JP4927978B2 - Optical disc manufacturing equipment - Google Patents

Description

  The present invention relates to an optical disc manufacturing apparatus suitable for manufacturing optical discs that can be written and read using light, particularly optical discs compatible with high-density recording.

  In recent years, next-generation optical discs capable of recording and playing back images such as HDTV (High Definition Television) image quality have been developed. There is a high-density recording method based on a new disk structure in which recording is performed using a semiconductor laser (hereinafter referred to as a blue-violet laser) that emits light having a shorter wavelength than that of a DVD (Digital Versatile Disc) and having an oscillation wavelength in the vicinity of 405 nm. Proposed. For example, a high recording density compatible optical disc having a structure in which a light transmission layer having a thickness of 0.1 mm is formed on a disc substrate having a thickness of 1.1 mm formed by forming an information recording layer, or on each disc substrate. High recording density compatible optical discs having a structure in which two substrates each having a thickness of 0.6 mm formed by forming an information recording layer are bonded with an adhesive that becomes a light transmission layer after curing are also being realized. In such a next-generation optical disc, since recording and reproduction are performed by a blue-violet laser through the light transmission layer, the light transmission layer needs to have high transmittance with respect to light having a wavelength of 405 nm and the vicinity thereof. Further, since the information recording layer has a higher density than DVD, a very high resolution is required for both recording and reproduction.

  Not only for DVDs or CDs, but also in the manufacturing process of optical discs that support high recording density, a recording chemical solution in which an organic dye material is dissolved in a solvent is supplied onto the disk substrate, and then rotated at a high speed to transfer the recording chemical solution to the disc. Some require a rotation process to spread on the substrate, and a liquid film-forming substance is applied to the disk substrate to form a light-transmitting layer that transmits light at a wavelength of 405 nm and its vicinity with high transmittance. There is a need for another rotation processing step for spreading the film, or a further rotation processing step for spreading the protective liquid film forming material to form a protective layer for protecting the light transmission layer or the like. It may be necessary. In these high-speed rotation processing steps, as described above, the liquid film forming materials such as the recording chemical, the liquid film forming material, and the protective liquid film forming material supplied onto the disk substrate have a very high purity. Is required. If fine particles and bubbles are mixed in these liquid film forming substances, particles and bubbles such as dust formed on the disk substrate are included, which adversely affects recording and reproduction. In conventional optical discs such as DVD, the influence is not so much a problem, but it has been found that an optical disc compatible with high recording density has a great adverse effect.

  Therefore, in the conventional case, in order to recover and reuse the liquid film forming material shaken off at high speed during the rotation process, the disk substrate on the rotation mounting table of the rotation processing apparatus such as a spin coater is used as described above. A filter member is provided in the middle of a liquid film forming material supply pipe that connects between a nozzle member that supplies the liquid film forming material in an annular shape and a tank that stores the liquid film forming material (for example, a patent) Reference 1 and Patent Reference 2). Such a filter member is provided with a particle removal member for removing particles mixed in the liquid film forming substance and a gas permeable membrane that allows only gas to pass through in order to remove bubbles. A liquid film forming substance is introduced from the inlet of the container, and the liquid film forming substance from which the particle removing member and the gas permeable film are removed by removing the liquid film forming substance is led out from the outlet (for example, see Patent Document 3). Then, as described in the invention of Patent Document 1, the cleaned liquid film forming substance is supplied onto the disk substrate through piping, various valve bodies, and a nozzle member.

Japanese Patent Laid-Open No. 06-124487 Japanese Patent Laid-Open No. 08-007347 JP-A-11-216338

  However, in the case of a conventional apparatus, even if a filter member with high filtration efficiency is used, the filter member is only disposed in the middle of the pipe. It was confirmed that particles and gas are generated in the valve body, and the particles and gas may be mixed into the liquid film forming substance. Also, if a filter member with high filtration efficiency is used, most particles and bubbles can be removed, and this is not a problem in the case of conventional optical discs such as DVD and CD. This can be a problem, leading to a decline in quality and yield.

  Accordingly, it is a primary object of the present invention to provide an optical disk manufacturing apparatus capable of manufacturing a high-quality, high-recording-density optical disk, or an optical disk such as a DVD or a CD, by solving such conventional problems.

A first aspect of the present invention is to solve the above problems, a nozzle member for discharging a liquid film forming material on the disc substrate, and the liquid supplying liquid film forming material layer forming material supplying mechanism to the nozzle member an arm member for supporting the nozzle member, the nozzle member driving device for moving the arm member, before Kiekimaku forming material supplying mechanism and the liquid film forming material off valve to selectively open and close the space between the nozzle member When, it is attach between the nozzle member and liquid membrane-forming material off valve, a closed container, a filtering material provided in the closed vessel, to each of the upper base and lower base of the sealed container A filtration member having an attachment portion to be formed and a gas discharge hole portion formed in an upper bottom of the sealed container , and accumulated in the filtration member via an exhaust pipe attached to the gas discharge hole portion. Bei and an exhaust valve, a for exhausting the gas , Attachment to a mounting portion formed on the upper base of the closed container of the filter member and the liquid film forming material off valve closely removably mounted, is formed under the bottom of the sealed container of the filtering member The optical disk manufacturing apparatus is characterized in that the part and the nozzle member are closely and detachably attached .

According to a second aspect of the present invention, the exhaust valve is not opened when the liquid film forming substance on / off valve is open and supplying the liquid film forming substance, and the liquid film forming substance on / off valve is closed to form the liquid film. 2. The optical disc manufacturing apparatus according to claim 1, wherein the optical disc manufacturing apparatus can be opened when the substance is blocked .

According to a third aspect of the present invention, the liquid film forming material supplied through the filtration member is supplied to the nozzle member without going through an on-off valve or a flow rate control valve for the liquid film forming material. An optical disc manufacturing apparatus according to claim 1 or claim 2 is provided.

According to a fourth aspect of the present invention, the liquid film-forming substance supply mechanism includes a filtration container including an inflow part into which the liquid film-forming substance flows and an outflow part from which the liquid film-forming substance flows in the middle of the flow path of the liquid film-forming substance. The filtration container is partitioned between the inflow part and the outflow part by a filtering material, and an exhaust valve for exhausting the gas accumulated in the container is provided on the inflow part side. An optical disc manufacturing apparatus according to any one of claims 1 to 3 is provided.

According to the present invention, it is possible to sufficiently remove bubbles and particles generated in piping for transporting a liquid film forming substance, various on-off valves, flow rate adjusting valves, etc. A high quality optical disk compatible with high recording density can also be obtained.

Further, according to the present invention, the gas accumulated in the filter member can be exhausted without adversely affecting the nozzle member when supplying the liquid film forming material onto the disk substrate, and a higher quality optical disk can be obtained. Can be manufactured.

It is a figure which shows the outline of the optical disk manufacturing apparatus of Embodiment 1 which concerns on this invention. It is a figure which shows the one part enlarged view of the nozzle apparatus of the optical disk manufacturing apparatus based on this invention. It is a figure which shows an example of the valve control part used for this invention. It is a figure which shows another example of the valve control part used for this invention. It is a figure which shows another example of the valve control part used for this invention.

[Embodiment 1]
First, an optical disk manufacturing apparatus according to Embodiment 1 which is the best mode for carrying out the present invention will be described with reference to FIGS. 1A and 1B are diagrams showing an optical disk manufacturing apparatus according to Embodiment 1 of the present invention. FIG. 1A shows the liquid film forming unit, and FIG. 1B shows the liquid film forming substance supply unit. . FIG. 2 is an enlarged partial cross-sectional view of a part of the nozzle device 3 of the liquid film forming unit shown in FIG. FIG. 3 is a view for explaining control of the filtering member 3E.

  In FIG. 1, a rotation processing device 2 and a nozzle device 3 are arranged on a base member 1. The rotation processing device 2 is a normal one, and a rotation mounting table 2A on which the disk substrate D is mounted, and a rotation driving unit 2B that can rotate the rotation mounting table 2A at a high speed, for example, about 3000 rpm to 10,000 rpm. And a cover portion 2C for preventing the liquid film forming material on the disk substrate D from being scattered when it is shaken off by centrifugal force due to high-speed rotation. The liquid film forming substance recovery mechanism and the like are not directly related to the present invention and are not shown. The nozzle device 3, which is also a main feature of the present invention, is coupled to the nozzle drive unit 3A, the drive shaft unit 3B that rotates up and down by the nozzle drive unit 3A, and a drive shaft unit 3B that is coupled at a substantially right angle. Preferably, the arm portion 3C, the liquid film forming material on / off valve 3D fixed to the tip of the arm portion 3C, the filtration member 3E removably attached to the liquid film forming material on / off valve 3D, and the filtration member 3E The nozzle member 3F is detachably attached. Note that the flow rate adjusting valve for the liquid film forming substance is not shown.

  The filter member 3E is small and light, and as shown in FIG. 2, the sealed container 3Ea, the filter medium 3Eb provided in a form that bisects the sealed container 3Ea, the upper bottom of the sealed container 3Ea, There are mounting portions 3Ec and 3Ed formed on the lower bottom, respectively, and gas discharge hole portions 3Ee formed on the upper bottom of the sealed container 3Ea. The attachment portion 3Ec on the inflow side of the filtering member 3E has a structure that can be easily attached to and detached from the attachment portion 3Db of the liquid film forming substance on-off valve 3D. The attachment part 3Db of the liquid film forming substance on / off valve 3D has a trapezoidal tapered surface Tm with a slight inclination, and the attachment part 3Ec on the inflow side of the filtering member 3E is provided with the liquid film forming substance on / off valve 3D. The attachment portion 3Db has a female tapered surface Tf that receives and closely contacts the tapered surface Tm. Although it has a threaded portion for mechanically maintaining the close contact state between the tapered surface Tm of the attachment portion 3Db of the liquid film forming substance on-off valve 3D and the tapered surface Tf of the attachment portion 3Ec on the inflow side of the filtration member 3E. This is not shown. Further, the attachment portion 3Ed on the outflow side of the filtering member 3E has a tapered surface tm having a trapezoidal cross section with a slight inclination. The nozzle member 3F includes a mounting portion 3Fa having a female tapered surface tf that receives and closely contacts the tapered surface tm of the mounting portion 3Ed on the outflow side of the filtering member 3E, and a nozzle tip portion 3Fb that is formed integrally therewith. With. The filter member 3E and the nozzle member 3F are preferably configured as described above, and should be easily attached to and detached from each other, but may be fixed.

On the other hand, a pipe 4A made of a flexible material of the liquid film forming substance supply mechanism 4 shown in FIG. 1B is coupled to the inlet 3Da of the liquid film forming substance on-off valve 3D. This pipe 4A is like a hose that supplies the liquid film forming substance to the liquid film forming substance on / off valve 3D from the liquid film forming substance supply mechanism 4, and is made of a flexible material that does not hinder the movement of the nozzle device 3. Become. The tip of the pipe 4A has a recording chemical solution in which an organic dye material is dissolved in a solvent, a liquid material for forming a light transmission film having a predetermined thickness, a protective material for protecting the optical disk substrate, or a disk substrate. It extends to the vicinity of the bottom in the container 4B in which a liquid film forming material such as an adhesive for bonding them together is accommodated. The container 4B is supplied with air or nitrogen gas by a pump mechanism (not shown) and has a predetermined atmospheric pressure higher than the atmosphere, and the liquid film forming substance is pumped by the pressure. A filter member 4C for removing particles and bubbles from the liquid film forming substance is provided in the middle of the pipe 4A, and an exhaust valve 4D for exhausting the gas accumulated in the filter member 4C is also provided. The pressurizing mechanism for the liquid film forming substance is not directly related to the present invention, and is not shown. Further, when the container 4B and the filter member 4C are fixed at a fixed position and do not move, the pipe 4A for connecting them does not need to be made of a flexible material. The filter member 4C is roughly composed of a filtration container 4Ca and a filtration material 4Cb provided in a form that partitions the filtration container 4Ca in two, and the gas is on the inlet side of the liquid film forming substance in the filtration container 4Ca, In other words, the gas accumulates in the upper part of the filter medium 4Cb in the drawing, and the gas is released to the atmosphere by opening the exhaust valve 4D. The exhaust method of the exhaust valve 4D will be described later.

  The filtering member 3E has a gas discharge hole 3Ee on the upper bottom of the sealed container 3Ea. An exhaust pipe 5 is attached to the gas discharge hole 3Ee, and an exhaust valve 6 is provided in the middle of the exhaust pipe 5. The exhaust valve 6 is a normal small-sized one composed of an opening / closing part 6A and an electromagnetic drive part 6B for opening / closing the opening / closing part, and is shown as separate parts for explanation, but these are single exhaust valves. 6 is constituted. The exhaust valve 6 is automatically opened and closed by the valve control unit 7 at an appropriate time. The exhaust valve 6 is fixed to a mounting plate (not shown), and the mounting plate is preferably fixed to the arm portion 3C shown in FIG. Therefore, the exhaust valve 6 moves together with the liquid film forming substance on / off valve 3D, the filtering member 3E, and the nozzle member 3F by the arm portion 3C. About valve control part 7, some embodiments are described, performing operation explanation.

  Next, the operation of this optical disk manufacturing apparatus will be described. At the beginning of each operation cycle, the nozzle device 3 keeps the nozzle member 3 </ b> F at the origin position away from the rotation processing device 2. When the disk substrate D is placed on the rotation mounting table 2A of the rotation processing device 2 by a transfer arm (not shown), the nozzle drive unit 3A of the nozzle device 3 extends the drive shaft portion 3B by a predetermined length, and at the same time. It is rotated by an angle and further shortened by a predetermined length. As a result, the arm portion 3C, the liquid film forming substance on / off valve 3D, the filtering member 3E, and the nozzle member 3F move together, and the nozzle member 3F stops at a predetermined position on the inner peripheral surface of the disk substrate D. At the same time, the rotation driving unit 2B rotates the rotary mounting table 2A at a low speed, and an open / close signal is given to the liquid film forming material on / off valve 3D from a sequencer (not shown), and the liquid film forming material on / off valve 3D opens for a predetermined time. The liquid film forming material supplied from the liquid film forming material supply mechanism 4 passes through the liquid film forming material on / off valve 3D, the filtering member 3E, and the nozzle member 3F to form a donut shape from the tip of the nozzle member 3F to a predetermined position on the disk substrate D. That is, it is given in an annular shape. Next, the rotary drive unit 2B rotates the rotary mounting table 2A at high speed, and the annular liquid film forming material on the disk substrate D is spread and uniformly spread by centrifugal force, and the excess liquid film forming material is shaken off. It is. In this way, a uniform film of the liquid film forming substance is formed on the disk substrate D.

  The liquid film forming substance supplied in this way is filtered by the filter member 4C through the pipe 4A ′ from the container 4B in which the liquid film forming substance is stored, and fine dust particles and bubbles are removed by the filter medium 4Cb. Then, the liquid film forming substance on-off valve 3D is reached through the flexible pipe 4A. As the liquid film forming substance on / off valve 3D, for example, the on / off structure proposed in the invention proposed by the present applicant (Japanese Patent Laid-Open No. 2004-275859) is suitable. When an open / close signal is sent from a sequencer (not shown) to the liquid film forming material on / off valve 3D, the liquid film forming material on / off valve 3D is opened to supply the liquid film forming material to the filter member 3E. When the open / close signal disappears, the liquid film forming substance on / off valve 3D is closed to stop supplying the liquid film forming substance to the filter member 3E. The liquid film forming material supplied to the filter member 3E is filtered by the filter medium 3Eb. The liquid film forming substance in the container 4B contains particles and bubbles. These are removed by the filter member 4C as described above, but fine particles and bubbles that cannot be removed pass through the filter member 4C and pass through the pipe 4A and the liquid film forming substance on / off valve 3D to form new particles. It also causes the generation of bubbles. The newly generated particles and bubbles cannot be ignored particularly in an optical disc corresponding to a high recording density, and adversely affect the quality.

  In the present invention, since the aforementioned particles and bubbles contained in the liquid film forming substance are removed by the filtering member 3E immediately before the nozzle member 3F, the above-described problems do not occur and the quality is extremely high. High optical disc can be provided. However, since air bubbles filtered by the filtering member 3E accumulate in the filtering member 3E, the exhaust valve 6 must be opened at an appropriate time to release the gas accumulated in the filtering member 3E. In the present invention, the valve control unit 7 controls the electromagnetic drive unit 6B of the exhaust valve 6 to open and close the opening / closing unit 6A at an appropriate time. An example of the valve control unit 7 will be described with reference to FIG. In this example, the exhaust valve 6 is opened and exhausted at every set time using the timer device 8. The timer device 8 includes a time measuring unit 8A for measuring the elapsed time of the optical disc manufacturing apparatus, a time setting unit 8B for setting the opening / closing interval T, and a comparing unit for comparing the time measured by the time measuring unit 8A with the set time. 8C. The time T set in the time setting unit 8B indicates how long the operation time of the optical disk manufacturing apparatus becomes, and gas is accumulated in the filtration member 3E and the supply of the liquid film forming material to the nozzle member 3F starts to be adversely affected. It is a time set by measuring in advance.

  When this optical disk manufacturing apparatus starts operation, the operation signal is input to the timer device 8, and the time measuring unit 8A performs time measurement. When the operation is stopped, the time measurement is interrupted and the time is held, and when the operation is started again, the time measurement is accumulated. When the accumulated time exceeds the time T set in the time setting unit 8B, the comparison unit 8C gives an output signal having a predetermined pulse width to the electromagnetic drive unit 6B of the exhaust valve 6. Accordingly, the electromagnetic drive unit 6B opens the opening / closing unit 6A for a certain period of time, and then closes the opening / closing unit 6A. During the time when the opening / closing portion 6A is open, the gas accumulated in the filter member 3E is exhausted through the exhaust pipe 5 and the exhaust valve 6. At this time, in order not to adversely affect the supply of the liquid film forming material to the nozzle member 3F, preferably, when the open / close signal is supplied to the liquid film forming material on / off valve 3D and the liquid film forming material on / off valve 3D is opened. As indicated by a chain line, it is preferable that the electromagnetic drive unit 6B does not operate in response to the open / close signal. Further, the output signal from the comparison unit 8C is given as a reset signal to the timer unit 8A, and the count value of the timer unit 8A becomes zero. As described above, the valve controller 7 having the configuration shown in FIG. 3 opens the exhaust valve 6 to release the gas in the filter member 3E when the operation time of the optical disk manufacturing apparatus reaches a predetermined time length. It is like that.

[Embodiment 2]
Next, Embodiment 2 of the present invention will be described. Since the structure of the optical disk manufacturing apparatus is almost the same as that of the first embodiment, it will be described with reference to FIGS. As in the first embodiment, the nozzle device 3 keeps the nozzle member 3F at the origin position away from the rotation processing device 2 at the beginning of each operation cycle. When the disk substrate D is placed on the rotation mounting table 2A of the rotation processing device 2 by a transfer arm (not shown), the nozzle drive unit 3A of the nozzle device 3 moves the drive shaft unit 3B in response to a signal from a sequencer (not shown). It is extended by a predetermined length, rotated by a predetermined angle, and further shortened by a predetermined length. As a result, the arm portion 3C, the liquid film forming substance on / off valve 3D, the filtering member 3E, and the nozzle member 3F move together, and the nozzle member 3F stops at a predetermined position on the disk substrate D. Next, the nozzle drive section 3A moves the drive shaft section 3B in the left-right direction and the front / back direction of the drawing, that is, the xy direction, so that the nozzle member 3F rotates on the inner peripheral surface of the disk substrate D. Simultaneously with this rotation, an opening / closing signal is given to the liquid film forming substance on / off valve 3D from a sequencer (not shown), and the liquid film forming substance on / off valve 3D is opened for a predetermined time, thereby supplying the liquid film supplied from the liquid film forming substance supply mechanism 4 The liquid forming material is provided in an annular shape on the inner peripheral side surface of the disk substrate D from the tip of the nozzle member 3F through the liquid film forming material on-off valve 3D, the filtering member 3E, and the nozzle member 3F. Instead of rotating the nozzle member 3F, the rotary mounting table 2A may be rotated at a low speed. Next, the rotary drive unit 2B rotates the rotary mounting table 2A at high speed, and the annular liquid film forming material on the disk substrate D is spread and uniformly spread by centrifugal force, and the excess liquid film forming material is shaken off. It is. In this way, a uniform film of the liquid film forming substance is formed on the disk substrate D. About others, since the structure of the valve control part 7 and the operation | movement relevant to this differ only from Embodiment 1, description is abbreviate | omitted.

  In the second embodiment, the total amount of the liquid film forming material supplied from the nozzle member 3F onto the disk substrate D is proportional to the number of times the liquid film forming material on / off valve 3D is opened and closed. This is based on the knowledge that the total amount of the liquid film forming product is proportional to the number of times the liquid film forming material on / off valve 3D is opened and closed. Therefore, in this embodiment, the counter unit 9A that receives an open / close signal for opening and closing the liquid film forming substance on / off valve 3D and counts the number of times, the number setting unit 9B that sets the set number N, and the count value from the counter unit 9A And a set number N, and a counter device 9 including a comparison unit 9C that generates an output signal when the count value exceeds the set number N is provided. The number of times N set by the number setting unit 9B indicates how much the liquid film forming substance on-off valve 3D is opened and closed, and gas is accumulated in the filtration member 3E and the supply of the liquid film forming substance to the nozzle member 3F starts to have an adverse effect. Is measured in advance, and is preferably the number of times set to the immediately preceding value before adverse effects start to appear.

  Every time the optical disk manufacturing apparatus starts operation and the liquid film forming material on / off valve 3D opens and closes, the nozzle member 3F supplies the liquid film forming material to the disk substrate D as described above. Since the liquid film forming substance that passes through 3D is filtered by the filtering member 3E, a small amount of gas gradually accumulates in the sealed container 3Ea of the filtering member 3E, and very fine dust is collected on the filtering material 3Eb. Such particles go on to accumulate. When the value N counted by the counter unit 9A exceeds the preset value N1 preset in the number-of-times setting unit 9B while repeating the operation of supplying the liquid film forming material from the nozzle member 3F to the disk substrate D many times, the comparison is made. The section 9C gives an output signal having a predetermined pulse width to the electromagnetic drive section 6B of the exhaust valve 6. Accordingly, the electromagnetic drive unit 6B opens the opening / closing unit 6A for a certain period of time, and then closes the opening / closing unit 6A. During the time when the opening / closing part 6A is open, the gas accumulated in the filter member 3E is released through the exhaust pipe 5 and the exhaust valve 6. At this time, in order not to adversely affect the supply of the liquid film forming material to the nozzle member 3F, preferably, an open / close signal is supplied to the liquid film forming material on / off valve 3D and the liquid film forming material on / off valve 3D is opened. Sometimes, it is preferable that the electromagnetic drive unit 6B does not operate. That is, it is preferable to open the exhaust valve 6 when the liquid film forming substance on-off valve 3D is closed, that is, when the liquid film forming substance is not discharged from the nozzle member 3F. The counter unit 9A is reset by the output signal of the comparison unit 9C and starts counting from the initial value.

  Moreover, in this embodiment, the 2nd counter apparatus 10 of the structure similar to the counter apparatus 9 and the alerting | reporting means 11 are provided. As described above, as the liquid film forming substance is repeatedly supplied from the nozzle member 3F to the disk substrate D, very fine particles such as dust are accumulated in the filter medium 3Eb. Before the supply of the liquid film forming substance is adversely affected, it is necessary to replace the filter member with a new one. For this purpose, the second counter device 10 counts the open / close signal supplied to the liquid film forming substance open / close valve 3D, and gives an output signal to the notification means 11 when the preset value N2 is reached. The set value N2 is a numerical value obtained in advance from the operation of the optical disc apparatus, and is larger than the set value N1 of the counter device 9. The notification means 11 is a general one, and is, for example, a light-emitting diode, a lamp, a buzzer, means for notifying the operator's personal computer or the like by voice, or a combination thereof. When the notification means 11 notifies, the operator replaces the filtering member 3E.

  The exchange is performed as follows. In FIG. 2, the attachment portion 3Ec on the inflow side of the filtration member 3E is removed from the attachment portion 3Db of the liquid film forming substance on-off valve 3D. First, when both screwed portions (not shown) are screwed and removed, the female tapered surface Tf of the mounting portion 3Ec is easily detached from the male tapered surface Tm of the mounting portion 3Db. Similarly, the attachment portion 3Fa of the nozzle member 3F is removed from the attachment portion 3Ed on the outflow side of the filtration member 3E. Then, the filter member is replaced with a new one, the nozzle member 3F is attached to the new filter member 3E in the same manner as described above, and the new filter member 3E is attached to the liquid film forming substance on / off valve 3D. By doing in this way, it becomes possible to replace | exchange the filtration member 3E at the appropriate time before a bad influence arises in supply of the liquid film formation substance of the nozzle member 3F.

[Embodiment 3]
Next, a third embodiment of the present invention will be described. The structure of this optical disc manufacturing apparatus is almost the same as that of the first embodiment or the second embodiment, and only the valve control unit 7 and the operation related thereto are different. Omitted. In this Embodiment 3, the thing of the structure shown in FIG. 4 is used as the valve control part 7 shown by FIG. 4, a mass flow meter (flow meter) 12 is installed in the middle of a pipe 4A connecting the liquid film forming substance on-off valve 3D and the filter member 4C shown in FIG. The flow meter 12 measures the flow rate of the liquid film forming substance flowing through the pipe 4A. It is known that as the gas accumulates in the sealed container 3Ea of the filtering member 3E, the air pressure in the sealed container 3Ea increases, and the flow rate of the liquid film forming material flowing through the pipe 4A decreases accordingly. . Embodiment 3 of the present invention utilizes this fact to open the exhaust valve 6 at an appropriate time.

  When the open / close signal is applied (high level), the liquid film forming material on / off valve 3D is open, and the liquid film forming material flows through the pipe 4A. The flow meter 12 used here measures the flow rate during the time when the open / close signal is applied. Alternatively, the flow meter 12 has a function of summing up the flow rate for a predetermined number of times, for example, 10 times, in order to accurately measure the flow rate. A value indicating the flow rate of the liquid film-forming substance flowing through the pipe 4 </ b> A measured by the flow meter 12 is converted into an electric signal corresponding to the value indicating the flow rate of the liquid film-forming substance by the flow rate-electric signal converter 13. This electrical signal is input to the comparison means 15 through the gate 14. The gate means 14 closes the gate when the opening / closing signal is supplied (high level) to the liquid film forming substance on / off valve 3D, and when the opening / closing signal is not supplied to the liquid film forming substance on / off valve 3D (low level). Only the electrical signal is allowed to pass by opening the gate.

  The comparison means 15 compares the electrical signal corresponding to the value indicating the flow rate of the liquid film forming substance with the set value set in the flow rate setting means 16, and when the former is smaller than the latter, the output signal is sent to the exhaust valve. Give to 6. In response to this signal, the exhaust valve 6 opens and releases the gas accumulated in the sealed container 3Ea of the filtration member 3E as described above. When the liquid film forming material opening / closing valve 3D is opened and the liquid film forming material is supplied from the nozzle member 3F to the disk substrate D, the exhaust valve 6 is not opened by the gate means 14, so that the liquid film forming material is supplied. Does not adversely affect Also in this embodiment, it is needless to say that the timer device 10 and the notification means 11 as shown in FIG.

By using the exhaust valve 4D of the liquid film forming substance supply mechanism 4 having the same configuration as the exhaust valve 6 and using the configuration shown in any of FIGS. 3 to 5 as the valve control unit 7. The exhaust valve 4D can be automatically opened at an appropriate time to release the gas accumulated in the filtration container 4Ca of the filter member 4C.
Further, by providing the same means as the second counter device 10 and the notification means 11 as shown in FIG. 4, the replacement time of the filter member 4C can also be notified. Also in the first embodiment, the valve control unit 7 is provided with a second timer device similar to the timer device 8 and a notification device, and when the operating time exceeds a preset time, the replacement time of the filter member is notified. You may make it do.

  The liquid film forming material contains an organic dye solvent containing an organic dye for forming a recording film, a liquid material for forming a light transmission film, a protective material for protecting the optical disk substrate, or between the disk substrates. The material, viscosity, amount of contained particles and bubbles, etc. vary greatly depending on the adhesive used for bonding, and therefore the set time, set number of times, set flow rate, etc. also differ greatly. Will not touch on. Further, when the liquid film forming material used in the rotation processing device 2 is not collected and reused, the liquid film forming material contains few particles and bubbles, so that the liquid film forming material supply mechanism 4 and the filter member 4C It is also possible to remove the exhaust valve 4D. Furthermore, the filtration member 3E and the nozzle member 3F may have an integral structure. In this case, when either the filtration member 3E or the nozzle member 3F is replaced, both are replaced.

  It can be used in an optical disc manufacturing apparatus suitable for manufacturing optical discs that can be written and read using light, particularly optical discs compatible with high-density recording.

DESCRIPTION OF SYMBOLS 1 ... Base member 2 ... Rotation processing apparatus 2A ... Rotation mounting base of rotation processing apparatus 2 2B ... Rotation drive part of rotation processing apparatus 2 2C ... Cover part of rotation processing apparatus 2 ..Nozzle device 3A ... Nozzle drive section 3B ... Drive shaft section 3C ... Arm section 3D ... Liquid film forming substance on / off valve 3Da ... Inlet section 3Db of liquid film forming substance on / off valve 3D ... Attachment part of liquid film forming substance on-off valve 3D 3E ... Filtering member 3Ea ... Airtight container of filtration member 3E 3Eb ... Filtering material of filter member 3E 3Ec ... Attachment part of filtration member 3E 3Ed ... Attachment part 3Ee of filtration member 3E ... Gas discharge hole part 3F ... Nozzle member 3Fa ... Attachment part of nozzle member 3F 3Fb ... Nozzle tip part of nozzle member 3F ..Liquid film forming substance supply mechanism 4 A ... Pipe of liquid film forming substance supply mechanism 4 4B ... Container of liquid film forming substance supply mechanism 4 4C ... Filter member of liquid film forming substance supply mechanism 4 4Ca ... Liquid film forming substance supply mechanism 4 Filtration container 4Cb ... Filter material of liquid film forming substance supply mechanism 4 4D ... Exhaust valve of liquid film forming substance supply mechanism 4 5 ... Exhaust pipe 6 ... Exhaust valve 6A ... Opening / closing section 6B ... Electromagnetic drive section 7 ... Valve control section 8 ... Timer device 8A ... Timer section 8 timer section 8B ... Timer apparatus 8 time setting section 8C ... Timer apparatus 8. Comparison unit 9 ... Counter device 9A ... Counter unit of counter device 9 9B ... Count setting unit of counter device 9 9C ... Comparison unit of counter device 9 10 ... Second counter device 11 ... notification means 12 ... flow meter 13 ... flow rate Electric signal conversion means 14 ... gate means 15 ... comparing unit 16 ... flow rate setting means

Claims (4)

A nozzle member for discharging a liquid film forming material on the disk substrate,
A liquid film forming substance supply mechanism for supplying the liquid film forming substance to the nozzle member;
An arm member for supporting the nozzle member;
A nozzle member driving device for moving the arm member ;
A liquid film forming material off valve to selectively open and close between the front Kiekimaku forming material supplying mechanism the nozzle member,
Are attach between the nozzle member and liquid membrane-forming material off valve, a closed container, a filtering material provided in the sealed container, it is formed on each of the upper base and lower base of the sealed container A filtration member having a mounting portion and a gas discharge hole portion formed in the upper bottom of the sealed container ;
An exhaust valve for exhausting the gas accumulated in the filtration member through an exhaust pipe attached to the gas discharge hole ,
The liquid film forming substance on-off valve and the attachment part formed on the upper bottom of the sealed container of the filtration member are attached in a detachable manner,
An optical disc manufacturing apparatus , wherein an attachment portion formed on a lower bottom of the sealed container of the filtration member and the nozzle member are attached in a detachable manner. The exhaust valve is not opened when the liquid film forming material on / off valve is open and supplying the liquid film forming material, and the liquid film forming material on / off valve is closed to block the liquid film forming material. 2. The optical disc manufacturing apparatus according to claim 1, wherein the optical disc manufacturing apparatus can be opened sometimes . 3. The liquid film forming material supplied through the filtration member is supplied to the nozzle member without going through an on-off valve or a flow control valve for the liquid film forming material. The optical disk manufacturing apparatus described . The liquid film-forming substance supply mechanism includes a filtration container including an inflow part into which the liquid film-forming substance flows and an outflow part from which the liquid film-forming substance flows in the middle of the flow path of the liquid film-forming substance,
The inside of the container for filtration is partitioned between the inflow part and the outflow part by a filtering material, and an exhaust valve for exhausting the gas accumulated in the container is provided on the inflow part side, The optical disc manufacturing apparatus according to any one of claims 1 to 3 .

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