JP4929880B2 - Fine recess processing apparatus and fine recess processing method - Google Patents

Description

  The present invention relates to a fine concave portion processing apparatus and a fine concave portion processing method used when forming fine concave portions on an outer peripheral surface of a workpiece, for example, an outer peripheral surface of a crankpin, a journal, or a cam journal.

Conventionally, as a fine recess processing apparatus for forming a fine recess on the outer peripheral surface of a workpiece such as a crank pin, a journal, or a cam journal as described above, for example, a roller shaft having a fine convex portion on the outer peripheral surface is provided. In this processing apparatus, the workpiece is rotated while pressing the fine convex portion of the processing roller against the outer peripheral surface of the workpiece with a constant load. A fine recess is formed on the outer peripheral surface of the workpiece.
JP 2002-361351 A

  However, in the conventional fine recess processing apparatus described above, the processing roller pressed against the outer peripheral surface of the workpiece processes the fine recess on the outer peripheral surface of the workpiece while rotating by obtaining rotational force from the workpiece. Therefore, there is a possibility that slip occurs between the processing roller and the workpiece, and the interval between the minute convex portions of the processing roller and the interval between the minute concave portions formed on the outer peripheral surface of the workpiece are shifted. In this case, since the slip changes depending on the material and processing conditions of the processing roller and the workpiece, there is a problem that it is difficult to control the pattern of the minute recesses formed on the outer peripheral surface of the workpiece. It was.

  Further, in the case where a minute concave portion is partially formed on the outer peripheral surface of the workpiece, it is necessary to repeat the contact and separation of the processing roller with respect to the rotating workpiece, but the processing roller is separated from the workpiece. During this time, the peripheral speed of the workpiece and the peripheral speed of the processing roller do not match because the behavior of the processing roller cannot be controlled. As a result, each time the processing roller re-contacts the workpiece, In addition to the increase in the load and the shortening of the life of the processing roller, the position of the minute recess cannot be controlled, and these problems can be solved. It has been a conventional problem.

  The present invention has been made by paying attention to the above-described conventional problems, and can control the slip between the processing roller and the workpiece, and as a result, a fine recess on the outer peripheral surface of the workpiece. Of course, even if the fine recesses are partially formed on the outer peripheral surface of the workpiece, the pattern of the fine recesses formed on the outer peripheral surface of the workpiece An object of the present invention is to provide a fine recess processing apparatus and a fine recess processing method which can control the position and can also realize a long life of the processing roller.

  As a result of intensive studies to achieve the above object, the present inventors rotate the processing roller at a rotation speed synchronized with the rotation speed of the workpiece when forming the fine recesses on the outer peripheral surface of the workpiece. As a result, the inventors have found that the above object can be achieved, and have completed the present invention.

  A fine recess processing apparatus according to the present invention is rotatably supported by a main shaft that holds and rotates a workpiece, and a roller shaft that has a fine convex portion on an outer peripheral surface and is parallel to the main shaft. A processing roller, and by applying a radial load on the workpiece to the processing roller, the fine convex portion of the processing roller is pressed against the outer peripheral surface of the workpiece, and the workpiece And a rotational speed of at least one of the main shaft and the roller drive source is controlled to synchronize the rotational speed of the processing roller and the rotational speed of the workpiece. And a control unit that calculates and controls the rotational speed of at least one of the spindle and the roller drive source based on the measurement result of the processed recess measured by the processing shape measuring unit that measures the processing shape of the recess. Preparation To have.

  The fine recess processing method according to the present invention, when forming a fine recess on the outer peripheral surface of the workpiece using the above-described fine recess processing apparatus, operates the spindle to rotate the workpiece and rotate the processing roller. The control unit outputs a control signal to the main shaft and / or the roller drive source to synchronize the rotational speed of the processing roller and the rotational speed of the workpiece, and applies a radial load to the processing roller. The fine convex portions of the processing roller are pressed against the outer peripheral surface of the rotating workpiece.

  In the fine recessed portion machining apparatus and the fine recessed portion machining method of the present invention, the processing roller pressed against the outer peripheral surface of the workpiece is rotated in synchronization with the rotational speed of the workpiece. In this case, it is possible to control the slippage between the workpieces. Therefore, it goes without saying that the fine concave portions are formed entirely on the outer peripheral surface of the workpiece, and the fine concave portions are partially formed on the outer peripheral surface of the workpiece. Even in this case, the pattern and position of the minute recesses formed on the outer peripheral surface of the workpiece can be controlled, and in addition, the life of the processing roller can be extended.

  According to the present invention, since it is configured as described above, it is possible to control the slip between the processing roller and the workpiece, and as a result, when a fine recess is formed entirely on the outer peripheral surface of the workpiece. In addition, in the case of forming a minute recess partly on the outer peripheral surface of the workpiece, the pattern and position of the minute recess formed on the outer peripheral surface of the workpiece can be controlled, A very excellent effect that it is possible to extend the life of the processing roller is brought about.

  In the fine recess processing apparatus of the present invention, the driving force transmitting means includes a driving force transmitting portion and a driving force receiving portion that is provided on the processing roller and receives a driving force from a roller driving source that is transmitted via the driving force transmitting portion. In this case, there is no need to provide a drive transmission device or a rotational speed detection device near the roller shaft of the processing roller, thereby reducing the size and cost of the device. For example, it is possible to easily process a workpiece having a complicated shape such as an automobile crankshaft.

  At this time, the driving force transmitting unit and the driving force receiving unit of the driving force transmitting unit are configured as gears that mesh with each other, the driving force receiving unit of the driving force transmitting unit is a pulley, and the driving force transmitting unit is a pulley and a roller. In this case, the driving force from the roller driving source can be reliably transmitted to the processing roller.

  In the fine recess processing apparatus of the present invention, the driving force transmitting portion and the driving force receiving portion of the driving force transmitting means may be configured as a friction transmission member having a rough surface capable of friction transmission by contacting each other. In this case, since it is not necessary to form the teeth constituting the gears and the grooves constituting the pulleys on the machining roller, the cost of the machining roller can be reduced.

  Here, at least one of the friction transmission member as the driving force transmission unit of the driving force transmission unit and the friction transmission member as the driving force receiving unit is an elastic body, or the driving force transmission of the driving force transmission unit It is possible to adopt a configuration in which the roughness of the rough surface of at least one of the friction transmission member as the portion and the friction transmission member as the driving force receiving portion is Ra1 μm or more. The friction between the friction transmission member as the transmission portion and the friction transmission member as the driving force receiving portion is increased, so that a larger driving force can be more reliably transmitted to the processing roller.

  Furthermore, in the fine recessed portion machining apparatus of the present invention, the concave and convex portions (such as press working) that engage with each of the rough surfaces of the friction transmission member as the driving force transmission portion of the driving force transmission means and the friction transmission member as the driving force reception portion. In this case, the friction between the friction transmission member as the driving force transmission portion and the friction transmission member as the driving force reception portion is increased. A larger driving force can be transmitted to the roller more reliably. At this time, if a configuration in which the driving force receiving portion of the driving force transmitting means is a fine convex portion on the outer peripheral surface of the processing roller is adopted, the driving force Since it is not necessary to form unevenness for transmission on the processing roller, the cost of the processing roller can be reduced.

  Furthermore, in the fine recessed portion machining apparatus of the present invention, it is possible to change the relative position between the driving force transmitting portion of the driving force transmitting means and the processing roller. When this configuration is adopted, for example, Even if the shape of the workpiece is complex, the driving force can be transmitted without interfering with the workpiece by moving the driving force transmitting portion of the driving force transmitting means with respect to the processing roller. Become.

  Furthermore, in the fine recess processing apparatus of the present invention, the encoder that detects the rotational speed of the processing roller using the fine convex portion on the outer peripheral surface of the processing roller can be configured as a rotational speed detection means. When the configuration is adopted, the apparatus can be further reduced in size and cost.

  Furthermore, in the fine recess processing apparatus of the present invention, a processing shape measuring means for measuring the fine recess formed on the outer peripheral surface of the workpiece is provided, and a fine post-processing measured by the processing shape measuring means in the control unit. A configuration may be adopted in which the rotational speed of at least one of the spindle and the roller drive source is calculated and controlled based on the measurement result of the recess, and in this case, the fine recess is formed with an even more accurate pattern. Will get.

  Furthermore, in the fine recess processing apparatus of the present invention, a breakage detection means for detecting breakage of the fine protrusions on the outer peripheral surface of the processing roller is provided, and the damage state of the fine protrusions detected by the breakage detection means in the control unit. It is possible to calculate the area ratio of the minute recesses to be processed with respect to the entire area of the processing surface based on the processing conditions, and to control the processing conditions so as to keep the area ratio within a predetermined range based on the calculation result. With this configuration, the processing roller can be used for a long time without reducing the area ratio.

  At this time, the breakage detecting means detects the breakage of the fine protrusion from the vibration of the processing roller, or the breakage detection means detects the breakage of the fine protrusion from the image of the fine protrusion on the outer peripheral surface of the processing roller. Or the breakage detecting means can detect breakage of minute protrusions from the acoustic emission of the processing roller.

  If the breakage detecting means detects the breakage of the minute convex portion from the vibration of the processing roller, the measurement can be performed at a higher speed, and the breakage detecting means is finely determined from the image of the fine convex portion on the outer peripheral surface of the processing roller. If the damage of each convex part is detected, the damage state of each fine convex part of the processing roller can be measured in detail, and the damage detection means detects the damage of the fine convex part from the acoustic emission of the processing roller. If it does, the detection sensitivity of the damage of a fine convex part will increase, for example, since it can measure via the lubricating fluid etc. which are used for a process, the freedom degree of an apparatus layout will expand.

  On the other hand, in the fine recess processing method of the present invention, when forming the fine recess on the outer peripheral surface of the workpiece using the micro recess processing apparatus, the spindle is actuated to rotationally drive the workpiece, and the driving force The processing roller is rotated by the driving force from the roller driving source transmitted through the transmitting unit, and a control signal is sent from the control unit to at least one of the main shaft and the roller driving source based on the signal from the rotation speed detecting unit. The output is synchronized with the rotation speed of the processing roller and the rotation speed of the workpiece, and then the workpiece is rotated by applying a radial load to the processing roller from the load generating means to rotate the fine convex portion of the processing roller. It is desirable to employ a configuration that presses against the outer peripheral surface of an object.

  In other words, if this configuration is adopted, the processing roller is pressed against the outer peripheral surface of the workpiece after processing the peripheral speed of the processing roller and the peripheral speed of the workpiece, so that the processing roller is pressed during pressing. Therefore, it is possible to realize a longer life of the processing roller.

  In the fine recess processing method of the present invention, when forming the fine recess on the outer peripheral surface of the workpiece using the micro recess processing apparatus, the spindle is actuated to rotationally drive the workpiece, and the driving force The processing roller is rotated by the driving force from the roller driving source transmitted through the transmitting unit, and a control signal is sent from the control unit to at least one of the main shaft and the roller driving source based on the signal from the rotation speed detecting unit. The output is synchronized with the rotation speed of the processing roller and the rotation speed of the workpiece, and then the workpiece is rotated by applying a radial load to the processing roller from the load generating means to rotate the fine convex portion of the processing roller. It is possible to adopt a configuration that controls the processing by pressing the outer peripheral surface of the object and detecting the breakage of the minute convex portion of the processing roller from the rotation signal of the encoder that is the rotation speed detecting means in the control unit. In this case, it is possible to omit the step of breakage inspection of the working rollers.

  Further, in the fine recess processing method of the present invention, when the fine recess is formed on the outer peripheral surface of the workpiece using the micro recess processing apparatus, the spindle is actuated to rotate the workpiece and drive force. A work piece that rotates a processing roller by a driving force from a roller driving source transmitted via a transmission means, and applies a radial load to the processing roller from a load generating means to rotate a minute convex portion of the processing roller. The control unit calculates the rotational speed of at least one of the spindle and the roller drive source based on the measurement result of the minute recesses after processing measured by the processing shape measuring means. In this case, the fine recesses can be formed with a pattern with higher accuracy.

  Furthermore, in the fine recess processing method of the present invention, when forming the fine recess on the outer peripheral surface of the workpiece using the micro recess processing apparatus, the spindle is actuated to rotate and drive the workpiece. The workpiece is rotated by rotating the machining roller with the driving force transmitted from the roller drive source transmitted through the force transmission means, and applying the radial load to the machining roller from the load generating means to rotate the fine convex portion of the machining roller. Processing is performed by pressing against the outer peripheral surface of the object, and the control unit calculates the area ratio of the fine concave portion with respect to the entire surface of the processed surface from the measurement result of the shape of the fine concave portion after processing, and keeps this area ratio within a predetermined range In this case, the area ratio is calculated from the measurement results of the minute recesses after the process, and the processing conditions are controlled, so that the area ratio can be made more accurate. And thus.

  Furthermore, in the fine recess processing method of the present invention, when forming the fine recess on the outer peripheral surface of the workpiece using the micro recess processing apparatus, the spindle is actuated to rotate and drive the workpiece. The workpiece is rotated by rotating the machining roller with the driving force transmitted from the roller drive source transmitted through the force transmission means, and applying the radial load to the machining roller from the load generating means to rotate the fine convex portion of the machining roller. Processing is performed by pressing against the outer peripheral surface of the object, and the control unit calculates the area ratio of the fine recesses with respect to the entire area of the processed surface based on the damage state of the fine protrusions detected by the breakage detection means, and calculates the area ratio. The processing conditions can be controlled so as to be within a predetermined range, and even if this configuration is adopted, the area ratio can be made more accurate.

  Here, control of the rotational speed of at least one of the main shaft and the roller drive source is used as control of processing conditions in the control unit, or control of feed speed of the processing roller in the axial direction with respect to the workpiece is performed in the control unit. If the control of the processing conditions is the control of the rotational speed of at least one of the spindle and the roller drive source, the area ratio can be adjusted more finely. On the other hand, when the control of the processing conditions is control of the feed speed of the processing roller in the axial direction with respect to the workpiece, the area ratio can be adjusted to a greater extent.

  Furthermore, in the fine recess processing method of the present invention, the control unit may adopt a configuration in which the processing conditions are corrected based on the area ratio of the fine recess obtained by calculation after processing. Since the machining conditions of the workpiece are corrected, variation in the area ratio between the workpieces can be reduced.

  And in the sliding member which has the fine recessed part processed using the above-mentioned fine recessed part processing apparatus and fine recessed part processing method of the present invention on the outer peripheral surface as the sliding surface, the fine recessed part formed on the sliding surface Since the shape accuracy is good, the fine concave portion becomes a lubricating oil pool, and the flow of the lubricating oil can be efficiently controlled. As a result, the friction can be reduced.

  That is, the above-mentioned sliding member is a crankshaft having a journal and pin having fine recesses on the outer peripheral surface, a camshaft having a journal and cam lobe having fine recesses on the outer peripheral surface, and a journal having fine recesses on the outer peripheral surface. In the case of an engine component such as a balancer shaft equipped with a fine concave portion formed on the outer peripheral surface as a sliding surface, it becomes a lubricating oil pool, and the flow of the lubricating oil can be controlled efficiently. As a result, the sliding resistance becomes low, which can contribute to improvement in fuel consumption.

  EXAMPLES Hereinafter, although an Example demonstrates this invention still in detail, this invention is not limited to a following example.

  As shown in FIG. 1, the fine recess processing apparatus 1 includes a main shaft 3 that rotationally drives a workpiece (sliding member) W held via a chuck 2, and a roller shaft 4 that is parallel to the main shaft 3. A processing roller 5 that is rotatably supported, and a minute protrusion of the processing roller 5 on the outer peripheral surface Wa of the workpiece W that rotates by applying a load in the radial direction (Z-axis direction) to the processing roller 5. A load generating mechanism 20 that presses the portion, an actuator (not shown) that moves the processing roller 5 in a direction (X-axis direction) orthogonal to the roller pressing direction (Z-axis direction), and a load measuring unit that measures the load by the load generating mechanism 20 The processing roller 5 has a fine convex part with an inclination with respect to the roller shaft 4 on the outer peripheral surface thereof.

  The load generation mechanism 20 supports a processing roller 5 via a roller shaft 4 and a housing 21 that reciprocates in the X-axis direction and the Z-axis direction by operation of an actuator (not shown). The arm 22 is provided, and a coil spring 23 is disposed in the housing 21 and serves as a load generating means for pressing the work roller 5 against the workpiece W via the arm 22. The load cell 6 described above is arranged between the spring 23.

  In addition, as shown in FIG. 2, the fine recess processing apparatus 1 is provided integrally with the motor (roller drive source) 7 that rotates the processing roller 5 and the processing roller 5 to process the driving force from the motor 7. A pulley (driving force receiving portion) 8 constituting a driving force transmitting means for transmitting to the roller 5, and a belt constituting a driving force transmitting means together with the pulley 8 and spanned between the pulley 8 and the output shaft 7 a of the motor 7. (A driving force transmission unit) 9, a rotational speed detector 10 provided as a rotational speed detection means that is connected to the roller shaft 4 and detects the rotational speed of the processing roller 5, and from the rotational speed detector 10 Control for outputting a control signal to at least one of the main shaft 3 and the motor 7 (in this embodiment, the motor 7) in order to synchronize the rotational speed of the processing roller 5 and the rotational speed of the workpiece W based on the signal. It is equipped with a 11.

  Therefore, a description will be given of a procedure for forming a fine recess on the outer peripheral surface Wa of the workpiece W using the fine recess processing apparatus 1 described above, that is, a fine recess processing method according to an embodiment of the present invention.

  First, as shown in FIG. 3, after inputting processing conditions such as a pressing load in step 101, the processing roller 5 is moved to the processing start position in step 102, and then in step 103, the processing roller is moved. 5 is started, and in step 104, the processing roller 5 is lowered until the signal from the load cell 6 reaches a predetermined load.

  Next, in step 105, the workpiece W is rotated by the main shaft 3 and the processing roller 5 is rotated by the driving force from the motor 7. At the same time, the actuator is operated to feed the workpiece W in the X-axis direction. Start.

  At this time, in step 106, the peripheral speed Vw of the workpiece W and the peripheral speed Vt of the processing roller 5 are input to the control unit 11, and in step 107 and step 108, the peripheral speed Vw of the workpiece W and the processing roller 5 In step 109 and step 110, calculation control is performed so that the peripheral speed Vw of the workpiece W and the peripheral speed Vt of the processing roller 5 are equal to each other.

  Then, in step 111, the above-described control is performed over the entire outer peripheral surface Wa of the workpiece W. In step 112, the processing is performed when a fine recess is formed in the entire outer peripheral surface Wa of the workpiece W. The roller 5 is raised and the processing is finished in step 113.

  As described above, in the fine recess processing method using the fine recess processing apparatus 1 in this embodiment, the processing roller 5 is rotated at the peripheral speed Vt synchronized with the peripheral speed Vw of the workpiece W. The slip between the workpiece W and the processing roller 5 is eliminated, so that it is possible to control the pattern and position of the minute recesses formed on the outer peripheral surface Wa of the workpiece W, and to achieve high accuracy. A pattern of fine recesses can be processed.

  In this embodiment, the driving force transmitting means for transmitting the driving force from the motor 7 to the processing roller 5 includes a pulley (driving force receiving portion) 8 provided integrally with the processing roller 5, and outputs of the pulley 8 and the motor 7. Although the case where the belt (driving force transmitting portion) 9 spanned between the shaft 7a and the shaft 7a is shown, the present invention is not limited to this. For example, as shown in FIG. Is composed of a bevel gear (driving force receiving portion) 8A provided integrally with the processing roller 5 and a pinion (driving force transmitting portion) 9A provided on the output shaft 7a of the motor 7 and meshing with the bevel gear 8A. In this case as well, the driving force from the motor 7 can be reliably transmitted to the processing roller 5 in the same manner as described above.

  Further, as shown in FIG. 5, the driving force transmitting means includes a friction transmitting member (driving force receiving portion) 8 </ b> B having an umbrella-shaped rough surface 8 a provided integrally with the processing roller 5, and an output shaft 7 a of the motor 7. And a pinion-like friction transmission member (driving force transmission portion) 9B having a rough surface 8a of the friction transmission member 8B and a rough surface 9a capable of friction transmission. In this case, the processing roller Since it is not necessary to form a tooth part and a groove part in 5, the cost reduction of the processing roller 5 will be achieved.

  At this time, for example, the pinion-like friction transmission member 9B that is the driving force transmission portion is made an elastic body, or the rough surface 8a of the umbrella-like friction transmission member 8B that is the driving force reception portion is Ra1 μm or more. Then, the friction between the friction transmission members 8B and 9B increases, and a larger driving force can be more reliably transmitted to the processing roller 5.

  In addition, as shown in FIG. 6, the concave and convex portions 8b and 9b that engage with the rough surfaces 8a and 9a of the friction transmission members 8B and 9B are subjected to plastic working such as press working or sintering, molding, and casting in a net shape. If formed by this, a larger frictional force can be generated between the frictional transmission members 8B and 9B, and a larger driving force can be more reliably transmitted to the processing roller 5.

  Further, as shown in FIG. 7, a fine convex portion 8C on the outer peripheral surface of the processing roller 5 is used as a driving force receiving portion of the driving force transmitting means, and the elastic portion provided on the output shaft 7a of the motor 7 on the fine convex portion 8C. The friction transmission wheel (driving force transmitting portion) 9C made of a body may be brought into contact. In this case, the processing roller 5 has only to the extent that it is not necessary to form the unevenness for driving force transmission on the processing roller 5. Cost reduction will be achieved.

  Thus, when the driving force from the motor 7 is transmitted to the processing roller 5 by bringing the friction transmission wheel 9C into contact with the fine convex portion 8C of the processing roller 5, as shown in FIG. It is desirable to be able to change the relative position of the friction transmission wheel 9C, which is the driving force transmission portion of the means, and the processing roller 5, and in this way, the relative position of the friction transmission wheel 9C and the processing roller 5 can be changed. Thus, even if the workpiece W has a complicated shape, the driving force can be transmitted without interfering with the workpiece W.

  Furthermore, in this embodiment, the case where the rotational speed detector 10 as the rotational speed detecting means is provided connected to the roller shaft 4 is shown. However, as another configuration, as shown in FIG. As the rotational speed detecting means, the transmitting portion 10a and the receiving portion 10b of the encoder 10A are opposed to each other with the outer peripheral edge portion of the processing roller 5 interposed therebetween, and the signal S emitted from the transmitting portion 10a passes between the fine convex portions 8C. The rotational speed of the processing roller 5 can be detected by using the arrival at the receiving unit 10b, and the transmitting unit 10a and the receiving unit 10b of the encoder 10A are connected to the processing roller 5 as shown in FIG. The rotational speed of the processing roller 5 is detected by using the fact that the signal S emitted from the transmitter 10a is reflected by the fine convex portion 8C and reaches the receiver 10b. It can be formed, in either case, and achieves compact simplification and cost reduction of the apparatus can be achieved.

  At this time, as shown in FIG. 11, two sets of encoders 10A are used as rotational speed detection means, and the transmitter 10a and the receiver 10b of these encoders 10A are opposed to each other across the outer peripheral edge of the processing roller 5, A processing roller utilizing the fact that signals S1 and S2 emitted from the transmitting portions 10a of both encoders 10A pass through between the tip and base ends of the fine convex portion 8C and reach each receiving portion 10b. 5 may be detected. In this case, the detection accuracy of the rotational speed is improved.

  As described above, when the encoder 10A is used as the rotational speed detecting means and the rotational speed of the processing roller 5 is detected using the fine convex portion 8C of the processing roller 5, the fine convex portion of the processing roller 5 is detected. When damage occurs in 8C, it is possible to recognize the state of loss of the fine convex portion 8C by the signal voltage waveform from the encoder 10A. For example, as shown in FIG. 12, when a signal voltage waveform having a pulse interval δTn2 that is four times the normal pulse interval δTn1 appears, it can be recognized that four defects have occurred in the fine convex portion 8C. It will be.

  Next, another procedure for forming fine recesses on the outer peripheral surface Wa of the workpiece W using the above-described fine recess processing apparatus 1, that is, a micro recess processing method according to another embodiment of the present invention will be described.

  First, as shown in FIG. 13, in step 201, after inputting processing conditions such as a pressing load, in step 202, the processing roller 5 is moved to the processing start position, and in step 203, the spindle 3 As a result, the workpiece W is rotated, and at the same time, the processing roller 5 is rotated by the driving force from the motor 7.

  At this time, in step 204, the peripheral speed Vw of the workpiece W and the peripheral speed Vt of the processing roller 5 are input to the control unit 11, and in step 205 and step 206, the peripheral speed Vw of the workpiece W and the processing roller 5 In step 207 and step 208, calculation control is performed so that the peripheral speed Vw of the workpiece W and the peripheral speed Vt of the processing roller 5 become equal. When processing a plurality of workpieces W continuously, the workpiece W and the processing roller 5 may be rotated continuously.

  In step 209, when it is determined that the rotational speed Vw of the workpiece W and the rotational speed Vt of the processing roller 5 are equal, in step 210, the lowering of the processing roller 5 is started. The processing roller 5 is lowered until the signal from the load cell 6 reaches a predetermined load.

  Subsequently, in step 212, the actuator is operated in the above-described state to start feeding the workpiece W in the X-axis direction, and in step 213, the machining by the control as described above is performed on the outer peripheral surface Wa of the workpiece W. The process is performed over the entire surface, and when the fine recess is formed on the entire outer peripheral surface Wa of the workpiece W in step 214, the processing roller 5 is raised, and in step 215, the processing ends.

  As described above, also in the fine recess processing method in this embodiment, since the processing roller 5 is rotated at the peripheral speed Vt synchronized with the peripheral speed Vw of the workpiece W, the workpiece W and the processing roller Therefore, it is possible to control the pattern and position of the minute recesses formed on the outer peripheral surface Wa of the workpiece W, and process the highly precise pattern of the minute recesses. be able to.

  In the fine recess processing method in this embodiment, the peripheral speed Vt of the processing roller 5 and the peripheral speed Vw of the workpiece W are synchronized, and then the processing roller 5 is pressed against the outer peripheral surface Wa of the workpiece W. Since the processing is performed, the stress acting on the processing roller at the time of pressing can be reduced, so that the life of the processing roller 5 can be further extended.

  Furthermore, since the processing roller 5 can be pressed against the workpiece W in a rotated state, that is, the rotation of the workpiece W and the pressing of the processing roller 5 against the workpiece W can be performed simultaneously. Thus, the processing time can be shortened.

  In addition, when the fine concave portion processing method in this embodiment is applied to the case where the fine concave portion is partially formed on the outer peripheral surface Wa of the workpiece W, as shown in FIG. After moving the workpiece W away from the workpiece, a series of operations (B1 to B3) for bringing the processing roller 5 into contact with the workpiece W again hinders the rotation operation (B0) of the workpiece W. As a result, the processing time can be shortened, and the load applied to the processing roller 5 at the time of re-contact can be greatly reduced, so that a longer life can be realized.

  FIG. 15 shows a fine recess processing apparatus according to another embodiment of the present invention. As shown in FIG. 15, the fine recess processing apparatus 31 of this embodiment is different from the fine recess processing apparatus 1 of the previous embodiment in that the processing roller 5 forms the outer peripheral surface Wa of the workpiece W. A monitor (working shape measuring means) 15 for measuring the minute recess T immediately after the main shaft 3 and the motor 7 is provided based on the measurement result of the processed minute recess T measured by the monitor 15 in the control unit 11. The rotational speed (including the rotational direction and the rotational amount) of at least one of the above is calculated and controlled, and the other configuration is the same as that of the fine recess processing apparatus 1 in the previous embodiment.

  Therefore, a description will be given of a procedure for forming the fine recess T on the outer peripheral surface Wa of the workpiece W using the fine recess processing apparatus 31 described above, that is, a micro recess processing method according to still another embodiment of the present invention.

  First, as shown in FIG. 16, after inputting processing conditions such as a pressing load and a design fine recess interval L in Step 301, after moving the processing roller 5 to a processing start position in Step 302, In step 303, the lowering of the processing roller 5 is started, and in step 304, the processing roller 5 is lowered until the signal from the load cell 6 reaches a predetermined load.

  Next, in step 305, the workpiece W is rotated by the main shaft 3 and the processing roller 5 is rotated by the driving force from the motor 7. At the same time, the actuator is operated to feed the workpiece W in the X-axis direction. Start.

  At this time, in step 306, the interval δ of the minute recess T immediately after processing measured by the monitor 15 during the processing is input to the control unit 11, and in step 307 and step 308, the minute distance measured as the design minute recess interval L is measured. Subsequent to the comparison with the interval δ of the recess T, in step 309 and step 310, calculation control is performed so that the designed micro-recess interval L and the measured interval δ of the micro-recess T are equal.

  In step 311, the above-described control is performed over the entire outer peripheral surface Wa of the workpiece W. In step 312, when the fine recess T is formed in the entire outer peripheral surface Wa of the workpiece W. The processing roller 5 is raised and the processing is finished in step 313.

  As described above, in the fine concave portion processing method using the fine concave portion processing apparatus 31 in this embodiment, the interval δ of the fine concave portions T immediately after processing measured by the monitor 15 during processing coincides with the designed fine concave portion interval L. Thus, since the rotation direction and the rotation amount of the processing roller 5 are controlled as described above, it is possible to form fine concave portions having a uniform pattern with higher accuracy.

  FIG. 17 shows a fine recess processing apparatus according to still another embodiment of the present invention. As shown in FIG. 17, the micro concave portion processing apparatus 51 of this embodiment is different from the micro concave portion processing apparatus 1 of the previous embodiment in that the damage of the fine convex portion on the outer peripheral surface of the processing roller 5 is detected. A roller breakage detection unit (breakage detection means) 16 is provided, and the area ratio of the fine recess T to be processed with respect to the entire processing surface area based on the breakage state of the fine protrusion detected by the roller breakage detection unit 16 in the control unit 11. And the processing conditions are controlled to keep the area ratio within a predetermined range based on the calculation result, and other configurations are the same as those of the fine recess processing apparatus 1 in the previous embodiment. .

  In this case, as the roller breakage detection unit 16, a non-contact type sensor shown in FIG. 17 can be used, a displacement sensor for detecting the displacement of the processing roller 5 shown in FIG. 18, or the processing roller 5 shown in FIG. An acceleration sensor for detecting the vibration of the processing roller 5 or an AE sensor for detecting the acoustic emission of the processing roller 5 through the lubricating oil 18 supplied from the lubricating oil supply unit 17 shown in FIG.

  If a displacement sensor or an acceleration sensor is used as the roller breakage detection unit 16, higher speed measurement can be performed. If an AE sensor is used as the roller breakage detection unit 16, the degree of freedom in apparatus layout is increased. When the monitor 15 which is the above-described machining shape measuring means is used as the breakage detection unit 16, it is possible to measure in detail the breakage state of each minute convex portion of the machining roller 5.

  A procedure for forming the fine recesses T on the outer peripheral surface Wa of the workpiece W using the above-described fine recess processing apparatus 51, that is, a fine recess processing method according to still another embodiment of the present invention will be described.

  First, in addition to the processing conditions similar to the above-described embodiment, the lower limit value SL of the area ratio of the fine concave portion T to be processed with respect to the entire surface of the processing surface, and the allowable fine convex portions on the outer peripheral surface of the processing roller 5 After the limit number of breaks BL is input to the control unit 11, the processing of the fine recess T is started in the same manner as in the above-described embodiment.

During the processing, the roller breakage detection unit 16 detects the number of breakage of the fine protrusions on the outer peripheral surface of the processing roller 5, and information on the number of breakage of the fine protrusions detected by the roller breakage detection unit 16 The calculation portion 11a of the control unit 11 is input, and in this calculation portion 11a, the total number of fine convex portions of the processing roller 5 is A, the number of broken fine convex portions is B, and the fine convex portions of the processing roller 5 are When the area ratio when not damaged is X, the following formula P = X × (A−B) / A
Based on the above, the area ratio of the minute recesses T processed by the processing roller 5 at this time is calculated.

  When the area ratio calculated in the calculation part 11a of the control unit 11 is smaller than the lower limit value SL of the area ratio input first, the calculation part 11a of the control part 11 to the output control part 11b. The output control portion 11b controls the difference in speed between the processing roller 5 and the workpiece W and the control of the feed speed of the processing roller 5 in the axial direction of the workpiece W. Either control is performed.

  In the case of performing the former control among these controls, as shown in FIG. 21, the fine speed to be processed is set by making the peripheral speed Vt of the processing roller 5 exceed the peripheral speed Vw of the workpiece W. When the distance between the concave portions T is changed to change the area of the fine concave portion T with respect to the entire area of the processing surface, and when the latter control is performed, as shown in FIG. By reducing the feed amount Ft1 of the processing roller 5 that can process the processing position (shown by a broken line) when the portion is not damaged to be Ft2, the interval between the minute recesses T to be processed is changed. Thus, the area of the fine recess T with respect to the entire area of the work surface is changed.

  In any case, the control by the output control portion 11b of the control unit 11 is such that the number of breakage of the fine projections on the outer peripheral surface of the processing roller 5 is the limit breakage number BL of the fine projections of the processing roller 5 that is input first. If this control is performed until the end of processing, even if the fine convex portion on the outer peripheral surface of the processing roller 5 is damaged during processing, the fine concave portion to be processed with respect to the entire surface of the processing surface The area ratio of T can be made uniform.

  Next, a procedure for forming the fine recesses on the outer peripheral surface Wa of the workpiece W using the fine recess processing apparatus 31 (the micro recess processing apparatus 31 having the monitor 15), that is, still another embodiment of the present invention. A method for processing a fine concave portion by the method will be described.

  First, similarly to the above-described embodiment, in addition to the processing conditions, the lower limit SL of the area ratio of the fine recesses T to be processed with respect to the entire area of the processing surface, and the fine protrusions on the outer peripheral surface of the allowable processing roller 5 After the limit failure number BL is input to the control unit 11, the processing of the fine recess T is started in the same manner as in the above-described embodiment.

  During the processing, as shown in FIG. 23, a plurality of fine recesses T immediately after being formed are continuously measured by the monitor 15, and defect information of the fine recesses T measured by the monitor 15, that is, a processing roller The information on the defective fine concave portion T1 shown in FIG. 23A and the fine concave portion T2 shown in FIG. 23B that are caused by the damage of the fine convex portion 5 is input to the calculation portion 11a of the control portion 11 In the calculation portion 11a, the area of the processed surface of the fine recess T is calculated based on the measurement result, and then the area ratio of the processed fine recess T is calculated from the calculation result. Calculations are made. At this time, the number of fine recesses T to be measured is not particularly defined, but is preferably larger than the number of fine protrusions formed on the outer peripheral surface of the processing roller 5.

  And when the area ratio calculated | required by the calculation part 11a of the control part 11 is smaller than the lower limit SL of the area ratio input initially, the calculation part 11a of the control part 11 to the output control part 11b The output control portion 11b controls the difference in speed between the processing roller 5 and the workpiece W and the control of the feed speed of the processing roller 5 in the axial direction of the workpiece W. Either control is performed.

  In any case, the control by the output control portion 11b of the control unit 11 is such that the number of breakage of the fine projections on the outer peripheral surface of the processing roller 5 is the limit breakage number BL of the fine projections of the processing roller 5 that is input first. This control is performed until machining is completed.

  In this embodiment, it is possible to calculate the area ratio including the area of the minute concave portion T1 partially formed due to the breakage of the fine convex portion of the processing roller 5, and the area ratio is within a predetermined range. Since the processing conditions are controlled so as to fit in, the area ratio of the fine concave portion T to be machined with respect to the entire surface of the work surface is more accurate even if the fine convex portion on the outer peripheral surface of the processing roller 5 is damaged during the processing. Can be made uniform.

  In this embodiment, the surface area of the fine recesses T processed during processing is measured to control the area ratio of the fine recesses T to be processed. The area ratio may be calculated by measurement, and the processing conditions of the next workpiece W may be corrected based on the measured area ratio. By controlling in this way, fine convex portions on the outer peripheral surface of the processing roller 5 Even if damage occurs, the area ratio of the fine recesses T of the plurality of workpieces W can be made uniform.

  The sliding member having the fine concave portion processed by using the fine concave portion processing apparatus and the fine concave portion processing method of the embodiment described above on the outer peripheral surface as the sliding surface includes a journal and a pin having the fine concave portion on the outer peripheral surface. In the case of engine parts such as crankshafts, camshafts with fine recesses on the outer peripheral surface and camshafts with cam lobes, and journals with fine recesses on the outer peripheral surface, the outer periphery as a sliding surface The minute recesses formed on the surface can become a lubricating oil pool and efficiently control the flow of the lubricating oil. As a result, the sliding resistance is low, which can contribute to the improvement of fuel consumption. Become.

It is front explanatory drawing which shows one Example of the fine recessed part processing apparatus of this invention. Example 1 FIG. 2 is an enlarged front explanatory view (a) and an enlarged side explanatory view (b) of a processing roller portion of the fine recess processing apparatus of FIG. 1. Example 1 It is a flowchart of the fine recessed part processing method by one Example performed using the fine recessed part processing apparatus of FIG. Example 1 FIG. 7 is an enlarged front explanatory view (a) and an enlarged side explanatory view (b) of a processing roller portion showing another configuration example of the driving force transmitting means in the fine recess processing apparatus of FIG. 1. FIG. 7 is an enlarged front explanatory view (a) and an enlarged side explanatory view (b) of a processing roller portion showing still another configuration example of the driving force transmitting means in the fine recess processing apparatus of FIG. 1. FIG. 7 is an enlarged front explanatory view (a) and an enlarged side explanatory view (b) of a processing roller portion showing still another configuration example of the driving force transmitting means in the fine recess processing apparatus of FIG. 1. FIG. 7 is an enlarged front explanatory view (a) and an enlarged side explanatory view (b) of a processing roller portion showing still another configuration example of the driving force transmitting means in the fine recess processing apparatus of FIG. 1. FIG. 8 is an enlarged side view of the processing roller portion showing a position change pattern of the driving force transmission means of FIG. 7 with respect to the processing roller of the friction transmission wheel. It is the expansion front explanatory view (a) of the processing roller part which shows the other structural example of the rotational speed detection means in the micro recessed part processing apparatus of FIG. 1, and the partial expansion perspective explanatory view (b) of the processing roller. It is the expansion front explanatory view (a) of the processing roller part which shows the further another structural example of the rotational speed detection means in the micro recessed part processing apparatus of FIG. 1, and the partial expansion perspective explanatory view (b) of the processing roller. FIG. 1 is an enlarged front explanatory view (a) of a processing roller portion showing still another configuration example of the rotational speed detecting means in the fine recess processing apparatus of FIG. 1, a partial enlarged perspective explanatory view (b) of the processing roller, and a partial enlarged side surface of the processing roller. It is explanatory drawing (c). It is a graph which shows the signal voltage waveform output from the rotational speed detection means which detects the rotational speed of a process roller. It is a flowchart of the fine recessed part processing method by the other Example performed using the fine recessed part processing apparatus of FIG. (Example 2) It is a process block diagram at the time of applying the fine recessed part processing method shown in FIG. 13 to partially forming a fine recessed part in the outer peripheral surface of a workpiece. It is the expansion front explanatory drawing (a) and enlarged side explanatory drawing (b) of the processing roller part which show the other Example of the fine recessed part processing apparatus of this invention. (Example 3) It is side explanatory drawing which shows the condition which performs a fine recessed part process using a processing roller. It is a flowchart of the fine recessed part processing method performed using the fine recessed part processing apparatus of FIG. (Example 3) It is front explanatory drawing which shows other Example of the fine recessed part processing apparatus of this invention. Example 4 FIG. 18 is an enlarged front explanatory view of a processing roller portion when a displacement sensor as another breakage detection means is used in the fine recess processing apparatus of FIG. 17. Example 4 FIG. 18 is an enlarged front explanatory view of a processing roller portion when an acceleration sensor as still another breakage detection unit is used in the fine recess processing apparatus of FIG. 17. Example 4 It is front explanatory drawing at the time of using the AE sensor as another damage detection means for the fine recessed part processing apparatus of FIG. Example 4 FIG. 18 is an enlarged explanatory view of a contact portion between a processing roller and a workpiece, showing an example of area ratio control when performing fine recess processing using the micro recess processing apparatus of FIG. 17. Example 4 FIG. 18 is a perspective explanatory view of a workpiece showing another example of area ratio control when fine concave processing is performed using the fine concave processing apparatus of FIG. 17. Example 4 FIG. 16 is an enlarged front explanatory view (a) of a processing roller portion and an enlarged explanatory view (b) of a work surface of a workpiece when performing fine recess processing by applying area ratio control to the fine recess processing apparatus of FIG. 15. . (Example 5)

Explanation of symbols

1,31,51 Fine recess processing apparatus 3 Main shaft 4 Roller shaft 5 Processing roller 6 Load cell (load measuring means)
7 Motor (Roller drive source)
7a Motor output shaft 8 Pulley (driving force receiving part; driving force transmitting means)
8a Rough surface of friction transmission member 8b Unevenness 8A Bevel gear (driving force receiving portion; driving force transmitting means)
8B Friction transmitting member (driving force receiving portion; driving force transmitting means)
8C Fine convex part (driving force receiving part; driving force transmitting means)
9 Belt (driving force transmission part)
9a Rough surface of friction transmission member 9b Unevenness 9A Pinion (driving force transmission part; driving force transmission means)
9B Friction transmission member (driving force transmission part)
9C Friction transmission wheel (drive force transmission part; drive force transmission means)
10 Rotational speed detector (Rotational speed detection means)
10A encoder (rotation speed detection means)
11 Control Unit 15 Monitor (Measuring Shape Measuring Means)
16 Roller breakage detector (breakage detection means)
23 Coil spring (load generating means)
T Fine concave part W Workpiece Wa Wafer outer peripheral surface

Claims (32)

This processing roller has a main shaft for holding and rotating the workpiece, and a processing roller rotatably supported by a roller shaft having a fine convex portion on the outer peripheral surface and parallel to the main shaft. By applying a load in the radial direction of the workpiece to the workpiece, the fine convex portion of the processing roller is pressed against the outer peripheral surface of the workpiece to form a fine concave portion on the outer peripheral surface of the workpiece. In the fine recess processing equipment ,
After machining measured by machining shape measuring means for controlling the rotation speed of the spindle and / or roller drive source to synchronize the rotation speed of the machining roller and the workpiece, and measuring the machining shape of the recess. A fine recess processing apparatus comprising a control unit that calculates and controls the rotational speed of the main shaft and / or the roller drive source based on the measurement result of the recess . This processing roller has a main shaft for holding and rotating the workpiece, and a processing roller rotatably supported by a roller shaft having a fine convex portion on the outer peripheral surface and parallel to the main shaft. By applying a load in the radial direction of the workpiece to the workpiece, the fine convex portion of the processing roller is pressed against the outer peripheral surface of the workpiece to form a fine concave portion on the outer peripheral surface of the workpiece. In the fine recess processing equipment,
In order to synchronize the rotational speed of the processing roller and the rotational speed of the workpiece, the rotational speed of the main shaft and / or roller drive source is controlled,
Based on the damage state of the protrusions detected by the breakage detecting means for detecting the breakage of the minute protrusions on the outer peripheral surface of the processing roller, the area ratio of the fine recesses to be processed with respect to the entire area of the processed surface is within a predetermined range. A fine recess processing apparatus comprising a control unit for controlling processing conditions . 3. The fine recess processing apparatus according to claim 1, further comprising: a roller driving source that rotates the processing roller; and a driving force transmission unit that transmits a driving force from the roller driving source to the processing roller . 4. The driving force transmitting means includes a driving force transmitting portion and a driving force receiving portion that is provided on the processing roller and receives a driving force from a roller driving source that is transmitted via the driving force transmitting portion. The fine recessed part processing apparatus of description. The fine recess processing apparatus according to claim 3 or 4 , wherein the driving force transmitting portion and the driving force receiving portion of the driving force transmitting means are gears that mesh with each other . The micro recess processing according to any one of claims 3 to 5, wherein the driving force receiving portion of the driving force transmitting means is a pulley, and the driving force transmitting portion is a belt spanned between the pulley and the roller driving source. apparatus. The fine recess according to any one of claims 3 to 5, wherein each of the driving force transmitting portion and the driving force receiving portion of the driving force transmitting means is a friction transmitting member having a rough surface capable of contacting and transmitting friction. Processing equipment. The fine recess processing apparatus according to claim 7, wherein the friction transmission member as the driving force transmission portion of the driving force transmission means, the friction transmission member as the driving force receiving portion, or both are elastic bodies . 9. The micro recess processing according to claim 7, wherein the surface roughness of the rough surface of the friction transmission member as the driving force transmission portion of the driving force transmission means, the friction transmission member as the driving force receiving portion, or both is Ra 1 μm or more. apparatus. The fine recess processing apparatus according to claim 9, wherein irregularities engaging each other are provided on each rough surface of a friction transmission member as a driving force transmission portion of the driving force transmission means and a friction transmission member as a driving force receiving portion. The fine recess processing apparatus according to claim 8, wherein the driving force receiving portion of the driving force transmitting means is a fine convex portion on the outer peripheral surface of the processing roller . The fine recess processing apparatus according to any one of claims 6 to 10, wherein a relative position between the driving force transmitting portion of the driving force transmitting means and the processing roller can be changed . The rotational speed detection means which detects the rotational speed of a processing roller by the encoder which detects the rotational speed of a processing roller using the fine convex part of the outer peripheral surface of a processing roller is provided. The fine recessed part processing apparatus of description .   The fine recess processing apparatus according to any one of claims 2 to 13, wherein the breakage detecting means detects a breakage of a fine convex portion from vibration of the processing roller.   The fine recess processing apparatus according to any one of claims 2 to 13, wherein the breakage detecting means detects a breakage of a fine protrusion from an image of the fine protrusion on the outer peripheral surface of the processing roller.   The fine recess processing apparatus according to any one of claims 2 to 13, wherein the breakage detecting means detects a breakage of a fine protrusion from an acoustic emission of a processing roller. In forming a fine concave portion on the outer peripheral surface of the workpiece using the fine concave portion processing apparatus according to any one of claims 3 to 16 ,
The spindle is actuated to rotate the workpiece and rotate the machining roller, and the control unit outputs a control signal to the spindle and / or roller drive source to both the rotation speed of the machining roller and the rotation speed of the workpiece. A method for processing a fine recess, which applies a radial load to the processing roller and presses the fine convex portion of the processing roller against the outer peripheral surface of the rotating workpiece . In forming a fine concave portion on the outer peripheral surface of the workpiece using the fine concave portion processing apparatus according to any one of claims 3 to 16 ,
The spindle is actuated to rotate the workpiece and rotate the machining roller, and the control unit outputs a control signal to at least one of the spindle and the roller drive source to rotate the machining roller and the workpiece. A method for processing a fine recess, which is characterized by applying a radial load to the processing roller and pressing the fine convex portion of the processing roller against the outer peripheral surface of the rotating workpiece after synchronizing with the rotation speed of the processing roller . When forming a fine concave portion on the outer peripheral surface of the workpiece using the fine concave portion processing apparatus according to claim 13 , the main shaft is operated to rotate the workpiece, and the processing roller is rotated to control the control portion. Output the control signal to the spindle or the roller drive source or both to synchronize the rotational speed of the processing roller and the rotational speed of the workpiece, and then apply the radial load to the processing roller to The fine convex part is pressed against the outer peripheral surface of the rotating workpiece, and the control unit detects the breakage of the fine convex part of the processing roller from the rotation signal of the encoder which is the rotation speed detecting means, and controls the machining. A method for processing a fine concave portion. When forming a fine recessed part in the outer peripheral surface of a to-be-processed object using the fine recessed part processing apparatus of any one of Claims 3-16, while operating a main axis | shaft and rotating a to-be-processed object, a processing roller , And applying a radial load to the processing roller, pressing the fine convex portion of the processing roller against the outer peripheral surface of the rotating workpiece, processing was performed, and the control unit measured with the processing shape measuring means A method for processing a fine recess, which calculates and controls the rotational speed of the main shaft and / or roller drive source based on the measurement result of the fine recess after processing. When forming a fine concave portion on the outer peripheral surface of the workpiece using the fine concave portion processing apparatus according to any one of claims 14 to 16, the spindle is operated to rotate the workpiece, The processing roller is rotated by the driving force from the roller driving source transmitted through the driving force transmitting means, and the radial load is applied to the processing roller from the load generating means to rotate the fine convex portion of the processing roller. Processing is performed by pressing against the outer peripheral surface of the workpiece, and the control unit calculates the area ratio of the fine recesses with respect to the entire area of the processed surface from the measurement result of the shape of the fine recesses after processing, and keeps this area ratio within a predetermined range. A fine recess processing method, wherein the processing conditions are controlled so as to be accommodated . When forming a fine concave portion on the outer peripheral surface of the workpiece using the fine concave portion processing apparatus according to any one of claims 14 to 16, the spindle is operated to rotate the workpiece, The processing roller is rotated by the driving force from the roller driving source transmitted through the driving force transmitting means, and the radial load is applied to the processing roller from the load generating means to rotate the fine convex portion of the processing roller. The processing is performed by pressing against the outer peripheral surface of the workpiece, and the control unit calculates the area ratio of the fine recesses with respect to the total area of the work surface based on the damage state of the fine protrusions detected by the breakage detection means. A method for processing a fine recess, wherein the processing conditions are controlled so as to be within a predetermined range.   23. The fine recess processing method according to claim 21, wherein the control of the processing conditions in the control unit is control of the rotational speed of the main shaft and / or roller drive source.   23. The fine recess processing method according to claim 21, wherein the control of the processing conditions in the control unit is control of a feed speed of the processing roller in the axial direction with respect to the workpiece.   The fine recess processing method according to any one of claims 21 to 24, wherein the control unit corrects the processing conditions based on the area ratio of the fine recesses obtained by calculation after the processing.   It has an outer peripheral surface as a sliding surface, and is processed by the fine recess processing apparatus according to any one of claims 1 to 16 or the fine recess processing method according to any one of claims 17 to 25. A sliding member characterized by having a fine concave portion formed on an outer peripheral surface as a sliding surface.   An outer peripheral surface as a sliding surface is provided, and the fine concave portion processed by the fine concave portion processing apparatus according to any one of claims 1 to 16 or the fine concave portion processing method according to any one of claims 17 to 25 is slid. An engine component having an outer peripheral surface as a moving surface.   A fine recess processing apparatus according to any one of claims 1 to 16 or a journal having fine recesses processed by the fine recess processing method according to any of claims 17 to 25 on an outer peripheral surface. Crankshaft.   A fine recess processing apparatus according to any one of claims 1 to 16 or a pin having fine recesses processed by the fine recess processing method according to any of claims 17 to 25 on an outer peripheral surface. Crankshaft.   A fine recess processing apparatus according to any one of claims 1 to 16 or a journal having fine recesses processed by the fine recess processing method according to any of claims 17 to 25 on an outer peripheral surface. Camshaft.   It has a cam lobe having a fine concave portion processed by the fine concave portion processing apparatus according to any one of claims 1 to 16 or the fine concave portion processing method according to any one of claims 17 to 25 on an outer peripheral surface. Camshaft.   A fine recess processing apparatus according to any one of claims 1 to 16 or a journal having fine recesses processed by the fine recess processing method according to any of claims 17 to 25 on an outer peripheral surface. Balancer shaft to do.

Images