JP4894617B2 - Fan filter unit integrated static eliminator - Google Patents

Description

  The present invention relates to a static eliminator for a clean room for removing static electricity used in a clean room of a manufacturing factory such as a semiconductor, a liquid crystal, and a plasma display panel.

  Conventionally, this type of static eliminator is a bar-type static eliminator, which applies positive and negative high voltages to a plurality of needle electrodes and generates positive and negative ions by corona discharge. In a downstream downflow type clean room of the fan filter unit, bar-type static eliminators are arranged on the outlet side of the fan filter unit arranged at a predetermined interval on the ceiling, and the air ionized by the downflow of the fan filter unit is the target of static elimination. Carry to the object and remove static electricity. The fixing method is fixed by another member. (For example, refer to Patent Document 1) This method will be described with reference to the drawings.

In FIG. 3, in the case of the bar-type static eliminator, when the static eliminator 101 and the fan filter unit 102 are attached to the ceiling, the support plate 105 is fitted into the groove 104 of the holding member 103 of the static eliminator 101, 106 is attached to the ceiling, and the static eliminator 101 is suspended, and is supported by the support 108 of the static eliminator 101 by a fixture 108 attached to the fan filter unit 102, and the fan filter unit 102 is disposed adjacent to the static eliminator 101. It is what is done.
Japanese Utility Model Publication No. 5-48297

  The above-described conventional static eliminator has a problem that, since the static eliminator and the fan filter unit are installed as separate parts, air leaks due to poor installation or the like when installed in a clean room.

  In addition, since the ions generated from the static eliminator are transported to the target by the downflow blown out from the fan filter unit, the problem of reduction in static eliminability due to the balance between the amount of ions generated from the static eliminator and the air volume of the fan filter unit Therefore, the improvement of the static elimination speed by optimal control is required, and the space of the clean room to be installed is reduced, so that the construction, size, weight, and space are required.

  The present invention solves such a conventional problem, and can prevent air leaks, prevent a reduction in static elimination capability, and reduce the construction and size and save space. An object of the present invention is to provide a fan filter unit integrated static eliminator.

  In order to achieve the above object, the fan filter unit integrated static eliminator of the present invention has a suction port at the top of a box-shaped chamber, and a fan unit comprising a fan and a motor is built in the chamber. In the fan filter unit having a filter on the side, the filter is divided into a plurality of parts, and a static eliminator is sandwiched between the divided filters.

  By this means, the fan filter unit and the static eliminator can be integrated, and a fan filter unit integrated static eliminator that can solve the problem of air leakage due to poor installation is obtained.

  Further, in the fan filter unit in which the other means has a suction port at the top of the box-shaped chamber, a fan unit including a fan and a motor is built in the chamber, and a filter is provided on the outlet side of the fan unit. The filter has a gap in the width direction with respect to the chamber, and a static eliminator is sandwiched in the gap.

  By this means, the fan filter unit and the static eliminator can be integrated, and a fan filter unit integrated static eliminator that can solve the problem of air leakage due to poor installation is obtained.

  Further, in the fan filter unit in which the other means has a suction port at the top of the box-shaped chamber, a fan unit including a fan and a motor is built in the chamber, and a filter is provided on the outlet side of the fan unit. The filter is folded into a pleat shape, and the pleat has a plurality of portions that are folded with a maximum thickness with respect to the filter thickness and a plurality of portions that are folded with a gap in the thickness direction. In addition, a static eliminator is sandwiched between the gaps.

  By this means, the fan filter unit and the static eliminator can be integrated, and a fan filter unit integrated static eliminator that can solve the problem of air leakage due to poor installation is obtained.

  Another means is that the static eliminator is disposed on substantially the same plane as the lower surface of the filter.

  By this means, the static eliminator can be housed inside the filter surface of the fan filter unit, and a fan filter unit integrated static eliminator that can be reduced in size, weight, and space can be obtained.

  Another means is that the conductive member of the filter is grounded.

  By this means, it is possible to obtain a fan filter unit-integrated static eliminator that can prevent electrification of the filter conductive part and can prevent a reduction in the static elimination capability.

  Further, the other means is characterized in that the fan unit and a power control unit of the static eliminator are shared.

  By this means, it is possible to share the power control parts of the static eliminator and the fan filter unit, and a fan filter unit-integrated static eliminator that can be reduced in size, weight, and space can be obtained.

  The other means is characterized in that the ion emission amount of the static eliminator is automatically controlled by the output of the fan unit.

  By this means, it is possible to control the ion emission amount optimal for the air volume output from the fan unit, and it is possible to obtain a fan filter unit-integrated static eliminator capable of improving the static elimination capability.

  Further, the other means is characterized in that the output of the fan unit is automatically controlled by the ion discharge amount of the static eliminator.

  By this means, it is possible to control the output air volume from the fan unit that is optimal for the amount of ions released from the static eliminator, and to obtain a fan filter unit integrated static eliminator that can improve the static elimination capability.

  According to the present invention, it is possible to provide a fan filter unit-integrated static eliminator that has an effect of preventing air leakage. In addition, it is possible to provide a fan filter unit-integrated static eliminator that has an effect of preventing a reduction in static eliminating capability and reducing the size, weight, and space.

  According to the first aspect of the present invention, a fan filter having a suction port in an upper portion of a box-shaped chamber, a fan unit including a fan and a motor built in the chamber, and a filter provided on the outlet side of the fan unit. In the unit, the filter is divided into a plurality of parts, and a static eliminator is sandwiched between the divided filters. The static eliminator is integrated in advance in the fan filter unit, This eliminates the need for separate parts and on-site sealing work, and has the effect of preventing air leaks.

  According to a second aspect of the present invention, a fan filter having a suction port in an upper portion of a box-shaped chamber, a fan unit including a fan and a motor built in the chamber, and a filter provided on the outlet side of the fan unit. In the unit, the filter has a gap in the width direction with respect to the chamber, and a static eliminator is sandwiched in the gap, and the static eliminator is integrated in advance in the fan filter unit. This eliminates the need for separate mounting members and on-site sealing work, and has the effect of preventing air leaks.

  According to a third aspect of the present invention, there is provided a fan filter having a suction port in an upper portion of a box-shaped chamber, a fan unit including a fan and a motor built in the chamber, and a filter provided on the outlet side of the fan unit. In the unit, the filter is folded into a pleat shape, and the pleat has a portion that is folded at a maximum thickness with respect to the filter thickness and a portion that is folded with a gap in the thickness direction. It is characterized in that there are a plurality of each, and a static eliminator is sandwiched between the gaps, and the static eliminator is integrated in advance with the fan filter unit, so that it can be installed separately or separately on site. There is an effect that work is unnecessary and air leakage can be prevented.

  The invention according to claim 4 of the present invention is characterized in that the static eliminator is disposed substantially on the same plane as the lower surface of the filter, and the static eliminator is accommodated inside the filter surface of the fan filter unit. And has the effect of reducing the thickness.

  The invention according to claim 5 of the present invention is characterized in that the conductive member of the filter is grounded, and has an effect of preventing charging of the filter conductive portion.

  According to a sixth aspect of the present invention, the fan unit and the power control unit of the static eliminator are shared, and the power control components of the static eliminator and the fan filter unit are shared. Has the effect of being able to

  The invention according to claim 7 of the present invention is characterized in that the ion emission amount of the static eliminator is automatically controlled by the output of the fan unit, and the ion quantity optimal for the air volume output from the fan unit is characterized in that It has the effect of controlling the release amount.

The invention according to claim 8 of the present invention is characterized in that the output of the fan unit is automatically controlled by the amount of ions discharged from the static eliminator, and is optimal for the amount of ions released from the static eliminator. It has the effect | action which can control the output air volume from a fan unit.
Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
A first embodiment of the present invention will be described with reference to FIG.

  As shown in FIG. 1, a fan unit 3 including a turbo fan 1 and a motor 2 is built in a box-shaped chamber 4. The filter is installed on the lower surface side of the chamber 4 on the downstream side of the fan unit 3, and the air 7 sucked from the suction port 6 by the fan unit 3 is discharged as clean air 8. The filter is divided into left and right parts, and the filter frame made of conductive aluminum material is grounded. The bar-type static eliminator 9 is sandwiched between the divided filters 5a and 5b. Is arranged. The static eliminator 9 is fixed to the chamber 4 by screws or the like as fastening members, and the gaps between the filters 5a and 5b and the static eliminator 9 are sealed with silicon 10 as a sealing agent for preventing air leakage. . An operation control power supply 11 for the fan unit 3 is built in the chamber 4 and shared with the static eliminator 9 to constitute a fan filter unit 12.

  In the above configuration, when the fan unit 3 is operated, air is sucked from the suction port 6 and sent into the chamber 4. The airflow blown out from the fan unit 3 passes through the filters 5a and 5b and is discharged. The static eliminator 9 operates the fan unit 3 and simultaneously applies a positive and negative high voltage to the needle-like electrode 13 to discharge positive and negative ions (not shown) radially. The discharged ions are carried to the static elimination object by the flow of air exhausted from the filter, and the static elimination of the static elimination object is removed to perform static elimination. At this time, the amount of positive and negative ions discharged from the static eliminator 9 is varied by the output air volume discharged from the fan unit 3 through the filters 5a and 5b, and the amount of ions reaching the static elimination object is optimally controlled. .

  According to the first embodiment of the present invention, since the static eliminator 9 is integrated with the fan filter unit 12, it is only necessary to install the fan filter unit 12 when installing in a clean room or the like. It is not necessary to install a static eliminator as a separate member, and the space can be reduced in size, and the static eliminator 9 is sealed by sealing at the stage of manufacturing the fan filter unit 12 so that there is no air leak. Providing a fan filter unit integrated static eliminator that eliminates the need for sealing work at the clean room installation site and a scan test to check for air leaks and saves work. can do.

  Further, since the positive and negative ions discharged from the static eliminator 9 are carried to the static elimination object by the downflow discharged from the fan filter unit 12, the ion emission amount and the air flow rate of the fan filter unit 12 should be optimally controlled. As a result, more discharged ions are transported to the object to be neutralized, so that it is possible to provide a fan filter unit integrated static eliminator capable of improving the static elimination speed and improving the static elimination efficiency.

  In the first embodiment, the filter is divided into two parts and the static eliminator 9 is sandwiched between them. However, the filter is reduced in the width direction with respect to the chamber 4 and is removed on one side, both sides, or four sides therebetween. An electric appliance 9 may be arranged, or a donut-type static eliminator 9 may be arranged, and there is no difference in the operation effect.

(Embodiment 2)
A second embodiment of the present invention will be described with reference to FIG. The same parts as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 2, the filter 5 includes a maximum pleated portion 14a that is folded at the maximum thickness of the filter 5 and a minimum pleated portion 14b that is folded with a gap in the thickness direction. The static eliminator 9 is sandwiched in the gap, and the frame material of the filter 5 is fastened and supported by screws or the like as fastening members.

  In the above configuration, when the fan unit 3 is operated, air is sucked from the suction port 6 and sent into the chamber 4. The airflow blown out from the fan unit 3 passes through the filter 5 and is discharged. The static eliminator 9 operates the fan unit 3 and simultaneously applies a positive and negative high voltage to the needle-like electrode 13 to discharge positive and negative ions (not shown) radially. The discharged ions are carried to the static elimination object by the flow of air exhausted from the filter, and the static elimination of the static elimination object is removed to perform static elimination. At this time, the amount of output air discharged from the fan unit through the filter 5 is varied by the amount of positive and negative ions discharged from the static eliminator 9, and optimally controls the amount of ions reaching the static elimination object.

  According to the second embodiment of the present invention, since the static eliminator 9 is integrated with the fan unit 3, the fan filter unit 12 can be mounted only by installing the fan unit 3 on the downstream side of the chamber 4. When installing in a clean room or the like, it is only necessary to install the fan filter unit 12, and it becomes unnecessary to install a static eliminator as a separate member later, which can be reduced in size and space saving. In addition, since the filter 5 is continuously folded without being divided, it is not necessary to perform sealing by sealing to prevent air leaks, so that the cost can be reduced and sealing by sealing at a clean room installation site is possible. Fan fill that can eliminate the need for stop work and scan tests to check for air leaks and saves work. It is possible to provide a unit-integrated static eliminator.

  Further, since the positive and negative ions discharged from the static eliminator 9 are carried to the static elimination object by the downflow discharged from the fan filter unit 12, the ion emission amount and the air flow rate of the fan filter unit 12 should be optimally controlled. As a result, more discharged ions are transported to the object to be neutralized, so that it is possible to provide a fan filter unit integrated static eliminator capable of improving the static elimination speed and improving the static elimination efficiency.

  The fan filter unit-integrated static eliminator of the present invention has the effect that the static eliminator is sandwiched between the divided filters, so that downsizing and space saving can be achieved, and air leaks due to defects in site construction can be prevented. It is useful for improving the environment in a clean room.

  Further, the fan filter unit-integrated static eliminator of the present invention optimally controls the discharge amount of ions and the air flow rate of the fan filter unit, so that more discharged ions are carried to the charge removal object. It has an effect that can be improved, and is useful as an application that provides an improvement in static elimination efficiency in a clean room.

Sectional drawing which shows the fan filter unit integrated static eliminator of Embodiment 1 of this invention Sectional drawing which shows the fan filter unit integrated static eliminator of Embodiment 2 of this invention. Sectional view showing a conventional clean room static eliminator

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Turbo type fan 2 Motor 3 Fan unit 4 Chamber 5 Filter 5a Filter 5b Filter 6 Suction port 7 Air 8 Clean air 9 Static eliminator 10 Silicon 11 Operation control power supply 12 Fan filter unit 13 Needle electrode 14a Maximum pleat part 14b Minimum pleat part

Claims (8)

In a fan filter unit having a suction port at the top of a box-shaped chamber, a fan unit comprising a fan and a motor built in the chamber, and a filter provided on the outlet side of the fan unit, the filter is divided into a plurality of parts. The fan filter unit integrated static eliminator, wherein the static eliminator is sandwiched between the divided filters. In a fan filter unit having a suction port at the top of a box-shaped chamber, a fan unit comprising a fan and a motor built in the chamber, and a filter provided on the outlet side of the fan unit, the filter is connected to the chamber A fan filter unit-integrated static eliminator, wherein a gap is provided in the width direction, and a static eliminator is sandwiched between the gaps. In a fan filter unit having a suction port at the top of a box-shaped chamber, a fan unit composed of a fan and a motor built in the chamber, and a filter provided on the outlet side of the fan unit, the filter is folded into a pleat shape The pleat has a plurality of portions that are folded with a maximum thickness with respect to the filter thickness and a plurality of portions that are folded with a gap in the thickness direction. A fan filter unit integrated static eliminator characterized by sandwiching an electric appliance. 4. The fan filter unit-integrated static eliminator according to claim 1, wherein the static eliminator is disposed on substantially the same plane as the lower surface of the filter. 5. 5. The fan filter unit integrated static eliminator according to claim 1, wherein the conductive member of the filter is grounded. The fan filter unit-integrated static eliminator according to any one of claims 1 to 5, wherein a power control unit for the fan unit and the static eliminator is shared. 7. The fan filter unit-integrated static eliminator according to claim 1, wherein an ion emission amount of the static eliminator is automatically controlled based on an output of the fan unit. 8. The fan filter unit-integrated static eliminator according to claim 1, wherein an output of the fan unit is automatically controlled based on an ion emission amount of the static eliminator.

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