JP4838158B2 - Material transport mechanism for resin-sealed molds - Google Patents

Description

  The present invention relates to a technical field of a resin sealing device that seals a semiconductor chip or the like with a resin.

  For example, a loader described in Patent Document 1 is known as a transport mechanism that enters a mold for resin sealing that can be opened and closed and carries members into or out of the mold (Patent Document 1). The loader carries a member such as a substrate into the mold by sliding a part of itself and entering the mold. Further, at the time of such conveyance, a part of the loader slides and is guided by an entry guide provided on a press post in the mold.

Japanese Patent Laid-Open No. 2001-300975 (page 6, right column, lines 15-20), FIG. 2)

  When a guide guide for the transport mechanism to enter the mold is provided as in the transport mechanism described in Patent Document 1 described above, the width of the entire mold (entrance of the transport mechanism) due to the presence of the guide guide. The width in the direction orthogonal to the direction) becomes large. This is inevitable to some extent even if the guide guide is designed to be thin (thin).

  In particular, in the case of multiple presses with multiple dies arranged in parallel, the width of the guide guide proportionally affects the overall size of the device, and problems such as hindering installation freedom are obvious. To do.

  The present invention has been made to solve such problems, and provides a transport mechanism that does not require a guide guide in a mold.

The present invention is a transport mechanism that enters a mold for resin sealing that can be opened and closed and carries a member into or out of the mold, and a mold entry portion that can enter the mold, and the member A member holding part provided in the mold entry part for holding, a main body part that supports the mold entry part without entering the mold, and the state in which the mold entry part does not enter the mold A slide rail provided in the main body, and the mold entry portion is guided only by the slide rail and can enter the mold, and the mold entry portion includes the slide rail. A support roller that is slidable along the slide and is rotatable while supporting the mold entry portion by contacting the slide rail on the mold side with respect to the connection position of the slide body. And a cleaner part capable of cleaning the mold surface. Comparatively, by the cleaner unit is always configured to the support roller is in contact with the slide rail at the time of cleaning the mold surface, it is intended to solve the above problems.

The transport mechanism according to the present invention does not rely on guide guides provided in the mold, but only by slide rails provided in the main body of the transport mechanism (the main body and slide rail do not enter the mold). mold Susumu join the club is guided. As a result, it is not necessary to separately provide a guide for guiding the transport mechanism in the mold, and the width of the mold (the width in the direction perpendicular to the entering direction of the transport mechanism) can be reduced. .

Then, the mold entrance section, slidable slide body along the slide rails that are fixedly connected. For example, by using a commercially available slide guide (a slide guide composed of a rail and a moving element), it can be easily configured, and an accurate slide can be realized.

Furthermore, the mold side from the connecting position (the mold at entry portion) the slide member (i.e., the slide tip side), the rotatable support while in the slide rail abutting supporting the mold entry portion roller Ru Sonawa. With such a configuration, the mold entry portion can be more reliably supported by the support roller, and a large slide amount of the mold entry portion can be secured.

In addition, (the mold entry section), the mold surface cleanable a cleaner unit Bei despite always the support roller at the time when the cleaner unit to clean the mold surface equivalent to the slide rail that in contact. Thus configured to transport members by the transport mechanism Rukoto with (loading and unloading), it is possible to clean the mold surface. Furthermore, during the cleaning of the mold surface by the cleaner portion, a considerable reaction force is applied to the mold entry portion including the cleaner portion, but the support roller is always in contact with the slide rail at the time of the cleaning. Therefore, it is possible to firmly support the mold entry portion.

  Further, the member holding portion may be provided with a positioning mechanism that can position the member holding portion with respect to the mold. If comprised in this way, it will become possible to convey a member correctly, without controlling the slide amount of a metal mold | die entrance part so finely.

  By applying the present invention, it is possible to downsize the resin-sealing mold and further the entire resin-sealing device. As a result, the degree of freedom of installation is also improved.

  Hereinafter, an example of an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a schematic configuration diagram of a resin sealing device 100 including a transport mechanism that is an example of an embodiment of the present invention. FIG. 2 is a side sectional view of an unloader 140 as a transport mechanism that is an example of an embodiment of the present invention. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 4 is a cross-sectional view taken along the line IV-IV in FIG. FIG. 5 is a side sectional view of the unloader 140 with the mold entry portion 142 extended. FIG. 6 is a side sectional view of the unloader 140 with the mold entry portion 142 extended to the maximum. FIG. 7 is a side cross-sectional view of a state in which a member is delivered to the mold 106 by the unloader 140. FIG. 8 is a plan view of the mold 106 (lower mold 106B).

  In the resin sealing device 100, a substrate supply unit 102 to which a molded product such as a substrate before resin sealing is supplied and a molded product after resin sealing are stored on a base portion 101 serving as a base of the device. The molded product storage unit 104 and four molds 106 arranged side by side between the substrate supply unit 102 and the molded product storage unit 104 are linearly arranged.

  Further, an X-direction guide 120 is installed on the base portion 101 in parallel with the arrangement of the substrate supply portion 102, the molded product storage portion 104, and the mold 106. On the X direction guide 120, a loader 130 and an unloader 140 are arranged. These loader 130 and unloader 140 function as a transport mechanism for a plurality of molds 106 arranged. That is, the loader 130 carries the substrate (not shown) before resin sealing supplied from the substrate supply unit 102 into the mold 106 at a predetermined timing. On the other hand, the unloader 140 has a function of carrying out a molded product resin-sealed by each mold 106 and storing it in the molded product storage unit 104.

  In the present embodiment, four molds 106 are arranged as described above. However, the present invention is not necessarily limited to four molds, and there are two to three, and more than five molds. It may be arranged. One may be sufficient. Further, the substrate supply unit 102 and the molded product storage unit 104 may be arranged on the same side, and the loader 130 and the unloader 140 may be realized by a single transport mechanism.

  Next, the unloader 140 as a transport mechanism will be described in detail with reference to FIGS. Although an unloader will be described here as a transport mechanism, a similar mechanism is adopted for the loader 130 as well.

  The unloader 140 is disposed on the two X direction guides 120 provided on the base portion 101. That is, the unloader 140 can freely move on the base portion 101 along the X direction guide 120. The unloader main body (main body portion) 141 of the unloader 140 has a substantially L shape when viewed from the side surface (X direction). A slide rail (guide portion) 144 is provided on the unloader main body 141 along the long side portion (left and right direction in FIG. 2) of the L shape. Two slide bodies 143 are fitted to the slide rail 144 with respect to one slide rail 144. Further, the two slide bodies 143 are connected and fixed to the mold intrusion portion 142. In other words, the mold entry portion 142 accommodated in the unloader body 141 is slidably supported with respect to the unloader body 141 via the slide rail 144 and the slide body 143. Further, four support rollers 145 with respect to one slide rail 142 so as to come into contact with the slide rail 144 closer to the mold 106 (that is, the slide tip side) than the connecting position of the slide body 143 in the mold intrusion portion 142. Is provided. Further, a chuck portion (member holding portion) 146 is suspended from the support roller 145 via a vertical mechanism 147 on the mold 106 side (that is, the slide tip side). The chuck portion 146 can hold a molded product after resin sealing on the surface of the mold 106. Further, when viewed in plan, the chuck portion 146 is formed in a substantially rectangular shape corresponding to the shape of the mold 106, and a pair of rollers 148 is provided at a substantially central portion of each side. The pair of rollers 148 functions as a positioning mechanism for the chuck 106 with respect to the mold 106 (details will be described later).

  A cleaner 149 that can clean the surface of the mold 106 is provided at the foremost end of the mold intrusion section 142. The cleaner 149 is realized by a rotating brush in this embodiment.

  Next, the operation of the unloader 140 as the transport mechanism will be described with reference to FIGS.

  When resin sealing is completed in the mold 106, the upper mold 106A and the lower mold 106B are opened by a press mechanism (not shown) (see FIG. 5). At this timing, the mold intrusion portion 142 of the unloader 140 serving as a transport mechanism slides and enters between the upper mold 106A and the lower mold 106B. At this time, the unloader main body 141 and the slide rail 144 do not enter the mold 106. Further, the positioning of the unloader 140 in the X direction is accurately managed by a control mechanism (not shown). The mold intrusion part 142 slides toward the mold 106 along the slide rail 144 due to the presence of the slide body 143 and the support roller 145 connected to the mold intrusion part 142. Since the slide slides in a state where it is supported by the two slide bodies 143 and the four support rollers 145, the mold intrusion portion 142 in a state of protruding from the unloader main body 141 (overhanged state) by the slide is surely provided. It is possible to support.

  Next, as shown in FIG. 6, the mold intrusion portion 142 further slides, and the slide of the mold intrusion portion 142 stops when the chuck portion 146 comes substantially above the lower mold 106 </ b> B. In the present embodiment, this state is a state where the mold entry portion 142 has slid to the maximum. At this time, the four support rollers 145 that have been in contact with the slide rail 144 are separated from the contact with the slide rail 144 and are slid out to the mold 106 side. As in this embodiment, not the slide body 143 but the roller 145 that can be removed from the slide rail 144 is arranged at the position of the support roller 145 because the mold intrusion portion 142 slides relative to the unloader body 141. This is to ensure the absolute value of the quantity (see FIG. 6L). In other words, since the slide body 143 fitted to the slide rail 144 cannot slide out of the slide rail 144, if the slide body 143 is disposed at the position of the support roller 145, it cannot be slid greatly. Because it ends up. On the other hand, if the support roller 145 is not disposed at the position, it will not be possible to reliably receive a reaction force during cleaning in the cleaner unit 149 described later.

  Subsequently, as shown in FIG. 7, the chuck unit 146 is moved to the lower mold 106B side by the action of the vertical mechanism 147 that supports the chuck unit 146 from the mold intrusion unit 142. At this time, the pair of rollers 148 provided at the center of the four sides of the substantially rectangular chuck portion 146 are fitted into the four convex portions 106C provided on the surface of the lower die 106B, respectively, so that the chuck portion 146 is accurately attached to the lower die 106B. Positioning is possible. Due to the presence of the roller 148 as the positioning mechanism, the resin-sealed molded product existing on the surface of the lower mold 106B is accurately held and carried out without excessively controlling the slide amount of the mold intrusion portion 142. It is possible to do. After the molded product (not shown) after resin sealing is held by the chuck portion 146, the mold intrusion portion 142 returns to the unloader main body 141 side.

  Further, when the mold intrusion portion 142 returns to the unloader main body 141 side, the surfaces of the upper mold 106A and the lower mold 106B are cleaned by the cleaner portion 149 disposed at the tip of the mold intrusion portion 142. In the present embodiment, each surface of the upper mold 106A and the lower mold 106B is configured to be cleanable, but only one of the surfaces can be cleaned. The cleaning of the mold is started from the stage where the mold intrusion portion 142 slightly returns to the unloader main body 141 side. Specifically, the mold intrusion portion 142 is cleaned while returning to the unloader body 141 side from the position shown in FIG. Here, at the stage where the cleaning of the surface of the mold 106 is started by the cleaner unit 149, the four support rollers 145 already provided in the mold intrusion unit 142 are in contact with the slide rail 144 (see FIG. 5). . That is, the mold intrusion portion 142 receives a reaction force from the mold 106 due to the cleaning operation as the cleaner portion 149 cleans the surface of the mold 106. This reaction force is transmitted to the slide rail 144 and further to the unloader main body 141 side through the mold intrusion portion 142. In this embodiment, since the support roller 145 is in contact with the slide rail 144 at this time and the mold intrusion portion 142 is supported by the two slide bodies 143 and the four support rollers 145, the reaction force is not lost. Secure support is possible. If the support roller 145 is not provided, the mold entry portion 142 must be supported by only two slide bodies 143 for one slide rail 144, so that sufficient support strength may not be ensured.

  As described above, the mold intrusion portion 142 of the unloader 141 to which the present invention is applied is guided only by the slide rail (guide portion) 144 provided in the unloader main body (main body portion) 141. As a result, it is not necessary to separately provide a guide for guiding the transport mechanism such as the unloader 140 in the mold 106, and the width of the mold 106 (width in the direction perpendicular to the entry direction of the mold entry portion 142) is increased. It can be made smaller.

  Although the loader 130 is not described, the loader 130 has the same mechanism as the unloader 140 described above. In the case of the loader 130, the presence of the cleaner portion is not essential and may be omitted depending on circumstances.

  Regardless of the sealing type such as transfer molding or compression molding, it can be widely used as a transport mechanism of a resin sealing device. In particular, it is suitable as a transport mechanism for a multi-press type resin sealing apparatus in which a plurality of dies are arranged in parallel.

1 is a schematic configuration diagram of a resin sealing device including a transport mechanism that is an example of an embodiment of the present invention. Side sectional view of an unloader 140 as a transport mechanism that is an example of an embodiment of the present invention. Sectional view along arrow III-III in FIG. Sectional view along arrow IV-IV in Fig. 2 Side sectional view of a state in which the mold entry portion of the unloader 140 is extended. Side sectional view of the unloader 140 with the mold entry portion extended to the maximum Side sectional view of the state of delivery of the member to the mold by the unloader 140 Top view of mold

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 ... Resin sealing apparatus 101 ... Base part 102 ... Substrate supply part 104 ... Molded product storage part 106 ... Mold 106A ... Upper mold 106B ... Lower mold 106C ... Projection part 120 ... X direction guide 130 ... Loader 140 ... Unloader 141 ... Unloader main body 142 ... entry part 143 ... slide body 144 ... slide rail 145 ... roller 146 ... chuck part 147 ... vertical mechanism 148 ... roller 149 ... cleaner part 160 ... cavity 170A ... upper mold platen 170B ... lower mold platen

Claims (2)

A transport mechanism that enters a mold for resin sealing that can be opened and closed, and carries in or out a member with respect to the mold,
A mold entry portion capable of entering the mold;
A member holding portion provided in the mold entry portion to hold the member;
A main body that supports the mold entry portion without entering the mold;
A slide rail provided in the main body in a state where it does not enter the mold,
The mold entry portion is guided only by the slide rail and can enter the mold ,
A slide body that is slidable along the slide rail is connected and fixed to the mold entry portion, and the mold entry is brought into contact with the slide rail on the mold side with respect to the connection position of the slide body. A support roller that can rotate while supporting the part, and a cleaner part that can clean the mold surface,
The conveyance mechanism , wherein the support roller is always in contact with the slide rail when the cleaner portion cleans the mold surface . Oite to claim 1,
The conveyance mechanism, wherein the member holding portion includes a positioning mechanism capable of positioning the member holding portion with respect to the mold.

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