JPH03251821A - Method and device for sprinkling gap material - Google Patents

Abstract

PURPOSE:To uniformly sprinkle a gap material over the surface of a panel board without using fluorocarbon by sprinkling the charged grains of the gap material over the surface of the board. CONSTITUTION:A panel board 3 is conveyed directly above a metallic electrode plate 26 by a conveyor roller 28, and the electrode plate 26 is raised by a lifting unit 27 to carry the board 3 and then stopped at a specified position. Compressed air is sent from a compressed air feed pipe 24 and discharged into the injection hole 23a of a sprinkling nozzle 23. The gap material is conveyed downward by the air jet. The gap material conveyed by the air jet is allowed to collide with or passed by a high-voltage electrode 29, negatively charged, dispersed and traveled toward the grounded electrode plate 26 along the lines of electric force 31 in an electric field. A panel board is placed on the electrode plate 26, and the gap material is sprinkled over the board surface.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention provides a spreading method and a spreading device for spreading a gap material as a spacer on a substrate to form a certain gap between two substrates. Regarding.

[Conventional technology]

In liquid crystal display panels and the like, spacers are arranged to ensure a certain gap between two substrates. As such a spacer, for example, a gap material made of fine spherical beads (hard plastic balls) is used. After such a gap material is spread on the surface of one substrate, the other substrate is laminated to secure a certain gap therebetween.

Here, a method for dispersing a gap material onto the surface of a panel substrate of a liquid crystal display panel will be described below with reference to FIG. 9(a).

In the figure, 101 is a gap material dispersing device;
Supply section 103 for gap material 102 and spray nozzle 104
It is composed of. This supply unit 103 includes a container 103a containing a fluorocarbon-alcohol mixed solvent 102a in which the gap material 102 is dispersed, and
a is placed thereon, and penetrates through the magnetic cooler 103b for maintaining the state in which the gap material 102 is uniformly dispersed in the fluorocarbon-alcohol mixed solvent 102a, and the cap 103a' of this container 103a. Container 10
The fluorocarbon-alcohol mixed solvent 102a is sprayed by the air blowing pipe 103c introduced into the air layer 3a and the air pressure-fed from the blowing pipe 103c to the nozzle 104.
103d for liquid delivery. A pressure air supply pipe 104b in which a valve 104a is arranged is connected to the spray nozzle 104 connected to the other end of this pipe manufacturing pipe 103d.
The chlorofluorocarbon-alcohol mixed solvent 102a is sprayed onto the surface of the panel substrate 106, which is transported below the spray nozzle 104 by the transport device 105, by the air pumped from 04b.

Here, the fluorocarbon and alcohol in the fluorocarbon-alcohol mixture 102a are volatilized, and the gap material 102 is spread on the surface of the panel substrate 106, as shown in FIG. 9(b). The panel substrate 10 on which this gap material 102 is spread
When the other panel substrate (not shown) is stacked on 6, a gap to be filled with liquid crystal is formed between them by a gap material 102.

(Problems to be Solved by the Invention) However, in the conventional spraying method, a large amount of Freon is used for spraying.Moreover, this Freon cannot be recovered and is released into the atmosphere. CFCs released into the atmosphere destroy the ozone layer in the upper atmosphere, increase the amount of ultraviolet rays contained in solar radiation on the ground, and cause the destruction of nature.

Further, since the alcohol blended to uniformly disperse the gap material 102 has a low flash point, special consideration must be given to safety.

Furthermore, although it is desirable that a plurality of gap materials 102 be uniformly distributed without being unevenly distributed, according to the above method, a plurality of gap materials 102 are solidified and the panel substrate 102 is
60 will be scattered on the surface. Such a condition causes display point defects in the liquid crystal display panel.

In view of the above-mentioned problems, an object of the present invention is to provide a spreading method and a spreading device that can uniformly spread gap material onto the surface of a panel substrate without using fluorocarbons.

[Means to solve the problem]

In order to solve the above problems, in the present invention, particles of the gap material are charged and sprayed toward the substrate surface in the charged state, thereby uniformly dispersing the gap material onto the substrate surface. ing.

That is, the basic feature of the method of the present invention is that it includes a charging step of charging a granular gap material, and a step of dispersing the charged gap material onto the surface of a substrate.

The above-mentioned spraying step can be realized by spraying the charged gap material toward the substrate surface using an air flow toward the substrate surface.

Further, in the method of the present invention, in order to charge the gap material in a fixed amount in the charging step, it is preferable to include a supply step of supplying the gap material in a fixed amount.

The above-mentioned spraying process utilizes airflow and also uses the suction force obtained by forming an electrostatic field to attract the charged gap material toward the substrate surface. It is preferable to do so. In addition, in order to spread the gap material spread around the outer periphery of the substrate, an electrostatic field is used to generate an attractive force around the outer periphery of the substrate, and this attractive force is used to supply the gap material to the outer periphery of the substrate surface. It is preferable. Furthermore, it is preferable to spray the gap material while preventing the gap material from scattering.

Next, in addition to the above-mentioned steps, the method of the present invention includes a charge relaxation step for attaching the gap material to the substrate surface after relaxing or releasing the charged state of the charged gap material. Preferably.

On the other hand, in order to uniformly spread the gap material over the substrate surface, it is preferable to include a diffusion step in which the gap material heading toward the substrate is diffused toward the substrate surface and then spread onto the substrate.

Note that the direction in which the gap material is spread is usually the direction of gravity. That is, the gap material is spread from above the substrate surface. However, on the contrary, the gap material may be sprayed onto the surface of the substrate disposed above against gravity.

Next, the gap material dispersing device of the present invention includes a charging means for charging the gap material to be sprayed onto the substrate surface, and a dispersing means for dispersing the charged gap material onto the substrate surface. This is a basic feature.

The dispersion means may include a dispersion nozzle that generates an air flow directed toward the substrate surface.

As a means for supplying the gap material to the spray nozzle, there can be mentioned a gap material supply unit that includes a stirring chamber and a discharge chamber that communicate with each other. Here, a stirring rotor is arranged in the stirring chamber, and the feeding blades formed on this stirring rotor rotate with their tips inscribed in the inner wall of the stirring chamber to stir the gap material. There is. Further, a grooved feed rotor is disposed in the discharge chamber, and this rotor is rotatable while inscribed in the inner wall of the discharge chamber, and has a structure including a groove filled with the gap material. In addition to these, the above unit is equipped with a scraping plate that scrapes out the gap material from the grooves of the grooved feed rotor and discharges it into the spray nozzle. Note that it is preferable that the gap material supply unit having this configuration is integrated with the spray nozzle.

Here, the plurality of feed blades of the stirring rotor disposed in the stirring chamber of the above-mentioned gap material supply unit form a communication portion that allows mutual communication between adjacent inner spaces of the stirring chamber partitioned by these feed blades. It is preferable that the gap material be reliably supplied to the discharge chamber side while being stirred.

Moreover, it is preferable to use a pulse motor as a drive source for the above-mentioned stirring rotor and grooved feed rotor.

Next, in the device of the present invention, an electrode plate is further arranged on the back side of the substrate, and the substrate is supported by this electrode plate, and this electrode plate is charged with a polarity opposite to that of the gap material or is grounded. It is preferable to keep it at

As mentioned above, instead of supporting the substrate directly by the electrode plate, a support part is placed between the electrode plate and the substrate to hold them with a certain gap, and through this support part,
It is also possible to adopt a configuration in which the substrate is supported on an electrode plate.

The above-mentioned electrode plate may have a plurality of minute electrode portions at positions corresponding to areas where the gap material is to be sprayed in order to spray the gap material onto a specific portion of the substrate.

It is preferable that such a microelectrode portion has a shape protruding from the surface of the electrode plate body.

Next, in order to uniformly spread the gap material to the outer periphery of the substrate surface, in the present invention, an auxiliary electrode is provided at a predetermined portion of the outer periphery of the substrate, the polarity of which is opposite to that of the gap material, or which is held in a grounded state. The configuration is adopted.

Furthermore, in order to ensure that the sprayed gap material adheres to the substrate, in the present invention, an ion gun is used to reduce or release the charged state of the gap material, and then the gap material is attached to the substrate surface. ing.

On the other hand, the gap material dispersion route by the gap material dispersing means described above can be divided using a hollow cover. In this case, in order to prevent the charged gap material from adhering to the inner peripheral surface of the cover, the inner surface of the cover should be charged to the same polarity as the gap material, and the outer surface of the cover should be kept in an insulated state. is preferred.

Another way to prevent the gap material from adhering to the inner surface of the cover when the cover is arranged in this way is to form an air knife layer along the inner surface of the cover. can do. Alternatively, without adopting this method, the cover itself has a double structure with a removable inner cover, and if a large number of gap materials adhere to the inner cover, only this cover can be removed. It is also possible to make it cleanable.

In addition, a mask part is arranged to prevent the gap material from scattering when the gap material is sprayed, and when the gap material is spread, the substrate supported by the electrode plate is positioned upstream of the mask part in the direction of dispersion of the gap material by the lifting unit. Let, conversely,
During standby, the substrate may be positioned downstream of the mask section.

Next, in order to uniformly spread the gap material over the substrate surface, a metal mesh plate is placed between the spreading means and the substrate, the gap material is stopped on one end of the mesh, and then this metal mesh plate is placed between the spreading means and the substrate. It is possible to adopt a configuration in which the particles are vibrated by a vibrating means and are sieved onto the substrate.

In addition, in order to incorporate the gap material dispersing device configured as described above onto a production line, the substrate must be carried into the dispersing means,
It is preferable to provide a substrate transport means for carrying out the substrate after the gap material has been spread from the spreading means.

Further, the spraying direction by the above-mentioned spraying means may be any direction, for example, the spraying may be performed in the opposite direction to the direction of gravity.

[Function] In the gap material spreading method and device according to the present invention,
The gap material is charged by the charging process or charging means, and in this charged state, the gap material is spread onto the surface of the substrate. Therefore, the charged particulate gap materials electrostatically repel each other and are dispersed and scattered over the substrate surface. Therefore, a plurality of gap materials do not adhere to the substrate surface in a solid state.

When such a gap material is sprayed by an air stream jetted from a spray nozzle disposed toward the substrate, it can be reliably sprayed onto the surface of the substrate.

In addition, the gap material is stirred by a stirring rotor,
When the gap material is filled into the grooves of the grooved feed rotor and then scraped from the groove and supplied into the spray nozzle, the gap material is quantitatively spread, so the gap material is evenly spread over the substrate surface. be done.

Further, when the stirring rotor and the grooved feed rotor are driven by a pulse motor, vibrations of the pulse motor are transmitted to the gap material. Therefore, its supply becomes more stable. Here, if the feeding blade of the stirring rotor has a communication part between the space formed with the stirring chamber, even if the stirring rotor rotates, the space will not be in a depressurized state, so the gap material will become clogged. It is stably transported to the discharge chamber without any problems. Moreover, if the gap material supply unit and the spraying nozzle are integrated, preparations such as changing the gap material to be sprayed can be made in a short time, improving production efficiency. realizable.

Further, an electrode plate is arranged opposite to the side of the substrate on which the gap material is to be sprayed, and the electrode plate is held at an opposite polarity or grounded with respect to the charged gap material. In this case, lines of electric force are generated between the injection nozzle and the electrode plate, and the charged gap material advances toward the electrode plate along the lines of electric force. Here, since the substrate is located between the spraying nozzle and the electrode plate, the advancing gap material is reliably sprayed onto the substrate.

In addition, if a gap is formed between the electrode plate and the substrate, when removing the substrate from the electrode plate, the voltage generated due to the charging of the gap material can be lowered, so that the gap material is evenly spread. The distribution of particles is not disturbed and the quality of spraying can be improved. Such an effect can also be obtained when the charged gap material is dispersed onto the substrate surface after the charged state of the gap material is relaxed or released by an ionic charge layer formed near the substrate surface.

In addition, when the electrode plate has an electrode part corresponding to the part where the gap material of the substrate is to be sprayed, for example, by the electrode part protruding at the position corresponding to the part to be sprayed,
If the substrate is supported, the gap material can be selectively applied. Therefore, the gap material can be uniformly spread, and unnecessary consumption of the gap material does not occur.

Furthermore, if an auxiliary electrode is placed at a position corresponding to those vertices around the substrate and is held at an opposite polarity to the charged gap material or is grounded, The gear gear material charged by the electric lines of force is pulled toward the auxiliary electrode and scattered.

Therefore, the gap material can be uniformly sprayed regardless of the shape of the spray nozzle.

If the side periphery of the gap material dispersion route is defined by a cover whose inner wall is charged with the same polarity as the gap material and whose outer wall is insulated, the gap material dispersion route and the cover When the air knife layer blocks the inner wall of the cover, the charged gap material does not adhere to or accumulate on the inner wall of the cover. Therefore, it is possible to prevent the gap material that has adhered and accumulated on the inner wall of the cover from dropping onto the surface of the substrate, thereby preventing deterioration in the spraying quality. or
Even in the case where the periphery of the side surface of the dispersion path is defined by a removable inner cover, the above effect can be obtained because the inner wall can be kept clean by replacement.

Further, around the substrate, there is a mask part that can prevent the gap material from scattering, and when the board is supported upstream of the gap material spreading from the mask part, the gap material is spread at this position. In this way, the gap material can be prevented from scattering outside the space to be sprayed, and can be reliably sprayed onto the substrate surface. Furthermore, it is possible to prevent the gap material that has adhered and accumulated on the mask surface from secondarily adhering to the top soil of the substrate, and it is possible to improve the spraying quality. Furthermore, if equipped with base vi transport means, an automated line can be organized.

Further, if a vibrating metal mesh plate is disposed between the spray nozzle and the substrate, the gap material can be further dispersed by the vibration, and can be uniformly sprayed over the entire substrate.

When the gap material is sprayed onto the substrate from below, dust, fluff, etc. are less likely to adhere to the surface of the substrate, so that the quality of the spraying can be improved.

〔Example〕

The present invention will be described in detail below with reference to the drawings. In addition, although the embodiment is for spraying a gap material onto a substrate for a liquid crystal panel, the present invention is applicable not only to liquid crystal panels but also to spraying a gap material to maintain a constant distance between two plates. It can be applied when scattering wood.

(Overall configuration) FIG. 1 is a sectional view showing the overall configuration of a gap material spreading device.

In the figure, 1 is the main body of the gap material dispersion device;
The upper interior of the housing 2 of the spraying device 1 is a gap material supply chamber 11. A gap material supply section 12 is disposed in the supply chamber 11, and the supply section 12 is composed of a gap material container 13 in which the gap material is stored, and a gap material supply unit 14 disposed below the gap material container 13. There is.

A gap material dispersion chamber 21 is arranged with respect to the supply chamber 11 across a partition plate 11a, and this dispersion chamber 21 serves as a gap material dispersion section 22. This dispersion chamber 21
, a spraying nozzle 23 assembled integrally with the gap material supply unit 14 is inserted into the opening 11a of the partition plate 11a.
A pressure air supply pipe 24 is connected to the side of the spray nozzle 23 . At a position below this spray nozzle 23, a panel substrate 3 of a liquid crystal display panel made of transparent glass is disposed to face the spray nozzle 23. The space between them is defined by an inner cover 25. This panel substrate 3 is placed on the upper surface of a metal electrode plate 26, and the metal electrode plate 26 is connected to a lifting unit 27 that moves it up and down. This metal electrode plate 26
A plurality of conveyance rollers 28 for conveying the panel substrate 3 are arranged in parallel between the lift unit 27 and the lift unit 27 .

Also, inside the lower part of the housing 2 of the spraying device 1, there is a gap material supply controller 31 that controls the operation of the gap material supply unit 14, and a voltage application to an electrode section, which will be described later, arranged inside the spray nozzle 23. A spray nozzle controller 32 for controlling the spray nozzle is arranged.

(Gap material supply unit) Here, the configuration of the gap material supply unit 12 is shown in FIG.
) and (b) below.

FIG. 2(a) is a perspective view showing the configuration of the supply section 12, and FIG. 2(b) is a sectional view thereof.

In these figures, the lower opening 13a of the gap material container 13 into which the gap material 4 is loaded communicates with the stirring chamber 15' of the gap material supply unit 14, and the inside thereof is equipped with four feeding blades 15a. A stirring rotor 15 is arranged. The tip 15a' of the feed blade 15a of this rotor
is arranged substantially inscribed in the inner wall of the stirring chamber 15'. This stirring rotor 15 is connected to a rotating shaft 15b. Further, the tip portion 15 of the sending blade 15a is
A' has a notch 15a# shown in FIG. 2(C). These notches are for preventing the space defined by the feed blade 15a of the stirring rotor 15 and the inner wall of the stirring chamber 15' from becoming depressurized when the stirring rotor 15 rotates. Further, the stirring chamber 15' communicates with a cylindrical discharge chamber 16' arranged directly below, and inside the discharge chamber 16' there is a cylindrical discharge chamber 16' with a single groove 16a on the side. A grooved feed rotor 16 is inscribed in the inner wall of the discharge chamber 16' and connected to its rotating shaft 16b. Below that, there is a groove 16a of the grooved feed rotor 16.
The scraping plate 17 is arranged with the tip 17a located inside the groove 1 of the grooved feed rotor 16.
The gap material 4 filled in the gap material 6a and conveyed can be scraped out and discharged into the injection hole 23a of the spray nozzle 23.

Here, the rotating shaft 15b of the stirring rotor and the rotating shaft 16b of the feed rotor are provided with cylindrical gears 15c and 16c, respectively.
The cylindrical gear 15c is fitted with a cylindrical gear 18b having a smaller diameter than the cylindrical gear 15c. The cylindrical gear 18b is connected to the rotating shaft 18a of the pulse motor 18, and is capable of decelerating and transmitting the rotational drive of the rotating shaft 18a of the pulse motor 18.

The supply section 12 having such a configuration is integrated with the dispersion nozzle 23 below the supply section 12, and the pressurized air supply pipe 2 is connected to the injection hole 23a of the dispersion nozzle 23 at an angle.
The gap material 4 discharged from the supply section 12 can be sprayed from the injection hole 23a by the air jetted from the supply section 12. Furthermore, a high voltage electrode 2 is provided inside the injection hole 23a.
9 is arranged, and the gap material 4 can be charged by the electrostatic field formed thereby.

(Gap material spreading section) Next, the configuration of the gap material spreading section 22 is shown in Fig. 3(a).
This will be explained with reference to (c).

FIG. 3(a) is a cross-sectional view showing the configuration of the spraying section 22. In the same figure, the spraying nozzle 23 is inserted into the panel substrate from the opening 11a' of the partition plate 11a which separates the spraying nozzle 23 from the supply chamber 11. It protrudes towards the center of 3. Here, the high voltage electrode 29 disposed inside the injection hole 23a of the spray nozzle 23 includes a power source 30a, a controller 30b
, the high voltage output from the high voltage generator 3o consisting of the high voltage generating circuit 30c is guided.

On the other hand, the metal electrode plate 26 is grounded, and the spray nozzle 23
The inner cover 25 is placed on the partition plate 21a to define the sides of the electric lines of force 31 from the surroundings. ing.

In such a spraying section 22, the metal electrode plate 26 is connected to an elevating unit 27 that moves it up and down, and during spraying, the metal electrode plate 26 rises and moves the panel base tfi,3 into the spraying chamber 21. It is moved inside and positioned there, and when replacing the panel substrate 3, it can be lowered and placed on the upper surface of the conveyance roller 28. Here, the conveyance rollers 28 are arranged horizontally, passing through the loading port 2a and 2b opened in the housing 2, and as shown in FIG. 3(b),
It is composed of a small-diameter shaft portion 28a and large-diameter pulleys 28b and 28c connected to both ends of the shaft portion 28a. on the other hand,
The shaft portion 2 of the conveying roller 28 is provided on the lower surface of the metal electrode plate 26.
A semicircular groove 26a having a slightly larger diameter than the diameter of the shaft 8a is formed corresponding to the position of the shaft portion 28a. Metal electrode plate 2
6 is connected to the lifting unit 27 by a support piece 27a that protrudes upward through a gap in the shaft portion 28a, and the metal electrode plate 26 is connected to the lift unit 27 by a support piece 27a that extends upwardly through the gap in the shaft portion 28a. The portion 28a can be lowered so that the end portion of the panel substrate 3 is inserted into the conveyor roller 2.
Even when the metal electrode plate 26 is lowered to the state where it is placed on the pulleys 28b and 28c of No. 8, the structure is such that the metal electrode plate 26 and the conveyance roller 28- do not interfere with each other.

As shown in FIG. 3(C), the inner cover 25 of the dispersion unit 22 having such a structure is comprised of front covers 2d, 2d attached to the front surface of the housing 2 by hinges 2c.
By opening ', it can be attached and detached from the front.

(Operation) The operation of the gap material dispersing device 1 having the above configuration will be described below.

In the initial state of the spraying device 1, the metal electrode plate 26 is in a lowered state by the lifting unit 27, and the gap material supply section 12 is loaded with the gap material 4, but the shutter mechanism (not shown) The gap material 4 is not discharged to the spray nozzle 23, and the pulse motor 18 that drives the stirring rotor 15 and the grooved feed rotor 16 is also stopped. Furthermore, the spray nozzle 23
The high voltage generator 30 of the high voltage electrode 29 is also in a stopped state.

From this state, the conveyance roller 28 senses that the panel substrate 3 has been conveyed from the entrance 2a to just above the metal electrode plate 26, and after the conveyance roller 28 has stopped, the lifting unit 27 moves the metal electrode plate 26 rises, places the panel substrate 3 thereon, rises further, and stops at a predetermined position. In this state, according to instructions from the spray nozzle controller 32, pressurized air is sent from the pressure air supply pipe 24, and a downward jet air flow is formed from the injection hole 23a of the spray nozzle 23. is activated, and a negative high voltage of 100 kvDC is introduced to the high voltage electrode 29 of the spray nozzle 23. As a result, the high voltage electrode 29 and the grounded metal electrode plate 2
An electrostatic field is formed between the two. In this state, the rotation shaft 18a of the pulse motor 18 rotates according to instructions from the gap material supply controller 31, and this rotational drive is transmitted at a reduced speed to the stirring rotor 15 and the grooved feed rotor 1.
6 starts rotating around their respective rotation axes 15b and 16b. Here, the stirring rotor 15 rotates in the direction of arrow A inside the stirring chamber 15', and the grooved feed rotor 16
is inside the discharge chamber 16' and is opposite to the stirring rotor 15 by arrow B.
By rotating in the direction, the grooved feed rotor 16
The gap material 4 is filled into the groove 16a. These gap materials 4 are removed from the grooves 1 by the tips 17a of the scraping plates 17 disposed in the grooves 16a of the grooved feed rotor 16.
6a and the spray hole 23a of the spray nozzle 23.
is discharged.

In this injection hole 23a, a jet air flow is formed downward from the pressurized air supply pipe 24, and the gap material 4 is conveyed downward by this jet air flow. Here, the gap material 4 conveyed by the jet air flow is transferred to the high voltage electrode 2.
When it collides with or passes near 9, it becomes negatively charged and advances along the lines of electric force 31 in the electrostatic field toward the metal electrode plate 26 that is connected to the ground. At this time, the gap materials 4 are all negatively charged, repel each other, and advance in a dispersed state. The panel substrate 3 is placed on the metal electrode plate 26, and the negatively charged gap material 4 is sprinkled on the surface of the panel substrate 30.

Through the above process, after a predetermined amount of the gap material 4 has been spread, the spreading of the gap material 4 is stopped, and the metal electrode plate 26 descends with the panel substrate 3 placed thereon. During the descent of the metal electrode plate 26, the ends of the panel substrate 3
The material is removed from the metal electrode plate 26, which is supported on the metal electrode plate 26 and further lowered. When the descent of the metal electrode plate 26 is completed, the conveyance roller 28 is activated, and the panel substrate 3 is carried out from the outlet 2b to the outside of the spraying device 1, and the panel substrate to which the gap material 4 is to be sprayed next (not shown) is carried into the spraying device l through the carry-in port 2a, and the gap material 4 is similarly sprayed.

(Effects of the first embodiment) As described above, the spraying device 1 according to the present embodiment uses a dry spraying method that does not use a solvent for spraying the gap material 4.
Inconveniences in process operations caused by the use of fluorocarbons and alcohol, such as safety problems with respect to alcohol and problems in the working environment due to volatilization of the solvent, can be solved.

In particular, since it does not use any fluorocarbons, which pose a major problem in terms of environmental destruction, it can meet social demands.

Also, the gap material 4 sprinkled on the surface of the panel substrate 30
are negatively charged inside the spraying nozzle 23, and since the gear teeth 4 are charged with the same polarity, they repel each other and are sprayed onto the surface of the panel substrate 3 without hardening. Therefore, display point defects of the liquid crystal display panel caused by the clumping of the gap material 4 can be prevented.

Furthermore, in the supply section 12, the gap material 4 is stirred.
, filling and discharging stirring rotor 15. The grooved feed rotor 16 and the scraping plate 17 are integrated as a gap material supply unit 14, and the spray nozzle 2
3 are also integrally connected, simply by loading the gap material 4 into the gap material container 13, a certain amount is automatically supplied.

Moreover, the stirring rotor 15 is formed with a notch 15a'', which prevents the space formed by the stirring rotor 15 and the wall surface of the stirring chamber 15' from becoming depressurized. Fluctuations in the supply amount of the gear/knob material 4 caused by clogging of the gear/knob material 4 do not occur.

Furthermore, the vibrations of the pulse motor 18 used as a drive source for the stirring rotor 15 and the grooved feed rotor 16 are transmitted to the gap material 4, so that the movement thereof is smoothed and the supply is stabilized. In particular, the frequency of the pulse motor 18 is set to 100.
By arbitrarily setting the speed between 1000 pps and 1000 pps, it is possible to operate under optimal conditions depending on the physical properties of the gap material to be sprayed. In this example, 1 mg of the gap material 4 was discharged, and the accuracy was ±1%, which is extremely stable. Therefore, liquid crystal display panels of consistently high quality can be manufactured.

Furthermore, if the gap material 4 adheres to and accumulates on the inner wall of the inner cover 25 due to repeated spraying operations, the inner cover 25 can be easily attached and removed by opening the front covers 2d and 2d' of the housing 2. Since it can be replaced, the inner wall can always be kept clean, so the accumulated gap material 4 can be removed.
The lumps on the surface of the panel substrate 3 do not fall off. Therefore, it is possible to prevent the occurrence of defects in the liquid crystal panel due to the clumping of the gap material 4, and maintenance is easy.

If such a spraying device is used, the spraying process can be automated and in-line production of liquid crystal display panels can be realized.

Next, a gap material dispersing device according to a second embodiment will be described below with reference to FIGS. 4(a) to 4(C).

FIG. 4(a) is a schematic plan view of the liquid crystal display panel, FIG. 4(b) is a perspective view showing the structure of the electrode plate of the spraying device of this example, and FIG. 4(C) is a schematic plan view of the liquid crystal display panel. It is a sectional view showing an aspect.

As shown in FIG. 4(a), a liquid crystal display panel 41 includes a glass panel substrate 4 on which a plurality of transparent X electrode layers 42 are formed.
3 and a glass panel substrate 45 on which a plurality of transparent Y electrode layers 44 are formed, and a liquid crystal layer is placed in the gap formed by the gap material 46. The overlapping portion becomes the display section 47. Therefore, it is ideal that the gap material 46 is spread over the area excluding the display section 47.

(Structure) Therefore, as shown in FIG. 4(b), the electrode plate of the spraying device of this example has an electrode portion 48 protruding from the surface of the electrode plate 48.
' are formed, and these electrode parts 48' are located at positions corresponding to parts 47' of the liquid crystal display panel 41 that do not have the X electrode layer 42 and the Y electrode layer 44, that is, the parts where the gap material 46 is to be sprayed. be. The other configuration of the spraying device of this example is the same as that of the first example.

(Operation) In the second usage mode of the electrode plate 48, as shown in FIG. As in the first embodiment, the metal electrode plate is grounded for the fourth day.

When such an electrode plate 48 is used, the gap material 46 sprayed in a negatively charged state is sprayed onto the surface of the panel substrate 43 along the lines of electric force formed between the electrode plate 48 and the spray nozzle. be done.

Here, in the vicinity of the surface of the panel substrate 43, the electric lines of force are concentrated at positions corresponding to the electrode portions 48' of the electrode plate 48.
The gap material 46 can be selectively sprayed at the position corresponding to '.

(Effects of the second embodiment) As described above, since the electrode plate 48 has the protruding electrode portion 48' that guides the gap material 46 to a predetermined spraying position, the display portion 47 of the liquid crystal display panel is excluded. The gap material 46 can be reliably spread at the position. Moreover, since the gap material 46 is electrically charged and does not solidify and is dispersed, efficient dispersion can be achieved, the display quality of the liquid crystal display panel 41 can be improved, and the amount of the gap material 46 used can be reduced.

Section J21 ([Next, a spraying device according to a third embodiment will be described below with reference to FIG. 5.

This figure is a sectional view of the spraying device of this example.

(Structure) In the figure, 51 is the main body of the spraying device, and a spraying nozzle 54 equipped with a high voltage electrode 53 protrudes downward from the gap material spraying chamber 52. A panel substrate 55 on which the gap material is sprayed is placed on a conveyance roller 56 facing the spray nozzle 54 . Between this spray nozzle 54 and the panel board 55,
A pair of vibrating bodies 58.5 are installed inside the dispersion chamber 52 on a support stand 57' attached horizontally from the housing 57.
8' and a metal mesh plate 59 whose both ends are supported by these vibrating bodies 58 and 58' are arranged, and the other configurations are the same as in the first embodiment.

(Operation) In the spraying device 51 having such a configuration, the gap materials sprayed from the spraying nozzle 54 toward the lower panel substrate 55 are negatively charged, and repel each other to form a dispersed state. The liquid is sprayed and first scattered onto the metal mesh plate 59. Here, metal mesh plate 5
9 is horizontally vibrated by the vibrating body 58, 58', and due to this horizontal vibration, the gap material further spreads and falls downward through the mesh, and the panel substrate 55
sprayed on the surface.

(Effects of the third embodiment) In such a spraying device 51, the gap material sprayed from the spray nozzle 54 is dispersed due to its electrical charge, and is further spread laterally due to the lateral vibration of the metal mesh plate 59. be done. Therefore, an equal amount of the gap material is also spread in the lateral direction on the surface of the panel substrate 55, so that the gap material can be uniformly spread.

The shape of the stirring rotor used, for example, in the gap material supply section as a spraying device according to the 1FuL comb and other embodiments is shown in Fig. 6 (a).
) may be used.

This figure is a perspective view of the stirring rotor.
Each of the sending blades 61a has a recess 61a# at its tip 61a'. By this recess 61a,
When the stirring rotor 61 rotates while stirring the gap material, a gap is secured between the tip 61a' and the inner wall of the stirring chamber to prevent the inside of the stirring chamber from becoming depressurized and to smoothly stir the gap material. transport. Furthermore, as long as the structure allows communication between the spaces on both sides of the feed blade, the feed blade 62 may be provided with a communication hole 62' as shown in FIG. 6(b).

In addition, in the first embodiment, a double cover structure was adopted in order to prevent the gap material that had adhered and accumulated on the wall of the dispersion chamber from falling onto the surface of the panel substrate, but a double cover structure was adopted. It's okay. In this case, as shown in FIG. 7(a), a structure for preventing adhesion of the gap material may be added.

This figure is a cross-sectional view showing the structure of a gap material dispersion chamber equipped with an adhesion prevention structure, and a cover 63 defining the dispersion chamber 63.
' has an insulating structure on its outer surface with a resin layer 63a, and has a high voltage generator tf64 on its inner surface.
An electrode layer 63 charged to the same polarity as the gap material by
It is equipped with b.

In the dispersion chamber 63 having such a structure, when the charged gap material is sprayed toward the panel substrate 65, the electrode layer 63b of the dispersion chamber cover 63' is charged to the same polarity as the gap material. The material is dispersed while receiving a repulsive force from this electrode layer 63b. Therefore, the gap material does not adhere to and accumulate on this electrode layer 63b.

Here, the voltage guided to the electrode layer 63b may be guided from the same device as the electrode 66' arranged inside the jet nozzle 66 with a flange, or from a different device. good. Note that the flange of the injection nozzle 66 prevents the gap material from scattering around it.

In addition, instead of such an adhesion prevention structure, as shown in Fig. 7(b)
The structure shown in may also be adopted.

The figure is a sectional view showing the structure of the gap material dispersion chamber.
The dispersion chamber 67 is defined by a bell-shaped dispersion chamber cover 67'. A spraying nozzle 68 for spraying the gap material is arranged above the spraying chamber cover 67'.
A plurality of air knife layer generators 69 are arranged around the dispersion chamber cover 67' to form an air flow along the inner wall of the dispersion chamber cover 67'.

On the other hand, a plurality of air suction pipes 70 are arranged below the dispersion chamber cover 67', and are capable of sucking in the air flow injected from the air knife layer generator 69.

In such a dispersion chamber 67, the gap material dispersion path from the dispersion nozzle 68 to the panel substrate 71 and the inner wall of the dispersion chamber cover 67' are connected to the air knife layer generating device 69.
It is blocked by an air knife layer 72 formed by the air flow injected from the air. Therefore, even if the gap material is scattered toward the inner wall of the dispersion chamber cover 67', the air knife layer 72
The gap material that has entered is sucked into the air suction pipe 70.

Therefore, the gap material does not adhere or accumulate on the inner wall of the dispersion chamber cover 67', and it is possible to prevent the display quality of the liquid crystal display panel from deteriorating due to the gap material falling off.

The panel substrate 71 is placed on a metal electrode plate 71', and the metal electrode plate 71' is connected to an elevating unit 73 that can raise and lower it to positions 1c and 1c. As a result, when the panel substrate 71 is conveyed, the metal electrode plate 71' is lowered to a position, the panel substrate 71 is moved onto the conveyance roller 74, and the gap material is sprinkled on the surface of the panel substrate 71. At times, the metal electrode plate 71' rises to position C, pushes the panel substrate 71 up to a position higher than the top surface of the bottom partition plate 67'' of the dispersion chamber cover 67' of the dispersion chamber 67, and then stops.

Here, when the gap material is irradiated, the bottom partition plate 67# functions as a mask for the gap material, and can prevent the gap material from adhering to the conveyance roller 74 and the like. Furthermore, since the surface of the panel substrate 71 is located at a higher position than the upper surface of the bottom partition plate 67'', the gap material that has adhered and accumulated on the bottom partition plate 67'' is scattered and is secondarily attached to the surface of the panel substrate 71. Since this can be prevented, the dispersion quality can be improved and the display contrast can be prevented from deteriorating.

Furthermore, for the purpose of more uniformly dispersing the gap material, a dispersion chamber having the following configuration may be adopted.

FIG. 8(a) is a cross-sectional view of a dispersion device with an added function of releasing the charge on the gap material.

In the figure, 75 is a dispersion chamber, and DC ion guns 76 are disposed in the dispersion chamber 75 so as to protrude from its side wall, and these DC ion guns 76 are connected to a DCC-in generation power supply device 76'. There is. These DCs
The ion gun 76 forms an ion charge layer 76'' with a polarity opposite to that of the charged gap material near the surface of the panel substrate 77, and the gap material sprayed from the spray nozzle 78 After being released from the charged state by the ion charge layer 76'', it is dispersed onto the surface of the panel substrate 77.

In this way, since the charged state is released and the gap material is spread, no static electricity is generated on the surface of the panel substrate 77. Therefore, the panel substrate 7 on which the gap material is spread
Even when the gap material 7 is removed from the metal electrode plate 77', the uniform distribution of the gap material is not disturbed by the static electricity of the gap material.

Further, even if a metal electrode plate as shown in FIG. 8(b) is used, it is possible to prevent the distribution of the gap material from being disturbed by static electricity.

This figure is a cross-sectional view showing the structure of the metal electrode plate, and a plurality of substrate support parts 78'' protrude from the metal electrode plate 78, which can support the panel substrate 78' from the bottom surface with a certain gap maintained. There is.

If the metal electrode plate 78 having such a structure is used, even if a charged gap material is scattered on the surface of the panel substrate 78', the voltage generated when the panel substrate 78'' is removed from the metal electrode plate 78 can be suppressed. It can be made low and the distribution of gap material is not disturbed.

Then, auxiliary electrodes may be arranged as shown in FIG. 8(c).

This figure is a plan view of a dispersion chamber in which an auxiliary electrode is arranged in the dispersion device according to the first embodiment, and a rectangular cylindrical inner cover 80 is disposed around a rectangular panel substrate 79.

The apexes of the panel substrate 79 and the apexes of the inner cover 80 are arranged in a corresponding positional relationship, and auxiliary electrodes 81 are arranged at the four corners of the inner cover 80 corresponding to the apexes of the panel substrate 79. These auxiliary electrodes 81 are metal electrode plates 82
Similarly, it is in a grounded state.

When such auxiliary electrodes 81 are arranged, an electrostatic field is formed between these auxiliary electrodes 81 in addition to the lines of electric force formed between the spray nozzle and the metal electrode plate 82 . Therefore, the gap material sprayed in a charged state is also attracted to the four corners of the inner cover 80 by the lines of electric force of this electrostatic field, so that it can be applied to the sprayed surface of the panel substrate 79 regardless of the shape of the injection hole of the spray nozzle. It is possible to form a dispersion path according to the shape of the gap material, and the gap material can be uniformly spread over the entire surface.

The arrangement of such auxiliary electrodes is not limited to the case of a square panel board, nor is it limited to a structure where the auxiliary electrodes are arranged as part of the inner surface cover of the arrangement location, but as long as they are arranged in accordance with the shape of the panel board. good.

Further, in all of the above embodiments, the gap material is sprayed from above to the bottom, but conversely, the gap material is sprayed from below to the top. It may also be a spraying device with a blow-up structure.

In the spraying device arranged in this way, it is possible to prevent dust, fluff, etc. from the inner surface of the cover and the atmosphere from adhering to the surface of the panel substrate, and it is possible to improve the spraying quality.

〔Effect of the invention〕

As described above, the gap material dispersing method and its dispersing device according to the present invention are for dispersing the gap material onto the surface of at least one substrate as a spacer for forming a certain gap between two substrates. The feature is that the gap material is sprayed onto the substrate surface in a charged state. Therefore, according to the present invention, the charged gap materials repel each other and are dispersed and scattered, so that on the substrate surface,
Multiple gap materials are not spread in a hardened state.

Therefore, a dry spraying method can be realized instead of a wet spraying method using Freon or the like. Therefore, it is possible to comply with social demands such as fluorocarbon regulations.

When the charged gap material is sprayed by an air stream jetted from a spray nozzle disposed toward the substrate, the charged gap material is dispersed even during spraying due to the electrical charge, and is reliably sprayed onto the substrate surface.

If the supply unit has a rotating stirring rotor, a grooved feed rotor, and a scraping plate that discharges the gap material from the grooves into the spray nozzle, the material is quantitatively sprayed, resulting in stable spray quality. can be obtained. Moreover, if these are integrated with the spray nozzle,
Arrangements such as changing the gap material model can be easily made in a short time.

When the agitation rotor and the grooved feed rotor are driven by a pulse motor, their vibrations are transmitted to the lug material, thereby stabilizing their supply. Furthermore, if the stirring rotor has a structure that allows communication between the spaces defined by the stirring chambers by the feeding blades, this space will not be in a depressurized state, so the gap material will not become clogged and will remain stable. is supplied to Therefore, automatic supply can be realized as well as quantitative supply of the gap material.

If an electrode plate that is held at the opposite polarity or grounded to the charged gap material is placed on the opposite side of the substrate to which the gap material is sprayed, the connection between the injection nozzle and the electrode plate is The gap material advances along the lines of electric force generated between them and is spread over the surface of the substrate disposed between them, so that the gap material is reliably spread over the substrate.

If a gap is formed between the electrode plate and the substrate,
When removing the substrate from the electrode plate, the voltage generated due to the charging of the gap material can be lowered, so the distribution of the spread gap material is not disturbed.

Even if there is an ionic charge layer near the substrate surface that relaxes or releases the charged state of the gap material, it is possible to prevent disturbances in the distribution of the gap material caused by the charging of the gap material when removing the substrate from the electrode plate. It can be prevented.

If the electrode plate has a minute electrode part corresponding to the part where the gap material of the substrate is to be sprayed, for example, by the electrode part protruding at the position corresponding to the part to be sprayed,
If the substrate is supported, the gap material is distributed only in the essential areas. Therefore, it can be sprayed at a predetermined location, and unnecessary consumption of gap material does not occur.

When dispensing the gap material on a polygonal substrate, auxiliary electrodes are placed at positions corresponding to these vertices around the substrate, either held at the opposite polarity to the charged gap material or grounded. When placed, the charged gap material is drawn toward the auxiliary electrode by electric lines of force within the electrostatic field formed by the auxiliary electrode. Therefore,
Gap material can be uniformly sprayed regardless of the shape of the spray nozzle.

If the lateral side of the gap material distribution route is an inner wall charged with the same polarity as the gap material, and the outer wall is defined by an insulated cover, or if the distribution route and the inner wall of the cover If the gap is blocked by the air knife layer, the charged gap material will not adhere or accumulate on the inner wall of the cover. Furthermore, if the structure includes a removable inner cover, the inner wall can be kept clean by replacing it. As a result, the gap material attached and deposited on the inner wall of the cover does not fall off onto the substrate surface.

A mask portion is provided around the substrate to prevent the gap material from scattering, and if the substrate can be supported upstream of the gap material spraying from the mask portion, the gap material is sprayed. It is possible to prevent the gap material from scattering outside the space. Further, during spraying, it is possible to prevent the gap material that has adhered and accumulated on the mask portion from secondary adhesion to the top soil of the substrate, and it is possible to improve the quality of the spraying. Furthermore, when a substrate transport means is provided, automation of the spraying process can be realized.

When a vibrating metal mesh plate is disposed between the spray nozzle and the substrate, the gap material is further diffused and sprayed by the vibration, so that the gap material can be uniformly spread over the entire substrate.

When the gap material is sprayed onto the substrate from below, dust, fluff, etc. are less likely to adhere to the surface of the substrate, so that the quality of the spraying can be improved.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing the overall configuration of a gap material dispersing device according to a first embodiment of the present invention. FIG. 2(a) is a perspective view showing the configuration of the supply section,
FIG. 2(b) is a sectional view thereof, and FIG. 2(C) is a perspective view of the stirring rotor. FIG. 3(a) is a cross-sectional view showing the configuration of the dispersion section,
FIG. 3(b) is a perspective view showing the structure of the conveying roller, and FIG. 3(C) is a perspective view showing the structure of the cover. FIG. 4(a) is a schematic plan view of the liquid crystal display panel, FIG. 4(b) is a perspective view showing the structure of the electrode plate of the spraying device according to the second embodiment, and FIG. 4(C) is a schematic plan view of the liquid crystal display panel. FIG. 2 is a sectional view showing how it is used. FIG. 5 is a sectional view of a spraying device according to a third embodiment. FIGS. 6(a) and 6(b) are perspective views showing the shape of a stirring rotor of a spraying device according to another embodiment. FIG. 7(a) is a sectional view showing the structure of a dispersion chamber equipped with a gap material adhesion prevention structure used in a dispersion device according to another embodiment, and FIG. 7(b) is a cross-sectional view showing the structure of a dispersion chamber equipped with an air knife layer. It is a sectional view showing the structure of a dispersion room. FIG. 8(a) is a sectional view of a dispersing device having a charge release function according to another embodiment, and FIG. 8(b)
FIG. 8(0) is a cross-sectional view showing the structure of a metal electrode plate having a charge-reducing structure, and FIG. 8(0) is a plan view showing the arrangement position of the auxiliary electrode. FIG. 9(a) is a cross-sectional view showing the configuration of a conventional gap material dispersing device, and FIG. 9(b) is a plan view of a panel substrate on which the gap material is sprayed. (Explanation of symbols) 1.51...Spreading device 3.43, 45, 55, 65, 71, 77°78'
79... Panel substrate 4.46... Gap material 12... Gap material supply unit 14... Gap material supply unit 15.61... Stirring rotor 16... Grooved feed rotor 17. ...Scraping plate 21.52, 63, 67.75...Scattering chamber 22...
Spraying part 23.54, 66.68.78... Spraying nozzle 25.
...Inner cover 26.48.71', 77', 78.82...Metal electrode plate 27...Elevating unit 28 56.74...Conveyance roller 59...Metal mesh roller 9...Air Knife layer generator 76...DC ion gun. (C) Fig. 5 - 163 - Fig. 7 (Q) Fig. 8 (CI) 164 - (b) (b) 78' no kami le Makune Hetsu 78 Metal Electric Yang Treatment Fig. 8 (C) Figure 9(a)

Claims (1)

[Claims] (1) In a gap material dispersing method for dispersing granular gap material onto the surface of the substrate as a spacer for forming a certain gap between two substrates, the gap material is charged. A method for distributing a gap material, the method comprising: a charging step; and a step of dispersing the charged gap material onto the surface of at least one of the substrates. (2) The gap material dispersing method according to claim 1, wherein in the dispersing step, the charged gap material is sprayed toward the substrate by an air flow directed toward the substrate surface. (3) The gap material dispersing method according to claim 2, further comprising a feeding step of supplying a fixed amount of the gap material, and the gap material is charged in fixed amounts in the charging step. (4) The gap material dispersing method according to claim 3, wherein in the supplying step, constant vibration is used to supply the gap material in a constant amount toward the supplying step. (5) In any one of claims 1 to 4, the dispersing step uses suction force obtained by forming an electrostatic field to the charged gap material,
A gap material dispersing method characterized in that the gap material is dispersed while being suctioned toward the substrate surface. (6) In claim 5, the dispersion step includes spreading the gap material over the entire surface of the substrate using an attractive force toward the outer periphery of the substrate surface obtained by forming an electrostatic field. A gap material dispersion method characterized by uniform dispersion. (7) In any one of claims 1 to 6, the charging step includes a charging relaxation step of relaxing or canceling the charged state of the gap material charged through the charging step, and after this step, the gap material is A gap material dispersing method comprising: dispersing a gap material onto the surface of the substrate. (8) The gap material according to any one of claims 1 to 7, wherein the dispersion step is performed in a state where the gap material is not scattered to areas other than the surface of the substrate. Spraying method. (9) The method according to any one of claims 1 to 8, further comprising a step of diffusing the gap material sprayed toward the substrate toward the surface of the substrate; A method for dispersing a gap material, comprising supplying the diffused gap material onto the surface of the substrate. (10) In any one of claims 1 to 9, the spraying step includes discharging the charged gap material.
A method for dispersing gap material, characterized in that the material is dispersed in a direction substantially opposite to the direction in which gravity acts. (11) In a gap material dispersing device for dispersing a granular gap material as a spacer for forming a certain gap between two substrates onto the surface of at least one substrate, the granular gap material is sprayed onto the surface of the substrate. What is claimed is: 1. A gap material dispersing device comprising: a charging means for charging the granular gap material; and a dispersing means for dispersing the granular gap material charged by the charging means onto the surface of the substrate. (12) The gap material dispersing device according to claim 11, wherein the dispersing means includes a dispersing nozzle that generates an air flow toward the substrate. (13) Claim 12, further comprising a gap material supply unit that supplies the gap material to the spraying nozzle, and this unit includes a stirring chamber and a discharge chamber that communicate with each other; A gap material stirring rotor is disposed in the stirring chamber, and the stirring rotor has a plurality of sending blades capable of stirring the gap material by rotating with a tip substantially inscribed in the inner wall of the stirring chamber. A grooved feed rotor is disposed in the discharge chamber, and the rotor is rotatable while substantially inscribed in the inner wall of the discharge chamber, and includes a groove filled with the gap material. . The gap material spreading device, wherein the unit further includes a scraping plate that scrapes out the gap material from the groove of the grooved feed rotor and discharges the gap material into the spray nozzle. (14) The gap material spraying device according to claim 13, wherein the gap material supply unit and the spray nozzle are integrated. (15) In claim 13 or 14, each of the plurality of feeding blades of the stirring rotor has a communication portion that connects adjacent internal spaces of the stirring chamber partitioned by these feeding blades. A gap material dispersing device characterized in that: (16) The gap material spreading device according to any one of claims 13 to 15, wherein the stirring rotor and the grooved feed rotor are rotationally driven by a pulse motor. (17) The method according to any one of claims 11 to 16, further comprising an electrode plate disposed on the opposite side of the surface of the substrate on which the gap material is to be sprayed; What is claimed is: 1. A gap material dispersing device, characterized in that the device supports the charged gap material and is held in a polarity opposite to the charged gap material or in a grounded state. (18) In claim 17, a support portion is disposed between the electrode plate and the substrate to hold them at a constant gap, and the substrate is connected to the electrode plate via the support portion. A gap material spreading device characterized in that it is supported on the top. (19) In claim 17, the surface of the electrode plate that supports the substrate is provided with a polarity opposite to that of the gap material or in a grounded state at a position corresponding to a portion of the substrate where the gap material is to be sprayed. A gap material dispersing device comprising a plurality of held microscopic electrode parts. (20) The gap material dispersing method according to claim 19, wherein the minute electrode portion protrudes from the surface of the electrode plate. (21) In any one of claims 17 to 20, the gap material dispersion surface of the substrate is polygonal,
A gap material dispersing device characterized in that a plurality of auxiliary electrodes having a polarity opposite to that of the gap material or held in a grounded state are arranged at positions corresponding to each vertex of the polygonal dispersing surface. (22) In any one of claims 11 to 21, the ion gun includes an ion gun and a power supply device for the ion gun, and the charged state of the charged gap material sprayed by the ion gun is alleviated. Alternatively, a gap material dispersing device characterized in that an ion charge layer to be released can be formed near the surface of the substrate. (23) In any one of claims 11 to 22, the method includes a cover that defines the periphery of the side surface of the gap material dispersion route, and the inner wall of the cover has the same polarity as the gap material. A gap material dispersing device characterized in that the cover is electrically charged and the outer wall of the cover is insulated. (24) In any one of claims 11 to 22, a cover that defines a side periphery of a gap material dispersion route, and an air block that blocks a gap between an inner wall of the cover and the dispersion route. A gap material dispersing device characterized by comprising: an air knife layer forming means for forming a knife layer; and an air suction means for sucking an air flow forming the air knife layer. (25) A gap material dispersing device according to any one of claims 11 to 22, characterized in that the device includes a removable inner cover that partitions the periphery of a side surface of a gap material dispersion path. (26) In any one of claims 11 to 25, a mask portion that can prevent the gap material from scattering is provided around the substrate, and the electrode plate is raised and lowered in the direction in which the gap material is spread. a position where the electrode plate supports the substrate upstream from the mask portion in the direction of dispersion of the gap material;
A gap material dispersing device, characterized in that it is movable to a position that supports a substrate downstream of the mask portion. (27) Any one of claims 11 to 26, further comprising a substrate transport means for transporting the substrate into the spreading means and transporting the board on which the gap material has been sprayed from the spreading means. A gap material spreading device characterized by: (28) In any one of claims 11 to 27, a metal mesh plate disposed in a gap material distribution route between the distribution means and the substrate, and a vibration applied to the metal mesh plate. A gap material dispersing device characterized by having a vibrating means. (29) The gap material spreading device according to any one of claims 11 to 28, wherein the spreading means is arranged below the substrate.