JP4865325B2 - Circuit board holder - Google Patents

Circuit board holder Download PDF

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JP4865325B2
JP4865325B2 JP2005374112A JP2005374112A JP4865325B2 JP 4865325 B2 JP4865325 B2 JP 4865325B2 JP 2005374112 A JP2005374112 A JP 2005374112A JP 2005374112 A JP2005374112 A JP 2005374112A JP 4865325 B2 JP4865325 B2 JP 4865325B2
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circuit board
plate
fitting
holder
fitted
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JP2007178150A (en
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謙太郎 中島
幹生 山下
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Hioki EE Corp
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Hioki EE Corp
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Description

本発明は、回路基板を保持可能に構成されて、回路基板にプローブを接触させて行う電気的な検査に用いられる回路基板保持具に関するものである。   The present invention relates to a circuit board holder that is configured to be able to hold a circuit board and is used for an electrical inspection performed by bringing a probe into contact with the circuit board.

この種の回路基板保持具を備えた装置として、特開2001−13190号公報において出願人が開示した回路基板検査装置が知られている。この回路基板検査装置は、回路基板保持具としての基板載置台を備えて構成され、この基板載置台には、検査対象の回路基板を嵌入可能な基板嵌入用孔が形成されている。この場合、基板嵌入用孔が回路基板の外形と相補的形状に形成されているため、基板嵌入用孔に嵌入された回路基板は、その水平方向の移動が防止されて位置決めされる。また、この回路基板検査装置では、基板嵌入用孔の上部に形成された固定板嵌入用孔に基板固定板を嵌入することにより、回路基板が基板載置台と基板固定板とによって固定される。
特開2001−13190号公報(第3−4頁、第1−5図)
As an apparatus provided with this type of circuit board holder, a circuit board inspection apparatus disclosed by the applicant in Japanese Patent Application Laid-Open No. 2001-13190 is known. This circuit board inspection apparatus includes a substrate mounting table as a circuit board holder, and the substrate mounting table is formed with a board insertion hole into which a circuit board to be inspected can be inserted. In this case, since the board insertion hole is formed in a shape complementary to the outer shape of the circuit board, the circuit board inserted into the board insertion hole is positioned while preventing its horizontal movement. Further, in this circuit board inspection apparatus, the circuit board is fixed by the board mounting table and the board fixing plate by inserting the board fixing plate into the fixing plate insertion hole formed in the upper part of the board insertion hole.
Japanese Patent Laid-Open No. 2001-13190 (page 3-4, FIG. 1-5)

ところが、上記の回路基板検査装置には、以下の改善すべき課題がある。すなわち、この回路基板検査装置では、回路基板の外形と相補的形状の基板嵌入用孔に回路基板を嵌入することによって回路基板の移動を防止している。このため、外形の異なる複数種類の回路基板についての検査を可能とするためには、各回路基板の外形に合致する基板嵌入用孔を形成した複数の基板載置台が必要となる。したがって、この回路基板検査装置では、基板載置台が複数必要な分、低コスト化が困難となっている。また、検査対象の回路基板に応じて基板載置台を交換する際には、例えば、基板載置台の設置位置とプローブを移動させる移動機構の設置位置との位置合わせの作業や、基板載置台の高さ調整の作業等が発生する。このため、複数種類の回路基板を検査する際の検査効率を向上し得る回路基板保持具の実現が望まれている。   However, the circuit board inspection apparatus has the following problems to be improved. That is, in this circuit board inspection apparatus, the circuit board is prevented from moving by inserting the circuit board into a board insertion hole having a shape complementary to the outer shape of the circuit board. For this reason, in order to make it possible to inspect a plurality of types of circuit boards having different external shapes, a plurality of substrate mounting tables in which substrate insertion holes matching the external shape of each circuit board are formed. Therefore, in this circuit board inspection apparatus, it is difficult to reduce the cost because a plurality of substrate mounting tables are required. In addition, when exchanging the substrate mounting table according to the circuit board to be inspected, for example, alignment work between the installation position of the substrate mounting table and the installation position of the moving mechanism for moving the probe, Work of height adjustment occurs. For this reason, realization of the circuit board holder which can improve the inspection efficiency at the time of inspecting a plurality of kinds of circuit boards is desired.

本発明は、かかる改善すべき課題に鑑みてなされたものであり、コストの低減および検査効率の向上を実現し得る回路基板保持具を提供することを主目的とする。   The present invention has been made in view of the problems to be improved, and a main object of the present invention is to provide a circuit board holder capable of realizing cost reduction and inspection efficiency improvement.

上記目的を達成すべく請求項1記載の回路基板保持具は、回路基板を保持可能に構成されて、前記回路基板に対する電気的な検査に用いられる回路基板保持具であって、前記回路基板を嵌め込み可能な嵌め込み孔が形成された第1板状体と、当該第1板状体を装着可能な装着部が形成されると共に当該装着部に装着された当該第1板状体の前記嵌め込み孔に嵌め込まれた前記回路基板を保持する基体部とを備え、前記基体部は、開口部が形成されると共に当該開口部の口縁部に段部が形成された本体部と、前記段部に嵌め込み可能に構成されると共に前記各挿通孔が形成された第2板状体とを備えて構成され、前記装着部は、前記本体部の前記段部と当該段部に嵌め込まれた前記第2板状体とを備えて構成され、前記装着部には、検査用のプローブを挿通可能な複数の挿通孔が所定の配列ピッチで形成されている。 In order to achieve the above object, a circuit board holder according to claim 1 is configured to be able to hold a circuit board, and is used for electrical inspection of the circuit board, wherein the circuit board is mounted on the circuit board holder. A first plate-like body in which a fitting hole that can be fitted is formed, and a fitting portion in which the first plate-like body can be attached are formed, and the fitting hole of the first plate-like body that is attached to the attachment portion. A base part that holds the circuit board fitted in the base part, and the base part includes a body part in which an opening part is formed and a step part is formed at a mouth edge part of the opening part. A second plate-like body that is configured to be fitted and formed with the respective insertion holes, and the mounting portion includes the step portion of the main body portion and the second portion that is fitted to the step portion. It is constituted by a plate-like body, to the mounting portion, up for inspection The chromatography Bed can be inserted a plurality of insertion holes are formed in a predetermined arrangement pitch.

また、請求項記載の回路基板保持具は、請求項記載の回路基板保持具において、前記基体部は、当該基体部を貫通する吸気孔と、前記装着部の周囲に形成されて前記吸気孔に連通する吸気溝とを備えている。 The circuit board holder according to claim 2 is the circuit board holder according to claim 1 , wherein the base portion is formed around an intake hole penetrating the base portion and the mounting portion. And an intake groove communicating with the hole.

請求項1記載の回路基板保持具によれば、回路基板を嵌め込み可能な嵌め込み孔が形成された第1板状体と、第1板状体を装着可能な装着部が形成されると共に装着部に装着された第1板状体の嵌め込み孔に嵌め込まれた回路基板を保持する基体部とを備え、検査用のプローブを挿通可能な複数の挿通孔を所定の配列ピッチで装着部に形成したことにより、嵌め込み孔の大きさや形状が異なる複数種類の第1板状体を作製しておくことで、第1板状体を交換するだけで大きさや形状の異なる複数種類の回路基板についての検査を行うことができる。したがって、回路基板の種類毎に回路基板保持具(基板載置台)自体の交換が必要となる従来の構成と比較して、コストを十分に低減することができる。また、第1板状体を交換するだけでよいため、上記(回路基板保持具自体を交換する)従来の構成とは異なり、例えば、回路基板保持具の設置位置と移動機構の設置位置との位置合わせの作業や、回路基板保持具の高さ調整の作業等を不要とすることができる。したがって、複数種類の回路基板を検査する際の検査効率を確実に向上させることができる。   According to the circuit board holder according to claim 1, the first plate-like body in which the fitting hole into which the circuit board can be fitted is formed, the attachment portion to which the first plate-like body can be attached, and the attachment portion are formed. And a base portion for holding the circuit board fitted in the fitting hole of the first plate-like body attached to the plurality of insertion holes, and a plurality of insertion holes into which the inspection probes can be inserted are formed in the attachment portion at a predetermined arrangement pitch. Thus, by preparing a plurality of types of first plate bodies having different sizes and shapes of the fitting holes, it is possible to inspect a plurality of types of circuit boards having different sizes and shapes simply by replacing the first plate bodies. It can be performed. Therefore, the cost can be sufficiently reduced as compared with the conventional configuration in which the circuit board holder (substrate mounting table) itself needs to be replaced for each type of circuit board. Moreover, since it is only necessary to replace the first plate-like body, unlike the conventional configuration (which replaces the circuit board holder itself), for example, the installation position of the circuit board holder and the installation position of the moving mechanism It is possible to eliminate the work of alignment, the work of adjusting the height of the circuit board holder, and the like. Therefore, it is possible to reliably improve the inspection efficiency when inspecting a plurality of types of circuit boards.

また、の回路基板保持具によれば、開口部が形成されると共に開口部の口縁部に段部が形成された本体部と、段部に嵌め込み可能に構成されると共に各挿通孔が形成された第2板状体とを備えて基体部を構成し、本体部の段部と段部に嵌め込まれた第2板状体とを備えて装着部を構成したことにより、プローブを接触させる端子の配列ピッチが互いに異なる複数種類の回路基板についての検査を行うときであっても、各配列ピッチに対応する配列ピッチで挿通孔を形成した複数種類の第2板状体を作製しておくことで、第2板状体を交換するだけでこれらの複数種類の回路基板についての検査を行うことができる。 Further, according to the circuit board holder of this, a main body stepped portion is formed on the rim of the opening with an opening is formed, the insertion holes together so can be fitted to the stepped portion formed is The base plate portion is configured with the formed second plate-shaped body, and the mounting portion is configured with the stepped portion of the main body portion and the second plate-like body fitted into the stepped portion, thereby contacting the probe. Even when a plurality of types of circuit boards having different arrangement pitches of terminals to be inspected, a plurality of types of second plate-like bodies having insertion holes formed at arrangement pitches corresponding to the arrangement pitches are prepared. Thus, it is possible to inspect these plural types of circuit boards simply by exchanging the second plate-like body.

また、請求項記載の回路基板保持具によれば、基体部を貫通する吸気孔と、装着部の周囲に形成されて吸気孔に連通する吸気溝とを備えて基体部を構成したことにより、回路基板が保持された回路基板保持具の上方の空間を例えば板状のシャッターによって閉塞して、回路基板保持具とシャッターとによって形成される空間内の空気を吸気溝および吸気孔を通して吸引することで、回路基板保持具の表面にシャッターを吸着させることができる。このため、シャッターによって回路基板を基体部に向けて押圧させることができる結果、回路基板を回路基板保持具によって確実に保持させることができる。 According to the circuit board holder of the second aspect of the present invention, the base portion is configured by including the intake holes that penetrate the base portion and the intake grooves that are formed around the mounting portion and communicate with the intake holes. The space above the circuit board holder holding the circuit board is closed by, for example, a plate-shaped shutter, and air in the space formed by the circuit board holder and the shutter is sucked through the intake groove and the intake hole. Thus, the shutter can be adsorbed on the surface of the circuit board holder. For this reason, as a result of being able to press a circuit board toward a base part with a shutter, a circuit board can be certainly held with a circuit board holder.

以下、本発明に係る回路基板保持具の最良の形態について、添付図面を参照して説明する。   Hereinafter, the best mode of a circuit board holder according to the present invention will be described with reference to the accompanying drawings.

最初に、回路基板検査装置1の構成について、図面を参照して説明する。   First, the configuration of the circuit board inspection apparatus 1 will be described with reference to the drawings.

図1に示す回路基板検査装置1は、本発明に係る回路基板保持具を備えた検査装置の一例であって、図2に示す回路基板P1,P2,P3(以下、区別しないときには「回路基板P」ともいう)の両面に配設された端子にプローブ72,82(図1参照)を接触させた状態で、回路基板Pについての電気的な検査を実行可能に構成されている。ここで、回路基板P1,P2は、例えば、1mm程度のピッチでマトリクス状に配設された複数の端子を備えて構成されている。また、回路基板P1は、1辺が30mm程度の略正方形に形成され、回路基板P2は、1辺が40mm程度の略正方形に形成されている。また、回路基板P3は、例えば、1.2mm程度のピッチでマトリクス状に配設された複数の端子を備えて構成されると共に、1辺が60mm程度の略正方形に形成されている。   A circuit board inspection apparatus 1 shown in FIG. 1 is an example of an inspection apparatus provided with a circuit board holder according to the present invention. The circuit boards P1, P2, and P3 shown in FIG. The circuit board P can be electrically inspected in a state where the probes 72 and 82 (see FIG. 1) are in contact with terminals disposed on both sides of the P). Here, the circuit boards P1 and P2 include a plurality of terminals arranged in a matrix with a pitch of about 1 mm, for example. The circuit board P1 is formed in a substantially square shape with one side of about 30 mm, and the circuit board P2 is formed in a substantially square shape with one side of about 40 mm. The circuit board P3 is configured to include a plurality of terminals arranged in a matrix at a pitch of about 1.2 mm, for example, and is formed in a substantially square shape with one side of about 60 mm.

また、回路基板検査装置1は、図1に示すように、テーブル2、回路基板保持具3、シャッター4,4、開閉機構5、吸気装置6、移動機構7,8および制御部9を備えて構成されている。テーブル2は、図2に示すように、全体として矩形の板状に構成されている。また、テーブル2には、平面視が長方形状の開口部21が形成されると共に、開口部21の口縁部を取り囲むようにして段部22が形成されている。この場合、段部22は、回路基板保持具3の本体部30(同図参照)を嵌め込み可能にそのサイズが規定されると共に、装着された状態における本体部30の表面とテーブル2の表面とが面一(ほぼ面一)となるように、つまり本体部30の厚みとほぼ同じとなるように、平面部22aからテーブル2の表面までの高さが規定されている。また、テーブル2には、嵌め込まれた状態における本体部30の吸気孔34(同図参照)に対向する部位からテーブル2の側面まで連通する吸気路23(図1も参照)が形成されている。   Further, as shown in FIG. 1, the circuit board inspection apparatus 1 includes a table 2, a circuit board holder 3, shutters 4 and 4, an opening / closing mechanism 5, an intake device 6, moving mechanisms 7 and 8, and a control unit 9. It is configured. As shown in FIG. 2, the table 2 is configured in a rectangular plate shape as a whole. Further, the table 2 is formed with an opening 21 having a rectangular shape in plan view, and a step portion 22 is formed so as to surround the mouth edge of the opening 21. In this case, the step portion 22 is sized so that the main body portion 30 (see the figure) of the circuit board holder 3 can be fitted, and the surface of the main body portion 30 and the surface of the table 2 in the mounted state are defined. The height from the flat surface portion 22a to the surface of the table 2 is defined so that is substantially flush, that is, substantially the same as the thickness of the main body portion 30. The table 2 is formed with an intake passage 23 (see also FIG. 1) that communicates from a portion facing the intake hole 34 (see the same figure) of the main body 30 in the fitted state to the side surface of the table 2. .

回路基板保持具3は、本発明に係る回路基板保持具の一例であって、図2に示すように、本体部30、載置板40a,40b(以下、区別しないときには「載置板40」ともいう)、および嵌め込み板50a,50b,50c(以下、区別しないときには「嵌め込み板50」ともいう)を備えて、回路基板Pを保持可能に構成されている。本体部30は、矩形の板状に構成されて、テーブル2の段部22に嵌め込まれた状態でテーブル2にねじ止めされる。また、本体部30には、平面視が長方形状の開口部31が形成されると共に、開口部31の口縁部を取り囲むようにして段部32が形成されている。この場合、段部32は、載置板40および嵌め込み板50の移動を規制した状態で両板40,50を嵌め込み(装着)可能なサイズに、つまり両板40,50とほぼ同じサイズに形成されている。また、段部32の平面部32aから本体部30の表面までの高さは、両板40,50がはめ込まれた状態において(図5参照)、嵌め込み板50の表面と本体部30の表面とが面一(ほぼ面一)となるように、つまり重ね合わせた状態の両板40,50の厚みの合計とほぼ同じとなるように規定されている。また、段部32の平面部32aには、載置板40および嵌め込み板50を段部32に嵌め込む際のガイドとして機能する2本の円柱状のガイドピン33が形成されている。さらに、本体部30の四隅には、本体部30の表裏を貫通する4つの吸気孔34がそれぞれ形成されている。また、本体部30の表面における段部32(開口部31)の周囲には、吸気孔34に連通する吸気溝35が形成されている。   The circuit board holder 3 is an example of the circuit board holder according to the present invention. As shown in FIG. 2, the circuit board holder 3 is provided with a main body 30, mounting plates 40a and 40b (hereinafter referred to as “mounting plate 40” when not distinguished from each other). ), And fitting plates 50a, 50b, 50c (hereinafter, also referred to as “fitting plate 50” when not distinguished), the circuit board P can be held. The main body 30 is formed in a rectangular plate shape and is screwed to the table 2 in a state where the main body 30 is fitted in the stepped portion 22 of the table 2. In addition, an opening 31 having a rectangular shape in plan view is formed in the main body 30, and a step 32 is formed so as to surround the rim of the opening 31. In this case, the stepped portion 32 is formed in a size that allows both the plates 40 and 50 to be fitted (attached) in a state where the movement of the mounting plate 40 and the fitting plate 50 is restricted, that is, substantially the same size as the both plates 40 and 50. Has been. Further, the height from the flat surface portion 32a of the step portion 32 to the surface of the main body portion 30 is such that the surface of the fitting plate 50 and the surface of the main body portion 30 are in a state where both the plates 40 and 50 are fitted (see FIG. 5). Is equal to each other (substantially flush), that is, to be substantially the same as the sum of the thicknesses of the stacked plates 40 and 50 in an overlapped state. Further, two columnar guide pins 33 functioning as guides when the mounting plate 40 and the fitting plate 50 are fitted into the stepped portion 32 are formed on the flat portion 32 a of the stepped portion 32. Further, four intake holes 34 penetrating the front and back of the main body 30 are formed at the four corners of the main body 30. An air intake groove 35 communicating with the air intake hole 34 is formed around the step 32 (opening 31) on the surface of the main body 30.

載置板40は、本発明における第2板状体に相当し、図2に示すように、矩形の板状に形成されて、本体部30の段部32に嵌め込み可能に構成されている。また、載置板40の中央部において等間隔に区画した9つのエリア41には、図3に示すように、プローブ72を挿通させる直径が0.60mm程度の複数の挿通孔42が形成されている。この場合、載置板40aの各エリア41(以下、載置板40aのエリア41を「エリア41a」ともいう)は、1辺が50mm程度の略正方形にそれぞれ規定されている。また、エリア41aに形成された各挿通孔42は、回路基板P1,P2の各端子と同じ所定のピッチ(この例では、1mm程度)でマトリクス状に配列されている。一方、載置板40bの各エリア41(以下、載置板40bのエリア41を「エリア41b」ともいう)は、1辺が70mm程度の略正方形にそれぞれ規定されている。また、エリア41bに形成された各挿通孔42は、回路基板P3の各端子と同じ所定のピッチ(この例では、1.2mm程度)でマトリクス状に配列されている。また、載置板40には、本体部30の段部32に嵌め込む際に本体部30のガイドピン33を挿通させる2つのガイド孔43が形成されている。この場合、本体部30と載置板40とによって本発明における基体部が構成される。また、本体部30の段部32と段部32に嵌め込まれた載置板40とによって本発明における装着部が構成される。   The mounting plate 40 corresponds to the second plate-like body in the present invention, and is formed in a rectangular plate shape as shown in FIG. 2 so as to be fitted into the stepped portion 32 of the main body 30. Further, as shown in FIG. 3, a plurality of insertion holes 42 with a diameter of about 0.60 mm are formed in the nine areas 41 divided at equal intervals in the center of the mounting plate 40. Yes. In this case, each area 41 of the mounting plate 40a (hereinafter, the area 41 of the mounting plate 40a is also referred to as “area 41a”) is defined as a substantially square having a side of about 50 mm. Further, the insertion holes 42 formed in the area 41a are arranged in a matrix at the same predetermined pitch (about 1 mm in this example) as the terminals of the circuit boards P1 and P2. On the other hand, each area 41 of the mounting plate 40b (hereinafter, the area 41 of the mounting plate 40b is also referred to as “area 41b”) is defined as a substantially square having a side of about 70 mm. Further, the insertion holes 42 formed in the area 41b are arranged in a matrix at the same predetermined pitch (in this example, about 1.2 mm) as each terminal of the circuit board P3. In addition, the mounting plate 40 is formed with two guide holes 43 through which the guide pins 33 of the main body 30 are inserted when fitted into the step 32 of the main body 30. In this case, the main body 30 and the mounting plate 40 constitute a base body in the present invention. Further, the mounting portion in the present invention is constituted by the step portion 32 of the main body portion 30 and the mounting plate 40 fitted into the step portion 32.

各嵌め込み板50は、本発明における第1板状体に相当し、図2に示すように、回路基板Pの厚みとほぼ同じ厚みで、かつ載置板40とほぼ同じサイズの矩形の板状に構成されて、本体部30の段部32に嵌め込み可能に構成されている。また、各嵌め込み板50には、9つの嵌め込み孔51が形成されている。この場合、嵌め込み板50aの嵌め込み孔51(以下、嵌め込み板50aの嵌め込み孔51を「嵌め込み孔51a」ともいう)は、回路基板P1とほぼ同じサイズの略正方形に形成されて、回路基板P1を嵌め込み可能に構成されると共に、載置板40aの上に重ね合わせた状態において、載置板40aの各エリア41aにそれぞれ対向するようにその形成位置が規定されている。また、嵌め込み板50bの嵌め込み孔51(以下、嵌め込み板50bの嵌め込み孔51を「嵌め込み孔51b」ともいう)は、回路基板P2とほぼ同じサイズの略正方形に形成されて、回路基板P2を嵌め込み可能に構成されると共に、載置板40aの上に重ね合わせた状態において、載置板40aの各エリア41aにそれぞれ対向するようにその形成位置が規定されている。さらに、嵌め込み板50cの嵌め込み孔51(以下、嵌め込み板50cの嵌め込み孔51を「嵌め込み孔51c」ともいう)は、回路基板P3とほぼ同じサイズの略正方形に形成されて、回路基板P3を嵌め込み可能に構成されると共に、載置板40bの上に重ね合わせた状態において、載置板40bの各エリア41bにそれぞれ対向するようにその形成位置が規定されている。また、各嵌め込み板50には、本体部30の段部32に嵌め込む際に本体部30のガイドピン33を挿通させる2つのガイド孔52が形成されている。   Each fitting plate 50 corresponds to the first plate-like body in the present invention. As shown in FIG. 2, the fitting plate 50 has a rectangular plate shape that has substantially the same thickness as the circuit board P and substantially the same size as the mounting plate 40. It is comprised so that it can fit in the step part 32 of the main-body part 30. As shown in FIG. Each fitting plate 50 is formed with nine fitting holes 51. In this case, the fitting hole 51 of the fitting plate 50a (hereinafter, the fitting hole 51 of the fitting plate 50a is also referred to as the “fitting hole 51a”) is formed in a substantially square shape having substantially the same size as the circuit board P1, and the circuit board P1 is formed. In addition to being configured to be fitted, the formation positions thereof are defined so as to face the respective areas 41a of the mounting plate 40a in a state of being superimposed on the mounting plate 40a. In addition, the fitting hole 51 of the fitting plate 50b (hereinafter, the fitting hole 51 of the fitting plate 50b is also referred to as the “fitting hole 51b”) is formed in a substantially square having the same size as the circuit board P2, and the circuit board P2 is fitted therein. In addition, the formation positions are defined so as to face the respective areas 41a of the placement plate 40a in a state of being superimposed on the placement plate 40a. Further, the fitting hole 51 of the fitting plate 50c (hereinafter, the fitting hole 51 of the fitting plate 50c is also referred to as the “fitting hole 51c”) is formed in a substantially square having substantially the same size as the circuit board P3, and the circuit board P3 is fitted therein. In addition to being configured, the formation positions are defined so as to face the respective areas 41b of the mounting plate 40b in a state of being superimposed on the mounting plate 40b. Each fitting plate 50 is formed with two guide holes 52 through which the guide pins 33 of the main body 30 are inserted when fitting into the stepped portion 32 of the main body 30.

シャッター4は、図1に示すように、開閉機構5によって互いに接離する方向に沿って移動させられることにより、テーブル2の開口部21(テーブル2に嵌め込まれた回路基板保持具3の上方の空間)を開閉する。また、シャッター4は、図7,8に示すように、3つの開口部4a、および3つの切欠部4bを備えて構成されている。この場合、開口部4aは、検査対象の回路基板Pの外形よりもやや小さい矩形状にその形状が規定されている。また、切欠部4bは、両シャッター4が互いに当接した状態において、一方のシャッター4の切欠部4bと他方のシャッター4の切欠部4bとが相俟って開口部4aと同じ形状でかつ同じ大きさの開口部を構成するようにその形状が規定されている。また、各開口部4aおよび各切欠部4bは、両シャッター4が互いに当接した状態において、各開口部4a、および各切欠部4bによって構成される開口部がテーブル2に装着された回路基板保持具3における嵌め込み板50の嵌め込み孔51にそれぞれ対向するようにその形成位置が規定されている。   As shown in FIG. 1, the shutter 4 is moved along the direction in which the shutter 5 is moved toward and away from each other by the opening / closing mechanism 5, thereby opening the opening 21 of the table 2 (above the circuit board holder 3 fitted in the table 2). Open and close the space. The shutter 4 includes three openings 4a and three notches 4b as shown in FIGS. In this case, the shape of the opening 4a is defined as a rectangular shape slightly smaller than the outer shape of the circuit board P to be inspected. The notch 4b has the same shape and the same shape as the opening 4a by combining the notch 4b of one shutter 4 and the notch 4b of the other shutter 4 in a state where both shutters 4 are in contact with each other. The shape is defined so as to constitute a size opening. In addition, each opening 4a and each notch 4b are held by the circuit board in which the opening constituted by each opening 4a and each notch 4b is mounted on the table 2 in a state where both shutters 4 are in contact with each other. The formation positions are defined so as to face the fitting holes 51 of the fitting plate 50 in the tool 3.

開閉機構5は、制御部9の制御に従ってシャッター4を開閉(移動)させる。吸気装置6は、制御部9の制御に従って作動することにより、回路基板保持具3とシャッター4とによって形成される空間内の空気を吸気溝35、吸気孔34、吸気路23および吸気管61(図1参照)を通して吸引する。移動機構7は、制御部9の制御に従い、図外のアームに取り付けられたプローブ保持具71a(または71b、図1参照:以下、プローブ保持具71a,71bを区別しないときには「プローブ保持具71」ともいう)をテーブル2の下方において移動させる。この場合、プローブ保持具71aには、載置板40の挿通孔42を挿通可能な(例えば、直径が0.53mm程度の)針状に形成されたプローブ72が、載置板40aのエリア41aに形成されている各挿通孔42と同じピッチで同じ数だけマトリクス状に配列(植設)された状態で保持されている。また、プローブ保持具71bには、上記のプローブ72が、載置板40bのエリア41bに形成された各挿通孔42と同じピッチで同じ数だけマトリクス状に配列された状態で保持(植設)されている。移動機構8は、制御部9の制御に従い、例えば、単一のプローブ82が保持されたプローブ保持具81をテーブル2の上方において移動させる。制御部9は、開閉機構5、吸気装置6、移動機構7,8を制御する。また、制御部9は、プローブ72およびプローブ82を介して出力または入力される検査用信号に基づいて回路基板Pについての所定の電気的な検査を実行する。   The opening / closing mechanism 5 opens / closes (moves) the shutter 4 under the control of the control unit 9. The intake device 6 operates according to the control of the control unit 9, thereby allowing air in the space formed by the circuit board holder 3 and the shutter 4 to flow into the intake groove 35, the intake hole 34, the intake path 23, and the intake pipe 61 ( Aspirate through (see Figure 1). The moving mechanism 7 controls the probe holder 71a (or 71b, see FIG. 1 below) attached to an arm not shown in accordance with the control of the control unit 9 when the probe holders 71a and 71b are not distinguished from each other. Is also moved below the table 2. In this case, a probe 72 formed in a needle shape (for example, a diameter of about 0.53 mm) that can be inserted through the insertion hole 42 of the mounting plate 40 is inserted into the probe holder 71a. Are held in a state of being arranged (planted) in a matrix at the same pitch as the insertion holes 42 formed in the same shape. The probe holder 71b holds the above-described probes 72 in a state where the same number of the probes 72 are arranged in a matrix at the same pitch as the insertion holes 42 formed in the area 41b of the mounting plate 40b. Has been. The moving mechanism 8 moves, for example, a probe holder 81 holding a single probe 82 above the table 2 under the control of the control unit 9. The control unit 9 controls the opening / closing mechanism 5, the intake device 6, and the moving mechanisms 7 and 8. In addition, the control unit 9 performs a predetermined electrical inspection on the circuit board P based on the inspection signal output or input via the probe 72 and the probe 82.

次に、回路基板検査装置1を用いた回路基板P1,P2,P3についての電気的な検査(以下、単に「検査」ともいう)の検査方法について、図面を参照して説明する。   Next, an inspection method for electrical inspection (hereinafter also simply referred to as “inspection”) for the circuit boards P1, P2, and P3 using the circuit board inspection apparatus 1 will be described with reference to the drawings.

最初に、回路基板P1についての検査方法について説明する。なお、初期状態において、図1に示すように、両シャッター4,4が互いに離間して回路基板保持具3の上方の空間が開放されているものとする。また、移動機構7のアームには、プローブ保持具71aが取り付けられているものとする。この検査では、同図に示すように、まず、テーブル2の段部22に回路基板保持具3の本体部30を嵌め込む。この状態では、本体部30の吸気孔34とテーブル2の吸気路23とが連通する。この場合、段部22の平面部22aからテーブル2の表面までの高さが本体部30の厚みとほぼ同じとなるように規定されているため、この状態では、テーブル2の表面と本体部30の表面とがほぼ面一となっている。次いで、本体部30をテーブル2にねじ止めする。続いて、図4に示すように、載置板40aのガイド孔43に本体部30のガイドピン33を挿通させつつ、本体部30の段部32に載置板40aを嵌め込む。この場合、段部32が、載置板40aとほぼ同じサイズに形成されているため、載置板40aの移動が確実に規制される。なお、同図、および後述する図5〜図8では、発明の理解を容易とするため、テーブル2の図示を省略している。     First, an inspection method for the circuit board P1 will be described. In the initial state, as shown in FIG. 1, it is assumed that the shutters 4 and 4 are separated from each other and the space above the circuit board holder 3 is opened. It is assumed that a probe holder 71a is attached to the arm of the moving mechanism 7. In this inspection, as shown in the figure, first, the main body portion 30 of the circuit board holder 3 is fitted into the step portion 22 of the table 2. In this state, the intake hole 34 of the main body 30 communicates with the intake passage 23 of the table 2. In this case, since the height from the flat surface portion 22a of the step portion 22 to the surface of the table 2 is defined to be substantially the same as the thickness of the main body portion 30, the surface of the table 2 and the main body portion 30 are in this state. Is almost flush with the surface. Next, the main body 30 is screwed to the table 2. Subsequently, as shown in FIG. 4, the mounting plate 40 a is fitted into the step portion 32 of the main body 30 while the guide pin 33 of the main body 30 is inserted into the guide hole 43 of the mounting plate 40 a. In this case, since the step part 32 is formed in the substantially same size as the mounting plate 40a, the movement of the mounting plate 40a is controlled reliably. In FIG. 5 and FIG. 5 to FIG. 8 described later, the table 2 is not shown for easy understanding of the invention.

次いで、図5に示すように、嵌め込み板50aのガイド孔52に本体部30のガイドピン33を挿通させつつ、本体部30の段部32に嵌め込んだ載置板40aの上に、つまり本体部30の段部32と載置板40aとによって構成された本発明における装着部に嵌め込み板50aを嵌め込む(装着する)。この場合、段部32が、嵌め込み板50aとほぼ同じサイズに形成されているため、嵌め込み板50aの移動が確実に規制される。また、段部32の平面部32aから本体部30の表面までの高さが、重ね合わせた状態の両板40a,50aの厚みの合計とほぼ同じとなるように規定されているため、この状態では、テーブル2および本体部30の表面と嵌め込み板50aの表面とがほぼ面一となっている。   Next, as shown in FIG. 5, the guide pin 33 of the main body 30 is inserted into the guide hole 52 of the fitting plate 50 a, and the main body 30 is placed on the mounting plate 40 a fitted into the step 32. The fitting plate 50a is fitted into (attached to) the mounting portion in the present invention constituted by the step portion 32 of the portion 30 and the mounting plate 40a. In this case, since the step part 32 is formed in substantially the same size as the fitting plate 50a, the movement of the fitting plate 50a is reliably restricted. Further, since the height from the flat surface portion 32a of the step portion 32 to the surface of the main body portion 30 is defined to be substantially the same as the sum of the thicknesses of the stacked plates 40a and 50a, this state. Then, the surface of the table 2 and the main-body part 30 and the surface of the fitting plate 50a are substantially flush.

続いて、図6に示すように、端子が配設された面(下面)を下向きにした状態で9つの回路基板P1を嵌め込み板50aの各嵌め込み孔51aにそれぞれ嵌め込む。この際に、回路基板P1の下面が載置板40aによって支持されることにより、回路基板P1が載置板40aによって保持される。この場合、嵌め込み板50aが回路基板P1の厚みとほぼ同じ厚みに形成されているため、この状態では、テーブル2、本体部30および嵌め込み板50aの表面と回路基板P1の表面とがほぼ面一となっている。また、この状態では、嵌め込み板50aの各嵌め込み孔51aと載置板40aの各エリア41aとがそれぞれ対向しているため、回路基板P1の下面の各端子と各エリア41aに形成された各挿通孔42とがそれぞれ対向している。   Subsequently, as shown in FIG. 6, nine circuit boards P1 are fitted into the respective fitting holes 51a of the fitting plate 50a with the surface (lower surface) on which the terminals are disposed facing downward. At this time, the lower surface of the circuit board P1 is supported by the mounting plate 40a, whereby the circuit board P1 is held by the mounting plate 40a. In this case, since the fitting plate 50a is formed to have almost the same thickness as the circuit board P1, in this state, the surface of the table 2, the main body 30 and the fitting plate 50a is substantially flush with the surface of the circuit board P1. It has become. Further, in this state, since each fitting hole 51a of the fitting plate 50a and each area 41a of the mounting plate 40a are opposed to each other, each insertion formed in each terminal and each area 41a on the lower surface of the circuit board P1. The holes 42 are opposed to each other.

次いで、回路基板検査装置1を作動させる。この際に、制御部9が、図7,8に示すように、開閉機構5を制御して両シャッター4,4を互いに当接する方向に沿って移動させることにより、回路基板保持具3の上方の空間を閉塞させる。この状態では、図8に示すように、シャッター4の各開口部4aおよび各切欠部4bによって構成される開口部が、回路基板保持具3によって保持されている各回路基板P1にそれぞれ対向している。続いて、制御部9は、吸気装置6を作動させる。この際には、図9に示すように、回路基板保持具3とシャッター4とによって形成される空間内の空気が、吸気溝35、吸気孔34、吸気路23および吸気管61(図1参照)を通って吸気装置6によって吸引されるため、回路基板保持具3(嵌め込み板50aおよび本体部30)の表面にシャッター4が吸着される。この結果、シャッター4によって回路基板P1が載置板40aに向けて押圧されて、回路基板P1が確実に保持される。   Next, the circuit board inspection apparatus 1 is operated. At this time, as shown in FIGS. 7 and 8, the control unit 9 controls the opening / closing mechanism 5 to move the shutters 4 and 4 along the direction in which the shutters 4 and 4 are in contact with each other. Block the space. In this state, as shown in FIG. 8, the openings formed by the openings 4 a and the notches 4 b of the shutter 4 face the circuit boards P <b> 1 held by the circuit board holder 3. Yes. Subsequently, the control unit 9 operates the intake device 6. At this time, as shown in FIG. 9, the air in the space formed by the circuit board holder 3 and the shutter 4 becomes the intake groove 35, the intake hole 34, the intake passage 23, and the intake pipe 61 (see FIG. 1). ), The shutter 4 is adsorbed on the surface of the circuit board holder 3 (the fitting plate 50a and the main body 30). As a result, the circuit board P1 is pressed toward the mounting plate 40a by the shutter 4, and the circuit board P1 is securely held.

次いで、制御部9は、移動機構7を制御して、プローブ保持具71aをテーブル2の下方において移動させると共に、載置板40aの各エリア41aのうちの1つに対向する位置でプローブ保持具71aの移動を停止させる。続いて、制御部9は、移動機構7を制御してプローブ保持具71aを回路基板P1に近接する方向(この例では上方向)に移動させる。この場合、載置板40aの各エリア41aに形成された各挿通孔42の配列ピッチ、およびプローブ72の配列ピッチが回路基板P1における端子の配列ピッチと同じ配列ピッチに規定されているため、図10に示すように、各プローブ72が、各挿通孔42を挿通して回路基板P1の各端子(図示せず)に接触させられる。次いで、制御部9は、移動機構8を制御して、プローブ保持具81をテーブル2の上方において移動させると共に、回路基板P1の表面に配設されている端子に対向する位置でプローブ保持具81の移動を停止させる。続いて、制御部9は、移動機構8を制御してプローブ保持具81を回路基板P1に近接する方向(この例では下方向)に移動させることにより、同図に示すように、回路基板P1の表面の端子にプローブ82を接触させる。次いで、制御部9は、プローブ72およびプローブ82を介して出力または入力された検査用信号に基づいて回路基板P1についての検査を実行する。続いて、制御部9は、上記した動作と同様に動作することにより、回路基板保持具3に保持されている他の回路基板P1についての検査を実行する。   Next, the control unit 9 controls the moving mechanism 7 to move the probe holder 71a below the table 2 and at a position facing one of the areas 41a of the mounting plate 40a. The movement of 71a is stopped. Subsequently, the control unit 9 controls the moving mechanism 7 to move the probe holder 71a in a direction approaching the circuit board P1 (in this example, upward). In this case, since the arrangement pitch of each insertion hole 42 formed in each area 41a of the mounting plate 40a and the arrangement pitch of the probes 72 are defined to be the same arrangement pitch as the arrangement pitch of the terminals on the circuit board P1, As shown in FIG. 10, each probe 72 is inserted through each insertion hole 42 and brought into contact with each terminal (not shown) of the circuit board P1. Next, the control unit 9 controls the moving mechanism 8 to move the probe holder 81 above the table 2 and at the position facing the terminal disposed on the surface of the circuit board P1. Stop moving. Subsequently, the control unit 9 controls the moving mechanism 8 to move the probe holder 81 in a direction close to the circuit board P1 (downward in this example), thereby, as shown in FIG. The probe 82 is brought into contact with the terminal on the surface of the substrate. Next, the control unit 9 performs an inspection on the circuit board P <b> 1 based on the inspection signal output or input via the probe 72 and the probe 82. Subsequently, the control unit 9 performs an inspection on the other circuit board P1 held by the circuit board holder 3 by operating in the same manner as described above.

次いで、回路基板保持具3に保持されている全ての回路基板P1についての検査を終了したときには、制御部9は、吸気装置6の作動を停止させた後に、開閉機構5を制御して両シャッター4,4を互いに離間する方向に沿って移動させることにより、回路基板保持具3の上方の空間を開放させる。これにより、回路基板P1についての検査が完了する。   Next, when the inspection for all the circuit boards P1 held by the circuit board holder 3 is completed, the control unit 9 stops the operation of the intake device 6 and then controls the opening / closing mechanism 5 to perform both shutters. The space above the circuit board holder 3 is opened by moving the fourth and fourth members 4 in a direction away from each other. Thereby, the inspection of the circuit board P1 is completed.

次に、回路基板P2についての検査方法について説明する。ここで、この回路基板保持具3では、嵌め込み板50を交換することで、複数種類の回路基板Pについての検査を行うことが可能となっている。この場合、回路基板P2についての検査では、回路基板P2が嵌め込み板50aの嵌め込み孔51aよりも大きいため、回路基板P2を嵌め込み可能な嵌め込み孔51bが形成された嵌め込み板50bを、嵌め込み板50aに代えて用いる。このため、まず、本体部30の段部32に嵌め込まれている嵌め込み板50aを取り外して、嵌め込み板50bを段部32に嵌め込む。続いて、端子が配設された面(下面)を下向きにした状態で9つの回路基板P2を嵌め込み板50bの各嵌め込み孔51bにそれぞれ嵌め込む。この状態では、嵌め込み板50bの各嵌め込み孔51bと載置板40aの各エリア41aとがそれぞれ対向しているため、回路基板P2の下面の各端子と各エリア41aに形成された各挿通孔42とがそれぞれ対向している。   Next, an inspection method for the circuit board P2 will be described. Here, in this circuit board holder 3, it is possible to inspect a plurality of types of circuit boards P by replacing the fitting plate 50. In this case, in the inspection of the circuit board P2, since the circuit board P2 is larger than the fitting hole 51a of the fitting board 50a, the fitting board 50b in which the fitting hole 51b into which the circuit board P2 can be fitted is formed is used as the fitting board 50a. Use instead. For this reason, first, the fitting plate 50 a fitted into the step portion 32 of the main body 30 is removed, and the fitting plate 50 b is fitted into the step portion 32. Subsequently, nine circuit boards P2 are fitted into the respective fitting holes 51b of the fitting plate 50b with the surface (lower surface) on which the terminals are disposed facing downward. In this state, since each fitting hole 51b of the fitting plate 50b and each area 41a of the mounting plate 40a face each other, each terminal on the lower surface of the circuit board P2 and each insertion hole 42 formed in each area 41a. Are facing each other.

次いで、回路基板検査装置1を作動させる。この際に、制御部9が、上記した回路基板P1についての検査の際の動作と同様にして両シャッター4,4によって回路基板保持具3の上方の空間を閉塞させた後に、吸気装置6を作動させる。これにより、シャッター4によって回路基板P2が載置板40aに向けて押圧されて、回路基板P2が確実に保持される。続いて、制御部9は、移動機構7を制御して、載置板40aの各エリア41aのうちの1つに対向するテーブル2の下方の位置から上方向に向けてプローブ保持具71aを移動させる。この際に、上記した回路基板P1についての検査の際の動作と同様にして各プローブ72が、各挿通孔42を挿通して回路基板P2の各端子に接触させられる。   Next, the circuit board inspection apparatus 1 is operated. At this time, after the control unit 9 closes the space above the circuit board holder 3 with the two shutters 4 and 4 in the same manner as the operation for the inspection of the circuit board P1 described above, Operate. Thereby, the circuit board P2 is pressed toward the mounting plate 40a by the shutter 4, and the circuit board P2 is securely held. Subsequently, the control unit 9 controls the moving mechanism 7 to move the probe holder 71a upward from a position below the table 2 facing one of the areas 41a of the mounting plate 40a. Let At this time, each probe 72 is inserted through each insertion hole 42 and brought into contact with each terminal of the circuit board P2 in the same manner as the operation for the inspection of the circuit board P1 described above.

次いで、制御部9は、移動機構8を制御して、プローブ72を接触させている回路基板P2の上方から下方向に向けてプローブ保持具81を移動させることにより、その回路基板P2の表面の端子にプローブ82を接触させる。続いて、制御部9は、プローブ72およびプローブ82を介して出力または入力される検査用信号に基づいて回路基板P2についての検査を実行する。次いで、制御部9は、上記と同様に動作することにより、回路基板保持具3に保持されている他の回路基板P2についての検査を実行する。続いて、回路基板保持具3に保持されている全ての回路基板P2についての検査を終了したときには、制御部9は、吸気装置6の作動を停止させた後に、両シャッター4,4を互いに離間する方向に沿って移動させて回路基板保持具3の上方の空間を開放させる。これにより、回路基板P2についての検査が完了する。   Next, the control unit 9 controls the moving mechanism 8 to move the probe holder 81 from the upper side to the lower side of the circuit board P2 in contact with the probe 72, so that the surface of the circuit board P2 is moved. The probe 82 is brought into contact with the terminal. Subsequently, the control unit 9 performs an inspection on the circuit board P <b> 2 based on the inspection signal output or input via the probe 72 and the probe 82. Next, the control unit 9 operates in the same manner as described above to execute the inspection for the other circuit board P2 held by the circuit board holder 3. Subsequently, when the inspection for all the circuit boards P2 held by the circuit board holder 3 is completed, the control unit 9 stops the operation of the intake device 6 and then separates the shutters 4 and 4 from each other. The space above the circuit board holder 3 is opened by moving along the direction of movement. Thereby, the inspection of the circuit board P2 is completed.

次に、回路基板P3についての検査方法について説明する。この場合、回路基板P3についての検査では、回路基板P3が嵌め込み板50bの嵌め込み孔51bよりも大きいため、回路基板P3を嵌め込み可能な嵌め込み孔51cが形成された嵌め込み板50cを、嵌め込み板50bに代えて用いる。また、回路基板P3が載置板40aのエリア41aのサイズよりも大きく、かつ回路基板P3の各端子の配列ピッチがエリア41aに形成された各挿通孔42の配列ピッチとは異なるため、回路基板P3よりも大きいサイズで、かつ配列ピッチが同ピッチのエリア41bを有する載置板40bを載置板40aに代えて用いる。このため、まず、本体部30の段部32に嵌め込まれている嵌め込み板50bおよび載置板40aを取り外して、載置板40bおよび嵌め込み板50cを段部32に嵌め込む。次いで、移動機構7のアームに取り付けられているプローブ保持具71aを取り外して、プローブ保持具71bを取り付ける。続いて、端子が配設された面(下面)を下向きにした状態で9つの回路基板P3を嵌め込み板50cの各嵌め込み孔51cにそれぞれ嵌め込む。この状態では、嵌め込み板50cの各嵌め込み孔51cと載置板40bの各エリア41bとがそれぞれ対向しているため、回路基板P3の下面の各端子と各エリア41bに形成された各挿通孔42とがそれぞれ対向している。   Next, an inspection method for the circuit board P3 will be described. In this case, in the inspection of the circuit board P3, since the circuit board P3 is larger than the fitting hole 51b of the fitting board 50b, the fitting board 50c in which the fitting hole 51c into which the circuit board P3 can be fitted is formed is used as the fitting board 50b. Use instead. Further, since the circuit board P3 is larger than the size of the area 41a of the mounting plate 40a and the arrangement pitch of the terminals of the circuit board P3 is different from the arrangement pitch of the insertion holes 42 formed in the area 41a, the circuit board A mounting plate 40b having an area 41b having a size larger than P3 and the same arrangement pitch is used instead of the mounting plate 40a. For this reason, first, the mounting plate 50 b and the mounting plate 40 a that are inserted into the step portion 32 of the main body 30 are removed, and the mounting plate 40 b and the mounting plate 50 c are inserted into the step portion 32. Next, the probe holder 71a attached to the arm of the moving mechanism 7 is removed, and the probe holder 71b is attached. Subsequently, nine circuit boards P3 are fitted into the respective fitting holes 51c of the fitting plate 50c with the surface (lower surface) on which the terminals are disposed facing downward. In this state, since each fitting hole 51c of the fitting plate 50c and each area 41b of the mounting plate 40b are opposed to each other, each terminal on the lower surface of the circuit board P3 and each insertion hole 42 formed in each area 41b. Are facing each other.

次いで、回路基板検査装置1を作動させる。この際に、制御部9が、上記した回路基板P1,P2についての検査の際の動作と同様にして両シャッター4,4によって回路基板保持具3の上方の空間を閉塞させた後に、吸気装置6を作動させる。これにより、シャッター4によって回路基板P3が載置板40bに向けて押圧されて、回路基板P3が確実に保持される。続いて、制御部9は、移動機構7を制御して、載置板40bの各エリア41bのうちの1つに対向するテーブル2の下方の位置から上方向に向けてプローブ保持具71bを移動させる。この際に、上記した回路基板P1,P2についての検査の際の動作と同様にして各プローブ72が、各挿通孔42を挿通して回路基板P3の各端子に接触させられる。   Next, the circuit board inspection apparatus 1 is operated. At this time, after the control unit 9 closes the space above the circuit board holder 3 with both shutters 4 and 4 in the same manner as the operation for the inspection of the circuit boards P1 and P2, the air intake device 6 is activated. Thereby, the circuit board P3 is pressed toward the mounting plate 40b by the shutter 4, and the circuit board P3 is securely held. Subsequently, the control unit 9 controls the moving mechanism 7 to move the probe holder 71b upward from a position below the table 2 facing one of the areas 41b of the mounting plate 40b. Let At this time, each probe 72 is inserted through each insertion hole 42 and brought into contact with each terminal of the circuit board P3 in the same manner as in the inspection for the circuit boards P1 and P2.

次いで、制御部9は、移動機構8を制御して、プローブ72を接触させている回路基板P3の上方から下方向に向けてプローブ保持具81を移動させることにより、その回路基板P3の表面の端子にプローブ82を接触させる。続いて、制御部9は、プローブ72およびプローブ82を介して出力または入力される検査用信号に基づいて回路基板P3についての検査を実行する。次いで、制御部9は、上記と同様に動作することにより、回路基板保持具3に保持されている他の回路基板P3についての検査を実行する。続いて、回路基板保持具3に保持されている全ての回路基板P3についての検査を終了したときには、制御部9は、吸気装置6の作動を停止させた後に、両シャッター4,4を互いに離間する方向に沿って移動させて回路基板保持具3の上方の空間を開放させる。これにより、回路基板P3についての検査が完了する。   Next, the control unit 9 controls the moving mechanism 8 to move the probe holder 81 from the upper side to the lower side of the circuit board P3 with which the probe 72 is in contact, so that the surface of the circuit board P3 is moved. The probe 82 is brought into contact with the terminal. Subsequently, the control unit 9 performs an inspection on the circuit board P3 based on an inspection signal output or input via the probe 72 and the probe 82. Next, the control unit 9 operates in the same manner as described above to execute an inspection for the other circuit board P3 held by the circuit board holder 3. Subsequently, when the inspection for all the circuit boards P3 held by the circuit board holder 3 is completed, the control unit 9 stops the operation of the intake device 6 and then separates the shutters 4 and 4 from each other. The space above the circuit board holder 3 is opened by moving along the direction of movement. Thereby, the inspection for the circuit board P3 is completed.

このように、この回路基板保持具3によれば、回路基板Pを嵌め込み可能な嵌め込み孔51を形成した嵌め込み板50と、嵌め込み板50を装着可能でかつ装着状態の嵌め込み板50の嵌め込み孔51に嵌め込まれた回路基板Pを保持する載置板40および本体部30とを備えると共に、プローブ72を挿通可能な複数の挿通孔42を回路基板Pの端子の配列ピッチと同じ所定の配列ピッチで載置板40に形成したことにより、嵌め込み孔51の大きさや形状が異なる複数種類の嵌め込み板50を作製しておくことで、嵌め込み板50を交換するだけで大きさや形状の異なる複数種類の回路基板Pについての検査を行うことができる。したがって、回路基板Pの種類毎に回路基板保持具(基板載置台)自体の交換が必要となる従来の構成と比較して、コストを十分に低減することができる。また、嵌め込み板50を交換するだけでよいため、上記(回路基板保持具自体を交換する)従来の構成とは異なり、例えば、回路基板保持具3の設置位置と移動機構7,8の設置位置との位置合わせの作業や、回路基板保持具3の高さ調整の作業等を不要とすることができる。したがって、複数種類の回路基板を検査する際の検査効率を確実に向上させることができる。   Thus, according to the circuit board holder 3, the fitting plate 50 in which the fitting hole 51 into which the circuit board P can be fitted is formed, and the fitting hole 51 of the fitting board 50 in which the fitting plate 50 can be mounted and in the mounted state. A plurality of insertion holes 42 through which the probes 72 can be inserted at a predetermined arrangement pitch that is the same as the arrangement pitch of the terminals of the circuit board P. By forming a plurality of types of fitting plates 50 having different sizes and shapes of the fitting holes 51 by forming the mounting plate 40, a plurality of types of circuits having different sizes and shapes can be obtained simply by replacing the fitting plate 50. Inspection of the substrate P can be performed. Therefore, the cost can be sufficiently reduced as compared with the conventional configuration in which the circuit board holder (substrate mounting table) itself needs to be replaced for each type of circuit board P. Further, since it is only necessary to replace the fitting plate 50, for example, the installation position of the circuit board holder 3 and the installation positions of the moving mechanisms 7 and 8 are different from the conventional configuration (which replaces the circuit board holder itself). And the work of adjusting the height of the circuit board holder 3 can be made unnecessary. Therefore, it is possible to reliably improve the inspection efficiency when inspecting a plurality of types of circuit boards.

また、この回路基板保持具3によれば、開口部31の口縁部に嵌め込み板50を装着可能な段部32が形成された本体部30と、挿通孔42が形成された載置板40とを備えたことにより、端子の配列ピッチが互いに異なる複数種類の回路基板Pについての検査を行うときであっても、各配列ピッチに対応する配列ピッチで挿通孔42を形成した複数種類の載置板40を作製しておくことで、載置板40を交換するだけでこれらの複数種類の回路基板Pについての検査を行うことができる。   Further, according to the circuit board holder 3, the main body portion 30 in which the step portion 32 to which the fitting plate 50 can be attached is formed at the rim portion of the opening portion 31, and the mounting plate 40 in which the insertion hole 42 is formed. Even when a plurality of types of circuit boards P having different terminal arrangement pitches are inspected, a plurality of types of mounting holes 42 in which the insertion holes 42 are formed at an arrangement pitch corresponding to each arrangement pitch. By preparing the mounting plate 40, these plural types of circuit boards P can be inspected simply by replacing the mounting plate 40.

また、この回路基板保持具3によれば、本体部30を貫通する吸気孔34と、段部32の周囲に形成されて吸気孔34に連通する吸気溝35とを備えたことにより、回路基板Pが保持された回路基板保持具3の上方の空間をシャッター4によって閉塞して、回路基板保持具3とシャッター4とによって形成される空間内の空気を吸気溝35および吸気孔34を通して吸引することで、回路基板保持具3(嵌め込み板50および本体部30)の表面にシャッター4を吸着させることができる。このため、シャッター4によって回路基板Pを載置板40に向けて押圧させることができる結果、回路基板Pを回路基板保持具3によって確実に保持させることができる。   Further, according to the circuit board holder 3, the circuit board is provided by including the intake hole 34 that penetrates the main body portion 30 and the intake groove 35 that is formed around the step portion 32 and communicates with the intake hole 34. The space above the circuit board holder 3 holding P is closed by the shutter 4, and the air in the space formed by the circuit board holder 3 and the shutter 4 is sucked through the intake groove 35 and the intake hole 34. Thus, the shutter 4 can be adsorbed on the surface of the circuit board holder 3 (the fitting plate 50 and the main body 30). For this reason, as a result of the circuit board P being pressed toward the mounting plate 40 by the shutter 4, the circuit board P can be reliably held by the circuit board holder 3.

なお、例えば、別体に形成した本体部30と載置板40とで本発明における基体部を構成した例について上記したが、本体部30と載置板40とを一体に形成した構成を採用することもできる。また、9つの嵌め込み孔51を形成した嵌め込み板50を例に挙げて説明したが、嵌め込み孔51の数はこれに限定されず任意の数に規定することができる。この場合、載置板40におけるエリア41の数を嵌め込み孔51の数と同じ数に規定することができる。また、例えば、複数のエリア41が含まれるような広いエリアを規定してこのエリアに挿通孔42を形成する構成を採用することもできるし、載置板40の全面に亘って挿通孔42を形成する構成、つまり、すべてのエリア41が含まれるような広いエリアに挿通孔42を形成する構成を採用することもできる。また、検査に際して、回路基板Pにおける端子の配列ピッチに応じて移動機構7のアームにプローブ保持具71a,71bを付け替える構成例について上記したが、プローブ保持具71a,71bの両者を予め取り付け可能に移動機構7を構成し、例えば、操作部の操作に応じて制御部9が移動機構7に対してプローブ保持具71a,71bの一方を移動させる構成を採用することもできる。また、複数のプローブ72が配設(植設)されたプローブ保持具71a,71bを例に挙げて説明したが、単一のプローブ72が配設されたプローブ保持具71を用いることもできる。さらに、載置板40における複数または全部のエリア41に形成された挿通孔42と同数のプローブ72が配設されたプローブ保持具71を用いることもできる。 Incidentally, if example embodiment, although an example in which the base portion of the present invention with a body portion 30 which is formed separately from the mounting plate 40, the structure integrally formed with a plate 40 mounting the main body portion 30 It can also be adopted. Further, although the fitting plate 50 in which the nine fitting holes 51 are formed has been described as an example, the number of the fitting holes 51 is not limited to this, and can be defined as an arbitrary number. In this case, the number of areas 41 in the mounting plate 40 can be defined to be the same as the number of the fitting holes 51. Further, for example, it is possible to adopt a configuration in which a wide area including a plurality of areas 41 is defined and the insertion hole 42 is formed in this area, or the insertion hole 42 is formed over the entire surface of the mounting plate 40. The structure to form, ie, the structure which forms the penetration hole 42 in a wide area where all the areas 41 are included, is also employable. In the inspection, the configuration example in which the probe holders 71a and 71b are replaced with the arm of the moving mechanism 7 in accordance with the arrangement pitch of the terminals on the circuit board P has been described above, but both the probe holders 71a and 71b can be attached in advance. For example, a configuration in which the moving mechanism 7 is configured such that the control unit 9 moves one of the probe holders 71a and 71b with respect to the moving mechanism 7 in accordance with the operation of the operating unit may be employed. In addition, the probe holders 71a and 71b in which a plurality of probes 72 are arranged (planted) have been described as an example, but a probe holder 71 in which a single probe 72 is arranged can also be used. Furthermore, a probe holder 71 in which the same number of probes 72 as the insertion holes 42 formed in a plurality or all of the areas 41 in the mounting plate 40 can be used.

回路基板検査装置1の構成を示す構成図である。1 is a configuration diagram showing a configuration of a circuit board inspection device 1. FIG. テーブル2、回路基板保持具3および回路基板P1,P2,P3の斜視図である。It is a perspective view of the table 2, the circuit board holder 3, and the circuit boards P1, P2, and P3. 載置板40におけるエリア41の平面図である。3 is a plan view of an area 41 in the mounting plate 40. FIG. 載置板40aを本体部30に嵌め込んだ状態の斜視図である。4 is a perspective view of a state in which a mounting plate 40a is fitted into the main body 30. FIG. 載置板40aおよび嵌め込み板50aを本体部30に嵌め込んだ状態の斜視図である。4 is a perspective view of a state in which a mounting plate 40a and a fitting plate 50a are fitted into the main body 30. FIG. 回路基板保持具3に回路基板P1を嵌め込んだ状態の斜視図である。3 is a perspective view of a state in which a circuit board P1 is fitted into the circuit board holder 3. FIG. シャッター4,4で回路基板保持具3の上方の空間を閉塞した状態の斜視図である。FIG. 4 is a perspective view of a state where a space above the circuit board holder 3 is closed by shutters 4 and 4. シャッター4,4で回路基板保持具3の上方の空間を閉塞した状態の平面図である。FIG. 4 is a plan view showing a state where a space above the circuit board holder 3 is closed by shutters 4 and 4. 図8におけるA−A線断面図である。It is the sectional view on the AA line in FIG. 回路基板P1にプローブ72,82を接触している状態の断面図である。It is sectional drawing of the state which has contacted the probes 72 and 82 with the circuit board P1.

符号の説明Explanation of symbols

3 回路基板保持具
30 本体部
31 開口部
32 段部
34 吸気孔
35 吸気溝
40,40a,40b 載置板
41a 挿通孔
50,50a〜50c 嵌め込み板
51 嵌め込み孔
72,82 プローブ
P,P1〜P3 回路基板
DESCRIPTION OF SYMBOLS 3 Circuit board holder 30 Main body part 31 Opening part 32 Step part 34 Intake hole 35 Intake groove 40, 40a, 40b Mounting board 41a Insertion hole 50, 50a-50c Insertion board 51 Insertion hole 72, 82 Probe P, P1-P3 Circuit board

Claims (2)

回路基板を保持可能に構成されて、前記回路基板に対する電気的な検査に用いられる回路基板保持具であって、
前記回路基板を嵌め込み可能な嵌め込み孔が形成された第1板状体と、当該第1板状体を装着可能な装着部が形成されると共に当該装着部に装着された当該第1板状体の前記嵌め込み孔に嵌め込まれた前記回路基板を保持する基体部とを備え、
前記基体部は、開口部が形成されると共に当該開口部の口縁部に段部が形成された本体部と、前記段部に嵌め込み可能に構成されると共に前記各挿通孔が形成された第2板状体とを備えて構成され、
前記装着部は、前記本体部の前記段部と当該段部に嵌め込まれた前記第2板状体とを備えて構成され、
前記装着部には、検査用のプローブを挿通可能な複数の挿通孔が所定の配列ピッチで形成されている回路基板保持具。
A circuit board holder configured to hold a circuit board and used for electrical inspection of the circuit board,
A first plate-like body formed with a fitting hole into which the circuit board can be fitted, and a mounting portion on which the first plate-like body can be attached, and the first plate-like body attached to the attachment portion. A base portion for holding the circuit board fitted in the fitting hole of
The base portion is formed with an opening portion and a body portion formed with a step portion at a mouth edge portion of the opening portion, and is configured to be fitted into the step portion, and the insertion holes are formed therein. Comprising two plate-like bodies,
The mounting portion includes the step portion of the main body portion and the second plate-like body fitted into the step portion,
A circuit board holder in which a plurality of insertion holes into which the inspection probes can be inserted are formed in the mounting portion at a predetermined arrangement pitch.
前記基体部は、当該基体部を貫通する吸気孔と、前記装着部の周囲に形成されて前記吸気孔に連通する吸気溝とを備えている請求項記載の回路基板保持具。 The base unit includes a suction hole penetrating the base portion, the circuit board holder of that claim 1, wherein a suction groove communicates with the intake hole is formed on the periphery of the mounting portion.
JP2005374112A 2005-12-27 2005-12-27 Circuit board holder Expired - Fee Related JP4865325B2 (en)

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JPH11150155A (en) * 1997-11-18 1999-06-02 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device and circuit board holding jig there for
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