

  As described above, in this embodiment, a part of the surface of the powder raw material 20 is covered with the raw material lid 19, and the sublimation gas is supplied to the growth space region 21 from the surface not covered with the raw material lid 19, and after a certain time. It is characterized in that the sublimation gas can be supplied from the entire surface of the powder raw material 20 by separating the raw material lid 19 from the powder raw material 20.

  Thereby, the surface area of the powder raw material 20 which can supply sublimation gas with respect to the growth initial stage of the SiC single crystal 8 can be increased. Therefore, the sublimation gas can be continuously supplied even in the latter half of the growth of SiC single crystal 8, and a reduction in the growth rate of SiC single crystal 8 can be prevented.

(Sixth embodiment)
In the present embodiment, only parts different from the fifth embodiment will be described. In the fifth embodiment, since the raw material lid 19 is in direct contact with the surface of the powder raw material 20 at the initial growth stage of the SiC single crystal 8, there is a possibility that the raw material lid 19 is fixed to the powder raw material 20. It was. Therefore, the present embodiment is characterized in that a lid member for preventing the raw material lid 19 from sticking is provided between the raw material lid 19 and the powder raw material 20.

  FIG. 11A is a cross-sectional configuration diagram of an SiC single crystal manufacturing apparatus according to a sixth embodiment of the present invention, and FIG. 11B is a plan view of a lid member 22 used in the apparatus shown in FIG. It is. The apparatus in the present embodiment has a configuration in which the lid member 22 shown in FIG. 11B is provided in the apparatus shown in FIG.

  The lid member 22 is for preventing the powder raw material 20 and the raw material lid 19 from sticking to each other. The outer shape of the lid member 22 is the same circular shape as the raw material lid 19 and has a plate shape. Moreover, in this embodiment, the diameter of the cover member 22 is the same as the raw material cover 19, and the window part 22a which penetrates the said board is provided in the center part of the board.

  Further, the lid member 22 is provided with a plurality of hole portions 22b penetrating the plate in a plate portion between the inner peripheral wall constituting the window portion 22a and the outer peripheral wall of the circular plate. Each hole 22 b is arranged on a straight line passing through the center point of the lid member 22. The arrangement layout of the holes 22b is not limited to FIG. 11B, and other arrangement layouts may be used.

  In the present embodiment, the positions and sizes of the window portions 19a and 22a in the raw material lid 19 and the lid member 22 are the same. The lid member 22 is preferably made of a carbon material or a refractory metal, for example, a metal such as tantalum or tungsten. Further, a carbon material whose surface is coated with these refractory metals may be used.

  As shown in FIG. 11, the lid member 22 having such a configuration is disposed on the powder raw material 20 and is sandwiched between the powder raw material 20 and the raw material lid 19. At this time, the window 19 a of the raw material lid 19 and the window 22 a of the lid member 22 are connected, and each hole 22 b of the lid member 22 is closed by the raw material lid 19.

  Thereby, in the state where the raw material lid 19 is arranged in contact with the lid member 22, the surface of the powder raw material 20 corresponding to the positions of the windows 19 a and 22 a among the surface of the powder raw material 20 is in the growth space region 21. It will be exposed. The above is the overall configuration of the SiC single crystal manufacturing apparatus according to the present embodiment.

  Next, a method for producing a SiC single crystal using the SiC single crystal production apparatus will be described with reference to FIGS. FIG. 12 is a diagram showing a manufacturing process of the SiC single crystal in the present embodiment.

  First, the powder raw material 20 is arranged on the container main body 1a, the lid member 22 shown in FIG. 11B is placed on the powder raw material 20, and the lid body 1b is attached to the container main body 1a. Then, in the first stage, the crucible 1 is heated to heat the powder raw material 20, thereby supplying the sublimation gas from the powder raw material 20 exposed to the growth space region 21 through the windows 19 a and 22 a to the growth space region 21. .

  Subsequently, as a second stage, after a certain period of time, as shown in FIG. 12, the lid 1b is moved away from the container body 1a. According to this, in the first stage, each hole 22b of the lid member 22 closed by the raw material lid 19 opens into the growth space region 21, and the sublimation gas grows from the powder raw material 20 exposed in each hole 22b. It is supplied to the space area 21.

  As a result, even if the supply of sublimation gas from the portions exposed to the growth space region 21 from the windows 19a and 22a of the powder raw material 20 decreases, the powder raw material 20 grows from the respective holes 22b of the lid member 22. Sublimation gas can also be supplied to the growth space region 21 from the portion exposed to the space region 21. Therefore, the sublimation gas can be continuously supplied to the growth space region 21, and a decrease in the growth rate of the SiC single crystal 8 can be prevented.

  In addition, the raw material lid 19 does not directly contact the powder raw material 20, and only covers each hole 22 b of the lid member 22. This state is the same as the state shown in FIG. 9, and the sublimation gas can be supplied from the powder raw material 20 in the initial growth stage of the SiC single crystal 8 as in the fifth embodiment. In this embodiment, even if the raw material lid 19 is separated from the lid member 22 after a certain time, the raw material lid 19 is fixed to the powder raw material 20 because the lid member 22 is disposed on the powder raw material 20. Can be prevented.

(Seventh embodiment)
In the present embodiment, only different parts from the first embodiment will be described. In the first embodiment, the separation wall 4 is integrated with the lid 1b and is separated from the container body 1a with the movement of the lid 1b. However, in this embodiment, the separation wall is separated from the lid 1b and the container body. It is characterized in that it is provided in each 1a.

  FIG. 13A is a cross-sectional configuration diagram of an SiC single crystal manufacturing apparatus according to a seventh embodiment of the present invention, and FIG. 13B is an external view of a separation wall 23 used in the apparatus shown in FIG. It is. In the crucible 1 shown in FIG. 13 (a), a hollow cylindrical separation wall 23 shown in FIG. 13 (b) is arranged. The separation wall 23 includes a lid-side separation wall 24 and a container-side separation wall 25 in which a hollow cylinder is divided in the axial direction.

  A flange portion 24a is provided on one end side of the lid body side separation wall 24, and the flange portion 24a is integrated with the inner wall of the lid body 1b. Moreover, the end surface of the one end side of the container side separation wall 25 is being fixed to the bottom face of the container main body 1a.

  Further, a protrusion 24 b is provided on the inner wall surface side of the end portion on the other end side of the lid side separation wall 24, and a protrusion portion on the outer wall surface side of the end portion on the other end side of the container side separation wall 25. 25a is provided. When the lid 1b is attached to the container body 1a, the projections 24b and 25a on the other end sides of the separation walls 24 and 25 are engaged with each other, and the separation walls 24 and 25 are integrated.

  In the apparatus having such a configuration, the powder raw material 26 is disposed in the hollow portion of the separation wall 23, and the powder raw material 27 is disposed in the space between the inner wall surface of the container body 1 a and the outer wall surface of the separation wall 23. Yes. In this case, a growth space region 28 is formed between the powder raw material 26 and the seed crystal 3. Moreover, the powder raw material 27 will be arrange | positioned in the closed space comprised by the inner wall face of the container main body 1a, the outer wall face of the separation wall 23, the inner wall face of the cover body 1b, and the flange part 24a. The above is the overall configuration of the SiC single crystal manufacturing apparatus according to the present embodiment.

  The hollow portion of the separation wall 23 in a state where the other end sides of the lid-side separation wall 24 and the container-side separation wall 25 are connected corresponds to the first chamber of the present invention, and the outer wall surface of the separation wall 23, The closed space constituted by the inner wall surface of the container body 1a, the inner wall surface of the lid 1b, and the flange portion 24a corresponds to the second room of the present invention.

  Next, a method for manufacturing a SiC single crystal using the SiC single crystal manufacturing apparatus will be described with reference to FIGS. 13 and 14. FIG. 14 is a view showing a manufacturing process of the SiC single crystal in the present embodiment, where (a) is a cross-sectional configuration diagram of the apparatus, and (b) is an external view of the separation wall 23. In FIG. 14B, the protrusions 24b and 25a are omitted.

  First, the container side separation wall 25 is fixed in the container main body 1 a, and the powder raw material 26 is formed in the hollow portion of the container side separation wall 25, in the space between the inner wall surface of the container main body 1 a and the outer wall surface of the container side separation wall 25. The powder raw material 27 is arranged. And the cover body 1b to which the cover body side separation wall 24 was attached via the flange part 24a is attached to the container main body 1a.

  When the crucible 1 is heated in the heating chamber, the powder raw materials 26 and 27 are heated to generate sublimation gas. In this case, the sublimation gas generated from the powder raw material 26 is supplied to the growth space region 28 and contributes to the growth of the SiC single crystal 8.

  On the other hand, the sublimation gas generated from the powder raw material 27 is confined in a closed space constituted by the inner wall surface of the container body 1a, the outer wall surface of the separation wall 23, the inner wall surface of the lid 1b, and the flange portion 24a. Therefore, it is not supplied to the growth space region 28 and does not contribute to the growth of the SiC single crystal 8.

  Therefore, in the first stage shown in FIG. 13, SiC single crystal 8 is grown only by the sublimation gas generated from powder raw material 26 arranged in the hollow portion of separation wall 23. When the first stage continues for a certain period of time, the sublimation gas that can be supplied from the powder raw material 26 is reduced, so the process proceeds to the second stage.

  That is, after a certain period of time has elapsed after the crucible 1 starts to be heated, as shown in FIG. 14 (a), the lid 1b is moved away from the container body 1a as the second stage. As a result, the lid-side separation wall 24 integrated with the lid 1b of the separation wall 23 also moves together with the lid 1b, and is in contact with the container-side separation wall 25 as shown in FIG. 14 (b). The other end side of the lid-side separation wall 24 is divided away from the other end of the container-side separation wall 25.

  And since the exterior and the hollow part of the separation wall 23 are connected, the closed space comprised by the outer wall surface of the separation wall 23, the inner wall surface of the container main body 1a, etc. is connected with the hollow part of the separation wall 23. Accordingly, the sublimation gas supplied from the powder raw material 27 to the closed space in the first stage enters the growth space region 28 via the gap 29 between the end portions on the other end side of the separation walls 24 and 25. Supplied. In this way, the growth of the SiC single crystal 8 is continued.

  In the present embodiment, the container-side separation wall 25 is fixed to the container body 1a, and the movable lid-side separation wall 24 does not contact the powder raw materials 26, 27. , 27 and the like will not occur.

  As described above, even if the supply of sublimation gas from the powder raw material 26 is lowered, the separation wall 23 is divided by moving the lid 1b from the container body 1a to form the separation wall 23, the container body 1a, and the like. The sublimation gas filled in the closed space can be supplied to the growth space region 28. In this way, the sublimation gas can be continuously supplied to the growth space region 28, and a decrease in the growth rate in the latter half of the growth of the SiC single crystal 8 can be prevented.

(Eighth embodiment)
In the present embodiment, only different parts from the first embodiment will be described. In the first embodiment, the powder raw material 5 is arranged in the hollow portion of the separation wall 4 integrated with the lid 1b, and sublimation starts from the lower layer of the powder raw material 5 by the movement of the separation wall 4 in the latter half of the growth of the SiC single crystal 8. Although the gas is supplied, the present embodiment is characterized in that the surface of the powder raw material is covered to suppress the supply of the sublimation gas.

  Fig.15 (a) is a cross-sectional block diagram of the SiC single crystal manufacturing apparatus concerning 8th Embodiment of this invention, FIG.15 (b) is an external view of the isolation | separation part 30 used for the apparatus shown by (a). It is. In the crucible 1 shown in FIG. 15 (a), a bottomed cylindrical separator 30 shown in FIG. 15 (b) is arranged. The separation portion 30 is integrated with the lid body 1b via the flange portion 30a. In addition, a plurality of through holes 30b are provided in the side portion of the separation portion 30 in the circumferential direction, for example. Each through hole 30b functions as a passage through which the sublimation gas passes from the outside of the separation portion 30 to the hollow portion.

  The powder raw material 31 is arranged in the container main body 1 a, and when the lid body 1 b is attached to the container main body 1 a, the bottom portion 30 c of the separation unit 30 comes into contact with the surface of the powder raw material 31. Thereby, the part which the bottom part 30c of the isolation | separation part 30 is not contacting among the powder raw materials 31 is exposed in the container main body 1a. That is, the area | region where the bottom part 30c of the isolation | separation part 30 is not contacting among the powder raw materials 31 becomes a sublimation gas supply surface. In the present embodiment, the growth space region 32 is formed between the bottom 30 c and the seed crystal 3 in the hollow portion of the separation portion 30.

  The raw material lid 19 corresponds to the sublimation gas supply adjusting member of the present invention. The lid 1b is provided with the above-described drive mechanism (not shown). The above is the overall configuration of the SiC single crystal manufacturing apparatus according to the present embodiment.

  Next, a method for producing a SiC single crystal using the apparatus having the above configuration will be described with reference to FIGS. FIG. 16 is a diagram showing a manufacturing process of the SiC single crystal in the present embodiment. First, as a first stage, the crucible 1 shown in FIG. 15 (a) is heated.

  In this case, the sublimation gas is generated from a part of the powder raw material 31 that is not in contact with the bottom 30c of the separation part 30, and the inner wall surface of the container main body 1a, the outer wall surface of the separation part 30, the flange part 30a, and the inside of the lid 1b. It is supplied to the space surrounded by the wall. And it passes through each through-hole 30b provided in the side part of the isolation | separation part 30, and is supplied to the growth space area | region 32, and the SiC single crystal 8 grows.

  Then, when the supply of sublimation gas from a region where the bottom 30c of the separation unit 30 is not in contact with the powder material 31 with the passage of time decreases, the process proceeds to the second stage.

  That is, after a certain period of time has elapsed after the crucible 1 starts to be heated, in the second stage, as shown in FIG. 16, the lid 1b is moved away from the container body 1a. Thereby, since the bottom 30c of the separation part 30 is separated from the powder raw material 31, it is possible to supply the sublimation gas from the region of the powder raw material 31 covered with the bottom 30c. That is, the area | region covered by the bottom part 30c of the isolation | separation part 30 among the powder raw materials 31 becomes a new sublimation gas supply surface.

  In this case, the sublimation gas is supplied to a space formed by the outer wall surface of the separation unit 30, the surface of the powder raw material 31, the inner wall surface of the container body 1a, and the like. It is guided to the growth space region 32 through the passages between them and the respective through holes 30b. Thus, the sublimation gas generated from the surface of the powder raw material 31 facing the bottom 30c of the separation part 30 contributes to the growth of the SiC single crystal 8.

  Also in the present embodiment, a lid member as shown in FIG. 11B can be disposed between the bottom 30c of the separation unit 30 and the powder raw material 31, for example. In this case, the lid member may have the same shape as the bottom portion 30c, and a plurality of holes may be provided. Thereby, adhesion with the bottom part 30c of the isolation | separation part 30 and the powder raw material 31 can be prevented.

  As described above, in the present embodiment, the bottom 30c of the separation unit 30 covers the surface of the powder raw material 31 in advance, and by separating the bottom 30c of the separation unit 30 from the surface of the powder raw material 31 after a certain period of time, A feature is that the sublimation gas can be supplied from the surface in contact with the bottom 30c. Thereby, the sublimation gas of the powder raw material 31 can be continuously supplied to the SiC single crystal 8, and a decrease in the growth rate in the latter half of the growth of the SiC single crystal 8 can be prevented.

(Other embodiments)
In each of the above embodiments, the sublimation gas is supplied to the growth space regions 6, 16, 21, 28, 32 in two stages. For example, in the first to fourth embodiments, the separation wall 4 and the outer container 11 are supplied. By subdividing the amount of movement into a plurality, the sublimation gas can be supplied in a plurality of stages. Moreover, you may make it move continuously instead of dividing into several steps. In this case, if the movement speed is equal to the growth speed, the distance between the surface of the powder raw material and the growth crystal can be grown at a constant state, and the fluctuation of the growth speed due to the change in the surface temperature difference between the powder raw material and the growth crystal is reduced You can also

  In the first embodiment, as shown in FIG. 1B, the plurality of through holes 4d are provided in a line in the circumferential direction of the separation wall 4, but the arrangement and size of each through hole 4d are shown in FIG. It is not limited to the case shown in b), and other arrangements and sizes may be used. For example, each through hole 4 d can be arranged in the axial direction of the separation wall 4, or can be arranged spirally on the side surface of the separation wall 4. A plurality of through holes 4d having different sizes may be provided in the separation wall 4.

  In the eighth embodiment, the through hole 30b is provided only on the side portion of the separation portion 30, but for example, the size of the through hole 30b is increased, the number of the through holes 30b is increased, or the bottom portion 30c is penetrated. It is also possible to increase the supply amount of the sublimation gas in the first stage by providing the holes 30b.

(A) is a cross-sectional block diagram of the SiC single crystal manufacturing apparatus concerning 1st Embodiment of this invention, (b) is an external view of the separation wall with which the apparatus shown by (a) was equipped. (A) is the figure which showed the manufacturing process of the SiC single crystal in 1st Embodiment, (b) is the figure which showed typically the gas supply path | route through which sublimation gas flows. It is a section lineblock diagram of the SiC single crystal manufacturing device concerning a 2nd embodiment of the present invention. It is the figure which showed the manufacturing process of the SiC single crystal in 2nd Embodiment. It is a section lineblock diagram of the SiC single crystal manufacturing device concerning a 3rd embodiment of the present invention. It is the figure which showed the manufacturing process of the SiC single crystal in 3rd Embodiment. It is a section lineblock diagram of the SiC single crystal manufacturing device concerning a 4th embodiment of the present invention. It is the figure which showed the manufacturing process of the SiC single crystal in 4th Embodiment. It is a section lineblock diagram of the SiC single crystal manufacturing device concerning a 5th embodiment of the present invention. It is the figure which showed the manufacturing process of the SiC single crystal in 5th Embodiment. (A) is a cross-sectional block diagram of the SiC single crystal manufacturing apparatus concerning 6th Embodiment, (b) is a top view of the cover member used for the apparatus shown by (a). It is the figure which showed the manufacturing process of the SiC single crystal in 6th Embodiment. (A) is a cross-sectional block diagram of the SiC single crystal manufacturing apparatus concerning 7th Embodiment, (b) is an external view of the separation wall used for the apparatus shown by (a). It is the figure which showed the manufacturing process of the SiC single crystal in 7th Embodiment, (a) is a cross-sectional block diagram of an apparatus, (b) is an external view of a separation wall. (A) is a cross-sectional block diagram of the SiC single crystal manufacturing apparatus concerning 8th Embodiment, (b) is an external view of the isolation | separation part used for the apparatus shown by (a). It is the figure which showed the manufacturing process of the SiC single crystal in 8th Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1, 10 ... Crucible, 1a container main body, 1b, 13 ... Cover body, 3 ... Seed crystal, 4 ... Separation wall, 4a ... One end side of separation wall, 4d ... Through hole of separation wall, 4c ... Other end of separation wall Side, 4e ... End face of separation wall 5, 14, 15, 20, 26, 27, 31 ... Silicon carbide raw material, 6, 16, 21, 32 ... Growth space region, 7 ... Gas supply passage, 8 ... Silicon carbide single Crystal, 9 ... Slide wall, 9a ... Cylindrical member, 9b ... Heat insulation member, 11 ... Outer container, 11a ... Inner wall part of outer container, 11b ... Outer wall part of outer container, 11c ... End face part of outer container, 11d ... Outer container 11e ... one end side of the outer container, 11f ... the other end side of the outer container, 11g ... a through hole in the outer container, 12 ... an inner container, 17 ... a heat insulating member, 18 ... a support part, 19 ... a raw material lid, 19a ... window part of raw material lid, 22 ... lid member, 22a ... window part of lid member, 22b ... of lid member , 23 ... separation wall, 24 ... lid side separation wall, 25 ... container side separation wall, 28 ... growth space region, 29 ... gap, 30 ... separation part, 30b ... through hole in separation part, 30c ... bottom of separation part .

Claims (2)

A hollow cylindrical crucible (1) having a bottomed cylindrical container body (1a) and a lid (1b) for closing the container body (1a); A seed crystal (3) made of a silicon carbide substrate is disposed in 1b), and a silicon carbide raw material (5, 20, 31) is disposed in the container body (1a), and the silicon carbide raw material (5, 20, 31) In a silicon carbide single crystal manufacturing apparatus for growing a silicon carbide single crystal (8) on the seed crystal (3) by supplying a sublimation gas,
The silicon carbide raw material (5, 20, 31) covering a part of the sublimation gas supply surface and the silicon carbide after a predetermined time from the start of heating of the silicon carbide raw material (5, 20, 31) apart from a part of the sublimation gas supply surface of the raw material (5,20,31) have a sublimation gas supply adjustment member which forms a form to form a new sublimation gas supply surface (4,19,30),
The sublimation gas supply adjusting member has a hollow cylindrical shape having a diameter smaller than the inner diameter of the container body (1a), and one end side (4a) of the cylinder is integrated with the lid (1b). , Having a separation wall (4) provided with a through hole (4d) on the side,
The lid (1b) is attached so that the open end of the lid (1b) is in contact with and overlaps the open end of the container body (1a), and the end surface (4e) on the other end side (4c) of the separation wall (4) is the container body. A silicon carbide raw material (5) is disposed in a hollow portion of the separation wall (4) in contact with the bottom surface of (1a), and the lid (1b) is a central axis with respect to the container body (1a). Is relatively movable in the axial direction of
When the space between the seed crystal (3) and the silicon carbide raw material (5) in the hollow portion of the separation wall (4) is a growth space region (6), and heating of the crucible (1) is started, Sublimation gas generated from the silicon carbide raw material (5) exposed in the hollow portion of the separation wall (4) is supplied to the growth space region (6),
The lid (1b) relatively moves away from the container body (1a) after a certain time from the start of heating of the crucible (1), and the other end side (4c) of the separation wall (4). ) Is separated from the bottom surface of the container body (1a), so that the silicon carbide raw material (5) in contact with the other end side (4c) of the separation wall (4) becomes the new sublimation gas. Exposed in the container body (1a) as a supply surface;
Sublimation gas from the exposed portion passes through the gas supply passage (7) and the through hole (4d) formed in the space between the inner wall surface of the container body (1a) and the outer wall surface of the separation wall (4). The silicon carbide single crystal manufacturing apparatus is supplied to the growth space region (6) . A hollow cylindrical cylindrical member (9a) is formed on the inner wall surface of the separation wall (4), and the hollow cylindrical shape is integrated with the cylindrical member (9a), and the bottom surface of the container body (1a). And a heat insulating member (9b) that is further air permeable, and is provided with a slide wall (9), and the silicon carbide raw material (5) is disposed in a hollow portion of the slide wall (9). When the lid (1b) moves away from the container body (1a), the sublimation gas passes through the heat insulating member (9b) and is supplied to the gas supply passage (7). The apparatus for producing a silicon carbide single crystal according to claim 1 , wherein the silicon carbide single crystal is produced.

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