JP4810017B2 - Vacuum valve - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a vacuum valve having a frustum-shaped plug that rotates, and more particularly to a vacuum valve that suppresses leakage.
[0002]
[Prior art]
Many vacuum valves are generally L-shaped because of their simple sealing structure. A ball valve or a diaphragm valve has a structure in which a shaft rotates, and an O-ring or a gland packing is used for shaft sealing of the rotating shaft. As for the ball valve, a Teflon (trade name) sheet press-contacted in advance to the vacuum flow path and the ball seal is used, and this generates a resistance friction force when the shaft is rotated.
Some valves use a bellows, but since this is a structure that moves directly, the movement distance of the stem is long.
[0003]
[Problems to be solved by the invention]
However, among the above valves, the rotary type valve body is likely to cause a vacuum leak due to the displacement of the shaft seal O-ring or gland packing during operation, and it is difficult to maintain a vacuum for a long period (year level). is there.
The bellows valve requires a long bellows for linear movement of the stem although there is no problem in maintaining the vacuum.
And the above-mentioned O-ring and the gland packing itself cause permeation leakage, and there is a problem in heat resistance.
The present invention has been made in view of such circumstances, and provides a vacuum valve that suppresses wear of a rotating plug without performing shaft sealing using an O-ring or a gland packing, and further significantly suppresses leakage. For the purpose.
[0004]
[Means for Solving the Problems]
The vacuum valve according to the first aspect of the present invention has a valve body in which the inside is a flow path, a joint is provided on both sides, and a plug housing portion is provided in the center, and the plug housing portion is connected to the valve body. In a vacuum valve having a truncated cone-shaped plug that is movably housed and has a horizontal through hole formed in the center, and a rotation driving means for the plug,
Elevating means for moving the plug up and down with respect to the plug storage portion is provided , and the plug is rotated by the rotation drive means in a state where the plug is lifted with respect to the plug storage portion , and The elevating means includes a spring that biases the plug toward the diameter expansion side, a pressure fitting that covers the top of the diameter expansion of the plug, pushes the plug against the spring, and is screwed into the pressure fitting to press the pressure. A handle for raising and lowering the metal fitting, a first flange is provided at an end of the plug housing on the diameter increasing side, and the pressing metal fitting is attached to the first flange in a sealed state. It is stored in an upper housing connected to the plug storage portion by a flange, and the pressing metal fitting and the second flange or the upper housing are connected by a bellows to be in a vacuum state. Maintained for a long period of time is ensured.
[0005]
Here, the vacuum valve according to the second invention is the vacuum valve according to the first invention, wherein the rotation driving means is provided in an internal magnet substantially fixed to the plug, and the plug. The internal magnet has an external magnet that rotates the plug by magnetically operating the plug from the outside in a sealed state. The inner magnet may be a permanent magnet and an electric magnet, and the outer magnet may be a permanent magnet and an electric magnet.
[0006]
A vacuum valve according to a third aspect of the present invention is the vacuum valve according to the second aspect of the present invention, wherein the external magnet is provided on an external handle disposed so as to be rotatable with the plug and the shaft center aligned.
A vacuum valve according to a fourth aspect of the present invention is the vacuum valve according to the first to third aspects of the present invention, wherein the flow path is sealed when the flow path is closed by the plug on the conical surface of the plug. An O-ring groove for providing an O-ring is formed. When the flow path is closed with the plug, the O-ring groove and the flow path are preferably concentric. Further, the size of the plug is determined so that the horizontal through hole and the O-ring groove of the plug do not interfere with each other.
A vacuum valve according to a fifth invention is the vacuum valve according to the first to fourth inventions, wherein the valve body and the plug are made of titanium, a titanium alloy or stainless steel.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Next, embodiments of the present invention will be described with reference to the accompanying drawings for understanding of the present invention.
FIG. 1 is a sectional view of a vacuum valve according to an embodiment of the present invention, FIGS. 2A and 2B are detailed explanatory views of a plug, and FIG. 3 is an end view taken along the line AA in FIG. FIG. 4 and FIG. 4 are end views taken along line BB in FIG.
[0008]
As shown in FIGS. 1 to 4, the vacuum valve 10 according to one embodiment of the present invention is an example of a joint that is entirely made of titanium, a titanium alloy mainly composed of titanium, or stainless steel. A valve main body 14 having a flow path 13 having flanges 11 and 12 therein is provided.
Metal touch circular rings 15 and 16 constituting a seal portion using a metal gasket are provided on the joint surfaces of the flanges 11 and 12, and the circular rings 15 and 16 are fitted into circular recesses of the opposing flanges. The inside and outside are sealed. In addition, external threads 17 and 18 are formed on the outer peripheral surfaces of the flanges 11 and 12, and are joined to each other via opposing flanges and internal threads. The flanges 11 and 12 and the pipe 19 constituting the flow path 13 are welded. In addition, the flanges 11 and 12 may be general pipe flange type bolted flanges.
[0009]
A plug housing 20 is provided at the center of the valve body 14. The plug storage unit 20 has a columnar storage unit main body 21 which is attached to the pipe 19 in a state where the axis centers thereof are orthogonal to each other. The storage unit main body 21 has a truncated cone-shaped storage that expands upward. A space 22 is formed. A first flange 23 is provided at the end of the plug housing 20 on the diameter increasing side, that is, at the upper end of the housing main body 21. A circular ring 24 constituting a protruding metal touch seal is provided inside the first flange 23.
A lower housing 25 is welded to the inside of the lower end of the storage unit body 21. A guide shaft 26 is provided at the center of the lower housing 25, and an external handle 28 is rotatably provided at the lower end of the guide shaft 26 via a bearing 27. The outer handle 28 is provided with a flange 29 close to the lower end surface of the storage unit main body 21, and a partial spherical recess is provided at the 90 ° position on the upper surface of the flange 29, and further, the outer handle 28 is partially fitted into the recess, A stopper member 30 having a protruding ball urged by a spring on the outside is embedded in the lower end of the storage portion main body 21. As a result, when the external handle 28 is rotated, the predetermined angular position can be easily recognized and stopped at that position.
[0010]
A truncated cone-shaped plug 31 whose main portion has the same slope angle as that of the storage space 22 is stored in the truncated cone-shaped storage space 22 that expands upward. The plug 31 has a cylindrical protrusion 32 at the center of the upper end, and a ring-shaped recess 33 around the protrusion 32. A sliding bush 34 having an L-shaped cross section is screwed to the ring-shaped recess 33. On the other hand, a guide tube 36 having a cylindrical hole 35 formed in the center is provided at the lower end of the plug 31. The above-described guide shaft 26 is fitted inside the cylindrical hole 35, a step 37 is provided in the middle portion of the guide shaft 26 and the diameter is reduced toward the front side, and a sliding washer 37a is provided in that portion to provide a coil spring. (An example of a spring) It is a seat on one side of 38. The other side of the coil spring 38 is in contact with the bottom of the cylindrical hole 35 via a sliding washer 39. Thus, by arranging the coil spring 38 at the bottom of the plug 31, the entire plug 31 is biased in the diameter increasing direction of the plug 31 and the plug storage portion 20. By arranging the sleeve 40 inside the cylindrical hole 35, the guide cylinder 36 and the guide shaft 26 are smoothly rotated.
[0011]
Permanent magnets 41 and 42, which are examples of internal magnets, are alternately arranged and fixed on the entire outer circumference of the guide cylinder 36 so as to face each other. And the permanent magnets 43 and 44 which are examples of an external magnet are provided in the external handle 28 facing this permanent magnet 41 and 42. As shown in FIG. The permanent magnet 41 and the permanent magnet 43, and the permanent magnet 42 and the permanent magnet 44 are arranged in pairs so as to be different from each other (N pole and S pole) and can be attracted and operated in a sealed state. ing. Accordingly, when the external handle 28 is rotated while the plug 31 is free to rotate, the plug 31 moves in synchronization with the rotation of the external handle 28. In addition, the rotation drive means which has the permanent magnets 41-44 and the external handle 28, and magnetically operates the plug 31 in the sealing state is formed. In addition, an electromagnet can also be used instead of the permanent magnets 41 to 44, and a control device is naturally necessary for the electromagnet.
In the center of the plug 31, a horizontal through hole 45 is provided that matches the flow path 13 of the pipe 19 when the plug 31 is mounted in close contact with the storage space 22. From this position, the diameter of the flow path 13 or the shape of the plug 31 is determined such that when the plug 31 is rotated 90 degrees, the plug 31 completely closes the flow path 13.
[0012]
Next, the upper housing 46 attached to the upper part of the plug storage part 20 and its peripheral part will be described.
The upper housing 46 has a small flange 46 a at the bottom, and is screwed to the second flange 47 via a plurality of bolts 48. The second flange 47 is provided with a circular concave portion 49 into which the circular ring 24 of the first flange 23 is fitted, and the first and second flanges 23 and 47 are screwed to form a metal using a metal gasket. Touch sealing has been done. An intermediate position of the upper housing 46 has a square cross section as shown in FIG. 4, and a tubular pressing fitting 50 is provided inside the upper housing 46 so as to be movable up and down. The pressing metal 50 has a quadrangular section on the upper and outer sides, and is fitted into the inner section rectangular part of the upper housing 46, whereby the pressing metal 50 moves up and down without rotating. In addition, a projecting portion 32 serving as an enlarged top portion of the plug 31 having a circular cross section is inserted into the pilot hole 51 having a circular cross section of the pressing metal 50 via a flat bush 52 and a cylindrical bush 53. A female screw 54 is formed on the upper side of the press fitting 50, and a male screw 57 formed on the lower part of the drive shaft 56 of the handle 55 is screwed. The drive shaft 56 of the handle 55 is rotatably supported by a bearing 58 provided on the upper portion of the upper housing 46, and the pressing fitting 50 is moved up and down by rotating the operation portion 59 of the handle 55.
[0013]
Accordingly, although the pressing metal fitting 50, the handle 55, and the coil spring 38 that presses the plug 31 from below are provided, an elevating means for elevating the plug 31 with respect to the plug housing portion 20 is formed. When the handle 55 is turned clockwise or counterclockwise, the pressing fitting 50 is raised and lowered, and the plug 31 pressed by the coil spring 38 is raised and lowered. The upper portion of the bearing 58 is pressed by a bearing retainer 59 a, and the bearing retainer 59 a is fixed to the enlarged portion of the upper housing 46 by a plurality of bolts 60. The drive shaft 56 of the handle 55 is provided with a stopper 61 having an enlarged diameter to prevent the handle 55 from being turned too much.
The lower end of the bellows 62 is welded to the lower outer position of the pressing metal fitting 50 that moves up and down, and the upper end of the bellows 62 is welded to the inner peripheral wall of the opening hole 63 into which the pressing metal fitting 50 is fitted in the second flange 47 with a gap. Even if a gap is generated between the plug 31 and the storage space 22 of the plug storage portion 20, the vacuum state is maintained for a long time in this portion.
[0014]
In this embodiment, the outer surface of the plug 31 is simply frustoconical, but as shown in FIGS. 2 (A) and 2 (B), the blind surface perpendicular to the surface on which the horizontal through hole 45 is formed is used. It is preferable to employ a plug 67 in which an O-ring groove 65 having a diameter substantially larger than that of the flow path 13 is provided in the partial conical surface 64 and a sealing metal or rubber O-ring 66 is put therein. As a result, when the flow path 13 is closed by the plug 67, the periphery of the flow path 13 is surrounded by the O-ring 66, and the vacuum can be maintained. In this case, of course, the handle 55 is rotated and the plug 67 is pressed against the plug storage portion 20.
[0015]
In use of the vacuum valve 10, the handle 31 is rotated in the direction of loosening and the plug 31 (67 is the same, the same applies hereinafter) is raised within a small range within the storage space 22 of the plug storage portion 20. The plug 31 is in a freely rotatable state.
Next, the external handle 28 is rotated in a predetermined direction. Thereby, the permanent magnets 41 to 44 are attracted to each other, and the internal plug 31 is rotated to a predetermined position. The predetermined position is a position where the horizontal through hole 45 formed in the plug 31 and the flow path 13 coincide with each other, a position where the horizontal through hole 45 is orthogonal to the water flow path 13, that is, the flow path 13 is blocked by the plug 31. It is a position to be done.
In this state, the handle 31 is turned in the closing direction, that is, in the direction in which the pressing metal fitting 50 is lowered, and the plug 31 is pressed against the coil spring 38 by the pressing metal fitting 50, so The plug 31 is pushed into 22. Thereby, the open state or the closed state of the flow path 13 is maintained.
In this embodiment, the flange 11, the circular ring 15 and the male screw 17 are a single piece, and the flange 12, the circular ring 16 and the male screw 18 are a single piece. Further, the plug housing portion 20, the housing portion main body 21, the first flange 23 and the circular ring 24 are integrated, and the external handle 28 and the flange 29, the plug 31 and the protruding portion 32, the upper housing 46 and the small flange 46a are respectively provided. It is a one-piece.
[0016]
【The invention's effect】
In the vacuum valve according to any one of claims 1 to 5, an elevating means for moving the plug up and down with respect to the plug accommodating portion is provided, and the plug is rotated by the rotation driving means while the plug is lifted with respect to the plug accommodating portion. Since the movement is performed, the plug rotates smoothly, and the plug and the mating side against which the plug contacts are not easily damaged. As a result, it is possible to provide a vacuum valve that can be used for a long time.
In particular , in this vacuum valve, the elevating means includes a spring that biases the plug toward the diameter expansion side, a pressure fitting that covers the top of the diameter expansion of the plug, pushes the plug against the spring, and is screwed to the pressure fitting. And a handle for raising and lowering the pressing bracket, a first flange is provided at the end of the plug housing on the diameter increasing side, and the pressing bracket is attached to the first flange in a sealed state. Is housed in the upper housing connected to the plug housing portion, and the press fitting and the second flange or the upper housing are connected by the bellows, so that the vacuum state of the valve itself can be maintained for a long time regardless of whether the vacuum valve is opened or closed. Is secured.
[0017]
In the vacuum valve according to claims 2 and 3 , the rotation driving means magnetizes the internal magnet substantially fixed to the plug and the internal magnet provided on the plug from the outside with the plug sealed. Since it has the external magnet which operates and rotates a plug, the rotation operation of a plug can be performed in the state which interrupted the inside and outside, and the valve | bulb for vacuum which can be leaked more can be provided. Here, if an electromagnet is used for one or both of the internal magnet and the external magnet, automatic control can be performed.
In the vacuum valve according to claim 4 , the conical surface of the plug is formed with an O-ring groove for providing an O-ring for sealing the flow path when the flow path is closed by the plug. The maintenance of the vacuum state of the closed device can be enhanced.
In the vacuum valve according to claim 5 , since the valve main body and the plug are made of titanium, titanium alloy or stainless steel, they are resistant to corrosion, and when titanium or titanium alloy is used, they are generated from the inside of the metal. Since there is less gas, a higher vacuum can be maintained.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a vacuum valve according to an embodiment of the present invention.
FIGS. 2A and 2B are detailed explanatory views of plugs.
FIG. 3 is an end view taken along the line AA in FIG. 1;
4 is an end view taken along the line BB in FIG. 1. FIG.
[Explanation of symbols]
10: vacuum valve, 11, 12: flange, 13: flow path, 14: valve body, 15, 16: circular ring, 17, 18: male thread, 19: pipe, 20: plug housing, 21: housing body , 22: storage space, 23: first flange, 24: circular ring, 25: lower housing, 26: guide shaft, 27: bearing, 28: external handle, 29: flange, 30: stopper member, 31: plug, 32: Projection, 33: Ring-shaped recess, 34: Sliding bush, 35: Cylindrical hole, 36: Guide tube, 37: Step, 37a: Sliding washer, 38: Coil spring, 39: Sliding washer, 40: Sleeve, 41 ˜44: Permanent magnet, 45: Horizontal through hole, 46: Upper housing, 46a: Small flange, 47: Second flange, 48: Bolt, 49: Circular recess, 50: Pressing 51: pilot hole, 52: flat bush, 53: cylindrical bush, 54: female screw, 55: handle, 56: drive shaft, 57: male screw, 58: bearing, 59: operating part, 59a: bearing retainer, 60 : Bolt, 61: Stopper, 62: Bellows, 63: Opening hole, 64: Blind part conical surface, 65: O-ring groove, 66: O-ring, 67: Plug

Claims (5)

The inside is a flow path, a valve body provided with joints on both sides and a plug housing part in the center, and is pivotally housed in the plug housing part, and a horizontal through hole is formed in the center. In a vacuum valve having a frustoconical plug and a rotation driving means for the plug,
Elevating means for moving the plug up and down with respect to the plug storage portion is provided , and the plug is rotated by the rotation drive means in a state where the plug is lifted with respect to the plug storage portion , and The elevating means includes a spring that biases the plug toward the diameter expansion side, a pressure fitting that covers the top of the diameter expansion of the plug, pushes the plug against the spring, and is screwed into the pressure fitting to press the pressure. A handle for raising and lowering the metal fitting, a first flange is provided at an end of the plug housing on the diameter increasing side, and the pressing metal fitting is attached to the first flange in a sealed state. It is stored in an upper housing connected to the plug storage portion by a flange, and the pressing metal fitting and the second flange or the upper housing are connected by a bellows to be in a vacuum state. Long maintained is reserved vacuum valve according to claim Rukoto. 2. The vacuum valve according to claim 1 , wherein the rotation driving means magnetizes the internal magnet substantially fixed to the plug and the internal magnet provided on the plug from the outside with the plug sealed. A vacuum valve comprising an external magnet that operates to rotate the plug. 3. The vacuum valve according to claim 2 , wherein the external magnet is provided on an external handle disposed so as to be rotatable in alignment with the plug and an axis. 4. The vacuum valve according to claim 1, wherein an O-ring groove is provided on a conical surface of the plug to provide an O-ring that seals the flow path when the flow path is closed with the plug. 5. A vacuum valve characterized in that is formed. The vacuum valve according to any one of claims 1 to 4 , wherein the valve body and the plug are made of titanium, a titanium alloy, or stainless steel.

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