JPH05231074A - Vacuum processing device having observation window - Google Patents

Abstract

PURPOSE:To constitute a vacuum processing device having an observation window closed with a transparent member, with which the inside of a vacuum vessel can be observed easily in a state wherein the transparent member of the observation window is normal, and that, when the transparent member is broken down, its fragments are surely prevented from scattering to the outside of the vessel. CONSTITUTION:In a vacuum processing device having an observation window 2 closed with a glass plate 21, an outer transparent plate 4 is mounted outside the observation window 2, and, at the same time, the peripheral part of said transparent plate 4 is connected to a window frame 31 that is a part of the main body of the device with a sheet-shaped member 5 folded up capable of stretching out. An when the glass plate 21 of the observation window 2 is broken, the outer transparent plate 4 is pulled into a vacuum vessel 1 while stretching out the sheet-shaped member 5 and a scattering preventive membrane 6 of glass fragments is formed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum processing apparatus, and more particularly to a vacuum processing apparatus having an observation window closed by a transparent member (usually tempered glass).

[0002]

2. Description of the Related Art A vacuum processing apparatus exposes an article to a predetermined vacuum while heating it and dries it. When a two-component epoxy resin or a two-component rubber is mixed and used, the mixture is defoamed. In this case, it is used for defoaming in a vacuum while depressurizing the mixed solution by heating the mixed solution, for storing the article under vacuum, for production step in which oxygen is disliked, for example, for performing N ₂ substitution treatment.

Such a vacuum processing apparatus is often provided with an observation window so that an article housed in the apparatus can be observed from the outside. Such an observation window is usually closed by a transparent member typified by tempered glass. When the glass of such an observation window is damaged by some kind of impact, the atmosphere penetrates into the vacuum chamber from the observation window at a speed close to the speed of sound, which causes glass fragments to also penetrate into the chamber and bounce off the inner wall of the chamber. , There is a danger of jumping out to the surface.

Therefore, the following means have been conventionally proposed as means for preventing glass from scattering. As shown in FIG. 4 (A), a curved transparent synthetic resin plate 92 is arranged in front of the observation window glass 91, and its periphery 921 is always brought into contact with the device frame F1 by a spring 93. When 91 is damaged by some impact or the like, as shown in FIG. 4B, the transparent plate 92 is pressed by the atmospheric pressure against the spring 93, so that the surroundings of the transparent plate 92 and the device frame F.
A gap is formed between the glass fragments 1 and 1, and the atmosphere a is allowed to enter the vacuum chamber 95 through the gaps.
This transparent plate 92 prevents 1 from jumping out to the front. As shown in FIG. 5, a flexible transparent synthetic resin plate 98 is provided in front of the observation window glass 96 via a spacer 97, and when the glass 96 is broken, the transparent plate 98 is shown in FIG. At the same time as bending to absorb the atmospheric pressure,
The atmosphere a is allowed to pass through between the spacers 97 and enter the inside of the vacuum chamber 99 from the inside of the transparent plate 98, and the transparent plate 98 prevents glass fragments from jumping to the surface. As shown in FIG. 6, the grid 1 is placed in front of the observation window glass 96.
00, and when the glass 96 is damaged, the atmosphere will
It is intended to enable the glass 100 to enter the vacuum chamber 99 through 00 and prevent the glass fragments from popping out by the lattice 100.

[0005]

However, in the glass scattering prevention means shown in FIGS. 4A and 4B, the atmospheric pressure is suddenly applied to the transparent plate 92 at the same time when the glass window 91 is damaged. Therefore, as shown in FIG. 4C, the transparent plate 92 is also damaged, and the glass fragments 91 are broken.
There is a problem that 1 jumps out to the front.

Also in the glass scattering prevention means shown in FIG. 5, when the window glass 96 is damaged, atmospheric pressure is suddenly applied to the transparent plate 98, and the transparent plate 98 is also damaged.
There is a problem that glass fragments will fly out to the front. further,
The means of FIG. 6 avoids damage to the lattice 100, but when the lattice 100 is coarse, glass fragments are scattered on the surface through the gaps in the lattice. If the grid 100 is made fine to prevent the glass fragments from scattering, it becomes difficult to observe the inside of the vacuum chamber through the observation window.

Therefore, the present invention is a vacuum processing apparatus having an observation window closed by a transparent member, and when the observation window transparent member is in a normal state, the inside of the vacuum chamber can be easily observed through the observation window. An object of the present invention is to provide a vacuum processing apparatus capable of reliably preventing the broken pieces from scattering outside the vacuum chamber when the transparent member is damaged.

[0008]

According to the above object, the present invention provides a vacuum processing apparatus having an observation window closed by a transparent member, wherein an outer transparent member is disposed outside the observation window transparent member and the outer transparent member is The peripheral portion is connected to the apparatus body by a sheet-shaped member that is foldable so that it can be stretched, and when the transparent member of the observation window is broken, the outer transparent member is drawn into the vacuum chamber while stretching the sheet-shaped member, A vacuum processing apparatus having an observation window, characterized in that a debris scattering prevention film is formed by a transparent member and a sheet-like member.

The sheet-like member is not particularly limited as long as it is foldable and has a strength that does not damage even when the observation window transparent member is stretched due to breakage. For example, a wire mesh sheet or a plurality of sheets may be used. Examples thereof include a sheet of metal mesh, a sheet of cloth, a sheet of cloth reinforced with wire mesh, and a synthetic resin sheet reinforced with wire mesh.

The "apparatus body" to which the sheet-like member is connected includes a wall forming a vacuum chamber, a window frame of the observation window, and the like. Further, the outer transparent member, when the observation window transparent member is broken, is easily pulled into the vacuum chamber,
It is desired that the sheet-shaped member has a shape, size, and material that can form the fragment scattering prevention film.

[0011]

According to the vacuum processing apparatus of the present invention, when the transparent member for the observation window is in a normal state, the inside of the vacuum chamber can be easily observed through the outer transparent member and the transparent member for the observation window.
If the observation window transparent member breaks due to some impact, atmospheric pressure is applied to the outer transparent member, so that the outer transparent member is drawn into the vacuum device, and the folded sheet-shaped member is stretched together. It is drawn into the vacuum chamber, and a debris scattering prevention film is formed. Fragments of the transparent member of the observation window are prevented from scattering to the outside by this film.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a schematic sectional view of a portion including an observation window of a vacuum processing apparatus according to an embodiment. FIG. 2 is a sectional view immediately after the glass of the observation window is broken. FIG. 3 is a cross-sectional view showing a state in which glass fragments are prevented from scattering outside.

This vacuum processing apparatus is equipped with a vacuum chamber 1, and an observation window 2 is formed in a part thereof. The observation window 2 is composed of a tempered glass plate 21 that covers the window opening 11 of the vacuum chamber 1 and a window frame 31 that is a part of the apparatus main body that supports the glass plate 21. A packing 31 a for airtight sealing is arranged between the inner surface of the peripheral portion of the glass plate 21 and the window frame 31.

The window frame 31 is formed in a ring shape so as to surround the window opening 11 of the vacuum chamber, and the space 3 is formed therein.
1b is formed. The window frame 31 is fixed to a part 32 of the apparatus body surrounding the vacuum chamber 1 by a member (not shown),
Alternatively, a packing 32a is connected to a hinge (not shown) so as to be openable and closable by a locking device, etc.
Are arranged between the window frame 31 and a part 32 of the apparatus main body.

A transparent plate 4 arranged in front of the glass plate 21 is attached to the window frame 31. In this example, the transparent plate 4 is a polycarbonate transparent plate having heat resistance and appropriate strength. The transparent plate is attached by connecting the peripheral portion of the transparent plate to the window frame 31 with an adhesive 41 for airtight sealing. In the space 31b in the window frame 31, a sheet-like member 5 having a plurality of fine meshes stacked is arranged. The sheet-shaped member 5 is formed in a tubular shape as a whole, is arranged so as to surround the glass plate 21, is folded, and has one end connected to the transparent plate 4 and the other end inside the window frame 31. Is linked to.

According to the vacuum processing apparatus described above, when the window glass 21 is broken due to some impact or the like, the transparent plate 4 is bent under atmospheric pressure and curved toward the window glass 21 and the glass fragments 211 are removed. Enter the vacuum chamber 1.
After that, as shown in FIG. 3, the transparent plate 4 is separated from the window frame 31 under atmospheric pressure and sucked into the vacuum chamber 1. At the same time, the folded sheet-shaped member 5 is stretched and also enters the vacuum chamber 1. Thus, in the vacuum chamber 1, the transparent plate 4 and the sheet-like member 5 connected thereto form a shatterproof film 6 for the glass fragments 211, and the presence of this film 6 causes the glass fragments 211 to scatter out of the chamber. Is reliably prevented.

The advantages of the apparatus of the embodiment described above can be summarized as follows. When the glass plate 21 is broken, the film 6 reliably prevents glass fragments from scattering outside the device. Since the transparent plate 4 is attached to the window frame 31 and the sheet-like member 5 connected to the transparent plate 4 is housed in the space 31b in the window frame 31, there is no protrusion as a whole and the appearance is good. When the observation window glass 21 is normal, the articles in the vacuum chamber 1 can be easily observed through the transparent plate 4 and the glass plate 21. Since the transparent plate 4 is attached to the window frame 31, it acts as a heat insulating plate, so that the temperature distribution in the vacuum chamber 1 can be maintained in a desired state. This point Figure 5,
In the conventional apparatus shown in FIG. 6, since the observation window glass 96 is in direct contact with the atmosphere, a temperature difference occurs between the central portion of the vacuum chamber and the portion close to the window glass, and the temperature distribution in the vacuum chamber becomes uneven. However, this point is improved in this embodiment.

The present invention is not limited to the above embodiment, but can be implemented in various modes. For example, the material of the transparent plate 4 need not be limited to polycarbonate. However, it is necessary that the transparent plate 4 has such strength, shape and size that even when the glass plate 21 is broken, even the transparent plate 4 is not damaged so as to damage the formation of the film 6. More desirably, it is desirable to have heat resistance to the temperature in the vacuum chamber 1.

In order to achieve the main object of the present invention, the transparent plate 4 does not need to be airtightly attached to the window frame 31, but since the transparent plate 4 has a function as a heat insulating plate, It is desirable that the window frame 31 is attached airtightly or almost airtightly. In addition, for such attachment, an adhesive may be used as in the above-mentioned embodiment, but instead of this adhesive, or together with this adhesive, other suitable means, for example, when the glass plate 21 is broken, it is transparent. The plate 4 may be brought into contact with the window frame 31 directly or through packing or the like by a plate spring, a coil spring, a tongue piece or the like that allows the plate 4 to be drawn into the vacuum chamber 1.

[0020]

As described above, according to the present invention, there is provided a vacuum processing apparatus having an observation window closed by a transparent member,
When the transparent member of the observation window is in a normal state, the inside of the device can be easily observed through the observation window, and when the transparent member is broken, it is possible to reliably prevent the fragments from scattering to the outside of the vacuum chamber. It is possible to provide a vacuum processing apparatus that can be used.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view near an observation window according to an embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view showing a state immediately after the observation window glass is broken.

FIG. 3 is a schematic cross-sectional view showing a state in which a film that prevents scattering of fragments of an observation window glass is formed.

FIG. 4 is an explanatory diagram of a conventional example.

FIG. 5 is an explanatory diagram of another conventional example.

FIG. 6 is an explanatory diagram of still another conventional example.

[Explanation of Codes] 1 vacuum tank 11 window opening of vacuum tank 2 observation window 21 glass plate 31 window frame 31a airtight seal packing 31b space inside the window frame 31 32 part of the apparatus body surrounding the vacuum tank 1 32a airtight seal Packing 4 Polycarbonate transparent plate 5 Sheet-like member 6 Glass fragment scattering prevention film

Claims (1)

[Claims] 1. A vacuum processing apparatus having an observation window closed by a transparent member, wherein an outer transparent member is arranged outside the observation window transparent member, and a peripheral edge portion of the outer transparent member is foldably foldable. When the transparent member of the observation window is broken, the outer transparent member is drawn into the vacuum chamber while extending the sheet-shaped member, and the outer transparent member and the sheet-shaped member prevent the fragments from scattering. A vacuum processing apparatus having an observation window, characterized in that