JP4813071B2 - マクロ画像表示システム及びマクロ画像表示方法 - Google Patents

マクロ画像表示システム及びマクロ画像表示方法 Download PDF

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Publication number
JP4813071B2
JP4813071B2 JP2005082929A JP2005082929A JP4813071B2 JP 4813071 B2 JP4813071 B2 JP 4813071B2 JP 2005082929 A JP2005082929 A JP 2005082929A JP 2005082929 A JP2005082929 A JP 2005082929A JP 4813071 B2 JP4813071 B2 JP 4813071B2
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defect
overlap
macro
substrate
data
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JP2006266766A (ja
JP2006266766A5 (enExample
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真孝 前田
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Olympus Corp
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Olympus Corp
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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
JP2005082929A 2005-03-23 2005-03-23 マクロ画像表示システム及びマクロ画像表示方法 Expired - Fee Related JP4813071B2 (ja)

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JP2005082929A JP4813071B2 (ja) 2005-03-23 2005-03-23 マクロ画像表示システム及びマクロ画像表示方法

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JP2005082929A JP4813071B2 (ja) 2005-03-23 2005-03-23 マクロ画像表示システム及びマクロ画像表示方法

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JP2006266766A JP2006266766A (ja) 2006-10-05
JP2006266766A5 JP2006266766A5 (enExample) 2008-05-08
JP4813071B2 true JP4813071B2 (ja) 2011-11-09

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007103696A (ja) * 2005-10-05 2007-04-19 Olympus Corp 基板の欠陥検査システム及び基板の欠陥検出方法
JP5407506B2 (ja) * 2009-04-09 2014-02-05 凸版印刷株式会社 目視検査システム
WO2016159390A1 (ja) * 2015-03-31 2016-10-06 日本電気株式会社 生体パターン情報処理装置、生体パターン情報処理方法、およびプログラム
CN109540904A (zh) * 2018-12-12 2019-03-29 华侨大学 一种衬底表面宏观缺陷检测及分类系统
JP7677336B2 (ja) * 2020-06-08 2025-05-15 日本電気株式会社 エアバッグ検査装置、エアバッグ検査システム、エアバッグ検査方法およびプログラム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09306957A (ja) * 1996-05-20 1997-11-28 Mitsubishi Electric Corp 異物検出方法
JPH1145919A (ja) * 1997-07-24 1999-02-16 Hitachi Ltd 半導体基板の製造方法

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