JP2002038255A - Abrasion resistant lubricating-film and coated member - Google Patents

Abrasion resistant lubricating-film and coated member

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Publication number
JP2002038255A
JP2002038255A JP2000226254A JP2000226254A JP2002038255A JP 2002038255 A JP2002038255 A JP 2002038255A JP 2000226254 A JP2000226254 A JP 2000226254A JP 2000226254 A JP2000226254 A JP 2000226254A JP 2002038255 A JP2002038255 A JP 2002038255A
Authority
JP
Japan
Prior art keywords
film
wear
hard coating
solid lubricant
lubricating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000226254A
Other languages
Japanese (ja)
Inventor
Masaki Kobayashi
正樹 小林
Itsuo Yazaki
逸夫 矢崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tungaloy Corp
Original Assignee
Toshiba Tungaloy Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Tungaloy Co Ltd filed Critical Toshiba Tungaloy Co Ltd
Priority to JP2000226254A priority Critical patent/JP2002038255A/en
Publication of JP2002038255A publication Critical patent/JP2002038255A/en
Withdrawn legal-status Critical Current

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  • Drilling Tools (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an abrasion resistant lubricating-film consisting of solid lubricant and hard coating, which can prolong the service life of sliding parts like tools such as a tip, a drill, and a die, and bearings, even in a hard service condition, by giving the lubricating-film a structure in which the solid lubricant is supplied to a surface of the hard coating over a long period. SOLUTION: The lubricating-film is characterized by that the solid lubricant is filled in concavity provided on the surface of the hard coating on a base material, which has diameter of dozens μm, depth ratio of 0.3 or deeper against the total film thickness, and area ratio of 0.05-0.4 against the total coating area.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、チップ、ドリル、
エンドミルに代表される切削工具、金型、切断刃などの
耐摩耗用工具、ライナー、軸受けブッシュなどの摺動部
品に使用される耐摩耗性潤滑膜に関し、具体的には、硬
質被膜の表面に分散形成した微細な凹部に固体潤滑剤を
充填して埋め込み構造とすることにより、耐摩耗性と共
に、潤滑性、耐溶着性、耐酸化性を向上させて寿命を大
幅に延長した耐摩耗性潤滑膜および被覆部材に関する。
TECHNICAL FIELD The present invention relates to a tip, a drill,
Cutting tools such as end mills, dies, wear-resistant tools such as cutting blades, and wear-resistant lubricating films used for sliding parts such as liners and bearing bushes. Abrasion-resistant lubrication with extended lubrication, welding resistance, and oxidation resistance as well as wear resistance, as well as improved wear resistance by filling solid lubricant into the finely dispersed fine recesses to form an embedded structure. It relates to a membrane and a covering member.

【0002】[0002]

【従来の技術】TiN、TiCN、TiC、Al23
(TiAl)Nなどの硬質被膜が切削工具を始め、耐摩
耗工具部品や摺動部品に使用され、寿命延長に貢献して
いる。しかし、被削材と加工条件あるいは相手材と摺動
条件によっては、摩擦応力による膜の剥離や基材のチッ
ピング、熱発性による膜の酸化変質、酸化摩耗や基材の
熱変質、変形などによって、使用寿命の延長が困難であ
ると言う問題がある。
2. Description of the Related Art TiN, TiCN, TiC, Al 2 O 3 ,
Hard coatings such as (TiAl) N are used for cutting tools, wear-resistant tool parts and sliding parts, and contribute to prolonging the service life. However, depending on the work material and processing conditions or the mating material and sliding conditions, film peeling and chipping of the base material due to frictional stress, oxidative deterioration of the film due to heat generation, oxidative wear, thermal deterioration of the base material, deformation, etc. However, there is a problem that it is difficult to extend the service life.

【0003】そこで、これらの硬質被膜中に硫化物を分
散させたCVD複合膜や、硬質被膜上に二硫化モリブデ
ン(MoS2)、二硫化タングステン(WS2)、黒鉛、
ダイヤモンドライクカーボン(DLC)などを被覆した
PVD多層膜など、硬質被膜に潤滑性を付与することに
より寿命延長を図った被覆工具あるいは部品が多数提案
されている。潤滑性複合膜に関する先行技術の代表的な
ものに、特公平1−26802号公報、特開平2−22
1714号公報、特開2000−001768号公報な
どがある。
[0003] Therefore, a CVD composite film in which sulfides are dispersed in these hard films, and molybdenum disulfide (MoS 2 ), tungsten disulfide (WS 2 ), graphite,
A number of coated tools or parts have been proposed that extend the life by imparting lubricity to a hard coating, such as a PVD multilayer film coated with diamond-like carbon (DLC) or the like. Representative examples of the prior art relating to the lubricating composite film include Japanese Patent Publication No. 1-26802 and Japanese Patent Application Laid-Open No. 2-22.
No. 1714 and Japanese Patent Application Laid-Open No. 2000-001768.

【0004】[0004]

【発明が解決しようとする課題】潤滑性複合膜に関する
先行技術の内、特公平1−26802号公報には、超硬
合金、サーメット、鉄系材料からなる工具部品の表面
に、4a、5a及び6a族金属の炭化物、窒化物、硼化
物、酸化アルミニウムなどからなる硬質相と金属硫化物
相(特に硫化チタン)とからなる複合組成物を内層と
し、最外層が硬質相である被覆工具部品が記載されてい
る。同公報記載の被覆工具は、含有された金属硫化物の
潤滑作用より、摩擦、溶着、摩耗などを軽減して工具寿
命の延長を図ろうとしたものである。しかし、金属硫化
物は低硬度で脆弱かつ不安定なために、逆に摩耗を促
進、膜が機械的にチッピングあるいは剥離、酸化あるい
は吸湿によって変質するので、高速加工や湿式加工では
工具寿命の延長効果が少ないと言う問題がある
Among the prior arts relating to the lubricating composite film, Japanese Patent Publication No. 1-26802 discloses that 4a, 5a and 4a, 5a and 4a are formed on the surface of a tool component made of a cemented carbide, cermet or iron-based material. A coated tool part in which a composite composition comprising a hard phase composed of a carbide, nitride, boride, aluminum oxide or the like of a Group 6a metal and a metal sulfide phase (particularly titanium sulfide) is used as an inner layer, and the outermost layer is a hard phase is provided. Has been described. The coated tool described in the publication aims to extend the tool life by reducing friction, welding, wear and the like by the lubricating action of the contained metal sulfide. However, metal sulfides are low in hardness, brittle and unstable, and conversely promote wear, and the film is mechanically chipped or peeled, oxidized or absorbed by moisture. There is a problem that it is less effective

【0005】また、特開平2−221714号公報に
は、軸受けの摺動面にTiCと金、銀、鉛などの軟質金
属あるいはMoS2、WS2などの層状固体潤滑剤との積
層膜を被覆した固体潤滑軸受が記載されている。また、
2000−001768号公報には、周期律表4、5、
6族金属元素とAl、Si、B、Cから選択され一種以
上の元素と、B、C、N、Oから選択される一種以上と
からなる高硬度被膜の下地層と、二硫化モリブデンを主
成分とする表面層を持つ積相被膜において、表面層には
4、5、6族金属元素の一種以上が0.5at%〜10
at%を含有した固体潤滑性を有する複合耐摩耗性硬質
被膜が記載されている。
Japanese Patent Application Laid-Open No. 2-221714 discloses that a sliding surface of a bearing is coated with a laminated film of TiC and a soft metal such as gold, silver or lead or a layered solid lubricant such as MoS 2 or WS 2. Described solid lubricated bearings. Also,
JP 2000001768 discloses periodic tables 4, 5,
The base layer of a high hardness coating composed of a Group 6 metal element and one or more elements selected from Al, Si, B, and C, and one or more elements selected from B, C, N, and O, and mainly molybdenum disulfide In the accumulated phase coating having a surface layer as a component, the surface layer contains at least one of Group 4, 5, and 6 metal elements in an amount of 0.5 at% to 10 at%.
A composite wear resistant hard coating with solid lubricity containing at% is described.

【0006】両公報に記載された潤滑性被膜は、MoS
2による潤滑性によって工具寿命の延長を図ろうとした
ものであるが、MoS2が軟質膜であるために摩滅ある
いは下地膜から剥離するために、切削や厳しい摺動条件
ではほとんど寿命延長効果がないと言う問題がある。
The lubricating coatings described in both publications are MoS
Although MoS 2 is a soft film that wears or peels off from the base film, it has little effect on extending the life of the tool under cutting or severe sliding conditions. There is a problem to say.

【0007】[0007]

【課題を解決するための手段】本発明者らは、長年に亘
り、耐摩耗性と潤滑性を兼備した耐摩耗性潤滑膜につい
て検討していたところ、硬質被膜の表面に凹凸を設けた
後に固体潤滑膜を被覆すると、加工材との摩擦初期には
凸部の固体潤滑剤が容易に摩滅するものの、硬質被膜が
露出すると、凸部の硬質被膜が耐摩耗性を保持しつつ凹
部に保持された固体潤滑剤が徐々に硬質被膜表面に供給
されるために、摩擦・摩耗が著しく抑制され、固体潤滑
剤が消費されるまでは低い摩擦・摩耗を保持すると言う
知見と、硬質被膜の表面形状としては、平滑な面に円形
の凹部が微細かつ無数に存在すると、耐摩耗性と潤滑性
のバランスが良く、厳しい加工あるいは摺動条件でも潤
滑性、耐溶着性を長時間保持できて寿命が大幅に延長で
きると言う知見を得て本発明を完成するに至ったもので
ある。
The present inventors have studied a wear-resistant lubricating film having both wear resistance and lubricity for many years. When the solid lubricating film is coated, the solid lubricant in the convex portion is easily worn out in the initial stage of friction with the work material, but when the hard coating is exposed, the hard coating in the convex portion is held in the concave portion while maintaining wear resistance. Since the solid lubricant is gradually supplied to the hard coating surface, the friction and wear are significantly suppressed, and the low friction and wear are maintained until the solid lubricant is consumed. As for the shape, if there are minute and numerous circular concave parts on a smooth surface, the wear resistance and lubricity are well balanced, and the lubrication and welding resistance can be maintained for a long time even under severe processing or sliding conditions, and the life is long Can be extended significantly Te which has led to the completion of the present invention.

【0008】本発明の耐摩耗性潤滑膜は、1〜20μm
厚みの単層あるいは多層からなる硬質被膜において、該
硬質被膜表面の全膜厚に対する深さ比が0.3以上、径
が1〜100μm、硬質被膜の表面積に対する開口面の
面積割合が0.05〜0.40でなる凹部が点在し、か
つ該凹部には固体潤滑剤が充填されていることを特徴と
するものである。
The wear-resistant lubricating film of the present invention has a thickness of 1 to 20 μm.
In a hard coating consisting of a single layer or multiple layers of thickness, the depth ratio of the hard coating surface to the total thickness is 0.3 or more, the diameter is 1 to 100 μm, and the area ratio of the opening surface to the surface area of the hard coating is 0.05. .. 0.40, which are characterized by being filled with a solid lubricant.

【0009】本発明の耐摩耗性潤滑膜を被覆する基材
は、具体的には、WC−Co系、WC−(WTiTa)
C−Co系、WC−TaC−Co系に代表される超硬合
金、TiC−Mo−Ni系、TiCN−WC−TaC−
Ni−Co系などのサーメット、Al23系、Al23
−TiC系、Si34系などのセラミックスや、立方晶
窒化ホウ素(cBN)を主成分とし、金属Co、Alあ
るいはTiN、Al23、AlN、TiB2などのセラ
ミックス成分を結合相とした立方晶窒化ホウ素焼結体、
高速度鋼、工具鋼を挙げることができる。
The base material for coating the wear-resistant lubricating film of the present invention is, specifically, a WC-Co type, WC- (WTiTa)
C-Co based, WC-TaC-Co based hard metal, TiC-Mo-Ni based, TiCN-WC-TaC-
Cermet such as Ni-Co-based, Al 2 O 3 system, Al 2 O 3
-Ceramics such as TiC and Si 3 N 4 and cubic boron nitride (cBN) as main components, and metal Co, Al or ceramic components such as TiN, Al 2 O 3 , AlN and TiB 2 as a binder phase. Cubic boron nitride sintered body,
High-speed steel and tool steel can be mentioned.

【0010】本発明の耐摩耗性潤滑膜における硬質被膜
は、具体的には、TiC、TiN、Ti(CN)、Ti
(CNO)、ZrN、HfN、VN、Al23、ZrO
2、(TiAl)N、(TiAl)(CNO)、周期律
表の4a、5a、6a族元素、アルミニウム、シリコン
の炭化物、窒化物、酸化物およびこれらの相互固溶体を
挙げることができる。硬質被膜の厚みは1μm以下では
耐摩耗性を向上させる効果が小さく、20μmを超えて
厚くなると、膜剥離による異常摩耗や強度低下による破
損を引き起こし易くなるので1〜20μmと定めた。ま
た、硬質被膜の最外層がPVD法によるチタンの炭化
物、窒化物、炭窒化物およびチタンとアルミニウムとの
複合窒化物、複合炭窒化物の中の少なくとも1種である
と、後処理により膜表面に凹凸部を形成し易く、かつ表
面が平滑で耐摩耗性に優れるため好ましい。
The hard coating in the wear-resistant lubricating film of the present invention is, specifically, TiC, TiN, Ti (CN), Ti
(CNO), ZrN, HfN, VN, Al 2 O 3 , ZrO
2 , (TiAl) N, (TiAl) (CNO), elements of groups 4a, 5a and 6a of the periodic table, aluminum, carbides, nitrides, oxides of silicon, and mutual solid solutions thereof. When the thickness of the hard coating is 1 μm or less, the effect of improving the wear resistance is small, and when the thickness exceeds 20 μm, abnormal wear due to film peeling or breakage due to a decrease in strength is liable to be caused. When the outermost layer of the hard coating is at least one of titanium carbide, nitride, carbonitride, composite nitride of titanium and aluminum, and composite carbonitride by PVD, the surface of the film is subjected to post-treatment. This is preferable because it is easy to form an uneven portion on the surface, and has a smooth surface and excellent wear resistance.

【0011】本発明の耐摩耗性潤滑膜における固体潤滑
剤は、具体的には、二硫化モリブデン、二硫化タングス
テン、黒鉛、フッ化黒鉛、一酸化鉛、窒化ホウ素、フッ
化カルシウム、フッ化バリウム、フッ素樹脂、ダイヤモ
ンドライクカーボンなどを挙げることができる。
The solid lubricant in the wear-resistant lubricating film of the present invention is, specifically, molybdenum disulfide, tungsten disulfide, graphite, graphite fluoride, lead monoxide, boron nitride, calcium fluoride, barium fluoride. , Fluorine resin, diamond-like carbon, and the like.

【0012】本発明の耐摩耗性潤滑膜における硬質被膜
表面上の凹部は、硬質被膜全膜厚との厚み比で0.3以
上の深さとなっているもので、厚み比で0.3未満の深
さでは硬質被膜の摩滅に伴って固体潤滑剤が供給されず
に寿命が短くなる。また、凹部の径は、1μm未満で
は、固体潤滑の充填が困難で、かつ相対的に凹部の距離
が短くなって硬質被膜の強度が低下し、100μmを超
えて大きくなると充填された固体潤滑剤の摩擦による流
出が激しくなって寿命が短くなる。さらに、硬質被膜の
表面積に対する凹部の面積割合が0.05未満では、固
体潤滑剤が不足するため摩擦・摩耗の低減効果が少な
く、0.40を超えて大きくなると、相対的に硬質被膜
の割合が減少するために耐摩耗性が低下する。
The recesses on the surface of the hard coating in the wear-resistant lubricating film of the present invention have a depth of at least 0.3 in a thickness ratio with respect to the total thickness of the hard coating, and are less than 0.3 in a thickness ratio. At a depth of, the solid lubricant is not supplied along with the wear of the hard coating, and the life is shortened. When the diameter of the concave portion is less than 1 μm, it is difficult to fill the solid lubricant, and the distance of the concave portion is relatively short, so that the strength of the hard coating is reduced. The outflow due to the friction of the oil becomes severe, and the life is shortened. Further, when the area ratio of the concave portion to the surface area of the hard coating is less than 0.05, the effect of reducing friction and wear is small because the solid lubricant is insufficient, and when it exceeds 0.40, the ratio of the hard coating relatively increases. , The wear resistance is reduced.

【0013】本発明の耐摩耗性潤滑膜における固体潤滑
剤は、硬質被膜上の凹部に充填されているものである
が、硬質被膜の表面全体に10μm以下の厚みの単層あ
るいは多層からなる被膜として被覆されていると、摩擦
初期に十分な潤滑性を確保できるので好ましい。
The solid lubricant in the abrasion-resistant lubricating film of the present invention is filled in the recesses on the hard film, and the entire surface of the hard film has a single-layer or multilayer film having a thickness of 10 μm or less. Is preferable because sufficient lubricity can be secured at the beginning of friction.

【0014】本発明の耐摩耗性潤滑膜の成膜法は、硬質
被膜上の凹部の形成方法として具体的には、アークイオ
ンプレート装置における蒸着中に発生するドロップレッ
トやコーティング中に散布した異質粒子の化学的除去、
レザービーム照射などを挙げることができる。また、硬
質被膜上の凹部への固体潤滑剤の充填方法として、具体
的には、各種固体潤滑剤粉末の機械的な擦り込み、ペー
ストの塗布や固体潤滑剤の真空蒸着、スパッター蒸着、
反応性スパッターリングおよびCVD被覆を挙げること
ができる。これらの方法の中で、ドロップレットを利用
した凹部形成と固体潤滑剤をターゲットとしたスパッタ
ー蒸着による潤滑膜形成は、製造が容易で、凹部の大き
さや量を制御できるので好ましい。
The method of forming a wear-resistant lubricating film according to the present invention is, as a method of forming a concave portion on a hard film, specifically, a droplet generated during vapor deposition in an arc ion plate device or a foreign material dispersed in a coating. Chemical removal of particles,
Laser beam irradiation and the like can be mentioned. In addition, as a method of filling the solid lubricant into the concave portion on the hard coating, specifically, mechanical rubbing of various solid lubricant powder, application of paste and vacuum deposition of solid lubricant, sputter deposition,
Reactive sputtering and CVD coating can be mentioned. Among these methods, the formation of a concave portion using droplets and the formation of a lubricating film by sputter deposition using a solid lubricant as a target are preferable because the production is easy and the size and amount of the concave portion can be controlled.

【0015】[0015]

【作用】本発明の耐摩耗性潤滑膜は、基材上に被覆した
硬質被膜が耐摩耗性を向上させる作用をし、硬質被膜表
面に形成した凸部が固体潤滑剤を保持する作用をし、凹
部に充填された固体潤滑剤が硬質被膜上の摩擦面に徐々
に供給されて、摩擦・摩耗を低減する作用をしているも
のである。
In the wear-resistant lubricating film of the present invention, the hard film coated on the base material functions to improve the wear resistance, and the projections formed on the hard film surface function to hold the solid lubricant. The solid lubricant filled in the concave portion is gradually supplied to the friction surface on the hard coating, and acts to reduce friction and wear.

【0016】[0016]

【実施例1】基材として、市販されている超硬合金製ソ
リッドドリル(φ8.0mm、組成:WC−10wt%
Co、硬さ:HRA=91.5)を用意し、硬質被膜の
被覆装置として、4極のターゲット着装および処理物表
面への粉体散布が可能なアークイオンプレーティング装
置を使用した。まず、基材ドリルを装置内に挿入して約
1×10-3Paの真空とした後、773Kに加熱してA
rガスを導入しながら装置内を約0.1Paとし、−6
00Vのバイアス電圧をかけて10分間保持することに
より、ドリル表面をArイオン逆スパッターにより十分
にイオン洗浄した後、脱気を行った。次いで、表1に示
した被覆条件(ターゲット種類、ガス成分と流量、バイ
アス電圧、処理時間)でもって被覆処理を順次行なうこ
とよって、A〜Eの被覆ドリル素材を得た。
Example 1 As a substrate, a commercially available solid drill made of cemented carbide (φ8.0 mm, composition: WC-10 wt%)
Co, hardness: HRA = 91.5) was prepared, and an arc ion plating apparatus capable of mounting a four-electrode target and spraying powder on the surface of a processed material was used as a hard coating apparatus. First, a base material drill is inserted into the apparatus to make a vacuum of about 1 × 10 −3 Pa, and then heated to 773 K and A
The inside of the apparatus was adjusted to about 0.1 Pa while introducing r gas, and -6
The drill surface was sufficiently ion-cleaned by Ar ion reverse sputtering by applying a bias voltage of 00 V for 10 minutes and then degassed. Next, the coating process was sequentially performed under the coating conditions (target type, gas component and flow rate, bias voltage, processing time) shown in Table 1, thereby obtaining coated drill materials A to E.

【0017】[0017]

【表1】 *注) IP:イオンプレーティング(反応蒸着) PD:パーティクルデポジション(塊状粒子蒸着)[Table 1] * Note) IP: Ion plating (reactive deposition) PD: Particle deposition (lumped particle deposition)

【0018】次に、A〜Eの被覆ドリル素材を表2に示
した前処理を施した。前処理後の被覆ドリルの刃先部を
走査型電子顕微鏡で観察し、被膜表面に形成された凹部
の平均径と全表面に対する凹部の面積割合を求めた。そ
の結果を表2に併記した。そして、前処理したこれらの
被覆ドリル素材をマグネトロンスパッター装置に装入
し、表2に併記したターゲット、ガス成分と圧力、バイ
アス電圧、処理時間の組み合わせ条件で固体潤滑剤の被
覆処理を施して、本発明品1〜8と比較品1〜5の耐摩
耗性潤滑膜被覆ドリルを得た。これらについて、刃先部
の断面組織での膜構成(成分、膜厚)、硬質被膜の膜厚
みに対する凹部の深さ比および凹部での固体潤滑剤充填
されている深さの観察・測定結果を表3に示す。
Next, the coated drilling materials A to E were subjected to the pretreatments shown in Table 2. The cutting edge of the coated drill after the pretreatment was observed with a scanning electron microscope, and the average diameter of the concave portion formed on the coating surface and the area ratio of the concave portion to the entire surface were determined. The results are shown in Table 2. Then, these pretreated coated drilling materials were charged into a magnetron sputtering apparatus, and subjected to a coating treatment of a solid lubricant under a combination of a target, a gas component and a pressure, a bias voltage, and a processing time described in Table 2, Drills coated with a wear-resistant lubricating film of inventive products 1 to 8 and comparative products 1 to 5 were obtained. For these, the results of observation and measurement of the film configuration (component, film thickness) in the cross-sectional structure of the cutting edge, the depth ratio of the concave portion to the film thickness of the hard coating, and the depth at which the solid lubricant is filled in the concave portion are shown. 3 is shown.

【0019】[0019]

【表2】 *注) 浸漬条件:10%HCl中、10min 電解処理条件:2.5V×0.05A/cm2×2.0
min
[Table 2] * Note) Immersion condition: 10% HCl in 10 minutes Electrolysis condition: 2.5V × 0.05A / cm 2 × 2.0
min

【0020】[0020]

【表3】 [Table 3]

【0021】得られた本発明品1〜8と比較品1〜5の
耐摩耗性潤滑膜被覆ドリルを用いて、被削材:S45
C、切削外周速度:80m/min、穴深さ:40m
m、乾式加工の条件で穴明け加工を連続して行った。刃
先のチッピング発生、折損あるいは切り屑詰まりによる
急激なトルク上昇が発生するまでの加工可能な穴数を表
4に示す。400穴加工まで正常であった場合には、刃
先の平均逃げ面摩耗量を併記した。
Using the obtained drills of the present invention 1 to 8 and comparative products 1 to 5 coated with a wear-resistant lubricating film, a work material: S45
C, Cutting peripheral speed: 80m / min, hole depth: 40m
m, drilling was continuously performed under dry processing conditions. Table 4 shows the number of holes that can be machined until a sharp increase in torque occurs due to occurrence of chipping, breakage or clogging of chips. When the machining was normal up to 400 holes, the average flank wear of the cutting edge was also described.

【0022】[0022]

【表4】 [Table 4]

【0023】[0023]

【実施例2】市販の金型鋼素材(SKD11、HRC=
60)を用い、切断と研磨加工により6×10×16m
mのブロックを製作し、一面をラップ仕上げした。そし
て、実施例1と同様な方法・条件を用いて表5に示した
本発明品9〜13と比較品6〜8を得た。こうして得た
耐摩耗性潤滑膜被覆ブロックのラップ仕上加工面をリン
グオンブロック式の摩擦摩耗試験機(LFW−1法)を
使用して、相手材:SAE4620の標準リング、荷
重:50kg、摩擦速度:30m/min、雰囲気:大
気中乾式の条件で摩擦試験を行った。摩擦係数が0.3
を超えて急増するまでの摩擦時間(但し、最大100時
間で停止)および摩耗幅を表5に併記した。
Example 2 Commercially available mold steel materials (SKD11, HRC =
60), cutting and polishing 6 × 10 × 16m
m was made and one side was wrapped. Then, using the same method and conditions as in Example 1, products 9 to 13 of the present invention and comparative products 6 to 8 shown in Table 5 were obtained. Using a ring-on-block type friction and wear tester (LFW-1 method), the lap-finished surface of the abrasion-resistant lubricating film-coated block thus obtained is mated with a standard ring of SAE4620, load: 50 kg, friction speed : 30 m / min, Atmosphere: A friction test was performed under dry conditions in the air. Friction coefficient is 0.3
Table 5 also shows the friction time (but stopped at a maximum of 100 hours) and the abrasion width until it rapidly increased beyond the limit.

【0024】[0024]

【表5】 [Table 5]

【0025】[0025]

【実施例3】耐摩耗工具用超硬合金素材(JISでV3
0相当)を用い、全面を140#と800#のダイヤモ
ンド砥石で粗研削と仕上げ研削加工して打抜き加工用の
パンチを作製した後、実施例1の本発明品2および比較
品1と同一の方法・条件で本発明14と比較品9の耐摩
耗性潤滑膜被覆パンチを得た。これらを用いて、厚み:
0.6mmの亜鉛鋼板を打ち抜き加工し、バリにより不
良品が発生するまでのショット数を測定した。その結
果、本発明品14が約81万ショットであるのに対し、
比較品9は約43万ショットであった。
Embodiment 3 Cemented carbide materials for wear-resistant tools (JIS V3
0), the entire surface is rough- and finish-ground with 140 # and 800 # diamond grindstones to produce punches for punching, and then the same as Example 2 of the present invention and Comparative Example 1 According to the method and the conditions, a punch coated with a wear-resistant lubricating film of the present invention 14 and the comparative product 9 were obtained. Using these, the thickness:
A 0.6 mm zinc steel plate was punched out, and the number of shots until a defective product was generated due to burrs was measured. As a result, the product 14 of the present invention has about 810,000 shots,
Comparative product 9 had about 430,000 shots.

【0026】[0026]

【発明の効果】 従来の硬質被膜上に固体潤滑膜を被覆
した積層構造の耐摩耗性潤滑膜よりも、固体潤滑剤の摩
滅による急激な潤滑性の低下がないため、耐摩耗性と潤
滑性とを長期に亘って保持でき、工具や摺動部品の寿命
延長が図れる。
EFFECTS OF THE INVENTION Compared to the conventional wear-resistant lubricating film having a laminated structure in which a solid lubricating film is coated on a hard coating, there is no sharp decrease in lubricity due to the abrasion of the solid lubricant. Can be held for a long time, and the life of tools and sliding parts can be extended.

フロントページの続き Fターム(参考) 3C037 CC01 CC02 CC04 CC08 CC09 CC10 CC11 3C046 FF01 FF02 FF03 FF04 FF05 FF11 FF16 FF19 FF25 4K029 AA02 AA04 BA54 BA55 BA58 BA60 BB02 BC02 BD05 EA01Continued on the front page F term (reference) 3C037 CC01 CC02 CC04 CC08 CC09 CC10 CC11 3C046 FF01 FF02 FF03 FF04 FF05 FF11 FF16 FF19 FF25 4K029 AA02 AA04 BA54 BA55 BA58 BA60 BB02 BC02 BD05 EA01

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 1〜20μm厚みの単層あるいは多層か
らなる硬質被膜において、該硬質被膜表面には膜厚みに
対する深さ比が0.3以上、径が1〜100μm、硬質
被膜の表面積に対する開口面の面積割合が0.05〜
0.40でなる凹部が点在し、かつ該凹部には固体潤滑
剤が充填されていることを特徴とする耐摩耗性潤滑膜。
1. A hard coating consisting of a single layer or a multilayer having a thickness of 1 to 20 μm, wherein the hard coating surface has a depth ratio to the film thickness of 0.3 or more, a diameter of 1 to 100 μm, and an opening relative to the surface area of the hard coating. The area ratio of the surface is 0.05 to
A wear-resistant lubricating film characterized by being dotted with recesses of 0.40 and filled with a solid lubricant.
【請求項2】 上記硬質被膜は、周期律表の4a、5
a、6a族元素、アルミニウム、シリコンの炭化物、窒
化物、酸化物およびこれらの相互固溶体の中から選ばれ
た1種以上であることを特徴とする請求項1記載の耐摩
耗性潤滑膜。
2. The hard coating is composed of 4a, 5a of the periodic table.
2. The wear-resistant lubricating film according to claim 1, wherein the lubricating film is at least one selected from the group consisting of elements a and 6a, aluminum, silicon carbide, nitride, oxide and mutual solid solutions thereof.
【請求項3】 上記硬質被膜は、少なくとも最外層がP
VD法により成膜されたチタンの炭化物、窒化物、炭窒
化物およびチタンとアルミニウムとの複合窒化物、複合
炭窒化物の中の少なくとも1種からなることを特徴とす
る請求項1記載の耐摩耗性潤滑膜。
3. The hard coating, wherein at least the outermost layer has P
2. The anti-reflection film according to claim 1, comprising at least one of titanium carbide, nitride, carbonitride, composite nitride of titanium and aluminum, and composite carbonitride formed by a VD method. Abrasive lubricating film.
【請求項4】 上記固体潤滑剤は、二硫化モリブデン、
二硫化タングステン、黒鉛、フッ化黒鉛、一酸化鉛、窒
化ホウ素、フッ化カルシウム、フッ化バリウム、フッ素
樹脂、ダイヤモンドライクカーボンの中の1種以上であ
ることを特徴とする請求項1、2又は3記載の耐摩耗性
潤滑膜。
4. The solid lubricant comprises molybdenum disulfide,
3. It is one or more of tungsten disulfide, graphite, graphite fluoride, lead monoxide, boron nitride, calcium fluoride, barium fluoride, fluororesin, and diamond-like carbon. 3. A wear-resistant lubricating film according to 3.
【請求項5】 上記凹部を含めた上記硬質被膜表面は、
10μm以下の厚みの単層あるいは多層からなる上記固
体潤滑剤の被膜が被覆されていることを特徴とする請求
項1、2、3又は4記載の耐摩耗性潤滑膜。
5. The hard coating surface including the concave portion,
5. The wear-resistant lubricating film according to claim 1, wherein the solid lubricant film having a thickness of 10 μm or less is coated with the solid lubricant film.
【請求項6】 超硬合金、サーメット、セラミックス、
立方晶窒化ホウ素焼結体、硬質鋼の中の少なくとも1種
からなる基材に成膜したことを特徴とする請求項1、
2、3、4又は5記載の耐摩耗性潤滑膜被覆部材。
6. A cemented carbide, cermet, ceramic,
A cubic boron nitride sintered body, a film formed on a substrate made of at least one of hard steel,
A wear-resistant lubricating film-coated member according to 2, 3, 4 or 5.
JP2000226254A 2000-07-27 2000-07-27 Abrasion resistant lubricating-film and coated member Withdrawn JP2002038255A (en)

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Country Link
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003321763A (en) * 2002-04-26 2003-11-14 Toshiba Tungaloy Co Ltd Coated member
JP2004345059A (en) * 2003-05-23 2004-12-09 Sumitomo Electric Ind Ltd Surface coated cutting tool
WO2007049785A1 (en) 2005-10-28 2007-05-03 Kyocera Corporation Surface-coated member, method for manufacture thereof, and cutting tool
KR100818165B1 (en) * 2006-02-09 2008-04-02 (주)이온본드 엘트론 Method for Producing Multilayered-film having Lubricant and Anti-abrasive Property
JP2012152852A (en) * 2011-01-26 2012-08-16 Sumitomo Electric Hardmetal Corp Surface coated cutting tool and method for manufacturing the same
US8298999B2 (en) 2006-12-25 2012-10-30 Hitachi Metals, Ltd. Hard coating film excellent in lubrication characteristics, process for formation thereof, and tool for the plastic working of metal
US9121548B2 (en) 2011-04-15 2015-09-01 Kobe Steel, Ltd. Sliding member
CN105063713A (en) * 2015-07-29 2015-11-18 兰州空间技术物理研究所 Aluminum alloy surface composite membrane for spacecraft and preparation method
JPWO2015152162A1 (en) * 2014-03-31 2017-04-13 三菱瓦斯化学株式会社 Entry sheet for drilling holes
CN114214101A (en) * 2021-12-28 2022-03-22 山东大学 Method for regulating friction force of molybdenum disulfide by constructing interface liquid drops

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003321763A (en) * 2002-04-26 2003-11-14 Toshiba Tungaloy Co Ltd Coated member
JP2004345059A (en) * 2003-05-23 2004-12-09 Sumitomo Electric Ind Ltd Surface coated cutting tool
WO2007049785A1 (en) 2005-10-28 2007-05-03 Kyocera Corporation Surface-coated member, method for manufacture thereof, and cutting tool
KR100818165B1 (en) * 2006-02-09 2008-04-02 (주)이온본드 엘트론 Method for Producing Multilayered-film having Lubricant and Anti-abrasive Property
US8298999B2 (en) 2006-12-25 2012-10-30 Hitachi Metals, Ltd. Hard coating film excellent in lubrication characteristics, process for formation thereof, and tool for the plastic working of metal
JP2012152852A (en) * 2011-01-26 2012-08-16 Sumitomo Electric Hardmetal Corp Surface coated cutting tool and method for manufacturing the same
US9121548B2 (en) 2011-04-15 2015-09-01 Kobe Steel, Ltd. Sliding member
JPWO2015152162A1 (en) * 2014-03-31 2017-04-13 三菱瓦斯化学株式会社 Entry sheet for drilling holes
US10674609B2 (en) 2014-03-31 2020-06-02 Mitsubishi Gas Chemical Company, Inc. Entry sheet for drilling
CN105063713A (en) * 2015-07-29 2015-11-18 兰州空间技术物理研究所 Aluminum alloy surface composite membrane for spacecraft and preparation method
CN114214101A (en) * 2021-12-28 2022-03-22 山东大学 Method for regulating friction force of molybdenum disulfide by constructing interface liquid drops

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