JP4578014B2 - Safety cover for discharge lamp - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to a safety cover for a discharge lamp in which high-pressure gas is sealed, and in particular, prevents personal injury and property damage from debris that scatters when it is ruptured due to a natural rupture when not lit or an impact or drop during handling. It is comprised as follows.
[0002]
[Prior art]
As shown in FIG. 5, the mercury discharge lamp 5 includes a central sphere portion 51, stem portions 52 formed on both sides of the sphere portion 51, and a base portion 53 coupled to the outside of the stem portion 52. It is configured.
[0003]
A mercury discharge lamp is used as a light source of an exposure apparatus that forms a pattern such as a semiconductor, a liquid crystal panel, and a printed wiring board. In a mercury discharge lamp, a rare gas such as Xe gas, Kr gas, Ar gas or the like is sealed at 1 atmosphere or more at room temperature. Also, in a metal vapor discharge lamp such as a rare gas type discharge lamp or a mercury discharge lamp used as a light source for a projector or a projector, a rare gas of 1 atm or more at normal temperature is enclosed in an arc tube.
[0004]
When transporting a discharge lamp filled with such a high-pressure rare gas or installing it in a lamp house (an optical system consisting of a reflector or lens), the discharge lamp is accidentally shocked or dropped. If broken, there is a possibility that glass fragments will scatter and cause human and material damage.In particular, if glass fragments enter the human eye, there is a danger of blindness in the worst case. was there. In a semiconductor factory, when a discharge lamp is broken, the air in the clean room may be dusted and contaminated.
[0005]
Furthermore, in a discharge lamp filled with high-pressure gas, it may burst spontaneously even when it is not lit due to residual strain generated during manufacture of the discharge lamp or microcracks on the surface of the arc tube.
[0006]
Therefore, conventionally, a discharge sheet in which high-pressure gas is sealed is provided with a plastic sheet such as vinyl chloride or a molded product matching the shape of the discharge lamp as a safety cover.
[0007]
[Problems to be solved by the invention]
When the safety cover of such a plastic sheet or molded product was verified, when a crack occurred in the arc tube due to impact, dropping, etc., high-pressure gas was ejected from the cracked portion to further expand the crack, and many The safety cover is instantaneously filled with the fragments and the pressure rises, and a part of the safety cover is pierced by the edge of the fragments and ejected together with the fragments.
[0008]
In this way, when a part of the safety cover is broken, high-pressure gas is concentrated and ejected from the fracture opening together with a large number of fragments, so that the ejection speed of the glass fragments is high and the scattering distance is also long. .
[0009]
The energy of each squirting piece (0.5 x square of jetting speed x weight) is almost the same regardless of the size of the shard. Large shards fall close because the squirting speed is slow. It was recognized that the jet velocity was fast and tended to scatter far away.
[0010]
Thus, when a discharge lamp filled with a high-pressure rare gas bursts, there is a great risk that the fragments will scatter widely and cause human and material harm.
[0011]
Therefore, the present invention has been conceived in order to reduce damage caused when a discharge lamp filled with such a high-pressure rare gas bursts.
[0012]
[Means for Solving the Problems]
The safety cover of the discharge lamp of the present invention protects a discharge lamp in which a gas body having a pressure higher than atmospheric pressure is enclosed at room temperature, and is formed of a breathable sheet, a breathable cylinder, and a breathable bag. Yes.
[0013]
Then, the end of the cover is bound to the stem portion of the discharge lamp or bound outside the base portion.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
The safety cover of the discharge lamp of the present invention is composed of a breathable sheet, for example, cotton cloth or nets, that wraps the discharge lamp filled with high-pressure gas.
[0015]
(First embodiment)
As shown in the perspective view of FIG. 1A, a breathable sheet 1a such as a cloth having a width of about the length of the discharge tube 5 is wound around the discharge tube 5 at least once, preferably 1.5 times or more. As shown in the perspective view of FIG. 1 (b), both ends of the wound breathable sheet 1 are bound by the stem 51 portion of the discharge tube 5, or as shown in the perspective view of FIG. They are bundled outside the base of the tube 5.
[0016]
(Second Embodiment)
As shown in the perspective view of FIG. 2, a cylindrical body 1b made by stitching cloth and having both ends opened or a cylindrical body made by knitting with both ends opened is prepared, and a discharge tube 5 is inserted into this cylindrical body 1b. Then, as shown in FIG. 1 (b), both ends of the cylindrical body 1b are bound by the stem 52 portion of the discharge tube 5, or as shown in FIG. 1 (c), the cap 53 of the discharge tube 5 is formed. Bundled outside.
[0017]
(Third embodiment)
As shown in the perspective view of FIG. 2, a cylindrical body 1b having both ends opened by sewing a cloth by a single thread ring stitch is prepared, and a discharge tube 5 is inserted into the cylindrical body 1b. As shown in FIG. 1B, both ends of the cylindrical body 1b are bound at the stem 52 portion of the discharge tube 5 or are bound outside the base 53 of the discharge tube 5 as shown in FIG. .
[0018]
In this way, if the safety cover is sewn by single thread ring stitching, the safety cover can be attached to the lamp house until the installation of the discharge lamp is completed. When one end is pulled to release the seam, the safety cover becomes one piece of cloth and can be easily removed.
[0019]
(Fourth embodiment)
As shown in the perspective view of FIG. 3 (a), a bag body 1c having one end portion closed by stitching cloth or a bag body having one end portion made by knitting is prepared. As shown in the perspective view of FIG. 3 (b), the discharge tube 5 is inserted into the opening, and the opening of the bag 1c is bound by the stem portion of the discharge tube 5, or the perspective view of FIG. 3 (c). As shown, it is bundled outside the base 53 of the discharge tube 5.
[0020]
(Other embodiments)
As a means for binding and closing the opening of the cylindrical body or bag surrounding the discharge tube, as shown in the perspective view of FIG. The string 3 is inserted alternately from the inside to the outside and from the outside to the inside. Then, it is only necessary to pull both ends of the string 3 to bind the opening portion.
[0021]
As a means for binding and closing the opening, as shown in the perspective view of FIG. 4 (b), the periphery of the opening is folded and sewn to form an annular cavity 4. The string 3 is attached to the cavity 4. Insert it. Then, both ends of the string 3 may be pulled to close the opening and bind them.
[0022]
The material of the safety cover described above is cloth, but is not limited to cotton cloth as long as it has air permeability. For example, if it is a material such as polyester or metal, dusting contamination can be prevented even if it is brought into a clean room.
[0023]
【The invention's effect】
As is clear from the description based on the above embodiment, according to the safety cover of the discharge lamp of the present invention, the safety cover has air permeability. As a result, the glass fragments do not scatter at all, and an effect such as a dull sound can be obtained.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a first embodiment of a safety cover according to the present invention;
FIG. 2 is a perspective view showing second and third embodiments of the safety cover of the present invention;
FIG. 3 is a perspective view showing a fourth embodiment of the safety cover of the present invention;
FIG. 4 is a perspective view showing another embodiment of the safety cover of the present invention;
FIG. 5 is a plan view showing an example of a mercury discharge lamp.
[Explanation of symbols]
1a Breathable sheet
1b Breathable cylinder
1c Breathable bag 2 Hole 3 String 4 Annular cavity 5 Discharge lamp

Claims (7)

A discharge lamp comprising a sphere portion in which a gas body having a pressure higher than atmospheric pressure is enclosed at normal temperature, a stem portion formed on both sides of the sphere portion, and a base portion coupled to the outside of the stem portion A safety cover for a discharge lamp, characterized in that the cover is formed of a breathable sheet and is bound to the stem portion of the discharge tube or bound outside the base portion . 2. The safety cover for a discharge lamp according to claim 1, wherein the cover is a cloth or a net and is wound around the surface of the discharge lamp one or more times . Cover, safety cover of the discharge lamp according to claim 1, characterized in that both ends Ru cylindrical body der which is open. The safety cover for a discharge lamp according to claim 3, wherein the safety cover is a cylindrical body in which sheets are sewn together by a single thread ring stitch. The discharge lamp according to claim 1, wherein the cover is a bag body having one end opened and the other end closed, the open end being bound to the stem portion of the discharge lamp or outside the base portion. Safety cover. The binding portion of the cover is formed by making a plurality of holes in the opening portion, and inserting a string through the holes alternately from the inside to the outside and from the outside to the inside. Safety cover for the described discharge lamp. 6. The discharge lamp according to claim 2, wherein the binding portion of the cover is formed by folding the periphery of the opening and sewing to form an annular cavity, and a string is inserted into the cavity. Safety cover.

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