JP4754011B2 - Inclination angle setting device for stationary plate in vacuum suction pad setting device - Google Patents

Inclination angle setting device for stationary plate in vacuum suction pad setting device Download PDF

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JP4754011B2
JP4754011B2 JP2009142843A JP2009142843A JP4754011B2 JP 4754011 B2 JP4754011 B2 JP 4754011B2 JP 2009142843 A JP2009142843 A JP 2009142843A JP 2009142843 A JP2009142843 A JP 2009142843A JP 4754011 B2 JP4754011 B2 JP 4754011B2
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stationary plate
servo motor
arm
setting device
vacuum suction
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JP2011000643A (en
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一郎 水谷
康 藤井
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株式会社誠和工業
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本発明は、真空吸着パッドをワークの形状に合うように所定の傾斜角度に予め設定するための真空吸着パッドセッティング装置において、真空吸着パッドが載置される定置板の傾斜角度を簡単に設定するための装置に関するものである。   The present invention simply sets the inclination angle of a stationary plate on which a vacuum suction pad is placed in a vacuum suction pad setting device for presetting the vacuum suction pad to a predetermined inclination angle so as to match the shape of the workpiece. It is related with the apparatus for.

本発明者の発明に係る真空吸着パッドセッティング装置は、下記特許文献1に示されたように、多関節アームの先端に設けられた真空吸着パッドの傾斜角度が、設計図面にて指示されたようなワーク表面の平坦な部分に対して常に垂直に相対するように、予め正確に設定できるようにするためのものであり、これによって例えば自動車工場のプレス成形ラインにおける真空吸着パッドの設定の手間を解消するとともに、正確な設定ができることから使用中にワークが脱落するよぅな事故を防止できるものである。   In the vacuum suction pad setting device according to the inventor's invention, as shown in the following Patent Document 1, the inclination angle of the vacuum suction pad provided at the tip of the articulated arm is indicated in the design drawing. For example, it is possible to accurately set in advance so as to always be perpendicular to a flat portion of a workpiece surface. In addition to solving this problem, it is possible to prevent an accident that a workpiece falls off during use because it can be set accurately.

特許第3801498号公報Japanese Patent No. 3801498

ところで、特許文献1に示された装置は、真空吸着パッドを載置する定置板がジャイロ支持盤により支持され、該定置板の下側に設けられた分度器のような二つの角度表示手段を見ながら該ジャイロ支持盤の二つのツマミを手動回転操作することにより、該定置板を水平状態から全方向に傾動させるものであった。このため設定操作がし難く、設定角度が曖昧になるおそれがあった。そこで、回転角度を自在に指令し得るサーボモータにより定置板を角度設定することが考えられたが、特許文献1に示されたようなジャイロ支持盤の直交する二軸に単にサーボモータを設けただけでは、定置板の周縁部に2台のサーボモータが出っ張ることになるので、真空吸着パッドを該定置板上に移動させて載置する際に妨げになるという問題が発生する。
そこで本発明は、サーボモータが真空吸着パッド移動の妨げになることなく、しかも定置板を簡単に正確に角度設定できるようにしようとするものである。
By the way, in the apparatus shown in Patent Document 1, a stationary plate on which a vacuum suction pad is placed is supported by a gyro support plate, and two angle display means such as a protractor provided on the lower side of the stationary plate are viewed. However, the stationary plate is tilted in all directions from the horizontal state by manually rotating the two knobs of the gyro support plate. For this reason, the setting operation is difficult, and the setting angle may become ambiguous. Then, although it was considered to set the angle of the stationary plate with a servo motor that can freely command the rotation angle, the servo motor was simply provided on two orthogonal axes of the gyro support plate as shown in Patent Document 1. However, since two servo motors protrude from the peripheral edge of the stationary plate, there arises a problem that the vacuum suction pad is hindered when being moved and placed on the stationary plate.
Therefore, the present invention is intended to make it possible to set the angle of the stationary plate easily and accurately without hindering the movement of the vacuum suction pad by the servo motor.

そのために本発明に係る真空吸着パッドセッティング装置における定置板の傾斜角度設定装置は、水平面内で縦横に移動可能に支持された移動盤の上に第1サーボモータと第2サーボモータとを互いの回転出力軸が水平面内で直交するように固設し、第1サーボモータの回転出力軸に左右に天秤状に同じ長さで張り出す第1アームを固設し、第2サーボモータの回転出力軸に左右に天秤状に同じ長さで張り出す第2アームを固設し、第1アームの両端部に同一高さの一対の第1リンクを該第1アームが回転する面内でのみ回転が許容されるように枢着し、第2アームの両端部に同一高さの一対の第2リンクを該第2アームが回転する面内でのみ回転が許容されるように枢着し、真空吸着パッドが載置される平坦な載置面を有する定置板を備え、該定置板を該定置板の中心にて回転自在に支持する支持ビームを該定置板の下側に横断状に設け、該支持ビームの両端部を該定置板の外周縁よりも外方に突出させ、該支持ビームの両端部であって該定置板の載置面の中心を中心とする同心円上に一対の第1自在継手を設け、前記第1リンクの上端部を該第1自在継手を介して該支持ビームに連結するとともに、該定置板の外周縁であって前記支持ビームと直交する一直線上に一対の突腕部を突設し、該各突腕部に前記同心円と同じ同心円上に位置する一対の第2自在継手を設け、前記第2リンクの上端部を該第2自在継手を介して該定置板に連結し、第1サーボモータと第2サーボモータを駆動させることで該定置板が水平状態から全方向に傾動するように構成したことを特徴とするものである。   For this purpose, the tilt angle setting device for the stationary plate in the vacuum suction pad setting device according to the present invention is configured such that the first servo motor and the second servo motor are placed on a moving plate supported so as to be movable vertically and horizontally within a horizontal plane. The rotation output shaft is fixed so that it is perpendicular to the horizontal plane, and the first servo motor is fixed to the rotation output shaft of the first servo motor with the same length as the balance, and the rotation output of the second servo motor is fixed. A second arm that protrudes from the left and right to the shaft in the same length as the balance is fixed, and a pair of first links having the same height are rotated at both ends of the first arm only within the plane in which the first arm rotates. And a pair of second links having the same height at both ends of the second arm so as to be allowed to rotate only within the plane in which the second arm rotates. A stationary plate having a flat mounting surface on which the suction pad is mounted A support beam for rotatably supporting the stationary plate at the center of the stationary plate is provided in a transverse shape below the stationary plate, and both ends of the supporting beam protrude outward from the outer peripheral edge of the stationary plate. A pair of first universal joints are provided on both ends of the support beam and concentrically around the center of the mounting surface of the stationary plate, and the upper end of the first link is connected to the first universal joint. A pair of projecting arm portions projecting on a straight line perpendicular to the support beam at the outer peripheral edge of the stationary plate, and each projecting arm portion having the same concentric circle as the concentric circle A pair of second universal joints are provided, and the upper ends of the second links are connected to the stationary plate via the second universal joints, and the first servo motor and the second servo motor are driven to The stationary plate is configured to tilt in all directions from the horizontal state A.

第1サーボモータおよび第2サーボモータにそれぞれ回転角度を指令することにより、定置板を所要傾斜状態に簡単に設定することができる。また、第1サーボモータおよび第2サーボモータが定置板の下方に設けられるので、該各サーボモータは真空吸着パッドを定置板上に移動し載置する際の妨げにならない。   By instructing the rotation angle to each of the first servo motor and the second servo motor, the stationary plate can be easily set to the required inclination state. In addition, since the first servo motor and the second servo motor are provided below the stationary plate, the servo motors do not hinder the movement of the vacuum suction pad on the stationary plate.

本発明に係る真空吸着パッドセッティング装置における定置板の傾斜角度設定装置の正面図。The front view of the inclination-angle setting apparatus of the stationary plate in the vacuum suction pad setting apparatus which concerns on this invention. 図1の傾斜角度設定装置の側面図。The side view of the inclination-angle setting apparatus of FIG. 図1の傾斜角度設定装置の平面図。The top view of the inclination-angle setting apparatus of FIG. 図1の傾斜角度設定装置の斜視図。The perspective view of the inclination-angle setting apparatus of FIG. 図1の作動状態図。The operation state figure of FIG. 本発明に係る真空吸着パッドセッティング装置の斜視図。The perspective view of the vacuum suction pad setting device concerning the present invention.

図1〜図5は本発明に係る定置板の傾斜角度設定装置を示し、図6はこの傾斜角度設定装置が設けられた真空吸着パッドセッティング装置を示す。先ず図1〜図4に従い本発明の傾斜角度設定装置の構造を説明する。図中、1はこの真空吸着パッドセッティング装置によって水平面内でX−Y方向に縦横に移動可能に支持される移動盤である。該移動盤1上にモータ据付台101を設け、第1サーボモータ102を水平に固設し、該第1サーボモータ102の回転出力軸に左右に天秤状に同じ長さで張り出す第1アーム103を固設する。また、該移動盤1上にモータ据付台201を設けその回転出力軸が前記第1サーボモータ102の回転出力軸と水平面内で直交するように第2サーボモータ202を水平に固設し、該第2サーボモータ202の回転出力軸に左右に天秤状に同じ長さで張り出す第2アーム203を固設する。なお、第2アーム203は他の部材との干渉を避けるために平面視でクランク状に形成されているが、第2サーボモータ202の回転出力軸に対しては第1アーム103と同様に左右に天秤状に同じ長さで張り出している。   1 to 5 show an inclination angle setting device for a stationary plate according to the present invention, and FIG. 6 shows a vacuum suction pad setting device provided with the inclination angle setting device. First, the structure of the tilt angle setting device of the present invention will be described with reference to FIGS. In the figure, reference numeral 1 denotes a moving plate supported by the vacuum suction pad setting device so as to be movable in the horizontal and vertical directions in the XY direction. A motor mounting base 101 is provided on the moving board 1, a first servo motor 102 is horizontally fixed, and a first arm that protrudes to the left and right of the rotary output shaft of the first servo motor 102 in the same length as a balance. 103 is fixed. Further, a motor mounting base 201 is provided on the moving board 1, and a second servo motor 202 is horizontally fixed so that its rotation output shaft is orthogonal to the rotation output shaft of the first servo motor 102 in a horizontal plane, A second arm 203 is fixed to the rotation output shaft of the second servo motor 202 to the left and right in the form of a balance with the same length. The second arm 203 is formed in a crank shape in plan view to avoid interference with other members, but the left and right sides of the rotation output shaft of the second servo motor 202 are the same as the first arm 103. It is overhanging in the form of a balance with the same length.

第1アーム103の両端部104a,104bは平面視で二股状に形成されている。105a,105bは高さ方向成分が同一の一対の第1リンクで、該第1リンクの下端部を該二股状部間に挿入してピン106a,106bを貫挿することにより、該第1リンク105a,105bを該第1アーム103が回転する面内でのみ回転が許容されるように枢着する。また、第2アーム203の両端部204a,204bも平面視で二股状に形成されている。205a,205bは高さ方向成分が同一の一対の第2リンクで、該第2リンクの下端部を該二股状部間に挿入してピン206a,206bを貫挿することにより、該第2リンク205a,205bを該第2アーム203が回転する面内でのみ回転が許容されるように枢着する。要するに、第2リンク205a,205b、および第1リンク105a,105bは、互いに直交する鉛直面内で回転が許容されるようにそれぞれ枢着される。なお、第2リンク205bは図示されているように他の部材との干渉を避けるために傾斜状に屈折した形状に形成されている。   Both end portions 104a and 104b of the first arm 103 are formed in a bifurcated shape in plan view. 105a and 105b are a pair of first links having the same height direction component. The first link is inserted by inserting the lower end of the first link between the bifurcated portions and penetrating the pins 106a and 106b. 105a and 105b are pivotally attached so that the rotation is allowed only in the plane in which the first arm 103 rotates. Also, both end portions 204a and 204b of the second arm 203 are formed in a bifurcated shape in plan view. 205a and 205b are a pair of second links having the same height direction component, and the second link is inserted by inserting the lower end of the second link between the bifurcated portions and inserting the pins 206a and 206b. 205a and 205b are pivotally attached so that the rotation is allowed only in the plane in which the second arm 203 rotates. In short, the second links 205a and 205b and the first links 105a and 105b are pivotally attached so as to be allowed to rotate in vertical planes orthogonal to each other. In addition, the 2nd link 205b is formed in the shape refracted | inclined in order to avoid interference with another member as shown in the figure.

300は平坦な載置面301を有した円板状の定置板で、該載置面301には該載置面の中心302を中心とする複数の同芯円303が描かれ、後述する真空吸着パッドを該載置面301の中心に位置合わせして載置し易いようにしている。   Reference numeral 300 denotes a disc-shaped stationary plate having a flat placement surface 301. The placement surface 301 has a plurality of concentric circles 303 centered on the center 302 of the placement surface, which will be described later. The suction pad is positioned at the center of the placement surface 301 so that it can be placed easily.

304は定置板300の下側に横断状に設けられた支持ビーム、305は該定置板を該定置板の中心にて回転自在に支持するために該支持ビームの中間点上部に設けられた軸受である。該支持ビーム304の両端部306a,306bは該定置板の外周縁よりも外方に突出しており、該両端部306a,306bであって該定置板の載置面301の中心302を中心とする同心円(前記同芯円303より大径の仮想同芯円)上に一対の第1自在継手107a,107bを設け、前記第1リンク105a,105bの上端部を該第1自在継手107a,107bを介して該両端部306a,306bに連結している。具体的には、図3に示されるように、第1リンク105a,105bの上端部が平面視で二股状に形成され、T字状に直交する2軸からなる第1自在継手107a,107bの両端部軸108を該二股状部間に回転自在に設けるとともに第3の軸109を支持ビームの両端部306a,306bに回転自在に貫挿している。   Reference numeral 304 denotes a support beam provided in a transverse manner below the stationary plate 300, and reference numeral 305 denotes a bearing provided above the intermediate point of the support beam so as to rotatably support the stationary plate at the center of the stationary plate. It is. Both end portions 306a and 306b of the support beam 304 protrude outward from the outer peripheral edge of the stationary plate, and the both end portions 306a and 306b are centered on the center 302 of the mounting surface 301 of the stationary plate. A pair of first universal joints 107a and 107b is provided on a concentric circle (a virtual concentric circle having a diameter larger than that of the concentric circle 303), and the upper ends of the first links 105a and 105b are connected to the first universal joints 107a and 107b. Via both ends 306a and 306b. Specifically, as shown in FIG. 3, the upper ends of the first links 105a and 105b are formed in a bifurcated shape in plan view, and the first universal joints 107a and 107b having two axes orthogonal to the T-shape. Both end shafts 108 are rotatably provided between the bifurcated portions, and a third shaft 109 is rotatably inserted into both end portions 306a and 306b of the support beam.

一方、定置板300の外周縁であって前記支持ビーム304と直交する一直線上に一対の突腕部307a,307bを突設し、該各突腕部に前記同心円と同じ同心円上に位置する一対の第2自在継手207a,207bを設け、前記第2リンク205a,205bの上端部を該第2自在継手207a,207bを介して定置板300に連結している。これも具体的には、図3に示されるように、第2リンク205a,205bの上端部が平面視で二股状に形成され、T字状に直交する2軸からなる第2自在継手207a,207bの両端部軸208を該二股状部間に回転自在に設けるとともに該第2自在継手の第3の軸209を突腕部307a,307bに回転自在に貫挿している。   On the other hand, a pair of projecting arm portions 307a and 307b are provided on the outer peripheral edge of the stationary plate 300 on a straight line orthogonal to the support beam 304, and a pair of concentric circles located on the same concentric circle as the concentric circles. The second universal joints 207a and 207b are provided, and the upper ends of the second links 205a and 205b are connected to the stationary plate 300 via the second universal joints 207a and 207b. Specifically, as shown in FIG. 3, the second links 205a and 205b are formed with bifurcated upper ends of the second links 205a and 205b. Both end shafts 208 of 207b are rotatably provided between the bifurcated portions, and a third shaft 209 of the second universal joint is rotatably inserted into the projecting arm portions 307a and 307b.

このように構成した傾斜角度設定装置では、制御盤から前記第1サーボモータ102に回転指令を出し、該第1サーボモータ102の回転出力軸に設けられた第1アーム103を一定角度回転(傾動)させると、該第1アーム103の両端部に枢支された第1リンク105a,105bが上下動し支持ビーム304が傾動する。このため、定置板300を載置面301の中心302を中心として該第1サーボモータ102の回転出力軸と直交する鉛直面内にて傾斜させる。また、制御盤から第2サーボモータ202に回転指令を出し、該第2サーボモータ202の回転出力軸に設けられた第2アーム203を一定角度回転(傾動)させると、該第2アーム203の両端部に枢支された第2リンク205a,205bが上下動することから定置板300を載置面301の中心302を中心として該第2サーボモータ202の回転出力軸と直交する鉛直面内にて傾斜させる。なお、このとき定置板300は支持ビーム304上に回転自在に支持されているので、互いに干渉することなく傾動させることができる。このため、第1サーボモータ102と第2サーボモータ202を駆動させることで該定置板300を水平状態から全方向に傾動させることができる。なお、図5にその傾斜状態の一例を示す。   In the tilt angle setting device configured as described above, a rotation command is issued from the control panel to the first servo motor 102, and the first arm 103 provided on the rotation output shaft of the first servo motor 102 is rotated by a predetermined angle (tilt). ), The first links 105a and 105b pivotally supported at both ends of the first arm 103 move up and down, and the support beam 304 tilts. For this reason, the stationary plate 300 is tilted around a center 302 of the mounting surface 301 in a vertical plane orthogonal to the rotation output axis of the first servo motor 102. When a rotation command is issued from the control panel to the second servo motor 202 and the second arm 203 provided on the rotation output shaft of the second servo motor 202 is rotated (tilted) by a certain angle, the second arm 203 Since the second links 205a and 205b pivotally supported at both ends move up and down, the stationary plate 300 is placed in a vertical plane perpendicular to the rotation output axis of the second servomotor 202 with the center 302 of the mounting surface 301 as the center. And tilt. At this time, since the stationary plate 300 is rotatably supported on the support beam 304, it can be tilted without interfering with each other. Therefore, by driving the first servo motor 102 and the second servo motor 202, the stationary plate 300 can be tilted in all directions from the horizontal state. FIG. 5 shows an example of the inclined state.

次にこの傾斜角度設定装置を備えた真空吸着パッドセッティング装置を図6に従い説明する。移動盤1はリニヤガイド2上に設けられることで水平面内でX方向に進退自在に支持され、さらに該リニヤガイド2が該リニヤガイド2と直交するリニヤガイド3上に設けられることにより、該移動盤1は水平面内でY方向にも進退自在に支持される。即ち、移動盤1はリニヤガイド2とリニヤガイド3とからなる縦横支持機構(XYテーブル)により水平面内で縦横に移動可能に支持される。そしてリニヤガイド2およびリニヤガイド3に駆動源としてそれぞれサーボモータ(図示せず)が備えられ、制御盤(図示せず)からの指令により該サーボモータを所要数回転させることにより該移動盤1を水平面上で所定位置に移動停止できるようにしている。   Next, a vacuum suction pad setting device equipped with this inclination angle setting device will be described with reference to FIG. The movable platen 1 is provided on the linear guide 2 so as to be supported in a horizontal plane so as to be movable back and forth in the X direction. Further, the linear guide 2 is provided on the linear guide 3 orthogonal to the linear guide 2 so that the movement is achieved. The board 1 is supported in a horizontal plane so as to be movable back and forth in the Y direction. That is, the movable board 1 is supported by a vertical / horizontal support mechanism (XY table) comprising a linear guide 2 and a linear guide 3 so as to be movable in the horizontal and vertical directions. The linear guide 2 and the linear guide 3 are each provided with a servo motor (not shown) as a drive source, and the movable board 1 is rotated by rotating the servo motor a required number in response to a command from a control board (not shown). The movement can be stopped at a predetermined position on the horizontal plane.

一方、4は上記縦横支持機構の一側に鉛直に起立状に設けたリニヤガイド、5は該リニヤガイド4により昇降動し得るように設けられた水平方向に長いリニヤガイドで、該リニヤガイド5にブラケット10が水平面内でX方向に移動可能に設けられ、該ブラケットに取付固定具6が設けられ、該取付固定具6にロックハンドル7が設けられ、該ロックハンドル7を操作することにより、該取付固定具6に真空吸着パッド8の基部9を着脱自在に取り付けられるようにしている。そして、リニヤガイド4およびリニヤガイド5に駆動源のサーボモータ(図示せず)が設けられ、該サーボモータを制御盤(図示せず)からの指令により回転させることにより、該取付固定具6を上下動させられると同時に該取付固定具6を水平面内でX方向に移動させられるようにしている。   On the other hand, 4 is a linear guide provided vertically upright on one side of the vertical and horizontal support mechanism, and 5 is a linear guide which is long in the horizontal direction so as to be moved up and down by the linear guide 4. The bracket 10 is provided so as to be movable in the X direction in a horizontal plane, the mounting fixture 6 is provided on the bracket, the lock fixture 7 is provided on the mounting fixture 6, and by operating the lock handle 7, The base 9 of the vacuum suction pad 8 is detachably attached to the mounting fixture 6. The linear guide 4 and the linear guide 5 are provided with a servo motor (not shown) as a drive source, and the servo motor is rotated in accordance with a command from a control panel (not shown), whereby the mounting fixture 6 is moved. The mounting fixture 6 can be moved in the X direction in a horizontal plane at the same time as being moved up and down.

このため、移動盤1を水平面内でX方向およびY方向に移動させて所定位置に移動停止させ、該移動盤1上に設けられた前記第1サーボモータ102および第2サーボモータ202を駆動して定置板300を所定の傾斜状態に設定した後、取付固定具6を上下動させるとともに該取付固定具6を水平面内でX方向に移動させることで、図6に示したように、定置板300上に真空吸着パッド8を載置することができる。これにより該真空吸着パッド8は基部9に対する位置および角度を容易に設定することができ、組立工場等の使用現場において該真空吸着パッド8を角度調整等の手間を要することなく簡単に使用できるようになる。   Therefore, the moving board 1 is moved in the X and Y directions in the horizontal plane to stop moving to predetermined positions, and the first servo motor 102 and the second servo motor 202 provided on the moving board 1 are driven. After the stationary plate 300 is set to a predetermined inclination state, the mounting fixture 6 is moved up and down, and the mounting fixture 6 is moved in the X direction within the horizontal plane, as shown in FIG. A vacuum suction pad 8 can be placed on 300. As a result, the position and angle of the vacuum suction pad 8 can be easily set with respect to the base 9, so that the vacuum suction pad 8 can be easily used at the site of use such as an assembly factory without the need for adjusting the angle. become.

そして、この傾斜角度設定装置では、定置板300の下方に第1サーボモータ102および第2サーボモータ202が設けられることから、該定置板の周囲は障害物がない開放された状態となり、真空吸着パッド8を該定置板300上に移動し載置する際にこれらのサーボモータが移動の妨げになることなく、真空吸着パッドを各方面から縦横に定置板上に移動させることができ、作業性を向上させられる。   In this tilt angle setting device, since the first servo motor 102 and the second servo motor 202 are provided below the stationary plate 300, the periphery of the stationary plate is in an open state free from obstacles, and vacuum suction is performed. When the pad 8 is moved and placed on the stationary plate 300, these servomotors can move the vacuum suction pad vertically and horizontally from each direction without hindering the movement, thereby improving workability. Can be improved.

1 移動盤
2,3,4,5 リニヤガイド
6 取付固定具
7 ロックハンドル
8 真空吸着パッド
101 モータ据付台
102 第1サーボモータ
103 第1アーム
104a,104b 第1アームの両端部
105a,105b 第1リンク
106a,106b ピン
107a,107b 第1自在継手
201 モータ据付台
202 第2サーボモータ
203 第2アーム
204a,204b 第2アームの両端部
205a,205b 第2リンク
206a,206b ピン
207a,207b 第2自在継手
300 定置板
301 載置面
302 載置面の中心
303 同芯円
304 支持ビーム
305 軸受
306a,306b 支持ビームの両端部
307a,307b 突腕部
DESCRIPTION OF SYMBOLS 1 Moving board 2,3,4,5 Linear guide 6 Mounting fixture 7 Lock handle 8 Vacuum suction pad 101 Motor mounting base 102 1st servo motor 103 1st arm 104a, 104b Both ends 105a, 105b of 1st arm 1st Links 106a, 106b Pins 107a, 107b First universal joint 201 Motor mounting base 202 Second servo motor 203 Second arms 204a, 204b Second arm ends 205a, 205b Second links 206a, 206b Pins 207a, 207b Second universal Joint 300 Stationary plate 301 Placement surface 302 Placement surface center 303 Concentric circle 304 Support beam 305 Bearings 306a and 306b Both ends 307a and 307b of the support beam

Claims (1)

水平面内で縦横に移動可能に支持された移動盤の上に第1サーボモータと第2サーボモータとを互いの回転出力軸が水平面内で直交するように固設し、第1サーボモータの回転出力軸に左右に天秤状に同じ長さで張り出す第1アームを固設し、第2サーボモータの回転出力軸に左右に天秤状に同じ長さで張り出す第2アームを固設し、第1アームの両端部に同一高さの一対の第1リンクを該第1アームが回転する面内でのみ回転が許容されるように枢着し、第2アームの両端部に同一高さの一対の第2リンクを該第2アームが回転する面内でのみ回転が許容されるように枢着し、真空吸着パッドが載置される平坦な載置面を有する定置板を備え、該定置板を該定置板の中心にて回転自在に支持する支持ビームを該定置板の下側に横断状に設け、該支持ビームの両端部を該定置板の外周縁よりも外方に突出させ、該支持ビームの両端部であって該定置板の載置面の中心を中心とする同心円上に一対の第1自在継手を設け、前記第1リンクの上端部を該第1自在継手を介して該支持ビームに連結するとともに、該定置板の外周縁であって前記支持ビームと直交する一直線上に一対の突腕部を突設し、該各突腕部に前記同心円と同じ同心円上に位置する一対の第2自在継手を設け、前記第2リンクの上端部を該第2自在継手を介して該定置板に連結し、第1サーボモータと第2サーボモータを駆動させることで該定置板が水平状態から全方向に傾動するように構成したことを特徴とする真空吸着パッドセッティング装置における定置板の傾斜角度設定装置。   A first servo motor and a second servo motor are fixed on a moving plate supported so as to be movable vertically and horizontally in a horizontal plane so that their rotational output axes are orthogonal to each other in the horizontal plane, and the rotation of the first servo motor is performed. A first arm that protrudes to the left and right with the same length as the balance is fixed to the output shaft, and a second arm that protrudes to the left and right with the same length as the balance is fixed to the rotation output shaft of the second servo motor. A pair of first links having the same height are pivotally attached to both ends of the first arm so as to be allowed to rotate only within the plane in which the first arm rotates, and the same height is provided to both ends of the second arm. A pair of second links are pivotally attached so as to be allowed to rotate only within a plane in which the second arm rotates, and a stationary plate having a flat placement surface on which a vacuum suction pad is placed is provided. A support beam that supports the plate rotatably at the center of the stationary plate is provided transversely below the stationary plate. Both ends of the support beam protrude outward from the outer peripheral edge of the stationary plate, and a pair of first beams are formed on concentric circles centering on the center of the mounting surface of the stationary plate at both ends of the support beam. A universal joint is provided, and the upper end portion of the first link is connected to the support beam via the first universal joint, and a pair of protrusions are formed on a straight line that is an outer peripheral edge of the stationary plate and is orthogonal to the support beam. A pair of second universal joints is provided on each of the protruding arm parts, and the upper end part of the second link is connected to the stationary plate via the second universal joint. Inclination angle of the stationary plate in the vacuum suction pad setting device, wherein the stationary plate is tilted in all directions from the horizontal state by driving the first servo motor and the second servo motor. Setting device.
JP2009142843A 2009-06-16 2009-06-16 Inclination angle setting device for stationary plate in vacuum suction pad setting device Active JP4754011B2 (en)

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