KR101470320B1 - Functional coating structure for wear and friction reduction and method thereof - Google Patents

Abstract

The present invention relates to a functional coating structure and method for friction and wear reduction between two structures that are in relative motion in contact with each other. To this end, the present invention provides a functional coating structure for reducing friction and abrasion between two structures contacting each other and performing relative motion, the functional coating structure comprising: a soft coating layer formed of a soft material having elasticity and coated on the surface of the structure; The hard coating layer is composed of a hard material having a hardness higher than that of the soft coating layer and is coated on the soft coating layer. The soft coating layer is interlocked with the soft coating layer due to the contact between the two structures, The hard coating layer is formed in a functional separation space having a predetermined cross-sectional shape and separating into a plurality of individual parts arranged in an array form so that the elastic coating can be smoothly deformed.

Description

Technical Field [0001] The present invention relates to a functional coating structure for reducing friction and wear,

The present invention relates to a functional coating structure and method for friction and wear reduction between two structures that are in relative motion in contact with each other.

In general, a method of forming a thin coating on the surface of a structure is widely used in order to improve the frictional wear characteristics between two structures performing relative motion in contact with each other. When a hard material is used as the material of the thin film coating, it is easy to think that wear phenomenon will be reduced due to increase in strength of the coating layer. However, since such a hard material has a high shear stress, Can be generated to accelerate surface wear. On the other hand, when a soft material is used as a thin film coating material, frictional force may be lower than that of a hard material because of low shear stress. However, since the strength of the coating layer is low, The coating layer may be broken and the abrasion phenomenon may be increased. In this way, when a thin film is coated on the surface of a structure, hard and soft materials generally have advantages and disadvantages in terms of friction and wear.

In this way, different strengths and weaknesses are exhibited in terms of reduction in friction and wear depending on the characteristics of the material coated on the surface of the structure. Therefore, in the past, researches for improving the friction and abrasion characteristics have been made Has come. In this paper, we propose a novel method for the fabrication of carbon nanotube-silver composite coatings. 2011) 599-602. In this paper, we have investigated the combination of CNT (Carbon Nano Tube), a hard material with high strength on a silicon wafer, and silver coating, Experimental results show that when two kinds of different materials are combined with each other, low friction coefficient and low wear rate are obtained.

FIG. 1 shows a comparison between the silver (Ag) single coating and the CNT-Ag dual coating effect shown in the above paper. As shown in FIG. 1 (a), when silver (Ag), which is a soft material, is coated on the surface of a silicon wafer, a coating surface of a soft material easily tears off due to friction during contact with the upper structure On the other hand, in the case of the CNT-Ag double coating structure in which the hard material and the soft material are combined as shown in FIG. 1 (b), the frictional wear is reduced by the anchoring effect caused by the hard material CNT .

In addition, another paper (Friction and wear characteristics of C / Si bi-layer coatings deposited on silicon substrate by DC magnetron sputtering, Oleksiy V. Penkov, Yegor A. Bugayev, Igor Zhuravel, Valeriy V. Kondratenko, Auezhan Amanov, Dae- Eun Kim, Tribol Lett (2012) 48: 123-131) discloses a dual coating structure in which amorphous carbon, which is a soft material, is coated on a silicon wafer and amorphous silicon is coated on the amorphous silicon, It has been experimentally confirmed that the friction and wear reduction characteristics have a lower friction coefficient and a lower wear rate than the case where only amorphous carbon or amorphous silicon is coated alone.

FIG. 2 is a conceptual diagram schematically illustrating the above description. When friction is generated by applying a vertical load to the surface of a substrate through a superstructure and then a vertical load is removed, (a) the amorphous carbon, which is a soft material, (B) coating amorphous silicon, which is a hard material, and (c) coating the two different materials together. As shown in the comparison result of Fig. 2, the double coating structure (c) in which amorphous carbon, which is a soft material and amorphous silicon, which is a hard material, are sequentially laminated on a substrate is coated with only amorphous carbon, which is a soft material, It can be seen that it exhibits lower friction coefficient and lower wear rate than structure (b) which is solely coated with silicon alone.

However, as described above, the double coating structure in which the soft material and the hard material are coated together on the surface of the structure exhibits superior tribological wear characteristics to the structure in which the single coating is made of a soft or hard single material. However, The upper coating layer 14 made of a hard material deforms the lower coating layer 12 made of a soft material when the coating surface is deformed by the vertical load applied from the superstructure 20 that is in relative motion with respect to the coating surface Cracks are generated in a portion of the upper coating layer 14 which is in contact with the upper structure 20 and the coating layer is damaged. In particular, in the process of deforming the upper coating layer 14, The coating layer breakage phenomenon is more likely to occur due to the concentration of stress in the direction of the abrasive grains, There was a problem that the abrasion wear was seriously affected.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a double coating structure in which a lower coating layer made of an elastic soft material and an upper coating layer made of a hard material are sequentially stacked An upper coating layer made of a hard material is horizontally divided into a plurality of individual parts so as to be arranged in an array form so that the upper coating layer follows the elastic deformation of the lower coating layer during elastic deformation of the lower coating layer The present invention provides a functional coating structure and coating method capable of maximizing the effect of reducing friction and wear by absorbing and restoring energy of an undercoat layer which is deformed in an elastic range and which can be smoothly deformed without breakage.

According to an aspect of the present invention, there is provided a functional coating structure for friction and wear reduction between two structures contacting and relatively moving in contact with each other. The functional coating structure includes a flexible coating layer formed of a flexible material having elasticity, and; The hard coating layer is composed of a hard material having a hardness higher than that of the soft coating layer and is coated on the soft coating layer. The soft coating layer is interlocked with the soft coating layer due to the contact between the two structures, The hard coating layer is formed in a functional separation space having a predetermined cross-sectional shape and separating into a plurality of individual parts arranged in an array form so that the elastic coating can be smoothly deformed.

Here, a bonding layer for bonding between the soft coating layer and the hard coating layer may be additionally formed.

At this time, the bonding layer may be made of silver (Ag) or aluminum (Al).

The plurality of individual parts separated by the functional separation space may be formed so that the longitudinal section shape has a trapezoidal sectional shape.

At this time, the cross-sectional shape of the individual parts may be formed to have a honeycomb shape.

In addition, the cross-sectional shape of the individual parts may be formed to have a circular shape or a square shape.

The soft coating layer may be formed of a soft material selected from CNT (Carbon Nano Tube), CNT, a mixture of PEO (poly ethylene oxide), and amorphous carbon.

Also, the hard coating layer may be made of one hard material selected from amorphous silicon and diamond-like carbon (DLC).

The soft coating layer may be formed by a spin coating process or a sputtering process.

In addition, the hard coating layer may be formed through a sputtering or ion-beam deposition process.

In addition, the bonding layer may be formed through a sputtering or electroless plating process.

In addition, the individual parts constituting the hard coating layer may be formed through an etching process of a hard coating layer by lithography, or may be formed through a process such as FIB (Focused Ion Beam) or laser or mechanical cutting have.

According to another aspect of the present invention, there is provided a functional coating method for friction and wear reduction between two structures relatively moving with respect to each other, the functional coating method comprising the steps of: (a) Forming a soft coating layer composed of a soft magnetic layer; (b) forming a hard coat layer on the soft coat layer, the hard coat layer being composed of a hard material having a hardness higher than that of the soft coat layer; (c) forming a functional separation space having a predetermined pattern shape on the hard coat layer so that the hard coat layer can be separated into a plurality of individual parts having a predetermined cross-sectional shape do.

Between the steps (a) and (b), a binding layer may be formed between the soft coating layer and the hard coating layer.

In the step (a), the soft coating layer may be formed by a spin coating process or a sputtering process.

In the step (b), the hard coating layer may be formed by sputtering or ion-beam deposition.

In addition, the bonding layer may be formed through a sputtering or electroless plating process.

In the step (c), the unit parts constituting the hard coating layer may be formed through etching of the hard coating layer by a lithography process.

In addition, in the step (c), the unit parts constituting the hard coating layer may be formed by FIB (Focused Ion Beam), a laser or a mechanical cutting process.

Meanwhile, one soft material selected from carbon nanotube (CNT), a mixture of CNT and poly ethylene oxide (PEO), and amorphous carbon may be used as the soft coating layer in step (a).

The hard coating layer in step (b) may be a hard material selected from amorphous silicon and diamond-like carbon (DLC).

The bonding layer may be made of silver (Ag) or aluminum (Al).

According to the present invention having the above-described configuration, in the dual thin film coating structure in which the soft coating layer composed of a soft material and the hard coating layer composed of a hard material are sequentially laminated, a hard coating layer made of a hard material is horizontally divided into a plurality of independent parts the hard coating layer follows the elastic deformation of the soft coating layer during the elastic deformation of the soft coating layer and can be smoothly deformed without breakage, It is possible to maximize the effect of reducing the friction and wear by the energy absorbing and restoring process of the soft coating layer which is deformed in the step of FIG.

In addition, by forming the side portions of the respective parts constituting the hard coating layer so as to be inclined obliquely inwardly, the pressure acting on the upper part of each part can be easily dispersed to the lower part when the upper part contacts with the upper structure, It is possible to design a hard coating layer with a narrower pattern structure by narrowing the interval between the parts while minimizing the interference between the parts in the process of deforming the hard coating layer.

In addition, even if abrasive particles are generated due to contact between the upper and lower structures, the abrasion particles generated during abrasion can be trapped by the functional separation space formed between the respective parts of the hard coating layer. Therefore, And the fear of increasing the wear rate can be solved.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a conceptual diagram showing a comparison between the effects of a single coating structure using a conventional soft material and a dual coating structure using a soft material and a hard material;
FIG. 2 is a conceptual diagram showing a comparison between the case where the substrate is coated with the soft material or the hard material alone and the case where the soft and hard materials are coated together when the substrate surface is removed after the friction is generated.
FIG. 3 is a conceptual view showing cracking of a hard coating layer due to elastic deformation of a soft coating layer in a composite coating structure in which conventional soft and hard materials are coated together. FIG.
4 is a cross-sectional view illustrating a functional coating structure for reducing frictional wear according to an embodiment of the present invention.
Fig. 5 is a plan view of Fig. 4; Fig.
6 is a conceptual view showing a state in which the stress in the horizontal direction is reduced due to the functional separation space formed in the hard coating layer during the deformation of the hard coating layer during the elastic deformation of the soft coating layer, thereby reducing the friction wear.
7 is a process chart sequentially showing a process for forming a functional coating structure according to the present invention.
Figures 8 and 9 illustrate another applicable shape of a functional coating structure according to the present invention;

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The present invention relates to a technique for improving wear resistance characteristics between two structures performing relative motion in a state of being in contact with each other, and it is possible to avoid the rigidity control technique of the surface of the structure based on the physical properties (for example, hardness) Stiffness control method based on the structural shape of the structure surface is presented.

Generally, when the pressure (load) generated when two structures contact with each other exceeds the hardness of the material itself, the damage occurs on the surface of the structure to be contacted. Such damage can not be solved only by using high hardness material. Since the surface of all structures has a uniform roughness and locally fine protrusions are formed, it is inevitable that pressure is concentrated on the corresponding portions when the structures are in contact with each other. However, if the contact pressure between the two structures can be kept below a certain level, the contact surface will behave in the region of the elastic deformation, and ultimately can be made in a state where there is little wear.

In order to satisfy such a precondition, the present invention provides a dual thin film coating structure comprising a structure in which a soft material coating layer and a hard material coating layer are sequentially laminated on the surface of a structure, The hard coat layer is formed so as to have a structural shape in which the hard coat layer is arranged in an array form by dividing the hard coat layer into a plurality of individual parts in the horizontal direction, whereby the hard coat layer under the elastic deformation of the soft coat layer behaves together with the elastic deformation of the soft coat layer And a functional coating structure and coating method capable of improving the effect of reducing friction and wear by energy absorbing and restoring process of a soft coating layer deformed within an elastic range.

FIG. 4 is a cross-sectional view illustrating a functional coating structure on the surface of a structure for reducing friction and wear according to one embodiment of the present invention, and FIG. 5 is a plan view showing the top view of FIG. 6 is a conceptual view showing a state in which the hard coating layer is deformed by interlocking with the elastic deformation of the soft coating layer upon contact between the two structures.

4 to 6, a functional coating structure for reducing friction and wear according to an exemplary embodiment of the present invention includes a contact surface of two MEMS structures that are relatively moving in contact with each other in a MEMS (micro electro mechanical systems) Which is used as a functional coating structure for reducing the friction wear generated in the coating layer.

Specifically, the functional coating structure according to the present invention includes a soft coating layer 120 formed of a soft material having elasticity and coated on a surface of a lower structure 110 having a plate shape, and a soft coating layer 120 having a hardness higher than that of the soft coating layer 120 And a hard coating layer 140 formed of a hard material and coated on the soft coating layer 120.

The soft coating layer 120 is a lower coating layer composed of a soft material having a certain elastic force and is made of an elastic material such as carbon nanotubes (CNT), a mixture of CNT and poly ethylene oxide (PEO), amorphous carbon, Which is made of a soft material.

When a load according to the contact is applied from the upper structure 200, the soft coating layer 120 is elastically deformed within the elastic range inherent to the material constituting the soft coating layer 120, and the load is removed Elastic restoration is performed in an initial state. The soft coating layer 120 may be coated on the surface of the lower structure 110 through a process such as spin coating or sputtering.

The hard coating layer 140 formed on the soft coating layer 120 is a coating layer that is in direct contact with the upper structure 200 and is formed of a hard material having a hardness relatively higher than that of the soft coating layer 120. Amorphous silicon, diamond-like carbon (DLC), or the like may be used as the hard material that can be used as the hard coating layer 140.

When a load is applied from the upper structure 200, the hard coating layer 140 behaves and elastically deforms with the soft coating layer 120 that is elastically deformed in the elastic region. The reason why the hard coating layer 140 made of a hard material can be elastically deformed is that when a hard ceramic material having high brittleness such as silicon is produced in a thin film form, same. Since the upper and lower structures 200 and 110, which are MEMS structures, are very small in weight, the magnitude of the vertical load generated due to the contact between the upper and lower structures 200 and 110 is also very small. Therefore, the soft coating layer 120 can be elastically deformed within the elastic range inherent to the material, and the hard coating layer 140 can be deformed together with the elastic deformation of the soft coating layer 120. The hard coating layer 140 may be coated on the surface of the soft coating layer 120 through a process such as sputtering or ion-beam deposition.

The hard coating layer 140 is formed with a functional separation space G in which the hard coating layer 140 is divided into a plurality of individual parts 141 having a predetermined cross-sectional shape in the horizontal direction. At this time, the plurality of individual parts 141 arranged in the hard coating layer 140 are formed to have a honeycomb-shaped cross-sectional shape. The plurality of individual parts 141 are formed on the soft coating layer 120, Are arrayed in an array with a gap therebetween.

The functional separation space G for partitioning the plurality of parts 141 is a gap space formed between the parts 141 so that the soft coating layer 120 made of a soft material is deformed within the elastic range The hard coating layer 140 made of a hard material is provided with a clearance space for preventing interference between the parts 141 in the process of being deformed together with the elastic deformation of the soft coating layer 120. At this time, the side portions 142 of the respective parts 141 are inclined obliquely to the inside of the part 141, and the longitudinal sectional shapes of the parts 141 are trapezoidal .

Since the side portions 142 of the parts 141 constituting the hard coating layer 140 are inclined at an angle to each other, It is possible to easily disperse the pressure to the lower part and minimize the interference between the parts 141 in the process of elastically deforming the hard coating layer 140 interlocked with the elastic deformation of the soft coating layer 120, It is possible to design a hard coating layer having a pattern structure with a finer pattern. Even if abrasive particles are generated due to the contact of the upper and lower structures 200 and 110, the abrasion particles generated during abrasion are formed in the functional separation space G formed between the respective parts 141 of the hard coating layer 140 It is possible to suppress the increase of the frictional force and the wear rate of the surface of the structure due to the generation of the abrasive particles.

As described above, in the dual thin film coating structure in which the soft coating layer 120 and the hard coating layer 140 are sequentially laminated, the uppermost hard coating layer 140 is separated in the horizontal direction by the functional separation space G, the plurality of parts 141 are formed at the time of deformation of the hard coating layer 140 due to the elastic deformation of the soft coating layer 120 by forming the functional surface structure including a plurality of parts 141 arranged to have a matrix pattern shape, Since the effective stiffness in the horizontal direction can be lowered through the functional separation space G formed between the soft coating layer 140 and the soft coating layer 140, the hard coating layer 140 is not damaged and the deformation of the soft coating layer 120 can be naturally followed Whereby the effect of reducing the friction and wear can be improved.

When the composite coating layer is formed by laminating the hard coating layer 140 on the soft coating layer 120 coated on the surface of the lower structure 110, the soft coating layer 120 and the hard coating layer 140 A binding layer 130 having a function of bonding the upper and lower coating layers may be additionally formed to increase the bonding strength. At this time, a metal material such as silver (Ag) or aluminum (Al) may be used as the material for the bonding layer 130.

Meanwhile, FIG. 7 is a process diagram for sequentially illustrating a method of forming a functional coating surface structure for reducing friction and wear according to the present invention.

As shown in FIG. 7, the method for fabricating a functional coating structure for reducing friction and abrasion according to the present invention includes:

First, a soft coating layer 120 is formed using an elastic soft material on a substructure 110 on which a functional thin film coating surface is to be formed. (A)

At this time, elastic materials such as carbon nanotubes (CNTs), mixtures of CNTs and poly ethylene oxide (PEO), and amorphous carbon may be used as the material of the soft coating layer 120. The soft coating layer 120 may be formed on the surface of the lower structure 110 by a process such as spin coating or sputtering.

After the formation of the soft coating layer 120 on the surface of the lower structure 110, the soft coating layer 120 is formed on the soft coating layer 120 in order to improve the bonding strength between the soft coating layer 120 and the hard coating layer 140, A binding layer 130 is formed. (b)

At this time, the bonding layer 130 may be formed on the soft coating layer 120 by a method such as sputtering or electroless plating with silver (Ag) or aluminum (Al).

After the formation of the bonding layer 130, a hard coating layer 140 made of a hard material is formed on the bonding layer 130. (c)

The hard coating layer 140 may be formed of a hard material such as amorphous silicon or diamond-like carbon (DLC) on the bonding layer 130 using a process such as sputtering or ion-beam deposition .

After the formation of the hard coating layer 140 as described above, the hard coating layer 140 is formed with a predetermined type of functional separation space G as a final step to form a plurality of functional separation spaces G having a predetermined pattern (honeycomb pattern in this embodiment) To complete the functionalized coating surface consisting of discrete parts 141 of (d)

The pattern of the part 141 formed on the hard coating layer 140 may be formed using a lithography process, a FIB (Focused Ion Beam) process, a laser or a mechanical cutting process. have.

As described above, the functional coating surface having excellent abrasion and abrasion-reducing performance on the surface of the structure can be manufactured using the simple MEMS manufacturing process as described above.

Meanwhile, in the formation of the functional surface for reducing the frictional wear, the pattern shapes of the parts 141 formed on the hard coating layer 140 may be designed in various shapes other than the honeycomb shape as in the above- can do.

Figs. 8 and 9 show another form applicable to the upper hard coating layer 140 when designing the functional coating surface on the structure surface. That is, in order to lower the effective stiffness in the horizontal direction of the hard coating layer 140 acting in conjunction with the elastic coating of the soft coating layer 120 due to the contact between the two structures, the pattern of each part 141 of the hard coating layer 140 It is possible to design various functional surfaces required in various operating environments by forming the shape in various pattern shapes such as circular and rectangular shapes shown in Figs. 8 and 9, in addition to the above-described honeycomb shape.

As described above, according to the present invention, the uppermost hard coating layer in contact with the upper structure in the double coating layer structure in which the soft material and the hard material are sequentially laminated is divided into a plurality of parts 141 The effective stiffness in the horizontal direction of the hard coating layer 140 can be lowered through the functional separation space G when the hard coating layer 140 is elastically deformed, The hard coating layer 140 is deformed along the deformation of the soft coating layer 120 without breakage in the process of elastically deforming the soft coating layer 120 when the load due to the contact of the soft coating layer 140 is applied, It is possible to maximize the effect of friction wear due to energy absorption and restoration within the elastic range of the elastic member 120.

The side portions 142 of the parts 141 constituting the hard coating layer 140 are inclined obliquely inwardly so that the upper portions of the upper and lower parts 141, It is possible to easily disperse the working pressure to the lower portion and to narrow the gap between the parts 141 while minimizing the interference between the parts 141 in the process of deforming the hard coating layer 140, There is an advantage that the coating layer 140 can be designed.

Even if abrasive particles are generated due to the contact of the upper and lower structures 200 and 110, the abrasion particles generated during abrasion are formed in the functional separation space G formed between the respective parts 141 of the hard coating layer 140 It is possible to eliminate the fear of increasing the frictional force and the wear rate of the surface of the structure due to the generation of the abrasive particles and to improve the durability of the contact surface.

In addition, when the functional coating structure of the present invention, which can improve the above-described frictional wear characteristics, is applied to a MEMS field such as a biosystem, an inkjet head, a pressure / acceleration sensor, and a gyroscope, The problem of shortening the lifetime due to the relative motion in the MEMS field has been dramatically solved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be construed as limited to the embodiments set forth herein. Will be possible.

110: substructure 120: soft coating layer
130: bonding layer 140: hard coating layer
141: part 142: side part
200: superstructure G: functional separation space

Claims (25)

1. A functional coating structure for friction and wear reduction between two structures contacting each other and performing relative movement,
A soft coating layer composed of one flexible material selected from CNT (Carbon Nano Tube) having elasticity, a mixture of CNT and PEO (Poly Ethylene Oxide), and amorphous carbon and coated on the surface of the structure;
And a hard coating layer composed of one hard material selected from amorphous silicon and diamond-like carbon (DLC) having a higher hardness than the soft coating layer and coated on the soft coating layer,
The hard coating layer is provided with a plurality of hard coating layers having a predetermined cross-sectional shape and arranged in an array so that the soft coating layer can smoothly be deformed by interlocking with the elastic coating of the soft coating layer upon contact between the two structures. A functional separation space is formed which separates the individual parts,
And a bonding layer composed of silver (Ag) or aluminum (Al) is formed between the soft coating layer and the hard coating layer.
delete delete The functional coating structure for reducing friction and wear according to claim 1, wherein the plurality of individual parts separated by the functional separation space have a trapezoidal cross-sectional shape.
5. The functional coating structure for reducing friction and wear according to claim 4, wherein the cross-sectional shape of the individual parts has a honeycomb shape.
The functional coating structure according to claim 4, wherein the cross-sectional shape of the individual parts has a circular shape.
The functional coating structure according to claim 4, wherein the cross-sectional shape of the individual parts has a square shape.
delete delete The functional coating structure for reducing friction and wear according to claim 1, wherein the soft coating layer is formed through a spin coating process or a sputtering process.
The functional coating structure for reducing friction and wear according to claim 1, wherein the hard coating layer is formed by sputtering or ion-beam deposition.
The functional coating structure according to claim 1, wherein the bonding layer is formed through a sputtering or electroless plating process.
The functional coating structure for reducing friction and wear according to claim 1, wherein the individual parts constituting the hard coating layer are formed through an etching process of the hard coating layer by lithography.
The functional coating structure for reducing friction and wear according to claim 1, wherein the individual parts constituting the hard coating layer are formed through processes such as FIB (Focused Ion Beam), laser or mechanical cutting.
delete 1. A functional coating method for friction and abrasion between two structures contacting each other and performing relative movement,
(a) forming a soft coating layer composed of a soft material having elasticity on a surface of a structure to form a functional surface;
(b) forming a hard coat layer on the soft coat layer, the hard coat layer being composed of a hard material having a hardness higher than that of the soft coat layer;
(c) forming a functional separation space having a predetermined pattern shape in the hard coating layer so that the hard coating layer can be separated into a plurality of individual parts having a predetermined cross-sectional shape,
Further comprising the step of forming a bonding layer between the soft coating layer and the hard coating layer between the steps (a) and (b)
In the step (a), one soft material selected from carbon nanotube (CNT), a mixture of CNT and poly ethylene oxide (PEO), and amorphous carbon is used.
In the step (b), one hard material selected from amorphous silicon and diamond-like carbon (DLC) is used as the hard coating layer,
Wherein the bonding layer is made of silver (Ag) or aluminum (Al).
delete [17] The method of claim 16, wherein the soft coating layer is formed by spin coating or sputtering in the step (a).
17. The method of claim 16, wherein the hard coating layer is formed by sputtering or ion-beam deposition in the step (b).
17. The method of claim 16, wherein the bonding layer is formed through a sputtering or electroless plating process.
[17] The method of claim 16, wherein the individual parts constituting the hard coating layer in step (c) are formed through an etching process of a hard coating layer by lithography. Way.
[17] The method of claim 16, wherein the individual parts constituting the hard coating layer in step (c) are formed through FIB (Focused Ion Beam), laser or mechanical cutting process.

delete delete delete

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