JP4912595B2 - Position detection device - Google Patents

Position detection device Download PDF

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JP4912595B2
JP4912595B2 JP2005027755A JP2005027755A JP4912595B2 JP 4912595 B2 JP4912595 B2 JP 4912595B2 JP 2005027755 A JP2005027755 A JP 2005027755A JP 2005027755 A JP2005027755 A JP 2005027755A JP 4912595 B2 JP4912595 B2 JP 4912595B2
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magnetic track
track
rotating body
width
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庫宇祐 社本
章 岡田
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Mitsubishi Electric Corp
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本発明は、着磁された磁気トラックを有するアブソリュート磁気エンコーダ等の位置検出装置に関する。   The present invention relates to a position detection device such as an absolute magnetic encoder having a magnetized magnetic track.

従来のアブソリュート磁気エンコーダとして、磁化の強さの分布をもつ少なくとも1つの磁化パターン列が書込まれた磁気記録媒体(磁気トラック)からの磁場を該記録媒体に近接した少なくとも1つのストライプ状の磁気抵抗効果素子により検出し、その出力値の大きさにより被検出体(動体、回転体)の絶対位置(角度位置)を検出するアブソリュート磁気エンコーダにおいて、磁気抵抗効果素子のストライプ長さ方向が磁気記録媒体表面にほぼ直角で、ストライプ幅方向が磁化パターン列方向と平行であり、ストライプ幅方向に磁化パターンからの磁界が印加されることを特徴とするアブソリュート磁気エンコーダがある(例えば、特許文献1参照)。   As a conventional absolute magnetic encoder, a magnetic field from a magnetic recording medium (magnetic track) in which at least one magnetization pattern array having a magnetization intensity distribution is written is used as at least one stripe-shaped magnetism close to the recording medium. In an absolute magnetic encoder that detects the absolute position (angular position) of the detected object (moving body, rotating body) based on the magnitude of the output value detected by the resistance effect element, the stripe length direction of the magnetoresistive effect element is the magnetic recording There is an absolute magnetic encoder characterized in that the stripe width direction is substantially perpendicular to the medium surface, the stripe width direction is parallel to the magnetization pattern row direction, and a magnetic field from the magnetization pattern is applied in the stripe width direction (see, for example, Patent Document 1). ).

また、相対移動する第1および第2の部材と、前記第1の部材(動体、回転体)に設けられ、かつ相対移動方向に記録ピッチλで記録された発磁体を有する磁気媒体(磁気トラック)と、前記第2の部材に設けられ、前記発磁体の磁界に感応する磁気抵抗効果素子を具備する磁気センサとから構成され、前記第1、第2の部材の相対移動によって変化する前記磁気抵抗効果素子の電気信号により前記両部材間の絶対位置(角度位置)を検出するものにおいて、前記磁気媒体に記録する発磁体の幅を前記相対移動方向に従って変えるようにし、前記第1、第2の部材の相対移動に応じてアナログ的に変化する前記磁気抵抗効果素子の出力信号により、前記第1、第2の部材間のずれ量を検出するように構成した絶対位置検出装置がある(例えば、特許文献2参照)。   Further, a magnetic medium (magnetic track) having first and second members that move relative to each other, and a magnetomotive member that is provided on the first member (moving body, rotating body) and recorded at a recording pitch λ in the relative movement direction. ) And a magnetic sensor provided with a magnetoresistive effect element that is provided on the second member and is sensitive to the magnetic field of the magnetomotive body, and changes in accordance with the relative movement of the first and second members. In the case where the absolute position (angular position) between the two members is detected by the electrical signal of the resistance effect element, the width of the magnetomotive member recorded on the magnetic medium is changed according to the relative movement direction, and the first and second There is an absolute position detecting device configured to detect a deviation amount between the first and second members based on an output signal of the magnetoresistive effect element that changes in an analog manner according to relative movement of the first member (for example, See Patent Document 2).

上記従来の磁気的に動体(回転体)の位置を検出する(回転)位置検出装置は、着磁され、その移動とともに変化する磁界を発生する磁気トラックを備える動体(回転体)と、磁界の変化を検出する磁気抵抗効果素子とにより構成されている。   The conventional (rotational) position detection device for magnetically detecting the position of a moving body (rotating body) is a moving body (rotating body) having a magnetic track that is magnetized and generates a magnetic field that changes with the movement, And a magnetoresistive effect element for detecting a change.

特開昭63−206613号公報JP-A-63-206613 特開昭64−032117号公報JP-A-64-032117

しかしながら、上述の磁気トラックを備える従来の位置検出装置では、磁気トラックの製作時に、磁気トラックの長さ方向位置(周方向位置)によって幅方向の着磁長さを変化させる必要があるため、磁気トラックを長さ方向(周方向)に精密に所定ピッチずつ移動させながら、その都度、幅方向の着磁長さを微妙に変化させなければならず、高精度な着磁トラックを製作するのは容易ではなかった。また、複雑に変化する磁界を発生する磁気トラックを製作するのが難しいという問題があった。   However, in the conventional position detecting device including the above-described magnetic track, it is necessary to change the magnetization length in the width direction depending on the position in the length direction (circumferential position) of the magnetic track when the magnetic track is manufactured. While moving the track precisely in the length direction (circumferential direction) by a predetermined pitch, the magnetizing length in the width direction must be changed slightly each time, and a highly accurate magnetized track is produced. It was not easy. In addition, there is a problem that it is difficult to manufacture a magnetic track that generates a magnetic field that changes in a complicated manner.

本発明は、上記に鑑みてなされたものであって、容易に製作することができ、高精度な位置検出装置を得ることを目的とする。   The present invention has been made in view of the above, and an object of the present invention is to obtain a highly accurate position detection device that can be easily manufactured.

上述した課題を解決し、目的を達成するために、本発明の位置検出装置は、回転軸および該回転軸に支持された円柱状又は円筒状の基台を有する回転体と、該回転体の基台の円周面上に配置され、周方向に所定のピッチで、隣接する磁極が互いに同じ磁極となるように、一様な幅と強度でNS着磁された円筒状の磁気トラックと、該磁気トラックの幅方向の一部を覆うように配置され、該磁気トラックの周方向位置によって幅の異なるリング状の強磁性体膜から成る集磁部材と、前記磁気トラックの円周面に対向するように設置され、近傍の磁界強度に感応して磁気強度信号を出力する磁気検出素子と、を備え、前記回転体の回転角度位置を検出することを特徴とする。 In order to solve the above-described problems and achieve the object, a position detection device of the present invention includes a rotating body having a rotating shaft and a columnar or cylindrical base supported by the rotating shaft, and the rotating body of the rotating body. A cylindrical magnetic track which is arranged on the circumferential surface of the base and is NS magnetized with a uniform width and strength so that adjacent magnetic poles are the same magnetic pole at a predetermined pitch in the circumferential direction; A magnetic flux collecting member, which is arranged so as to cover a part of the magnetic track in the width direction and is made of a ring-shaped ferromagnetic film having a different width depending on the circumferential position of the magnetic track, and opposed to the circumferential surface of the magnetic track And a magnetic detection element that outputs a magnetic strength signal in response to a nearby magnetic field strength, and detects a rotational angle position of the rotating body.

この発明によれば、周方向に所定のピッチで、隣接する磁極が互いに同じ磁極となるように、一様な幅と強度でNS着磁された円筒状の磁気トラックと、該磁気トラックの一部を覆うように配置され、該磁気トラックの周方向位置によって幅の異なるリング状の集磁部材と、を備えることにより、磁気トラックの周方向位置によって発生磁界強度を精密に変化させる磁気トラックを容易に製作することができる。   According to the present invention, a cylindrical magnetic track which is NS magnetized with a uniform width and strength so that adjacent magnetic poles are the same magnetic pole at a predetermined pitch in the circumferential direction, and one of the magnetic tracks. A magnetic current collecting member that is arranged so as to cover a portion and has a ring-shaped magnetic flux collecting member having a different width depending on the circumferential position of the magnetic track. It can be easily manufactured.

この発明によれば、磁気トラックの周方向位置によって発生磁界強度を精密に変化させる磁気トラックを有する回転体を容易に製作することができ、位置検出精度が高く製造コストの低い位置検出装置を得ることができるという効果を奏する。   According to the present invention, it is possible to easily manufacture a rotating body having a magnetic track that accurately changes the generated magnetic field intensity according to the circumferential position of the magnetic track, and to obtain a position detection device with high position detection accuracy and low manufacturing cost. There is an effect that can be.

以下に、本発明にかかる位置検出装置の実施の形態を図面に基づいて詳細に説明する。なお、この実施の形態によりこの発明が限定されるものではない。   Embodiments of a position detection apparatus according to the present invention will be described below in detail with reference to the drawings. Note that the present invention is not limited to the embodiments.

実施の形態1.
図1は、本発明の実施の形態1の位置検出装置を示す斜視図であり、図2は、図1に示す円筒状の磁気トラック4および集磁部材5を平面に展開して示した展開図であり、図3は、回転体1の上面図であり、図4は、回転体1の縦断面図である。
Embodiment 1 FIG.
FIG. 1 is a perspective view showing a position detection apparatus according to Embodiment 1 of the present invention, and FIG. 2 is a development in which the cylindrical magnetic track 4 and the magnetic flux collecting member 5 shown in FIG. FIG. 3 is a top view of the rotating body 1, and FIG. 4 is a longitudinal sectional view of the rotating body 1.

回転体1は、回転軸2と回転軸2に支持された幅H、円周長Lの円柱状の基台3とを備えている。回転軸2および基台3は、例えば、アルミニウムやSUSのような非磁性材料で製作するのが望ましい。基台3の形状は、端板を有する中空の円筒状としてもよく、円筒状の磁気トラック4を回転軸2を軸心とするように支持可能であれば、どのような形状であってもよい。   The rotating body 1 includes a rotating shaft 2 and a columnar base 3 having a width H and a circumferential length L supported by the rotating shaft 2. The rotating shaft 2 and the base 3 are preferably made of a nonmagnetic material such as aluminum or SUS. The shape of the base 3 may be a hollow cylindrical shape having end plates, and any shape can be used as long as the cylindrical magnetic track 4 can be supported with the rotary shaft 2 as an axis. Good.

基台3の円周面には、磁性粉末を混入した樹脂材料製の磁気トラック4が、幅H、円周長Lの円筒状に形成され設置されている。樹脂材料としては、耐熱性を考慮し、例えばPPS等のエンジニアリングプラスチックを用いるのがよい。磁気トラック4は、周方向に所定の等ピッチλで、隣接する磁極が互いに同じ極性となるように、円周全長Lと一様な幅Hに亘って一様な強度でNS着磁を行う。   On the circumferential surface of the base 3, a magnetic track 4 made of a resin material mixed with magnetic powder is formed and installed in a cylindrical shape having a width H and a circumferential length L. As the resin material, it is preferable to use an engineering plastic such as PPS in consideration of heat resistance. The magnetic track 4 performs NS magnetization with a uniform strength over the entire circumference L and a uniform width H so that adjacent magnetic poles have the same polarity at a predetermined equal pitch λ in the circumferential direction. .

樹脂材料製の磁気トラック4の外周面上には、磁気トラック4とは別部材の、リング状の集磁部材としての強磁性体膜5が、磁気トラック4の幅方向の一部を覆うように形成されている。強磁性体膜5は強磁性材料で形成されている。強磁性材料としては、例えば、パーマロイ、珪素鋼板、フェライト等を用いてもよいが、回転体1の質量バランスを考慮すると、薄膜状で透磁率の高いアモルファス合金を用いるのが望ましい。リング状の強磁性体膜5は、磁気トラック4の周方向位置によって、その幅を異ならせるように形成する。   On the outer peripheral surface of the magnetic track 4 made of resin material, a ferromagnetic film 5 as a ring-shaped magnetic collecting member, which is a member different from the magnetic track 4, covers a part of the magnetic track 4 in the width direction. Is formed. The ferromagnetic film 5 is made of a ferromagnetic material. As the ferromagnetic material, for example, permalloy, silicon steel plate, ferrite or the like may be used, but considering the mass balance of the rotating body 1, it is desirable to use an amorphous alloy having a thin film shape and high magnetic permeability. The ring-shaped ferromagnetic film 5 is formed so that its width varies depending on the circumferential position of the magnetic track 4.

一様な幅HでNS着磁された磁気トラック4の幅方向の一部が、周方向位置によって幅の異なるリング状の強磁性体膜5で覆われるので、覆われた部分の下に発生している磁束線が強磁性体5により集磁され、磁束線が強磁性体膜5の外側に漏れなくなる。従って、磁気トラック4の発生磁界強度が、周方向位置によって変化することになる。   Part of the magnetic track 4 in the width direction, which is NS magnetized with a uniform width H, is covered with a ring-shaped ferromagnetic film 5 having a different width depending on the position in the circumferential direction. The collected magnetic flux lines are collected by the ferromagnetic material 5 so that the magnetic flux lines do not leak outside the ferromagnetic film 5. Therefore, the magnetic field intensity generated by the magnetic track 4 varies depending on the circumferential position.

NS着磁される磁気トラック4の厚さは、例えば、2mm程度とするのがよいが、基台3の外径寸法等を勘案して適宜の厚さとすればよい。また、強磁性体膜5の厚さは、図3には、磁気トラック4と同等の厚さとして示されているが、周方向位置によって幅の異なる形状であるため、回転体1の質量バランスを考慮すると、できるだけ薄い薄膜で作製し、回転体1の質量バランスを崩さないようにすることが回転位置検出の精度向上のために望ましい。集磁部材としての強磁性体膜5は、強磁性特性を有する液体を磁気トラック4に塗布し固化させることにより形成してもよい。   The thickness of the NS magnetized magnetic track 4 is preferably about 2 mm, for example, but may be set to an appropriate thickness in consideration of the outer diameter of the base 3 and the like. Further, although the thickness of the ferromagnetic film 5 is shown in FIG. 3 as the same thickness as the magnetic track 4, the thickness is different depending on the position in the circumferential direction. In view of the above, it is desirable to improve the rotational position detection accuracy by making the thin film as thin as possible and keeping the mass balance of the rotator 1 intact. The ferromagnetic film 5 as the magnetic flux collecting member may be formed by applying a liquid having ferromagnetic characteristics to the magnetic track 4 and solidifying it.

図1、図2および図4に示すように、強磁性体膜5の幅は、回転体1の周方向位置によって異なっている。図4に発生磁束8を模式的に示したが、強磁性体膜5の集磁効果により、強磁性体膜5が磁気トラック4を覆う幅寸法に比例して発生磁束8が減少する。   As shown in FIGS. 1, 2, and 4, the width of the ferromagnetic film 5 varies depending on the circumferential position of the rotating body 1. Although the generated magnetic flux 8 is schematically shown in FIG. 4, the generated magnetic flux 8 decreases in proportion to the width of the ferromagnetic film 5 covering the magnetic track 4 due to the magnetic flux collecting effect of the ferromagnetic film 5.

回転体1の質量バランスが崩れた場合、基台3の一部質量を除去した質量除去部12、または、基台3に質量を付加した質量付加部13を設け、回転体1の質量バランスを調整するとよい。   When the mass balance of the rotating body 1 is lost, a mass removing unit 12 that removes part of the mass of the base 3 or a mass adding unit 13 that adds mass to the base 3 is provided, and the mass balance of the rotating body 1 is increased. Adjust it.

磁気検出素子6としては、例えば、自身の近傍の磁気強度に感応して電気抵抗が変化し磁気強度信号を出力する磁気抵抗効果素子(MR素子)のような磁電変換素子を用いる。磁気トラック4の円周面に微小な間隔を空けて対向するように磁気検出素子6を設置する。磁気検出素子6には演算処理回路7を接続し、回転体1の回転変位に伴なう磁気トラック4の周方向変位に応じて磁気検出素子6近傍の磁界強度を変化させ、これに感応する磁気検出素子6の出力する磁気強度信号を処理し、回転体1の回転角度位置を演算し出力するようにする。   As the magnetic detection element 6, for example, a magnetoelectric conversion element such as a magnetoresistive effect element (MR element) that changes the electric resistance in response to the magnetic intensity in the vicinity of itself and outputs a magnetic intensity signal is used. The magnetic detection element 6 is installed so as to face the circumferential surface of the magnetic track 4 with a minute gap. An arithmetic processing circuit 7 is connected to the magnetic detection element 6, and the magnetic field intensity in the vicinity of the magnetic detection element 6 is changed according to the circumferential displacement of the magnetic track 4 accompanying the rotational displacement of the rotating body 1, and is sensitive to this. The magnetic intensity signal output from the magnetic detection element 6 is processed, and the rotational angle position of the rotating body 1 is calculated and output.

なお、実施の形態1では、磁気検出素子6として、磁気抵抗効果素子のような磁電変換素子を用いたが、磁気検出素子6は、磁気抵抗効果素子に限定されることはなく、着磁ピッチλに対応できる寸法のデバイスであれば、例えば、ホール素子、MI素子等を用いてもよい。   In the first embodiment, a magnetoelectric conversion element such as a magnetoresistive effect element is used as the magnetic detection element 6, but the magnetic detection element 6 is not limited to the magnetoresistive effect element, and the magnetization pitch For example, a Hall element, an MI element, or the like may be used as long as the device has a dimension that can handle λ.

磁気検出素子6は、磁気トラック4の着磁ピッチに応じた波長の信号を出力し、その信号と位相を反転した信号の両者を加算することで、磁気トラック4の周方向変位に伴って変化する磁界強度を検出する。なお、実施の形態1では、強磁性体膜5の幅を直線的に変化させているため、検出する磁界強度も直線的に変化することになるが、強磁性体膜5の形状は、容易に任意の形状に形成可能であり、例えば、正弦波形状等の所望の波形信号を得られるように形成することができる。   The magnetic detection element 6 outputs a signal having a wavelength corresponding to the magnetization pitch of the magnetic track 4, and adds both the signal and a signal whose phase is inverted, so that the magnetic detection element 6 changes with the circumferential displacement of the magnetic track 4. The magnetic field strength to be detected is detected. In the first embodiment, since the width of the ferromagnetic film 5 is linearly changed, the detected magnetic field intensity also changes linearly, but the shape of the ferromagnetic film 5 is easy. For example, it can be formed so as to obtain a desired waveform signal such as a sine wave shape.

以上に説明した実施の形態1では、磁気トラック4を、周方向に所定のピッチλで、隣接する磁極が互いに同じ磁極となるように、一様な幅Hと強度でNS着磁し、NS着磁後の磁気トラック4に、磁気トラック4の周方向位置によって幅を変えたリング状の強磁性体膜5で磁気トラック4の幅方向の一部を覆ったので、磁気トラック4の周方向位置によって発生磁界強度を精密に変化させる磁気トラック4を容易に製作することができる。   In the first embodiment described above, the magnetic track 4 is NS magnetized with a uniform width H and strength so that adjacent magnetic poles are the same magnetic pole at a predetermined pitch λ in the circumferential direction. Since a part of the magnetic track 4 in the width direction is covered with the ring-shaped ferromagnetic film 5 whose width is changed according to the circumferential position of the magnetic track 4 on the magnetic track 4 after magnetization, the circumferential direction of the magnetic track 4 The magnetic track 4 in which the generated magnetic field strength is precisely changed depending on the position can be easily manufactured.

また、強磁性体膜5の形状を変えることにより、磁気トラック4のNS着磁のパターンを変えずに所望の波形信号を得ることができる。   Further, by changing the shape of the ferromagnetic film 5, a desired waveform signal can be obtained without changing the NS magnetization pattern of the magnetic track 4.

また、磁気トラック4の周方向位置によって発生磁界強度を精密に変化させる磁気トラック4を有する回転体1を容易に製作することができ、位置検出精度が高く製造コストの低い位置検出装置を得ることができるという効果を奏する。   Further, it is possible to easily manufacture the rotating body 1 having the magnetic track 4 that precisely changes the generated magnetic field intensity according to the circumferential position of the magnetic track 4, and to obtain a position detection device with high position detection accuracy and low manufacturing cost. There is an effect that can be.

実施の形態2.
図5は、本発明の実施の形態2の位置検出装置を示す斜視図であり、図6は、回転体1の縦断面図である。なお、図5では、磁気検出素子および演算処理回路の図示を省略している。図5および図6において、図1〜図4に示すものと同等のものには同じ符号を付し、重複する説明を省略する。
Embodiment 2. FIG.
FIG. 5 is a perspective view showing a position detection device according to Embodiment 2 of the present invention, and FIG. 6 is a longitudinal sectional view of the rotating body 1. In FIG. 5, the magnetic detection element and the arithmetic processing circuit are not shown. 5 and 6, the same components as those shown in FIGS. 1 to 4 are denoted by the same reference numerals, and redundant description is omitted.

図5および図6に示すように、集磁部材5で覆われていない磁気トラック4の外周面を覆うように、磁気透過部材としてのリング状の非磁性部材10が形成され配置されている。非磁性部材10は、回転軸2を挟んで対向する集磁部材5と非磁性部材10の単位面積当たりの合計質量が等しくなり、回転体1の質量バランスがとれるように設置する。従って、非磁性部材10は、磁気トラック4の集磁部材5で覆われていない部分を完全に覆う必要はなく、あくまで、回転体1の質量バランスをとるように調整して配置する。また、回転体1の質量バランスをとるために、集磁部材5の外周部まで延長して外周部の一部を覆うように非磁性部材10を配置してもよい。   As shown in FIGS. 5 and 6, a ring-shaped nonmagnetic member 10 as a magnetic transmission member is formed and arranged so as to cover the outer peripheral surface of the magnetic track 4 that is not covered with the magnetic collecting member 5. The nonmagnetic member 10 is installed so that the total mass per unit area of the magnetism collecting member 5 and the nonmagnetic member 10 facing each other with the rotating shaft 2 interposed therebetween is equal, and the mass balance of the rotating body 1 is maintained. Therefore, the nonmagnetic member 10 does not need to completely cover the portion of the magnetic track 4 that is not covered with the magnetic collecting member 5, and is adjusted and arranged so as to balance the mass of the rotating body 1. In order to balance the mass of the rotating body 1, the nonmagnetic member 10 may be arranged so as to extend to the outer peripheral portion of the magnetic flux collecting member 5 and cover a part of the outer peripheral portion.

集磁部材5として、薄膜ではなく、バルク材のように大きな質量を有する部材を使用する場合は、回転体1の質量バランスが大きく崩れる。そこで、質量バランスを保つために非磁性部材10を設置する必要がある。図6に発生磁束8を模式的に示したが、集磁手段5の集磁効果により、集磁手段5が磁気トラック4を覆う幅寸法に比例して発生磁束8が減少し、発生磁束8は、非磁性部材10を透過して外部へ放出される。   When a member having a large mass such as a bulk material is used as the magnetic flux collecting member 5 instead of a thin film, the mass balance of the rotating body 1 is greatly broken. Therefore, it is necessary to install the nonmagnetic member 10 in order to maintain the mass balance. Although the generated magnetic flux 8 is schematically shown in FIG. 6, the generated magnetic flux 8 decreases in proportion to the width of the magnetic collecting means 5 covering the magnetic track 4 due to the magnetic collecting effect of the magnetic collecting means 5. Passes through the nonmagnetic member 10 and is released to the outside.

また、非磁性部材10の設置による回転体1の質量バランスの調整の後、さらに質量バランスを微調整する必要がある場合、基台3の一部質量を除去した質量除去部12、または、基台3に質量を付加した質量付加部13を設け、回転体1の質量バランスを微調整することも可能である。   In addition, after the adjustment of the mass balance of the rotating body 1 by the installation of the nonmagnetic member 10, when the mass balance needs to be further finely adjusted, the mass removing unit 12 from which a part of the mass of the base 3 is removed, It is also possible to finely adjust the mass balance of the rotating body 1 by providing a mass adding portion 13 that adds mass to the table 3.

以上に説明した実施の形態2では、非磁性部材10の設置により質量バランスのとれた回転体1が得られるので、回転体1の高速回転および低速回転にかかわらず、どのような回転時にも質量のアンバランスに起因する回転体1の回転ムラが生じることがなく、位置検出精度の高い回転位置検出装置を得ることができる。   In the second embodiment described above, the rotating body 1 having a mass balance can be obtained by installing the non-magnetic member 10, so that the mass can be obtained at any rotation regardless of whether the rotating body 1 rotates at high speed or low speed. Therefore, the rotation position detection apparatus with high position detection accuracy can be obtained.

実施の形態3.
図7は、実施の形態3の位置検出装置の回転体1を示す縦断面図である。なお、図7では、磁気検出素子および演算処理回路の図示を省略している。図7において、図1〜図6に示すものと同等のものには同じ符号を付し、重複する説明を省略する。
Embodiment 3 FIG.
FIG. 7 is a longitudinal sectional view showing the rotating body 1 of the position detection device according to the third embodiment. In FIG. 7, the magnetic detection element and the arithmetic processing circuit are not shown. In FIG. 7, the same components as those shown in FIGS. 1 to 6 are denoted by the same reference numerals, and redundant description is omitted.

磁気トラック4の外周面に配置した集磁部材5と磁気透過部材10の外周面を、磁気透過材料により作製された保護部材11で覆っている。保護部材11は、磁気トラック4、集磁部材5および磁気透過部材10が、回転体1の回転時の遠心力により破断するのを防ぎ、かつ、外部環境により破損するのを防ぐ目的で設置する。   The outer peripheral surfaces of the magnetic flux collecting member 5 and the magnetic transmission member 10 arranged on the outer peripheral surface of the magnetic track 4 are covered with a protective member 11 made of a magnetic transmission material. The protective member 11 is installed for the purpose of preventing the magnetic track 4, the magnetic flux collecting member 5 and the magnetic transmission member 10 from being broken by the centrifugal force during the rotation of the rotating body 1 and from being damaged by the external environment. .

保護部材11は、例えば、集磁部材5および磁気透過部材10の外周面に樹脂材料を塗布して固化させることや、非磁性金属製の円筒をはめ込むこと等によって形成される。保護部材11は、回転体1の外周部の磁界分布に変化を与えずに、磁気トラック4、集磁部材5および磁気透過部材10を保護する。なお、保護部材11は、回転体1の外周面のみを覆うのではなく、回転体1(基台3)の上面および下面を覆うようにしてもよい。   The protection member 11 is formed, for example, by applying a resin material to the outer peripheral surfaces of the magnetic flux collecting member 5 and the magnetic transmission member 10 and solidifying it, or by fitting a nonmagnetic metal cylinder. The protection member 11 protects the magnetic track 4, the magnetic flux collecting member 5, and the magnetic transmission member 10 without changing the magnetic field distribution on the outer peripheral portion of the rotating body 1. In addition, the protection member 11 may cover not only the outer peripheral surface of the rotating body 1 but also the upper surface and the lower surface of the rotating body 1 (base 3).

保護部材11の設置によって回転体1に質量のアンバランスが生じないように、保護部材11は、全周に亘って質量分布が均一となるように設置する。   The protection member 11 is installed so that the mass distribution is uniform over the entire circumference so that mass unbalance does not occur in the rotating body 1 due to the installation of the protection member 11.

また、質量バランスを微調整する必要がある場合は、基台3の一部質量を除去した質量除去部12、または、基台3に質量を付加した質量付加部13を設け、回転体1の質量バランスを微調整することも可能である。   Further, when it is necessary to finely adjust the mass balance, a mass removing unit 12 that removes a part of the mass of the base 3 or a mass adding unit 13 that adds mass to the base 3 is provided. It is also possible to finely adjust the mass balance.

以上に説明した実施の形態3では、保護部材11の設置により、回転体1が保護されるので、外部環境に影響されずに長期間に亘って高精度に位置検出を行なうことができる位置検出装置が得られる。   In the third embodiment described above, since the rotating body 1 is protected by the installation of the protection member 11, the position detection can be performed with high accuracy over a long period of time without being affected by the external environment. A device is obtained.

なお、実施の形態1〜3は、磁気検出素子6に対して回転体1が回転し、その回転角度位置を検出する回転位置検出装置を示したが、位置検出装置としては、直線的に変位する動体と、該動体上に配置され、長さ方向に所定のピッチで、隣接する磁極が互いに同じ磁極となるように、一様な幅と強度でNS着磁された平板状の磁気トラックと、該磁気トラックの一部を覆うように配置され、該磁気トラックの長さ方向位置によって幅の異なる帯状の集磁部材と、前記磁気トラックの面に対向するように設置され、近傍の磁界強度に感応して磁気強度信号を出力する磁気検出素子と、を備え、前記動体の変位位置を検出するようにしたリニア位置検出装置であってもよい。   In the first to third embodiments, the rotation position detection device that rotates the rotating body 1 relative to the magnetic detection element 6 and detects the rotation angle position is shown. However, the position detection device is linearly displaced. And a flat magnetic track arranged on the moving body and NS-magnetized with uniform width and strength so that adjacent magnetic poles are the same magnetic pole with a predetermined pitch in the length direction, A magnetic flux collecting member which is disposed so as to cover a part of the magnetic track and has a width different depending on the position in the length direction of the magnetic track, and is disposed so as to face the surface of the magnetic track. And a magnetic detection element that outputs a magnetic intensity signal in response to the linear position detection device that detects the displacement position of the moving body.

上記のように構成したリニア位置検出装置では、磁気トラックを、長さ方向に所定のピッチで、隣接する磁極が互いに同じ磁極となるように、一様な幅と強度でNS着磁し、NS着磁後の磁気トラックに、磁気トラックの長さ方向位置によって幅を異ならせた帯状の集磁部材で磁気トラックの幅方向の一部を覆ったので、磁気トラックの長さ方向位置によって発生磁界強度を精密に変化させる磁気トラックを容易に製作することができる。   In the linear position detection apparatus configured as described above, the magnetic track is NS magnetized with a uniform width and strength so that adjacent magnetic poles have the same magnetic pole at a predetermined pitch in the length direction, and NS Since a part of the magnetic track in the width direction is covered with a band-shaped magnetic flux collecting member whose width varies depending on the position in the length direction of the magnetic track, the magnetic field generated by the position in the length direction of the magnetic track is covered. Magnetic tracks that change the strength precisely can be easily manufactured.

また、集磁部材の形状を変えることにより、磁気トラックのNS着磁のパターンを変えずに所望の波形信号を得ることができる。   Further, by changing the shape of the magnetic flux collecting member, a desired waveform signal can be obtained without changing the NS magnetization pattern of the magnetic track.

また、磁気トラックの長さ方向位置によって発生磁界強度を精密に変化させる磁気トラックを有する動体を容易に製作することができ、位置検出精度が高く製造コストの低いリニア位置検出装置を得ることができるという効果を奏する。   Further, it is possible to easily manufacture a moving body having a magnetic track that precisely changes the generated magnetic field intensity depending on the position in the length direction of the magnetic track, and to obtain a linear position detection device with high position detection accuracy and low manufacturing cost. There is an effect.

以上のように、本発明にかかる位置検出装置は、容易に低コストで製作することのできる高精度な位置検出装置として、従来の位置検出装置に換えて利用することができる。   As described above, the position detection device according to the present invention can be used in place of a conventional position detection device as a highly accurate position detection device that can be easily manufactured at low cost.

本発明の実施の形態1の位置検出装置を示す斜視図である。It is a perspective view which shows the position detection apparatus of Embodiment 1 of this invention. 磁気トラックおよび強磁性体膜を平面に展開して示す展開図である。FIG. 4 is a development view showing a magnetic track and a ferromagnetic film developed in a plane. 回転体の上面図である。It is a top view of a rotary body. 回転体の縦断面図である。It is a longitudinal cross-sectional view of a rotary body. 本発明の実施の形態2の位置検出装置を示す斜視図である。It is a perspective view which shows the position detection apparatus of Embodiment 2 of this invention. 回転体の縦断面図である。It is a longitudinal cross-sectional view of a rotary body. 本発明の実施の形態3の磁気検出装置の回転体を示す縦断面図である。It is a longitudinal cross-sectional view which shows the rotary body of the magnetic detection apparatus of Embodiment 3 of this invention.

符号の説明Explanation of symbols

1 回転体
2 回転軸
3 基台
4 磁気トラック
5 強磁性体膜(集磁部材)
6 磁気検出素子(磁気抵抗効果素子)
7 演算処理回路
8 発生磁束
10 非磁性部材(磁気透過部材)
11 保護部材
12 質量除去部
13 質量付加部
1 Rotating body 2 Rotating shaft 3 Base 4 Magnetic track 5 Ferromagnetic film (magnetic collecting member)
6 Magnetic sensing element (magnetoresistance effect element)
7 Arithmetic processing circuit 8 Generated magnetic flux 10 Non-magnetic member (magnetic transmission member)
11 Protection member 12 Mass removal part 13 Mass addition part

Claims (5)

回転軸および該回転軸に支持された円柱状又は円筒状の基台を有する回転体と、
該回転体の基台の円周面上に配置され、周方向に所定のピッチで、隣接する磁極が互いに同じ磁極となるように、一様な幅と強度でNS着磁された円筒状の磁気トラックと、
該磁気トラックの幅方向の一部を覆うように配置され、該磁気トラックの周方向位置によって幅の異なるリング状の強磁性体膜から成る集磁部材と、
前記磁気トラックの円周面に対向するように設置され、近傍の磁界強度に感応して磁気強度信号を出力する磁気検出素子と、
を備え、前記回転体の回転角度位置を検出することを特徴とする位置検出装置。
A rotating body having a rotating shaft and a columnar or cylindrical base supported by the rotating shaft;
A cylindrical shape which is arranged on the circumferential surface of the base of the rotating body and is NS magnetized with a uniform width and strength so that adjacent magnetic poles are the same magnetic pole at a predetermined pitch in the circumferential direction. Magnetic track,
A magnetic flux collecting member that is arranged so as to cover a part in the width direction of the magnetic track, and is formed of a ring-shaped ferromagnetic film having a different width depending on a circumferential position of the magnetic track;
A magnetic detecting element that is installed so as to face the circumferential surface of the magnetic track and outputs a magnetic strength signal in response to a magnetic field strength in the vicinity;
A position detecting device for detecting a rotation angle position of the rotating body.
前記強磁性体膜が、強磁性特性を有する液体を前記磁気トラックに塗布し固化させることにより形成されていることを特徴とする請求項に記載の位置検出装置。 The position detecting device according to claim 1 , wherein the ferromagnetic film is formed by applying a liquid having ferromagnetic characteristics to the magnetic track and solidifying the magnetic track. 前記磁気トラックの前記集磁部材で覆われていない部分に、前記回転体の質量バランスをとるための磁気透過部材を設置したことを特徴とする請求項1又は2に記載の位置検出装置。 Wherein the collector is not covered with the magnetic member portion of the magnetic track, the position detecting device according to claim 1 or 2, characterized in that it has established a magnetically permeable member for establishing mass balance of the rotating body. 前記集磁部材および磁気透過部材の外周面を、磁気を透過する保護部材で覆ったことを特徴とする請求項に記載の位置検出装置。 The position detection device according to claim 3 , wherein outer peripheral surfaces of the magnetic flux collecting member and the magnetic transmission member are covered with a protective member that transmits magnetism. 直線的に変位する動体と、
該動体上に配置され、長さ方向に所定のピッチで、隣接する磁極が互いに同じ磁極となるように、一様な幅と強度でNS着磁された平板状の磁気トラックと、
該磁気トラックの幅方向の一部を覆うように配置され、該磁気トラックの長さ方向位置によって幅の異なる帯状の強磁性体膜から成る集磁部材と、
前記磁気トラックの面に対向するように設置され、近傍の磁界強度に感応して磁気強度信号を出力する磁気検出素子と、
を備え、前記動体の変位位置を検出することを特徴とする位置検出装置。
A moving body that is linearly displaced;
A flat magnetic track disposed on the moving body and NS-magnetized with a uniform width and strength so that adjacent magnetic poles are the same magnetic pole at a predetermined pitch in the length direction;
A magnetic flux collecting member that is arranged so as to cover a part in the width direction of the magnetic track, and is formed of a strip-shaped ferromagnetic film having a different width depending on the position in the length direction of the magnetic track;
A magnetic detection element installed to face the surface of the magnetic track, and outputs a magnetic intensity signal in response to a magnetic field intensity in the vicinity;
And a position detecting device for detecting a displacement position of the moving body.
JP2005027755A 2005-02-03 2005-02-03 Position detection device Expired - Fee Related JP4912595B2 (en)

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