JP4835830B2 - Expanding method, apparatus and dicing apparatus - Google Patents

Description

  The present invention relates to an expanding method, an apparatus, and a dicing apparatus, and more particularly, to an expanding method, an apparatus, and a dicing apparatus that are used when cutting a workpiece such as a semiconductor or an electronic component material.

  In a semiconductor manufacturing process, a wafer having a semiconductor device or electronic component formed on the surface is subjected to an electrical test in a probing process, and then divided into individual chips (also referred to as dies or pellets) in a dicing process. Next, individual chips are die-bonded to a component base in a die bonding process. After die bonding, the chip is resin-molded to be a finished product such as a semiconductor device or an electronic component.

  After the probing process, as shown in FIG. 9, the adhesive sheet S (also referred to as a dicing sheet or dicing tape) S having an adhesive layer formed on one side and having a thickness of about 100 μm is attached to the back side. Is mounted on a rigid ring-shaped frame F. In this state, the wafer W is transferred in the dicing process, between the dicing process and the die bonding process, and in the die bonding process.

  In the dicing process, a dicing apparatus that cuts the wafer by inserting grinding grooves into the wafer W with a thin grindstone called a dicing blade is used. The dicing blade is obtained by electrodepositing fine diamond abrasive grains with Ni, and an extremely thin one having a thickness of about 10 μm to 30 μm is used.

  The dicing blade is rotated at a high speed of 30,000 to 60,000 rpm to cut into the wafer W, and the wafer W is completely cut (full cut) or partially cut (half cut). In the case of full cut, since the adhesive sheet S stuck on the back surface of the wafer W is cut only about 10 μm from the front surface, the wafer W is cut into individual chips T, but the individual chips T are not cut. Since the arrangement of the chips T is not broken, the wafer state is maintained as a whole.

  Further, without using a dicing blade, a laser beam having a focused point is irradiated inside the wafer W to form a modified region due to a multiphoton absorption phenomenon inside the wafer, and the wafer W is started from this modified region. Laser dicing has been proposed to cleave. Also in this laser dicing process, the wafer W is diced in a state as shown in FIG. 9, so that the arrangement of the chips T is not broken and the wafer state is maintained as a whole.

  Here, even after dicing and dividing into individual chips T in this way, an assembly of the chips T in which the arrangement of the chips T is not broken is also referred to as a wafer W for convenience.

  Thereafter, the wafer W is sent to a die bonding process. A die bonder is used in the die bonding process. In the die bonder, the wafer W is first placed on the chuck stage, and then the adhesive sheet S is expanded to widen the interval between the chips T so that the chips T can be easily picked up.

  Next, the chip T is pushed up with a pusher from below, and the chip T is picked up with a collet from above, and the chip T is bonded to a predetermined position of the base.

Such an expanding method and an expanding apparatus for expanding the adhesive sheet S and expanding the interval between the chips T have been conventionally used. In addition, various improvements and developments have been made in this expanding apparatus (for example, Patent Document 1 and Patent Document 2).
JP 2005-109044 A JP 2005-057158 A

  However, in the conventional wafer expansion, the peripheral members of the frame F are large-sized, which is not only inconvenient to handle but also cannot be stored in the wafer cassette, so that simplification and compactness have been demanded.

  That is, in the conventional expand, the pressure-sensitive adhesive sheet S is expanded, the pressure member ring member is bonded to the pressure-sensitive adhesive sheet S in a state where the interval between the chips T is widened, and the expanded state of the pressure-sensitive adhesive sheet S is caused by this ring member. The so-called double ring system was used to maintain this, but the thickness of the ring member was large. It was difficult to store the frame F or the like.

  The present invention has been made in view of such a situation, and expands the adhesive sheet adhered to the back surface of the wafer on which the linear modified region along the planned dividing line is formed, and between the chips. The expanded state of the pressure-sensitive adhesive sheet can be maintained in a state where the interval is widened, and the expanded method, the expanded device, and the expanded method and device can be simplified and made compact so that the expanded state can be stored in the cassette of the wafer. An object is to provide an applied dicing apparatus.

  In order to achieve the above object, the present invention attaches an adhesive sheet to the back surface of a wafer in which a linear modified region is formed along the predetermined dividing line on the surface or inside, and the outer diameter of the wafer A sticking step for locking the peripheral edge of the pressure-sensitive adhesive sheet to a first annular member having a larger inner diameter, an expanding step for applying tension to the pressure-sensitive adhesive sheet, and a second step having a larger inner diameter than the outer diameter of the wafer The pressure-sensitive adhesive sheet stretched on the inner peripheral portion of the annular member is adhered, and the stretched state of the pressure-sensitive adhesive sheet is maintained by engaging the second annular member with the first annular member. An expanding and holding step, and an expanding method.

  In addition, for this purpose, the present invention attaches a pressure-sensitive adhesive sheet to the back surface of the wafer, and also adheres the peripheral edge of the pressure-sensitive adhesive sheet to the first annular member having an inner diameter larger than the outer diameter of the wafer. Expanding means for bending the adhesive sheet in a concave or convex manner on the side to which the wafer is attached, and applying tension to the adhesive sheet to stretch the second adhesive sheet, and a second inner diameter that is larger than the outer diameter of the wafer. An extension for supplying an annular member, sticking the stretched adhesive sheet to the inner peripheral portion of the second annular member, and locking the outer peripheral portion of the second annular member to the first annular member An expanding device comprising a holding means.

  According to the present invention, the pressure-sensitive adhesive sheet is adhered to the back surface of the wafer on which the modified region along the planned dividing line is formed, and the periphery of the pressure-sensitive adhesive sheet is locked to the first annular member. The sheet is stretched by applying tension, and the adhesive sheet stretched on the second annular member is attached, and the second annular member is locked to the first annular member, and the adhesive sheet is stretched. maintain.

  Therefore, the expanded state of the pressure-sensitive adhesive sheet can be easily maintained with the space between the chips widened. Thereby, it is possible to expand the wafer with improved yield.

  Note that the surface or internal linear modified region is a linear region along the planned dividing line into individual chips of the wafer, and when formed on the surface of the wafer, the wafer is formed by a dicing blade. Full cut (full cut) or partial cut (half cut) is typical, and when it is formed inside the wafer, internal cracks (micro cracks) due to laser light irradiation with the focused point inside the wafer Is representative.

  In the present invention, in the expanding step, an embossing plate having a plane size substantially the same as that of the wafer is disposed on the opposite side of the adhesive sheet to the side on which the wafer is adhered, and the embossing plate is disposed on the adhesive sheet. It is preferable to stretch the pressure-sensitive adhesive sheet by pressing it against the sheet. With such an expanding means, the pressure-sensitive adhesive sheet can be easily stretched uniformly.

  Further, in the present invention, the inner diameter of the first annular member and the outer diameter of the second annular member are formed to be substantially equal, and in the expansion holding step, the second annular member is formed on the inner diameter portion of the first annular member. It is preferable to fit the annular member. As described above, in the extended holding step, if the second annular member is fitted to the inner diameter portion of the first annular member, the coupling state between the two becomes good and the size is reduced (particularly, the thickness is reduced). Can be planned.

  Further, in the present invention, the outer diameter of the second annular member is formed larger than the inner diameter of the first annular member, and in the expansion holding step, on the front surface or the back surface of the inner peripheral portion of the first annular member. The second annular member is preferably adhered. Thus, if it is the structure which adhere | attaches the 2nd annular member on the surface or back surface of the inner peripheral part of a 1st annular member in an extended holding process, both will become favorable by simple structure.

  As described above, according to the present invention, it is possible to expand a wafer with improved yield.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments (first embodiment) of an expanding method, an expanding apparatus, and a dicing apparatus to which the expanding method and apparatus according to the present invention are applied will be described in detail with reference to the accompanying drawings. In addition, the same number is attached | subjected to the same member in each figure. First, the configuration of the dicing apparatus will be described. FIG. 1 is a plan view showing a schematic configuration of a dicing apparatus according to the present invention.

  In FIG. 1, in the dicing apparatus 10, as shown in FIG. 7, the wafer W is attached to a dicing sheet T having an adhesive material on one surface, and is integrated with the frame F via the dicing sheet T. And is carried in the dicing apparatus 10.

  As shown in FIG. 1, the dicing apparatus 10 includes a cassette storage unit 90, an elevator 91, a laser dicing unit 40 as a dicing unit, an expanding unit 60, a wafer W transfer means 61, an expanding ring storing unit 92, an expanding ring It comprises a conveying means 93, a control unit 50 described later, a television monitor 36 described later, and the like.

  The cassette storage unit 90 stores a cassette storing a large number of wafers W integrated with the frame F via a dicing sheet T.

  The laser dicing unit 40 dices the wafer W into individual chips by making a laser beam incident from the surface of the wafer W and forming a modified region inside the wafer W.

  In the expanding unit 60, the dicing sheet T to which the diced wafer W is attached is extended to expand the interval between the individual chips, and thereafter, the expanded ring 64 maintains the state in which the interval between the chips is expanded. It is supposed to be.

  The expanding ring storage unit 92 stores a cassette storing a large number of expanding rings 64.

  The elevator 91 is configured to store the expanded wafer W integrated with the frame F and transported by the transport means 61 from the expanding unit 60 in a cassette.

  The transfer means 61 is means for transferring the wafer W integrated with the frame F to each part of the dicing apparatus 10, and as shown by the thick arrows in the figure, the wafer W is transferred from the cassette storage part 90 to the laser dicing part 40. The first transfer for transferring the wafer W, the second transfer for transferring the wafer W from the laser dicing unit 40 to the expanding unit 60, and the third transfer for transferring the wafer W from the expanding unit 60 to the elevator 91 can be performed. Yes.

  The expand ring transport means 93 is a transport arm that transports the expand ring 64 from the expand ring storage section 92 to the expand section 60.

  The control unit 50 (see FIG. 2) includes a CPU, a memory, an input / output circuit unit, various drive circuit units, and the like, and each is connected by a bus line so as to control the operation of each unit of the dicing apparatus 10. It has become. The TV monitor 36 displays a program setting screen and various observation screens.

  On the main body base 16, two X guide rails 17 and 17 arranged in the X direction in the figure are attached. Further, a gate-shaped Y guide rail 18 extending in the Y direction in the figure across the X guide rail is attached above the X guide rails 17 and 17.

  The X guide rails 17 and 17 guide the XZθ table 11 (see FIG. 2) of the laser dicing unit 40, and the XZθ table 11 is moved in the X direction by driving means (not shown). As this driving means, a known driving means such as a linear motor is used.

  FIG. 2 is a conceptual configuration diagram showing details of the laser dicing unit 40. The laser dicing unit 40 includes an XZθ table 11, a laser optical unit 20, an observation optical unit 30, and the like.

  The XZθ table 11 includes an X table 12 that is guided by X guide rails 17 and 17 and moves in the X direction, and a Zθ table 15 that is mounted on the X table 12 and is driven in the Z direction and θ direction in the figure. A suction stage 13 that holds the wafer W and a cradle 14 that holds the frame F are attached to the table 15 via a dicing sheet T. With this XZθ table 11, the wafer W is moved precisely in the XZθ direction of the figure.

  The laser optical unit 20 is attached to a Y table 19 (see FIG. 1) and is precisely indexed in the Y direction. A laser oscillator 21, a collimating lens 22, a half mirror 23, a condensation lens 24, and the like are used. It is configured.

  The observation optical unit 30 includes an observation light source 31, a collimating lens 32, a half mirror 33, a condensation lens 34, a CCD camera 35 as an observation means, a television monitor 36, and the like.

In the laser optical unit 20, the laser light oscillated from the laser oscillator 21 is condensed inside the wafer W through an optical system such as a collimating lens 22, a half mirror 23, and a condensation lens 24. Here, laser light having transparency to the dicing tape is used under the condition that the peak power density at the condensing point is 1 × 10 ⁸ (W / cm ² ) or more and the pulse width is 1 μs or less. The Z direction position of the condensing point is adjusted by fine movement in the Z direction of the XZθ table 11.

  In the observation optical unit 30, the illumination light emitted from the observation light source 31 irradiates the surface of the wafer W through an optical system such as a collimator lens 32, a half mirror 33, and a condensation lens 24. Reflected light from the surface of the wafer W enters the CCD camera 35 as observation means via the condensation lens 24, the half mirrors 23 and 33, and the condensation lens 34, and a surface image of the wafer W is captured. Yes.

  This imaged data is input to the image processing unit 38, used for alignment of the wafer W, and is displayed on the television monitor 36 through the control unit 50.

  FIG. 3 is a conceptual configuration diagram showing details of the expanding unit 60. The expanding section 60 is for expanding the distance between adjacent chips C of the wafer W diced while being adhered to the dicing sheet T, and expands the dicing sheet T outward from the center. By doing that.

  The expanded portion 60 is supported by a base 61 fixed to the main body base 16, a receiving ring 62 attached to the base 61, and an outer periphery of the receiving ring 62 so as to be movable up and down, and a dicing sheet T is affixed thereto. A press ring 63 that presses the frame F downward, driving means such as an air cylinder (not shown) that moves the press ring 63 up and down, a press plate 65 that is a cylindrical member whose outer diameter is slightly larger than the wafer W, and the press plate 65 It is comprised with drive means, such as an air cylinder which is not shown in figure which moves up and down.

  The embossing plate 65 is not necessarily a solid columnar member, and may be a hollow cylindrical member.

  Although not shown in FIG. 3, the expand ring 64 shown in FIG. 1 and the like is supplied from the expand ring storage unit 92 by the expand ring transport means 93. Details of the expanding ring 64 will be described later.

  The expanding unit 60 is provided with inspection means 70 for confirming the state of the wafer W. In the inspection means 70, the illumination light emitted from the light source 71 irradiates the wafer W through an optical system such as a collimator lens 72, a half mirror 73, a condensation lens 74, and the like.

  Next, the operation of the dicing apparatus 10 configured as described above will be described. The wafer W mounted on the ring-shaped frame F via the dicing sheet T is pulled out from the cassette stored in the cassette storage unit 90 by a clamper provided in the elevator 91, and is transferred from the laser dicing unit 40 by the transport unit 61. It is transported onto the XZθ table 11 and held by suction on the suction stage 13.

  A circuit pattern formed on the surface of the wafer W sucked and held on the suction stage 13 is first imaged by the CCD camera 35, and the θ direction alignment and XY are performed by the alignment means provided in the image processing unit 38 and the control unit 50. Directional positioning is made.

  When the alignment is completed, the XZθ table 11 moves in the X direction, and laser light is incident along the dicing street of the wafer W. Since the condensing point of the laser light incident from the surface of the wafer W is set inside the thickness direction of the wafer W, the energy of the laser light transmitted through the surface of the wafer is concentrated at the condensing point inside the wafer. In the vicinity of the condensing point inside the wafer W, modified regions such as a crack region due to multiphoton absorption, a melting region, and a refractive index changing region are formed. As a result, the balance of intermolecular force is lost, and the wafer is cleaved naturally or by applying a slight external force.

  When the formation of the modified region of one line is completed, the Y table to which the laser optical unit 20 is attached is sent in the 1 index Y direction, and the laser beam is incident along the next dicing street, and the modified inside the wafer. A region is formed.

  When the modified region formation is performed for all dicing streets in one direction, the Zθ table 15 is rotated by 90 °, and the modified region formation is also performed for all dicing streets orthogonal to the previous dicing street.

  The wafer W on which all the dicing streets have been subjected to laser dicing for forming a modified region therein is transported to the expanding unit 60 by the transporting unit 61 and placed on the receiving ring 62 provided in the expanding unit 60. Set. At this time, unlike the state shown in FIG. 3, the embossing plate 65 is located at the descending end, and the press ring 63 is located at the ascending end. Accordingly, no tension is applied to the dicing sheet T.

  In this state, the press ring 63 descends to press the frame F and fix it on the receiving ring 62.

  In the expanded portion 60, the internal modified region formation state of the wafer W is confirmed by the inspection unit 70. The confirmation is performed by capturing an image inside the wafer while scanning the infrared light from the light source 71 with the X movement table 82 and the Y movement table 81. The reformed region formation state can be confirmed on the screen displayed on the television monitor 36, and pass / fail is automatically determined by a reformed region formation state determination unit (not shown) provided in the control unit 50. The determination result is fed back to the irradiation condition of the laser beam L.

  When the reformed region formation state is confirmed, the die pressing plate 65 next rises in the direction of the thick arrow in FIG. 3 to push up the dicing sheet T and expand the dicing sheet T. At this time, since the outer peripheral edge 65A on the upper surface of the embossing plate 65 is chamfered in an arc shape, the dicing sheet T is expanded smoothly, and the interval between the individual chips C is expanded.

  Next, the inspection unit 70 images the surfaces of the plurality of chips C, C,... And inspects the expanded state. This inspection is performed by scanning the inspection means 70 over the entire surface of the wafer W using an X movement table and a Y movement table (not shown). After the captured image is processed by the image processing unit 38, the image data is stored in the control unit. 50.

  The control unit 50 displays the expanded state on the television monitor 36 and automatically determines whether or not the chip interval has been expanded by a predetermined amount. This determination result is also fed back, and the amount of elevation of the embossing plate 65 is controlled. Also, the chipping size of the peripheral edge of the chip C is checked.

  Next, as shown in a cross-sectional view in FIG. 4A, an expanding ring 64 is supplied from above the dicing sheet T in an expanded state. The inner peripheral portion of the expand ring 64 is bonded to the dicing sheet T. As a result, the expanding ring 64 and the dicing sheet T are integrated, and the expanded state of the dicing sheet T is maintained even in the state where the expansion of the dicing sheet T is released (the die pressing plate 65 is lowered).

  Next, as shown in a cross-sectional view in FIG. 4B, the embossing plate 65 is lowered, and then the expand ring 64 is lowered and fitted to the inner peripheral portion of the frame F. Thereby, the expand ring 64 and the frame F are integrated. FIG. 5 is a partially enlarged sectional view showing this state, and shows the expanding ring 64 and the left side portion of the frame F. FIG.

  As shown in FIG. 5, a slight amount of protrusion 64A is formed on the lower surface of the outer periphery of the expand ring 64, and a stopper 64B having an outer diameter larger than that of the protrusion 64A is formed on the upper surface of the outer periphery of the expand ring 64. Is formed. With such a configuration, when the expand ring 64 is lowered, the protrusion 64A gets over the inner peripheral portion of the frame F, and the expand ring 64 is fitted to the inner peripheral portion of the frame F. Lowering is prevented. Thereby, the expand ring 64 and the frame F are integrated.

  As shown in FIG. 5, in this state, the left end of the dicing sheet T is bonded to the frame F, and the portion shown in FIG. 4A is bonded to the expanding ring 64. A slack is formed between them. FIG. 6 is a top view of the state shown in FIG. 4B, and shows the positional relationship among the wafer W, the dicing sheet T, the expand ring 64, and the frame F in this state.

  4 and 6 described above, the wafer W is illustrated in a simplified manner. However, in any state, the wafer W is expanded and divided into a plurality of chips C, C,.

  After the processing in the expanding unit 60 is finished, the individual chips C, C,... As they are stuck on the dicing sheet T are carried out from the expanding unit 60 together with the frame F by the conveying means. Next, the elevator 91 returns the cassette to its original position.

  In this way, the wafers W housed in the cassette are sequentially diced by the laser dicing unit 40, and then the state of formation of the modified region formed inside is confirmed by the expanding unit 60, expanded, and the expanded state is further increased. It is confirmed. For this reason, the interval between the chips C on the dicing sheet T is stably expanded by a predetermined amount.

  Further, when the laser dicing of one wafer W is completed and the wafer W is transferred from the laser dicing unit 40 to the expanding unit 60, the next wafer W is transferred into the laser dicing unit 40 again. Therefore, since the confirmation of the modified region formation state and the expanded state confirmation are performed when the next wafer W is laser-diced, the state of the wafer W can be confirmed without reducing the throughput of the dicing apparatus 10.

  According to the embodiment of the present invention described above, the expanded state of the dicing sheet T can be easily maintained in a state where the distance between the chips C and C is widened. As a result, it is possible to expand the wafer W with improved yield.

  And since it is the structure which fits the expand ring 64 to the internal-diameter part of the flame | frame F, both connection state becomes favorable, and compactization (especially thickness reduction) can be achieved. If it is the frame F etc. of such a state, it can return to the original position of a cassette, and it is very convenient also on a process.

  Next, another embodiment (second embodiment) of the present invention will be described. The description of the same or similar devices and members as those in the first embodiment is omitted. In the present embodiment, the expanding ring 164 is formed so that the outer diameter is larger than the inner diameter of the frame F. Hereinafter, the cross-sectional view shown in FIGS. 7 and 8 will be described. 7 corresponds to FIG. 4 of the first embodiment, and FIG. 8 corresponds to FIG. 5 of the first embodiment.

  As shown in the cross-sectional view of FIG. 7A after the expanded portion 60 confirms the formation state of the modified region inside the wafer W, the dicing sheet T is expanded, and the expanded state is determined by the control unit 50. The expanded ring 164 is supplied from above the dicing sheet T in the expanded state.

  The inner peripheral portion of the expand ring 164 is bonded to the dicing sheet T. As a result, the expanding ring 164 and the dicing sheet T are integrated, and the expanded state of the dicing sheet T is maintained even in the state where the expansion of the dicing sheet T is released (the die pressing plate 65 is lowered).

  Next, as shown in a cross-sectional view in FIG. 7B, the embossing plate 65 is lowered, and then the expand ring 164 is lowered to adhere to the inner peripheral portion of the frame F. An adhesive or a pressure-sensitive adhesive (including a double-sided adhesive sheet) is formed (applied or the like) in advance on the lower surface of the outer peripheral portion of the expand ring 164 or the upper surface of the inner peripheral portion of the frame F. The ring 164 and the frame F are integrated. FIG. 8 is a partial enlarged cross-sectional view showing this state, and shows the expanding ring 164 and the left side portion of the frame F. FIG.

  As shown in FIG. 8, in this state, the dicing sheet T is bonded to the frame F at the left end, and the portion shown in FIG. 7A is bonded to the expanding ring 164. A slack is formed between them.

  Even with such a configuration, the same effects as those of the first embodiment described above can be obtained.

  As mentioned above, although the embodiment of the expanding method, apparatus, and dicing apparatus according to the present invention has been described, the present invention is not limited to the above-described embodiment, and various aspects can be adopted.

  For example, in the present embodiment, the laser dicing unit 40 that forms a modified region inside the wafer W using laser light is used as the dicing unit, but the present invention is not limited to this, and a dicing blade is used. A dicing unit may be used. In this case, the inspection unit 70 does not need to confirm the formation state of the modified region, and therefore the light source 71 does not need infrared light and may be a white light source.

  In this embodiment, the wafer W is confirmed to have an internal modified region formed by the inspection means 70. However, such an inspection means 70 is not an essential configuration, and the apparatus is simplified or inexpensive. If it is intended, it can be omitted.

  Furthermore, in the second embodiment, in the expanded portion 60, the lower surface of the outer peripheral portion of the expand ring 164 and the upper surface of the inner peripheral portion of the frame F are bonded, but other modes can also be adopted. For example, the dicing sheet T is expanded so as to protrude downward, and in this state, the upper surface of the inner peripheral portion of the expanding ring 164 is adhered to the rear surface of the dicing sheet T, and then the upper surface of the outer peripheral portion of the expanding ring 164 is attached. A mode of adhering the lower surface of the inner peripheral portion of the frame F can be taken, and the same effect can be obtained.

Schematic configuration diagram of a dicing apparatus according to the present invention Conceptual diagram explaining the laser dicing unit Conceptual diagram explaining the expanded section Cross section of the main part of the expanded part Partial enlarged sectional view of expanding ring, frame, etc. Top view showing wafer mounted on frame Cross section of the main part of the expanded part Partial enlarged sectional view of expanding ring, frame, etc. Perspective view showing wafer mounted on frame

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Dicing apparatus, 11 ... XZ (theta) table, 20 ... Laser optical part, 30 ... Observation optical part, 40 ... Laser dicing part, 50 ... Control part, 60 ... Expanding part, 64 ... Expanding ring, 70 ... Inspection means, C ... Chip, F ... Frame, L ... Laser light, P ... Modified region, T ... Dicing sheet, W ... Wafer

Claims (6)

The first annular member having an inner diameter larger than the outer diameter of the wafer is attached to the back surface of the wafer in which a linear modified region along the planned dividing line is formed on the front surface or inside. A sticking step for locking the periphery of the adhesive sheet;
An expanding step in which tension is applied to the pressure-sensitive adhesive sheet to expand it;
Have a larger inner diameter than the outer diameter of the wafer, thereby adhering the said adhesive sheet stretched on the inner peripheral portion of the second annular member having an outer diameter substantially equal to the inner diameter of the first annular member, the An extended holding step of maintaining the stretched state of the adhesive sheet by locking the second annular member to the first annular member ,
In the expanding step, an embossing plate having substantially the same plane size as the wafer is disposed on the opposite side of the adhesive sheet to the side on which the wafer is adhered, and the embossing plate is pressed against the adhesive sheet. Stretch the adhesive sheet,
In the extended holding step, the first protrusion formed on the surface side to which the adhesive sheet is affixed among the outer peripheral surfaces of the second annular member, and the opposite side to the surface to which the adhesive sheet is affixed. An expanding method characterized in that the second annular member is fitted to the inner diameter portion of the first annular member by sandwiching the first annular member with the second protrusion . The first annular member having an inner diameter larger than the outer diameter of the wafer is attached to the back surface of the wafer in which a linear modified region along the planned dividing line is formed on the front surface or inside. A sticking step for locking the periphery of the adhesive sheet;
An expanding step in which tension is applied to the pressure-sensitive adhesive sheet to expand it;
Have a larger inner diameter than the outer diameter of the wafer, thereby adhering the adhesive sheet stretched on the inner peripheral portion of the second annular member having an inner diameter larger than the outer diameter of said first annular member, said An extended holding step of maintaining the stretched state of the pressure-sensitive adhesive sheet by locking the annular member of 2 to the first annular member ,
In the expanding step, an embossing plate having substantially the same plane size as the wafer is disposed on the opposite side of the adhesive sheet to the side on which the wafer is adhered, and the embossing plate is pressed against the adhesive sheet. Stretch the adhesive sheet,
In the expanding and holding step, the second annular member is bonded to the side of the inner peripheral portion of the first annular member on the side where the adhesive sheet is not attached . The expanding the wafer is divided into individual chips along the dividing line in step, expanding method according to claim 1 or 2 the individual chips is separated from the adhesive sheet in the extended holding step. A first annular member having an inner diameter greater than the outer diameter of the wafer;
A second annular member having an inner diameter greater than the outer diameter of the wafer and having an outer diameter substantially equal to the inner diameter of the first annular member;
Affixing a pressure sensitive adhesive sheet on the back surface of a wafer having a line-shaped modified region formed along a predetermined dividing line on the front surface or inside, and affixing the peripheral edge of the pressure sensitive adhesive sheet to the first annular member Wearing means,
Expanding means for applying tension to the pressure-sensitive adhesive sheet to expand it;
The pressure-sensitive adhesive sheet was stretched by adhering the stretched pressure-sensitive adhesive sheet to the inner peripheral portion of the second annular member and engaging the second annular member with the first annular member. Extended holding means for maintaining the state;
With
The expanding means arranges an embossing plate having a plane size substantially the same as that of the wafer on the opposite side of the pressure-sensitive adhesive sheet from which the wafer is adhered, and presses the embossing plate against the pressure-sensitive adhesive sheet. Stretch the adhesive sheet,
The expansion holding means is formed on a side opposite to the surface on which the pressure-sensitive adhesive sheet is adhered, and a first protrusion formed on the surface of the outer surface of the second annular member on which the pressure-sensitive adhesive sheet is adhered. An expanding apparatus, wherein the second annular member is fitted into an inner diameter portion of the first annular member by sandwiching the first annular member with the second protrusion . A first annular member having an inner diameter greater than the outer diameter of the wafer;
A second annular member having an inner diameter greater than the outer diameter of the wafer and having an outer diameter greater than the inner diameter of the first annular member;
Affixing a pressure sensitive adhesive sheet on the back surface of a wafer having a line-shaped modified region formed along a predetermined dividing line on the front surface or inside, and affixing the peripheral edge of the pressure sensitive adhesive sheet to the first annular member Wearing means,
Expanding means for applying tension to the pressure-sensitive adhesive sheet to expand it;
The pressure-sensitive adhesive sheet was stretched by adhering the stretched pressure-sensitive adhesive sheet to the inner peripheral portion of the second annular member and engaging the second annular member with the first annular member. Extended holding means for maintaining the state;
With
The expanding means arranges an embossing plate having a plane size substantially the same as that of the wafer on the opposite side of the pressure-sensitive adhesive sheet from which the wafer is adhered, and presses the embossing plate against the pressure-sensitive adhesive sheet. Stretch the adhesive sheet,
The expanding and holding means is configured to adhere the second annular member to a side of the inner peripheral portion of the first annular member on the side where the adhesive sheet is not attached . A dicing means for forming a linear modified region along the planned dividing line on the surface or inside of the wafer;
The expanding device according to claim 4 or 5 ,
Dicing apparatus, comprising a conveying means for transporting the wafers between the wafer storage means for storing the previous SL wafer wherein the dicing unit, expanding apparatus and wafer storage means.

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