JP4799978B2 - Protective cover and lighting device for discharge lamp - Google Patents

Description

  The present invention relates to a protective cover for a discharge lamp, and in particular, when the discharge lamp is attached to a lighting device, the discharge lamp is prevented from being scratched or foreign matter, and the discharge lamp is prevented from being attached incorrectly, thereby turning on safely. It can relate to a protective cover.

  As shown in FIG. 8, the short arc type discharge lamp includes a central arc tube 2, a sealing tube 3 formed on both sides of the arc tube 2, and a base 4 coupled to the outside of the arc tube 2. It is comprised by. A short arc type discharge lamp is used as a light source of an exposure apparatus for forming a pattern of a semiconductor, a liquid crystal panel, a printed wiring board or the like. There is also a short arc type discharge lamp in which a rare gas such as Xe gas, Kr gas, or Ar gas is sealed in an arc tube at 1 atmosphere or more at room temperature. In addition, in a metal vapor discharge lamp such as a rare gas discharge lamp or a mercury discharge lamp used as a light source for a projector or a projector, there is a discharge lamp in which a rare gas of 1 atm or more is enclosed in an arc tube. Hereinafter, these are referred to as high-pressure gas-filled discharge lamps.

  When a discharge lamp is transported or attached to a device that lights the discharge lamp, if the shock is accidentally applied to the discharge lamp, the discharge lamp may be damaged. In particular, when a high-pressure gas-sealed discharge lamp is broken, the impact of high-pressure gas discharge is great, which can be life-threatening. Even if it does not lead to breakage, if a small scratch or crack occurs due to impact, or if a part of the device part peels off and remains on the surface, the discharge lamp may burst during lighting. In order to avoid such a problem, a safety cover is attached with a string to mitigate the impact when the lamp is ruptured during the work of attaching the discharge lamp to the lighting device. Further, in order to prevent forgetting to remove the protective cover, a resistance circuit and a capacitor circuit are provided on the protective cover so that the lighting device can recognize the presence of the protective cover.

  Moreover, since the short arc type discharge lamp is DC lighting, the polarity and direction which connect to a lighting device are determined in each lighting device. If the polarity (cathode and anode) is connected incorrectly, the cathode will be consumed significantly. The life as a discharge lamp is remarkably shortened. For such problems, measures are taken to clearly indicate the polarity on the base of the discharge lamp, etc., and to call attention so that the mounting direction of the discharge lamp is not mistaken. Also, the cathode and anode have different terminal shapes so that they cannot be connected to opposite polarities. Hereinafter, some examples of related art will be given.

  The “safety cover for a discharge lamp” disclosed in Patent Document 1 reduces damage caused when a discharge lamp filled with a high-pressure rare gas bursts. As shown in FIG. 9A, the discharge lamp in which a gas body having a pressure higher than the atmospheric pressure at normal temperature is enclosed is protected. It is a cover formed of a breathable sheet, a breathable cylinder, and a breathable bag. The end of this cover is bound to the stem portion of the discharge lamp or bound outside the base portion.

  The “protective cover for discharge lamp” disclosed in Patent Document 2 can easily attach the protective cover to the discharge lamp, and the protective cover can be removed even after the discharge lamp is attached to the lighting device. This is a protective cover for a discharge lamp that can be easily performed. As shown in FIG. 9B, a self-adhesive sheet was used for the discharge lamp protective cover that covers at least the arc tube portion of the discharge lamp.

  The “discharge lamp protective cover” disclosed in Patent Document 3 prevents forgetting to remove the discharge lamp protective cover that is covered to protect the discharge lamp after the discharge lamp is attached to the discharge lamp lighting device. Is. As shown in FIG. 9C, a resistor circuit or a capacitor circuit connected between the terminals of the discharge lamp or between the caps is provided on the discharge lamp protective cover for covering the discharge lamp. As a result, if you forget to remove the discharge lamp protection cover after attaching the discharge lamp to the discharge lamp lighting device, the discharge lamp will not light even if you try to turn on the discharge lamp. Forgetting can be prevented.

The “ultra-high-pressure mercury lamp” disclosed in Patent Document 4 is free from debris even if the lamp is ruptured when excessive stress exceeding the specified level is applied during lamp replacement work or when the lamp is defective. It is an ultra-high pressure mercury lamp that does not scatter. The ultra-high pressure mercury lamp is used as a light source in a semiconductor exposure apparatus or the like in which a gas at atmospheric pressure or higher is enclosed. As shown in FIG. 9 (d), the protective cover that wraps the bulb and the protective case that is packed during transportation cover the super high pressure mercury lamp twice until it is fixed to the lighting device. After fixing the ultra-high pressure mercury lamp to the lighting device, it is easy to check the presence of the protective cover. The lamp cannot be lit without removing the protective cover.
JP 2002-302180 A Japanese Patent Laid-Open No. 2003-160185 JP 2003-272558 A Japanese Patent Laid-Open No. 2003-309060

  However, the conventional discharge lamp protective cover has the following problems. When the discharge lamp is attached to the lighting device, it is difficult to remove the protective cover. In addition, the lighting device cannot recognize that the mounting direction of the discharge lamp or the type of the discharge lamp is wrong.

  SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned conventional problems and prevent a mistake in mounting a discharge lamp or forgetting to remove the protective cover when a discharge lamp protective cover for safely transporting a discharge lamp is used.

  In order to solve the above problems, in the present invention, the discharge lamp protection for protecting the discharge lamp from mechanical shock, the IC chip holding the information about the protected discharge lamp, and the information of the IC chip And a communication means for reading. In addition, a means for breaking the IC chip in response to an operation of removing the discharge lamp protective cover from the discharge lamp is provided.

  By configuring as described above, the surface of the discharge lamp arc tube can be protected to reduce the damage caused when the discharge lamp filled with the high-pressure rare gas bursts, and the discharge lamp can be attached to the lighting device. Removal is safe and reliable.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to FIGS.

  Embodiment 1 of the present invention is a protective cover for a discharge lamp that includes an IC chip that holds information related to the discharge lamp, and that the IC chip is destroyed when the cover is removed from the discharge lamp.

  FIG. 1 is a conceptual diagram of a protective cover for a discharge lamp in Embodiment 1 of the present invention. It is a figure which shows the state which attached the protective cover to the discharge lamp. In FIG. 1, a discharge lamp 1 is a short arc type discharge lamp. The sealing tube 3 is a portion that seals the arc tube and connects and holds the electrode. The chip 6 is an IC chip that holds information regarding the discharge lamp. The cable 7 is a lead wire for reading and writing the IC chip. The terminal 8 is a terminal for reading and writing of the IC chip. The protective cover 10 is a cover that protects the surface of the arc tube. The divided portion 11 is a slit opening for removing the protective cover.

  FIG. 2 is a diagram illustrating a state in which a discharge lamp with a protective cover is attached to a lighting device. In FIG. 2, a lighting device 50 is a device that is used with a discharge lamp attached. FIG. 3 is a diagram illustrating a state when the protective cover is removed. In FIG. 3, a chip 16 is a destroyed IC chip. FIG. 4 is an enlarged cross-sectional view of the vicinity of the IC chip of the discharge lamp protective cover. FIG. 5 is a conceptual diagram of a protective cover for a discharge lamp made of vinyl or cloth. FIG. 6 is a conceptual diagram of a circuit breaker provided in the divided portion of the discharge lamp protective cover. In FIG. 6, the broken portion 9 is obtained by providing a circuit connecting portion of the IC chip in the divided portion.

  A detailed configuration and function of the discharge lamp protective cover according to the first embodiment of the present invention configured as described above will be described. First, an outline of the discharge lamp protective cover will be described with reference to FIG. The material of the protective cover for the discharge lamp is preferably a material that can reduce the impact when the discharge lamp bursts. Here, a tray of PET material that is press-molded into a shape having a buffer function is used. When the protective cover is removed, it can be divided by the divided portion 11. The IC chip 6 is attached so as to be broken by dividing the divided portion 11 of the protective cover 10. An information communication cable 7 is extended from the IC chip 6 and communicates with the lighting device 50 via the terminal 8. Here, information communication such as provision of the discharge lamp information and confirmation of the discharge lamp mounting state is performed using the communication terminal 8, but it may communicate with the lighting device via the base 4.

  Next, a method for attaching to the lighting device 50 will be described with reference to FIGS. When the discharge lamp 1 is attached to the lighting device 50, information about the discharge lamp 1 is provided from the IC chip 6 of the discharge lamp 1 to the lighting device 50. The lighting device 50 confirms the mounting state of the discharge lamp 1 with the IC chip 6. When the operator attaches the discharge lamp 1 to the lighting device 50, the lighting device 50 reads information about the discharge lamp such as the lighting posture and the specification of the discharge lamp lighting method from the IC chip 6. After the operator confirms that the lighting device 50 has determined that there is no problem in the mounting state of the discharge lamp 1, the protective cover 10 is removed.

  If the attachment state of the discharge lamp 1 is wrong, the discharge lamp 1 with the protective cover 10 removed is reattached to the lighting device 50, which is very dangerous for the operator. Therefore, it is necessary to remove the protective cover 10 after confirming the mounting state of the discharge lamp 1. The lighting device 50 controls the discharge lamp 1 so that it cannot be turned on until it is confirmed that the protective cover 10 has been removed when the IC chip 6 confirms that the discharge lamp 1 has been attached. . As shown in FIG. 3, the IC chip 6 is destroyed when the protective cover 10 is removed from the discharge lamp 1. The destroyed IC chip 16 cannot be returned to the state before being destroyed.

  Next, destruction of the IC chip will be described with reference to FIG. FIG. 4 is an enlarged view of the vicinity of the IC chip 6 in the AA cross section of FIG. As shown in FIG. 4 (a), the integrated IC chip 6 is divided, broken and broken as shown in FIG. 3 (b) as the protective cover 10 is removed. IC chip 16 is obtained. The reason for destroying the IC chip 6 is as follows. When the used discharge lamp 1 is removed from the lighting device 50, there is a risk as in the case of installation. Therefore, when replacing the discharge lamp 1 at the end of its life, it is preferable to remove the protective cover 10 from the lighting device 50 after attaching the protective cover 10 to the discharge lamp 1. In this way, even when the protective cover 10 that has been used once is used again, the lighting device 50 does not mistakenly recognize the discharge lamp 1 because the IC chip 16 of the protective cover 10 is destroyed.

  Next, a soft protective cover will be described with reference to FIG. In the above example, a tray in which a PET material is press-molded is used. However, as shown in FIG. 5, a vinyl sheet, cloth, or the like can be used as a discharge lamp protective cover. Wrap it with a vinyl sheet or cloth to cover the arc tube of the discharge lamp. Decide the thickness of the vinyl sheet or cloth so that the shock can be absorbed sufficiently. The IC chip 6 is affixed to the end portion of the protective cover 10 so as to be destroyed when peeled off. In this way, the IC chip 6 is destroyed when the protective cover 10 is removed.

  Next, another IC chip destruction method will be described with reference to FIG. In the above example, the IC chip itself was destroyed. However, as shown in FIG. 6, the divided part 11 of the protective cover 10 is provided with a broken part 9 that is an extension of a part of the circuit of the IC chip 6. The circuit of the IC chip 6 can be destroyed by breaking at least a part of the circuit. In the above example, the IC chip 6 was destroyed by dividing the divided portion 11 of the protective cover 10, but a stopper (for example, a seal, a heat shrinkable tube, a string, etc.) that holds the discharge lamp 1 is removed. Thus, the IC chip 6 may be destroyed. The destruction means that the state of the IC chip 6 does not return to the initial state, and not only the IC chip 6 is mechanically destroyed but also the function and stored information of the IC chip 6 are destroyed. This is also included in destroying the IC chip 6. For example, as shown in FIG. 6, the information held in the IC chip 6 may be erased by breaking a part of the circuit of the IC chip 6.

  As described above, in the first embodiment of the present invention, the discharge lamp protective cover includes an IC chip that holds information about the discharge lamp, and the IC chip is destroyed when the cover is removed from the discharge lamp. The discharge lamp can be attached to and detached from the lighting device safely and reliably.

  Embodiment 2 of the present invention is a protective cover for a discharge lamp provided with a non-contact IC chip that holds information about the discharge lamp.

  FIG. 7 is a conceptual diagram of a protective cover for a discharge lamp in Embodiment 2 of the present invention. In FIG. 7, a chip 6 is a non-contact IC chip. The transceiver 51 is a wireless communication device that reads and writes a non-contact IC chip.

  A detailed configuration and function of the protective cover for the discharge lamp in the second embodiment of the present invention configured as described above will be described. By using a non-contact IC chip, it is possible to read out the discharge lamp information by non-contact information communication instead of wired communication. The transmitter / receiver 51 on the lighting device side performs wireless information communication between the discharge lamp 1 and the lighting device 50. When the discharge lamp replacement door of the lighting device 50 is opened when the discharge lamp 1 is attached, the lighting device 50 waits until the discharge lamp 1 is carried into the lighting device. When performing information communication wirelessly, confirm that the discharge lamp has been installed so that information communication can be performed if the discharge lamp is installed in the correct orientation, and information communication cannot be performed if the discharge lamp is installed in the wrong orientation. To.

  As shown in FIG. 7, a transceiver 51 for receiving information on the discharge lamp 1 from the IC chip 6 to the lighting device is installed above the discharge lamp mounting position of the lighting device. Since the protective cover 10 has directionality with respect to the tube axis direction of the discharge lamp, the mounting state of the discharge lamp can be confirmed. Further, a tilt sensor or the like may be provided on the IC chip so that the mounting direction of the discharge lamp can be confirmed.

  When the worker attaches the discharge lamp to the lighting device, the lighting device 50 reads information about the discharge lamp, such as the specifications of the discharge lamp lighting method, from the IC chip 6. The operator removes the protective cover 10 after confirming that the lighting device 50 has determined that there is no problem in the mounting state of the discharge lamp 1. When it is confirmed by the IC chip 6 that the discharge lamp 1 has been attached, the lighting device 50 performs control so that the discharge lamp 1 cannot be turned on until it can be confirmed that the protective cover 10 has been removed. When the lighting device confirms that the protective cover 10 has been removed and other safety is confirmed, the discharge lamp can be lit.

  When the end-of-life discharge lamp 1 is removed from the lighting device 50, it is necessary to attach the protective cover 10 to the discharge lamp. If the protective cover 10 is not attached, the attachment by the IC chip cannot be recognized. Therefore, if the discharge lamp is removed without attaching the protective cover 10, the lighting device 50 issues a warning. Alternatively, a mechanism for locking the discharge lamp so that it cannot be removed is provided. When it is confirmed by the lighting device 50 that the protective cover 10 is attached to the discharge lamp 1, information indicating that the discharge lamp is at the end of its life is written in the IC chip 6. Thereby, confusion of the lamp removed from the lighting device can be prevented, and the discharge lamp can be used safely. In addition, if information such as usage time and usage environment is written, it can be used for countermeasures in the event of an abnormality.

  As described above, in the second embodiment of the present invention, the discharge lamp protective cover is configured to include the non-contact IC chip that holds information about the discharge lamp, so that the discharge lamp can be attached to and detached from the lighting device. Safe and reliable.

  The protective cover for a discharge lamp of the present invention is optimal as a protective cover for safely and surely lighting a lamp by preventing erroneous mounting of the discharge lamp and forgetting to remove the protective cover.

It is a conceptual diagram of the protective cover for discharge lamps in Example 1 of this invention. It is a figure which shows the state which attached the discharge lamp which covered the protective cover in Example 2 of this invention to the lighting device. It is a figure which shows a state when removing the protective cover in Example 1 of this invention. It is an expanded sectional view of the IC chip vicinity of the protective cover for discharge lamps in Example 1 of the present invention. It is a conceptual diagram of another example of the protective cover for discharge lamps in Example 1 of this invention. It is a conceptual diagram of the example which provided the fracture | rupture part of the circuit in the division | segmentation part of the protective cover for discharge lamps in Example 1 of this invention. It is a conceptual diagram of the protective cover for discharge lamps in Example 2 of this invention. It is a schematic diagram of the conventional short arc type discharge lamp. It is a conceptual diagram of the protection method of the conventional short arc type discharge lamp.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Discharge lamp 2 Arc tube 3 Sealing tube 4 Base 6 Chip 7 Cable 8 Terminal 9 Broken part
10 Protective cover
11 Divided parts
16 chips
50 lighting device
51 Transceiver

Claims (6)

A discharge lamp protective cover, an IC chip for holding information relating to a protected discharge lamp, a communication means for reading information on the IC chip, and an operation for removing the discharge lamp protective cover from the discharge lamp. And a means for preventing the IC chip from returning to the state prior to destruction . The state of the IC chip is destroyed by means for preventing the state of the IC chip from returning to the state before being destroyed in response to an operation of removing the discharge lamp protective cover from the discharge lamp. The discharge lamp protective cover according to 1. The discharge lamp protective cover according to claim 1, wherein the communication unit includes a wired communication terminal for communicating by electrical contact. The discharge lamp protective cover according to claim 1, wherein the communication unit includes a wireless communication antenna for performing wireless communication. Communication means for communicating with the IC chip of the discharge lamp protective cover according to any one of claims 1 to 4, means for confirming attachment of the discharge lamp by the communication means, and after confirming the attachment of the discharge lamp, Means for confirming removal of the discharge lamp protection cover due to the inability to communicate with the IC chip; and means for enabling lighting of the discharge lamp in response to confirmation of removal of the discharge lamp protection cover. A lighting device for a discharge lamp. Communicating means for communicating with claim 1 discharge lamp protective cover of the IC chip, comprising: a means for verifying by said communication means that the discharge lamp protective cover to the discharge lamp that is mounted is mounted et the said discharge lamp A discharge lamp lighting device comprising: means for controlling so that the discharge lamp can be removed in accordance with confirmation of attachment of the protective cover.

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