JP4825966B2 - Coarse / fine positioning device - Google Patents
Coarse / fine positioning device Download PDFInfo
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- JP4825966B2 JP4825966B2 JP2005040478A JP2005040478A JP4825966B2 JP 4825966 B2 JP4825966 B2 JP 4825966B2 JP 2005040478 A JP2005040478 A JP 2005040478A JP 2005040478 A JP2005040478 A JP 2005040478A JP 4825966 B2 JP4825966 B2 JP 4825966B2
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Description
本発明は、同軸上に２個のモータと減速機を配して、粗動および微動をしながら軸上の対象物を位置決めする粗動微動位置決め装置に関する。 The present invention relates to a coarse movement / fine movement positioning device that positions two objects on a shaft while coaxially arranging two motors and a speed reducer and performing coarse movement and fine movement.
半導体産業や工作機械やバイオケミカル産業を始めとする位置決め装置を動作機構に用いる産業では、ナノメートルの位置決め精度と位置決め時間の短縮が要求されている。しかし、位置決め精度を向上させると、位置決めを完了するまでの所要時間が長くなり、生産性の向上や、測定評価時間の短縮には悪影響を及ぼす。これを解決するために、本発明は、粗動による高速位置決めと微動による高精度位置決めを両立させた機構により、位置決め時間の短縮と同時に高精度な位置決めを実現することを目的とした。従来の位置決め機構としては、モータに減速機を取付けて単に分解能を上げただけの位置決め装置や、モータと圧電素子との組合せにより、モータを用いて粗動位置決めし、圧電素子を用いて微動位置決めする装置が市販されている。また、圧電素子を用いてテーブルの位置決めをする従来技術としては、特許文献１に記載の微動テーブル装置がある。
しかしながら、上述したように、モータに減速機を取付けて単に分解能を上げただけの位置決め装置では、高分解能の位置決めは達成できるが、位置決めに要する時間の短縮は望めない。一方、モータと圧電素子との組合せにより、モータを用いた粗動位置決めと、圧電素子を用いた微動位置決めとを組み合わせた装置は、モータの制御装置と圧電素子の制御装置がそれぞれ必要となる。また、微動操作は、粗動操作により一定の閾値内に装置が位置決めされてから微動制御が行われるため、制御自体が複雑となり、さらに微動時の位置決め時間も多く要するという課題があった。そこで本発明は、位置決め時間を短縮すると同時に高精度な位置決めを可能にする粗動微動位置決め装置を提案することを目的とした。 However, as described above, with a positioning device in which a reduction gear is attached to a motor and the resolution is simply increased, high-resolution positioning can be achieved, but a reduction in time required for positioning cannot be expected. On the other hand, an apparatus that combines coarse movement positioning using a motor and fine movement positioning using a piezoelectric element by combining a motor and a piezoelectric element requires a motor control device and a piezoelectric element control device, respectively. In addition, since the fine movement operation is performed after the apparatus is positioned within a certain threshold value by the coarse movement operation, the control itself is complicated, and there is a problem that more positioning time is required during the fine movement. SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to propose a coarse / fine movement positioning device that shortens positioning time and enables high-accuracy positioning.
上記課題を解決するために、本発明に係る粗動微動位置決め装置は、ナットを介してテーブルに接続された送りねじと、入力軸と出力軸が同軸上に配置された減速機であって前記送りねじの一端に出力軸が接続された減速機と、該減速機の入力軸に接続された微動送り用のモータと、出力軸が貫通した中空であって該中空部に前記減速機のケーシング部を同軸上に嵌着保持した粗動送り用の中空モータとを備えたことを特徴とする。なお、前記減速機は波動歯車減速機とすることが好ましい。 In order to solve the above problems, a coarse / fine movement positioning device according to the present invention is a speed reducer in which a feed screw connected to a table via a nut, and an input shaft and an output shaft are arranged coaxially. A speed reducer having an output shaft connected to one end of a feed screw, a fine feed motor connected to the input shaft of the speed reducer, and a hollow through which the output shaft penetrates, the casing of the speed reducer being in the hollow portion And a coarse motor for coarse motion feed having a portion fitted and held on the same axis. The speed reducer is preferably a wave gear speed reducer.
本発明は、モータ２個と減速機を組み合わせたことにより、制御装置の構成は、モータを駆動させる制御装置だけとなり、機構が簡略化される。また、中空モータの回転数と減速機の入力軸を回転させるモータの回転数を制御することにより、加速・減速を任意に設定できるので、滑らかな動作を行うことが可能となる。 In the present invention, by combining the two motors and the speed reducer, the configuration of the control device is only the control device that drives the motor, and the mechanism is simplified. Further, by controlling the number of revolutions of the hollow motor and the number of revolutions of the motor that rotates the input shaft of the speed reducer, acceleration / deceleration can be arbitrarily set, so that smooth operation can be performed.
以上述べたように本発明の粗動微動位置決め装置によれば、従来実現できなかった粗動・微動動作を複合して行うことが可能となり、かつ、従来よりも高速で位置決め動作を完了できる。これにより、半導体産業、工作機械、バイオケミカル産業等の産業界において、位置決め時間の短縮により、生産性向上や測定評価時間の短縮の実現が期待できる。 As described above, according to the coarse movement / fine movement positioning apparatus of the present invention, it is possible to perform a combination of coarse movement / fine movement operation that could not be realized in the past, and complete positioning operation at a higher speed than in the past. As a result, in industries such as the semiconductor industry, machine tool, biochemical industry, etc., it can be expected to improve productivity and shorten measurement evaluation time by shortening positioning time.
以下、図に基づいて本発明の実施形態を説明する。
本発明による粗動微動位置決め装置は、図１および図２に示すように、マニュアルノブ付ステッピングモータ１、波動歯車減速機４（商品名ハーモニックドライブ、以下ＨＤと略称する。）を回転軸に取付けた中空ステッピングモータ２、ボールネジ駆動機構３から構成される。ＨＤ４の出力軸はボールネジ駆動機構３にカップリングにより接続されている。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
As shown in FIGS. 1 and 2, the coarse / fine positioning apparatus according to the present invention has a stepping motor 1 with a manual knob and a wave gear reducer 4 (trade name harmonic drive, hereinafter abbreviated as HD) attached to a rotating shaft. And a hollow stepping motor 2 and a ball screw drive mechanism 3. The output shaft of the HD 4 is connected to the ball screw drive mechanism 3 by coupling.
まず、モータ１をＭ1ｒｐｍで回転させるとＨＤ４の入力軸に回転が伝わり、所定の減速比ｄを介してＨＤ４の出力軸が−ｄ・M1だけ逆回転する。このＨＤ４の出力軸はボールネジ駆動機構３と連結されているので、テーブルはこの機構を制御することにより位置決めされる。ここで、中空モータ２の回転軸はＨＤ４のアウターケースと連結されており、中空モータ２が静止している場合は、微動動作となりｎｍレベルの精密位置決めが可能となる。 First, when the motor 1 is rotated at M 1 rpm, the rotation is transmitted to the input shaft of the HD 4 and the output shaft of the HD 4 is reversely rotated by −d · M 1 through a predetermined reduction ratio d. Since the output shaft of the HD 4 is connected to the ball screw driving mechanism 3, the table is positioned by controlling this mechanism. Here, the rotating shaft of the hollow motor 2 is connected to the outer case of the HD 4, and when the hollow motor 2 is stationary, fine movement operation is performed, and nm level precision positioning is possible.
一方、中空モータ２がM2 ｒｐｍで回転するとＨＤ４の入力軸とアウターケースの回転の相対運動により、ＨＤ４の出力軸はM2−ｄ・M1ｒｐｍの回転数となりボールねじ駆動機構３に回転が伝わり、位置決め動作となる。このとき、ｄは一般的には、１／３０〜１／１００程度であるため、ＨＤ４の出力軸の回転数は、概ねM2に近くなり、粗動運動が得られ高速位置決めが可能となる。また、回転数M2−ｄ・M1ｒｐｍは、従来の粗動・微動の区別をすることなく粗動から微動への連続的な制御が可能となることも示している。 On the other hand, when the hollow motor 2 rotates at M 2 rpm, the output shaft of the HD 4 becomes a rotation speed of M 2 -d · M 1 rpm due to the relative movement of the input shaft of the HD 4 and the rotation of the outer case, and rotates to the ball screw drive mechanism 3. Is transmitted and positioning operation is started. At this time, since d is generally about 1/30 to 1/100, the rotational speed of the output shaft of the HD4 is almost close to M 2 , so that coarse motion is obtained and high-speed positioning is possible. . Further, the rotation speed M 2 -d · M 1 rpm indicates that continuous control from coarse movement to fine movement can be performed without distinguishing between conventional coarse movement and fine movement.
次に、実施例により得られた制御結果について述べる。図３は、粗動時の位置決め制御結果を示す。図より、０．１ｍｍごとに位置決めが行われていることが分かる。つぎに、図４は、微動時の位置決め制御結果を示す。図より、１ｎｍの位置決め分解能により、位置決めが行われていることが確認できる。また、図５には、粗動のみにより位置決め制御結果（点線）と、粗・微動動作を複合して行った場合の位置決め制御結果(実線)を示す。これによれば、本発明により、従来の微動のみの位置決め機構に比較して、位置決め時間が約１／２に短縮されたことが分かる。なお、実施形態では、減速機として波動歯車減速機を用いたが、他に遊星歯車減速機を用いることも可能である。 Next, the control results obtained by the examples will be described. FIG. 3 shows the positioning control result during coarse movement. From the figure, it can be seen that positioning is performed every 0.1 mm. Next, FIG. 4 shows the positioning control result during fine movement. From the figure, it can be confirmed that positioning is performed with a positioning resolution of 1 nm. FIG. 5 shows a positioning control result (dotted line) by only coarse movement and a positioning control result (solid line) when the coarse / fine movement operation is performed in combination. According to this, it can be seen that the positioning time is shortened to about ½ according to the present invention as compared with the conventional fine movement only positioning mechanism. In the embodiment, the wave gear reducer is used as the reducer, but it is also possible to use a planetary gear reducer.
本発明は、半導体産業、工作機械、バイオケミカル産業等に利用可能である。 The present invention is applicable to the semiconductor industry, machine tool, biochemical industry, and the like.
１ マニュアルノブ付ステッピングモータ
２ 中空ステッピングモータ
３ ボールネジ駆動機構
４ 波動歯車減速機
1 Stepping motor with manual knob 2 Hollow stepping motor 3 Ball screw drive mechanism 4 Wave gear reducer
Claims (2)
入力軸と出力軸が同軸状に配置された減速機であって前記送りねじの一端に出力軸が接続された減速機と、
前記減速機の入力軸に接続された微動送り用のモータと、
出力軸が貫通した中空部であって該中空部に前記減速機のケーシング部を同軸状に嵌着保持するとともに前記微動送り用のモータと同時に駆動および制御される粗動送り用の中空モータと、
を備えたことを特徴とする粗動微動位置決め装置。 A lead screw connected to the table via a nut;
A reduction gear input shaft and the output shaft is the output shaft at one end of the feed screw a reduction gear that is disposed coaxially are connected,
A motor for connected micromotion feed to the input shaft of the speed reducer,
A hollow motor for coarse feed the output shaft is the motor simultaneously with driving and control for said fine feed while fitting holding the casing portion of the reduction gear hollow section a hollow section which penetrates coaxially ,
A coarse / fine movement positioning device.
前記減速機は波動歯車減速機であることを特徴とする粗動微動位置決め装置。 The coarse / fine movement positioning device according to claim 1,
2. The coarse / fine movement positioning device according to claim 1, wherein the reduction gear is a wave gear reduction gear.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005040478A JP4825966B2 (en) | 2005-02-17 | 2005-02-17 | Coarse / fine positioning device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005040478A JP4825966B2 (en) | 2005-02-17 | 2005-02-17 | Coarse / fine positioning device |
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| Publication Number | Publication Date |
|---|---|
| JP2006226811A JP2006226811A (en) | 2006-08-31 |
| JP4825966B2 true JP4825966B2 (en) | 2011-11-30 |
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| JP2005040478A Active JP4825966B2 (en) | 2005-02-17 | 2005-02-17 | Coarse / fine positioning device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103137217A (en) * | 2013-02-02 | 2013-06-05 | 哈尔滨工业大学 | Macro and micro double-stage final motion adjusting device based on harmonic reducer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018102589A1 (en) * | 2018-02-06 | 2019-08-08 | Trumpf Werkzeugmaschinen Gmbh + Co. Kg | A drive arrangement for moving a workpiece as well as a machine arrangement provided with such a drive arrangement for machining a workpiece |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH09322591A (en) * | 1996-05-30 | 1997-12-12 | Fujitsu Ltd | Motor mechanism and inspection device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103137217A (en) * | 2013-02-02 | 2013-06-05 | 哈尔滨工业大学 | Macro and micro double-stage final motion adjusting device based on harmonic reducer |
| CN103137217B (en) * | 2013-02-02 | 2015-11-25 | 哈尔滨工业大学 | Based on grand micro-two-stage micro-positioning regulators device of harmonic speed reducer |
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| JP2006226811A (en) | 2006-08-31 |
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