JP4871648B2 - Workpiece manufacturing method and grinding apparatus - Google Patents

Description

  The present invention relates to a machining apparatus in which a measuring means is provided integrally with a machining apparatus. More specifically, the measuring means retracts from a machining position during machining and is positioned near the machining position when machining is interrupted to measure a workpiece dimension. The present invention relates to a processing method and a processing apparatus.

  Conventionally, the grindstone controls the position of the grindstone and the workpiece with NC, moves the grindstone up and down, moves it closer to the work, and rotates the grindstone while supplying the grinding fluid, thereby moving the work to a flat surface. Grinding methods are well known.

The shape of the processed workpiece is measured with a touch probe, but since the touch probe is not water-resistant, the work surface is wiped off with grinding fluid. Furthermore, the touch probe having no water resistance is retracted to a highly waterproof part in order to eliminate the influence of contamination by grinding scraps and grinding fluid. In order to perform highly accurate measurement, a device such as a low thermal expansion material is used for the arm to which the touch probe is attached.
JP-A-11-277428 JP2004-243468

  Conventionally, since displacement sensors and touch probes are not water-resistant in a grinding machine, when measuring the shape of the machined surface on the machine based on the motion standard of the table of the grinding machine, work the grinding fluid remaining on the workpiece surface after machining. Had to be removed.

  Moreover, since the probe is disposed adjacent to the grindstone, the same position as the processing position cannot be measured.

  Furthermore, when measuring the shape of the machined surface by scanning the displacement sensor parallel to the machined surface, if there is no grinding fluid and the workpiece surface is dry, the contact-type displacement sensor wears the tip of the sensor probe. It was easy, and the temperature at the contact point increased, and accurate measurement could not be performed.

  In addition, if the grinding fluid is removed, the surface temperature of the workpiece, the displacement sensor, and the arm to which the displacement sensor is attached decreases due to the heat of vaporization, and as a result, thermal deformation tends to occur. After removal, time was required to stabilize the temperature of the workpiece.

  Therefore, since it takes a long time to obtain the shape information after processing, the period of applying the information to the next processing conditions such as the cutting amount of the grindstone and the table feed speed is also long.

In order to solve the above-described problem, a method for manufacturing a workpiece according to the present invention includes a step of processing the workpiece with a grindstone rotated around a rotation axis while moving a stage on which the workpiece is mounted.
After raising the grindstone and moving the displacement sensor fixed to the arm directly below the processing position of the grindstone, the displacement sensor fixed to the arm is lowered and brought into contact with the workpiece to raise the height of the workpiece Measuring the value of the direction, and in the processing step, the displacement sensor fixed to the arm is turned around the rotation axis of the grindstone, and the displacement sensor fixed to the arm is moved to the grindstone The workpiece is processed by lowering the grindstone after retreating upward from the machining position.

In order to solve the above-described problems, the cutting apparatus of the present invention is attached to a stage for moving a workpiece, a stage that moves in the vertical direction, and a stage that moves in the vertical direction, and is rotatable around a rotation axis. And a displacement sensor fixed to the arm, which is attached to the stage moving in the up-and-down direction and can be turned around the rotation axis. The displacement sensor fixed to the arm has the rotation axis By turning around, the movement is performed from the retreat position above the processing position of the grindstone to the measurement position directly below the processing position of the grindstone.

  In the present invention, the measurement position and the machining position can be made substantially the same by moving the measurement means between the machining means and the workpiece, and the influence of the system error of the apparatus can be reduced. In addition to making the measurement position and machining position almost the same, it is possible to measure under the same conditions as the machining process by measuring while applying grinding fluid to the workpiece, displacement sensor, and displacement sensor mounting arm. Accurate machining can be realized.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a cross-sectional view of a processing apparatus according to one embodiment of the present invention, FIG. 2 is a schematic view showing a measuring apparatus according to one embodiment of the present invention, and FIG. 3 shows a measuring apparatus in a retracted position. FIG.

  In the figure, 2 is a workpiece, 3 is a stage that reciprocates in the X direction (left-right direction), 4 is a motor that drives the stage 3, 5 is a water-resistant displacement sensor, 6 is an arm that fixes the displacement sensor, and 7 is A grindstone, 8 is a grindstone cover, 9 is a nozzle which is a first temperature adjusting liquid supply means for supplying a grinding liquid to a workpiece, 10 is a stage which reciprocates in the Y direction (vertical direction), and 11 is for driving the stage 15. Motor, 12 is a gate column that indicates the Z slider, 13 is a motor that drives the grinding wheel shaft up and down, 14 is a motor that rotates the grinding wheel, 15 is a slider that drives in the Z direction (frontward direction), and 16 is ground on the arm A nozzle 17 serving as a second temperature adjusting liquid supply means for supplying the liquid is a base to which a spindle is attached.

  First, measurement means and processing means used in the processing apparatus of the present invention will be described.

  In the present embodiment, the processing means includes a grindstone 7, a grindstone cover 8, and a rotary motor 14, and is attached to the stage 10 via a base 17. In the measuring means, the displacement sensor 5 is fixed to one end of the arm 6, and the other end is pivotably attached between the grindstone cover 8 and the rotary motor 14. The measuring means only needs to be able to move in synchronization with the processing means, and may be directly mounted on the same stage 10 as the stage to which the processing means is attached. As shown in FIG. 3, the displacement sensor 5 is moved to the retracted position during the machining as shown in FIG. 3, and during the measurement, the displacement sensor 5 is located directly below the machining position of the grindstone 7 as shown in FIG. It is a mechanism that can make the measurement position the same position. In the state where the displacement sensor 5 is attached to the arm 6, the shape of the arm 6 is adjusted in advance so that the displacement sensor 5 is positioned directly below the processing position of the grindstone 7 during measurement.

  Next, a method for measuring by interrupting the processing of the workpiece by the grindstone will be described. When the machining is interrupted, the stage 10 that reciprocates in the Y direction (up and down direction) first moves up, and the grindstone 7 stops at a predetermined position. Next, the arm 6 turns and the displacement sensor 5 moves to a measurement position directly below the processing position of the grindstone 7. Next, the position when the stage 10 is lowered and the displacement sensor 5 comes into contact with the workpiece is stored. By repeating this, the stage 3 and the stage 15 are moved, and the displacement sensor moves in parallel on the upper surface of the workpiece, whereby the value in the height direction of the surface of the workpiece 2 is measured at each measurement position in the matrix form, and the planar shape is calculated. To do. During the measurement, as in the machining, by applying the grinding fluid whose temperature is always adjusted from the grinding fluid supply nozzle 9 and the nozzle 16 to the workpiece 2, the displacement sensor 5 and the displacement sensor mounting arm 6, it is possible to cause a measurement error. Suppresses temperature deformation.

  By measuring on the grinding machine without moving the workpiece immediately after machining, there is no change in the shape of the workpiece due to holding, and by measuring at almost the same position as the machining point, high-precision measurement based on the machining state and the same process Is possible.

  By measuring during machining and grasping the shape of the workpiece 2 as needed, the machining time can be shortened without overworking the workpiece 2.

  Suppresses thermal deformation at locations that can cause measurement errors, and by using a water-resistant displacement sensor, it is possible to immediately measure the shape of the machined surface based on the motion reference of the grinding machine table without wiping off the grinding fluid after grinding. It becomes possible. In addition to point-to-point shape data, continuous shape measurement data can be acquired. In particular, the thermal deformation of the workpiece is further suppressed by performing measurement while applying a grinding liquid to the entire surface of the workpiece. In addition, by comparing the measurement data with the design value of the workpiece and calculating the remaining machining amount, it is possible to reduce the machining condition calculation time, and further, the shape is inspected by interrupting the measurement during machining, The machining process can be completed at an early stage.

It is sectional drawing which shows the grinding machine of embodiment. It is a three-dimensional view showing a grinding machine measuring unit of an embodiment. It is a three-dimensional view showing a grinding machine measuring unit when the arm is retracted.

Explanation of symbols

2 Workpiece 3 X stage 4 X axis drive motor 5 Water resistant displacement sensor 6 Displacement sensor mounting arm 7 Grinding stone 8 Grinding stone cover 9 Grinding fluid supply nozzle 10 Y slider 11 Z axis drive motor 12 Z slider indication column 13 Y axis drive motor 14 Spindle Motor 15 Z slider 16 Arm direction grinding fluid supply nozzle 17 Spindle mounting base

Claims (6)

A step of processing the workpiece with a grindstone rotated around a rotation axis while moving the stage on which the workpiece is mounted;
After raising the grindstone and moving the displacement sensor fixed to the arm directly below the processing position of the grindstone, the displacement sensor fixed to the arm is lowered and brought into contact with the workpiece to raise the height of the workpiece Measuring the value of the direction,
In the processing step, the displacement sensor fixed to the arm is turned around the rotation axis of the grindstone, and the displacement sensor fixed to the arm is retracted upward from the processing position of the grindstone, and then the grindstone The workpiece manufacturing method, wherein the workpiece is machined by lowering the workpiece. First temperature adjustment liquid supply means for supplying a temperature adjustment liquid to the workpiece;
Second temperature adjusting liquid supply means for supplying temperature adjusting liquid to the arm ,
The method for manufacturing a workpiece according to claim 1, wherein the measurement is performed while flowing the temperature adjustment liquid from the first temperature adjustment liquid supply unit and the second temperature adjustment liquid supply unit. The temperature adjustment liquid supplied from the first temperature adjustment liquid supply means and the second temperature adjustment liquid supply means is the same as the grinding liquid supplied to the workpiece when the workpiece is processed. The manufacturing method of the workpiece | work of Claim 2. 4. The work manufacturing method according to claim 2, wherein the temperature control liquid supplied from the first temperature control liquid supply unit is supplied to the entire surface of the work . A stage for moving the workpiece,
A stage that moves up and down,
A grindstone that is attached to the stage that moves in the vertical direction and is rotatable about a rotation axis;
A displacement sensor fixed to the arm, which is attached to the stage moving in the up-down direction and can be turned around the rotation axis, and the displacement sensor fixed to the arm is rotated by turning around the rotation axis. A grinding apparatus that moves from a retracted position above a processing position of the grindstone to a measurement position directly below the processing position of the grindstone . First temperature adjustment liquid supply means for supplying a temperature adjustment liquid to the workpiece;
Said arm includes a second temperature control fluid supply means for supplying a temperature control fluid, and a temperature control liquid supplied to the workpiece, temperature control liquid supplied to the arm is the same grinding fluid The grinding apparatus according to claim 5 .

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