JP4902098B2 - Transport method of superconducting bulk magnet - Google Patents

Description

  In the present invention, when a superconductor is magnetized and used as a superconducting bulk magnet, the supplier of the superconducting bulk magnet provides magnetization and transport services, and the user can use the necessary magnetic field of the superconducting bulk magnet. The present invention relates to a method for transporting a superconducting bulk magnet.

  In recent years, a bulk (bulk) superconductor called a molten bulk solidified after melting has been developed. The melted bulk synthesized with appropriate structure control can be obtained by holding a strong magnetic field of T (tesla) class with a size of several centimeters once it is magnetized by a method such as cooling in a magnetic field. A magnet formed by magnetizing a superconductor is called a superconducting bulk magnet. A superconducting bulk magnet has recently been studied for various applications as a new type of magnet, which is different from a conventional superconducting magnet having a wire as a coil.

Patent Document 1 discloses an emergency water purification system in which a superconducting magnetic separation device that generates purified water by supplying a flocculant and magnetic powder to raw water during an earthquake is mounted on a vehicle. Further, Patent Document 2 discloses a mobile magnetic resonance imaging apparatus in which a solar cell that supplies electric power of a temperature control device that makes a magnetic field generator constant temperature is mounted on a vehicle.
FIG. 1 of JP 2000-51866 A FIG. 1 of Japanese Patent Laid-Open No. 6-237911

  The above publication technique is not a technique related to magnetization of a superconductor. The above-described superconducting bulk magnet is characterized by being able to easily use a strong magnetic field close to that of a superconducting magnet although it is very compact. However, there are various restrictions when using a superconducting bulk magnet as a magnet. First, the superconducting bulk magnet must always be kept at a temperature sufficiently lower than the magnetized temperature in order to prevent the attenuation of the magnetic field and maintain a stable generated magnetic field strength. This can be solved by using a refrigerator as long as the power is turned on and the operation is continued. However, since it is necessary to maintain the temperature immediately after magnetization, in order to satisfy this condition, there is no choice but to prepare a magnetizing device at the place where the user using the superconducting bulk magnet is used.

  Furthermore, there are problems with this magnetization method and apparatus. That is, the superconducting bulk magnet is magnetized by holding the applied magnetic field as it is. Therefore, in order to generate a strong magnetic field, it is necessary to apply a magnetic field of at least more than that. The method and apparatus capable of generating a strong magnetic field of T (Tesla) class are limited. One is a pulse magnetization method in which a strong magnetic field is generated by energizing a coil with a capacitor discharge current in a short time. In this method, the apparatus price, size, etc. are not so large with respect to the magnetic field intensity that can be generated, and superconducting bulk magnets can be magnetized in situ by incorporating a coil in the apparatus. However, there is a problem that the intensity of the magnetic field that can be magnetized is limited due to heat generation inside the superconducting bulk magnet that occurs in the magnetization process.

  As another magnetization method, there is a cooling method in a magnetic field using a superconducting magnet. In this method, the superconducting bulk magnet can be magnetized to the original performance of the material, but the apparatus is large and expensive, and a large installation area is required because measures against leakage magnetic field are required.

  The superconducting bulk magnet described above is characterized by the ability to stably generate a strong magnetic field locally, and is generally used for applications that change the magnetic field strength, applications that require frequent magnetic field generation and erasure. Is not very suitable. Because of this feature, superconducting bulk magnets that utilize cooling by a refrigerator are almost always used while retaining the magnetic field for a considerable period of time, such as half a year to several years, as it is once magnetized.

  Due to such usage characteristics, it has been difficult for a user who uses a superconducting bulk magnet to prepare a magnetizing device individually at the user's location, even from an economic point of view. Therefore, the fact that the superconducting bulk magnet has a compact strong magnetic field is practically limited only to those who have some means of magnetizing the superconducting bulk magnet.

  In addition, a very large stress is applied to the inside of the superconducting bulk magnet during the magnetization process, and in some cases, the superconducting bulk magnet may be destroyed. Users cannot say enough about these phenomena, and users who want to use the magnetic field of superconducting bulk magnets do not have enough experience and know-how to purchase expensive superconducting bulk materials. There is a problem that the superconducting bulk magnet is damaged during the process, or that sufficient magnetization is not possible.

  On the other hand, various apparatuses using this superconducting bulk magnet have been confirmed to have a remarkable effect such as a sputtering apparatus, and there is an increasing need for users who want to use the apparatus immediately. In order to solve the above problems and make it possible to use the equipment that makes use of the superior properties of superconducting bulk magnets widely and generally, the superconducting bulk magnets can be magnetized and transported as needed. The key is whether it can be supplied so that it can be used.

  The present invention has been made in view of the above-described circumstances, and a user who uses a superconducting bulk magnet does not have an expensive system such as a magnetizing apparatus, and cares about know-how about the magnetizing method. It is an object of the present invention to provide a method of transporting a superconducting bulk magnet necessary for constructing a system that can receive a supply of a superconducting bulk magnet in a magnetized state.

(1) A method for transporting a superconducting bulk magnet according to claim 1 is a method of transporting a superconducting bulk magnet that is disposed in a vacuum vessel and that becomes a superconducting bulk magnet that is cooled to a superconducting transition temperature and emits a magnetic field to the outside. A movable cooling device that cools the superconductor by receiving power and a movable auxiliary power source that can supply power for a certain period of time are prepared, and a movable movable device that is equipped with the superconductor, cooling device, and auxiliary power source. Preparing a cart,
Magnetizing the superconductor to form a superconducting bulk magnet; and
A superconducting bulk magnet, a cooling device, and an auxiliary power source are integrated into a movable carriage, and power is supplied from the auxiliary power source to the cooling device to keep the cooling device running. The inside of the vacuum vessel is kept heat-insulated in a sealed state, and the carrying process of carrying the inside of the building freely while maintaining the state where the superconducting bulk magnet generates a magnetic field is performed in order. .

  According to the inventive method of claim 1, after magnetizing the superconductor to form a superconducting bulk body, power is supplied from the auxiliary power source on the movable carriage to the cooling apparatus on the movable carriage to operate the cooling apparatus. The superconducting bulk magnet on the movable carriage is cooled, and the superconducting bulk magnet on the movable carriage is transported together with the cooling device and the auxiliary power source in a state where the magnetic field of the superconducting bulk magnet is generated.

  As described above, according to the inventive method of the first aspect, the superconducting bulk magnet, the cooling device, and the auxiliary power source are integrally mounted on the movable carriage, and power is supplied from the auxiliary power source to the cooling device to operate the cooling device. By continuing, the superconducting bulk magnet is transported with the magnetic field generated. In addition, while continuing to operate the cooling device by supplying power from the auxiliary power supply to the cooling device, without evacuating the vacuum vessel in which the superconducting bulk magnet is disposed, Keep insulation in the vacuum vessel. Thus, according to the method of the present invention according to claim 1, the movable carriage can be freely moved in the building without being evacuated inside the vacuum vessel in which the superconducting bulk magnet is disposed, and is mounted on the movable carriage. A superconducting bulk magnet, a cooling device, and an auxiliary power source formed of superconductors can be freely transported in the building.

(2) A method for transporting a superconducting bulk magnet according to claim 2 is provided in a superconducting bulk magnet which is disposed in a vacuum vessel and is cooled below the superconducting transition temperature and generates a magnetic field to the outside, and is supplied with electric power. Preparing a cooling device for cooling the superconductor by this, and an auxiliary power source capable of supplying power for a certain period of time,
Magnetizing the superconductor to form a superconducting bulk magnet; and
The superconducting bulk magnet generates a magnetic field while keeping the insulation inside the vacuum vessel sealed without evacuating the inside of the vacuum vessel, and supplying power from the auxiliary power source to the cooling device and operating the cooling device. In this state, a superconducting bulk magnet, a cooling device, and an auxiliary power source are integrated, and a transporting step of transporting the inside of the building freely with a movable carriage is performed in order.

  As described above, according to the method of the invention according to claim 2, the superconducting bulk magnet and the cooling device are cooled in a state where the superconducting bulk magnet generates a magnetic field while supplying the electric power from the auxiliary power source to the cooling device and operating the cooling device. Transport equipment and auxiliary power together. In this way, the superconducting bulk magnet, the cooling device, and the auxiliary power source can be collectively transported by a movable carriage. Thus, according to the invention method of claim 2, the superconducting bulk magnet, the cooling device, and the auxiliary power source formed of the superconductor are integrated without evacuating the vacuum container in which the superconducting bulk magnet is disposed. Can be freely transported in the building with a movable carriage.

  (1) According to the method of the present invention, a superconducting bulk magnet, a cooling device, and an auxiliary power source are integrally mounted on a movable carriage, and a cooling device mounted on the movable carriage together with the superconducting bulk magnet is used during transportation. Then, by supplying electric power to the cooling device and continuing to operate the cooling device, the superconducting bulk magnet is transported while maintaining a state where a magnetic field is generated. Here, what is necessary for cooling the superconducting bulk magnet is electric power for operating the cooling device. Since the auxiliary power source that can supply power to the cooling device is combined with the superconducting bulk magnet and the cooling device in the movable carriage, it is mounted on the movable carriage even when the commercial power source and the cooling device are separated from the transportation source and destination. The cooling device can be powered for a certain time by the auxiliary power source. By continuing to operate the cooling device, the superconducting bulk magnet can be transported while maintaining a state where a magnetic field is generated.

  Therefore, the temperature of the superconducting bulk magnet mounted on the movable carriage can be kept sufficiently lower than the temperature at the time of magnetization without stopping the cooling device. For this reason, it is possible to transport the superconducting bulk magnet by changing the power supply source of the cooling device or disconnecting it from the commercial power supply while suppressing the influence on the trapped magnetic field of the superconducting bulk magnet.

  Furthermore, according to the method according to the present invention, the superconductor is magnetized to form a superconducting bulk magnet, which eliminates the need for a large number of users to prepare a magnetizing device only for a magnetizing operation that is less frequently used. The Moreover, since superconducting bulk magnets can be provided to a large number of users, cost reduction can be expected, and it is expected that superconducting bulk magnets can be provided to destinations at a price that is easier to use.

  Furthermore, according to the method of the present invention, the heat insulation in the vacuum container is maintained in a state where the inside of the vacuum container is sealed without evacuating the inside of the vacuum container. For this reason, the cryogenic state in the vacuum vessel in which the superconducting bulk magnet is disposed is maintained.

  It is preferable to attach the magnetic field shielding member that shields the magnetic field generated from the superconducting bulk magnet to the superconducting bulk magnet or the vacuum container that houses the superconducting bulk magnet. The magnetic field shielding member is a cover member that covers the superconductor so that an object cannot approach the magnetic pole of the superconducting bulk magnet within a certain distance, or a yoke that forms a magnetic circuit that suppresses the leakage of the magnetic field of the superconductor to the outside. A material is preferred. It is preferable that the cover member and the yoke material are detachable from the vacuum vessel that accommodates the superconducting bulk magnet. The cover member can be formed of a nonmagnetic material such as resin or rubber, and can be, for example, a foam. The yoke material can be formed of a material having high magnetic permeability, such as iron-cobalt-vanadium (permendur), pure iron, silicon steel plate, iron-silicon-aluminum (Sendust), or the like. Alternatively, the yoke material can be formed of a permanent magnet material (for example, neodymium-iron-boron system, samarium-cobalt system).

  A cooling device can be set as the structure which has the vacuum vessel which accommodates a superconducting bulk magnet, and the refrigerator which cools a vacuum vessel to low temperature. In this case, the superconducting bulk magnet is cooled in the vacuum container of the refrigerator, and the vacuum container is not evacuated during transportation, and the vacuum container is sealed and transported. The superconducting bulk magnet can be transported along with the refrigerator while maintaining heat insulation.

  The refrigerator preferably has an air-cooled compressor. Each of the superconducting bulk magnet, the cooling device, and the auxiliary power source preferably has a caster or the like and is configured to be easily moved. Furthermore, by making the operating conditions of the cooling device as low as possible below 60K, it is possible to disconnect auxiliary equipment such as an exhaust device during transportation. The vacuum container can function as a heat insulating container having heat insulation properties by maintaining the chamber in a high vacuum state.

  The auxiliary power supply can supply power without receiving energy supply from outside for a certain period of time. The auxiliary power source is preferably integrated with all or part of the cooling device and is capable of moving independently. If it does in this way, the movement in a building will become very easy, and it can also be easily moved to another floor using an elevator etc. In order to be able to move independently, it is preferable that the auxiliary power source has a traveling wheel, and it is preferable to mount an operating motor for self-propelling. It is also preferable to integrate the auxiliary power source and the compressor.

  Embodiments of the present invention will be described below with reference to the drawings.

Example 1
FIG. 1 shows a first embodiment. The present embodiment is an example in which the present invention is applied to a superconducting bulk magnet mounted on a magnetic field utilization apparatus such as a sputtering apparatus for film formation. Before using a superconducting bulk magnet in a device such as a sputtering device, preparation of the superconducting bulk magnet, magnetization of the superconducting bulk magnet, confirmation of the generated magnetic field, transportation of the superconducting bulk magnet, sputtering using the superconducting bulk magnet in the user There are various processes such as assembling to the mounting device. This will be explained step by step.

  As shown in FIG. 1, a movable movable carriage 1 having traveling wheels 1x includes a superconducting bulk magnet 3 (Sm-Ba-Cu-O system, for example, a diameter of 60 mm) formed of a superconductor 2, a superconducting bulk magnet. A refrigerator 6 as a cooling device for cooling 3, a jack 4 as a lift for raising and lowering the superconducting bulk magnet 3, and an uninterruptible power supply 5 as an auxiliary power supply for supplying power to the refrigerator 6 are mounted. . In addition, the thing before magnetization is called the superconductor 2, and the thing which magnetized the superconductor 2 is called the superconducting bulk magnet 3.

  The refrigerator 6 includes a compressor 8 that compresses a refrigerant (generally helium) to obtain a low temperature, a refrigeration unit 7 for generating refrigeration, and a cold part that is cooled by the refrigeration unit 7 and has a low temperature. It has a certain cold head 9 and a vacuum container 11 that can function as a heat insulating container that forms a vacuum heat insulating chamber 10 that houses the cold head 9. These elements are mounted on the movable carriage 1. The compressor 8 is an air-cooled type, and unlike the water-cooled type, it does not require a water source and a water pump, and can be made compact in size, and is suitable for transportation, in-vehicle use, and the like. The compressor 8 is an air-cooled compressor operating at 100 V AC and rated at 800 W.

  The vacuum vessel 11 protrudes upward from the installation surface 1 a of the movable carriage 1. The cold head 9 holds the superconducting bulk magnet 3 and cools it, and is held in the vacuum heat insulating chamber 10 of the vacuum vessel 11 together with the superconducting bulk magnet 3. Although not shown, a temperature sensor and a heater were attached to the cold head 9 and connected to an external temperature controller. As a result, the temperature can be adjusted and maintained at a desired temperature between the minimum temperature reached by the freezing unit 7 and room temperature. Further, after the superconducting bulk magnet 3 is magnetized, the temperature controller can be disconnected from the freezing section 7 while the superconducting bulk magnet 3 is cooled to the lowest temperature and the magnetic field is maintained. A power line 15 for supplying electric power is connected between the refrigeration unit 7 and the compressor 8, and two flexible refrigerant hoses serving as a forward path and a return path for the refrigerant (generally helium) are connected. 12 are connected. A refrigerant (helium) gas circulates in the refrigerant hose 12.

  The compressor 8 and the uninterruptible power supply 5 are connected by a second power supply line 13. The power supply to the compressor 8 can be performed from the uninterruptible power supply 5 (maximum output 1500 VA) through the second power supply line 13. The uninterruptible power supply 5 is a power supply that can supply electric power without being replenished with energy from the outside for a certain period of time, and has a plug 14 that can be connected to a commercial power outlet attached to a room of a transportation source and a transportation destination. It has a line 16. If the plug 14 of the uninterruptible power supply 5 is connected to the outlet of a commercial power source installed in the room of the transportation source or the transportation destination, the compressor 8 is operated by the commercial power source to operate the refrigerator 6, and the cold head 9 The low temperature of can be maintained. Further, when the plug 14 of the uninterruptible power supply 5 is not connected to a commercial power outlet attached to the room of the transportation source or destination, the uninterruptible power supply 5 operates the compressor 8 for a certain period of time to operate the refrigerator. 6 can be driven. In addition, the uninterruptible power supply 5 with a maximum output of 1500 VA allowed the compressor with power consumption of 800 W to be operated for 15 minutes.

  Now, according to the present embodiment, the superconductor 2 is attached to the vacuum vessel 11, connected, etc. in the state before the operation of the refrigerator 6, that is, at room temperature. Next, the magnetization process will be described. That is, while evacuating the vacuum container 11 of the refrigeration unit 7 with a transport source vacuum exhaust device (not shown here), the plug 14 is connected to the outlet of the commercial power source of the transport source, and the refrigerator 6 is operated by the commercial power source. Then, the bulk superconductor 2 is cooled to a low temperature. The superconductor 2 is a superconducting bulk magnet that emits a magnetic field to the outside by being cooled below the superconducting transition temperature and capturing the magnetic field. For the magnetization performed by capturing the magnetic field, a superconducting magnet 100 (see FIG. 1, having an outer diameter of 56 cm and a height of 67 cm) having a ring-shaped room temperature bore of 10 cm that is cooled by a refrigerator was used. The superconducting magnet 100 requires a water-cooled refrigerator for cooling the magnet body, and the total weight including auxiliary equipment such as an excitation power source is 500 kg or more. The superconducting magnet 100 has a very large leakage magnetic field when a magnetic field is generated, the installation location is limited, and the superconducting magnet 100 is usually not installed at the transportation destination. In this embodiment, a dedicated superconducting magnet 100 of a transportation source that satisfies the installation conditions is used. As a magnetization process, a general cooling method in a magnetic field is used. The procedure is to raise the vacuum vessel 11 containing the superconductor 2 by raising the jack 4 and inserting it into the room temperature bore of the ring-shaped superconducting magnet 100. Next, the refrigerator of the superconducting magnet 100 is operated, and the temperature of the superconductor 2 is maintained at 100 K which is equal to or higher than the superelectromagnetic transition temperature by the temperature controller, and in this state, the superconducting magnet 100 is excited to 6.5 T. Next, the temperature of the superconductor 2 is cooled to 42 K while the magnetic field of the superconducting magnet 100 is maintained at 6.5 T. In this case, since the plug 14 of the uninterruptible power supply 5 is connected to the outlet of the commercial power source of the transportation source, the compressor 8 is operated and the refrigerator 6 is operated by the commercial power source of the transportation source to cool the superconductor 2. .

  Next, the magnetic field of the superconducting magnet 100 is lowered to 0 while keeping the temperature of the superconductor 2 at 42K. Next, after the magnetic field of the superconducting magnet 100 becomes zero, the heater of the temperature controller is stopped, and the superconductor 2 is cooled to the lowest temperature of 34 K to suppress magnetic flux creep and stabilize the generated magnetic field. With the above procedure, the superconducting bulk magnet 3 having a strong magnetic field of about 4.6 T can be obtained on the magnetic field surface serving as a room temperature space. After magnetization, the jack 4 is lowered to lower the vacuum container 11 that accommodates the superconducting bulk magnet 3, and the superconducting bulk magnet 3 is detached from the bore of the ring-shaped superconducting magnet 100.

(Magnetic field distribution measurement, confirmation)
The superconducting bulk magnet 3 having the magnetic field generated by the magnetic poles magnetized as described above is evaluated using a dedicated three-dimensional magnetic field distribution measuring device. This apparatus can measure a magnetic field vector in a measurement space by scanning a sensor capable of simultaneously measuring each direction component of the magnetic field XYZ with an XYZ stage. The measurement result is analyzed, and it is confirmed that a magnetic field having a horizontal magnetic field of 1 T or more necessary for the sputtering apparatus is generated in a concentric and symmetrical distribution. This confirms that the superconducting bulk magnet 3 has the target magnetic field distribution before the superconducting bulk magnet 3 is transported.

(transport)
As described above, the superconducting bulk magnet 3 generating a desired magnetic field is transported from the transport source to the transport destination. The transport destination is a room that is far from the laboratory where the superconducting magnet 100 for magnetization is located (for example, 10 km or more away) and has a device such as a sputtering device. In this case, the movable carriage 1 on which the superconducting bulk magnet 3 is mounted is carried into a vehicle 18 (transport means, see FIG. 3) and is carried using the vehicle 18. The vehicle 18 (automobile) has an on-vehicle outlet 17 (AC, AC 100 V) as a power supply source. The in-vehicle outlet 17 has compatibility with respect to the voltage, electric capacity, frequency, and outlet shape with respect to the commercial power source of the transportation source and the commercial power source of the transportation destination. The main transportation procedures are magnetic field leakage prevention measures, movement of the superconducting bulk magnet 3 from the laboratory where the magnetizing device is located to the vehicle 18, transportation by the vehicle 18 with the superconducting bulk magnet 3 mounted thereon, It is assembling to a device such as a sputtering device.

  A very strong magnetic field is generated from the surface of the magnetic pole of the superconducting bulk magnet 3. For this reason, when an object of a magnetic material such as iron approaches, it is attracted to the superconducting bulk magnet 3 and sticks, and it is difficult to remove it from the superconducting bulk magnet 3. In addition, since a magnetic material such as iron jumps vigorously to the magnetic poles of the superconducting bulk magnet 3 with a strong force, consideration is required. Therefore, as shown in FIG. 2, nonmagnetic as a cover member made of a nonmagnetic material is used as a cover member so that an object of magnetic material does not approach the strong magnetic field around the magnetic field of the superconducting bulk magnet 3. The buffer material 20 is coaxially attached to the upper part of the vacuum vessel 11 so as to be detachable. The nonmagnetic cushioning material 20 is formed of a foamed material such as polystyrene foam in order to ensure weight reduction, buffering properties, and magnetic field shielding properties. The nonmagnetic buffer material 20 includes a ring-shaped side wall portion 21 that covers the upper side surface of the vacuum vessel 11 that accommodates the superconducting bulk magnet 3, and a ceiling wall portion 22 that covers the upper surface of the vacuum vessel 11 that accommodates the superconducting bulk magnet 3. And integrally. Since the outside of the nonmagnetic buffer material 20 is far from the superconducting bulk magnet 3, the magnetic field strength has no danger even when other magnetic materials approach.

  Further, as shown in FIG. 2, a yoke material 24 made of a soft magnetic material having a high magnetic permeability and having a container shape is coaxially and detachably attached on the nonmagnetic buffer material 20. The yoke material 24 includes a ring-shaped side wall 25 that covers the side surface of the superconducting bulk magnet 3 by covering the side surface of the nonmagnetic buffer material 20, and an upper surface of the superconducting bulk magnet 3 by covering the top surface of the nonmagnetic buffer material 20. And a ceiling wall portion 26 covering the wall. Thus, since the side surface and the upper part of the superconducting bulk magnet 3 are covered with the yoke material 24 via the nonmagnetic buffer material 20, a closed-loop magnetic circuit 30 that connects the superconducting bulk magnet 3 and the yoke material 24 is formed. Thus, the leakage of the magnetic field of the superconducting bulk magnet 3 is further suppressed. That is, the magnetic lines of force that emerge from the magnetic poles of the superconducting bulk magnet 3 form a closed-loop magnetic circuit 30 that passes through the yoke material 24, so that leakage of the magnetic field to the outside is suppressed. Thus, since the yoke material 24 is arranged outside the superconducting bulk magnet 3 and formed in the magnetic circuit 30, the range in which a strong magnetic field leaks is considerably narrower than when the yoke material 24 is not provided. As a result, the magnetic field generated at a distance away from the magnetic pole of the superconducting bulk magnet 3 rapidly decreases. As a result, the magnetic field leaking to the outside is suppressed, for example, the magnetic field leaking to the outside is set to 200 gauss or less, and an object of magnetic material such as iron jumps to the magnetic pole of the superconducting bulk magnet 3 with a strong force during transportation. suppress. Thereby, the safety | security at the time of conveyance can be improved.

  According to the present embodiment, as shown in FIG. 2, the container-shaped protection member 65 is detachably attached to the outside of the vacuum container 11 during transportation. The protective member 65 is made of a nonmagnetic material such as resin or rubber, has a side wall portion 66 and a ceiling wall portion 67 and surrounds the nonmagnetic cushioning material 20 and the yoke material 24. The protective member 65 further suppresses magnetic field leakage.

  When moving from the laboratory at the transportation source where the magnetizing device is installed to the vehicle 18, the plug 14 of the uninterruptible power supply 5 is disconnected from the commercial power outlet of the laboratory at the transportation source to transport the room and passage. . In this case, since the compressor 8 is disconnected from the outlet of the commercial power source of the transportation source, the compressor 8 is operated by the electric power supplied from the uninterruptible power supply 5, the refrigerator 6 is operated, and the superconducting bulk magnet 3 is cooled. . In this case, as the vehicle 18, a hybrid vehicle having an in-vehicle outlet 17 that can output a maximum of 1500 W in the vehicle interior is used. After the movable carriage 1 mounted with each element such as the superconducting bulk magnet 3 is placed in the vehicle interior of the vehicle 18, the plug 14 of the power line 16 of the uninterruptible power supply 5 is inserted into the vehicle-mounted outlet 17 in the vehicle interior of the vehicle 18. While the superconducting bulk magnet 3 is being transported by the vehicle 18, the compressor 8 of the refrigerator 6 is supplied with power from the in-vehicle outlet 17 of the vehicle 18 to cool the superconducting bulk magnet 3. The vehicle 18 is driven for a predetermined time (about 1 hour) and the vehicle 18 arrives at the destination. During transportation, the superconducting bulk magnet 3 is frozen while the vacuum vessel 11 is sealed and the heat insulation in the vacuum vessel 11 is maintained without evacuating the vacuum vessel 11 of the refrigerator 6. Carry with machine 6

  At the transportation destination, the plug 14 of the power line 16 of the uninterruptible power supply 5 is disconnected from the in-vehicle outlet 17 in the passenger compartment of the vehicle 18. Further, the movable carriage 1 on which the superconducting bulk magnet 3 and the like are mounted is transported from the vehicle 18 to the laboratory where the film forming sputtering apparatus is provided, as in the case where the movable carriage 1 is carried in. In this case, until the movable carriage 1 is moved from the vehicle 18 to the transport destination laboratory, the compressor 8 of the refrigerator 6 is operated by the electric power from the uninterruptible power supply 5, and the vacuum that accommodates the superconducting bulk magnet 3 is accommodated. The low temperature in the heat insulating chamber 10 is maintained. Then, with the protective member 65, the yoke material 24, and the nonmagnetic buffer material 20 removed from the vacuum container 11, the jack 4 is lifted to raise the vacuum container 11 that accommodates the superconductor 2, and the transport destination Installed in a magnetic field device such as a sputtering device. In this case, the plug 14 of the uninterruptible power supply 5 is connected to the outlet of the commercial power source of the laboratory at the transportation destination, the compressor 8 is operated by the electric power from the commercial power source, the refrigerator 6 is operated, and the superconducting bulk magnet 3 is cooled to a low temperature. To maintain.

  As described above, according to the present embodiment, the refrigerator 6 that functions as a cooling device is used, and what is necessary for the operation of the superconducting bulk magnet 3 is the electric power of the refrigerator 6. Since the uninterruptible power supply 5 which is an auxiliary power supply is combined, the refrigerator 6 is not stopped for a certain time by the uninterruptible power supply 5 even when the commercial power source of the transportation source and the refrigerator 6 are disconnected. The temperature of the superconducting bulk magnet 3 can be kept sufficiently lower than the temperature at the time of magnetization. For this reason, it is possible to change the power supply source of the refrigerator 6 or to transport the refrigerator 6 separated from the commercial power source while suppressing the influence on the trapped magnetic field of the superconducting bulk magnet 3.

  Furthermore, according to the present embodiment, since the superconductor 2 is magnetized at the transportation source to form the superconducting bulk magnet 3, it is necessary for many users to prepare a magnetizing device only for a magnetizing operation that is less frequently used. Is released from. In addition, since the superconducting bulk magnet 3 can be provided to a large number of users, the cost can be expected to be reduced, and it is expected that the superconducting bulk magnet can be provided at a price that is easier to use.

  According to the present embodiment, the superconducting bulk magnet 3 can be transported to a remote place by using the vehicle 18 as a transport means having a power supply source (vehicle outlet 17) such as a hybrid vehicle. This eliminates the need for users of the superconducting bulk magnet 3 to have an expensive magnetizing device on their own, and obtains the superconducting bulk magnet 3 from the manufacturer of the superconducting bulk magnet 3 while ensuring the desired magnetic field strength. Is also possible.

  As described above, the uninterruptible power supply 5 which is an auxiliary power supply can supply electric power without being replenished with energy from the outside for a certain period of time. If it does in this way, it will become very easy to move movable cart 1 carrying uninterruptible power supply 5, superconducting bulk magnet 3, etc. in a building, and it can also be easily moved to another floor using an elevator etc. it can.

(Example 2)
FIG. 4 shows a second embodiment. The second embodiment basically has the same configuration as that of the first embodiment, and basically has the same functions and effects. Parts having common functions are denoted by common reference numerals. Only the parts different from the first embodiment will be described below. As shown in FIG. 4, a movable carriage 1B having traveling wheels 1x includes a superconducting bulk magnet 3 (Sm system, for example, a diameter of 60 mm), a refrigeration unit 7 for generating cold with a cold head 9, and a superconducting bulk magnet 3. A liftable jack 4 is mounted as a lift that moves up and down. The refrigerator 6 is a vacuum that can function as a heat insulating container that houses the compressor 8 that compresses the refrigerant, the freezing unit 7, the cold head 9 that is a cold part cooled by the freezing unit 7, and the cold head 9. And a container 11. The cold head 9 is held in the vacuum heat insulating chamber 10 of the vacuum vessel 11 together with the superconducting bulk magnet 3. According to the present embodiment, the compressor 8 is provided integrally with the uninterruptible power supply 5 that is an auxiliary power supply that supplies power to the refrigeration unit 7. The integrated compressor 8 is separate from the movable carriage 1B, has traveling wheels 8x, and is movable. A power line 13 is connected between the refrigeration unit 7 and the compressor 8 for power supply, and a refrigerant hose 12 serving as a forward path and a return path for two flexible refrigerants (helium) for cooling. It is connected. Electric power is supplied to the compressor 8 of the refrigerator 6 from the uninterruptible power supply 5 (maximum output 1500 VA). The uninterruptible power supply 5 integrated with the compressor 8 can operate the refrigerator 6 for a predetermined time (up to 30 minutes). Then, in the state before the operation of the refrigerator 6, that is, at room temperature, the work of attaching the bulk superconductor 2 to the vacuum vessel 11, connection, etc. are performed. According to the present embodiment, since the uninterruptible power supply 5 is integrated with the compressor 8, the number of items to be transported is reduced, and an advantage of being easy to carry is obtained. Furthermore, since the compressor 8 integrated with the uninterruptible power supply 5 is advantageous for separating from the superconducting bulk magnet 3, the influence of the strong magnetic field of the superconducting bulk magnet 3 affects the uninterruptible power supply 5 and the compressor 8. You can avoid that. In addition, since only the superconductor 2 that generates a magnetic field (superconducting bulk magnet 3 after magnetization) can be handled separately, the magnetizing operation can be facilitated. Also, when using the superconductor 2, the degree of freedom in incorporating it into the apparatus is large and easy to use.

  In addition, according to the present embodiment, similarly to the first embodiment, at the transportation source, by raising the jack 4, the vacuum vessel 11 that accommodates the superconductor 2 is raised, and the ring-shaped superconducting magnet 100 is The superconducting bulk magnet 3 is magnetized by being inserted into the room temperature bore. After the superconducting bulk magnet 3 is magnetized, the jack 4 is moved downward to lower the vacuum container 11 that accommodates the superconducting bulk magnet 3 and is detached from the room temperature bore of the ring-shaped superconducting magnet 100. On the other hand, at the transport destination, the vacuum container 11 that accommodates the superconducting bulk magnet 3 is operated by raising the jack 4 with the protective member 65, the yoke material 24, and the nonmagnetic buffer material 20 removed from the vacuum container 11. The superconducting bulk magnet 3 is assembled to a device such as a sputtering device. As described above, the uninterruptible power supply 5 which is an auxiliary power supply can supply electric power without being replenished with energy from the outside for a predetermined time. If it does in this way, it will become very easy to move movable cart 1 carrying uninterruptible power supply 5, superconducting bulk magnet 3, etc. in a building, and it can also be easily moved to another floor using an elevator etc. it can.

Example 3
FIG. 5 shows a third embodiment. The third embodiment has basically the same configuration as that of the second embodiment, and basically has the same functions and effects. Parts having common functions are denoted by common reference numerals. Hereinafter, a description will be given centering on the difference from the second embodiment. According to the present embodiment, as shown in FIG. 5, the uninterruptible power supply 5 that is an auxiliary power supply that supplies power to the refrigeration unit 7 is separated from the air-cooled compressor 8. The uninterruptible power supply 5 has traveling wheels 5x and is movable. The compressor 8 has traveling wheels 8x and is movable.

  Also in the present embodiment, as in the first embodiment, the jack 4 is lifted and operated at the transportation source with the protective member 65, the yoke material 24, and the nonmagnetic buffer material 20 removed from the vacuum container 11. Thus, the vacuum vessel 11 that accommodates the superconductor 2 is raised and inserted into the room temperature bore of the ring-shaped superconducting magnet 100, and the superconducting bulk magnet 3 is magnetized in this state. After magnetization, the jack 4 is lowered to lower the vacuum vessel 11 that accommodates the superconductor 2 and is detached from the room temperature bore of the ring-shaped superconducting magnet 100, and in this state, the superconducting bulk magnet 3 is magnetized. I do. At the time of magnetization, since the plug 14 is connected to the outlet of the commercial power source in the room of the transportation source, the compressor 8 is operated by the commercial power source, the refrigeration equipment 6 is operated, and the superconducting bulk magnet 3 is cooled. . Further, at the transportation destination, the vacuum container 11 that accommodates the superconducting bulk magnet 3 is operated by raising the jack 4 with the protective member 65, the yoke material 24, and the nonmagnetic buffer material 20 removed from the vacuum container 11. Raised and assembled to a magnetic field utilization device such as a sputtering device. As described above, the uninterruptible power supply 5 which is an auxiliary power supply can supply electric power without being replenished with energy from the outside for a certain period of time. If it does in this way, it will become very easy to move movable cart 1 carrying uninterruptible power supply 5, superconducting bulk magnet 3, etc. in a building, and it can also be easily moved to another floor using an elevator etc. it can.

Example 4
FIG. 6 shows a fourth embodiment. The fourth embodiment has basically the same configuration as that of the second embodiment, and basically has the same functions and effects. Parts having common functions are denoted by common reference numerals. Hereinafter, the description will focus on the different parts. As shown in FIG. 6, the uninterruptible power supply 5, which is an auxiliary power supply that supplies power to the refrigeration unit 7, is separate from the air-cooled compressor 8. The uninterruptible power supply 5 has traveling wheels 5x and is movable. The compressor 8 has traveling wheels 8x and is movable. Further, a backup uninterruptible power supply 80 (second auxiliary power supply) connected to the uninterruptible power supply 5 is provided. The standby uninterruptible power supply 80 has traveling wheels 80x. When the vehicle 1 is stopped, such as when fuel is supplied, there is a possibility that electric power cannot be sufficiently supplied from the in-vehicle outlet 17 of the vehicle 18 to the compressor 8. Therefore, the uninterruptible power supply 5 is connected to the backup uninterruptible power supply 80, and the backup uninterruptible power supply 80 is interposed between the uninterruptible power supply 5 and the in-vehicle outlet 17. For this reason, even when the vehicle 18 stops for a long time, power can be supplied to the compressor 8 by the backup uninterruptible power supply 80, so that it is suitable for long-time transportation with a large number of times of refueling. By dividing the uninterruptible power supply into the standby uninterruptible power supply 80 and the uninterruptible power supply 5 in this way, the auxiliary power supply attached to the superconducting bulk magnet 3 side can be made the minimum necessary, and the user can assist more than necessary. There is no need to prepare a power supply. As described above, the uninterruptible power supply 5 which is an auxiliary power supply can supply electric power without being replenished with energy from the outside for a predetermined time. If it does in this way, it will become very easy to move movable cart 1 carrying uninterruptible power supply 5, superconducting bulk magnet 3, etc. in a building, and it can also be easily moved to another floor using an elevator etc. it can.

(Example 5)
FIG. 7 shows a fifth embodiment. The fifth embodiment has basically the same configuration as the first embodiment, and basically has the same function and effect. Parts having common functions are denoted by common reference numerals. Hereinafter, the description will focus on the different parts. As shown in FIG. 7, in this embodiment, the superconducting bulk magnet 3 is immersed in a liquid refrigerant 41 (generally liquid nitrogen, but not limited to this) in the storage container 40, and the superconducting bulk magnet is immersed. It is an example conveyed in the state which generated 3 magnetic fields. In this case, as shown in FIG. 7, the storage container 40 and the uninterruptible power supply 5 that can function as a heat insulating container having a heat insulating property containing the liquid refrigerant 41 are mounted on the movable carriage 1 together with the cooling device 43. The cooling device 43 mounted on the movable carriage 1 includes a refrigerator 6 having a refrigeration unit 7 that generates cold with the cold head 9, a storage container 40 having an upper surface opening 40 a for storing the liquid refrigerant 41, and a storage container 40. And a lid 44 having heat insulation for opening and closing the upper surface opening 40a. Cooling fins 46 are attached to the cold head 9 so as to be immersed in the liquid refrigerant 41. The cold head 9 can control the temperature of the liquid refrigerant 41 so that the liquid refrigerant 41 of the storage container 40 can be set to a predetermined temperature.

The take-out container 50 has a holding part 51 on which the superconducting bulk magnet 3 generating a magnetic field can be placed, and a handle part 52 that is gripped by a user or a robot, and is attached to the cooling fin 46 in the storage container 40. On the other hand, it is detachable. The take-out container 50 that accommodates the superconducting bulk magnet 3 is detachably immersed in the liquid refrigerant 41 of the storage container 40. Even when the extraction container 50 is immersed in the liquid refrigerant 41, the handle portion 52 is exposed from the liquid surface 41 d of the liquid refrigerant 41. The support material 53 is detachably disposed between the cooling fin 46 and the take-out container 50, whereby the take-out container 50 that accommodates the superconducting bulk magnet 3 is fixed and does not move in the horizontal direction during transportation. . In this case, the superconducting bulk magnet 3 is formed of, for example, the Sm—Ba—Cu—O-based superconductor 2 (Tc = 94K), but is not limited thereto.
When transporting, do as follows.
(1) The magnetized superconducting bulk magnet 3 is kept in the take-out container 50 together with the liquid refrigerant 41 (see FIG. 8). Usually, when the superconducting bulk magnet 3 is magnetized in the liquid refrigerant 41 using a superconducting magnet, such a state can be easily achieved. The position of superconducting bulk magnet 3 is fixed by positioning member 47. Specifically, a hole corresponding to the superconducting bulk magnet 3 is formed in the plate-shaped positioning member 47, and the superconductor 2 is fitted into this hole, so that the horizontal movement of the superconductor 2 is suppressed. Yes.
(2) A liquid refrigerant 41 (generally liquid nitrogen) is stored in the storage container 40 of the movable carriage 1 in advance. Then, the temperature of the refrigeration unit 7 is controlled to a temperature at which evaporation of the liquid refrigerant 41 is suppressed (generally 63 K or more and 77 K or less at atmospheric pressure).
(3) The extraction container 50 is immersed together with the superconducting bulk magnet 3 in the liquid refrigerant 41 stored in the storage container 40. In this case, the entire superconducting bulk magnet 3 is immersed in the liquid refrigerant 41. In this case, the support member 53 is attached between the cooling fin 46 and the outer peripheral portion of the extraction container 50, and the extraction container 50 that accommodates the superconducting bulk magnet 3 is fixed so as not to move. Further, the lid 44 is set in the upper surface opening 40 a of the storage container 40.
(4) The movable carriage 1 in this state is placed on a vehicle 18 with an in-vehicle outlet 17 (power supply source), the plug 14 is connected to the in-vehicle outlet 17, and is transported by the vehicle 18 to the destination of the transportation destination.
(5) When arriving at the destination, the movable carriage 1 carrying the superconducting bulk magnet 3 is carried out of the vehicle 18 in the reverse procedure. Further, the superconducting bulk magnet 3 of the movable carriage 1 is assembled to the transport destination apparatus by the reverse procedure.

  According to the present embodiment, as in the above-described embodiment, the superconducting bulk magnet 3 can be transported with the magnetic field generated. Furthermore, since the liquid refrigerant 41 is used to maintain the low temperature of the superconducting bulk magnet 3, the inside of the storage chamber 40c of the storage container 40 does not necessarily have to be maintained in a vacuum state or a high vacuum state. Easy to put in and out. Moreover, since the magnetic field shielding space for shielding the magnetic field of the superconducting bulk magnet 3 can be secured by the storage chamber 40c of the storage container 40, the influence of the magnetic field to the outside can be reduced.

  Further, as shown in FIG. 7, a float member formed on the liquid surface 41 d of the liquid refrigerant 41 of the storage container 40 with a material (resin foam or the like) having a specific gravity smaller than that of the liquid refrigerant 41 and having magnetic field shielding and heat insulation properties. It is also possible to float 85 and cover the liquid refrigerant 41 with the float member 85. In this case, it is possible to improve the cold insulation property for the liquid refrigerant 41 in which the superconducting bulk magnet 3 is immersed, and further, it is possible to suppress the swing of the liquid surface 41d of the liquid refrigerant 41 during transportation, and the superconducting bulk magnet 3 has a low temperature. It is advantageous for maintenance, and in addition, it is advantageous for suppressing leakage of the magnetic field of the superconducting bulk magnet 3. As described above, the uninterruptible power supply 5 which is an auxiliary power supply can supply electric power without being replenished with energy from the outside for a certain period of time. If it does in this way, it will become very easy to move movable cart 1 carrying uninterruptible power supply 5, superconducting bulk magnet 3, etc. in a building, and it can also be easily moved to another floor using an elevator etc. it can.

(Example 6)
FIG. 9 shows a sixth embodiment. The sixth embodiment has basically the same configuration as that of the fifth embodiment, and basically has the same functions and effects. Parts having common functions are denoted by common reference numerals. Hereinafter, the description will focus on the different parts. The present embodiment is another example in which the superconducting bulk magnet 3 is transported while being immersed in the liquid refrigerant 41 stored in the storage container 40 and generating a magnetic field. Differences from the fifth embodiment are as follows. That is, by changing the set temperature of the refrigerator 6, the temperature of the liquid refrigerant 41 in the storage container 40 is set to the freezing point or lower (if the liquid refrigerant 41 is liquid nitrogen, 63 K at atmospheric pressure), and the superconducting bulk magnet 3. The liquid refrigerant 41 in a state where the whole is immersed is frozen and solidified. As a result, since the liquid refrigerant 41 on the outer peripheral side and the upper surface side of the superconducting bulk magnet 3 is frozen and solidified, the fixing and protecting properties of the superconducting bulk magnet 3 can be improved, and the protecting properties of the superconducting bulk magnet 3 can be improved. Further, even when the movable carriage 1 vibrates during transportation, it is possible to prevent the liquid surface 41d of the liquid refrigerant 41 from swinging and to prevent the superconducting bulk magnet 3 from being exposed from the liquid surface 41d of the liquid refrigerant 41.

  Thereafter, the movable carriage 1 is placed on a vehicle 18 with an on-vehicle outlet 17 (power supply source) and transported to the destination. In this case, the plug 14 of the uninterruptible power supply 5 is connected to the in-vehicle outlet 17, the compressor 8 is operated by the electric power from the in-vehicle outlet 17, the refrigerator 6 is operated, and the low temperature is maintained. When the destination is reached, the temperature control setting of the refrigerator 6 is changed again to a temperature at which the refrigerant becomes liquid (in the case of liquid nitrogen, 63 to 77 K at atmospheric pressure), and the refrigerant is frozen and solidified. Return to the liquid. When the liquid medium 41 is thus obtained, the take-out container 50 that accommodates the superconducting bulk magnet 3 can be taken out from the storage container 40. In the same manner as in the seventh embodiment, the superconducting bulk magnet 3 generating a magnetic field is assembled to the transport destination apparatus.

  According to the present embodiment, since the liquid refrigerant 41 in which the superconducting bulk magnet 3 is immersed is frozen and transported, it is advantageous for fixing the superconducting bulk magnet 3 in the storage container 40, and the above-described support material 53, etc. Is no longer necessary. Furthermore, since the superconducting bulk magnet 3 magnetized at the temperature of the liquid refrigerant 41 is transported below the magnetizing temperature, magnetic flux creep (the magnetic field trapped by the superconductor 2 has a certain probability due to thermal energy). (Phenomenon in which the trapped magnetic field decreases with time). Therefore, the superconducting bulk magnet 3 can be transported while suppressing the deterioration of the performance of the superconducting bulk magnet 3.

  Further, as an example where a similar effect can be expected, when the superconducting transition temperature Tc of the superconductor 2 to be the superconducting bulk magnet 3 is higher than the boiling point of the refrigerant, it can be transported in the same manner. Possible refrigerants are as follows. In the case of the Sm—Ba—Cu—O-based superconductor 2 (Tc = 94K), examples of the refrigerant that can be used in principle include neon, nitrogen, air, argon, and oxygen. Depending on the material of the superconductor 2, krypton or xenon can be used. Also in the present embodiment, the float member 85 formed of a material (foam or the like) having a small specific gravity and a magnetic field shielding property and heat insulation property can be suspended in the refrigerant 41 to be frozen in the storage container 40. As described above, the uninterruptible power supply 5 which is an auxiliary power supply can supply electric power without being replenished with energy from the outside for a certain period of time. If it does in this way, it will become very easy to move movable cart 1 carrying uninterruptible power supply 5, superconducting bulk magnet 3, etc. in a building, and it can also be easily moved to another floor using an elevator etc. it can.

(Example 7)
FIG. 10 shows a seventh embodiment. The seventh embodiment has basically the same configuration as that of the sixth embodiment, and basically has the same functions and effects. Parts having common functions are denoted by common reference numerals. Hereinafter, the description will focus on the different parts. As shown in FIG. 10, the cold head 9 of the refrigerator 6 is not immersed in the liquid refrigerant 41 of the storage container 40, and is held together with the refrigeration unit 7 on the lid 44 that opens and closes the upper surface opening 40 a of the storage container 40. And disposed above the liquid level 41 d of the liquid refrigerant 41 stored in the storage container 40. The cold head 9 has cooling fins 9c. The cold head 9 does not directly cool the liquid refrigerant 41 in the storage container 40, but cools the gaseous refrigerant above the liquid surface 41d in the storage container 40 evaporated from the liquid refrigerant 41 in the storage container 40. Reliquefaction (cooled below the boiling point), dropletized and dropped as liquid refrigerant 41f and returned to the storage container 40, the decrease due to evaporation of the liquid refrigerant 41 is suppressed. Thus, since the decrease by evaporation of the liquid refrigerant 41 is suppressed, it is possible to maintain the superconducting bulk magnet 3 being immersed in the liquid refrigerant 41 in the storage container 40 for a long time. Also in the present embodiment, the float member 85 formed of a material (foam or the like) having a small specific gravity and having a magnetic field shielding property and a heat insulating property can be suspended in the refrigerant 41 to be frozen. As described above, the uninterruptible power supply 5 which is an auxiliary power supply can supply electric power without being replenished with energy from the outside for a predetermined time. If it does in this way, it will become very easy to move movable cart 1 carrying uninterruptible power supply 5, superconducting bulk magnet 3, etc. in a building, and it can also be easily moved to another floor using an elevator etc. it can.

(Example 8)
FIG. 11 shows an eighth embodiment. The eighth embodiment has basically the same configuration as that of the first embodiment, and basically has the same functions and effects. Parts having common functions are denoted by common reference numerals. Hereinafter, the description will focus on the different parts. As shown in FIG. 11, the superconducting bulk magnet 3 is held on the upper surface of the cold head 9 accommodated in the vacuum vessel 11 via a first yoke member 61 as a magnetic field shielding member. Further, a second yoke member 62 as a magnetic field shielding member is held on the outer periphery of the upper portion of the vacuum vessel 11. The first yoke material 61 has a disc shape, and faces the lower surface of the superconducting bulk magnet 3, and the second yoke material 62 has a ring shape, and the side surfaces of the superconducting bulk magnet 3 and the side surfaces of the first yoke material 61. Face to face. For this reason, a closed loop magnetic circuit 63 that passes through the magnetic poles of the superconducting bulk magnet 3, the first yoke material 61, and the second yoke material 62 is formed. Thereby, leakage of the magnetic field is suppressed, and an object made of a magnetic material such as iron is prevented from jumping to the magnetic pole of the superconducting bulk magnet 3 during transportation. Furthermore, a container-shaped protective member 65 is detachably attached to the outside of the vacuum container 11. The protection member 65 is made of resin or the like and has a side wall portion 66 and a ceiling wall portion 67. The protective member 65 further suppresses magnetic field leakage.

  When the superconducting bulk magnet 3 is assembled to the transport destination sputtering apparatus, the first yoke material 61 and the second yoke material 62 remain attached. Therefore, when the film forming process is performed by the sputtering apparatus in which the superconducting bulk magnet 3 is assembled, as shown in FIG. 11, a closed loop shape that passes through the magnetic poles of the superconducting bulk magnet 3, the first yoke material 61, and the second yoke material 62 is used. A magnetic circuit 63 is formed, which is advantageous for confining plasma, and can improve the sputtering film forming process.

  (Others) According to the above-described embodiment, the superconducting bulk magnet 3 is Sm-Ba-Cu-O-based, but is not limited to this, Y-Ba-Cu-O-based, La-Ba-Cu--. O-based, La-Sr-Cu-O-based, Bi-Sr-Ca-Cu-O-based, and the like can also be used. According to the first embodiment described above, as shown in FIG. 2, both the nonmagnetic buffer material 20 and the yoke material 24 are provided in the vacuum container 11, but not limited to this, the nonmagnetic buffer material 20 and the yoke are provided. Only one of the materials 24 may be installed in the vacuum vessel 11. In addition, the present invention is not limited to the embodiments described above and shown in the drawings, and can be implemented with appropriate modifications as necessary.

The following technical idea can also be grasped from the above description.
(Supplementary Item 1) A superconducting bulk magnet that emits a magnetic field by cooling to a superconducting transition temperature and capturing a magnetic field and a liquid refrigerant that immerses the superconducting bulk magnet are prepared, and the superconducting bulk magnet is immersed in the liquid refrigerant. And transporting the superconducting bulk magnet covered with the liquid refrigerant in a state where the magnetic field of the superconducting bulk magnet is generated.
(Additional Item 2) A superconducting bulk magnet that generates a magnetic field by capturing the magnetic field after being cooled to a superconducting transition temperature and a liquid refrigerant that immerses the superconducting bulk magnet are prepared, and the superconducting bulk magnet is immersed in the liquid refrigerant. In addition, the superconducting bulk magnet is characterized by transporting the superconducting bulk magnet covered with the frozen and solidified refrigerant in a state where the liquid refrigerant immersed in the superconducting bulk magnet is frozen and solidified to generate a magnetic field of the superconducting bulk magnet. Transportation method. In this case, since the refrigerant covering the superconducting bulk magnet is frozen and solidified, the fixing property and protection of the superconducting bulk magnet are improved. Generally, the refrigerant is thawed at the transportation destination. In some cases, a superconducting bulk magnet may be used without thawing and with the refrigerant frozen.
(Additional Item 3) A method for transporting a superconducting bulk magnet according to Additional Item 1, 2, wherein the refrigerant is transported in a state where the refrigerant is covered with a float member having a magnetic field shielding property and heat insulation property having a small specific gravity.

  The present invention can be applied to a technique in which a superconductor is magnetized to form a superconducting bulk magnet and the magnetic force of the superconducting bulk magnet is used.

1 is a configuration diagram schematically showing an apparatus according to Example 1. FIG. It is a block diagram which shows typically the state currently attached to the vacuum vessel of the apparatus concerning Example 1. FIG. It is a block diagram which shows typically the state which is conveying the apparatus with a vehicle. FIG. 6 is a configuration diagram schematically illustrating an apparatus according to a second embodiment. FIG. 6 is a configuration diagram schematically illustrating an apparatus according to a third embodiment. FIG. 6 is a configuration diagram schematically illustrating a main part of an apparatus according to a fourth embodiment. FIG. 10 is a configuration diagram schematically illustrating an apparatus according to a fifth embodiment. It is a block diagram which shows typically the extraction container 50 which accommodates the superconducting bulk magnet concerning Example 5 with a liquid refrigerant. FIG. 10 is a configuration diagram schematically illustrating an apparatus according to Example 6; FIG. 10 is a configuration diagram schematically illustrating an apparatus according to Example 7; FIG. 10 is a configuration diagram schematically illustrating an apparatus according to an eighth embodiment.

In the figure, 1 is a movable carriage, 2 is a superconductor, 3 is a superconducting bulk magnet, 5 is an uninterruptible power supply (auxiliary power supply), 6 is a refrigerator, 8 is a compressor, 7 is a refrigeration unit, 9 is a cold head, 11 Is a vacuum vessel, 18 is a vehicle (transportation means), 17 is an on-vehicle outlet (power supply source), 20 is a non-magnetic cushioning material (magnetic field shielding member), 24 is a yoke material (magnetic field shielding member), 40 is a storage container, 41 Is a liquid refrigerant, 43 is a cooling device, 61 is a first yoke material (magnetic field shielding member), 62 is a second yoke material (magnetic field shielding member), and 65 is a protective member.

Claims (2)

A movable superconductor that is disposed in a vacuum vessel that is evacuated by a vacuum evacuation device that is a transport source, is cooled to a superconducting transition temperature or lower and generates a magnetic field to the outside, and a movable superconductor that is supplied with power. A movable cooling device that cools the superconductor and a movable auxiliary power source that can supply power for a certain period of time are prepared, and a movable movable carriage equipped with the superconductor, the cooling device, and the auxiliary power source, and A process of preparing
Magnetizing the superconductor to form the superconducting bulk magnet; and
The superconducting bulk magnet, the cooling device, and the auxiliary power source are integrally mounted on the movable carriage, and electric power is supplied from the auxiliary power source to the cooling device, and the cooling device is continuously operated. The vacuum container is kept in a sealed state without evacuating the vacuum container, heat insulation is maintained in the vacuum container, and the superconducting bulk magnet is maintained in a state where a magnetic field is generated, and is transported freely in the building. A method for transporting a superconducting bulk magnet, which is performed in order. The superconductor is disposed in a vacuum vessel evacuated by a vacuum evacuation device of the transport source, and becomes a superconducting bulk magnet that is cooled below the superconducting transition temperature and generates a magnetic field to the outside. Providing a cooling device for cooling and an auxiliary power source capable of supplying power for a certain period of time;
Magnetizing the superconductor to form the superconducting bulk magnet; and
Keeping the heat insulation in the vacuum vessel in a state where the vacuum vessel is sealed without evacuating the vacuum vessel, supplying power from the auxiliary power source to the cooling device while operating the cooling device. The superconducting bulk magnet generates a magnetic field, and the superconducting bulk magnet, the cooling device, and the auxiliary power source are integrated, and a transporting step of transporting the inside of the building freely with a movable carriage is performed in order. Transport method for superconducting bulk magnets.

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