JP2002148635A - Dry spacer spraying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dry spacer spraying device such that spacers can be easily prepared and handled, the device can be used for large-size substrates, spacers in various sizes from a spacer with a small particle size to a spacer with a large particle size can be sprayed not only on a glass substrate but on a film substrate, high spraying efficiency of spacers is obtained, fast spraying operation and high reliability are obtained. SOLUTION: The dry spacer spraying device is equipped with a spray chamber to house a substrate, a measurement unit to measure a specified volume of the spacer corresponding to the spray density of the spacer on the substrate, and a spray nozzle attached to the ceiling of the spray chamber.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dry spacer spraying apparatus. More specifically, the present invention is to disperse spacers on the substrates in order to fix the two substrates in parallel at the time of bonding a thin film transistor substrate or the like to a color filter substrate or the like in a process of assembling a liquid crystal cell. And a dry spacer spraying device.

[0002]

2. Description of the Related Art In the process of assembling a liquid crystal cell, spherical spacers of a minute prescribed size are dispersed on a substrate in order to accurately and uniformly make a gap between display elements. The spacer spraying method includes a wet spraying method and a dry spraying method. The wet spraying method is a method in which spacers are dispersed in a solvent and sprayed as a liquid to uniformly distribute the spacers on a substrate. This method has the merit that the device is inexpensive and the spacer itself is not charged, so that it can be sprayed while minimizing external static electricity and the influence of the surroundings.The twisted nematic method and the super twisted nematic method Many are used in liquid crystal elements.
However, it is necessary that the solvent as the medium is surely dried before reaching the substrate. Otherwise, the spacer aggregates as the solvent on the substrate dries, so that a volatile liquid must be used as the solvent and the inside of the chamber must be dried at a high temperature. In addition, since aggregation tends to occur during the spraying process, strict control is required from the stage of preparing the spacer dispersion to the moment of spraying in the apparatus. However, it is conceivable that this method is already being used by liquid crystal display device manufacturers to accumulate considerable experience and to operate them. The dry spraying method is a method in which the spacer itself is supplied and sprayed, and since there is no need to add anything to the spacer, the preparation is very simple. As a dry spraying method,
In general, there are an electrification method in which a spacer is placed in an air stream and pressure-fed and sprayed, and an electrostatic method in which a spacer is forcibly charged and sprayed. In the electrostatic method, since the spacer is charged to a high voltage, the spacer can be sprayed without being put on an air current, so the use efficiency of the spacer is improved, but the spacer is not suitable for a wide range of spraying, and the spacer charged to a high voltage, Since it reaches the substrate as it is, there is a problem that there is a danger that the pattern on the substrate may be destroyed. In the charging method, it is difficult to separate and disperse the spacers, and various measures and know-how are required. However, since the charging of the spacers is small, there is no concern about the electrostatic method. Currently, liquid crystal cells are used as display elements.
In general, liquid crystal cells having different display structures are selectively used in accordance with various demands. As the range of application as a display element, such as an increase in the number of types and an increase in the size, is expanded, the requirements are diversified, and accordingly, various types of spacers are developed. Spacers have also been developed. In addition, there is a demand for a substrate material to be sprayed not only on glass but also on a plastic film. On the other hand, the current spraying apparatuses do not always satisfy the performance including high speed and reliability. For this reason, there is a demand for a spacer dispersing device that can achieve higher performance and can meet a variety of requirements.

[0003]

SUMMARY OF THE INVENTION According to the present invention, the preparation and handling of a spacer are simple, and it is possible to cope with a large-sized substrate.
It is an object of the present invention to provide a dry spacer spraying device which can spray not only a glass substrate but also a film substrate, has a high spraying efficiency of spacers, a high speed of spraying operation and a high reliability.

[0004]

The present inventors have made intensive studies to solve the above-mentioned problems, and as a result, have found that a spraying chamber,
In a dry spacer spraying apparatus having a spacer measuring unit and a spray nozzle, high-speed and highly reliable spraying is performed by weighing a fixed volume of spacer on a weighing dish and pressure-spreading the spacer to a multiplex nozzle for spraying. It has been found that the present invention can be achieved, and the present invention has been completed based on this finding. That is, the present invention
(1) A spray chamber for accommodating a substrate, a measuring unit for measuring a spacer having a constant volume corresponding to a spacer spray density on the substrate, and a spray nozzle provided on a ceiling portion of the spray chamber. A dry spacer spraying device, (2) a table provided with a plurality of weighing pans in which a weighing unit for weighing a fixed volume of spacers is provided, and a spacer supply hopper for supplying spacers to the weighing pans by applying vibration; Sensor for checking the amount of spacer supplied to the weighing pan, a slicing wiper for slicing the spacer supplied to the weighing dish to a fixed amount, and a weighing confirmation sensor having a sensor for determining that the slicing spacer has been cut to a fixed amount Item 1 comprising a unit and an ejector unit that sucks up a spacer on a weighing dish for which the confirmation result is determined to be GO and feeds the spacer to a spray nozzle. Placing dry spacer spraying apparatus, (3)
The spacer supply hopper has a vibration drive control circuit that makes the high frequency component, amplitude and frequency of vibration variable, and a mechanism for adjusting the detection position of a sensor that detects the amount of spacer supplied to the weighing pan, and controls the spacer supply amount. 3. The dry spacer spraying device according to claim 2, comprising a sensor unit to be adjusted.
(4) A second sensor including a sensor for confirming the amount of the cut spacer on the weighing pan, a distance sensor for confirming the spacer planes of the plurality of weighing pans on the table, and a weighing confirmation sensor control circuit having a monitoring display function. (5) The ejector unit that sends the spacer of the weighing pan to the pressure feed pipe moves up and down the ejector suction port with the electromagnetic solenoid, sets the distance between the suction port and the weighing pan plane, and then sets the distance between the suction port and the weighing pan. ON-OFF
The dry spacer spraying device according to claim 2, further comprising a solenoid control circuit that does not apply a strong impact force to the weighing pan when the spacer is driven to suck the spacer and pressed against the weighing pan. (6) The spraying nozzle supplies the spacer. 2. The dry spacer spraying apparatus according to claim 1, which is a multiplex nozzle having a plurality of independent spray holes for spreading and spraying one supply port and a supplied spacer on a substrate. (7) The multiplex nozzle includes a spacer. 7. The dry spacer spraying apparatus according to claim 6, further comprising a hood for restricting the spraying area of (8).
7. The dry spacer spraying apparatus according to claim 6, wherein a plurality of multiplex nozzles are provided on a ceiling portion of the spray chamber.
(9) The spraying chamber is a multi-layer chamber in which each layer is electrically insulated, wherein the innermost layer surface of the chamber forms a high-resistance conductive surface, and the innermost layer surface has a terminal for supplying a voltage from outside. Item 1. The dry spacer spraying device according to Item 1, and (1)
0) A dry spacer dispersing apparatus according to claim 9, wherein a high voltage generating circuit for supplying a high voltage capable of switching between voltage and polarity is connected to a terminal for supplying a voltage from the outside. .

[0005]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A dry spacer spraying apparatus according to the present invention includes a spray chamber for accommodating a substrate, a metering unit for metering a fixed volume of spacers corresponding to the spacer spray density on the substrate, and a ceiling of the spray chamber. Has a spraying nozzle provided in the nozzle. In the dry-type spacer spraying device of the present invention, the spraying nozzle is preferably a multiplex nozzle. FIG. 1A is a perspective view of one embodiment of the dry spacer spraying device of the present invention, and FIG. 1B is an explanatory diagram of one embodiment of a multiplex nozzle. The dry spacer spraying apparatus according to the present embodiment has a spray chamber A, a spacer measuring unit B, and a spray nozzle C for spraying the spacer,
A substrate table 1 on which a substrate on which a spacer is to be sprayed is placed is provided below the chamber. Spacer measuring unit B
This unit automatically supplies a spacer supplied in advance from the outside to the weighing pan in the unit prior to spraying, and sends out the spacer on the weighing pan having a fixed volume measured to the multiplex nozzle. The board table is a moving table 2
And the whole table can be pulled out. Therefore, from the outside, only the closed door on the side of the table is seen. By the switch operation of the operation panel 3 of the entire apparatus, the entire table can be automatically pulled out and inserted by the air cylinder along the left and right movement guides on the side of the table installed inside.

[0006] In the dry spacer spraying apparatus of this aspect,
The basic operation is performed as follows. That is, the moving table 2 is pulled out by turning on the table OUT switch of the operation panel, and the board is placed on the board table attached to the table.
The moving table is put into the spray chamber by turning on the table IN switch on the operation panel. Next, by pressing the spray start switch on the operation panel, the metering of the spacer is started, and the operation for spraying is started. The operation for spraying is performed according to a spray mode, parameters, and the like, which are set in advance. The overall control is performed by an apparatus controller provided at the lower part of the chamber. The spacer is measured by the measuring unit B, and the measured spacer is sent out to the spacer supply port of the multiplex nozzle 120 provided on the ceiling portion of the spray chamber (pressure feeding 1). At the same time, pressurized gas is applied to the spray holes of the multiplex nozzle, and the first spraying is performed on the area 121 in the spray mode (spray 1). Subsequently, similarly,
Second scatter and spraying to area 122 in the second weighing and spraying mode (spray 2), third scattering to area 123 in the third weighing and spraying mode (spraying 3), fourth weighing and spraying in mode The fourth spraying (spraying 4) on the area 124 is performed. By scattering the spacers a plurality of times, the distribution of the spacers is averaged, and a scattered state uniformly distributed on the substrate can be obtained. In addition, during the spraying of the spacer, the exhaust and the electric field in the spraying chamber can be set according to the characteristics of the spacer to be used. Although the dry spacer spraying apparatus of this embodiment is a manual operating machine, it can be an in-line automatic machine by performing setting and unloading of a substrate by a robot similarly to the conventional spacer spraying apparatus.

FIG. 2A shows. FIG. 2B is a perspective view of one embodiment of a hopper unit, FIG. 2C is a perspective view of one embodiment of a weighing sensor unit, and FIG. (d) is a perspective view of one aspect of a weighing dish. The weighing unit according to the present embodiment includes four weighing pan units 200 that weigh the scattered spacer as a fixed volume amount.
Each of a, 200b, 200c and 200d has a rotary table 201 arranged in units of 90 degrees, and the rotary table is rotated by a rotary motor (not shown) provided thereunder. There are weighing pan stop position detection pins 203 on the side of the table, and photoelectric sensors 202 arranged in four directions.
When a, 202b, 202c and 202d (only 202a are stopped) at the position where the detection pin is detected, the respective weighing pan positions and the respective function station positions described below are arranged so as to exactly match. The function stations are a hopper 20A for supplying a spacer to the weighing pan, a weighing confirmation sensor 20B, and an ejector 20C for taking out the spacer on the weighing pan after weighing. Is provided.
The hopper unit 20A is composed of two units, a hopper unit that supplies a spacer to the weighing pan and a weighing sensor unit. Hopper unit is hopper 2
a8 has a hopper upper lid 2a1 for supplying a spacer from outside, and the hopper upper lid is screwed and fixed to the hopper body. When supplying the spacer, the hopper upper lid is removed, and the spacer is supplied from above the hopper. The hopper 2a8 has a small-diameter spacer supply hole 2a3 for dropping a spacer into the weighing dish 2a2, and the main body itself is fixed to a diaphragm 2a4 for applying vibration to drop the spacer. The diaphragm is screwed to the unit base at one end.
The piezo element 2a6 is fixed by a5 and is a vibration source housed in the unit base. When stopped, the piezo element is pressurized by the diaphragm 2a4,
At the time of driving, vibration is applied to the hopper via the diaphragm with the screw 2a5 as a fulcrum. Further, the spacer is supplied from the hopper to the weighing plate 2a2 on the rotary table, and the supply amount is confirmed by the weighing confirmation sensor by the detection beam 2a7 indicated by the virtual line of the spacer supply detection position.

The piezo element 2a6 is connected to the drive circuit box 2
The apparatus is connected to a vibration drive control circuit housed in the apparatus 05 and driven by a signal from the apparatus controller. The high frequency component, amplitude and frequency of the vibration are made variable by the vibration drive control circuit, so that it is possible to generate an optimum vibration suitable for a spacer having various characteristics to be dispersed. Usually, it is preferable that the high-frequency component and the amplitude are set in advance at the time of adjusting the apparatus, and that the operator sets only the optimum frequency according to the spacer to be used. FIG. 3A is a circuit diagram of one embodiment of the vibration drive control circuit. In the frequency variable pulse oscillator 2d1 having a duty cycle of 50%, a pulse 2d3 is generated by a drive signal from the device controller 2d2. The saturation type pulse power amplifier 2d4 is a high-side amplifier 2d41 and a low-side amplifier 2d42, and outputs the piezo element 2d to each output via a rise time adjustment resistor 2d51 and a fall time adjustment resistor 2d52.
It is connected to d6 and cuts excessive vibration high frequency components according to the structure of the unit. The variable power supply 2d7 varies the power supply voltage of the pulse power amplifier 2d4 to change the peak value of the pulse applied to the piezo element 2d6 in order to obtain a standard vibration amplitude for supplying various spacers. In many cases, the rise time adjustment resistance 2d51 and the fall time adjustment resistance 2d52 are preferably 100 to 200Ω, the peak value is preferably 100 to 150V, and the frequency is preferably 0.3 to 2kHz. .

In the embodiment shown in FIG. 2C, the timing at which the vibration applied to the hopper 2a8 is stopped is detected by the weighing sensor unit in order to supply the spacer to the weighing dish 2a2. The weighing sensor, prior to the spraying operation,
This is a fiber beam sensor for controlling the start of the supply of the spacer to the weighing dish and the stop of the supply by the vibration start signal sent from the device controller. As shown in FIG. 2C, the fiber beam sensor for detection is
The detection beam 2a7, which is composed of b2 and the light receiving head 2b1, and is indicated by a virtual line, is the ON / OFF detection position of the fiber beam. The detection beam 2a7 is moved and adjusted in the vertical direction 2b11 by the adjustment screw 2b7, and after the adjustment, the set screw 2b
9 fixed. Also, the left and right screws 2b81 and 2b
By loosening b82, the adjustment screw 2b7 can be adjusted in the rotation direction 2b10 around the vertical direction. By such means, the detection beam 2a7 is moved or rotated up and down to adjust and set the detection position. FIG.
As shown in (d), the spacer is supplied from the hopper to the measuring hole 2c3 of the measuring plate 2a2,
Deposit on 1. When the spacer reaches the position of the detection beam, the supply of the spacer is stopped.

In the embodiment shown in FIG. 2, the hopper 2a
When the vibration to 8 is stopped and the spacer is not supplied, the weighing dish 2a2 is positioned immediately below the spacer supply hole 2a3 and stopped. Since the spacer has a very small particle size of 1 to 10 μm, it does not fall unless vibration is applied due to powder adhesion. Even if it is slightly dropped, there is no problem simply because it is supplied to the weighing dish 2a2 located below. Recently, in order to solve the problem that the conventional spraying device cannot measure due to such adhesive force, a spacer with very high fluidity has been developed. Not converted. The dry spacer spraying apparatus of the present invention can cope with such a high-fluidity spacer by making the diameter of the spacer supply hole 2a3 of the hopper smaller than usual. For normal spacers, the diameter of the spacer supply holes is often preferably between 1.0 and 1.5 mm, and may be less than 1.0 mm if desired. At the start of the weighing operation, the device controller applies vibration to the hopper 2a8 via the piezo element driving circuit. The spacer in the hopper starts falling uniformly on the weighing dish 2a2 by appropriate vibration. Uniform drop means that a considerable amount of the sample falls on the weighing pan in about 0.5 seconds. The portion of the spacer 2c3 indicated by the broken line of the weighing dish 2a2 in FIG.
When the spacer starts to reach the portion, the spacer starts to expand laterally due to the drop force due to vibration and its own weight. When the apparatus controller detects that the detection sensor has detected the spacer by the detection beam 2a7, the vibration of the piezo element 2a6 is stopped. By adopting such a spacer supply method,
The spacers required for sanding can be supplied to the weighing pan without excess or shortage. Further, even if the amount of drop slightly changes depending on the remaining amount of the spacer in the hopper 2a8, the amount of fall is automatically corrected depending on the length of the vibration time. By making the adjustment, it is possible to make the subsequent amount of sanding to be minimum and constant. Further, such a detection method is not affected by the particle size of the spacer and does not depend on the surface color.
It is possible to cope with all kinds of spacers in the future, and the implementation effect is great.

In the hopper section 20A, the spacer supplied to the weighing pan unit 200a attached to the rotary table 201 is displaced by the rotation of the rotary table 201 so that the weighing pan unit 200a moves and passes through the slotted wiper 204. And reaches the weighing confirmation sensor unit 20B. The weighing confirmation sensor confirms the final weighed value at this position, determines GO-NG, and simultaneously monitors the spacer amount. FIG. 3B is a circuit diagram illustrating one embodiment of the weighing confirmation circuit. The measuring hole 2c3 of the measuring dish 2e1 is filled with a spacer. The distance sensor 2e2 is a photoelectric element that outputs an analog voltage proportional to the length L in the drawing. By accurately measuring the distance between the sensor and the spacer surface of the weighing pan, the weighing result of the spacer can be determined. Analog switch 2e3
Sets the correction voltages 2e41 to 2e44 to the input,
Analog switch selection signal 2e from device controller
5, the output voltages 2e41 to 2e44 are selected. In the addition circuit 2e6, the sensor output and the selection correction voltage are added. With the correction voltage, the height at the time when the four weighing pans mounted on the rotary table are mounted can be made the same, that is, mechanical errors can be electrically corrected, whereby the weighing value of each weighing pan can be corrected. Can be accurately detected. Therefore, the selection signal 2e5 is a mechanism by which the device controller selects a correction voltage corresponding to each of the weighing pan units 200a, 200b, 200c, and 200d.

In the weighing confirmation circuit of the embodiment shown in FIG. 3B, GO / NG determination of the weighing result is performed by the window comparators 2e7 and 2e8.
It is sensed by the controller connected by e9. When the changeover switch 2e10 is set to "1", the output of the distance sensor 2e2 is output to the connection line 2e13. When the changeover switch 2e10 is set to "2", the corrected sensor output obtained by the adding circuit 2e6 is output to the connection line 2e13 as a weighing value. Further, when it is set to "3", the upper limit set value 2e of the judgment circuit is set.
When 11 is set to "4", the lower limit set value 2e12 is output. The output of the changeover switch 2e10 is displayed on the digital panel meter 2e14. If you want to hold the output display value with the display hold input of the panel meter,
An instruction can be given from the controller via the connection line 2e15.

[0013] In the dry spacer spraying apparatus of the present invention,
The operation of the weighing confirmation sensor unit can be performed as follows. That is, the four weighing dishes on the turntable are No. 1, No. 2, No. 3 and No. 4, respectively, and the changeover switch 2e10 is set to "1". The spacer is manually cut on each weighing pan, and the rotating table is turned to display the weighing value on the digital panel meter 2e14 via the connection line 2e13, thereby setting the height of the weighing pan on the table. You can see the variation of the size. In the embodiment, the distance L
= 4.00 mm and 4.00 V, and the distance can be measured as it is. While checking the variation at this time, the mounting height is adjusted and each variation is corrected.
Next, the changeover switch 2e10 is set to “2”, and the sensor output corrected by the adding circuit 2e6 is displayed on the digital panel meter 2e14. By rotating the table, the weighing pans Nos. 1 to 4 are sequentially moved to the sensor positions, and the analog switch selection signal 2e5 of the analog switch 2e3 is switched accordingly, so that all weighing results are 4.00 V, that is, the distance 4 The adjustment voltages 2e41 to 2e44 are adjusted by the correction voltage adjustment volume so as to be .00 mm.
To adjust. As a result, a mechanical variation error in the height direction of the weighing pan is corrected, and an accurate weighing result can be read. Further, the changeover switch 2e10
Is set to “3” or “4”, and the allowable measurement upper limit value and the lower limit value are set as an upper limit set value 2e11 and a lower limit set value 2e12, respectively, by a volume. In the embodiment, the upper limit value and the lower limit value are set to about 4.00 ± 0.10 to 0.25 mm, and when the weighing result is between the upper limit value and the lower limit value, the GO signal is output to the controller, and the upper limit value is output. When the value or the lower limit is exceeded, an NG signal is output to the connection line 2e9, and the operation is stopped as a measurement confirmation error. In the case of an NG signal, a retry of the weighing operation can be performed. The pre-adjustment is completed by the above operation, and the changeover switch 2e10 is set to "2" to start the actual operation.

The outline of the actual operation of the weighing confirmation sensor unit after the preliminary adjustment is as follows. That is, the rotary table is driven, the spacer on the weighing dish No. 1 supplied by the hopper is passed through the wiper section, and when it reaches the sensor section, the spacer is added by the analog switch selection signal 2e5 from the controller. In the circuit 2e6, the sensor output corrected by the correction voltage 2e41 is displayed, and at the same time, the GO / NG determination result is sent to the controller. Next, N
Drive the rotary table to check the weighing pan of o.2. It is preferable to adjust the table rotation speed so that the arrival timing is about 0.5 seconds until the next weighing pan arrives and weighing starts. Sequential weighing,
It is usually difficult to visually check the value of the panel meter 2e14 due to confirmation and rotational movement.
According to the instruction from e15, the value of the panel meter 2e14 is held and displayed for about 0.5 seconds, so that it is possible to visually monitor the weighing result. Further, the buzzer is sounded for a moment at the hold timing, so that it is possible to easily confirm visually by a test operation or the like. As described above, the weighing pan N
From o.1 to No.4, select the correction value corresponding to each weighing pan that stops in the sensor part sequentially by the rotation of the table, monitor the weighing value, and spray the spacer of the weighing pan that obtained GO judgment. I do.

At present, the spacer used in the dry spraying method behaves as a powder, and exhibits a very delicate behavior. In the weighing unit, not only ordinary spacers, but also spacers with extremely small particle diameters around 1 μm and spacers with special characteristics such as spacers coated with a heat-fusible adhesive are several mg. Or 1mg
Stably weighing a small amount of powder that is also
Extremely difficult. For example, sensitively affected by the external environment such as humidity, the spacer in the hopper scatters as a small lump, and during the supply to the weighing pan, the supply amount confirmation sensor may determine that the supply is complete. There is a case where it occurs sometimes, or a case where the spacer cannot be properly cut due to the attachment of the spacer to the filed wiper. If an unsatisfactory result is obtained after dispersing the spacer having such a measurement error, it is very difficult to find the cause. In order to handle spacers having such characteristics, especially recently developed special spacers, and to obtain stable spraying results, careful attention and monitoring are always required, and in that sense, the dry spacer spraying of the present invention is in this sense. The existence value and effect of the weighing confirmation sensor provided in the device have a great value.

In the dry-type spacer spraying apparatus of the present invention, the spacer measured by the measuring unit is sent to the spraying nozzle provided in the spraying chamber by the ejector unit. The ejector has a function of sucking a spacer, which has been volume-measured and given a GO determination, from a weighing dish to a weighing dish arranged on a rotary table of the weighing unit, and sending the spacer to a spray nozzle. FIG. 4 is a perspective view of one embodiment of the ejector unit. The ejector 2f1 is a gas suction mechanism component, and can use this reduced pressure suction airflow to suck a spacer as powder. When a supply pressure gas such as a nitrogen gas is supplied from the direction 2f2, the gas flows out as a high-speed fluid in the direction 2f3. At this time, as a result of the suction port 2f4 being depressurized by the flow velocity pressure due to the internal airflow, the spacer is sucked and sent to the spray nozzle by the airflow. The rotary table is controlled in advance by the controller, and the spacer on the weighing dish 2f5 is located directly below the suction port 2f4. The distance between the suction port 2f4 and the surface of the weighing dish is very important in order to reliably suck up various types of spacers having various characteristics, particularly, extremely minute spacers. The dry spacer spraying device of the present invention has a moving unit that moves the ejector body in order to ensure that the spacer is sucked up by the ejector. The ejector 2f1 moves up and down by driving the electromagnetic solenoid 2g4. In this embodiment, the base fitting 2g1 and the slider 2g2 of the ejector unit are connected to the electromagnetic solenoid 2g4.
And the ejector is fixed to the mounting hole 2g3. In addition, the electromagnetic solenoid 2g4 includes:
The solenoid return spring 2g5 is connected. The ejector 2f1 is fixed to the mounting hole 2g3 of the slider 2g2 with the screw 2f7 via the fixing metal mounting hole 2f6. The entire ejector unit is fixed to the base of the weighing unit by the screw holes 2g6. In addition, adjustment screw 2g
7, the slider can be moved in the vertical direction, the force of the solenoid 2g4 is more effectively utilized, the distance to the weighing pan is optimized, and the spacer is sucked by the spacer suction force to a position where the spacer can be sucked securely. . For the standard spacer of the example, the optimum distance between the suction surface and the weighing pan was 0.5 mm.

The ejector suction port 2f4 is kept at a fixed distance from the weighing pan, and is held at a set position by a solenoid return spring 2g5 and an adjusting screw 2g7. On the other hand, in a state where the weighing pan 2f5 is at the stop position just below the ejector suction port, the ejector sucks up the spacer,
Start feeding to spray nozzle. The properties of certain spacers, especially the adhesion of very small diameter spacers, are strong, and it is extremely difficult to reliably suck them up, making it impossible with conventional spacer sprayers. Since the dry-type spacer spraying device of the present invention has a mechanism for moving the ejector unit, the spacer can be sucked reliably without being largely influenced by the temperature and humidity or the characteristics of the spacer. That is, the spacer on the weighing dish 2f5 is sucked in an amount corresponding to the gas sending pressure, and the spacer can be stably sucked by providing an optimum gap between the ejector suction port and the weighing dish. However, in the case of a spacer having a large adhesive force or a large weighing value, the weighing hole 2
In some cases, c3 becomes large and deep, so that reliable suction of the spacer often becomes insufficient. Further, when such a spacer is operated as an ejector as it is, the attached amount of the spacer in the vicinity of the suction port increases, and the reproducibility of spraying is impaired. In the dry spacer spraying device of the present invention, the ejector is provided with a moving mechanism, and the distance between the suction port and the weighing pan is controlled so that the suction port is brought into close contact with the weighing pan while the ejector is performing the spacer suction operation. After a sufficient pressure reduction state is formed inside the suction port, the suction port is released at a stretch at the next moment, and the solenoid is ON-OFF controlled so as to return to the normal flow rate state.
By such a control, a sudden change of the suction airflow and a momentary high-speed airflow are created, and the suction of the spacer can be surely performed. By placing the weighing dish on the spring plate to give a somewhat flexible structure, it is possible to reduce the impact when the ejector suction port is in close contact.

FIG. 3C is a circuit diagram of one embodiment of the solenoid control circuit. The pulse oscillator 2h1 has a volume 2h
2, the frequency is variable at a duty cycle of about 50%, and an output with a substantially constant peak value is possible. Resistance 2h
3 and the volume 2h4 divide the peak value. The buffer amplifier 2h5 is also an impedance converter that outputs the divided voltage as it is. The volume 2h7 is a variable resistor for setting a time constant with a capacitor, and is a voltage regulator 2h7.
Numeral 8 makes the output variable by the volume 2h9. Operational amplifier 2h10, resistor 2h11, and power transistor 2
h16 constitutes a general voltage-current converter. The solenoid 2h17 moves the ejector according to a drive signal, and is driven by a solenoid drive power supply 2h18. The input terminal 2h20 receives a solenoid ON-OFF signal from the controller. Pre-operation adjustments can be made at each volume of the circuit. The volume 2h2 is set as a time during which the ejector suction port is brought into close contact with the weighing pan when the solenoid is turned on, and the inside of the ejector suction port is sufficiently depressurized. Also,
The volume 2h4 sets the current value at the moment when the solenoid is turned ON. By the capacitor 2h6 and the volume 2h7,
The damping curve of the solenoid current when the ejector moves, that is, the force at the time of movement, is set, and the holding current in the ON state, that is, the force at the time of close contact is set by the volume 2h9.

When there is no solenoid operation instruction from the controller, the transistor 2h16 is forcibly turned off via the diode 2h14, and the solenoid 2h17 is turned off.
Is in an open state, that is, a state in which there is a gap between the return spring and the weighing pan. When an ON instruction is given from the input terminal 2h20, the diode 2h14 is released. On the other hand, when the output of the pulse oscillator 2h1 is "low", the transistor 2h1 is connected via the diode 2h13.
6 is forcibly turned off and the solenoid is released, but when the output of the pulse oscillator 2h1 becomes "high", the resistor 2h3
And a pulse having a peak value set by the volume 2h4 is output from the buffer amplifier 2h5. The output pulse is differentiated by the time constant of the capacitor 2h6 and the volume 2h7 to form an attenuation curve.
The constant voltage set at h8 is maintained. This voltage enters a voltage-current conversion circuit composed of an operational amplifier 2h10, a transistor 2h16, and a current detection resistor 2h15, and becomes a solenoid drive current. The resistance 2h11
Is a protection resistance of the operational amplifier 2h10 when the diodes 2h13 and 2h14 conduct, and the diode 2h12
Is protection for preventing-voltage from being applied to the base of the transistor 2h16, and the element 2h19 has the solenoid turned off.
This is the surge absorbing element when it is used. By configuring and controlling such a circuit in the ejector unit,
Since the ejector suction port is pressed against the weighing pan with a substantially constant force and the pressing force can be adjusted, bounce during close contact can be reduced without applying excessive force to the weighing pan. Note that the solenoid ON-OFF frequency is preferably set to 3 to 4 Hz in order to optimize the processing time of the entire apparatus. In the dry spacer spraying device of the present invention, it is possible to reliably suck up the spacer by the mechanism and control of the ejector unit, and in particular, a spacer having an extremely small particle diameter or a special spacer which is conventionally susceptible to an external environment such as humidity. Can also be handled. The configuration of the ejector unit is one of the factors that made it possible to spray various spacers as a spraying device.

FIG. 5 is a perspective view of one embodiment of the rotary table of the dry spacer spraying apparatus of the present invention. The rotary table of this embodiment has four spacer weighing dishes attached thereto. The disk-shaped rotary table 2i1 is rotated by a motor 2i2 in the direction of the arrow in the figure. There is a photo sensor detection pin 2i3 on the side of the table, and a stop position detection sensor (not shown) on the weighing unit base that fixes the motor defines the table rotation stop position, that is, the weighing pan position.
Four weighing pan units 2i41, 2i42, 2i43 and 2i44 are located at quartered positions on the table circumference. The detection sensor is also arranged at a position corresponding to the weighing pan unit. The weighing pan unit is a base 2i51-2
One ends of the vibration plates 2i61 to 2i64 are fixed to the i54, and the piezo elements 2i71 to 2i74 are incorporated therebetween.
A screw nut is provided on the other side of the diaphragm, and a weighing dish is screwed and fixed to the nut. The weighing dish can be replaced when the number of sprays, that is, the spray density (measuring value) is changed. The vibrating piezo elements 2i71 to 2i74 allow each weighing dish to vibrate independently according to a controller signal. The piezo element attached to each weighing pan unit is connected to an external piezo element driver via a rotary connector 2i8 at the center of the table. In the state where the motor has returned to the home position, weighing pan No. 1 (2i4
1) is stopped at the spacer supply position, that is, at the hopper position where the position detection sensor detects the detection pin. Weighing pan No. 2 (2i42) is 90 degrees forward. In the case of an apparatus using a single multiplex nozzle with a small substrate, there is no function at this position, but in the case of a multi-nozzle apparatus with a large substrate, it becomes a second ejector unit. . Weighing pan No. 3 (2i43) is in the ejector unit, and weighing pan No. 4 (2i44) is in the weighing confirmation sensor unit.

Here, the spacer is supplied to the weighing dish No. 1 (2i41) by applying vibration to the hopper. Next, the turntable is rotated 90 degrees, and the weighing pan No. 1 (2i4
1) passes through the slotted wiper, stops at the measurement confirmation sensor unit, and performs the GO / NG determination process. At the same time, weighing pan No.2
(2i42) receives the supply of the spacer at the hopper position. Further, the turntable rotates 90 degrees. Simultaneously with the start of rotation, the controller generates a display hold signal for 0.5 seconds so that the weighing value of weighing pan No. 1 (2i41) is held and monitoring can be performed visually with the panel meter of the apparatus operation panel. Upon reaching the ejector unit, the spacer of the weighing dish No. 1 (2i41) is sucked up by the operation control of the ejector, and is pressure-fed to the spray nozzle to perform spraying. During this time, the weighing pan No.
2 (2i42) moves to the measurement confirmation sensor position,
The NG determination process is performed, and a spacer is supplied from the hopper to weighing dish No. 3 (2i43). Thereafter, in the same manner, each time the rotary table is rotated by 90 degrees, the processing of each unit is performed. When the application of the weighing pan No. 4 (2i44) is completed, the rotary table returns to the origin and the next application is started. Wait for. The piezo element of the weighing pan unit applies vibration immediately after each weighing pan receives the supply of spacers from the hopper and immediately before spraying is started with the ejector unit, causing the powder spacers to be more loose and, if necessary, a driver Can be used to select ON-OFF of vibration and frequency.
The dry spacer spraying apparatus of this aspect is configured using a rotating disk-shaped table, but may be configured with a table that moves linearly, or a configuration in which a functional unit is moved by fixing a weighing dish. You can also.

FIG. 6A is a perspective view of one embodiment of a spray chamber of the dry spacer spray apparatus of the present invention. The spraying chamber of this embodiment is a manual spraying chamber, in which a spraying nozzle 32, a door 33 for opening the chamber when cleaning the chamber, and a substrate table 34 on which a substrate is placed are provided in the spraying chamber 31. The substrate table is a side door. It is a drawer table having 35. For loading and unloading of the substrate, the table is moved in the direction of the arrow 36, the substrate is placed on the substrate table 34 in a state of being pulled out, and then the table is pulled into the chamber to spray spacers. The sparging chamber has a chamber exhaust 37. Further, a voltage input terminal 38 for controlling the inside of the chamber is connected to a high voltage generating unit 39 via a high voltage cable 40. The chamber of a conventional general dry spraying apparatus is made of stainless steel or vinyl chloride resin, and in the case of a chamber made of resin, there is a case of a double structure using stainless steel on the outer surface. The basic structure of the spray chamber of the dry spacer spray apparatus of the present invention is that the inner layer surface is made of resin and coated with a high-resistance conductor, or forms a high-resistance monohedron with a high-resistance film or the like attached thereto. preferable. Preferably, the outer surface is made of a similar conductor, the outer surface is grounded, and the inner and outer surfaces are insulated. The ground on the outer surface is for preventing electrostatic charging and electric shock, but in some cases, the outer conductor may be omitted. Alternatively, the outer surface can be made of metal and grounded, but this is an expensive device.

The high resistance conductor on the inner surface of the chamber has a resistance value of several tens MΩ or more and is treated as a high voltage electrode surface.
There is no risk of electric shock even when touching the human body. What is important here is that the inner surface and the outer surface of the chamber are always insulated, and if leakage current flows from the inner surface electrode in any form, such as a human body touching the outer surface, one of the objects of the present invention is It becomes impossible to apply a predetermined voltage to a certain inner surface. The high-voltage cable 40 is preferably pressed against a conductive rubber to reliably connect the voltage of the high-voltage generation unit to the inner surface of the chamber. The table on which the substrate is placed and the lower part of the chamber are basically grounded, but it is preferable that the ground potential is at least during the spraying, for example, by performing static elimination before spraying. In the dry spacer spraying apparatus of the present invention, it is preferable to control the generation of a necessary electric field in the chamber space by applying a voltage to the inner wall surface of the spray chamber in accordance with the charging characteristics of the spacer. The spacer charged by pressure feeding from the measuring unit to the spray nozzle can be concentrated at the lower portion of the chamber by the controlled electric field to reach the substrate. At the same time, the repulsive force generated near the wall surface can prevent the spacer from adhering to the inner wall surface. The spacers diffused by the scattered airflow are usually near the wall where the airflow is weak, that is, in the peripheral portion of the substrate, the number of scatters is usually reduced, but by performing such control, the spacer is repelled by the wall surface The spacer serves as a spacer for correcting the density of the peripheral portion, and a uniform distribution can be obtained.

FIG. 6B is a perspective view of one embodiment of a panel of a control box of the high voltage generating unit. In this embodiment, the LED 3a1 indicates that a controlled high voltage is being generated, and the ON / OFF of the high voltage control is performed.
Is performed by the device controller. Adapter plug 3
a2 is switched by a spacer to be used and is a socket. The case where the adapter is set as shown in the figure is a case where a plastic spacer is used. In the selection-side LED 3a3, PL is lit in a normal character, SI is reversed, and the LED 3a4 is turned off. When using a silica spacer, the adapter plug 3a2
, And by inserting it rotated 180 degrees, the selection LED 3a4 is turned on, and the SI becomes a regular character. On the other hand, P
L is an inverted character, and the LED 3a3 is turned off, indicating that it is not selected. The selected high voltage output unit 3a5 is connected to the chamber inner layer surface via a high voltage cable. FIG.
(c) is a circuit diagram of an embodiment of a circuit configuration of the high-voltage generation unit, the adapter socket, and the plug. The + high-voltage generation circuit 3b1 is externally variable by a volume 3b2, and the -high-voltage generation circuit 3b3 is externally variable by a volume 3b4. A high voltage selected according to the insertion of the plug 3b12 is generated on the output line 3b16 by the ON-OFF input line 3b5 from the controller. + The high voltage output is supplied to the adapter socket 3b via the connection line 3b6.
11 is connected to one end. -High voltage output is connection line 3
It is connected to one end of the socket 3b11 of the adapter via b7. The connection lines 3b8 and 3b9 are connected to socket terminals on the side of the adapter by polarity selection lines.
b10 is grounded. The plug 3b12 side is connected to the selection terminals 3b13 and 3b14, respectively, to the LED. Of the three terminals on the middle side, two are connection wires 3b1
Shorted by 5. The plug side is shown in FIG.
(b) As shown in FIG.
It is preferable to seal with a resin and cover it for safety, leaving a window displaying 3a4.

The LED 3a3 on the plug side is 3b8 → LE
D → 3b10 → Lights via ground. On the other hand, since the 3b6 → 3b15 → output line 3b16 is connected to the high voltage side, the voltage set at the + polarity is output as the PL side output. From controller
When an ON instruction is transmitted via the ON-OFF input line 3b5, a + high voltage is output to the outside via the output line 3b16. In addition, ON-O indicated by the ON-OFF input line 3b5
The output LED 3a1 is turned on / off according to the FF. Also, to ensure safety, the controller should only be used during spraying.
It is preferable to issue an ON instruction and minimize the high voltage output time. In the dry spacer spraying apparatus according to the present invention, an optimum voltage for the spacer to be used is applied to the inner surface of the chamber, an electric field is generated in the chamber space, and the sprayed charging spacer is concentrated on the substrate, so that the spacer adheres to the wall surface safely. A uniform spray with high efficiency can be achieved. In this embodiment, the output is selected by manual switching using an adapter plug for a manual machine, and a low-cost configuration is adopted.However, in the case of an automatic machine, a high-voltage reed relay is used to automatically control an external device via a controller. Can be switched.

FIG. 7 is a perspective view of one embodiment of the spray nozzle. The spray nozzle according to the present embodiment is a multiplex nozzle including a main body including a single supply port 42 for supplying a spacer, a plurality of independent spray holes 43 to 46 for diffusing and spreading the spacer, and a hood 47. When the spacers are sprayed, the spacers are in the diffusion directions 43a, 44a, 45a.
And 46a, conceptually in the region 43 on the substrate 48.
b, 44b, 45b and 46b. The spray nozzle used in the dry spacer spray device of the present invention divides the supplied spacer into a plurality of times for spraying the spacer on one substrate, and sequentially switches the diffusion airflow from a plurality of independent spray holes. It is preferable to use a multiplex nozzle for diffusion and dispersion. The supplied spacer is pressure-fed from the measuring unit, and the diffusion spray pressure is applied to each of the spray holes 43 to 46.
Is added to ON / OFF of the pressurized gas can be controlled by an attached solenoid valve or the like. The spacer weighed by the weighing plate No. 1 of the weighing unit is pressure-fed from the ejector and sent to the supply port 42 of the nozzle, and the first spraying is started. On the other hand, immediately before the spacer is fed, the electromagnetic valve is driven to the spray hole 43 and nitrogen gas pressure is applied, so that the spacer supplied to the nozzle is put on the diffusion spray airflow and spreads near the spray area 43b on the substrate. Sprayed. Next, as the second spraying, the spacer of the weighing dish No. 2 is sprayed in the same manner, and is spread around the spray area 44b. Then, spray area 4 by the third spraying
By the fourth spraying, around 5b, it is sequentially sprayed around the spray area 46b. As a dispersion on the substrate, a spacer is obtained as a result of four layers of spacers for each distribution having a different density being laminated on the substrate.

By employing a multiplex nozzle,
Spraying over a wide area is possible with one nozzle, there is no mechanically moving part such as a scanning head, and only the spraying direction is switched by switching the solenoid valve, so there is no fear of dust generation. Also, regarding the uniformity of the spraying, since the spraying of one substrate is performed a plurality of times,
It will be averaged. For this reason, a uniform spraying result can be obtained without having a large number near the center and an extremely small number of peripheral portions unlike the conventional spraying chisel. In the case of a spacer having a particle size of several μm, a conventional spray nozzle has a diameter of 200 to
Although it could be sprayed only on the area of about 300 mm square, 400 to 50
It can be spread and spread to an area of about 0 mm square. Since the spacer having an ultra-fine particle diameter of 1 μm is light and rides well on the scatter air current, it can be diffused and scattered to about 1 m × 1 m. In the dry spacer spraying apparatus of the present invention, it is usually preferable to provide a hood 47 at the spray nozzle to restrict the spray area of the spacer.However, a spacer having a large particle size or a spacer having a large specific gravity is more likely to ride on the spray airflow. In some cases, the area may be limited by its own weight, and may not always be necessary. For this reason, it is preferable to prepare a nozzle which is screwed in so that the nozzle body 41 and the hood 47 can be removed, or a nozzle having a different radiation angle of the hood. Further, the spraying holes can be sequentially switched one by one, or can be sprayed by sequentially switching two or three by one. In some cases, it is better to spray by switching the spraying holes by two or three instead of two, so the spraying state may be more averaged and better, so a mechanism that can specify the spraying mode and control according to the specification of the controller preferable. After the optimum spraying mode is determined in advance by test spraying, actual spraying can be performed.

FIG. 8 is an explanatory view of one embodiment of a multi-nozzle spraying method applied to the dry spacer spraying device of the present invention. In this embodiment, the four multiplex nozzles 51, 52, 53 and 54 are arranged equidistantly on the quartered radiation from the center of the plane of the ceiling of the spray chamber;
Each nozzle can be moved and fixed radially from the center of the spray chamber. The fixed position can be determined optimally by test spraying. From the multiplex nozzles 51, 52, 53 and 54, an arrow direction 5A,
5B, 5C and 5D, the spacers are spread and sprayed, each nozzle spraying four times each, and the spray area 5 of each nozzle.
a1 to 5a4, 5b1 to 5b4, 5c1 to 5c4, 5d
By assigning 1 to 5d4, it is possible to cope with a large size. The weighing unit will be provided in accordance with the required tact time. If one weighing unit is provided for each spraying nozzle, the dispense mode 1 is set when the spacers of the weighing unit are prepared.
The spray nozzles 51, 52, 53 and 54 spray the spacers in the areas 5a1, 5b1, 5c1 and 5d1, then spray the spacers in the areas 5a2, 5b2, 5c2 and 5d2, and then spray the spacers in the areas 5a3, 5b3. , 5c
3 and 5d3, a spacer is sprayed, and finally, the region 5a
The spacers are sprayed on 4, 5b4, 5c4 and 5d4. In this way, by successively overlapping and spraying, the spray density can be averaged, and even a large-sized substrate can be sprayed in a uniform dispersion state. Instead of providing one weighing unit for each spray nozzle, two weighing units having two ejectors may be installed on a rotary table, and spacers may be supplied to four spray nozzles. In the case of spraying using one multiplex nozzle, it is possible to spray up to a substrate size of about 500 mm × 500 mm with a spacer having the most common particle diameter of about several μm.
However, recently, a large size of about 1 m × 1 m is required. By the multi-nozzle method in which a plurality of multiplex nozzles are arranged, the spacers can be evenly spread on a large-sized substrate.

[0029]

According to the dry spacer spraying apparatus of the present invention, the supply of spacers to the spray nozzle by the measuring unit provided with the vibration spacer supply hopper, the ejector, the measuring confirmation sensor and the like is ensured, and the multiplex nozzle is used for a wide range. It is possible to cope with large-sized substrates by means of proper diffusion spraying, and at the same time, by controlling the inside of the spray chamber, maintenance time for cleaning can be reduced, spacer use efficiency can be increased, and various spacers can be sprayed. Becomes possible.

[Brief description of the drawings]

FIG. 1 is a perspective view of an embodiment of a dry spacer spraying apparatus of the present invention and an explanatory view of an embodiment of a multiplex nozzle.

FIG. 2 is a perspective view of one embodiment of a weighing unit.

FIG. 3 is a circuit diagram of one embodiment of a control circuit of the dry spacer spraying apparatus of the present invention.

FIG. 4 is a perspective view of one embodiment of an ejector unit.

FIG. 5 is a perspective view of one embodiment of a rotary table.

FIG. 6 is a perspective view and a circuit diagram of one embodiment of a spray chamber.

FIG. 7 is a perspective view of one embodiment of a spray nozzle.

FIG. 8 is an explanatory diagram of one embodiment of a multi-nozzle spray method.

[Explanation of symbols]

 A Spraying chamber B Spacer measuring unit C Spray nozzle 1 Substrate table 2 Moving table 3 Operation panel 120 Multiplex nozzle 121 to 124 Area 20A Hopper section 20B Weighing confirmation sensor section 20C Ejector section 200a to 200d Weighing pan unit 201 Rotating table 202a to 202d Photoelectric sensor 203 Weighing pan stop position detecting pin 204 Slotting wiper 205 Drive circuit box 2a1 Hopper top lid 2a2 Weighing pan 2a3 Spacer supply hole 2a4 Vibrating plate 2a5 Screw 2a6 Piezo element 2a7 Detection beam 2a8 Hopper 2b1 Light receiving head 2b2 Light emitting head 2b7 Adjusting screw 2b81 Left and right screw 2b82 Left and right screw 2b9 Set screw 2b10 Rotation direction 2b11 Vertical direction 2c1 Spacer 2c3 Spacer 2d1 Frequency Variable pulse oscillator 2d2 Device controller 2d3 Pulse 2d4 Pulse power amplifier 2d41 High side amplifier 2d42 Low side amplifier 2d51 Rise time adjustment resistor 2d52 Fall time adjustment resistor 2d6 Piezo element 2d7 Variable power supply 2e1 Weighing dish 2e2 Distance sensor 2e3 Analog switch 2e41 to 2e44 Voltage 2e5 Selection signal 2e6 Addition circuit 2e7 Window comparator 2e8 Window comparator 2e9 Connection line 2e10 Changeover switch 2e11 Upper limit setting value 2e12 Lower limit setting value 2e13 Connection line 2e14 Panel meter 2e15 Connection line 2f1 Ejector 2f2 Direction 2f3 Direction 2f4 Suction port 2f5 Weighing plate 2f6 Fixing plate 2f6 Mounting hole 2f7 Screw 2g1 Base fitting 2g2 Slider 2g3 Mounting hole 2g4 Solenoid 2g5 Solenoid return spring 2g6 Screw hole 2g7 Adjusting screw 2h1 Pulse oscillator 2h2 Volume 2h3 Resistance 2h4 Volume 2h5 Buffer amplifier 2h6 Capacitor 2h7 Volume 2h8 Voltage regulator 2h9 Volume 2h10 Operational amplifier 2h11 Resistance 2h12 Diode 2h13 Diode 2h13 Diode 2h13 Diode 2h13 Diode 2h13 Diode 2h13 2h16 Transistor 2h17 Solenoid 2h18 Solenoid drive power supply 2h19 Element 2h20 Input terminal 2i1 Rotary table 2i2 Motor 2i3 Photo sensor detection pin 2i41 to 2i44 Weighing pan unit 2i51 to 2i54 Base 2i61 to 2i64 Vibrating plate 2i71 to 2i74 Piezo element 2i8 Rotary cloth scattering connector 32 Nozzle 33 Door 34 Board base 35 Side door 36 Direction 37 Exhaust port 38 Voltage take-in terminal section 39 High voltage generating unit 40 High voltage cable 3a1 LED 3a2 Adapter plug 3a3 LED 3a4 LED 3a5 High voltage output section 3b1 + High voltage generating circuit 3b2 Volume 3b3-High voltage generating circuit 3b4 Volume 3b5 ON-OFF input line 3b6 connection line 3b7 connection line 3b8 connection line 3b9 connection line 3b10 terminal 3b11 socket 3b12 plug 3b13 selection terminal 3b14 selection terminal 3b15 connection line 3b16 output line 41 nozzle body supply port 43-46 Spray holes 43a-46a Diffusion direction 43b-46b Area 47 Hood 48 Substrate 51-54 Multiplex nozzle 5A-5D Arrow direction 5a1-5d4 Area

Continued on the front page F term (reference) 2H089 NA11 NA24 NA55 NA56 NA58 NA60 PA06 PA09 QA12 QA13 QA14 TA04 TA09 4F033 AA14 BA05 CA01 DA05 EA01 LA01 NA01 QA10 QB02Y QB05 QB12Y QB18 QD05 QD14 QD23 QE05 QE03 EK05 QE05 QE05 QE03

Claims (10)

[Claims] 1. A spraying chamber for accommodating a substrate, a measuring unit for measuring a spacer having a predetermined volume corresponding to a spacer spraying density on the substrate, and a spraying nozzle provided on a ceiling portion of the spraying chamber. Dry-type spacer spraying device. 2. A weighing unit for weighing a fixed volume of spacers is a table provided with a plurality of weighing dishes, a spacer supply hopper for supplying spacers to the weighing dishes by applying vibration, and a spacer for weighing dishes. A sensor for confirming the supply amount of the weighing dish, a slicing wiper for slicing the spacer supplied to the weighing dish to a certain amount, a weighing confirmation sensor unit having a sensor for determining that the slicing spacer has been cut to a certain amount, and 2. The dry spacer spraying apparatus according to claim 1, further comprising an ejector unit for sucking up the spacer on the weighing pan for which the confirmation result is determined to be GO and sending it to the spraying nozzle. 3. A spacer supply hopper has a vibration drive control circuit for varying a high frequency component, amplitude and frequency of vibration, and a mechanism for adjusting a detection position of a sensor for detecting the amount of spacer supplied to the weighing pan. 3. The dry spacer spraying device according to claim 2, further comprising a sensor unit for adjusting a spacer supply amount. 4. A sensor for confirming the amount of the spacer cut off on the weighing pan, a distance sensor for confirming the spacer plane of a plurality of weighing pans on the table, and a weighing confirmation sensor control circuit having a monitoring display function. The dry spacer spraying device according to claim 2. 5. An ejector unit which feeds a spacer of a weighing pan into a pressure feed pipe moves up and down an ejector suction port by an electromagnetic solenoid, sets a distance between the suction port and a plane of the weighing dish, and drives the solenoid to ON-OFF. 3. The dry spacer spraying device according to claim 2, further comprising a solenoid control circuit that does not apply a strong impact force to the weighing pan when the spacer is sucked up and pressed against the weighing pan. 6. The dry type nozzle according to claim 1, wherein the spray nozzle is a multiplex nozzle having one supply port for supplying a spacer and a plurality of independent spray holes for diffusing and dispersing the supplied spacer on a substrate. Spacer spraying device. 7. The dry spacer spraying apparatus according to claim 6, wherein the multiplex nozzle includes a hood for restricting a spray area of the spacer. 8. The apparatus for spraying dry spacers according to claim 6, wherein a plurality of multiplex nozzles are provided on the ceiling of the spray chamber. 9. The spray chamber is a multi-layer chamber in which each layer is electrically insulated, wherein the innermost surface of the chamber forms a high-resistance conductive surface, and a terminal for supplying a voltage from outside to the innermost surface. The dry spacer spraying device according to claim 1, further comprising: 10. The dry spacer spraying apparatus according to claim 9, wherein a high voltage generating circuit for supplying a high voltage capable of switching between voltage and polarity is connected to a terminal for supplying a voltage from the outside.