JP4840911B2 - Liquid leakage prevention device for treatment tank - Google Patents

Description

  The present invention relates to a treatment tank liquid leakage prevention apparatus for preventing a treatment liquid from leaking from a work entrance / exit of a treatment tank in a plating apparatus for plating while transferring a flat workpiece in a vertical posture.

  Various types of apparatuses for plating a flat work such as a printed circuit board are provided. Among these apparatuses, the plating apparatus for continuously transferring a flat workpiece in a vertical posture does not require a jig, and is equipped with a bath liquid jet mechanism to enable high-speed plating. It is used a lot because there is. In such a plating apparatus that continuously transfers a flat work in a vertical posture, the flat work enters and exits the treatment tank below the treatment liquid surface, so that it is a problem that the treatment liquid leaks from the work entrance and exit. For example, a mechanism for preventing leakage of the processing liquid from the work entrance and exit as provided in the processing apparatus disclosed in Patent Document 1 is provided.

  The liquid leakage prevention mechanism of the processing tank equipped in the processing apparatus disclosed in Patent Document 1 is provided with a vertical slit for allowing a workpiece to pass through the end wall of the processing compartment, and the vertical corresponding to the slit. The rods or pipes that are loosely placed in pairs in the treatment bath in any direction are arranged as seals, and these rods or pipes are connected to each other by liquid pressure or to the end walls of the treatment compartments each time. It is configured to be crimped. In this mechanism, the rod or tube is a roller having a generally cylindrical cross section, and since the roller is rotated by the workpiece passing therethrough, it is possible to dispense with a roller driving device and to handle a workpiece that is extremely sensitive to friction. There is an effect that becomes possible.

However, in the invention shown in Patent Document 1, the roller is pressure-bonded and sealed to the end wall of the processing compartment, and the frictional force becomes resistance, and a large tensile force acts on the work rotating the roller. . Further, it is difficult to keep the roller in a completely vertical state, and if the roller is inclined even slightly, an upward or downward force is applied to the passing workpiece. The force acting on such a workpiece is not particularly problematic if it is a workpiece with a certain thickness and strength like a conventional printed circuit board, but it will be used with the progress of high-density mounting of electronic devices in recent years. There is a problem that a workpiece such as a flexible circuit board having an extremely large thickness and a low strength is damaged, such as wrinkles.
Japanese National Patent Publication No. 9-505638

  The present invention has been made in order to solve the above-described problems and to provide a liquid leakage prevention apparatus for a processing tank in which a workpiece is not damaged even when the workpiece is extremely thin and low in strength.

The apparatus for preventing leakage of a treatment tank of the present invention, which has been made to solve the above problems, is provided with a vertical slit for workpiece entry / exit on a side wall into which a workpiece of a treatment tank for treating a flat workpiece enters / exits, In a liquid leakage prevention device for a treatment tank that prevents liquid leakage by sandwiching a workpiece with a pair of two sealing rollers arranged close to the slit, the outer diameter of each sealing roller is outside the sealing roller. Each bearing smaller than the diameter is attached, a spacer is provided on the treatment tank to contact each bearing, and the movement of the seal tank in the outer direction in the plane parallel to the work surface of each seal roller is it is characterized in that the inner surface of the side wall remote from the processing vessel of the sealing roller case is limited to a range that forms the gap 0.2~0.5mm not contact

According to the present invention, bearings whose outer diameters do not exceed the outer diameter of the sealing rollers are respectively attached to the upper and lower ends of the respective sealing rollers, and spacers for contacting the respective bearings are provided in the treatment tank, and are parallel to the work surfaces of the respective sealing rollers. Since the movement of the processing tank in the outer plane in a smooth plane is limited to a range where each sealing roller and the side wall of the processing tank are not in contact with each other and a slight gap is formed, the sealing roller is in contact with the side wall. No frictional force is generated and the seal roller is supported by the bearing, so it can rotate with a very small force, and a large tensile force does not act on the workpiece, so that even a thin workpiece with low thickness can be damaged. There are no advantages.

If another spacer is provided to restrict the movement of each seal roller in the direction away from the workpiece surface to a range where the distance between the seal rollers does not greatly exceed the maximum thickness of the workpiece, Since there is no restriction on the position of the side wall of the roller that does not contact the workpiece, the treatment liquid can be sufficiently stored on the side of the sealing roller that does not contact the workpiece. This increases the force that presses the seal rollers against each other due to the fluid pressure, thereby improving the close contact between the seal rollers and between the seal roller and the workpiece, reducing liquid leakage from the seal roller and preventing the seal roller and the workpiece from slipping. There are advantages.

Next, the best mode for carrying out the present invention will be specifically described with reference to the drawings.
1 to 4 show the construction of the apparatus for preventing leakage of treatment tanks according to the present invention, in which a pair of seal roller cases 1 and 2 having a U-shaped cross section face each other with their openings facing each other. It is provided in the vertical direction, and cylindrical seal rollers 3 and 4 are accommodated in the seal roller cases 1 and 2, respectively, so as to be movable in the horizontal direction. These seal roller cases 1 and 2 are attached to the outside of the slit portion that serves as a work entrance and exit of the processing tank, and the seal rollers 3 and 4 are disposed on both sides of the slit.

  Bearings 5a and 5b are attached to the upper and lower ends of the sealing roller 3, and bearings 6a and 6b are attached to the upper and lower ends of the sealing roller 4, respectively. The outer diameters of the bearings 5a, 5b, 6a and 6b are the sealing roller 3. And 4 does not exceed the outer diameter. Spacers 7a and 8a are provided at the upper end of the seal roller case 1 as position restricting members that abut the bearing 5a and restrict the movement of the seal roller 3, and the lower end of the seal roller case 1 is in contact with the bearing 5b. Spacers 7b and 8b for limiting the movement of the seal roller 3 are provided.

  The spacers 7a and 7b limit the movement of the seal roller 3 in the direction far from the processing tank in a plane parallel to the workpiece surface. When the seal roller 3 moves in the direction away from the processing tank, the seal roller 3 The seal roller 3 is moved so as not to contact the inner surface of the side wall of the seal roller case 1 far from the treatment tank and to form a slight gap such as 0.2 to 0.5 mm between the inner surface of the side wall. Restrict. The spacers 8a and 8b limit the movement of the seal roller 3 in the direction away from the workpiece surface, and the seal roller 3 and the seal roller 4 do not greatly exceed the maximum thickness of the workpiece. Limit 3 moves.

  Similarly, spacers 9 a and 10 a that contact the bearing 6 a are provided at the upper end of the seal roller case 2, and spacers 9 b and 10 b that contact the bearing 6 b are provided at the lower end of the seal roller case 2. The spacers 9a and 9b limit the movement of the seal roller 4 so that the seal roller 4 does not contact the inner surface of the side wall of the seal roller case 2 far from the treatment tank and a slight gap is formed between the inner surface and the inner surface of the side wall. The spacers 10a and 10b limit the movement of the seal roller 4 so that the distance between the seal roller 4 and the seal roller 3 does not greatly exceed the maximum thickness of the workpiece. The bearings 5b and 6b attached to the lower ends of the seal rollers 3 and 4 are immersed in the treatment liquid, and the bearings 5a and 6a attached to the upper ends may also come into contact with the treatment liquid, so that they can withstand the treatment liquid. It is preferable to use a material and structure that can be used.

  In the figure, reference numerals 11 and 12 denote bottom plates of the seal roller cases 1 and 2, respectively, which support bearings 5b and 6b so as not to disturb the rotation of the inner ring, and the spacers 7b and 9b and 8b and 10b are The bottom plates 11 and 12 can be fixed. Reference numerals 13 and 14 denote lids of the sealing roller cases 1 and 2, respectively. The spacers 7a, 8a, 9a, and 10a are fixed to the lids 13 and 14, and the lids 13 and 14 are removed from the sealing roller cases 1 and 2. Preferably it is possible. In this way, when the outer diameters of the bearings 5a and 6a are smaller than the outer diameters of the seal rollers 3 and 4, the spacers 7a, 8a and 9a are attached when the seal rollers 3 and 4 are attached to and detached from the seal roller cases 1 and 2. 10a will interfere, but since the spacers 7a, 8a and 9a and 10a can be removed together with the lids 13 and 14, the seal rollers 3 and 4 can be easily attached and detached, and the seal rollers 3 and 4 and the bearing 5a. Convenient for exchanging 5b, 6a, 6b.

  In the treatment tank to which the apparatus for preventing leakage of the treatment tank of the present invention configured as described above is attached, for example, the liquid receiving tanks 16 and 17 are integrally formed on the inlet side and the outlet side of the treatment tank 15 as shown in FIG. The slits 20 and 21 are provided on the side walls 18 and 19 on the workpiece entrance side and the exit side of the treatment tank 15. The seal roller cases 1 and 2 are attached to the outside of the side walls 18 and 19, but if the attachment plate portions 22 and 23 are provided on the seal roller cases 1 and 2, respectively, and they are attached to the side walls 18 and 19, the positions are provided. It is possible to easily adjust the position of the sealing roller case, and the sealing roller cases 1 and 2 can be attached to the inside of the side walls 18 and 19, or the sealing roller case can be integrally formed with the side walls 18 and 19.

  In such a configuration in which the seal roller cases 1 and 2 are attached to the outside or the inside of the side walls 18 and 19, the seal roller cases 1 and 2 communicate with the treatment tank 15, and the seal roller cases 1 and 2 are treated. The side wall far from the center of the processing tank 15 in a state attached to the tank 15 is a substantial side wall of the processing tank 15. A substantial slit for entering and exiting the workpiece is formed between the seal roller case 1 and the seal roller case 2, and the slits 20 and 21 provided on the side walls 18 and 19 function as attachment portions for the seal roller cases 1 and 2. Is.

  Slits 24 and 25 serving as work passages are provided on the side wall on the work inlet side of the liquid receiving tank 16 and the side wall on the work outlet side of the liquid receiving tank 17, respectively. The liquid receiving tanks 16 and 17 are pumped up from the processing tank 15 through the seal roller 3 and the sealing roller 4 and the like and are retained in the liquid receiving tanks 16 and 17 and returned to the processing tank 15. A pump (not shown) is provided. Further, the processing tank 15 is provided with reinforcing ribs as necessary, and in the case of a chemical tank, a jet apparatus, a circulation apparatus, a stirring apparatus, etc. of the processing liquid, and in the case of a plating tank, an anode is additionally provided. In the case of a washing tank, a shower device or the like is provided.

  A plurality of processing tanks 15 having the above-described configuration are arranged in a straight line in the order of processing steps to form a plating line, and a transfer device (not shown) for transferring a workpiece is provided. As the transfer device, for example, a mechanism that clamps and transfers the upper end of the workpiece is preferable, but other known mechanisms can be used as appropriate. The treatment tank 15 of each treatment tank is filled with necessary treatment liquid, washing water, etc. according to the treatment process, and is circulated, stirred, etc. as necessary. The workpiece W is transferred from the inlet-side slit 24 through the path of the liquid receiving tank 16, the slit 20, the processing tank 15, the slit 21, the liquid receiving tank 17, and the slit 25 as indicated by an arrow.

  Until the workpiece W enters between the sealing roller 3 and the sealing roller 4, the sealing rollers 3 and 4 are pressed against each other by the liquid pressure of the processing liquid in the sealing roller cases 1 and 2 flowing from the processing tank 15. Since the outer diameters of the bearings 5a, 5b, 6a and 6b do not exceed the outer diameters of the seal rollers 3 and 4, the seal roller 3 and the seal roller 4 are in close contact with each other to prevent leakage of the processing liquid. It becomes. At the same time, the seal rollers 3 and 4 are pushed in the direction of the side wall of the seal roller cases 1 and 2 far from the treatment tank 15, but the movement of the bearings 5a, 5b, 6a, and 6b is restricted by the spacers 7a, 7b, 9a, and 9b, respectively. Therefore, the seal rollers 3 and 4 are not in contact with the inner surface of the side walls of the seal roller cases 1 and 2, and a slight gap is formed.

  When the workpiece W enters and is transferred between the sealing rollers 3 and 4, the sealing rollers 3 and 4 are in close contact with the workpiece W, respectively, and the leakage of the processing liquid is suppressed. It will be rotated with it. Here, the seal rollers 3 and 4 are supported by bearings 5a, 5b, 6a and 6b, and are not in contact with the inner surfaces of the side walls of the seal roller cases 1 and 2, so that no frictional force is generated, and the roller rotates with a very small force. Therefore, a large tensile force does not act on the workpiece W. Thereby, even if the workpiece W is thin and low in strength, it is not damaged.

  In the treatment tank liquid leakage prevention apparatus of the present invention, the seal rollers 3 and 4 and the side wall inner surfaces of the seal roller cases 1 and 2 are not in close contact with each other, and a slight gap is formed. In comparison, the amount of leakage of the processing liquid is slightly increased, but this type of liquid leakage prevention device is premised on the occurrence of liquid leakage and does not cause any particular problem. Further, the direction of the flow of the processing liquid leaking from the gap between the seal rollers 3 and 4 and the side wall inner surfaces of the seal roller cases 1 and 2 is perpendicular to the surface of the workpiece W, and does not go directly to the slits 24 and 25. It is not necessary to lengthen the liquid receiving tanks 16 and 17.

  As described above, the sealing rollers 3 and 4 are pressed against each other by the liquid pressure of the processing liquid in the sealing roller cases 1 and 2, but the processing tank 15 and the sealing roller cases 1 and 2 are filled with the processing liquid and sealed. Until the rollers 3 and 4 are pressed against each other, the processing liquid leaks from between the sealing rollers 3 and 4. If the spacers 8a, 8b, 10a, and 10b that restrict the movement of the seal rollers 3 and 4 in the direction perpendicular to the workpiece surface are provided, the distance between the seal rollers 3 and 4 does not become too large, and the seal There is an advantage that the amount of the processing liquid leaking from between the sealing rollers 3 and 4 before the rollers 3 and 4 are pressed against each other can be reduced.

It is a top view of the liquid leak prevention apparatus of the processing tank of this invention. It is a longitudinal cross-sectional view in the AA part of FIG. It is a longitudinal cross-sectional view in the BB part of FIG. It is a top view which shows an example of a processing tank.

Explanation of symbols

1, 2 Seal roller case 3, 4 Seal roller 5a, 5b, 6a, 6b Bearing 7a, 7b, 8a, 8b, 9a, 9b, 10a, 10b Spacer 11, 12 Bottom plate 13, 14 Lid 15 Processing tank 16, 17 Liquid tank 18, 19 Side wall 20, 21 Slit 22, 23 Mounting plate 24, 25 Slit W Workpiece

Claims (1)

A vertical slit for workpiece entry / exit is provided on the side wall where the workpiece of the processing tank for processing the flat plate workpiece enters / exits, and the workpiece is sandwiched by a set of two seal rollers arranged in proximity to the slit. In the treatment tank liquid leakage prevention device for preventing leakage, each seal roller is provided with a bearing whose outer diameter is smaller than the outer diameter of the seal roller at each of the upper and lower ends, and a spacer for contacting each bearing is provided in the treatment tank. The movement of the processing tank in the outer direction in a plane parallel to the work surface of the roller is 0.2 to 0 without contact between each sealing roller after movement and the inner surface of the side wall far from the processing tank of the sealing roller case. A device for preventing leakage of liquid in a processing tank, which is limited to a range in which a gap of 5 mm is formed.

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