JP4711265B2 - COMPOSITE SLIDING STRUCTURE CONTAINING SEGMENT STRUCTURE HARD FILM AND SOLID LUBRICATION LAYER OR FLUID LUBRICATION LAYER ON SUBSTRATE AND METHOD FOR PRODUCING THEM - Google Patents

Description

  The present invention provides a hard film (for example, diamond, graphite, cubic boron nitride (c-BN), hexagonal boron nitride (h-BN), diamond-like carbon film (DLC)) on a substrate. Composite structure formed by a combination of segment structure hard films arranged separately from each other, and a solid lubricant layer or fluid lubricant layer formed between the segment structure hard films, and a method for manufacturing the same Thus, the composite sliding structure of the present invention has an extremely low coefficient of friction, wear resistance, releasability, water repellency and oil repellency compared with a base structure provided with a conventional diamond-like carbon coating. It has lubricity, slidability and moisture resistance.

  A rotating or sliding structure having a hard sliding film formed on the surface of a substrate is a structure having an excellent low friction coefficient and wear resistance. However, the rotating or sliding structure having a hard sliding film formed on the surface of the base has a sliding structure when the hard sliding layer on the base is broken and peeled off due to deformation of the base and rotates or slides. Things will be worn out.

  In order to prevent breakage and peeling of the hard sliding film formed on the surface of the base, a method of improving the adhesion by providing an intermediate layer between the base and the hard sliding film is used. This method of providing the intermediate layer is effective when the amount of deformation of the structure provided with the hard film is small, but when the amount of deformation increases, the hard sliding film breaks and peels off. Therefore, when the deformation amount of the structure provided with the hard coating is large, it is not possible to provide a structure having an excellent low friction coefficient and wear resistance that does not cause breakage and peeling of the hard sliding film. .

  Oil grooves provided on a rotating surface and a sliding surface of a conventional machine tool or the like are formed by scraping by hand that requires a high degree of skill. A large number of notched surfaces with a very thin depth compared to the width and length are provided on the rotating surface or sliding surface, and the contact surface other than these notched surfaces improves the flatness and It is an oil groove.

  These machine tools periodically apply fluid or grease-like lubricants and oils to the rotating surfaces and sliding surfaces that have this notch surface, leaving the lubricant oil and fat on this notch surface for a certain period of time. Lubrication and slidability are maintained without supplying a lubricant.

  However, since scraping is a manual operation, it is impossible to form deep oil grooves, and it is not possible to form a surface or groove to be carved by scraping on the rotating surface and sliding surface with high hardness. Processing is very expensive and requires a high level of skill.

  Further, in a machine tool bearing part that requires lubrication and sliding, a bush or a metal liner in which an oil groove is formed in the bearing part is incorporated in the bearing part. In these bushes or metal liners, a center hole into which the rotating shaft is inserted is opened, and an oil groove is formed on the inner surface of the center hole. In this bearing part, when the rotary shaft inserted in the center hole rotates, the lubricant or oil supplied from the oil reservoir or oil pot provided around the bearing part is not fed into the center hole of the bush or metal liner. It is injected into an oil groove provided on the inner surface, and lubrication and slidability are maintained.

  Furthermore, the bush and the metal liner are formed of a powder sintered alloy, and the holes formed during the sintering are impregnated and filled with lubricating oil and fat, thereby maintaining lubricity and slidability.

  When the oil groove of the bearing part is a flat surface on which the oil groove is formed, the groove is cut with a milling machine using an end mill or the like. On the other hand, when the surface forming the oil groove is inside the cylinder, the spiral groove is cut with a lathe. Furthermore, the oil groove of the bearing component is formed by plastic working using a hydraulic device and a groove forming die.

The sliding structure requires lubricity and slidability, and the sliding structure forms an oil groove by the above-described manual operation or machining. However, forming the oil groove manually and by machining is a very skillful and time consuming process.
Patent Document 1: Japanese Patent Application Laid-Open No. 2003-147525 Patent Document 2: Japanese Patent Application No. 2004-095207 Patent Document 3: Japanese Patent Application Laid-Open No. 2003-147525

  For example, diamond-like carbon film used as a hard film has intermediate mechanical properties between diamond and graphite, and diamond-like carbon film coated on the surface of the structure has excellent friction and wear resistance. Is granted. The diamond-like carbon film can be synthetically coated at a low temperature of about room temperature, and the surface of the diamond-like carbon film that has been synthetically coated is flat. It is currently the most promising material for wear-resistant coatings.

  However, when a practical sliding structure is coated with, for example, a diamond-like carbon film, the residual stress with the coated structure is optimized, the adhesion is improved, the film thickness is optimized, and the impact resistance is improved. It is necessary to consider various conditions such as improvement, reduction of the coefficient of friction under the actual use environment and improvement of wear resistance. In particular, in the case of a sliding structure in which a diamond-like carbon film is coated on a base that is easily elastically and plastically deformed, such as rubber, plastic, and aluminum, it is harder than the deformability of the base against the same deformation stress. Since the deformability of the film (for example, diamond-like carbon film) is small, the deformation of the substrate structure may easily cause the hard film (for example, diamond-like carbon film) to break or peel off from the substrate. It has become a major technical issue on expansion.

  Structures comprising a substrate coated with a hard film (for example, a diamond-like carbon film) have excellent friction and wear resistance, but these substrate structures can be used as high-speed rotating structures and sliding structures. In order to apply to a product, it has been a problem to provide a structure made of a substrate coated with a hard film (for example, a diamond-like carbon film) with lubricity and slidability.

  It was very hard, and it was impossible to manually process the groove for impregnating and filling the surface of these materials with a sliding lubricant, and it was also difficult to process the groove by machining. The present invention forms grooves that are impregnated and filled with a sliding lubricant even on the surface of a material part having a high hardness as described above, and slides that are impregnated and filled with various sliding lubricants in these grooves. It is an object to provide a dynamic lubrication structure.

  Structures made by coating a hard film (for example, diamond-like carbon) on a substrate made of the above-mentioned high hardness material have excellent friction resistance and wear resistance, but these substrate structures can be rotated at a high speed. In order to apply to a structure and a sliding structure, it has been a challenge to provide a structure made of a substrate coated with a hard film (for example, diamond-like carbon) with lubricity and slidability.

  In order to solve the above-mentioned problem of breakage and peeling of the hard film due to the deformation of the base, when the hard film (for example, diamond-like carbon film) is coated on the base, it is unidirectional, bi-directional (grid-like) or disordered Further, by forming a hard film divided into a plurality of sections, that is, by forming the hard film into a segment structure hard film, the substrate itself can be deformed by a gap formed between the respective films. Due to the deformation of the substrate itself, even if the substrate structure provided with a segment structure hard film (for example, a diamond-like carbon film) undergoes large elastic deformation and plastic deformation, the film can be deformed without peeling off from the substrate. Can be.

In order to solve the above problems, in the present invention, there are a case where a solid lubricant is used and a case where a fluid lubricant is used.
First, in order to solve the lubricity and slidability of the structure, a case where a solid lubricant is formed on the segment groove portions between the segment structure hard films will be specifically described below.

When Using Solid Lubricant The composite sliding structure 1 of the present invention includes a hard layer coated on the surface of a base 4, and a segment structure in which the hard films are arranged on the surface of the base so as to be separated from each other It comprises a hard film 2 and segment groove portions 5 formed between the respective segment structure hard films, and comprises a solid lubricating layer 3 covered and filled in the segment groove portions.

Further, the solid lubricating layer 3 forming the composite sliding structure 1 of the present invention has diamond, diamond-like carbon (DLC), graphite, cubic boron nitride (c-BN), hexagonal boron nitride (h- Characterized in that it comprises at least one member of the group consisting of BN) . By considering the rotational speed or sliding speed and the applied load, the solid lubricating layer 3 can obtain a sufficient lubricating effect even if it does not contain a resin.

Further, the segment structure hard film 2 made of the hard film forming the composite sliding structure 1 of the present invention is diamond, diamond-like carbon (DLC), graphite, cubic boron nitride (c-BN), hexagonal boron. characterized in that it comprises at least one of the group consisting of nitride (h-BN).

The substrate forming the composite sliding structure 1 of the present invention is characterized by comprising any one of a metal material, an inorganic material excluding graphite, and an organic material. The substrate is a commonly used structural material, the metal material is a single metal or an alloy thereof, the inorganic material is glass, ceramic and oxide and compound, and the organic material includes plastic and resin.

  In addition, each of the segment structure hard films 2 forming the segment grooves 5 forming the composite sliding structure 1 of the present invention has a side or outer diameter of 0.1 μm to 3 mm, and the segment structure hard The film interval is 0.01 μm to 1 mm, and the thickness of the segment structure hard film is 1 nm to 200 μm. In this case, if the one side or the outer diameter of the segment structure hard film is 0.1 μm or less, the adhesive force of the segment structure hard film may be reduced, and the segment structure hard film may be peeled off. There is a risk of breaking and peeling due to deformation. Further, if the interval between the segment structure hard films is 0.01 μm or less, the solid lubricant cannot be sufficiently covered during this interval, and sufficient lubricity cannot be obtained, and if it is 1 mm or more, the segment The effect of providing the structural hard film is reduced. Furthermore, if the thickness of the segment structure hard film is 1 nm or less, sufficient wear resistance cannot be obtained, and if it is 200 μm or less, sufficient wear resistance is obtained.

  In addition, the segment groove portions 5 between the segment structure hard films 2 forming the composite sliding structure 1 of the present invention are formed to be separated from each other, and the peeling of the segment structure hard film 2 from the base body 4 is suppressed by deformation. It is characterized by.

Further, at least one of non-segment structure diamond film, non-segment structure boron nitride film, non-segment structure diamond-like film, and non-segment structure silicon forming the composite sliding structure 1 of the present invention is 30 to 70. At least one of the non-segment structure hard films composed of atomic% is 0.01 μm to 10 μm on the segment groove between the segment structure hard films or on the segment structure hard film and the segment groove It is characterized by being formed with a thickness. The non-segmented hard film can be deformed by making it thinner than the segmented structural hard film, and can improve wear resistance together with the segmented structural hard film.

  The manufacturing method of the composite sliding structure 1 described above is that the segment structure hard film 2 coated with the hard films spaced apart from each other on the surface of the substrate 4 is formed by physical vapor deposition or chemical vapor deposition. The solid lubricant layer 3 is coated on the segment groove portions 5 which are formed so as to be coated and spaced apart between the segment structure hard films 2.

  In addition, in the method of manufacturing the composite sliding structure 1 described above, the non-segment structure hard film coated on the surface of the base 4 and the hard film are coated on the surface of the non-segment structure hard film so as to be separated from each other. The segment structure hard film 2 is coated with a physical vapor deposition method or a chemical vapor deposition method, and the solid lubricating layer 3 is formed in the segment groove portion 5 that is spaced between the segment structure hard films 2. It is characterized by covering.

When a fluid lubricant is used The composite sliding structure containing the fluid lubricant of the present invention will be specifically described below.
In the composite sliding structure containing a fluid lubricant having high hardness according to the present invention, a hard film is coated on the surface of the structure in order to provide an excellent low friction coefficient and wear resistance. Furthermore, the composite sliding structure of the present invention has a unidirectional and bi-directional (grid-like shape) when a hard film (for example, a diamond-like carbon film) is coated on the surface of the structure in order to provide sliding and lubricity. ) Or a segment structure hard film that is randomly divided into a plurality of segments, so that grooves having a predetermined interval are provided between the segment structure hard films, and the grooves are impregnated and filled with a fluid lubricant.
Each of the above problems of the present invention is specifically solved by the following means.

  A composite sliding structure 1 ′ including a fluid lubrication layer according to the present invention includes a hard film coated on the surface of a base 4 ′, and the hard films are arranged on the surface of the base so as to be separated from each other. Any of liquid oil, grease, or wax comprising a segment structure hard film 2 ′ and a segment groove portion 5 ′ formed between the segment structure hard films 2 ′ and 2 ′ and impregnating and filling the segment groove portions. It is characterized by comprising a fluid lubricating layer 3 ′ composed of one of these.

  The fluid lubricating layer 3 ′ forming the composite sliding structure 1 ′ of the present invention is characterized by using a base oil of mineral oil or animal or vegetable oil.

Further, the fluid lubricating layer 3 ′ forming the composite sliding structure 1 ′ of the present invention is a group consisting of carbide, nitride, carbonitride, oxide, hydroxide, sulfide, boride and fluoride. It comprises at least one of the group consisting of any one of 5 to less than 95 wt%. These carbide, nitride, carbonitride, oxide, hydroxide, sulfide, boride and fluoride groups include titanium, chromium, tungsten and silicon carbides, nitrides, carbonitrides, oxides And hydroxides, sulfides, borides and fluorides are composed of carbon nanotubes, fullerenes, hydroxyapatite, molybdenum sulfide (MoS ₂ ). In this case, if 5 wt% or less, the lubricating effect cannot be satisfied, and if 95 wt% or more, the synergistic effect between the fluid lubricant layer and the additive is reduced.

  The segment structure hard film 2 ′ made of a hard film forming the composite sliding structure 1 ′ of the present invention is at least one member of the group consisting of diamond, diamond-like carbon, graphite, cubic boron nitride and hexagonal boron nitride. It is characterized by selectively containing seeds.

The base 4 ′ forming the composite sliding structure 1 ′ of the present invention is characterized by being made of any one of a metal material, an inorganic material excluding graphite, and an organic material. The substrate is a commonly used structural material, the metal material is a single metal or an alloy thereof, the inorganic material is glass, ceramic and oxide, and the compound, and the organic material includes plastic and resin.

Further, each segment structure hard film 2 ′ forming the segment groove portion 5 ′ forming the composite sliding structure 1 ′ of the present invention has a side or outer diameter of 0.1 μm to 3 mm, and the segment The interval between the structural hard films is 0.1 μm to 5 mm, and the thickness of the segment structural hard film is 0.1 μm to 100 μm.
In this case, if the one side or the outer diameter of the segment structure hard film is 0.1 μm or less, the adhesive force of the segment structure hard film may be reduced, and the segment structure hard film may be peeled off. There is a risk of breaking and peeling due to deformation. Further, when the interval between the segment structure hard films is 0.01 μm or less, the fluid lubricant cannot be sufficiently impregnated during this period, and sufficient lubricity cannot be obtained. The effect of providing a hard film is reduced. Furthermore, if the thickness of the segment structure hard film is 0.1 μm or less, the effect of a fluid lubricant mixed with various additives equivalent to this thickness cannot be obtained, and if it is 100 μm or more, the coating is not covered. It takes time and increases costs.

  Further, the composite sliding structure 1 ′ of the present invention is formed by separating the segment groove portions 5 ′ between the segment structure hard films 2 ′ and deforming the segment structure hard film 2 ′ from the base body 4 ′ by deformation. It is characterized by suppressing peeling.

The composite sliding structure 1 ′ of the present invention includes a non-segment structure diamond film, a non-segment structure diamond-like carbon film, a non-segment structure cubic boron nitride, a non-segment structure hexagonal boron nitride, At least one member of the group consisting of any one of the non-segmented hard films containing 30 to 70 atomic% of non-segmented silicon is formed on the segment grooves between the segmented structural hard films, or A segment structure hard film and the segment groove are formed to a thickness of 0.01 μm to 50 μm. The non-segmented hard film can be deformed by making it thinner than the segmented structural hard film, and can improve wear resistance together with the segmented structural hard film.

  In the method of manufacturing the composite sliding structure 1 ′ described above, the segment structure hard film 2 ′ coated with the hard films spaced apart from each other on the surface of the substrate 4 ′ is formed by physical vapor deposition or chemical vapor deposition. A fluid-like lubricating layer 3 ′ is formed by a growth method and impregnated and filled in the segment groove 5 ′ formed between the segment structure hard films, and is impregnated in at least one atmosphere of reduced pressure, normal pressure and high pressure. It is characterized by filling.

  Furthermore, the manufacturing method of the composite sliding structure 1 ′ described above is formed by separating the non-segment structure hard film coated on the surface of the base 4 ′ and the non-segment structure hard film from each other on the surface. The segment structure hard film 2 ′ is coated with a physical vapor deposition method or a chemical vapor deposition method, and the segment groove portion 5 ′ disposed so as to be spaced apart from the segment structure hard film 2 is impregnated. The fluid lubricating layer 3 ′ is impregnated and filled in at least one atmosphere of reduced pressure, normal pressure and high pressure.

  A segment structure hard film coated on a substrate, and a solid lubricant or fluid lubricant filled in a segment groove formed between the segment structure hard films formed of each hard film. The composite sliding structure of the present invention comprises a friction coefficient as compared with a conventional structure in which a segment groove portion is not formed and a sliding structure in which a segment groove portion is not coated or impregnated with a prior art sliding film. Excellent stability of 0.1 or less was obtained.

  In addition, the composite sliding structure of the present invention has very excellent wear resistance compared to a sliding structure having a sliding film of a prior art in which a solid lubricant layer or a fluid lubricant is not combined. Release properties, water and oil repellency, and moisture resistance were obtained.

Example of Solid Lubricating Layer In the composite sliding structure of the present invention, a composite sliding film comprising a hard layer and a solid lubricant layer is formed by chemical vapor deposition (plasma, light and laser CVD), sputtering ( DC, high frequency, magnetron and ion sputtering) and physical vapor deposition (vacuum and low-pressure atmospheric vapor deposition) are used for coating, and a particularly preferred method is plasma chemical vapor deposition.

  The segment structure hard film (DLC) forming one of the composite sliding structures of the present invention has a side or outer diameter in the range of 0.1 μm to 3 mm, and is between the segment structure hard film and the segment structure hard film. The interval is 0.01 μm to 1 mm, and the thickness of the segment structure hard film is 1 nm to 200 μm. Preferably, the segment structure hard film is coated with a micro segment structure hard film having a side of 20 μm × 20 μm, an interval of 20 μm, and a thickness of 200 nm on the substrate, and sprayed with a fluorine-containing resin in the groove portion. Baking is performed at a temperature of preferably 100 to 200 ° C. In this way, a composite protective film composed of the hard film and the fluororesin is formed on the substrate to form a composite sliding structure.

  A composite sliding structure formed from a composite protective film and a substrate made of this hard film and a fluororesin has an air flow when the segment structure hard film is coated with a number of metals and other materials such as steel materials. Among them, it has a very low coefficient of friction (μ = less than 0.1). Moreover, this segment structure hard film has gas barrier properties, releasability, water repellency, and chemical stability while maintaining the high deformability characteristics that are the characteristics of the segment structure hard film.

Furthermore, in the present invention, each segment structure hard film preferably contains silicon or fluorine. When silicon is included in this segment structure hard film, tetramethylsilane, (Si (CH ₃ ) ₄ ), (Si (CH ₃ ) ₄ ) / (Si (CH ₃ ) ₄ ) + (C ₂ H ₂ ) It is preferable that about 0.09, that is, Si is introduced by about 10 atomic% of C. In addition, when fluorine is included in this segment structure hard film, (CF ₄ ) / (CF ₄ ) + (C ₂ H ₂ ) = about 0.5, that is, F flows in at about 50 atomic% of C. preferable. This solid lubricating layer may be a lubricating resin containing fluorine.

  The solid lubricant layer or lubricant resin covering the segment grooves formed between the segment structure hard films can be coated not only on the segment grooves but also on the surface of the segment structure hard film by 10 μm or less. . By coating in this manner, the segmented structure hard film appears after the solid lubricating layer or lubricant resin on the surface of the segmented structure hard film is worn out, so that the lubrication performance is improved but the wear resistance is affected. There is nothing.

In the present invention, the solid lubricant layer covering the segment groove formed between the segment structure hard films can contain other than fluororesin. That is, the segment grooves are covered and filled with a silicon-based resin synthesized with tetramethylsilane, (Si (CH ₃ ) ₄ ) + (C ₂ H ₂ ). The flow rate ratio of (Si (CH ₃ ) ₄ ) / (Si (CH ₃ ) ₄ ) + (C ₂ H ₂ ) was 1 to 100%, but the Si / C was 0.5 to 5 atoms. %, Preferably in the range of 1 to 2.5 atomic%.

  As in the case of the fluororesin described above, the solid lubricant layer or lubricant resin covering the segment grooves formed between the segment structure hard films not only covers the segment grooves but also the segment structure hard films. A surface of 10 μm or less can be coated on the surface. By coating in this manner, the segmented structure hard film appears after the solid lubricating layer or lubricant resin on the surface of the segmented structure hard film is worn out, so that the lubrication performance is improved but the wear resistance is affected. There is nothing.

Example 1
Plasma Chemical Vapor Deposition Method Using Composite Sliding Structure Mesh Electrode A part of the composite sliding structure of the present invention is schematically shown in FIG. The composite sliding structure 1 of this example is obtained by forming a diamond-like carbon film, which is a hard film, on a silicon substrate 4 by a plasma chemical vapor deposition method using a mesh electrode. 5 was formed by coating synthesis. A segment structure hard film 2 made of a diamond-like carbon film coated and synthesized by a plasma chemical vapor deposition method using a mesh electrode and a segment groove portion 5 formed between them are shown in micrographs in FIGS. Show. As shown in these drawings, segment groove portions 5 that are spaced apart from each other by a predetermined interval can be formed between the segment structure hard films 2. The segment structure hard film 2 made of the diamond-like carbon film of this example was substantially square with one side of 20 μm × 20 μm, and the width of the segment groove portion 5 was 20 μm.

  Thereafter, a fluorine resin is applied to the surface on which the segment structure hard film 2 is formed and the segment groove portion 5 by a spray method, and further, the fluorine resin is heated and cured to form a solid lubricating layer 3 to form a composite sliding structure. Object 1 was created. During the application, the fluororesin as the solid lubricating layer 5 covered both the segment structure hard film 2 made of the diamond-like carbon film and the segment groove portion 5 entirely. However, as described above, the segment structure hard film appears after the solid lubricant layer or lubricant resin on the surface of the segment structure hard film is worn out, so that the lubrication performance is improved but the wear resistance is affected. Absent.

Example 2
Characteristic Evaluation of Composite Sliding Structure The composite sliding structure 1 including the segment structure hard film 2 and the solid lubricating layer 5 of the present invention was evaluated by a ball-on-disk method. The ball used for the evaluation was SUJ2 material having a diameter of 6 mm. FIG. 2 shows the relationship between the friction coefficient and the sliding rotational speed of the present invention and the comparative example evaluated by the ball-on-disk method when loaded with a load of 0.5 N. As a comparative example, the result of the sliding membrane structure including only the segment structure hard film of the same size and not including the solid lubricating layer is also shown.

  As shown in FIG. 2, the composite sliding structure of the present invention has a low coefficient of friction and a sliding rotational speed of about 1000 rpm compared to the protective film structure that does not include the solid lubricant layer of the comparative example. The range was 1 or less. On the other hand, the friction coefficient of the comparative example shown in FIG. 2 is larger than 0.1 from the initial sliding rotational speed, and shows a tendency to gradually increase as the sliding rotational speed increases.

  The variation tendency of the friction coefficient of the composite sliding structure of the present invention when a large load was applied was examined. FIG. 3 shows the relationship between the friction coefficient and the sliding rotational speed of the present invention and the comparative example evaluated by the ball-on-disk method when loaded with a load of 1.0 N.

  As shown in FIG. 2 and FIG. 3, the composite sliding structure of the present invention hardly changes when the number of sliding is about 300 and the friction coefficient is 0.1 or less. FIG. 5 shows a segment structure hard film made of a diamond-like carbon film coated and synthesized by a plasma chemical vapor deposition method using a mesh electrode of the present invention and a segment groove portion, and a microscope after sliding up to 300 times. It is a photograph. As shown in the micrograph of the surface of the composite sliding structure in FIG. 5, the composite sliding structure of the present invention has a segment structure hard film and a segment groove on the sliding friction surface up to 300 times or less. Since a sliding trace is seen when sliding on both sides, the solid lubricant remains entirely or partially on both the segment structure hard film and the segment groove portion.

  FIG. 6 shows a segment structure hard film composed of a diamond-like carbon film coated and synthesized by a plasma chemical vapor deposition method using a mesh electrode of the present invention and a segment groove portion, and is a micrograph after sliding up to 800 times. is there. As shown in the photomicrograph of the surface of the composite sliding structure in FIG. 6, the composite sliding structure of the present invention slid onto the segment structure hard film on the sliding friction surface when the number of sliding was about 800 times or less. Since no trace of sliding is observed, the solid lubricant does not remain on the segment structure hard film, and the solid lubricant remains in the segment groove. That is, in the composite sliding structure of the present invention, the solid lubricant remains in the segment groove when the number of sliding times exceeds about 300 and not more than 800. Therefore, the solid lubricant is added to the segment groove of the comparative example. It is shown that it is low friction compared with the sliding membrane structure which does not contain.

  FIG. 7 shows a segment structure hard film composed of a diamond-like carbon film coated and synthesized by a plasma chemical vapor deposition method using a mesh electrode of the present invention and a segment groove portion, and a micrograph after sliding up to about 1000 times. It is. As shown in the photomicrograph of the surface of the composite sliding structure in FIG. 7, in the composite sliding structure of the present invention, when the number of sliding times exceeds 800 times and reaches 1000 times, the solid lubricating layer in the segment groove portion also remains. Therefore, the friction coefficient tends to increase as shown in FIG.

  From the relationship between the friction coefficient of the present invention evaluated by the ball-on-disk method when the load load is 1N shown in FIG. 3 and the comparative example, and the number of sliding times, the composite sliding structure of the present invention has a sliding number of about If it exceeds 800 times, the coefficient of friction increases. This is because the solid lubricating layer coated on the segment groove is almost worn out. However, from the relationship between the friction coefficient and the number of sliding operations of the present invention and the comparative example evaluated by the ball-on-disk method at a load load of 0.5 N shown in FIG. In the composite sliding structure, the solid lubricating layer in the segment groove portion is not worn even when the number of sliding times exceeds about 1000 times. This depends on changes in the contact area and the stress applied to the solid lubricating layer due to the difference in load conditions. Therefore, the composite sliding structure of the present invention may be worn and peeled off due to the load applied to the segment structure hard film and the solid lubricating layer. Therefore, depending on the load condition of the actual structure, The size of the structural hard film and the segment groove is determined, and the hardness of the lubricant is also determined thereby.

Examples of Fluid Lubricating Layer In the composite sliding structure including the fluid lubricating layer of the present invention, the fluid lubricating layer 3 ′ impregnated and filled in the segment groove portion 5 ′ of the composite sliding structure 1 ′ is liquid oil. Any one of grease or wax, which is based on mineral oil or animal and vegetable oils. These base oils use ISO VG22 to VG220 as ISO viscosity grade (JIS K2001). These lubricants contain various additives, and it is desirable that these additives are uniformly dispersed in the lubricant. For this reason, it is necessary that the oil film of the lubricating oil be 1 to 15 μm, preferably about 1 to 5 μm. Based on the thickness of the oil film, the segment structure hard film has a thickness of 1 to 100 μm in order to set the depth of the segment groove 5 ′ of the composite sliding structure 1 ′ to a range of 1 to 100 μm.

Example 3
The composite sliding structure 1 ′ of the present invention has a segment structure hard film made of a diamond-like carbon film coated and synthesized by a plasma chemical vapor deposition method using a mesh electrode, and a segment groove portion. As shown in the micrographs of the surface of the composite sliding structure of FIGS. 5 to 7, a segment structure hard film made of a substantially square diamond-like carbon film having a side of about 20 μm is formed. Each segment structure hard film is spaced apart at an interval of about 20 μm.

Example 4
Lubricating method to segment groove part of sliding structure The space | interval 0.1 micrometer-5 mm of the segment structure hard film provided in the sliding structure as mentioned above is the width | variety of a segment groove part. The segment structure hard film has oil repellency depending on the synthesis conditions, and on the lower limit side where the width of the segment groove becomes narrow, depending on the viscosity and surface tension of the fluid lubricant, the fluid to the segment groove at normal atmospheric pressure It becomes relatively difficult to impregnate and fill the lubricant. The state of the fluid lubricant due to the difference in surface tension is shown in FIGS. As shown in FIG. 4B, the fluid lubricant is preferably convex in the segment grooves. In order to facilitate the impregnation and filling of the fluid lubricant, the fluid lubricant, particularly the grease, is impregnated and filled into the segment grooves in a reduced pressure atmosphere (0.9 to 0.1 atm (about 8900 to 980 pascals)).

  The segment groove portion of the composite sliding structure containing the fluid lubricant of the present invention is impregnated once in this way, and when a fluid lubricant needs to be impregnated thereafter, a reduced pressure atmosphere is provided. In the atmospheric pressure atmosphere, the same kind of fluid lubricant as that in the initial stage can be filled. The reason for this is that because the fluid lubricant does not completely flow out of the segment groove due to the nature of the viscous fluid lubricant, the segment groove is wet with the fluid lubricant.

  In addition, the impregnation apparatus provided with the decompression chamber of about 0.9 to 0.1 atm can be sufficiently exhausted using a low vacuum pump, an exhaust device, or an atmospheric adsorbent (molecular tube). The decompression chamber of about 0.9 to 0.1 atm does not need to completely block the atmosphere, and it is sufficient that the segment groove portion can replace the atmosphere and the fluid lubricant. Therefore, the impregnation / filling step of the composite sliding structure of the present invention can be continued by sequentially inserting the sliding structure into the apparatus.

Example 5
Dimension of segment structure hard film and intersecting shape of segment groove portion In the composite sliding structure including the fluid lubrication layer in the present invention, the segment structure hard film 2 having a thickness of 0.1 μm to 100 μm is formed on the surface of the substrate 4. Excellent wear resistance is provided by forming the segment groove portions 5 spaced apart by an interval of 1 μm to 5 mm. The segment groove portion may be a groove portion that is parallel to each other, a groove portion that intersects with each other, or a groove portion that intersects randomly.

Since the composite sliding structure of the present invention is provided with a segmented hard film of a very hard hard film on the surface of the substrate, it is particularly applied to an apparatus that rotates at high speed and slides at high speed.
In addition, the composite sliding structure including the solid lubricating layer of the present invention has a solid lubricating layer coated on the segment groove portion, so that a liquid lubricant cannot be used in a dry state to cause adhesion of surrounding dust. Especially applied to industrial equipment and ultra-precision equipment.
Furthermore, the composite sliding structure including the fluid lubrication layer of the present invention is impregnated and filled with the fluid lubrication layer in the segment groove, so it is planned to be used in places where it is difficult to replenish the lubricant and to extend the maintenance period. It can be applied to many devices.

FIG. 1 is a diagram schematically showing a part of a composite sliding structure having a solid lubricant or a fluid lubricant of the present invention. FIG. 2 shows the relationship between the friction coefficient and the number of sliding of the composite sliding structure having the solid lubricant of the present invention evaluated by the ball-on-disk method at a load of 0.5 N and the comparative example. FIG. 3 shows the relationship between the friction coefficient and the number of sliding of the composite sliding structure having the solid lubricant of the present invention evaluated by the ball-on-disk method at a load of 1 N and the comparative example. FIG. 4 shows the state of the fluid lubricant in the segment groove due to the difference in surface tension. The fluid lubricant of the present invention shows a concave state in (a) and a convex state in (b). FIG. 5 shows a segment structure hard film made of a diamond-like carbon film coated and synthesized by a plasma chemical vapor deposition method using a mesh electrode of the present invention and a segment groove portion, and a microscope after sliding up to 300 times. It is a photograph. FIG. 6 shows a segment structure hard film composed of a diamond-like carbon film coated and synthesized by a plasma chemical vapor deposition method using a mesh electrode of the present invention and a segment groove portion, and a microscope after sliding up to 800 times. It is a photograph. FIG. 7 shows a segment structure hard film made of a diamond-like carbon film coated and synthesized by a plasma chemical vapor deposition method using the mesh electrode of the present invention and a segment groove portion, and a microscope after sliding up to 1000 times. It is a photograph.

Claims (8)

A composite sliding structure comprising a hard layer coated on the surface of a substrate other than graphite ,
A solid structure comprising a segment structure hard film on the surface of the base member, the segment structure hard film being spaced apart from each other, and a segment groove portion formed between the segment structure hard films; A lubricating layer, or a liquid lubricating layer impregnated and filled in the segment groove,
The segment structure hard film is at least one member selected from the group consisting of diamond, diamond-like carbon, graphite, cubic boron nitride and hexagonal boron nitride,
The solid lubricant layer includes at least one member selected from the group consisting of diamond, diamond-like carbon, graphite, cubic boron nitride, hexagonal boron nitride, silicon, and fluorine;
The liquid sliding layer includes at least one of liquid oil, grease, or wax based on mineral oil or animal or vegetable oil as a base oil . 2. The composite sliding structure according to claim 1, wherein the substrate other than graphite is made of any one of a metal material, an inorganic material excluding graphite, and an organic material. Each of the segment structure hard films forming the segment groove part has a side or outer diameter of 0.1 μm to 3 mm,
3. The composite sliding structure according to claim 1, wherein an interval between the segment structure hard films is 0.01 μm to 1 mm, and a thickness of the segment structure hard film is 1 nm to 200 μm. object.   The segment groove portion between the segment structure hard films is formed so as to be separated, and peeling of the segment structure hard film from the base body is suppressed by deformation. Composite sliding structure. 5. The composite sliding structure according to claim 1, wherein a non-segment structure hard film is formed between the base and the segment structure hard film on the substrate. It is a manufacturing method of the compound sliding structure given in any 1 paragraph of Claims 1-4 ,
A segment structure hard film is formed by physical vapor deposition or chemical vapor deposition on the surface of the substrate so that the hard films are spaced apart from each other, and the segment structure hard films are spaced apart from each other. A method for producing a composite sliding structure, characterized in that a solid lubricant layer is coated on the segment groove portion to be disposed in a row. It is a manufacturing method of the compound sliding structure according to claim 5 ,
A non-segmented structure hard film coated on the surface of a substrate and a segmented structure hard film coated on the surface of the non-segmented structure hard film separately from each other by physical vapor deposition or chemistry. A method for producing a composite sliding structure, characterized in that a solid lubricating layer is coated on a segment groove portion that is formed by a chemical vapor deposition method and is spaced apart between the segment structure hard films. It is a manufacturing method of the composite sliding structure of any one of Claims 1-5, Comprising: After the said solid-lubrication layer contains a fluorine and spray-applying the resin containing a fluorine to the said segment groove part, 60- A method for producing a composite sliding structure, characterized by firing at 300 ° C.