JP4867160B2 - Photoelectric conversion element and photoelectric conversion device - Google Patents

Description

  The present invention relates to a photoelectric conversion element and a photoelectric conversion apparatus suitable for, for example, a charge transfer type solid-state imaging element.

  In the conventional charge transfer device (CCD) solid-state imaging device 62 shown in FIG. 7, on-chip is provided on each pixel unit 66 as a means (light collecting means) for improving the sensitivity of light in the photosensor unit 56. A lens 51 is formed (see Patent Document 1 described later).

  A plurality of pixel portions 66 are formed in an array in the image area of the semiconductor substrate 70, but here, the structure near one pixel portion 66 will be described as a representative.

In the pixel portion 66, a charge transfer path region 72, which is an N ⁺ -type conductive region, and a photosensor portion 56 are formed on an N ⁻ -type semiconductor substrate 70 made of Si. ^A charge generation unit 60 (photodiode) is formed by a pn junction between the ⁺ type charge storage unit 58 and the P ⁺ type region 63. On the gate insulating film 71 formed on the photosensor unit 56, a charge transfer electrode 55 is formed adjacent to the photosensor unit 56, and in combination with the charge transfer path region 72, a vertical register unit (VCCD: Vertical Charge) is formed. Coupled Devise: The same applies hereinafter.) 55 is configured as a vertical transfer gate. Note that illustration of a channel stopper and the like is omitted.

  Further, on the vertical register portion 55, a light shielding film 54 for preventing light from entering the charge transfer path region 72 is provided via an insulating film 64, and further, a transparent insulating layer 73 which is a planarizing insulating film is provided thereon. , A protective film 59, for example, a color filter 52 composed of a green (G) color filter portion and red (R) and blue (B) color filter portions adjacent thereto, and a convex lens for improving the condensing rate of incident light An on-chip lens 51 composed of a portion 61 is formed.

  The color filter 52 is formed, for example, by spin-coating a pigment-dispersed photoresist for each color, and performing exposure and development processing.

  In such a structure, incident light 65 incident on the charge transfer type solid-state imaging device 62 from the outside is condensed by the convex lens portion 61 of the on-chip lens 51 and reaches the optical sensor portion 56 as indicated by an arrow in the figure. Here, photoelectric conversion is performed.

  Although the charge transfer type solid-state imaging device 62 shown in FIG. 7 is configured as an interline type, when the incident light 65 has high luminance, the charge of the photosensor unit 56 is generated by the photodiode 60 due to the light irradiation. When photoelectrons to be accumulated in the accumulation unit 58 are directly mixed into the charge transfer path 72 and converted into image information, a phenomenon called smear that appears as streak noise may occur.

  Such smear is highly dependent on the structure of the solid-state imaging device, and is proportional to the vertical size of the light input, and is generated even below the saturation illuminance and proportional to the intensity of the incident light. , The longer the wavelength of the incident light, the larger it appears.

  Smear is generated, for example, when a large amount of charge is generated in the deep part of the substrate in a region where strong light is incident, and a part of it reaches the vertical register part by diffusion, but light that has entered the vertical register part is charged. May be mixed with signal charges from other pixels during charge transfer.

  On the other hand, due to irradiation of high-intensity light, electrons overflowing from the photodiode (photosensor unit) leak into the charge transfer path region, and when converted to image information, noise occurs in blooming that makes the periphery of the high-intensity light source appear white and bright. Sometimes.

  In order to prevent such smearing and blooming from occurring, it is necessary to irradiate light with a stable illuminance of, for example, 1 to 2 Lux. In particular, light irradiation with high luminance of 200 to 300 Lux or higher should be prevented. I can't.

  Therefore, in order to suppress smear, as shown in FIG. 8, the distance d1 between the opening end of the light shielding film 54 and the charge transfer path region 72 is increased, or the gate insulation between the light shielding film 54 and the Si substrate 70 is performed. Measures have been taken to reduce the thickness d2 of the film 71 and to reduce the distance between the surface of the photodiode (pn junction) and the light shielding film 54 as much as possible.

  As described above, as a structure that increases the distance d1 between the opening end of the light shielding film 54 and the charge transfer path region 72, for example, when forming an impurity diffusion region that constitutes a photosensor portion in a semiconductor region (substrate). There is a structure in which the width of this impurity diffusion region is formed larger than a normal width (see Patent Document 2 described later).

  In order to suppress blooming, as shown in FIG. 8, the distance d3 between the photodiode and the charge transfer path region 72 is increased, or an overflow drain (not shown) for sweeping away excess charge is charged. It has been made easier to flow.

  As described above, for example, in a digital still camera that controls the exposure time using a mechanical shutter, the signal charge is read from the optical sensor unit to the vertical register unit as a structure provided with an overflow drain for sweeping away surplus charges. Prior to the transfer, the charges in the vertical register unit are transferred to the horizontal register unit and swept out from the adjacent overflow drain at a speed higher than the transfer speed for transferring the signal charge read from the optical sensor unit to the vertical register unit. Thus, it is known that the sweep transfer period on the first field side is longer than the sweep transfer period on the second field side (see Patent Document 3 described later).

  There has also been proposed a structure that suppresses and optimizes the amount of light incident on the optical sensor without providing such an overflow drain (see Patent Document 4 described later).

  In this structure, an on-chip lens structure in which a liquid crystal lens serving as a condensing lens is provided on the optical sensor unit, a voltage value to be applied to each liquid crystal lens is determined, and the refractive index is determined by applying the voltage to each liquid crystal lens. It is variable and the amount of incident light is suppressed.

JP 2003-332546 A (first column 45th line to second column 35th line, FIGS. 7 and 8) Japanese Patent Laid-Open No. 10-209423 (column 4, lines 16 to 28, FIGS. 2 and 3) JP 2001-148809 A (6th column 29th line to 8th column 24th line, FIG. 1) JP-A-5-326903 (second column, line 50 to third column, line 25, FIG. 1)

  However, since the size per pixel has been reduced along with the reduction in size and the number of pixels of the charge transfer type solid-state imaging device, the structures shown in Patent Documents 2 and 3 described above are sufficient to realize this. There is no margin, and conversely, the effect of reducing smear and blooming is getting worse.

  Further, in the on-chip lens structure shown in Patent Document 4 above, it is necessary to change the applied voltage in response to a change in the amount of light incident on the liquid crystal lens (particularly in a high luminance region). Applicable only when discriminating. In addition, light attenuation and irregular reflection are likely to occur in the liquid crystal lens, and it is necessary to provide the liquid crystal lens on the substrate, which is difficult to incorporate.

  The present invention has been made in view of such a situation, and an object thereof is to effectively suppress the generation of noise such as smear and blooming, and to easily incorporate the suppression means. And providing a photoelectric conversion device.

  That is, the present invention relates to a photoelectric conversion element that photoelectrically converts incident light to a light sensing unit, and has a characteristic that light transmittance changes nonlinearly with respect to light irradiation power on the light incident side of the light sensing unit. The present invention relates to a photoelectric conversion element in which a saturable absorber is disposed.

  The present invention also provides a photoelectric conversion device in which a plurality of photoelectric conversion elements that photoelectrically convert incident light to the light sensing unit are arranged, and transmits light with respect to light irradiation power on the light incident side of the light sensing unit. The present invention relates to a photoelectric conversion device characterized in that an inverse saturable absorber having a characteristic in which the rate changes nonlinearly is disposed.

  According to the photoelectric conversion element and the photoelectric conversion device of the present invention, the reverse saturable absorber having the characteristic that the light transmittance changes nonlinearly with respect to the light irradiation power is disposed on the light incident side of the light sensing unit. Therefore, this reverse saturable absorber can suppress the light transmittance nonlinearly so that the light transmittance is low when the light irradiation power is high. As a result, it is possible to suppress light with high light irradiation power from being transmitted to the light sensing unit more than necessary, so that it is possible to always generate an optical carrier in an appropriate amount and maintain good photoelectric conversion characteristics. Therefore, it is possible to suppress the occurrence of smear and blooming. Moreover, this can be realized easily and simply by disposing the reverse saturable absorber.

  In the present invention, in order to realize the object of the present invention, the reverse saturable absorber suppresses the light transmission power nonlinearly so that the light transmittance is low when the light irradiation power is high. When is low, it is desirable that the light transmittance changes linearly with respect to the light irradiation power.

  Further, in order to simplify the structure, it is preferable that the single layer of the reverse saturable absorber is disposed on the light incident side of the light sensing unit.

  Alternatively, the reverse saturable absorber may be contained in an optical filter disposed on the light incident side of the light sensing unit, or may be contained in a condensing lens for incident light on the light sensing unit. Also good.

  The reverse saturable absorber usable in the present invention is preferably composed of at least one compound selected from the group consisting of fullerene and phenylacetylene, and it is desirable that this compound forms a polymer.

  In addition, the light sensing unit includes a charge generation unit and a charge storage unit formed of a pn junction formed on a semiconductor substrate, and in this case, a charge transfer path is formed adjacent to the light sensing unit. It is desirable to construct a charge transfer type (CCD) solid-state imaging device in which the light sensing unit is a pixel.

  Further, it is preferable that a plurality of the light sensing units are arranged in an array, and a charge transfer path is formed adjacent to the array.

  In the present invention, an aggregate of photoelectric conversion elements constitutes a photoelectric conversion device. In particular, a photoelectric conversion device for imaging may be referred to as a charge transfer type solid-state imaging device.

  Next, a preferred embodiment of the present invention will be described specifically and in detail with reference to the drawings.

First Embodiment FIGS. 1 to 3 show a first embodiment of the present invention.

  FIG. 1A shows the structure of the charge transfer type solid-state imaging device 12a (photoelectric conversion device) according to the present embodiment. In order to improve the sensitivity of light in the photosensor unit 6 (photodetection unit), FIG. On-chip lens 1 (condensing lens) is formed on pixel portion 16.

  Here, a plurality of pixel portions 16 constituting an image area are arranged in an array on the semiconductor substrate 20, but one pixel portion 16 (photoelectric conversion) is representatively shown in FIG. The structure near the device will be described.

In the pixel portion 16, a charge transfer path region 22, which is an N ⁺ type conductive region, and an optical sensor unit 6 are formed on an N ⁻ type semiconductor substrate 20 made of Si. A charge generation unit 10 formed of a pn junction is formed by the N ⁺ type charge storage unit 8 and the P ⁺ type region 13. A gate insulating film 21 is formed on the photosensor unit 6, and a charge transfer region 22 and a transfer gate electrode 5 of the vertical register unit (VCCD) 5 are formed adjacent to the photosensor unit 6.

  Further, a light shielding film 4 for preventing light from entering the charge transfer path region 22 (charge transfer path) is provided on the vertical register portion 5 via an insulating film 14, and further, a planarizing insulating film is provided thereon. A color filter 2 (optical filter) comprising a transparent insulating layer 23, a SiN protective film 9 formed by plasma CVD (chemical vapor deposition), a green (G) filter portion, and red (R) and blue (B) filter portions. ), And an on-chip lens 1 for improving the condensing rate of incident light.

  Although a channel stopper or the like is not shown in the figure, the surface region between the optical sensor unit 6 and the charge transfer path region 22 is doped with an impurity to form a P-type (not shown), so that it is not transferred. Electric charges are prevented from moving from the photosensor unit 6 to the charge transfer path region 22.

  The color filter 2 is formed, for example, by spin-coating a pigment-dispersed photoresist for each color and then performing exposure and development processing.

  Further, as shown by the alternate long and short dash line in the figure, if the inner lens 3 composed of a combination of a convex portion and a concave portion is formed in the transparent insulating layer 23, the condensing characteristic of incident light can be further improved.

  As described above, the optical sensor unit 6 (photodiode), the charge transfer path region 22, the vertical register unit 5 (charge transfer electrode), the light shielding film 4, the transparent insulating film 23 (flattened insulating film), and the like are shown in FIG. The conventional charge transfer type (CCD) solid-state imaging device has the same configuration.

  In this embodiment, it should be noted that a flat layer is formed between the color filter 2 and the protective film 9 on the flattening transparent insulating film 23 of the charge transfer type solid-state imaging device 12a, for example, by spin coating or the like. That is, the single layer 7 of the reverse saturable absorber that also serves as the above is formed.

As a material of the reverse saturable absorber layer 7, for example, at least one compound selected from the group consisting of fullerene (C ₆₀ ) and phenylacetylene, or a polymer thereof, for example, fullerene polymer, polyphenylacetylene is used. be able to. It is also possible to use the fine powder of crystals dispersed in an organic resin such as polyimide or PMMA (polymethyl methacrylate).

  After forming the reverse saturable absorber layer 7, the color filter 2 and the on-chip microlens 1 can be formed by a known exposure technique or the like.

  Further, the reverse saturable absorber layer 7 can be inserted into the upper layer of the color filter 2 as shown in FIG. Alternatively, it can be provided as a lower layer of the planarized transparent insulating layer 23 on the light shielding film 4.

Such a reverse saturable absorber layer 7 has a correlation characteristic as shown in FIG. 2 between the light irradiation power P _A (light irradiation intensity) and the light transmission power P _B (light transmittance).

That is, when the light irradiation power P _A is low, have a linearity between the light irradiation power P _A and the light transmittance P _B, becomes higher than the value P _A1 there is light irradiation power P _A, the light transmittance The characteristic is that it decreases nonlinearly.

Specifically, when the reverse saturable absorber layer 7 is not formed, the light transmission power P _A increases as the light irradiation power PA increases as shown by the straight line continuous from the straight line A to the broken line B in the figure. _{Since B} also increases linearly, when the light irradiation power P _A becomes higher than a certain value P _A1 , the light transmission power P _B transmitted to the optical sensor unit 6 becomes excessive, and the above smear is caused by an excessive incident light amount. And blooming cannot be suppressed.

However, by providing the reverse saturable absorber layer 7 in the present embodiment, when the light irradiation power P _A exceeds P _A1 (for example, 100 lux) as shown by the curve C in the figure, the light is thereafter emitted. The transmission power P _B gradually decreases nonlinearly, and the light transmission power P _B is maintained at P _B1 (for example, 50 lux) or less that does not generate smear or the like. Thereby, even when a high irradiation power P _A, suppressing the light transmission power P _B of the transmitted light to the light sensing portion, can be suppressed to an appropriate amount of incident light smear or blooming does not occur, maintaining the proper photoelectric conversion characteristic can do. Therefore, even when the amount of incident light (or intensity) fluctuates during the operation of the solid-state imaging device, it is possible to always obtain good photoelectric conversion characteristics.

  In addition, since such an effect can be realized only by inserting the reverse saturable absorber layer 7, it is possible to easily incorporate a suppressing means such as smear with a simplified structure.

  In addition, with this structure, it is possible to highly integrate and downsize the element components including the optical sensor unit 6.

  FIG. 3 shows the structure of a charge transfer type solid-state imaging device 26 (photoelectric conversion device) incorporating the solid-state imaging element 12a or 12b and the charge transfer process.

  That is, the photosensor is detected by the incident light incident on the photosensor unit 6 (pixel unit 16) arranged in an array so as to form the image area central portion 17a and the image area peripheral portion 17b of the charge transfer type solid-state imaging device 26. A charge is generated in the unit 6, and this charge is transferred from the photosensor unit 6 to the vertical register unit (VCCD) 5, and this charge is further transferred from the vertical register unit 5 to the horizontal register unit (HCCD: Horizontal Charge Coupled Device: The same shall apply.)

  Next, the charges are transferred to the amplifier output terminal 15 and the correction circuit 19 by the horizontal register unit 18 and output. The correction circuit 19 nonlinearly reduces the amount of incident light with high brightness by the reverse saturable absorber layer 7. However, the charge corresponding to the amount of decrease can be compensated.

  As described above, according to the present embodiment, on the light incident side of the optical sensor unit 6, the light transmission intensity is nonlinearly suppressed so that the light transmittance is low when the light irradiation intensity is high. Since the saturable absorber layer 7 is disposed, the amount of light transmitted through the light sensor unit 6 with high light irradiation intensity can be effectively suppressed by a simple structure, and appropriate photoelectric conversion characteristics can be maintained. Thus, the occurrence of smear and blooming can be suppressed.

  In this case, smearing and blooming can be suppressed only for the pixel portion 16 irradiated with a high-intensity light source or incident light.

Further, since the incident light with a high light irradiation intensity high intensity is limited, but not the linearity of the high luminance side is maintained, to improve the dynamic range by expanding the upper limit of the light irradiation power P _A Can do. In this case, an external adjustment circuit (for example, the correction circuit 19) can correct the voltage reduced by the non-linear portion according to the characteristics of the reverse saturable absorber layer 7.

  In addition, the reverse saturable absorber layer 7 can be manufactured using a normal semiconductor manufacturing technique, and can be manufactured at a low cost with only the material cost added.

Second Embodiment FIG. 4 shows a second embodiment of the present invention.

  According to the present embodiment, instead of providing the reverse saturable absorber layer 7 described above, the charge transfer type solid-state imaging device 12c provided with the color filter 2a mixed with the reverse saturable absorber used in the layer 7; Except for this, it is the same as the above-described first embodiment.

  That is, the color filter is usually formed of a mixture of a dye or pigment, a photosensitizer and a base material, but the reverse saturable absorber 7A is based on a particle size or amount (for example, 20% by mass) that can maintain the color filter characteristics. By dispersing in the material, the color filter 2a mixed with the reverse saturable absorber 7A is formed on the protective film 9 using a normal semiconductor exposure process. The mixing amount of the reverse saturable absorber 7A is preferably in the range of 10 to 40% by mass, and when the fine crystal powder is dispersed, the particle size is preferably 0.1 μm.

  In this way, by mixing the reverse saturable absorber 7A into the color filter 2a, the same incident light characteristics as shown in FIG. 2 can be obtained, so that the same operations and effects as those of the first embodiment described above can be obtained. Obtainable.

Third Embodiment FIG. 5 shows a third embodiment of the present invention.

  According to the present embodiment, instead of providing the reverse saturable absorber layer 7 described above, a charge transfer type solid-state imaging provided with an on-chip microlens 1a mixed with the reverse saturable absorber 7A used for the layer 7 is provided. Except for the element 12d, the second embodiment is the same as the first embodiment.

  That is, after the color filter 2 is formed, the reverse saturable absorber 7A is coated with a lens material mixed with a particle size or amount (for example, 50% by mass) that can maintain the characteristics of the microlens 1a by spin coating or the like. An on-chip microlens 1a is formed using an etching technique. The mixing amount of the reverse saturable absorber 7A is preferably 10 to 60% by mass. When the fine crystal powder is dispersed, the particle size is preferably 0.1 μm.

  In this way, by mixing the reverse saturable absorber 7A into the microlens 1a, the same incident light characteristics as shown in FIG. 2 can be obtained. Therefore, the same functions and effects as those of the first embodiment described above can be obtained. Obtainable.

Fourth Embodiment FIG. 6 shows a fourth embodiment of the present invention.

  In the present embodiment, the image sensor 24 is configured to output the charge generated in the optical sensor unit 41 (photodiode) by the transistor operation without forming the transfer unit with the CCD structure as in the above-described embodiment. This is different from the above-described first embodiment.

That is, in the optical sensor unit 41, an optical sensor is formed by a pn junction at the interface between the N-type silicon layer 37 formed on the surface portion of the N-type silicon substrate 36 and the P ⁻ -type silicon layer 34 below it. A portion (photodiode) 41 is formed. Hereinafter, a portion surrounded by the element isolation structure 31 is referred to as a light receiving region 30, and a portion where a pn junction is formed is referred to as an opening 40 of the optical sensor portion 41 to distinguish between the two.

Then, when the light incident on the opening 40 reaches the pn junction, it is converted into holes and electrons, and signal charges (electrons) corresponding to the amount of incident light are converted into the N-type silicon layer 37 and further P ^−. Accumulated in the mold silicon layer 34. The P ⁺ type silicon layer 38 at the outermost surface is for preventing leakage of electric charges from the surface.

  The signal charge storage region composed of the N-type silicon layer 37 and the like includes a P-type surface side well 32 formed in the lower part of the element isolation structure 31 and the periphery thereof, a P-type deep well 35 formed in a deep position of the substrate, and P The side surface and the bottom surface are surrounded by a P-type plug (Plug) well 33 formed vertically long below the element isolation structure 31 so as to electrically connect the mold surface side well 32 and the P type deep well 35. It is. As a result, the signal charge storage region is electrically isolated from the peripheral elements even in the substrate, and the signal charge does not leak.

  Further, on the element isolation structure 31, a transparent insulating layer 23 that is a planarizing insulating film, a protective film 9, a color filter 2 (optical filter) made of red (R), green (G), and blue (B), and a convex lens An on-chip lens 1 that is an aggregate of the portions 11 and is used to improve the collection rate of incident light is laminated. However, this laminated structure may be changed as appropriate.

  In the present embodiment, the image sensor 24 is provided with the reverse saturable absorber layer 7, but the reverse saturable absorber layer 7 obtains the same operations and effects as those of the first embodiment described above. Can do.

  As mentioned above, although this invention was demonstrated based on embodiment, it cannot be overemphasized that this invention is not limited to these examples at all, and can be suitably changed in the range which does not deviate from the main point of invention.

  For example, the forming method, forming position, material, and the like of the reverse saturable absorber 7 and the mixing ratio and forming method when the reverse saturable absorber 7A is included in the on-chip lens can be changed. In this case, the first to third embodiments described above may be combined to provide a plurality of reverse saturable absorbers (this is also the case with the fourth embodiment described above).

  Further, the light shielding film 4 may have a light absorption property in addition to the light shielding property, or may have only a light absorption property. Further, an overflow drain may be provided for the treatment of excessive charges.

  Moreover, it is good also as a photoelectric conversion element which replaced with a color filter and formed the ND filter, and it is not necessary to form an on-chip lens and the color filter itself.

  Further, the structure and layout of the charge transfer type solid-state imaging device are not limited to those described above, and various changes may be made.

  In addition, this invention is applicable also to photoelectric conversion elements other than the example mentioned above.

  The photoelectric conversion element and the photoelectric conversion device of the present invention can be applied to a solid-state imaging element and a solid-state imaging device in which smear and blooming are suppressed.

It is sectional drawing (A) of the photoelectric conversion element by the 1st Embodiment of this invention, and sectional drawing (B) of another photoelectric conversion element. It is a graph which shows the correlation characteristic of the light irradiation power and light transmission power of a reverse saturable absorber similarly. 2 is a partial plan view of the photoelectric conversion device. FIG. It is sectional drawing of the photoelectric conversion element by the 2nd Embodiment of this invention. It is sectional drawing of the photoelectric conversion element by the 3rd Embodiment of this invention. It is sectional drawing of the photoelectric conversion element by the 4th Embodiment of this invention. It is sectional drawing of the photoelectric conversion element by a prior art example. It is sectional drawing of the photoelectric conversion element which shows the arrangement | positioning relationship of each part similarly.

Explanation of symbols

1, 1a: On-chip (micro) lens, 2, 2a: Color filter,
3 ... inner lens, 4 ... light shielding film, 5 ... charge transfer electrode (vertical register part), 6 ... optical sensor part,
7 ... Reverse saturable absorber layer, 7A ... Reverse saturable absorber, 8 ... Charge storage unit, 9 ... Protective film,
10: Charge generation unit, 11: Convex lens unit,
12a, 12b, 12c, 12d ... charge transfer type solid-state imaging device, 13 ... horizontal register section,
16 ... pixel portion, 20 ... substrate, 21 ... gate insulating film, 22 ... charge transfer path region,
23 ... Transparent insulating layer, 24 ... Image sensor, 26 ... Charge transfer type solid-state imaging device,
30: Light receiving region, 31: Element isolation structure, 32: P-type surface side well,
33 ... P-type plug well, 34 ... P ^- type silicon layer, 35 ... P-type deep well,
36 ... N-type silicon substrate, 37 ... N-type silicon layer, 38 ... P ⁺ type silicon layer,
40 ... opening, 41 ... optical sensor part

Claims (16)

A charge transfer path is formed adjacent to the light sensing unit, and in the photoelectric conversion element that photoelectrically converts incident light to the light sensing unit through a condenser lens and an optical filter , light incident on the light sensing unit The reverse saturable absorber having the characteristic that the light transmittance changes nonlinearly with respect to the light irradiation power is disposed on the side, and the reverse saturable absorber is disposed on the light incident side of the light sensing unit (1). Including the reverse saturable absorber in the optical filter, (2) including the reverse saturable absorber in the condensing lens of the incident light to the light sensing unit, and (3) the collection. Arranged by at least one of a layer in which the reverse saturable absorber is dispersed in an organic resin between a light lens and the light sensing unit, and light irradiation by the reverse saturable absorber. Light transmission so that light transmission is low when power is high There is suppressed in a non-linear, optical transmittance changes linearly with respect to the light irradiation power when irradiation power is low, the photoelectric conversion element. The photo-sensing unit composed of a charge generation unit made of a pn junction and a charge storage unit, and the charge transfer path are formed on a semiconductor substrate, and a gate insulating film is formed on the photo-sensing unit and the charge transfer path. A transfer gate electrode is formed on the gate insulating film, a light shielding film is provided on the transfer gate electrode via an insulating film, and the light shielding film is exposed on the light sensing portion. A transparent planarization insulating layer is formed on the planarization insulation layer, a protective film is formed on the planarization insulation layer, the optical filter and the lens are formed in this order above the light sensing unit, and the light sensing unit is a pixel. 2. The photoelectric conversion according to claim 1, wherein a charge transfer solid-state imaging device is formed, and a layer in which the reverse saturable absorber is dispersed in an organic resin is formed between the protective film and the optical filter. element. The photo-sensing unit composed of a charge generation unit made of a pn junction and a charge storage unit, and the charge transfer path are formed on a semiconductor substrate, and a gate insulating film is formed on the photo-sensing unit and the charge transfer path. A transfer gate electrode is formed on the gate insulating film, a light shielding film is provided on the transfer gate electrode via an insulating film, and the light shielding film is exposed on the light sensing portion. A transparent planarization insulating layer is formed on the planarization insulation layer, a protective film is formed on the planarization insulation layer, the optical filter and the lens are formed in this order above the light sensing unit, and the light sensing unit is a pixel. 2. The charge transfer type solid-state imaging device is configured, and a layer in which the reverse saturable absorber is dispersed in an organic resin is provided as a lower layer of the planarization insulating layer on the light shielding film. Photoelectric conversion element. The photo-sensing unit composed of a charge generation unit made of a pn junction and a charge storage unit, and the charge transfer path are formed on a semiconductor substrate, and a gate insulating film is formed on the photo-sensing unit and the charge transfer path. A transfer gate electrode is formed on the gate insulating film, a light shielding film is provided on the transfer gate electrode via an insulating film, and the light shielding film is exposed on the light sensing portion. A transparent planarization insulating layer is formed on the planarization insulation layer, a protective film is formed on the planarization insulation layer, the optical filter and the lens are formed in this order above the light sensing unit, and the light sensing unit is a pixel. 2. The photoelectric conversion element according to claim 1, wherein a charge transfer type solid-state imaging device is configured, and a layer in which the reverse saturable absorber is dispersed in an organic resin is formed between the optical filter and the lens. .   The photoelectric conversion element according to claim 1, wherein the reverse saturable absorber is composed of at least one compound selected from the group consisting of fullerene and phenylacetylene. The photoelectric conversion element according to claim 5 , wherein the compound forms a polymer.   The photoelectric conversion element according to claim 1, wherein the light sensing unit includes a charge generation unit and a charge storage unit formed of a pn junction formed on a semiconductor substrate. The photoelectric conversion element according to claim 7 , which constitutes a charge transfer solid-state imaging element in which the light sensing unit is a pixel. A plurality of light sensing units are arranged in an array, and a charge transfer path is formed adjacent to the array, and photoelectrically converts incident light to the light sensing unit through a condenser lens and an optical filter. In the photoelectric conversion device in which a plurality of photoelectric conversion elements are arranged, an inverse saturable absorber having a characteristic that the light transmittance changes nonlinearly with respect to the light irradiation power is disposed on the light incident side of the light sensing unit. The reverse saturable absorber includes: (1) causing the optical filter disposed on the light incident side of the light sensing unit to contain the reverse saturable absorber, and (2) incident on the light sensing unit. Including the reverse saturable absorber in the condensing lens of light; and (3) arranging a layer in which the reverse saturable absorber is dispersed in an organic resin between the condensing lens and the light sensing unit. Arranged by at least one of said reverse saturable The absorber, light transmission power so that the light transmittance becomes lower when light irradiation power is high is suppressed to a non-linear, optical transmittance changes linearly with respect to the light irradiation power when irradiation power is low, Photoelectric conversion device. The photo-sensing unit composed of a charge generation unit made of a pn junction and a charge storage unit, and the charge transfer path are formed on a semiconductor substrate, and a gate insulating film is formed on the photo-sensing unit and the charge transfer path. A transfer gate electrode is formed on the gate insulating film, a light shielding film is provided on the transfer gate electrode via an insulating film, and the light shielding film is exposed on the light sensing portion. A transparent planarization insulating layer is formed on the planarization insulation layer, a protective film is formed on the planarization insulation layer, the optical filter and the lens are formed in this order above the light sensing unit, and the light sensing unit is a pixel. The photoelectric conversion according to claim 9, wherein a charge transfer solid-state imaging device is configured, and a layer in which the reverse saturable absorber is dispersed in an organic resin is formed between the protective film and the optical filter. apparatus. The photo-sensing unit composed of a charge generation unit made of a pn junction and a charge storage unit, and the charge transfer path are formed on a semiconductor substrate, and a gate insulating film is formed on the photo-sensing unit and the charge transfer path. A transfer gate electrode is formed on the gate insulating film, a light shielding film is provided on the transfer gate electrode via an insulating film, and the light shielding film is exposed on the light sensing portion. A transparent planarization insulating layer is formed on the planarization insulation layer, a protective film is formed on the planarization insulation layer, the optical filter and the lens are formed in this order above the light sensing unit, and the light sensing unit is a pixel. The charge transfer type solid-state imaging device is configured, and a layer in which the reverse saturable absorber is dispersed in an organic resin is provided as a lower layer of the planarization insulating layer on the light shielding film. Photoelectric conversion device. The photo-sensing unit composed of a charge generation unit made of a pn junction and a charge storage unit, and the charge transfer path are formed on a semiconductor substrate, and a gate insulating film is formed on the photo-sensing unit and the charge transfer path. A transfer gate electrode is formed on the gate insulating film, a light shielding film is provided on the transfer gate electrode via an insulating film, and the light shielding film is exposed on the light sensing portion. A transparent planarization insulating layer is formed on the planarization insulation layer, a protective film is formed on the planarization insulation layer, the optical filter and the lens are formed in this order above the light sensing unit, and the light sensing unit is a pixel. 10. The photoelectric conversion device according to claim 9, wherein a charge transfer type solid-state imaging device is configured, and a layer in which the reverse saturable absorber is dispersed in an organic resin is formed between the optical filter and the lens. . The photoelectric conversion device according to claim 9 , wherein the reverse saturable absorber is made of at least one compound selected from the group consisting of fullerene and phenylacetylene. The photoelectric conversion device according to claim 13 , wherein the compound forms a polymer. The photoelectric conversion device according to claim 9 , wherein the light sensing unit includes a charge generation unit and a charge storage unit formed of a pn junction formed on a semiconductor substrate. The photoelectric conversion device according to claim 15 , which constitutes a charge transfer solid-state imaging device in which the light sensing unit is a pixel.

Images