JP4843771B2 - Dry spacer sprayer - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a dry spacer spraying device. More specifically, the present invention is to disperse spacers on a substrate in order to fix the two substrates at a parallel interval when the thin film transistor substrate and the color filter substrate are bonded together in the liquid crystal cell assembly process. The present invention relates to a dry spacer spraying apparatus.
[0002]
[Prior art]
In the process of assembling the liquid crystal cell, spherical spacers having a minute prescribed size are dispersed on the substrate in order to make the gap between the display elements accurate and uniform. As the spacer spraying method, there are a wet spraying method and a dry spraying method. The wet spraying method is a method of uniformly distributing the spacers on the substrate by dispersing the spacers in a solvent and spraying them as a liquid. This method has the merit that the device is inexpensive and the spacer itself is not charged, so that it can be sprayed with minimal external static electricity and the influence of the surroundings. The twisted nematic method and the super twisted nematic method can be used. Many liquid crystal elements are used. However, the solvent as a medium needs to be surely dried before reaching the substrate. Otherwise, the spacers aggregate as the solvent on the substrate is dried. Therefore, a volatile liquid must be used as the solvent and the chamber must be dried at a high temperature. Further, since aggregation is likely to occur in the spraying process, strict management is required from the stage of preparing the spacer dispersion liquid to the spraying moment in the apparatus. However, it is considered that this method has been used by liquid crystal display device manufacturers who have accumulated considerable experience.
The dry spraying method is a method in which the spacer itself is supplied and sprayed, and since it is not necessary to add anything to the spacer, preparation is very simple. As the dry spraying method, there are generally a charging method in which a spacer is put on an air stream and pumped and sprayed, and an electrostatic method in which the spacer is forcibly charged and sprayed. Since the electrostatic method can charge the spacers at a high voltage without being placed on the airflow, the spacer can be used efficiently, but it is not suitable for a wide range of applications. Since it reaches the substrate as it is, there is a problem that there is a risk that the pattern on the substrate is destroyed. In the charging method, it is difficult to separate and disperse the spacers, and various ideas and know-how are required. However, since the spacers are less charged, there is no worry like the electrostatic method.
At present, liquid crystal cells are widely used as display elements, and liquid crystal cells having different display structures are properly used according to various requirements. As the range of applications as display elements expands, such as an increase in types and an increase in size, the requirements have diversified, and various types of spacers have been developed correspondingly. For example, a minimum particle size of about 1 μm is developed. Spacers have also been developed. In addition, the substrate material is required to be sprayed not only on glass but also on a plastic film. On the other hand, the current spraying device does not always satisfy the performance including the high speed and reliability. For this reason, there is a need for a spacer spraying device that has higher performance and can meet a wide variety of requirements.
[0003]
[Problems to be solved by the invention]
The present invention is easy to prepare and handle spacers, can be used for large substrates, from small diameter spacers to large diameter spacers can be dispersed not only on glass substrates but also on film substrates, The object of the present invention is to provide a dry spacer spraying device having high spacer spraying efficiency, high speed spraying operation and high reliability.
[0004]
[Means for Solving the Problems]
  As a result of intensive research to solve the above problems, the present inventors weighed a fixed volume of spacer on a weighing pan in a dry spacer spraying device having a spraying chamber, a spacer weighing unit, and a spraying nozzle. It was found that high-speed and high-reliability spraying can be performed by pumping and dispersing the spacers to the multiplex nozzle, and the present invention has been completed based on this finding.
  That is, the present invention
(1) It has a spraying chamber for storing a substrate, a measuring unit for measuring a fixed volume of spacers corresponding to the spacer spraying density on the substrate, and a spraying nozzle provided on the ceiling of the spraying chamber. ElectricallyInner layer and outer layerLayers are insulatedTheA dry spacer spraying device, characterized in that the innermost layer surface of the chamber is a high-resistance conductive surface, and the innermost layer surface has a terminal for supplying a voltage from the outside,
(2) The dry spacer spraying device according to the first aspect, wherein a high voltage generation circuit for supplying a high voltage capable of switching between voltage and polarity is connected to a terminal for supplying a voltage from the outside,
(3) Item 1 or Item 2 wherein the spray nozzle is a multiplex nozzle having one supply port for supplying spacers and a plurality of independent spray holes for diffusing and spraying the supplied spacers on the substrate. Of dry spacer spraying device,
(4) The dry spacer spraying device according to item 3, wherein the multiplex nozzle comprises a hood that restricts the spraying area of the spacer.
(5) The dry spacer spraying device according to the third or fourth item, wherein the spray chamber has a plurality of multiplex nozzles on the ceiling.
(6) A spacer unit that measures a constant volume of spacer is a table provided with a plurality of weighing pans, and a spacer supply hopper that supplies the spacers to the weighing pan when vibration is applied, and the supply of the spacers to the weighing pan Weighing confirmation sensor unit having a sensor for confirming the amount, a slit wiper for slitting the spacer supplied to the weighing pan to a certain amount, a sensor for determining that the slit spacer has been slit to a certain amount, and a confirmation The dry spacer spraying device according to any one of claims 1 to 5, further comprising an ejector unit that sucks up the spacer on the weighing pan whose result is determined to be GO and sends it to the spray nozzle.
(7) The spacer supply hopper has a vibration drive control circuit that makes the high-frequency component, amplitude and frequency of vibration variable, and a sensor detection position adjustment mechanism that detects the amount of spacer supplied to the weighing pan. The dry spacer spraying device according to claim 6, comprising a sensor unit for adjusting the supply amount,
(8) A sixth sensor having a sensor for confirming the amount of spacers cut on the weighing pan, a distance sensor for confirming spacer planes of a plurality of weighing pans on the table, and a weighing confirmation sensor control circuit having a monitoring display function Or a dry spacer spraying device according to item 7, and
(9) The ejector unit that feeds the weighing pan spacer into the pressure feed pipe moves the ejector suction port up and down by the electromagnetic solenoid, sets the distance between the suction port and the weighing pan plane, and then drives the solenoid ON-OFF to move the spacer. The dry spacer spraying device according to any one of Items 6 to 8, which has a solenoid control circuit that does not give a strong impact force to the weighing pan when sucked and pressed against the weighing pan.
Is to provide.
The high resistance conductive surface described in (1) above refers to a conductive surface having a resistance value of several tens of MΩ or more.
[0005]
DETAILED DESCRIPTION OF THE INVENTION
A dry spacer spraying apparatus according to the present invention includes a spraying chamber that accommodates a substrate, a weighing unit that measures a fixed volume of spacers corresponding to the spacer spraying density on the substrate, and a spraying nozzle provided on the ceiling of the spraying chamber. Have. In the dry spacer spraying device of the present invention, the spray nozzle is preferably a multiplex nozzle.
Fig.1 (a) is a perspective view of the one aspect | mode of the dry-type spacer spraying apparatus of this invention, FIG.1 (b) is explanatory drawing of the one aspect | mode of a multiplex nozzle. The dry spacer spraying apparatus of this aspect includes a spraying chamber A, a spacer weighing unit B, and a spraying nozzle C for spraying spacers, and a substrate stand 1 on which a substrate for spraying spacers is placed in the lower part of the chamber. .
The spacer weighing unit B automatically supplies a spacer supplied in advance from the outside to the weighing pan in the unit prior to spraying, and sends the spacer on the weighing pan with a constant volume measured to the multiplex nozzle. Is a unit. The substrate table is attached to the moving table 2 and the entire table can be pulled out. Therefore, it can be seen only from the outside as a sealed door on the side of the table. By the switch operation of the operation panel 3 of the entire apparatus, the entire table can be automatically pulled out and inserted along the left and right moving guides on the side of the table installed inside by the air cylinder.
[0006]
In the dry spacer spraying apparatus of this aspect, the basic operation is performed as follows. That is, the movable table 2 is pulled out by turning on the table OUT switch on the operation panel, the substrate is placed on the substrate table attached to the table, and the movable table is placed in the spraying chamber by turning on the table IN switch on the operation panel. Next, by pressing the spray start switch on the operation panel, the measurement of the spacer is started and the operation for spraying is started. The operation for spraying is performed according to a spraying mode, parameters, and the like set in advance. These overall controls are performed by an apparatus controller provided at the lower part of the chamber.
The spacer is weighed by the weighing unit B, and the weighed spacer is sent out to the spacer supply port of the multiplex nozzle 120 provided in the ceiling portion of the spraying chamber (pressure feed 1). At the same time, pressurized gas is applied to the spray holes of the multiplex nozzle, and the first spray is performed on the region 121 in the spray mode (spray 1). Subsequently, in the same manner, the second application to the area 122 by the second measurement and the application mode (dispersion 2), the third application to the area 123 by the third measurement and the application mode (application 3), and the fourth time. The fourth spraying (spreading 4) is performed on the area 124 by the weighing and spraying mode. By dispersing the spacers in a plurality of times, the spacer distribution is averaged and a uniformly distributed state on the substrate is obtained. Further, during the dispersion of the spacers, the exhaust or electric field in the dispersion chamber can be set according to the characteristics of the spacers used. The dry spacer spraying apparatus of this embodiment is a manual operation machine, but it can be an in-line automatic machine by performing setting and taking out of the substrate with a robot in the same manner as the conventional spacer spraying apparatus.
[0007]
FIG. FIG. 2B is a perspective view of an aspect of the weighing unit, FIG. 2B is a perspective view of an aspect of the hopper unit, and FIG. 2C is a perspective view of an aspect of the weighing sensor unit. (d) is a perspective view of one mode of a weighing pan. The weighing unit of this aspect has a rotating table 201 in which four weighing dish units 200a, 200b, 200c, and 200d for measuring a spacer to be spread as a constant volume amount are arranged in units of 90 degrees. It is rotated by a rotary motor (not shown) provided thereunder. There is a weighing pan stop position detection pin 203 on the side of the table, and when each of the photoelectric sensors 202a, 202b, 202c and 202d (only 202a is shown) arranged in four directions stops at a position where the detection pin is detected, each weighing pan The position is arranged so that the position of each functional station described below is exactly the same. Each functional station is a hopper unit 20A for supplying spacers to the weighing pan, a weighing confirmation sensor unit 20B, and an ejector unit 20C for taking out the spacers on the weighing pan after weighing. A slit wiper 204 is provided between the hopper and the confirmation sensor. Is provided.
The hopper portion 20A includes two units, a hopper unit that supplies spacers to the weighing pan and a weighing sensor unit. The hopper unit has a hopper upper lid 2a1 for supplying spacers to the hopper 2a8 from the outside, and the hopper upper lid is screwed and fixed to the hopper body. When supplying the spacer, the upper lid of the hopper is removed and the spacer is supplied from the top of the hopper. The hopper 2a8 has a small-diameter spacer supply hole 2a3 for dropping the spacer into the weighing pan 2a2, and the main body itself is fixed to a vibration plate 2a4 for applying vibration to drop the spacer. The diaphragm is fixed to the unit base at one end with a screw 2a5 and is in close contact with the piezo element 2a6 which is a vibration source housed in the unit base. The piezo element is pressurized by the diaphragm 2a4 when stopped, and vibrates the hopper through the diaphragm with the screw 2a5 as a fulcrum during driving. Further, the spacer is supplied from the hopper to the weighing pan 2a2 on the rotary table, and the supply amount is confirmed by the measurement confirmation sensor by the detection beam 2a7 indicated by the phantom line of the spacer supply detection position.
[0008]
The piezo element 2a6 is connected to a vibration drive control circuit housed in the drive circuit box 205, and is driven by a signal from the device controller. By the vibration drive control circuit, the high-frequency component, amplitude and frequency of the vibration are variable, and it is possible to generate the optimum vibration according to the spacer having various characteristics to be dispersed. Usually, it is preferable that the high frequency component and the amplitude are set in advance when the apparatus is adjusted, and the operator sets only the optimum frequency according to the spacer to be used.
FIG. 3A is a circuit diagram of one mode of the vibration drive control circuit. In the frequency variable pulse oscillator 2d1 having a duty cycle of 50%, a pulse 2d3 is generated by a drive signal from the device controller 2d2. The saturation type pulse power amplifier 2d4 is a high-side amplifier 2d41 and a low-side amplifier 2d42, and is connected to the piezo element 2d6 via a rise time adjustment resistor 2d51 and a fall time adjustment resistor 2d52, respectively, to the output of each of them. In addition, excessive vibration high frequency components are cut. The variable power source 2d7 changes the peak value of the pulse applied to the piezo element 2d6 by varying the power source voltage of the pulse power amplifier 2d4 in order to obtain a standard vibration amplitude when supplying various spacers. In many cases, the rise time adjustment resistor 2d51 and the fall time adjustment resistor 2d52 are preferably 100 to 200Ω, the crest value is preferably 100 to 150 V, and the frequency is preferably 0.3 to 2 kHz. .
[0009]
In the embodiment shown in FIG. 2 (c), the timing at which the vibration applied to the hopper 2a8 is stopped in order to supply the spacer to the weighing pan 2a2 is detected by the weighing sensor unit. The weighing sensor is a fiber beam sensor for controlling the start and stop of the supply of the spacer to the weighing pan by the vibration start signal sent from the apparatus controller prior to the spraying operation. As shown in FIG. 2C, the detection fiber beam sensor is composed of a light emitting head 2b2 and a light receiving head 2b1, and a detection beam 2a7 indicated by a virtual line is an ON-OFF detection position of the fiber beam. The detection beam 2a7 is moved and adjusted in the vertical direction 2b11 by the adjustment screw 2b7, and is fixed by the set screw 2b9 after the adjustment. Further, by loosening the left and right screws 2b81 and 2b82, it is possible to adjust the rotation direction 2b10 around the vertical direction of the adjustment screw 2b7. By such means, the detection beam 2a7 is moved or rotated up and down to adjust and set the detection position. As shown in FIG. 2D, the spacer is supplied from the hopper to the measuring hole 2c3 of the weighing pan 2a2, and further deposited on the measuring hole 2c1. When the spacer reaches the position of the detection beam, the supply of the spacer is stopped.
[0010]
In the mode shown in FIG. 2, when the vibration to the hopper 2a8 is stopped and the spacer is not supplied, the weighing pan 2a2 is positioned directly below the spacer supply hole 2a3 and stopped. Since the spacer has a very small particle size of 1 to 10 μm, it does not drop due to the powder adhesion force unless it is vibrated. Even if it falls a little, there is no problem as long as it is supplied to the weighing pan 2a2 located below. Recently, in order to solve the problem that conventional spraying devices cannot measure due to such adhesive force, spacers with very good fluidity have been developed, but they are expensive and are still almost practical. It has not been converted. In the dry spacer spraying apparatus of the present invention, such a high fluidity spacer can be dealt with by making the diameter of the spacer supply hole 2a3 of the hopper smaller than usual. For ordinary spacers, the diameter of the spacer supply holes is preferably 1.0 to 1.5 mm in many cases, and may be less than 1.0 mm if necessary.
At the start of the weighing operation, the device controller applies vibration to the hopper 2a8 via the piezo element driving circuit. The spacer in the hopper begins to drop uniformly on the weighing pan 2a2 by appropriate vibration. Uniform dropping means dropping a considerable amount on the weighing pan in about 0.5 seconds. When the portion of the spacer 2c3 indicated by the broken line of the weighing pan 2a2 in FIG. 2 (d) is filled and stacked and starts to reach the portion of the spacer 2c1, the spacer starts to spread sideways due to the dropping force and the own weight due to vibration. When the apparatus controller senses that the detection sensor has detected the spacer by the detection beam 2a7, the vibration of the piezo element 2a6 is stopped. By adopting such a spacer supplying method, the spacers necessary for the slitting can be supplied to the weighing pan without excess or deficiency. In addition, even if the fall amount changes slightly due to the remaining amount of spacer in the hopper 2a8, it is automatically corrected depending on the length of vibration time, so that a stable spacer can be supplied and the sensor detection position can be adjusted. By adjusting, it becomes possible to make the amount of subsequent slitting minimum and constant. Furthermore, since such a detection method does not depend on the particle diameter of the spacer and does not depend on the surface color, it can be applied to all types of spacers in the future, and the effect of the detection is great.
[0011]
In the hopper portion 20 </ b> A, the spacer supplied to the weighing pan unit 200 a attached to the rotary table 201 becomes flat when the rotary plate 201 rotates and the weighing pan unit 200 a moves and passes through the slit wiper 204. It is cut and reaches the weighing confirmation sensor unit 20B. The measurement confirmation sensor confirms the final measurement value at this position, determines GO-NG, and simultaneously monitors the spacer amount.
FIG. 3B is a circuit diagram showing an aspect of the weighing confirmation circuit. The measuring hole 2c3 of the measuring pan 2e1 is filled with a spacer. The distance sensor 2e2 is a photoelectric element that outputs an analog voltage proportional to the length L in the drawing. By accurately measuring the distance between the sensor and the spacer surface of the weighing pan, the measurement result of the spacer can be determined. The correction voltage 2e41 to 2e44 is set to the input by the analog switch 2e3, and the output voltage 2e41 to 2e44 is selected by the analog switch selection signal 2e5 from the device controller. In the addition circuit 2e6, the sensor output and the selection correction voltage are added. With the correction voltage, the height when the four weighing pans mounted on the rotary table are mounted can be made the same, that is, the mechanical error can be electrically corrected, whereby the weighing value of each weighing pan can be corrected. Can be accurately detected. Therefore, the selection signal 2e5 is a mechanism for the device controller to select a correction voltage corresponding to each weighing pan unit 200a, 200b, 200c and 200d.
[0012]
In the measurement confirmation circuit of the embodiment shown in FIG. 3B, the GO / NG determination of the measurement result is performed by the window comparators 2e7 and 2e8, and the determination result is sensed by the controller connected by the connection line 2e9. When the changeover switch 2e10 is set to “1”, the output of the distance sensor 2e2 is output to the connection line 2e13. Further, when the changeover switch 2e10 is set to “2”, the corrected sensor output obtained by the addition circuit 2e6 is output to the connection line 2e13 as a measured value. Further, when set to “3”, the upper limit set value 2e11 of the determination circuit is output, and when set to “4”, the lower limit set value 2e12 is output. The output of the changeover switch 2e10 is displayed on the digital panel meter 2e14. When it is desired to hold the output display value by the display hold input of the panel meter, it can be instructed from the controller via the connection line 2e15.
[0013]
In the dry spacer spraying apparatus of the present invention, the operation of the weighing confirmation sensor unit can be performed as follows. That is, the four weighing pans on the rotary table are respectively No. 1, No. 2, No. 3 and No. 4, and the changeover switch 2e10 is set to “1”. By setting the spacer on each weighing pan manually and turning the rotary table to display the measured value on the digital panel meter 2e14 via the connection line 2e13, the mounting height of the weighing pan on the table is set. It is possible to confirm the variation of the size. In the embodiment, when the distance L = 4.00 mm, the voltage is 4.00 V, and the distance can be measured as it is. While confirming the variation at this time, the adjustment of the mounting height and each variation are corrected.
Next, the changeover switch 2e10 is set to “2”, and the sensor output corrected by the adding circuit 2e6 is displayed on the digital panel meter 2e14. The table is rotated, the weighing pans No. 1 to 4 are sequentially moved to the sensor position, the analog switch selection signal 2e5 of the analog switch 2e3 is switched accordingly, and all weighing results are 4.00V, that is, the distance 4 The adjustment voltages 2e41 to 2e44 are adjusted by the correction voltage adjustment volume so as to be 0.000 mm. As a result, the mechanical variation error in the height direction of the weighing pan is corrected, and an accurate weighing result can be read.
Further, the changeover switch 2e10 is set to “3” or “4”, and the measurement allowable upper limit value and the lower limit value are set as an upper limit set value 2e11 and a lower limit set value 2e12, respectively, by means of a volume. In the embodiment, the upper limit value and the lower limit value are set to about 4.00 ± 0.10 to 0.25 mm, and when the measurement result is between the upper limit value and the lower limit value, the GO signal is output to the controller, and the upper limit value is set. If the value or the lower limit is exceeded, an NG signal is output to the connection line 2e9, and the operation is stopped as a measurement confirmation error. In the case of an NG signal, the weighing operation can be retried. The pre-adjustment is completed by the above operation, and the changeover switch 2e10 is set to “2” to start the actual operation.
[0014]
The outline of the actual operation of the weighing confirmation sensor after the pre-adjustment is as follows. That is, when the rotary table is driven and the spacer on the weighing pan No. 1 supplied by the hopper is passed through the slit wiper unit and reaches the sensor unit, it is added by the analog switch selection signal 2e5 from the controller. The sensor output corrected with the correction voltage 2e41 is displayed in the circuit 2e6, and at the same time, the GO / NG determination result is sent to the controller. Next, the rotary table is driven to confirm the No. 2 weighing pan. It is preferable to adjust the table rotation speed so that the arrival timing is approximately 0.5 seconds until the next weighing pan arrives and the weighing is started. It is usually difficult to visually check the value of the panel meter 2e14 due to the sequential weighing, confirmation, and rotational movement. However, the value of the panel meter 2e14 is set for about 0.5 seconds according to the instruction from the connection line 2e15. By displaying the hold, it is possible to monitor the measurement result visually. Furthermore, by visually sounding a buzzer at the hold timing, it is possible to facilitate visual confirmation during a test operation or the like. As described above, for weighing pans No. 1 to No. 4, correction values corresponding to the weighing pans that are sequentially stopped at the sensor unit by rotation of the table are selected, the weighing values are monitored, and GO determination is obtained. Spread the weighing pan spacer.
[0015]
Currently, spacers used in dry spraying systems behave as powders, and very delicate behavior appears. In the weighing unit, not only ordinary spacers, but also spacers with special characteristics such as spacers with a very small particle size around 1 μm and spacers coated with a heat-fusible adhesive, several mg It is extremely difficult to stably measure a small amount of powder that is 1 mg or less. For example, there is a case where the supply amount confirmation sensor determines that the supply is completed during the supply to the weighing pan in the middle of the supply to the weighing pan due to the influence of the external environment such as humidity, which is sensitive to the spacers in the hopper. Occasionally, it may occur, or a spacer may adhere to the slit wiper and the slit may not be cut correctly. If unsatisfactory results are obtained after spraying spacers with such weighing errors, it is very difficult to find the cause. In order to handle spacers having such characteristics, especially special spacers that have been recently developed and to obtain stable spray results, careful attention and monitoring are always required. In this sense, the dry spacer spray of the present invention is required. The existence value and the effect of the weighing confirmation sensor provided in the apparatus are large.
[0016]
In the dry spacer spraying device of the present invention, the spacer weighed by the weighing unit is sent to the spray nozzle provided in the spraying chamber by the ejector unit. The ejector has a function of sucking a volume-measured spacer given to the weighing pan disposed on the rotary table of the weighing unit and sucking it from the weighing pan to the spray nozzle. FIG. 4 is a perspective view of one embodiment of the ejector unit. The ejector 2f1 is a gas suction mechanism component, and a spacer as powder can be sucked in by using the reduced pressure suction airflow. When a supply pressure gas such as clean nitrogen gas is applied from the direction 2f2, the high-speed fluid exits in the direction 2f3. At this time, as a result of the suction port 2f4 being depressurized by the flow velocity pressure caused by the internal air flow, the spacer is sucked and is sent to the spray nozzle by riding on the air flow. The rotary table is controlled in advance by the controller, and the spacer on the weighing pan 2f5 is located directly below the suction port 2f4. The distance between the suction port 2f4 and the surface of the weighing pan is very important for reliably sucking up various types of spacers having various characteristics, particularly extremely small spacers.
The dry spacer spraying apparatus of the present invention has a moving unit that moves the ejector body in order to ensure that the spacer is sucked up by the ejector. The ejector 2f1 moves in the vertical direction by driving the electromagnetic solenoid 2g4. In this aspect, the base bracket 2g1 and the slider 2g2 of the ejector unit are connected to the moving shaft of the electromagnetic solenoid 2g4, and the ejector is fixed to the mounting hole 2g3. A solenoid return spring 2g5 is connected to the electromagnetic solenoid 2g4. The ejector 2f1 is fixed to the mounting hole 2g3 of the slider 2g2 with a screw 2f7 through the fixing bracket mounting hole 2f6. The entire ejector unit is fixed to the base of the measuring unit by the screw hole 2g6. In addition, the slider can be moved in the vertical direction by the adjusting screw 2g7, and the spacer 2g4 can be used more effectively, the distance from the weighing pan can be optimized, and the spacer can be reliably sucked in by the spacer suction force. To the correct position. In the standard spacer of the example, the optimum distance between the suction surface and the weighing pan was 0.5 mm.
[0017]
The ejector suction port 2f4 is maintained at a set position by the solenoid return spring 2g5 and the adjusting screw 2g7 while maintaining a certain distance from the weighing pan. On the other hand, in a state where the weighing pan 2f5 is at a stop position just below the ejector suction port, the ejector sucks up the spacer and starts to feed out to the spray nozzle. Certain spacer properties, particularly the adhesion of very small diameter spacers, are strong, making it very difficult to draw up reliably, making it impossible with conventional spacer sprayers. Since the dry spacer spraying device of the present invention has the ejector unit moving mechanism, the spacer can be reliably sucked almost without being influenced by the temperature and humidity and the characteristics of the spacer. That is, the spacer on the weighing pan 2f5 is sucked in according to the gas pressure, and the spacer can be stably sucked by providing an optimal gap between the ejector suction port and the weighing pan. However, when the spacer has a large adhesion force or the measurement value is large, the measurement hole 2c3 on the weighing pan may be large and deep, and the suction of the spacer is often insufficient. Furthermore, if such a spacer is operated as an ejector as it is, the amount of adhesion of the spacer in the vicinity of the suction port increases, and the reproducibility of spraying is impaired. In the dry spacer spraying device of the present invention, the ejector is provided with a moving mechanism, and the distance between the suction port and the weighing pan is controlled so that the suction port is in close contact with the weighing pan while the ejector is performing the spacer suction operation. After a sufficiently reduced pressure state is formed inside the suction port, the solenoid is turned on and off at the next moment to release the suction port at once and return to the normal flow rate state. By such control, a rapid change of the suction airflow and an instantaneous high-speed airflow can be created, and the suction of the spacer can be surely performed. In addition, by placing the weighing pan on the spring plate and giving a somewhat flexible structure, it is possible to reduce the impact when the ejector suction port is in close contact.
[0018]
FIG. 3C is a circuit diagram of one aspect of the solenoid control circuit. The frequency of the pulse oscillator 2h1 is variable with a duty cycle of about 50% by the volume 2h2, and an output with a substantially constant peak value is possible. The resistor 2h3 and the volume 2h4 divide the peak value. The buffer amplifier 2h5 is also an impedance converter that outputs the divided voltage as it is. The volume 2h7 is a variable resistor for setting a time constant with the capacitor, and the voltage regulator 2h8 makes the output variable by the volume 2h9. The operational amplifier 2h10, the resistor 2h11, and the power transistor 2h16 constitute a general voltage-current converter. The solenoid 2h17 moves the ejector according to the drive signal, and is driven by the solenoid drive power source 2h18. The input terminal 2h20 receives a solenoid ON / OFF signal from the controller. Adjustments before operation can be made at each volume of the circuit. The volume 2h2 is set as a time during which the ejector suction port comes into close contact with the weighing pan when the solenoid is turned on and the inside of the ejector suction port is sufficiently decompressed. The volume 2h4 sets the current value at the moment when the solenoid is turned on. The capacitor 2h6 and the volume 2h7 set the attenuation curve of the solenoid current during movement of the ejector, that is, the force during movement, and the volume 2h9 sets the holding current in the ON state, that is, the force during contact.
[0019]
When there is no solenoid operation instruction from the controller, the transistor 2h16 is forcibly turned off via the diode 2h14, and the solenoid 2h17 is in a released state, that is, a state in which there is a gap between the return plate and the weighing pan. Yes. When an ON instruction is given from the input terminal 2h20, the diode 2h14 is released. On the other hand, when the output of the pulse oscillator 2h1 is “low”, the transistor 2h16 is forcibly turned off via the diode 2h13 to release the solenoid. However, when the output of the pulse oscillator 2h1 becomes “high”, the resistance 2h3 A pulse having a peak value set by the volume 2h4 is output from the buffer amplifier 2h5. The output pulse is differentiated by the time constant between the capacitor 2h6 and the volume 2h7, becomes an attenuation curve, and finally becomes a constant voltage set in the voltage regulator 2h8 and is held.
This voltage enters a voltage-current conversion circuit including an operational amplifier 2h10, a transistor 2h16, and a current detection resistor 2h15, and becomes a solenoid driving current. The resistor 2h11 is a protective resistor for the operational amplifier 2h10 when the diodes 2h13 and 2h14 are conductive. The diode 2h12 is a protection for preventing a negative voltage from being applied to the base of the transistor 2h16, and the element 2h19 is when the solenoid is turned off. This is a surge absorbing element.
By configuring and controlling such a circuit in the ejector unit section, the ejector suction port can be pressed against the weighing pan with almost constant force, and the pressing force can be adjusted, so without applying excessive force to the weighing pan, Bounce at close contact can be reduced. The solenoid ON / OFF frequency is preferably set to 3 to 4 Hz in order to make the processing time of the entire apparatus appropriate.
In the dry spacer spraying device of the present invention, the mechanism and control of the ejector unit can surely suck up the spacer, and in particular, a spacer with a very small particle diameter and a special spacer that is easily affected by the external environment such as conventional humidity Can also be handled. The configuration of the ejector unit is one of the factors that enables various spacers to be sprayed as a spraying device.
[0020]
FIG. 5 is a perspective view of one embodiment of the rotary table of the dry spacer spraying device of the present invention. The rotary table of this aspect is provided with four spacer weighing dishes. The disc-shaped rotary table 2i1 is rotated in the direction of the arrow in the figure by the motor 2i2. There is a photo sensor detection pin 2i3 on the side of the table, and a stop position detection sensor (not shown) on the weighing unit base to which the motor is fixed defines the table rotation stop position, that is, the weighing pan position. The four weighing pan units 2i41, 2i42, 2i43, and 2i44 are in quartered positions on the table circumference. The detection sensor is also arranged at a position corresponding to the weighing pan unit. In the weighing pan unit, one end of the diaphragms 2i61 to 2i64 is fixed to the bases 2i51 to 2i54, and piezo elements 2i71 to 2i74 are incorporated therebetween. A screw-in nut is provided on the other side of the diaphragm, and the weighing pan is screwed and fixed thereto. When changing the number of sprays, that is, the spray density (measured value), the pan can be replaced. Each weighing pan can be vibrated independently according to the controller signal by the piezo elements 2i71 to 2i74 for vibration. A piezo element attached to each weighing pan unit is connected to an external piezo element driver via a rotary connector 2i8 at the center of the table.
In the state where the motor is returned to the origin, the weighing pan No. 1 (2i41) is stopped at the spacer supply position, that is, at the hopper position where the position detection sensor senses the detection pin. Weighing pan No. 2 (2i42) is 90 degrees forward. In the case of a device having a small substrate and using one multiplex nozzle, there is no function at this position. However, in a multi-nozzle device in the case of a large substrate, this is the second ejector section. . Weighing pan No. 3 (2i43) is in the ejector section, and weighing pan No. 4 (2i44) is in the weighing confirmation sensor section.
[0021]
Here, the hopper is vibrated to supply the spacer to the weighing pan No. 1 (2i41). Next, the rotary table rotates 90 degrees, the weighing pan No. 1 (2i41) passes through the slit wiper, stops at the weighing confirmation sensor unit, and performs GO / NG determination processing. At the same time, weighing pan No. 2 (2i42) is supplied with spacers at the hopper position. Further, the rotary table rotates 90 degrees. Simultaneously with the start of rotation, the controller generates a display hold signal for 0.5 seconds so that the weighing value of weighing pan No. 1 (2i41) is held and can be visually monitored with the panel meter of the device operation panel.
When reaching the ejector part, the spacer of the weighing pan No. 1 (2i41) is sucked up by the operation control of the ejector, is pumped to the spray nozzle, and spraying is performed. During this time, weighing pan No. 2 (2i42) moves to the weighing confirmation sensor position, GO / NG determination processing is performed, and a spacer is supplied from the hopper to weighing pan No. 3 (2i43). Thereafter, in the same manner, each time the turntable rotates 90 degrees, each unit is processed, and when the application of the weighing pan No. 4 (2i44) is completed, the turntable returns to the origin and the next spraying starts. Wait for. The piezo element of the weighing pan unit vibrates immediately after each weighing pan receives the supply of spacers from the hopper and immediately before the spraying starts with the ejector unit, causing the powder spacers to break apart, and if necessary, You can use to select ON / OFF of vibration and frequency. The dry spacer spraying device of this aspect is configured using a rotating disk-shaped table, but can also be configured with a table that moves linearly, or a configuration in which the weighing pan is fixed and the functional unit is moved. You can also
[0022]
FIG. 6A is a perspective view of an embodiment of a spraying chamber of the dry spacer spraying apparatus of the present invention. The spray chamber of this embodiment is a manual spray chamber. The spray chamber 31 is provided with a spray nozzle 32, a door 33 for opening the chamber, and a substrate table 34 on which the substrate is placed. The substrate table is a side door. The drawer table has 35. The substrate is taken in and out by moving the table in the direction of the arrow 36 and placing the substrate on the substrate table 34 in the state of being pulled out, and then drawing the table into the chamber and spraying the spacers. The spray chamber has a chamber exhaust 37. In addition, a voltage capturing terminal portion 38 for in-chamber control is connected to the high voltage generating unit 39 via a high voltage cable 40.
A chamber of a conventional general dry spraying device is made of stainless steel or vinyl chloride resin, and in the case of a resin chamber, there is a case of a double structure using stainless steel on the outer surface. The basic structure of the spraying chamber of the dry spacer spraying apparatus of the present invention is that the inner surface of the resin is coated with a high-resistance conductor, or a high-resistance monohedron to which a high-resistance film or the like is attached is formed. preferable. Further, it is preferable that the outer surface is a similar conductor, the outer surface is grounded, and the inner surface and the outer surface are insulated. The grounding of the outer surface is for electrostatic charging, prevention of electric shock, etc., but in some cases, the outer surface conductor can be omitted. Further, although the outer surface can be made of metal and grounded, it becomes an expensive device.
[0023]
The high-resistance conductor on the inner surface of the chamber has a resistance value of several tens of MΩ or more and is handled as a high-voltage electrode surface, but there is no risk of electric shock when touched by the human body. What is important here is that the inner surface and the outer surface of the chamber must be insulated, and if leakage current flows from the inner surface electrode in some way, such as touching the outer surface, one of the objects of the present invention. It becomes impossible to apply a predetermined voltage to a certain inner surface. The high voltage cable 40 is preferably pressure-contacted with a conductive rubber in order to securely connect the voltage of the high voltage generating unit to the inner surface of the chamber. The table on which the substrate is placed and the lower part of the chamber are basically grounded. However, it is preferable that the table is at least grounded during spraying, for example, by static electricity neutralization before spraying.
In the dry spacer spraying device of the present invention, it is preferable to apply a voltage in accordance with the charging characteristics of the spacer to the space inner wall surface of the spraying chamber so as to control to generate a necessary electric field in the chamber space. The spacer charged by pressure feeding from the measuring unit to the spray nozzle can be concentrated in the lower part of the chamber and reach the substrate by the controlled electric field generated. At the same time, the repulsive force generated in the vicinity of the wall surface can prevent the spacer from adhering to the inner wall surface. Spacers that are diffused by the sprayed airflow usually have a smaller number of sprayed near the wall surface where the airflow is weak, that is, at the periphery of the substrate. The spacer serves as a spacer for correcting the density of the peripheral portion, and a uniform distribution can be obtained.
[0024]
FIG. 6B is a perspective view of one embodiment of the control box panel of the high voltage generating unit. In this embodiment, the LED 3a1 indicates that a controlled high voltage is being generated, and the device controller performs ON-OFF of the high voltage control. The adapter plug 3a2 is switched by a spacer to be used and becomes a socket. When the adapter is set as shown in the figure, a plastic spacer is used, and the selection-side LED 3a3 is lit with a positive PL, SI is a reverse character, and the LED 3a4 is turned off. When using the silica-based spacer, the adapter LED 3a4 is turned on by removing the adapter plug 3a2 and inserting it by rotating it 180 degrees, so that SI becomes a normal character. On the other hand, PL is a reverse character, and the LED 3a3 is turned off to indicate that it is not selected. The selected high voltage output part 3a5 is connected to the chamber inner layer surface via a high voltage cable.
FIG. 6C is a circuit diagram of one embodiment of the circuit configuration of the high voltage generation unit, the adapter socket, and the plug. The + high voltage generation circuit 3b1 is variable from the outside by a volume 3b2, and the -high voltage generation circuit 3b3 is variable from the outside by a volume 3b4. A high voltage selected according to the insertion of the plug 3b12 is generated on the output line 3b16 by the ON-OFF input line 3b5 from the controller. The + high voltage output is connected to one end of the adapter socket 3b11 via the connection line 3b6. The high voltage output is connected to one end of the adapter socket 3b11 via the connection line 3b7. The connection lines 3b8 and 3b9 are connected to socket terminals beside the adapter by polarity selection lines, and the terminal 3b10 is grounded. The plug 3b12 side is connected to the LEDs at selection terminals 3b13 and 3b14, respectively. Of the three inner terminals, two are short-circuited by the connection line 3b15. In addition, as shown in FIG.6 (b), it is preferable to leave the window which displays LED3a3 and 3a4, resin-enclose, and cover the plug side for safety, as shown in FIG.6 (b).
[0025]
The LED 3a3 on the plug side lights up through 3b8 → LED → 3b10 → ground. On the other hand, since the 3b6 → 3b15 → output line 3b16 is connected on the high voltage side, it is set so that a voltage set in the + polarity is output as the PL side output. When an ON instruction is transmitted from the controller via the ON-OFF input line 3b5, + high voltage is output to the outside via the output line 3b16. The output LED 3a1 is turned on / off in accordance with the ON / OFF commanded from the ON / OFF input line 3b5. In order to ensure safety, it is preferable that the controller gives an ON instruction only during spraying and minimizes the high voltage output time.
In the dry spacer spraying device of the present invention, the optimum voltage for the spacer to be used is applied to the inner surface of the chamber, an electric field is generated in the chamber space, and the scattered charging spacer is concentrated on the substrate, so that the spacer adheres to the wall surface safely. High efficiency and uniform spraying is possible. In this mode, output was selected by manual switching using an adapter plug for a manual machine, and a low-cost configuration was adopted. However, in the case of an automatic machine, a high-voltage reed relay is used to automatically select from an external controller. Can be switched automatically.
[0026]
FIG. 7 is a perspective view of one embodiment of the spray nozzle. The spray nozzle of this aspect is a multiplex nozzle composed of a main body and a hood 47, each having a single supply port 42 for supplying spacers, and a plurality of independent spray holes 43 to 46 for diffusing and spraying the spacers. When the spacers are dispersed, the spacers diffuse in the diffusion directions 43a, 44a, 45a and 46a, and are conceptually diffused and dispersed in the regions 43b, 44b, 45b and 46b on the substrate 48. The spray nozzle used in the dry spacer spraying apparatus of the present invention divides the supplied spacer into a plurality of times for spacer spraying on one substrate, and sequentially switches the diffusion air flow from a plurality of independent spray holes. A multiplex nozzle that diffuses and spreads is preferable. The supplied spacer is pumped from the metering unit, and a diffusion spray pressure is applied to each spray hole 43-46. ON / OFF of the pressure gas can be controlled by an attached solenoid valve or the like.
The spacer weighed in the weighing pan No. 1 of the weighing unit is pumped from the ejector and fed into the nozzle supply port 42, and the first spraying starts. On the other hand, by driving a solenoid valve to the spray hole 43 immediately before the spacer is fed and applying nitrogen gas pressure, the spacer supplied to the nozzle is put on the diffusion spray airflow and diffused in the vicinity of the spray region 43b on the substrate. Be sprayed. Next, as the second spraying, the spacers of the weighing pan No. 2 are sprayed in the same manner and diffused and sprayed in the vicinity of the spraying area 44b. Subsequently, spraying is performed sequentially in the vicinity of the spraying region 45b by the third spraying and in the vicinity of the spraying region 46b by the fourth spraying. Scattering on the substrate is obtained as a result of stacking four layers of spacers for each spraying with a difference in density on the substrate.
[0027]
  By adopting a multiplex nozzle, it is possible to spray over a wide area with one nozzle, there is no mechanically moving part like a scanning head, and only switching the spraying direction by switching the solenoid valve, so dust generation No worries. Further, the uniformity of the dispersion is averaged because the dispersion is performed a plurality of times for the dispersion of one substrate. For this reason, unlike the conventional spraying slur, there are many areas near the center and the peripheral area does not become extremely small, and a uniform spraying result can be obtained. With a spacer having a particle size of several μm, the conventional spray nozzle could spray only about 200 to 300 mm square, but by using a multiplex nozzle, it should be spread to a range of about 400 to 500 mm square. Can do. Since the spacer with a very small particle diameter such as 1 μm is light and easily rides on the air flow, it can be diffused and dispersed up to about 1 m × 1 m. In the dry spacer spraying device of the present invention, it is usually preferable to provide the hood 47 in the spray nozzle and restrict the spraying area of the spacer. However, a spacer having a large particle size or a spacer having a large specific gravity is more likely to ride on the spraying airflow. However, the area may be limited by its own weight, and may not be necessary. For this purpose, it is preferable to prepare a nozzle that is screwed so that the nozzle body 41 and the hood 47 can be removed, or a hood with a different radiation angle. Further, the spray holes can be sequentially switched one by one, or two or three spray holes can be sequentially switched and sprayed. Two spray holes or two3 pieces eachIf the spraying is performed by switching, the spraying state may be more averaged and better, and therefore it is preferable to use a mechanism that can specify the spraying mode and to control according to the designation of the controller. After obtaining the optimal spraying mode by test spraying in advance, actual spraying can be performed.
[0028]
FIG. 8 is an explanatory view of one mode of a multi-nozzle spraying method applied to the dry spacer spraying apparatus of the present invention. In this embodiment, four multiplex nozzles 51, 52, 53, and 54 are arranged equidistantly on a quadrant of radiation from the center of the plane of the ceiling of the spraying chamber, and each nozzle is located in the spraying chamber. It can be fixed by moving radially from the center. The fixed position can be determined optimally by test spraying. From the multiplex nozzles 51, 52, 53 and 54, spacers are diffused and dispersed in the arrow directions 5A, 5B, 5C and 5D, and each nozzle performs four times of dispersion, and the dispersion regions 5a1 to 5a4, 5b1 of each nozzle. By assigning 5b4, 5c1 to 5c4, 5d1 to 5d4, it is possible to cope with a large size.
The weighing unit is provided in accordance with the required tact time. When one measuring unit is provided for each spraying nozzle, the spraying nozzles 51, 52, 53, and 54 are in the areas 5a1, 5b1 as the spraying mode 1 at the stage where the spacer of the weighing unit is prepared. 5c1 and 5d1, spacers are dispersed, regions 5a2, 5b2, 5c2 and 5d2 are then dispersed, then spacers are dispersed in regions 5a3, 5b3, 5c3 and 5d3, and finally regions 5a4, 5b4. Spacers are dispersed on 5c4 and 5d4. In this way, by sequentially overlapping and spraying, the spray density can be averaged, and even a large-sized substrate can be sprayed in a uniform dispersed state.
Instead of providing one metering unit for each spray nozzle, two metering units having two ejectors can be installed on the rotary table, and spacers can be supplied to the four spray nozzles. When spraying with one multiplex nozzle, it is possible to spray up to a substrate size of about 500 mm × 500 mm with the most common spacer having a particle size of about several μm. However, recently, a large size is required up to about 1 m × 1 m. By a multi-nozzle system in which a plurality of multiplex nozzles are arranged, spacers can be evenly dispersed even on a large-sized substrate.
[0029]
【The invention's effect】
According to the dry spacer spraying apparatus of the present invention, the spacer is reliably supplied to the spray nozzle by the weighing unit provided with the vibrating spacer supply hopper, the ejector, the weighing confirmation sensor, etc. The size of the substrate can be accommodated, and at the same time, by controlling the inside of the spraying chamber, the maintenance time for cleaning can be reduced, the spacer use efficiency can be increased, and various spacers can be sprayed.
[Brief description of the drawings]
FIG. 1 is a perspective view of an embodiment of a dry spacer spraying apparatus of the present invention and an explanatory view of an embodiment of a multiplex nozzle.
FIG. 2 is a perspective view of an aspect of a weighing unit.
FIG. 3 is a circuit diagram of one embodiment of a control circuit of the dry spacer spraying device of the present invention.
FIG. 4 is a perspective view of an aspect of an ejector unit.
FIG. 5 is a perspective view of one embodiment of a rotary table.
FIG. 6 is a perspective view and a circuit diagram of one embodiment of a spray chamber.
FIG. 7 is a perspective view of an aspect of a spray nozzle.
FIG. 8 is an explanatory diagram of an aspect of a multi-nozzle spraying method.
[Explanation of symbols]
A spraying chamber
B Spacer weighing unit
C Spray nozzle
1 Board stand
2 Moving table
3 Operation panel
120 multiplex nozzle
121-124 areas
20A hopper
20B Weighing confirmation sensor
20C Ejector section
200a-200d Weighing pan unit
201 rotating table
202a to 202d Photoelectric sensor
203 Weighing pan stop position detection pin
204 Slotted wiper
205 Drive circuit box
2a1 Upper lid of hopper
2a2 Weighing pan
2a3 Spacer supply hole
2a4 Diaphragm
2a5 screw
2a6 Piezo element
2a7 Detection beam
2a8 hopper
2b1 Light receiving head
2b2 Light emitting head
2b7 Adjustment screw
2b81 Left and right screws
2b82 Left and right screws
2b9 Set screw
2b10 Rotation direction
2b11 vertical direction
2c1 spacer
2c3 spacer
2d1 variable frequency pulse oscillator
2d2 device controller
2d3 pulse
2d4 pulse power amplifier
2d41 high side amplifier
2d42 Low side amplifier
2d51 Rise time adjustment resistor
2d52 Fall time adjustment resistor
2d6 piezo element
2d7 variable power supply
2e1 Weighing pan
2e2 distance sensor
2e3 analog switch
2e41-2e44 voltage
2e5 selection signal
2e6 Adder circuit
2e7 Window comparator
2e8 window comparator
2e9 connecting line
2e10 selector switch
2e11 Upper limit setting value
2e12 Lower limit set value
2e13 connection line
2e14 Panel meter
2e15 connection line
2f1 ejector
2f2 direction
2f3 direction
2f4 suction port
2f5 weighing pan
2f6 fixing bracket mounting hole
2f7 screw
2g1 Base bracket
2g2 slider
2g3 mounting hole
2g4 solenoid
2g5 solenoid return spring
2g6 screw hole
2g7 adjusting screw
2h1 pulse oscillator
2h2 volume
2h3 resistance
2h4 volume
2h5 buffer amplifier
2h6 capacitor
2h7 volume
2h8 voltage regulator
2h9 volume
2h10 operational amplifier
2h11 resistance
2h12 diode
2h13 diode
2h14 diode
2h15 Current detection resistor
2h16 transistor
2h17 solenoid
2h18 Solenoid drive power supply
2h19 elements
2h20 input terminal
2i1 rotary table
2i2 motor
2i3 Photo sensor detection pin
2i41-2i44 Weighing pan unit
2i51-2i54 base
2i61-2i64 Diaphragm
2i71-2i74 Piezo element
2i8 rotary connector
31 Spraying chamber
32 Spray nozzle
33 door
34 Substrate stand
35 Side door
36 directions
37 Exhaust vent
38 Voltage capture terminal
39 High voltage generation unit
40 High voltage cable
3a1 LED
3a2 adapter plug
3a3 LED
3a4 LED
3a5 High voltage output section
3b1 + high voltage generator
3b2 volume
3b3-High voltage generation circuit
3b4 volume
3b5 ON-OFF input line
3b6 connecting line
3b7 connecting line
3b8 connecting line
3b9 connection line
3b10 terminal
3b11 socket
3b12 plug
3b13 selection terminal
3b14 selection terminal
3b15 connection line
3b16 output line
41 Nozzle body
42 Supply port
43-46 spray holes
43a-46a Diffusion direction
43b-46b region
47 Food
48 substrates
51-54 Multiplex nozzle
5A-5D Arrow direction
5a1-5d4 area

Claims (9)

A spraying chamber for storing a substrate, a weighing unit for weighing a fixed volume of spacers corresponding to the spacer spraying density on the substrate, and a spraying nozzle provided on the ceiling of the spraying chamber,
Dry spraying chamber, an electrically chamber inner and outer layers are insulated, which forms a subsurface high resistance conductive surface of the chamber, and having a terminal for supplying a voltage from the outside to the inner surface Spacer spraying device.   2. The dry spacer spraying device according to claim 1, wherein a high voltage generating circuit for supplying a high voltage capable of switching between voltage and polarity is connected to a terminal for supplying a voltage from the outside.   3. The dry spacer spraying device according to claim 1, wherein the spray nozzle is a multiplex nozzle having one supply port for supplying a spacer and a plurality of independent spray holes for diffusing and spraying the supplied spacer on the substrate. .   4. The dry spacer spraying device according to claim 3, wherein the multiplex nozzle comprises a hood that restricts a spraying area of the spacer.   The dry-type spacer spraying device according to claim 2 or 3, wherein the spray chamber has a plurality of multiplex nozzles on the ceiling.   The weighing unit that weighs a certain volume of spacer is a table with multiple weighing pans, and a spacer supply hopper that feeds the spacers to the weighing pan when vibration is applied. Check the amount of spacers supplied to the weighing pan. Sensor, a wetting wiper that slits the spacer supplied to the weighing pan to a certain amount, a weighing confirmation sensor unit that has a sensor that determines that the slit spacer has been slit to a certain amount, and the confirmation result is GO The dry-type spacer spraying device according to any one of claims 1 to 5, further comprising an ejector unit that sucks up the determined spacer on the lightweight plate and sends it to the spray nozzle.   The spacer supply hopper has a vibration drive control circuit that makes the high-frequency component, amplitude and frequency of vibration variable, and a sensor detection position adjustment mechanism that detects the amount of spacer supplied to the weighing pan. 7. The dry spacer spraying device according to claim 6, further comprising a sensor unit to be adjusted.   8. A sensor for confirming the amount of spacers cut on the weighing pan, a distance sensor for confirming spacer planes of a plurality of weighing pans on the table, and a weighing confirmation sensor control circuit having a monitoring display function. The dry-type spacer spraying device described.   The ejector unit that feeds the spacer of the weighing pan to the pressure feed pipe moves the ejector suction port up and down by the electromagnetic solenoid, sets the distance between the suction port and the weighing pan plane, and then drives the solenoid ON-OFF to suck up the spacer and measure The dry spacer spraying device according to any one of claims 6 to 8, further comprising a solenoid control circuit that does not give a strong impact force to the weighing pan when pressed against the pan.

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