JP4935046B2 - Solid-state image sensor - Google Patents

Description

  The present invention relates to a solid-state imaging device.

As a solid-state imaging device, a CCD (charge coupled device) type image sensor (hereinafter referred to as a CCD sensor), a CMOS type image sensor (hereinafter referred to as a CMOS sensor), and the like are known.

Furthermore, in recent years, a threshold voltage modulation type MOS solid-state imaging device (hereinafter referred to as a substrate modulation type sensor) having both high image quality and low power consumption has been proposed. The substrate modulation type sensor is disclosed in Patent Document 1, for example.

The CCD sensor consumes a large amount of power because of its high driving voltage, but a correlated double sampling (CDS) function for noise removal and so-called batch electronics for capturing images so as not to distort the object moving at high speed. The shutter function is realized. This collective electronic shutter function eliminates distortion of an image of a subject by simultaneously accumulating photogenerated charges for a large number of light receiving elements arranged two-dimensionally. CCD sensors generally have an advantage of excellent image quality.

On the other hand, among CMOS sensors, CMOS-APS (Active Pixel) with a 4-transistor configuration
The sensor type cannot realize the collective electronic shutter function, but realizes the CDS function. Also, the CMOS sensor has low power consumption because the drive voltage can be suppressed,
Further, since it can be formed by a process according to the manufacturing process of the CMOS transistor, there is an advantage that the process cost is low.

A general CMOS-APS type sensor cannot perform a collective electronic shutter because a CDS function that resets a floating diffusion portion, which is a charge holding region, for each readout line, first reads a noise component, and then reads a signal component. This is because it is operated to realize the above.

In order to realize a CDS function, a CMOS-APS type sensor sequentially resets a charge transfer transistor for each selection line for reading a pixel signal, reads a noise component, and then reads a signal component. The signal component is read while being sequentially reset for each selected line. Therefore, when a moving subject is imaged, the readout timing gradually shifts between the first line and the last readout line, resulting in distortion in the obtained subject image. In order to suppress this distortion, a mechanical shutter or the like is required, and it is difficult to image a moving subject.

In order to cope with such a problem, a substrate holding type sensor or a CMOS-APS type sensor has a charge holding unit that temporarily stores the photocharge before transferring the photocharge accumulated in the accumulation well to the floating diffusion portion. By providing a batch electronic shutter and CDS
A technique for realizing both operations is disclosed in Patent Document 2.

In the substrate modulation type sensor and the CMOS-APS type sensor disclosed in Patent Document 2, if the photocharge generated in the charge holding unit or the floating diffusion unit is mixed, the image quality is deteriorated. It is necessary to suppress. Patent Document 3 includes CM
In order to prevent light from entering the floating diffusion portion of the OS-APS type sensor, a technique for forming a light shielding film using tungsten silicide or the like on the floating diffusion portion is disclosed.

JP 2002-134729 A Japanese Patent Application No. 2005-79330 JP 2004-140152 A

However, when the technique described in Patent Document 2 described above is used, there is no structure that suppresses light from entering the charge holding portion provided close to the accumulation well. There is a problem in that noise charges are generated due to intrusion and image quality is degraded.

Further, when the technique described in Patent Document 3 described above is used, the generation of noise charges due to the intrusion of light into the floating diffusion part can be suppressed, but since the charge holding part is not provided, the collective electronic shutter function cannot be realized. When a moving subject is imaged, there is a problem in that the obtained subject image is distorted and the image quality is degraded.

The present invention has been made in view of the above-described points, and provides a solid-state imaging device capable of realizing a collective electronic shutter function while realizing a CDS function and further effectively suppressing light from entering the charge holding portion. For the purpose.

In order to achieve the above object, a solid-state imaging device according to the present invention is formed on a semiconductor substrate for accumulating charges obtained by photoelectric conversion of incident light, and for transferring the charges from the accumulation well. A first transfer control element having a first transfer gate electrode formed by using a first gate electrode layer provided on a surface of the semiconductor substrate via a first insulating layer, and the storage well A charge holding region provided under the first transfer gate electrode for storing the charge transferred from the first transfer control element from the first transfer control element, and for transferring the charge from the charge holding region, Second transfer control having a second transfer gate electrode formed by using the first transfer gate electrode and a second gate electrode layer provided on the surface of the semiconductor substrate via a second insulating layer Element and front A solid-state imaging device comprising a floating diffusion region for storing the charge transferred from the charge holding region via the second transfer control element and detecting a potential fluctuation caused by the charge, In order to prevent the incident light from entering the charge holding region through the transfer gate electrode, at least a part of the portion of the first transfer gate electrode formed on the charge holding region is the charge holding region. The second transfer gate electrode is extended so as to cover the light.

According to this configuration, since the second gate electrode extends so as to cover at least a part of the first gate electrode for light shielding, the second gate electrode is provided under the first transfer gate to store the charge. The charge holding region is covered with the first gate electrode and the second gate electrode.

Since the entrance of the incident light can be suppressed by being covered with the first gate electrode and the second gate electrode in the charge holding region, leakage of the incident light in the charge holding region causing deterioration in image quality can be prevented. Generation of the resulting charge can be suppressed.

In the solid-state imaging device of the present invention described above, the second transfer gate electrode extends so as to cover a part of the accumulation well in addition to covering an upper portion of the first gate electrode. And

According to this configuration, the charge holding region can more reliably suppress the generation of charges due to leakage of the incident light by the second transfer gate electrode.

In the solid-state imaging device of the present invention described above, the second transfer gate electrode has a light transmittance lower than that of the polysilicon on the polysilicon, tungsten, titanium, cobalt silicide, tungsten, titanium, or It has a two-layer structure of silicide containing two or more kinds of metal components of cobalt or tungsten, titanium, or a metal containing one or more kinds of components of cobalt.

According to this configuration, the light transmittance is smaller than polysilicon, tungsten, titanium, or cobalt silicide, or tungsten, titanium, or cobalt containing two or more kinds of metal components of tungsten, or tungsten, titanium, or cobalt. Since the metal containing one or more kinds of components is formed on the polysilicon, the intrusion of the incident light is suppressed, and the generation of the charge due to the leakage of the incident light in the charge holding region that causes the deterioration of the image quality is suppressed. be able to. In addition, tungsten, titanium, or cobalt having a large stress, or silicide containing two or more metal components of tungsten, titanium, or cobalt, or a metal containing one or more components of tungsten, titanium, or cobalt is poly By forming via silicon, the stress can be relaxed and the generation of charges from defects caused by the stress can be suppressed.

In the solid-state imaging device of the present invention described above, the second transfer gate electrode has a light transmittance lower than that of polysilicon, silicide containing one or more metal components of tungsten, titanium, or cobalt, or A metal containing one or more components of tungsten, titanium, or cobalt is used.

According to this configuration, since the polysilicon layer is not provided, the second transfer gate electrode layer can be thinned, so that the second gate electrode can be formed while suppressing the step amount.

In the above-described solid-state imaging device of the present invention, the second transfer gate electrode layer includes a reflection suppressing layer for preventing halation in the photolithography process.

According to this configuration, since halation in the photolithography process can be prevented, the photolithography process can be performed with high transferability.

The solid-state imaging device of the present invention described above is characterized in that the reflection suppressing layer is silicon oxide or titanium nitride.

According to this configuration, since reflection of light can be suppressed without using a highly novel material, it is possible to prevent unexpected contamination of a line for manufacturing a solid-state imaging device.

In the solid-state imaging device of the present invention, the floating diffusion region has a third gate electrode obtained by processing the first gate electrode layer located on the first insulating layer into a ring shape. An incident light intensity is detected from a change in threshold value formed by charges accumulated in the floating diffusion region, which is formed below the MOS transistor.

According to this configuration, the floating diffusion region and the detection MOS transistor can be formed to overlap each other, and a region for detecting incident light intensity can be formed with a small area.

The solid-state imaging device of the present invention described above has an overflow drain on the side of the storage well for absorbing the overflowed charge when the charge generated by light incident on the storage well overflows. It is characterized by.

According to this configuration, when the strong incident light is irradiated, the charge overflowing from the accumulation well is absorbed by the overflow drain, so that leakage of charge to other solid-state imaging devices can be suppressed, so Even if there is light, image quality deterioration can be suppressed.

Further, the solid-state imaging device according to the present invention described above, the surface of the semiconductor substrate between the surface of the semiconductor substrate and at least a part between the first insulating layer or the second insulating layer, A pinning layer having a conductivity type opposite to that of the holding region for electrically filling defects existing between the first insulating layer and the second insulating layer is provided.

According to this configuration, since defects existing between the semiconductor substrate and the insulating layer are electrically filled, generation of charges due to the defects can be suppressed, so that deterioration in image quality can be suppressed.

The solid-state imaging device of the present invention described above is characterized in that a part of the accumulation well is disposed so as to overlap the first transfer gate electrode.

According to this configuration, the electrical influence of the second transfer gate electrode extended so as to cover a part of the storage well can be shielded by the first transfer gate electrode. When it extends so as to cover a part, an electrically stable operation can be performed.

In the solid-state imaging device of the present invention, the detection MOS transistor having the third gate electrode obtained by processing the first gate electrode layer located on the first insulating layer into a ring shape. A pocket region for collecting charges and having a higher impurity concentration than other regions of the floating diffusion is formed below the third gate electrode.

According to this configuration, a pocket region for collecting charges is formed below the third gate electrode of the detection MOS transistor, and has a higher impurity concentration than other regions of the floating diffusion region. Therefore, the charge injected into the floating diffusion is concentrated in the lower part of the detection MOS transistor.

Since charges can be concentrated under the detection MOS transistor in the floating diffusion region, the threshold fluctuation per unit charge of the detection MOS transistor becomes large, so that a highly sensitive solid-state imaging device can be obtained. it can.

  Embodiments of the present invention will be described below with reference to the drawings.

(First embodiment)
First, the configuration of the solid-state imaging device according to the first embodiment of the present invention will be described. FIG.
These are top views which show the planar shape of the solid-state image sensor concerning the 1st Embodiment of this invention. FIG. 2 is a cross-sectional view taken along the line AA ′ of FIG. However, the cross section of the wiring and its upper layer structure is not shown.

Note that the present embodiment shows an example in which holes are accumulated among the photo-generated charges generated in pairs. Even in the case where electrons are accumulated among the photo-generated charges, the same configuration can be adopted.

As shown in FIG. 2, the transfer transistor formation region TT for transferring charges from the photodiode formation region PD to the modulation transistor formation region TM is the photodiode formation region PD.
And the modulation transistor formation region TM.

In the present embodiment, the transfer transistor formation region TT has a carrier pocket region TCP as a charge holding region for temporarily holding charges, and further includes a carrier pocket region T
A transfer region TC for transferring charges from the CP to the modulation transistor formation region TM is provided. At the same time, the charges accumulated in each photodiode formation region PD are transferred to the carrier pocket region TCP of each device and temporarily held for all the solid-state imaging devices, and the modulation transistor formation region is transferred from the carrier pocket region TCP to each selected line. A batch electronic shutter function and a CDS function are realized by transferring to TM.

Next, the configuration of the solid-state imaging device according to the present embodiment will be described in more detail with reference to FIGS. 1 and 2. In FIG. 2 and the description thereof, the subscripts-and + of N and P indicate the state from the lighter portion (subscript-) to the darker portion (subscript ++) depending on the number. .

As shown in FIG. 1, the photodiode formation region PD is substantially rectangular. On the N-type well 2 in the photodiode formation region PD, a P layer is formed over substantially the entire surface of the photodiode formation region PD, and the P layer functions as the storage well 4. Photodiode formation region P
On the substrate surface side of D, a pinning layer 8 is formed over substantially the entire surface. An opening region (not shown) is formed on the surface of the substrate 1 on the photodiode formation region PD, and a storage well 4 that is a P-type well wider than the opening region is formed.

A depletion region is formed in the boundary region between the N-type well 2 and the P-type accumulation well 4 formed on the substrate 1 below the photodiode formation region PD having the function of the photoelectric conversion element. Photogenerated charges are generated by the light incident on the depletion region. Of the generated photogenerated charge pairs, holes are accumulated in the accumulation well 4.

As the amplifying means formed in the modulation transistor formation region TM, for example, an N-channel depletion MOS transistor is used as the modulation transistor Tm shown in FIG. On the N-type well 3 in the modulation transistor formation region TM, a substantially ring-shaped (octagonal in FIG. 1) gate (hereinafter referred to as “an octagonal shape” in FIG.
(Also called a ring gate or simply a gate) 5 is formed. Substrate 1 under ring gate 5
An N + diffusion layer 11 constituting a channel is formed on the surface of the substrate. An N ++ diffusion layer is formed on the surface of the substrate at the center of the opening of the ring gate 5 to form a source region (hereinafter simply referred to as a source) 12. A P layer is formed on the N-type well 3 in the modulation transistor formation region TM in accordance with the substantially outer peripheral shape of the ring gate 5 constituting the modulation transistor TM, and the P layer functions as the modulation well 6. In this modulation well 6, a ring-shaped carrier pocket 7 of a P-type high concentration region formed by P + diffusion formed along the ring shape of the ring gate 5 is formed.

Further, an N ++ diffusion layer is formed on the substrate surface around the ring gate 5 to form a drain region (
(Hereinafter also simply referred to as a drain) 13. The N + diffusion layer 11 constituting the channel is connected to the source region 12 and the drain region 13.

The modulation well 6 controls the threshold voltage of the modulation transistor Tm. The modulation transistor Tm includes a modulation well 6, a ring gate 5, a source region 12, and a drain region 13.
The threshold voltage changes according to the electric charge accumulated in the carrier pocket 7.

The charges accumulated in the accumulation well 4 are transferred to the modulation well 6 through the transfer transistor formation region TT described below and held in the carrier pocket 7. The source potential of the modulation transistor formation region TM functioning as a modulation transistor is in accordance with the amount of charge transferred to the modulation well 6, that is, incident light to the photodiode formation region PD functioning as a photodiode.

On the surface of the substrate 1 in the vicinity of the accumulation well 4, a diffusion region (hereinafter referred to as OFD region) 14 for discharging unnecessary charges including overflow charges is formed by a high concentration P ++ type diffusion layer. The OFD region 14 as a discharging means for discharging unnecessary excess charges from the accumulation well overflows from the accumulation well 4 without being accumulated in the accumulation well 4 and does not contribute to the pixel signal (hereinafter referred to as unnecessary charge). Is an area for discharging to the substrate.

Next, the transfer transistor formation region TT will be described. Transfer transistor formation region TT
As shown in FIG. 2, it has a transfer accumulation area TA and a transfer area TC. The transfer accumulation area TA includes a carrier pocket area TCP for temporarily holding charges in the substrate.

Specifically, the transfer transistor region TT is formed on the substrate surface side between the photodiode forming region PD and the modulation transistor forming region TM. The transfer accumulation region TA of the transfer transistor region TT has a transfer gate 22A on the substrate surface via a gate insulating film 21 made of a first gate insulating layer so that a channel is formed on the substrate surface. The channel of the transfer transistor region TT, that is, the transfer path is controlled by the voltage applied to the transfer gate 22A.

A carrier pocket region TCP is provided under the transfer gate 22A. In the carrier pocket region TCP, a P layer is formed on the N-type well 3 in the modulation transistor formation region TM, and the P layer functions as a transfer accumulation well. This transfer well is a carrier pocket 24 for transfer by P + diffusion. As shown in FIG. 2, transfer gate 22 of FIG.
A carrier pocket 24 (not shown in FIG. 1) is formed inside A.

Further, the transfer gate 22A is provided on the surface via the gate insulating film 21 so as to partially cover the accumulation well 4 as shown in FIG.

Further, a pinning layer 25 made of an N-type impurity diffusion layer having a conductivity type opposite to that of the carrier pocket 24 is formed under the gate insulating layer 21 on the substrate surface in contact with the gate insulating layer 21 of the transfer gate 22A. Is formed. As shown in FIG. 2, the pinning layer 25 is formed so as to overlap a part of the transfer gate 22A. The entire area of the upper surface of the P-type carrier pocket 24 is covered with the pinning layer 25, and the carrier pocket 24 is not in contact with the gate insulating layer 21. Due to the presence of the pinning layer 25, defects generated between the insulating layer and the semiconductor layer are filled with electrons, thereby suppressing the generation of electric charges.

The transfer gate 22B is formed on the second gate insulating layer 22BG on the surface side of the substrate 1 using the second gate electrode layer. As shown in FIG. 1, the side on the transfer gate 22A side is the transfer gate 22A. And covers part of the transfer gate 22A and the photodiode formation region PD. The side on the ring gate 5 side has a shape along the shape of the ring gate 5 and covers a part of the ring gate 5.

As the second gate electrode layer constituting the transfer gate 22B, a tungsten silicide layer formed on a polysilicon layer is used, and a gate electrode layer having a high light shielding property is formed. Note that titanium silicide or cobalt silicide may be used instead of the tungsten silicide used here. By disposing tungsten silicide or the like on the polysilicon layer, stress from tungsten silicide or the like having a large mechanical stress can be relieved by the polysilicon layer, and generation of electric charges due to this stress can be suppressed. Further, a silicide containing two or more kinds of metals among the above-described tungsten, titanium, and cobalt may be used as the silicide.

Alternatively, a metal such as tungsten, titanium, cobalt, or a silicide containing one or more of the above metals can be used as the second gate electrode layer without using polysilicon. In this case, since no polysilicon is used, it is possible to reduce the thickness and improve the coverage. In addition, a single layer of polysilicon may be used. In this case, only a low stress layer can be used, and generation of crystal defects can be suppressed. When polysilicon is used for the second gate electrode layer, the light shielding property can be improved by forming the polysilicon layer thicker.

Further, although polysilicon is used for the first gate electrode layer used for the gate electrodes of the transfer gate 22A and the ring gate 5, this may be used by overlapping polysilicon and tungsten silicide. In this case, since the light transmittance at the transfer gate 22A is also suppressed,
When the transfer gates 22B are overlapped, higher light shielding properties can be obtained. Even in this case, by disposing tungsten silicide or the like on the polysilicon layer, stress from tungsten silicide or the like having a large mechanical stress can be relieved, so that the stress can be relieved as described above. Further, titanium silicide or cobalt silicide may be used instead of tungsten silicide. Further, a silicide containing two or more kinds of metals among the above-described tungsten, titanium, and cobalt may be used as the silicide. Alternatively, a layer in which tungsten, titanium, or cobalt is formed as a single metal on polysilicon may be used.

Furthermore, a single metal such as tungsten, titanium, cobalt, or silicide can be used without a polysilicon layer.

In this case, since polysilicon is not used, the thickness can be reduced, and the amount of step due to the formation of the gate electrode can be suppressed.

Further, when the first gate electrode layer used for the second gate electrode layer or the transfer gate 22A and the gate electrode of the ring gate 5 is made of a highly reflective material such as silicide or metal, halation is caused in the photolithography process. There is a case. As a countermeasure against halation in the photolithographic process, for example, a silicon oxide layer or a titanium nitride layer is used for the second gate electrode layer having a material capable of controlling the reflectance on the silicide or metal layer, thereby suppressing the amount of light reflection. be able to.

Since the transfer gate 22A is covered by the transfer gate 22B having a high light-shielding property, it is possible to effectively suppress leakage of signal light that enters the carrier pocket 24 below the transfer gate 22A through the transfer gate 22A and accumulates it. The charge transferred from the well 4 can be held.

The transfer gate 22B controls to lower the potential barrier between the carrier pocket 24 below the transfer gate 22A and the carrier pocket 7 below the modulation transistor during carrier transfer.

The transfer gate 22A, transfer gate 22B, and carrier pocket 24 in the transfer transistor formation region TT described above constitute transfer means.

FIG. 3 is a potential diagram illustrating a potential state in each mode of the solid-state imaging device. FIG. 3 shows the potential in the accumulation mode (M1), batch transfer mode (M2), hold / noise output mode (M3), transfer mode (M4), and signal output mode (M5) from the top. In FIG. 3, the potential relationship in each mode is shown with the positive direction being the direction in which the hole potential becomes higher.

In FIG. 3, the horizontal axis indicates the position along the line AA ′ in FIG. 1, and the vertical axis indicates the potential based on the hole, and shows the potential relationship at each position. Yes. From the left side to the right side of FIG. 3, one end side of the ring gate 5, the source region 12, the other end side of the ring gate 5, the transfer gate 22B, the transfer gate 22A, the storage well 4, and the OFD region 14 in the substrate. Shows the potential. The portion where the transfer gate 22B overlaps the ring gate 5 and the transfer gate 22A is electrically shielded by the ring gate 5 and the transfer gate 22A, so that the transfer gate 22B in FIG. Only the part that has an effect is described.

In the accumulation mode (M1), a voltage is applied to the transfer gate 22A so that a high potential barrier is formed between the accumulation well 4 and the carrier pocket 24 (below the transfer gate 22A). A voltage is also applied to the transfer gate 22B so that a high potential barrier is formed between the modulation well 6 and the carrier pocket 24. The potential between the storage well 4 and the OFD region 14 is lower than the potential of the transfer gate 22A region. This is because the electric charge overflowing from the accumulation well 4 is discharged to the OFD region 14. That is, as an accumulation procedure, the potential barrier of the transfer path is simultaneously controlled for all the pixels, so that the photogenerated charges generated by the photoelectric conversion elements are accumulated in the accumulation well 4 so as not to flow to the carrier pocket 24 via at least the transfer path. The procedure is performed.

In the collective transfer mode (M2), a low predetermined first voltage is applied to the transfer gate 22A so as not to form a potential barrier between the storage well 4 and the carrier pocket 24. A voltage is applied to the transfer gate 22B so that a high potential barrier is formed between the modulation well 6 and the carrier pocket 24. In this case, since the potential of the carrier pocket 24 is lower than that of the accumulation well 4, the charge accumulated in the accumulation well 4 flows into the carrier pocket 24. That is, as a batch transfer procedure, a procedure for controlling the potential barrier of the transfer path by the gate voltage of the transfer gate 22A and transferring the photo-generated charges accumulated in the accumulation well 4 to the carrier pocket 24 is performed simultaneously for all pixels. .

In the holding / noise output mode (M3), a voltage is applied to the transfer gate 22A so that a high potential barrier is formed between the storage well 4 and the carrier pocket 24. A voltage is applied to the transfer gate 22B so that a high potential barrier is formed between the modulation well 6 and the carrier pocket 24. Thereby, the electric charge flowing into the carrier pocket 24 is held in the carrier pocket 24. Further, in this state, as will be described later, resetting and readout of noise components are performed. That is, as a noise component modulation procedure, a procedure for reading out the noise component of the carrier pocket 7 without controlling the potential barrier of the transfer path by the gate voltage of the transfer gate 22A and the transfer gate 22B so that photogenerated charges do not flow into the carrier pocket 7 Is done.

In the case of the transfer mode (M4) performed for each line, the transfer gate 22A has a predetermined second high so that no potential barrier is formed between the carrier pocket 24 and the modulation well 6.
Is applied. A predetermined voltage is applied to the transfer gate 22B so that a potential barrier is not formed between the carrier pocket 24 and the modulation well 6. Further, a predetermined voltage is applied to the transfer gate 22B so that the potential formed by the transfer gate 22B is lower than the potential formed by the transfer gate 22A and higher than the potential of the modulation well 6. That is, when the transfer gate 22B transfers charges from the carrier pocket 24 to the carrier pocket 7, the potential between the carrier pocket 24 and the carrier pocket 7 is set to the potential between the potential of the carrier pocket 24 and the potential of the carrier pocket 7. To.

In this case, the potential formed by the transfer gate 22B is the carrier pocket 24.
Since the potential of the modulation well 6 is lower than the potential formed by the transfer gate 22B, the charge accumulated in the carrier pocket 24 flows into the modulation well 6. That is, as a transfer procedure for each line, the voltage applied to the transfer gate 22A and the transfer gate 22B is set to a predetermined voltage to control the potential barrier of the transfer path, and the photogenerated charges accumulated in the carrier pocket 24 are stored. Almost all of the carrier pocket 7
The procedure to transfer to is performed.

As shown in FIG. 2, the dark current is suppressed by the pinning layer 25 provided between the gate insulating layer 21 of the transfer gate 22A and the carrier pocket 24 for transfer. But,
Since there is the pinning layer 25, even if a predetermined voltage is applied to the transfer gate 22A by being pinned by the voltage of the drain region, the potential below the transfer gate 22A does not rise sufficiently, and all the photogenerated charges are transferred. Things that can't be done can occur. Therefore, in the present embodiment, as described above, by providing the transfer gate 22B and applying the predetermined voltage as described above, it is possible to transfer all the photo-generated charges accumulated in the carrier pocket 24. I have to.

In the signal output mode (M5), a voltage is applied to the transfer gate 22A so that a high potential barrier is formed between the carrier pocket 24 and the accumulation well 4. Transfer gate 2
A voltage is also applied to 2B so that a high potential barrier is formed between the modulation well 6 and the carrier pocket 24. As a result, the electric charge flowing into the modulation well 6 is held in the modulation well 6. Further, as described later in this state, there is a procedure for outputting a pixel signal corresponding to the photogenerated charge from the carrier pocket 7 while controlling the potential barrier of the transfer path and holding the photogenerated charge in the modulation well 6. Done.

Next, a driving method for realizing the CDS function and the collective electronic shutter function in the solid-state imaging device according to the above configuration will be described according to an operation sequence.

FIG. 4 is a timing chart showing a driving sequence when the solid-state imaging devices of the present embodiment are arranged in a two-dimensional array. As shown in FIG. 4, one frame period F includes four periods of a reset period (R1), an accumulation period (A), a batch transfer period (T), and a pixel signal readout period (S).

The reset period (R1) is an all-cell simultaneous reset period for simultaneously resetting all the pixels at the start of one frame, that is, all the solid-state imaging devices. The reset operation performed in the reset period (R1) is an operation for discharging remaining charges from the accumulation well 4, the carrier pocket 24, and the modulation well 6 for all pixels. After the reset operation, charge accumulation in the accumulation well 4 of each solid-state image sensor is started.

In the accumulation period (A) following the reset period (R1), each solid-state image sensor is in accumulation mode (M1).
This is a period for accumulating photogenerated charges generated in the photodiode formation region PD upon receiving light in the accumulation well 4.

In the batch transfer period (T) following the accumulation period (A), each solid-state image sensor is in the batch transfer mode (M2
This is a period in which collective transfer is performed in which charges accumulated in each photodiode formation region PD are transferred to the carrier pocket region TCP of each solid-state image sensor simultaneously for all pixels, that is, for all solid-state image sensors simultaneously. . The batch transfer operation in the batch transfer period (T) is performed by simultaneously applying a predetermined first voltage to the transfer gate 22A described above.

After the batch transfer mode (M2), the carrier pocket region TCP is held in charge, that is, the above-described holding / noise output mode (M3).

As shown in FIG. 4, in the pixel signal readout period (S) after the collective transfer period (T), the charges held in the carrier pocket area TCP are converted into the modulation transistor formation area TM for each selected line.
Has horizontal blanking to transfer to. That is, as shown in FIG. 4, in the pixel signal readout period (S), the horizontal blanking period (H) is shifted sequentially, that is, temporally, for the n lines from the first line L1 to the last line Ln. It occurs continuously. As shown in FIG. 5, the horizontal blanking period (H) includes a reset period (R2) and a noise component / signal component readout period (SS).

FIG. 5 is a timing chart for explaining the batch transfer period (T) and the horizontal blanking period (1H). The horizontal blanking period (1H) occurs for each selected line. FIG.
Are the transfer gate 22A and transfer gate 22B, the ring gate (G) 5 of the modulation transistor Tm, and the source region (S) in the batch transfer period (T) and the horizontal blanking period (1H).
) 12 and the voltage waveform applied to the drain region (D) 13.

In the batch transfer period (T), the transfer gate 22A is changed from 3.3V to 0V, the ring gate 5 is changed to 1.0V, the drain region 13 is changed from 1.0V to 3.3V, and the source region 12 is set to 1 0.0V.

In the reset period (R2), the transfer gates 22A and 22B are high impedance, the ring gate 5 is changed from 1.0 V to 8.0 V, and the drain region 13 is changed from 3.3 V to 6 V.
. The source region 12 is changed from 1.0 V to 6.0 V. The charges in the carrier pocket 7 are discharged by the reset operation in the reset period (R2).

In the noise component / signal component readout period (SS), first, in order to read out the noise component, the transfer gates 22A and 22B are 3.3V, and the ring gate 5 is 1.0V to 2.8.
V, the drain region 13 is 3.3 V, and the noise component voltage is output to the source region 12 (M3). Thereafter, the transfer gate 22A is changed from 3.3V to 5.0V, the transfer gate 22B is changed from 3.3V to 0V, the ring gate 5 is 1.0V, and the source region 12 is 1.V.
0V. Thereby, charge transfer from the carrier pocket 24 to the carrier pocket 7 is performed (M4).

Next, in order to read out signal components, the transfer gates 22A and 22B are 3.3V, the ring gate 5 is changed from 1.0V to 2.8V, the drain region 13 is 3.3V, and the source region 12
Is the voltage of the signal component. As a result, the signal component is read from the charge amount of the carrier pocket 7 (M5).

Thereafter, the transfer gates 22A and 22B are 3.3V, the rig gate 5 is 1.0V, the drain region 13 is 3.3V, and the source region 12 is 1.0V.

As described above, according to the solid-state imaging device of the present embodiment, it is possible to easily manufacture with low power consumption, collective electronic shutter function that simultaneously receives all the pixels, accumulates charges, and transfers them collectively, and noise precedent A high-quality image signal can be obtained by realizing both the CDS function by reading and suppressing leakage of incident light.

Note that a reset operation may be performed at the end of the horizontal blanking period (H) in order to suppress the output of the non-selected lines. For example, in FIG. 5, the timing R indicated by the dotted line
By giving a reset signal at X, it is possible to eliminate the influence of the photogenerated charges remaining in the carrier pocket 7 of the non-selected line.

Further, as shown in FIGS. 6 and 7, a reset operation may be added between the accumulation operation and the batch transfer operation. FIG. 6 is a timing chart showing a driving sequence of the solid-state imaging device according to the modification of the first embodiment. FIG. 7 is a timing chart including a batch transfer period (T) and a horizontal blanking period (H) of the solid-state imaging device according to the modification of the first embodiment. As shown in FIG. 6, a reset period (R22) is provided between the accumulation period (A) and the batch transfer period (T). FIG. 7 shows the details of the reset period (R22).
The voltage waveforms applied to the transfer gate 22A and the transfer gate 22B, the ring gate (G) 5, the source region (S) 12 and the drain region (D) 13 of the modulation transistor Tm are shown.

In this way, by adding a reset operation between the accumulation operation and the batch transfer operation,
The carrier pocket 24 is completely depleted. As a result, only the photo-generated charges from the accumulation well 4 can be accumulated and transferred.

  Next, the effect of this embodiment will be described.

(1) Since the carrier gate 24 is covered with the transfer gate 22A by the transfer gate 22B, the amount of photogenerated charges in the carrier pocket 24 can be suppressed, and an image with a high SN ratio can be provided.

(2) In addition to the transfer gate 22A, a part of the photodiode formation region PD is transferred to the transfer gate 2
Since it is covered with 2B, the amount of photogenerated charges in the carrier pocket 24 can be more reliably suppressed.

(3) Since the transfer gate 22B is made of a two-layer structure of polysilicon and tungsten silicide, the light transmission is suppressed by tungsten silicide having a low light transmission, and polysilicon having a stress relaxation function of tungsten silicide is laminated. By doing so, it is possible to provide a structure with low stress and suppressing light penetration into the carrier pocket 24.

(4) Since the carrier pocket 7 is provided under the ring gate 5 to collect the photocharge, the optical signal intensity per unit charge can be increased, and the SN ratio is high even in a dark place where the optical signal is weak. Images can be provided.

(5) Since the OFD region 14 is provided, even if the optical signal is strong and the charge overflows, the overflowed charge can flow out of the OFD region 14, and the smear phenomenon that the overflowed charge jumps into another pixel occurs. Can be suppressed.

(6) Since the pinning layer 8 and the like are formed in the photodiode region PD and the like, generation of noise due to the interface state can be suppressed.

(7) Since the storage well 4 and the transfer gate 22A are arranged so as to overlap, the charge generated in the storage well 4 can be transferred reliably.

(8) Since the second gate electrode layer having silicon oxide or titanium nitride as a reflection suppressing layer is used, halation in the photolithography process can be prevented.

(Second Embodiment)
Next, a second embodiment of the present invention will be described in detail. FIG. 8 is a plan view showing a planar shape of a solid-state imaging device according to the second embodiment of the present invention. FIG. 9 is a cross-sectional view taken along the line BB ′ of FIG. However, the cross section of the wiring and its upper layer structure is not shown.

As shown in FIG. 8, the solid-state image sensor of the present embodiment has a solid-state image sensor array in which a plurality of solid-state image sensors are arranged in a two-dimensional matrix on a substrate plane. A range indicated by a broken line in FIG. 8 is one solid-state imaging device C which is a unit pixel. The solid-state imaging device according to the present embodiment is a CMOS-APS (Active Pixel Sensor) type sensor. Each solid-state imaging device accumulates photogenerated charges generated according to incident light, and outputs a pixel signal at a level based on the accumulated photogenerated charges. A pixel signal of one screen can be obtained by arranging the solid-state imaging devices in a matrix.

The solid-state imaging device according to the present embodiment achieves both the CDS function and the collective electronic shutter function. Note that the present embodiment shows an example in which electrons are used among the photogenerated charge pairs. Even when holes are used as the photogenerated charge pair, the same configuration can be adopted.

As shown in FIG. 9, the solid-state imaging device includes a photodiode formation region PD1, a transfer transistor formation region TT1, a reset transistor formation region RST1, an amplification transistor formation region TAm1, and a selection transistor formation region TS1.

In the reset transistor forming region RST1 for forming the reset transistor RST,
A floating diffusion region 58 is formed. A carrier pocket region TCP1 is formed in the transfer transistor formation region TT1. Carrier pocket area T
CP1 has a carrier pocket 56 for temporarily holding the transferred photogenerated charge.

In the present embodiment, the transfer transistor formation region TT1 has a carrier pocket region TCP1 as a carrier pocket 56 for temporarily holding charges, and further transfers charges from the carrier pocket region TCP1 to the floating diffusion region 58. It has a transfer area TC1. Transistors and the like formed in the transfer transistor formation region TT1 constitute transfer means.

In the present embodiment, all the pixels are collectively (that is, all the solid-state imaging devices are simultaneously).
The photogenerated charges accumulated in each photodiode formation region PD1 are transferred to the carrier pocket region TCP1 of each solid-state imaging device and temporarily held in the carrier pocket 56. Thereafter, for each selected line, from the carrier pocket region TCP1 to the reset transistor formation region RST1.
The floating diffusion area 58 is transferred.

The configuration of the solid-state imaging device according to the present embodiment will be described in more detail with reference to FIGS. In FIG. 9 and the description thereof, the subscripts-and + of N and P indicate the state from the lighter portion (subscript-) to the darker portion (subscript ++) depending on the number. .

As shown in FIG. 9, the solid-state imaging device is formed on a P-type semiconductor region 52 a formed on the N-type semiconductor region 51. In the present embodiment, the N-type impurity region 51 is provided in the semiconductor substrate. However, the present invention is not limited to this, and the N-type semiconductor region 51 may be an N-type semiconductor substrate. In the photodiode formation region PD1, an accumulation well 5 made of N-type impurities is formed on the P-type semiconductor region 52a.
2 is formed.

The P-type semiconductor region 52a and the N-type impurity layer 52 form a photodiode. A P-type pinning layer 53 electrically connected to the P-type semiconductor region 52a is formed on the substrate surface side of the photodiode formation region PD1. In the photodiode formation region PD1, an opening region (not shown) is formed on the substrate surface, and the accumulation well 52 is formed below the opening region. As shown in FIG. 8, the photodiode formation region PD1 is formed in a substantially L shape on the substrate surface.

On the other hand, a pair of N-type impurity layers are formed on the substrate surface over the P-type semiconductor region 52a of the reset transistor formation region RST1. Of the pair of impurity layers, the impurity layer on the photodiode formation region PD1 side forms a floating diffusion region 58, and the other impurity layer 60 is connected to a fixed potential point, for example, VDD.

A reset gate (also simply referred to as a gate) 59 is formed on the substrate surface of the reset transistor formation region RST1 via a gate insulating film (not shown). Reset gate 5
A channel is formed on the lower substrate surface. By applying a predetermined voltage to the reset gate 59 via a terminal, the channel is made conductive, the charge in the floating diffusion region 58 is discharged through the other impurity layer 60, and the potential of the floating diffusion region 58 is changed. It can be initialized.

A pinning layer 53 is disposed below the opening region of the photodiode. A depletion layer extends from the boundary surface between the P-type semiconductor region 52a and the accumulation well 52. In the depletion region,
Photogenerated charges are generated by the light incident through the opening region. The generated photo-generated charges are collected in the accumulation well 52.

The charges accumulated in the accumulation well 52 are transferred to and held in the floating diffusion region 58 via a transfer transistor formation region TT1 described below. The floating diffusion region 58 is a gate TA of an amplification transistor formation region TAm1 (described later).
connected to g. The drain of the amplification transistor formation region TAm1 that constitutes the amplification transistor Amp that is an amplification means is connected to the power supply terminal, and the output of the amplification transistor formation region TAm1 is the potential of the floating diffusion region 58, that is, a photo diode that functions as a photodiode This corresponds to light incident on the diode formation region PD1.

Next, the transfer transistor formation region TT1 will be described. Transfer transistor formation region T
As shown in FIG. 9, T1 is a carrier pocket region TC for temporarily holding photogenerated charges.
P1 is included in the P-type semiconductor region 52a.

Specifically, the transfer transistor region TT1 on the substrate surface side between the photodiode formation region PD1 and the reset transistor formation region RST1 in one solid-state imaging device.
Is formed. The transfer transistor region TT1 has a transfer gate 54A on the substrate surface via a gate insulating layer 55 so that a channel is formed on the substrate surface. A carrier pocket region TCP1 is provided below the transfer gate 54A. Carrier pocket area TCP1
The carrier pocket 56 is formed near the substrate surface. N-type carrier pocket 56 is capacitively coupled to transfer gate 54A. A transfer pulse is supplied to the transfer gate 54A via a terminal.

The transfer transistor region TT1 is a transfer storage region T including the carrier pocket region TCP1.
In addition to A1, it further includes a transfer control area TC1. The transfer control area TC1 is provided between the transfer accumulation area TA1 and the reset transistor formation area RST1. The transfer accumulation region TA1 including the transfer gate 54A and the carrier pocket 56 constitutes a transfer control element that performs control to transfer the charge from the accumulation well 52 to the floating diffusion region 58 after once accumulating the charge from the accumulation well 52.

A transfer gate 54B is provided in the transfer control region TC1. The transfer gate 54B
When the substrate is formed on the surface side of the substrate using the second gate electrode layer over the second gate insulating layer 54BG and the substrate is viewed from a direction orthogonal to the surface of the substrate, the side on the transfer gate 54A side is: It has a shape along the shape of the transfer gate 54A, and covers the transfer gate 54A and a part of the photodiode formation region PD1.

As the second gate electrode layer constituting the transfer gate 54B, a polysilicon layer formed with a tungsten silicide layer is used, and a gate electrode layer having high light shielding properties is formed. Although tungsten silicide is used here, titanium silicide or cobalt silicide may be used instead of tungsten silicide. By disposing tungsten silicide or the like on the polysilicon layer, stress from tungsten silicide or the like having a large mechanical stress can be relieved, and generation of charges due to the stress can be suppressed.

Further, a silicide containing two or more kinds of metals among the above-described tungsten, titanium, and cobalt may be used as the silicide. Furthermore, a metal containing one or more substances among tungsten, titanium, and cobalt may be formed on the polysilicon.

The second gate electrode layer can be made of a metal containing one or more kinds of tungsten, titanium, or cobalt without using polysilicon, or a silicide containing one or more kinds of the above metals. In this case, since no polysilicon is used, it is possible to reduce the thickness and improve the coverage. In addition, a single layer of polysilicon may be used. In this case, only a low stress layer can be used, and generation of crystal defects can be suppressed. When polysilicon is used for the second gate electrode layer, the light shielding property can be improved by forming the polysilicon layer thicker.

Further, for example, a silicon oxide layer or a titanium nitride layer may be formed on the second gate electrode layer in order to suppress halation in the photolithography process of the second gate electrode layer.

The transfer gate 54A and the like use single-layer polysilicon serving as the first gate electrode layer, but this may be a stack of polysilicon and tungsten silicide. In this case, since the light transmittance at the transfer gate 54A can be suppressed, higher light shielding properties can be obtained when the transfer gate 54B is overlapped. Even in this case, by disposing tungsten silicide or the like on the polysilicon layer, stress from tungsten silicide or the like having a large mechanical stress can be relieved, so that the stress can be relieved as described above. Further, instead of tungsten silicide, titanium silicide, cobalt silicide, or silicide containing two or more kinds of metals among tungsten, titanium, and cobalt described above may be used.

Further, a metal or silicide containing one or more kinds of metals among tungsten, titanium, and cobalt metals can be used without using polysilicon. In this case, since no polysilicon is used, it is possible to reduce the thickness and improve the coverage.

Further, in order to suppress halation in the photolithography process that occurs when silicide or metal is used on the second gate electrode layer or the first gate electrode layer, the reflectance such as a silicon oxide layer or a titanium nitride layer is used. You may form the layer for controlling.

Since the transfer gate 54A is covered by the transfer gate 54B having a high light shielding property, it is possible to effectively suppress leakage of signal light that enters the carrier pocket 56 under the transfer gate 54A through the transfer gate 54A and accumulates it. The charge transferred from the well 52 can be held.

The transfer accumulation region TA1 including the transfer gate 54B and the carrier pocket 56 constitutes a transfer control element that performs control to transfer the charge from the accumulation well 52 to the floating diffusion region 58 after once accumulating.

With this transfer gate 54B, the potential barrier of the transfer path formed between the carrier pocket 56 under the transfer gate 54A and the floating diffusion region 58 of the reset transistor formation region RST1 can be controlled to be lowered during carrier transfer.

As described above, the transfer gate 54A and the transfer gate 54 in the transfer transistor region TT1.
B and the carrier pocket 56 constitute transfer means.

As shown in FIG. 8, the transfer gate 54A of the transfer transistor region TT1 is formed in a substantially rectangular shape adjacent to the end of one side of the substantially L-shaped photodiode formation region PD1.

In the present embodiment, an overflow drain region OFD1 is formed adjacent to the photodiode formation region PD1 to discharge charges (excess charge) overflowed from the photodiode formation region PD. In the overflow drain region OFD1, an N-type impurity layer 62 as an impurity region is formed on the substrate surface, and the impurity layer 62 is connected to a predetermined fixed potential point together with the other impurity layer 60 of the reset transistor formation region RST1. Yes.

In a period in which the potential barrier in the transfer transistor formation region TT1 is set high, the potential barrier between the accumulation well 52 and the impurity layer 62 in the photodiode formation region PD1 is lower than the potential barrier in the transfer transistor formation region TT1. Yes. As a result, surplus charges generated in the photodiode formation region PD1 are discharged to the overflow drain region OFD1.

FIG. 10 is a potential diagram illustrating a potential state in each mode of the solid-state imaging device. FIG. 10 shows, from the top, the accumulation mode (M1), batch transfer mode (M2), hold mode (M3), reset mode (M4), noise component readout mode (M5), transfer mode (
M6) and the potential in the signal component readout mode (M7). In addition, FIG.
In 0, the potential relationship in each mode is shown with the direction in which the potential of the electron, which is the photogenerated charge, becomes higher, on the positive side. When a predetermined timing signal is supplied to a transfer line or the like from a timing control circuit (not shown), the solid-state imaging device enters each mode state.

In FIG. 10, the horizontal axis indicates the position along the line BB ′ in FIG. 8, and the vertical axis indicates the potential based on the electrons, and shows the potential relationship at each position. Yes. FIG. 10 is a potential diagram from the overflow drain region OFD1 to the reset transistor formation region RST1 to the middle of the line BB ′ in FIG. Note that the description of the region of the transfer gate 54B that overlaps the transfer gate 54A is omitted because the potential is electrically cut off.

FIG. 10 shows the potential in the substrate at the positions of the reset gate 59, the transfer gate 54B, the transfer gate 54A, the accumulation well 52, and the impurity layer 62 in the overflow drain region OFD1 from the left side to the right side.

In the accumulation mode (M1), a voltage is applied to the transfer gate 54A so that a high potential barrier is formed between the accumulation well 52 and the carrier pocket 56. The potential of the path to the overflow drain region OFD1 is lower than the potential of the region of the transfer gate 54A. This is because the charge overflowing from the accumulation well 52 is caused to flow into the overflow drain region O.
This is for discharging to the impurity layer 62 of FD1. That is, as an accumulation procedure, the potential barrier of the transfer path is controlled by the gate voltage of the transfer gate 54A for all the pixels at the same time, and the photo-generated charges generated by the photoelectric conversion elements are transferred at least through the transfer path to the carrier pocket 56 of the carrier pocket region TCP1. The procedure of accumulating in the accumulation well 52 is performed while preventing the current from flowing.

In the collective transfer mode (M2), a high predetermined voltage is applied to the transfer gate 54A so as not to form a potential barrier between the accumulation well 52 and the carrier pocket 56.
At this time, since the potential of the carrier pocket 56 is lower than that of the accumulation well 52, the charge accumulated in the accumulation well 52 flows into the carrier pocket 56. That is, as a batch transfer procedure, a procedure for controlling the potential barrier of the transfer path by the gate voltage of the transfer gate 54A and transferring the photogenerated charges accumulated in the accumulation well 52 to the carrier pocket 56 is performed simultaneously for all pixels. .

In the holding mode (M3), as shown in FIG.
The potential barrier of the transfer path is controlled by the gate voltage of A so that the photo-generated charges due to the photoelectric conversion elements do not flow from the accumulation well 52 to the carrier pocket 56 of the carrier pocket region TCP1 via at least the transfer path. The transferred photogenerated charge is held in the carrier pocket 56.

In the reset mode (M4), a high potential barrier is formed between the accumulation well 52 and the carrier pocket 56 in the transfer gate 54A, and is also high between the carrier pocket 56 and the floating diffusion region 58. A voltage is applied so that a potential barrier is formed. As a result, the charge flowing into the carrier pocket 56 is transferred to the carrier pocket 5.
6 is held. In this state, reset is performed. In the floating diffusion region 58, the above-described accumulation, transfer, and hold modes (M1 to M
Since unnecessary charges may accumulate during 3), unnecessary charges in the floating diffusion region 58 are eliminated in the reset mode (M4).

That is, a predetermined voltage is applied to the reset gate 59 of the reset transistor formation region RST1, the reset transistor RST becomes conductive, and the charge accumulated in the floating diffusion region 58 flows to the fixed potential point. Therefore, the photogenerated charges in the floating diffusion region 58 are discharged, and the floating diffusion region 58 is discharged.
There is no electric charge other than noise components.

Also in the noise component readout mode (M5), a high potential barrier is formed between the accumulation well 52 and the carrier pocket 56 in the transfer gate 54A and the transfer gate 54B, and
A voltage is applied so that a high potential barrier is also formed between the carrier pocket 56 and the floating diffusion region 58. In this state, the noise component is read out. That is, as the noise component modulation procedure, a procedure is performed in which the potential barrier of the transfer path is controlled by the gate voltage of the transfer gate 54B, and the noise component in the floating diffusion region 58 is read without flowing the photogenerated charge to the floating diffusion region 58. . The noise component in the floating diffusion region 58 is read out. This corresponds to the amplification transistor Amp in accordance with the floating diffusion region 58 in a state where there is no charge.
Therefore, the output voltage VO of the amplification transistor Amp corresponds to the state in which the floating diffusion region 58 has no potential, that is, corresponds to the noise component. As for the signal of the noise component, the output of the amplification transistor Amp is output to the output line via the selection transistor WL in the selection transistor formation region TS1.

In the transfer mode (M6), a predetermined voltage is applied to the transfer gate 54A so that a potential barrier is not formed between the carrier pocket 56 and the floating diffusion region 58. In this case, since the potential of the floating diffusion region 58 is lower than that of the carrier pocket 56, the charge accumulated in the carrier pocket 56 flows into the floating diffusion region 58. That is, as a transfer procedure for each line, a procedure is performed in which the potential barrier of the transfer path is controlled by the gate voltage of the transfer gate 54A to transfer the photogenerated charges accumulated in the carrier pocket 56 to the floating diffusion region 58.

In this case, a predetermined voltage is further applied to the transfer gate 54B so that a potential barrier is not formed between the carrier pocket 56 and the floating diffusion region 58. A predetermined voltage is applied to the transfer gate 54B so that the potential formed by the transfer gate 54B is lower than the potential formed by the transfer gate 54A and higher than the potential of the floating diffusion region 58. That is, when the transfer gate 54B transfers charges from the carrier pocket 56 to the floating diffusion region 58, the potential between the carrier pocket 56 and the floating diffusion region 58 is equal to the potential of the carrier pocket 56 and the potential of the floating diffusion region 58. Make potential between.

That is, the potential formed by the transfer gate 54B is the carrier pocket 56.
Since the potential of the floating diffusion region 58 is lower than the potential formed by the transfer gate 54A, the charge accumulated in the carrier pocket 56 flows into the floating diffusion region 58. That is, as a transfer procedure for each line, the voltage applied to the transfer gate 54A and the transfer gate 54B is set to a predetermined voltage to control the potential barrier of the transfer path, and the photogenerated charges accumulated in the carrier pocket 56 are stored. Is transferred to the floating diffusion region 58.

In the signal component read mode (M7), a voltage is applied to the transfer gate 54B so that a high potential barrier is formed between the carrier pocket 56 and the floating diffusion region 58. As a result, the charge that has flowed into the floating diffusion region 58 is held in the floating diffusion region 58. In this state, signal components are read out. That is, as the signal component modulation procedure, the transfer gate 5
A procedure for controlling the potential barrier of the transfer path by the gate voltage of 4A and the transfer gate 54B and outputting the pixel signal corresponding to the photogenerated charge in a state where the photogenerated charge is held in the floating diffusion region 58 is performed.

Next, a driving method for realizing the CDS function and the collective electronic shutter function in the solid-state imaging device according to the above configuration will be described according to an operation sequence.

FIG. 11 is a timing chart showing a driving sequence of the solid-state imaging device according to the present embodiment. As shown in FIG. 11, one frame period includes four periods of a reset period R11, an accumulation period A11, a batch transfer period T11, and a pixel signal readout period S11.

The reset period R11 is an all-cell simultaneous reset period for simultaneously resetting all the pixels at the start of one frame, that is, for all the solid-state imaging devices. In addition, the reset operation performed in the reset period R11 is performed for all the pixels by the accumulation well 52, the carrier pocket 56 which is a temporary accumulation diffusion region, and the floating diffusion region 58.
This is an operation for discharging the remaining charges. After the reset operation, charge accumulation in the accumulation well 52 of each solid-state imaging device is started.

The accumulation period A11 subsequent to the reset period R11 is a period in which each solid-state imaging device enters the accumulation mode (M1) and accumulates photogenerated charges generated in the photodiode formation region PD1 in the accumulation well 52 upon receiving light.

In the batch transfer period T11 following the accumulation period A11, each solid-state image sensor is in the batch transfer mode (M2
This is a period in which collective transfer is performed in which charges accumulated in each photodiode formation region PD1 are transferred to the carrier pocket 56 of each solid-state image sensor simultaneously for all pixels, that is, for all solid-state image sensors simultaneously. The batch transfer operation in the batch transfer period T11 is performed by simultaneously applying a predetermined first voltage to the transfer gate 54A described above.

When extremely intense light is incident on the photodiode formation region PD1, overflow charge may be generated in the accumulation period and the batch transfer period. Excess charge from the photodiode formation region PD1 is transferred to the overflow drain region OFD1 and discharged. That is, signal charges (photogenerated charges) are held in the carrier pocket region TCP1, and at the same time, surplus charges are discharged through the overflow drain region OFD1.

Thus far, the carrier pocket 56 is in a state where charges are held. In the pixel signal readout period, the horizontal blanking period occurs sequentially, that is, shifted in time, for n lines from the first line L1 to the last line Ln. As shown in FIG. 14, the horizontal blanking period includes a reset period and a noise component / signal component readout period.

FIG. 12 shows reset, noise component readout, charge transfer, and horizontal blanking period.
4 is a timing chart showing the timing of signal component readout.

First, in the reset period R31 after the batch transfer period T11, the charges in the floating diffusion region 58 are discharged, and the potential of the floating diffusion region 58 has an initial value. Subsequent to the reset period R31, a noise and signal component readout period S21 is provided.

At the noise component readout timing, first, the noise component is read out. Subsequently, charges are transferred from the carrier pocket 56 to the floating diffusion region 58 at the timing of charge transfer. Next, the signal component is read at the signal component read timing.

As described above, according to the solid-state imaging device of the present embodiment, it is possible to easily manufacture with low power consumption, collective electronic shutter function that simultaneously receives all the pixels, accumulates charges, and transfers them collectively, and noise precedent Both CDS functions by reading can be realized.

Therefore, as a result, according to the solid-state imaging device according to the above-described embodiment, a high-quality image signal can be obtained.

In order to suppress the output of the non-selected line, at the end of the horizontal blanking period (1H),
A reset operation may be performed. For example, in FIG. 12, by giving a reset signal at timing RX indicated by a dotted line, it is possible to eliminate the influence of the photogenerated charges remaining in the floating diffusion region 58 of the non-selected line.

Furthermore, as shown in FIG. 13, a reset operation may be added between the accumulation operation and the batch transfer operation. FIG. 13 is a timing chart showing a driving sequence of the solid-state imaging device according to the modification of the second embodiment. As shown in FIG. 13, the accumulation period (A11)
And a batch transfer period (T11), a reset period (R32) is provided, and a reset operation is performed. FIG. 14 shows details of the transfer gate 54 in the reset period (R32).
The voltage waveforms of A and the transfer gate 54B, the reset transistor RST1, and the amplification transistor Amp are shown.

In this way, by adding a reset operation between the accumulation operation and the batch transfer operation,
The carrier pocket 56 is completely depleted. As a result, only the photo-generated charges from the accumulation well 52 can be accumulated and transferred.

Even when this embodiment is used, the same effect as in the case of the first embodiment described above can be obtained, for example, an image with a high SN ratio can be provided by suppressing the amount of photogenerated charges in the carrier pocket 56. .

The present invention is not limited to the embodiment described above, and various changes and modifications can be made without departing from the scope of the present invention.

The top view which shows the planar shape of a board | substrate modulation type | mold sensor. Sectional drawing which shows the cross-sectional shape of a board | substrate modulation type | mold sensor. The potential diagram which shows the state of the potential in each mode of a substrate modulation type sensor. The timing chart which shows the drive sequence at the time of arrange | positioning a board | substrate modulation type sensor in a two-dimensional array form. The timing chart for demonstrating operation | movement in the batch transfer period (T) and horizontal blanking period (H) of a board | substrate modulation type | mold sensor. The timing chart which shows the drive sequence of a board | substrate modulation type | mold sensor. 4 is a timing chart including a batch transfer period (T) and a horizontal blanking period (H) of a substrate modulation type sensor. The top view which shows the planar shape of a CMOS type solid-state imaging device. Sectional drawing which shows the cross-sectional shape of a CMOS type solid-state image sensor. The potential diagram which shows the state of the potential in each mode of a CMOS type solid-state imaging device. 6 is a timing chart showing a driving sequence of the CMOS type solid-state imaging device. 6 is a timing chart showing timings of reset, noise component readout, charge transfer, and signal component readout in a horizontal blanking period of the CMOS type solid-state imaging device. The timing chart which shows the drive sequence of the solid-state imaging device of a CMOS type solid-state imaging device.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Substrate as a semiconductor substrate, PD ... Photodiode formation region, TM ... Modulation transistor formation region, TT ... Transfer transistor formation region, TCP ... Carrier pocket region, 2 ...
N-type well, 4 ... accumulation well, 3 ... N-type well, 8 ... pinning layer, Tm ... modulation transistor as detection MOS transistor, 10 ... gate insulating film, 5 ... ring gate as third gate electrode, 11 ... N + diffusion layer, 12 ... source region, 6 ... modulation well as floating diffusion region, 7 ... carrier pocket as pocket region, 13
... Drain region, 14. OFD region as an overflow drain, TA... Transfer accumulation region as a first transfer control element formed using the first gate electrode layer, TC... Transfer as a second transfer control element Region, 21... Gate insulating film as first insulating layer, 22A.
A transfer gate as a transfer gate electrode, a carrier pocket as a charge holding region,
25 ... a pinning layer, 22B ... a transfer gate as a second transfer gate electrode formed using a second electrode layer including a reflection suppressing layer, 22BG ... a second gate insulating layer as a second insulating layer, PD1... Photodiode formation region, TT1... Transfer transistor formation region, RST1.
Reset transistor formation region, TAm1 ... amplification transistor formation region, TS1 ... selection transistor formation region, RST ... reset transistor, TCP1 ... carrier pocket region, 56 ... carrier pocket as charge holding region, 58 ... floating diffusion region, TC1 ... second Transfer region as a transfer control element, 51... N-type semiconductor region as a semiconductor substrate, 52 a... P-type semiconductor region, 52.
... impurity layer, 59 ... reset gate, 53 ... pinning layer, TAg ... gate, Amp ... amplification transistor, 54A ... transfer gate as a first transfer gate electrode formed using the first gate electrode layer, 54B ... A transfer gate as a second transfer gate formed by using a second gate electrode layer including a reflection suppressing layer, 54BG ... a second gate insulating layer as a second insulating layer, 62 ... an impurity layer, 59 ... Reset gate, 55... Gate insulating layer as first insulating layer, TA1... Transfer accumulation region as first transfer control element, OFD1... Overflow drain region as overflow drain.

Claims (11)

An accumulation well for accumulating charges obtained by photoelectrically converting incident light formed on a semiconductor substrate;
A first transfer gate electrode formed by using a first gate electrode layer provided on a surface of the semiconductor substrate via a first insulating layer for transferring the charge from the accumulation well; 1 transfer control element;
A charge holding region provided under the first transfer gate electrode for storing the charge transferred from the storage well via the first transfer control element;
The first transfer gate electrode for transferring the charge from the charge holding region and a second gate electrode layer formed on the surface of the semiconductor substrate via a second insulating layer are used. A second transfer control element having two transfer gate electrodes;
A solid-state imaging device comprising a floating diffusion region for storing the charge transferred from the charge holding region via the second transfer control element and detecting a potential fluctuation caused by the charge,
In order to prevent the incident light from entering the charge holding region through the first transfer gate electrode, at least a part of the first transfer gate electrode on the charge holding region is covered for light shielding. A solid-state imaging device, wherein the second transfer gate electrode is extended. 2. The second transfer gate electrode is extended so as to cover a part of the accumulation well in addition to covering an upper portion of the first gate electrode on the charge holding region. The solid-state image sensor described in 1. The second transfer gate electrode is tungsten, titanium, or cobalt silicide or silicide containing two or more kinds of metal components of tungsten, titanium, or cobalt, which has a light transmittance lower than that of the polysilicon on polysilicon. The solid-state imaging device according to claim 1, wherein the solid-state imaging device has a two-layer structure with a metal including one or more components of tungsten, titanium, or cobalt. The second transfer gate electrode has a light transmittance lower than that of polysilicon, tungsten,
The solid-state imaging device according to claim 1, wherein a silicide containing one or more metal components of titanium or cobalt, or a metal containing one or more components of tungsten, titanium, or cobalt is used. . The solid-state imaging device according to claim 1, wherein the second transfer gate electrode layer includes a reflection suppressing layer for preventing halation in a photolithography process. The solid-state imaging device according to claim 1, wherein the reflection suppression layer is silicon oxide or titanium nitride. The floating diffusion region is the first region located on the first insulating layer.
And detecting the incident light intensity from the fluctuation of the threshold value formed by the charge accumulated in the floating diffusion region, which is formed under the detection MOS transistor having the third gate electrode processed in a ring shape. The solid-state imaging device according to claim 1. 2. The solid-state imaging according to claim 1, further comprising an overflow drain on the side of the accumulation well for absorbing the overflowed charge when the charge generated by light incident on the accumulation well overflows. element. The surface of the semiconductor substrate and the first insulating layer or the second insulation between the surface of the semiconductor substrate and at least a part between the first insulating layer or the second insulating layer. The solid-state imaging device according to claim 1, further comprising a pinning layer having a conductivity type opposite to that of the holding region for electrically filling defects existing between the layers. 3. The solid-state imaging device according to claim 2, wherein a part of the storage well is arranged to overlap the first transfer gate electrode. The third gate electrode layer located on the first insulating layer is processed into a ring shape.
A pocket region for collecting charges, having a higher impurity concentration than the other regions of the floating diffusion region, is formed under the third gate electrode of the detection MOS transistor having the gate electrode; The solid-state imaging device according to claim 7, wherein

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