JP4742282B2 - Ultrasonic air / water separator - Google Patents

Ultrasonic air / water separator Download PDF

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JP4742282B2
JP4742282B2 JP2004315065A JP2004315065A JP4742282B2 JP 4742282 B2 JP4742282 B2 JP 4742282B2 JP 2004315065 A JP2004315065 A JP 2004315065A JP 2004315065 A JP2004315065 A JP 2004315065A JP 4742282 B2 JP4742282 B2 JP 4742282B2
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vibration
ultrasonic
case
gas
collection
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JP2006122823A (en
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貢 佐野
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Honda Electronics Co Ltd
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Honda Electronics Co Ltd
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本発明は、超音波振動で捕集振動管を振動させて、気水から液体を分離する超音波気水分離装置に関するものである。   The present invention relates to an ultrasonic air / water separator for separating a liquid from air / water by vibrating a collection vibration tube using ultrasonic vibration.

従来のこの種の気水分離装置としては、図3に示すように、ケース1内に吸着マット2を装着し、ケース1の上端に排気管3を装着し、ケース1の下端に装着した供給管4に気体供給装置5が接続され、ケース1の下部に廃液管6及び廃液管6に廃液装置7が接続された装置が提案されている。 As a conventional air / water separator of this type, as shown in FIG. 3 , an adsorption mat 2 is mounted in a case 1, an exhaust pipe 3 is mounted on the upper end of the case 1, and a supply mounted on the lower end of the case 1. A device is proposed in which a gas supply device 5 is connected to the tube 4, and a waste liquid tube 6 is connected to the lower part of the case 1, and a waste liquid device 7 is connected to the waste liquid tube 6.

このように構成された従来の気水分離装置では、気体供給装置5から供給されたミストを含有する気体はケース1内の吸着マット2に吸着され、この吸着マット2で吸着されたミストは液滴となって廃液管6から廃液装置7で回収されるように構成されているが、この従来例では、吸着マット2をケース内に装着しているため、供給管から圧力の高い気体を供給しなければ、吸着マット2で吸着されれず、又、吸着マット2を使用しているために、吸着マット2の耐薬品性の問題があり、さらに、ある程度使用した吸着マット2は廃棄しなければならないので、産業廃棄物となり、又、吸着マット2を使用しているために、ケース1内の保守が必要となるという問題があった。   In the conventional air / water separator configured as described above, the gas containing the mist supplied from the gas supply device 5 is adsorbed by the adsorption mat 2 in the case 1, and the mist adsorbed by the adsorption mat 2 is liquid. Although it is configured to be collected as a droplet from the waste liquid pipe 6 by the waste liquid apparatus 7, in this conventional example, since the adsorption mat 2 is mounted in the case, a high-pressure gas is supplied from the supply pipe. Otherwise, the adsorption mat 2 is not adsorbed, and because the adsorption mat 2 is used, there is a problem of chemical resistance of the adsorption mat 2, and the adsorption mat 2 used to some extent must be discarded. Therefore, there is a problem that the inside of the case 1 needs to be maintained because the suction mat 2 is used.

解決しようとする問題点は、従来の気水分離装置では、吸着マットを使用するために、高圧で気体を供給しなければならず、又、吸着マットは耐薬品性の問題があり、さらに、吸着マットはある程度使用すると廃棄しなければならず、さらに、吸着マットを使用しているために、ケース内の保守が必要となるという問題がある。   The problem to be solved is that in the conventional air-water separator, in order to use the adsorption mat, the gas must be supplied at a high pressure, and the adsorption mat has a problem of chemical resistance. If the suction mat is used to some extent, it must be discarded, and furthermore, since the suction mat is used, there is a problem that maintenance inside the case is required.

本発明では、液粒子を含んだ気体を供給する気体供給装置に連結された供給管を下端に設け、気体を排出する排気管を上端に接続するケースと、該ケースの内部に装着した捕集振動管と、前記ケースの側部を通して、前記捕集振動管に一端が固着された振動伝達板と、該振動伝達板の他端に固着された超音波振動発生装置と、該超音波振動発生装置に接続された発振器とからなり、前記超音波振動発生装置から発生された超音波振動を前記振動伝達板を介して前記捕集振動管に伝達し、前記供給管の一端は前記捕集振動管の中心に装着され、気体供給装置が接続された前記供給管より供給された気体から液粒子を分離するものであり、又、前記振動発生装置はランジュバン型振動子の結合ホーンとダミーホーンとから構成され、前記振動伝達板は前記結合ホーンとダミーホーンの間に挟持固定されているである。 In the present invention, a supply pipe connected to a gas supply device that supplies a gas containing liquid particles is provided at the lower end, an exhaust pipe that discharges the gas is connected to the upper end, and a collection attached to the inside of the case A vibration transmission plate having one end fixed to the collecting vibration tube through the side of the case, an ultrasonic vibration generating device fixed to the other end of the vibration transmission plate, and the ultrasonic vibration generation An oscillator connected to the apparatus, and transmits the ultrasonic vibration generated from the ultrasonic vibration generator to the collection vibration pipe through the vibration transmission plate, and one end of the supply pipe has the collection vibration It is mounted at the center of the pipe and separates liquid particles from the gas supplied from the supply pipe to which the gas supply apparatus is connected. The vibration generator includes a coupling horn and a dummy horn of a Langevin type vibrator. The vibration transmission composed of It is being sandwiched and fixed between the coupling horn and the dummy horn.

本発明の超音波気水分離装置では、捕集振動管の側部に超音波振動発生装置に連結された振動伝達板を固着し、超音波振動発生装置からの超音波振動を振動伝達板を介して捕集振動管に伝達することにより、超音波振動が捕集振動管の外側から中心に向かって超音波が集中合成される事により、捕集振動管の中心部分の音圧が高くなることから、供給管から供給された気体に含まれている液体粒子は供給管付近に集中して、液体粒子が大きくなると、供給管を伝わって落下し、ケースの廃液管から液体粒子のみが回収され、液体粒子が除去された気体は排気管から排気されるという利点がある。 In the ultrasonic air-water separator of the present invention, a vibration transmission plate connected to the ultrasonic vibration generator is fixed to the side of the collecting vibration tube, and the ultrasonic vibration from the ultrasonic vibration generator is attached to the vibration transmission plate. When the ultrasonic vibration is transmitted to the collecting vibration tube via the center, the ultrasonic pressure is concentrated and synthesized from the outside to the center of the collecting vibration tube, so that the sound pressure at the central portion of the collecting vibration tube is increased. Therefore, the liquid particles contained in the gas supplied from the supply pipe concentrate in the vicinity of the supply pipe, and when the liquid particles become large, they fall along the supply pipe, and only the liquid particles are recovered from the waste liquid pipe of the case is, gas liquid particles have been removed has the advantage that Ru is exhausted from the exhaust pipe.

本発明では、ケースは液粒子を含んだ気体を供給する気体供給装置に連結された供給管と気体を排出する排気管に接続され、捕集振動管はケースの内部に装着され、振動伝達板はケースの側部を通して捕集振動管に一端が固着され、超音波振動発生装置は振動伝達板の他端に固着され、超音波振動発生装置は圧電体振動子振動子を金属ブロックと結合ホーンで挟持したランジュバン型振動子で構成され、このランジュバン型振動子の結合ホーンとダミーホーンの間に振動伝達板を挟持固定し、発振器は超音波振動発生装置に接続され、振動発生装置から発生された超音波振動を振動伝達板を介して捕集振動管に伝達し、供給管より供給された気体から液粒子を捕集振動管で分離するものである。   In the present invention, the case is connected to a supply pipe connected to a gas supply device that supplies a gas containing liquid particles and an exhaust pipe that discharges the gas, and the collection vibration pipe is mounted inside the case, and the vibration transmission plate One end is fixed to the collecting vibration tube through the side of the case, the ultrasonic vibration generator is fixed to the other end of the vibration transmission plate, and the ultrasonic vibration generator is a horn that combines a piezoelectric vibrator with a metal block and a horn. The vibration transmission plate is sandwiched and fixed between the coupling horn and dummy horn of this Langevin type oscillator, and the oscillator is connected to the ultrasonic vibration generator and generated from the vibration generator. The ultrasonic vibration is transmitted to the collection vibration tube via the vibration transmission plate, and the liquid particles are separated from the gas supplied from the supply tube by the collection vibration tube.

図1は本発明の実施例の超音波気水分離装置の側面断面図、図2は図1の装置の平面断面図で、ケース8の内部に捕集振動管9が装着され、ケース8の上部に排気管10が装着され、ケース8の下部を通して、供給管11の一端が捕集振動管9の中心に挿入するように装着され、供給管11の他端に気体供給装置12が接続され、捕集振動管9の側部に振動伝達板13の一端が固着され、他端はランジュバン型振動子14の結合ホーン14aとダミーホーン15の間に装着され、ランジュバン型振動子14は結合ホーン14aと金属ブロック14bの間に圧電体振動子16が挟持されるように構成され、圧電体振動子16に発振器17が接続され、又、ケース8の下部に廃液管18が接続され、廃液管18に廃液装置19が接続されている。   FIG. 1 is a side sectional view of an ultrasonic air / water separator according to an embodiment of the present invention. FIG. 2 is a plan sectional view of the apparatus shown in FIG. 1. An exhaust pipe 10 is attached to the upper part, and one end of the supply pipe 11 is attached so as to be inserted into the center of the collecting vibration pipe 9 through the lower part of the case 8, and a gas supply device 12 is connected to the other end of the supply pipe 11. One end of the vibration transmission plate 13 is fixed to the side portion of the collecting vibration tube 9, and the other end is mounted between the coupling horn 14a of the Langevin type vibrator 14 and the dummy horn 15, and the Langevin type vibrator 14 is connected to the coupling horn. 14a and the metal block 14b, the piezoelectric vibrator 16 is sandwiched, the oscillator 17 is connected to the piezoelectric vibrator 16, and the waste pipe 18 is connected to the lower part of the case 8, and the waste pipe. A waste liquid device 19 is connected to 18.

このように構成された本実施例の超音波気水分離装置では、発振器17から発振出力がランジュバン型振動子14の圧電体振動子16に印加されると、ランジュバン型振動子14の結合ホーン14aとダミーホーン15の間に装着された振動伝達板13が振動し、ケース8内の捕集振動管9を超音波振動するので、捕集振動管9に伝達された超音波振動は捕集振動管9から中心方向に集中合成されるので、供給管11から供給された気体の中の液体粒子が捕集振動管9の中心付近に集中され、この液体粒子が集中すると、粒子が大きくなって質量が高くなり、液滴となって供給管11を伝わって落下するので、落下した液滴はケース8の下部に溜まり、廃液管18から廃液装置19に流されて回収される。   In the ultrasonic steam-water separation device of this embodiment configured as described above, when the oscillation output is applied from the oscillator 17 to the piezoelectric vibrator 16 of the Langevin vibrator 14, the coupling horn 14a of the Langevin vibrator 14 is used. Since the vibration transmission plate 13 mounted between the dummy horn 15 vibrates and ultrasonically vibrates the collection vibration tube 9 in the case 8, the ultrasonic vibration transmitted to the collection vibration tube 9 is collected vibration. Since concentrated synthesis is performed from the tube 9 toward the center, the liquid particles in the gas supplied from the supply tube 11 are concentrated in the vicinity of the center of the collection vibration tube 9, and when the liquid particles are concentrated, the particles become larger. Since the mass increases and drops through the supply pipe 11 through the supply pipe 11, the dropped liquid drops accumulate in the lower part of the case 8, flow from the waste liquid pipe 18 to the waste liquid device 19, and are collected.

このように、本実施例では、捕集振動管9に超音波振動を伝達することにより、捕集振動管9の中心に音波が集中し、この集中した音波によって供給された気体に含まれるミストが集まって大きな液滴となり、質量が高くなることによりケース8内に落下して回収され、ミストが除去された気体はケース8の上部の排気管10から排気され、吸着マットを使用しないので、気体の供給は圧力損失が無いため、供給圧力を低減でき、耐薬品性の問題が無く、産業廃棄物が無くなり、又、ケース8内の保守を必要としないという利点がある。   Thus, in this embodiment, by transmitting ultrasonic vibration to the collection vibration tube 9, the sound wave concentrates at the center of the collection vibration tube 9, and the mist contained in the gas supplied by the concentrated sound wave Since the gas is collected into large droplets and the mass is increased, the gas falls into the case 8 and is recovered, and the gas from which the mist has been removed is exhausted from the exhaust pipe 10 at the top of the case 8, and the adsorption mat is not used. Since the gas supply has no pressure loss, there is an advantage that the supply pressure can be reduced, there is no problem of chemical resistance, industrial waste is eliminated, and maintenance in the case 8 is not required.

なお、上記実施例において、ランジュバン型振動子を使用した例を示したが、超音波振動を発生するものであれば他の発生装置でも使用することができ、又、発振器からの発振周波数を変更することにより、捕集される液滴の大きさを制御することができ、さらに、ミストを発生する洗浄装置、乾燥装置、食品製造装置、半導体ウェット処理装置、液晶ウェット処理装置、精密洗浄装置等に設置して、有害、無害のミストを捕集することができる。   In the above embodiment, an example using a Langevin type vibrator has been shown. However, any generator that generates ultrasonic vibration can be used, and the oscillation frequency from the oscillator can be changed. By controlling the size of the collected droplets, it is possible to control the size of the collected droplets, and further, a cleaning device that generates mist, a drying device, a food manufacturing device, a semiconductor wet processing device, a liquid crystal wet processing device, a precision cleaning device, etc. It can be installed in to collect harmful and harmless mist.

本発明の実施例の超音波気水分離装置の側面断面図である。It is side surface sectional drawing of the ultrasonic air-water separator of the Example of this invention. 図1の超音波気水分離装置の平面断面図である。It is a plane sectional view of the ultrasonic steam-water separation device of FIG. 従来の気水分離装置の側面断面図である。It is side surface sectional drawing of the conventional steam-water separation apparatus.

8 ケース
9 捕集振動管
10 排気管
11 供給管
12 気体供給装置
13 伝達振動板
14 ランジュバン型振動子
15 ダミーホーン
16 圧電体振動子
17 発振器
18 廃液管
19 廃液装置
DESCRIPTION OF SYMBOLS 8 Case 9 Collection vibration pipe 10 Exhaust pipe 11 Supply pipe 12 Gas supply apparatus 13 Transmission vibration plate 14 Langevin type vibrator 15 Dummy horn 16 Piezoelectric vibrator 17 Oscillator 18 Waste liquid pipe 19 Waste liquid apparatus

Claims (2)

液粒子を含んだ気体を供給する気体供給装置に連結された供給管を下端に設け、気体を排出する排気管を上端に接続するケースと、該ケースの内部に装着した捕集振動管と、前記ケースの側部を通して、前記捕集振動管に一端が固着された振動伝達板と、該振動伝達板の他端に固着された超音波振動発生装置と、該超音波振動発生装置に接続された発振器とからなり、前記超音波振動発生装置から発生された超音波振動を前記振動伝達板を介して前記捕集振動管に伝達し、前記供給管の一端は前記捕集振動管の中心に装着され、気体供給装置が接続された前記供給管より供給された気体から液粒子を分離することを特徴とする超音波気水分離装置。 A supply pipe connected to a gas supply device that supplies a gas containing liquid particles is provided at the lower end, a case that connects an exhaust pipe that discharges gas to the upper end, a collection vibration pipe that is attached to the inside of the case, Through the side part of the case, a vibration transmission plate having one end fixed to the collection vibration tube, an ultrasonic vibration generation device fixed to the other end of the vibration transmission plate, and the ultrasonic vibration generation device are connected. The ultrasonic vibration generated from the ultrasonic vibration generator is transmitted to the collection vibration tube via the vibration transmission plate, and one end of the supply pipe is placed at the center of the collection vibration tube. An ultrasonic steam-water separation device , wherein liquid particles are separated from the gas supplied from the supply pipe to which the gas supply device is attached . 前記振動発生装置はランジュバン型振動子の結合ホーンとダミーホーンとから構成され、前記振動伝達板は前記結合ホーンとダミーホーンの間に挟持固定されていることを特徴とする請求項1記載の超音波気水分離装置。 2. The super vibration generator according to claim 1, wherein the vibration generating device includes a coupling horn of a Langevin type vibrator and a dummy horn, and the vibration transmission plate is sandwiched and fixed between the coupling horn and the dummy horn. Sonic water separator .
JP2004315065A 2004-10-29 2004-10-29 Ultrasonic air / water separator Expired - Fee Related JP4742282B2 (en)

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Publication number Priority date Publication date Assignee Title
JPH04126536A (en) * 1990-09-19 1992-04-27 Nkk Corp Method for capturing inorganic sphered particles
JPH0647346A (en) * 1992-01-09 1994-02-22 Hiroyuki Yamane Ultrasonic generating source and floated particle collector using the same
JP3471536B2 (en) * 1996-08-30 2003-12-02 アマノ株式会社 Ultrasonic collection method and apparatus for suspended particles
JP3471548B2 (en) * 1996-12-18 2003-12-02 アマノ株式会社 Method and apparatus for collecting suspended particles
JP3499389B2 (en) * 1996-12-18 2004-02-23 アマノ株式会社 Suspended particle collection device
JPH11202633A (en) * 1998-01-09 1999-07-30 Toray Ind Inc Liquid agent recovering device and method and image forming device
JP4403254B2 (en) * 2004-06-14 2010-01-27 本多電子株式会社 Liquid recovery apparatus and liquid fractionation apparatus
JP2006000711A (en) * 2004-06-15 2006-01-05 Honda Electronic Co Ltd Ultrasonic particle-collecting apparatus

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