JP4827608B2 - 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法 - Google Patents

堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法 Download PDF

Info

Publication number
JP4827608B2
JP4827608B2 JP2006140138A JP2006140138A JP4827608B2 JP 4827608 B2 JP4827608 B2 JP 4827608B2 JP 2006140138 A JP2006140138 A JP 2006140138A JP 2006140138 A JP2006140138 A JP 2006140138A JP 4827608 B2 JP4827608 B2 JP 4827608B2
Authority
JP
Japan
Prior art keywords
deposited film
exhaust
film forming
substrate
reaction vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006140138A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007308775A5 (enExample
JP2007308775A (ja
Inventor
康夫 小島
寿康 白砂
誠 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2006140138A priority Critical patent/JP4827608B2/ja
Publication of JP2007308775A publication Critical patent/JP2007308775A/ja
Publication of JP2007308775A5 publication Critical patent/JP2007308775A5/ja
Application granted granted Critical
Publication of JP4827608B2 publication Critical patent/JP4827608B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP2006140138A 2006-05-19 2006-05-19 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法 Expired - Fee Related JP4827608B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006140138A JP4827608B2 (ja) 2006-05-19 2006-05-19 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006140138A JP4827608B2 (ja) 2006-05-19 2006-05-19 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法

Publications (3)

Publication Number Publication Date
JP2007308775A JP2007308775A (ja) 2007-11-29
JP2007308775A5 JP2007308775A5 (enExample) 2009-06-25
JP4827608B2 true JP4827608B2 (ja) 2011-11-30

Family

ID=38841908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006140138A Expired - Fee Related JP4827608B2 (ja) 2006-05-19 2006-05-19 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法

Country Status (1)

Country Link
JP (1) JP4827608B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5555077B2 (ja) * 2010-07-05 2014-07-23 キヤノン株式会社 処理容器の設置方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59170259A (ja) * 1983-03-17 1984-09-26 Minolta Camera Co Ltd 容量結合型グロ−放電分解装置
JPH0334061A (ja) * 1989-06-30 1991-02-14 Mitsubishi Electric Corp 文書編集方式
JPH09330884A (ja) * 1996-06-07 1997-12-22 Sony Corp エピタキシャル成長装置

Also Published As

Publication number Publication date
JP2007308775A (ja) 2007-11-29

Similar Documents

Publication Publication Date Title
JP4827608B2 (ja) 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法
JP2010065238A (ja) 堆積膜形成装置および堆積膜形成方法
JP2009030122A (ja) 堆積膜形成装置、堆積膜形成方法および電子写真感光体の形成方法
JP5398368B2 (ja) 堆積膜成形装置および電子写真感光体の製造方法
JP4614380B2 (ja) 真空処理装置
JP5941365B2 (ja) 電子写真感光体の製造方法
JP2009287064A (ja) 触媒ｃｖｄ装置
JP2008214712A (ja) 堆積膜形成装置
JP2010168611A (ja) 堆積膜形成装置
JP2005307304A (ja) 堆積膜形成方法および堆積膜形成装置
JP5618617B2 (ja) 電子写真感光体の製造装置
JP2006104534A (ja) プラズマｃｖｄによる堆積膜形成方法及び堆積膜形成装置
JP2009215618A (ja) 触媒ｃｖｄ装置、触媒ｃｖｄ装置に用いる触媒体の処理方法、及び、触媒ｃｖｄ装置を用いた成膜方法
JP2007113065A (ja) 堆積膜形成方法
JP2009108370A (ja) 堆積膜形成装置
JP2007023325A (ja) 真空処理装置
JP2009108385A (ja) 堆積膜形成装置
JP2013033115A (ja) 電子写真感光体の製造装置
JP2017003862A (ja) 電子写真感光体の製造方法
JP5852378B2 (ja) 堆積膜形成方法および電子写真感光体の製造方法
JP2009287065A (ja) 触媒ｃｖｄ装置及び堆積膜形成方法
JP2004332027A (ja) 堆積膜形成方法
JP2004119705A (ja) ガス供給装置および真空処理装置
JP2001323375A (ja) プラズマｃｖｄ法による堆積膜形成方法及び装置
JP2010013717A (ja) 堆積膜形成装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090508

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090508

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110623

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110629

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110802

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110907

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110913

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140922

Year of fee payment: 3

R151 Written notification of patent or utility model registration

Ref document number: 4827608

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140922

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees