JP4813979B2 - Through-type current sensor - Google Patents

Description

  The present invention relates to a technology relating to a through-type current sensor having a built-in fluxgate sensor element.

FIG. 11 is an exploded perspective view of a fluxgate sensor disclosed in Patent Document 1 as a magnetic sensor for detecting geomagnetism, and the fluxgate sensor is manufactured using a printed circuit board manufacturing technique.
JP 2003-270310 A

  According to the figure, the fluxgate sensor 1 includes a thin plate-like magnetic body 2, a first laminated body 3 in which an excitation winding layer 5 is formed and laminated on the lower surface side of the magnetic body 2, and the upper surface of the magnetic body 2. A second laminated body 4 laminated on the side, and a pair of third laminated bodies 6 and 6 formed on the lower surface of the first laminated body 3 and the upper surface of the second laminated body 4 with the detection winding layer 7 formed thereon It is formed with.

  In this case, the upper and lower exciting winding layers 5 arranged in a plurality of parallel straight lines are made conductive through the via holes 9 formed in the first stacked body 3 and the second stacked body 4, One excitation winding pattern connected in a zigzag manner is formed to surround the magnetic body 2.

  In addition, the upper and lower detection winding layers 7 arranged in a plurality of parallel straight lines are conducted through through holes 8 penetrating the first stacked body 3, the second stacked body 4, and the third stacked body 6. Thus, one detection winding pattern connected in a zigzag shape is formed to surround the magnetic body 2 and the detection winding layer 5.

  For this reason, since the fluxgate sensor 1 can form an excitation winding pattern and a detection winding pattern by a printed circuit board manufacturing technique, a small and inexpensive one can be manufactured in large quantities.

  On the other hand, FIG. 12 shows an example of a conventional through-type current sensor. The main core 102 has a substantially annular shape and is discontinuously formed with a gap portion 103 interposed in a part thereof. It includes at least a magnetic detection element 104 formed of a Hall element or the like disposed via a gap portion 103 of the main core 102 and a feedback winding 105 wound around the main core 102.

  Then, a magnetic shield 106 made of a magnetic material is disposed outside the main core 102, and then a negative feedback AC / DC current is obtained by combining the magnetic detection element driving circuit 107 and the electric circuit 108 for supplying a feedback current. The sensor 101 is configured.

  For this reason, according to the current sensor 101 shown in FIG. 12, in addition to obtaining a voltage output proportional to the input current from the conductor L to be measured, it is possible to detect a highly linear current by its negative feedback structure. The shield 106 can block the influence of the external magnetic field.

  By the way, the fluxgate sensor 1 shown in FIG. 11 employs a structure in which the magnetic material 2 is sandwiched directly between the first laminate 3 and the second laminate 4. The two laminates 4 are directly affected by the stress generated when the laminate 4 is bent. As a result, for example, when the magnetic material 2 is formed using a material that is weak against stress such as permalloy, there is a disadvantage that the sensor sensitivity is greatly reduced.

  On the other hand, in the case of the current sensor 101 shown in FIG. 12, since the magnetic detection element 104 is arranged under an asymmetric structure, the sensitivity changes depending on the position of the conductor L to be measured, and the main current is caused by a large current. When the core 102 becomes magnetized, the residual magnetic flux leaks from the gap portion 103, and this is detected by the magnetic detection element 104 and output as an offset signal. Therefore, the main core 102 is demagnetized every time inspection is performed. It was necessary to keep.

  Further, since the magnetic shield 106 is formed using a magnetic material, a part of the magnetic flux that should be detected by the main core 102 with the feedback winding 105 flows to the magnetic shield 106 side, and its detection sensitivity. In addition to the effect of decreasing the current, it acts as an inductance for the conductor L to be measured, so that an insertion impedance is given to the conductor L to be measured, and it becomes difficult for current to flow, or heat is generated by high frequency high current and burns out. There was a problem such as fear.

  In view of the above problems of the prior art, the present invention simplifies the butting structure of one side core part and the other side core part constituting the main core main core made of a ferromagnetic material, and provides a magnetic shield characteristic. At the same time, the influence of the introduction position of the conductor to be measured and the influence of the external magnetic field are reduced, the output of the offset signal is eliminated, the conductor to be measured is affected, and heat is generated at high frequency and high current. An object of the present invention is to provide a through-type current sensor with reduced fear.

  The present invention has been made in order to achieve the above-described object, and each has an annular shape on at least one of the opposing surfaces of the one-side core portion and the other-side core portion that are freely divided into two to meet each other. A fluxgate sensor element incorporating a ring core unit is housed in the formed groove portion to form a main core, and a mutual boundary surface when the one side core portion and the other side core portion are face-to-face matched. The main feature is that a magnetic material layer is provided on the outer surface side of the main core so as to be shielded.

  In this case, the magnetic material layer is preferably provided separately on the inner peripheral surface and the outer peripheral surface of the main core.

  Further, in the present invention, the ring core unit includes a ring core made of a magnetic material, an annular case body made of an insulating base material having an annular groove portion that accommodates the ring core, and an insulating base that covers the annular groove portion side of the annular case body. The ring core is formed smaller than any of the groove width and the groove depth of the annular groove portion of the annular case body, and the annular lid body is substantially the same as the annular case body. It is preferable that the ring core is accommodated in the annular groove portion and covered with a concentric circular positional relationship.

  In this case, it is preferable that the annular lid is applied to the ring core in a non-contact or light contact. Further, the annular case body has a substantially concave shape in cross section, and the annular lid body has a substantially convex shape in cross section, and its protruding portion is positioned in the annular groove portion so as to face the annular case body side. It can be made to cover. Further, the annular case body includes the annular groove portion in which the ring core is accommodated, and a large annular groove portion formed shallower by interposing a step between the annular groove portion, You may arrange | position in the said large annular groove part so that the said annular groove part may be covered.

On the other hand, in the present invention, the fluxgate sensor element is an annular large-diameter case body that houses the ring core unit, and constitutes an excitation unit on one surface and the other surface that are in a positional relationship that face each other. Conductor pattern rows comprising a plurality of pattern layers, wherein the one-side substrate body and the other-side substrate body are arranged to face each other and arranged separately so as to be in non-contact with each other in the direction intersecting the circumferential direction. The annular large-diameter case is provided on each of the front side surface side of the one side substrate body and the front side surface side of the other side substrate body, and the conductor pattern rows are exposed on the front side surface side. its entirety with intervening body therebetween with laminated fixed to sandwich, in the annular large-diameter casing body periphery and individually corresponding site by penetrating the the one side substrate body and the other side substrate body Formed Continuous and each pattern layer of the front plane side of each pattern layer and the other side substrate of the front plane side of the one side substrate body be sequentially alternately conducted to one linear through the plated through holes were What was formed can be used suitably.

  Further, the flux gate sensor element can be housed in a plurality of layers with an insulating layer interposed in the groove portion of the main core. Further, a feedback winding may be wound around the main core so that the outside is electrostatically shielded.

  According to the present invention, the magnetic material layer is formed on the outer surface side of the main core that houses the fluxgate sensor element in which the ring core unit is housed, and the one-side core that is a constituent member of the magnetic material layer. Since the gap formed between each other when the part and the other side core part are face-to-face matched, while simplifying the butting structure of the one side core part and the other side core part, Magnetic shield characteristics can be improved.

  Further, when the ring core is accommodated in the annular groove portion of the annular case body and covered with the lid, the ring core can be reliably protected from the outside to prevent the deterioration of characteristics. In this case, when the annular lid is applied to the lid without contacting the ring core, it is possible to more effectively prevent the deterioration of characteristics by lowering the possibility that the ring core is subjected to stress. .

  Furthermore, a ring core unit including a ring core accommodated so that the characteristics of the fluxgate sensor element are not deteriorated, and one side substrate body and the other side substrate that are arranged to face each other on one side and the other side on the ring core unit side In the case where at least an excitation unit composed of a body is provided, an excellent performance with no characteristic deterioration can be provided in a small size and at a low price.

  Furthermore, when the fluxgate sensor element, which is a magnetic detection means, is arranged under a circumferentially symmetric structure, the influence of the position of the conductor to be measured and the influence of the external magnetic field may be extremely small. it can. In addition, since there is no gap in the main core, there is no leakage magnetic flux even when magnetized, so that it is possible to eliminate the output as an offset signal. Further, even though the main core functions as a magnetic shield for the fluxgate sensor element, the main core is located inside the feedback winding, so that the influence on the measured conductor side can be eliminated. If the outer side of the feedback winding is electrostatically shielded, the influence on the sensitivity on the main core side and the influence on the conductor to be measured can be eliminated, and heat generation due to high-frequency current is less likely to occur. You can also.

  1 is an exploded perspective view of an example of the present invention, FIG. 2 is an enlarged explanatory view of a main part of the cross-sectional structure after assembly of the example shown in FIG. 1, and FIG. 3 is an evenly wound feedback winding. The expanded sectional view of the AA arrow direction site | part in the example of FIG. 2 provided with a line is each shown.

  According to these drawings, the through-type current sensor 51 includes a fluxgate sensor element 31 and an insulating layer made of an insulating sheet or a thin plate-like vinyl chloride interposed between the fluxgate sensor element 31 or an insulating film. The main core 52 having a groove 53 for storing the two laminated sheets in the same manner as described above, and interposing an insulating layer on both exposed surfaces of the two laminated sheets or attaching an insulating film, and the main core 52 And at least a feedback winding 82 wound around the outer surface 54.

  Of these, the main core 52 formed using a ferromagnetic material such as ferrite or permalloy has an annular shape, and can be divided into two freely matching each other through the opposing surfaces 64 and 74. The one-side core part 63 and the other-side core part 73 are configured.

  In addition, at the central portion of the facing surface 64 of the one-side core portion 63, the one-side groove-shaped portion 65 in which one fluxgate sensor element 31 is accommodated is located in the center in the facing surface 74 of the other-side core portion 73. The other side groove-like part 75 in which the other fluxgate sensor element 31 is accommodated is formed in the circumferential direction in the part, respectively, and these one side groove-like part 65 and the other side groove-like part 75 are made to face-match. The groove 53 is secured. The groove 53 communicates with lead-out grooves 67 and 77 provided to lead out the lead wire 42 included in the fluxgate sensor element 31 to the outside.

  Further, on the facing surface 64 near the inner periphery adjacent to the one-side groove portion 65 of the one-side core portion 63, a one-side convex portion 66 having a surface height higher than that near the outer periphery is provided on the facing surface of the other-side core portion 73. Near the outer periphery of 74, the other side convex part 76 whose surface height is higher than the inner peripheral part adjacent to the other side groove-like part 75 is formed in an annular shape. For this reason, when the one-side core part 63 and the other-side core part 73 are made to face each other, a stepped stepped part 55 that goes in the direction of the groove part 53 is formed between the opposing faces 64 and 74 in the circumferential direction. Will be.

  In this case, the facing surface 64 of the one-side core portion 63 and the facing surface 74 of the other-side core portion 73 are simply formed as shown in FIG. 4 without forming the stepped step portion 55 as shown in FIG. It can also be formed as a flat surface 56.

  Moreover, about each fluxgate sensor element 31 accommodated in the groove | channel part 53 of the main core 52 by overlapping two sheets, according to the example shown in FIG. 6, what was formed using the ring core unit 11 shown in FIG. The other side substrate body 37 side is arranged in a positional relationship in which the other side substrate bodies 37 face each other. In this example, it can be obtained as a differential signal of two cores excited in opposite directions. In addition, when using the flux gate sensor element 31 as another example shown in FIG. 7, it can arrange | position similarly. Further, the two fluxgate sensor elements 31 can be arranged in the same direction as long as they are arranged in a relationship that cancels out the exemplified magnetic flux direction.

  Further, the main core 52 formed in this way has an inner periphery so as to at least shield the gap 57 formed between the one side core portion 63 and the other side core portion 64 when facing each other. The surface 52a and the outer peripheral surface 52b are covered with the magnetic material layer 62 separately.

  In this case, the magnetic material layer 62 is formed by using a metal material having excellent magnetic shielding characteristics such as a tape-like amorphous material, and this is covered with the inner peripheral surface 52a and the outer peripheral surface 52b. desirable.

  The magnetic material layer 62 can also be disposed and covered so that the tape-shaped metal material described above is wound around the entire outer surface 54 of the main core 52 including the inner peripheral surface 52a and the outer peripheral surface 52b.

  Further, the magnetic material layer 62 may be one in which a conductive resin agent is separately applied to the inner peripheral surface 52 a and the outer peripheral surface 52 b to shield the gap 57.

  Further, the feedback winding 82 wound around the outer surface 54 of the main core 52 in which the fluxgate sensor element 31 is housed in the groove 53 is formed, for example, on a wire forming a winding layer 83 as shown in FIG. It is formed by winding evenly with an appropriate number of windings considering frequency characteristics over the entire circumference, such as a four-layer winding with the insulating layer 84 covered.

  Moreover, the feedback winding 82 wound around the outer surface 54 of the main core 52 is electrostatically shielded by winding a conductor tape 92 such as a copper foil tape around the outer side thereof.

  5 (a) to 5 (c) show an assembly process for an example of the ring core unit constituting the present invention, and FIGS. 5 (d) and 5 (e) use the ring core unit assembled in this way. It is explanatory drawing which shows each formation process of the fluxgate sensor element formed.

  According to the figure, the ring core unit 11 as an example includes a ring core 12 formed in an annular shape by a magnetic body, an annular case body 13 that accommodates the ring core 12, and an annular shape that covers the annular case body 13. It is comprised with the cover body 16. FIG.

  Among these, the ring core 12 having an appropriate inner diameter and outer diameter is made of a ferromagnetic material containing permalloy or alumofus, and is given a thickness of, for example, about 0.1 mm and is shown in FIGS. ).

  The annular case body 13 formed using an insulating base material such as a glass cloth base material epoxy resin or a prepreg is an annular groove portion 14 formed so as to be slightly wider than the core width of the ring core 12 and deeper than its thickness. And is formed to have a substantially concave cross section as shown in FIGS. 5 (a) and 6 (a) in order to accommodate the ring core 12 in the annular groove 14 with a margin. Yes.

  Similarly, the annular lid 16 formed using an insulating base material such as a glass cloth base epoxy resin or a prepreg has a substantially convex cross section, and the protruding portion 17 is not in the annular groove portion 14 with the ring core 12. It is formed as shown in FIGS. 5 (b) and 6 (a) so as to be placed under a contact state and covered with an arrangement relationship that faces the annular case body 13 side. In addition, the protrusion part 17 can also be formed giving a height dimension of the grade which can obtain the state of the light contact which contacts the ring core 12 to such an extent that stress is not applied to the ring core 12 at the time of the lid | cover.

  The ring core 12, the annular case body 13, and the annular lid body 16 having such a structure accommodate the ring core 12 in the annular groove portion 14 of the annular case body 13, and time elapses as shown in FIG. A soft material of a type that does not harden even if it is, for example, a silicone material 29 of a type that does not harden, is interposed over the entire circumference or partially, and then the annular lid 16 is placed in FIGS. 5 (c) and 6 (b). The ring core unit 11 is formed by integration under the arrangement relationship shown in FIG.

  Moreover, the ring core unit 11 shown in FIG.5 (c) is used for the fluxgate sensor element 31 as an example, and this ring core unit 11 is formed using insulating base materials, such as a glass cloth base material epoxy resin and a prepreg. 5D is accommodated in the annular recess 19 of the annular large-diameter case body 18. The annular large-diameter case body 18 can be formed by cutting and cutting the inner and outer circumferences indicated by broken lines in FIG.

  In this way, for the annular large-diameter case body 18 that accommodates the ring core unit 11, the one-side substrate body 33 and the other-side substrate body 37 that are positioned separately on one surface and the other surface and face each other. An excitation unit 32 comprising:

  That is, the one-side substrate 33 has a conductor pattern row 34 composed of a plurality of pattern layers 35 arranged on each side so as to be in non-contact with each other in a direction crossing the circumferential direction. The body 37 is provided with conductor pattern rows 38 each having a plurality of pattern layers 39 arranged on each side so as to be in non-contact with each other in a direction crossing the circumferential direction.

  The one-side substrate body 33 and the other-side substrate body 37 arranged in a positional relationship in which one conductor pattern row 34 is exposed on the front surface side and the other conductor pattern row 38 is exposed on the back surface side are a ring core. An annular large-diameter case body 18 containing the unit 11 is interposed between the two, and the whole is laminated and fixed in a sandwich shape. In this case, since the ring core unit 11 that is difficult to handle is accommodated in the annular large-diameter case body 18 in advance, the workability when forming the excitation unit 32 can be further improved.

Moreover, each pattern layer 35 on the front surface side and each pattern layer 39 on the back surface side penetrate the peripheral portion 18a of the annular large-diameter case body 18 and the corresponding portions of the one side substrate body 33 and the other side substrate body 37. As shown in FIG. 5 (e), the flux gate sensor element 3 1 having the excitation unit 32 that is continuous in one line as shown in FIG. 5 (e) by sequentially conducting through the plated through holes 41 formed separately. As shown in FIG. 6 (d). In addition, the code | symbol 42 shown in FIG.6 (d) is respectively connected to the plating through hole 41 with which the pattern layer 38 located in the start end side is equipped, and the plating through hole 41 with which the pattern layer 38 located in the termination | terminus side is provided. Indicates the lead wire.

  FIG. 7 is an explanatory diagram showing (a) and (b) assembling steps for another example of the ring core unit, and (c) showing the structure of the fluxgate sensor element using the ring core unit assembled in this way. It is. Moreover, FIG. 8 is explanatory drawing which shows explanatory drawing shown in FIG. 7 as (a)-(c) on the correspondence with a specific manufacturing process.

  According to these drawings, another example of the ring core unit 11 is an annular core 12 formed in an annular shape by a magnetic body, an annular case body 23 that accommodates the ring core 12, and an annular case body 23. And an annular lid body 26.

  Among them, the ring core 12 is made of a ferromagnetic material containing permalloy or alumofas similarly to that shown in FIG. 5, and is given a thickness of, for example, about 0.1 mm, and is shown in FIGS. 7 (a) and 8 (a). It is formed as shown in FIG.

  An annular case body 23 formed using the same insulating base material as the annular case body 13 shown in FIG. 5 or a different appropriate insulating base material is slightly wider than the core width of the ring core 12 and deeper than its thickness. The annular groove portion 24 formed as described above and the annular large-diameter groove portion 25 formed shallower with a step between the annular groove portion 24 are formed on one side surface thereof. For this reason, the ring core 12 can be accommodated in the annular groove portion 24 with a margin as shown in FIG.

  An annular lid body 26 formed using an insulating base similar to that of the annular lid body 16 shown in FIG. 5 is provided with a thickness that substantially matches the annular large-diameter groove portion 25 and that substantially matches the depth thereof. Is formed.

  The ring core 12, the annular case body 23, and the annular lid body 26 having such a structure accommodate the ring core 12 in the annular groove 24 of the annular case body 23, and time elapses as shown in FIG. Even if a soft material of a type that does not harden even, for example, a silicone material 29 of a type that does not harden, is interposed over the entire circumference or partially, the annular lid 26 is disposed in the annular large-diameter groove 25 and integrated. As a result, the ring core unit 11 is integrally formed. The annular case body 23 can be formed by cutting and cutting the inner and outer peripheries indicated by broken lines in FIG.

  Moreover, the ring core unit 11 shown in FIG.7 (c) is used for the fluxgate sensor element 31 as another example, and the ring core unit 11 is separately positioned on one surface and the other surface thereof. An excitation unit 32 composed of a one-side substrate body 33 and another-side substrate body 37 that face each other is disposed.

  That is, the one-side substrate 33 has a conductor pattern row 34 composed of a plurality of pattern layers 35 arranged on each side so as to be in non-contact with each other in a direction crossing the circumferential direction. The body 37 is provided with conductor pattern rows 38 each having a plurality of pattern layers 39 arranged on each side so as to be in non-contact with each other in a direction crossing the circumferential direction.

  The one-side substrate body 33 and the other-side substrate body 37 arranged in a positional relationship in which one conductor pattern row 34 is exposed on the front surface side and the other conductor pattern row 38 is exposed on the back surface side are a ring core. The unit 11 is interposed between the two and the whole is laminated and fixed in a sandwich shape.

Moreover, each pattern layer 35 on the front surface side and each pattern layer 38 on the back surface side are separated from each other by penetrating the peripheral portion 23a of the annular case body 23 and the corresponding portion of the one side substrate body 33 and the other side substrate body 37. be to sequentially conduct alternately through each plated through hole 41 formed, FIG as a flux gate sensor element 3 1 having the excitation unit 32, which is continuous with one of the linear, as shown in FIG. 7 (c) It is formed as shown in FIG. In addition, the code | symbol 42 shown in FIG.8 (c) is respectively connected to the plating through hole 41 with which the pattern layer 38 located in the start end side is equipped, and the plating through hole 41 with which the pattern layer 38 located in the termination | terminus side is provided. Indicates the lead wire.

  Next, the operation and effect of the present invention configured as described above will be described based on the example shown in FIG. 1. The through-type current sensor 51 includes the fluxgate sensor element 31 in the groove 53 of the annular main core 52. The inner peripheral surface 52a and the outer peripheral surface 52b are accommodated by the magnetic material layer 62 that shields the gap 57 formed between the one-side core portion 63 and the other-side core portion 64 facing each other. And the return winding 82 is uniformly wound over the entire circumference of the outer surface 54 of the main core 52.

  Therefore, the through-type current sensor 51 improves the magnetic shield characteristics by the magnetic material layer 62 as a result of the gap 57 of the main core 52 containing the fluxgate sensor element 31 being shielded by the magnetic material layer 62. be able to.

  Therefore, the one-side core portion 63 and the other-side core portion 73 constituting the main core 52 have a butt-like stepped portion 55 as shown in FIG. In the simplified flat surface 56, the magnetic shield characteristics can be improved.

  Further, the fluxgate sensor element 31 housed in the main core 52 as the magnetic detection means provided in the through-type current sensor 51 and the feedback winding 82 wound evenly around the main core 52 are symmetrical around the entire circumference. Since it is arranged under the structure, the influence of the position of the conductor L to be measured as shown in FIG. 12 and the influence of the external magnetic field can be made extremely small.

  In addition, since the main core 52 does not have a gap portion, there is no leakage magnetic flux even when magnetized, so that an output as an offset signal can be eliminated.

  Further, although the main core 52 functions as a magnetic shield for the fluxgate sensor element 31, it is located inside the feedback winding 82, so that the measured conductor as shown in FIG. The influence on the L side can be eliminated. It is also possible to make it difficult to generate heat due to the high-frequency current.

  Further, when the outside of the feedback winding 82 is electrostatically shielded, there is an effect of reducing the influence of high frequency noise due to capacitive coupling from the conductor L to be measured as shown in FIG.

  The through-type current sensor 51 having such a feature is provided in an appropriate case by exciting the fluxgate sensor element 31 under the electric circuit shown in FIG. 9 and wiring it on a circuit board having a feedback circuit. After being accommodated, the current flowing through the conductor L to be measured as shown in FIG. 12 can be converted into a voltage and output.

  In this case, the ring core 12 is accommodated in the annular groove portion 14 of the annular case body 13 as shown in FIG. At this time, the ring core 12 is accommodated in the annular groove portion 14 with a margin in both the width direction and the height direction.

  After the ring core 12 is housed in the annular groove portion 14 of the annular case body 13 in this way, a soft material of a type that does not solidify over time as shown in FIG. 5B, for example, a type of silicone that does not solidify. After the material 29 is interposed, the annular lid body 16 is integrated by applying the lid 17 with the projecting portion 17 positioned in the annular groove portion 14, and as shown in FIG. 5 (c). A ring core unit 11 is formed.

  In this case, the annular lid body 16 is covered with the protruding portion 17 in a non-contact state where no stress is applied to the ring core 12 accommodated in the annular groove portion 14 of the annular case body 14. Therefore, the sensor characteristics of the ring core 12 do not deteriorate. As described above, the protrusion 17 is provided with an elastic layer made of a soft material of a type that does not harden even after a lapse of time on its contact surface side, such as a silicone material of a type that does not harden. As long as it is covered, the ring core 12 can be kept in contact with the lid.

  The ring unit 11 formed by accommodating the ring core 12 in this manner is accommodated in the annular recessed portion 19 of the annular large-diameter case body 18, and then, one surface and the other surface of the large-diameter case body 18 are accommodated. In addition, by arranging the one side substrate body 33 and the other side substrate body 37 to face each other, the flux gate sensor element 31 as an example including the excitation unit 32 is formed.

Moreover, the excitation unit fluxgate sensor element 31 comprises 32 includes a plurality Article pattern layer 35 in which one side substrate 33 is provided on its front surface side, the other side substrate body 37 are a number conditions provided similarly on the front surface side These pattern layers 39 are formed in such a manner that they are alternately conducted sequentially through the plated through holes 41 so as to be continuous in one line.

  That is, the fluxgate sensor element 31 as an example shown in FIGS. 5E and 6D includes a ring core unit 11 including the ring core 12 accommodated so as not to deteriorate the characteristics, and one of the ring core unit 11 side. Since it is formed with the excitation unit 32 composed of the one side substrate body 33 and the other side substrate body 37 which are arranged to face each other on the surface and the other surface, it is assumed that the performance is excellent without deterioration of characteristics. Therefore, it can be manufactured and provided at a small size and at a low price.

  On the other hand, the ring core 12 shown in FIG. 7 is accommodated in the annular groove portion 24 of the annular case body 23 as shown in FIG. At this time, the ring core 12 is accommodated in the annular groove portion 24 with a margin in both the width direction and the height direction.

  After the ring core 12 is housed in the annular groove 24 of the annular case body 23 in this manner, a soft material that does not solidify over time as shown in FIG. 7B, for example, a silicone that does not solidify. The ring core unit 11 is integrally formed by interposing the material 29 and then covering the annular groove 26 so as to cover the annular groove 24 and placing it in the annular large-diameter groove 25. Become.

  In this case, the annular lid body 26 is applied in a non-contact state where no stress is applied to the ring core 12 accommodated in the annular groove portion 24 of the annular case body 23. The 12 sensor characteristics do not deteriorate.

  For the ring unit 11 formed in this way, one side substrate body 33 and one side of the annular case body 23 (the side where the annular lid body 26 is covered) and the other surface are separately provided. By arranging the other side substrate body 37 so as to face each other, the flux gate sensor element 31 as another example including the excitation unit 32 is formed as shown in FIGS. 7C and 8C.

  Therefore, the flux gate sensor element 31 as another example shown in FIGS. 7C and 8C is the same as the flux gate sensor element 31 as an example shown in FIGS. 5E and 6D. In addition, a ring core unit 11 including a ring core 12 accommodated so as not to deteriorate the characteristics, and a one-side substrate body 33 and another-side substrate body that are arranged to face each other on one surface and the other surface on the ring core unit 11 side. Therefore, it is possible to manufacture and provide a small and inexpensive product having excellent performance without deterioration of characteristics.

  In particular, since the fluxgate sensor element 31 as another example is formed without using the annular large-diameter case body 18 shown in FIG. 5, it is possible to reduce the number of members and to reduce the thickness thereof. .

  In the present invention, the excitation unit 32 formed by the one side substrate body 33 and the other side substrate body 37 is formed by a known printed circuit board manufacturing technique. One example is the case of using the subtractive method. A copper foil is applied to an insulating substrate, an etching resistant ink is applied to a necessary portion by a screen printing method, and then only the conductor pattern portion is exposed and developed, and then exposed. Etching is performed after leaving the etching-resistant film only in the exposed portions, and finally the etching resist is peeled off and removed to expose the conductor patterns (conductor pattern rows 34 and 38 including the pattern layers 35 and 39 in the present invention). Is done.

  Further, the plated through hole 41 can be formed by providing a through hole penetrating the individual pattern layers 35 and 39 at the opposing positions and performing, for example, an electroless copper plating process on the through hole.

  The through-type current sensor 51 includes one formed without applying an electrostatic shield if desired. Further, the main core 52 may have an appropriate annular shape other than an annular shape as long as it exhibits an annular shape that is substantially similar to the fluxgate sensor element 31. Further, the facing surface 64 of the one-side core portion 63 and the facing surface 74 of the other-side core portion 73 can be mirror-finished so as to be able to closely face each other. Furthermore, the facing surface 64 of the one-side core portion 63 and the facing surface 74 of the other-side core portion 73 face each other through a non-flat shape other than that forming the stepped portion 55 shown in FIG. You may make it match. In addition, a plurality of flux gate sensor elements 31 can be accommodated in the main core 52. For example, when four fluxgate sensor elements 31 are stacked, the detection sensitivity can be increased by connecting them as shown in FIG. Further, the groove 53 of the main core 52 is only on one side of the one-side groove 65 of the facing surface 64 of the one-side core 63 and the other groove 75 of the facing surface 74 of the other-side core 73. Besides, the groove depths of the one-side groove-like portion 65 and the other-side groove-like portion 75 can be formed uniformly or at non-uniform depths.

The disassembled perspective view which shows the basic composition about an example of this invention. The principal part expansion explanatory drawing which shows the cross-sectional structure example after the assembly of the example shown in FIG. The expanded sectional view of the AA arrow direction site | part in the example of FIG. 2 provided with the feedback winding wound uniformly. The principal part expansion explanatory drawing shown on the basis of the correspondence with FIG. 2 about the other example of this invention. The assembly process for an example of the ring core unit constituting the present invention is defined as (a) to (c), and the process of forming a fluxgate sensor element using the ring core unit assembled in this way is (d), Explanatory drawing each shown as (e). Explanatory drawing which shows explanatory drawing shown in FIG. 5 as (a)-(d) on the correspondence with a specific manufacturing process. The assembly process for the other examples of the ring core unit constituting the present invention is defined as (a) and (b), and the structure of the fluxgate sensor element using the ring core storage unit assembled in this way is shown in (c). FIG. Explanatory drawing which shows explanatory drawing shown in FIG. 7 as (a)-(c) on the correspondence with a specific manufacturing process. An explanatory view showing an example of circuit composition of a penetration type current sensor concerning the present invention. Explanatory drawing which shows the connection relation about the other example of the penetration type current sensor concerning the present invention. The exploded perspective view of the fluxgate sensor currently indicated by patent documents 1 as a magnetic sensor for geomagnetic detection. An explanatory view showing an example of a conventional penetration type current sensor.

DESCRIPTION OF SYMBOLS 11 Ring core unit 12 Ring core 13 Annular case body 14 Annular groove part 16 Annular lid body 17 Projection part 18 Annular large diameter case body 18a Peripheral part 19 Annular recess part 23 Annular case body 23a Peripheral part 24 Annular groove part 25 Annular large diameter groove part 26 Annular lid Body 29 Silicone material 31 Flux gate sensor element 32 Excitation unit 33 One side substrate body 34 Conductive pattern array 35 Pattern layer 37 Other side substrate body 38 Conductor pattern array 39 Pattern layer 41 Plating through hole 42 Lead wire 51 Through-type current sensor 52 Main Core 52a Inner peripheral surface 52b Outer peripheral surface 53 Groove portion 54 Outer surface 55 Stepped portion 56 Flat surface 57 Air gap 62 Magnetic material layer 63 One side core portion 64 Opposing surface 65 One side groove portion 66 One side convex portion 67 Derived groove 73 Other side core Part 74 Opposing surface 75 Other side groove part 76 Others Protrusions 77 derives the groove 82 the feedback winding 83 winding layer 84 insulating layer 92 conductor tape

Claims (9)

A fluxgate sensor element in which a ring core unit is incorporated in a groove formed in at least one of the opposing surfaces of the one-side core portion and the other-side core portion, each of which has an annular shape and is freely divided into two faces. And forming the main core,
A magnetic material layer is provided on the outer surface side of the main core so as to shield a gap formed between the one side core portion and the other side core portion facing each other. Through-type current sensor.   The through-type current sensor according to claim 1, wherein the magnetic material layer is provided separately on an inner peripheral surface and an outer peripheral surface of the main core.   The ring core unit includes a ring core made of a magnetic material, an annular case body made of an insulating base material having an annular groove portion for accommodating the ring core, and an annular lid made of an insulating base material covering the annular groove portion side of the annular case body The ring core is formed to be smaller than any of the groove width and groove depth of the annular groove portion of the annular case body, and the annular lid body is substantially concentric with the annular case body. 3. The through-type current sensor according to claim 1, wherein the ring core is accommodated in the annular groove portion and covered with the relationship.   The through-type current sensor according to claim 3, wherein the annular lid is applied to the ring core in a non-contact or light contact.   The annular case body has a substantially concave shape in cross section, and the annular lid body has a substantially convex shape in cross section, and the protruding portion is positioned in the annular groove portion so as to face the annular case body side. The penetration type current sensor according to claim 3 or 4 covered.   The annular case body includes the annular groove portion in which the ring core is accommodated, and a large annular groove portion formed shallower with a step interposed between the annular groove portion, and the annular lid body includes the annular groove portion. The through-type current sensor according to claim 3, wherein the through-type current sensor is disposed in the large annular groove so as to cover the groove. The fluxgate sensor element is an annular large-diameter case body in which the ring core unit is accommodated, and one side substrate body that constitutes an excitation unit on one surface and the other surface that are in a face-to-face relationship with each other; and the other side substrate body disposed facing each other, in the circumferential direction intersecting the direction to each other without contact with so as to conductor pattern sequence consisting of the pattern layer of a large number Article which are arranged to each other the one side substrate body Provided on each of the front side and the front side of the other side substrate body, the annular large-diameter case body is placed between the two under the arrangement relationship in which each conductor pattern row is exposed on the front side. by interposing with laminated fixed in its entirety sandwich, the annular large-diameter casing of the peripheral portion and the corresponding portion by penetrating formed separately plating of the the one side substrate body and the other side substrate body Suruho It was formed continuously with each pattern layer of the front plane side of each pattern layer and the other side substrate of the front plane side of the one side substrate body be sequentially alternately conducted to one of the linear via The through-type current sensor according to claim 1.   The through-type current sensor according to any one of claims 1 to 7, wherein a plurality of the flux gate sensor elements are stacked in the groove portion of the main core with an insulating layer interposed therebetween.   The feedthrough current sensor according to claim 1, wherein a feedback winding is wound around the main core, and an outer side thereof is electrostatically shielded.

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