CN1253304A - Manufacturing method and equipment of liquid crystal display element and liquid crystal display element - Google Patents

Manufacturing method and equipment of liquid crystal display element and liquid crystal display element Download PDF

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Publication number
CN1253304A
CN1253304A CN99124302A CN99124302A CN1253304A CN 1253304 A CN1253304 A CN 1253304A CN 99124302 A CN99124302 A CN 99124302A CN 99124302 A CN99124302 A CN 99124302A CN 1253304 A CN1253304 A CN 1253304A
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China
Prior art keywords
liquid
crystal display
liquid crystal
spreading
spray time
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CN99124302A
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Chinese (zh)
Inventor
藤枝善裕
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Publication of CN1253304A publication Critical patent/CN1253304A/en
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1339Gaskets; Spacers; Sealing of cells
    • G02F1/13392Gaskets; Spacers; Sealing of cells spacers dispersed on the cell substrate, e.g. spherical particles, microfibres
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material

Abstract

To improve display quality by preventing fluctuation of scattering density of spacer particulates and ensuring a uniform cell gap. Particulates 14 are sprayed and scattered on a substrate 13 while controlling spray time in accordance with quantity of liquid to be scattered 1 so as to control density of particulates on a substrate surface to approach a target value. Or number of particulates 14 scattered on the substrate 13 is counted and the spray time for the subsequent step of the liquid to be scattered is controlled in accordance with the counted value so as to control the density of particulates 14 on the substrate surface to approach the target value.

Description

The manufacture method of liquid crystal display cells and manufacturing installation and liquid crystal display cells
The present invention relates to utilize half dry type jet spread method to scatter manufacture method and the manufacturing installation and the liquid crystal display cells of the liquid crystal display cells of liner (spacer).
Generally, at least a pair of substrate that has applied encapsulant on the form peripheral edge portions of a substrate is close to relatively across liner, and bonded to each other with encapsulant, form liquid crystal cells, again liquid crystal is injected, is filled to this liquid crystal cells, by such formation liquid crystal display cells.The thickness that is spaced apart liquid crystal layer of a pair of substrate of liquid crystal display cells (below, be called " element thickness ").
The element thickness of liquid crystal display cells is the key factor of decision display element optics characteristic, and the particulate of size makes the viewing area form uniform element thickness about a few μ m of additional formation liner between substrate.
For the particulate that will constitute liner is attached between substrate, can enumerate various distributing methods, for example have and make the substrate of particulate before bonding relatively charged and disperse and the dry type static that scatters scatters method, be used on the substrate that moving nozzle that the nozzle that moves scatters particulate scatters method and disperse particles and carry out the half dry type jet spread method etc. of jet spread in volatile liquid.Wherein, half dry type jet spread method is particularly suitable for using.
When carrying out half dry type jet spread method, at first, particulate is dispersed in the volatile liquid of alcohol etc., make spreading liquid.Be dispersed in the particulate in this spreading liquid, because of its particle diameter is about a few μ m, for dispersion equably, available stirrer or ultrasound wave stir.
Fig. 9 represents the liner dissemination apparatus that carries out the half dry type gunite in the past.
Utilize pump 6 that spreading liquid 1 is carried along the arrow A direction by liquid loop hose 5a from container 4,, carry along the arrow B direction by liquid loop hose 5b again, turn back in the container 4, constitute circulation by being arranged on the injection nozzle 8 that scatters 7 tops, chamber.
In the not shown liquid circulation path of injection nozzle 8 inside, needle valve is set, if will carry out pressure controlled pressure-air 24 with regulator (not shown) supplies gas to the arrow C direction along pipeline 9a by solenoid valve 10a, and supply injection nozzle 8, then under this air pressure, needle valve is opened.
In addition, supply gas to arrow D direction along pipeline 9b by solenoid valve 10b, then utilize this nitrogen to spray spreading liquid 1 if will carry out pressure controlled high pressure nitrogen 25 with regulator (not shown).
Open and close with scattering control module 3 control electromagnetic valve 10a, 10b,, control its switching time with being arranged on timer 2 and the connected guidance panel 12 that scatters in the control module 3.And, when solenoid valve 10a, 10b both sides open, make spreading liquid 1 jet spread.
Spreading liquid 1 jet spread on scattering the substrate 13 of chamber 7 time, is being preestablished the spray time of regulation on guidance panel 12.According to the distribution time of this setting, be contained in the timer 2 action of scattering in the control module 3, solenoid valve 10a, 10b open, and pressure-air and nitrogen are offered injection nozzle 8, make spreading liquid 1 jet spread.
Below scattering the inside of chamber 7 substrate 13 is set, shown in dotted line in scattering chamber 7, the spreading liquid 1 that quilt is sprayed slowly falls, evaporation of volatile liquid therebetween, and particulate 14 is attached on the substrate 13.
The substrate 13 that has scattered particulate 14 takes out from scattering chamber 7 as shown by arrow E, measures the quantity of the particulate 14 on the substrate 13 with corpuscular counter 15a.Corpuscular counter 15a is general to be adopted the part of substrate surface is made a video recording by the means of electricity and measured the method for particulate subnumber according to picture signal.
Sealant in advance on the surface of the substrate 13 that has scattered particulate 14, the face that this substrate 13 is accepted jet spread turns over as inside surface, with another piece baseplate-laminating, form unit interval, by means of heating or carry out the ultraviolet ray irradiation, make hardening seal, form liquid crystal cells.
At last, the liquid crystal injection is filled to liquid crystal cells, finishes liquid crystal display cells.
The liquid crystal display cells of structure is the display element that utilizes the electrooptics characteristic of liquid crystal as described above, and element thickness is one of key factor of decision display characteristic.
For this element thickness being made the value of regulation, scatter the particulate 14 that constitutes liner, but the density of the particulate 14 in the liquid crystal cells one changes, element thickness also changes thereupon.Therefore, when liquid crystal display cells is produced in batches, when wishing in the distribution operation of particulate 14, to scatter, the density of the particulate 14 on the substrate 13 (below, be called " distribution density ") want even and stable.
But, in aforementioned dissemination apparatus in the past, because the problem that reason described later occurs is that along with scattering the number of times increase, distribution density reduces, and can not obtain stable element thickness.That is to say, in aforementioned dissemination apparatus in the past, before carrying out jet spread, the spreading liquid 1 of concentrating quantity is set in container 4, carry out jet spread for the substrate of sending here successively 13.Therefore, through after a while, along with the processing block number increase of substrate 13, the spreading liquid 1 in the container 4 of packing into reduces gradually.
Because of amount one minimizing of spreading liquid 1, the liquid level of spreading liquid 1 just descends, so be applied to liquid loop hose 5a, the fluid pressure on the spreading liquid 1 in 5b and the injection nozzle 8 reduces.
From the front end inject high pressure nitrogen 25 of injection nozzle 8 time, the front end inside of injection nozzle 8 becomes negative pressure, by means of this pressure spreading liquid 1 is attracted to the front end of injection nozzle 8, and sprays, by carrying out the jet spread of spreading liquid 1 like this with high pressure nitrogen 25
But as previously mentioned, along with the minimizing of spreading liquid 1, fluid pressure one reduces, and the amount of liquid of the spreading liquid 1 that comes out from injection nozzle 8 just reduces, and the distribution density that is dispersed in the particulate 14 on substrate 13 surfaces just reduces.
In aforementioned dissemination apparatus in the past, reduce also not to its method that compensates even scatter density, so when scattering density overshoot scope, the operator haves no alternative but to adopt method such as change distribution time to solve in process of production.
The invention solves foregoing problems, in the liquid crystal display cells manufacture method of utilizing half dry type jet spread method, the atomic distribution density of liner that can prevent to be attached on the substrate descends, can obtain having uniform element thickness and the good liquid crystal display cells of display quality, liquid crystal display cells manufacture method and the manufacturing installation and the liquid crystal display cells that can obtain described liquid crystal display cells are provided.
Liquid crystal display cells manufacture method of the present invention is characterized in that,
Comprise following operation:
Detect operation, be used for detecting the particulate that makes liner and be dispersed in liquid and be contained in the liquid measure of the spreading liquid in the container and at least one amount (at least one among A and the B) in the weight;
The decision operation, be used at least one amount, the aperture of the needle valve of decision spray time, atomisation pressure, injection nozzle inside or the distance (at least one among A, B, C and the D) of injection nozzle and substrate according to detected described liquid measure and described weight;
Operation is scattered in spraying, be used for the aperture of the needle valve of spray time, atomisation pressure, injection nozzle inside or the distance of injection nozzle and substrate (at least one of A, B, C and D) being controlled according to the described value of decision, described spreading liquid spraying is dispersed on the described substrate
Described atomic density to described real estate is controlled, the desired value that makes it approach to stipulate.
Adopt this method, then can be controlled at and be easy to generate each discrete key element in the operation, suppress to scatter the discreteness of density, prevent the difference of unit interval, obtain the display quality liquid crystal display device with excellent.
In addition, liquid crystal display cells manufacture method of the present invention,
Comprise following operation:
Operation is scattered in spraying, and the particulate that is used for making liner is dispersed in liquid and the spreading liquid spraying that is contained in the container is dispersed in substrate;
Detect operation, be used to detect the liquid measure of described spreading liquid;
The control operation is used for corresponding to detected described liquid measure, the control spray time, and spraying is simultaneously scattered, and the described atomic density of described real estate is controlled the desired value that makes it approach to stipulate.
Adopt this method, then can be corresponding to the liquid measure of spreading liquid, the control spray time suppresses to scatter reducing of density, prevents the difference of unit interval, obtains the display quality liquid crystal display device with excellent.
In addition, the manufacture method of liquid crystal display cells of the present invention,
Comprise following operation:
Operation is scattered in spraying, and the particulate that is used for making liner is dispersed in liquid and the spreading liquid spraying that is contained in the container is dispersed in substrate;
The counting operation is used for the described particulate that is dispersed on the described substrate is counted;
The control operation is used for corresponding to described count value, and the control spreading liquid is to the spray time that the substrate of handling in the operation in the back scatters, the desired value that makes the described atomic density of real estate approach to stipulate.
Adopt this method, then because of carrying out direct census to the particulate subnumber that is dispersed on the substrate, and according to this count value control spray time next time, so the distribution density that can suppress to cause along with scattering the liquid measure minimizing reduces, prevent that unit interval from reducing, and obtains the display quality liquid crystal display device with excellent.
In addition, liquid crystal display cells manufacturing installation of the present invention comprises
Hold the container of spreading liquid;
Have the spreading liquid that will be contained in the described container and be dispersed in the dissemination apparatus of the spraying function on the substrate;
Detect the liquid measure detection means of the liquid measure of described spreading liquid;
The spray time control device is used for the liquid measure that detects according to described liquid measure detection means, control spray time, the desired value that makes the atomic density of described real estate approach to stipulate.
Adopt this device, then when carrying out jet spread, can make distribution density stabilized easily.
In addition, liquid crystal display cells manufacturing installation of the present invention comprises
Hold the container of spreading liquid;
Have the spreading liquid that will be contained in the described container and be dispersed in the dissemination apparatus of the spraying function on the substrate;
Measurement is dispersed in the means of the particulate subnumber on the described substrate;
The spray time control device is used for according to measured described particulate subnumber, control spray time, the desired value that makes the described atomic density of described real estate approach to stipulate.
Adopt this device, then when carrying out jet spread, also can make distribution density stabilized easily.
In addition, liquid crystal display cells of the present invention is characterized in that,
Manufacture method by aforesaid liquid crystal display cells is made.
Adopt this method, then can obtain not having the variation and the display quality liquid crystal display device with excellent of unit interval.
Fig. 1 represents the side view of the liquid crystal display cells manufacturing installation of the invention process form 1.
Fig. 2 represents the part side view of the liquid crystal display cells manufacturing installation structure of the invention process form 1.
Fig. 3 A, Fig. 3 B represent the variation diagram of the invention process form distribution density with respect to the relative distribution density of scattering number of times.
Fig. 4 represents the part side view of the liquid crystal display cells manufacturing installation structure of the invention process form 2.
Fig. 5 A, Fig. 5 B represent the distribution liquid measure of the invention process form 2 and scatter time relation figure.
Fig. 6 represents the side view of the liquid crystal display cells manufacturing installation of the invention process form 3.
Fig. 7 represents the part side view of the liquid crystal display cells manufacturing installation structure of the invention process form 4.
The difference that Fig. 8 represents the desired value of distribution density of the invention process form 4 and measured value with scatter time relation figure.
Fig. 9 represents the structural drawing of liquid crystal display cells liner dissemination apparatus in the past.
Below, referring to figs. 1 through Fig. 8 each example of the present invention is described.
In addition, describe with identical label with the part of the aforementioned Fig. 9 same function of example in the past of expression is attached.
Example 1
Below, referring to figs. 1 through Fig. 5 B the liquid crystal display cells manufacture method and the manufacturing installation of the invention process form 1 are described.
Fig. 1 represents the structural drawing of the dissemination apparatus of example 1, and Fig. 2 is illustrated in the key component as the dissemination apparatus that uses among the embodiment 1 of its concrete example, and Fig. 3 A, Fig. 3 B represent the measurement result of example 1.
In this example 1, in order to make distribution density more stable than dissemination apparatus in the past, be provided with the liquid measure pick-up unit of detection spreading liquid liquid measure and make distribution density approach the spray time control device of desired value according to the liquid measure control spray time that this liquid measure pick-up unit detects, these 2 newly add.
In detail, as shown in Figure 1, in the container 4 of spreading liquid 1 of packing into, liquid measure pick-up unit 16 is set, is used to detect the liquid measure of the spreading liquid 1 that changes along with jet spread.In addition, the control device 11 of the spray time control module 17 that is connected with aforementioned liquid measure pick-up unit 16 of dress in this example 1, being provided with, the distribution control module 3 of adorning timer 2 and being connected in replacing in the routine in the past Fig. 9 of expression with guidance panel 12.
In the dissemination apparatus of this structure, increase along with scattering number of times, the liquid measure of packing in the container 4 reduces, and at this moment fluid volume pick-up unit 16 calculates the amount of the spreading liquid 1 in the container 4 of packing into, and this liquid measure information is sent in the spray time control module 17 that constitutes control device 11 as signal.
The spray time control module 17 that obtains liquid measure information is calculated the spray time that spraying is next time scattered according to its information, changes the setting of timer, and control electromagnetic valve 10a, 10b are so that obtain the distribution density identical with last time scattering operation.
Adopt this structure, increase, the distribution density of substrate 13 also always is maintained fixed,, obtain showing the grade liquid crystal display device with excellent so can stably obtain few unit interval at random even scatter number of times.
In example 1, as shown in Figure 2, in present embodiment 1, use light source 18 and photoelectric sensor 19 as liquid measure pick-up unit 16.With timer A17a and timer B17b as the spray time control module 17 that constitutes control device 11.
Use transparent glass container as packing the container 4 of spreading liquid 1 into, and be predisposed to the light transmission container 4 that sends from light source 18 and arrive photoelectric sensors 19.
For example mixing with 50: 50 ratio in the aqueous solution of isopropyl alcohol and pure water, mixing and disperseing to constitute the particulate of the diameter 5 μ m of liner, forming the concentration that every 100ml is 1g, with this as spreading liquid 1.
This spreading liquid 1 is because of being mixed with particulate 14, so be difficult to see through light, have spreading liquid 1 in the light path between light source 18 and photoelectric sensor 19 and do not exist under the situation of spreading liquid 1, and the sensitive volume of photoelectric sensor 19 alters a great deal.
Therefore, in this example 1, with a pair of light source 18 and photoelectric sensor 19 judge the liquid level of the spreading liquid 1 in the containers 4 be on the liquid measure detection position of regulation or below, and with this information as electric signal, be sent to the spray time control module 17 that is arranged on the control device 11 from photoelectric sensor 19.
Spray time control module 17 has timer A17a and these 2 timers of timer B17b, when the liquid level of spreading liquid 1 is on the liquid measure detection position of regulation the time, set spray time for timer A17a, when the liquid level of spreading liquid 1 is below the liquid measure detection position of regulation the time, set spray time for timer B17b.
Therefore, beginning when substrate 13 scatters, the liquid level of spreading liquid 1 is on the liquid measure detection position of regulation, from after the dissemination to the liquid measure detection position of the regulation that photoelectric sensor 19 is set, the time of setting with the timer A17a distribution of spraying, then, spreading liquid 1 constantly consumes, and begins from the liquid measure detection position of regulation with the distribution of spraying of the time of timer B17b setting.
Fig. 3 A is the example of the device of this structure of use, show and set the spray time of timer A17a for 5.0 seconds, set the spray time of timer B17b for 5.5 seconds, the distribution of spraying, and measure the result who scatters number of times and scatter the relation of density relative value.
In addition, the liquid measure detection position, be that the position of photoelectric sensor 19 is the position of half capacity of container 4.In addition, so-called distribution density relative value is that target is scattered the relative value of density as 100% o'clock practical measurement value, and distribution density is with 18 positions on the corpuscular counter mensuration substrate and asks its mean value.
In order to compare research with aforementioned example 1, Fig. 3 B shows the result who measures with the dissemination apparatus of representing routine in the past Fig. 9.At this moment spray time is fixed on 5.0 seconds as 1 example.
As shown in Figure 3A, though along with the increase of scattering number of times, scattering density has the tendency that reduces a little, switches to the boundary to carry out spray time, and scattering density increases again, and the unlikely minimizing of particulate is too much.
In addition, shown in Fig. 3 B, in dissemination apparatus in the past,, scatter density and constantly reduce along with the increase of scattering number of times.
Like this, according to the liquid level of spreading liquid, be liquid measure, control spray time, can prevent to cause being dispersed in the minimizing of the particulate subnumber on the substrate, obtain having the display quality liquid crystal display device with excellent of stabilized uniform element thickness along with the minimizing of scattering liquid measure.
In addition, in this example, be to be illustrated for example with a pair of light source 18 and photoelectric sensor 19, but also can be with many to light source and photoelectric sensor, form the liquid measure detection position of a plurality of regulations, according to the liquid level of spreading liquid is which scope in the liquid level of a plurality of regulations, determines spray time respectively, by further improving the precision that density is scattered in control like this.
Example 2
Figure 4 shows that example 2 of the present invention.
In present embodiment 2, with laser scanning type sensor, laser scanning type light source 20 and photoelectric sensor 21 as liquid measure pick-up unit 16, with the timer 17c that can write and numerical transformation unit 17d as the spray time control module 17 that constitutes control device 11, and by sensor control unit 22 connection photoelectric sensor 21 and numerical transformation unit 17d, basic structure in addition and example 1 are basic identical.
As the laser scanning type light source 20 of liquid measure pick-up unit 16 and being constructed as follows of photoelectric sensor 21, if it is promptly such to arrow G from the arrow F shown in the figure, press time sweep measuring scope from the light source that laser scanning type light source 20 takes place, then carry out sensitization with 21 pairs of this laser of photoelectric sensor, in sensor control unit 22 with the liquid level position numeric representation.Calculate the liquid measure of spreading liquid according to the liquid level position of spreading liquid.
The little by little variation of liquid level position that produces if use this liquid measure pick-up unit to scatter for 16,1 times uses laser scanning type sensor 20,21 also can record usually, then the liquid measure of spreading liquid is delivered in the spray time control module 17 as numerical information.Therefore, if use the laser scanning type sensor 20,21 that the scope of stipulating is scanned, then can critically measure the liquid measure of the spreading liquid 1 in the container 4 of packing into.
In addition, the liquid level position that the laser scanning type sensor 20,21 of using the scope to aforementioned regulation to scan is measured is converted to numerical value in sensor control unit 22, and delivers in the spray time control module 17.Spray time control module 17 can carry out Multistage Control according to the signal of sending here.
In detail, spray time control module 17 according to the information of the liquid level position of sending here from sensor control unit 22, be the liquid measure of spreading liquid, with numerical transformation unit 17d predefined spray time is set among the timer 17c that can write.
The liquid measure of spreading liquid and the relation of spray time are for example set shown in Fig. 5 A, and the numerical information that is about to liquid measure is corresponding to the multistage distribution time.
Fig. 5 B represents, is divided into 7 grades till the liquid measure arrival 300ml with spreading liquid, sets the measurement result of the occasion of spray time shown in Fig. 5 A at each grade.For example, initial liquid measure 300ml begins to scatter with 5.0 seconds spray times, and soon, scattering number of times increases, and spray time switched to 5.4 seconds when liquid measure is 240ml.
Like this, control the liquid measure and the distribution time of spreading liquid multistagely, come the relation of analysing scattering number of times and distribution density then.
Shown in Fig. 5 B, increase even scatter number of times, scatter density and also reduce hardly, in addition, relatively represent Fig. 3 A of aforementioned example 1 and expression comparative example 1 Fig. 3 B measurement result as can be known, example 2 can obtain stable distribution density.
Like this,, can control more accurately, can obtain having the display quality liquid crystal display device with excellent of stabilized uniform unit interval by means of carrying out multistage time control.
In addition, when carrying out more High Accuracy Control, as long as increase the progression of spray time, in addition, as other the example of method, also can deliver in the spray time control module 17 with the information of liquid level position as analog electrical signal, and in spray time control module 17, adopting and making liquid level position information and spray time is the method for the relation etc. of continuous quantity.
In addition, in this example 1 and 2, described the liquid measure of spreading liquid or the method for liquid level of detecting in detail.But much less, the device of measuring spreading liquid weight can be set also, and, the spray time of spreading liquid be changed, by controlling the atomic density of being sprayed like this according to weight or weight and liquid measure.In addition, the Weight measurement device of spreading liquid (not shown) is as long as be arranged on container 4 following of spreading liquid.
Example 3
Fig. 6 represents the manufacture method and the manufacturing installation of the liquid crystal display cells of the invention process form 3.
Corpuscular counter 15b is made special structure, this corpuscular counter 15b is connected with spray time control module 17, and the number of the particulate of measuring corresponding to corpuscular counter 15b 14, with spray time control module 17 control spray times, make and scatter density and approach desired value.
In detail, if the substrate 13 behind the spreading liquid 1 of will having sprayed is put among the corpuscular counter 15b, then corpuscular counter 15b measures the particulate subnumber on the substrate 13, and it is scattered density information deliver in the spray time control module 17.
After obtaining scattering density information, the spray time when spray time control module 17 resets next one spraying distribution according to this information to timer, and control electromagnetic valve 10a, 10b.
Therefore, the spray flux density of operation and back operation obtains the uniform liquid crystal indicator of unit interval before stably keeping.
Below, the concrete example of expression example 2.
Example 4
Fig. 7 represents the key component of the dissemination apparatus of example 4.
Corpuscular counter 15b is made of ccd video camera and Flame Image Process measurement mechanism 23a.Ccd video camera as optical system 23b is set up ring illumination, makes the particulate in the camera watch region not have shade, and dress is according to the computing machine of the image measurement population of this camera photography in the Flame Image Process measurement mechanism 23a.
In scattering chamber 7, accept to scatter the substrate 13 of particulate 14, be placed on the inside of delivering to corpuscular counter 15b on the objective table (not shown).
Corpuscular counter 15b measures at the beginning, and objective table moves to the preassigned position of process of measurement, and with the CDD video camera is made a video recording in a plurality of places of substrate 13.The image that is taken is measured the particulate subnumber with Flame Image Process measurement mechanism 23a, and is kept in the storer with information such as condition determinations as scattering density data.
Like this, by means of comparing to the particulate that measures 14 numbers with as particulate 14 numbers of target, information that can controlled spray time.According to this information, the spray time that spray time control module 17 changes when spraying next time is to compensate the too much or not enough of particulate 14 numbers.
Usually, in corpuscular counter 15b, the multi-purpose computer as Flame Image Process measurement mechanism 23a or machinery control and data processing equipment is arranged as an example.If the judgement with this computing machine time of carrying out is controlled then can make the simple in structure of spray time control module 17.
In this example 4, suppose that Δ n is the poor of the distribution density of target and the distribution density that in fact measures, then represent that by predefined the voting of scattering density and spray time relation decides spray time according to this Δ n, this spray time is delivered in the spray time control module 17 with the computing machine of Flame Image Process measurement mechanism 23a.
Spray time control module 17 has the timer 17c that can write, so long as will be become the constituting of service time of solenoid valve to get final product by the setting value that computing machine is supplied with.
Fig. 8 represents to scatter the desired value of density and the difference Δ n and an example of scattering time relation of measured value.
In this case, with Δ n at ± 35/mm 2Scope in per 5/mm 2Be unit, set spray time for 14 grades.
If scatter like this, then can realize stable distribution density for scattering number of times.
In addition, adopt the dissemination apparatus of aforementioned structure, then handle, so can be with corresponding tables or calculating formula are set up Δ n and scattered time relation arbitrarily because of utilizing computing machine to carry out complex calculations.
In addition, in aforementioned example 4, be in corpuscular counter, to have used computing machine, but the invention is not restricted to this, also can make spray time control module 17 have the calculation function of decision spray time and the function of input/output condition and data, and, come substituting for computer from the data that corpuscular counter 15b only exports distribution density.
Like this, can be corresponding to different spray times, in fact control be dispersed in particulate 14 numbers on the substrate 13, not only count corresponding control of situation energy of reducing for particulate 14, and for waiting other unusual situation of particulate 14 number increases that causes also correspondingly to control because of atomisation pressure change (being that pressure rises in this case).Therefore, can obtain having the display quality liquid crystal display device with excellent of stabilized uniform unit interval.
In addition, in example of the present invention, decide the example of spray time at length to be illustrated for atomic count value according to detected liquid measure or distribution.But atomisation pressure one change is scattered density and is also changed.For the stable density of scattering when atomisation pressure changes, the device of the atomisation pressure that mensuration sprays to particulate is set, decide spray time by means of measured value, can further reduce the discreteness of particulate density according to detected liquid measure and atomisation pressure.The atomisation pressure determinator is arranged on for example between the injection nozzle 8 and solenoid valve 10b (not shown).
In addition, according to the liquid measure of spreading liquid, the weight of spreading liquid, the atomic count value of being scattered or their combination, can not only change spray time controls, much less also can or control atomisation pressure, perhaps control the aperture of the needle valve of injection nozzle inside, perhaps control the distance of injection nozzle and substrate, perhaps these methods are made up control etc., further approach the desired value of stipulating by so atomic density that can make spraying accurately.
As previously mentioned, adopt elements of LCD manufacture method of the present invention, then when utilizing the half dry type gunite will evenly be dispersed with the spraying of atomic spreading liquid to be dispersed on the substrate, liquid measure according to spreading liquid, the control spray time, the distribution of on substrate, spraying simultaneously, the density of the aforementioned micro particles of control basal plate face makes it approach desired value, can suppress reducing of distribution density by such, obtain to prevent that unit interval from reducing and the good liquid crystal display cells of display quality.
Perhaps, according to the particulate subnumber that is dispersed on the substrate, the spray time of control back operation, particulate is scattered in spraying on substrate simultaneously, makes it approach desired value with the density of the aforementioned micro particles on the control basal plate face, also can obtain effect as hereinbefore.

Claims (16)

1. the manufacture method of a liquid crystal display cells is characterized in that,
Comprise following operation:
Detect operation, be used for detecting the particulate that makes liner and be dispersed in liquid and be contained in the liquid measure of the spreading liquid in the container and at least one amount (at least one among A and the B) in the weight;
The decision operation, be used at least one amount, the aperture of the needle valve of decision spray time, atomisation pressure, injection nozzle inside or the distance (at least one among A, B, C and the D) of injection nozzle and substrate according to detected described liquid measure and described weight;
Operation is scattered in spraying, be used for the aperture of the needle valve of spray time, atomisation pressure, injection nozzle inside or the distance of injection nozzle and substrate (at least one of A, B, C and D) being controlled according to the described value of decision, described spreading liquid spraying is dispersed on the described substrate
Described atomic density to described real estate is controlled, and it is controlled, the desired value that makes it approach to stipulate.
2. the manufacture method of a liquid crystal display cells is characterized in that,
Comprise following operation:
Detect operation, be used for detecting the liquid measure that the particulate that makes liner is dispersed in liquid and is contained in the spreading liquid in the container;
The decision operation is used for according to detected described liquid measure, the decision spray time;
Operation is scattered in spraying, only is used in the described spray time of decision, described spreading liquid spraying being dispersed on the described substrate,
Described atomic density to described real estate is controlled, the desired value that makes it approach to stipulate.
3. the manufacture method of liquid crystal display cells as claimed in claim 2 is characterized in that,
Also comprise the mensuration operation, be used to measure the atomisation pressure that described particulate is sprayed,
According to the detected described liquid measure and the measured value of described atomisation pressure, the decision spray time.
4. the manufacture method of a liquid crystal display cells is characterized in that,
Comprise following operation:
Operation is scattered in spraying, and the particulate that is used for making liner is dispersed in liquid and the spreading liquid spraying that is contained in the container is dispersed in substrate;
Detect operation, be used to detect the liquid measure of described spreading liquid;
The control operation is used for according to detected described liquid measure, the control spray time, and spraying is simultaneously scattered, and controls the described atomic density of described real estate, the desired value that makes it approach to stipulate.
5. the manufacture method of liquid crystal display cells as claimed in claim 4 is characterized in that,
Be contained in the liquid level of the spreading liquid in the described container by means of detection, the liquid measure of carrying out described spreading liquid detects.
6. the manufacture method of liquid crystal display cells as claimed in claim 4 is characterized in that,
The detected liquid level of described spreading liquid has a plurality of, is which scope that is in the liquid level of a plurality of regulations according to described liquid level, determines spray time respectively.
7. the manufacture method of a liquid crystal display cells is characterized in that,
Comprise following operation:
The counting operation is used for that the particulate that makes liner is dispersed in the described particulate subnumber that the spreading liquid of liquid is dispersed on the substrate and counts;
The decision operation is used for according to the described atomic count value that is counted, the decision spray time;
Operation is scattered in spraying, only is used in the described spray time of decision, described spreading liquid spraying being dispersed on the described substrate,
Described atomic density to described real estate is controlled, the desired value that makes it approach to stipulate.
8. the manufacture method of liquid crystal display cells as claimed in claim 7 is characterized in that,
According to described atomic count value,, determine described spray time with representing the corresponding tables that concerns between described atomic count value and the described spray time or calculating formula (among A and the B one).
9. the manufacture method of liquid crystal display cells as claimed in claim 7 is characterized in that,
Also comprise the relation of mensuration, be used to measure the atomisation pressure that described particulate is sprayed.
10. the manufacture method of a liquid crystal display cells is characterized in that,
Comprise following operation:
Operation is scattered in spraying, and the particulate that is used for making liner is dispersed in liquid and the spreading liquid spraying that is contained in the container is dispersed in substrate;
The counting operation is used for the described particulate subnumber that is dispersed on the described substrate is counted;
According to described count value, the control spreading liquid carries out the spray time of spreading liquid to the substrate of handling in the operation in the back, the desired value that makes the described atomic density of real estate approach to stipulate.
11. the manufacturing installation of a liquid crystal display cells is characterized in that, comprises
Hold the container of spreading liquid;
Have the spreading liquid that will be contained in the described container and be dispersed in the dissemination apparatus of the spraying function on the substrate;
Detect the liquid measure detection means of the liquid measure of described spreading liquid;
The spray time control device is used for the liquid measure that detects according to described liquid measure detection means, control spray time, the desired value that makes the atomic density of described real estate approach to stipulate.
12. the manufacturing installation of liquid crystal display cells as claimed in claim 11 is characterized in that,
Level detection means with the liquid level position that detects described spreading liquid constitute described liquid measure detection means.
13. the manufacturing installation of liquid crystal display cells as claimed in claim 11 is characterized in that,
The device that also comprises the atomisation pressure that mensuration is sprayed to described particulate.
14. the manufacturing installation of a liquid crystal display cells is characterized in that, comprises
Hold the container of spreading liquid;
Have the spreading liquid that will be contained in the described container and be dispersed in the dissemination apparatus of the spraying function on the substrate;
Measurement is dispersed in the means of the particulate subnumber on the described substrate;
The spray time control device is used for according to measured described particulate subnumber, control spray time, the desired value that makes the described atomic density of described real estate approach to stipulate.
15. the manufacturing installation of liquid crystal display cells as claimed in claim 12 is characterized in that,
The device that also comprises the atomisation pressure that mensuration is sprayed to described particulate.
16. a liquid crystal display cells is characterized in that,
Manufacture method by claim 1,4,7 or 10 each described liquid crystal display cells is made.
CN99124302A 1998-11-09 1999-11-09 Manufacturing method and equipment of liquid crystal display element and liquid crystal display element Pending CN1253304A (en)

Applications Claiming Priority (2)

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JP316732/1998 1998-11-09
JP31673298 1998-11-09

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CN (1) CN1253304A (en)

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