JP2003049968A - Valve for vacuum - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a valve for vacuum capable of restraining abrasion of a rotating plug and remarkably restraining leakage without performing shaft- sealing with an O ring or a gland packing. SOLUTION: This valve 10 for vacuum is equipped with: a valve body 14 having a flow passage 13 in an inside, joints 11 and 12 at both sides, and a plug accommodation part 20 at a center; a conic plug 31 rotatably accommodated in the plug accommodation part 20 and having a horizontal through hole 45 at a center; and a rotationally driving means for the plug 31. A lifting and lowering means is provided for lifting and lowering the plug 31 with respect to the plug accommodation part 20. The plug 31 is rotated by the rotationally driving means in a state where the plug 31 is lifted from the plug accommodation part 20.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum valve having a rotating frustoconical plug, and more particularly to a vacuum valve with reduced leakage.

[0002]

2. Description of the Related Art Many vacuum valves usually have an L-shaped angle because of their simple sealing structure.
A ball valve or a diaphragm valve has a structure in which a shaft rotates, and an O-ring or a gland packing is used to seal the shaft of the rotating shaft. As for the ball valve, a Teflon (trade name) sheet, which is pre-press-contacted with the vacuum passage and the seal of the ball, is used, and when the shaft is rotated, this produces a resistance frictional force. Some valves use bellows, but since this is a structure that moves directly, the movement distance of the stem is long.

[0003]

However, among the above-mentioned valves, the rotary type of the valve body is highly likely to cause vacuum leakage due to the displacement of the O-ring of the shaft seal and the gland packing during the operation, and the valve is used for a long time (yearly). It is also difficult to maintain the level) vacuum. Also, regarding the bellows valve, although there is no problem in maintaining the vacuum, a long bellows is required for the linear movement of the stem. Further, the O-ring and the gland packing themselves also cause a leakage leak, which causes a problem in heat resistance. The present invention has been made in view of such circumstances.
It is an object of the present invention to provide a vacuum valve that does not perform shaft sealing using a ring or a gland packing, suppresses wear of a rotating plug, and further significantly suppresses leakage.

[0004]

A vacuum valve according to a first aspect of the present invention, which has the above object, is a valve having a flow passage inside, a joint on both sides, and a plug housing in the center. A vacuum valve having a main body, a frustoconical plug that is rotatably housed in the plug housing, and has a horizontal through hole formed in the center, and a rotation driving means for the plug, wherein the plug is Elevating means for moving up and down with respect to the plug storage portion is provided, and the plug is rotated by the rotation drive means in a state where the plug is lifted with respect to the plug storage portion.

A vacuum valve according to a second aspect of the present invention is the vacuum valve according to the first aspect, wherein the elevating means urges the plug toward the diameter-increasing side and a diameter-increasing portion of the plug. A pressing metal fitting that covers the top and presses down the plug facing the spring, and a handle that is screwed into the pressing metal and moves up and down the pressing metal fitting; A first flange is provided, and the pressing metal fitting is housed in an upper housing connected to the plug housing by a second flange mounted in a sealed state with the first flange. The second flange or the upper housing is connected by a bellows to ensure that the vacuum state is maintained for a long time. A vacuum valve according to a third invention is the vacuum valve according to the first or second invention, wherein the rotation driving means is provided in the plug and an internal magnet substantially fixed to the plug. The internal magnet has an external magnet for rotating the plug by magnetically operating the plug from the outside in a sealed state. The inner magnet may be a permanent magnet or an electric magnet, and the outer magnet may be a permanent magnet or an electric magnet.

A vacuum valve according to a fourth aspect of the present invention is the vacuum valve according to the third aspect of the present invention, wherein the external magnet is provided on an external handle that is rotatably disposed with its axis aligned with the plug. ing. A vacuum valve according to a fifth aspect is the vacuum valve according to any one of the first to fourth aspects, wherein the conical surface of the plug seals the flow passage when the plug closes the flow passage. An O-ring groove for forming an O-ring is formed. When the flow path is closed by the plug, the O-ring groove and the flow path are preferably concentric. Further, the size of the plug is determined so that the horizontal through hole of the plug and the O-ring groove do not interfere with each other. And
A vacuum valve according to a sixth aspect is the vacuum valve according to any one of the first to fifth aspects, wherein the valve body and the plug are made of titanium, a titanium alloy, or stainless steel.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION Next, referring to the attached drawings, an embodiment in which the present invention is embodied will be described to provide an understanding of the present invention. Here, FIG. 1 is a cross-sectional view of a vacuum valve according to an embodiment of the present invention, FIGS. 2A and 2B are detailed explanatory views of a plug, and FIG. 3 is an end surface taken along the line AA in FIG. FIG. 4 is an end view taken along the line BB in FIG.

As shown in FIGS. 1 to 4, a vacuum valve 10 according to an embodiment of the present invention is wholly made of titanium, a titanium alloy containing titanium as a main component, or stainless steel. It has a valve body 14 having therein a flow path 13 having flanges 11 and 12 as an example. On the joint surfaces of the flanges 11 and 12, there are provided metal touch circular rings 15 and 16 which form a seal portion using a metal gasket, and the circular rings 15 and 16 are fitted into the circular concave portions of the opposing flanges. The inside and outside are sealed. In addition, external threads 17 and 18 are formed on the outer peripheral surfaces of the flanges 11 and 12, and are joined to the opposing flanges via internal threads. Further, the flanges 11 and 12 and the pipe 19 forming the flow path 13 are attached by welding. The flanges 11 and 12 may be general pipe flange type bolt tightening flanges.

A plug accommodating portion 20 is provided at the center of the valve body 14. The plug housing 20 is a pipe 19
On the other hand, a cylindrical storage unit main body 21 is attached by penetrating with the respective axial centers orthogonal to each other, and the storage unit main body 21 is formed with a truncated cone-shaped storage space 22 that expands upward. . A first flange 23 is provided at the end of the plug housing portion 20 on the enlarged diameter side, that is, at the upper end of the housing body 21. Inside the first flange 23, a circular ring 24 that constitutes a protruding metal touch seal is provided. Inside the lower end of the storage unit body 21, the lower housing 2
5 is attached by welding. A guide shaft 26 is provided at the center of the lower housing 25, and an outer handle 28 is rotatably provided at the lower end of the guide shaft 26 via a bearing 27. The outer handle 28 is provided with a flange 29 close to the lower end surface of the storage section main body 21.
A partial spherical concave portion is provided at the 90 degree position on the upper surface of the stopper member, and further, a stopper member 30 partially fitted in the concave portion and having a projecting ball urged by a spring to the outside.
Is embedded in the lower end of the storage unit main body 21. Thus, when the external handle 28 is rotated, its predetermined angular position can be easily recognized, and the external handle 28 can be stopped at that position.

A frustoconical storage space 22 whose diameter is expanded upward accommodates a frustoconical plug 31 whose main part has the same slope angle as the storage space 22. The plug 31 has a cylindrical protrusion 32 at the center of the upper end and a ring-shaped recess 33 around the protrusion 32. Ring-shaped recess 3
A slide bush 34 having an L-shaped cross section is screwed to the screw 3. On the other hand, the lower end of the plug 31 has a cylindrical hole 35 at the center.
A guide cylinder 36 in which is formed is provided. Cylindrical hole 3
The guide shaft 26 is fitted inside the guide shaft 5, and a step 37 is provided in the middle portion of the guide shaft 26 to reduce the diameter toward the front side. A slide washer 37a is provided in that portion to provide a coil spring (spring). One example) 38 is a seat on one side. The other side of the coil spring 38 is a slide washer 3
It is in contact with the bottom of the cylindrical hole 35 via 9. By thus disposing the coil spring 38 on the bottom of the plug 31, the entire plug 31 is urged in the radial direction of the plug 31 and the plug housing 20. By disposing the sleeve 40 inside the cylindrical hole 35, the guide cylinder 36 and the guide shaft 26 rotate smoothly.

Permanent magnets 41 and 42, which are examples of internal magnets, are alternately arranged and fixed on the entire outer circumference of the guide cylinder 36 so as to face each other. The permanent magnets 43 and 44, which are examples of external magnets, are provided on the external handle 28 so as to face the permanent magnets 41 and 42. The permanent magnet 41 and the permanent magnet 43, and the permanent magnet 42 and the permanent magnet 44 are arranged in pairs so as to have mutually different polarities (N pole and S pole), so that they can be sucked and operated in a sealed state. ing. Therefore, when the plug 31 can rotate freely, the external handle 2
When 8 is rotated, the plug 31 moves in synchronization with the rotation of the external handle 28. It is to be noted that the rotary drive means is formed which has the permanent magnets 41 to 44 and the external handle 28 and magnetically operates the plug 31 in a sealed state.
An electromagnet may be used instead of the permanent magnets 41 to 44, and a control device is naturally required when using the electromagnet. At the center of the plug 31, a horizontal through hole 45 that matches the flow path 13 of the pipe 19 when the plug 31 is closely attached to the storage space 22 is provided. Then, when the plug 31 is rotated 90 degrees from this position,
The flow path 1 is formed so that the plug 31 completely closes the flow path 13.
The diameter of 3 or the shape of the plug 31 is determined.

Next, the upper housing 46 attached to the upper portion of the plug housing 20 and its peripheral portion will be described. The upper housing 46 has a small flange 46a at the bottom and is screwed to the second flange 47 via a plurality of bolts 48. The second flange 47 is provided with a circular recess 49 into which the circular ring 24 of the first flange 23 is fitted, and the first and second flanges 23 and 47 are screwed together to form a metal using a metal gasket. Touch sticker is done. As shown in FIG. 4, an intermediate position of the upper housing 46 has a quadrangular cross section, and a tubular pressing member 50 is provided therein so as to be vertically movable. The pressing metal fitting 50 has a quadrangular cross section on the upper and outer sides, and is fitted into the quadrangular cross section of the inner side of the upper housing 46, whereby the pressing metal fitting 50 moves up and down without rotating.
Further, the projecting portion 32, which serves as a diameter-expanded top of the plug 31 having a circular cross section, is inserted into the pilot hole 51 of the pressing metal fitting 50 having a circular cross section through the flat bush 52 and the tubular bush 53. Further, a female screw 54 is formed on the upper side of the pressing fitting 50,
Male screw 5 formed under drive shaft 56 of handle 55
7 is screwed. The drive shaft 56 of the handle 55 is rotatably supported by a bearing 58 provided on the upper portion of the upper housing 46, and the pressing member 50 is moved up and down by rotating the operating portion 59 of the handle 55.

Therefore, the press fitting 50 and the handle 5
5 and a coil spring 38 for pressing the plug 31 from below, an elevating means for elevating the plug 31 with respect to the plug accommodating part 20 is formed. By rotating it counterclockwise, the pressing metal fitting 50 moves up and down, and the plug 31 pressed by the coil spring 38 moves up and down. In addition, the bearing 58 holds the upper portion of the bearing 5
The bearing retainer 59a is pressed by 9a and is fixed to the enlarged portion of the upper housing 46 by a plurality of bolts 60. Further, the drive shaft 56 of the handle 55 is provided with an enlarged stopper 61 to prevent the handle 55 from being excessively rotated. Then, the pressing metal fitting 50 that moves up and down
The lower end of the bellows 62 is welded to the lower end of the bellows 62, and the upper end of the bellows 62 is welded to the inner peripheral wall of the opening hole 63 into which the pressing metal fitting 50 is fitted in the second flange 47 with a gap. Even if a gap is created in the storage space 22 of the storage portion 20, the vacuum state is maintained for a long time in this portion.

In this embodiment, the outer surface of the plug 31 is simply frustoconical in shape, but FIGS.
As shown in FIG. 5, an O-ring groove 65 having a diameter substantially larger than that of the flow path 13 is provided in the blind partial conical surface 64 orthogonal to the surface in which the horizontal through hole 45 is formed. It is preferable to employ a plug 67 containing a rubber O-ring 66. As a result, when the flow path 13 is closed by the plug 67, the circumference of the flow path 13 is surrounded by the O-ring 66 and the vacuum can be maintained. In this case, of course, the handle 55 is rotated and the plug 67 is pressed against the plug storage portion 20.

In using the vacuum valve 10,
Rotate the handle 55 in the direction to loosen it and
The same applies to the same).
The plug 31 is raised in a slight range within 2 to allow the plug 31 to freely rotate. Next, the outer handle 28 is rotated in a predetermined direction. As a result, the permanent magnets 41 to 44 attract each other, and the internal plug 31 rotates to a predetermined position. This predetermined position corresponds to the horizontal through hole 4 formed in the plug 31.
5 and the flow path 13 coincide with each other, a position where the horizontal through hole 45 is orthogonal to the water flow path 13, that is, the flow path 13 is the plug 3
It is a position to be closed by 1. In this state, the handle 55 is turned in the direction in which it is closed, that is, the pressing metal fitting 50 is lowered, and the plug 31 is pressed by the pressing metal fitting 50 so as to face the coil spring 38.
The plug 31 is pushed into the frustoconical storage space 22. Thereby, the open state or the closed state of the flow path 13 is maintained. In addition, in this embodiment, the flange 11,
The circular ring 15 and the male screw 17 are one body, and the flange 12, the circular ring 16 and the male screw 18 are one body. Further, the plug housing 20, the housing body 21, the first flange 23, and the circular ring 24 are integrated, and the external handle 28 and the flange 29, the plug 31, and the protruding portion 32.
In addition, the upper housing 46 and the small flange 46a are integrally formed.

[0016]

In the vacuum valve according to the present invention, the elevating means for moving the plug up and down with respect to the plug accommodating portion is provided, and the plug is rotated relative to the plug accommodating portion. Since the rotation of the plug is performed by the means, the rotation of the plug is smooth, and the plug and the other party with which the plug abuts are not easily scratched, and as a result, a vacuum valve that can be used for a long time can be provided. it can.
Particularly, in the vacuum valve according to claim 2, the elevating means is a spring for urging the plug toward the diameter-expanding side, a pressing metal fitting which covers the diameter-expansion top of the plug and presses down the plug facing the spring, and a pressing metal fitting. Has a handle for screwing up and down the pressing fitting, and a first flange is provided at the end of the plug housing on the expanded side, and the pressing fitting is attached to the first flange in a sealed state. It is housed in an upper housing that is connected to the plug housing by a second flange, and the pressing metal member and the second flange or the upper housing are connected by a bellows, so that the vacuum state of the valve itself is independent of whether the vacuum valve is opened or closed. Is maintained for a long time.

Further, in the vacuum valve according to the third and fourth aspects, the rotary drive means includes an internal magnet substantially fixed to the plug and an internal magnet provided in the plug in a sealed state of the plug. Since it has an external magnet that magnetically operates from the outside to rotate the plug, the plug can be rotated while the inside and outside are blocked, and a vacuum valve with less leakage can be provided. Here, if an electromagnet is used for one or both of the internal magnet and the external magnet, automatic control can be performed. In the vacuum valve according to claim 5, an O-ring groove is provided on the conical surface of the plug to provide an O-ring for sealing the flow path when the plug closes the flow path. It is possible to enhance the maintenance of the vacuum state of the device in the closed state. In the vacuum valve according to claim 6, since the valve body and the plug are made of titanium, titanium alloy or stainless steel, they are resistant to corrosion, and when titanium or titanium alloy is used, they are generated from inside the metal. Since there is less gas, a higher vacuum can be maintained.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a vacuum valve according to an embodiment of the present invention.

2A and 2B are detailed explanatory diagrams of a plug.

FIG. 3 is an end view taken along the line AA in FIG.

4 is an end view taken along the line BB in FIG.

[Explanation of symbols]

10: vacuum valve, 11, 12: flange, 13: flow path, 14: valve body, 15, 16: circular ring, 1
7, 18: Male screw, 19: Pipe, 20: Plug storage part, 21: Storage part main body, 22: Storage space, 23: First flange, 24: Circular ring, 25: Lower housing,
26: guide shaft, 27: bearing, 28: external handle,
29: flange, 30: stopper member, 31: plug, 32: protrusion, 33: ring-shaped recess, 34: sliding bush, 35: cylindrical hole, 36: guide tube, 37: step, 3
7a: sliding washer, 38: coil spring, 39:
Sliding washer, 40: sleeve, 41-44: permanent magnet, 45: horizontal through hole, 46: upper housing, 46a:
Small flange, 47: second flange, 48: bolt, 4
9: circular recess, 50: pressing metal fitting, 51: pilot hole, 52: flat bush, 53: tubular bush, 54: female screw, 55:
Handle, 56: drive shaft, 57: male screw, 58: bearing, 59: operating part, 59a: bearing retainer, 6
0: Bolt, 61: Stopper, 62: Bellows, 63:
Opening hole, 64: conical surface of blind part, 65: O-ring groove, 6
6: O-ring, 67: plug

Claims (6)

[Claims] 1. A flow passage is formed inside, and joints are formed on both sides.
A valve body having a plug storage portion provided at the center, a conical plug having a horizontal through hole formed in the plug storage portion so as to be rotatable, and a rotation driving means for the plug. A vacuum valve having: a raising / lowering means for moving the plug up and down with respect to the plug storage portion; A vacuum valve characterized by being rotated. 2. The vacuum valve according to claim 1, wherein
The elevating means includes a spring for urging the plug toward the diameter-expanding side, a pressing metal fitting that covers the diameter-expanding top of the plug and presses down the plug facing the spring, and is screwed into the pressing metal fitting to press the plug. A handle for moving the metal fitting up and down, a first flange is provided at an end of the plug accommodating portion on the diameter-increasing side, and the pressing metal fitting is attached to the first flange in a sealed state with a second flange. It is housed in an upper housing that is connected to the plug housing by a flange, and the pressing metal member and the second flange or the upper housing are connected by a bellows to ensure that a vacuum state is maintained for a long time. Characteristic vacuum valve. 3. The vacuum valve according to claim 1, wherein the rotation driving means includes an internal magnet substantially fixed to the plug and the internal magnet provided in the plug, the internal magnet being provided in the plug. A vacuum valve characterized in that it has an external magnet for rotating the plug by magnetically operating from outside in a sealed state. 4. The vacuum valve according to claim 3,
The vacuum valve, wherein the external magnet is provided on an external handle that is rotatably disposed so as to be aligned with the plug in the axis. 5. The vacuum valve according to claim 1, wherein the conical surface of the plug seals the flow passage when the plug closes the flow passage.
A vacuum valve, wherein an O-ring groove for forming a ring is formed. 6. The vacuum valve according to claim 1, wherein the valve body and the plug are made of titanium, a titanium alloy, or stainless steel.