JP4812244B2 - Print head - Google Patents

Description

  The present invention relates to an actuator mainly composed of a perovskite type compound having piezoelectricity, particularly lead zirconate titanate (PZT), and a print head mounted on an ink jet printer using the same for printing characters and images. .

  In recent years, with the spread of personal computers and the development of multimedia, the use of ink jet recording apparatuses as recording apparatuses that output information to recording media is rapidly expanding.

  Such an ink jet recording apparatus is equipped with a print head, and this type of print head includes a heater as a pressurizing unit in an ink flow path filled with ink, and heats the ink with the heater. A thermal head system that boiles and pressurizes ink with bubbles generated in the ink flow path and discharges it as an ink flow from the ink discharge hole, and a part of the wall of the ink flow path filled with ink is bent by a displacement element A piezoelectric method is generally known that displaces, pressurizes ink in an ink flow path mechanically, and discharges the ink as an ink flow from an ink discharge hole.

  For example, as shown in FIG. 3A, a print head used in an inkjet recording apparatus using a piezoelectric method has a plurality of grooves arranged in parallel as ink flow paths 23a, and a partition wall as a wall that partitions each ink flow path 23a. The actuator 21 is provided on the flow path member 23 in which 23b is formed.

  The actuator 21 includes a common electrode 25 formed on one main surface of the piezoelectric ceramic layer 24, a plurality of individual electrodes 26 formed on the other main surface, and an actuator provided with a plurality of displacement elements 27. The actuator 21 and the flow path member 23 are bonded so that the individual electrode 26 is disposed immediately above the ink flow path 23 a that is the opening of the path member 23.

  By applying a voltage between the common electrode 25 and the individual electrode 26 to vibrate the displacement element 27, the ink in the ink flow path 23 a is pressurized, and the ink discharge hole 28 opened on the bottom surface of the flow path member 23. The ink droplets are ejected.

  Further, as shown in FIG. 3B, a print head in which a large number of individual electrodes 26 are arranged in parallel on the piezoelectric ceramic layer 24 at an equal pitch and a large number of displacement elements 27 are provided is formed. This can contribute to speeding up and high accuracy of the ink jet printer.

Such an actuator uses Pb, Zr and Ti, Zn, Sb, Ni, Te as a metal component, and a perovskite type compound containing at least one of Sr and Ba, thereby providing heat resistance, durability, and temperature resistance. It is disclosed that a piezoelectric body excellent in changeability can be realized.
JP 11-34321 A JP 7-315923 A

  However, in recent high-precision printers, there is a tendency to reduce the thickness in order to increase the displacement as an actuator. For example, if a piezoelectric sintered body having a thickness of 100 μm or less, particularly 60 μm or less is directly obtained, 1000 is obtained. When firing at a temperature higher than or equal to ℃, Pb evaporates from the surface of the molded body at such a high temperature, resulting in a change in composition, resulting in variations in the composition of the obtained piezoelectric sintered body. As a result, there is a problem in that the variation in displacement increases and the ink discharge varies, the sharpness of recorded characters and images partially deteriorates, and high-speed printing cannot be performed.

  Further, in order to obtain an actuator of 100 μm or less, the surface portion where Pb is evaporated is removed from the thick piezoelectric ceramic obtained by sintering, and only the central portion with little composition variation is used, and this is used as a print head for an ink jet printer. In the case of using as, the thickness variation and the surface roughness cannot be strictly controlled, and there is a problem that such processing is substantially difficult.

  In addition, when a piezoelectric sintered body is used as a print head, the piezoelectric sintered body is bonded to a metal channel member using an adhesive, but even if it has excellent piezoelectric characteristics as an actuator before bonding, There was a problem that the characteristics later deteriorated, causing variation in displacement.

  Accordingly, an object of the present invention is to provide an actuator having a thickness of 100 μm or less and little composition variation even when fired, and an ink jet print head with improved displacement variation.

Printhead of the present invention, the flow channel member in which a plurality of ink flow paths are connected to a plurality of ink ejection holes are opened, the piezoelectric ceramic layer are laminated on the surface of the ceramic substrate, the piezoelectric ceramic layer and an actuator plurality of displacement elements that have been eclipsed set comprising a pair of electrodes sandwiching the piezoelectric ceramic layer, covering the opening of said plurality of ink flow paths, the plurality of displacement elements of the plurality The print head is laminated so as to be positioned immediately above the opening of the ink flow path , wherein the piezoelectric ceramic layer has a thickness of 100 μm or less, is subjected to compressive stress , and is made of a lead zirconate titanate compound. together consist of some perovskite lattice constant ratio c / a of the perovskite compound is characterized by a 1.013 to 1.01 6.

  The piezoelectric ceramic layer preferably contains at least one of Sr, Ba, Ni, Sb, Nb, Zn, and Te.

  The piezoelectric ceramic layer preferably contains 0.02 to 0.08 mol of Ba and 0.02 to 0.12 mol of Sr.

  The piezoelectric ceramic layer preferably has a molar ratio A / B between the A site and the B site of the perovskite compound of 0.99 to 1.04.

  The ceramic substrate is preferably a piezoelectric body.

The elastic compliance is preferably 14.0 × 10 ⁻¹² m ² / N or less.

  In the print head of the present invention, the actuator is joined to the surface of a flow path member having a plurality of ink flow paths so that a displacement element constituting the actuator is disposed immediately above the ink flow path. Thus, ink is ejected by displacement of the displacement element.

The present invention, when the stress is applied to the piezoelectric thin layer, the capacitance is decreased, which based on the novel finding that induces variations in characteristics of the actuator, titanium lead zirconate titanate constituting the piezoelectric ceramic layers strictly control the lattice constant ratio of perovskite compound is a system compound by crystal phase of the piezoelectric ceramic layer is closer to the tetragonal, can be suppressed decrease in capacitance with applied compressive stress, restraint of multiple Even when compressive stress is applied to a support member having a portion, excellent piezoelectric characteristics are maintained and a high displacement print head is realized.

  Further, since the piezoelectric ceramic layer contains at least one of Sr, Ba, Ni, Sb, Nb, Zn, and Te, a piezoelectric sintered body having more excellent characteristics can be easily obtained.

Further, since the piezoelectric ceramic layer contains 0.02 to 0.08 mol of Ba and 0.02 to 0.12 mol of Sr, a piezoelectric sintered body having a tetragonal composition as a main component and d ₃₁ of 200 or more is obtained. be able to.

Furthermore, since the piezoelectric ceramic layer has a molar ratio A / B between the A site and the B site of the perovskite compound of 0.99 to 1.04, piezoelectric sintering having a high performance of d ₃₁ of 250 or more. You can get a body.

  The ceramic substrate is preferably a piezoelectric body. As a result, simultaneous firing can be performed, and generation of stress due to a difference in thermal expansion can be suppressed.

Furthermore, the elastic compliance is preferably 14.0 × 10 ⁻¹² m ² / N or less. As a result, it becomes easy to suppress a decrease in the electrostatic capacity with respect to the stress generated after the actuator is attached to the support member.

  The actuator of the present invention is formed by providing a plurality of displacement elements 7 on the surface of a ceramic substrate 2, for example, as shown in FIG. The displacement element 7 includes a common electrode 5 provided on the ceramic substrate 2, a piezoelectric ceramic layer 4 provided on the common electrode 5, and an individual electrode 6 provided on the piezoelectric ceramic layer 4. is there. In other words, the displacement element 7 is configured to sandwich the piezoelectric ceramic layer 4 between the common electrode 5 and the individual electrode 6, and the common electrode 5 is provided on the ceramic substrate 2.

  A plurality of displacement elements 7 are provided on the ceramic substrate 2. For example, as shown in FIG. 1B, the individual electrodes 6 are two-dimensionally arranged at equal intervals, and are independent from the external electronic control circuit. When the voltage is applied between the electrodes, the piezoelectric ceramic layer 4 at the portion sandwiched between the common electrode 5 and the individual electrode 6 to which the voltage is applied can be displaced.

  According to the present invention, a constraining portion made of metal is provided on the main surface opposite to the main surface on which the displacement element 7 of the ceramic substrate 2 is provided via the adhesive layer, and displacement occurs in the non-constraining portion. Especially when it has such a structure, the effect of this invention can fully be exhibited. In such a configuration, since the constraining portion made of metal is provided via the adhesive layer, the piezoelectric ceramic layer 4 has a structure in which compressive stress is applied and displacement occurs in the non-constraining portion. Is good.

  Specifically, as shown in FIG. 1C, a support member 3 is fixed to the ceramic substrate 2 of the actuator of the present invention, and the main surface of the ceramic substrate 2 joined to the support member 3 is A support member 3 is provided which includes a free vibration part 9a located at the opening of the groove and a fixing part 9b formed by bonding. When a voltage is applied between the common electrode 5 and the individual electrode 6, the displacement element 7 is displaced by the displacement of the piezoelectric ceramic layer 4, and as a result, can be vibrated by the free vibration part 9a. With such a structure, the characteristics can be fully utilized as an actuator having a large displacement.

  According to the present invention, it is important that the piezoelectric ceramic layer 4 constituting the displacement element 7 has a perovskite crystal containing at least Pb, Zr and Ti as a main component. For example, a crystal containing Pb as an A site constituent element and Zr and Ti as a B site constituent element, in particular, a lead zirconate titanate-based compound having a higher d constant It is preferable for obtaining a piezoelectric sintered body.

The piezoelectric ceramic layer preferably contains at least one of Sr, Ba, Ni, Sb, Nb, Zn, and Te. Thus, a more stable piezoelectric sintered body can be obtained. For example, Pb (Zn _1/3 Sb _2/3 ) O ₃ and Pb (Ni _1/2 Te _1/2 ) O ₃ are solidified as subcomponents. What melt | dissolves can be illustrated.

  In particular, it is desirable to further contain an alkaline earth element as the A site constituent element. As the alkaline earth element, Ba and Sr are particularly preferable in that a high displacement can be obtained, and the inclusion of 0.02 to 0.08 mol of Ba and 0.02 to 0.12 mol of Sr is particularly mainly tetragonal composition. It is advantageous to obtain a large displacement in the case of the following composition.

For _{example, Pb 1-x-y Sr} x Ba y (Zn 1/3 Sb 2/3) a (Ni 1/2 Te 1/2) b Zr 1-a-b-c Ti c O 3 + αwt% Pb 1 _{/ 2} NbO ₃ (0 ≧ x ≧ 0.14, 0 ≧ y ≧ 0.14, 0.05 ≧ a ≧ 0.1, 0.002 ≧ b ≧ 0.01, 0.44 ≧ c ≧ 0.50 , Α = 0.1 to 1.0), the amount of Pb is adjusted so that the molar ratio A / B is 0.99 to 1.04.

  When a molded body prepared with a stoichiometric composition of Pb is baked at 1000 ° C. for 2 hours, Pb evaporates as PbO, resulting in a deviation in the composition of the surface portion, resulting in deterioration in the characteristics of the displacement element and performance variations. However, it is preferable that the molar ratio A / B is 0.99 to 1.04, particularly 0.995 to 1.03, so that the Pb / (Ti + Zr) ratio in the thickness direction of the displacement element 7 can be increased. It becomes easy to suppress the variation to 0.02 or less, and the composition variation can be further reduced.

  The molar ratio A / B is obtained by dividing the sum of the number of moles of all components of the A site by the sum of the number of moles of all components of the B site. The A / B ratio is a perovskite type of stoichiometry. When the A / B ratio is more than 1 in the oxide, the A site has a larger molar ratio than the B site, and the A / B ratio is more than 1. Is smaller, it means that the molar ratio of the B site is larger than that of the A site.

  Further, the perovskite type compound constituting the piezoelectric ceramic layer 4 usually has two types of crystal forms, and exists in a state where rhombohedral crystals and tetragonal crystals are mixed. However, according to the present invention, in order to enhance the piezoelectric characteristics, it is preferable to adopt a crystal form in a tetragonal mixed phase region with rhombohedral crystals, but when an actuator having a thickness T of 100 μm or less is fired, Pb evaporates. The composition of the piezoelectric body changes from the actuator surface to the inside, and characteristic deterioration occurs. However, by controlling the lattice constant ratio c / a and mixing the two crystal forms at a specific ratio, excellent characteristics can be obtained. The deterioration of characteristics can be suppressed even in a stress environment.

  That is, it is important to set the lattice constant ratio c / a of the perovskite type compound of the piezoelectric ceramic layer 4 to 1.013 to 1.016. With this configuration, the main component of the perovskite type compound is a tetragonal composition. it can. In order to obtain particularly stable piezoelectric characteristics, it is preferably 1.0135 to 1.0155, more preferably 1.014 to 1.015.

  The thickness of the displacement element 7 of the present invention is 100 μm, which is important for obtaining a large displacement. In particular, 80 μm, further 60 μm, and more preferably 50 μm is preferable in terms of increasing the displacement. In order to prevent breakage during production and operation, the lower limit is preferably 3 μm, particularly 5 μm, and more preferably 10 μm in view of sufficient mechanical strength.

  According to the present invention, the ceramic substrate 2 only needs to have a high insulating property, but is preferably a piezoelectric body, and in particular, has a thermal expansion coefficient substantially the same as that of the piezoelectric ceramic layer 4. Furthermore, it is preferable that the ceramic substrate is a piezoelectric body and further has substantially the same composition as the piezoelectric ceramic layer 4. As a result, simultaneous firing becomes possible, and it becomes easy to prevent warping and distortion from being caused by thermal stress generated during firing due to a difference in thermal expansion.

  The ceramic substrate 2 may be a single layer, but is preferably a laminate in order to control the thickness and suppress compositional variation and characteristic variation after sintering.

The piezoelectric strain constant used as the ink jet print head is, for example, d ₃₁ , and the size of d ₃₁ needs to be 200 pm / V or more in order to exhibit a sufficient discharge capability as the ink jet print head. When it is lower than 200 pm / V, there is no sufficient discharge capability and the ink jet print head cannot be used. In order to obtain high-speed and fine printing, d ₃₁ is more preferably 250 pm / V or more.

The elastic compliance of the actuator of the present invention is 14.0 × 10 ⁻¹² m ² / N or less, particularly 13.5 × 10 ⁻¹² m ² / N or less, more preferably 13.0 × 10 ⁻¹² m ² / N or less. It is preferable that As a result, it is easy to suppress a decrease in electrostatic capacitance with respect to stress generated after the actuator is attached to the support member.

  Further, since the displacement element 7 has a porosity of 1% or less, particularly 0.8% or less, and further 0.5% or less, it can effectively prevent liquid such as ink from penetrating, thereby reducing ink leakage. This is preferable.

  The material of the individual electrode 4 and the common electrode 6 may be any material as long as it has conductivity, and Au, Ag, Pd, Pt, Cu, Al, alloys thereof, and the like are used.

Further, the electrode thickness needs to be a level that is conductive and does not hinder displacement, and is generally about 0.5 to 5 μm, and particularly preferably 1 to 4 μm.

  By adopting such a configuration, the displacement magnitude can be controlled independently and sufficiently in each of the seven displacement elements of the actuator, and the ink ejection amount can be precisely controlled. As a result, it is possible to provide a high-quality ink jet recording head with little discharge unevenness.

Next, the method for manufacturing the actuator of the present invention will be described by taking as an example a case where a PbZrTiO ₃ -based perovskite crystal is applied to a print head of an inkjet printer.

First, Pb ₂ O ₃ , ZrO ₂ , TiO ₂ , BaCO ₃ , ZnO, SrCO ₃ , Sb ₂ O ₃ , NiO, and TeO ₂ are prepared as raw material powders. These are adjusted to a composition in which Pb is added so as to be larger than the Pb amount corresponding to the stoichiometric composition of the perovskite crystal and mixed. In particular, adjusting the molar ratio A / B between the A site and the B site of the perovskite crystal to be 1.005 to 1.04, particularly 1.01 to 1.03, maintains excellent piezoelectric characteristics. This is preferable.

  The obtained mixed powder is molded into a tape made of a piezoelectric ceramic and an organic composition by a general tape molding method such as a roll coater method or a slit coater method to produce a green sheet.

  An individual electrode and a common electrode are formed on a part of the green sheet by a printing method or the like. If desired, a via hole is formed in a part of the green sheet, and a via conductor is inserted into the via hole.

  Next, a desired green sheet is laminated to produce a laminate, and further, a constraining sheet made of a piezoelectric ceramic and an organic composition having substantially the same composition as the green sheet is disposed on both sides or one side of the laminate, Apply pressure contact.

  The laminated body after pressure adhesion is placed inside a firing furnace, fired at a firing temperature of 900 ° C. or higher, particularly 940 to 1100 ° C. in a high-concentration oxygen atmosphere, and the composition is formed by evaporation of Pb in the laminated body. It is possible to prevent Pb from becoming deficient compared to the perovskite composition, and as a result, a piezoelectric sintered body having a composition ratio Pb / (Ti + Zr) ratio variation of 0.02 or less can be obtained.

  In addition, it is preferable that a laminated body is mounted and fired in the baking mortar which consists of a dense sintered compact. As a result, the A / B composition fluctuation due to firing is small, and in particular, evaporation of volatile components such as Pb on the surface is suppressed, and characteristic control and variation can be easily controlled.

  The oxygen concentration during firing is preferably fired in an oxygen atmosphere. The oxygen concentration is preferably 80% or more, particularly 90% or more, more preferably 95% or more, and more preferably 98% or more from the viewpoint of suppressing the evaporation of Pb and reducing the variation in density.

  As shown in FIG. 2, the print head of the present invention has an actuator 11 bonded to a flow path member 13, and the flow path member 13 corresponds to the support member 3 in FIG. 1. Specifically, the ceramic substrate 12 is bonded to the surface of the flow path member 13 formed by dividing the ink flow paths 13a, which are a plurality of grooves, by the partition walls 13b, and a plurality of displacement elements are formed on the ceramic substrate 12. 17 is provided.

  The displacement element 17 has a structure in which a common electrode 15 is formed on one main surface of the piezoelectric ceramic layer 14 and an individual electrode 16 is formed on the other main surface, and the piezoelectric ceramic layer 14 is sandwiched between a pair of electrodes 15 and 16. ing.

  The displacement element 17 is bonded to the surface on which the ink flow path 13a that is the opening of the flow path member 13 is provided on the common electrode 15 side, and the displacement element 17 is disposed directly above each of the ink flow paths.

  The common electrode 15 and the individual electrode 16 of the displacement element 17 are electrically connected to an external drive circuit, and a voltage is applied between the common electrode 15 and the individual electrode 16 from the drive circuit, and the voltage is applied and displaced. The ink in the ink flow path 13 a corresponding to the displaced element is pressurized, and ink droplets can be discharged from the ink discharge holes 18 opened in the bottom surface of the flow path member 13.

  By adopting such a configuration, a feature of high-speed and high-precision ejection can be obtained, and a print head suitable for high-speed printing can be provided. In addition, by mounting the print head of the present invention on a printer, for example, a printer including an ink tank that supplies ink to the print head and a recording paper transport mechanism for printing on recording paper is realized. Therefore, high-speed and high-precision printing can be easily realized.

As raw material powders, high-purity Pb ₂ O ₃ , ZrO ₂ , TiO ₂ , SrCO ₃ , BaCO ₃ , NiO, Sb ₂ O ₃ , ZnO, TeO ₂ raw material powders have the compositions shown in Table 1. Weighed quantitatively and added excess Pb to this composition.

The composition has the general formula _{Pb 1-x-y Sr x} Ba y (Zn 1/3 Sb 2/3) a (Ni 1/2 Te 1/2) b Zr 1-a-b-c Ti c O ₃ , x, y, a, b, and c were adjusted to be as shown in Table 1. Sample No. For No. 25, BaTiO ₃ was used.

  The above prepared powder was wet-mixed for 20 hours by a ball mill, and then the mixture was dehydrated and dried. Thereafter, the mixture was calcined at 900 ° C. for 3 hours, and the obtained calcined product was wet pulverized again with a ball mill.

  Thereafter, an organic binder, water, a dispersing agent and a plasticizer are mixed into the pulverized product to prepare a slurry, and the thickness after firing is determined by a roll coater method generally used for forming a thin green sheet. A green sheet in which the shrinkage rate was considered in advance so as to have the size shown in Table 1 was produced.

  Thereafter, the green sheet was punched into a short shape using a mold to prepare a plurality of short sheets. Next, the electrode was apply | coated to the green sheet surface by screen printing on this short-shaped sheet | seat surface using the electrode paste which consists of Ag-Pd for a common electrode and an individual electrode.

  Next, a displacement element is formed in which a green sheet coated with an electrode and a green sheet coated with no electrode are structured as shown in FIG. In this way, heat was applied and pressure bonded to produce a laminated actuator molded body.

Finally, after degreasing the molded body at 400 ° C., the five types of laminates were fired in a 99% O ₂ atmosphere at a temperature of 1000 ° C. for 2 hours, and the restraint sheet was removed by ultrasonic cleaning to remove the five types. Obtained actuator.

  The thickness of the obtained actuator was measured with a Keyence microscope using a CCD after polishing the cross section of the sintered body. The composition variation was calculated as Pb / (Ti + Zr) by cutting the piezoelectric ceramic layer and measuring the cross section using EPMA and quantitatively measuring Pb, Ti, and Zr. Further, the porosity was calculated by cutting the piezoelectric ceramic layer and making the cross section into a mirror state, then observing with a microscope, obtaining the area of voids within a certain area, and dividing by the total area.

  The compositional variation was determined by comparing the amounts of Pb, Zr, and Ti with EPMA using EPMA. The obtained amounts of Pb, Zr and Ti were converted into molar amounts, and the Pb / (Ti + Zr) ratio was calculated. Further, c / a was calculated by substituting the d (002) plane distance and the d (200) plane distance in the X-ray diffraction into the following equation.

1 / d ² = h ² + k ² + (a / c) ² l ² / a ²
Further, d ₃₁ of the actuator was measured by a resonance method using an impedance analyzer. Furthermore, the elastic compliance S ₁₁ ^E was measured by the sintered body density and the resonance frequency.

Next, the actuator is bonded to the flow path member, and a print head as shown in FIG. 2 is manufactured. The capacitance before and after bonding is measured using an impedance analyzer, and the value after bonding is compared with the value before bonding. Was calculated as the rate of change. Further, the displacement when a voltage was applied to each displacement element was measured by a Doppler measuring device, and the in-plane displacement variation was calculated. The variation is expressed as a percentage by dividing the maximum difference from the average value by the average value. The results are shown in Table 1.

Sample No. of the present invention. 2 to 5, 7 to 10, and 12 to 24 had a capacitance change rate of 35% or less, an average displacement of 25 nm or more, and a variation of 4% or less. In particular, Pb _0.94 Sr _0.04 Ba _0.02 (Zn _1/3 Sb _2/3 ) _0.075 (Ni _1/2 Te _1/2 ) _0.005 Zr _0.47 Ti whose main phase is A1 _{At 0.45} O ₃ , the average displacement was 35 nm or more and the variation was 2%.

  On the other hand, sample No. C / a outside the scope of the present invention is less than 1.013. In No. 1, the change rate of the capacitance was as large as 50%, and the average displacement was 40 nm, but the variation was as large as 15%.

  In addition, the sample No. c / a is larger than 1.016 and is outside the scope of the present invention. No. 6 had an average displacement of 40 nm, but the variation was as large as 12%.

  Furthermore, sample Nos. Exceeding the range of the present invention with a thickness exceeding 100 μm. No. 11 has an average displacement as small as 19 nm and was not practically used as an actuator, particularly an actuator used for a print head.

  Furthermore, a sample No. 5 comprising a perovskite type compound not containing Pb or Zr is outside the scope of the present invention. No. 25 has an average displacement as small as 10 nm and was not practically used as an actuator, particularly an actuator used for a print head.

The actuator of this invention is shown, (a) is a schematic sectional drawing, (b) is a top view, (c) is a schematic sectional drawing at the time of providing a restraint part. It is a schematic sectional drawing which shows the structure of the print head of this invention. The structure of the conventional print head is shown, (a) is a schematic sectional drawing, (b) is a top view.

Explanation of symbols

2, 12 ... ceramic substrate 3 ... support member 4, 14 ... piezoelectric ceramic layer 5, 15 ... common electrode 6, 16 ... individual electrode 7, 17 ... displacement element 9a ... -Restraining part 9b ... Non-restraining part 11 ... Actuator 13 ... Flow path member 13a ... Ink flow path 13b ... Partition 18 ... Ejection hole

Claims (6)

A flow path member having a plurality of ink flow paths are connected to a plurality of ink ejection holes are opened, and the piezoelectric ceramic layer is laminated on the surface of the ceramic substrate, sandwiching the piezoelectric ceramic layer and a piezoelectric ceramic layer the actuator plurality of displacement elements that have been eclipsed set comprising a pair of electrodes, and covers the opening of said plurality of ink flow paths, the plurality of displacement elements of the opening before Symbol plurality of ink flow paths a laminated by being printhead so as to be positioned directly above the piezoelectric layer, a thickness of 100μm or less, and applied compressive stress, the perovskite compound is a titanium phosphate zirconate compound together comprising, print head lattice constant ratio c / a of the perovskite compound is characterized by a 1.013 to 1.01 6. The piezoelectric ceramic layer, Sr, Ba, Ni, Sb , Nb, claim 1 Symbol placement of the print head, characterized in that it comprises at least one of Zn and Te. The print head according to claim 2 , wherein the piezoelectric ceramic layer contains 0.02 to 0.08 mol of Ba and 0.02 to 0.12 mol of Sr. The piezoelectric ceramic layer, A site and printing according to any one of claims 1 to 3 molar ratio A / B of the B site is characterized by a 0.99 to 1.04 of the perovskite-type compound Head . Print head according to any one of claims 1 to 4, wherein the ceramic substrate is a piezoelectric element. Print head according to any one of claims 1 to 5 elastic compliance is equal to or less than ^{14.0 × 10 -12 m 2 / N} .

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