JP4712787B2 - Transflective liquid crystal display device and manufacturing method thereof - Google Patents

Description

  The present invention relates to a passive matrix type and active matrix type liquid crystal display device. In particular, the present invention relates to an electrode structure of a transflective liquid crystal display device having both transmissive and reflective functions.

  In recent years, with the explosive spread of portable information terminals typified by mobile phones, displays that can respond to changes in light weight, power saving, and usage environment are required.

  In terms of thin film and light weight, liquid crystal display devices or organic EL display devices are promising.

  The transmissive display device consumes less power only for driving the display. However, since the liquid crystal itself does not emit light, a backlight is required to display as a display. In the cellular phone application, an EL backlight is generally used. However, separate power is required for the backlight, and the characteristics of power saving peculiar to liquid crystals cannot be fully utilized, which is disadvantageous for power saving. . Also, the display on the display looks good in contrast in a dark environment, but the display does not look very good in a normal bright environment, and the adaptability according to the usage environment is in either the upper emission method or the lower emission method. There are difficulties.

  The organic EL display device is characterized in that the display element itself emits light. The power consumption is larger than that of the reflective liquid crystal display device, but is smaller than that of the transmissive liquid crystal display device (with backlight). However, as in the case of the transmissive liquid crystal display device, the display on the display looks good in a dark environment, but the display does not look very good in a normal bright environment. Even in the case, there is a difficulty in adaptability according to the use environment.

  Further, the reflection type liquid crystal display device uses external light from the environment as light for display. From the display side, basically no backlight is required, and only power for driving the liquid crystal and the driving circuit is required, so that active power saving can be achieved. However, in contrast to the former two, the display on the display looks good in a bright environment, but the display does not look very good in a dark environment. Considering the use of portable information terminals, it is mainly used outdoors, and although there are many cases where the display is viewed in a relatively bright environment, this is still insufficient in terms of adaptability according to the usage environment. . Therefore, in some cases, a device incorporating a front light is commercially available so that display can be performed as a reflective display device even in a dark environment.

  Accordingly, attention has been paid to a transflective liquid crystal display having both advantages by combining a transmissive type and a reflective type liquid crystal display device. In a bright environment, we take advantage of the power-saving features of the reflective type and good visibility in this environment, while in a dark environment, we use the backlight to take advantage of the superior contrast characteristics of the transmissive type. ing.

  A transflective liquid crystal display device is disclosed in Japanese Patent Application Laid-Open No. 11-101992, and a reflective portion that reflects external light and a transmissive portion that transmits light from a backlight are formed in one display pixel. As a dual-use liquid crystal display device that performs display using light transmitted through the transmission part from the backlight and light reflected by the reflection part formed by a film having a relatively high reflectance when the surroundings are completely dark, Further, when the outside light is bright, it is possible to use as a reflection type liquid crystal display device that can be used as a reflection type liquid crystal display device that performs display using light reflected by a reflection portion formed by a film having a relatively high light reflectance. This is a dual-use (semi-transmissive) liquid crystal display device.

  Further, in the above-described transflective liquid crystal display device, a special concavo-convex structure having light diffusibility is provided particularly in a reflective portion that performs reflective display. Reflective electrodes reflect light incident on a surface at a certain incident angle from a certain direction only at a certain emission angle in a certain direction (Snell's law). This is because if the surface is flat, the direction and angle of light emission with respect to the incidence of light are fixed. When a display is manufactured in such a state, a display with very poor visibility is obtained.

  The transflective liquid crystal display device can be said to be a display that is well adapted to special usage conditions such as a portable information terminal. Especially for mobile phone applications, it is expected that there will be a great demand in the future. Therefore, it is clear that further cost reduction is necessary to ensure stable demand or to cope with enormous demand.

  However, in order to form the concavo-convex structure as described above, a method of forming a concavo-convex shape on a layer below the reflective electrode and then forming a reflective electrode thereon is necessary.

  In addition to the above example, in order to manufacture a transflective liquid crystal display device, unevenness is formed on the surface of one or both of the reflective electrode and the transmissive electrode constituting the pixel electrode, or on the layer below the pixel electrode. Since patterning is necessary to form the structure, the number of processes is increased. An increase in the number of processes leads to disadvantageous situations such as a decrease in yield, an increase in process time, and an increase in cost.

  Accordingly, an object of the present invention is to provide a display with high visibility and a transflective liquid crystal display device in which a reflective electrode having a concavo-convex structure is formed without particularly increasing the number of steps.

  In order to solve the above problems, in the present invention, in the production of a transflective liquid crystal display device, in forming an electrode composed of a transparent electrode and a reflective electrode, a reflective electrode composed of a plurality of island-shaped patterns and a transparent conductive film It is characterized by having a concavo-convex shape by laminating and forming a transparent electrode made of and improving the visibility of the display by increasing the light scattering property. Further, since the plurality of island-shaped patterns can be formed simultaneously with the wiring, the concavo-convex structure can be formed without particularly increasing the number of patterning steps only for forming the concavo-convex structure during the manufacturing process. Thus, significant cost reduction and productivity improvement are possible.

  The liquid crystal display device of the present invention has a transparent conductive film formed on an insulating surface, a wiring formed on the transparent conductive film, and a plurality of island-shaped patterns, the transparent conductive film, The liquid crystal display device is characterized in that the wiring and the plurality of island-shaped patterns are electrically connected.

  The plurality of island-shaped patterns formed here have a function as a reflective electrode. In addition, a transparent electrode made of a transparent conductive film and a reflective electrode made up of a plurality of island-shaped patterns are laminated so that the portion having the reflective electrode becomes an electrode having light reflectivity and is formed on the transparent electrode. In the part which does not have a reflective electrode and the transparent electrode is exposed to the surface, it becomes a transparent electrode which has the transparency with respect to light. Therefore, in the present invention, a transflective liquid crystal display device having an electrode having two kinds of properties of reflection and transmission as a pixel electrode is formed. That is, the pixel electrode in the present invention is composed of a reflective electrode and a transparent electrode, and has an uneven structure.

  In addition, as the reflective conductive film in the present invention, a conductive film having a reflectance of 75% or more in the vertical reflection characteristic at a wavelength of 400 to 800 nm (visible light region) is used. As such a material, aluminum (Al), silver (Ag), or an alloy material containing these as a main component can be used.

  A liquid crystal display device according to another configuration of the present invention is formed on a thin film transistor formed on a substrate, a transparent conductive film formed on the thin film transistor via an insulating film, and the transparent conductive film. And a plurality of island-like patterns, wherein the wiring electrically connects the thin film transistor and the transparent conductive film.

  Furthermore, the liquid crystal display device of the present invention includes a first substrate having a first transparent conductive film, a wiring, and a plurality of island-like patterns, a second substrate having a second transparent conductive film, The wiring and the plurality of island-shaped patterns are formed on the first transparent conductive film, and the transparent conductive film, the wiring, and the plurality of island-shaped patterns are electrically And the film forming surface of the first substrate and the film forming surface of the second substrate are arranged to face each other, and the first substrate and the second substrate The liquid crystal display device is characterized in that the liquid crystal is sandwiched therebetween.

  Furthermore, the liquid crystal display device of the present invention includes a first substrate having a thin film transistor, a first transparent conductive film, a wiring, and a plurality of island patterns, and a second substrate having a second transparent conductive film. And the liquid crystal and the wiring and the plurality of island-shaped patterns are formed on the first transparent conductive film, and the wiring includes the thin film transistor, the first transparent conductive film, The plurality of island-shaped patterns are electrically connected, the film formation surface of the first substrate and the film formation surface of the second substrate are arranged to face each other, and the first substrate The liquid crystal is sandwiched between the second substrate and the second substrate.

  According to each of the above structures, the island-like pattern and the wiring made of the reflective conductive film can be formed by etching. Further, when forming simultaneously by etching, the reflective conductive film is viewed from the film formation surface. Thus, the concavo-convex structure can be formed, so that the number of photolithography steps that are normally used for forming the concavo-convex structure can be reduced, and a significant cost reduction and productivity improvement can be realized.

In addition, the plurality of island-like patterns formed in each of the above configurations are formed in a random shape and a random arrangement, and are electrically connected to the first transparent conductive film.
However, it is desirable that the island-shaped pattern formed by etching the reflective conductive film has a smaller taper angle at the end of the pattern in order to improve the reflection function. The plurality of island patterns in the present invention are characterized in that the taper angle of each pattern end is 5 to 60 °.

  Further, in each of the above structures, the ratio of the area occupied by the plurality of island-shaped patterns made of the reflective conductive film formed in the pixel portion is 50 to 90% of the area of the pixel portion.

  As described above, by implementing the present invention, light scattering can be improved by forming a concavo-convex structure with a transparent electrode and a reflective electrode in the manufacture of a transflective liquid crystal display device. Visibility can be improved. In addition, since the plurality of island-shaped patterns serving as the reflective electrodes can be formed at the same time as the wiring by etching the conductive film, significant cost reduction and improvement in productivity can be realized.

  An embodiment of the present invention will be described with reference to FIG. A semiconductor layer 105 is formed on the substrate 101. The semiconductor layer 105 is formed of a polycrystalline semiconductor layer obtained by crystallizing an amorphous semiconductor layer by heat treatment, and has a thickness of about 30 to 750 nm. Furthermore, a gate insulating film 106 is formed thereon. Note that the gate insulating film 106 is formed of a silicon oxide film having a thickness of 30 to 100 nm.

  On the gate insulating film 106, a gate electrode 107 and a capacitor wiring 108 are formed in the same layer, and a first insulating film 109 made of a silicon oxide film and a second insulating film 110 made of an acrylic film are formed thereon. The As a material for forming the first insulating film 109, an inorganic material containing silicon such as a silicon nitride film, a silicon nitride oxide film, and a coated silicon oxide film (SOG: Spin On Glass) is used in addition to the silicon oxide film. be able to. In addition to the acrylic film (including photosensitive acrylic), an organic material such as polyimide, polyamide, or BCB (benzocyclobutene) can be used as the material for forming the second insulating film 110.

  The transmissive electrode 111 is an electrode for transmitting incident light to the substrate 101 side. As a material for forming the transparent electrode 111, 2 to 20% of indium tin oxide (ITO) film or indium oxide is used. A transparent conductive film mixed with zinc oxide (ZnO) is used to form a film with a thickness of 100 to 200 nm. Furthermore, the transparent electrode 111 is formed for every pixel by patterning this.

  The wiring 112 is also an electrode that forms a contact with the source region 102 of the TFT 115 and is also a source line. The wiring 113 is an electrode that forms a contact with the drain region 103 of the TFT 115.

  A source region 102, a drain region 103, and a channel formation region 104 are formed in the semiconductor layer 105. In addition, except for the source region 102 and the drain region 103, the semiconductor layer 105 formed in a position overlapping with the capacitor wiring 108 functions as one electrode of the capacitor.

In addition, a reflective electrode 114 made of a reflective conductive film is formed on the previously formed transparent electrode 111 by the same film as the conductive film forming the wirings 112 and 113. That is, a plurality of island-like patterns are formed on the transparent electrode 111 in the pixel portion by using a photolithography technique, and wirings 112 and 113 are formed in other portions.
Note that the island-shaped pattern formed here is formed in a random shape and arrangement, and forms the reflective electrode 114. Since the reflective electrode 114 has such a structure, it can have a function of scattering light incident on the surface.

  According to the structure of the present invention, the light incident on the reflective electrode 114 formed on the transparent electrode 111 is scattered by the shape of the reflective electrode 114, but the transparent electrode 222 is exposed without forming the reflective electrode 114. The light incident on the portion that is present can pass through the transparent electrode 111 and be emitted to the substrate 101 side.

  Note that the reflective electrode formed in the present invention has a random shape as shown in FIG. 2A and is formed at random positions so that the angle of light incident on the reflective electrode ( The light can be scattered by shifting the incident angle) and the angle of the light reflected by the reflective electrode (reflection angle).

  In the present invention, what is important in shifting the incident angle and the reflection angle is the shape of the plurality of reflectors constituting the reflection electrode, and the tapered slope surface of each reflector shown in FIG. This is an angle indicating how much the (reflecting surface) 210 is inclined with respect to the substrate surface (reference surface) 211, and this is indicated as a taper angle (θ) 212.

  In this embodiment, the reflector is formed so that the taper angle (θ) 212 is 5 to 60 °, so that the taper slope surface (reflective surface) is larger than the emission angle with respect to the substrate surface (reference surface) 211. It is possible to shift the emission angle with respect to 210 to scatter light and improve the visibility of the panel.

FIG. 2C shows the behavior of incident light 213 and reflected light 214 with respect to a reflecting surface having no slope. The incident direction with respect to the reference surface 211 is a _in , the emission direction is a _out , the incident direction with respect to the reflection surface 210 is a ′ _in , and the emission direction is a ′ _out , and the incident angle (φ ₁ ) 215 and the emission angle (φ ₂ ) If 216 is defined with respect to the reference plane, here, since the reference plane 211 and the reflection plane 210 coincide, a _in = a ′ _in = φ ₁ and a _out = a ′ _out = φ ₂ holds.

Further, since a ′ _in = a ′ _out holds according to Snell's law, a _in = a _out and φ ₁ = φ ₂ hold.

  On the other hand, FIG. 2D shows the behavior of the incident light 213 and the outgoing light 214 when the tapered slope surface with the taper angle (θ) 212 is a reflection surface.

The incident light 213 and the outgoing light 214 are assumed to have an incident angle (φ ₁ ′) 217 and an outgoing angle (φ ₂ ′) 218 with respect to the reference surface 211, respectively, and a _in = φ ₁ ′ and a _out = φ ₂ And a ′ _in = φ ₁ ′ + θ and a ′ _out = φ ₂ ′ −θ hold.

Also, according to Snell's law, a ′ _in = a ′ _out holds, and therefore φ ₁ ′ + θ = φ ₂ ′ −θ holds. From this equation, the relationship between the incident angle (φ ₁ ′) 217 and the emission angle (φ ₂ ′) 218 can be expressed as φ ₂ ′ −φ ₁ ′ = 2θ. This means that the incident direction (a _in ) of the incident light 213 and the emission direction (a _out ) of the emitted light 214 are shifted by 2θ.

  In producing a panel with higher visibility, it is preferable to uniformly distribute the deviation angle (2θ) in the range of 40 ° or less, and therefore the taper angle (θ) 212 is 20 ° or less. More preferably, the reflector 204 is formed.

  In the present embodiment, the light incident on the reflective electrode 114 can be efficiently scattered by forming the taper angle (θ) 212 of the reflector 204 constituting the reflective electrode 114 at 5 to 60 °. Therefore, the structure of the present invention can improve the visibility of the display without increasing the TFT manufacturing process.

  Note that a transflective type is obtained by combining a counter substrate (not shown) having a counter electrode with an element substrate (FIG. 1) having a TFT on a substrate described in this embodiment and providing a liquid crystal therebetween. A liquid crystal display device can be formed.

  Examples of the present invention will be described below.

  In this embodiment, an example of a manufacturing process of an active matrix substrate including a top gate type TFT is shown. For description, FIGS. 3 to 7 showing a top view and a cross-sectional view of a part of the pixel portion are used.

  First, an amorphous semiconductor layer is formed over the substrate 301 having an insulating surface. Here, a quartz substrate is used as the substrate 301, and an amorphous semiconductor layer is formed with a thickness of 10 to 100 nm.

  Note that the substrate 301 can be a glass substrate or a plastic substrate in addition to a quartz substrate. When a glass substrate is used, heat treatment may be performed in advance at a temperature lower by about 10 to 20 ° C. than the glass strain point. In order to prevent impurity diffusion from the substrate 301, a base film made of an insulating film such as a silicon oxide film, a silicon nitride film, or a silicon oxynitride film is preferably formed on the surface of the substrate 301 on which the TFT is formed.

  As the amorphous semiconductor layer, an amorphous silicon film (amorphous silicon film) having a thickness of 60 nm is formed by LPCVD. Next, this amorphous semiconductor layer is crystallized. Here, crystallization is performed using the technique described in JP-A-8-78329. The technique described in this publication is to selectively add a metal element that promotes crystallization to an amorphous silicon film and perform a heat treatment to form a crystalline silicon film that spreads from the added region as a starting point. is there. Here, nickel is used as a metal element for promoting crystallization, and after heat treatment for dehydrogenation (450 ° C., 1 hour), heat treatment for crystallization (600 ° C., 12 hours) is performed. Here, the technique described in the above publication is used for crystallization, but is not particularly limited, and a known crystallization process (laser crystallization method, thermal crystallization method, or the like) can be used.

If necessary, irradiation with a laser beam (XeCl: wavelength 308 nm) for increasing the crystallization rate and repairing defects left in the crystal grains is performed. As the laser light, excimer laser light having a wavelength of 400 nm or less, and second harmonic and third harmonic of a YAG laser are used. In any case, a pulse laser beam having a repetition frequency of about 10 to 1000 Hz is used, and the laser beam is condensed to 100 to 400 mJ / cm ² by an optical system and irradiated with an overlap rate of 90 to 95%. The film surface may be scanned.

Next, Ni is gettered from the region used as the active layer of the TFT. Here, an example is shown in which a gettering method is performed using a semiconductor layer containing a rare gas element. In addition to the oxide film formed by the laser light irradiation, the surface is treated with ozone water for 120 seconds to form a barrier layer made of an oxide film having a total thickness of 1 to 5 nm. Next, an amorphous silicon film containing an argon element serving as a gettering site is formed with a thickness of 150 nm on the barrier layer by a sputtering method. The film formation conditions by the sputtering method of this embodiment are as follows: the film formation pressure is 0.3 Pa, the gas (Ar) flow rate is 50 (sccm), the film formation power is 3 kW, and the substrate temperature is 150 ° C. Note that the atomic concentration of the argon element contained in the amorphous silicon film under the above conditions is 3 × 10 ²⁰ / cm ^{3 to} 6 × 10 ²⁰ / cm ³ , and the atomic concentration of oxygen is 1 × 10 ¹⁹ / cm ³ to 3 × 10 ¹⁹ / cm ³ . Thereafter, heat treatment is performed at 650 ° C. for 3 minutes using a lamp annealing apparatus to perform gettering. An electric furnace may be used instead of the lamp annealing apparatus.

  Next, the amorphous silicon film containing an argon element as a gettering site is selectively removed using the barrier layer as an etching stopper, and then the barrier layer is selectively removed with dilute hydrofluoric acid. Note that during gettering, nickel tends to move to a region with a high oxygen concentration, and thus it is desirable to remove the barrier layer made of an oxide film after gettering.

  After forming a thin oxide film with ozone water on the surface of the obtained silicon film having a crystal structure (also called a polysilicon film), a resist mask is formed, etched into a desired shape, and separated into islands The formed semiconductor layer 305 is formed. After the semiconductor layer 305 is formed, the resist mask is removed, and a gate insulating film 306 covering the semiconductor layer 305 is formed to a thickness of 100 nm, and then thermal oxidation is performed.

Next, a channel doping process in which a p-type or n-type impurity element is added at a low concentration in a region to be a channel region of the TFT is performed over the entire surface or selectively. This channel doping process is a process for controlling the threshold voltage of the TFT. Note that boron (B), aluminum (Al) are impurity elements that impart p-type to the semiconductor.
And periodic group 13 elements such as gallium (Ga) are known. As an impurity element imparting n-type to a semiconductor, an element belonging to Group 15 of the periodic table, typically phosphorus (P) or arsenic (As) is known. Here, boron is added by an ion doping method in which diborane (B ₂ H ₆ ) is plasma-excited without mass separation. Of course, an ion implantation method that performs mass separation may be used.

  Next, a first conductive film is formed and patterned to form the gate electrode 307 and the capacitor wiring 308. Here, a stacked structure of tantalum nitride (TaN) (film thickness: 30 nm) and tungsten (film thickness: 370 nm) is used. In this embodiment, a double gate structure is used. Note that the storage capacitor includes the capacitor wiring 308 and a region a (303a) which is part of the semiconductor layer 305 using the gate insulating film 306 as a dielectric.

Next, phosphorus is added at a low concentration in a self-aligning manner using the gate electrode 307 and the capacitor wiring 308 as a mask. The concentration of phosphorus in the region added at this low concentration is adjusted to 1 × 10 ^{16 to} 5 × 10 ¹⁸ / cm ³ , typically 3 × 10 ^{17 to} 3 × 10 ¹⁸ / cm ³ .

Next, a mask (not shown) is formed and phosphorus is added at a high concentration, so that a high concentration impurity region which becomes the source region 302 or the drain region 303 is formed. The concentration of phosphorus in the high concentration impurity region is adjusted to 1 × 10 ²⁰ to 1 × 10 ²¹ / cm ³ (typically 2 × 10 ^{20 to} 5 × 10 ²⁰ / cm ³ ). Note that a region of the semiconductor layer 305 that overlaps with the gate electrode 307 serves as a channel formation region 304, and a region covered with the mask serves as a low concentration impurity region and serves as an LDD region 311. Further, a region that is not covered by any of the gate electrode 307, the capacitor wiring 308, and the mask is a high concentration impurity region including the source region 302 and the drain region 303.

  In this embodiment, the TFT of the pixel portion and the TFT of the driving circuit are formed on the same substrate, but the TFT of the driving circuit is also on both sides of the channel formation region and between the source and drain regions. A low concentration impurity region having an impurity concentration lower than that of the region may be provided, or a low concentration impurity region may be provided on one side. However, it is not always necessary to provide low-concentration impurity regions on both sides, and a practitioner may design a mask appropriately.

  Next, although not shown here, in order to form a p-channel TFT used for a driver circuit formed over the same substrate as the pixel, a region that becomes an n-channel TFT is covered with a mask, and boron is added to form a source region. Alternatively, a drain region is formed.

  Next, after removing the mask, a first insulating film 309 covering the gate electrode 307 and the capacitor wiring 308 is formed. Here, a silicon oxide film is formed to a thickness of 50 nm, and a heat treatment step for activating the n-type or p-type impurity element added to the semiconductor layer 305 at each concentration is performed. Here, heat treatment is performed at 850 ° C. for 30 minutes (FIG. 3A). A top view of the pixel here is shown in FIG. In FIG. 4, a cross-sectional view taken along the dotted line A-A ′ corresponds to FIG.

  Next, after performing hydrogenation treatment, a second insulating film 313 made of an organic resin material is formed. Here, the surface of the second insulating film 313 can be planarized by using an acrylic film with a thickness of 1 μm. Thereby, it is possible to prevent the influence of the step caused by the pattern formed under the second insulating film 813. Next, a mask is formed over the second insulating film 313, and a contact hole 312 reaching the semiconductor layer 305 is formed (FIG. 3B). Then, the mask is removed after the contact hole 312 is formed. A top view of the pixel here is shown in FIG. In FIG. 5, a cross-sectional view taken along the dotted line A-A ′ corresponds to FIG.

Next, a 120 nm transparent conductive film (here, indium tin oxide (ITO))
Film) is formed by sputtering, and this is patterned into a rectangle by using a photolithography technique. Then, after the wet etching process, a transparent electrode 313 is formed by performing a heat treatment at 250 ° C. for 60 minutes in a clean oven (FIG. 3C). A top view of the pixel here is shown in FIG.
In FIG. 6, a cross-sectional view taken along the dotted line AA ′ corresponds to FIG.

  Next, a second conductive film is formed and patterned to electrically connect the wiring 315 which is also a source line, the TFT 310 and the transparent electrode 313 in addition to the reflective electrode 314 formed on the transparent electrode 313. A wiring 316 to be connected is formed. Note that the second conductive film formed here is a reflective conductive film for forming the reflective electrode in the present invention. In addition to aluminum, silver, or the like, an alloy material containing these as a main component may be used. it can.

  In this embodiment, a multilayer film having a two-layer structure in which a Ti film of 50 nm and an Si-containing aluminum film of 500 nm are continuously formed by a sputtering method is used as the second conductive film.

Note that a photolithography technique is used as a patterning method, and the reflective electrode 314 and the wirings 315 and 316 having a plurality of island patterns are formed.
As an etching method used here, a dry etching method is used, and a taper etching and an anisotropic etching are performed.

First, a mask made of resist is formed, and a first etching process for performing taper etching is performed. The first etching process is performed under the first and second etching conditions. For etching, an ICP (Inductively Coupled Plasma) etching method may be used. Using the ICP etching method, the film is formed into a desired taper shape by appropriately adjusting the etching conditions (the amount of power applied to the coil-type electrode, the amount of power applied to the substrate-side electrode, the electrode temperature on the substrate side, etc.) Can be etched. As an etching _{gas, Cl 2, BCl 3, SiCl} 4, CCl 4 chlorine gas or CF ₄ to the typified like, SF _6, fluorine-based gas NF ₃ and the like typified, or O ₂ as appropriate Can be used.

In this embodiment, ICP (Inductively Coupled Plasma) etching method is used as the first etching condition, BCl ₃ , Cl ₂ and O ₂ are used as etching gases, and the respective gas flow ratios are set. 65/10/5 (sccm)
Etching is performed by supplying 500 W of RF (13.56 MHz) power to the coil-type electrode at a pressure of 1.2 Pa to generate plasma. 300 W RF (13.56 MHz) power is also applied to the substrate side (sample stage), and a substantially negative self-bias voltage is applied. The aluminum film containing Si is etched under the first etching condition so that the end portion of the first conductive layer is tapered.

Thereafter, the second etching condition is changed without removing the mask, and CF ₄ , Cl _2, and O ₂ are used as etching gases, and the gas flow ratio is 25/25/10 (sccm). The plasma was generated by applying 500 W of RF (13.56 MHz) power to the coil-type electrode at a pressure of about 30 seconds, and etching was performed for about 30 seconds.
20 W RF (13.56 MHz) power is also applied to the substrate side (sample stage), and a substantially negative self-bias voltage is applied. Under the second etching condition in which CF ₄ and Cl ₂ are mixed, both the aluminum film containing Si and the Ti film are etched to the same extent.

  Thus, the second conductive film including the first conductive layer and the second conductive layer can be tapered by the first etching process.

Next, a second etching process is performed to perform anisotropic etching without removing the resist mask. Here, BCl ₃ and Cl ₂ are used as etching gases, the respective gas flow ratios are set to 80/20 (sccm), and 300 W of RF (13.56 MHz) power is supplied to the coil-type electrode at a pressure of 1 Pa. Then, plasma is generated and etching is performed. 50 W RF (13.56 MHz) power is also applied to the substrate side (sample stage), and a substantially negative self-bias voltage is applied.

  As described above, when the reflective electrode 314 and the wirings 315 and 316 are formed, the resist is removed to obtain the structure shown in FIG. A top view of the pixel here is shown in FIG. In FIG. 7, a cross-sectional view taken along the dotted line A-A ′ corresponds to FIG.

  Note that, as shown in FIG. 7, the reflective electrode 314 is randomly formed on the transparent electrode 313, so that light is reflected by the reflective electrode 314 in a portion where the transparent electrode 313 and the reflective electrode 314 are overlapped. In the portion where the transparent electrode 313 is exposed on the surface without the reflective electrode 314 being formed, the light passes through the transparent electrode 313 and is emitted to the substrate 301 side.

  As described above, an n-channel TFT having a double gate structure, a pixel portion having a storage capacitor, and a driver circuit having an n-channel TFT and a p-channel TFT can be formed over the same substrate. . In this specification, such a substrate is referred to as an active matrix substrate for convenience.

  Needless to say, the present embodiment is an example and is not limited to the steps of the present embodiment. For example, as each conductive film, an element film selected from tantalum (Ta), titanium (Ti), molybdenum (Mo), tungsten (W), chromium (Cr), and silicon (Si), or an alloy film in which elements are combined (Typically, a Mo—W alloy or a Mo—Ta alloy) can be used. As each insulating film, a silicon oxide film, a silicon nitride film, a silicon oxynitride film, or an organic resin material (polyimide, acrylic, polyamide, polyimide amide, BCB (benzocyclobutene), or the like) film can be used.

  Further, according to the process shown in this embodiment, the reflective electrode 314 and the wirings (315 and 316) can be formed at the same time using a wiring pattern mask as shown in FIG. A plurality of reflective electrodes can be formed in an island shape on the transparent electrode without increasing the number of photomasks necessary for manufacturing the substrate. As a result, in the manufacture of a transflective liquid crystal display device, the process can be shortened, which can contribute to a reduction in manufacturing cost and an increase in yield.

  In this embodiment, a method for manufacturing a transflective liquid crystal display device having a structure different from that of Embodiment 1 will be described in detail with reference to FIGS.

  First, as shown in FIG. 8A, an amorphous semiconductor film is formed over a substrate 801, crystallized, and then a semiconductor layer 805 separated into islands by patterning is formed. Further, a gate insulating film 806 made of an insulating film is formed over the semiconductor layer 805. Note that since a manufacturing method until the gate insulating film 806 is formed is similar to that described in Embodiment 1, Embodiment 1 may be referred to. Similarly, after an insulating film covering the semiconductor layer 805 is formed, thermal oxidation is performed to form a gate insulating film 806.

  Next, a channel doping process in which a p-type or n-type impurity element is added at a low concentration in a region to be a channel region of the TFT is performed over the entire surface or selectively.

  Then, by forming a conductive film over the gate insulating film 806 and patterning the conductive film, a gate electrode 807, a capacitor wiring 808, and a wiring 809 to be a source line can be formed. Note that the first conductive film in this embodiment is formed by stacking TaN (tantalum nitride) formed to a thickness of 50 to 100 nm and W (tungsten) formed to a thickness of 100 to 400 nm.

In this example, the conductive film was formed using a stacked film of TaN and W, but there is no particular limitation, and any of the elements selected from Ta, W, Ti, Mo, Al, Cu, or the above You may form with the alloy material or compound material which has an element as a main component.
Alternatively, a semiconductor film typified by a polycrystalline silicon film doped with an impurity element such as phosphorus may be used.

Next, phosphorus is added at a low concentration in a self-aligning manner using the gate electrode 807 and the capacitor wiring 808 as a mask. The concentration of phosphorus in the region added at this low concentration is adjusted to 1 × 10 ^{16 to} 5 × 10 ¹⁸ / cm ³ , typically 3 × 10 ^{17 to} 3 × 10 ¹⁸ / cm ³ .

Next, a mask (not shown) is formed and phosphorus is added at a high concentration, so that a high concentration impurity region which becomes the source region 802 or the drain region 803 is formed. The concentration of phosphorus in the high concentration impurity region is adjusted to 1 × 10 ²⁰ to 1 × 10 ²¹ / cm ³ (typically 2 × 10 ^{20 to} 5 × 10 ²⁰ / cm ³ ). Note that a region of the semiconductor layer 805 that overlaps with the gate electrode 807 serves as a channel formation region 804, and a region covered with the mask serves as a low-concentration impurity region and serves as an LDD region 811. Further, a region that is not covered by any of the gate electrode 807, the capacitor wiring 808, and the mask is a high-concentration impurity region including the source region 802 and the drain region 803.

  Also in this embodiment, in the same manner as in Embodiment 1, in order to form a p-channel TFT used for a driver circuit formed on the same substrate as the pixel, a region that becomes an n-channel TFT is covered with a mask. Boron is added to form a source region or a drain region.

  Next, after removing the mask, a first insulating film 810 that covers the gate electrode 807, the capacitor wiring 808, and the wiring (source line) 809 is formed. Here, a silicon oxide film is formed to a thickness of 50 nm, and a heat treatment step for activating the n-type or p-type impurity element added to the semiconductor layer 805 at each concentration is performed. Here, heat treatment is performed at 850 ° C. for 30 minutes (FIG. 8A). A top view of the pixel here is shown in FIG. In FIG. 9, a cross-sectional view taken along the dotted line A-A ′ corresponds to FIG.

  Next, after performing hydrogenation treatment, a second insulating film 813 made of an organic resin material is formed. Here, the surface of the second insulating film 813 can be planarized by using an acrylic film with a thickness of 1 μm. Thereby, it is possible to prevent the influence of the step caused by the pattern formed under the second insulating film 813. Next, a mask is formed over the second insulating film 813, and a contact hole 812 reaching the semiconductor layer 805 is formed by etching (FIG. 8B). Then, the mask is removed after the contact hole 812 is formed.

Next, a 120 nm transparent conductive film (here, indium tin oxide (ITO))
Film) is formed by sputtering, and this is patterned into a rectangle by using a photolithography technique. Then, after performing the wet etching process, a transparent electrode 813 is formed by performing a heat treatment at 250 ° C. for 60 minutes in a clean oven (FIG. 8C). A top view of the pixel here is shown in FIG.
In FIG. 9, a cross-sectional view taken along the dotted line AA ′ corresponds to FIG.

  Next, a second conductive film is formed and patterned to electrically connect the wiring (source line) 809 and the source region of the TFT 810 in addition to the reflective electrode 814 formed on the transparent electrode 813. A wiring 815, a wiring 816 for forming a contact with the drain region of the TFT 810, and a wiring 817 for electrically connecting the drain region of the TFT 810 and the transparent electrode 813 are formed. Note that the second conductive film formed here is a reflective conductive film for forming the reflective electrode in the present invention. In addition to aluminum, silver, or the like, an alloy material containing these as a main component may be used. it can.

  In this embodiment, a multilayer film having a two-layer structure in which a Ti film of 50 nm and an Si-containing aluminum film of 500 nm are continuously formed by a sputtering method is used as the second conductive film.

  Note that a photolithography technique is used as a patterning method, and a reflective electrode 814 having a plurality of island patterns and wirings 815, 816, and 817 are formed. As an etching method used here, a dry etching method is used, and a taper etching and an anisotropic etching are performed.

First, a mask made of resist is formed, and a first etching process for performing taper etching is performed. The first etching process is performed under the first and second etching conditions. For etching, an ICP (Inductively Coupled Plasma) etching method may be used. Using the ICP etching method, the film is formed into a desired taper shape by appropriately adjusting the etching conditions (the amount of power applied to the coil-type electrode, the amount of power applied to the substrate-side electrode, the electrode temperature on the substrate side, etc.) Can be etched. As an etching _{gas, Cl 2, BCl 3, SiCl} 4, CCl 4 chlorine gas or CF ₄ to the typified like, SF _6, fluorine-based gas NF ₃ and the like typified, or O ₂ as appropriate Can be used.

In this embodiment, ICP (Inductively Coupled Plasma) etching method is used as the first etching condition, BCl ₃ , Cl ₂ and O ₂ are used as etching gases, and the respective gas flow ratios are set. 65/10/5 (sccm)
Etching is performed by supplying 500 W of RF (13.56 MHz) power to the coil-type electrode at a pressure of 1.2 Pa to generate plasma. 300 W RF (13.56 MHz) power is also applied to the substrate side (sample stage), and a substantially negative self-bias voltage is applied. The aluminum film containing Si is etched under the first etching condition so that the end portion of the first conductive layer is tapered.

Thereafter, the second etching condition is changed without removing the mask, and CF ₄ , Cl _2, and O ₂ are used as etching gases, and the gas flow ratio is 25/25/10 (sccm). The plasma was generated by applying 500 W of RF (13.56 MHz) power to the coil-type electrode at a pressure of about 30 seconds, and etching was performed for about 30 seconds.
20 W RF (13.56 MHz) power is also applied to the substrate side (sample stage), and a substantially negative self-bias voltage is applied. Under the second etching condition in which CF ₄ and Cl ₂ are mixed, both the aluminum film containing Si and the Ti film are etched to the same extent.

  Thus, the second conductive film including the first conductive layer and the second conductive layer can be tapered by the first etching process.

Next, a second etching process is performed to perform anisotropic etching without removing the resist mask. Here, BCl ₃ and Cl ₂ are used as etching gases, the respective gas flow ratios are set to 80/20 (sccm), and 300 W of RF (13.56 MHz) power is supplied to the coil-type electrode at a pressure of 1 Pa. Then, plasma is generated and etching is performed. 50 W RF (13.56 MHz) power is also applied to the substrate side (sample stage), and a substantially negative self-bias voltage is applied.

  Through the above steps, when the reflective electrode 814 and the wirings 815, 816, and 817 are formed, the resist is removed to obtain the structure shown in FIG. A top view of the pixel here is shown in FIG. In FIG. 10, a cross-sectional view taken along the dotted line A-A ′ corresponds to FIG.

  As described above, also in this embodiment, the n-channel TFT having the double gate structure, the pixel portion having the storage capacitor, and the driving circuit having the n-channel TFT and the p-channel TFT are provided on the same substrate. An active matrix substrate is formed.

  Further, according to the steps shown in this embodiment, the reflective electrode 814 and the wirings (815, 816, 817) can be formed at the same time using a wiring pattern mask as shown in FIG. A plurality of reflective electrodes can be formed in an island shape on the transparent electrode without increasing the number of photomasks necessary for manufacturing the active matrix substrate. As a result, in the manufacture of a transflective liquid crystal display device, the process can be shortened, which can contribute to a reduction in manufacturing cost and an increase in yield.

  In this embodiment, a method for manufacturing an active matrix substrate having a structure different from that shown in Embodiments 1 and 2 will be described with reference to FIGS.

  In FIG. 12, a TFT 1215 having a gate electrode 1207, a source region 1202, a drain region 1203, and wirings (1212 and 1213) is formed over a substrate 1201. Note that the wirings (1212 and 1213) are electrically connected to the source region and the drain region, respectively.

  Note that the active matrix substrate in this example is different from those in Example 1 and Example 2 in that the transparent electrode 1211 is formed after the wiring (1212, 1213).

  A second insulating film 1210 is formed in the same manner as described in Example 1 or Example 2, a contact hole is formed in the second insulating film 1210, and then a second conductive film is formed. Note that as the material of the second conductive film used here, the same material as that of Embodiment 1 or Embodiment 2 can be used.

  Then, the wirings (1212, 1213) and the reflective electrode 1214 can be formed by patterning the second conductive film. Note that the reflective electrode 1214 having a plurality of island-shaped patterns can be formed by a method similar to the method for forming the reflective electrode formed in Example 1 or Example 2. However, since the reflective electrode 1214 in this embodiment is formed in an island shape on the second insulating film 1210, it is not electrically connected to the TFT 1215 at the time of formation. By forming a transparent electrode 1211 by laminating a transparent conductive film on part of the wiring 1213 and on the reflective electrode 1214, an electrical connection can be formed.

  Note that the active matrix substrate manufactured in this embodiment can also be manufactured as a liquid crystal display device by performing the method shown in Embodiment 4.

  In this embodiment, a process for manufacturing a transflective liquid crystal display device from the active matrix substrate manufactured in Embodiment 1 will be described below. The sectional view of FIG. 11 is used for the description.

  First, after obtaining the active matrix substrate of FIG. 3D in accordance with Embodiment 1, an alignment film 1119 is formed on the active matrix substrate as shown in FIG. 11, and a rubbing process is performed. In this embodiment, before the alignment film 1119 is formed, spherical spacers 1121 for maintaining the distance between the substrates are dispersed over the entire surface of the substrate. Further, instead of the spherical spacer 1121, a columnar spacer may be formed at a desired position by patterning an organic resin film such as an acrylic resin film.

  Next, a substrate 1122 is prepared. A colored layer 1123 (1123a, 1123b) and a planarization film 1124 are formed over the substrate 1122. Note that as the colored layer 1123, a red colored layer 1123a, a blue colored layer 1123b, and a green colored layer (not shown) are formed. Although not shown here, the red colored layer 1123a and the blue colored layer 1123b are partially overlapped, or the red colored layer 1123a and the green colored layer (not shown) are partially overlapped. Thus, a light shielding portion may be formed.

  Further, a counter electrode 1125 made of a transparent conductive film is formed over the planarization film 1124 at a position to be a pixel portion, an alignment film 1126 is formed over the entire surface of the substrate 1122, and a counter substrate 1128 is obtained by performing a rubbing process. .

  Then, the active matrix substrate on which the alignment film 1119 is formed and the counter substrate 1128 are bonded to each other with a sealant (not shown). A filler is mixed in the sealing agent, and two substrates are bonded to each other with a uniform interval (preferably 2.0 to 3.0 μm) by the filler and the spherical spacer. Thereafter, a liquid crystal material 1127 is injected between both substrates and completely sealed with a sealant (not shown). A known liquid crystal material may be used for the liquid crystal material 1127. In this way, the transflective liquid crystal display device shown in FIG. 11 is completed. Then, if necessary, the active matrix substrate or the counter substrate 1128 is divided into a desired shape. Furthermore, a polarizing plate or the like was appropriately provided using a known technique. Then, the FPC is pasted using a known technique.

The structure of the liquid crystal module thus obtained will be described with reference to the top view of FIG.
A pixel portion 1504 is disposed in the center of the active matrix substrate 1501. A source signal line driver circuit 1502 for driving the source signal line is disposed above the pixel portion 1504. On the left and right sides of the pixel portion 1504, gate signal line driving circuits 1503 for driving the gate signal lines are arranged. In the example shown in this embodiment, the gate signal line driver circuit 1503 is arranged symmetrically with respect to the pixel portion. However, this may be arranged only on one side, and the designer may consider the substrate size of the liquid crystal module. May be appropriately selected. However, considering the operation reliability and driving efficiency of the circuit, the symmetrical arrangement shown in FIG. 15 is desirable.

  Input of signals to each drive circuit is performed from a flexible printed circuit (FPC) 1505. The FPC 1505 opens a contact hole in the interlayer insulating film and the resin film so as to reach the wiring arranged up to a predetermined place on the substrate 1501, and after forming a connection electrode (not shown), an anisotropic conductive film or the like It is crimped through. In this example, the connection electrode was formed using ITO.

  A sealant 1507 is applied around the periphery of the driving circuit and the pixel portion along the outer periphery of the substrate, and a predetermined gap (a space between the substrate 1501 and the counter substrate 1506) is maintained by a spacer formed on the active matrix substrate in advance. In this state, the counter substrate 806 is attached. Thereafter, a liquid crystal element is injected from a portion where the sealant 1507 is not applied, and is sealed with the sealant 1508. The liquid crystal module is completed through the above steps. Although an example in which all the drive circuits are formed on the substrate is shown here, several ICs may be used as part of the drive circuit. As described above, an active matrix liquid crystal display device is completed.

A block diagram of an electro-optical device manufactured using the present invention is shown in FIGS. FIG. 13 shows a circuit configuration for performing analog driving.
In this embodiment, an electro-optical device having a source side driver circuit 90, a pixel portion 91, and a gate side driver circuit 92 is shown. Note that in this specification, a drive circuit refers to a generic name including a source side processing circuit and a gate side drive circuit.

  The source side driver circuit 90 includes a shift register 90a, a buffer 90b, and a sampling circuit (transfer gate) 90c. The gate side driving circuit 92 includes a shift register 92a, a level shifter 92b, and a buffer 92c. Further, if necessary, a level shifter circuit may be provided between the sampling circuit and the shift register.

  In this embodiment, the pixel unit 91 includes a plurality of pixels, and each of the plurality of pixels includes a TFT element.

  Although not shown, a gate side drive circuit may be further provided on the opposite side of the gate side drive circuit 92 with the pixel portion 91 interposed therebetween.

  In the case of digital driving, a latch (A) 93b and a latch (B) 93c may be provided instead of the sampling circuit as shown in FIG. The source side driving circuit 93 includes a shift register 93a, a latch (A) 93b, a latch (B) 93c, a D / A converter 93d, and a buffer 93e. The gate side driving circuit 95 includes a shift register 95a, a level shifter 95b, and a buffer 95c. If necessary, a level shifter circuit may be provided between the latch (B) 93c and the D / A converter 93d.

  In addition, the said structure is realizable according to the manufacturing process shown in Example 1 or Example 2. FIG. In this embodiment, only the configuration of the pixel portion and the drive circuit is shown. However, according to the manufacturing process of the present invention, a memory and a microprocessor can be formed.

  The transflective liquid crystal display device manufactured by implementing the present invention can be used for various electro-optical devices. The present invention can be applied to all electric appliances incorporating such an electro-optical device as a display medium.

  As an electrical appliance manufactured using the liquid crystal display device manufactured according to the present invention, a video camera, a digital camera, a navigation system, a sound reproduction device (car audio, audio component, etc.), a notebook personal computer, a game machine, a portable information terminal (Mobile computer, mobile phone, portable game machine, electronic book, or the like), an image playback device equipped with a recording medium (specifically, a recording medium such as a digital video disc (DVD) can be played back and the image can be displayed. And a device provided with a display device). Specific examples of these electric appliances are shown in FIG.

  FIG. 16A shows a digital still camera, which includes a main body 2101, a display portion 2102, an image receiving portion 2103, operation keys 2104, an external connection port 2105, a shutter 2106, and the like. The liquid crystal display device manufactured according to the present invention is manufactured using the display portion 2102.

  FIG. 16B illustrates a laptop personal computer, which includes a main body 2201, a housing 2202, a display portion 2203, a keyboard 2204, an external connection port 2205, a pointing mouse 2206, and the like. The liquid crystal display device manufactured according to the present invention is manufactured using the display portion 2203.

  FIG. 16C illustrates a mobile computer, which includes a main body 2301, a display portion 2302, a switch 2303, operation keys 2304, an infrared port 2305, and the like. The liquid crystal display device manufactured according to the present invention is manufactured using the display portion 2302.

FIG. 16D illustrates a portable image reproducing device (specifically, a DVD reproducing device) provided with a recording medium, which includes a main body 2401, a housing 2402, a display portion A2403, a display portion B2404, and a recording medium (DVD or the like). A reading unit 2405, operation keys 2406, a speaker unit 2407, and the like are included. Although the display portion A 2403 mainly displays image information and the display portion B 2404 mainly displays character information, the liquid crystal display device manufactured according to the present invention is used for the display portions A, B 2403, and 2404.
Note that an image reproducing device provided with a recording medium includes a home game machine and the like.

  FIG. 16E illustrates a video camera, which includes a main body 2601, a display portion 2602, a housing 2603, an external connection port 2604, a remote control reception portion 2605, an image receiving portion 2606, a battery 2607, an audio input portion 2608, operation keys 2609, and an eyepiece. Part 2610 and the like. The liquid crystal display device manufactured according to the present invention is manufactured using the display portion 2602.

  Here, FIG. 16F shows a mobile phone, which includes a main body 2701, a housing 2702, a display portion 2703, an audio input portion 2704, an audio output portion 2705, operation keys 2706, an external connection port 2707, an antenna 2708, and the like. The liquid crystal display device manufactured according to the present invention is manufactured by using it for the display portion 2703. Note that the display portion 2703 can reduce power consumption of the mobile phone by displaying white characters on a black background.

  As described above, the applicable range of the liquid crystal display device manufactured in the present invention is so wide that electrical appliances in various fields can be manufactured. In addition, the electric appliance of this embodiment can be completed by using a liquid crystal display device manufactured by implementing Examples 1 to 5.

3A and 3B each illustrate an element structure of a liquid crystal display device of the present invention. 4A and 4B illustrate a structure of a reflective electrode according to the present invention. 4A and 4B illustrate a manufacturing process of a liquid crystal display device of the present invention. 4A and 4B illustrate a manufacturing process of a liquid crystal display device of the present invention. 4A and 4B illustrate a manufacturing process of a liquid crystal display device of the present invention. 4A and 4B illustrate a manufacturing process of a liquid crystal display device of the present invention. 4A and 4B illustrate a manufacturing process of a liquid crystal display device of the present invention. 4A and 4B illustrate a manufacturing process of a liquid crystal display device of the present invention. 4A and 4B illustrate a manufacturing process of a liquid crystal display device of the present invention. 4A and 4B illustrate a manufacturing process of a liquid crystal display device of the present invention. 4A and 4B illustrate a structure of a liquid crystal display device of the present invention. 3A and 3B each illustrate an element structure of a liquid crystal display device of the present invention. 3A and 3B each illustrate a circuit configuration that can be used in the present invention. 3A and 3B each illustrate a circuit configuration that can be used in the present invention. FIG. 6 illustrates an appearance of a liquid crystal display device of the present invention. The figure which shows an example of an electric appliance.

Explanation of symbols

101 Substrate 102 Source region 103 Drain region 104 Channel forming region 105 Semiconductor layer 106 Gate insulating film 107 Gate electrode 108 Capacitive wiring 109 First insulating film 110 Second insulating film 111 Transparent electrodes 112, 113 Wiring 114 Reflecting electrode

Claims (6)

An interlayer insulating film formed on the thin film transistor;
A first contact hole and a second contact hole formed in the interlayer insulating film;
First wiring that said first contact hole and is formed on the interlayer insulating film, which is electrically coupled to the drain of said thin film transistor,
A second wiring formed in the second contact hole and on the interlayer insulating film and electrically connected to a source of the thin film transistor;
A pixel electrode formed on the interlayer insulating film,
The pixel electrode has a structure in which a transparent electrode and a plurality of island patterns composed only of a reflective electrode are laminated,
It said first wiring is connected to the transparent electrode and electrically,
The top surface shape of the plurality of island-shaped patterns is a random shape,
And the taper slope surface is formed in the pattern end of the plurality of island-shaped patterns ,
The transflective liquid crystal display device , wherein the plurality of island patterns are formed simultaneously with the first wiring and the second wiring . Oite to claim 1,
The transflective liquid crystal display device, wherein the plurality of island patterns are arranged at random positions. Oite to claim 1 or claim 2,
The transflective liquid crystal display device, wherein the plurality of island patterns are formed on the transparent electrode. Oite to claim 1 or claim 2,
The transflective liquid crystal display device, wherein the plurality of island patterns are formed under the transparent electrode. An interlayer insulating film is formed on the thin film transistor,
Forming a first contact hole and a second contact hole reaching the thin film transistor in the interlayer insulating film;
Forming a transparent electrode on the interlayer insulating film;
A reflective conductive film is formed in the first contact hole, in the second contact hole, on the interlayer insulating film, and on the transparent electrode;
By etching the reflective conductive film, a first wiring electrically connected to the transparent electrode and a drain of the thin film transistor through the first contact hole, and the second contact hole are formed. And a second wiring electrically connected to the source of the thin film transistor through, and forming a plurality of island-like patterns consisting only of reflective electrodes on the transparent electrode,
The method of manufacturing a transflective liquid crystal display device, wherein the plurality of island patterns have a random shape and have a tapered slope surface at an end portion of the pattern. An interlayer insulating film is formed on the thin film transistor,
Forming a first contact hole and a second contact hole reaching the thin film transistor in the interlayer insulating film;
A reflective conductive film is formed in the first contact hole, in the second contact hole, and on the interlayer insulating film;
By etching the reflective conductive film, a first wiring electrically connected to a drain of the thin film transistor through the first contact hole, and a source of the thin film transistor through the second contact hole And a plurality of island-like patterns made of only reflective electrodes on the interlayer insulating film,
Forming a transparent electrode in contact with the first wiring and covering the plurality of island patterns;
The method of manufacturing a transflective liquid crystal display device, wherein the plurality of island patterns have a random shape and have a tapered slope surface at an end portion of the pattern.

Images