JP2002052444A - Surface grinding device and work grinding method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface grinding device for giving excellent dimensional precision to a work. SOLUTION: The surface grinding device comprises a sensor unit 90 mounted on the side face of a wheel spindle head in opposition to a working table 11, a nozzle for blowing a gas, a reference block 100, contact detecting means for detecting the contact of a touch probe with the upper face of the reference block when a column is moved a predetermined distance in the longitudinal direction, a storage part for storing a height H from the working table to the upper face of the reference block during contact, contact detecting means for detecting the contact of the touch probe with the upper face of the work when the working table is moved a predetermined distance in the cross direction, a storage part for storing a height (h) from the working table to the upper face of the work during contact, a storage part for storing a height (H+h) after grinding, and computing means for computing a machining allowance αto be ground in accordance with a difference between the (h) and the H stored in the storage parts.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a saddle-type, column-type, or portal-type surface grinding apparatus in which the influence of the temperature distribution of a work table on the working dimensions of a work is reduced. It is. Also, the present invention
The present invention relates to a surface grinding method for a work.

[0002]

2. Description of the Related Art A wafer provided on a table by a grindstone
Saddle-type or column-type grinding devices for grinding a grinding wheel are known (Japanese Patent Application Laid-Open Nos. 55-83567 and 59-58).
-59349 and 61-173851;
13552, JP-A-2000-135675, Japanese Patent No. 2694189, and Japanese Patent No. 3023018). FIG. 5 shows an example of the column type NC surface grinding apparatus 1. In the figure, 10
Is a worktable, 11 is a table capable of reciprocating in the horizontal direction (X-axis direction), 12 is an electromagnetic chuck, 13 is a saddle capable of reciprocating in the front-rear direction (Z-axis direction), 20 is a grindstone device, 21 Is a column provided with an elevating mechanism for moving the grindstone in the vertical direction (Y-axis direction), 22 is a grindstone head, 24 is a grindstone provided on the grindstone shaft, 70 is an operation panel, and 80 is a bed.

[0003] In grinding a work, a total grinding amount and a cutting amount for each table reversal are set in advance, and the grindstone is lowered by the cutting amount every time the table is reversed while feeding the table during grinding. By doing so grinding. This N
In the C-plane grinding machine 1, the work is fixed to the electromagnetic chuck 12 on the table 11, the saddle 13 is moved to determine the position in the Z-axis direction, and the table 11 is reciprocated in the X-axis direction. The rotating grindstone 24 provided on the grindstone head during the process
Is brought into contact with the work, and the grinding wheel spindle head is fed in the Y-axis direction to cut the work and grind it. At this time, a grinding fluid is supplied to the work surface from a grinding fluid supply nozzle (not shown).

The total amount of grinding is divided into a rough grinding allowance and a fine grinding allowance as shown in a cycle diagram in FIG. 6, and in the rough grinding, a large cutting allowance is taken for each table reversal. In fine grinding, the cutting allowance for each table reversal is smaller than the removal allowance in rough grinding. The grindstone is retracted from the work surface to the grinding starting point position of the machining origin, and the bottom of the grindstone is brought into contact with the work surface by pressing the button on the operation panel or turning the handle.
Then, the grindstone bottom is brought into contact with the work by manually moving the handwheel, and rough grinding is started.

[0005] When the rough grinding amount is ground and the rough grinding is completed, the grinding wheel is slightly retracted to prepare for fine grinding. Press the button on the operation panel or turn the handle to bring the grindstone bottom surface close to the work surface 2-3 μm away quickly,
Then, the handwheel is manually moved to bring the bottom surface of the grindstone into contact with the work, and fine grinding is started. When the fine grinding amount is ground and the fine grinding is completed, the grinding wheel is slightly retracted, and then the sparking is performed 0 to 10 times in which the grinding wheel makes a 0 μm cut into the work surface, and the grinding wheel is retracted (retract).
Then, the grinding is completed.

During grinding of the work, the grindstone is worn and the surface roughness, grindability and uncut amount change, so it is necessary to dress the outer periphery of the grindstone in a timely manner (Japanese Patent Laid-Open No. 2000-1).
See the above-mentioned patent publications such as 35675). The dresser is a table dresser that is used by being provided on a table or
An overhead dresser provided on the grindstone head is used.

[0007] In the surface grinding apparatus, the positional relationship between the table and the axis of the grinding wheel on the Y axis is clear from the design point of view.
The measurement of the work height for the grinding allowance of the work is performed using the table surface as a reference point (0 mm position). However, when the work grinding time is long or the work is continuously ground, the bed expands and contracts due to thermal deformation and the like during the actual operation. Is precisely different from the set value, and the dimensional accuracy may be shifted by about 1 to 3 μm depending on the product.

[0008]

The present invention uses a sensor unit having a touch probe and a reference block.
The present invention is based on the idea of calculating the grinding allowance value of the work from the height between the reference block and the work table surface and the height between the work grinding surface and the work table surface. The invention has been reached.

According to a first aspect of the present invention, a worktable reciprocally movable in the left-right direction and a work held on a column movable in the front-rear direction with respect to the worktable are processed. A grinding wheel supported on the grinding wheel shaft of the grinding wheel shaft head, a feed mechanism capable of moving the grinding wheel shaft up and down, a driving mechanism for rotating the grinding wheel, and moving amounts of the front-rear axis and the vertical axis of the grinding wheel axis A surface grinding apparatus having a control mechanism for controlling and a left and right axis of a worktable having a positioning function, wherein the surface grinding apparatus is mounted on a grindstone shaft head so as to face the worktable. A sensor unit provided with a touch probe having a stylus at the tip, a reference block provided on the worktable and the worktable are moved by a predetermined amount in the front-rear direction, and the stylus of the touch probe is moved. Contact the top of the reference block When obtained by the contact detection means for detecting that contact, the sum of upon its contact - Kute - a storage unit for storing the height H _i of the table to the reference block top surface, Wa - Kute - lateral Bull When the stylus of the touch probe is brought into contact with the upper surface of the work by a predetermined amount in the direction, the contact detection means for detecting the contact, and the work table at the time of the contact makes a work. Height h _i to the top
, A storage unit for storing the desired height (H + β) of the machining work after the end of grinding, which is input to the control unit, and _hi and H stored in the storage unit. and a calculating means for calculating a grinding allowance α based on the difference _i .

[0010] The actual grinding allowance, which is the value measured by the touch probe via the reference block having a small coefficient of thermal expansion, is calculated, and the remaining allowance is also calculated. Is not affected.

According to a second aspect of the present invention, in the above-mentioned surface grinding apparatus, the sensor unit having a touch probe having a stylus is disposed on a side surface of a grinding wheel shaft head, and the reference block is provided on a work table. The work is placed within 0 to 100 mm from the front end of the work placed on the work.

Since the sensor unit is provided on a grindstone guard for protecting the grindstone supported on the grindstone shaft, the distance between the grindstone shaft and the sensor unit is determined, and the calculation of the grindstone diameter and the touch probe / wire are performed. The distance between the surface of the workpiece and the distance between the surface of the touch probe and the surface of the reference block can be calculated starting from the grinding wheel axis. Since the reference block is set within 0 to 100 mm from the front end of the work placed on the work table, the reference block is provided at the left and right ends of the work table. The distance is measured on a table that is closer to the work than at the time and has substantially the same temperature as the work, and is not affected by the temperature distribution of the table.

A third aspect of the present invention is a wire grinding machine for a surface grinding apparatus.
The table is input to the control device with the left-right reversal position of the table, the reversal position of the column in the front-rear direction, and the desired work thickness (H + β) after grinding, and the column is moved in the front-rear direction by a predetermined amount. Then, the stylus of the touch probe is brought into contact with the upper surface of the reference block to measure the height H from the work table to the upper surface of the reference block. Then, the work table is moved in the left and right direction by a predetermined amount. The stylus of the touch probe is brought into contact with the upper surface of the work, the height h from the work table to the upper surface of the work is measured, and the total grinding allowance α is α = (h−
With calculated H-beta) and, distributed by the control unit the total grinding allowance amount alpha in the rough grinding allowance amount alpha ₁ and fine grinding allowance amount alpha _2, to calculate the allowance amount alpha ₁ to the rough grinding, the reference based on the height H of the block top surface to determine the rough grinding start position Y _1, to position the wheel spindle to the rough grinding start position Y _1, after rough grinding, a predetermined amount of movement in the longitudinal direction of the column Let
Touch Pro - contacting the blanking of the stylus on the reference block top surface Wa - Kute - measuring the height H ₁ from bull to the reference block top surface, then word - Kute - by a predetermined amount of movement of the table in the lateral direction, touch pro - Bed stylus a word - word into contact with the click top - Kute - table Kurrawa - measuring the height h ₁ to click a top surface, a machining allowance amount alpha ₂ to fine grinding (h ₁ -H ₁ -
to calculate than beta) type, and the reference block upper surface height H _i to the reference to determine the fine grinding start position Y _2, to position the wheel spindle in seminal grinding start position Y _2, was fine grinding after, is moved by a predetermined amount in the longitudinal direction of the column, touch pro - the blanking of the stylus is brought into contact with the reference block top surface Wa - Kute - measuring the height H _i of the table to the reference block top surface, then word - Kute - Bull in the lateral direction is moved by a predetermined amount, the touch pro - the blanking stylus word - is brought into contact with the click top word - Kute - table Kurrawa - measuring the height h _i of up click top, word - the click calculates the value of the finished dimension (h _i -H _i), when the _{(h i -H i) = β} , and grinding ends, (h _i
-H _i ) <β, the amount of (h _i -H _i -β) is further input to the control device to perform the precise grinding, and the correction grinding is performed. A grinding method is provided.

When grinding a work using a column-type surface grinding apparatus, after finishing the fine grinding, the height of the processed work is determined with reference to the height position of the reference block, and the precision grinding for correction is further performed. Is required, the grinding is performed with the product removal amount corrected, so that a machining work with good dimensional accuracy can be obtained.

According to a fourth aspect of the present invention, there is provided a worktable reciprocally movable in the left-right direction and the front-rear direction with respect to the bed, and a grindstone of a grindstone shaft head provided above the worktable. A grindstone supported on a shaft, a feed mechanism capable of moving the grindstone shaft up and down, and a drive mechanism for rotating the grindstone,
A surface grinding device having a control mechanism for numerically controlling the amount of movement of the left and right axes and the front and rear axes of a worktable and the vertical axis of a grinding wheel axis, wherein the surface grinding apparatus is opposed to the worktable. Unit equipped with a touch probe having a stylus at the tip attached to the head of the grinding wheel, a reference block provided on the worktable, and a worktable
When the stylus of the touch probe is brought into contact with the upper surface of the reference block by contacting the stylus of the touch probe with the upper surface of the reference block, contact detection means for detecting the contact and a worktable at the time of the contact are used as a reference. a storage unit for storing the height H _i to the block top surface, Wa - Kute - Bull in the lateral direction is moved by a predetermined amount, the touch pro - the stylus of the probe word - when in contact with the click top, the contact a contact detection means for detecting the sum of upon its contact - Kute - Bull Kurrawa - a storage unit for storing the height h _i of up click top, which is input to the control device, the desired processing after grinding completion A storage unit for storing the work height (H + β), and h stored in the storage unit
Based on the difference between _i and H _i, there is provided a surface grinding apparatus, characterized in that it comprises calculating means for calculating an allowance amount α grinding, the.

In the saddle-type surface grinding device, an actually ground removal amount, which is a value measured by a touch probe via a reference block having a small coefficient of thermal expansion, is calculated.
Since the remaining amount is also calculated, it is not affected by the thermal expansion coefficient of the bed.

A fifth aspect of the present invention is a wire grinding machine for a surface grinding apparatus.
And the desired work thickness (H +) after the grinding process.
β) is input to the control device, the worktable is moved in the front-rear direction by a predetermined amount, and the stylus of the touch probe is brought into contact with the upper surface of the reference block, and the height from the worktable to the upper surface of the reference block is increased. The height H from the worktable to the upper surface of the reference block is measured by measuring the H, moving the column in the front-rear direction by a predetermined amount, bringing the stylus of the touch probe into contact with the upper surface of the reference block, and then measuring the height H. -Move the table in the left and right direction by a predetermined amount, bring the stylus of the touch probe into contact with the upper surface of the work, measure the height h from the work table to the upper surface of the work, and determine the total grinding allowance. When the quantity α is α = (h−H
−β) and calculate the total grinding allowance α by the coarse grinding allowance α.
Distributing the control device ₁ and the fine grinding allowance amount alpha _2, to calculate the allowance amount alpha ₁ to rough grinding, the reference block upper surface height H with respect to determining the rough grinding start position Y _1, positioning the wheel spindle to the rough grinding start position Y _1, after rough grinding, Wa - Kute - Bull in the longitudinal direction is moved by a predetermined amount, the touch pro - with the blanking of the stylus into contact with the reference block top surface Wa - Kute - the height H ₁ to the reference block top surface measured from Bull, then word - Kute - Bull in the lateral direction is moved by a predetermined amount, the touch pro - the blanking stylus word - it is brought into contact with the click upper surface Wa - Kute - table Kurrawa - measuring the height h ₁ to click a top surface, a the allowance amount alpha ₂ to fine grinding to calculate than (h ₁ -H _1-beta) type, the reference block upper surface height based on the H _i to determine the fine grinding start position Y _2, fine grinding wheel spindle Positioned in Engineering start position Y _2, after fine grinding, Wa - Kute - Bull in the longitudinal direction is moved by a predetermined amount, the touch pro - from table - with the blanking of the stylus into contact with the reference block top surface Wa - Kute up reference block upper surface height H _i is measured, then, word - Kute - Bull in the lateral direction is moved by a predetermined amount, the touch pro - from table - is brought into contact with the click top word - - the blanking of the stylus word Kute Wow
Measuring the height h _i of up click top, Wa - calculating the value of the click of the finished dimension (h _i -H _i), when the _{(h i -H i) = β} , and grinding ends, (h _i− H _i ) <β, then (h _i
The present invention provides a grinding method for a work, characterized in that a control device is instructed to perform the precise grinding for the amount of -H _i -β) and further to perform the correction grinding.

When grinding a work using a saddle-type surface grinding device, after finishing the fine grinding, the height of the processed work is determined based on the height position of the reference block, and the precision fine grinding is further corrected. Is required, the grinding is performed with the product removal amount corrected, so that a machining work with good dimensional accuracy can be obtained.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in more detail with reference to the drawings. FIG. 1 is a partially cutaway front view of a surface grinding apparatus, FIG. 2 is a front view of a sensor unit having a touch probe, and FIG. 3 is a flowchart of a surface grinding method of a work according to the present invention. is there. FIG. 4 is a diagram showing the correlation between the dimensions of the work before grinding, the amount of grinding allowance and the height of the basic block.

In the surface grinding apparatus shown in FIG. 1, reference numeral 11 denotes a table capable of reciprocating in the horizontal direction (X-axis direction), w denotes a work placed on the table, and 22 denotes a grindstone shaft head. , 24
Is a grindstone provided on the grindstone shaft, 25 is a grindstone cover, 90 is a sensor unit having a touch probe, 91 is a stylus, and 100 is a reference block.

In the sensor unit 90 shown in FIG.
91 is a stylus, 92 is a probe, 93 is a module.
, 94 is junk, 95 is spindle, 96 is wiring,
Reference numeral 97 denotes an interface, 98 denotes a control mechanism of a surface grinding apparatus, 99 denotes a spray nozzle, and the tip of the stylus has a warp.
The dry air of 0.4 to 0.6 Mpa is blown to the portion touching the crack. Sensor unit 90 as contact detection means
Is provided to measure the distance between the surface of the inspection object (work or reference block) where the tip of the stylus comes in contact with the axis of the grinding wheel shaft. The control mechanism 98 includes a storage unit and a calculation unit.

[0022]

Embodiment 1 Referring to the flow chart of the method for grinding a work surface shown in FIG.
An example of rough grinding followed by fine grinding is described below. First, the power of the surface grinding apparatus and the power of the operation panel are turned on, and the table is taught 200 between the left and right reversing positions and the front and rear reversing positions (start). After moving the table 11 to the left, and then moving the table backward, the grinding wheel head 22 is lowered by rotating a ball screw with a servo motor (not shown), and the sensor unit is turned off. A stylus 91 of a touch probe 90 is brought into contact with the surface of the reference block, a reference measurement 201 is performed, and a distance H between the surface of the table and the surface of the reference block is controlled 98.
And record it in the storage unit.

After raising the grindstone shaft head 22 and moving the table 11 forward, the grindstone head 22 is lowered and the stylus 91 of the sensor unit 90 is brought into contact with the surface of the work w, and the work is performed. The measurement 202 is performed, and the distance h between the table surface and the work surface is transmitted to the control device 98 and recorded in the storage unit.

The diameter of the grindstone is input to the control device 98, and the distance L between the work surface and the bottom surface of the grindstone is calculated by the arithmetic unit of the control device and recorded in the storage unit 203. Alternatively, after raising the grinding wheel shaft head 22 and moving the table 11 to the left, the grinding wheel shaft head 22 is lowered to bring the bottom surface of the grinding wheel into contact with the reference block. The height is calculated by the servomotor, and the difference (L) from the height of the grinding wheel axis in the Y-axis direction at the time of the reference measurement 201 is calculated by the arithmetic unit of the control device and recorded in the storage unit 203. This step is not essential.

The height (H + β) of the work after grinding is input to the controller, and the total grinding allowance α is calculated by the equation α = (h−H−
β), which is obtained by calculation from this, and the grinding allowance α ₁ for rough grinding
And the grinding allowance α ₁ for coarse grinding by dividing the amount into a grinding allowance α ₂ for fine grinding and transmitting the same to the control device, and the rough grinding start position Y _{1 based on} the height H of the upper surface of the reference block. To determine. As shown in FIG. 5, the total grinding allowance amount alpha is distributed in the rough grinding allowance amount alpha ₁ and fine grinding allowance amount alpha _2,
The work height (H + β) after the end of grinding is equal to (h−α).

[0026] raise the wheel spindle head 22, to move the grinding wheel to the rough grinding start position Y ₁ 205 (see the left grinding wheel of FIG. 1). The rough grinding is started, performs the grinding of the grinding allowance corresponding to the calculated rough grinding allowance amount alpha ₁ 206. After the table 11 is moved to the left and the table is retracted backward, the ball screw 22 is rotated by a servo motor (not shown) to lower the grindstone shaft head 22 so as to lower the surface. There is washed, the stylus 91 of the sensor unit on the surface of the dried reference block by blowing dry air is contacted performs reference measurement 207 of the rough grinding, Te - the distance H ₁ between the reference block from the surface table surface The information is transmitted to the control device 98 and recorded in the storage unit.

After raising the grindstone shaft head 22 and advancing the table 11 forward, the grindstone shaft head 22 is lowered to clean the surface and dry the workpiece by blowing dry air. surface contacting the stylus 91 of the sensor unit 90, word - perform click measurement 208, Te - table surface Kurrawa - it transmits the distance h ₁ between click surface to the controller 98, and records in the storage unit.

The machining allowance α ₂ for fine grinding is defined as (h ₁ −H ₁ −
β), and the precise grinding start position Y ₂ is determined based on the height H _{1 of the} upper surface of the reference block 20.
9.

[0029] The grinding wheel axis position to fine grinding machining start position Y ₂ 210.

The fine grinding is started, and the cut grinding of the calculated α ₂ amount is performed 211. Move table 11 to the left,
Then, after retracting the table in the backward direction, the wheel head 22 is lowered by rotating a ball screw with a servo motor (not shown), the surface is cleaned, and the dry air is blown. the dried reference block surface contacting the stylus 91 of Sensayunito 90 performs reference measurement 212 of fine grinding, Te - transmitted from Bull surface distance H _i between the reference block surface to the controller 98, recorded in the storage unit I do.

The wheel head 22 is raised, and the table 11 is moved forward. Then, the wheel head 22 is lowered, and the surface is cleaned and dried by blowing dry air.
The stylus 91 of the sensor unit 90 is brought into contact with the surface of the work w, a work measurement 213 is performed, and the work
Transmitting the distance h _i between the click surface to the controller 98, and records in the storage unit.

In order to obtain the value (H _i + β) of the finished dimension of the work, the relationship (h _i −H _i ) = β is used, and (h _i −
The value of _Hi ) is compared 214 in the arithmetic unit of the control device. (H _i
When −H _i ) = β, the grinding end 215 is performed, at which point fine grinding is performed until the table returns to the reversing position, and the fine grinding ends when the table returns to the reversing position. (H _i −
H _i) <When the _{β, (h i -H i -β} ) of the amount (the correction amount of grinding is (α-h + h _i) corresponding to.) Instructed by the control device may further perform the precise grinding of correction 216, and perform precise grinding for correction 217.

The correction grinding 217 is performed, the product size is calculated, the fine grinding at that time when the (h _i -H _i = β) Te - performed until Bull returns to reverse position, returns to the reversing position Then, the correction grinding is ended 215.

As another aspect of the present invention, the control unit does not perform the step 216 of causing the arithmetic unit of the control unit to calculate the grinding allowance for correction grinding, and the operator inputs the grinding allowance for correction grinding to the control unit. When the input value is (h _i −
When the arithmetic unit of the control device calculates that H _i )> β, a step 218 of transmitting an alarm signal is added.

[0035]

The method for grinding a surface of a work according to the present invention is characterized in that
A grinding work with good dimensional accuracy is provided without being affected by the temperature distribution of the cable.

[Brief description of the drawings]

FIG. 1 is a partially cutaway front view of a surface grinding apparatus.

FIG. 2 is a front view of the sensor unit.

FIG. 3 is a flowchart of a method of surface grinding a work according to the present invention.

FIG. 4 is a diagram showing the relationship between the dimensions of a work before grinding, the amount of grinding allowance, and the height of a basic block.

FIG. 5 is a perspective view of a surface grinding device.

FIG. 6 is a flow diagram of surface grinding of a work.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Surface grinding device W work 11 Table 22 Grinding wheel shaft head 24 Grinding wheel 90 Sensor unit 91 Stylus 98 Control device 100 Reference block

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3C029 BB06 3C034 AA07 CA04 CA12 CA13 CB01 DD12 3C043 BA01 BA12 CC03

Claims (5)

[Claims] 1. A worktable reciprocally movable in the left-right direction, and a grindstone shaft head for processing a work held on a column movable in the front-rear direction with respect to the worktable. A grindstone supported on a grindstone shaft, a feed mechanism capable of moving the grindstone shaft up and down, a drive mechanism for rotating the grindstone, and a control mechanism for numerically controlling the amount of movement of the front and rear axes of the grindstone shaft and the vertical axis, A surface grinding device having a left and right axis of a worktable having a positioning function, said surface grinding device having a stylus at a tip attached to a whetstone shaft head opposite to the worktable. The sensor unit having the probe, the reference block provided on the worktable and the worktable are moved in the front-rear direction by a predetermined amount, and the stylus of the touch probe is brought into contact with the upper surface of the reference block. Contact A contact detection means for detecting that the sum of upon its contact - Kute - a storage unit for storing the height H _i of the table to the reference block top surface, Wa - Kute - by a predetermined amount of movement of the table in the lateral direction Contact detecting means for detecting the contact when the stylus of the touch probe is brought into contact with the upper surface of the work, and the height h from the work table to the upper surface of the work when the contact is made; a storage unit for storing _i , a storage unit for storing a desired height (H + β) of the machining work after the completion of the grinding, and a h _i stored in the storage unit. based on a difference H _i, surface grinding apparatus characterized by comprising calculating means for calculating an allowance amount α grinding, the. 2. A sensor unit is disposed on a side surface of a grinding wheel shaft head, and a reference block is installed within 0 to 100 mm from a front end of a work placed on a work table. The surface grinding apparatus according to claim 1, wherein: 3. A control device is provided with a left and right reversal position of a work table of a surface grinding device, a reversal position of a column in a front and rear direction, and a desired work thickness (H + β) after grinding. Input, move the column in the forward and backward direction by a predetermined amount, and touch the stylus of the touch probe to the upper surface of the reference block to make the work
The height H from the table to the upper surface of the reference block is measured. Then, the work table is moved in the left and right direction by a predetermined amount.
The stylus of the touch probe is brought into contact with the upper surface of the work, and the height h from the work table to the upper surface of the work is measured.
The total grinding allowance amount alpha alpha = calculated to (h-H-β), distributed by the control unit the total grinding allowance amount alpha in the rough grinding allowance amount alpha ₁ and fine grinding allowance amount alpha _2, to rough grinding to calculate the allowance amount alpha _1, the reference block upper surface height H with respect to determining the rough grinding start position Y _1, to position the wheel spindle to the rough grinding start position Y _1, a rough grinding performed After that, the column is moved in the front-rear direction by a predetermined amount, and the stylus of the touch probe is brought into contact with the upper surface of the reference block to make the work table.
The height H ₁ to the reference block top surface measured from Bull, then word - Kute - by a predetermined amount of movement of the table in the lateral direction,
Touch Pro - Bed stylus a word - word into contact with the click top - Kute - table Kurrawa - measuring the height h ₁ to click a top surface, a machining allowance amount alpha ₂ to fine grinding (h ₁ -H ₁ to calculate than-beta) type, and the reference block upper surface height H _i to the reference to determine the fine grinding start position Y _2, to position the wheel spindle in seminal grinding start position Y _2, subjected to fine grinding After that, the column is moved in the front-rear direction by a predetermined amount, and the stylus of the touch probe is brought into contact with the upper surface of the reference block to make the work table.
The height H _i from the cable to the upper surface of the reference block is measured. Then, the work table is moved in the left and right direction by a predetermined amount.
Touch Pro - Bed stylus a word - word into contact with the click top - Kute - table Kurrawa - measuring the height h _i of up click top, word - the value of the click of the finished dimension (h _i -H _i) calculating a, when the _{(h i -H i) = β} , and grinding ends, (h _i -H _i) <when beta is the amount further correction of fine grinding (h _i -H _i -β) Performing a correction grinding on a workpiece. 4. A worktable reciprocally movable in a left-right direction and a front-rear direction with respect to a bed, and a grindstone supported on a grindstone shaft of a grindstone shaft head provided above the worktable. A feed mechanism capable of moving the grindstone shaft up and down, a drive mechanism for rotating the grindstone, and a control mechanism for numerically controlling the amount of movement of the left and right axes and the front and rear axes of the worktable and the vertical axis of the grindstone axis. A surface grinding device comprising: a sensor unit having a touch probe having a stylus at a tip attached to a grinding wheel shaft head facing a work table; and When the reference block and the work table provided on the table are moved by a predetermined amount in the front-rear direction and the stylus of the touch probe is brought into contact with the upper surface of the reference block, contact detection is performed to detect the contact. Means and their connections The time of Wa - Kute - a storage unit for storing the height H _i to the reference block upper surface from Bull, word - Kute - Bull in the lateral direction is moved by a predetermined amount, the touch pro - word the blanking stylus - click top when in contact with the a contact detecting means for detecting that contact, the sum of upon its contact - Kute - Bull Kurrawa - a storage unit for storing the height h _i of up click top, input to the control device is, desired processing word after grinding completion - a storage unit which stores the click height (H + beta), and, based on the difference h _i and H _i stored in the storage unit, allowance amount taken to grind a surface grinding device comprising: a calculating means for calculating α. 5. A control device is supplied with a left-right reversal position and a front-rear reversal position of a work table of a surface grinding device, and a desired work thickness (H + β) after the grinding process. Move the worktable in the front-rear direction by a predetermined amount, bring the stylus of the touch probe into contact with the upper surface of the reference block, measure the height H from the worktable to the upper surface of the reference block, and move the column in the front-rear direction. And move the stylus of the touch probe into contact with the top surface of the reference block.
Measure the height H from the table to the top surface of the reference block. Then, move the work table in the left and right direction by a predetermined amount.
The stylus of the touch probe is brought into contact with the upper surface of the work, and the height h from the work table to the upper surface of the work is measured.
The total grinding allowance amount alpha alpha = calculated to (h-H-β), distributed by the control unit the total grinding allowance amount alpha in the rough grinding allowance amount alpha ₁ and fine grinding allowance amount alpha _2, to rough grinding to calculate the allowance amount alpha _1, the reference block upper surface height H with respect to determining the rough grinding start position Y _1, to position the wheel spindle to the rough grinding start position Y _1, a rough grinding performed after, Wa - Kute - Bull in the longitudinal direction is moved by a predetermined amount, the touch pro - the blanking of the stylus is brought into contact with the reference block top surface Wa - Kute - measuring the height H ₁ from bull to the reference block upper surface, Then, the work table is moved in the left and right direction by a predetermined amount,
Touch Pro - Bed stylus a word - word into contact with the click top - Kute - table Kurrawa - measuring the height h ₁ to click a top surface, a machining allowance amount alpha ₂ to fine grinding (h ₁ -H ₁ to calculate than-beta) type, and the reference block upper surface height H _i to the reference to determine the fine grinding start position Y _2, to position the wheel spindle in seminal grinding start position Y _2, subjected to fine grinding after, Wa - Kute - Bull in the longitudinal direction is moved by a predetermined amount, the touch pro - the blanking of the stylus is brought into contact with the reference block top surface Wa - Kute - measuring the height H _i of the table to the reference block upper surface, Then, the work table is moved in the left and right direction by a predetermined amount,
Touch Pro - Bed stylus a word - word into contact with the click top - Kute - table Kurrawa - measuring the height h _i of up click top, word - the value of the click of the finished dimension (h _i -H _i) calculating a, when the _{(h i -H i) = β} , and grinding ends, (h _i -H _i) <when beta is the amount further correction of fine grinding (h _i -H _i -β) Performing a correction grinding on the workpiece.