JP2005313041A - Dust collector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dust collector capable of shaking down dust efficiently from a filter element and allowing the easy replacement of the filter element and easy visual check and cleaning of the inside. <P>SOLUTION: The filer element 33 of the dust collector 1 comprises a filter cartridge 35, a lid member 37 in the upper part of the cartridge 35 and a holding member 39 having, within the member, an exhaust room Er connected with the cartridge 35 and arranged in the lower part of the cartridge 35. The filter element 33 is held within a casing 3 by using an upper coil spring 45 and a lower coil spring 47 so that vibration can be applied to the filter element 33 externally by an oscillator 55 from the outside of the casing 3. The exhaust room Er and an outlet 17 for the exhaust flow of the casing 3 are connected with a bellows tube 51. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a dust collector that is provided on an exhaust path of various devices and that can collect dust discharged together with exhaust through the exhaust path.

The exhaust discharged from various devices may contain dust. In an apparatus that discharges dust, in order to prevent dust from being diffused into the atmosphere together with exhaust, a dust collector is installed in the exhaust path of the apparatus, and the dust is collected by the dust collector.
A conventional dust collector includes a casing having an exhaust inlet, an exhaust outlet, and a dust outlet, and a filter element that partitions the inside of the casing into a dust collection chamber and an exhaust chamber, and the dust collection chamber has an exhaust inlet and A dust outlet is located, and an exhaust outlet is located in the exhaust chamber. Exhaust gas flows into the dust collecting chamber from the upstream side of the exhaust path along with the dust through the exhaust inlet, and then flows into the exhaust chamber through the filter element. When the exhaust passes through the filter element, the filter element collects dust, and the exhaust from which the dust has been removed flows out from the exhaust chamber to the downstream side of the exhaust path through the exhaust outlet.

As an apparatus for discharging dust together with exhaust gas, for example, there is a hydride vapor phase growth apparatus (HVPE apparatus) for manufacturing a compound semiconductor by a hydride vapor phase growth method (HVPE method).
HVPE when the HVPE apparatus for producing nitride-based semiconductor such as gallium nitride (GaN), at the same time, large amounts of ammonium chloride (NH ₄ Cl) is produced as a by-product, a fine powder of the resulting NH ₄ Cl is together with the exhaust gas Discharged from the device. A dust collector is installed in the exhaust path of the HVPE device to collect NH ₄ Cl fine powder as dust, but the filter element of the dust collector is clogged in a short time by a large amount of dust, and the clogged filter element Disturbs the flow of exhaust in the exhaust path.

  If the flow of exhaust gas is obstructed in the exhaust path, the HVPE device upstream of the exhaust path is affected, which hinders the production of compound semiconductors. For this reason, every time the filter element of the dust collector is clogged, the operation of the HVPE apparatus must be stopped and the filter element must be cleaned. However, since the filter element is clogged again in a short time, the HVPE apparatus must be frequently stopped, and the operating rate of the HVPE apparatus is significantly reduced.

Therefore, a large amount of dust is discharged together with the exhaust gas, and the state of the exhaust flow changes due to the dust. It is installed and dust is removed from the filter element without stopping the HVPE apparatus or the like by using a dust removal mechanism, thereby preventing a reduction in the operating rate of the HVPE apparatus or the like.
As a method of dust removal mechanism, there are a pulse jet method in which pulse jet air is blown to a filter element, an impact method in which an impact is applied to the filter element, a vibration method in which a vibration is applied to the filter element (see Patent Document 1), and the like.

In the pulse jet type dust removal mechanism, the pulse jet air greatly disturbs the flow of the exhaust gas in the dust collector, causing trouble in the production of the compound semiconductor in the HVPE apparatus. Therefore, it is not preferable to use a pulse jet type dust removal mechanism for a dust collector such as an HVPE apparatus.
In the impact-type dust removal mechanism, since the impact is frequently applied to the filter element, the filter element is easily damaged, and noise when the impact is applied to the filter element is also a problem.
Therefore, it is preferable to use a vibration-type dust removal mechanism for a dust collector such as an HVPE apparatus.

  An example of a dust collector having a vibration type dust removal mechanism is shown in FIG. The dust collector 1 installed in the exhaust path 70 includes a horizontally long casing 3 and a vibration device 55 outside the casing 3. An exhaust inlet 15, an exhaust outlet 17, and a dust outlet 19 are formed in the casing 3, and a filter element 33 is incorporated in the casing 3. The filter element 33 includes a frame member 80 and a cylindrical mesh member 84 supported by the frame member 80, and elastic support members 82 are attached to both ends (left and right ends in FIG. 4) in the casing 3. Supports both ends of the frame member 80 and tightly seals between both ends of the mesh member 84 and the inner wall of the casing 3. The inside of the casing 3 is partitioned into a dust collecting chamber Cr and an exhaust chamber Er by a mesh member 84, and a space between the mesh member 84 and the inner wall of the casing 3 forms the dust collecting chamber Cr, and the inside of the mesh member 84 is inside. The space forms the exhaust chamber Er. The upper part of the dust collecting chamber Cr is connected to the exhaust inlet 15, the lower part of the dust collecting chamber Cr is connected to the dust outlet 19, and the side of the exhaust chamber Er is connected to the exhaust outlet 17. A side portion of the frame member 80 is connected to the vibration device 55, and the vibration device 55 is configured to apply vibration in the horizontal direction to the filter element 33 via the frame member 80.

Exhaust gas flows into the exhaust inlet 15 of the dust collector 1 from the upstream side of the exhaust path 70 together with dust. The exhaust gas flowing into the exhaust inlet 15 enters the dust collection chamber Cr, then passes through the mesh member 84 of the filter element 33 and enters the exhaust chamber Er. When the exhaust passes through the mesh member 84, dust is collected by the mesh member 84, and only the exhaust enters the exhaust chamber Er. Then, the exhaust gas flows out from the exhaust chamber Er through the exhaust outlet 17 to the downstream side of the exhaust path 70. Since the dust is collected and attached to the mesh member 84, the vibration device 55 vibrates the filter element 33 via the frame member 80, and the dust is removed from the mesh member 84. Deposits in the lower part of the collection chamber Cr. The on-off valve 86 provided at the dust discharge port 19 is periodically opened, and the dust accumulated in the dust collection chamber Cr is dropped from the dust discharge port 19 and discharged out of the casing 3.
WO99 / 02238

  However, in the dust collector 1 having the above-described vibration-type dust removal mechanism, the vibration direction of the filter element 33 that vibrates by the vibration device 55 is orthogonal to the direction of gravity, and is applied to the filter element 33 from the vibration device 55. Part of the generated vibration energy is absorbed as shear resistance in the elastic support member 82 that supports the frame member 80, and the vibration energy applied to the filter element 33 cannot be efficiently used for dust removal.

The elastic support member 82 seals between the both end portions of the mesh member 84 and the inner wall of the casing 3 to prevent the dust collection chamber Cr and the exhaust chamber Er from communicating directly without passing through the mesh member 84. Therefore, the deformation amount allowed for the elastic support member 82 is limited, and the vibration device 55 cannot give the vibration to the filter element 33 with such an amplitude that the elastic support member 82 is greatly deformed.
When the filter element 33 is replaced, the filter element 33 is tightly incorporated in the casing 3 by the elastic support member 82, so that it is difficult to attach and detach the filter element 33.

  When the dust accumulated in the dust collection chamber Cr is discharged out of the casing 3, the dust is dropped from the dust discharge port 19, so that the dust accumulated in a place away from the dust discharge port 19 falls from the dust discharge port 19. Without being retained in the dust collection chamber Cr. Since there is no means for confirming the dust staying in the dust collecting chamber Cr, the staying dust may cause local clogging of the mesh member 84 or may hinder the vibration of the filter element 33.

  The present invention solves the above problems, and the object is to vibrate dust efficiently by vibrating the filter element, and the adjustment range of vibration conditions can be increased, The filter element can be vibrated, the filter element can be easily replaced, the inside can be easily cleaned, and the dust collector can be confirmed.

  The present invention adopts the following configuration in order to solve the problem. A dust collector according to a first aspect of the present invention is a casing having an exhaust inlet, an exhaust outlet, and a dust outlet, a filter element standing in the casing, and dust collection between the casing inner wall and the filter element. A dust collector comprising a chamber, comprising: a filter cartridge; a lid member that covers the upper part of the filter cartridge; and a holding member that has an exhaust chamber that is continuous with the filter cartridge and is disposed at the lower part of the filter cartridge Filter element, a coil spring that supports the upper and lower portions of the filter element, a vibration device that can apply vertical vibration to the filter element, and an expandable / contractible structure that connects the exhaust chamber and the exhaust outlet of the holding member An exhaust outlet pipe.

  According to the first aspect of the present invention, the exhaust gas together with the dust flows into the dust collecting chamber from the exhaust inlet, passes through the filter cartridge from the dust collecting chamber, and enters the exhaust chamber of the holding member. It flows through the exhaust outlet and passes through the exhaust outlet. As the exhaust passes through the filter cartridge, dust is collected on the surface of the filter cartridge. Dust collected on the filter cartridge adheres, but the vibration exciter applies vibration to the filter element, and dust is removed from the filter cartridge.

  The vibration applied to the filter element by the vibration exciter has an amplitude in the vertical direction. The upper and lower parts of the filter element are supported by a coil spring, and the exhaust chamber and the exhaust outlet of the holding member at the lower part of the filter element can be expanded and contracted. Since it is connected by the exhaust outflow pipe, the filter element vibrates in the vertical gravity direction, and the exhaust outflow pipe expands and contracts in the vertical gravitational direction with vibration, and most of the vibration energy given to the filter element from the vibration exciter It will be used for the vibration of the filter element, and the efficiency of dust removal from the filter cartridge will be improved.

The coil spring that supports the upper and lower parts of the filter element does not have a function of sealing between the dust collection chamber and the exhaust chamber, and even if these coil springs vibrate with a large amplitude, the dust collection The chamber and the exhaust chamber do not directly communicate with each other without passing through the filter cartridge. Therefore, the vibration device can be adjusted to give the filter element vibration having an appropriate amplitude according to the properties of the dust.
If the top plate is detachable, the top plate can be removed and the filter cartridge can be easily removed from the casing, so that the filter cartridge can be easily replaced.
An example of the extendable exhaust outlet pipe that connects the exhaust chamber of the holding member and the exhaust outlet is a bellows pipe.

A dust collector according to a second aspect of the present invention is the dust collector according to the first aspect, wherein a coil spring mounted between the top plate of the casing and the lid member and supporting the upper portion of the filter element, and a holding member are provided. And a coil spring that suspends and supports the lower part of the filter element.
According to the invention of claim 2, since the lower part of the filter element is supported by the coil spring that suspends the holding member, the space volume between the lower part of the filter element and the bottom of the casing is increased. The capacity of dust that can accumulate on the bottom can be increased, the frequency of dust discharge can be reduced, and the accumulated dust can be easily discharged, facilitating cleaning.

A dust collector according to a third aspect of the present invention is the dust collector according to the first or second aspect, wherein a collision element that collides with the filter element when the amplitude of the filter element that is vibrated by the vibrating device reaches a predetermined width is provided. Provide in the casing.
According to the third aspect of the present invention, when the vibration device applies vibration having a predetermined width to the filter element, the impactor and the filter element collide with each other, so that the impact is applied to the filter cartridge from the impactor. Even if it is difficult to sufficiently remove dust from the filter cartridge only by vibrating the filter element, it is possible to efficiently remove dust by applying an impact to the filter cartridge.

A dust collector according to a fourth aspect of the present invention is the dust collector according to any one of the first to third aspects, wherein a dust discharge port formed below the casing and an upper end of the dust discharge pipe are provided. And a viewing window arranged detachably.
According to the invention of claim 4, the state of the dust accumulated on the bottom of the casing can be monitored through the viewing window, and when the accumulation of a large amount of dust is confirmed from the viewing window, the viewing window is removed from the dust discharge pipe, and the dust is removed. Discharge. Dust can be discharged at an appropriate time, and it is possible to prevent the dust collection efficiency from decreasing due to an increase in the amount of accumulated dust.

  Since the dust collector according to the present invention is configured as described above, the filter element can be vibrated and dust can be efficiently removed, the adjustment range of vibration conditions can be increased, and the filter element can be It can be easily replaced, the inside can be easily cleaned, and the internal state can be confirmed.

The best mode for carrying out the present invention will be described with reference to FIGS. 1 is a configuration diagram of a dust collector according to an embodiment of the present invention, FIG. 2 is a cross-sectional view taken along line AA in FIG. 1, and FIG. 3 is a cross-sectional view taken along line BB in FIG.
The dust collector 1 is installed in the exhaust path 70 of the HVPE apparatus (not shown). The dust collector 1 has a cylindrical casing 3 supported by legs 13. The casing 3 includes a cylindrical side plate 5, a top plate 7, and a bottom plate 11, and the top plate 7 is configured to be detachable from the upper part of the cylindrical side plate 5. The cylindrical side plate 5 is formed with an exhaust inlet 15, a dust outlet 19 and an upper viewing window 29. The exhaust inlet 15 and the upper viewing window 29 are located slightly above the middle of the cylindrical side plate 5, and dust exhaust The outlet 19 is located below the cylindrical side plate 5. The exhaust inlet 15 is connected to the upstream side of the exhaust path 70, and a window glass is fitted into the upper viewing window 29. The dust discharge port 19 is provided with a dust discharge pipe 21 inclined obliquely upward, and an extension pipe 23 having a butterfly valve 25 is detachably attached to the upper end side of the dust discharge pipe 21 via a seal (not shown). It fits. A lower viewing window 31 is detachably disposed at the upper end of the extension tube 23, and a window glass is fitted into the lower viewing window 31. An air introduction pipe 27 is inserted into the extension pipe 23 between the butterfly valve 25 and the lower observation window 31 from the outside, and the opening end of the air introduction pipe 27 faces the lower observation window 31 inside the extension pipe 23 to introduce air. Nitrogen gas or the like can be ejected from the tube 27 toward the lower viewing window 31.

A filter element 33 including a plurality of cylindrical filter cartridges 35, a lid member 37, and a holding member 39 is loaded in the casing 3, and the space between the inner surface of the casing 3 and the filter element 33 is dust collecting. A chamber Cr is formed.
The lid member 37 is a disk-shaped plate member having a bolt hole in the center, and the lid member 37 covers the upper part of each filter cartridge 35. The holding member 39 is a hollow ring-shaped member, and a hollow portion inside the holding member 39 forms an exhaust chamber Er, and a cross-shaped cross frame 40 having a bolt hole in the center is attached to the ring hole at the center of the holding member 39. Has been. A holding member 39 is connected to the lower part of each filter cartridge 35, and the exhaust chamber Er communicates with the inside of the cylinder of each filter cartridge 35.

A connecting bolt 41 is inserted into the bolt hole of the lid member 37 and the bolt hole of the cross frame 40 of the holding member 39, and the upper and lower ends of the connecting bolt 41 are fastened by nuts 43, and each filter cartridge 35 is held by the lid member 37. It is sandwiched between the member 39.
An upper coil spring 45 is mounted between the lid member 37 and the recess 9 of the top plate 7, and a lower coil spring 47 suspends the holding member 39 from a spring hanger 49 formed on the inner peripheral surface of the cylindrical side plate 5. doing. The spring hanger 49 is located above the exhaust inlet 15 and the upper viewing window 29.

The exhaust chamber Er in the holding member 39 is connected by a bellows pipe 51 from the lower surface of the holding member 39 to the exhaust outlet 17 formed in the bottom plate 11, and the exhaust outlet 17 is connected downstream of the exhaust path 70.
Two bellows 53 are mounted between the lower surface of the holding member 39 and the bottom plate 11 of the casing 3, and the lower end of the bellows 53 is connected to an insertion hole 59 formed in the bottom plate 11. The space between the upper end of the bellows 53 and the lower surface of the holding member 39 and the space between the lower end of the bellows 53 and the bottom plate 11 are sealed. The holding frame 57 of the vibration device 55 passes through the bellows 53 and the insertion hole 59, the upper end of the holding frame 57 is connected to the lower surface of the holding member 39, and the vibration device is attached to the lower end of the holding frame 57 protruding downward from the bottom plate 11. 55 is suspended. The vibration device 55 is a piston-type vibrator and is configured to be able to generate vertical vibrations.
On the inner peripheral surface of the cylindrical side plate 5 of the casing 3, a collision hanger 63 is formed above the spring hanger 49, and the collision element 61 is attached to the collision hanger 63 with a bolt 65. The collision element 61 is located above the upper surface of the lid member 37 by a predetermined distance.

This embodiment is configured as described above, and the operation thereof will be described next.
Exhaust gas is discharged from the HVPE apparatus to the exhaust path 70 together with dust, and flows into the exhaust inlet 15 of the dust collector 1 from the upstream side of the exhaust path 70. Exhaust gas and dust flowing into the exhaust inlet 15 enter the dust collection chamber Cr, then pass through the filter element 33 and enter the exhaust chamber Er. When the exhaust gas passes through the filter element 33, dust is collected in the filter element 33, and only the exhaust gas enters the exhaust chamber Er, flows from the exhaust chamber Er through the bellows pipe 51 to the exhaust outlet 17, and downstream of the exhaust path 70. To the side. The collected dust adheres to the surface of the filter element 33.

  While the exhaust gas and dust are flowing into the dust collector 1, the vibration device 55 is vibrated in the vertical direction at a predetermined interval. When the vibration device 55 vibrates, the vibration is transmitted to the holding member 39 that suspends the vibration device 55, and the filter element 33 vibrates in the vertical direction. When the filter element 33 vibrates in the vertical direction, the upper coil spring 45 and the lower coil spring 47 also vibrate in the vertical direction, and the bellows pipe 51 and the bellows 53 expand and contract in the vertical direction. Since the filter element 33 vibrates in the vertical direction, the filter cartridge 35 also vibrates in the vertical direction, and the dust adhering to the surface of the filter cartridge 35 is removed and accumulated on the bottom plate 11.

  The vibration direction of the vibration device 55, the vibration direction of the upper coil spring 45 and the lower coil spring 47, and the expansion / contraction direction of the bellows tube 51 and the bellows 53 all coincide with each other in the vertical gravity direction. Most of the vibration energy applied to the filter element 33 from 55 becomes the vibration energy of the filter element 33, and the proportion absorbed by the upper coil spring 45, the lower coil spring 47, the bellows pipe 51 and the bellows 53 is suppressed to be small. Therefore, the vibration energy of the vibration device 55 can be used for dust removal from the surface of the filter cartridge 35 with little waste, and the dust removal efficiency is excellent.

  The efficiency of dust removal from the filter cartridge 35 is further improved by changing the vibration conditions of the vibration device 55 in accordance with the properties of the dust and adjusting the vertical amplitude and frequency of the filter element 33. By adjusting the respective elastic coefficients of the upper coil spring 45 and the lower coil spring 47, the vertical amplitude and frequency of the filter element 33 can also be adjusted.

Depending on the properties of the dust, it may not be possible to remove dust sufficiently from the filter cartridge 35 simply by vibrating the filter element 33. In such a case, the vibration condition of the vibration exciter 55 is changed to increase the vertical amplitude of the vibration of the filter element 33 so that the lid member 37 and the colliding element 61 collide with each other. When the lid member 37 and the colliding element 61 collide, an impact is applied to the filter cartridge 35 via the lid member 37, and the dust adhering to the filter cartridge 35 is caused by the vertical vibration and the impact from the colliding element 61. It will be paid off.
Since the state of dust adhering to the surface of the filter cartridge 35 can be monitored from the upper viewing window 29, the vibration device 55 can be operated as necessary, and whether or not the impact from the collider 61 needs to be applied to the filter cartridge 35. Therefore, the vibration condition of the vibration device 55 can be easily adjusted.

  Since dust accumulated on the bottom plate 11 can be monitored from the lower viewing window 31, the timing at which dust needs to be cleaned can be accurately determined, and the dust accumulated on the bottom plate 11 reduces the dust collection efficiency of the dust collector 1. And preventing the vibration of the filter element 33 from being disturbed. It is possible to prevent dust from adhering to the lower viewing window 31 by opening the butterfly valve 25 only when monitoring dust accumulated on the bottom plate 11 from the lower viewing window 31 and closing the butterfly valve 25 at other times. . When the butterfly valve 25 is opened and dust accumulation is monitored from the lower viewing window 31, the lower viewing window 31 is formed on the extension pipe 23 fitted on the upper end side of the dust discharge pipe 21 inclined obliquely upward. Dust hardly adheres to the lower viewing window 31. Further, when dust adheres to the lower viewing window 31, nitrogen gas or the like can be ejected from the air introduction pipe 27 toward the lower viewing window 31, and the dust attached to the lower viewing window 31 can be blown off. The nitrogen gas or the like ejected from the air introduction pipe 27 only blows away the dust adhering to the lower viewing window 31, so that a slight ejection amount is sufficient, and the flow of exhaust gas flowing into the dust collection chamber Cr is ejected from the air introduction pipe 27. It is possible to avoid being disturbed by the nitrogen gas or the like, and the nitrogen gas or the like ejected from the air introduction pipe 27 is prevented from affecting the HVPE device upstream of the exhaust path 70.

When dust deposited on the bottom plate 11 is monitored from the lower viewing window 31 and it is determined that dust cleaning is necessary, the operation of the HVPE apparatus and the dust collector 1 is stopped, the butterfly valve 25 is opened, and the lower viewing window 31 is opened. The vacuum nozzle (not shown) is removed from the extension pipe 23 and inserted into the casing 3 from the upper end of the extension pipe 23, and the dust accumulated on the bottom plate 11 is sucked out of the dust collector 1. The filter cartridge 35 is suspended in the casing 3 by the lower coil spring 47, and two bellows 53 and one bellows pipe 51 exist between the lower surface of the holding member 39 and the bottom plate 11. Therefore, the dust accumulated on the bottom plate 11 can be easily sucked without remaining.
When inserting the vacuum nozzle into the casing 3, instead of opening the butterfly valve 25 and removing the lower viewing window 31 from the extension pipe 23, the extension pipe 23 itself is removed from the dust discharge pipe 21, and the vacuum is removed from the dust discharge pipe 21. A nozzle may be inserted into the casing 3.

In the present embodiment, dust adhering to the lower viewing window 31 is removed by ejecting nitrogen gas from the air introduction pipe 27, but a wiper device may be provided separately.
When the filter cartridge 35 is replaced, the operation is performed according to the following procedure. The top plate 7 is removed from the casing 3, and the upper coil spring 45 is taken out. After the upper coil spring 45 is taken out, the bolt 65 is loosened and the collider 61 is moved from above the lid member 37, the upper nut 43 is removed from the connecting bolt 41, the lid member 37 is removed, and the old filter cartridge 35 is extracted. And replace with a new filter cartridge 35. When the filter cartridge 35 is replaced, the dust collector 1 is restored by the reverse procedure. There is no need to remove the tightly sealed portion, and the replacement of the filter cartridge 35 is very easy.

It is a block diagram of the dust collector which concerns on one Embodiment of this invention. It is the sectional view on the AA line of FIG. It is the BB sectional view taken on the line of FIG. It is sectional drawing of the conventional dust collector.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Dust collector 3 Casing 5 Cylindrical side plate 7 Top plate 9 Recess 11 Bottom plate 13 Leg 15 Exhaust inlet 17 Exhaust outlet 19 Dust outlet 21 Dust outlet pipe 23 Extension pipe 25 Butterfly valve 27 Air inlet pipe 29 Upper view window 31 Lower view Window 33 Filter element 35 Filter cartridge 37 Cover member 39 Holding member 40 Cross frame 41 Connecting bolt 43 Nut 45 Upper coil spring 47 Lower coil spring 49 Spring hanger 51 Bellows tube 53 Bellows 55 Excitation device 57 Holding frame 59 Insertion hole 61 Colliding element 63 Colliding hanger 65 Bolt 70 Exhaust path Cr Dust collection chamber Er Exhaust chamber

Claims (4)

A dust collector comprising a casing having an exhaust inlet, an exhaust outlet and a dust outlet, a filter element standing in the casing, and a dust collection chamber between the casing inner wall and the filter element,
A filter element comprising: a filter cartridge; a lid member that covers an upper portion of the filter cartridge; and a holding member that has an exhaust chamber connected to the filter cartridge and is disposed at the lower portion of the filter cartridge;
A coil spring that supports the upper and lower portions of the filter element;
An excitation device capable of applying vertical vibration to the filter element;
A dust collector comprising: an extendable exhaust outlet pipe connecting the exhaust chamber of the holding member and the exhaust outlet.   A coil spring that is mounted between the top plate of the casing and the lid member and supports the upper part of the filter element, and a coil spring that suspends the holding member and supports the lower part of the filter element. The dust collector according to claim 1.   3. The dust collector according to claim 1, wherein a collision element that collides with the filter element when the amplitude of the filter element that vibrates by the vibrating device reaches a predetermined width is provided in the casing.   The dust according to any one of claims 1 to 3, further comprising: a dust discharge port formed below the casing; and a viewing window detachably disposed at an upper end of the dust discharge pipe. collector.

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